TIN_PMC/TIN001-PLC/TIN001/PMC/GVLs/TO PMC/NDO.TcGVL

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <GVL Name="NDO" Id="{6c6dc7c8-3eec-4abf-b759-d31e388627fe}">
    <Declaration><![CDATA[{attribute 'qualified_only'}
VAR_GLOBAL
//**************HARDWARE***********************⬇	
//PW
	VFD_CS							 AT%I*:BOOL;	// 初始状态下未分配
	VFD_AU							 AT%I*:BOOL;	// 端子4输入选择
	VFD_RES							 AT%I*:BOOL;	// 复位
	VFD_MRS							 AT%I*:BOOL;	// 输出停止
	VFD_RT							 AT%I*:BOOL;	// 第2功能选择
	VFD_JOG							 AT%I*:BOOL;	// JOG点动模式
	VFD_RL							 AT%I*:BOOL;	// 低速
	VFD_RM							 AT%I*:BOOL;	// 中速
	VFD_RH							 AT%I*:BOOL;	// 高速
	VFD_STP							 AT%I*:BOOL;	// 启动信号自我保持选择
	VFD_STR							 AT%I*:BOOL;	// 反转启动
	VFD_STF							 AT%I*:BOOL;	// 正转启动
			
			
			
					
	Furnace_1_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_2_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_3_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_4_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_5_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_6_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_7_zone_heating_enable	 AT%I*:BOOL;	//
	LDS1_REQUEST_Or_VALVE_OPEN		 AT%I*:BOOL;	//
	
	HPM_valve_out_status			 AT%I*:BOOL;	//
	Forline_heater_on				 AT%I*:BOOL;	//
			
		
	Vaccum_Pump_Both_On				 AT%I*:BOOL;	//
	Vaccum_Pump_AUC_On				 AT%I*:BOOL;	//
	Vaccum_Pump_AGV_Open			 AT%I*:BOOL;	//
	LSD2_REQUEST_Or_VALVE_OPEN		 AT%I*:BOOL;	//
	

//GAS
	OX_PUMP_ON AT%I*:BOOL;

	

//EXHAUST
	Cooling_Valve1			 AT%I*:BOOL;	//	Q300.00
	Cooling_Valve2	 AT%I*:BOOL;	//	Q300.01
			//	Q300.02
			//	Q300.03
			//	Q300.04
			//	Q300.05
			//	Q300.06
			//	Q300.07
	AV71_AUTO_CLOSE			 AT%I*:BOOL;	//	Q300.08
	AV71_PUMP_ON			 AT%I*:BOOL;	//	Q300.09
	BALL_VALVE_OPEN_CLOSE	 AT%I*:BOOL;	//	Q300.10

