ELK/Furnace/FurnaceRT/Config/IO/NTP/DeviceModelPM.xml

<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Furnace" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"  >	
	<IoLPs classType="FurnaceRT.Devices.IoLP" assembly="FurnaceRT">
		<IoLP id="LP1" display="LP1" schematicId="LP1" unit=""
				diLeftClamp="DI_LP1FOUPLeftClamp"
				diRightClamp="DI_LP1FOUPRightClamp"
				diLeftRelease="DI_LP1FOUPLeftRelease"
				diRightRelease="DI_LP1FOUPRightRelease"
				diInPosition1="DI_LP1FOUPInPosition1"
				diInPosition2="DI_LP1FOUPInPosition2"
				diInPosition3="DI_LP1FOUPInPosition3"
				diDetect="DI_LP1FOUPDetect"
			  
				doClamp="DO_LP1FOUPClamp"
				doRelease="DO_LP1FOUPRelease"
				doPresence="DO_LP1FOUPPresence"
				doPlacement="DO_LP1FOUPPlacement"
				doLoad="DO_LP1FOUPLoad"
				doUnload="DO_LP1FOUPUnload"
				doManual="DO_LP1FOUPManual"
          
				scRootPath="LoadPort"
				/>
		<IoLP id="LP2" display="LP2" schematicId="LP2" unit=""
				diLeftClamp="DI_LP2FOUPLeftClamp"
				diRightClamp="DI_LP2FOUPRightClamp"
				diLeftRelease="DI_LP2FOUPLeftRelease"
				diRightRelease="DI_LP2FOUPRightRelease"
				diInPosition1="DI_LP2FOUPInPosition1"
				diInPosition2="DI_LP2FOUPInPosition2"
				diInPosition3="DI_LP2FOUPInPosition3"
				diDetect="DI_LP2FOUPDetect"
			  
				doClamp="DO_LP2FOUPClamp"
				doRelease="DO_LP2FOUPRelease"
				doPresence="DO_LP2FOUPPresence"
				doPlacement="DO_LP2FOUPPlacement"
				doLoad="DO_LP2FOUPLoad"
				doUnload="DO_LP2FOUPUnload"
				doManual="DO_LP2FOUPManual"
          
				scRootPath="LoadPort"
				/>

		<IoLP id="LP3" display="LP3" schematicId="LP3" unit=""
				diLeftClamp=""
				diRightClamp=""
				diLeftRelease=""
				diRightRelease=""
				diInPosition1="DI_LP3FOUPInPosition1"
				diInPosition2="DI_LP3FOUPInPosition2"
				diInPosition3="DI_LP3FOUPInPosition3"
				diDetect="DI_LP3FOUPDetect"
			  
				doClamp=""
				doRelease=""
				doPresence=""
				doPlacement=""
				doLoad=""
				doUnload=""
				doManual=""
          
				scRootPath="LoadPort"
				/>

		<IoLP id="LP4" display="LP4" schematicId="LP4" unit=""
				diLeftClamp=""
				diRightClamp=""
				diLeftRelease=""
				diRightRelease=""
				diInPosition1="DI_LP4FOUPInPosition1"
				diInPosition2="DI_LP4FOUPInPosition2"
				diInPosition3="DI_LP4FOUPInPosition3"
				diDetect="DI_LP4FOUPDetect"
			  
				doClamp=""
				doRelease=""
				doPresence=""
				doPlacement=""
				doLoad=""
				doUnload=""
				doManual=""
          
				scRootPath="LoadPort"
				/>

	</IoLPs>

	<IoFIMSs classType="FurnaceRT.Devices.IoFIMS" assembly="FurnaceRT">
		<IoFIMS id="FIMS1" display="FIMS1" schematicId="FIMS1" unit=""
				diLoadComplete="DI_FIMS1LoadComplete"
				diUnloadComplete="DI_FIMS1UnloadComplete"
				diHomeComplete="DI_FIMS1UnloadComplete"
				diRunning="DI_FIMS1Running"
				diAutoManual="DI_FIMS1AutoManualMode"
				diDock="DI_FIMS1FOUPDock"
				diUndock="DI_FIMS1FOUPUndock"
				diExist="DI_FIMS1FOUPExist"
				diSeal="DI_FIMS1Seal"
				diRelease="DI_FIMS1Release"
				diDoorOpen="DI_FIMS1DoorClosed"
				diDoorClose="DI_FIMS1DoorOpened"
				diLatchOn="DI_FIMS1LatchOn"
				diLatchOff="DI_FIMS1LatchOff"
				diCollisionAvoidanceDown="DI_FIMS1CollisionAvoidanceDown"
				diCollisionAvoidanceUp="DI_FIMS1CollisionAvoidanceUp"
				diN2PurgeValveClosed="DI_FIMS1N2PurgeValveClosed"
				diN2PurgeValveOpened="DI_FIMS1N2PurgeValveOpened"
				diFOUPVacuumSuckingOK="DI_FIMS1FOUPVacuumSuckingOK"
				diFOUPVacuumSuckingAlarm="DI_FIMS1FOUPVacuumSuckingAlarm"
				diWaferOnRobot="DI_FIMS1WaferOnRobot"
				diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
				diWaferRobotEX2AxisHomePosition="DI_WaferRobotEX2AxisHomePosition"
				
				doLoad="DO_FIMS1LoadCommand"
				doUnload="DO_FIMS1UnloadCommand"
				doHome="DO_FIMS1UnloadCommand"
				doAlarmReset="DO_FIMS1AlarmReset"
				doAutoManual="DO_FIMS1AutoManualCommand"
				doDock="DO_FIMS1Dock"
				doUndock="DO_FIMS1Undock"
				doSeal="DO_FIMS1Seal"
				doRelease="DO_FIMS1Release"
			    doDoorOpen="DO_FIMS1DoorClose"
			    doDoorClose="DO_FIMS1DoorOpen"
			    doLatch1On="DO_FIMS1Latch1On"
			    doLatch2On="DO_FIMS1Latch2On"
			    doLatch1Off="DO_FIMS1Latch1Off"
			    doLatch2Off="DO_FIMS1Latch2Off"
			    doCollisionAvoidanceDown="DO_FIMS1CollisionAvoidanceDown"
			    doCollisionAvoidanceUp="DO_FIMS1CollisionAvoidanceUp"
			    doN2PurgeValveOpen="DO_FIMS1N2PurgeValveOpen"
			    doN2PurgeValveClose="DO_FIMS1N2PurgeValveClose"
			    doVaccumValveOpen="DO_FIMS1VaccumValveOpen"
			    doVaccumValveClose="DO_FIMS1VaccumValveClose"
				
				scRootPath="FIMS"
				/>
		<IoFIMS id="FIMS2" display="FIMS2" schematicId="FIMS2" unit=""
				diLoadComplete="DI_FIMS2LoadComplete"
				diUnloadComplete="DI_FIMS2UnloadComplete"
				diHomeComplete="DI_FIMS2UnloadComplete"
				diRunning="DI_FIMS2Running"
				diAutoManual="DI_FIMS2AutoManualMode"
				diDock="DI_FIMS2FOUPDock"
				diUndock="DI_FIMS2FOUPUndock"
				diExist="DI_FIMS2FOUPExist"
				diSeal="DI_FIMS2Seal"
				diRelease="DI_FIMS2Release"
				diDoorOpen="DI_FIMS2DoorClosed"
				diDoorClose="DI_FIMS2DoorOpened"
				diLatchOn="DI_FIMS2LatchOn"
				diLatchOff="DI_FIMS2LatchOff"
				diCollisionAvoidanceDown="DI_FIMS2CollisionAvoidanceDown"
				diCollisionAvoidanceUp="DI_FIMS2CollisionAvoidanceUp"
				diN2PurgeValveClosed="DI_FIMS2N2PurgeValveClosed"
				diN2PurgeValveOpened="DI_FIMS2N2PurgeValveOpened"
				diFOUPVacuumSuckingOK="DI_FIMS2FOUPVacuumSuckingOK"
				diFOUPVacuumSuckingAlarm="DI_FIMS2FOUPVacuumSuckingAlarm"
				diWaferOnRobot="DI_FIMS2WaferOnRobot"
				diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
				diWaferRobotEX2AxisHomePosition="DI_WaferRobotEX2AxisHomePosition"
				
				doLoad="DO_FIMS2LoadCommand"
				doUnload="DO_FIMS2UnloadCommand"
				doHome="DO_FIMS2UnloadCommand"
				doAlarmReset="DO_FIMS2AlarmReset"
				doAutoManual="DO_FIMS2AutoManualCommand"
				doDock="DO_FIMS2Dock"
				doUndock="DO_FIMS2Undock"
				doSeal="DO_FIMS2Seal"
				doRelease="DO_FIMS2Release"
			    doDoorOpen="DO_FIMS2DoorClose"
			    doDoorClose="DO_FIMS2DoorOpen"
			    doLatch1On="DO_FIMS2Latch1On"
			    doLatch2On="DO_FIMS2Latch2On"
			    doLatch1Off="DO_FIMS2Latch1Off"
			    doLatch2Off="DO_FIMS2Latch2Off"
			    doCollisionAvoidanceDown="DO_FIMS2CollisionAvoidanceDown"
			    doCollisionAvoidanceUp="DO_FIMS2CollisionAvoidanceUp"
			    doN2PurgeValveOpen="DO_FIMS2N2PurgeValveOpen"
			    doN2PurgeValveClose="DO_FIMS2N2PurgeValveClose"
			    doVaccumValveOpen="DO_FIMS2VaccumValveOpen"
			    doVaccumValveClose="DO_FIMS2VaccumValveClose"
				
				scRootPath="FIMS"
				/>
	</IoFIMSs>
	<IoDoors classType="FurnaceRT.Devices.IoDoor" assembly="FurnaceRT">
		<IoDoor id="AGVDoor" display="AGVDoor" schematicId="AGVDoor" unit=""
				diOpen="DI_AGVDoorOpened"
				diClose="DI_AGVDoorClosed"
					         
			    doOpen="DO_AGVDoorSwitchOpen"
			    doClose="DO_AGVDoorSwitchClose"
					
				scRootPath=""
	    />
	</IoDoors>
	<IoShutters classType="FurnaceRT.Devices.IoShutter" assembly="FurnaceRT">
		<IoShutter id="Shutter" display="Shutter" schematicId="Shutter" unit=""
				diOpen="DI_FurnaceShutterOpened"
				diClose="DI_FurnaceShutterClosed"
					         
			    doOpen="DO_ShutterOpen"
			    doClose="DO_ShutterClose"
		        scRootPath=""
		/>
	</IoShutters>
	<IoBufferMotors assembly="FurnaceRT" classType="FurnaceRT.Devices.IoBufferMotor">
		<IoBufferMotor id="BufferServo" display="" schematicId="" unit="" module=""
					aiRealPosition="AI_BufferMotorPositionFb"
					aiRealSpeed="AI_BufferMotorSpeedFb"
					aiRealTorque="AI_BufferMotorTorqueFb"
				    aiTargetPosFb="AI_BufferTargetPosFb"
				    aiDriverErrorCode="AI_BufferDriverErrCode"
				    aiMotionErrorCode="AI_BufferMotionErrID"
					 
					aoTargetPosition="AO_TargetPositionBufferAxis"
					aoSpeed="AO_BufferRotationSpeed"
					aoAcc="AO_BufferRotationAcc"
					aoDec="AO_BufferRotationDec"
					 
					diMoving="DI_MvAbsBusyBufferAxis"
				    diSensor1="DI_L1Position"
				    diSensor2="DI_L2Position"
				    diSensor3="DI_L3Position"
				    diSensor4="DI_L4Position"
				    diSensor5="DI_H1Position"
				    diSensor6="DI_H2Position"
				    diSensor7="DI_H3Position"
				    diSensor8="DI_H4Position"
				    diWarning="DI_BufferWarningBufferAxis"
				    diAlarm="DI_BufferFaultBufferAxis"
					diPositionA1="DI_BufferInPositionA1"
					diPositionB1="DI_BufferInPositionB1"
					diPositionC1="DI_BufferInPositionC1"
					diPositionD1="DI_BufferInPositionD1"
					diPositionA2="DI_BufferInPositionA2"
					diPositionB2="DI_BufferInPositionB2"
					diPositionC2="DI_BufferInPositionC2"
					diPositionD2="DI_BufferInPositionD2"
					diPositionA3="DI_BufferInPositionA3"
					diPositionB3="DI_BufferInPositionB3"
					diPositionC3="DI_BufferInPositionC3"
					diPositionD3="DI_BufferInPositionD3"
					diPositionA4="DI_BufferInPositionA4"
					diPositionB4="DI_BufferInPositionB4"
					diPositionC4="DI_BufferInPositionC4"
					diPositionD4="DI_BufferInPositionD4"
             
					doServoOn="DO_ServoOnBufferAxis"
					doStop="DO_StopBufferAxis"
					doMove="DO_MoveCommandBufferAxis"
					doReset="DO_ResetBufferAxis"
						
					aioType="float"
						
					scRootPath="BufferServo"
				 />
	</IoBufferMotors>
	<IoFurnaceMotors assembly="FurnaceRT" classType="FurnaceRT.Devices.IoFurnaceMotor">
		<IoFurnaceMotor id="BoatElevatorServo" display="" schematicId="" unit="" module=""
					aiRealPosition="AI_BoatMotorPositionFeedback"
					aiRealSpeed="AI_BoatMotorSpeedFb"
				    aiTargetPosFb="AI_BoatTargetPosFb"
					aiDriverErrorCode="AI_BoatDriverErrCode"
				    aiMotionErrorCode="AI_BoatMotioErrID"
					 
					aoTargetPosition="AO_BoatPosition"
				    aoTargetSpeed="AO_BoatRotationSpeed"
					aoAcc="AO_BoatRotationAcc"
					aoDec="AO_BoatRotationDec"
					 
					diMotorAlarm="DI_PwrErrBufferAxis"
					diMove="DI_StopBusyBufferAxis"
					diPowerOn="DI_PwrBusyBoatZAxis"
					diPowerOnError="DI_PwrErrBoatZAxis"
					diStop="DI_StopBusyBoatZAxis"
					diStopError="DI_StopErrBoatZAxis"
				    diHomeDone=""
				    diAlignDone=""
					diHoming=""
					diHomeError=""
					diMoving="DI_MvAbsBusyBoatZAxis"
					diMoveError="DI_MvAbsErrBoatZAxis"
					diHomePosition="DI_HmPosBoatZAxis"
					diNegativeLimit="DI_NegLmtPosBoatZAxis"
					diPositiveLimit="DI_PotLmtPosBoatZAxis"
				    diConveyRelaxAlarm=""
				    diReadyToSwitchOn="DI_ReadytoSwitchOnBoatZAxis"
				    diSwitchOn="DI_SwitchedOnBoatZAxis"
				    diWarning="DI_BoatWarningBoatZAxis"
				    diAlarm="DI_BoatFaultBoatZAxis"
				    diPosition1="DI_MiddlePos1BoatZAxis"
				    diPosition2="DI_MiddlePos2BoatZAxis"
				    diPosition3="DI_MiddlePos3BoatZAxis"				    
				    
				    diUpPosition="DI_BoatLiftMotorUpPosition"
				    diDownPosition="DI_BoatLiftMotorDownPosition"
             
					doStop="DO_StopBoatZAxis"
					doHome=""
				    doMove="DO_MoveEnableBoatZAxis"
					doReset="DO_ResetBoatZAxis"
				    doServoOn="DO_ServoOnBoatZAxis"
					doInTransfer=""
					doTransferComplete=""
					doStepperDriverStart=""
				    doStepperDriverAllWindingsOff=""
				    doStepperDriverDataSelectionM0=""
				    doStepperDriverDataSelectionM1=""
				    doStepperDriverDataSelectionM2=""
				    doStepperDriverDataSelectionM3=""
				    doStepperDriverDataSelectionM4=""
				    doStepperDriverDataSelectionM5=""
				    doStepperDriverHomeOrPosPrerst=""
				    doCW=""
				    doCCW=""
						
					aioType="float"
						
					scRootPath="Boat.BoatElevatorServo"
				 />
		<IoFurnaceMotor id="BoatRotationServo" display="" schematicId="" unit="" module=""
					aiRealPosition=""
					aiRealSpeed=""
					aiPowerErrorCode=""
					aiStopErrorCode=""
					aiHomeErrorCode=""
					aiMoveAbsErrorCode=""
					aiJogErrorCode=""
					aiResetErrorCode=""
					aiDriverErrorCode=""
				    aiErrorCode=""
					 
				    aoTargetSpeed=""
					 
					diMotorAlarm=""
					diMove="DI_BoatRAxisMoving"
					diPowerOn=""
					diPowerOnError=""
					diStop=""
					diStopError=""
					diHoming="DI_BoatRAxisHomeBusy"
					diInitializing="DI_BoatRAxisInitBusy"
					diHomeDone="DI_BoatRAxisHomeDone"
					diInitDone="DI_BoatRAxisInitDone"
					diMoving="DI_BoatRAxisRotationBusy"
					diMoveError=""
					diHomePosition="DI_BoatRAxisInHomePosition"
					diNegativeLimit=""
					diPositiveLimit=""
				    diConveyRelaxAlarm=""
				    diReadyToSwitchOn=""
				    diSwitchOn=""
				    diWarning="DI_BoatRAxisWarning"
				    diAlarm="DI_BoatRAxisAlarm"
				    diPosition1=""
				    
				    diStepperMotorInWorkPosition="DI_BoatRAxisInWorkPosition"
				    diStepperMotorMoving=""
				    diStepperMotorAlarm=""
				    diStepperMotorInArea="DI_BoatRAxisInHomeArea"
				    diStepperMotorInReady="DI_BoatRAxisInReady"
				    diStepperMotorInHomePosition=""
				    
				    diUpPosition=""
				    diDownPosition=""
             
					doStop="DO_BoatRAxisStop"
					doHome="DO_BoatRAxisHomeCmd"
					doInit="DO_BoatRAxisInitialCmd"
				    doMove="DO_BoatRAxisRotationCmd"
					doReset="DO_BoatRAxisAlarmReset"
				    doM0="DO_BoatRAxisM0"
				    doM1="DO_BoatRAxisM1"
				    doM2="DO_BoatRAxisM2"
				    doM3="DO_BoatRAxisM3"
				    doM4="DO_BoatRAxisM4"
				    doM5="DO_BoatRAxisM5"
				    doCW="DO_BoatRAxisRotationForward"
				    doCCW="DO_BoatRAxisRotationReverse"
						
					aioType="float"
						
					scRootPath="Boat.BoatRotationServo"
				 />
	</IoFurnaceMotors>
	<IoWaferRobots classType="FurnaceRT.Devices.IoWaferRobot" assembly="FurnaceRT">
		<IoWaferRobot id="IoWaferRobot" display="IoWaferRobot" schematicId="IoWaferRobot" unit=""
			    diInFIMS1="DI_WaferRobotAtPOD1Area"
			    diInFIMS2="DI_WaferRobotAtPOD2Area"
			    diInBoatRotate="DI_WaferRobotAtBoatRotaryArea"
			    diInBoatBottom="DI_WaferRobotAtBoatBottomArea"
				diFIMS1WaferOnRobot="DI_FIMS1WaferOnRobot"
				diFIMS2WaferOnRobot="DI_FIMS2WaferOnRobot"
			    diTPEmo="DI_WaferRobotTPEMOButtonStatus"
				diServoOn="DI_WaferRobotTPServoOn"
			    diTPStatus="DI_WaferRobotTPStatus"
			    diRobotPowerOn="DI_WaferRobotPowerOn"
			    diAlarm="DI_WaferRobotAlarm"
				diBlade1WaferPresent="DI_WaferRobotWafer1Checked"
				diBlade2WaferPresent="DI_WaferRobotWafer2Checked"
				diBlade3WaferPresent="DI_WaferRobotWafer3Checked"
				diBlade4WaferPresent="DI_WaferRobotWafer4Checked"
				diBlade5WaferPresent="DI_WaferRobotWafer5Checked"
					
			    diZAxisHomePosition="DI_WaferRobotZAxisHomePosition"
			    diYAxisHomePosition="DI_WaferRobotTHAxisHomePosition"
			    diVAxisHomePosition="DI_WaferRobotPAxisHomePosition"
			    diRunning="DI_WaferRobotRunning"
					         
			    doAlarmReset="DO_WaferRobotAlarmReset"
			    doActionHold="DO_WaferRobotActionHold"
			    doTPEnable="DO_WaferRobotTPEnable"
				doFIMS1Interlock="DO_WaferRobotFIMS1Interlock"
				doFIMS2Interlock="DO_WaferRobotFIMS2Interlock"
				doBoatRotateInterlock="DO_WaferRobotBoatRotaryInterlock"
			    doBoatBottomInterlock="DO_WaferRobotBoatBottomInterlock"
					
				scRootPath=""
	    />
	</IoWaferRobots>
	<IoCarrierRobots classType="FurnaceRT.Devices.IoCarrierRobot" assembly="FurnaceRT">
		<IoCarrierRobot id="IoCarrierRobot" display="IoCarrierRobot" schematicId="IoCarrierRobot" unit=""
				diInFIMS1="DI_FOUPRobotWithinFIMS1Area"
				diInFIMS2="DI_FOUPRobotWithinFIMS2Area"
				diInStockerLayer1="DI_FOUPRobotWithinBufferLayer1Area"
				diInStockerLayer2="DI_FOUPRobotWithinBufferLayer2Area"
				diInStockerLayer3="DI_FOUPRobotWithinBufferLayer3Area"
				diInStockerLayer4="DI_FOUPRobotWithinBufferLayer4Area"
				diTPEmo="DI_FOUPRobotTPEMOButton"
				diServoOn="DI_FOUPRobotTPServoOn"
				diTPStatus="DI_FOUPRobotTPStatus"
			    diRobotPowerOn="DI_FOUPRobotPowerOn"
			    diAlarm="DI_FOUPRobotAlarmSignal"
				diBlade1WaferPresent="DI_FOUPRobotFOUPOnRobotCheck"
				 
				diZAxisHomePosition="DI_FOUPRobotZAxisHomePosition"
			    diYAxisHomePosition="DI_FOUPRobotYAxisHomePosition"
			    diRAxisHomePosition="DI_FOUPRobotRAxisHomePosition"
			    diRunning="DI_FOUPRobotRunning"

			    doAlarmReset="DO_FOUPRobotAlarmReset"
			    doActionHold="DO_FOUPRobotActionHold"
			    doTPEnable="DO_FOUPRobotTPEnable"
				doFIMS1Interlock="DO_FOUPRobotFIMS1Interlock"
				doFIMS2Interlock="DO_FOUPRobotFIMS2Interlock"
				doStockerInterlock="DO_FOUPRobotBufferInterlock"
					
				scRootPath=""
	    />
	</IoCarrierRobots>
	<!--<E84Passivers  classType="FurnaceRT.Devices.E84Passiver" assembly="FurnaceRT">
		<E84Passiver module="LP1" id ="Loadport1E84" display="Loadport1 E84" schematicId=""
					   VALID  ="DI_Loadport1E84Valid"
					   CS_0   ="DI_Loadport1E84CS0"
					   CS_1   ="DI_Loadport1E84CS1"
					   AM_AVBL=""
					   TR_REQ ="DI_Loadport1E84TRREQ"
					   BUSY   ="DI_Loadport1E84busy"
					   COMPT  ="DI_Loadport1E84COMPT"
					   CONT   ="DI_Loadport1E84CONT"
					   LightCurtain   =""
					   Present1   ="DI_LP1FOUPInPosition1"
					   Present2   ="DI_LP1FOUPInPosition2"
					   Present3   ="DI_LP1FOUPInPosition3"
					   Seat   ="DI_LP1FOUPDetect"
                   
					   L_REQ  =""
					   U_REQ  =""
					   READY  =""
					   HO_AVBL=""
					   ES     =""
                   />

		<E84Passiver module="LP2" id ="Loadport2E84" display="Loadport2 E84" schematicId=""
					   VALID  ="DI_Loadport2E84Valid"
					   CS_0   ="DI_Loadport2E84CS0"
					   CS_1   ="DI_Loadport2E84CS1"
					   AM_AVBL=""
					   TR_REQ ="DI_Loadport2E84TRREQ"
					   BUSY   ="DI_Loadport2E84busy"
					   COMPT  ="DI_Loadport2E84COMPT"
					   CONT   ="DI_Loadport2E84CONT"
					   LightCurtain   =""
					   Present1   ="DI_LP2FOUPInPosition1"
					   Present2   ="DI_LP2FOUPInPosition2"
					   Present3   ="DI_LP2FOUPInPosition3"
					   Seat   ="DI_LP2FOUPDetect"
                   
