|
|
@@ -5,22 +5,22 @@
|
|
|
VAR_GLOBAL
|
|
|
//**************HARDWARE***********************⬇
|
|
|
//PW
|
|
|
- VFD_RES AT%I*:BOOL; //
|
|
|
- VFD_MRS AT%I*:BOOL; //
|
|
|
- VFD_RT AT%I*:BOOL; //
|
|
|
- VFD_JOG AT%I*:BOOL; //
|
|
|
- VFD_RL AT%I*:BOOL; //
|
|
|
- VFD_RM AT%I*:BOOL; //
|
|
|
- VFD_RH AT%I*:BOOL; //
|
|
|
- VFD_STP AT%I*:BOOL; //
|
|
|
- VFD_RTR AT%I*:BOOL; //
|
|
|
- VFD_RTF AT%I*:BOOL; //
|
|
|
-
|
|
|
-
|
|
|
-
|
|
|
+ VFD_CS AT%I*:BOOL; // 初始状态下未分配
|
|
|
+ VFD_AU AT%I*:BOOL; // 端子4输入选择
|
|
|
+ VFD_RES AT%I*:BOOL; // 复位
|
|
|
+ VFD_MRS AT%I*:BOOL; // 输出停止
|
|
|
+ VFD_RT AT%I*:BOOL; // 第2功能选择
|
|
|
+ VFD_JOG AT%I*:BOOL; // JOG点动模式
|
|
|
+ VFD_RL AT%I*:BOOL; // 低速
|
|
|
+ VFD_RM AT%I*:BOOL; // 中速
|
|
|
+ VFD_RH AT%I*:BOOL; // 高速
|
|
|
+ VFD_STP AT%I*:BOOL; // 启动信号自我保持选择
|
|
|
+ VFD_STR AT%I*:BOOL; // 反转启动
|
|
|
+ VFD_STF AT%I*:BOOL; // 正转启动
|
|
|
|
|
|
|
|
|
|
|
|
+
|
|
|
Furnace_1_zone_heating_enable AT%I*:BOOL; //
|
|
|
Furnace_2_zone_heating_enable AT%I*:BOOL; //
|
|
|
Furnace_3_zone_heating_enable AT%I*:BOOL; //
|
|
|
@@ -28,18 +28,16 @@ VAR_GLOBAL
|
|
|
Furnace_5_zone_heating_enable AT%I*:BOOL; //
|
|
|
Furnace_6_zone_heating_enable AT%I*:BOOL; //
|
|
|
Furnace_7_zone_heating_enable AT%I*:BOOL; //
|
|
|
- AUTOREFILL_1_REQUEST_Or_VALVE_OPEN AT%I*:BOOL; //
|
|
|
- AUTOREFILL_2_REQUEST_Or_VALVE_OPEN AT%I*:BOOL; //
|
|
|
- HPM_valve_out_status AT%I*:BOOL; //
|
|
|
- Forline_heater_on AT%I*:BOOL; //
|
|
|
-
|
|
|
-
|
|
|
-
|
|
|
-
|
|
|
+ LDS1_REQUEST_Or_VALVE_OPEN AT%I*:BOOL; //
|
|
|
+
|
|
|
+ HPM_valve_out_status AT%I*:BOOL; //
|
|
|
+ Forline_heater_on AT%I*:BOOL; //
|
|
|
|
|
|
- Vaccum_Pump_Both_On AT%I*:BOOL; //
|
|
|
- Vaccum_Pump_AUC_On AT%I*:BOOL; //
|
|
|
- Vaccum_Pump_AGV_Open AT%I*:BOOL; //
|
|
|
+
|
|
|
+ Vaccum_Pump_Both_On AT%I*:BOOL; //
|
|
|
+ Vaccum_Pump_AUC_On AT%I*:BOOL; //
|
|
|
+ Vaccum_Pump_AGV_Open AT%I*:BOOL; //
|
|
|
+ LSD2_REQUEST_Or_VALVE_OPEN AT%I*:BOOL; //
|
|
|
|
|
|
|
|
|
//GAS
|
|
|
@@ -48,7 +46,7 @@ VAR_GLOBAL
|
|
|
|
|
|
|
|
|
//EXHAUST
|
|
|
- Cooling_Valve1 AT%I*:BOOL; // Q300.00
