ELK/Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/Process.cs

using Aitex.Core.Common;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Alarms;
using MECF.Framework.Common.Event;
using MECF.Framework.Common.SubstrateTrackings;
using System;
using System.Collections.Generic;
using FurnaceRT.Equipments.PMs.Routines;
using System.Diagnostics;

namespace FurnaceRT.Equipments.PMs.RecipeExecutions
{
    public enum RecipeContinueMode
    {
        None,
        WaferReturnAndJobStop,
        RecipeCompleted,
        StepContinue,
        StepRestart,
        RecipeRestart,
        NextStep,
    }

    public class Process : PMBaseRoutine
    {
        enum RecipeRunningState
        {
            Error,
            RecipeCompleted,
            ExecStep,
            TimeWait,
            ConditionWait,
            StepCompleted,
            Paused,
        }

        enum RecipeAlaramAction
        {
            None,
            JumpAbortRecipe,
            JumpStep,
            JumpStepCancelCallLoop,
            Abort,
            Hold,
            IgnoreAlaram,
        }

        private object _recipeLocker = new object();

        private RecipeRunningState _state = RecipeRunningState.ExecStep;
        private RecipeRunningState _pausedState = RecipeRunningState.ExecStep;

        private double _curStepElpasedTimeBeforePaused;

        private double _holdTimeElpasedTime;

        private double _waferTimeElpasedTimeBeforPaused;

        private double _totalElpasedTime;

        public RecipeContinueMode ContinueAction { get; set; }

        public DateTime _recipeStartTime
        {
            get;
            private set;
        }

        public string CurrentRecipeContent { get; private set; }


        private int _currentStepNumber;

        private int _currentSubRecipeStepNumber;

        private bool _loopEnd;

        public int CurStepTotalLoopCount
        {
            get;
            private set;
        }

        public int CurSubRecipeStepTotalLoopCount
        {
            get;
            private set;
        }

        public double CurStepTotalTime
        {
            get
            {
                if (PMModule.RecipeRunningInfo.RecipeStepList == null || PMModule.RecipeRunningInfo.RecipeStepList.Count == 0 || _state == RecipeRunningState.RecipeCompleted || _state == RecipeRunningState.Error)
                    return 0;
                return PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000;
            }
        }


        public int CurrentLoopCount
        {
            get;
            private set;
        }
        public int CurrentAbortRecipeLoopCount
        {
            get;
            private set;
        }
        public int CurrentSubRecipeLoopCount
        {
            get;
            private set;
        }

        public bool IsExecuteAbort
        {
            get;
            private set;
        }
        public bool IsSubReciep
        {
            get;
            private set;
        }
        public int AlarmConditionJumpStep { get; set; } = -1;

        private DeviceTimer _stepTimer = new DeviceTimer();

        private DeviceTimer _holdTimer = new DeviceTimer();

        private RecipeFACallback _faCallback;
        private RecipeDBCallback _dbCallback;

        private Fdc _fdc;

        private ModuleName _doModule = ModuleName.PM1;


        private bool IsJumpStepCancelCallLoop;

        private int _jumpStepNumber;
        private int _showStepNo;

        private int _subRecipeStartStepNumber;


        private RecipeAlaramAction _alarmAction = RecipeAlaramAction.None;

        public List<string> _alarmNames
        {
            private set;
            get;
        }

        private R_TRIG _trigHeaterBottomToleranceAlarm = new R_TRIG();
        private R_TRIG _trigHeaterBottomToleranceWarning = new R_TRIG();
        private R_TRIG _trigHeaterCenterBottomToleranceAlarm = new R_TRIG();
        private R_TRIG _trigHeaterCenterBottomToleranceWarning = new R_TRIG();
        private R_TRIG _trigHeaterCenterToleranceAlarm = new R_TRIG();
        private R_TRIG _trigHeaterCenterToleranceWarning = new R_TRIG();
        private R_TRIG _trigHeaterCenterTopToleranceAlarm = new R_TRIG();
        private R_TRIG _trigHeaterCenterTopToleranceWarning = new R_TRIG();
        private R_TRIG _trigHeaterTopToleranceAlarm = new R_TRIG();
        private R_TRIG _trigHeaterTopToleranceWarning = new R_TRIG();
        private R_TRIG _trigPressureToleranceAlarm = new R_TRIG();
        private R_TRIG _trigPressureToleranceWarning = new R_TRIG();
        private R_TRIG _trigInputSignalTimeOutAlarm = new R_TRIG();
        private R_TRIG _trigTemperatureConvergenceTimeOutAlarm = new R_TRIG();
        private R_TRIG _trigReachTempTimeOutAlarm = new R_TRIG();
        private R_TRIG _trigPressureConvergenceTimeOutAlarm = new R_TRIG();
        private R_TRIG _trigReachPressureTimeOutAlarm = new R_TRIG();
        private R_TRIG _trigAutoProfileTimeOutAlarm = new R_TRIG();
        private Dictionary<string, R_TRIG> _trigMfcToleranceAlarms;
        private Dictionary<string, R_TRIG> _trigMfcToleranceWarnings;

        private R_TRIG _trigBoatMoveToLoadPositionTimeout = new R_TRIG();
        private R_TRIG _trigHeaterProfileFinish = new R_TRIG();
        private R_TRIG _trigLeakCheckFinish = new R_TRIG();
        private R_TRIG _trigBoatWaitCondition = new R_TRIG();
        private R_TRIG _trigAPCWaitCondition = new R_TRIG();
        private R_TRIG _trigAUXWaitCondition = new R_TRIG();
        private R_TRIG _trigHeaterWaitCondition = new R_TRIG();
        private R_TRIG _trigMFCWaitCondition = new R_TRIG();
        private string _infoHeaterProfileFinish = "";
        private string _infoAUXWaitCondition = "";
        private string _infoHeaterWaitCondition = "";
        private string _infoMFCWaitCondition = "";
        private Dictionary<int, Tuple<bool,int>> _callSubSteps = new Dictionary<int, Tuple<bool, int>>();
        private bool _isJumpStep = false;

        public Process(ModuleName module, PMModule pm) : base(module, pm)
        {
            Module = module.ToString();
            Name = "Process";

            _trigMfcToleranceAlarms = new Dictionary<string, R_TRIG>()
            {
                {"MFC61", new R_TRIG() },
                {"MFC13", new R_TRIG() },
                {"MFC14", new R_TRIG() },
                {"MFC15", new R_TRIG() },
                {"MFC16", new R_TRIG() },
                {"MFC24", new R_TRIG() },
                {"MFC25", new R_TRIG() },
                {"MFC26", new R_TRIG() },
                {"MFC34", new R_TRIG() },
                {"MFC35", new R_TRIG() },
                {"MFC36", new R_TRIG() },
                {"MFC90", new R_TRIG() },
                {"MFC91", new R_TRIG() },
                {"MFC84", new R_TRIG() },
            };

            _trigMfcToleranceWarnings = new Dictionary<string, R_TRIG>()
            {
                {"MFC61", new R_TRIG() },
                {"MFC13", new R_TRIG() },
                {"MFC14", new R_TRIG() },
                {"MFC15", new R_TRIG() },
                {"MFC16", new R_TRIG() },
                {"MFC24", new R_TRIG() },
                {"MFC25", new R_TRIG() },
                {"MFC26", new R_TRIG() },
                {"MFC34", new R_TRIG() },
                {"MFC35", new R_TRIG() },
                {"MFC36", new R_TRIG() },
                {"MFC90", new R_TRIG() },
                {"MFC91", new R_TRIG() },
                {"MFC84", new R_TRIG() },
            };

            _faCallback = new RecipeFACallback();
            _dbCallback = new RecipeDBCallback();
            _fdc = new Fdc(Module);
        }

        public override Result Start(params object[] param)
        {
            CurStepTotalLoopCount = 0;
            _currentSubRecipeStepNumber = CurSubRecipeStepTotalLoopCount = 0;

            if (AlarmConditionJumpStep > 0)
                _currentStepNumber = AlarmConditionJumpStep;
            else
                _currentStepNumber = PMModule.IsJobProcess ? 1 : 0; // 如果是从Job Process开始，从1开始，跳过standby step

            AlarmConditionJumpStep = -1;
            PMModule.RecipeRunningInfo.InnerId = Guid.NewGuid();
            PMModule.RecipeRunningInfo.BeginTime = DateTime.Now;
            PMModule.RecipeRunningInfo.TotalTime = CalcRecipeTime();
            if (PMModule.RecipeRunningInfo.TotalTime < 0)
                return Result.FAIL;

