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git-svn-id: http://10.4.3.168:50001/svn/Furnace@83 dbcde07d-dcf5-c148-8a84-ac3097b7778e

Xiongbing il y a 1 mois
Parent
2118634991
commit
0180b1e26d
9 fichiers modifiés avec 427 ajouts et 10 suppressions
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  1. 373 0
      Furnace/FurnaceRT/Config/FurnaceGemModel.xml
  2. 1 1
      Furnace/FurnaceRT/Config/VIDs/_ALID.xml
  3. 1 1
      Furnace/FurnaceRT/Config/VIDs/_ECID.xml
  4. 1 1
      Furnace/FurnaceRT/Config/VIDs/_SVID.xml
  5. 31 6
      Furnace/FurnaceRT/Equipments/Jobs/AutoTransfer.cs
  6. 17 0
      Furnace/FurnaceRT/Equipments/PMs/PMN2Purge.cs
  7. 1 0
      Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/Process.cs
  8. 1 1
      Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/RecipeHead.cs
  9. 1 0
      Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/RecipeParser.cs

+ 373 - 0
Furnace/FurnaceRT/Config/FurnaceGemModel.xml
Voir le fichier 

@@ -784,6 +784,7 @@
 
     <SVID id="332190044" valueType="Boolean" logicalName="PM1.RecipeWait" value="" eventTrigger="" units="" description="" isArray="false" />

     <SVID id="332190045" valueType="Ascii" logicalName="PM1.SubRecipeCurrentLoopCount" value="" eventTrigger="" units="" description="" isArray="false" />

     <SVID id="332190046" valueType="Ascii" logicalName="PM1.SubRecipeLoopCount" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="332190047" valueType="Boolean" logicalName="PM1.RunningMode" value="" eventTrigger="" units="" description="" isArray="false" />

     <SVID id="332200001" valueType="Boolean" logicalName="PM1.CMNT.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />

     <SVID id="332200002" valueType="Boolean" logicalName="PM1.CMNT.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />

     <SVID id="332210001" valueType="F8" logicalName="PM1.ConcentrationO2.Value" value="" eventTrigger="" units="" description="" isArray="false" />

@@ -2167,6 +2168,17 @@
 
     <SVID id="338580001" valueType="F8" logicalName="PM1.VG22.Value" value="" eventTrigger="" units="" description="" isArray="false" />

     <SVID id="338590001" valueType="F8" logicalName="PM1.VG32Pressure.Value" value="" eventTrigger="" units="" description="" isArray="false" />

     <SVID id="338600001" valueType="F8" logicalName="PM1.VG33Pressure.Value" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="338610001" valueType="Boolean" logicalName="PM1.AlarmSignaAPCCommAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="338620001" valueType="Boolean" logicalName="PM1.SensorLADoorSw1.Value" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="338630001" valueType="Boolean" logicalName="PM1.SensorLADoorSw2.Value" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="338640001" valueType="Boolean" logicalName="PM1.SensorLADoorSw3.Value" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="338650001" valueType="Boolean" logicalName="PM1.SensorO2DetectSideFIMS1.Value" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="338660001" valueType="Boolean" logicalName="PM1.SensorO2DetectSideFIMS2.Value" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="338670001" valueType="Boolean" logicalName="PM1.SensorO2DetectSideLA.Value" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />

+    <SVID id="630010004" valueType="Boolean" logicalName="Stocker1.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />

   </StatusVariables>

   <EquipmentConstants>

     <ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />

@@ -2207,6 +2219,8 @@
 
     <ECID id="10010030" valueType="Ascii" logicalName="System.TotalCycledWafer" value="" min="" max="" eventTrigger="" units="" description="Total Cycled Wafer" isArray="false" />

     <ECID id="10010031" valueType="Ascii" logicalName="System.UnloadNeedPressCassetteInButton" value="" min="" max="" eventTrigger="" units="" description="Unload Need Press Cassette In Button" isArray="false" />

     <ECID id="10010032" valueType="Ascii" logicalName="System.UnloadNeedPressCassetteOutButton" value="" min="" max="" eventTrigger="" units="" description="Unload Need Press Cassette Out Button" isArray="false" />

+    <ECID id="10010033" valueType="Ascii" logicalName="System.BackUpFileMaxNumber" value="" min="" max="" eventTrigger="" units="" description="BackUpFileMaxNumber" isArray="false" />

+    <ECID id="10010034" valueType="Ascii" logicalName="System.RunningMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

     <ECID id="10020001" valueType="Ascii" logicalName="System.EditParameter.EditChamberType" value="" min="" max="" eventTrigger="" units="" description="Edit Chamber Type" isArray="false" />

     <ECID id="10020002" valueType="Ascii" logicalName="System.EditParameter.EditParameterType" value="" min="" max="" eventTrigger="" units="" description="Alarm Condition,Temp Correction,Temp PID,Temp Profile,Temp Auto PID,Leak Check Condition,APC PID" isArray="false" />

     <ECID id="10030001" valueType="Ascii" logicalName="System.FDC.DataGroupName" value="" min="" max="" eventTrigger="" units="" description="FDC data group" isArray="false" />

@@ -2260,6 +2274,8 @@
 
     <ECID id="10090018" valueType="Ascii" logicalName="System.Recipe.SupportedProcessType" value="" min="" max="" eventTrigger="" units="" description="Supported Process Recipe Type" isArray="false" />

     <ECID id="10090019" valueType="Ascii" logicalName="System.Recipe.SupportedResetType" value="" min="" max="" eventTrigger="" units="" description="Supported Reset Recipe Type" isArray="false" />

     <ECID id="10090020" valueType="Ascii" logicalName="System.Recipe.SupportedSubType" value="" min="" max="" eventTrigger="" units="" description="Supported Sub Recipe Type" isArray="false" />

+    <ECID id="10090021" valueType="Ascii" logicalName="System.Recipe.DefaultFileName" value="" min="" max="" eventTrigger="" units="" description="Default File Name" isArray="false" />

+    <ECID id="10090022" valueType="Ascii" logicalName="System.Recipe.SingleRecipeFileType" value="" min="" max="" eventTrigger="" units="" description="Single Recipe File Type" isArray="false" />