|
|
|
+ Cooling_Valve1 AT%I*:BOOL; // Q300.00
|
|
|
Cooling_Valve2 AT%I*:BOOL; // Q300.01
|
|
|
// Q300.02
|
|
|
// Q300.03
|
|
|
@@ -56,8 +54,8 @@ VAR_GLOBAL
|
|
|
// Q300.05
|
|
|
// Q300.06
|
|
|
// Q300.07
|
|
|
- AV71_AUTO_CLOSE AT%I*:BOOL; // Q300.08
|
|
|
- AV71_PUMP_ON AT%I*:BOOL; // Q300.09
|
|
|
+ AV71_AUTO_CLOSE AT%I*:BOOL; // Q300.08
|
|
|
+ AV71_PUMP_ON AT%I*:BOOL; // Q300.09
|
|
|
BALL_VALVE_OPEN_CLOSE AT%I*:BOOL; // Q300.10
|
|
|
|
|
|
//FB
|
|
|
@@ -142,18 +140,18 @@ VAR_GLOBAL
|
|
|
Robot_Spare15 AT%I*:BOOL; // Q404.14
|
|
|
|
|
|
//LA
|
|
|
- LA_internal_air_cycle_switch_1_open AT%I*:BOOL; // LA内循环切换1开 Q500.00
|
|
|
- LA_internal_air_cycle_switch_1_close AT%I*:BOOL; // LA内循环切换1关 Q500.01
|
|
|
- LA_internal_air_cycle_switch_2_open AT%I*:BOOL; // LA内循环切换2开 Q500.02
|
|
|
- LA_internal_air_cycle_switch_2_close AT%I*:BOOL; // LA内循环切换2关 Q500.03
|
|
|
+ LA_internal_air_cycle_switch_1_open AT%I*:BOOL; // LA内循环切换1关 Q500.00 SV532
|
|
|
+ LA_internal_air_cycle_switch_1_close AT%I*:BOOL; // LA内循环切换1开 Q500.01 SV532
|
|
|
+ LA_internal_air_cycle_switch_2_open AT%I*:BOOL; // LA内循环切换2开 Q500.02 SV531
|
|
|
+ LA_internal_air_cycle_switch_2_close AT%I*:BOOL; // LA内循环切换2关 Q500.03 SV531
|
|
|
R_axis_air_cylinder_extend_switch AT%I*:BOOL; // CAP气缸伸 Q500.04
|
|
|
R_axis_air_cylinder_retract_switch AT%I*:BOOL; // CAP气缸缩 Q500.05
|
|
|
O2_detector_switch_LA_POD AT%I*:BOOL; // O2分析切换LA_POD Q500.06
|
|
|
O2_detector_switch_POD1_POD2 AT%I*:BOOL; // O2分析切换POD1_POD2 Q500.07
|
|
|
- LA_internal_air_cycle_fan_1_switch AT%I*:BOOL; // 内循环风扇1开 Q500.08
|
|
|
- LA_internal_air_cycle_fan_2_switch AT%I*:BOOL; // 内循环风扇2开 Q500.09
|
|
|
- LA_internal_air_cycle_fan_3_switch AT%I*:BOOL; // 内循环风扇3开 Q500.10
|
|
|
- LA_internal_air_cycle_fan_4_switch AT%I*:BOOL; // 内循环风扇4开 Q500.11
|
|
|
+ LA_internal_air_cycle_fan_1_switch AT%I*:BOOL; // 内循环风扇1开 Q500.08 MS501
|
|
|
+ LA_internal_air_cycle_fan_2_switch AT%I*:BOOL; // 内循环风扇2开 Q500.09 MS502
|
|
|
+ LA_internal_air_cycle_fan_3_switch AT%I*:BOOL; // 内循环风扇3开 Q500.10 MS503
|
|
|
