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- using System;
- using System.Collections.Generic;
- using System.Xml;
- using System.Reflection;
- using Aitex.Common.Util;
- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.RecipeCenter;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Equipment;
- using System.IO;
- namespace FurnaceRT.Equipments.PMs.RecipeExecutions
- {
- public class RecipeParser
- {
- public static bool Parse(string recipeFile, string module, out RecipeHead recipeHead, out List<RecipeStep> recipeData, out string reason, string recipeType, int tableID = 1, RecipeHead mainHead = null)
- {
- reason = string.Empty;
- if (mainHead != null)
- recipeHead = mainHead;
- else
- recipeHead = new RecipeHead();
- recipeData = new List<RecipeStep>();
- string content = string.Empty;
- if (recipeType != "Process" && recipeType != "Idle" && recipeType != "Reset")
- {
- if (!File.Exists($"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\{SC.GetStringValue($"System.Recipe.Supported{recipeType}Type")}\\{recipeFile}.rcp"))
- return true;
- }
- content = RecipeFileManager.Instance.LoadRecipe($"{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\{SC.GetStringValue($"System.Recipe.Supported{recipeType}Type")}", recipeFile, false);
- if (string.IsNullOrEmpty(content))
- {
- reason = $"{recipeFile} is not a valid recipe file";
- return false;
- }
- try
- {
- //获取工艺程序文件中允许的命令字符串列表
- //目的:如果工艺程序文件中含有规定之外的命令,则被禁止执行
- HashSet<string> recipeAllowedCommands = new HashSet<string>();
- XmlDocument rcpFormatDoc = new XmlDocument();
- string recipeSchema = PathManager.GetCfgDir() + $@"\Recipe\Furnace\Process\{SC.GetStringValue("System.SetUp.ToolType")}\RecipeFormat.xml";
- rcpFormatDoc.Load(recipeSchema);
- XmlNodeList rcpItemNodeList = rcpFormatDoc.SelectNodes("/Aitex/TableRecipeFormat/Catalog/Group/Step");
- foreach (XmlElement item in rcpItemNodeList)
- recipeAllowedCommands.Add(item.Attributes["ControlName"].Value);
- recipeAllowedCommands.Add("Temperature.ControlMode");
- recipeAllowedCommands.Add("Temperature.Correct");
- recipeAllowedCommands.Add("Temperature.PID");
- recipeAllowedCommands.Add("ConditionCheck");
- recipeAllowedCommands.Add("EventSetting");
- recipeAllowedCommands.Add("FilmThickFormula");
- recipeAllowedCommands.Add("FilmThickCoefficientA");
- recipeAllowedCommands.Add("FilmThickCoefficientB");
- recipeAllowedCommands.Add("AlarmTableIndex");
- recipeAllowedCommands.Add("RFSwitch");
- recipeAllowedCommands.Add("RFSetpoint");
- recipeAllowedCommands.Add("ForwardPowerAlarmWatchTable");
- recipeAllowedCommands.Add("PrAlarmWatchTable");
- recipeAllowedCommands.Add("PIAlarmWatchTable");
- recipeAllowedCommands.Add("C1Setpoint");
- recipeAllowedCommands.Add("C2Setpoint");
- recipeAllowedCommands.Add("C1AlarmWatchTable");
- recipeAllowedCommands.Add("C2AlarmWatchTable");
- recipeAllowedCommands.Add("VppAlarmWatchTable");
- recipeAllowedCommands.Add("VdcAlarmWatchTable");
- recipeAllowedCommands.Add("PressureSonserValue");
- recipeAllowedCommands.Add("PressureValveAngle");
- recipeAllowedCommands.Add("PressureSettingVG");
- recipeAllowedCommands.Add("PressCommand");
- recipeAllowedCommands.Add("PressValue");
- recipeAllowedCommands.Add("PressureAlarmTableNo");
- recipeAllowedCommands.Add("AbortRecipeTableIndex");
- recipeAllowedCommands.Add("AlarmConditionTable");
- recipeAllowedCommands.Add("LoaderCommand");
- recipeAllowedCommands.Add("LoaderValue");
- for (int i = 1; i < 11; i++)
- {
- recipeAllowedCommands.Add($"AlarmAction.{i}");
- recipeAllowedCommands.Add($"AlarmDetails.{i}");
- }
- for (int i = 1; i < 60; i++)
- {
- recipeAllowedCommands.Add($"MFC{i}.Flow.Set");
- recipeAllowedCommands.Add($"MFC{i}.Flow.SetUnit");
- recipeAllowedCommands.Add($"MFC{i}.Flow.Ramprate");
- recipeAllowedCommands.Add($"MFC{i}.Flow.RamprateUnit");
- recipeAllowedCommands.Add($"MFC{i}.Flow.Check");
- recipeAllowedCommands.Add($"MFC{i}.Flow.High");
- recipeAllowedCommands.Add($"MFC{i}.Flow.Low");
- recipeAllowedCommands.Add($"MFC{i}.Flow.Unit");
- }
- for (int i = 1; i < 200; i++)
- {
- recipeAllowedCommands.Add($"AUX.{i}.Set");
- recipeAllowedCommands.Add($"AUX.{i}.Check");
- recipeAllowedCommands.Add($"AUX.{i}.High");
- recipeAllowedCommands.Add($"AUX.{i}.Low");
- recipeAllowedCommands.Add($"AUX.{i}.CheckUnit");
- }
- recipeAllowedCommands.Add("HeaterU.ZoneName");
- recipeAllowedCommands.Add("HeaterU.Set");
- recipeAllowedCommands.Add("HeaterU.SetUnit");
- recipeAllowedCommands.Add("HeaterU.Ramprate");
- recipeAllowedCommands.Add("HeaterU.RamprateUnit");
- recipeAllowedCommands.Add("HeaterU.Check");
- recipeAllowedCommands.Add("HeaterU.High");
- recipeAllowedCommands.Add("HeaterU.Low");
- recipeAllowedCommands.Add("HeaterU.Unit");
- recipeAllowedCommands.Add("HeaterCU.ZoneName");
- recipeAllowedCommands.Add("HeaterCU.Set");
- recipeAllowedCommands.Add("HeaterCU.SetUnit");
- recipeAllowedCommands.Add("HeaterCU.Ramprate");
- recipeAllowedCommands.Add("HeaterCU.RamprateUnit");
- recipeAllowedCommands.Add("HeaterCU.Check");
- recipeAllowedCommands.Add("HeaterCU.High");
- recipeAllowedCommands.Add("HeaterCU.Low");
- recipeAllowedCommands.Add("HeaterCU.Unit");
- recipeAllowedCommands.Add("HeaterC.ZoneName");
- recipeAllowedCommands.Add("HeaterC.Set");
- recipeAllowedCommands.Add("HeaterC.SetUnit");
- recipeAllowedCommands.Add("HeaterC.Ramprate");