            IsSubReciep = false;
            IsExecuteAbort = false;
            IsJumpStepCancelCallLoop = false;
            PMModule.IsPaused = false;
            PMModule.IsHeaterProfile = false;
            PMModule.IsHeaterProfileSuccess = false;
            PMModule.IsMainRecipeComplete = false;
            _loopEnd = false;
            _isJumpStep = false;

            _curStepElpasedTimeBeforePaused = 0;
            _waferTimeElpasedTimeBeforPaused = 0;
            _totalElpasedTime = 0;
            _holdTimeElpasedTime = 0;
            _jumpStepNumber = 0;
            _showStepNo = 0;

            _state = RecipeRunningState.ExecStep;
            _alarmAction = RecipeAlaramAction.None;
            _alarmNames = new List<string>();

            _subRecipeStartStepNumber = 1;
            _callSubSteps.Clear();

            PMModule.InitAlarmCondition(PMModule.RecipeRunningInfo.Head.AlarmCondition);
            PMModule.InitLeakCheck(PMModule.RecipeRunningInfo.Head.LeakCheck);

            ResetTrig();

            Notify($"Start");

            _faCallback.RecipeStart(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);

            _dbCallback.RecipeStart(PMModule.Module, 0, PMModule.RecipeRunningInfo.InnerId.ToString(), PMModule.RecipeRunningInfo.RecipeName);

            _dbCallback.RecipeUpdateStatus(PMModule.RecipeRunningInfo.InnerId.ToString(), "InProcess");

            _fdc.Reset();

            WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.InProcess);

            PMModule.HeaterEnable(true);

            return Result.RUN;
        }


        public override Result Monitor()
        {
            if (!PMModule.CheckEnableRunProcess(out string reason))
            {
                PMModule.CheckEnableRunProcessAlarm.Set(reason);
                return Result.FAIL;
            }

            //MonitorRecipeAlaramAction();

            //if (IsExecuteAbort)
            //    return Result.DONE;

            MonitorRecipePause();

            CheckTolerance();

            List<RecipeStep> curSteps;
            if ((IsSubReciep || PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsCallSubStep) && !_isJumpStep)
            {
                curSteps = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps;

                if (!_callSubSteps.ContainsKey(_currentStepNumber))
                    _callSubSteps.Add(_currentStepNumber, Tuple.Create(false,0));
                if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsCallSubStep)
                {
                    _callSubSteps[_currentStepNumber] = Tuple.Create(true, PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount);
                    PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsCallSubStepTemp = true;
                    PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCountTemp = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount;
                }

                if (!IsSubReciep)
                {
                    PMModule.RecipeRunningInfo.SubRecipeCurrentLoopCount = 1;
                    PMModule.RecipeRunningInfo.SubRecipeLoopCount = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount;
                }
                PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsCallSubStep = false;
                IsSubReciep = true;
            }
            else
            {
                curSteps = PMModule.RecipeRunningInfo.RecipeStepList;
                PMModule.RecipeRunningInfo.SubRecipeLoopCount = 0;
            }

            lock (_recipeLocker)
            {
                try
                {
                    switch (_state)
                    {
                        case RecipeRunningState.ExecStep:
                            {
                                PMModule.IsWait = false;
                                _loopEnd = false;
                                if (!_holdTimer.IsIdle())
                                {
                                    _holdTimeElpasedTime += _holdTimer.GetElapseTime();
                                    _holdTimer.Stop();
                                }

                                PMModule.ResetToleranceChecker();

                                _curStepElpasedTimeBeforePaused = 0;
                                ContinueAction = RecipeContinueMode.None;

                                if (IsSubReciep)
                                {
                                    if (curSteps[_currentSubRecipeStepNumber].IsLoopStartStep)
                                    {
                                        CurrentSubRecipeLoopCount++;
                                        PMModule.RecipeRunningInfo.IsLooping = true;
                                        PMModule.RecipeRunningInfo.LoopCountCurrent = CurrentSubRecipeLoopCount - 1;//即使不循环，本身也有一次。本身的一次不算，所以减1
                                        PMModule.RecipeRunningInfo.LoopCountSet = curSteps[_currentSubRecipeStepNumber].LoopCount - 1;//即使不循环，本身也有一次。本身的一次不算，所以减1
                                    }

                                    if (curSteps[_currentSubRecipeStepNumber].IsJumpStep)
                                    {
                                        _currentSubRecipeStepNumber = curSteps[_currentSubRecipeStepNumber].JumpStepNo;
                                    }

                                    RecipeExec("Sub recipe", curSteps, _currentSubRecipeStepNumber, _curStepElpasedTimeBeforePaused, _currentSubRecipeStepNumber+1);
                                }
                                else
                                {
                                    if (curSteps[_currentStepNumber].IsLoopStartStep)
                                    {
                                        CurrentLoopCount++;
                                        PMModule.RecipeRunningInfo.IsLooping = true;
                                        PMModule.RecipeRunningInfo.LoopCountCurrent = CurrentLoopCount - 1;//即使不循环，本身也有一次。本身的一次不算，所以减1
                                        PMModule.RecipeRunningInfo.LoopCountSet = curSteps[_currentStepNumber].LoopCount - 1;//即使不循环，本身也有一次。本身的一次不算，所以减1
                                    }

                                    if (curSteps[_currentStepNumber].IsJumpStep)
                                    {
                                        curSteps[_currentStepNumber].IsJumpStep = false;//只执行一次
                                        _currentStepNumber = curSteps[_currentStepNumber].JumpStepNo;
                                    }

                                    RecipeExec("Main recipe", curSteps, _currentStepNumber, _curStepElpasedTimeBeforePaused);
                                }
                            }
                            break;

                        case RecipeRunningState.TimeWait:

                            //if (PMModule.IsPaused)
                            //{
                            //    _state = RecipeRunningState.Paused;
                            //    break;
                            //}
                            var leakCheck = PMModule.CheckLeakCheckFinish();
                            _trigLeakCheckFinish.CLK = !leakCheck;
                            if (_trigLeakCheckFinish.Q)
                                LOG.Write($"Wait condition:leak check");

                            if (_stepTimer.IsTimeout())
                            {
                                var heaterProfile = PMModule.CheckHeaterProfileFinish(out reason);
                                _trigHeaterProfileFinish.CLK = !heaterProfile || _infoHeaterProfileFinish != reason;
                                if (_trigHeaterProfileFinish.Q)
                                    LOG.Write($"Wait condition:heater profile--{reason}");
                                _infoHeaterProfileFinish = reason;

                                var boatWaitCondition = PMModule.CheckBoatWaitCondition(out reason);
                                _trigBoatWaitCondition.CLK = !boatWaitCondition;
                                if (_trigBoatWaitCondition.Q)
                                    LOG.Write($"Wait condition:boat--{reason}");

                                var apcWaitCondition = PMModule.CheckAPCWaitCondition(out reason);
                                _trigAPCWaitCondition.CLK = !apcWaitCondition;
                                if (_trigAPCWaitCondition.Q)
                                    LOG.Write($"Wait condition:APC--{reason}");

                                var auxWaitCondition = PMModule.CheckAUXWaitCondition(out reason);
                                _trigAUXWaitCondition.CLK = !auxWaitCondition || _infoAUXWaitCondition != reason;
                                if (_trigAUXWaitCondition.Q)
                                    LOG.Write($"Wait condition:heater profile--{reason}");
                                _infoAUXWaitCondition = reason;

                                var heaterWaitCondition = PMModule.CheckHeaterWaitCondition(out reason);
                                _trigHeaterWaitCondition.CLK = !heaterWaitCondition || _infoHeaterWaitCondition != reason;
                                if (_trigHeaterWaitCondition.Q)
                                    LOG.Write($"Wait condition:heater--{reason}");
                                _infoHeaterWaitCondition = reason;

                                var mfcWaitCondition = PMModule.CheckMFCWaitCondition(out reason);
                                _trigMFCWaitCondition.CLK = !mfcWaitCondition || _infoMFCWaitCondition != reason;
                                if (_trigMFCWaitCondition.Q)
                                    LOG.Write($"Wait condition:MFC--{reason}");
                                _infoMFCWaitCondition = reason;