					   L_REQ  =""
					   U_REQ  =""
					   READY  =""
					   HO_AVBL=""
					   ES     =""
                   />

	</E84Passivers>-->
	<IoRFs classType="FurnaceRT.Devices.IoRF" assembly="FurnaceRT">
		<IoRF id="RF" display="RF" schematicId="RF" unit=""
				aiRelfectionPower="AI_RFGeneratorRelfectionPower"
			    aiForwardPower="AI_RFGeneratorForwardPower"
			    diPowerReached="DI_RFSetPowerReached"
			    diAlarm="DI_RFAlarm"
			    diRFOnStatus="DI_RFOnStatus"
			    doReset="DO_RFReset"
			    doOnOff="DO_RFOnOff"
			    doManualAnalog="DO_RFManualAnalog"
				
			    aoPower="AO_RFPowerSet"
          
				scRootPath=""
				/>
	</IoRFs>
	<IoRFMatchs classType="FurnaceRT.Devices.IoRFMatch" assembly="FurnaceRT">
		<IoRFMatch id="RFMatch" display="RFMatch" schematicId="RFMatch" unit=""
				aiVpp="AI_MatchingUnitVppMonitor"
				aiVdc="AI_MatchingUnitVdcMonitor"
			    aiLoadPosition="AI_MatchingUnitLoadPosition"
			    aiPhase="AI_MatchingUnitPhasePosition"
			  
			    doPresetMemory="DO_MatchingUnitPresetMemory"
			    doPresetStart="DO_MatchingUnitPresetStart"
			    doPresetCH0="DO_MatchingUnitPresetCH0"
			    doPresetCH1="DO_MatchingUnitPresetCH1"
			    doPresetCH2="DO_MatchingUnitPresetCH2"
			    doPresetCH3="DO_MatchingUnitPresetCH3"
			    doSafty="DO_MatchingUnitSafty"
				
			    aoLoadPosition="AO_MatchingUnitLoadPositionSet"
			    aoPhase="AO_MatchingUnitPhaseSet"
          
				scRootPath=""
				/>
	</IoRFMatchs>
	<IoAPCs classType="FurnaceRT.Devices.IoAPC" assembly="FurnaceRT">
		<IoAPC id="APC" display="APC" schematicId="APC" unit=""
				aiValueSensorInput1="AI_APCValueSensorInput1"
				aiValueSensorInput2="AI_APCValueSensorInput2"
			    aiSelectController="AI_APCSelectController"
			    aiPositionActualValue="AI_APCPositionActualValue"
			    aiControlModeStatus="AI_APCControlModeStatus"
			    aiHomeStatus="AI_APCHomeStatus"
			    aiWarningStatus1="AI_APCWarningStatus1"
			    aiWarningStatus2="AI_APCWarningStatus2"
			    aiWarningStatus3="AI_APCWarningStatus3"
			    aiWarningStatus4="AI_APCWarningStatus4"
			    aiWarningStatus5="AI_APCWarningStatus5"
			    aiWarningStatus6="AI_APCWarningStatus6"
			    aiErrorStatus1="AI_APCErrorStatus1"
			    aiErrorStatus2="AI_APCErrorStatus2"
			    aiErrorStatus3="AI_APCErrorStatus3"
			    aiErrorStatus4="AI_APCErrorStatus4"
			    aiValveStatusThreshold="AI_APCValveStatusThreshold"
		        aiSlowVacuumModeSetting="AI_APCSlowVacuumModeSetting"
	            aiInterlock1="AI_APCInterlock1"
	            aiInterlock2="AI_APCInterlock2"
	            aiInterlock3="AI_APCInterlock3"
                aiInterlockConstantOfInterlock3="AI_APCInterlockConstantOfInterlock3"
                aiP1SensorOffsetSetting="AI_APCP1SensorOffsetSetting"
                aiPosMonOffsetSetting="AI_APCPosMonOffsetSetting"
			  
			    diP1ZeroOffsetOutRangeAlm="DI_P1ZeroOffsetOutRangeAlm"
			    diP1ZeroAdjOutRangeAlm="DI_P1ZeroAdjOutRangeAlm"
			    diP1SpanAdjOutRangeAlm="DI_P1SpanAdjOutRangeAlm"
			    diP2ZeroOffsetOutRangeAlm="DI_P2ZeroOffsetOutRangeAlm"
			    diP2ZeroAdjOutRangeAlm="DI_P2ZeroAdjOutRangeAlm"
			    diP2SpanAdjOutRangeAlm="DI_P2SpanAdjOutRangeAlm"
			    diP1PressCtrlInterlockAlm="DI_P1PressCtrlInterlockAlm"
			    diP2PressCtrlInterlockAlm="DI_P2PressCtrlInterlockAlm"
			    diValveOpenCtrlInterlockAlm="DI_ValveOpenCtrlInterlockAlm"
			    diValveHoldCtrlInterlockAlm="DI_ValveHoldCtrlInterlockAlm"
			    diValveCloseInterlockAlm="DI_ValveCloseInterlockAlm"
			    diAutoTeachingInterlockAlm="DI_AutoTeachingInterlockAlm"
			    diP1DisconnectionAlm="DI_P1DisconnectionAlm"
			    diP2DisconnectionAlm="DI_P2DisconnectionAlm"
			    diPumpStopInterlockAlm="DI_PumpStopInterlockAlm"
			    diAutoTeachingErr1Alm="DI_AutoTeachingErr1Alm"
			    diAutoTeachingErr2Alm="DI_AutoTeachingErr2Alm"
			    
			    doValve="DO_ValveAV71"
			   
			    doVGUnit="DO_VGUnitConversion"
			    doAoDataReadSysConfig="DO_APCAoDataReadSysConfig"
			    doAoDataWriteSysConfig="DO_APCAoDataWriteSysConfig"
			    doAoDataReadCusConfig="DO_APCAoDataReadCusConfig"
		        doAoDataWriteCusConfig="DO_APCAoDataWriteCusConfig"
				
			    aoZeroResetP1=""
			    aoZeroAdjustP1="AO_APCZeroAdjustP1"
			    aoSpanAdjustP1=""
			    aoZeroResetP2=""
			    aoZeroAdjustP2="AO_APCZeroAdjustP2"
			    aoSpanAdjustP2=""
			    aoSlowVacuumTargetPressure="AO_APCSlowVacuumTargetPressure"
			    aoValveStatusThreshold="AO_APCValveStatusThreshold"
			    aoForbidInterlockOutbreak="AO_APCForbidInterlockOutbreak"
			    aoSlowVacuumModeSetting="AO_APCSlowVacuumModeSetting"
			    aoInterlock1="AO_APCInterlock1"
			    aoInterlock2="AO_APCInterlock2"
			    aoInterlock3="AO_APCInterlock3"
			    aoInterlockConstantOfInterlock3="AO_APCInterlockConstantOfInterlock3"
			    aoP1SensorOffsetSetting="AO_APCP1SensorOffsetSetting"
			    aoPosMonOffsetSetting="AO_APCPosMonOffsetSetting"
			    aoSensorAdjustReset="AO_APCSensorAdjustReset"
			    aoSlowVacuumRate="AO_APCSlowVacuumRate"
			    aoSlowVacuumP="AO_APCSlowVacuumP"
			    aoSlowVacuumI="AO_APCSlowVacuumI"
			    aoSlowVacuumD="AO_APCSlowVacuumD"
			    aoSlowVacuumA="AO_APCSlowVacuumA"
			    aoControllerModeSelect="AO_APCControllerModeSelect"
			    aoSpecifyTargetVacuumPressureControl="AO_APCSpecifyTargetVacuumPressureControl"
			    aoSpecifyTargetOpeningForValveOpeningControl="AO_APCSpecifyTargetOpeningForValveOpeningControl"
			    aoSpecifyControlMode="AO_APCSpecifyControlMode"
			    aoRangeUpperLimitSensorInput="AO_APCRangeUpperLimitSensorInput"
			    aoController1="AO_APCController1"
			    aoController1P="AO_APCController1P"
			    aoController1I="AO_APCController1I"
			    aoController1D="AO_APCController1D"
			    aoController1A="AO_APCController1A"
			    aoController1CH="AO_APCController1CH"
			    aoController1CL="AO_APCController1CL"
			    aoController1Offset="AO_APCController1Offset"
			    aoController2="AO_APCController2"
			    aoController2P="AO_APCController2P"
			    aoController2I="AO_APCController2I"
			    aoController2D="AO_APCController2D"
			    aoController2A="AO_APCController2A"
			    aoController2CH="AO_APCController2CH"
			    aoController2CL="AO_APCController2CL"
			    aoController2Offset="AO_APCController2Offset"
			   	aoController3="AO_APCController3"
			    aoController3P="AO_APCController3P"
			    aoController3I="AO_APCController3I"
			    aoController3D="AO_APCController3D"
			    aoController3A="AO_APCController3A"
			    aoController3CH="AO_APCController3CH"
			    aoController3CL="AO_APCController3CL"
			    aoController3Offset="AO_APCController3Offset"
			   	aoController4="AO_APCController4"
			    aoController4P="AO_APCController4P"
			    aoController4I="AO_APCController4I"
			    aoController4D="AO_APCController4D"
			    aoController4A="AO_APCController4A"
			    aoController4CH="AO_APCController4CH"
			    aoController4CL="AO_APCController4CL"
			    aoController4Offset="AO_APCController4Offset"
			   	aoController5="AO_APCController5"
			    aoController5P="AO_APCController5P"
			    aoController5I="AO_APCController5I"
			    aoController5D="AO_APCController5D"
			    aoController5A="AO_APCController5A"
			    aoController5CH="AO_APCController5CH"
			    aoController5CL="AO_APCController5CL"
			    aoController5Offset="AO_APCController5Offset"
			   	aoController6="AO_APCController6"
			    aoController6P="AO_APCController6P"
			    aoController6I="AO_APCController6I"
			    aoController6D="AO_APCController6D"
			    aoController6A="AO_APCController6A"
			    aoController6CH="AO_APCController6CH"
			    aoController6CL="AO_APCController6CL"
			    aoController6Offset="AO_APCController6Offset"
			   	aoController7="AO_APCController7"
			    aoController7P="AO_APCController7P"
			    aoController7I="AO_APCController7I"
			    aoController7D="AO_APCController7D"
			    aoController7A="AO_APCController7A"
			    aoController7CH="AO_APCController7CH"
			    aoController7CL="AO_APCController7CL"
			    aoController7Offset="AO_APCController7Offset"
			   	aoController8="AO_APCController8"
			    aoController8P="AO_APCController8P"
			    aoController8I="AO_APCController8I"
			    aoController8D="AO_APCController8D"
			    aoController8A="AO_APCController8A"
			    aoController8CH="AO_APCController8CH"
			    aoController8CL="AO_APCController8CL"
			    aoController8Offset="AO_APCController8Offset"
			   	aoController9="AO_APCController9"
			    aoController9P="AO_APCController9P"
			    aoController9I="AO_APCController9I"
			    aoController9D="AO_APCController9D"
			    aoController9A="AO_APCController9A"
			    aoController9CH="AO_APCController9CH"
			    aoController9CL="AO_APCController9CL"
			    aoController9Offset="AO_APCController9Offset"
			   	aoController10="AO_APCController10"
			    aoController10P="AO_APCController10P"
			    aoController10I="AO_APCController10I"
			    aoController10D="AO_APCController10D"
			    aoController10A="AO_APCController10A"
			    aoController10CH="AO_APCController10CH"
			    aoController10CL="AO_APCController10CL"
			    aoController10Offset="AO_APCController10Offset"
          
				scRootPath=""
			    aioType="float"
				/>
	</IoAPCs>
	<IoPressureMeters classType="FurnaceRT.Devices.IoPressureMeter" assembly="FurnaceRT">
		<IoPressureMeter id="PressureGLBoxPG1" display="GLBoxPG1Pressure"  schematicId="GLBoxPG1Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG1Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
		<IoPressureMeter id="PressureGLBoxPG2" display="GLBoxPG2Pressure"  schematicId="GLBoxPG2Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG2Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
		<IoPressureMeter id="PressureGLBoxPG3" display="GLBoxPG3Pressure"  schematicId="GLBoxPG3Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG3Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
		<IoPressureMeter id="PressureGLBoxPG4" display="GLBoxPG4Pressure"  schematicId="GLBoxPG4Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG4Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
		<IoPressureMeter id="PressureGLBoxPG5" display="GLBoxPG5Pressure"  schematicId="GLBoxPG5Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG5Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
		<IoPressureMeter id="PressureGLBoxPG6" display="GLBoxPG6Pressure"  schematicId="GLBoxPG6Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG6Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
		<!--<IoPressureMeter id="PressureGasBoxUpperVG21" display="GasBoxUpperVG21Pressure"  schematicId="GasBoxUpperVG21Pressure" unit="Torr" aiFeedback="AI_GasBoxUpperVG21Pressure"  scale="0,1000" physical="0,15000" aioType="float"/>-->
		<!--<IoPressureMeter id="PressureGasBoxUpperVG22" display="GasBoxUpperVG22Pressure"  schematicId="GasBoxUpperVG22Pressure" unit="Torr" aiFeedback="AI_GasBoxUpperVG22Pressure"  scale="0,1000" physical="0,15000" aioType="float"/>-->
		<IoPressureMeter id="ConcentrationO2" display="O2Concentration"  schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration"  scale="0,10" physical="0,15000" aioType="float"/>
		
		<IoPressureMeter id="HeatingExhaustMS1" display="HeatingExhaustMS1"  schematicId="HeatingExhaustMS1" unit="pa" aiFeedback="AI_HeatingExhaustMS1"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="GasBoxExhaustMS2" display="GasBoxExhaustMS2"  schematicId="GasBoxExhaustMS2" unit="pa" aiFeedback="AI_GasBoxExhaustMS2"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="ScavengerExhaustMS3" display="ScavengerExhaustMS3"  schematicId="ScavengerExhaustMS3" unit="pa" aiFeedback="AI_ScavengerExhaustMS3"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="ExhaustBoxExhaustMS4" display="ExhaustBoxExhaustMS4"  schematicId="ExhaustBoxExhaustMS4" unit="pa" aiFeedback="AI_ExhaustBoxExhaustMS4"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="LoadingAreaExhaustMS5" display="LoadingAreaExhaustMS5"  schematicId="LoadingAreaExhaustMS5" unit="pa" aiFeedback="AI_LoadingAreaExhaustMS5"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="FrontBodyExhaustMS6" display="FrontBodyExhaustMS6"  schematicId="FrontBodyExhaustMS6" unit="pa" aiFeedback="AI_FrontBodyExhaustMS6"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="LAExhaustMS7" display="LAExhaustMS7"  schematicId="LAExhaustMS7" unit="pa" aiFeedback="AI_LAExhaustMS7"  physical="0,15000" scale="0,500" aioType="float"/>
		<IoPressureMeter id="RHCExhaustMS8" display="RHCExhaustMS8"  schematicId="RHCExhaustMS8" unit="kPa" aiFeedback="AI_RHCExhaustMS8"  physical="0,15000" scale="0,2" aioType="float"/>
		<IoPressureMeter id="PS11" display="PS11"  schematicId="PS11" unit="MPa" aiFeedback="AI_PS11Value"  physical="1500,7500" scale="0,1" aioType="float"/>
		
		<IoPressureMeter id="RHCFlowFL901" display="RHCFlowFL901"  schematicId="RHCFlowFL901" unit="L" aiFeedback="AI_RHCFlowFL901"  physical="0,30000" scale="0,40" aioType="float"/>
		<IoPressureMeter id="CoolingWaterFlowOfFurnaceFL902" display="CoolingWaterFlowOfFurnaceFL902"  schematicId="CoolingWaterFlowOfFurnaceFL902" unit="L" aiFeedback="AI_CoolingWaterFlowOfFurnaceFL902"  physical="0,30000" scale="0,16" aioType="float"/>
		<IoPressureMeter id="CoolingWateFlowOfShuttleFL903" display="CoolingWateFlowOfShuttleFL903"  schematicId="CoolingWateFlowOfShuttleFL903" unit="L" aiFeedback="AI_CoolingWateFlowOfShuttleFL903"  physical="0,30000" scale="0,4" aioType="float"/>
		<IoPressureMeter id="CoolingWaterFlowOfBoatRotationFL904" display="CoolingWaterFlowOfBoatRotationFL904"  schematicId="CoolingWaterFlowOfBoatRotationFL904" unit="L" aiFeedback="AI_CoolingWaterFlowOfBoatRotationFL904"  physical="0,30000" scale="0,4" aioType="float"/>
		<IoPressureMeter id="CoolingWaterFlowOfFlangeFL905" display="CoolingWaterFlowOfFlangeFL905"  schematicId="CoolingWaterFlowOfFlangeFL905" unit="L" aiFeedback="AI_CoolingWaterFlowOfFlangeFL905"  physical="0,30000" scale="0,4" aioType="float"/>
		<IoPressureMeter id="CoolingWaterFlowOfLoadingAreaFL906" display="CoolingWaterFlowOfLoadingAreaFL906"  schematicId="CoolingWaterFlowOfLoadingAreaFL906" unit="L" aiFeedback="AI_CoolingWaterFlowOfLoadingAreaFL906"  physical="0,30000" scale="0,16" aioType="float"/>
		
		<IoPressureMeter id="PG12" display="PG12"  schematicId="PG12" unit="psig" aiFeedback="AI_PG12AnalogValue"  physical="0,15000" scale="0,100" aioType="float"/>
		<IoPressureMeter id="PG13" display="PG13"  schematicId="PG13" unit="psig" aiFeedback="AI_PG13AnalogValue"  physical="0,15000" scale="0,100" aioType="float"/>
		<IoPressureMeter id="PS13" display="PS13"  schematicId="PS13" unit="kPa" aiFeedback="AI_PS13AnalogValue"  physical="0,30000" scale="0,98.1" aioType="float"/>
		<IoPressureMeter id="PS17" display="PS17"  schematicId="PS17" unit="MPa" aiFeedback="AI_PS17Value"  physical="900,7500" scale="-0.1,1" aioType="float"/>
		<IoPressureMeter id="VG12AnalogValue" display="VG12AnalogValue"  schematicId="VG12AnalogValue" unit="Pa" aiFeedback="AI_VG12AnalogValue"  physical="0,15000" scale="0,1330" aioType="float"/>
		<IoPressureMeter id="DG1AnalogValue" display="DG1AnalogValue"  schematicId="DG1AnalogValue" unit="Pa" aiFeedback="AI_DG1AnalogValue"  physical="0,15000" scale="-500,500" aioType="float"/>
		<IoPressureMeter id="PS14AnalogValue" display="PS14AnalogValue"  schematicId="PS14AnalogValue" unit="kPa" aiFeedback="AI_PS14AnalogValue"  physical="1500,7500" scale="-99.9,99.9" aioType="float"/>
		
		<IoPressureMeter id="VG11" display="VG11"  schematicId="VG11" unit="Torr" aiFeedback="AI_VG11Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="VG12" display="VG12"  schematicId="VG12" unit="Torr" aiFeedback="AI_VG12Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="VG13" display="VG13"  schematicId="VG13" unit="Torr" aiFeedback="AI_VG13Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="VG21" display="VG21"  schematicId="VG21" unit="Torr" aiFeedback="AI_VG21Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="VG22" display="VG22"  schematicId="VG22" unit="Torr" aiFeedback="AI_VG22Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		
		<IoPressureMeter id="N24PurgePressure" display="N24PurgePressure"  schematicId="N24PurgePressure" unit="psig" aiFeedback="AI_N24PurgePressure"  physical="0,15000" scale="0,150" aioType="float"/>
		<IoPressureMeter id="N25PurgePressure" display="N25PurgePressure"  schematicId="N25PurgePressure" unit="psig" aiFeedback="AI_N25PurgePressure"  physical="0,15000" scale="0,150" aioType="float"/>
		<IoPressureMeter id="N26PurgePressure" display="N26PurgePressure"  schematicId="N26PurgePressure" unit="psig" aiFeedback="AI_N26PurgePressure"  physical="0,15000" scale="0,150" aioType="float"/>
		<IoPressureMeter id="N27PurgePressure" display="N27PurgePressure"  schematicId="N27PurgePressure" unit="psig" aiFeedback="AI_N27PurgePressure"  physical="0,15000" scale="0,150" aioType="float"/>


	</IoPressureMeters>


    <IoAlarmSignals classType="Aitex.Core.RT.Device.Unit.IoAlarmSignal" assembly="MECF.Framework.RT.EquipmentLibrary">
		<IoAlarmSignal id="AlarmSignalOPBoxPS11Out1"		diSignalsplay="Air/N2-7 Pressure Too Low"			diSignal="DI_OPBoxPS11Out1"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT1Alarm"		diSignalsplay="N2-1 Pressure Too Low"			diSignal="DI_GLBoxPG1CNT1Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT2Alarm"		diSignalsplay="N2-1 Pressure Too High"			diSignal="DI_GLBoxPG1CNT2Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG2CNT1Alarm"		diSignalsplay="SiH2Cl2 Pressure Too Low"			diSignal="DI_GLBoxPG2CNT1Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG2CNT2Alarm"		diSignalsplay="SiH2Cl2 Pressure Too High"			diSignal="DI_GLBoxPG2CNT2Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG3CNT1Alarm"		diSignalsplay="NH3-1 Pressure To Low"			diSignal="DI_GLBoxPG3CNT1Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG3CNT2Alarm"		diSignalsplay="NH3-1 Pressure Too High"			diSignal="DI_GLBoxPG3CNT2Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG4CNT1Alarm"		diSignalsplay="NH3-2 Pressure Too Low"			diSignal="DI_GLBoxPG4CNT1Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG4CNT2Alarm"		diSignalsplay="NH3-2 Pressure Too High"			diSignal="DI_GLBoxPG4CNT2Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG5CNT1Alarm"		diSignalsplay="N2-2 Pressure Too Low"			diSignal="DI_GLBoxPG5CNT1Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG5CNT2Alarm"		diSignalsplay="N2-2 Pressure Too High"			diSignal="DI_GLBoxPG5CNT2Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG6CNT1Alarm"		diSignalsplay="20% F2/N2 Pressure Too Low"			diSignal="DI_GLBoxPG6CNT1Alarm"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG6CNT2Alarm"		diSignalsplay="20% F2/N2 Pressure Too High"			diSignal="DI_GLBoxPG6CNT2Alarm"		alarmTrigValue="true" delay="5"/>

		<IoAlarmSignal id="AlarmSignalPG12OUT1"		diSignalsplay="N2-8-1 Pressure Too Low"			diSignal="DI_PG12OUT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPG12OUT2"		diSignalsplay="N2-8-1 Pressure Too High"			diSignal="DI_PG12OUT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPG13OUT1"		diSignalsplay="N2-8-2 Pressure Too Low"			diSignal="DI_PG13OUT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPG13OUT2"		diSignalsplay="PG13OUT2"			diSignal="DI_PG13OUT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPS14OUT1"		diSignalsplay="O.PRS-PS14 Pressure Too High"			diSignal="DI_PS14OUT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPS14OUT2"		diSignalsplay="O.PRS-PS14 Pressure Too High"			diSignal="DI_PS14OUT2"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT1"		diSignalsplay="N2PurgeBOXPG14CNT1"			diSignal="DI_N2PurgeBOXPG14CNT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT2"		diSignalsplay="N2PurgeBOXPG14CNT2"			diSignal="DI_N2PurgeBOXPG14CNT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG15CNT1"		diSignalsplay="N2PurgeBOXPG15CNT1"			diSignal="DI_N2PurgeBOXPG15CNT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG15CNT2"		diSignalsplay="N2PurgeBOXPG15CNT2"			diSignal="DI_N2PurgeBOXPG15CNT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG16CNT1"		diSignalsplay="N2-6 Pressure Too Low"			diSignal="DI_N2PurgeBOXPG16CNT1"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG16CNT2"		diSignalsplay="N2PurgeBOXPG16CNT2"			diSignal="DI_N2PurgeBOXPG16CNT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG70CNT1"		diSignalsplay="N2PurgeBOXPG70CNT1"			diSignal="DI_N2PurgeBOXPG70CNT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG70CNT2"		diSignalsplay="N2-70 Pressure Too Low"			diSignal="DI_N2PurgeBOXPG70CNT2"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalPS17ValueLowLimitAlarm"		diSignalsplay="Air/N2-1 Pressure Too Low"			diSignal="DI_PS17ValueLowLimitAlarm"		alarmTrigValue="true" delay="5"/>

		<IoAlarmSignal id="AlarmSignalHeatingExhaust1stAlarmMS1"		diSignalsplay="Heater Exhaust Pressure Too Low"			diSignal="DI_HeatingExhaust1stAlarmMS1"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalHeatingExhaust2ndAlarmMS1"		diSignalsplay="HeatingExhaust2ndAlarmMS1"			diSignal="DI_HeatingExhaust2ndAlarmMS1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalScavengeExhaust1stAlarmMS3"		diSignalsplay="Scavenge Exhaust Pressure Too Low"			diSignal="DI_ScavengeExhaust1stAlarmMS3"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalScavengeExhaust2ndAlarmMS3"		diSignalsplay="ScavengeExhaust2ndAlarmMS3"			diSignal="DI_ScavengeExhaust2ndAlarmMS3"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalValveBoxExhaust1stAlarmMS4"		diSignalsplay="ValveBox Exhaust Pressure Too Low"			diSignal="DI_ValveBoxExhaust1stAlarmMS4"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalValveBoxExhaust2ndAlarmMS4"		diSignalsplay="ValveBoxExhaust2ndAlarmMS4"			diSignal="DI_ValveBoxExhaust2ndAlarmMS4"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalGasBoxExhaust1stAlarmMS2"		diSignalsplay="GasBox Exhaust Pressure Too Low"			diSignal="DI_GasBoxExhaust1stAlarmMS2"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalGasBoxExhaust2ndAlarmMS2"		diSignalsplay="GasBoxExhaust2ndAlarmMS2"			diSignal="DI_GasBoxExhaust2ndAlarmMS2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLAExhaust1stAlarmMS7"		diSignalsplay="LA Exhaust Pressure Too Low"			diSignal="DI_LAExhaust1stAlarmMS7"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalLAExhaust2ndAlarmMS7"		diSignalsplay="LAExhaust2ndAlarmMS7"			diSignal="DI_LAExhaust2ndAlarmMS7"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalRHC1stAlarmMS8"		diSignalsplay="RHC Exhaust Pressure Too Low"			diSignal="DI_RHC1stAlarmMS8"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalRHC2ndAlarmMS8"		diSignalsplay="RHC2ndAlarmMS8"			diSignal="DI_RHC2ndAlarmMS8"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalREV1stAlarmMS9"		diSignalsplay="REV1stAlarmMS9"			diSignal="DI_REV1stAlarmMS9"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalREV2ndAlarmMS9"		diSignalsplay="REV2ndAlarmMS9"			diSignal="DI_REV2ndAlarmMS9"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalREV1stAlarmMS10"		diSignalsplay="REV1stAlarmMS10"			diSignal="DI_REV1stAlarmMS10"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalREV2ndAlarmMS10"		diSignalsplay="REV2ndAlarmMS10"			diSignal="DI_REV2ndAlarmMS10"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLoadingAreaExhaust1stAlarmMS5"		diSignalsplay="Loading Area Exhaust Abnormal"			diSignal="DI_LoadingAreaExhaust1stAlarmMS5"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalLoadingAreaExhaust2ndAlarmMS5"		diSignalsplay="LoadingAreaExhaust2ndAlarmMS5"			diSignal="DI_LoadingAreaExhaust2ndAlarmMS5"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFrontBodyExhaust1stAlarmMS6"		diSignalsplay="FrontBody Exhaust Pressure Too Low"			diSignal="DI_FrontBodyExhaust1stAlarmMS6"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalFrontBodyExhaust2ndAlarmMS6"		diSignalsplay="FrontBodyExhaust2ndAlarmMS6"			diSignal="DI_FrontBodyExhaust2ndAlarmMS6"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalMainFurnaceCellingTS306"		diSignalsplay="TEMP1 HTR Abnormal"			diSignal="DI_MainFurnaceCellingTS306"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalT101TempStatus"		diSignalsplay="TEMP3 TR1 Abnormal"			diSignal="DI_T101TempStatus"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalT102TempStatus"		diSignalsplay="TEMP4 TR2 Abnormal"			diSignal="DI_T102TempStatus"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalT103TempStatus"		diSignalsplay="TEMP5 TR3 Abnormal"			diSignal="DI_T103TempStatus"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalMagneticFluidLeak"		diSignalsplay="Magnetic Water Leak"			diSignal="DI_MagneticFluidLeak"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterLeak"		diSignalsplay="Cooling Water Leak"			diSignal="DI_CoolingWaterLeak"		alarmTrigValue="true" delay="5"/>