- recipeAllowedCommands.Add("HeaterC.RamprateUnit");
- recipeAllowedCommands.Add("HeaterC.Check");
- recipeAllowedCommands.Add("HeaterC.High");
- recipeAllowedCommands.Add("HeaterC.Low");
- recipeAllowedCommands.Add("HeaterC.Unit");
- recipeAllowedCommands.Add("HeaterCL.ZoneName");
- recipeAllowedCommands.Add("HeaterCL.Set");
- recipeAllowedCommands.Add("HeaterCL.SetUnit");
- recipeAllowedCommands.Add("HeaterCL.Ramprate");
- recipeAllowedCommands.Add("HeaterCL.RamprateUnit");
- recipeAllowedCommands.Add("HeaterCL.Check");
- recipeAllowedCommands.Add("HeaterCL.High");
- recipeAllowedCommands.Add("HeaterCL.Low");
- recipeAllowedCommands.Add("HeaterCL.Unit");
- recipeAllowedCommands.Add("HeaterL.ZoneName");
- recipeAllowedCommands.Add("HeaterL.Set");
- recipeAllowedCommands.Add("HeaterL.SetUnit");
- recipeAllowedCommands.Add("HeaterL.Ramprate");
- recipeAllowedCommands.Add("HeaterL.RamprateUnit");
- recipeAllowedCommands.Add("HeaterL.Check");
- recipeAllowedCommands.Add("HeaterL.High");
- recipeAllowedCommands.Add("HeaterL.Low");
- recipeAllowedCommands.Add("HeaterL.Unit");
- recipeAllowedCommands.Add("Loader.Command");
- recipeAllowedCommands.Add("Loader.Speed1");
- recipeAllowedCommands.Add("Loader.Speed2");
- recipeAllowedCommands.Add("Loader.Speed3");
- recipeAllowedCommands.Add("Loader.RPM");
- recipeAllowedCommands.Add("Press.Command");
- recipeAllowedCommands.Add("Press.PID");
- recipeAllowedCommands.Add("Press.Set");
- recipeAllowedCommands.Add("Press.SlowVacSet");
- recipeAllowedCommands.Add("Press.ValveAngleSet");
- recipeAllowedCommands.Add("Press.IsWait");
- recipeAllowedCommands.Add("Press.LowWait");
- recipeAllowedCommands.Add("Press.HighWait");
- recipeAllowedCommands.Add("Press.WaitUnit");
- recipeAllowedCommands.Add("Press.WaitPress");
- //获取工艺程序文件中所有步的内容
- XmlDocument rcpDataDoc = new XmlDocument();
- rcpDataDoc.LoadXml(content);
- XmlNode nodeModule = null;
- if (recipeType == "Process" || recipeType == "Idle" || recipeType == "Reset")
- nodeModule = rcpDataDoc.SelectSingleNode($"/Aitex/TableRecipeData/Module[@Name='{module}']");
- else
- nodeModule = rcpDataDoc.SelectSingleNode($"/Aitex/TableRecipeData/Tables/Table[@Index='{tableID}']");
- if (nodeModule == null)
- {
- reason = $"Recipe file does not contains step content for {module}";
- return false;
- }
- XmlElement nodeConfig = nodeModule.SelectSingleNode($"Config") as XmlElement;
- if (nodeConfig != null)
- {
- if (mainHead == null)
- {
- recipeHead.SubRecipe = nodeConfig.HasAttribute("Combination.SubRecipe") ? nodeConfig.Attributes["Combination.SubRecipe"].Value : "";
- recipeHead.AlarmRecipe = nodeConfig.HasAttribute("Combination.AlarmRecipe") ? nodeConfig.Attributes["Combination.AlarmRecipe"].Value : "";
- recipeHead.AlarmCondition = nodeConfig.HasAttribute("Combination.AlarmCondition") ? nodeConfig.Attributes["Combination.AlarmCondition"].Value : "";
- recipeHead.LeakCheck = nodeConfig.HasAttribute("Combination.LeakCheck") ? nodeConfig.Attributes["Combination.LeakCheck"].Value : "";
- recipeHead.AbortRecipe = nodeConfig.HasAttribute("Combination.AbortRecipe") ? nodeConfig.Attributes["Combination.AbortRecipe"].Value : "";
- recipeHead.PressApcPID = nodeConfig.HasAttribute("Combination.PressAPCPID") ? nodeConfig.Attributes["Combination.PressAPCPID"].Value : "";
- recipeHead.TempCorrect = nodeConfig.HasAttribute("Combination.TempCorrection") ? nodeConfig.Attributes["Combination.TempCorrection"].Value : "";
- recipeHead.TempPID = nodeConfig.HasAttribute("Combination.TempPID") ? nodeConfig.Attributes["Combination.TempPID"].Value : "";
- recipeHead.ProfileCondition = nodeConfig.HasAttribute("Combination.ProfileCondition") ? nodeConfig.Attributes["Combination.ProfileCondition"].Value : "";
- if(nodeConfig.HasAttribute("N2PurgeMode"))
- {
- recipeHead.IsN2PurgeMode = nodeConfig.Attributes["N2PurgeMode"].Value.Replace(" ", "").ToLower() == "n2purge";
- recipeHead.N2PurgeModeStr = nodeConfig.Attributes["N2PurgeMode"].Value;
- }
- else
- {
- recipeHead.IsN2PurgeMode = false;
- }
- if (string.IsNullOrEmpty(recipeHead.AbortRecipe))
- recipeHead.AbortRecipe = SC.GetStringValue("System.Recipe.Abort Recipe");
- }
- }
- else
- {
- if (mainHead == null)
- {
- recipeHead.SubRecipe = "";
- recipeHead.AlarmRecipe = "";
- recipeHead.AlarmCondition = "";
- recipeHead.LeakCheck = "";
- recipeHead.AbortRecipe = "";
- recipeHead.PressApcPID = "";
- recipeHead.TempCorrect = "";
- recipeHead.TempPID = "";
- recipeHead.ProfileCondition = "";
- if (recipeType == "Sub")
- recipeHead.AbortRecipe = SC.GetStringValue("System.Recipe.Abort Recipe");
- }
- }
- XmlNodeList stepNodeList = nodeModule.SelectNodes($"Step");
- string strLoopEndStep, strJumpStep;
- strLoopEndStep = strJumpStep = string.Empty;
- for (int i = 0; i < stepNodeList.Count; i++)
- {
- var recipeStep = new RecipeStep();
- recipeStep.RecipeType = recipeType;
- recipeData.Add(recipeStep);
- XmlElement stepNode = stepNodeList[i] as XmlElement;
- Dictionary<string, string> dic = new Dictionary<string, string>();
- //遍历Step节点
- foreach (XmlAttribute att in stepNode.Attributes)
- {
- if (recipeAllowedCommands.Contains(att.Name))
- {
- dic.Add(att.Name, att.Value);
- }
- }
- //遍历Step子节点中所有的attribute属性节点
- foreach (XmlElement subStepNode in stepNode.ChildNodes)
- {
- foreach (XmlAttribute att in subStepNode.Attributes)
- {
- if (recipeAllowedCommands.Contains(att.Name))