//FB
	No1_left_Clamp_Val	 AT%I*:BOOL;	//	Q400.00
	Spare	 AT%I*:BOOL;	//	Q400.01
	No1_Right_Clamp_Val	 AT%I*:BOOL;	//	Q400.02
					//	Q400.03
	No2_left_Val_Extended	 AT%I*:BOOL;	//	Q400.04
	No2_left_Val_Back	 AT%I*:BOOL;	//	Q400.05
	No2_left_Flow_Open	 AT%I*:BOOL;	//	Q400.06
	No2_Right_Val_Extended	 AT%I*:BOOL;	//	Q400.07
	No2_Right_Val_Back	 AT%I*:BOOL;	//	Q400.08
	No2_Right_Flow_Open	 AT%I*:BOOL;	//	Q400.09
	No3_left_Val_Extended	 AT%I*:BOOL;	//	Q400.10
	No3_left_Val_Back	 AT%I*:BOOL;	//	Q400.11
	No3_left_Flow_Open	 AT%I*:BOOL;	//	Q400.12
	No3_Right_Val_Extended	 AT%I*:BOOL;	//	Q400.13
	No3_Right_Val_Back	 AT%I*:BOOL;	//	Q400.14
	No3_Right_Flow_Open	 AT%I*:BOOL;	//	Q400.15
	Tri_Color_Light_Red	 AT%I*:BOOL;	//	Q401.00
	Tri_Color_Light_YE	 AT%I*:BOOL;	//	Q401.01
	Tri_Color_Light_GN	 AT%I*:BOOL;	//	Q401.02
	Tri_Color_Light_BZ	 AT%I*:BOOL;	//	Q401.03
	Door_Up	 AT%I*:BOOL;	//	Q401.04
	DOOr_Down	 AT%I*:BOOL;	//	Q401.05
	Stop_Light	 AT%I*:BOOL;	//	Q401.06
	Pause_Light	 AT%I*:BOOL;	//	Q401.07
	Plugging_Light	 AT%I*:BOOL;	//	Q401.08
	Left_Error_Rst_Light	 AT%I*:BOOL;	//	Q401.09
	Right_Error_Rst_Light	 AT%I*:BOOL;	//	Q401.10
									//	Q401.11
									//	Q401.12
									//	Q401.13
									//	Q401.14
	Left_FOUP_Detect	 AT%I*:BOOL;	//	Q401.15
	Left_FOUP_InPos	 AT%I*:BOOL;	//	Q402.00
	Left_FOUP_Load	 AT%I*:BOOL;	//	Q402.01
	Left_FOUP_Unload	 AT%I*:BOOL;	//	Q402.02
	Left_FOUP_Manual	 AT%I*:BOOL;	//	Q402.03
	Right_FOUP_Detect	 AT%I*:BOOL;	//	Q402.04
	Right_FOUP_InPos	 AT%I*:BOOL;	//	Q402.05
	Right_FOUP_Load	 AT%I*:BOOL;	//	Q402.06
	Right_FOUP_Unload	 AT%I*:BOOL;	//	Q402.07
	Right_FOUP_Manual	 AT%I*:BOOL;	//	Q402.08
								//	Q402.09
								//	Q402.10
								//	Q402.11
								//	Q402.12
								//	Q402.13
								//	Q402.14
	Robot_loadport_1_E84_REQ	 AT%I*:BOOL;	//	Q402.15
	Robot_loadport_1_E84_UREQ	 AT%I*:BOOL;	//	Q403.00
	Robot_loadport_1_E84_ready	 AT%I*:BOOL;	//	Q403.01
	Robot_loadport_1_E84_HO_AVBL	 AT%I*:BOOL;	//	Q403.02
	Robot_loadport_1_E84_ES	 AT%I*:BOOL;	//	Q403.03
	Robot_loadport_2_E84_REQ	 AT%I*:BOOL;	//	Q403.04
	Robot_loadport_2_E84_UREQ	 AT%I*:BOOL;	//	Q403.05
	Robot_loadport_2_E84_ready	 AT%I*:BOOL;	//	Q403.06
	Robot_loadport_2_E84_HO_AVBL	 AT%I*:BOOL;	//	Q403.07
	Robot_loadport2_E84_ES	 AT%I*:BOOL;	//	Q403.08
	Robot_loadport_2_FOUP_detect	 AT%I*:BOOL;	//	Q403.09
	Robot_loadport_3_FOUP_detect	 AT%I*:BOOL;	//	Q403.10
	Robot_loadport_4_FOUP_detect	 AT%I*:BOOL;	//	Q403.11
	Robot_Extend_Buffer_1_FOUP_detect	 AT%I*:BOOL;	//	Q403.12
	Robot_Extend_Buffer_2_FOUP_detect	 AT%I*:BOOL;	//	Q403.13
	Robot_POD_1_FOUP_detect	 AT%I*:BOOL;	//	Q403.14
	Robot_POD_2_FOUP_detect	 AT%I*:BOOL;	//	Q403.15
	Robot_Spare1	 AT%I*:BOOL;	//	Q404.00
	Robot_Spare2	 AT%I*:BOOL;	//	Q404.01
	Robot_Spare3	 AT%I*:BOOL;	//	Q404.02
	Robot_Spare4	 AT%I*:BOOL;	//	Q404.03
	Robot_Spare5	 AT%I*:BOOL;	//	Q404.04
	Robot_Spare6	 AT%I*:BOOL;	//	Q404.05
	Robot_Spare7	 AT%I*:BOOL;	//	Q404.06
	Robot_Spare8	 AT%I*:BOOL;	//	Q404.07
	Robot_Spare9	 AT%I*:BOOL;	//	Q404.08
	Robot_Spare10	 AT%I*:BOOL;	//	Q404.09
	Robot_Spare11	 AT%I*:BOOL;	//	Q404.10
	Robot_Spare12	 AT%I*:BOOL;	//	Q404.11
	Robot_Spare13	 AT%I*:BOOL;	//	Q404.12
	Robot_Spare14	 AT%I*:BOOL;	//	Q404.13
	Robot_Spare15	 AT%I*:BOOL;	//	Q404.14
	