		<IoAlarmSignal id="AlarmSignalDoorOverride"		diSignalsplay="DoorOverride"			diSignal="DI_DoorOverride"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFBFrontDoorSwitch"		diSignalsplay="Front Panel Abnormal"			diSignal="DI_FBFrontDoorSwitch"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFilterBox1DoorSwitch"		diSignalsplay="Filter Box Cover Abnormal"			diSignal="DI_FilterBox1DoorSwitch"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLABacksideDoorSwitch"		diSignalsplay="Transfer Room Panel Abnormal"			diSignal="DI_LABacksideDoorSwitch"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalHeaterRoomSWS11S12"		diSignalsplay="Heater Room Panel Abnormal"			diSignal="DI_HeaterRoomSWS11S12"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGasBoxLowerDoorSW"		diSignalsplay="GasBox Lower Door Abnormal"			diSignal="DI_GasBoxLowerDoorSW"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGasBoxUpperDoorSW"		diSignalsplay="GasBox Upper Door Abnormal"			diSignal="DI_GasBoxUpperDoorSW"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalRHCTS305"		diSignalsplay="RHC Abnormal Radiator"			diSignal="DI_RHCTS305"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalRHCFlowAlarmFL901"		diSignalsplay="RHC Flow Abnormal"			diSignal="DI_RHCFlowAlarmFL901"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902"		diSignalsplay="Cooling Water Flow Of Furnace Abnormal"			diSignal="DI_CoolingWaterFlowAlarmOfFurnaceFL902"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903"		diSignalsplay="Cooling Water Flow Of Shuttle Abnormal"			diSignal="DI_CoolingWaterFlowAlarmOfShuttleFL903"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904"		diSignalsplay="Cooling Water Flow Of BoatRotation Abnormal"			diSignal="DI_CoolingWaterFlowAlarmOfBoatRotationFL904"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905"		diSignalsplay="Cooling Water Flow Of Flange Abnormal"			diSignal="DI_CoolingWaterFlowAlarmOfFlangeFL905"		alarmTrigValue="true" delay="10"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906"		diSignalsplay="Cooling Water Flow Of Loading Area Abnormal"			diSignal="DI_CoolingWaterFlowAlarmOfLoadingAreaFL906"		alarmTrigValue="true" delay="10"/>

		<IoAlarmSignal id="AlarmSignalRFAlarm"		diSignalsplay="RF Alarm"			diSignal="DI_RFAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalAirFlowFL70"		diSignalsplay="RF N2 Flow Abnormal"			diSignal="DI_AirFlowFL70"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalAirFlowFL71"		diSignalsplay="RF N2 Flow Abnormal"			diSignal="DI_AirFlowFL71"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalAirFlowFL72"		diSignalsplay="AirFlowFL72"			diSignal="DI_AirFlowFL72"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalWaterFlowFL62"		diSignalsplay="WaterFlowFL62"			diSignal="DI_WaterFlowFL62"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalFilterBox1Fan1Alarm"		diSignalsplay="Filter Box Fan Abnormal"			diSignal="DI_FilterBox1Fan1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFilterBox1Fan2Alarm"		diSignalsplay="Filter Box Fan Abnormal"			diSignal="DI_FilterBox1Fan2Alarm"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalHCLGasLeak1stAlarm"		diSignalsplay="SiH2CL2 Gas Leak"			diSignal="DI_HCLGasLeak1stAlarm"		alarmTrigValue="true" delay="2"/>
		<IoAlarmSignal id="AlarmSignalHCLGasLeak2ndAlarm"		diSignalsplay="SiH2CL2 Gas Leak"			diSignal="DI_HCLGasLeak2ndAlarm"		alarmTrigValue="true" delay="2"/>
		<IoAlarmSignal id="AlarmSignalNH3GasLeak1stAlarm"		diSignalsplay="NH3 Gas Leak"			diSignal="DI_NH3GasLeak1stAlarm"		alarmTrigValue="true" delay="2"/>
		<IoAlarmSignal id="AlarmSignalNH3GasLeak2ndAlarm"		diSignalsplay="NH3 Gas Leak"			diSignal="DI_NH3GasLeak2ndAlarm"		alarmTrigValue="true" delay="2"/>
		<IoAlarmSignal id="AlarmSignalF2GasLeak1stAlarm"		diSignalsplay="F2 Gas Leak"			diSignal="DI_F2GasLeak1stAlarm"		alarmTrigValue="true" delay="2"/>
		<IoAlarmSignal id="AlarmSignalF2GasLeak2ndAlarm"		diSignalsplay="F2 Gas Leak"			diSignal="DI_F2GasLeak2ndAlarm"		alarmTrigValue="true" delay="2"/>
		<IoAlarmSignal id="AlarmSignalGasLeakFault"		diSignalsplay="Gas Leak Fault"			diSignal="DI_GasLeakFault"		alarmTrigValue="true"/>

		<!--<IoAlarmSignal id="AlarmSignalFurnaceMainCircuitBreakerStatusMonitor"		diSignalsplay="Heater Power Down"			diSignal="DI_FurnaceMainCircuitBreakerStatusMonitor"		alarmTrigValue="true"/>-->
		<IoAlarmSignal id="AlarmSignalPumpDown"		diSignalsplay="Pump Down"			diSignal="DI_VaccumPumpBothOn"		alarmTrigValue="false"/>
		<IoAlarmSignal id="AlarmSignalVaccumPumpWarning"		diSignalsplay="Vacuum Pump Warning"			diSignal="DI_VaccumPumpWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVaccumPumpAlarm"		diSignalsplay="Vacuum Pump Alarm"			diSignal="DI_VaccumPumpAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPS13HStatus"		diSignalsplay="O.PRS Too High"			diSignal="DI_PS13HStatus"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPS13LStatus"		diSignalsplay="CK.PRS Too Low"			diSignal="DI_PS13LStatus"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU1DataWriteError"		diSignalsplay="FFU1 Data Write Error"			diSignal="DI_FFU1DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU2DataWriteError"		diSignalsplay="FFU2 Data Write Error"			diSignal="DI_FFU2DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU3DataWriteError"		diSignalsplay="FFU3 Data Write Error"			diSignal="DI_FFU3DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU4DataWriteError"		diSignalsplay="FFU4 Data Write Error"			diSignal="DI_FFU4DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU5DataWriteError"		diSignalsplay="FFU5 Data Write Error"			diSignal="DI_FFU5DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU6DataWriteError"		diSignalsplay="FFU6 Data Write Error"			diSignal="DI_FFU6DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU7DataWriteError"		diSignalsplay="FFU7 Data Write Error"			diSignal="DI_FFU7DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU8DataWriteError"		diSignalsplay="FFU8 Data Write Error"			diSignal="DI_FFU8DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFFU9DataWriteError"		diSignalsplay="FFU9 Data Write Error"			diSignal="DI_FFU9DataWriteError"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalDG1Output1"		diSignalsplay="P.CNT Pressure NG"			diSignal="DI_DG1Output1"		alarmTrigValue="true" delay="30"/>
		<IoAlarmSignal id="AlarmSignalDG1Output2"		diSignalsplay="P.CNT Pressure NG"			diSignal="DI_DG1Output2"		alarmTrigValue="true" delay="30"/>
		<IoAlarmSignal id="AlarmSignalAV91_1RHCAirInOpened"		diSignalsplay="RHC.DMR Abnormal"			diSignal="DI_AV91_1RHCAirInOpened"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalAV91_2RHCAirInOpened"		diSignalsplay="RHC.DMR Abnormal"			diSignal="DI_AV91_2RHCAirInOpened"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalAV91_3RHCAirInOpened"		diSignalsplay="RHC.DMR Abnormal"			diSignal="DI_AV91_3RHCAirOutOpened"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalAV91_4RHCAirInOpened"		diSignalsplay="RHC.DMR Abnormal"			diSignal="DI_AV91_4RHCAirOutOpened"		alarmTrigValue="true" delay="5"/>
		<IoAlarmSignal id="AlarmSignalBlowerPower"		diSignalsplay="BlowerPower Overload"			diSignal="DI_BlowerPowerStatusFeedback"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalRFSetPowerReached"		diSignalsplay="RF Output Abnormal"			diSignal="DI_RFSetPowerReached"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2FlowInFOUPAbnormal"		diSignalsplay="N2 Flow in FOUP Abnormal" aiSignal="AI_N26PurgePressure"	alarmTrigValue="true" condition="L" limitValue="0.3"/>
		<IoAlarmSignal id="AlarmSignalCapHeaterAbnormal"		diSignalsplay="Cap Heater Abnormal" aiSignal="AI_CapHeaterTempPV"	alarmTrigValue="true" condition="H" limitValue="260"/>

		
		
		
		<IoAlarmSignal id="AlarmSignalO2ConcentrationHI"			diSignalsplay="O2ConcentrationHigh"				diSignal="DI_O2ConcentrationHI"			alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalO2ConcentrationLow"			diSignalsplay="O2ConcentrationLow"				diSignal="DI_O2ConcentrationLow"			alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalO2ConcentrationEcho1"		diSignalsplay="O2ConcentrationEcho1"			diSignal="DI_O2ConcentrationEcho1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalO2ConcentrationEcho2"		diSignalsplay="O2ConcentrationEcho2"			diSignal="DI_O2ConcentrationEcho2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalSMK1DetectorSensorOperates"		diSignalsplay="SMK1DetectorSensorOperates"			diSignal="DI_SMK1DetectorSensorOperates"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalSMK1DetectorSensorFireAlarm"		diSignalsplay="SMK1DetectorSensorFireAlarm"			diSignal="DI_SMK1DetectorFireAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalSMK1DetectorSensorFault"		diSignalsplay="SMK1DetectorSensorFault"			diSignal="DI_SMK1DetectorFault"		alarmTrigValue="true"/>


		<IoAlarmSignal id="AlarmSignalTS34RotationTempSW"		diSignalsplay="TS34CapInsideTempSW"			diSignal="DI_TS34RotationTempSW"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalTS30CapInsideTempSW"		diSignalsplay="TS30CapInsideTempSW"			diSignal="DI_TS30CapInsideTempSW"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalTS31CapOutsideTempSW"		diSignalsplay="TS31CapOutsideTempSW"			diSignal="DI_TS31CapOutsideTempSW"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalEXHBoxWaterLeak"		diSignalsplay="EXHBoxWaterLeak"			diSignal="DI_EXHBoxWaterLeak"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalOPPanelEMO1"		diSignalsplay="OPPanelEMO1"			diSignal="DI_OPPanelEMO1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalOPPanelEMO2"		diSignalsplay="OPPanelEMO2"			diSignal="DI_OPPanelEMO2"		alarmTrigValue="true"/>


		<IoAlarmSignal id="AlarmSignalMachineEMO1"		diSignalsplay="MachineEMO1"			diSignal="DI_MachineEMO1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalMachineEMO2"		diSignalsplay="MachineEMO2"			diSignal="DI_MachineEMO2"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalBufferMotorHardwareInterlockAlarm"		diSignalsplay="BufferMotorHardwareInterlockAlarm"			diSignal="DI_BufferMotorHardwareInterlockAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalBoatLiftMotorHardwareInterlockAlarm"		diSignalsplay="BoatLiftMotorHardwareInterlockAlarm"			diSignal="DI_BoatLiftMotorHardwareInterlockAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalHFReconciliationPressureMinAbnormal"		diSignalsplay="HFReconciliationPressureMinAbnormal"			diSignal="DI_HFReconciliationPressureMinAbnormal"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalMachineEMS1"		diSignalsplay="MachineEMS1"			diSignal="DI_MachineEMS1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalMachineEMS2"		diSignalsplay="MachineEMS2"			diSignal="DI_MachineEMS2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFBLightCurtainFault"		diSignalsplay="FBLightCurtainFault"			diSignal="DI_FBLightCurtainFault"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFBLightCurtainOSSD1"		diSignalsplay="FBLightCurtainOSSD1"			diSignal="DI_FBLightCurtainOSSD1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFBLightCurtainOSSD2"		diSignalsplay="FBLightCurtainOSSD2"			diSignal="DI_FBLightCurtainOSSD2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFBEMO1"		diSignalsplay="FBEMO1"			diSignal="DI_FBEMO1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalFBEMO2"		diSignalsplay="FBEMO2"			diSignal="DI_FBEMO2"		alarmTrigValue="true"/>


		<IoAlarmSignal id="AlarmSignalGLBoxVG21Status"		diSignalsplay="GLBox VG21 Alarm"			diSignal="DI_GLBoxVG21Status"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxVG21Output1"		diSignalsplay="GLBoxVG21Output1"			diSignal="DI_GLBoxVG21Output1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxVG21Output2"		diSignalsplay="GLBoxVG21Output2"			diSignal="DI_GLBoxVG21Output2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxVG22Status"		diSignalsplay="GLBox VG22 Alarm"			diSignal="DI_GLBoxVG22Status"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxVG22Output1"		diSignalsplay="GLBoxVG22Output1"			diSignal="DI_GLBoxVG22Output1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxVG22Output2"		diSignalsplay="GLBoxVG22Output2"			diSignal="DI_GLBoxVG22Output2"		alarmTrigValue="true"/>


		<IoAlarmSignal id="AlarmSignalVG11LowAlarm"		diSignalsplay="VG11 Low Alarm"			diSignal="DI_VG11LowAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG11HighAlarm"		diSignalsplay="VG11 High Alarm"			diSignal="DI_VG11HighAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG12LowAlarm"		diSignalsplay="VG12 Low Alarm"			diSignal="DI_VG12LowAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG12HighAlarm"		diSignalsplay="VG12 High Alarm"			diSignal="DI_VG12HighAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG13LowAlarm"		diSignalsplay="VG13 Low Alarm"			diSignal="DI_VG13LowAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG13HighAlarm"		diSignalsplay="VG13 High Alarm"			diSignal="DI_VG13HighAlarm"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut1"		diSignalsplay="CoolingWaterPressureOut1"			diSignal="DI_CoolingWaterPressureOut1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut2"		diSignalsplay="CoolingWaterPressureOut2"			diSignal="DI_CoolingWaterPressureOut2"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalUPSFault"		diSignalsplay="UPSFault"			diSignal="DI_UPSFault"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalUPSAlarm"		diSignalsplay="UPSAlarm"			diSignal="DI_UPSAlarm"		alarmTrigValue="true"/>



		<IoAlarmSignal id="AlarmSignalStepperMotorAlarm"		diSignalsplay="StepperMotorAlarm"			diSignal="DI_StepperMotorAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalForelineHeaterJacketLightAlarm"		diSignalsplay="ForelineHeaterJacketLightAlarm"			diSignal="DI_ForelineHeaterJacketLightAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalForelineHeaterJacketHeavyAlarm"		diSignalsplay="ForelineHeaterJacketHeavyAlarm"			diSignal="DI_ForelineHeaterJacketHeavyAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalScrubberWarning"		diSignalsplay="ScrubberWarning"			diSignal="DI_ScrubberWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalScrubberAlarm"		diSignalsplay="ScrubberAlarm"			diSignal="DI_ScrubberAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalNegLmtPosBoatZAxis"		diSignalsplay="NegLmtPosBoatZAxis"			diSignal="DI_NegLmtPosBoatZAxis"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPotLmtPosBoatZAxis"		diSignalsplay="PotLmtPosBoatZAxis"			diSignal="DI_PotLmtPosBoatZAxis"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLAFFUCommAlarm"		diSignalsplay="LAFFUCommAlarm"			diSignal="DI_LAFFUCommAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalMINI8CommAlarm"		diSignalsplay="MINI8CommAlarm"			diSignal="DI_MINI8CommAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaMainWaterFlowAlarm"		diSignalsplay="MINI8CommAlarm"			diSignal="DI_MainWaterFlowAlarm"		alarmTrigValue="true"/>
		
		<IoAlarmSignal id="AlarmSignaBoatRAxisAlarm"		diSignalsplay="BoatRAxisAlarm"			diSignal="DI_BoatRAxisAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaBoatRAxisWarning"		diSignalsplay="BoatRAxisWarning"			diSignal="DI_BoatRAxisWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaBoatZAxisWarning"		diSignalsplay="BoatZAxisWarning"			diSignal="DI_BoatWarningBoatZAxis"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaBoatZAxisAlarm"		diSignalsplay="BoatZAxisAlarm"			diSignal="DI_BoatFaultBoatZAxis"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaFOUPRobotTPStatusWarning"		diSignalsplay="FOUPRobotTPStatusWarning"			diSignal="DI_FOUPRobotTPStatus"		alarmTrigValue="false"/>

		<IoAlarmSignal id="AlarmSignaWaferRobotAlarm"		diSignalsplay="WaferRobotAlarm"			diSignal="DI_WaferRobotAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaFOUPRobotAlarm"		diSignalsplay="WaferRobotAlarm"			diSignal="DI_FOUPRobotAlarmSignal"		alarmTrigValue="true"/>

	</IoAlarmSignals>
	<IoSensors>
		<IoSensor id="SensorEMOReset" display="" di="DI_EMOReset"/>
		<IoSensor id="SensorFurnacePowerOnButton" display="" di="DI_FurnacePowerOnButton"/>
		<IoSensor id="SensorGasLineHeaterPowerOnButton" display="" di="DI_GasLineHeaterPowerOnButton"/>
		<IoSensor id="SensorExhaustHeaterPowerOnButton" display="" di="DI_ExhaustHeaterPowerOnButton"/>
		<IoSensor id="SensorFrontbodyPowerOnButton" display="" di="DI_FrontbodyPowerOnButton"/>
		<IoSensor id="SensorBlowerMotorPowerOnButton" display="" di="DI_BlowerMotorPowerOnButton"/>
		<IoSensor id="SensorFFUPowerOnButton" display="" di="DI_FFUPowerOnButton"/>
		<IoSensor id="SensorT102PowerOnButton" display="" di="DI_T102PowerOnButton"/>
		<IoSensor id="SensorT103PowerOnButton" display="" di="DI_T103PowerOnButton"/>
		<IoSensor id="SensorStartButton" display="" di="DI_StartButton"/>
		<IoSensor id="SensorStopButton" display="" di="DI_StopButton"/>
		<IoSensor id="SensorResetButton" display="" di="DI_ResetButton"/>
		<IoSensor id="SensorMechaStopButton" display="" di="DI_MechaStopButton"/>
		<IoSensor id="SensorAutoOrmanualKnob" display="" di="DI_AutoOrmanualKnob"/>
		<IoSensor id="SensorNormalOrMaintainKnob" display="" di="DI_NormalOrMaintainKnob"/>
		<IoSensor id="SensorHeaterPowerOnOffKnob" display="" di="DI_HeaterPowerOnOffKnob"/>
		<IoSensor id="SensorREVReset" display="" di="DI_REVReset"/>
		<IoSensor id="SensorMachineStop" display="" di="DI_MachineStop"/>
		<IoSensor id="SensorMachinePause" display="" di="DI_MachinePause"/>
		<IoSensor id="SensorOperatorAccessHandOffLeft" display="" di="DI_OperatorAccessHandOffLeft"/>
		<IoSensor id="SensorOperatorAccessHandOffRight" display="" di="DI_OperatorAccessHandOffRight"/>
		
		<IoSensor id="SensorBoatLiftCAPInPosition" display="" di="DI_BoatLiftCAPInPosition"/>

		<IoSensor id="SensorVG11Status" display="" di="DI_VG11Status"/>
		<IoSensor id="SensorVG12Status" display="" di="DI_VG12Status"/>
		<IoSensor id="SensorVG13Status" display="" di="DI_VG13Status"/>

		<IoSensor id="SensorUPSBypassStatus" display="" di="DI_UPSBypassStatus"/>
		<IoSensor id="SensorUPSBatteryVoltageLow" display="" di="DI_UPSBatteryVoltageLow"/>
		<IoSensor id="SensorUPSStart" display="" di="DI_UPSStart"/>
		<IoSensor id="SensorUPSACInputCutOff" display="" di="DI_UPSACInputCutOff"/>

		<IoSensor id="SensorBlowerPowerStatusFeedback" display="" di="DI_BlowerPowerStatusFeedback"/>
		<IoSensor id="SensorVaccumPumpBothOn" display="" di="DI_VaccumPumpBothOn"/>
		
		<IoSensor id="SensorStocker1" display="" di="DI_BufferStock1A"/>
		<IoSensor id="SensorStocker2" display="" di="DI_BufferStock1B"/>
		<IoSensor id="SensorStocker3" display="" di="DI_BufferStock1C"/>
		<IoSensor id="SensorStocker4" display="" di="DI_BufferStock1D"/>
		<IoSensor id="SensorStocker5" display="" di="DI_BufferStock2A"/>
		<IoSensor id="SensorStocker6" display="" di="DI_BufferStock2B"/>
		<IoSensor id="SensorStocker7" display="" di="DI_BufferStock2C"/>
		<IoSensor id="SensorStocker8" display="" di="DI_BufferStock2D"/>
		<IoSensor id="SensorStocker9" display="" di="DI_BufferStock3A"/>
		<IoSensor id="SensorStocker10" display="" di="DI_BufferStock3B"/>
		<IoSensor id="SensorStocker11" display="" di="DI_BufferStock3C"/>
		<IoSensor id="SensorStocker12" display="" di="DI_BufferStock3D"/>
		<IoSensor id="SensorStocker13" display="" di="DI_BufferStock4A"/>
		<IoSensor id="SensorStocker14" display="" di="DI_BufferStock4B"/>
		<IoSensor id="SensorStocker15" display="" di="DI_BufferStock4C"/>
		<IoSensor id="SensorStocker16" display="" di="DI_BufferStock4D"/>
		<IoSensor id="SensorStocker17" display="" di="DI_FBFrontFOUPBufferEX1"/>
		<IoSensor id="SensorStocker18" display="" di="DI_FBFrontFOUPBufferEX2"/>
		
		<IoSensor id="SensorZone1CircuitBreakerStatusMonitor" display="" di="DI_Zone1CircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone2CircuitBreakerStatusMonitor" display="" di="DI_Zone2CircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone3CircuitBreakerStatusMonitor" display="" di="DI_Zone3CircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone4CircuitBreakerStatusMonitor" display="" di="DI_Zone4CircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone5CircuitBreakerStatusMonitor" display="" di="DI_Zone5CircuitBreakerStatusMonitor"/>
		
		<IoSensor id="SensorWaferRobotEX1AxisHomePosition" display="" di="DI_WaferRobotEX1AxisHomePosition"/>
		<IoSensor id="SensorWaferRobotEX2AxisHomePosition" display="" di="DI_WaferRobotEX2AxisHomePosition"/>
		
		<IoSensor id="SensorVAC1" display="" di="DI_VAC1"/>
		<IoSensor id="SensorVAC2" display="" di="DI_VAC2"/>
		<IoSensor id="SensorVAC3" display="" di="DI_VAC3"/>
		
		<IoSensor id="SensorPS13LStatus" display="" di="DI_PS13LStatus"/>
		<IoSensor id="SensorBoatUnloadInterlock" display="" di="DI_BoatUnloadInterlock"/>
		<IoSensor id="SensorAVGSwitchStatus" display="" di="DI_AVGSwitchStatus"/>
		