- {
- dic.Add(att.Name, att.Value);
- }
- }
- //遍历Step子节点的子节点中所有的attribute属性节点
- foreach (XmlElement subsubStepNode in subStepNode.ChildNodes)
- {
- foreach (XmlAttribute att in subsubStepNode.Attributes)
- {
- if (recipeAllowedCommands.Contains(att.Name))
- {
- dic.Add(att.Name, att.Value);
- }
- }
- }
- }
- recipeStep.StepName = dic["Name"];
- if (dic["Name"] == strLoopEndStep)
- {
- recipeStep.IsLoopEndStep = true;
- strLoopEndStep = string.Empty;
- }
- recipeStep.IsJumpStep = false;
- if (dic.ContainsKey("Command"))
- {
- string commandStr = dic["Command"];
- if (commandStr.Contains("CallSystemRecipe"))
- {
- }
- else if (commandStr.ToUpper().StartsWith("CALL"))
- {
- int subTableID = 0;
- var subPara = commandStr.Replace("CALL", "").Replace("[", "").Replace("]", "").Split('*');
- if (subPara != null && subPara.Length > 1)
- {
- int.TryParse(subPara[0], out int loopCount);
- var tablePara = subPara[1].Split(':');
- if (tablePara != null && tablePara.Length > 1)
- {
- int.TryParse(tablePara[0], out subTableID);
- if (subTableID > 0)
- {
- recipeStep.IsCallSubStep = true;
- recipeStep.SubRecipeLoopCount = loopCount;
- }
- }
- recipeStep.SubRecipeTableInfo = subPara[1];
- }
- //sub需要修改table id
- List<RecipeStep> subRecipeData = null;
- if (recipeStep.IsCallSubStep && !Parse(recipeHead.SubRecipe, module, out var head, out subRecipeData, out reason, "Sub", subTableID, recipeHead))
- {
- return false;
- }
- if (subRecipeData == null || subRecipeData.Count == 0)
- {
- reason = $"Sub Recipe {commandStr.Replace("CallSubRecipe:", string.Empty)} is empty";
- return false;
- }
- recipeStep.SubRecipeSteps = subRecipeData;
- }
- else if (commandStr.ToUpper().StartsWith("LOOP"))
- {
- recipeStep.IsLoopEndStep = true;
- var loopPara = commandStr.Replace("LOOP", "").Replace("[", "").Replace("]", "").Split('*');
- if (loopPara != null && loopPara.Length > 1)
- {
- int.TryParse(loopPara[0], out int loopCount);
- recipeStep.LoopCount = loopCount + 1;//加1是因为第一次从正常的start-》end的执行算是一次循环,所以要额外加1
- int loopStartStep = -1;
- for (int index = 0; index < recipeData.Count; index++)
- {
- if (recipeData[index].StepName == loopPara[1])
- {
- loopStartStep = index;
- break;
- }
- }
- if (loopStartStep < 0)
- {
- reason = $"Recipe file does not contains LOOP step {loopPara[1]}";
- return false;
- }
- if (loopPara[1] != null)
- {
- if (loopStartStep < 0 ||
- (recipeType == "Process" && loopStartStep == 0))//Process recipe的standby不参与循环
- recipeStep.IsLoopEndStep = false;
- else
- {
- recipeStep.LoopStartStep = loopStartStep;
- if (recipeData.Count > loopStartStep)
- {
- recipeData[loopStartStep].IsLoopStartStep = true;
- recipeData[loopStartStep].LoopCount = loopCount + 1;
- recipeStep.LoopEndStep = recipeType == "Process" ? i + 1 : i;//Process recipe包含standby,从0开始;其他recipe不包含standby
- }
- }
- }
- }
- }
- else if (commandStr.ToUpper().StartsWith("JUMP"))
- {
- var jumpPara = commandStr.Replace("Jump:", string.Empty).Replace("[", "").Replace("]", "");//JumpStepNo
- if (jumpPara != null)
- {
- //int.TryParse(jumpPara[0], out int jumpStepNo);
- //recipeStep.JumpStepNo = recipeType == "Process" ? jumpStepNo : jumpStepNo - 1;//Process recipe包含standby,从0开始;其他recipe不包含standby
- recipeStep.IsJumpStep = true;
- recipeStep.JumpStepName = jumpPara;
- }
- }
- }
- if (dic.ContainsKey("AbortRecipeTableIndex"))
- {
- if (dic["AbortRecipeTableIndex"].ToLower() != "none")
- {
- //格式 1:name
- var abortPara = dic["AbortRecipeTableIndex"].Split(':');
- int abortTableID = 0;
- if (abortPara.Length > 1)
- {
- int.TryParse(abortPara[0], out abortTableID);
- List<RecipeStep> abortRecipeData = null;
- if (!Parse(recipeHead.AbortRecipe, module, out var head, out abortRecipeData, out reason, "Abort", abortTableID))
- {
- return false;
- }
- if (abortRecipeData == null || abortRecipeData.Count == 0)
- {
- reason = $"Abort Recipe {recipeHead.AbortRecipe}--{dic["AbortRecipeTableIndex"]} is empty";
- return false;
- }
- recipeStep.AbortRecipeSteps = abortRecipeData;
- recipeStep.AbortRecipeTableInfo = dic["AbortRecipeTableIndex"];
- }
- }
- else
- {
- recipeStep.AbortRecipeSteps = null;
- }
- }
- if (dic.ContainsKey("EventSetting"))
- {
- string eventSettingStr = dic["EventSetting"];
- if (eventSettingStr.ToLower() == "start")
- {
- recipeStep.IsTimeMeasurementStartStep = true;
- }
- else if (eventSettingStr.ToLower() == "stop")
- {
- recipeStep.IsTimeMeasurementStopStep = true;
- }
- }
- if (dic.ContainsKey("FilmThickFormula"))
- {
- recipeStep.FilmThickFormula = dic["FilmThickFormula"];
- }
- if (dic.ContainsKey("FilmThickCoefficientA"))
- {
- recipeStep.FilmThickCoefficientA = float.Parse(dic["FilmThickCoefficientA"]);
- }
- if (dic.ContainsKey("FilmThickCoefficientB"))
- {
- recipeStep.FilmThickCoefficientB = float.Parse(dic["FilmThickCoefficientB"]);
- }
- if (dic.ContainsKey("AlarmConditionTable"))
- {
- recipeStep.AlarmConditionTable = dic["AlarmConditionTable"];
- }
- for (int j = 1; j < 11; j++)
- {
- string tempType = "Ignore Alarm";
- string tempDetails = "";
- if (dic.ContainsKey($"AlarmAction.{j}"))
- {
- tempType = dic[$"AlarmAction.{j}"];
- }
- if (dic.ContainsKey($"AlarmDetails.{j}"))
- {
- tempDetails = dic[$"AlarmDetails.{j}"];
- }
- recipeStep.AlarmActionSets.Add(j, new AlarmActions()
- {
- ProcessingType = tempType,
- ProcessingDetails = tempDetails
- });
- }
- //if(dic.ContainsKey("Loop"))