                                if (heaterProfile &&
                                    leakCheck &&
                                    boatWaitCondition &&
                                    apcWaitCondition &&
                                    auxWaitCondition &&
                                    heaterWaitCondition &&
                                    mfcWaitCondition)
                                {
                                    _state = RecipeRunningState.StepCompleted;
                                }
                                else
                                {
                                    PMModule.IsWait = true;
                                }
                            }
                            else
                            {
                                PMModule.CheckHeaterProfileFinish(out reason);
                                PMModule.CheckBoatWaitCondition(out reason);
                                PMModule.CheckAPCWaitCondition(out reason);
                                PMModule.CheckAUXWaitCondition(out reason);
                                PMModule.CheckHeaterWaitCondition(out reason);
                                PMModule.CheckMFCWaitCondition(out reason);
                            }

                            break;

                        case RecipeRunningState.ConditionWait:
                            {
                                if (!PMModule.CheckBoatState() && !PMModule.IsBoatMoveToLoadPosition)
                                    break;

                                var heaterProfile = PMModule.CheckHeaterProfileFinish(out reason);
                                _trigHeaterProfileFinish.CLK = !heaterProfile || _infoHeaterProfileFinish != reason;
                                if (_trigHeaterProfileFinish.Q)
                                    LOG.Write($"Wait condition:heater profile--{reason}");
                                _infoHeaterProfileFinish = reason;

                                leakCheck = PMModule.CheckLeakCheckFinish();
                                _trigLeakCheckFinish.CLK = !leakCheck;
                                if (_trigLeakCheckFinish.Q)
                                    LOG.Write($"Wait condition:leak check");

                                var boatWaitCondition = PMModule.CheckBoatWaitCondition(out reason);
                                _trigBoatWaitCondition.CLK = !boatWaitCondition;
                                if (_trigBoatWaitCondition.Q)
                                    LOG.Write($"Wait condition:boat--{reason}");

                                var apcWaitCondition = PMModule.CheckAPCWaitCondition(out reason);
                                _trigAPCWaitCondition.CLK = !apcWaitCondition;
                                if (_trigAPCWaitCondition.Q)
                                    LOG.Write($"Wait condition:APC--{reason}");

                                var auxWaitCondition = PMModule.CheckAUXWaitCondition(out reason);
                                _trigAUXWaitCondition.CLK = !auxWaitCondition || _infoAUXWaitCondition != reason;
                                if (_trigAUXWaitCondition.Q)
                                    LOG.Write($"Wait condition:heater profile--{reason}");
                                _infoAUXWaitCondition = reason;

                                var heaterWaitCondition = PMModule.CheckHeaterWaitCondition(out reason);
                                _trigHeaterWaitCondition.CLK = !heaterWaitCondition || _infoHeaterWaitCondition != reason;
                                if (_trigHeaterWaitCondition.Q)
                                    LOG.Write($"Wait condition:heater--{reason}");
                                _infoHeaterWaitCondition = reason;

                                var mfcWaitCondition = PMModule.CheckMFCWaitCondition(out reason);
                                _trigMFCWaitCondition.CLK = !mfcWaitCondition || _infoMFCWaitCondition != reason;
                                if (_trigMFCWaitCondition.Q)
                                    LOG.Write($"Wait condition:MFC--{reason}");
                                _infoMFCWaitCondition = reason;

                                if (heaterProfile &&
                                    leakCheck &&
                                    boatWaitCondition &&
                                    apcWaitCondition &&
                                    auxWaitCondition &&
                                    heaterWaitCondition &&
                                    mfcWaitCondition)
                                {
                                    _state = RecipeRunningState.StepCompleted;
                                }
                                if (_stepTimer.IsTimeout())
                                {

                                    if(PMModule.IsBoatMoveToLoadPosition)
                                    {
                                        _trigBoatMoveToLoadPositionTimeout.CLK = !boatWaitCondition;
                                        if(_trigBoatMoveToLoadPositionTimeout.Q)
                                            PMModule.BoatMoveToLoadPositionTimeoutWarning.Set();
                                    }
                                    //_trigInputSignalTimeOutAlarm.CLK = !PMModule.CheckExternalSensorCondition();
                                    //if (_trigInputSignalTimeOutAlarm.Q)
                                    //    PMModule.InputSignalTimeOutAlarm.Set();

                                    //_trigTemperatureConvergenceTimeOutAlarm.CLK = !PMModule.CheckTempStabilizeCondition();
                                    //if (_trigTemperatureConvergenceTimeOutAlarm.Q)
                                    //    PMModule.TemperatureConvergenceTimeOutAlarm.Set();

                                    //_trigReachTempTimeOutAlarm.CLK = !PMModule.CheckReachTempCondition();
                                    //if (_trigReachTempTimeOutAlarm.Q)
                                    //    PMModule.TemperatureConvergenceTimeOutAlarm.Set("Reach temp condition timeout");

                                    //_trigPressureConvergenceTimeOutAlarm.CLK = !PMModule.CheckPressureStablilizeCondition();
                                    //if (_trigPressureConvergenceTimeOutAlarm.Q)
                                    //    PMModule.PressureConvergenceTimeOutAlarm.Set();

                                    //_trigReachPressureTimeOutAlarm.CLK = !PMModule.CheckReachPressureCondition();
                                    //if (_trigReachPressureTimeOutAlarm.Q)
                                    //    PMModule.PressureConvergenceTimeOutAlarm.Set("Reach pressure condition timeout");

                                    //_trigAutoProfileTimeOutAlarm.CLK = !PMModule.CheckFinishAutoProfileCondition();
                                    //if (_trigAutoProfileTimeOutAlarm.Q)
                                    //    PMModule.AutoProfileTimeOutAlarm.Set();

                                    //_state = RecipeRunningState.StepCompleted;
                                }
                                else
                                {
                                    _trigBoatMoveToLoadPositionTimeout.RST = true;
                                }
                            }
                            break;

                        case RecipeRunningState.Paused:
                            if (!_stepTimer.IsIdle())
                            {
                                _curStepElpasedTimeBeforePaused += _stepTimer.GetElapseTime();
                                _stepTimer.Stop();
                            }

                            if (_holdTimer.IsIdle())
                                _holdTimer.Start(0);
                            switch (ContinueAction)
                            {
                                case RecipeContinueMode.None:
                                    break;
                                case RecipeContinueMode.StepContinue:
                                    if (!_holdTimer.IsIdle())
                                    {
                                        _holdTimeElpasedTime += _holdTimer.GetElapseTime();
                                        _holdTimer.Stop();
                                    }

                                    _state = RecipeRunningState.ExecStep;
                                    _stepTimer.Stop();
                                    break;
                            }
                            break;

                        case RecipeRunningState.StepCompleted:
                            {
                                ResetTrig();

                                //CloseAllValve();

                                _curStepElpasedTimeBeforePaused = 0;

                                var stepName = "";
                                var stepTime = (float)_stepTimer.GetElapseTime() / 1000;//sec
                                var thickness = 0.0f;
                                if (IsSubReciep)
                                {
                                    stepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepName;
                                    float.TryParse(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].FilmThickFormula, out thickness);
                                   
                                    //放在前面，stepnumber后面会被更新
                                    if (!_isJumpStep)
                                    {
                                        _faCallback.RecipeStepEnd(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, _currentSubRecipeStepNumber + 1);
                                        _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentSubRecipeStepNumber + 1, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
                                    }
                                        
                                    _fdc.Stop();

                                    //if (PMModule.RecipeRunningInfo.RecipeStepList.Count > _currentStepNumber)
                                    //{
                                    //    _totalElpasedTime += PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;
                                    //}

                                    if (PMModule.RecipeRunningInfo.RecipeStepList.Count > _currentStepNumber && PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps.Count> _currentSubRecipeStepNumber)
                                    {
                                        _totalElpasedTime +=  PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepTime;
                                    }

                                    _subRecipeStartStepNumber++;

                                    if (_loopEnd)
                                    {
                                        _currentSubRecipeStepNumber++;
                                        CurrentSubRecipeLoopCount = 0;
                                        PMModule.RecipeRunningInfo.IsLooping = false;
                                        PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
                                        PMModule.RecipeRunningInfo.LoopCountSet = 0;
                                    }
                                    else
                                    {
                                        SubRecipeLoopEndCheck(curSteps);
                                    }

                                    if (_currentSubRecipeStepNumber >= curSteps.Count)
                                    {
                                        PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount--;
                                        if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount > 0)
                                        {
                                            IsSubReciep = true;
                                        }
                                        else
                                        {
                                            IsSubReciep = false;
                                            //PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount = PMModule.RecipeRunningInfo.SubRecipeLoopCount;
                                        }

                                        _currentSubRecipeStepNumber = 0;
                                        CurrentSubRecipeLoopCount = 0;