	</IoSensors>

	<IoTriggers >
		<IoTrigger id="TrigHPMValve" display="" schematicId="" unit="" doTrigger="DO_HPMValveOnOff"/>
		<IoTrigger id="TrigT101PowerOn" display="" schematicId="" unit="" doTrigger="DO_T101PowerOn"/>
		<IoTrigger id="TrigT101PowerOff" display="" schematicId="" unit="" doTrigger="DO_T101PowerOff"/>
		<IoTrigger id="TrigGaslineHeaterPowerOn" display="" schematicId="" unit="" doTrigger="DO_GaslineHeaterPowerOn"/>
		<IoTrigger id="TrigExhaustHeaterPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustHeaterPowerOn"/>
		<IoTrigger id="TrigFrontBodyPowerOn" display="" schematicId="" unit="" doTrigger="DO_FrontBodyPowerOn"/>
		<IoTrigger id="TrigBlowerMotorPowerOn" display="" schematicId="" unit="" doTrigger="DO_BlowerMotorPowerOn"/>
		<IoTrigger id="TrigFFUPowerOn" display="" schematicId="" unit="" doTrigger="DO_FFUPowerOn"/>
		<IoTrigger id="TrigT102PowerOn" display="" schematicId="" unit="" doTrigger="DO_T102PowerOn"/>
		<IoTrigger id="TrigT103PowerOff" display="" schematicId="" unit="" doTrigger="DO_T103PowerOff"/>
		<IoTrigger id="TrigBufferMotorHardwareInterlockOk1" display="" schematicId="" unit="" doTrigger="DO_BufferMotorHardwareInterlockOk1"/>
		<IoTrigger id="TrigBufferMotorHardwareInterlockOk2" display="" schematicId="" unit="" doTrigger="DO_BufferMotorHardwareInterlockOk2"/>
		<IoTrigger id="TrigBoatLiftMotorHardwareInterlockOk1" display="" schematicId="" unit="" doTrigger="DO_BoatLiftMotorHardwareInterlockOk1"/>
		<IoTrigger id="TrigBoatLiftMotorHardwareInterlockOk2" display="" schematicId="" unit="" doTrigger="DO_BoatLiftMotorHardwareInterlockOk2"/>
		<IoTrigger id="TrigWaferRobotEnable" display="" schematicId="" unit="" doTrigger="DO_WaferRobotEnable"/>
		<IoTrigger id="TrigFOUPRobotEnable" display="" schematicId="" unit="" doTrigger="DO_FOUPRobotEnable"/>
		<IoTrigger id="TrigLightCurtainIdle" display="" schematicId="" unit="" doTrigger="DO_LightCurtainIdle"/>
		<IoTrigger id="TrigGaslineHeatingEN1K5201" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5201"/>
		<IoTrigger id="TrigGaslineHeatingEN1K5202" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5202"/>
		<IoTrigger id="TrigGaslineHeatingEN1K5203" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5203"/>
		<IoTrigger id="TrigGaslineHeatingEN1K5204" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5204"/>
		<IoTrigger id="TrigGaslineHeatingEN1K5205" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5205"/>

		<IoTrigger id="TrigStartButton" display="" schematicId="" unit="" doTrigger="DO_StartButton"/>
		<IoTrigger id="TrigStopButton" display="" schematicId="" unit="" doTrigger="DO_StopButton"/>
		<IoTrigger id="TrigResetButton" display="" schematicId="" unit="" doTrigger="DO_ResetButton"/>
		<IoTrigger id="TrigMechaStopButton" display="" schematicId="" unit="" doTrigger="DO_MechaStopButton"/>
		<IoTrigger id="TrigAutoOrManualKnob" display="" schematicId="" unit="" doTrigger="DO_AutoOrManualKnob"/>
		<IoTrigger id="TrigNormalOrMaintainKnob" display="" schematicId="" unit="" doTrigger="DO_NormalOrMaintainKnob"/>
		<IoTrigger id="TrigHeaterPowerOnOffKnob" display="" schematicId="" unit="" doTrigger="DO_HeaterPowerOnOffKnob"/>
		<IoTrigger id="TrigREVReset" display="" schematicId="" unit="" doTrigger="DO_REVReset"/>
		<IoTrigger id="TrigEV101CoolingWaterShift" display="" schematicId="" unit="" doTrigger="DO_EV101CoolingWaterShift"/>
		<IoTrigger id="TrigVaccumPumpBothOn" display="" schematicId="" unit="" doTrigger="DO_VaccumPumpBothOn"/>
		<IoTrigger id="TrigVaccumPumpAGVOpen" display="" schematicId="" unit="" doTrigger="DO_VaccumPumpAGVOpen"/>
		<IoTrigger id="TrigFurnaceLZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceLZoneHeatingEnable"/>
		<IoTrigger id="TrigFurnaceCLZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCLZoneHeatingEnable"/>
		<IoTrigger id="TrigFurnaceCZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCZoneHeatingEnable"/>
		<IoTrigger id="TrigFurnaceCUZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCUZoneHeatingEnable"/>
		<IoTrigger id="TrigFurnaceUZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceUZoneHeatingEnable"/>
		<IoTrigger id="TrigExhaustOmmanBoxFanPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustOmmanBoxFanPowerOn"/>
		<IoTrigger id="TrigHPMValveOutStatus" display="" schematicId="" unit="" doTrigger="DO_HPMValveOutStatus"/>
		<IoTrigger id="TrigForlineHeaterOn" display="" schematicId="" unit="" doTrigger="DO_ForlineHeaterOn"/>
		<IoTrigger id="TrigHeaterE901Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE901Enable"/>
		<IoTrigger id="TrigHeaterE902Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE902Enable"/>
		<IoTrigger id="TrigHeaterE903Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE903Enable"/>
		<IoTrigger id="TrigHeaterE904Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE904Enable"/>
		<IoTrigger id="TrigHeaterE905Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE905Enable"/>
		<IoTrigger id="TrigHeaterE906Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE906Enable"/>
		<IoTrigger id="TrigHeaterE907Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE907Enable"/>
		<IoTrigger id="TrigHeaterE908Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE908Enable"/>
		<IoTrigger id="TrigHeaterE909Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE909Enable"/>
		<IoTrigger id="TrigHeaterE910Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE910Enable"/>
		<IoTrigger id="TrigHeaterE911Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE911Enable"/>
		<IoTrigger id="TrigHeaterE912Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE912Enable"/>
		<IoTrigger id="TrigAV71ExternalHeater" display="" schematicId="" unit="" doTrigger="DO_AV71ExternalHeater"/>
		<IoTrigger id="TrigAV71RingHeater" display="" schematicId="" unit="" doTrigger="DO_AV71RingHeater"/>
		<IoTrigger id="TrigCapHeaterPowerOnEnable" display="" schematicId="" unit="" doTrigger="DO_CapHeaterPowerOnEnable"/>
		<IoTrigger id="TrigMechaStopRed" display="" schematicId="" unit="" doTrigger="DO_MechaStopRed"/>
		<IoTrigger id="TrigMechaPause" display="" schematicId="" unit="" doTrigger="DO_MechaPause"/>
		<IoTrigger id="TrigHandOffLeft" display="" schematicId="" unit="" doTrigger="DO_HandOffLeft"/>
		<IoTrigger id="TrigHandOffRight" display="" schematicId="" unit="" doTrigger="DO_HandOffRight"/>
		<IoTrigger id="TrigLP1FoupPresence" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPPresence"/>
		<IoTrigger id="TrigLP1FoupPlacement" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPPlacement"/>
		<IoTrigger id="TrigLP1FoupLoad" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPLoad"/>
		<IoTrigger id="TrigLP1FoupUnload" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPUnload"/>
		<IoTrigger id="TrigLP1FoupManual" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPManual"/>
		<IoTrigger id="TrigLP2FoupPresence" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPPresence"/>
		<IoTrigger id="TrigLP2FoupPlacement" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPPlacement"/>
		<IoTrigger id="TrigLP2FoupLoad" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPLoad"/>
		<IoTrigger id="TrigLP2FoupUnload" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPUnload"/>
		<IoTrigger id="TrigLP2FoupManual" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPManual"/>
		
		<IoTrigger id="TrigTransferRoomLedLightBar" display="" schematicId="" unit="" doTrigger="DO_TransferRoomLedLightBar"/>
		<IoTrigger id="TrigBoatRAxisAlarmReset" display="" schematicId="" unit="" doTrigger="DO_BoatRAxisAlarmReset"/>
		<IoTrigger id="TrigWaferRobotAlarmReset" display="" schematicId="" unit="" doTrigger="DO_WaferRobotAlarmReset"/>
		<IoTrigger id="TrigFOUPRobotAlarmReset" display="" schematicId="" unit="" doTrigger="DO_FOUPRobotAlarmReset"/>
		
		<IoTrigger id="TrigVGUnitConversion" display="" schematicId="" unit="" doTrigger="DO_VGUnitConversion"/>
		<IoTrigger id="TrigHeaterAllEnable" display="" schematicId="" unit="" aoTrigger="AO_HeaterAllEnable"/>
	</IoTriggers>
	<IoSignalTowers  assembly="FurnaceRT" classType="FurnaceRT.Equipments.Systems.FurnaceSignalTower">
		<IoSignalTower module="System" id ="SignalTower" display="Signal Tower" schematicId=""
					   doRed="DO_TowerRed" doYellow="DO_TowerOrange" doGreen="DO_TowerGreen" doBlue=""
					   doBuzzer1="DO_TowerBuzzle"/>
	</IoSignalTowers>
	<IoHeaterBands  classType="FurnaceRT.Devices.IoHeaterBand" assembly="FurnaceRT">
		<IoHeaterBand id="ForelineHeater1" display="ForelineHeater1" schematicId="ForelineHeater1" unit="" module=""
			   aiPV="AI_ForelineHeater1TempPV"
		       aiMV="AI_ForelineHeater1ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater1ControlOutput"
		       aiErrorID="AI_ForelineHeater1ControlErrorID"
			   aiPID_P="AI_ForelineHeater1PBFeedback"
			   aiPID_I="AI_ForelineHeater1TIFeedback"
			   aiPID_D="AI_ForelineHeater1TDFeedback"
				
			   doEnable="DO_ForelineHeater1Enable"
		       doManualControl="DO_ForelineHeater1ManualControl"
			   doAutoTuning="DO_ForelineHeater1PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater1ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater1PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater1PIDATDone"
		       diPIDControlError="DI_ForelineHeater1PIDControlError"
		       diTimePropControlError="DI_ForelineHeater1TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater1PBSV"
			   aoPID_I="AO_ForelineHeater1TISV"
			   aoPID_D="AO_ForelineHeater1TDSV"
		       aoManualOutput="AO_ForelineHeater1ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater1ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater1TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater2" display="ForelineHeater2" schematicId="ForelineHeater2" unit="" module=""
			   aiPV="AI_ForelineHeater2TempPV"
		       aiMV="AI_ForelineHeater2ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater2ControlOutput"
		       aiErrorID="AI_ForelineHeater2ControlErrorID"
			   aiPID_P="AI_ForelineHeater2PBFeedback"
			   aiPID_I="AI_ForelineHeater2TIFeedback"
			   aiPID_D="AI_ForelineHeater2TDFeedback"
				
			   doEnable="DO_ForelineHeater2Enable"
		       doManualControl="DO_ForelineHeater2ManualControl"
			   doAutoTuning="DO_ForelineHeater2PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater2ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater2PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater2PIDATDone"
		       diPIDControlError="DI_ForelineHeater2PIDControlError"
		       diTimePropControlError="DI_ForelineHeater2TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater2PBSV"
			   aoPID_I="AO_ForelineHeater2TISV"
			   aoPID_D="AO_ForelineHeater2TDSV"
		       aoManualOutput="AO_ForelineHeater2ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater2ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater2TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater3" display="ForelineHeater3" schematicId="ForelineHeater3" unit="" module=""
			   aiPV="AI_ForelineHeater3TempPV"
		       aiMV="AI_ForelineHeater3ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater3ControlOutput"
		       aiErrorID="AI_ForelineHeater3ControlErrorID"
			   aiPID_P="AI_ForelineHeater3PBFeedback"
			   aiPID_I="AI_ForelineHeater3TIFeedback"
			   aiPID_D="AI_ForelineHeater3TDFeedback"
				
			   doEnable="DO_ForelineHeater3Enable"
		       doManualControl="DO_ForelineHeater3ManualControl"
			   doAutoTuning="DO_ForelineHeater3PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater3ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater3PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater3PIDATDone"
		       diPIDControlError="DI_ForelineHeater3PIDControlError"
		       diTimePropControlError="DI_ForelineHeater3TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater3PBSV"
			   aoPID_I="AO_ForelineHeater3TISV"
			   aoPID_D="AO_ForelineHeater3TDSV"
		       aoManualOutput="AO_ForelineHeater3ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater3ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater3TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater4" display="ForelineHeater4" schematicId="ForelineHeater4" unit="" module=""
			   aiPV="AI_ForelineHeater4TempPV"
		       aiMV="AI_ForelineHeater4ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater4ControlOutput"
		       aiErrorID="AI_ForelineHeater4ControlErrorID"
			   aiPID_P="AI_ForelineHeater4PBFeedback"
			   aiPID_I="AI_ForelineHeater4TIFeedback"
			   aiPID_D="AI_ForelineHeater4TDFeedback"
				
			   doEnable="DO_ForelineHeater4Enable"
		       doManualControl="DO_ForelineHeater4ManualControl"
			   doAutoTuning="DO_ForelineHeater4PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater4ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater4PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater4PIDATDone"
		       diPIDControlError="DI_ForelineHeater4PIDControlError"
		       diTimePropControlError="DI_ForelineHeater4TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater4PBSV"
			   aoPID_I="AO_ForelineHeater4TISV"
			   aoPID_D="AO_ForelineHeater4TDSV"
		       aoManualOutput="AO_ForelineHeater4ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater4ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater4TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater5" display="ForelineHeater5" schematicId="ForelineHeater5" unit="" module=""
			   aiPV="AI_ForelineHeater5TempPV"
		       aiMV="AI_ForelineHeater5ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater5ControlOutput"
		       aiErrorID="AI_ForelineHeater5ControlErrorID"
			   aiPID_P="AI_ForelineHeater5PBFeedback"
			   aiPID_I="AI_ForelineHeater5TIFeedback"
			   aiPID_D="AI_ForelineHeater5TDFeedback"
				
			   doEnable="DO_ForelineHeater5Enable"
		       doManualControl="DO_ForelineHeater5ManualControl"
			   doAutoTuning="DO_ForelineHeater5PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater5ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater5PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater5PIDATDone"
		       diPIDControlError="DI_ForelineHeater5PIDControlError"
		       diTimePropControlError="DI_ForelineHeater5TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater5PBSV"
			   aoPID_I="AO_ForelineHeater5TISV"
			   aoPID_D="AO_ForelineHeater5TDSV"
		       aoManualOutput="AO_ForelineHeater5ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater5ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater5TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater6" display="ForelineHeater6" schematicId="ForelineHeater6" unit="" module=""
			   aiPV="AI_ForelineHeater6TempPV"
		       aiMV="AI_ForelineHeater6ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater6ControlOutput"
		       aiErrorID="AI_ForelineHeater6ControlErrorID"
			   aiPID_P="AI_ForelineHeater6PBFeedback"
			   aiPID_I="AI_ForelineHeater6TIFeedback"
			   aiPID_D="AI_ForelineHeater6TDFeedback"
				
			   doEnable="DO_ForelineHeater6Enable"
		       doManualControl="DO_ForelineHeater6ManualControl"
			   doAutoTuning="DO_ForelineHeater6PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater6ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater6PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater6PIDATDone"
		       diPIDControlError="DI_ForelineHeater6PIDControlError"
		       diTimePropControlError="DI_ForelineHeater6TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater6PBSV"
			   aoPID_I="AO_ForelineHeater6TISV"
			   aoPID_D="AO_ForelineHeater6TDSV"
		       aoManualOutput="AO_ForelineHeater6ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater6ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater6TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater7" display="ForelineHeater7" schematicId="ForelineHeater7" unit="" module=""
			   aiPV="AI_ForelineHeater7TempPV"
		       aiMV="AI_ForelineHeater7ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater7ControlOutput"
		       aiErrorID="AI_ForelineHeater7ControlErrorID"
			   aiPID_P="AI_ForelineHeater7PBFeedback"
			   aiPID_I="AI_ForelineHeater7TIFeedback"
			   aiPID_D="AI_ForelineHeater7TDFeedback"
				
			   doEnable="DO_ForelineHeater7Enable"
		       doManualControl="DO_ForelineHeater7ManualControl"
			   doAutoTuning="DO_ForelineHeater7PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater7ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater7PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater7PIDATDone"
		       diPIDControlError="DI_ForelineHeater7PIDControlError"
		       diTimePropControlError="DI_ForelineHeater7TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater7PBSV"
			   aoPID_I="AO_ForelineHeater7TISV"
			   aoPID_D="AO_ForelineHeater7TDSV"
		       aoManualOutput="AO_ForelineHeater7ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater7ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater7TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater8" display="ForelineHeater8" schematicId="ForelineHeater8" unit="" module=""
			   aiPV="AI_ForelineHeater8TempPV"
		       aiMV="AI_ForelineHeater8ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater8ControlOutput"
		       aiErrorID="AI_ForelineHeater8ControlErrorID"
			   aiPID_P="AI_ForelineHeater8PBFeedback"
			   aiPID_I="AI_ForelineHeater8TIFeedback"
			   aiPID_D="AI_ForelineHeater8TDFeedback"
				
			   doEnable="DO_ForelineHeater8Enable"
		       doManualControl="DO_ForelineHeater8ManualControl"
			   doAutoTuning="DO_ForelineHeater8PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater8ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater8PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater8PIDATDone"
		       diPIDControlError="DI_ForelineHeater8PIDControlError"
		       diTimePropControlError="DI_ForelineHeater8TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater8PBSV"
			   aoPID_I="AO_ForelineHeater8TISV"
			   aoPID_D="AO_ForelineHeater8TDSV"
		       aoManualOutput="AO_ForelineHeater8ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater8ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater8TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater9" display="ForelineHeater9" schematicId="ForelineHeater9" unit="" module=""
			   aiPV="AI_ForelineHeater9TempPV"
		       aiMV="AI_ForelineHeater9ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater9ControlOutput"
		       aiErrorID="AI_ForelineHeater9ControlErrorID"
			   aiPID_P="AI_ForelineHeater9PBFeedback"
			   aiPID_I="AI_ForelineHeater9TIFeedback"
			   aiPID_D="AI_ForelineHeater9TDFeedback"
				
			   doEnable="DO_ForelineHeater9Enable"
		       doManualControl="DO_ForelineHeater9ManualControl"
			   doAutoTuning="DO_ForelineHeater9PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater9ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater9PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater9PIDATDone"
		       diPIDControlError="DI_ForelineHeater9PIDControlError"
		       diTimePropControlError="DI_ForelineHeater9TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater9PBSV"
			   aoPID_I="AO_ForelineHeater9TISV"
			   aoPID_D="AO_ForelineHeater9TDSV"
		       aoManualOutput="AO_ForelineHeater9ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater9ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater9TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater10" display="ForelineHeater10" schematicId="ForelineHeater10" unit="" module=""
			   aiPV="AI_ForelineHeater10TempPV"
		       aiMV="AI_ForelineHeater10ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater10ControlOutput"
		       aiErrorID="AI_ForelineHeater10ControlErrorID"
			   aiPID_P="AI_ForelineHeater10PBFeedback"
			   aiPID_I="AI_ForelineHeater10TIFeedback"
			   aiPID_D="AI_ForelineHeater10TDFeedback"
				
			   doEnable="DO_ForelineHeater10Enable"
		       doManualControl="DO_ForelineHeater10ManualControl"
			   doAutoTuning="DO_ForelineHeater10PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater10ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater10PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater10PIDATDone"
		       diPIDControlError="DI_ForelineHeater10PIDControlError"
		       diTimePropControlError="DI_ForelineHeater10TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater10PBSV"
			   aoPID_I="AO_ForelineHeater10TISV"
			   aoPID_D="AO_ForelineHeater10TDSV"
		       aoManualOutput="AO_ForelineHeater10ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater10ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater10TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater11" display="ForelineHeater11" schematicId="ForelineHeater11" unit="" module=""
			   aiPV="AI_ForelineHeater11TempPV"
		       aiMV="AI_ForelineHeater11ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater11ControlOutput"
		       aiErrorID="AI_ForelineHeater11ControlErrorID"
			   aiPID_P="AI_ForelineHeater11PBFeedback"
			   aiPID_I="AI_ForelineHeater11TIFeedback"
			   aiPID_D="AI_ForelineHeater11TDFeedback"
				
			   doEnable="DO_ForelineHeater11Enable"
		       doManualControl="DO_ForelineHeater11ManualControl"
			   doAutoTuning="DO_ForelineHeater11PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater11ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater11PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater11PIDATDone"
		       diPIDControlError="DI_ForelineHeater11PIDControlError"
		       diTimePropControlError="DI_ForelineHeater11TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater11PBSV"
			   aoPID_I="AO_ForelineHeater11TISV"
			   aoPID_D="AO_ForelineHeater11TDSV"
		       aoManualOutput="AO_ForelineHeater11ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater11ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater11TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="ForelineHeater12" display="ForelineHeater12" schematicId="ForelineHeater12" unit="" module=""
			   aiPV="AI_ForelineHeater12TempPV"
		       aiMV="AI_ForelineHeater12ManualMVFeedback"
		       aiControlOutput="AI_ForelineHeater12ControlOutput"
		       aiErrorID="AI_ForelineHeater12ControlErrorID"
			   aiPID_P="AI_ForelineHeater12PBFeedback"
			   aiPID_I="AI_ForelineHeater12TIFeedback"
			   aiPID_D="AI_ForelineHeater12TDFeedback"
				
			   doEnable="DO_ForelineHeater12Enable"
		       doManualControl="DO_ForelineHeater12ManualControl"
			   doAutoTuning="DO_ForelineHeater12PIDATCommand"
			   
		       diControlDoing="DI_ForelineHeater12ControlDoing"
		       diAutoTuningDoing="DI_ForelineHeater12PIDATDoing"
		       diAutoTuningDone="DI_ForelineHeater12PIDATDone"
		       diPIDControlError="DI_ForelineHeater12PIDControlError"
		       diTimePropControlError="DI_ForelineHeater12TimePropControlError"
			   
		       aoPID_P="AO_ForelineHeater12PBSV"
			   aoPID_I="AO_ForelineHeater12TISV"
			   aoPID_D="AO_ForelineHeater12TDSV"
		       aoManualOutput="AO_ForelineHeater12ManualOutputSV"
		       aoControlPeriodTime="AO_ForelineHeater12ControlPeriodTimeSV"
			   aoSetPoint="AO_ForelineHeater12TempSV"
					  aioType="float"
             />
		<IoHeaterBand id="CapHeater" display="CapHeater" schematicId="CapHeater" unit="" module=""
			   aiPV="AI_CapHeaterTempPV"
		       aiMV="AI_CapHeaterManualMVFeedback"
		       aiControlOutput="AI_CapHeaterControlOutput"
		       aiErrorID="AI_CapHeaterControlErrorID"
			   aiPID_P="AI_CapHeaterPBFeedback"
			   aiPID_I="AI_CapHeaterTIFeedback"
			   aiPID_D="AI_CapHeaterTDFeedback"
				
			   doEnable="DO_CapHeaterEnable"
		       doManualControl="DO_CapHeaterManualControl"
			   doAutoTuning="DO_CapHeaterPIDATCommand"
			   
		       diControlDoing="DI_CapHeaterControlDoing"
		       diAutoTuningDoing="DI_CapHeaterPIDATDoing"
		       diAutoTuningDone="DI_CapHeaterPIDATDone"
		       diPIDControlError="DI_CapHeaterPIDControlError"
		       diTimePropControlError="DI_CapHeaterTimePropControlError"
			   
		       aoPID_P="AO_CapHeaterPBSV"
			   aoPID_I="AO_CapHeaterTISV"
			   aoPID_D="AO_CapHeaterTDSV"
		       aoManualOutput="AO_CapHeaterManualOutputSV"
		       aoControlPeriodTime="AO_CapHeaterControlPeriodTimeSV"
		   aoSetPoint="AO_CapHeaterTempSV"
				  aioType="float"
             />
		<IoHeaterBand id="APCExternalHeater" display="APCExternalHeater" schematicId="APCExternalHeater" unit="" module=""
			   aiPV="AI_APCExternalHeaterTempPV"
		       aiMV="AI_APCExternalHeaterManualMVFeedback"
		       aiControlOutput="AI_APCExternalHeaterControlOutput"
		       aiErrorID="AI_APCExternalHeaterControlErrorID"
			   aiPID_P="AI_APCExternalHeaterPBFeedback"
			   aiPID_I="AI_APCExternalHeaterTIFeedback"
			   aiPID_D="AI_APCExternalHeaterTDFeedback"
				
			   doEnable="DO_APCExternalHeaterEnable"
		       doManualControl="DO_APCExternalHeaterManualControl"
			   doAutoTuning="DO_APCExternalHeaterPIDATCommand"
			   
		       diControlDoing="DI_APCExternalHeaterControlDoing"
		       diAutoTuningDoing="DI_APCExternalHeaterPIDATDoing"
		       diAutoTuningDone="DI_APCExternalHeaterPIDATDone"
		       diPIDControlError="DI_APCExternalHeaterPIDControlError"
		       diTimePropControlError="DI_APCExternalHeaterTimePropControlError"
			   
		       aoPID_P="AO_APCExternalHeaterPBSV"
			   aoPID_I="AO_APCExternalHeaterTISV"
			   aoPID_D="AO_APCExternalHeaterTDSV"
		       aoManualOutput="AO_APCExternalHeaterManualOutputSV"
		       aoControlPeriodTime="AO_APCExternalHeaterControlPeriodTimeSV"
			   aoSetPoint="AO_APCExternalHeaterTempSV"
					  aioType="float"
             />
		<IoHeaterBand id="APCRingHeater" display="APCRingHeater" schematicId="APCRingHeater" unit="" module=""
			   aiPV="AI_APCRingHeaterTempPV"
		       aiMV="AI_APCRingHeaterManualMVFeedback"
		       aiControlOutput="AI_APCRingHeaterControlOutput"
		       aiErrorID="AI_APCRingHeaterControlErrorID"
			   aiPID_P="AI_APCRingHeaterPBFeedback"
			   aiPID_I="AI_APCRingHeaterTIFeedback"
			   aiPID_D="AI_APCRingHeaterTDFeedback"
				
			   doEnable="DO_APCRingHeaterEnable"
		       doManualControl="DO_APCRingHeaterManualControl"
			   doAutoTuning="DO_APCRingHeaterPIDATCommand"
			   
		       diControlDoing="DI_APCRingHeaterControlDoing"
		       diAutoTuningDoing="DI_APCRingHeaterPIDATDoing"
		       diAutoTuningDone="DI_APCRingHeaterPIDATDone"
		       diPIDControlError="DI_APCRingHeaterPIDControlError"
		       diTimePropControlError="DI_APCRingHeaterTimePropControlError"
			   