//LA	
	LA_internal_air_cycle_switch_1_open	 AT%I*:BOOL;	//	LA内循环切换1关	Q500.00 SV532 
	LA_internal_air_cycle_switch_1_close	 AT%I*:BOOL;	//	LA内循环切换1开	Q500.01 SV532
	LA_internal_air_cycle_switch_2_open	 AT%I*:BOOL;	//	LA内循环切换2开		Q500.02 SV531
	LA_internal_air_cycle_switch_2_close	 AT%I*:BOOL;	//	LA内循环切换2关		Q500.03 SV531
	R_axis_air_cylinder_extend_switch	 AT%I*:BOOL;	//	CAP气缸伸		Q500.04
	R_axis_air_cylinder_retract_switch	 AT%I*:BOOL;	//	CAP气缸缩		Q500.05
	O2_detector_switch_LA_POD	 AT%I*:BOOL;	//	O2分析切换LA_POD		Q500.06
	O2_detector_switch_POD1_POD2	 AT%I*:BOOL;	//	O2分析切换POD1_POD2		Q500.07
	LA_internal_air_cycle_fan_1_switch	 AT%I*:BOOL;	//	内循环风扇1开		Q500.08 MS501
	LA_internal_air_cycle_fan_2_switch	 AT%I*:BOOL;	//	内循环风扇2开		Q500.09 MS502
	LA_internal_air_cycle_fan_3_switch	 AT%I*:BOOL;	//	内循环风扇3开		Q500.10 MS503
	LA_internal_air_cycle_fan_4_switch	 AT%I*:BOOL;	//	内循环风扇4开		Q500.11 MS504
	Furnace_shutter_open		 AT%I*:BOOL;	//	SHUTTER开		Q500.12
	Furnace_shutter_close		 AT%I*:BOOL;	//	SHUTTER关		Q500.13
										//			Q500.14
										//			Q500.15
	POD1_exhaust_switch_open	 AT%I*:BOOL;	//	POD1排气开		Q501.00
	POD1_exhaust_switch_close	 AT%I*:BOOL;	//	POD1排气关		Q501.01
	POD2_exhaust_switch_open	 AT%I*:BOOL;	//	POD2排气开		Q501.02
	POD2_exhaust_switch_close	 AT%I*:BOOL;	//	POD2排气关		Q501.03
										//			Q501.04
										//			Q501.05
										//			Q501.06
										//			Q501.07
										//			Q501.08
										//			Q501.09
										//			Q501.10
										//			Q501.11
										//			Q501.12
										//			Q501.13
										//			Q501.14
										//			Q501.15
	Buffer_A1_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup1_1充气阀		Q502.00
	Buffer_B1_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup1_2充气阀		Q502.01
	Buffer_C1_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup1_3充气阀		Q502.02
	Buffer_D1_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup1_4充气阀		Q502.03
	Buffer_A2_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup2_1充气阀		Q502.04
	Buffer_B2_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup2_2充气阀		Q502.05
	Buffer_C2_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup2_3充气阀		Q502.06
	Buffer_D2_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup2_4充气阀		Q502.07
	Buffer_A3_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup3_1充气阀		Q502.08
	Buffer_B3_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup3_2充气阀		Q502.09
	Buffer_C3_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup3_3充气阀		Q502.10
	Buffer_D3_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup3_4充气阀		Q502.11
	Buffer_A4_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup4_1充气阀		Q502.12
	Buffer_B4_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup4_2充气阀		Q502.13
	Buffer_C4_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup4_3充气阀		Q502.14
	Buffer_D4_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup4_4充气阀		Q502.15