- //{
- // string loopStr = dic["Loop"];
- // recipeStep.IsLoopStartStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop\x20\d+\s*$").Success;
- // recipeStep.IsLoopEndStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop End$").Success;
- // if (recipeStep.IsLoopStartStep)
- // recipeStep.LoopCount = Convert.ToInt32(loopStr.Replace("Loop", string.Empty));
- // else
- // recipeStep.LoopCount = 0;
- //}
- //recipe time
- if (dic["Name"].ToLower() == "standby")
- {
- if (DateTime.TryParse(dic["Time"], out DateTime time))
- {
- recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600 + time.Millisecond / 1000.0;
- }
- else if (float.TryParse(dic["Time"], out float timeInSec))
- {
- recipeStep.StepTime = timeInSec;
- recipeStep.EndBy = EnumEndByCondition.ByTime;
- }
- else
- {
- recipeStep.StepTime = 0;
- recipeStep.EndBy = EnumEndByCondition.ByStandbyFactor;
- }
- }
- else
- {
- if (System.Text.RegularExpressions.Regex.Match(dic["Time"], @"[a-zA-Z]").Success)
- {
- if (SC.ContainsItem($"{module}.RecipeEditParameter.StepTime.{dic["Time"]}"))
- {
- var time = DateTime.Parse(SC.GetStringValue($"{module}.RecipeEditParameter.StepTime.{dic["Time"]}"));
- recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600;
- }
- else
- {
- reason = $"Configuration does not contains step time config {dic["Time"]}";
- return false;
- }
- }
- else
- {
- if (DateTime.TryParse(dic["Time"], out DateTime time))
- {
- recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600 + time.Millisecond / 1000.0;
- }
- else if (float.TryParse(dic["Time"], out float timeInSec))
- {
- recipeStep.StepTime = timeInSec;
- }
- else
- {
- reason = $"Step time {dic["Time"]} is invalid";
- return false;
- }
- }
- if (dic["ConditionCheck"].ToLower() == "none")
- {
- recipeStep.EndBy = EnumEndByCondition.ByTime;
- }
- else
- {
- recipeStep.EndBy = EnumEndByCondition.ByStandbyFactor;
- }
- }
- //ReplaceControlName(ref dic, "GasLineMFC1.Flow", "MFC1.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC2.Flow", "MFC2.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC3.Flow", "MFC3.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC4.Flow", "MFC4.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC5.Flow", "MFC5.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC6.Flow", "MFC6.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC7.Flow", "MFC7.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC8.Flow", "MFC8.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC9.Flow", "MFC9.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC10.Flow", "MFC10.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC11.Flow", "MFC11.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC12.Flow", "MFC12.SetParameters");
- //ReplaceControlName(ref dic, "GasLineMFC51.Flow", "MFC51.SetParameters");
- AddParameter(ref dic, "MFC1.SetParameters", new string[8] { "MFC1.Flow.Set", "MFC1.Flow.Ramprate", "MFC1.Flow.SetUnit", "MFC1.Flow.RamprateUnit", "MFC1.Flow.Check", "MFC1.Flow.High", "MFC1.Flow.Low", "MFC1.Flow.Unit" });
- AddParameter(ref dic, "MFC2.SetParameters", new string[8] { "MFC2.Flow.Set", "MFC2.Flow.Ramprate", "MFC2.Flow.SetUnit", "MFC2.Flow.RamprateUnit", "MFC2.Flow.Check", "MFC2.Flow.High", "MFC2.Flow.Low", "MFC2.Flow.Unit" });
- AddParameter(ref dic, "MFC3.SetParameters", new string[8] { "MFC3.Flow.Set", "MFC3.Flow.Ramprate", "MFC3.Flow.SetUnit", "MFC3.Flow.RamprateUnit", "MFC3.Flow.Check", "MFC3.Flow.High", "MFC3.Flow.Low", "MFC3.Flow.Unit" });
- AddParameter(ref dic, "MFC4.SetParameters", new string[8] { "MFC4.Flow.Set", "MFC4.Flow.Ramprate", "MFC4.Flow.SetUnit", "MFC4.Flow.RamprateUnit", "MFC4.Flow.Check", "MFC4.Flow.High", "MFC4.Flow.Low", "MFC4.Flow.Unit" });
- AddParameter(ref dic, "MFC5.SetParameters", new string[8] { "MFC5.Flow.Set", "MFC5.Flow.Ramprate", "MFC5.Flow.SetUnit", "MFC5.Flow.RamprateUnit", "MFC5.Flow.Check", "MFC5.Flow.High", "MFC5.Flow.Low", "MFC5.Flow.Unit" });
- AddParameter(ref dic, "MFC6.SetParameters", new string[8] { "MFC6.Flow.Set", "MFC6.Flow.Ramprate", "MFC6.Flow.SetUnit", "MFC6.Flow.RamprateUnit", "MFC6.Flow.Check", "MFC6.Flow.High", "MFC6.Flow.Low", "MFC6.Flow.Unit" });
- AddParameter(ref dic, "MFC7.SetParameters", new string[8] { "MFC7.Flow.Set", "MFC7.Flow.Ramprate", "MFC7.Flow.SetUnit", "MFC7.Flow.RamprateUnit", "MFC7.Flow.Check", "MFC7.Flow.High", "MFC7.Flow.Low", "MFC7.Flow.Unit" });
- AddParameter(ref dic, "MFC8.SetParameters", new string[8] { "MFC8.Flow.Set", "MFC8.Flow.Ramprate", "MFC8.Flow.SetUnit", "MFC8.Flow.RamprateUnit", "MFC8.Flow.Check", "MFC8.Flow.High", "MFC8.Flow.Low", "MFC8.Flow.Unit" });
- AddParameter(ref dic, "MFC9.SetParameters", new string[8] { "MFC9.Flow.Set", "MFC9.Flow.Ramprate", "MFC9.Flow.SetUnit", "MFC9.Flow.RamprateUnit", "MFC9.Flow.Check", "MFC9.Flow.High", "MFC9.Flow.Low", "MFC9.Flow.Unit" });
- AddParameter(ref dic, "MFC10.SetParameters", new string[8] { "MFC10.Flow.Set", "MFC10.Flow.Ramprate", "MFC10.Flow.SetUnit", "MFC10.Flow.RamprateUnit", "MFC10.Flow.Check", "MFC10.Flow.High", "MFC10.Flow.Low", "MFC10.Flow.Unit" });
- AddParameter(ref dic, "MFC11.SetParameters", new string[8] { "MFC11.Flow.Set", "MFC11.Flow.Ramprate", "MFC11.Flow.SetUnit", "MFC11.Flow.RamprateUnit", "MFC11.Flow.Check", "MFC11.Flow.High", "MFC11.Flow.Low", "MFC11.Flow.Unit" });