		       aoPID_P="AO_APCRingHeaterPBSV"
			   aoPID_I="AO_APCRingHeaterTISV"
			   aoPID_D="AO_APCRingHeaterTDSV"
		       aoManualOutput="AO_APCRingHeaterManualOutputSV"
		       aoControlPeriodTime="AO_APCRingHeaterControlPeriodTimeSV"
			   aoSetPoint="AO_APCRingHeaterTempSV"
					  aioType="float"
             />
		<IoHeaterBand id="GaslineHeaterUnit1CH1" display="GaslineHeaterUnit1CH1" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH1SV" aiPV="AI_Unit1CH1PV" aiControlOutput="AI_Unit1CH1WorkingOutput" aiPID_P="AI_Unit1CH1PID_P" aiPID_I="AI_Unit1CH1PID_I" aiPID_D="AI_Unit1CH1PID_D" aiEnableIn="AI_Unit1CH1EnableIn" aiAutotuneActivate="AI_Unit1CH1AutotuneActivate" aiAlarmHigher="AI_Unit1CH1AlarmHigher" aiUpRate="AI_Unit1CH1UpRate" aiDownRate="AI_Unit1CH1DownRate" aiAlarmLower="AI_Unit1CH1AlarmLower" aoUpRate="AO_Unit1CH1UpRate" aoDownRate="AO_Unit1CH1DownRate" aoEnableIn="AO_Unit1CH1EnableIn" aoAutotuneActivate="AO_Unit1CH1AutotuneActivate" aoPID_P="AO_Unit1CH1PID_P" aoPID_I="AO_Unit1CH1PID_I" aoPID_D="AO_Unit1CH1PID_D" aoSetPoint="AO_Unit1CH1SV" aoAlarmHigher="AO_Unit1CH1AlarmHigher" aoAlarmLower="AO_Unit1CH1AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH2" display="GaslineHeaterUnit1CH2" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH2SV" aiPV="AI_Unit1CH2PV" aiControlOutput="AI_Unit1CH2WorkingOutput" aiPID_P="AI_Unit1CH2PID_P" aiPID_I="AI_Unit1CH2PID_I" aiPID_D="AI_Unit1CH2PID_D" aiEnableIn="AI_Unit1CH2EnableIn" aiAutotuneActivate="AI_Unit1CH2AutotuneActivate" aiAlarmHigher="AI_Unit1CH2AlarmHigher" aiUpRate="AI_Unit1CH2UpRate" aiDownRate="AI_Unit1CH2DownRate" aiAlarmLower="AI_Unit1CH2AlarmLower" aoUpRate="AO_Unit1CH2UpRate" aoDownRate="AO_Unit1CH2DownRate" aoEnableIn="AO_Unit1CH2EnableIn" aoAutotuneActivate="AO_Unit1CH2AutotuneActivate" aoPID_P="AO_Unit1CH2PID_P" aoPID_I="AO_Unit1CH2PID_I" aoPID_D="AO_Unit1CH2PID_D" aoSetPoint="AO_Unit1CH2SV" aoAlarmHigher="AO_Unit1CH2AlarmHigher" aoAlarmLower="AO_Unit1CH2AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH3" display="GaslineHeaterUnit1CH3" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH3SV" aiPV="AI_Unit1CH3PV" aiControlOutput="AI_Unit1CH3WorkingOutput" aiPID_P="AI_Unit1CH3PID_P" aiPID_I="AI_Unit1CH3PID_I" aiPID_D="AI_Unit1CH3PID_D" aiEnableIn="AI_Unit1CH3EnableIn" aiAutotuneActivate="AI_Unit1CH3AutotuneActivate" aiAlarmHigher="AI_Unit1CH3AlarmHigher" aiUpRate="AI_Unit1CH3UpRate" aiDownRate="AI_Unit1CH3DownRate" aiAlarmLower="AI_Unit1CH3AlarmLower" aoUpRate="AO_Unit1CH3UpRate" aoDownRate="AO_Unit1CH3DownRate" aoEnableIn="AO_Unit1CH3EnableIn" aoAutotuneActivate="AO_Unit1CH3AutotuneActivate" aoPID_P="AO_Unit1CH3PID_P" aoPID_I="AO_Unit1CH3PID_I" aoPID_D="AO_Unit1CH3PID_D" aoSetPoint="AO_Unit1CH3SV" aoAlarmHigher="AO_Unit1CH3AlarmHigher" aoAlarmLower="AO_Unit1CH3AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH4" display="GaslineHeaterUnit1CH4" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH4SV" aiPV="AI_Unit1CH4PV" aiControlOutput="AI_Unit1CH4WorkingOutput" aiPID_P="AI_Unit1CH4PID_P" aiPID_I="AI_Unit1CH4PID_I" aiPID_D="AI_Unit1CH4PID_D" aiEnableIn="AI_Unit1CH4EnableIn" aiAutotuneActivate="AI_Unit1CH4AutotuneActivate" aiAlarmHigher="AI_Unit1CH4AlarmHigher" aiUpRate="AI_Unit1CH4UpRate" aiDownRate="AI_Unit1CH4DownRate" aiAlarmLower="AI_Unit1CH4AlarmLower" aoUpRate="AO_Unit1CH4UpRate" aoDownRate="AO_Unit1CH4DownRate" aoEnableIn="AO_Unit1CH4EnableIn" aoAutotuneActivate="AO_Unit1CH4AutotuneActivate" aoPID_P="AO_Unit1CH4PID_P" aoPID_I="AO_Unit1CH4PID_I" aoPID_D="AO_Unit1CH4PID_D" aoSetPoint="AO_Unit1CH4SV" aoAlarmHigher="AO_Unit1CH4AlarmHigher" aoAlarmLower="AO_Unit1CH4AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH5" display="GaslineHeaterUnit1CH5" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH5SV" aiPV="AI_Unit1CH5PV" aiControlOutput="AI_Unit1CH5WorkingOutput" aiPID_P="AI_Unit1CH5PID_P" aiPID_I="AI_Unit1CH5PID_I" aiPID_D="AI_Unit1CH5PID_D" aiEnableIn="AI_Unit1CH5EnableIn" aiAutotuneActivate="AI_Unit1CH5AutotuneActivate" aiAlarmHigher="AI_Unit1CH5AlarmHigher" aiUpRate="AI_Unit1CH5UpRate" aiDownRate="AI_Unit1CH5DownRate" aiAlarmLower="AI_Unit1CH5AlarmLower" aoUpRate="AO_Unit1CH5UpRate" aoDownRate="AO_Unit1CH5DownRate" aoEnableIn="AO_Unit1CH5EnableIn" aoAutotuneActivate="AO_Unit1CH5AutotuneActivate" aoPID_P="AO_Unit1CH5PID_P" aoPID_I="AO_Unit1CH5PID_I" aoPID_D="AO_Unit1CH5PID_D" aoSetPoint="AO_Unit1CH5SV" aoAlarmHigher="AO_Unit1CH5AlarmHigher" aoAlarmLower="AO_Unit1CH5AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH6" display="GaslineHeaterUnit1CH6" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH6SV" aiPV="AI_Unit1CH6PV" aiControlOutput="AI_Unit1CH6WorkingOutput" aiPID_P="AI_Unit1CH6PID_P" aiPID_I="AI_Unit1CH6PID_I" aiPID_D="AI_Unit1CH6PID_D" aiEnableIn="AI_Unit1CH6EnableIn" aiAutotuneActivate="AI_Unit1CH6AutotuneActivate" aiAlarmHigher="AI_Unit1CH6AlarmHigher" aiUpRate="AI_Unit1CH6UpRate" aiDownRate="AI_Unit1CH6DownRate" aiAlarmLower="AI_Unit1CH6AlarmLower" aoUpRate="AO_Unit1CH6UpRate" aoDownRate="AO_Unit1CH6DownRate" aoEnableIn="AO_Unit1CH6EnableIn" aoAutotuneActivate="AO_Unit1CH6AutotuneActivate" aoPID_P="AO_Unit1CH6PID_P" aoPID_I="AO_Unit1CH6PID_I" aoPID_D="AO_Unit1CH6PID_D" aoSetPoint="AO_Unit1CH6SV" aoAlarmHigher="AO_Unit1CH6AlarmHigher" aoAlarmLower="AO_Unit1CH6AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH7" display="GaslineHeaterUnit1CH7" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH7SV" aiPV="AI_Unit1CH7PV" aiControlOutput="AI_Unit1CH7WorkingOutput" aiPID_P="AI_Unit1CH7PID_P" aiPID_I="AI_Unit1CH7PID_I" aiPID_D="AI_Unit1CH7PID_D" aiEnableIn="AI_Unit1CH7EnableIn" aiAutotuneActivate="AI_Unit1CH7AutotuneActivate" aiAlarmHigher="AI_Unit1CH7AlarmHigher" aiUpRate="AI_Unit1CH7UpRate" aiDownRate="AI_Unit1CH7DownRate" aiAlarmLower="AI_Unit1CH7AlarmLower" aoUpRate="AO_Unit1CH7UpRate" aoDownRate="AO_Unit1CH7DownRate" aoEnableIn="AO_Unit1CH7EnableIn" aoAutotuneActivate="AO_Unit1CH7AutotuneActivate" aoPID_P="AO_Unit1CH7PID_P" aoPID_I="AO_Unit1CH7PID_I" aoPID_D="AO_Unit1CH7PID_D" aoSetPoint="AO_Unit1CH7SV" aoAlarmHigher="AO_Unit1CH7AlarmHigher" aoAlarmLower="AO_Unit1CH7AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH8" display="GaslineHeaterUnit1CH8" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH8SV" aiPV="AI_Unit1CH8PV" aiControlOutput="AI_Unit1CH8WorkingOutput" aiPID_P="AI_Unit1CH8PID_P" aiPID_I="AI_Unit1CH8PID_I" aiPID_D="AI_Unit1CH8PID_D" aiEnableIn="AI_Unit1CH8EnableIn" aiAutotuneActivate="AI_Unit1CH8AutotuneActivate" aiAlarmHigher="AI_Unit1CH8AlarmHigher" aiUpRate="AI_Unit1CH8UpRate" aiDownRate="AI_Unit1CH8DownRate" aiAlarmLower="AI_Unit1CH8AlarmLower" aoUpRate="AO_Unit1CH8UpRate" aoDownRate="AO_Unit1CH8DownRate" aoEnableIn="AO_Unit1CH8EnableIn" aoAutotuneActivate="AO_Unit1CH8AutotuneActivate" aoPID_P="AO_Unit1CH8PID_P" aoPID_I="AO_Unit1CH8PID_I" aoPID_D="AO_Unit1CH8PID_D" aoSetPoint="AO_Unit1CH8SV" aoAlarmHigher="AO_Unit1CH8AlarmHigher" aoAlarmLower="AO_Unit1CH8AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH9" display="GaslineHeaterUnit1CH9" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH9SV" aiPV="AI_Unit1CH9PV" aiControlOutput="AI_Unit1CH9WorkingOutput" aiPID_P="AI_Unit1CH9PID_P" aiPID_I="AI_Unit1CH9PID_I" aiPID_D="AI_Unit1CH9PID_D" aiEnableIn="AI_Unit1CH9EnableIn" aiAutotuneActivate="AI_Unit1CH9AutotuneActivate" aiAlarmHigher="AI_Unit1CH9AlarmHigher" aiUpRate="AI_Unit1CH9UpRate" aiDownRate="AI_Unit1CH9DownRate" aiAlarmLower="AI_Unit1CH9AlarmLower" aoUpRate="AO_Unit1CH9UpRate" aoDownRate="AO_Unit1CH9DownRate" aoEnableIn="AO_Unit1CH9EnableIn" aoAutotuneActivate="AO_Unit1CH9AutotuneActivate" aoPID_P="AO_Unit1CH9PID_P" aoPID_I="AO_Unit1CH9PID_I" aoPID_D="AO_Unit1CH9PID_D" aoSetPoint="AO_Unit1CH9SV" aoAlarmHigher="AO_Unit1CH9AlarmHigher" aoAlarmLower="AO_Unit1CH9AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH10" display="GaslineHeaterUnit1CH10" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH10SV" aiPV="AI_Unit1CH10PV" aiControlOutput="AI_Unit1CH10WorkingOutput" aiPID_P="AI_Unit1CH10PID_P" aiPID_I="AI_Unit1CH10PID_I" aiPID_D="AI_Unit1CH10PID_D" aiEnableIn="AI_Unit1CH10EnableIn" aiAutotuneActivate="AI_Unit1CH10AutotuneActivate" aiAlarmHigher="AI_Unit1CH10AlarmHigher" aiUpRate="AI_Unit1CH10UpRate" aiDownRate="AI_Unit1CH10DownRate" aiAlarmLower="AI_Unit1CH10AlarmLower" aoUpRate="AO_Unit1CH10UpRate" aoDownRate="AO_Unit1CH10DownRate" aoEnableIn="AO_Unit1CH10EnableIn" aoAutotuneActivate="AO_Unit1CH10AutotuneActivate" aoPID_P="AO_Unit1CH10PID_P" aoPID_I="AO_Unit1CH10PID_I" aoPID_D="AO_Unit1CH10PID_D" aoSetPoint="AO_Unit1CH10SV" aoAlarmHigher="AO_Unit1CH10AlarmHigher" aoAlarmLower="AO_Unit1CH10AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH11" display="GaslineHeaterUnit1CH11" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH11SV" aiPV="AI_Unit1CH11PV" aiControlOutput="AI_Unit1CH11WorkingOutput" aiPID_P="AI_Unit1CH11PID_P" aiPID_I="AI_Unit1CH11PID_I" aiPID_D="AI_Unit1CH11PID_D" aiEnableIn="AI_Unit1CH11EnableIn" aiAutotuneActivate="AI_Unit1CH11AutotuneActivate" aiAlarmHigher="AI_Unit1CH11AlarmHigher" aiUpRate="AI_Unit1CH11UpRate" aiDownRate="AI_Unit1CH11DownRate" aiAlarmLower="AI_Unit1CH11AlarmLower" aoUpRate="AO_Unit1CH11UpRate" aoDownRate="AO_Unit1CH11DownRate" aoEnableIn="AO_Unit1CH11EnableIn" aoAutotuneActivate="AO_Unit1CH11AutotuneActivate" aoPID_P="AO_Unit1CH11PID_P" aoPID_I="AO_Unit1CH11PID_I" aoPID_D="AO_Unit1CH11PID_D" aoSetPoint="AO_Unit1CH11SV" aoAlarmHigher="AO_Unit1CH11AlarmHigher" aoAlarmLower="AO_Unit1CH11AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH12" display="GaslineHeaterUnit1CH12" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH12SV" aiPV="AI_Unit1CH12PV" aiControlOutput="AI_Unit1CH12WorkingOutput" aiPID_P="AI_Unit1CH12PID_P" aiPID_I="AI_Unit1CH12PID_I" aiPID_D="AI_Unit1CH12PID_D" aiEnableIn="AI_Unit1CH12EnableIn" aiAutotuneActivate="AI_Unit1CH12AutotuneActivate" aiAlarmHigher="AI_Unit1CH12AlarmHigher" aiUpRate="AI_Unit1CH12UpRate" aiDownRate="AI_Unit1CH12DownRate" aiAlarmLower="AI_Unit1CH12AlarmLower" aoUpRate="AO_Unit1CH12UpRate" aoDownRate="AO_Unit1CH12DownRate" aoEnableIn="AO_Unit1CH12EnableIn" aoAutotuneActivate="AO_Unit1CH12AutotuneActivate" aoPID_P="AO_Unit1CH12PID_P" aoPID_I="AO_Unit1CH12PID_I" aoPID_D="AO_Unit1CH12PID_D" aoSetPoint="AO_Unit1CH12SV" aoAlarmHigher="AO_Unit1CH12AlarmHigher" aoAlarmLower="AO_Unit1CH12AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH13" display="GaslineHeaterUnit1CH13" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH13SV" aiPV="AI_Unit1CH13PV" aiControlOutput="AI_Unit1CH13WorkingOutput" aiPID_P="AI_Unit1CH13PID_P" aiPID_I="AI_Unit1CH13PID_I" aiPID_D="AI_Unit1CH13PID_D" aiEnableIn="AI_Unit1CH13EnableIn" aiAutotuneActivate="AI_Unit1CH13AutotuneActivate" aiAlarmHigher="AI_Unit1CH13AlarmHigher" aiUpRate="AI_Unit1CH13UpRate" aiDownRate="AI_Unit1CH13DownRate" aiAlarmLower="AI_Unit1CH13AlarmLower" aoUpRate="AO_Unit1CH13UpRate" aoDownRate="AO_Unit1CH13DownRate" aoEnableIn="AO_Unit1CH13EnableIn" aoAutotuneActivate="AO_Unit1CH13AutotuneActivate" aoPID_P="AO_Unit1CH13PID_P" aoPID_I="AO_Unit1CH13PID_I" aoPID_D="AO_Unit1CH13PID_D" aoSetPoint="AO_Unit1CH13SV" aoAlarmHigher="AO_Unit1CH13AlarmHigher" aoAlarmLower="AO_Unit1CH13AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH14" display="GaslineHeaterUnit1CH14" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH14SV" aiPV="AI_Unit1CH14PV" aiControlOutput="AI_Unit1CH14WorkingOutput" aiPID_P="AI_Unit1CH14PID_P" aiPID_I="AI_Unit1CH14PID_I" aiPID_D="AI_Unit1CH14PID_D" aiEnableIn="AI_Unit1CH14EnableIn" aiAutotuneActivate="AI_Unit1CH14AutotuneActivate" aiAlarmHigher="AI_Unit1CH14AlarmHigher" aiUpRate="AI_Unit1CH14UpRate" aiDownRate="AI_Unit1CH14DownRate" aiAlarmLower="AI_Unit1CH14AlarmLower" aoUpRate="AO_Unit1CH14UpRate" aoDownRate="AO_Unit1CH14DownRate" aoEnableIn="AO_Unit1CH14EnableIn" aoAutotuneActivate="AO_Unit1CH14AutotuneActivate" aoPID_P="AO_Unit1CH14PID_P" aoPID_I="AO_Unit1CH14PID_I" aoPID_D="AO_Unit1CH14PID_D" aoSetPoint="AO_Unit1CH14SV" aoAlarmHigher="AO_Unit1CH14AlarmHigher" aoAlarmLower="AO_Unit1CH14AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH15" display="GaslineHeaterUnit1CH15" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH15SV" aiPV="AI_Unit1CH15PV" aiControlOutput="AI_Unit1CH15WorkingOutput" aiPID_P="AI_Unit1CH15PID_P" aiPID_I="AI_Unit1CH15PID_I" aiPID_D="AI_Unit1CH15PID_D" aiEnableIn="AI_Unit1CH15EnableIn" aiAutotuneActivate="AI_Unit1CH15AutotuneActivate" aiAlarmHigher="AI_Unit1CH15AlarmHigher" aiUpRate="AI_Unit1CH15UpRate" aiDownRate="AI_Unit1CH15DownRate" aiAlarmLower="AI_Unit1CH15AlarmLower" aoUpRate="AO_Unit1CH15UpRate" aoDownRate="AO_Unit1CH15DownRate" aoEnableIn="AO_Unit1CH15EnableIn" aoAutotuneActivate="AO_Unit1CH15AutotuneActivate" aoPID_P="AO_Unit1CH15PID_P" aoPID_I="AO_Unit1CH15PID_I" aoPID_D="AO_Unit1CH15PID_D" aoSetPoint="AO_Unit1CH15SV" aoAlarmHigher="AO_Unit1CH15AlarmHigher" aoAlarmLower="AO_Unit1CH15AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit1CH16" display="GaslineHeaterUnit1CH16" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH16SV" aiPV="AI_Unit1CH16PV" aiControlOutput="AI_Unit1CH16WorkingOutput" aiPID_P="AI_Unit1CH16PID_P" aiPID_I="AI_Unit1CH16PID_I" aiPID_D="AI_Unit1CH16PID_D" aiEnableIn="AI_Unit1CH16EnableIn" aiAutotuneActivate="AI_Unit1CH16AutotuneActivate" aiAlarmHigher="AI_Unit1CH16AlarmHigher" aiUpRate="AI_Unit1CH16UpRate" aiDownRate="AI_Unit1CH16DownRate" aiAlarmLower="AI_Unit1CH16AlarmLower" aoUpRate="AO_Unit1CH16UpRate" aoDownRate="AO_Unit1CH16DownRate" aoEnableIn="AO_Unit1CH16EnableIn" aoAutotuneActivate="AO_Unit1CH16AutotuneActivate" aoPID_P="AO_Unit1CH16PID_P" aoPID_I="AO_Unit1CH16PID_I" aoPID_D="AO_Unit1CH16PID_D" aoSetPoint="AO_Unit1CH16SV" aoAlarmHigher="AO_Unit1CH16AlarmHigher" aoAlarmLower="AO_Unit1CH16AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH1" display="GaslineHeaterUnit2CH1" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH1SV" aiPV="AI_Unit2CH1PV" aiControlOutput="AI_Unit2CH1WorkingOutput" aiPID_P="AI_Unit2CH1PID_P" aiPID_I="AI_Unit2CH1PID_I" aiPID_D="AI_Unit2CH1PID_D" aiEnableIn="AI_Unit2CH1EnableIn" aiAutotuneActivate="AI_Unit2CH1AutotuneActivate" aiAlarmHigher="AI_Unit2CH1AlarmHigher" aiUpRate="AI_Unit2CH1UpRate" aiDownRate="AI_Unit2CH1DownRate" aiAlarmLower="AI_Unit2CH1AlarmLower" aoUpRate="AO_Unit2CH1UpRate" aoDownRate="AO_Unit2CH1DownRate" aoEnableIn="AO_Unit2CH1EnableIn" aoAutotuneActivate="AO_Unit2CH1AutotuneActivate" aoPID_P="AO_Unit2CH1PID_P" aoPID_I="AO_Unit2CH1PID_I" aoPID_D="AO_Unit2CH1PID_D" aoSetPoint="AO_Unit2CH1SV" aoAlarmHigher="AO_Unit2CH1AlarmHigher" aoAlarmLower="AO_Unit2CH1AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH2" display="GaslineHeaterUnit2CH2" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH2SV" aiPV="AI_Unit2CH2PV" aiControlOutput="AI_Unit2CH2WorkingOutput" aiPID_P="AI_Unit2CH2PID_P" aiPID_I="AI_Unit2CH2PID_I" aiPID_D="AI_Unit2CH2PID_D" aiEnableIn="AI_Unit2CH2EnableIn" aiAutotuneActivate="AI_Unit2CH2AutotuneActivate" aiAlarmHigher="AI_Unit2CH2AlarmHigher" aiUpRate="AI_Unit2CH2UpRate" aiDownRate="AI_Unit2CH2DownRate" aiAlarmLower="AI_Unit2CH2AlarmLower" aoUpRate="AO_Unit2CH2UpRate" aoDownRate="AO_Unit2CH2DownRate" aoEnableIn="AO_Unit2CH2EnableIn" aoAutotuneActivate="AO_Unit2CH2AutotuneActivate" aoPID_P="AO_Unit2CH2PID_P" aoPID_I="AO_Unit2CH2PID_I" aoPID_D="AO_Unit2CH2PID_D" aoSetPoint="AO_Unit2CH2SV" aoAlarmHigher="AO_Unit2CH2AlarmHigher" aoAlarmLower="AO_Unit2CH2AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH3" display="GaslineHeaterUnit2CH3" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH3SV" aiPV="AI_Unit2CH3PV" aiControlOutput="AI_Unit2CH3WorkingOutput" aiPID_P="AI_Unit2CH3PID_P" aiPID_I="AI_Unit2CH3PID_I" aiPID_D="AI_Unit2CH3PID_D" aiEnableIn="AI_Unit2CH3EnableIn" aiAutotuneActivate="AI_Unit2CH3AutotuneActivate" aiAlarmHigher="AI_Unit2CH3AlarmHigher" aiUpRate="AI_Unit2CH3UpRate" aiDownRate="AI_Unit2CH3DownRate" aiAlarmLower="AI_Unit2CH3AlarmLower" aoUpRate="AO_Unit2CH3UpRate" aoDownRate="AO_Unit2CH3DownRate" aoEnableIn="AO_Unit2CH3EnableIn" aoAutotuneActivate="AO_Unit2CH3AutotuneActivate" aoPID_P="AO_Unit2CH3PID_P" aoPID_I="AO_Unit2CH3PID_I" aoPID_D="AO_Unit2CH3PID_D" aoSetPoint="AO_Unit2CH3SV" aoAlarmHigher="AO_Unit2CH3AlarmHigher" aoAlarmLower="AO_Unit2CH3AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH4" display="GaslineHeaterUnit2CH4" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH4SV" aiPV="AI_Unit2CH4PV" aiControlOutput="AI_Unit2CH4WorkingOutput" aiPID_P="AI_Unit2CH4PID_P" aiPID_I="AI_Unit2CH4PID_I" aiPID_D="AI_Unit2CH4PID_D" aiEnableIn="AI_Unit2CH4EnableIn" aiAutotuneActivate="AI_Unit2CH4AutotuneActivate" aiAlarmHigher="AI_Unit2CH4AlarmHigher" aiUpRate="AI_Unit2CH4UpRate" aiDownRate="AI_Unit2CH4DownRate" aiAlarmLower="AI_Unit2CH4AlarmLower" aoUpRate="AO_Unit2CH4UpRate" aoDownRate="AO_Unit2CH4DownRate" aoEnableIn="AO_Unit2CH4EnableIn" aoAutotuneActivate="AO_Unit2CH4AutotuneActivate" aoPID_P="AO_Unit2CH4PID_P" aoPID_I="AO_Unit2CH4PID_I" aoPID_D="AO_Unit2CH4PID_D" aoSetPoint="AO_Unit2CH4SV" aoAlarmHigher="AO_Unit2CH4AlarmHigher" aoAlarmLower="AO_Unit2CH4AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH5" display="GaslineHeaterUnit2CH5" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH5SV" aiPV="AI_Unit2CH5PV" aiControlOutput="AI_Unit2CH5WorkingOutput" aiPID_P="AI_Unit2CH5PID_P" aiPID_I="AI_Unit2CH5PID_I" aiPID_D="AI_Unit2CH5PID_D" aiEnableIn="AI_Unit2CH5EnableIn" aiAutotuneActivate="AI_Unit2CH5AutotuneActivate" aiAlarmHigher="AI_Unit2CH5AlarmHigher" aiUpRate="AI_Unit2CH5UpRate" aiDownRate="AI_Unit2CH5DownRate" aiAlarmLower="AI_Unit2CH5AlarmLower" aoUpRate="AO_Unit2CH5UpRate" aoDownRate="AO_Unit2CH5DownRate" aoEnableIn="AO_Unit2CH5EnableIn" aoAutotuneActivate="AO_Unit2CH5AutotuneActivate" aoPID_P="AO_Unit2CH5PID_P" aoPID_I="AO_Unit2CH5PID_I" aoPID_D="AO_Unit2CH5PID_D" aoSetPoint="AO_Unit2CH5SV" aoAlarmHigher="AO_Unit2CH5AlarmHigher" aoAlarmLower="AO_Unit2CH5AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH6" display="GaslineHeaterUnit2CH6" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH6SV" aiPV="AI_Unit2CH6PV" aiControlOutput="AI_Unit2CH6WorkingOutput" aiPID_P="AI_Unit2CH6PID_P" aiPID_I="AI_Unit2CH6PID_I" aiPID_D="AI_Unit2CH6PID_D" aiEnableIn="AI_Unit2CH6EnableIn" aiAutotuneActivate="AI_Unit2CH6AutotuneActivate" aiAlarmHigher="AI_Unit2CH6AlarmHigher" aiUpRate="AI_Unit2CH6UpRate" aiDownRate="AI_Unit2CH6DownRate" aiAlarmLower="AI_Unit2CH6AlarmLower" aoUpRate="AO_Unit2CH6UpRate" aoDownRate="AO_Unit2CH6DownRate" aoEnableIn="AO_Unit2CH6EnableIn" aoAutotuneActivate="AO_Unit2CH6AutotuneActivate" aoPID_P="AO_Unit2CH6PID_P" aoPID_I="AO_Unit2CH6PID_I" aoPID_D="AO_Unit2CH6PID_D" aoSetPoint="AO_Unit2CH6SV" aoAlarmHigher="AO_Unit2CH6AlarmHigher" aoAlarmLower="AO_Unit2CH6AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH7" display="GaslineHeaterUnit2CH7" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH7SV" aiPV="AI_Unit2CH7PV" aiControlOutput="AI_Unit2CH7WorkingOutput" aiPID_P="AI_Unit2CH7PID_P" aiPID_I="AI_Unit2CH7PID_I" aiPID_D="AI_Unit2CH7PID_D" aiEnableIn="AI_Unit2CH7EnableIn" aiAutotuneActivate="AI_Unit2CH7AutotuneActivate" aiAlarmHigher="AI_Unit2CH7AlarmHigher" aiUpRate="AI_Unit2CH7UpRate" aiDownRate="AI_Unit2CH7DownRate" aiAlarmLower="AI_Unit2CH7AlarmLower" aoUpRate="AO_Unit2CH7UpRate" aoDownRate="AO_Unit2CH7DownRate" aoEnableIn="AO_Unit2CH7EnableIn" aoAutotuneActivate="AO_Unit2CH7AutotuneActivate" aoPID_P="AO_Unit2CH7PID_P" aoPID_I="AO_Unit2CH7PID_I" aoPID_D="AO_Unit2CH7PID_D" aoSetPoint="AO_Unit2CH7SV" aoAlarmHigher="AO_Unit2CH7AlarmHigher" aoAlarmLower="AO_Unit2CH7AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH8" display="GaslineHeaterUnit2CH8" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH8SV" aiPV="AI_Unit2CH8PV" aiControlOutput="AI_Unit2CH8WorkingOutput" aiPID_P="AI_Unit2CH8PID_P" aiPID_I="AI_Unit2CH8PID_I" aiPID_D="AI_Unit2CH8PID_D" aiEnableIn="AI_Unit2CH8EnableIn" aiAutotuneActivate="AI_Unit2CH8AutotuneActivate" aiAlarmHigher="AI_Unit2CH8AlarmHigher" aiUpRate="AI_Unit2CH8UpRate" aiDownRate="AI_Unit2CH8DownRate" aiAlarmLower="AI_Unit2CH8AlarmLower" aoUpRate="AO_Unit2CH8UpRate" aoDownRate="AO_Unit2CH8DownRate" aoEnableIn="AO_Unit2CH8EnableIn" aoAutotuneActivate="AO_Unit2CH8AutotuneActivate" aoPID_P="AO_Unit2CH8PID_P" aoPID_I="AO_Unit2CH8PID_I" aoPID_D="AO_Unit2CH8PID_D" aoSetPoint="AO_Unit2CH8SV" aoAlarmHigher="AO_Unit2CH8AlarmHigher" aoAlarmLower="AO_Unit2CH8AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH9" display="GaslineHeaterUnit2CH9" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH9SV" aiPV="AI_Unit2CH9PV" aiControlOutput="AI_Unit2CH9WorkingOutput" aiPID_P="AI_Unit2CH9PID_P" aiPID_I="AI_Unit2CH9PID_I" aiPID_D="AI_Unit2CH9PID_D" aiEnableIn="AI_Unit2CH9EnableIn" aiAutotuneActivate="AI_Unit2CH9AutotuneActivate" aiAlarmHigher="AI_Unit2CH9AlarmHigher" aiUpRate="AI_Unit2CH9UpRate" aiDownRate="AI_Unit2CH9DownRate" aiAlarmLower="AI_Unit2CH9AlarmLower" aoUpRate="AO_Unit2CH9UpRate" aoDownRate="AO_Unit2CH9DownRate" aoEnableIn="AO_Unit2CH9EnableIn" aoAutotuneActivate="AO_Unit2CH9AutotuneActivate" aoPID_P="AO_Unit2CH9PID_P" aoPID_I="AO_Unit2CH9PID_I" aoPID_D="AO_Unit2CH9PID_D" aoSetPoint="AO_Unit2CH9SV" aoAlarmHigher="AO_Unit2CH9AlarmHigher" aoAlarmLower="AO_Unit2CH9AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH10" display="GaslineHeaterUnit2CH10" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH10SV" aiPV="AI_Unit2CH10PV" aiControlOutput="AI_Unit2CH10WorkingOutput" aiPID_P="AI_Unit2CH10PID_P" aiPID_I="AI_Unit2CH10PID_I" aiPID_D="AI_Unit2CH10PID_D" aiEnableIn="AI_Unit2CH10EnableIn" aiAutotuneActivate="AI_Unit2CH10AutotuneActivate" aiAlarmHigher="AI_Unit2CH10AlarmHigher" aiUpRate="AI_Unit2CH10UpRate" aiDownRate="AI_Unit2CH10DownRate" aiAlarmLower="AI_Unit2CH10AlarmLower" aoUpRate="AO_Unit2CH10UpRate" aoDownRate="AO_Unit2CH10DownRate" aoEnableIn="AO_Unit2CH10EnableIn" aoAutotuneActivate="AO_Unit2CH10AutotuneActivate" aoPID_P="AO_Unit2CH10PID_P" aoPID_I="AO_Unit2CH10PID_I" aoPID_D="AO_Unit2CH10PID_D" aoSetPoint="AO_Unit2CH10SV" aoAlarmHigher="AO_Unit2CH10AlarmHigher" aoAlarmLower="AO_Unit2CH10AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH11" display="GaslineHeaterUnit2CH11" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH11SV" aiPV="AI_Unit2CH11PV" aiControlOutput="AI_Unit2CH11WorkingOutput" aiPID_P="AI_Unit2CH11PID_P" aiPID_I="AI_Unit2CH11PID_I" aiPID_D="AI_Unit2CH11PID_D" aiEnableIn="AI_Unit2CH11EnableIn" aiAutotuneActivate="AI_Unit2CH11AutotuneActivate" aiAlarmHigher="AI_Unit2CH11AlarmHigher" aiUpRate="AI_Unit2CH11UpRate" aiDownRate="AI_Unit2CH11DownRate" aiAlarmLower="AI_Unit2CH11AlarmLower" aoUpRate="AO_Unit2CH11UpRate" aoDownRate="AO_Unit2CH11DownRate" aoEnableIn="AO_Unit2CH11EnableIn" aoAutotuneActivate="AO_Unit2CH11AutotuneActivate" aoPID_P="AO_Unit2CH11PID_P" aoPID_I="AO_Unit2CH11PID_I" aoPID_D="AO_Unit2CH11PID_D" aoSetPoint="AO_Unit2CH11SV" aoAlarmHigher="AO_Unit2CH11AlarmHigher" aoAlarmLower="AO_Unit2CH11AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH12" display="GaslineHeaterUnit2CH12" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH12SV" aiPV="AI_Unit2CH12PV" aiControlOutput="AI_Unit2CH12WorkingOutput" aiPID_P="AI_Unit2CH12PID_P" aiPID_I="AI_Unit2CH12PID_I" aiPID_D="AI_Unit2CH12PID_D" aiEnableIn="AI_Unit2CH12EnableIn" aiAutotuneActivate="AI_Unit2CH12AutotuneActivate" aiAlarmHigher="AI_Unit2CH12AlarmHigher" aiUpRate="AI_Unit2CH12UpRate" aiDownRate="AI_Unit2CH12DownRate" aiAlarmLower="AI_Unit2CH12AlarmLower" aoUpRate="AO_Unit2CH12UpRate" aoDownRate="AO_Unit2CH12DownRate" aoEnableIn="AO_Unit2CH12EnableIn" aoAutotuneActivate="AO_Unit2CH12AutotuneActivate" aoPID_P="AO_Unit2CH12PID_P" aoPID_I="AO_Unit2CH12PID_I" aoPID_D="AO_Unit2CH12PID_D" aoSetPoint="AO_Unit2CH12SV" aoAlarmHigher="AO_Unit2CH12AlarmHigher" aoAlarmLower="AO_Unit2CH12AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH13" display="GaslineHeaterUnit2CH13" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH13SV" aiPV="AI_Unit2CH13PV" aiControlOutput="AI_Unit2CH13WorkingOutput" aiPID_P="AI_Unit2CH13PID_P" aiPID_I="AI_Unit2CH13PID_I" aiPID_D="AI_Unit2CH13PID_D" aiEnableIn="AI_Unit2CH13EnableIn" aiAutotuneActivate="AI_Unit2CH13AutotuneActivate" aiAlarmHigher="AI_Unit2CH13AlarmHigher" aiUpRate="AI_Unit2CH13UpRate" aiDownRate="AI_Unit2CH13DownRate" aiAlarmLower="AI_Unit2CH13AlarmLower" aoUpRate="AO_Unit2CH13UpRate" aoDownRate="AO_Unit2CH13DownRate" aoEnableIn="AO_Unit2CH13EnableIn" aoAutotuneActivate="AO_Unit2CH13AutotuneActivate" aoPID_P="AO_Unit2CH13PID_P" aoPID_I="AO_Unit2CH13PID_I" aoPID_D="AO_Unit2CH13PID_D" aoSetPoint="AO_Unit2CH13SV" aoAlarmHigher="AO_Unit2CH13AlarmHigher" aoAlarmLower="AO_Unit2CH13AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH14" display="GaslineHeaterUnit2CH14" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH14SV" aiPV="AI_Unit2CH14PV" aiControlOutput="AI_Unit2CH14WorkingOutput" aiPID_P="AI_Unit2CH14PID_P" aiPID_I="AI_Unit2CH14PID_I" aiPID_D="AI_Unit2CH14PID_D" aiEnableIn="AI_Unit2CH14EnableIn" aiAutotuneActivate="AI_Unit2CH14AutotuneActivate" aiAlarmHigher="AI_Unit2CH14AlarmHigher" aiUpRate="AI_Unit2CH14UpRate" aiDownRate="AI_Unit2CH14DownRate" aiAlarmLower="AI_Unit2CH14AlarmLower" aoUpRate="AO_Unit2CH14UpRate" aoDownRate="AO_Unit2CH14DownRate" aoEnableIn="AO_Unit2CH14EnableIn" aoAutotuneActivate="AO_Unit2CH14AutotuneActivate" aoPID_P="AO_Unit2CH14PID_P" aoPID_I="AO_Unit2CH14PID_I" aoPID_D="AO_Unit2CH14PID_D" aoSetPoint="AO_Unit2CH14SV" aoAlarmHigher="AO_Unit2CH14AlarmHigher" aoAlarmLower="AO_Unit2CH14AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH15" display="GaslineHeaterUnit2CH15" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH15SV" aiPV="AI_Unit2CH15PV" aiControlOutput="AI_Unit2CH15WorkingOutput" aiPID_P="AI_Unit2CH15PID_P" aiPID_I="AI_Unit2CH15PID_I" aiPID_D="AI_Unit2CH15PID_D" aiEnableIn="AI_Unit2CH15EnableIn" aiAutotuneActivate="AI_Unit2CH15AutotuneActivate" aiAlarmHigher="AI_Unit2CH15AlarmHigher" aiUpRate="AI_Unit2CH15UpRate" aiDownRate="AI_Unit2CH15DownRate" aiAlarmLower="AI_Unit2CH15AlarmLower" aoUpRate="AO_Unit2CH15UpRate" aoDownRate="AO_Unit2CH15DownRate" aoEnableIn="AO_Unit2CH15EnableIn" aoAutotuneActivate="AO_Unit2CH15AutotuneActivate" aoPID_P="AO_Unit2CH15PID_P" aoPID_I="AO_Unit2CH15PID_I" aoPID_D="AO_Unit2CH15PID_D" aoSetPoint="AO_Unit2CH15SV" aoAlarmHigher="AO_Unit2CH15AlarmHigher" aoAlarmLower="AO_Unit2CH15AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit2CH16" display="GaslineHeaterUnit2CH16" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH16SV" aiPV="AI_Unit2CH16PV" aiControlOutput="AI_Unit2CH16WorkingOutput" aiPID_P="AI_Unit2CH16PID_P" aiPID_I="AI_Unit2CH16PID_I" aiPID_D="AI_Unit2CH16PID_D" aiEnableIn="AI_Unit2CH16EnableIn" aiAutotuneActivate="AI_Unit2CH16AutotuneActivate" aiAlarmHigher="AI_Unit2CH16AlarmHigher" aiUpRate="AI_Unit2CH16UpRate" aiDownRate="AI_Unit2CH16DownRate" aiAlarmLower="AI_Unit2CH16AlarmLower" aoUpRate="AO_Unit2CH16UpRate" aoDownRate="AO_Unit2CH16DownRate" aoEnableIn="AO_Unit2CH16EnableIn" aoAutotuneActivate="AO_Unit2CH16AutotuneActivate" aoPID_P="AO_Unit2CH16PID_P" aoPID_I="AO_Unit2CH16