	
	
//WaterRobot
	WaferRobotAlarmReset AT%I*:BOOL;
	WaferRobotActionHold  AT%I*:BOOL; 
	WaferRobotTPEnable AT%I*:BOOL;
	WaferRobotPOD1Interlock AT%I*:BOOL;
	WaferRobotPOD2Interlock AT%I*:BOOL;
	WaferRobotBoatRotaryInterlock AT%I*:BOOL;
	WaferRobotBoatBottomInterlock AT%I*:BOOL;









//**************HARDWARE***********************⬆	
	
//SystemData

	Sys_PLCReset_b						 AT%I*:BOOL	;
	Sys_BlowerSwitch_b					 AT%I*:BOOL	;
	Sys_LightCurtainBypass_b			 AT%I*:BOOL	;
	Sys_FFUAlarmReset_b					 AT%I*:BOOL	;
	Sys_MINI8AlarmReset_b				 AT%I*:BOOL	;
	Sys_VGUnitConversion_b				 AT%I*:BOOL	;
	Sys_F2_CleanSwitch_b				 AT%I*:BOOL	;
	Sys_APC_DATA_READ_SYSCONFIG			 AT%I*:BOOL	;
	Sys_APC_DATA_WRITE_SYSCONFIG		 AT%I*:BOOL	;
	Sys_APC_DATA_READ_CUSCONFIG			 AT%I*:BOOL	;
	Sys_APC_DATA_WRITE_CUSCONFIG		 AT%I*:BOOL	;
	Sys_HTR1_Temp_alarm					 AT%I*:BOOL	;
	Sys_HTR2_Temp_alarm					 AT%I*:BOOL	;
	Sys_Abnormal_seal_cap_HTR_temp		 AT%I*:BOOL	;
	Sys_Abnormal_furnace_heater_temp	 AT%I*:BOOL	;
	Sys_HTR3_Temp_alarm					 AT%I*:BOOL	;
	Sys_HTR1_ON							 AT%I*:BOOL	;
	Sys_HTR2_ON							 AT%I*:BOOL	;
	Sys_HTR3_ON							 AT%I*:BOOL	;
	Sys_HTR1_SW_ON						 AT%I*:BOOL	;
	Sys_HTR2_SW_ON						 AT%I*:BOOL	;
	Sys_HTR3_SW_ON						 AT%I*:BOOL	;
	Sys_HF_CleanSwitch					 AT%I*:BOOL	;
	Sys_DEPO_SW							 AT%I*:BOOL	;
	

//FIMS	
	Sys_LA_O2_Check_First_EN			 AT%I*:BOOL	;
	Sys_FIMS1_O2_Check_EN				 AT%I*:BOOL	;
	Sys_FIMS2_O2_Check_EN				 AT%I*:BOOL	;
	Sys_N2_PURGE_PROCESS				 AT%I*:BOOL	;
	
	FIMS1LoadCommand	,
	FIMS1UnloadCommand	,	
	FIMS1HomeCommand	,
	FIMS1AlarmReset		,
	FIMS1Stop	,
	FIMS1AutoManualCommand	,
	FIMS1Dock	,
	FIMS1Undock	,
	FIMS1Seal	,	
	FIMS1Release	,
	FIMS1DoorClose	,
	FIMS1DoorOpen	,
	FIMS1Latch1On	,
	FIMS1Latch2On	,
	FIMS1Latch1Off	,
	FIMS1Latch2Off	,
	FIMS1CollisionAvoidanceDown	,
	FIMS1CollisionAvoidanceUp	,
	FIMS1N2PurgeBypass			,
	FIMS1N2PurgeValveOpen		,
	FIMS1N2PurgeValveClose		,
	FIMS1VaccumValveOpen		,
	FIMS1VaccumValveClose		 AT%I*:BOOL;
	