     <ECID id="10100001" valueType="Ascii" logicalName="System.Scheduler.GroupWaferBySequence" value="" min="" max="" eventTrigger="" units="" description="Group Wafer By Sequence" isArray="false" />

     <ECID id="10100002" valueType="Ascii" logicalName="System.Scheduler.IsRunInParallelMode" value="" min="" max="" eventTrigger="" units="" description="IsRunInParallelMode" isArray="false" />

     <ECID id="10100003" valueType="Ascii" logicalName="System.Scheduler.WaferCountBelowWhichStartNewProcessJob" value="" min="" max="" eventTrigger="" units="" description="Wafer Count Below Which Start New Process Job" isArray="false" />

@@ -2291,6 +2307,7 @@
 
     <ECID id="10110025" valueType="Ascii" logicalName="System.SetUp.IsStocker8Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker8 Installed" isArray="false" />

     <ECID id="10110026" valueType="Ascii" logicalName="System.SetUp.IsStocker9Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker9 Installed" isArray="false" />

     <ECID id="10110027" valueType="Ascii" logicalName="System.SetUp.ToolType" value="" min="" max="" eventTrigger="" units="" description="Tool Type" isArray="false" />

+    <ECID id="10110028" valueType="Ascii" logicalName="System.SetUp.ExportNameConversion" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

     <ECID id="10120001" valueType="Ascii" logicalName="System.ShutDown.ShutDown" value="" min="" max="" eventTrigger="" units="" description="ShutDown" isArray="false" />

     <ECID id="10130001" valueType="Ascii" logicalName="System.SignalTower.Light" value="" min="" max="" eventTrigger="" units="" description="设置灯的种类，顺序" isArray="false" />

     <ECID id="10130002" valueType="Ascii" logicalName="System.SignalTower.Trigger" value="" min="" max="" eventTrigger="" units="" description="设置触发灯塔的项" isArray="false" />

@@ -2455,6 +2472,45 @@
 
     <ECID id="10220017" valueType="Ascii" logicalName="System.WaferType.SD.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />

     <ECID id="10220018" valueType="Ascii" logicalName="System.WaferType.SD.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />

     <ECID id="10220019" valueType="Ascii" logicalName="System.WaferType.SD.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />

+    <ECID id="10230001" valueType="Ascii" logicalName="System.FFU.FFU1.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10240001" valueType="Ascii" logicalName="System.FFU.FFU10.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10250001" valueType="Ascii" logicalName="System.FFU.FFU11.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10260001" valueType="Ascii" logicalName="System.FFU.FFU12.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10270001" valueType="Ascii" logicalName="System.FFU.FFU13.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10280001" valueType="Ascii" logicalName="System.FFU.FFU14.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10290001" valueType="Ascii" logicalName="System.FFU.FFU15.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10300001" valueType="Ascii" logicalName="System.FFU.FFU16.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10310001" valueType="Ascii" logicalName="System.FFU.FFU17.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10320001" valueType="Ascii" logicalName="System.FFU.FFU18.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10330001" valueType="Ascii" logicalName="System.FFU.FFU2.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10340001" valueType="Ascii" logicalName="System.FFU.FFU3.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10350001" valueType="Ascii" logicalName="System.FFU.FFU4.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10360001" valueType="Ascii" logicalName="System.FFU.FFU5.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10370001" valueType="Ascii" logicalName="System.FFU.FFU6.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10380001" valueType="Ascii" logicalName="System.FFU.FFU7.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10390001" valueType="Ascii" logicalName="System.FFU.FFU8.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10400001" valueType="Ascii" logicalName="System.FFU.FFU9.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />

+    <ECID id="10410001" valueType="Ascii" logicalName="System.FFU.HSPEED" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10410002" valueType="Ascii" logicalName="System.FFU.LSPEED" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10420001" valueType="Ascii" logicalName="System.WaferType.P.AccFilmThick" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10420002" valueType="Ascii" logicalName="System.WaferType.P.AlternativeWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10420003" valueType="Ascii" logicalName="System.WaferType.P.CanProcessContinuously" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10420004" valueType="Ascii" logicalName="System.WaferType.P.FullName" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10420005" valueType="Ascii" logicalName="System.WaferType.P.IsDummy" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10420006" valueType="Ascii" logicalName="System.WaferType.P.IsReturnWafer" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10420007" valueType="Ascii" logicalName="System.WaferType.P.MAPPING" value="" min="" max="" eventTrigger="" units="" description="Mapping" isArray="false" />

+    <ECID id="10420008" valueType="Ascii" logicalName="System.WaferType.P.MOVECST" value="" min="" max="" eventTrigger="" units="" description="Moving transfer foup" isArray="false" />

+    <ECID id="10420009" valueType="Ascii" logicalName="System.WaferType.P.NOFOUP" value="" min="" max="" eventTrigger="" units="" description="no foup" isArray="false" />

+    <ECID id="10420010" valueType="Ascii" logicalName="System.WaferType.P.ONBOAT" value="" min="" max="" eventTrigger="" units="" description="Complete Wafers Charging" isArray="false" />

+    <ECID id="10420011" valueType="Ascii" logicalName="System.WaferType.P.PRCEND" value="" min="" max="" eventTrigger="" units="" description="There are foups waiting to be moved out" isArray="false" />

+    <ECID id="10420012" valueType="Ascii" logicalName="System.WaferType.P.READY" value="" min="" max="" eventTrigger="" units="" description="have transfer foup" isArray="false" />

+    <ECID id="10420013" valueType="Ascii" logicalName="System.WaferType.P.ReturnWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="10420014" valueType="Ascii" logicalName="System.WaferType.P.SERR1" value="" min="" max="" eventTrigger="" units="" description="Sensor error 1 unrecoverable" isArray="false" />

+    <ECID id="10420015" valueType="Ascii" logicalName="System.WaferType.P.SERR2" value="" min="" max="" eventTrigger="" units="" description="Sensor error 2 recoverable" isArray="false" />

+    <ECID id="10420016" valueType="Ascii" logicalName="System.WaferType.P.SERR3" value="" min="" max="" eventTrigger="" units="" description="Sensor error 3 recoverable" isArray="false" />