                                        //// sub recipe执行完后，检查下是否在main recipe的loop内
                                        //RecipeLoopEndCheck();

                                        //if (_currentStepNumber >= PMModule.RecipeRunningInfo.RecipeStepList.Count)
                                        //{
                                        //    _currentStepNumber = PMModule.RecipeRunningInfo.RecipeStepList.Count - 1;
                                        //    _state = RecipeRunningState.RecipeCompleted;
                                        //}
                                    }

                                    _state = RecipeRunningState.ExecStep;
                                    _stepTimer.Stop();
                                }
                                else
                                {
                                    stepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName;
                                    float.TryParse(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].FilmThickFormula, out thickness);

                                    //放在前面，stepnumber后面会被更新
                                    if (!_isJumpStep)
                                    {
                                        _faCallback.RecipeStepEnd(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, _currentStepNumber);
                                        _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentStepNumber, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
                                    }
                                        
                                    _fdc.Stop();

                                    if (_currentStepNumber >= 0 && !IsSubReciep)
                                    {
                                        _totalElpasedTime += PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;

                                    }

                                    if (IsSubReciep)
                                        IsSubReciep = false;

                                    if (_currentStepNumber > 0 && PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber - 1].IsCallSubStepTemp)
                                    {
                                        PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber - 1].IsCallSubStep = true;
                                        PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber - 1].SubRecipeLoopCount = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber - 1].SubRecipeLoopCountTemp;
                                    }

                                    if (_loopEnd)
                                    {
                                        _currentStepNumber++;
                                        CurrentLoopCount = 0;
                                        CurrentAbortRecipeLoopCount = 0;
                                        CurrentSubRecipeLoopCount = 0;
                                        PMModule.RecipeRunningInfo.IsLooping = false;
                                        PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
                                        PMModule.RecipeRunningInfo.LoopCountSet = 0;
                                    }
                                    else
                                    {
                                        RecipeLoopEndCheck(PMModule.RecipeRunningInfo.RecipeStepList);
                                    }

                                    if(_currentStepNumber >= PMModule.RecipeRunningInfo.RecipeStepList.Count - 1)
                                    {
                                        for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
                                        {
                                            if (!WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(Module), i))
                                                continue;

                                            var wafer = WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), i);
                                            if (wafer.ProcessState == EnumWaferProcessStatus.Completed ||
                                                wafer.ProcessState == EnumWaferProcessStatus.Idle)
                                                continue;

                                            WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), i, EnumWaferProcessStatus.Completed);
                                        }
                                        PMModule.IsMainRecipeComplete = true;
                                    }

                                    if (_currentStepNumber >= PMModule.RecipeRunningInfo.RecipeStepList.Count)
                                    {
                                        _currentStepNumber = PMModule.RecipeRunningInfo.RecipeStepList.Count - 1;
                                        _state = RecipeRunningState.RecipeCompleted;
                                    }
                                    else
                                    {
                                        _state = RecipeRunningState.ExecStep;
                                        _stepTimer.Stop();
                                    }
                                }

                                if(!_isJumpStep)
                                {
                                    PMModule.UpdateRecipeStepThicknessAndTime(stepName, thickness, stepTime);
                                    var wafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(Module));
                                    for (int i = 0; i < wafers.Length; i++)
                                    {
                                        if (WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(Module), i))
                                            continue;
                                        var useCount = wafers[i].UseCount;
                                        var useTime = wafers[i].UseTime + (float)stepTime;
                                        var useThick = wafers[i].UseThick + thickness;

                                        WaferManager.Instance.UpdateWaferStatistics(ModuleHelper.Converter(Module), i, useCount, useTime, useThick);
                                    }
                                }
                            }

                            _isJumpStep = false;

                            if (PMModule.IsPaused)
                            {
                                _state = RecipeRunningState.Paused;
                                break;
                            }

                            break;

                        case RecipeRunningState.RecipeCompleted:
                            {
                                var wafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(Module));
                                for (int i = 0; i < wafers.Length; i++)
                                {
                                    if (WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(Module), i))
                                        continue;
                                    var useCount = wafers[i].UseCount + 1;
                                    var useTime = wafers[i].UseTime;
                                    var useThick = wafers[i].UseThick;

                                    WaferManager.Instance.UpdateWaferStatistics(ModuleHelper.Converter(Module), i, useCount, useTime, useThick);
                                }

                                if (PMModule.IsHeaterProfile && !PMModule.IsHeaterProfileSuccess)
                                    EV.PostWarningLog(PMModule.Module, "Auto profile failed");

                                Notify("End");
                                return Result.DONE;
                            }

                        case RecipeRunningState.Error:
                            {
                                return Result.DONE;
                            }
                        default:
                            break;
                    }
                }
                catch (Exception ex)
                {
                    LOG.Write(ex);
                    return Result.FAIL;
                }
            }

            MonitorRecipeRunInfo();

            return Result.RUN;
        }

        private void MonitorRecipeRunInfo()
        {
            PMModule.IsHolded = _state == RecipeRunningState.Paused;
            double elapseTime;
            double totalElapseTime;
            double holdTotalElapseTime;
            var step = 0;

            if (IsSubReciep)
            {
                if(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps != null)
                {
                    if (_stepTimer.IsIdle())
                    {
                        elapseTime = (_curStepElpasedTimeBeforePaused / 1000) < 1 ? 0 : _curStepElpasedTimeBeforePaused / 1000;
                    }
                    else
                    {
                        elapseTime = ((_curStepElpasedTimeBeforePaused + _stepTimer.GetElapseTime()) / 1000) < 1 ? 0 : (_curStepElpasedTimeBeforePaused + _stepTimer.GetElapseTime()) / 1000;
                    }

                    if (elapseTime > PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepTime)
                        elapseTime = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepTime;

                    totalElapseTime = _totalElpasedTime + elapseTime > PMModule.RecipeRunningInfo.TotalTime ? PMModule.RecipeRunningInfo.TotalTime : _totalElpasedTime + elapseTime;

                    if (_holdTimer.IsIdle())
                    {
                        holdTotalElapseTime = _holdTimeElpasedTime / 1000;
                    }
                    else
                    {
                        holdTotalElapseTime = (_holdTimeElpasedTime + _holdTimer.GetElapseTime()) / 1000;
                    }

                    PMModule.RecipeRunningInfo.StepElapseTime = elapseTime;
                    PMModule.RecipeRunningInfo.TotalElapseTime = totalElapseTime;
                    PMModule.RecipeRunningInfo.HoldTime = holdTotalElapseTime;
                    PMModule.RecipeRunningInfo.StepTime = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepTime;
                    PMModule.RecipeRunningInfo.RecipeName = $"Sub/{PMModule.RecipeRunningInfo.Head.SubRecipe}-{PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeTableInfo}-{PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepName}";
                    PMModule.RecipeRunningInfo.ExecRecipeType = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeType;
                    PMModule.RecipeRunningInfo.ExecSubRecipeType = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].RecipeType;

                    PMModule.RecipeRunningInfo.SubRecipeCurrentLoopCount = PMModule.RecipeRunningInfo.SubRecipeLoopCount - PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount + 1;
                    PMModule.RecipeRunningInfo.SubRecipeName = PMModule.RecipeRunningInfo.Head.SubRecipe;

                    step = _currentSubRecipeStepNumber;
                    if (_state == RecipeRunningState.Paused)
                    {
                        //pause之后，当前step执行完，显示的step要保持hold住的这一步的
                        step--;
                        if (step < 0)
                            step = 0;
                    }
                    PMModule.RecipeRunningInfo.StepNumber = step + 1; //CurStepNum start from 0
                    PMModule.RecipeRunningInfo.StepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[step].StepName;
                    if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[step].IsLoopEndStep)
                        PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps.Count > PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].LoopStartStep ?
                            PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[step].LoopStartStep].StepName : "";
                    else
                    {
                        if(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps.Count > step + 1)
                        {
                            PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[step + 1].StepName;
                        }
                        else
                        {
                            if(PMModule.RecipeRunningInfo.SubRecipeCurrentLoopCount < PMModule.RecipeRunningInfo.SubRecipeLoopCount)
                            {
                                //sub 下一个循环
                                PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[0].StepName;
                            }
                            else
                            {
                                //sub执行结束
                                if (PMModule.RecipeRunningInfo.RecipeStepList.Count > _currentStepNumber)
                                {
                                    PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName;
                                }
                            }
                        }
                    }

                    if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepName.ToLower() == "standby")
                    {
                        PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Standby.ToString();
                    }
                    else
                    {
                        PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Run.ToString();
                    }
                }
                
                return;
            }

            if (_stepTimer.IsIdle())
            {
                elapseTime = (_curStepElpasedTimeBeforePaused / 1000) < 1 ? 0 : _curStepElpasedTimeBeforePaused / 1000;
            }
            else
            {
                elapseTime = ((_curStepElpasedTimeBeforePaused + _stepTimer.GetElapseTime()) / 1000) < 1 ? 0 : (_curStepElpasedTimeBeforePaused + _stepTimer.GetElapseTime()) / 1000;
            }

            if (elapseTime > PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime)
                elapseTime = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;

            totalElapseTime = _totalElpasedTime + elapseTime > PMModule.RecipeRunningInfo.TotalTime ? PMModule.RecipeRunningInfo.TotalTime : _totalElpasedTime + elapseTime;

            if (_holdTimer.IsIdle())
            {
                holdTotalElapseTime = _holdTimeElpasedTime / 1000;
            }
            else
            {
                holdTotalElapseTime = (_holdTimeElpasedTime + _holdTimer.GetElapseTime()) / 1000;
            }