PID_I" aoPID_D="AO_Unit2CH16PID_D" aoSetPoint="AO_Unit2CH16SV" aoAlarmHigher="AO_Unit2CH16AlarmHigher" aoAlarmLower="AO_Unit2CH16AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH1" display="GaslineHeaterUnit3CH1" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH1SV" aiPV="AI_Unit3CH1PV" aiControlOutput="AI_Unit3CH1WorkingOutput" aiPID_P="AI_Unit3CH1PID_P" aiPID_I="AI_Unit3CH1PID_I" aiPID_D="AI_Unit3CH1PID_D" aiEnableIn="AI_Unit3CH1EnableIn" aiAutotuneActivate="AI_Unit3CH1AutotuneActivate" aiAlarmHigher="AI_Unit3CH1AlarmHigher" aiUpRate="AI_Unit3CH1UpRate" aiDownRate="AI_Unit3CH1DownRate" aiAlarmLower="AI_Unit3CH1AlarmLower" aoUpRate="AO_Unit3CH1UpRate" aoDownRate="AO_Unit3CH1DownRate" aoEnableIn="AO_Unit3CH1EnableIn" aoAutotuneActivate="AO_Unit3CH1AutotuneActivate" aoPID_P="AO_Unit3CH1PID_P" aoPID_I="AO_Unit3CH1PID_I" aoPID_D="AO_Unit3CH1PID_D" aoSetPoint="AO_Unit3CH1SV" aoAlarmHigher="AO_Unit3CH1AlarmHigher" aoAlarmLower="AO_Unit3CH1AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH2" display="GaslineHeaterUnit3CH2" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH2SV" aiPV="AI_Unit3CH2PV" aiControlOutput="AI_Unit3CH2WorkingOutput" aiPID_P="AI_Unit3CH2PID_P" aiPID_I="AI_Unit3CH2PID_I" aiPID_D="AI_Unit3CH2PID_D" aiEnableIn="AI_Unit3CH2EnableIn" aiAutotuneActivate="AI_Unit3CH2AutotuneActivate" aiAlarmHigher="AI_Unit3CH2AlarmHigher" aiUpRate="AI_Unit3CH2UpRate" aiDownRate="AI_Unit3CH2DownRate" aiAlarmLower="AI_Unit3CH2AlarmLower" aoUpRate="AO_Unit3CH2UpRate" aoDownRate="AO_Unit3CH2DownRate" aoEnableIn="AO_Unit3CH2EnableIn" aoAutotuneActivate="AO_Unit3CH2AutotuneActivate" aoPID_P="AO_Unit3CH2PID_P" aoPID_I="AO_Unit3CH2PID_I" aoPID_D="AO_Unit3CH2PID_D" aoSetPoint="AO_Unit3CH2SV" aoAlarmHigher="AO_Unit3CH2AlarmHigher" aoAlarmLower="AO_Unit3CH2AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH3" display="GaslineHeaterUnit3CH3" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH3SV" aiPV="AI_Unit3CH3PV" aiControlOutput="AI_Unit3CH3WorkingOutput" aiPID_P="AI_Unit3CH3PID_P" aiPID_I="AI_Unit3CH3PID_I" aiPID_D="AI_Unit3CH3PID_D" aiEnableIn="AI_Unit3CH3EnableIn" aiAutotuneActivate="AI_Unit3CH3AutotuneActivate" aiAlarmHigher="AI_Unit3CH3AlarmHigher" aiUpRate="AI_Unit3CH3UpRate" aiDownRate="AI_Unit3CH3DownRate" aiAlarmLower="AI_Unit3CH3AlarmLower" aoUpRate="AO_Unit3CH3UpRate" aoDownRate="AO_Unit3CH3DownRate" aoEnableIn="AO_Unit3CH3EnableIn" aoAutotuneActivate="AO_Unit3CH3AutotuneActivate" aoPID_P="AO_Unit3CH3PID_P" aoPID_I="AO_Unit3CH3PID_I" aoPID_D="AO_Unit3CH3PID_D" aoSetPoint="AO_Unit3CH3SV" aoAlarmHigher="AO_Unit3CH3AlarmHigher" aoAlarmLower="AO_Unit3CH3AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH4" display="GaslineHeaterUnit3CH4" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH4SV" aiPV="AI_Unit3CH4PV" aiControlOutput="AI_Unit3CH4WorkingOutput" aiPID_P="AI_Unit3CH4PID_P" aiPID_I="AI_Unit3CH4PID_I" aiPID_D="AI_Unit3CH4PID_D" aiEnableIn="AI_Unit3CH4EnableIn" aiAutotuneActivate="AI_Unit3CH4AutotuneActivate" aiAlarmHigher="AI_Unit3CH4AlarmHigher" aiUpRate="AI_Unit3CH4UpRate" aiDownRate="AI_Unit3CH4DownRate" aiAlarmLower="AI_Unit3CH4AlarmLower" aoUpRate="AO_Unit3CH4UpRate" aoDownRate="AO_Unit3CH4DownRate" aoEnableIn="AO_Unit3CH4EnableIn" aoAutotuneActivate="AO_Unit3CH4AutotuneActivate" aoPID_P="AO_Unit3CH4PID_P" aoPID_I="AO_Unit3CH4PID_I" aoPID_D="AO_Unit3CH4PID_D" aoSetPoint="AO_Unit3CH4SV" aoAlarmHigher="AO_Unit3CH4AlarmHigher" aoAlarmLower="AO_Unit3CH4AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH5" display="GaslineHeaterUnit3CH5" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH5SV" aiPV="AI_Unit3CH5PV" aiControlOutput="AI_Unit3CH5WorkingOutput" aiPID_P="AI_Unit3CH5PID_P" aiPID_I="AI_Unit3CH5PID_I" aiPID_D="AI_Unit3CH5PID_D" aiEnableIn="AI_Unit3CH5EnableIn" aiAutotuneActivate="AI_Unit3CH5AutotuneActivate" aiAlarmHigher="AI_Unit3CH5AlarmHigher" aiUpRate="AI_Unit3CH5UpRate" aiDownRate="AI_Unit3CH5DownRate" aiAlarmLower="AI_Unit3CH5AlarmLower" aoUpRate="AO_Unit3CH5UpRate" aoDownRate="AO_Unit3CH5DownRate" aoEnableIn="AO_Unit3CH5EnableIn" aoAutotuneActivate="AO_Unit3CH5AutotuneActivate" aoPID_P="AO_Unit3CH5PID_P" aoPID_I="AO_Unit3CH5PID_I" aoPID_D="AO_Unit3CH5PID_D" aoSetPoint="AO_Unit3CH5SV" aoAlarmHigher="AO_Unit3CH5AlarmHigher" aoAlarmLower="AO_Unit3CH5AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH6" display="GaslineHeaterUnit3CH6" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH6SV" aiPV="AI_Unit3CH6PV" aiControlOutput="AI_Unit3CH6WorkingOutput" aiPID_P="AI_Unit3CH6PID_P" aiPID_I="AI_Unit3CH6PID_I" aiPID_D="AI_Unit3CH6PID_D" aiEnableIn="AI_Unit3CH6EnableIn" aiAutotuneActivate="AI_Unit3CH6AutotuneActivate" aiAlarmHigher="AI_Unit3CH6AlarmHigher" aiUpRate="AI_Unit3CH6UpRate" aiDownRate="AI_Unit3CH6DownRate" aiAlarmLower="AI_Unit3CH6AlarmLower" aoUpRate="AO_Unit3CH6UpRate" aoDownRate="AO_Unit3CH6DownRate" aoEnableIn="AO_Unit3CH6EnableIn" aoAutotuneActivate="AO_Unit3CH6AutotuneActivate" aoPID_P="AO_Unit3CH6PID_P" aoPID_I="AO_Unit3CH6PID_I" aoPID_D="AO_Unit3CH6PID_D" aoSetPoint="AO_Unit3CH6SV" aoAlarmHigher="AO_Unit3CH6AlarmHigher" aoAlarmLower="AO_Unit3CH6AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH7" display="GaslineHeaterUnit3CH7" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH7SV" aiPV="AI_Unit3CH7PV" aiControlOutput="AI_Unit3CH7WorkingOutput" aiPID_P="AI_Unit3CH7PID_P" aiPID_I="AI_Unit3CH7PID_I" aiPID_D="AI_Unit3CH7PID_D" aiEnableIn="AI_Unit3CH7EnableIn" aiAutotuneActivate="AI_Unit3CH7AutotuneActivate" aiAlarmHigher="AI_Unit3CH7AlarmHigher" aiUpRate="AI_Unit3CH7UpRate" aiDownRate="AI_Unit3CH7DownRate" aiAlarmLower="AI_Unit3CH7AlarmLower" aoUpRate="AO_Unit3CH7UpRate" aoDownRate="AO_Unit3CH7DownRate" aoEnableIn="AO_Unit3CH7EnableIn" aoAutotuneActivate="AO_Unit3CH7AutotuneActivate" aoPID_P="AO_Unit3CH7PID_P" aoPID_I="AO_Unit3CH7PID_I" aoPID_D="AO_Unit3CH7PID_D" aoSetPoint="AO_Unit3CH7SV" aoAlarmHigher="AO_Unit3CH7AlarmHigher" aoAlarmLower="AO_Unit3CH7AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH8" display="GaslineHeaterUnit3CH8" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH8SV" aiPV="AI_Unit3CH8PV" aiControlOutput="AI_Unit3CH8WorkingOutput" aiPID_P="AI_Unit3CH8PID_P" aiPID_I="AI_Unit3CH8PID_I" aiPID_D="AI_Unit3CH8PID_D" aiEnableIn="AI_Unit3CH8EnableIn" aiAutotuneActivate="AI_Unit3CH8AutotuneActivate" aiAlarmHigher="AI_Unit3CH8AlarmHigher" aiUpRate="AI_Unit3CH8UpRate" aiDownRate="AI_Unit3CH8DownRate" aiAlarmLower="AI_Unit3CH8AlarmLower" aoUpRate="AO_Unit3CH8UpRate" aoDownRate="AO_Unit3CH8DownRate" aoEnableIn="AO_Unit3CH8EnableIn" aoAutotuneActivate="AO_Unit3CH8AutotuneActivate" aoPID_P="AO_Unit3CH8PID_P" aoPID_I="AO_Unit3CH8PID_I" aoPID_D="AO_Unit3CH8PID_D" aoSetPoint="AO_Unit3CH8SV" aoAlarmHigher="AO_Unit3CH8AlarmHigher" aoAlarmLower="AO_Unit3CH8AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH9" display="GaslineHeaterUnit3CH9" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH9SV" aiPV="AI_Unit3CH9PV" aiControlOutput="AI_Unit3CH9WorkingOutput" aiPID_P="AI_Unit3CH9PID_P" aiPID_I="AI_Unit3CH9PID_I" aiPID_D="AI_Unit3CH9PID_D" aiEnableIn="AI_Unit3CH9EnableIn" aiAutotuneActivate="AI_Unit3CH9AutotuneActivate" aiAlarmHigher="AI_Unit3CH9AlarmHigher" aiUpRate="AI_Unit3CH9UpRate" aiDownRate="AI_Unit3CH9DownRate" aiAlarmLower="AI_Unit3CH9AlarmLower" aoUpRate="AO_Unit3CH9UpRate" aoDownRate="AO_Unit3CH9DownRate" aoEnableIn="AO_Unit3CH9EnableIn" aoAutotuneActivate="AO_Unit3CH9AutotuneActivate" aoPID_P="AO_Unit3CH9PID_P" aoPID_I="AO_Unit3CH9PID_I" aoPID_D="AO_Unit3CH9PID_D" aoSetPoint="AO_Unit3CH9SV" aoAlarmHigher="AO_Unit3CH9AlarmHigher" aoAlarmLower="AO_Unit3CH9AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH10" display="GaslineHeaterUnit3CH10" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH10SV" aiPV="AI_Unit3CH10PV" aiControlOutput="AI_Unit3CH10WorkingOutput" aiPID_P="AI_Unit3CH10PID_P" aiPID_I="AI_Unit3CH10PID_I" aiPID_D="AI_Unit3CH10PID_D" aiEnableIn="AI_Unit3CH10EnableIn" aiAutotuneActivate="AI_Unit3CH10AutotuneActivate" aiAlarmHigher="AI_Unit3CH10AlarmHigher" aiUpRate="AI_Unit3CH10UpRate" aiDownRate="AI_Unit3CH10DownRate" aiAlarmLower="AI_Unit3CH10AlarmLower" aoUpRate="AO_Unit3CH10UpRate" aoDownRate="AO_Unit3CH10DownRate" aoEnableIn="AO_Unit3CH10EnableIn" aoAutotuneActivate="AO_Unit3CH10AutotuneActivate" aoPID_P="AO_Unit3CH10PID_P" aoPID_I="AO_Unit3CH10PID_I" aoPID_D="AO_Unit3CH10PID_D" aoSetPoint="AO_Unit3CH10SV" aoAlarmHigher="AO_Unit3CH10AlarmHigher" aoAlarmLower="AO_Unit3CH10AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH11" display="GaslineHeaterUnit3CH11" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH11SV" aiPV="AI_Unit3CH11PV" aiControlOutput="AI_Unit3CH11WorkingOutput" aiPID_P="AI_Unit3CH11PID_P" aiPID_I="AI_Unit3CH11PID_I" aiPID_D="AI_Unit3CH11PID_D" aiEnableIn="AI_Unit3CH11EnableIn" aiAutotuneActivate="AI_Unit3CH11AutotuneActivate" aiAlarmHigher="AI_Unit3CH11AlarmHigher" aiUpRate="AI_Unit3CH11UpRate" aiDownRate="AI_Unit3CH11DownRate" aiAlarmLower="AI_Unit3CH11AlarmLower" aoUpRate="AO_Unit3CH11UpRate" aoDownRate="AO_Unit3CH11DownRate" aoEnableIn="AO_Unit3CH11EnableIn" aoAutotuneActivate="AO_Unit3CH11AutotuneActivate" aoPID_P="AO_Unit3CH11PID_P" aoPID_I="AO_Unit3CH11PID_I" aoPID_D="AO_Unit3CH11PID_D" aoSetPoint="AO_Unit3CH11SV" aoAlarmHigher="AO_Unit3CH11AlarmHigher" aoAlarmLower="AO_Unit3CH11AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH12" display="GaslineHeaterUnit3CH12" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH12SV" aiPV="AI_Unit3CH12PV" aiControlOutput="AI_Unit3CH12WorkingOutput" aiPID_P="AI_Unit3CH12PID_P" aiPID_I="AI_Unit3CH12PID_I" aiPID_D="AI_Unit3CH12PID_D" aiEnableIn="AI_Unit3CH12EnableIn" aiAutotuneActivate="AI_Unit3CH12AutotuneActivate" aiAlarmHigher="AI_Unit3CH12AlarmHigher" aiUpRate="AI_Unit3CH12UpRate" aiDownRate="AI_Unit3CH12DownRate" aiAlarmLower="AI_Unit3CH12AlarmLower" aoUpRate="AO_Unit3CH12UpRate" aoDownRate="AO_Unit3CH12DownRate" aoEnableIn="AO_Unit3CH12EnableIn" aoAutotuneActivate="AO_Unit3CH12AutotuneActivate" aoPID_P="AO_Unit3CH12PID_P" aoPID_I="AO_Unit3CH12PID_I" aoPID_D="AO_Unit3CH12PID_D" aoSetPoint="AO_Unit3CH12SV" aoAlarmHigher="AO_Unit3CH12AlarmHigher" aoAlarmLower="AO_Unit3CH12AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH13" display="GaslineHeaterUnit3CH13" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH13SV" aiPV="AI_Unit3CH13PV" aiControlOutput="AI_Unit3CH13WorkingOutput" aiPID_P="AI_Unit3CH13PID_P" aiPID_I="AI_Unit3CH13PID_I" aiPID_D="AI_Unit3CH13PID_D" aiEnableIn="AI_Unit3CH13EnableIn" aiAutotuneActivate="AI_Unit3CH13AutotuneActivate" aiAlarmHigher="AI_Unit3CH13AlarmHigher" aiUpRate="AI_Unit3CH13UpRate" aiDownRate="AI_Unit3CH13DownRate" aiAlarmLower="AI_Unit3CH13AlarmLower" aoUpRate="AO_Unit3CH13UpRate" aoDownRate="AO_Unit3CH13DownRate" aoEnableIn="AO_Unit3CH13EnableIn" aoAutotuneActivate="AO_Unit3CH13AutotuneActivate" aoPID_P="AO_Unit3CH13PID_P" aoPID_I="AO_Unit3CH13PID_I" aoPID_D="AO_Unit3CH13PID_D" aoSetPoint="AO_Unit3CH13SV" aoAlarmHigher="AO_Unit3CH13AlarmHigher" aoAlarmLower="AO_Unit3CH13AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH14" display="GaslineHeaterUnit3CH14" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH14SV" aiPV="AI_Unit3CH14PV" aiControlOutput="AI_Unit3CH14WorkingOutput" aiPID_P="AI_Unit3CH14PID_P" aiPID_I="AI_Unit3CH14PID_I" aiPID_D="AI_Unit3CH14PID_D" aiEnableIn="AI_Unit3CH14EnableIn" aiAutotuneActivate="AI_Unit3CH14AutotuneActivate" aiAlarmHigher="AI_Unit3CH14AlarmHigher" aiUpRate="AI_Unit3CH14UpRate" aiDownRate="AI_Unit3CH14DownRate" aiAlarmLower="AI_Unit3CH14AlarmLower" aoUpRate="AO_Unit3CH14UpRate" aoDownRate="AO_Unit3CH14DownRate" aoEnableIn="AO_Unit3CH14EnableIn" aoAutotuneActivate="AO_Unit3CH14AutotuneActivate" aoPID_P="AO_Unit3CH14PID_P" aoPID_I="AO_Unit3CH14PID_I" aoPID_D="AO_Unit3CH14PID_D" aoSetPoint="AO_Unit3CH14SV" aoAlarmHigher="AO_Unit3CH14AlarmHigher" aoAlarmLower="AO_Unit3CH14AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH15" display="GaslineHeaterUnit3CH15" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH15SV" aiPV="AI_Unit3CH15PV" aiControlOutput="AI_Unit3CH15WorkingOutput" aiPID_P="AI_Unit3CH15PID_P" aiPID_I="AI_Unit3CH15PID_I" aiPID_D="AI_Unit3CH15PID_D" aiEnableIn="AI_Unit3CH15EnableIn" aiAutotuneActivate="AI_Unit3CH15AutotuneActivate" aiAlarmHigher="AI_Unit3CH15AlarmHigher" aiUpRate="AI_Unit3CH15UpRate" aiDownRate="AI_Unit3CH15DownRate" aiAlarmLower="AI_Unit3CH15AlarmLower" aoUpRate="AO_Unit3CH15UpRate" aoDownRate="AO_Unit3CH15DownRate" aoEnableIn="AO_Unit3CH15EnableIn" aoAutotuneActivate="AO_Unit3CH15AutotuneActivate" aoPID_P="AO_Unit3CH15PID_P" aoPID_I="AO_Unit3CH15PID_I" aoPID_D="AO_Unit3CH15PID_D" aoSetPoint="AO_Unit3CH15SV" aoAlarmHigher="AO_Unit3CH15AlarmHigher" aoAlarmLower="AO_Unit3CH15AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit3CH16" display="GaslineHeaterUnit3CH16" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH16SV" aiPV="AI_Unit3CH16PV" aiControlOutput="AI_Unit3CH16WorkingOutput" aiPID_P="AI_Unit3CH16PID_P" aiPID_I="AI_Unit3CH16PID_I" aiPID_D="AI_Unit3CH16PID_D" aiEnableIn="AI_Unit3CH16EnableIn" aiAutotuneActivate="AI_Unit3CH16AutotuneActivate" aiAlarmHigher="AI_Unit3CH16AlarmHigher" aiUpRate="AI_Unit3CH16UpRate" aiDownRate="AI_Unit3CH16DownRate" aiAlarmLower="AI_Unit3CH16AlarmLower" aoUpRate="AO_Unit3CH16UpRate" aoDownRate="AO_Unit3CH16DownRate" aoEnableIn="AO_Unit3CH16EnableIn" aoAutotuneActivate="AO_Unit3CH16AutotuneActivate" aoPID_P="AO_Unit3CH16PID_P" aoPID_I="AO_Unit3CH16PID_I" aoPID_D="AO_Unit3CH16PID_D" aoSetPoint="AO_Unit3CH16SV" aoAlarmHigher="AO_Unit3CH16AlarmHigher" aoAlarmLower="AO_Unit3CH16AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH1" display="GaslineHeaterUnit4CH1" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH1SV" aiPV="AI_Unit4CH1PV" aiControlOutput="AI_Unit4CH1WorkingOutput" aiPID_P="AI_Unit4CH1PID_P" aiPID_I="AI_Unit4CH1PID_I" aiPID_D="AI_Unit4CH1PID_D" aiEnableIn="AI_Unit4CH1EnableIn" aiAutotuneActivate="AI_Unit4CH1AutotuneActivate" aiAlarmHigher="AI_Unit4CH1AlarmHigher" aiUpRate="AI_Unit4CH1UpRate" aiDownRate="AI_Unit4CH1DownRate" aiAlarmLower="AI_Unit4CH1AlarmLower" aoUpRate="AO_Unit4CH1UpRate" aoDownRate="AO_Unit4CH1DownRate" aoEnableIn="AO_Unit4CH1EnableIn" aoAutotuneActivate="AO_Unit4CH1AutotuneActivate" aoPID_P="AO_Unit4CH1PID_P" aoPID_I="AO_Unit4CH1PID_I" aoPID_D="AO_Unit4CH1PID_D" aoSetPoint="AO_Unit4CH1SV" aoAlarmHigher="AO_Unit4CH1AlarmHigher" aoAlarmLower="AO_Unit4CH1AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH2" display="GaslineHeaterUnit4CH2" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH2SV" aiPV="AI_Unit4CH2PV" aiControlOutput="AI_Unit4CH2WorkingOutput" aiPID_P="AI_Unit4CH2PID_P" aiPID_I="AI_Unit4CH2PID_I" aiPID_D="AI_Unit4CH2PID_D" aiEnableIn="AI_Unit4CH2EnableIn" aiAutotuneActivate="AI_Unit4CH2AutotuneActivate" aiAlarmHigher="AI_Unit4CH2AlarmHigher" aiUpRate="AI_Unit4CH2UpRate" aiDownRate="AI_Unit4CH2DownRate" aiAlarmLower="AI_Unit4CH2AlarmLower" aoUpRate="AO_Unit4CH2UpRate" aoDownRate="AO_Unit4CH2DownRate" aoEnableIn="AO_Unit4CH2EnableIn" aoAutotuneActivate="AO_Unit4CH2AutotuneActivate" aoPID_P="AO_Unit4CH2PID_P" aoPID_I="AO_Unit4CH2PID_I" aoPID_D="AO_Unit4CH2PID_D" aoSetPoint="AO_Unit4CH2SV" aoAlarmHigher="AO_Unit4CH2AlarmHigher" aoAlarmLower="AO_Unit4CH2AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH3" display="GaslineHeaterUnit4CH3" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH3SV" aiPV="AI_Unit4CH3PV" aiControlOutput="AI_Unit4CH3WorkingOutput" aiPID_P="AI_Unit4CH3PID_P" aiPID_I="AI_Unit4CH3PID_I" aiPID_D="AI_Unit4CH3PID_D" aiEnableIn="AI_Unit4CH3EnableIn" aiAutotuneActivate="AI_Unit4CH3AutotuneActivate" aiAlarmHigher="AI_Unit4CH3AlarmHigher" aiUpRate="AI_Unit4CH3UpRate" aiDownRate="AI_Unit4CH3DownRate" aiAlarmLower="AI_Unit4CH3AlarmLower" aoUpRate="AO_Unit4CH3UpRate" aoDownRate="AO_Unit4CH3DownRate" aoEnableIn="AO_Unit4CH3EnableIn" aoAutotuneActivate="AO_Unit4CH3AutotuneActivate" aoPID_P="AO_Unit4CH3PID_P" aoPID_I="AO_Unit4CH3PID_I" aoPID_D="AO_Unit4CH3PID_D" aoSetPoint="AO_Unit4CH3SV" aoAlarmHigher="AO_Unit4CH3AlarmHigher" aoAlarmLower="AO_Unit4CH3AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH4" display="GaslineHeaterUnit4CH4" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH4SV" aiPV="AI_Unit4CH4PV" aiControlOutput="AI_Unit4CH4WorkingOutput" aiPID_P="AI_Unit4CH4PID_P" aiPID_I="AI_Unit4CH4PID_I" aiPID_D="AI_Unit4CH4PID_D" aiEnableIn="AI_Unit4CH4EnableIn" aiAutotuneActivate="AI_Unit4CH4AutotuneActivate" aiAlarmHigher="AI_Unit4CH4AlarmHigher" aiUpRate="AI_Unit4CH4UpRate" aiDownRate="AI_Unit4CH4DownRate" aiAlarmLower="AI_Unit4CH4AlarmLower" aoUpRate="AO_Unit4CH4UpRate" aoDownRate="AO_Unit4CH4DownRate" aoEnableIn="AO_Unit4CH4EnableIn" aoAutotuneActivate="AO_Unit4CH4AutotuneActivate" aoPID_P="AO_Unit4CH4PID_P" aoPID_I="AO_Unit4CH4PID_I" aoPID_D="AO_Unit4CH4PID_D" aoSetPoint="AO_Unit4CH4SV" aoAlarmHigher="AO_Unit4CH4AlarmHigher" aoAlarmLower="AO_Unit4CH4AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH5" display="GaslineHeaterUnit4CH5" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH5SV" aiPV="AI_Unit4CH5PV" aiControlOutput="AI_Unit4CH5WorkingOutput" aiPID_P="AI_Unit4CH5PID_P" aiPID_I="AI_Unit4CH5PID_I" aiPID_D="AI_Unit4CH5PID_D" aiEnableIn="AI_Unit4CH5EnableIn" aiAutotuneActivate="AI_Unit4CH5AutotuneActivate" aiAlarmHigher="AI_Unit4CH5AlarmHigher" aiUpRate="AI_Unit4CH5UpRate" aiDownRate="AI_Unit4CH5DownRate" aiAlarmLower="AI_Unit4CH5AlarmLower" aoUpRate="AO_Unit4CH5UpRate" aoDownRate="AO_Unit4CH5DownRate" aoEnableIn="AO_Unit4CH5EnableIn" aoAutotuneActivate="AO_Unit4CH5AutotuneActivate" aoPID_P="AO_Unit4CH5PID_P" aoPID_I="AO_Unit4CH5PID_I" aoPID_D="AO_Unit4CH5PID_D" aoSetPoint="AO_Unit4CH5SV" aoAlarmHigher="AO_Unit4CH5AlarmHigher" aoAlarmLower="AO_Unit4CH5AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH6" display="GaslineHeaterUnit4CH6" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH6SV" aiPV="AI_Unit4CH6PV" aiControlOutput="AI_Unit4CH6WorkingOutput" aiPID_P="AI_Unit4CH6PID_P" aiPID_I="AI_Unit4CH6PID_I" aiPID_D="AI_Unit4CH6PID_D" aiEnableIn="AI_Unit4CH6EnableIn" aiAutotuneActivate="AI_Unit4CH6AutotuneActivate" aiAlarmHigher="AI_Unit4CH6AlarmHigher" aiUpRate="AI_Unit4CH6UpRate" aiDownRate="AI_Unit4CH6DownRate" aiAlarmLower="AI_Unit4CH6AlarmLower" aoUpRate="AO_Unit4CH6UpRate" aoDownRate="AO_Unit4CH6DownRate" aoEnableIn="AO_Unit4CH6EnableIn" aoAutotuneActivate="AO_Unit4CH6AutotuneActivate" aoPID_P="AO_Unit4CH6PID_P" aoPID_I="AO_Unit4CH6PID_I" aoPID_D="AO_Unit4CH6PID_D" aoSetPoint="AO_Unit4CH6SV" aoAlarmHigher="AO_Unit4CH6AlarmHigher" aoAlarmLower="AO_Unit4CH6AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH7" display="GaslineHeaterUnit4CH7" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH7SV" aiPV="AI_Unit4CH7PV" aiControlOutput="AI_Unit4CH7WorkingOutput" aiPID_P="AI_Unit4CH7PID_P" aiPID_I="AI_Unit4CH7PID_I" aiPID_D="AI_Unit4CH7PID_D" aiEnableIn="AI_Unit4CH7EnableIn" aiAutotuneActivate="AI_Unit4CH7AutotuneActivate" aiAlarmHigher="AI_Unit4CH7AlarmHigher" aiUpRate="AI_Unit4CH7UpRate" aiDownRate="AI_Unit4CH7DownRate" aiAlarmLower="AI_Unit4CH7AlarmLower" aoUpRate="AO_Unit4CH7UpRate" aoDownRate="AO_Unit4CH7DownRate" aoEnableIn="AO_Unit4CH7EnableIn" aoAutotuneActivate="AO_Unit4CH7AutotuneActivate" aoPID_P="AO_Unit4CH7PID_P" aoPID_I="AO_Unit4CH7PID_I" aoPID_D="AO_Unit4CH7PID_D" aoSetPoint="AO_Unit4CH7SV" aoAlarmHigher="AO_Unit4CH7AlarmHigher" aoAlarmLower="AO_Unit4CH7AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH8" display="GaslineHeaterUnit4CH8" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH8SV" aiPV="AI_Unit4CH8PV" aiControlOutput="AI_Unit4CH8WorkingOutput" aiPID_P="AI_Unit4CH8PID_P" aiPID_I="AI_Unit4CH8PID_I" aiPID_D="AI_Unit4CH8PID_D" aiEnableIn="AI_Unit4CH8EnableIn" aiAutotuneActivate="AI_Unit4CH8AutotuneActivate" aiAlarmHigher="AI_Unit4CH8AlarmHigher" aiUpRate="AI_Unit4CH8UpRate" aiDownRate="AI_Unit4CH8DownRate" aiAlarmLower="AI_Unit4CH8AlarmLower" aoUpRate="AO_Unit4CH8UpRate" aoDownRate="AO_Unit4CH8DownRate" aoEnableIn="AO_Unit4CH8EnableIn" aoAutotuneActivate="AO_Unit4CH8AutotuneActivate" aoPID_P="AO_Unit4CH8PID_P" aoPID_I="AO_Unit4CH8PID_I" aoPID_D="AO_Unit4CH8PID_D" aoSetPoint="AO_Unit4CH8SV" aoAlarmHigher="AO_Unit4CH8AlarmHigher" aoAlarmLower="AO_Unit4CH8AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH9" display="GaslineHeaterUnit4CH9" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH9SV" aiPV="AI_Unit4CH9PV" aiControlOutput="AI_Unit4CH9WorkingOutput" aiPID_P="AI_Unit4CH9PID_P" aiPID_I="AI_Unit4CH9PID_I" aiPID_D="AI_Unit4CH9PID_D" aiEnableIn="AI_Unit4CH9EnableIn" aiAutotuneActivate="AI_Unit4CH9AutotuneActivate" aiAlarmHigher="AI_Unit4CH9AlarmHigher" aiUpRate="AI_Unit4CH9UpRate" aiDownRate="AI_Unit4CH9DownRate" aiAlarmLower="AI_Unit4CH9AlarmLower" aoUpRate="AO_Unit4CH9UpRate" aoDownRate="AO_Unit4CH9DownRate" aoEnableIn="AO_Unit4CH9EnableIn" aoAutotuneActivate="AO_Unit4CH9AutotuneActivate" aoPID_P="AO_Unit4CH9PID_P" aoPID_I="AO_Unit4CH9PID_I" aoPID_D="AO_Unit4CH9PID_D" aoSetPoint="AO_Unit4CH9SV" aoAlarmHigher="AO_Unit4CH9AlarmHigher" aoAlarmLower="AO_Unit4CH9AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH10" display="GaslineHeaterUnit4CH10" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH10SV" aiPV="AI_Unit4CH10PV" aiControlOutput="AI_Unit4CH10WorkingOutput" aiPID_P="AI_Unit4CH10PID_P" aiPID_I="AI_Unit4CH10PID_I" aiPID_D="AI_Unit4CH10PID_D" aiEnableIn="AI_Unit4CH10EnableIn" aiAutotuneActivate="AI_Unit4CH10AutotuneActivate" aiAlarmHigher="AI_Unit4CH10AlarmHigher" aiUpRate="AI_Unit4CH10UpRate" aiDownRate="AI_Unit4CH10DownRate" aiAlarmLower="AI_Unit4CH10AlarmLower" aoUpRate="AO_Unit4CH10UpRate" aoDownRate="AO_Unit4CH10DownRate" aoEnableIn="AO_Unit4CH10EnableIn" aoAutotuneActivate="AO_Unit4CH10AutotuneActivate" aoPID_P="AO_Unit4CH10PID_P" aoPID_I="AO_Unit4CH10PID_I" aoPID_D="AO_Unit4CH10PID_D" aoSetPoint="AO_Unit4CH10SV" aoAlarmHigher="AO_Unit4CH10AlarmHigher" aoAlarmLower="AO_Unit4CH10AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH11" display="GaslineHeaterUnit4CH11" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH11SV" aiPV="AI_Unit4CH11PV" aiControlOutput="AI_Unit4CH11WorkingOutput" aiPID_P="AI_Unit4CH11PID_P" aiPID_I="AI_Unit4CH11PID_I" aiPID_D="AI_Unit4CH11PID_D" aiEnableIn="AI_Unit4CH11EnableIn" aiAutotuneActivate="AI_Unit4CH11AutotuneActivate" aiAlarmHigher="AI_Unit4CH11AlarmHigher" aiUpRate="AI_Unit4CH11UpRate" aiDownRate="AI_Unit4CH11DownRate" aiAlarmLower="AI_Unit4CH11AlarmLower" aoUpRate="AO_Unit4CH11UpRate" aoDownRate="AO_Unit4CH11DownRate" aoEnableIn="AO_Unit4CH11EnableIn" aoAutotuneActivate="AO_Unit4CH11AutotuneActivate" aoPID_P="AO_Unit4CH11PID_P" aoPID_I="AO_Unit4CH11PID_I" aoPID_D="AO_Unit4CH11PID_D" aoSetPoint="AO_Unit4CH11SV" aoAlarmHigher="AO_Unit4CH11AlarmHigher" aoAlarmLower="AO_Unit4CH11AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH12" display="GaslineHeaterUnit4CH12" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH12SV" aiPV="AI_Unit4CH12PV" aiControlOutput="AI_Unit4CH12WorkingOutput" aiPID_P="AI_Unit4CH12PID_P" aiPID_I="AI_Unit4CH12PID_I" aiPID_D="AI_Unit4CH12PID_D" aiEnableIn="AI_Unit4CH12EnableIn" aiAutotuneActivate="AI_Unit4CH12AutotuneActivate" aiAlarmHigher="AI_Unit4CH12AlarmHigher" aiUpRate="AI_Unit4CH12UpRate" aiDownRate="AI_Unit4CH12DownRate" aiAlarmLower="AI_Unit4CH12AlarmLower" aoUpRate="AO_Unit4CH12UpRate" aoDownRate="AO_Unit4CH12DownRate" aoEnableIn="AO_Unit4CH12EnableIn" aoAutotuneActivate="AO_Unit4CH12AutotuneActivate" aoPID_P="AO_Unit4CH12PID_P" aoPID_I="AO_Unit4CH12PID_I" aoPID_D="AO_Unit4CH12PID_D" aoSetPoint="AO_Unit4CH12SV" aoAlarmHigher="AO_Unit4CH12AlarmHigher" aoAlarmLower="AO_Unit4CH12AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH13" display="GaslineHeaterUnit4CH13" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH13SV" aiPV="AI_Unit4CH13PV" aiControlOutput="AI_Unit4CH13WorkingOutput" aiPID_P="AI_Unit4CH13PID_P" aiPID_I="AI_Unit4CH13PID_I" aiPID_D="AI_Unit4CH13PID_D" aiEnableIn="AI_Unit4CH13EnableIn" aiAutotuneActivate="AI_Unit4CH13AutotuneActivate" aiAlarmHigher="AI_Unit4CH13AlarmHigher" aiUpRate="AI_Unit4CH13UpRate" aiDownRate="AI_Unit4CH13DownRate" aiAlarmLower="AI_Unit4CH13AlarmLower" aoUpRate="AO_Unit4CH13UpRate" aoDownRate="AO_Unit4CH13DownRate" aoEnableIn="AO_Unit4CH13EnableIn" aoAutotuneActivate="AO_Unit4CH13AutotuneActivate" aoPID_P="AO_Unit4CH13PID_P" aoPID_I="AO_Unit4CH13PID_I" aoPID_D="AO_Unit4CH13PID_D" aoSetPoint="AO_Unit4CH13SV" aoAlarmHigher="AO_Unit4CH13AlarmHigher" aoAlarmLower="AO_Unit4CH13AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH14" display="GaslineHeaterUnit4CH14" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH14SV" aiPV="AI_Unit4CH14PV" aiControlOutput="AI_Unit4CH14WorkingOutput" aiPID_P="AI_Unit4CH14PID_P" aiPID_I="AI_Unit4CH14PID_I" aiPID_D="AI_Unit4CH14PID_D" aiEnableIn="AI_Unit4CH14EnableIn" aiAutotuneActivate="AI_Unit4CH14AutotuneActivate" aiAlarmHigher="AI_Unit4CH14AlarmHigher" aiUpRate="AI_Unit4CH14UpRate" aiDownRate="AI_Unit4CH14DownRate" aiAlarmLower="AI_Unit4CH14AlarmLower" aoUpRate="AO_Unit4CH14UpRate" aoDownRate="AO_Unit4CH14DownRate" aoEnableIn="AO_Unit4CH14EnableIn" aoAutotuneActivate="AO_Unit4CH14AutotuneActivate" aoPID_P="AO_Unit4CH14PID_P" aoPID_I="AO_Unit4CH14PID_I" aoPID_D="AO_Unit4CH14PID_D" aoSetPoint="AO_Unit4CH14SV" aoAlarmHigher="AO_Unit4CH14AlarmHigher" aoAlarmLower="AO_Unit4CH14AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH15" display="GaslineHeaterUnit4CH15" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH15SV" aiPV="AI_Unit4CH15PV" aiControlOutput="AI_Unit4CH15WorkingOutput" aiPID_P="AI_Unit4CH15PID_P" aiPID_I="AI_Unit4CH15PID_I" aiPID_D="AI_Unit4CH15PID_D" aiEnableIn="AI_Unit4CH15EnableIn" aiAutotuneActivate="AI_Unit4CH15AutotuneActivate" aiAlarmHigher="AI_Unit4CH15AlarmHigher" aiUpRate="AI_Unit4CH15UpRate" aiDownRate="AI_Unit4CH15DownRate" aiAlarmLower="AI_Unit4CH15AlarmLower" aoUpRate="AO_Unit4CH15UpRate" aoDownRate="AO_Unit4CH15DownRate" aoEnableIn="AO_Unit4CH15EnableIn" aoAutotuneActivate="AO_Unit4CH15AutotuneActivate" aoPID_P="AO_Unit4CH15PID_P" aoPID_I="AO_Unit4CH15PID_I" aoPID_D="AO_Unit4CH15PID_D" aoSetPoint="AO_Unit4CH15SV" aoAlarmHigher="AO_Unit4CH15AlarmHigher" aoAlarmLower="AO_Unit4CH15AlarmLower" aioType="float" />
		<IoHeaterBand id="GaslineHeaterUnit4CH16" display="GaslineHeaterUnit4CH16" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH16SV" aiPV="AI_Unit4CH16PV" aiControlOutput="AI_Unit4CH16WorkingOutput" aiPID_P="AI_Unit4CH16PID_P" aiPID_I="AI_Unit4CH16PID_I" aiPID_D="AI_Unit4CH16PID_D" aiEnableIn="AI_Unit4CH16EnableIn" aiAutotuneActivate="AI_Unit4CH16AutotuneActivate" aiAlarmHigher="AI_Unit4CH16AlarmHigher" aiUpRate="AI_Unit4CH16UpRate" aiDownRate="AI_Unit4CH16DownRate" aiAlarmLower="AI_Unit4CH16AlarmLower" aoUpRate="AO_Unit4CH16UpRate" aoDownRate="AO_Unit4CH16DownRate" aoEnableIn="AO_Unit4CH16EnableIn" aoAutotuneActivate="AO_Unit4CH16AutotuneActivate" aoPID_P="AO_Unit4CH16PID_P" aoPID_I="AO_Unit4CH16PID_I" aoPID_D="AO_Unit4CH16PID_D" aoSetPoint="AO_Unit4CH16SV" aoAlarmHigher="AO_Unit4CH16AlarmHigher" aoAlarmLower="AO_Unit4CH16AlarmLower" aioType="float" />