+    <ECID id="10420017" valueType="Ascii" logicalName="System.WaferType.P.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />

+    <ECID id="10420018" valueType="Ascii" logicalName="System.WaferType.P.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />

+    <ECID id="10420019" valueType="Ascii" logicalName="System.WaferType.P.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />

     <ECID id="330010001" valueType="Ascii" logicalName="PM1.AlarmCondition" value="" min="" max="" eventTrigger="" units="" description="Alarm Condition" isArray="false" />

     <ECID id="330010002" valueType="Ascii" logicalName="PM1.AlarmConditionIndex" value="" min="" max="" eventTrigger="" units="" description="Alarm ConditionIndex" isArray="false" />

     <ECID id="330010003" valueType="Ascii" logicalName="PM1.APCPID" value="" min="" max="" eventTrigger="" units="" description="APCP ID" isArray="false" />

@@ -2489,6 +2545,8 @@
 
     <ECID id="330010032" valueType="Ascii" logicalName="PM1.TempCorrection" value="" min="" max="" eventTrigger="" units="" description="Temp Correction" isArray="false" />

     <ECID id="330010033" valueType="Ascii" logicalName="PM1.TempPID" value="" min="" max="" eventTrigger="" units="" description="Temp PID" isArray="false" />

     <ECID id="330010034" valueType="Ascii" logicalName="PM1.TempProfile" value="" min="" max="" eventTrigger="" units="" description="Temp Profile" isArray="false" />

+    <ECID id="330010035" valueType="Ascii" logicalName="PM1.RecipeRelevancyN2Purge" value="" min="" max="" eventTrigger="" units="" description="Is Open Recipe Relevancy N2Purge" isArray="false" />

+    <ECID id="330010036" valueType="Ascii" logicalName="PM1.SelectN2PurgeMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

     <ECID id="330020001" valueType="Ascii" logicalName="PM1.APC.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />

     <ECID id="330020002" valueType="Ascii" logicalName="PM1.APC.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />

     <ECID id="330020003" valueType="Ascii" logicalName="PM1.APC.AngleAlarmCondtionUnit" value="" min="" max="" eventTrigger="" units="" description="Angle Alarm Condtion Unit" isArray="false" />

@@ -3034,6 +3092,8 @@
 
     <ECID id="330480005" valueType="Ascii" logicalName="PM1.N2Purge.O2DetectorTransferRoomToFOUPTime" value="" min="" max="" eventTrigger="" units="" description="O2 Detector Transfer Room To FOUP Time" isArray="false" />

     <ECID id="330480006" valueType="Ascii" logicalName="PM1.N2Purge.TransferRoomArrivalWaitTime" value="" min="" max="" eventTrigger="" units="" description="Transfer Room O2-Density Arrival Wait Time" isArray="false" />

     <ECID id="330480007" valueType="Ascii" logicalName="PM1.N2Purge.TransferRoomStableWaitTime" value="" min="" max="" eventTrigger="" units="" description=" Transfer Room O2_Density Stable Wait Time" isArray="false" />

+    <ECID id="330480008" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeFOUPO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="FOUP O2 CheckSV" isArray="false" />

+    <ECID id="330480009" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeLAO2CheckSV" value="" min="" max="" eventTrigger="" units="" description=" LA O2 CheckSV" isArray="false" />

     <ECID id="330490001" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Charge Enable" isArray="false" />

     <ECID id="330490002" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="Transfer Room N2 Purge Charge Enable" isArray="false" />

     <ECID id="330490003" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="Transfer Room O2 Density Check Charge Enable" isArray="false" />

@@ -3047,418 +3107,522 @@
 
     <ECID id="330520002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.1.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330520003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.1.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330520004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.1.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330520005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.1.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330530001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.10.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330530002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.10.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330530003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.10.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330530004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.10.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330530005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.10.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330540001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.100.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330540002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.100.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330540003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.100.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330540004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.100.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330540005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.100.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330550001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.101.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330550002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.101.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330550003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.101.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330550004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.101.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330550005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.101.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330560001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.102.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330560002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.102.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330560003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.102.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330560004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.102.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330560005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.102.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330570001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.103.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330570002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.103.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330570003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.103.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330570004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.103.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330570005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.103.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330580001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.104.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330580002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.104.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330580003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.104.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330580004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.104.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330580005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.104.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330590001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.11.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330590002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.11.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330590003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.11.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330590004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.11.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330590005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.11.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330600001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.12.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330600002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.12.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330600003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.12.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330600004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.12.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330600005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.12.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330610001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.13.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330610002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.13.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330610003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.13.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330610004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.13.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330610005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.13.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330620001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.14.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330620002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.14.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330620003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.14.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330620004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.14.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330620005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.14.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330630001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.15.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330630002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.15.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330630003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.15.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330630004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.15.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330630005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.15.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330640001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.16.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330640002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.16.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330640003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.16.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330640004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.16.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330640005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.16.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330650001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.17.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330650002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.17.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330650003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.17.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330650004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.17.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330650005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.17.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330660001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.18.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330660002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.18.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330660003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.18.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330660004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.18.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330660005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.18.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330670001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.19.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330670002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.19.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330670003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.19.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330670004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.19.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330670005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.19.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="330680002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.2.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330680003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.2.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330680004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.2.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330680005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.2.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330690001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.20.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330690002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.20.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330690003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.20.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330690004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.20.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330690005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.20.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330700001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.21.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330700002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.21.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330700003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.21.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330700004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.21.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330700005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.21.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330710001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.22.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330710002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.22.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330710003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.22.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330710004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.22.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330710005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.22.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330720001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.23.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330720002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.23.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330720003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.23.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330720004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.23.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330720005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.23.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330730001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.24.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330730002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.24.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330730003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.24.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330730004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.24.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330730005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.24.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330740001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.25.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330740002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.25.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330740003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.25.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330740004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.25.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330740005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.25.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330750001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.26.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330750002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.26.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330750003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.26.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330750004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.26.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330750005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.26.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330760001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.27.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330760002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.27.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330760003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.27.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330760004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.27.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330760005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.27.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330770001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.28.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330770002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.28.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330770003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.28.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330770004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.28.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330770005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.28.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330780001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.29.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330780002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.29.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330780003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.29.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330780004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.29.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330780005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.29.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330790001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.3.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330790002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.3.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330790003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.3.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330790004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.3.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330790005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.3.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330800001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.30.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330800002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.30.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330800003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.30.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330800004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.30.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330800005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.30.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330810001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.31.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330810002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.31.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330810003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.31.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330810004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.31.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330810005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.31.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330820001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.32.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330820002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.32.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330820003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.32.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330820004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.32.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330820005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.32.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330830001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.33.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330830002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.33.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330830003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.33.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330830004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.33.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330830005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.33.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330840001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.34.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330840002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.34.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330840003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.34.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330840004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.34.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330840005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.34.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330850001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.35.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330850002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.35.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330850003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.35.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330850004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.35.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330850005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.35.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330860001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.36.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330860002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.36.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330860003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.36.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330860004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.36.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330860005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.36.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330870001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.37.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330870002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.37.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330870003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.37.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330870004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.37.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330870005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.37.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330880001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.38.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330880002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.38.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330880003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.38.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330880004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.38.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330880005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.38.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330890001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.39.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330890002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.39.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330890003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.39.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330890004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.39.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330890005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.39.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="330900002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.4.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330900003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.4.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330900004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.4.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