- AddParameter(ref dic, "MFC12.SetParameters", new string[8] { "MFC12.Flow.Set", "MFC12.Flow.Ramprate", "MFC12.Flow.SetUnit", "MFC12.Flow.RamprateUnit", "MFC12.Flow.Check", "MFC12.Flow.High", "MFC12.Flow.Low", "MFC12.Flow.Unit" });
- AddParameter(ref dic, "MFC13.SetParameters", new string[8] { "MFC13.Flow.Set", "MFC13.Flow.Ramprate", "MFC13.Flow.SetUnit", "MFC13.Flow.RamprateUnit", "MFC13.Flow.Check", "MFC13.Flow.High", "MFC13.Flow.Low", "MFC13.Flow.Unit" });
- AddParameter(ref dic, "MFC14.SetParameters", new string[8] { "MFC14.Flow.Set", "MFC14.Flow.Ramprate", "MFC14.Flow.SetUnit", "MFC14.Flow.RamprateUnit", "MFC14.Flow.Check", "MFC14.Flow.High", "MFC14.Flow.Low", "MFC14.Flow.Unit" });
- AddParameter(ref dic, "MFC15.SetParameters", new string[8] { "MFC15.Flow.Set", "MFC15.Flow.Ramprate", "MFC15.Flow.SetUnit", "MFC15.Flow.RamprateUnit", "MFC15.Flow.Check", "MFC15.Flow.High", "MFC15.Flow.Low", "MFC15.Flow.Unit" });
- AddParameter(ref dic, "MFC16.SetParameters", new string[8] { "MFC16.Flow.Set", "MFC16.Flow.Ramprate", "MFC16.Flow.SetUnit", "MFC16.Flow.RamprateUnit", "MFC16.Flow.Check", "MFC16.Flow.High", "MFC16.Flow.Low", "MFC16.Flow.Unit" });
- AddParameter(ref dic, "MFC17.SetParameters", new string[8] { "MFC17.Flow.Set", "MFC17.Flow.Ramprate", "MFC17.Flow.SetUnit", "MFC17.Flow.RamprateUnit", "MFC17.Flow.Check", "MFC17.Flow.High", "MFC17.Flow.Low", "MFC17.Flow.Unit" });
- AddParameter(ref dic, "MFC31.SetParameters", new string[8] { "MFC31.Flow.Set", "MFC31.Flow.Ramprate", "MFC31.Flow.SetUnit", "MFC31.Flow.RamprateUnit", "MFC31.Flow.Check", "MFC31.Flow.High", "MFC31.Flow.Low", "MFC31.Flow.Unit" });
- AddParameter(ref dic, "MFC32.SetParameters", new string[8] { "MFC32.Flow.Set", "MFC32.Flow.Ramprate", "MFC32.Flow.SetUnit", "MFC32.Flow.RamprateUnit", "MFC32.Flow.Check", "MFC32.Flow.High", "MFC32.Flow.Low", "MFC32.Flow.Unit" });
- //AddParameter(ref dic, "MFC51.SetParameters", new string[8] { "MFC51.Flow.Set", "MFC51.Flow.Ramprate", "MFC51.Flow.SetUnit", "MFC51.Flow.RamprateUnit", "MFC51.Flow.Check", "MFC51.Flow.High", "MFC51.Flow.Low", "MFC51.Flow.Unit" });
- ReplaceControlName(ref dic, "MFM57Flow", "MFM57.SetParameters");
- ReplaceControlName(ref dic, "MFM1Flow", "MFM1.SetParameters");
- ReplaceControlName(ref dic, "MFM6Flow", "MFM6.SetParameters");
- ReplaceControlName(ref dic, "MFM7Flow", "MFM7.SetParameters");
- ReplaceControlName(ref dic, "MFM8Flow", "MFM8.SetParameters");
- ReplaceControlName(ref dic, "MFM9Flow", "MFM9.SetParameters");
- ReplaceControlName(ref dic, "MFM11Flow", "MFM11.SetParameters");
- ReplaceControlName(ref dic, "MFM12Flow", "MFM12.SetParameters");
- ReplaceControlName(ref dic, "MFM13Flow", "MFM13.SetParameters");
- ReplaceControlName(ref dic, "MFM16Flow", "MFM16.SetParameters");
- ReplaceControlName(ref dic, "ConditionCheck", "SetConditionCheck");
- ReplaceControlName(ref dic, "Command", "SetCommand");
- if (dic.ContainsKey("AlarmConditionTable"))
- ReplaceControlName(ref dic, "AlarmConditionTable", "SetAlarmConditionTable");
- //ReplaceControlName(ref dic, "Heater2", "ZoneU.SetParameters");
- //ReplaceControlName(ref dic, "Heater4", "ZoneCU.SetParameters");
- //ReplaceControlName(ref dic, "Heater6", "ZoneC.SetParameters");
- //ReplaceControlName(ref dic, "Heater8", "ZoneCL.SetParameters");
- //ReplaceControlName(ref dic, "Heater10", "ZoneL.SetParameters");
- var controlMode = dic["Temperature.ControlMode"];
- var correct = dic["Temperature.Correct"];
- var PID = dic["Temperature.PID"];
- //AddParameter(ref dic, "ZoneU.SetParameters", controlMode, correct, PID);
- //AddParameter(ref dic, "ZoneCU.SetParameters", controlMode, correct, PID);
- //AddParameter(ref dic, "ZoneC.SetParameters", controlMode, correct, PID);
- //AddParameter(ref dic, "ZoneCL.SetParameters", controlMode, correct, PID);
- //AddParameter(ref dic, "ZoneL.SetParameters", controlMode, correct, PID);
- AddParameter(ref dic, "HeaterU.SetParameters", new string[9] { "HeaterU.ZoneName", "HeaterU.Set", "HeaterU.SetUnit", "HeaterU.Ramprate", "HeaterU.RamprateUnit", "HeaterU.Check", "HeaterU.High", "HeaterU.Low", "HeaterU.Unit" });
- AddParameterValue(ref dic, "HeaterU.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });
- AddParameter(ref dic, "HeaterCU.SetParameters", new string[9] { "HeaterCU.ZoneName", "HeaterCU.Set", "HeaterCU.SetUnit", "HeaterCU.Ramprate", "HeaterCU.RamprateUnit", "HeaterCU.Check", "HeaterCU.High", "HeaterCU.Low", "HeaterCU.Unit" });
- AddParameterValue(ref dic, "HeaterCU.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });
- AddParameter(ref dic, "HeaterC.SetParameters", new string[9] { "HeaterC.ZoneName", "HeaterC.Set", "HeaterC.SetUnit", "HeaterC.Ramprate", "HeaterC.RamprateUnit", "HeaterC.Check", "HeaterC.High", "HeaterC.Low", "HeaterC.Unit" });
- AddParameterValue(ref dic, "HeaterC.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });
- AddParameter(ref dic, "HeaterCL.SetParameters", new string[9] { "HeaterCL.ZoneName", "HeaterCL.Set", "HeaterCL.SetUnit", "HeaterCL.Ramprate", "HeaterCL.RamprateUnit", "HeaterCL.Check", "HeaterCL.High", "HeaterCL.Low", "HeaterCL.Unit" });
- AddParameterValue(ref dic, "HeaterCL.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });
- AddParameter(ref dic, "HeaterL.SetParameters", new string[9] { "HeaterL.ZoneName", "HeaterL.Set", "HeaterL.SetUnit", "HeaterL.Ramprate", "HeaterL.RamprateUnit", "HeaterL.Check", "HeaterL.High", "HeaterL.Low", "HeaterL.Unit" });