	</IoHeaterBands>
	<IoMFCs  classType="FurnaceRT.Equipments.PMs.Devices.IoMFC" assembly="FurnaceRT">
		<IoMFC id="MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
				aiFlow="AI_MFC1AirFlowPV"
				aoFlow="AO_MFC1AirFlowSV"
				aoRamp="AO_MFC1RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC2" display="MFC2" schematicId="MFC2" unit="sccm"
				aiFlow="AI_MFC2AirFlowPV"
				aoFlow="AO_MFC2AirFlowSV"
			    aoRamp="AO_MFC2RampTime"
			    aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC3" display="MFC3" schematicId="MFC3" unit="sccm"
				aiFlow="AI_MFC3AirFlowPV"
			    aoFlow="AO_MFC3AirFlowSV"
		        aoRamp="AO_MFC3RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC4" display="MFC4" schematicId="MFC4" unit="sccm"
				aiFlow="AI_MFC4AirFlowPV"
				aoFlow="AO_MFC4AirFlowSV"
			    aoRamp="AO_MFC4RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC5" display="MFC5" schematicId="MFC5" unit="sccm"
				aiFlow="AI_MFC5AirFlowPV"
			    aoFlow="AO_MFC5AirFlowSV"
		        aoRamp="AO_MFC5RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC6" display="MFC6" schematicId="MFC6" unit="sccm"
				aiFlow="AI_MFC6AirFlowPV"
				aoFlow="AO_MFC6AirFlowSV"
			    aoRamp="AO_MFC6RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC7" display="MFC7" schematicId="MFC7" unit="sccm"
				aiFlow="AI_MFC7AirFlowPV"
				aoFlow="AO_MFC7AirFlowSV"
			    aoRamp="AO_MFC7RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC8" display="MFC8" schematicId="MFC8" unit="sccm"
				aiFlow="AI_MFC8AirFlowPV"
				aoFlow="AO_MFC8AirFlowSV"
			    aoRamp="AO_MFC8RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC9" display="MFC9" schematicId="MFC9" unit="sccm"
				aiFlow="AI_MFC9AirFlowPV"
				aoFlow="AO_MFC9AirFlowSV"
			    aoRamp="AO_MFC9RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC10" display="MFC10" schematicId="MFC10" unit="sccm"
				aiFlow="AI_MFC10AirFlowPV"
				aoFlow="AO_MFC10AirFlowSV"
			    aoRamp="AO_MFC10RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC11" display="MFC11" schematicId="MFC11" unit="sccm"
				aiFlow="AI_MFC11AirFlowPV"
				aoFlow="AO_MFC11AirFlowSV"
			    aoRamp="AO_MFC11RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC12" display="MFC12" schematicId="MFC12" unit="sccm"
				aiFlow="AI_MFC12AirFlowPV"
				aoFlow="AO_MFC12AirFlowSV"
			    aoRamp="AO_MFC12RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC51" display="MFC51" schematicId="MFC51" unit="sccm"
				aiFlow="AI_MFC51AirFlowPV"
				aoFlow="AO_MFC51AirFlowSV"
			    aoRamp="AO_MFC51RampTime"
				aioType="float"
				scBasePath="PM1.MFC"/>
	</IoMFCs>
	<IoMFMs classType="FurnaceRT.Equipments.PMs.Devices.IoMFM" assembly="FurnaceRT">
		<IoMFM id="MFM57" display="MFM57" schematicId="MFM57" unit="sccm"				aiFlow="AI_MFM57AirFlowPV"	  aoFlow="AO_MFM57AirFlowSV"			aioType="float"				scBasePath="PM1.MFM"/>