            PMModule.RecipeRunningInfo.StepElapseTime = elapseTime;
            PMModule.RecipeRunningInfo.TotalElapseTime = totalElapseTime;
            PMModule.RecipeRunningInfo.HoldTime = holdTotalElapseTime;
            PMModule.RecipeRunningInfo.StepTime = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;
            PMModule.RecipeRunningInfo.RecipeName = PMModule.RecipeRunningInfo.MainRecipeName;
            PMModule.RecipeRunningInfo.ExecRecipeType = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeType;
            if (_state == RecipeRunningState.RecipeCompleted) { 
                PMModule.RecipeRunningInfo.HoldTime = 0;
            }


            step = _currentStepNumber;
            if (_state == RecipeRunningState.Paused)
            {
                //pause之后，当前step执行完，显示的step要保持hold住的这一步的
                step--;
                if (step < 0)
                    step = 0;
            }
            if (PMModule.RecipeRunningInfo.RecipeStepList[0].StepName.ToLower() == "standby")
            {
                PMModule.RecipeRunningInfo.StepNumber = step; //CurStepNum start from 0
            }
            else
            {
                PMModule.RecipeRunningInfo.StepNumber = step + 1; //CurStepNum start from 0
            }
            PMModule.RecipeRunningInfo.StepName = PMModule.RecipeRunningInfo.RecipeStepList[_showStepNo].StepName;
            if(PMModule.RecipeRunningInfo.RecipeStepList[step].IsLoopEndStep && PMModule.RecipeRunningInfo.LoopCountCurrent < PMModule.RecipeRunningInfo.LoopCountSet)
                PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList.Count > PMModule.RecipeRunningInfo.RecipeStepList[step].LoopStartStep ? PMModule.RecipeRunningInfo.RecipeStepList[PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].LoopStartStep].StepName : "";
            else
                PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList.Count > step + 1 ? PMModule.RecipeRunningInfo.RecipeStepList[step + 1].StepName : "";

            if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName.ToLower() == "standby")
            {
                PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Standby.ToString();
            }
            else if (PMModule.RecipeRunningInfo.RecipeStepList.Count - 1 == _currentStepNumber)
            {
                PMModule.StringProcessFlowState = PMModule.ProcessFlowState.End.ToString();
            }
            else
            {
                PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Run.ToString();
            }
        }

        private void MonitorRecipeAlaramAction()
        {
            if (_state != RecipeRunningState.TimeWait && _state != RecipeRunningState.ConditionWait)
                return;

            if (_alarmNames.Count == 0)
                return;

            int group = -1,temp = 0;
            string iAlarmConditionTable="1:";
            if (IsSubReciep)
            {
                for (int i = 0; i < _alarmNames.Count; i++)
                {
                    iAlarmConditionTable = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmConditionTable;
                    temp = (int)Singleton<EventManager>.Instance.AlarmDic[iAlarmConditionTable.ToString()][_alarmNames[i]].Group;

                    if (!PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets.ContainsKey(temp))
                        continue;

                    var type = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets[temp].ProcessingType;
                    if (temp >= group && (group == -1 || type != "Ignore Alarm"))
                        group = temp;
                }

            }
            else
            {
                for (int i = 0; i < _alarmNames.Count; i++)
                {
                    iAlarmConditionTable = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmConditionTable;
                    temp = (int)Singleton<EventManager>.Instance.AlarmDic[iAlarmConditionTable.ToString()][_alarmNames[i]].Group;

                    if (!PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets.ContainsKey(temp))
                        continue;

                    var type = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets[temp].ProcessingType;
                    if (temp >= group && (group == -1 || type != "Ignore Alarm"))
                        group = temp;
                }
            }

            _alarmNames.Clear();

            if (group == -1)
                return;

            string alarmAction = "", alarmDetails = "";
            List<RecipeStep> abortRecipes = new List<RecipeStep>();
            if (IsSubReciep)
            {
                alarmAction = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets[group].ProcessingType;
                alarmDetails = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets[group].ProcessingDetails;
                abortRecipes = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets[group].AbortRecipeStepList;
            }
            else
            {
                alarmAction = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets[group].ProcessingType;
                alarmDetails = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets[group].ProcessingDetails;
                abortRecipes = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets[group].AbortRecipeStepList;

            }
            switch (alarmAction)
            {
                case "Jump Abort Recipe":
                    alarmDetails = alarmDetails.Replace("Abort Recipe/", string.Empty);
                    Abort();
                    _alarmAction = RecipeAlaramAction.JumpAbortRecipe;
                    break;
                case "Jump Step":
                    alarmDetails = alarmDetails.Replace("Jump Step/", string.Empty);
                    _jumpStepNumber = PMModule.RecipeRunningInfo.RecipeStepList.FindIndex(x => x.StepName == alarmDetails);
                    _alarmAction = RecipeAlaramAction.JumpStep;
                    _state = RecipeRunningState.StepCompleted;
                    break;
                case "Jump Step(Cancel Call Loop)":
                    alarmDetails = alarmDetails.Replace("Jump Step(Cancel Call Loop)/", string.Empty);
                    _jumpStepNumber = PMModule.RecipeRunningInfo.RecipeStepList.FindIndex(x => x.StepName == alarmDetails);
                    _alarmAction = RecipeAlaramAction.JumpStepCancelCallLoop;
                    IsJumpStepCancelCallLoop = true;
                    _state = RecipeRunningState.StepCompleted;
                    break;
                case "Abort":
                    IsExecuteAbort = true;
                    break;
                case "Hold":
                    PMModule.IsPaused = true;
                    ContinueAction = RecipeContinueMode.None;
                    _alarmAction = RecipeAlaramAction.Hold;
                    break;
                case "Ignore Alarm":
                    _alarmAction = RecipeAlaramAction.IgnoreAlaram;
                    break;
                default:
                    _alarmAction = RecipeAlaramAction.IgnoreAlaram;
                    break;
            }
        }

        private void MonitorRecipePause()
        {
            if (_state != RecipeRunningState.TimeWait && _state != RecipeRunningState.ConditionWait)
                return;

            //if (PMModule.IsPaused)
            //{
            //    _state = RecipeRunningState.Paused;
            //}
        }

        public override void Abort()
        {
            //PMModule.AbortRecipe();//暂时这么做
            PMModule.RecipeRunningInfo.IsLooping = false;
            PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
            PMModule.RecipeRunningInfo.LoopCountSet = 0;
            IsExecuteAbort = true;
            IsSubReciep = false;
            PMModule.IsPaused = false;
            PMModule.IsHeaterProfile = false;
            PMModule.IsHeaterProfileSuccess = false;
            if (!_holdTimer.IsIdle())
            {
                _holdTimeElpasedTime += _holdTimer.GetElapseTime();
                _holdTimer.Stop();
            }
            
            CurrentLoopCount = 0;
            CurrentAbortRecipeLoopCount = 0;
            CurrentSubRecipeLoopCount = 0;

            _state = RecipeRunningState.RecipeCompleted;//暂时这么做
            return;//暂时这么做

            //_totalElpasedTime = 0;
            PMModule.RecipeRunningInfo.BeginTime = DateTime.Now;
            double total = 0;
            for (int i = 0; i < PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AbortRecipeSteps.Count; i++)
            {
                total += PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AbortRecipeSteps[i].StepTime;
            }
            PMModule.RecipeRunningInfo.TotalTime = _totalElpasedTime + total;