	FIMS2LoadCommand	,		
	FIMS2UnloadCommand	,		
	FIMS2HomeCommand	,		
	FIMS2AlarmReset		,	
	FIMS2Stop	,
	FIMS2AutoManualCommand	,		
	FIMS2Dock	,		
	FIMS2Undock	,		
	FIMS2Seal	,		
	FIMS2Release	,		
	FIMS2DoorClose	,		
	FIMS2DoorOpen	,		
	FIMS2Latch1On	,		
	FIMS2Latch2On	,		
	FIMS2Latch1Off	,		
	FIMS2Latch2Off	,		
	FIMS2CollisionAvoidanceDown	,		
	FIMS2CollisionAvoidanceUp	,	
	FIMS2N2PurgeBypass			,
	FIMS2N2PurgeValveOpen		,	
	FIMS2N2PurgeValveClose		,	
	FIMS2VaccumValveOpen		,	
	FIMS2VaccumValveClose		 AT%I*:BOOL;	

//BUFFER
	ServoOnBufferAxis			 AT%I*:BOOL;
	StopBufferAxis				 AT%I*:BOOL;
	MoveCommandBufferAxis		 AT%I*:BOOL;
	ResetBufferAxis				 AT%I*:BOOL;
//Boat
	StopBoatZAxis				 AT%I*:BOOL;
	MoveEnableBoatZAxis			 AT%I*:BOOL;
	ResetBoatZAxis				 AT%I*:BOOL;
	ServoOnBoatZAxis			 AT%I*:BOOL;
	
//CAPS
	BoatRAxisStop				 AT%I*:BOOL;
	BoatRAxisHomeCmd			 AT%I*:BOOL;
	BoatRAxisRotationCmd		 AT%I*:BOOL;
	BoatRAxisAlarmReset			 AT%I*:BOOL;
	BoatRAxisRotationForward	 AT%I*:BOOL;
	BoatRAxisRotationReverse	 AT%I*:BOOL;
	GetBoatAllow AT%I*:BOOL;
	GetBoatStart AT%I*:BOOL;
	GetBoatFinish AT%I*:BOOL;
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	//PMC to PLC
	DP_sw						,
    BWR_sw						,
    DPR1_sw						,
	DPR2_sw						,
    WAT_R_sw					,
    WAT_F_sw					,
    HTR1_sw						,
    HTR2_sw						,
    HTR3_sw						,
    HTR4_sw						,
    HTR5_sw						,
    AGV_sw						,
    DEPO_sw						,
    CLN_sw						,
	T_MNT_sw					,
    T_REF_sw					,
    Pump1_ECO_sw				,
	SP1_sw						,
    PZ_sw						,
    P_CONT_sw					,
    DGZERO_sw					,
    C_EXH_sw					,
    F2_CLN_sw					,
    F_N_sw						
	 AT%I*:BOOL;
	
	Furnace_Temp_abnormal		 AT%I*:BOOL;	// Furnace temp over 1000℃
	LSC_Ht_temp_abnormal		 AT%I*:BOOL;	// LSC heater temperature beyond preset value
	GB_Ht_temp_abnormal			 AT%I*:BOOL; // Gas line heater temperature beyond preset value
	EXH_Ht_temp_abnormal		 AT%I*:BOOL;	// Exhaust line heater temperature beyond preset value
	CLN_Temp_abnormal			 AT%I*:BOOL; // furnace&exhaust line heater temperature beyond preset value
	