- AddParameterValue(ref dic, "HeaterL.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });
- AddParameter(ref dic, "APC.SetParameters", new string[10] { "Press.Command", "Press.PID", "Press.Set", "Press.SlowVacSet", "Press.ValveAngleSet", "Press.IsWait", "Press.LowWait", "Press.HighWait", "Press.WaitUnit", "Press.WaitPress" });//APC
- AddParameterValue(ref dic, "APC.SetParameters", new string[2] { recipeHead.PressApcPID, dic["ValveAV71"] });//APC
- AddParameter(ref dic, "SetBoatMotion", new string[5] { "Loader.Command", "Loader.Speed1", "Loader.Speed2", "Loader.Speed3", "Loader.RPM" });//Boat
- List<string> auxCommands = new List<string>();
- for (int k = 1; k < 200; k++)
- {
- if (!dic.ContainsKey($"AUX.{k}.Set"))
- continue;
- auxCommands.Add($"{k},{dic[$"AUX.{k}.Set"]},{dic[$"AUX.{k}.Check"]},{dic[$"AUX.{k}.High"]},{dic[$"AUX.{k}.Low"]},{dic[$"AUX.{k}.CheckUnit"]}");
- dic.Remove($"AUX.{k}.Set");
- dic.Remove($"AUX.{k}.Check");
- dic.Remove($"AUX.{k}.High");
- dic.Remove($"AUX.{k}.Low");
- dic.Remove($"AUX.{k}.CheckUnit");
- }
- dic.Add("AUX.SetParameters", string.Join(";", auxCommands));
- //ReplaceControlName(ref dic, "RFSwitch", "RfPower.SetParameters");
- //AddParameter(ref dic, "RfPower.SetParameters", dic["RFSetpoint"], dic["ForwardPowerAlarmWatchTable"], dic["PrAlarmWatchTable"], dic["PIAlarmWatchTable"]);
- //ReplaceControlName(ref dic, "C1Setpoint", "RfMatch.SetParameters");
- //AddParameter(ref dic, "RfMatch.SetParameters", dic["C2Setpoint"], dic["C1AlarmWatchTable"], dic["C2AlarmWatchTable"], dic["VppAlarmWatchTable"]);
- AddValveParameter(ref dic, "SetValves", new string[159] {
- "ValveAV1",
- "ValveAV2",
- "ValveAV3",
- "ValveAV4",
- "ValveAV5",
- "ValveAV6",
- "ValveAV7",
- "ValveAV8",
- "ValveAV9",
- "ValveAV10",
- "ValveAV11",
- "ValveAV12",
- "ValveAV13",
- "ValveAV14",
- "ValveAV15",
- "ValveAV16",
- "ValveAV17",
- "ValveAV18",
- "ValveAV19",
- "ValveAV20",
- "ValveAV21",
- "ValveAV22",
- "ValveAV23",
- "ValveAV24",
- "ValveAV25",
- "ValveAV26",
- "ValveAV27",
- "ValveAV28",
- "ValveAV29",
- "ValveAV30",
- "ValveAV31",
- "ValveAV32",
- "ValveAV33",
- "ValveAV34",
- "ValveAV35",
- "ValveAV36",
- "ValveAV37",
- "ValveAV38",
- "ValveAV39",
- "ValveAV40",
- "ValveAV41",
- "ValveAV42",
- "ValveAV43",
- "ValveAV44",
- "ValveAV45",
- "ValveAV46",
- "ValveAV47",
- "ValveAV48",
- "ValveAV49",
- "ValveAV50",
- "ValveAV51",
- "ValveAV52",
- "ValveAV53",
- "ValveAV54",
- "ValveAV55",
- "ValveAV56",
- "ValveAV57",
- "ValveAV58",
- "ValveAV59",
- "ValveAV60",
- "ValveAV61",
- "ValveAV62",
- "ValveAV63",
- "ValveAV64",
- "ValveAV65",
- "ValveAV66",
- "ValveAV67",
- "ValveAV68",
- "ValveAV69",
- "ValveAV70",
- "ValveAV71",
- "ValveAV72",
- "ValveAV73",
- "ValveAV74",
- "ValveAV75",
- "ValveAV76",
- "ValveAV77",
- "ValveAV78",
- "ValveAV79",
- "ValveAV80",
- "ValveAV81",
- "ValveAV82",
- "ValveAV83",
- "ValveAV84",
- "ValveAV85",
- "ValveAV86",
- "ValveAV87",
- "ValveAV88",
- "ValveAV89",
- "ValveAV90",
- "ValveAV91",
- "ValveAV92",
- "ValveAV93",
- "ValveAV94",
- "ValveAV95",
- "ValveAV96",
- "ValveAV97",
- "ValveAV98",
- "ValveAV99",
- "ValveAV100",
- "ValveAV101",
- "ValveAV102",
- "ValveAV103",
- "ValveAV104",
- "ValveAV105",
- "ValveAV106",
- "ValveAV107",
- "ValveAV108",
- "ValveAV109",
- "ValveAV110",
- "ValveAV111",
- "ValveAV112",
- "ValveAV113",
- "ValveAV114",
- "ValveAV115",
- "ValveAV116",
- "ValveAV117",
- "ValveAV118",
- "ValveAV119",
- "ValveAV120",
- "ValveAV121",
- "ValveAV122",
- "ValveAV123",
- "ValveAV124",
- "ValveAV125",
- "ValveAV126",
- "ValveAV127",
- "ValveAV128",
- "ValveAV129",
- "ValveAV130",
- "ValveAV131",
- "ValveAV132",
- "ValveAV133",
- "ValveAV134",
- "ValveAV135",
- "ValveAV136",
- "DPR",
- "AGV",
- "AGV2",
- "MBP",
- "MBP1",
- "MBP2",
- "DP",
- "BWR",
- "F2Cln",
- "HFCln",
- "CEXH",
- "DEPO",
- "HTR1",
- "HTR2",
- "HTR3",
- "DP1",
- "DP2",
- "HMNT",
- "CMNT",
- "HREF",
- "CREF",
- "HZERO",
- "CZERO"
- });
- //dic.Remove("SetValves");
- //dic.Remove("HeaterU.SetParameters");
- //dic.Remove("HeaterCU.SetParameters");
- //dic.Remove("HeaterC.SetParameters");
- //dic.Remove("HeaterCL.SetParameters");
- //dic.Remove("HeaterL.SetParameters");
- //dic.Remove("MFC1.SetParameters");
- //dic.Remove("MFC2.SetParameters");
- //dic.Remove("MFC3.SetParameters");
- //dic.Remove("MFC4.SetParameters");
- //dic.Remove("MFC5.SetParameters");
- //dic.Remove("MFC6.SetParameters");
- //dic.Remove("MFC7.SetParameters");
- //dic.Remove("MFC8.SetParameters");
- //dic.Remove("MFC9.SetParameters");
- //dic.Remove("MFC10.SetParameters");
- //dic.Remove("MFC11.SetParameters");
- //dic.Remove("MFC12.SetParameters");
- //ReplaceControlNameForValve(ref dic, "ValveAV1");
- //ReplaceControlNameForValve(ref dic, "ValveAV2");
- //ReplaceControlNameForValve(ref dic, "ValveAV3");
- //ReplaceControlNameForValve(ref dic, "ValveAV4");
- //ReplaceControlNameForValve(ref dic, "ValveAV5");
- //ReplaceControlNameForValve(ref dic, "ValveAV6");
- //ReplaceControlNameForValve(ref dic, "ValveAV7");
- //ReplaceControlNameForValve(ref dic, "ValveAV8");
- //ReplaceControlNameForValve(ref dic, "ValveAV9");
- //ReplaceControlNameForValve(ref dic, "ValveAV10");
- //ReplaceControlNameForValve(ref dic, "ValveAV11");
- //ReplaceControlNameForValve(ref dic, "ValveAV12");
- //ReplaceControlNameForValve(ref dic, "ValveAV13");
- //ReplaceControlNameForValve(ref dic, "ValveAV14");