+ LA_internal_air_cycle_fan_4_switch AT%I*:BOOL; // 内循环风扇4开 Q500.11 MS504
|
|
|
Furnace_shutter_open AT%I*:BOOL; // SHUTTER开 Q500.12
|
|
|
Furnace_shutter_close AT%I*:BOOL; // SHUTTER关 Q500.13
|
|
|
// Q500.14
|
|
|
@@ -193,40 +191,436 @@ VAR_GLOBAL
|
|
|
|
|
|
|
|
|
|
|
|
+//WaterRobot
|
|
|
+ WaferRobotAlarmReset AT%I*:BOOL;
|
|
|
+ WaferRobotActionHold AT%I*:BOOL;
|
|
|
+ WaferRobotTPEnable AT%I*:BOOL;
|
|
|
+ WaferRobotPOD1Interlock AT%I*:BOOL;
|
|
|
+ WaferRobotPOD2Interlock AT%I*:BOOL;
|
|
|
+ WaferRobotBoatRotaryInterlock AT%I*:BOOL;
|
|
|
+ WaferRobotBoatBottomInterlock AT%I*:BOOL;
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
//**************HARDWARE***********************⬆
|
|
|
|
|
|
//SystemData
|
|
|
-//FIMS
|
|
|
- Sys_PLCReset_b AT%I*: BOOL ;
|
|
|
- Sys_BlowerSwitch_b AT%I*: BOOL ;
|
|
|
- Sys_LightCurtainBypass_b AT%I*: BOOL ;
|
|
|
- Sys_FFUAlarmReset_b AT%I*: BOOL ;
|
|
|
- Sys_MINI8AlarmReset_b AT%I*: BOOL ;
|
|
|
- Sys_VGUnitConversion_b AT%I*: BOOL ;
|
|
|
- Sys_F2_CleanSwitch_b AT%I*: BOOL ;
|
|
|
- Sys_APC_DATA_READ_SYSCONFIG AT%I*: BOOL ;
|
|
|
- Sys_APC_DATA_WRITE_SYSCONFIG AT%I*: BOOL ;
|
|
|
- Sys_APC_DATA_READ_CUSCONFIG AT%I*: BOOL ;
|
|
|
- Sys_APC_DATA_WRITE_CUSCONFIG AT%I*: BOOL ;
|
|
|
- Sys_HTR1_Temp_alarm AT%I*: BOOL ;
|
|
|
- Sys_HTR2_Temp_alarm AT%I*: BOOL ;
|
|
|
- Sys_Abnormal_seal_cap_HTR_temp AT%I*: BOOL ;
|
|
|
- Sys_Abnormal_furnace_heater_temp AT%I*: BOOL ;
|
|
|
- Sys_HTR3_Temp_alarm AT%I*: BOOL ;
|
|
|
- Sys_HTR1_ON AT%I*: BOOL ;
|
|
|
- Sys_HTR2_ON AT%I*: BOOL ;
|
|
|
- Sys_HTR3_ON AT%I*: BOOL ;
|
|
|
- Sys_HTR1_SW_ON AT%I*: BOOL ;
|
|
|
- Sys_HTR2_SW_ON AT%I*: BOOL ;
|
|
|
- Sys_HTR3_SW_ON AT%I*: BOOL ;
|
|
|
- Sys_HF_CleanSwitch AT%I*: BOOL ;
|
|
|
- Sys_DEPO_SW AT%I*: BOOL ;
|
|
|
- Sys_LA_O2_Check_First_EN AT%I*: BOOL ;
|
|
|
- Sys_FIMS1_O2_Check_EN AT%I*: BOOL ;
|
|
|
- Sys_FIMS2_O2_Check_EN AT%I*: BOOL ;
|
|
|
- Sys_N2_PURGE_PROCESS AT%I*: BOOL ;
|
|
|
+
|
|
|
+ Sys_PLCReset_b AT%I*:BOOL ;
|
|
|
+ Sys_BlowerSwitch_b AT%I*:BOOL ;
|
|
|
+ Sys_LightCurtainBypass_b AT%I*:BOOL ;