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     <ECID id="330910002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.40.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330910003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.40.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330910004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.40.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330910005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.40.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330920001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.41.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330920002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.41.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330920003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.41.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330920004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.41.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330920005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.41.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="330930002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.42.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330930003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.42.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330930004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.42.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330930005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.42.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="330940003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.43.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330940004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.43.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330940005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.43.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330950001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.44.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

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     <ECID id="330950003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.44.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330950004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.44.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330950005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.44.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="330960002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.45.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

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     <ECID id="330960004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.45.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330960005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.45.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="330970002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.46.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

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     <ECID id="330970004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.46.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330970005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.46.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="330980001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.47.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="330980002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.47.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330980003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.47.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330980004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.47.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330980005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.47.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="330990002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.48.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="330990003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.48.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="330990004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.48.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="330990005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.48.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331000001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.49.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331000002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.49.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331000003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.49.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331000004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.49.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331000005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.49.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="331010002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.5.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331010003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.5.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331010004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.5.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331010005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.5.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331020001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.50.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331020002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.50.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331020003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.50.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331020004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.50.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331020005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.50.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

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     <ECID id="331030002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.51.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331030003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.51.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331030004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.51.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331030005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.51.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331040001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.52.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331040002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.52.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331040003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.52.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331040004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.52.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331040005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.52.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331050001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.53.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331050002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.53.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331050003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.53.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331050004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.53.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331050005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.53.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331060001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.54.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331060002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.54.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331060003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.54.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331060004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.54.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331060005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.54.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331070001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.55.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331070002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.55.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331070003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.55.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331070004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.55.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331070005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.55.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331080001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.56.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331080002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.56.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331080003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.56.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331080004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.56.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331080005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.56.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331090001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.57.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331090002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.57.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331090003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.57.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331090004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.57.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331090005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.57.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331100001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.58.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331100002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.58.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331100003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.58.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331100004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.58.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331100005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.58.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331110001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.59.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331110002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.59.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331110003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.59.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331110004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.59.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331110005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.59.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331120001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.6.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331120002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.6.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331120003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.6.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331120004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.6.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331120005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.6.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331130001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.60.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331130002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.60.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331130003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.60.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331130004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.60.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331130005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.60.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331140001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.61.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331140002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.61.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

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     <ECID id="331140004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.61.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

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     <ECID id="331420004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.87.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331420005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.87.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331430001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.88.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331430002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.88.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331430003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.88.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331430004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.88.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331430005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.88.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331440001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.89.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331440002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.89.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331440003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.89.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331440004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.89.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331440005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.89.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331450001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.9.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331450002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.9.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331450003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.9.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331450004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.9.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331450005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.9.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331460001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.90.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331460002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.90.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331460003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.90.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331460004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.90.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331460005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.90.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331470001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.91.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331470002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.91.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331470003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.91.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331470004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.91.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331470005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.91.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331480001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.92.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331480002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.92.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331480003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.92.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331480004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.92.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331480005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.92.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331490001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.93.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331490002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.93.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331490003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.93.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331490004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.93.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331490005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.93.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331500001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.94.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331500002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.94.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331500003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.94.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331500004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.94.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331500005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.94.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331510001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.95.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331510002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.95.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331510003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.95.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331510004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.95.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331510005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.95.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331520001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.96.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331520002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.96.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331520003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.96.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331520004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.96.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331520005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.96.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331530001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.97.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331530002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.97.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331530003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.97.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331530004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.97.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331530005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.97.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331540001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.98.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331540002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.98.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331540003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.98.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331540004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.98.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331540005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.98.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331550001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.99.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />

     <ECID id="331550002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.99.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />

     <ECID id="331550003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.99.Display" value="" min="" max="" eventTrigger="" units="" description="Display" isArray="false" />

     <ECID id="331550004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.99.Unit" value="" min="" max="" eventTrigger="" units="" description="Unit" isArray="false" />

+    <ECID id="331550005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.99.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Install" isArray="false" />

     <ECID id="331560001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.IsModifyAll" value="" min="" max="" eventTrigger="" units="" description="IsModifyAll" isArray="false" />

     <ECID id="331570001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.Table1.1.AlarmHighLimit" value="" min="" max="" eventTrigger="" units="" description="AlarmHighLimit" isArray="false" />

     <ECID id="331570002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.Table1.1.AlarmLowLimit" value="" min="" max="" eventTrigger="" units="" description="AlarmLowLimit" isArray="false" />

@@ -9092,6 +9256,149 @@
 
     <ECID id="3312100016" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDThicknessWarning" value="" min="" max="" eventTrigger="" units="" description="SD use thickness warning" isArray="false" />

     <ECID id="3312100017" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDTimeAlarm" value="" min="" max="" eventTrigger="" units="" description="SD use time alarm" isArray="false" />