- //ReplaceControlNameForValve(ref dic, "ValveAV15");
- //ReplaceControlNameForValve(ref dic, "ValveAV16");
- //ReplaceControlNameForValve(ref dic, "ValveAV17");
- //ReplaceControlNameForValve(ref dic, "ValveAV18");
- //ReplaceControlNameForValve(ref dic, "ValveAV19");
- //ReplaceControlNameForValve(ref dic, "ValveAV20");
- //ReplaceControlNameForValve(ref dic, "ValveAV21");
- //ReplaceControlNameForValve(ref dic, "ValveAV22");
- //ReplaceControlNameForValve(ref dic, "ValveAV23");
- //ReplaceControlNameForValve(ref dic, "ValveAV24");
- //ReplaceControlNameForValve(ref dic, "ValveAV25");
- //ReplaceControlNameForValve(ref dic, "ValveAV26");
- //ReplaceControlNameForValve(ref dic, "ValveAV27");
- //ReplaceControlNameForValve(ref dic, "ValveAV28");
- //ReplaceControlNameForValve(ref dic, "ValveAV29");
- //ReplaceControlNameForValve(ref dic, "ValveAV30");
- //ReplaceControlNameForValve(ref dic, "ValveAV31");
- //ReplaceControlNameForValve(ref dic, "ValveAV32");
- //ReplaceControlNameForValve(ref dic, "ValveAV33");
- //ReplaceControlNameForValve(ref dic, "ValveAV34");
- //ReplaceControlNameForValve(ref dic, "ValveAV35");
- //ReplaceControlNameForValve(ref dic, "ValveAV36");
- //ReplaceControlNameForValve(ref dic, "ValveAV37");
- //ReplaceControlNameForValve(ref dic, "ValveAV38");
- //ReplaceControlNameForValve(ref dic, "ValveAV39");
- //ReplaceControlNameForValve(ref dic, "ValveAV52");
- ////ReplaceControlNameForValve(ref dic, "ValveAV54");
- ////ReplaceControlNameForValve(ref dic, "ValveAV56");
- ////ReplaceControlNameForValve(ref dic, "ValveAV57");
- ////ReplaceControlNameForValve(ref dic, "ValveAV58");
- ////ReplaceControlNameForValve(ref dic, "ValveAV59");
- //ReplaceControlNameForValve(ref dic, "ValveAV60");
- ////ReplaceControlNameForValve(ref dic, "ValveAV65");
- ////ReplaceControlNameForValve(ref dic, "ValveAV66");
- ////ReplaceControlNameForValve(ref dic, "ValveAV68");
- //ReplaceControlNameForValve(ref dic, "ValveAV71");
- //ReplaceControlNameForValve(ref dic, "ValveAV72");
- //ReplaceControlNameForValve(ref dic, "ValveAV73");
- //ReplaceControlNameForValve(ref dic, "ValveAV74");
- //ReplaceControlNameForValve(ref dic, "ValveAV75");
- //ReplaceControlNameForValve(ref dic, "ValveAV77");
- //ReplaceControlNameForValve(ref dic, "ValveAV81");
- //ReplaceControlNameForValve(ref dic, "ValveAV82");
- //ReplaceControlNameForValve(ref dic, "ValveAV83");
- //ReplaceControlNameForValve(ref dic, "ValveAV91");
- dic.Remove("StepNo");
- dic.Remove("Name");
- dic.Remove("EndBy");
- dic.Remove("Time");
- dic.Remove("ZAxisPosition");
- dic.Remove("ZAxisSpeed");
- dic.Remove("RotatePosition");
- dic.Remove("RotateSpeed");
- dic.Remove("RotateDirection");
- dic.Remove("Heater1");
- dic.Remove("Heater2");
- dic.Remove("Heater3");
- dic.Remove("Heater4");
- dic.Remove("Heater5");
- dic.Remove("ValveAV54");
- dic.Remove("ValveAV56");
- dic.Remove("ValveAV57");
- dic.Remove("ValveAV58");
- dic.Remove("ValveAV59");
- dic.Remove("ValveAV65");
- dic.Remove("ValveAV66");
- dic.Remove("ValveAV68");
- dic.Remove("ExternalOn");
- dic.Remove("ExternalOff");
- dic.Remove("ExternalSensor");
- dic.Remove("TempStabilize");
- dic.Remove("FinishAutoProfile");
- dic.Remove("ReachTempWait");
- dic.Remove("ReachTemp");
- dic.Remove("TempUpper");
- dic.Remove("TempLower");
- dic.Remove("ReachPressureWait");
- dic.Remove("ReachPressure");
- dic.Remove("PressureUpper");
- dic.Remove("PressureLower");
- dic.Remove("PressureStabilize");
- dic.Remove("External.Out1");
- dic.Remove("External.Out2");
- dic.Remove("External.Out3");
- dic.Remove("External.Out4");
- dic.Remove("External.Out5");
- dic.Remove("External.Out6");
- dic.Remove("RFSwitch");
- dic.Remove("RFSetpoint");
- dic.Remove("ForwardPowerAlarmWatchTable");
- dic.Remove("PrAlarmWatchTable");
- dic.Remove("PIAlarmWatchTable");
- dic.Remove("C1Setpoint");
- dic.Remove("C2Setpoint");
- dic.Remove("C1AlarmWatchTable");
- dic.Remove("C2AlarmWatchTable");
- dic.Remove("VppAlarmWatchTable");
- dic.Remove("VdcAlarmWatchTable");
- dic.Remove("AbortRecipeTableIndex");
- dic.Remove("Temperature.ControlMode");
- dic.Remove("Temperature.Correct");
- dic.Remove("Temperature.PID");
- dic.Remove("Temperature.Profile");
- dic.Remove("Temperature.Stabilize");
- dic.Remove("Temperature.TempReadyCond");
- dic.Remove("FilmThickFormula");
- dic.Remove("FilmThickCoefficientA");
- dic.Remove("FilmThickCoefficientB");
- dic.Remove("APC.SetPressure");
- dic.Remove("PressureSettingVG");
- dic.Remove("PressureSonserValue");
- dic.Remove("PressureValveAngle");
- dic.Remove("PressureAlarmTableNo");
- dic.Remove("EventSetting");
- dic.Remove("AlarmTableIndex");
- dic.Remove("AlarmDetails.1");
- dic.Remove("AlarmAction.1");
- dic.Remove("AlarmDetails.2");
- dic.Remove("AlarmAction.2");
- dic.Remove("AlarmDetails.3");
- dic.Remove("AlarmAction.3");
- dic.Remove("AlarmDetails.4");
- dic.Remove("AlarmAction.4");
- dic.Remove("AlarmDetails.5");
- dic.Remove("AlarmAction.5");
- dic.Remove("AlarmDetails.6");
- dic.Remove("AlarmAction.6");
- dic.Remove("AlarmDetails.7");
- dic.Remove("AlarmAction.7");
- dic.Remove("AlarmDetails.8");
- dic.Remove("AlarmAction.8");
- dic.Remove("AlarmDetails.9");
- dic.Remove("AlarmAction.9");
- dic.Remove("AlarmDetails.10");
- dic.Remove("AlarmAction.10");
- //List<string> mfcCheckInstall = new List<string>()
- //{
- // "MfcN1",