|
|
|
+ Sys_FFUAlarmReset_b AT%I*:BOOL ;
|
|
|
+ Sys_MINI8AlarmReset_b AT%I*:BOOL ;
|
|
|
+ Sys_VGUnitConversion_b AT%I*:BOOL ;
|
|
|
+ Sys_F2_CleanSwitch_b AT%I*:BOOL ;
|
|
|
+ Sys_APC_DATA_READ_SYSCONFIG AT%I*:BOOL ;
|
|
|
+ Sys_APC_DATA_WRITE_SYSCONFIG AT%I*:BOOL ;
|
|
|
+ Sys_APC_DATA_READ_CUSCONFIG AT%I*:BOOL ;
|
|
|
+ Sys_APC_DATA_WRITE_CUSCONFIG AT%I*:BOOL ;
|
|
|
+ Sys_HTR1_Temp_alarm AT%I*:BOOL ;
|
|
|
+ Sys_HTR2_Temp_alarm AT%I*:BOOL ;
|
|
|
+ Sys_Abnormal_seal_cap_HTR_temp AT%I*:BOOL ;
|
|
|
+ Sys_Abnormal_furnace_heater_temp AT%I*:BOOL ;
|
|
|
+ Sys_HTR3_Temp_alarm AT%I*:BOOL ;
|
|
|
+ Sys_HTR1_ON AT%I*:BOOL ;
|
|
|
+ Sys_HTR2_ON AT%I*:BOOL ;
|
|
|
+ Sys_HTR3_ON AT%I*:BOOL ;
|
|
|
+ Sys_HTR1_SW_ON AT%I*:BOOL ;
|
|
|
+ Sys_HTR2_SW_ON AT%I*:BOOL ;
|
|
|
+ Sys_HTR3_SW_ON AT%I*:BOOL ;
|
|
|
+ Sys_HF_CleanSwitch AT%I*:BOOL ;
|
|
|
+ Sys_DEPO_SW AT%I*:BOOL ;
|
|
|
+
|
|
|
+
|
|
|
+//FIMS
|
|
|
+ Sys_LA_O2_Check_First_EN AT%I*:BOOL ;
|
|
|
+ Sys_FIMS1_O2_Check_EN AT%I*:BOOL ;
|
|
|
+ Sys_FIMS2_O2_Check_EN AT%I*:BOOL ;
|
|
|
+ Sys_N2_PURGE_PROCESS AT%I*:BOOL ;
|
|
|
+
|
|
|
+ FIMS1LoadCommand ,
|
|
|
+ FIMS1UnloadCommand ,
|
|
|
+ FIMS1HomeCommand ,
|
|
|
+ FIMS1AlarmReset ,
|
|
|
+ FIMS1Stop ,
|
|
|
+ FIMS1AutoManualCommand ,
|
|
|
+ FIMS1Dock ,
|
|
|
+ FIMS1Undock ,
|
|
|
+ FIMS1Seal ,
|
|
|
+ FIMS1Release ,
|
|
|
+ FIMS1DoorClose ,
|
|
|
+ FIMS1DoorOpen ,
|
|
|
+ FIMS1Latch1On ,
|
|
|
+ FIMS1Latch2On ,
|
|
|
+ FIMS1Latch1Off ,
|
|
|
+ FIMS1Latch2Off ,
|
|
|
+ FIMS1CollisionAvoidanceDown ,
|
|
|
+ FIMS1CollisionAvoidanceUp ,
|
|
|
+ FIMS1N2PurgeBypass ,
|
|
|
+ FIMS1N2PurgeValveOpen ,
|
|
|
+ FIMS1N2PurgeValveClose ,
|
|
|
+ FIMS1VaccumValveOpen ,
|
|
|
+ FIMS1VaccumValveClose AT%I*:BOOL;
|
|
|
|
|
|
+ FIMS2LoadCommand ,
|
|
|
+ FIMS2UnloadCommand ,
|
|
|
+ FIMS2HomeCommand ,
|
|
|
+ FIMS2AlarmReset ,
|
|
|
+ FIMS2Stop ,
|
|
|
+ FIMS2AutoManualCommand ,
|
|
|
+ FIMS2Dock ,
|
|
|
+ FIMS2Undock ,
|
|
|
+ FIMS2Seal ,
|
|
|
+ FIMS2Release ,
|
|
|
+ FIMS2DoorClose ,
|
|
|
+ FIMS2DoorOpen ,
|
|
|