            ResetTrig();
            //PMModule.ResetToleranceAlarm();
            //PMModule.ResetToleranceAlarmChecker();

            PMModule.ExecuteAbortRecipeWarning.Set($"from recipe name:{PMModule.RecipeRunningInfo.RecipeName} step:{_currentStepNumber} start execute abort recipe.");

            _state = RecipeRunningState.ExecStep;
        }
        public void UpdateProcessDataPJid(string pjId)
        {
            _dbCallback.RecipeUpdatePjId(PMModule.RecipeRunningInfo.InnerId.ToString(), pjId);
        }
        public void ExitProcess()
        {
            if (_state == RecipeRunningState.RecipeCompleted)
            {
                PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Standby.ToString();
                _faCallback.RecipeComplete(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);
                _dbCallback.RecipeComplete(PMModule.RecipeRunningInfo.InnerId.ToString());
                _fdc.Stop();
            }
            else
            {
                if (PMModule.IsExcuteIdleRecipe)
                {
                    _faCallback.RecipeComplete(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);
                    _dbCallback.RecipeComplete(PMModule.RecipeRunningInfo.InnerId.ToString());
                    _fdc.Stop();
                }
                else
                {
                    _faCallback.RecipeFailed(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);
                    _dbCallback.RecipeFailed(PMModule.RecipeRunningInfo.InnerId.ToString());
                    _fdc.Stop();
                };
            }
        }


        public void PauseRecipe()
        {
            PMModule.IsPaused = true;
            ContinueAction = RecipeContinueMode.None;
        }

        public void ContinueRecipe()
        {
            PMModule.IsPaused = false;
            ContinueAction = RecipeContinueMode.StepContinue;
        }


        public void SkipCurrentRecipeStep()
        {
            if (_state == RecipeRunningState.ConditionWait || _state == RecipeRunningState.TimeWait || _state == RecipeRunningState.Paused)
            {
                _state = RecipeRunningState.StepCompleted;
                _loopEnd = true;
                PMModule.RecipeRunningInfo.IsLooping = false;
                PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
                PMModule.RecipeRunningInfo.LoopCountSet = 0;
                PMModule.IsPaused = false;
                if (!_holdTimer.IsIdle())
                {
                    _holdTimeElpasedTime += _holdTimer.GetElapseTime();
                    _holdTimer.Stop();
                }
            }
            if(IsSubReciep)
            {
                ResetLoop(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps, _currentSubRecipeStepNumber);
            }
            else
            {
                ResetLoop(PMModule.RecipeRunningInfo.RecipeStepList, _currentStepNumber);
            }
        }

        private void ResetLoop(List<RecipeStep> checkRecipeSeps, int currentStepNumber)
        {
            if (checkRecipeSeps == null)
                return;

            var hasLoopStart = false;
            for (int i = currentStepNumber; i >= 0; i--)
            {
                if (checkRecipeSeps[i].IsLoopStartStep)
                {
                    hasLoopStart = true;
                    break;
                }
                if (checkRecipeSeps[i].IsLoopEndStep)
                {
                    hasLoopStart = false;//前面有end，说明没有循环
                    break;
                }
            }

            if (hasLoopStart)
            {
                for (int i = currentStepNumber; i < checkRecipeSeps.Count; i++)
                {
                    if (checkRecipeSeps[i].IsLoopStartStep)
                    {
                        break;//没有循环
                    }
                    if (checkRecipeSeps[i].IsLoopEndStep)
                    {
                        checkRecipeSeps[i].IsLoopEndStep = false;//跳出skip step之间的循环
                        break;
                    }
                }
            }
        }
        public void LeakCheckRetry()
        {
            JumpCurrentRecipeStep(_currentStepNumber - 1, PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber - 1].StepName);
        }
        public void JumpCurrentRecipeStep(int stepNumber, string stepName, bool isAlarmConditionCall = false)
        {
            PMModule.AbortLeakCheck();
            LOG.Write($"Jump to step stepNumber={stepNumber} stepName={stepName}, currentStepNumber={_currentStepNumber}");
            if (_state == RecipeRunningState.ConditionWait || _state == RecipeRunningState.TimeWait || 
                _state == RecipeRunningState.Paused || _state == RecipeRunningState.ExecStep)
            {
                _loopEnd = true;
                PMModule.RecipeRunningInfo.IsLooping = false;
                PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
                PMModule.RecipeRunningInfo.LoopCountSet = 0;
                CurrentLoopCount = 0;
                CurrentAbortRecipeLoopCount = 0;
                CurrentSubRecipeLoopCount = 0;
                IsSubReciep = false;

                if (IsSubReciep)
                {
                    _faCallback.RecipeStepEnd(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, _currentSubRecipeStepNumber + 1);
                    _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentSubRecipeStepNumber + 1, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
                    ResetLoop(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps, _currentSubRecipeStepNumber);
                }
                else
                {
                    _faCallback.RecipeStepEnd(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, _currentStepNumber);
                    _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentStepNumber, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
                    ResetLoop(PMModule.RecipeRunningInfo.RecipeStepList, _currentStepNumber);
                }

                if(_callSubSteps != null)
                {
                    foreach(var key in _callSubSteps.Keys)
                    {
                        if(PMModule.RecipeRunningInfo.RecipeStepList.Count > key)
                        {
                            PMModule.RecipeRunningInfo.RecipeStepList[key].IsCallSubStep = _callSubSteps[key].Item1;
                            PMModule.RecipeRunningInfo.RecipeStepList[key].SubRecipeLoopCount = _callSubSteps[key].Item2;
                        }
                    }

                    _currentSubRecipeStepNumber = CurSubRecipeStepTotalLoopCount = 0;
                }

                _isJumpStep = true;
                _currentStepNumber = stepNumber - 1;
                if (_currentStepNumber < 0)
                    _currentStepNumber = 0;
                    
                _totalElpasedTime = RefreshElpasedTime();
                _state = RecipeRunningState.StepCompleted;
                PMModule.IsPaused = false;
                if (!_holdTimer.IsIdle())
                {
                    _holdTimeElpasedTime += _holdTimer.GetElapseTime();
                    _holdTimer.Stop();
                }
            }
        }

        private double RefreshElpasedTime()
        {
            double total = 0;

            try
            {
                for (int i = 0; i < _currentStepNumber; i++)
                {
                    if (!PMModule.RecipeRunningInfo.RecipeStepList[i].IsJumpStep)
                    {
                        if (PMModule.RecipeRunningInfo.RecipeStepList[i].IsLoopEndStep)
                        {
                            int iLoopStartStep = PMModule.RecipeRunningInfo.RecipeStepList[i].LoopStartStep;
                            for (int j = 0; j < PMModule.RecipeRunningInfo.RecipeStepList[i].LoopCount; j++)
                            {
                                for (int m = iLoopStartStep; m <= i; m++)
                                {
                                    if (PMModule.RecipeRunningInfo.RecipeStepList[m].SubRecipeSteps != null && PMModule.RecipeRunningInfo.RecipeStepList[m].SubRecipeSteps.Count > _currentSubRecipeStepNumber)
                                    {
                                        int subLoopCount =Math.Max(1, PMModule.RecipeRunningInfo.RecipeStepList[m].SubRecipeLoopCount);

                                        total += SubRecipeCalTotalTime(m) * subLoopCount;
                                    }

                                    total += PMModule.RecipeRunningInfo.RecipeStepList[m].StepTime;
                                }
                            }
                        }
                        else
                        {
                            if (PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps != null && 
                                PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps.Count > _currentSubRecipeStepNumber)
                            {
                                int subLoopCount = Math.Max(1, PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeLoopCount);

                                total += SubRecipeCalTotalTime(i) * subLoopCount ;
                            }

                            total += PMModule.RecipeRunningInfo.RecipeStepList[i].StepTime;
                        }
                    }
                }
            }
            catch (Exception ex)
            {
                LOG.Write(ex);
                return -1;
            }

            return (int)total;
        }

        public void RespondAlarm(string name)
        {
            if (!_alarmNames.Contains(name))
                _alarmNames.Add(name);
        }

        protected int CalcRecipeTime()
        {
            double total = 0;

            int iStart = PMModule.IsJobProcess ? 1 : 0;
            try
            {
                for (int i = iStart; i < PMModule.RecipeRunningInfo.RecipeStepList.Count; i++)
                {
                    if (!PMModule.RecipeRunningInfo.RecipeStepList[i].IsJumpStep)
                    {
                        if (PMModule.RecipeRunningInfo.RecipeStepList[i].IsLoopEndStep)
                        {
                            int iLoopStartStep = PMModule.RecipeRunningInfo.RecipeStepList[i].LoopStartStep;
                            total += PMModule.RecipeRunningInfo.RecipeStepList[i].StepTime;