	</IoMFMs>
	<IoFFUs classType="FurnaceRT.Devices.IoFFU" assembly="FurnaceRT">
		<IoFFU id="FFU1" display="FFU1" schematicId="FFU1" unit=""
				diDataWriteDone="DI_FFU1DataWriteDone"
			    diDataWriteError="DI_FFU1DataWriteError"
			    diDataReadError="DI_FFU1DataReadError"
			    
			    aiGroupNumber="AI_FFU1GroupNumber"
			    aiAddressNumber="AI_FFU1AddressNumber"
			    aiSwitch="AI_FFU1Switch"
			    aiSetSpeed="AI_FFU1SetSpeed"
		        aiMaxSpeed="AI_FFU1MaxSpeed"
			    aiReset="AI_FFU1Reset"
			    aiErrorTimer="AI_FFU1ErrorTimer"
			    aiCurrentSpeed="AI_FFU1CurrentSpeed"
			    aiVoltage="AI_FFU1Voltage"
			    aiCurrent="AI_FFU1Current"
			   
			    aoSwitch="AO_FFU1Switch"
			    aoSetSpeed="AO_FFU1SetSpeed"
			    aoReset="AO_FFU1Reset"
				
				doEnable="DO_FFU1Enable"
			    doWriteCommand="DO_FFU1WriteCommand"
			   
				aioType="float"
				/>
		<IoFFU id="FFU2" display="FFU2" schematicId="FFU2" unit=""
				diDataWriteDone="DI_FFU2DataWriteDone"
			    diDataWriteError="DI_FFU2DataWriteError"
			    diDataReadError="DI_FFU2DataReadError"
			    
			    aiGroupNumber="AI_FFU2GroupNumber"
			    aiAddressNumber="AI_FFU2AddressNumber"
			    aiSwitch="AI_FFU2Switch"
			    aiSetSpeed="AI_FFU2SetSpeed"
		        aiMaxSpeed="AI_FFU2MaxSpeed"
			    aiReset="AI_FFU2Reset"
			    aiErrorTimer="AI_FFU2ErrorTimer"
			    aiCurrentSpeed="AI_FFU2CurrentSpeed"
			    aiVoltage="AI_FFU2Voltage"
			    aiCurrent="AI_FFU2Current"
			   
			    aoSwitch="AO_FFU2Switch"
			    aoSetSpeed="AO_FFU2SetSpeed"
			    aoReset="AO_FFU2Reset"
				
				doEnable="DO_FFU2Enable"
			    doWriteCommand="DO_FFU2WriteCommand"
			   
				aioType="float"
				/>
		<IoFFU id="FFU3" display="FFU3" schematicId="FFU3" unit=""
				diDataWriteDone="DI_FFU3DataWriteDone"
			    diDataWriteError="DI_FFU3DataWriteError"
			    diDataReadError="DI_FFU3DataReadError"
			    
			    aiGroupNumber="AI_FFU3GroupNumber"
			    aiAddressNumber="AI_FFU3AddressNumber"
			    aiSwitch="AI_FFU3Switch"
			    aiSetSpeed="AI_FFU3SetSpeed"
		        aiMaxSpeed="AI_FFU3MaxSpeed"
			    aiReset="AI_FFU3Reset"
			    aiErrorTimer="AI_FFU3ErrorTimer"
			    aiCurrentSpeed="AI_FFU3CurrentSpeed"
			    aiVoltage="AI_FFU3Voltage"
			    aiCurrent="AI_FFU3Current"
			   
			    aoSwitch="AO_FFU3Switch"
			    aoSetSpeed="AO_FFU3SetSpeed"
			    aoReset="AO_FFU3Reset"
				
				doEnable="DO_FFU3Enable"
			    doWriteCommand="DO_FFU3WriteCommand"
			   
				aioType="float"
				/>
		<IoFFU id="FFU4" display="FFU4" schematicId="FFU4" unit=""
				diDataWriteDone="DI_FFU4DataWriteDone"
			    diDataWriteError="DI_FFU4DataWriteError"
			    diDataReadError="DI_FFU4DataReadError"
			    
			    aiGroupNumber="AI_FFU4GroupNumber"
			    aiAddressNumber="AI_FFU4AddressNumber"
			    aiSwitch="AI_FFU4Switch"
			    aiSetSpeed="AI_FFU4SetSpeed"
		        aiMaxSpeed="AI_FFU4MaxSpeed"
			    aiReset="AI_FFU4Reset"
			    aiErrorTimer="AI_FFU4ErrorTimer"
			    aiCurrentSpeed="AI_FFU4CurrentSpeed"
			    aiVoltage="AI_FFU4Voltage"
			    aiCurrent="AI_FFU4Current"
			   
			    aoSwitch="AO_FFU4Switch"
			    aoSetSpeed="AO_FFU4SetSpeed"
			    aoReset="AO_FFU4Reset"
				
				doEnable="DO_FFU4Enable"
			    doWriteCommand="DO_FFU4WriteCommand"
			   
				aioType="float"
				/>
		<IoFFU id="FFU5" display="FFU5" schematicId="FFU5" unit=""
				diDataWriteDone="DI_FFU5DataWriteDone"
			    diDataWriteError="DI_FFU5DataWriteError"
			    diDataReadError="DI_FFU5DataReadError"
			    
			    aiGroupNumber="AI_FFU5GroupNumber"
			    aiAddressNumber="AI_FFU5AddressNumber"
			    aiSwitch="AI_FFU5Switch"
			    aiSetSpeed="AI_FFU5SetSpeed"
		        aiMaxSpeed="AI_FFU5MaxSpeed"
			    aiReset="AI_FFU5Reset"
			    aiErrorTimer="AI_FFU5ErrorTimer"
			    aiCurrentSpeed="AI_FFU5CurrentSpeed"
			    aiVoltage="AI_FFU5Voltage"
			    aiCurrent="AI_FFU5Current"
			   
			    aoSwitch="AO_FFU5Switch"
			    aoSetSpeed="AO_FFU5SetSpeed"
			    aoReset="AO_FFU5Reset"
				
				doEnable="DO_FFU5Enable"
			    doWriteCommand="DO_FFU5WriteCommand"
			   
				aioType="float"
				/>
		<IoFFU id="FFU6" display="FFU6" schematicId="FFU6" unit=""
				diDataWriteDone="DI_FFU6DataWriteDone"
			    diDataWriteError="DI_FFU6DataWriteError"
			    diDataReadError="DI_FFU6DataReadError"
			    
			    aiGroupNumber="AI_FFU6GroupNumber"
			    aiAddressNumber="AI_FFU6AddressNumber"
			    aiSwitch="AI_FFU6Switch"
			    aiSetSpeed="AI_FFU6SetSpeed"
		        aiMaxSpeed="AI_FFU6MaxSpeed"
			    aiReset="AI_FFU6Reset"
			    aiErrorTimer="AI_FFU6ErrorTimer"
			    aiCurrentSpeed="AI_FFU6CurrentSpeed"
			    aiVoltage="AI_FFU6Voltage"
			    aiCurrent="AI_FFU6Current"
			   
			    aoSwitch="AO_FFU6Switch"
			    aoSetSpeed="AO_FFU6SetSpeed"
			    aoReset="AO_FFU6Reset"
				
				doEnable="DO_FFU6Enable"
			    doWriteCommand="DO_FFU6WriteCommand"
			   
				aioType="float"
				/>
		<IoFFU id="FFU7" display="FFU7" schematicId="FFU7" unit=""
				diDataWriteDone="DI_FFU7DataWriteDone"
			    diDataWriteError="DI_FFU7DataWriteError"
			    diDataReadError="DI_FFU7DataReadError"
			    
			    aiGroupNumber="AI_FFU7GroupNumber"
			    aiAddressNumber="AI_FFU7AddressNumber"
			    aiSwitch="AI_FFU7Switch"
			    aiSetSpeed="AI_FFU7SetSpeed"
		        aiMaxSpeed="AI_FFU7MaxSpeed"
			    aiReset="AI_FFU7Reset"
			    aiErrorTimer="AI_FFU7ErrorTimer"
			    aiCurrentSpeed="AI_FFU7CurrentSpeed"
			    aiVoltage="AI_FFU7Voltage"
			    aiCurrent="AI_FFU7Current"
			   
			    aoSwitch="AO_FFU7Switch"
			    aoSetSpeed="AO_FFU7SetSpeed"
			    aoReset="AO_FFU7Reset"
				
				doEnable="DO_FFU7Enable"
			    doWriteCommand="DO_FFU7WriteCommand"
			   
				aioType="float"
				/>
		<IoFFU id="FFU8" display="FFU8" schematicId="FFU8" unit=""
				diDataWriteDone="DI_FFU8DataWriteDone"
			    diDataWriteError="DI_FFU8DataWriteError"
			    diDataReadError="DI_FFU8DataReadError"
			    
			    aiGroupNumber="AI_FFU8GroupNumber"
			    aiAddressNumber="AI_FFU8AddressNumber"
			    aiSwitch="AI_FFU8Switch"
			    aiSetSpeed="AI_FFU8SetSpeed"
		        aiMaxSpeed="AI_FFU8MaxSpeed"
			    aiReset="AI_FFU8Reset"
			    aiErrorTimer="AI_FFU8ErrorTimer"
			    aiCurrentSpeed="AI_FFU8CurrentSpeed"
			    aiVoltage="AI_FFU8Voltage"
			    aiCurrent="AI_FFU8Current"
			   
			    aoSwitch="AO_FFU8Switch"
			    aoSetSpeed="AO_FFU8SetSpeed"
			    aoReset="AO_FFU8Reset"
				
				doEnable="DO_FFU8Enable"
			    doWriteCommand="DO_FFU8WriteCommand"
			   
				aioType="float"
				/>
		<IoFFU id="FFU9" display="FFU9" schematicId="FFU9" unit=""
				diDataWriteDone="DI_FFU9DataWriteDone"
			    diDataWriteError="DI_FFU9DataWriteError"
			    diDataReadError="DI_FFU9DataReadError"
			    
			    aiGroupNumber="AI_FFU9GroupNumber"
			    aiAddressNumber="AI_FFU9AddressNumber"
			    aiSwitch="AI_FFU9Switch"
			    aiSetSpeed="AI_FFU9SetSpeed"
		        aiMaxSpeed="AI_FFU9MaxSpeed"
			    aiReset="AI_FFU9Reset"
			    aiErrorTimer="AI_FFU9ErrorTimer"
			    aiCurrentSpeed="AI_FFU9CurrentSpeed"
			    aiVoltage="AI_FFU9Voltage"
			    aiCurrent="AI_FFU9Current"
			   
			    aoSwitch="AO_FFU9Switch"
			    aoSetSpeed="AO_FFU9SetSpeed"
			    aoReset="AO_FFU9Reset"
				
				doEnable="DO_FFU9Enable"
			    doWriteCommand="DO_FFU9WriteCommand"
			   
				aioType="float"
				/>
	</IoFFUs>
	<IoValves>
		<IoValve id="ValveAV1" diOpen="" doOpen="DO_ValveAV1" display="ValveAV1" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV2" diOpen="" doOpen="DO_ValveAV2" display="ValveAV2" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV3" diOpen="" doOpen="DO_ValveAV3" display="ValveAV3" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV4" diOpen="" doOpen="DO_ValveAV4" display="ValveAV4" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV5" diOpen="" doOpen="DO_ValveAV5" display="ValveAV5" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV6" diOpen="" doOpen="DO_ValveAV6" display="ValveAV6" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV7" diOpen="" doOpen="DO_ValveAV7" display="ValveAV7" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV8" diOpen="" doOpen="DO_ValveAV8" display="ValveAV8" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV9" diOpen="" doOpen="DO_ValveAV9" display="ValveAV9" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV10" diOpen="" doOpen="DO_ValveAV10" display="ValveAV10" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV11" diOpen="" doOpen="DO_ValveAV11" display="ValveAV11" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV12" diOpen="" doOpen="DO_ValveAV12" display="ValveAV12" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV13" diOpen="" doOpen="DO_ValveAV13" display="ValveAV13" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV14" diOpen="" doOpen="DO_ValveAV14" display="ValveAV14" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV15" diOpen="" doOpen="DO_ValveAV15" display="ValveAV15" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV16" diOpen="" doOpen="DO_ValveAV16" display="ValveAV16" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV17" diOpen="" doOpen="DO_ValveAV17" display="ValveAV17" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV18" diOpen="" doOpen="DO_ValveAV18" display="ValveAV18" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV19" diOpen="" doOpen="DO_ValveAV19" display="ValveAV19" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV20" diOpen="" doOpen="DO_ValveAV20" display="ValveAV20" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV21" diOpen="" doOpen="DO_ValveAV21" display="ValveAV21" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV22" diOpen="" doOpen="DO_ValveAV22" display="ValveAV22" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV23" diOpen="" doOpen="DO_ValveAV23" display="ValveAV23" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV24" diOpen="" doOpen="DO_ValveAV24" display="ValveAV24" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV25" diOpen="" doOpen="DO_ValveAV25" display="ValveAV25" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV26" diOpen="" doOpen="DO_ValveAV26" display="ValveAV26" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV27" diOpen="" doOpen="DO_ValveAV27" display="ValveAV27" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV28" diOpen="" doOpen="DO_ValveAV28" display="ValveAV28" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV29" diOpen="" doOpen="DO_ValveAV29" display="ValveAV29" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV30" diOpen="" doOpen="DO_ValveAV30" display="ValveAV30" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV31" diOpen="" doOpen="DO_ValveAV31" display="ValveAV31" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV32" diOpen="" doOpen="DO_ValveAV32" display="ValveAV32" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV33" diOpen="" doOpen="DO_ValveAV33" display="ValveAV33" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV34" diOpen="" doOpen="DO_ValveAV34" display="ValveAV34" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV35" diOpen="" doOpen="DO_ValveAV35" display="ValveAV35" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV36" diOpen="" doOpen="DO_ValveAV36" display="ValveAV36" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV37" diOpen="" doOpen="DO_ValveAV37" display="ValveAV37" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV38" diOpen="" doOpen="DO_ValveAV38" display="ValveAV38" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV39" diOpen="" doOpen="DO_ValveAV39" display="ValveAV39" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV52" diOpen="" doOpen="DO_ValveAV52" display="ValveAV52" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV54" diOpen="" doOpen="DO_ValveAV54" display="ValveAV54" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV56" diOpen="" doOpen="DO_ValveAV56" display="ValveAV56" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV57" diOpen="" doOpen="DO_ValveAV57" display="ValveAV57" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV58" diOpen="" doOpen="DO_ValveAV58" display="ValveAV58" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV59" diOpen="" doOpen="DO_ValveAV59" display="ValveAV59" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV60" diOpen="" doOpen="" display="ValveAV60" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV202LADoor" diOpenSensor="DI_AV202LADoorLocked" diCloseSensor="DI_AV202LADoorUnlocked" doOpen="" display="ValveAV202LADoor" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV66" diOpenSensor="DI_AV66CommonExhaustOpened" diCloseSensor="DI_AV66CommonExhaustClosed"  doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="ValveAV66" schematicId="" isNc="true" isDefaultOpen="false"/>		<IoValve id="ValveAV68" diOpen="" doOpen="DO_ValveAV68" display="ValveAV68" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV71" diOpen="" doOpen="DO_ValveAV71" display="ValveAV71" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV72" diOpen="" doOpen="DO_ValveAV72" display="ValveAV72" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV73" diOpen="" doOpen="DO_ValveAV73" display="ValveAV73" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV74" diOpen="DI_AV74ILK" doOpen="" display="ValveAV74" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV75" diOpen="" doOpen="DO_ValveAV75" display="ValveAV75" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV77" diOpen="DI_AV77ILK" doOpen="" display="ValveAV77" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV81" diOpen="" doOpen="DO_ValveAV81" display="ValveAV81" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV82" diOpen="" doOpen="DO_ValveAV82" display="ValveAV82" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV83" diOpen="" doOpen="DO_ValveAV83" display="ValveAV83" schematicId="" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV91" diOpenSensor="DI_AV91_1RHCAirInOpened" diCloseSensor="DI_AV91_1RHCAirInClosed" doOpen="DO_ValveAV91" display="ValveAV91" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV92" diOpenSensor="DI_AV91_2RHCAirInOpened" diCloseSensor="DI_AV91_2RHCAirInClosed" doOpen="" display="ValveAV92" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV93" diOpenSensor="DI_AV91_3RHCAirOutOpened" diCloseSensor="DI_AV91_3RHCAirOutClosed" doOpen="" display="ValveAV93" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV94" diOpenSensor="DI_AV91_4RHCAirOutOpened" diCloseSensor="DI_AV91_4RHCAirOutClosed" doOpen="" display="ValveAV94" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV95" diOpenSensor="DI_AV95FFUAirInOpened" diCloseSensor="DI_AV94RHCAirOutClosed" doOpen="" display="ValveAV95" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV96" diOpenSensor="DI_AV96CommonExhaustCylinderOpened" diCloseSensor="DI_AV96CommonExhaustCylinderClosed" doOpen="" display="ValveAV96" schematicId="" isNc="true" isDefaultOpen="false"/>
		
		<IoValve id="ValveCommonBoxPressureRegulatingCylinder" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV65" doOpen="DO_FFUAirInValveOpen" doClose="DO_FFUAirInValveClose" diOpenSensor="DI_AV65FFUAirInOpened" diCloseSensor="DI_AV65FFUAirInClosed" display="ValveAV65" schematicId="" isNc="true" isDefaultOpen="false"/>		<IoValve id="ValveLABacksideDoorCylinderControl" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveLAExhaustDamper" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveLADamper" doOpen="DO_LADamperOpen" doClose="DO_LADamperClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveFIMS1N2Purge" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveFIMS2N2Purge" doOpen="DO_FIMS2N2PurgeValveOpen" doClose="DO_FIMS2N2PurgeValveClose" display="ValveAV64" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveSV61" doOpen="DO_SV61Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveSV62" doOpen="DO_SV62Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveSV63" doOpen="DO_SV63Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveSV64" doOpen="DO_SV64Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>

		
		<IoValve id="ValveBlowerPowerOn" doOpen="DO_BlowerPowerOn" doClose="" display="Blower Power On" schematicId="" isNc="true" isDefaultOpen="false"/>


		<IoValve id="AUCPump" doOpen="DO_VaccumPumpAUCOn" doClose="" display="AUCPump" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="BothPump" doOpen="DO_VaccumPumpBothOn"  diOpenSensor="DI_VaccumPumpBothOn" doClose="" display="BothPump" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="AGVPump" doOpen="DO_VaccumPumpAGVOpen" doClose="" display="AGVPump" schematicId="" isNc="true" isDefaultOpen="false"/>
	</IoValves>
	

</DeviceModelDefine>