+ FIMS2Latch1On ,
|
|
|
+ FIMS2Latch2On ,
|
|
|
+ FIMS2Latch1Off ,
|
|
|
+ FIMS2Latch2Off ,
|
|
|
+ FIMS2CollisionAvoidanceDown ,
|
|
|
+ FIMS2CollisionAvoidanceUp ,
|
|
|
+ FIMS2N2PurgeBypass ,
|
|
|
+ FIMS2N2PurgeValveOpen ,
|
|
|
+ FIMS2N2PurgeValveClose ,
|
|
|
+ FIMS2VaccumValveOpen ,
|
|
|
+ FIMS2VaccumValveClose AT%I*:BOOL;
|
|
|
|
|
|
+//BUFFER
|
|
|
+ ServoOnBufferAxis AT%I*:BOOL;
|
|
|
+ StopBufferAxis AT%I*:BOOL;
|
|
|
+ MoveCommandBufferAxis AT%I*:BOOL;
|
|
|
+ ResetBufferAxis AT%I*:BOOL;
|
|
|
+//Boat
|
|
|
+ StopBoatZAxis AT%I*:BOOL;
|
|
|
+ MoveEnableBoatZAxis AT%I*:BOOL;
|
|
|
+ ResetBoatZAxis AT%I*:BOOL;
|
|
|
+ ServoOnBoatZAxis AT%I*:BOOL;
|
|
|
+
|
|
|
+//CAPS
|
|
|
+ BoatRAxisStop AT%I*:BOOL;
|
|
|
+ BoatRAxisHomeCmd AT%I*:BOOL;
|
|
|
+ BoatRAxisRotationCmd AT%I*:BOOL;
|
|
|
+ BoatRAxisAlarmReset AT%I*:BOOL;
|
|
|
+ BoatRAxisRotationForward AT%I*:BOOL;
|
|
|
+ BoatRAxisRotationReverse AT%I*:BOOL;
|
|
|
+ GetBoatAllow AT%I*:BOOL;
|
|
|
+ GetBoatStart AT%I*:BOOL;
|
|
|
+ GetBoatFinish AT%I*:BOOL;
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+ //PMC to PLC
|
|
|
+ DP_sw ,
|
|
|
+ BWR_sw ,
|
|
|
+ DPR1_sw ,
|
|
|
+ DPR2_sw ,
|
|
|
+ WAT_R_sw ,
|
|
|
+ WAT_F_sw ,
|
|
|
+ HTR1_sw ,
|
|
|
+ HTR2_sw ,
|
|
|
+ HTR3_sw ,
|
|
|
+ HTR4_sw ,
|
|
|
+ HTR5_sw ,
|
|
|
+ AGV_sw ,
|
|
|
+ DEPO_sw ,
|
|
|
+ CLN_sw ,
|
|
|
+ T_MNT_sw ,
|
|
|
+ T_REF_sw ,
|
|
|
+ Pump1_ECO_sw ,
|
|
|
+ SP1_sw ,
|
|
|
+ PZ_sw ,
|
|
|
+ P_CONT_sw ,
|
|
|
+ DGZERO_sw ,
|
|
|
+ C_EXH_sw ,
|
|
|
+ F2_CLN_sw ,
|
|
|
+ F_N_sw
|
|
|
+ AT%I*:BOOL;
|
|
|
+
|
|
|
+ Furnace_Temp_abnormal AT%I*:BOOL; // Furnace temp over 1000℃
|
|
|
+ LSC_Ht_temp_abnormal AT%I*:BOOL; // LSC heater temperature beyond preset value
|
|
|
+ GB_Ht_temp_abnormal AT%I*:BOOL; // Gas line heater temperature beyond preset value
|
|
|
+ EXH_Ht_temp_abnormal AT%I*:BOOL; // Exhaust line heater temperature beyond preset value
|
|
|
+ CLN_Temp_abnormal AT%I*:BOOL; // furnace&exhaust line heater temperature beyond preset value
|
|
|
+
|
|
|
+ AV1 ,
|
|
|
+ AV2 ,
|
|
|
+ AV3 ,