     <ECID id="3312100018" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDTimeWarning" value="" min="" max="" eventTrigger="" units="" description="SD use time warning" isArray="false" />

+    <ECID id="3312110001" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110002" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110003" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110004" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveAV59" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110005" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110006" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110007" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveCommonBoxPressureRegulatingCylinder" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110008" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveFIMS1N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110009" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveFIMS2N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110010" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110011" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312110012" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312120001" valueType="Ascii" logicalName="PM1.N2Purge.BoatLoad.EAxisInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="E Axis Inhibit Enable" isArray="false" />

+    <ECID id="3312120002" valueType="Ascii" logicalName="PM1.N2Purge.BoatLoad.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable When boatloading" isArray="false" />

+    <ECID id="3312120003" valueType="Ascii" logicalName="PM1.N2Purge.BoatLoad.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge Charge Enable" isArray="false" />

+    <ECID id="3312120004" valueType="Ascii" logicalName="PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Charge Enable" isArray="false" />

+    <ECID id="3312120005" valueType="Ascii" logicalName="PM1.N2Purge.BoatLoad.TransferRoomO2DensityKeepEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Keep boatloading Enable" isArray="false" />

+    <ECID id="3312130001" valueType="Ascii" logicalName="PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="E Axis Inhibit Enable" isArray="false" />

+    <ECID id="3312130002" valueType="Ascii" logicalName="PM1.N2Purge.BoatUnLoad.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable When boatUnloading" isArray="false" />

+    <ECID id="3312130003" valueType="Ascii" logicalName="PM1.N2Purge.BoatUnLoad.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge Charge Enable Before Boat Unload" isArray="false" />

+    <ECID id="3312130004" valueType="Ascii" logicalName="PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Charge Enable Before Boat Unload" isArray="false" />

+    <ECID id="3312130005" valueType="Ascii" logicalName="PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityKeepEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Keep boatloading Enable" isArray="false" />

+    <ECID id="3312140001" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140002" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140003" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140004" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveAV59" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140005" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140006" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140007" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveCommonBoxPressureRegulatingCylinder" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140008" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveFIMS1N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140009" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveFIMS2N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140010" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140011" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312140012" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150001" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150002" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150003" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150004" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV59" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150005" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150006" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150007" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveCommonBoxPressureRegulatingCylinder" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150008" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveFIMS1N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150009" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveFIMS2N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150010" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150011" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312150012" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160001" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160002" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160003" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160004" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV59" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160005" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160006" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160007" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveCommonBoxPressureRegulatingCylinder" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160008" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveFIMS1N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160009" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveFIMS2N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160010" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160011" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312160012" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312170001" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.FOUPN2PurgeCancelEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Cancel Enable When Foup Enter" isArray="false" />

+    <ECID id="3312170002" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Enable When Foup Enter" isArray="false" />

+    <ECID id="3312170003" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge  Enable When Foup Enter" isArray="false" />

+    <ECID id="3312170004" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Enable When Foup Enter" isArray="false" />

+    <ECID id="3312180001" valueType="Ascii" logicalName="PM1.N2Purge.FoupInhibit.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable After BoatLoad" isArray="false" />

+    <ECID id="3312180002" valueType="Ascii" logicalName="PM1.N2Purge.FoupInhibit.FoupInhibitTime" value="" min="" max="" eventTrigger="" units="" description="FOUP TO FOUP WaitTime After BoatLoad" isArray="false" />

+    <ECID id="3312190001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190002" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.TrigMS501" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190003" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.TrigMS502" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190004" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.TrigMS503" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190005" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.TrigMS504" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190006" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveAV202" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190007" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190008" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190009" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312190011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200002" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS501" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200003" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS502" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200004" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS503" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200005" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS504" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200006" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveAV202" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200007" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200008" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200009" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312200011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210002" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS501" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210003" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS502" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210004" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS503" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210005" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS504" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210006" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveAV202" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210007" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210008" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210009" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312210011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS501" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220002" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS502" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220003" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS503" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220004" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS504" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220005" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveAV202" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220006" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220007" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220008" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220009" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312220010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230001" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230002" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230003" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230004" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV59" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230005" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230006" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230007" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveCommonBoxPressureRegulatingCylinder" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230008" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveFIMS1N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230009" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveFIMS2N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230010" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230011" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312230012" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240001" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240002" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240003" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240004" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV59" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240005" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240006" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240007" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveCommonBoxPressureRegulatingCylinder" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240008" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveFIMS1N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240009" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveFIMS2N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240010" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240011" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312240012" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250001" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250002" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan1switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250003" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan2switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250004" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan3switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250005" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan4switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250006" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveAV202" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250007" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250008" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250009" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250010" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312250011" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />

+    <ECID id="3312260001" valueType="Ascii" logicalName="PM1.N2Purge.WaferCooling.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable When Wafer Cooling" isArray="false" />

   </EquipmentConstants>

   <DataVariables>

     <DVID id="3003" valueType="Ascii" logicalName="PPChangeName" value="" eventTrigger="" description="Recipe change name(RCPID)" isArray="false" />

@@ -11284,6 +11591,8 @@
 
     <ALID id="330010901" logicalName="PM1.WaterFlowFS111ToleranceWarning" description="WaterFlowFS111 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010901" eventClear="2330010901" />

     <ALID id="330010902" logicalName="PM1.WaterFlowFS116ToleranceAlarm" description="WaterFlowFS116 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010902" eventClear="2330010902" />

     <ALID id="330010903" logicalName="PM1.WaterFlowFS116ToleranceWarning" description="WaterFlowFS116 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010903" eventClear="2330010903" />

+    <ALID id="330010904" logicalName="PM1.AlarmSignaAPCCommAlarm" description="APC Comm Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010904" eventClear="2330010904" />

+    <ALID id="330010905" logicalName="PM1.ExecuteAbortRecipeFailAlarm" description="PM1 execute abort recipe fail alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010905" eventClear="2330010905" />

     <ALID id="330020001" logicalName="PM1.AlarmHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020001" eventClear="2330020001" />

     <ALID id="330020002" logicalName="PM1.AlarmHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020002" eventClear="2330020002" />