- // "MfcN2",
- // "MfcN3",
- // "MfcH1",
- // "MfcJ1",
- // "MfcXN1",
- //};
- //foreach(var mfc in mfcCheckInstall)
- //{
- // if (!SC.GetValue<bool>($"PM1.MFC.{mfc}.IsMFCInstalled"))
- // dic.Remove($"{mfc}.SetParameters");
- //}
- foreach (string key in dic.Keys)
- recipeStep.RecipeCommands.Add(key, dic[key]);
- }
- for (int i = 0; i < recipeData.Count; i++)
- {
- if (recipeData[i].IsJumpStep)
- {
- bool findJumpStep = false;
- for (int j = 0; j < recipeData.Count; j++)
- {
- if (recipeData[j].StepName == recipeData[i].JumpStepName)
- {
- recipeData[i].JumpStepNo = j;
- findJumpStep = true;
- break;
- }
- }
- if (!findJumpStep)
- {
- reason = $"Recipe file does not contains jump step {recipeData[i].JumpStepName}";
- return false;
- }
- }
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- reason = $"Recipe file content not valid, {recipeFile}, {ex.Message}";
- return false;
- }
- return true;
- }
- public static bool LayoutRecipeParse(string recipeFile, string module, out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out string reason)
- {
- reason = string.Empty;
- layoutRecipeDataNormal = new RecipeLayoutEntityNormal();
- layoutRecipeDataExpert = new RecipeLayoutEntityExpert();
- string content = RecipeFileManager.Instance.LoadRecipe($"{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\{SC.GetStringValue("System.Recipe.SupportedLayoutType")}", recipeFile, false);
- if (string.IsNullOrEmpty(content))
- {
- reason = $"{recipeFile} is not a valid recipe file";
- return false;
- }
- try
- {
- XmlDocument rcpDataDoc = new XmlDocument();
- rcpDataDoc.LoadXml(content);
- XmlNode nodeModule;
- nodeModule = rcpDataDoc.SelectSingleNode("/Aitex/TableRecipeData/Module/Step[@Name='Normal']");
- if (nodeModule == null)
- {
- //reason = "Recipe file does not contains step content for Normal";
- return false;
- }
- else
- {
- Type t = layoutRecipeDataNormal.GetType();
- foreach (FieldInfo pi in t.GetFields())
- {
- XmlElement stepNode = nodeModule as XmlElement;
- //遍历Step节点
- foreach (XmlAttribute att in stepNode.Attributes)
- {
- if (pi.Name == att.Name)
- {
- pi.SetValue(layoutRecipeDataNormal, att.Value);
- }
- }
- }
- }
- nodeModule = rcpDataDoc.SelectSingleNode("/Aitex/TableRecipeData/Module/Step[@Name='Expert']");
- if (nodeModule == null)
- {
- //reason = "Recipe file does not contains step content for Expert";
- return false;
- }
- else
- {
- XmlElement stepNode = nodeModule as XmlElement;
- string strName = "";
- //遍历Step节点
- foreach (XmlAttribute att in stepNode.Attributes)
- {
- if (att.Name != "Name")
- {
- layoutRecipeDataExpert.Items.Add(att.Value);
- }
- else
- {
- strName = att.Value;
- }
- }
- layoutRecipeDataExpert.Name = strName;
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- reason = $"Recipe file content not valid, {recipeFile}, {ex.Message}";
- return false;
- }
- return true;
- }
- private static void ReplaceControlName(ref Dictionary<string, string> dic, string from, string to)
- {
- if (dic.ContainsKey(from))
- {
- dic.Add(to, dic[from]);
- dic.Remove(from);
- }
- }
- private static void ReplaceControlName(ref Dictionary<string, string> dic, string from, string to1, string to2)
- {
- dic.Add(to1, dic[from]);
- dic.Add(to2, dic[from]);
- dic.Remove(from);
- }
- private static void ReplaceControlNameForValve(ref Dictionary<string, string> dic, string key)
- {
- switch (dic[key].ToLower())
- {
- case "open":
- dic[key] = "true";
- break;
- case "close":
- dic[key] = "false";
- break;
- case "continue":
- dic[key] = "Continue";
- break;
- }
- //dic[key] = dic[key].ToLower() == "open" ? "true" : "false";
- }
- private static void AddValveParameter(ref Dictionary<string, string> dic, string to, string[] param)
- {
- if (param != null && param.Length > 0)
- {
- foreach (var item in param)
- {
- if (!string.IsNullOrEmpty(item) && dic.ContainsKey(item))
- {
- if (!dic.ContainsKey(to))
- dic.Add(to, "");
- var set = "";
- switch (dic[item].ToLower())
- {
- case "open":
- set = "true";
- break;
- case "close":
- set = "false";
- break;
- case "continue":
- set = "Continue";
- break;
- }
- var value = $"{dic[to]};{item},{set}";
- dic[to] = string.IsNullOrEmpty(dic[to]) ? $"{item},{set}" : value;
- dic.Remove(item);
- }
- }
- }
- }
- private static void AddParameter(ref Dictionary<string, string> dic, string to, string from1, string from2, string from3, string from4 = null)
- {
- var value = $"{dic[to]};{from1};{from2};{from3}";
- if (!string.IsNullOrEmpty(from4))
- value = $"{value};{from4}";
- dic[to] = value;
- }
- private static void AddParameter(ref Dictionary<string, string> dic, string to, string[] param)
- {
- if (param != null && param.Length > 0)
- {
- foreach (var item in param)
- {
- if (!string.IsNullOrEmpty(item) && dic.ContainsKey(item))
- {
- if (!dic.ContainsKey(to))
- dic.Add(to, "");
- var value = $"{dic[to]};{dic[item]}";
- dic[to] = string.IsNullOrEmpty(dic[to]) ? dic[item] : value;
- dic.Remove(item);
- }
- }
- }
- }
- private static void AddParameterValue(ref Dictionary<string, string> dic, string to, string[] param)
- {
- if (!dic.ContainsKey(to))
- dic.Add(to, "");
- if (param != null && param.Length > 0)
- {
- foreach (var item in param)
- {
- var value = $"{dic[to]};{item}";
- dic[to] = string.IsNullOrEmpty(dic[to]) ? item : value;
- }
- }
- }
- }
- }
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