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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Reflection.Metadata;
- using System.Text;
- using System.Threading.Tasks;
- namespace Test;
- public class ProximaSystem
- {
- public Boat Boat { get; set; }
- }
- public class Boat
- {
- public float BoatTestCycledCount { get; set; }
- public bool IsError { get; set; }
- public bool IsOnline { get; set; }
- public float ShutterCycledCount { get; set; }
- }
- public class CarrierRobot
- {
- public float CurrentExtensionPosition { get; set; }
- public float CurrentThetaPosition { get; set; }
- public float CycleSwapCycledCount { get; set; }
- public bool IsCommandExecutionReady { get; set; }
- public bool IsControllerBatteryLow { get; set; }
- public bool IsError { get; set; }
- public bool IsErrorOccurred { get; set; }
- public bool IsManipulatorBatteryLow { get; set; }
- public bool IsOnline { get; set; }
- public bool IsPause { get; set; }
- public bool IsServoON { get; set; }
- public bool IsWaferPresenceOnBlade1 { get; set; }
- public float SwapCycledCount { get; set; }
- public bool TPStatus { get; set; }
- }
- public class WaferRobot
- {
- public bool CurrentArm1Position { get; set; }
- public bool CurrentArm2Position { get; set; }
- public bool CurrentExtensionPosition { get; set; }
- public bool CurrentThetaPosition { get; set; }
- public bool CurrentZPosition { get; set; }
- public bool IsCommandExecutionReady { get; set; }
- public bool IsControllerBatteryLow { get; set; }
- public bool IsErrorOccurred { get; set; }
- public bool IsManipulatorBatteryLow { get; set; }
- public bool IsOnline { get; set; }
- public bool IsPause { get; set; }
- public bool IsServoON { get; set; }
- public bool IsWaferPresenceOnBlade1 { get; set; }
- public bool IsWaferPresenceOnBlade2 { get; set; }
- public bool IsWaferPresenceOnBlade3 { get; set; }
- public bool IsWaferPresenceOnBlade4 { get; set; }
- public bool IsWaferPresenceOnBlade5 { get; set; }
- public bool SwapCycledCount { get; set; }
- public bool TPStatus { get; set; }
- }
- public class FIMS
- {
- public float FIMSCycledCount { get; set; }
- public bool IsError { get; set; }
- public bool IsOnline { get; set; }
- }
- public class LoadPort
- {
- public float CasstleType { get; set; }
- public float InfoPadCarrierIndex { get; set; }
- public float intAccessMode { get; set; }
- public float intAccessStatus { get; set; }
- public float intAssociationState { get; set; }
- public float intCarrierIDStatus { get; set; }
- public float intReserveState { get; set; }
- public float intSlotMapStatus { get; set; }
- public float intTransferState { get; set; }
- public bool IsAccessSwPressed { get; set; }
- public bool IsAutoDetectCarrierType { get; set; }
- public bool IsClamped { get; set; }
- public bool IsDocked { get; set; }
- public bool IsDoorOpen { get; set; }
- public bool IsError { get; set; }
- public bool IsFoupPresent { get; set; }
- public bool IsMapped { get; set; }
- public bool IsOnline { get; set; }
- public bool IsPlaced { get; set; }
- public bool IsPresent { get; set; }
- public bool IsVerifyPreDefineWaferCount { get; set; }
- public float PreDefineWaferCount { get; set; }
- }
- public class Schedule
- {
- public bool CoolingRemainTime { get; set; }
- public bool CoolingTime { get; set; }
- public bool CycledCount { get; set; }
- public bool CycledTotalWafer { get; set; }
- public bool CycledWafer { get; set; }
- public bool CycleSetPoint { get; set; }
- }
- public class Stocker
- {
- public bool CassetteHasWafer { get; set; }
- public bool FoupPresent { get; set; }
- public bool IsError { get; set; }
- public bool IsOnline { get; set; }
- public bool StatusAbnormal { get; set; }
- }
- public class Heater_
- {
- public float CascadeControlModeSV { get; set; }
- public float CascadePID_D { get; set; }
- public float CascadePID_I { get; set; }
- public float CascadePID_P { get; set; }
- public float CascadePV { get; set; }
- public float ControlMode { get; set; }
- public float DownRate { get; set; }
- public float HeaterControlModeSV { get; set; }
- public float HeaterPID_D { get; set; }
- public float HeaterPID_I { get; set; }
- public float HeaterPID_P { get; set; }
- public float HeaterPV { get; set; }
- public bool IsAutoManual { get; set; }
- public bool IsCascadeMode { get; set; }
- public bool IsCascadePVBreak { get; set; }
- public bool IsEnableIn { get; set; }
- public bool IsEnableOutput { get; set; }
- public bool IsHeaterPVBreak { get; set; }
- public bool IsSelect { get; set; }
- public float OverTemp { get; set; }
- public float TCOpenOffsetOffset { get; set; }
- public float TempFeedback { get; set; }
- public float TempOffset { get; set; }
- public float TempSetPoint { get; set; }
- public float UpRate { get; set; }
- public float WorkingOutput { get; set; }
- }
- public class System
- {
- public bool HasActiveAlarm { get; set; }
- public bool IsAlarm { get; set; }
- public bool IsAlarmConditionBuzzerOn { get; set; }
- public bool IsAutoRunning { get; set; }
- public bool IsBusy { get; set; }
- public bool IsIdle { get; set; }
- public bool IsInitialized { get; set; }
- public bool IsRecipeEditView { get; set; }
- public bool IsSpoolingEnable { get; set; }
- public bool SpoolingState { get; set; }
- }
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