|
|
|
+ AV4 ,
|
|
|
+ AV5 ,
|
|
|
+ AV6 ,
|
|
|
+ AV7 ,
|
|
|
+ AV8 ,
|
|
|
+ AV9 ,
|
|
|
+ AV10 ,
|
|
|
+ AV11 ,
|
|
|
+ AV12 ,
|
|
|
+ AV13 ,
|
|
|
+ AV14 ,
|
|
|
+ AV15 ,
|
|
|
+ AV16 ,
|
|
|
+ AV17 ,
|
|
|
+ AV18 ,
|
|
|
+ AV19 ,
|
|
|
+ AV20 ,
|
|
|
+ AV21 ,
|
|
|
+ AV22 ,
|
|
|
+ AV23 ,
|
|
|
+ AV24 ,
|
|
|
+ AV25 ,
|
|
|
+ AV26 ,
|
|
|
+ AV27 ,
|
|
|
+ AV28 ,
|
|
|
+ AV29 ,
|
|
|
+ AV30 ,
|
|
|
+ AV31 ,
|
|
|
+ AV32 ,
|
|
|
+ AV33 ,
|
|
|
+ AV34 ,
|
|
|
+ AV35 ,
|
|
|
+ AV36 ,
|
|
|
+ AV37 ,
|
|
|
+ AV38 ,
|
|
|
+ AV39 ,
|
|
|
+ AV40 ,
|
|
|
+ AV41 ,
|
|
|
+ AV42 ,
|
|
|
+ AV43 ,
|
|
|
+ AV44 ,
|
|
|
+ AV45 ,
|
|
|
+ AV46 ,
|
|
|
+ AV47 ,
|
|
|
+ AV48 ,
|
|
|
+ AV49 ,
|
|
|
+ AV50 ,
|
|
|
+ AV51 ,
|
|
|
+ AV52 ,
|
|
|
+ AV53 ,
|
|
|
+ AV54 ,
|
|
|
+ AV55 ,
|
|
|
+ AV56 ,
|
|
|
+ AV57 ,
|
|
|
+ AV58 ,
|
|
|
+ AV59 ,
|
|
|
+ AV60 ,
|
|
|
+ AV61 ,
|
|
|
+ AV62 ,
|
|
|
+ AV63 ,
|
|
|
+ AV64 ,
|
|
|
+ AV65Open,
|
|
|
+ AV65Close,
|
|
|
+ AV66 ,
|
|
|
+ AV67 ,
|
|
|
+ AV68 ,
|
|
|
+ AV69 ,
|
|
|
+ AV70 ,
|
|
|
+ AV71 ,
|
|
|
+ AV72 ,
|
|
|
+ AV73 ,
|
|
|
+ AV74 ,
|
|
|
+ AV75 ,
|
|
|
+ AV76 ,
|
|
|
+ AV77 ,
|
|
|
+ AV78 ,
|
|
|
+ AV79Open,
|
|
|
+ AV79Close,
|
|
|
+ AV80 ,
|
|
|
+ AV81 ,
|
|
|
+ AV82 ,
|
|
|
+ AV83 ,
|
|
|
+ AV84 ,
|
|
|
+ AV85 ,
|
|
|
+ AV86 ,
|
|
|
+ AV87 ,
|
|
|
+ AV88 ,
|
|
|
+ AV89 ,
|
|
|
+ AV90 ,
|
|
|
+ AV91Open,
|
|
|
+ AV91Close,
|
|
|
+ AV92 ,
|
|
|
+ AV93 ,
|
|
|
+ AV94 ,
|
|
|
+ AV95 ,
|
|
|
+ AV96 ,
|
|
|
+ AV97 ,
|
|
|
+ AV98 ,
|
|
|
+ AV99 ,
|
|
|
+ AV100 ,
|
|
|
+ AV101 ,
|
|
|
+ AV102 ,
|
|
|
+ AV103 ,
|
|
|
+ AV104 ,
|
|
|
+ AV105 ,
|
|
|
+ AV106 ,
|
|
|
+ AV107 ,
|
|
|
+ AV108 ,
|
|
|
+ AV109 ,
|
|
|
+ AV110 ,
|
|
|
+ AV111 ,
|
|
|
+ AV112 ,
|
|
|
+ AV113 ,
|
|
|
+ AV114 ,
|
|
|
+ AV115 ,
|
|
|
+ AV116 ,
|
|
|
+ AV117 ,
|
|
|
+ AV118 ,
|
|
|
+ AV119 ,
|
|
|
+ AV120 ,
|
|
|
+ AV121 ,
|
|
|
+ AV122 ,
|
|
|
+ AV123 ,
|
|
|
+ AV124 ,
|
|
|
+ AV125 ,
|
|
|
+ AV126 ,
|
|
|
+ AV127 ,
|
|
|
+ AV128 ,
|
|
|
+ AV129 ,
|
|
|
+ AV130 ,
|
|
|
+ AV131 ,
|
|
|
+ AV132 ,
|
|
|
+ AV133 ,
|
|
|