     <ALID id="330020003" logicalName="PM1.AlarmHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020003" eventClear="2330020003" />

@@ -11466,6 +11775,22 @@
 
     <ALID id="330020180" logicalName="PM1.AlarmHighLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020180" eventClear="2330020180" />

     <ALID id="330020181" logicalName="PM1.AlarmHighLimit.AI_VG12AnalogValue" description="VG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020181" eventClear="2330020181" />

     <ALID id="330020182" logicalName="PM1.AlarmHighLimit.AI_VG14AnalogValue" description="VG14 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020182" eventClear="2330020182" />

+    <ALID id="330020183" logicalName="PM1.AlarmHighLimit.AI_CH10PV" description="Unit1-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020183" eventClear="2330020183" />

+    <ALID id="330020184" logicalName="PM1.AlarmHighLimit.AI_CH11PV" description="Unit1-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020184" eventClear="2330020184" />

+    <ALID id="330020185" logicalName="PM1.AlarmHighLimit.AI_CH12PV" description="Unit1-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020185" eventClear="2330020185" />

+    <ALID id="330020186" logicalName="PM1.AlarmHighLimit.AI_CH13PV" description="Unit1-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020186" eventClear="2330020186" />

+    <ALID id="330020187" logicalName="PM1.AlarmHighLimit.AI_CH14PV" description="Unit1-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020187" eventClear="2330020187" />

+    <ALID id="330020188" logicalName="PM1.AlarmHighLimit.AI_CH15PV" description="Unit1-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020188" eventClear="2330020188" />

+    <ALID id="330020189" logicalName="PM1.AlarmHighLimit.AI_CH16PV" description="Unit1-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020189" eventClear="2330020189" />

+    <ALID id="330020190" logicalName="PM1.AlarmHighLimit.AI_CH1PV" description="Unit1-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020190" eventClear="2330020190" />

+    <ALID id="330020191" logicalName="PM1.AlarmHighLimit.AI_CH2PV" description="Unit1-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020191" eventClear="2330020191" />

+    <ALID id="330020192" logicalName="PM1.AlarmHighLimit.AI_CH3PV" description="Unit1-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020192" eventClear="2330020192" />

+    <ALID id="330020193" logicalName="PM1.AlarmHighLimit.AI_CH4PV" description="Unit1-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020193" eventClear="2330020193" />

+    <ALID id="330020194" logicalName="PM1.AlarmHighLimit.AI_CH5PV" description="Unit1-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020194" eventClear="2330020194" />

+    <ALID id="330020195" logicalName="PM1.AlarmHighLimit.AI_CH6PV" description="Unit1-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020195" eventClear="2330020195" />

+    <ALID id="330020196" logicalName="PM1.AlarmHighLimit.AI_CH7PV" description="Unit1-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020196" eventClear="2330020196" />

+    <ALID id="330020197" logicalName="PM1.AlarmHighLimit.AI_CH8PV" description="Unit1-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020197" eventClear="2330020197" />

+    <ALID id="330020198" logicalName="PM1.AlarmHighLimit.AI_CH9PV" description="Unit1-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020198" eventClear="2330020198" />

     <ALID id="330030001" logicalName="PM1.AlarmHighLimit.AI_WaterFlowREV." description="water flow REV. High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330030001" eventClear="2330030001" />

     <ALID id="330040001" logicalName="PM1.AlarmLowLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040001" eventClear="2330040001" />

     <ALID id="330040002" logicalName="PM1.AlarmLowLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040002" eventClear="2330040002" />

@@ -11649,6 +11974,22 @@
 
     <ALID id="330040180" logicalName="PM1.AlarmLowLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040180" eventClear="2330040180" />

     <ALID id="330040181" logicalName="PM1.AlarmLowLimit.AI_VG12AnalogValue" description="VG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040181" eventClear="2330040181" />

     <ALID id="330040182" logicalName="PM1.AlarmLowLimit.AI_VG14AnalogValue" description="VG14 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040182" eventClear="2330040182" />

+    <ALID id="330040183" logicalName="PM1.AlarmLowLimit.AI_CH10PV" description="Unit1-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040183" eventClear="2330040183" />

+    <ALID id="330040184" logicalName="PM1.AlarmLowLimit.AI_CH11PV" description="Unit1-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040184" eventClear="2330040184" />

+    <ALID id="330040185" logicalName="PM1.AlarmLowLimit.AI_CH12PV" description="Unit1-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040185" eventClear="2330040185" />

+    <ALID id="330040186" logicalName="PM1.AlarmLowLimit.AI_CH13PV" description="Unit1-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040186" eventClear="2330040186" />

+    <ALID id="330040187" logicalName="PM1.AlarmLowLimit.AI_CH14PV" description="Unit1-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040187" eventClear="2330040187" />

+    <ALID id="330040188" logicalName="PM1.AlarmLowLimit.AI_CH15PV" description="Unit1-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040188" eventClear="2330040188" />

+    <ALID id="330040189" logicalName="PM1.AlarmLowLimit.AI_CH16PV" description="Unit1-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040189" eventClear="2330040189" />

+    <ALID id="330040190" logicalName="PM1.AlarmLowLimit.AI_CH1PV" description="Unit1-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040190" eventClear="2330040190" />

+    <ALID id="330040191" logicalName="PM1.AlarmLowLimit.AI_CH2PV" description="Unit1-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040191" eventClear="2330040191" />

+    <ALID id="330040192" logicalName="PM1.AlarmLowLimit.AI_CH3PV" description="Unit1-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040192" eventClear="2330040192" />

+    <ALID id="330040193" logicalName="PM1.AlarmLowLimit.AI_CH4PV" description="Unit1-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040193" eventClear="2330040193" />

+    <ALID id="330040194" logicalName="PM1.AlarmLowLimit.AI_CH5PV" description="Unit1-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040194" eventClear="2330040194" />

+    <ALID id="330040195" logicalName="PM1.AlarmLowLimit.AI_CH6PV" description="Unit1-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040195" eventClear="2330040195" />

+    <ALID id="330040196" logicalName="PM1.AlarmLowLimit.AI_CH7PV" description="Unit1-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040196" eventClear="2330040196" />