                            for (int j = 0; j < PMModule.RecipeRunningInfo.RecipeStepList[i].LoopCount - 1; j++)
                            {
                                for (int m = iLoopStartStep; m <= i; m++)
                                {
                                    if (PMModule.RecipeRunningInfo.RecipeStepList[m].SubRecipeSteps != null && PMModule.RecipeRunningInfo.RecipeStepList[m].SubRecipeSteps.Count > _currentSubRecipeStepNumber)
                                    {
                                  
                                        int subLoopCount = Math.Max(1, PMModule.RecipeRunningInfo.RecipeStepList[m].SubRecipeLoopCount);

                                        total += SubRecipeCalTotalTime(m) * subLoopCount ;
                                    }

                                    total += PMModule.RecipeRunningInfo.RecipeStepList[m].StepTime;
                                }
                            }
                        }
                        else
                        {

                            if (PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps != null && PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps.Count > _currentSubRecipeStepNumber)
                            {
                                int subLoopCount = Math.Max(1, PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeLoopCount);

                                total += SubRecipeCalTotalTime(i) * subLoopCount;
                            }

                            total += PMModule.RecipeRunningInfo.RecipeStepList[i].StepTime;
                        }
                    }
                    else
                    {
                        i = PMModule.RecipeRunningInfo.RecipeStepList[i].JumpStepNo - 1;// -1是因为i++
                    }
                }
            }
            catch (Exception ex)
            {
                LOG.Write(ex);
                return -1;
            }

            return (int)total;
        }


        private int AbortRecipeCalTotalTime()
        {
            double total = 0;

            List<RecipeStep> abortRecipeSteps;
            abortRecipeSteps = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AbortRecipeSteps;

            try
            {
                for (int i = 0; i < abortRecipeSteps.Count; i++)
                {
                    if (!abortRecipeSteps[i].IsJumpStep)
                    {
                        if (abortRecipeSteps[i].IsLoopStartStep)
                        {
                            int iLoopEndStep = 0;
                            for (int j = 0; j < abortRecipeSteps[i].LoopCount; j++)
                            {
                                for (int m = i; m < abortRecipeSteps.Count; m++)
                                {
                                    total += abortRecipeSteps[m].StepTime;

                                    if (abortRecipeSteps[m].IsLoopEndStep)
                                    {
                                        iLoopEndStep = m;
                                        break;
                                    }
                                }
                            }
                            i = iLoopEndStep;
                        }
                        else
                        {
                            total += abortRecipeSteps[i].StepTime;
                        }
                    }
                    else
                    {
                        i = abortRecipeSteps[i].JumpStepNo - 1;// -1是因为i++
                    }
                }
            }
            catch (Exception ex)
            {
                LOG.Write(ex);
                return -1;
            }

            return (int)total;
        }

        public void SetContinue(string continueMode)
        {
            switch (continueMode)
            {
                case "Step continue":
                    ContinueAction = RecipeContinueMode.StepContinue;
                    break;
                case "Step restart":
                    ContinueAction = RecipeContinueMode.StepRestart;
                    break;
                case "Next step":
                    ContinueAction = RecipeContinueMode.NextStep;
                    break;
                case "Recipe restart":
                    ContinueAction = RecipeContinueMode.RecipeRestart;
                    break;
                case "Recipe complete":
                    ContinueAction = RecipeContinueMode.RecipeCompleted;
                    break;
                case "Wafer return and job stop":
                    ContinueAction = RecipeContinueMode.WaferReturnAndJobStop;
                    break;
            }

            PMModule.ResetToleranceChecker();
        }

        private double SubRecipeCalTotalTime(int currentStepNumber)
        {
            double total = 0;

            for (int k = _currentSubRecipeStepNumber; k < PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps.Count; k++)
            {
                if (!PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].IsJumpStep)
                {
                    if (PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].IsLoopEndStep)
                    {
                        int iSystemLoopStartStep = PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].LoopStartStep;
                        total += PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].StepTime;
                        for (int n = 0; n < PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].LoopCount - 1; n++)
                        {
                            for (int l = iSystemLoopStartStep; l <= k; l++)
                            {
                                total += PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[l].StepTime;
                            }
                        }
                    }
                    else
                    {
                        total += PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].StepTime;
                    }
                }
                else
                {
                    k = PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].JumpStepNo - 1;// -1是因为k++
                }
            }

            return total;
        }

        private void SubRecipeLoopEndCheck(List<RecipeStep> recipeSteps)
        {
            if (_alarmAction == RecipeAlaramAction.JumpStep || _alarmAction == RecipeAlaramAction.JumpStepCancelCallLoop)
            {
                _currentSubRecipeStepNumber = _jumpStepNumber;
                _alarmAction = RecipeAlaramAction.None;
                _alarmNames.Clear();
                return;
            }

            if (recipeSteps[_currentSubRecipeStepNumber].IsLoopEndStep)
            {
                if (IsJumpStepCancelCallLoop)
                {
                    _currentSubRecipeStepNumber++;
                    IsJumpStepCancelCallLoop = false;
                    return;
                }

                //重新读取循环的设定次数
                CurSubRecipeStepTotalLoopCount = recipeSteps[_currentSubRecipeStepNumber].LoopCount;

                if (CurrentSubRecipeLoopCount >= CurSubRecipeStepTotalLoopCount)
                {
                    CurrentSubRecipeLoopCount = CurSubRecipeStepTotalLoopCount = 0;
                    _currentSubRecipeStepNumber++;
                    PMModule.RecipeRunningInfo.IsLooping = false;
                    PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
                    PMModule.RecipeRunningInfo.LoopCountSet = 0;
                }
                else
                {
                    _currentSubRecipeStepNumber = recipeSteps[_currentSubRecipeStepNumber].LoopStartStep;
                }
            }
            else
            {
                _currentSubRecipeStepNumber++;
            }
        }

        private void RecipeLoopEndCheck(List<RecipeStep> recipeSteps)
        {
            if (_alarmAction == RecipeAlaramAction.JumpStep || _alarmAction == RecipeAlaramAction.JumpStepCancelCallLoop)
            {
                _currentStepNumber = _jumpStepNumber;
                _alarmAction = RecipeAlaramAction.None;
                _alarmNames.Clear();
                return;
            }

            if (recipeSteps[_currentStepNumber].IsLoopEndStep)
            {
                if (IsJumpStepCancelCallLoop)
                {
                    _currentStepNumber++;
                    IsJumpStepCancelCallLoop = false;
                    return;
                }

                //重新读取循环的设定次数
                CurStepTotalLoopCount = recipeSteps[_currentStepNumber].LoopCount;
                if (CurrentLoopCount >= CurStepTotalLoopCount)
                {
                    CurrentLoopCount = CurStepTotalLoopCount = 0;
                    _currentStepNumber++;
                    PMModule.RecipeRunningInfo.IsLooping = false;
                    PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
                    PMModule.RecipeRunningInfo.LoopCountSet = 0;
                }
                else
                {
                    _currentStepNumber = recipeSteps[_currentStepNumber].LoopStartStep;
                }
            }
            else
            {
                _currentStepNumber++;
            }
        }

        private void CheckTolerance()
        {
            //foreach (var key in _trigMfcToleranceAlarms.Keys)
            //{
            //    if (PMModule.GasMFCs.ContainsKey(key) && _trigMfcToleranceWarnings.ContainsKey(key))
            //    {
            //        _trigMfcToleranceAlarms[key].CLK = PMModule.GasMFCs[key].CheckToleranceAlarm();
            //        if (_trigMfcToleranceAlarms[key].Q)
            //            PMModule.GasMFCs[key].SetToleranceAlarm();

            //        _trigMfcToleranceWarnings[key].CLK = PMModule.GasMFCs[key].CheckToleranceWarning();
            //        if (_trigMfcToleranceWarnings[key].Q && !_trigMfcToleranceAlarms[key].Q)
            //            PMModule.GasMFCs[key].SetToleranceWarning();
            //    }
            //}

            //_trigHeaterBottomToleranceAlarm.CLK = PMModule.CheckHeaterBottomToleranceAlaram();
            //if (_trigHeaterBottomToleranceAlarm.Q)
            //    PMModule.SetHeaterBottomToleranceAlaram();