+ AV134 ,
|
|
|
+ AV135 ,
|
|
|
+ AV136 ,
|
|
|
+ AV137 ,
|
|
|
+ AV138 ,
|
|
|
+ AV139 ,
|
|
|
+ AV140 ,
|
|
|
+ AV141 ,
|
|
|
+ AV142 ,
|
|
|
+ AV143 ,
|
|
|
+ AV144 ,
|
|
|
+ AV145 ,
|
|
|
+ AV146 ,
|
|
|
+ AV147 ,
|
|
|
+ AV148 ,
|
|
|
+ AV149 ,
|
|
|
+ AV150 ,
|
|
|
+ AV151 ,
|
|
|
+ AV152 ,
|
|
|
+ AV153 ,
|
|
|
+ AV154 ,
|
|
|
+ AV155 ,
|
|
|
+ AV156 ,
|
|
|
+ AV157 ,
|
|
|
+ AV158 ,
|
|
|
+ AV159 ,
|
|
|
+ AV160 ,
|
|
|
+ AV161 ,
|
|
|
+ AV162 ,
|
|
|
+ AV163 ,
|
|
|
+ AV164 ,
|
|
|
+ AV165 ,
|
|
|
+ AV166 ,
|
|
|
+ AV167 ,
|
|
|
+ AV168 ,
|
|
|
+ AV169 ,
|
|
|
+ AV170 ,
|
|
|
+ AV171 ,
|
|
|
+ AV172 ,
|
|
|
+ AV173 ,
|
|
|
+ AV174 ,
|
|
|
+ AV175 ,
|
|
|
+ AV176 ,
|
|
|
+ AV177 ,
|
|
|
+ AV178 ,
|
|
|
+ AV179 ,
|
|
|
+ AV180 ,
|
|
|
+ AV181 ,
|
|
|
+ AV182 ,
|
|
|
+ AV183 ,
|
|
|
+ AV184 ,
|
|
|
+ AV185 ,
|
|
|
+ AV186 ,
|
|
|
+ AV187 ,
|
|
|
+ AV188 ,
|
|
|
+ AV189 ,
|
|
|
+ AV190 ,
|
|
|
+ AV191 ,
|
|
|
+ AV192 ,
|
|
|
+ AV193 ,
|
|
|
+ AV194 ,
|
|
|
+ AV195 ,
|
|
|
+ AV196 ,
|
|
|
+ AV197 ,
|
|
|
+ AV198 ,
|
|
|
+ AV199 ,
|
|
|
+ AV200 ,
|
|
|
+ AV201 ,
|
|
|
+ AV202Open,
|
|
|
+ AV202Close,
|
|
|
+ AV203 ,
|
|
|
+ AV204 ,
|
|
|
+ AV205 ,
|
|
|
+ AV206 ,
|
|
|
+ AV207 ,
|
|
|
+ AV208 ,
|
|
|
+ AV209 ,
|
|
|
+ AV210 ,
|
|
|
+ AV211 ,
|
|
|
+ AV212 ,
|
|
|
+ AV213 ,
|
|
|
+ AV214 ,
|
|
|
+ AV215 ,
|
|
|
+ AV216 ,
|
|
|
+ AV217 ,
|
|
|
+ AV218 ,
|
|
|
+ AV219 ,
|
|
|
+ AV220 ,
|
|
|
+ AV221 ,
|
|
|
+ AV222 ,
|
|
|
+ AV223 ,
|
|
|
+ AV224 ,
|
|
|
+ AV225 ,
|
|
|
+ AV226 ,
|
|
|
+ AV227 ,
|
|
|
+ AV228 ,
|
|
|
+ AV229 ,
|
|
|
+ AV230 ,
|
|
|
+ AV231 ,
|
|
|
+ AV232 ,
|
|
|
+ AV233 ,
|
|
|
+ AV234 ,
|
|
|
+ AV235 ,
|
|
|
+ AV236 ,
|
|
|
+ AV237 ,
|
|
|
+ AV238 ,
|
|
|
+ AV239 ,
|
|
|
+ AV240 ,
|
|
|
+ AV241 ,
|
|
|
+ AV242 ,
|
|
|
+ AV243 ,
|
|
|
+ AV244 ,
|
|
|
+ AV245 ,
|
|
|
+ AV246 ,
|
|
|
+ AV247 ,
|
|
|
+ AV248 ,
|
|
|
+ AV249 ,
|
|
|
+ AV250
|
|
|
+ AT%I*:BOOL;
|
|
|
+
|
|
|
+
|
|
|
+//AxisDataFalg
|
|
|
+DataLoad AT%I*:BOOL;
|
|
|
+DataSend AT%I*:BOOL;
|
|
|
|
|
|
END_VAR]]></Declaration>
|
|
|
</GVL>
|