+    <ALID id="330040197" logicalName="PM1.AlarmLowLimit.AI_CH8PV" description="Unit1-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040197" eventClear="2330040197" />

+    <ALID id="330040198" logicalName="PM1.AlarmLowLimit.AI_CH9PV" description="Unit1-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040198" eventClear="2330040198" />

     <ALID id="330050001" logicalName="PM1.AlarmLowLimit.AI_WaterFlowREV." description="water flow REV. Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330050001" eventClear="2330050001" />

     <ALID id="330060001" logicalName="PM1.WarningHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060001" eventClear="2330060001" />

     <ALID id="330060002" logicalName="PM1.WarningHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060002" eventClear="2330060002" />

@@ -11832,6 +12173,22 @@
 
     <ALID id="330060180" logicalName="PM1.WarningHighLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060180" eventClear="2330060180" />

     <ALID id="330060181" logicalName="PM1.WarningHighLimit.AI_VG12AnalogValue" description="VG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060181" eventClear="2330060181" />

     <ALID id="330060182" logicalName="PM1.WarningHighLimit.AI_VG14AnalogValue" description="VG14 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060182" eventClear="2330060182" />

+    <ALID id="330060183" logicalName="PM1.WarningHighLimit.AI_CH10PV" description="Unit1-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060183" eventClear="2330060183" />

+    <ALID id="330060184" logicalName="PM1.WarningHighLimit.AI_CH11PV" description="Unit1-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060184" eventClear="2330060184" />

+    <ALID id="330060185" logicalName="PM1.WarningHighLimit.AI_CH12PV" description="Unit1-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060185" eventClear="2330060185" />

+    <ALID id="330060186" logicalName="PM1.WarningHighLimit.AI_CH13PV" description="Unit1-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060186" eventClear="2330060186" />

+    <ALID id="330060187" logicalName="PM1.WarningHighLimit.AI_CH14PV" description="Unit1-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060187" eventClear="2330060187" />

+    <ALID id="330060188" logicalName="PM1.WarningHighLimit.AI_CH15PV" description="Unit1-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060188" eventClear="2330060188" />

+    <ALID id="330060189" logicalName="PM1.WarningHighLimit.AI_CH16PV" description="Unit1-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060189" eventClear="2330060189" />

+    <ALID id="330060190" logicalName="PM1.WarningHighLimit.AI_CH1PV" description="Unit1-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060190" eventClear="2330060190" />

+    <ALID id="330060191" logicalName="PM1.WarningHighLimit.AI_CH2PV" description="Unit1-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060191" eventClear="2330060191" />

+    <ALID id="330060192" logicalName="PM1.WarningHighLimit.AI_CH3PV" description="Unit1-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060192" eventClear="2330060192" />

+    <ALID id="330060193" logicalName="PM1.WarningHighLimit.AI_CH4PV" description="Unit1-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060193" eventClear="2330060193" />

+    <ALID id="330060194" logicalName="PM1.WarningHighLimit.AI_CH5PV" description="Unit1-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060194" eventClear="2330060194" />

+    <ALID id="330060195" logicalName="PM1.WarningHighLimit.AI_CH6PV" description="Unit1-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060195" eventClear="2330060195" />

+    <ALID id="330060196" logicalName="PM1.WarningHighLimit.AI_CH7PV" description="Unit1-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060196" eventClear="2330060196" />

+    <ALID id="330060197" logicalName="PM1.WarningHighLimit.AI_CH8PV" description="Unit1-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060197" eventClear="2330060197" />

+    <ALID id="330060198" logicalName="PM1.WarningHighLimit.AI_CH9PV" description="Unit1-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060198" eventClear="2330060198" />

     <ALID id="330070001" logicalName="PM1.WarningHighLimit.AI_WaterFlowREV." description="water flow REV. High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330070001" eventClear="2330070001" />

     <ALID id="330080001" logicalName="PM1.WarningLowLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080001" eventClear="2330080001" />

     <ALID id="330080002" logicalName="PM1.WarningLowLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080002" eventClear="2330080002" />

@@ -12015,6 +12372,22 @@
 
     <ALID id="330080180" logicalName="PM1.WarningLowLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080180" eventClear="2330080180" />

     <ALID id="330080181" logicalName="PM1.WarningLowLimit.AI_VG12AnalogValue" description="VG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080181" eventClear="2330080181" />

     <ALID id="330080182" logicalName="PM1.WarningLowLimit.AI_VG14AnalogValue" description="VG14 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080182" eventClear="2330080182" />

+    <ALID id="330080183" logicalName="PM1.WarningLowLimit.AI_CH10PV" description="Unit1-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080183" eventClear="2330080183" />

+    <ALID id="330080184" logicalName="PM1.WarningLowLimit.AI_CH11PV" description="Unit1-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080184" eventClear="2330080184" />

+    <ALID id="330080185" logicalName="PM1.WarningLowLimit.AI_CH12PV" description="Unit1-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080185" eventClear="2330080185" />

+    <ALID id="330080186" logicalName="PM1.WarningLowLimit.AI_CH13PV" description="Unit1-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080186" eventClear="2330080186" />

+    <ALID id="330080187" logicalName="PM1.WarningLowLimit.AI_CH14PV" description="Unit1-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080187" eventClear="2330080187" />

+    <ALID id="330080188" logicalName="PM1.WarningLowLimit.AI_CH15PV" description="Unit1-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080188" eventClear="2330080188" />

+    <ALID id="330080189" logicalName="PM1.WarningLowLimit.AI_CH16PV" description="Unit1-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080189" eventClear="2330080189" />

+    <ALID id="330080190" logicalName="PM1.WarningLowLimit.AI_CH1PV" description="Unit1-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080190" eventClear="2330080190" />

+    <ALID id="330080191" logicalName="PM1.WarningLowLimit.AI_CH2PV" description="Unit1-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080191" eventClear="2330080191" />

+    <ALID id="330080192" logicalName="PM1.WarningLowLimit.AI_CH3PV" description="Unit1-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080192" eventClear="2330080192" />

+    <ALID id="330080193" logicalName="PM1.WarningLowLimit.AI_CH4PV" description="Unit1-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080193" eventClear="2330080193" />