            //_trigHeaterBottomToleranceWarning.CLK = PMModule.CheckHeaterBottomToleranceWarning();
            //if (_trigHeaterBottomToleranceWarning.Q && !_trigHeaterBottomToleranceAlarm.Q)
            //    PMModule.SetHeaterBottomToleranceWarning();

            //_trigHeaterCenterBottomToleranceAlarm.CLK = PMModule.CheckHeaterCenterBottomToleranceAlaram();
            //if (_trigHeaterCenterBottomToleranceAlarm.Q)
            //    PMModule.SetHeaterCenterBottomToleranceAlaram();

            //_trigHeaterCenterBottomToleranceWarning.CLK = PMModule.CheckHeaterCenterBottomToleranceWarning();
            //if (_trigHeaterCenterBottomToleranceWarning.Q && !_trigHeaterCenterBottomToleranceAlarm.Q)
            //    PMModule.SetHeaterCenterBottomToleranceWarning();

            //_trigHeaterCenterToleranceAlarm.CLK = PMModule.CheckHeaterCenterToleranceAlaram();
            //if (_trigHeaterCenterToleranceAlarm.Q)
            //    PMModule.SetHeaterCenterToleranceAlaram();

            //_trigHeaterCenterToleranceWarning.CLK = PMModule.CheckHeaterCenterToleranceWarning();
            //if (_trigHeaterCenterToleranceWarning.Q && !_trigHeaterCenterToleranceAlarm.Q)
            //    PMModule.SetHeaterCenterToleranceWarning();

            //_trigHeaterCenterTopToleranceAlarm.CLK = PMModule.CheckHeaterCenterTopToleranceAlaram();
            //if (_trigHeaterCenterTopToleranceAlarm.Q)
            //    PMModule.SetHeaterCenterTopToleranceAlaram();

            //_trigHeaterCenterTopToleranceWarning.CLK = PMModule.CheckHeaterCenterTopToleranceWarning();
            //if (_trigHeaterCenterTopToleranceWarning.Q && !_trigHeaterCenterTopToleranceAlarm.Q)
            //    PMModule.SetHeaterCenterTopToleranceWarning();

            //_trigHeaterTopToleranceAlarm.CLK = PMModule.CheckHeaterTopToleranceAlaram();
            //if (_trigHeaterTopToleranceAlarm.Q)
            //    PMModule.SetHeaterTopToleranceAlaram();

            //_trigHeaterTopToleranceWarning.CLK = PMModule.CheckHeaterTopToleranceWarning();
            //if (_trigHeaterTopToleranceWarning.Q && !_trigHeaterTopToleranceAlarm.Q)
            //    PMModule.SetHeaterTopToleranceWarning();

            //_trigPressureToleranceAlarm.CLK = PMModule.CheckPressureToleranceAlaram();
            //if (_trigPressureToleranceAlarm.Q)
            //    PMModule.SetPressureToleranceAlaram();

            //_trigPressureToleranceWarning.CLK = PMModule.CheckPressureToleranceWarning();
            //if (_trigPressureToleranceWarning.Q && !_trigPressureToleranceAlarm.Q)
            //    PMModule.SetPressureToleranceWarning();
        }

        private void ResetTrig()
        {
            PMModule.ResetAlarmCondition();

            foreach (var key in _trigMfcToleranceAlarms.Keys)
            {
                if (_trigMfcToleranceWarnings.ContainsKey(key))
                {
                    _trigMfcToleranceAlarms[key].RST = true;
                    _trigMfcToleranceWarnings[key].RST = true;
                }
            }
            _trigHeaterBottomToleranceAlarm.RST = true;
            _trigHeaterBottomToleranceWarning.RST = true;
            _trigHeaterCenterBottomToleranceAlarm.RST = true;
            _trigHeaterCenterBottomToleranceWarning.RST = true;
            _trigHeaterCenterToleranceAlarm.RST = true;
            _trigHeaterCenterToleranceWarning.RST = true;
            _trigHeaterCenterTopToleranceAlarm.RST = true;
            _trigHeaterCenterTopToleranceWarning.RST = true;
            _trigHeaterTopToleranceAlarm.RST = true;
            _trigHeaterTopToleranceWarning.RST = true;
            _trigPressureToleranceAlarm.RST = true;
            _trigPressureToleranceWarning.RST = true;
            _trigInputSignalTimeOutAlarm.RST = true;
            _trigTemperatureConvergenceTimeOutAlarm.RST = true;
            _trigReachTempTimeOutAlarm.RST = true;
            _trigPressureConvergenceTimeOutAlarm.RST = true;
            _trigReachPressureTimeOutAlarm.RST = true;
            _trigAutoProfileTimeOutAlarm.RST = true;

            _trigHeaterProfileFinish.RST = true;
            _trigLeakCheckFinish.RST = true;
            _trigBoatWaitCondition.RST = true;
            _trigAPCWaitCondition.RST = true;
            _trigAUXWaitCondition.RST = true;
            _trigHeaterWaitCondition.RST = true;
            _trigMFCWaitCondition.RST = true;
            _infoHeaterProfileFinish = "";
            _infoAUXWaitCondition = "";
            _infoHeaterWaitCondition = "";
            _infoMFCWaitCondition = "";
        }

        private void RecipeExec(string type, List<RecipeStep> curSteps, int currentStepNumber, double curStepElpasedTimeBeforePaused, int otherRecipeStartStepNumber=0)
        {
            var reason = "";
            _stepTimer.Start(curSteps[currentStepNumber].StepTime * 1000 - curStepElpasedTimeBeforePaused);
            _showStepNo = currentStepNumber;
            Notify($"{type} running step {currentStepNumber + 1}:{curSteps[currentStepNumber].StepName}");
            var stopwatch = new Stopwatch();
            stopwatch.Start();
            //执行工艺程序命令
            foreach (var recipeCmd in curSteps[currentStepNumber].RecipeCommands.Keys)
            {
                if (!OP.CanDoOperation($"{_doModule}.{recipeCmd}", out reason, curSteps[currentStepNumber].RecipeCommands[recipeCmd]))
                {
                    if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out reason, curSteps[currentStepNumber].RecipeCommands[recipeCmd]))
                    {
                        if (!OP.CanDoOperation($"{ModuleName.System}.{recipeCmd}", out reason, curSteps[currentStepNumber].RecipeCommands[recipeCmd]))
                        {
                            PMModule.CheckCanDoOperationAlarm.Set($"Can not execute {recipeCmd}, {reason}");
                            return;
                        }
                        else
                        {
                            OP.DoOperation($"{ModuleName.System}.{recipeCmd}", out string reason1, 0, curSteps[currentStepNumber].RecipeCommands[recipeCmd]);
                        }
                    }
                    else
                    {
                        OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, 0, curSteps[currentStepNumber].RecipeCommands[recipeCmd]);
                    }
                }
                else
                {
                    OP.DoOperation($"{_doModule}.{recipeCmd}", out string reason1, 0, curSteps[currentStepNumber].RecipeCommands[recipeCmd]);
                }
            }
            LOG.Write($"step exec time {stopwatch.ElapsedMilliseconds}");

            if (curSteps[currentStepNumber].EndBy == EnumEndByCondition.ByTime && !PMModule.IsBoatMoveToLoadPosition)
                _state = RecipeRunningState.TimeWait;
            else
                _state = RecipeRunningState.ConditionWait;

            _faCallback.RecipeStepStart(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, otherRecipeStartStepNumber != 0 ? otherRecipeStartStepNumber : currentStepNumber);
            if (type == "Sub recipe")
                _dbCallback.RecipeStepStart(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentStepNumber, PMModule.RecipeRunningInfo.RecipeStepList.Count > _currentStepNumber ? PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName : "",
                    PMModule.RecipeRunningInfo.RecipeStepList.Count > _currentStepNumber ? (float)PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime : 0,
                    $"{(otherRecipeStartStepNumber != 0 ? otherRecipeStartStepNumber : currentStepNumber)}", curSteps[currentStepNumber].StepName, (float)curSteps[currentStepNumber].StepTime,
                    $"{PMModule.RecipeRunningInfo.SubRecipeCurrentLoopCount}/{PMModule.RecipeRunningInfo.SubRecipeLoopCount}");
            else
                _dbCallback.RecipeStepStart(PMModule.RecipeRunningInfo.InnerId.ToString(), otherRecipeStartStepNumber != 0 ? otherRecipeStartStepNumber : currentStepNumber,
                    curSteps[currentStepNumber].StepName, (float)curSteps[currentStepNumber].StepTime, "", "", 0, "");
            _fdc.Start(curSteps[currentStepNumber].RecipeCommands);
        }
    }
}