	AV1		,
	AV2		,
	AV3		,
	AV4		,
	AV5		,
	AV6		,
	AV7		,
	AV8		,
	AV9		,
	AV10	,
	AV11	,
	AV12	,
	AV13	,
	AV14	,
	AV15	,
	AV16	,
	AV17	,
	AV18	,
	AV19	,
	AV20	,
	AV21	,
	AV22	,
	AV23	,
	AV24	,
	AV25	,
	AV26	,
	AV27	,
	AV28	,
	AV29	,
	AV30	,
	AV31	,
	AV32	,
	AV33	,
	AV34	,
	AV35	,
	AV36	,
	AV37	,
	AV38	,
	AV39	,
	AV40	,
	AV41	,
	AV42	,
	AV43	,
	AV44	,
	AV45	,
	AV46	,
	AV47	,
	AV48	,
	AV49	,
	AV50	,
	AV51	,
	AV52	,
	AV53	,
	AV54	,
	AV55	,
	AV56	,
	AV57	,
	AV58	,
	AV59	,
	AV60	,
	AV61	,
	AV62	,
	AV63	,
	AV64	,
	AV65Open,
	AV65Close,
	AV66	,
	AV67	,
	AV68	,
	AV69	,
	AV70	,
	AV71	,
	AV72	,
	AV73	,
	AV74	,
	AV75	,
	AV76	,
	AV77	,
	AV78	,
	AV79Open,
	AV79Close,
	AV80	,
	AV81	,
	AV82	,
	AV83	,
	AV84	,
	AV85	,
	AV86	,
	AV87	,
	AV88	,
	AV89	,
	AV90	,
	AV91Open,
	AV91Close,
	AV92	,
	AV93	,
	AV94	,
	AV95	,
	AV96	,
	AV97	,
	AV98	,
	AV99	,
	AV100	,
	AV101	,
	AV102	,
	AV103	,
	AV104	,
	AV105	,
	AV106	,
	AV107	,
	AV108	,
	AV109	,
	AV110	,
	AV111	,
	AV112	,
	AV113	,
	AV114	,
	AV115	,
	AV116	,
	AV117	,
	AV118	,
	AV119	,
	AV120	,
	AV121	,
	AV122	,
	AV123	,
	AV124	,
	AV125	,
	AV126	,
	AV127	,
	AV128	,
	AV129	,
	AV130	,
	AV131	,
	AV132	,
	AV133	,
	AV134	,
	AV135	,
	AV136	,
	AV137	,
	AV138	,
	AV139	,
	AV140	,
	AV141	,
	AV142	,
	AV143	,
	AV144	,
	AV145	,
	AV146	,
	AV147	,
	AV148	,
	AV149	,
	AV150	,
	AV151	,
	AV152	,
	AV153	,
	AV154	,
	AV155	,
	AV156	,
	AV157	,
	AV158	,
	AV159	,
	AV160	,
	AV161	,
	AV162	,
	AV163	,
	AV164	,
	AV165	,
	AV166	,
	AV167	,
	AV168	,
	AV169	,
	AV170	,
	AV171	,
	AV172	,
	AV173	,
	AV174	,
	AV175	,
	AV176	,
	AV177	,
	AV178	,
	AV179	,
	AV180	,
	AV181	,
	AV182	,
	AV183	,
	AV184	,
	AV185	,
	AV186	,
	AV187	,
	AV188	,
	AV189	,
	AV190	,
	AV191	,
	AV192	,
	AV193	,
	AV194	,
	AV195	,
	AV196	,
	AV197	,
	AV198	,
	AV199	,
	AV200	,
	AV201	,
	AV202Open,
	AV202Close,
	AV203	,
	AV204	,
	AV205	,
	AV206	,
	AV207	,
	AV208	,
	AV209	,
	AV210	,
	AV211	,
	AV212	,
	AV213	,
	AV214	,
	AV215	,
	AV216	,
	AV217	,
	AV218	,
	AV219	,
	AV220	,
	AV221	,
	AV222	,
	AV223	,
	AV224	,
	AV225	,
	AV226	,
	AV227	,
	AV228	,
	AV229	,
	AV230	,
	AV231	,
	AV232	,
	AV233	,
	AV234	,
	AV235	,
	AV236	,
	AV237	,
	AV238	,
	AV239	,
	AV240	,
	AV241	,
	AV242	,
	AV243	,
	AV244	,
	AV245	,
	AV246	,
	AV247	,
	AV248	,
	AV249	,
	AV250	
	 AT%I*:BOOL;	
	
	
//AxisDataFalg
DataLoad AT%I*:BOOL;
DataSend AT%I*:BOOL;

END_VAR]]></Declaration>
  </GVL>
</TcPlcObject>