+    <ALID id="330080194" logicalName="PM1.WarningLowLimit.AI_CH5PV" description="Unit1-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080194" eventClear="2330080194" />

+    <ALID id="330080195" logicalName="PM1.WarningLowLimit.AI_CH6PV" description="Unit1-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080195" eventClear="2330080195" />

+    <ALID id="330080196" logicalName="PM1.WarningLowLimit.AI_CH7PV" description="Unit1-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080196" eventClear="2330080196" />

+    <ALID id="330080197" logicalName="PM1.WarningLowLimit.AI_CH8PV" description="Unit1-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080197" eventClear="2330080197" />

+    <ALID id="330080198" logicalName="PM1.WarningLowLimit.AI_CH9PV" description="Unit1-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080198" eventClear="2330080198" />

     <ALID id="330090001" logicalName="PM1.WarningLowLimit.AI_WaterFlowREV." description="water flow REV. Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330090001" eventClear="2330090001" />

     <ALID id="860010001" logicalName="WaferRobot.AlarmSignaWaferRobotTPStatusWarning" description="Wafer Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1860010001" eventClear="2860010001" />

     <ALID id="860010002" logicalName="WaferRobot.BladeWaferNotPresentWarning" description="Blade wafer not present " category="EquipmentStatusWarning" enabled="false" eventSet="1860010002" eventClear="2860010002" />

Fichier diff supprimé car celui-ci est trop grand
+ 1 - 1
Furnace/FurnaceRT/Config/VIDs/_ALID.xml


Fichier diff supprimé car celui-ci est trop grand
+ 1 - 1
Furnace/FurnaceRT/Config/VIDs/_ECID.xml


Fichier diff supprimé car celui-ci est trop grand
+ 1 - 1
Furnace/FurnaceRT/Config/VIDs/_SVID.xml


+ 31 - 6
Furnace/FurnaceRT/Equipments/Jobs/AutoTransfer.cs
Voir le fichier 

@@ -638,6 +638,7 @@ namespace FurnaceRT.Equipments.Jobs
 
             pj.CoolTimeSec = coolTime;

             pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");

             pj.IsN2PurgeMode = recipeHead.IsN2PurgeMode;

+            pj.N2PurgeModeStr = recipeHead.N2PurgeModeStr;

 

             if (useStockers.Any() && !CheckChargeRule(pj, out bool waferShort, false, true, out reason))

             {

@@ -1482,13 +1483,26 @@ namespace FurnaceRT.Equipments.Jobs
 
             pj.ProcessingState = EnumProcessingState.Charging;

             pj.BeginTime = DateTime.Now;

 

-            if (pj.IsN2PurgeMode &&

-                SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable"))

+            if (pj.IsN2PurgeMode)

             {

                 var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;

-                pmModule?.SetN2PurgeProcess(true);

+                //pmModule?.SetN2PurgeProcess(true);

+                //if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))

+                //    pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);

+

                 if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))

+                {

+                    pmModule?.SetN2PurgeProcess(true);

+

                     pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);

+                }

+                if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))

+                {

+                    var setValue = pmModule.GetN2PurgeModeEnumByStr(pj.N2PurgeModeStr);

+                    SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);

+                    pmModule.RestAllN2PrugeRD();

+                }

+

             }

 

             foreach (var pm in _lstPms)

@@ -6121,12 +6135,23 @@ namespace FurnaceRT.Equipments.Jobs
 
                             AdjustDischargeSlots();

                             pj.ProcessingState = EnumProcessingState.Discharging;

                             LOG.Write($"Cooling completed {pj.CoolTimeSec}");

-                            if (pj.IsN2PurgeMode &&

-                                SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable"))

+                            if (pj.IsN2PurgeMode)

                             {

-                                pmModule?.SetN2PurgeProcess(true);

+                                //pmModule?.SetN2PurgeProcess(true);

+                                //if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))

+                                //    pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);

+

                                 if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))

+                                {

+                                    pmModule?.SetN2PurgeProcess(true);

                                     pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);

+                                }

+                                if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))

+                                {

+                                    var setValue = pmModule.GetN2PurgeModeEnumByStr(pj.N2PurgeModeStr);

+                                    SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);

+                                    pmModule.RestAllN2PrugeRD();

+                                }

                             }

                         }

                     }

+ 17 - 0
Furnace/FurnaceRT/Equipments/PMs/PMN2Purge.cs
Voir le fichier 

@@ -360,5 +360,22 @@ namespace FurnaceRT.Equipments.PMs
 
                 TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);

             }

         }

+

+        public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)

+        {

+            if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))

+            {

+                if (!isN2Purge)

+                {

+                    SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());

+                }

+                else

+                {

+                    var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);

+                    SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);

+                }

+                RestAllN2PrugeRD();

+            }

+        }

     }

 }

+ 1 - 0
Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/Process.cs
Voir le fichier 

@@ -286,6 +286,7 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
 
 

             PMModule.InitAlarmCondition(PMModule.RecipeRunningInfo.Head.AlarmCondition);

             PMModule.InitLeakCheck(PMModule.RecipeRunningInfo.Head.LeakCheck);

+            PMModule.InitN2PurgeMode(PMModule.RecipeRunningInfo.Head.N2PurgeModeStr, PMModule.RecipeRunningInfo.Head.IsN2PurgeMode);

 

             ResetTrig();

+ 1 - 1
Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/RecipeHead.cs
Voir le fichier 

@@ -16,6 +16,6 @@
 
         public string ProfileCondition { get; set; }

         public bool IsN2PurgeMode { get; set; }

 

-

+        public string N2PurgeModeStr { get; set; }

     }

 }

+ 1 - 0
Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/RecipeParser.cs
Voir le fichier 

@@ -206,6 +206,7 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
 
                         if(nodeConfig.HasAttribute("N2PurgeMode"))

                         {

                             recipeHead.IsN2PurgeMode = nodeConfig.Attributes["N2PurgeMode"].Value.Replace(" ", "").ToLower() == "n2purge";

+                            recipeHead.N2PurgeModeStr = nodeConfig.Attributes["N2PurgeMode"].Value;

                         }

                         else

                         {