| 1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768 | <?xml version="1.0" encoding="utf-8"?><Aitex>	<TableParameterFormat ChamberType="APCPID" Version="1.0"  TableNumber="10">		<!--###########################################-->		<Catalog DisplayName="ParameterInfo">			<Group DisplayName="Parameter Information">				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="TableNo" InputType="ReadOnly" />				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />				<Step ModuleName="" DeviceType="" DisplayName="P" DefaultValue="0.1" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.01" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="I" DefaultValue="0" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="D" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="a" DefaultValue="0" ControlName="a" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>			</Group>		</Catalog>		<!--###########################################-->		<Catalog DisplayName="Table">			<Group DisplayName="Press" ControlName="Press">				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="No" InputType="ReadOnly" />				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />				<Step ModuleName="" DeviceType="" DisplayName="P" DefaultValue="0.1" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.01" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="I" DefaultValue="0" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="D" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="a" DefaultValue="0" ControlName="a" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="offset" DefaultValue="0" ControlName="offset" InputType="NumInput" InputMode=""  Min="-999" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="CH(mm)" DefaultValue="0.1" ControlName="CH" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>				<Step ModuleName="" DeviceType="" DisplayName="CL(mm)" DefaultValue="0.1" ControlName="CL" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>			</Group>		</Catalog>	</TableParameterFormat>	<TableParameterSchema>		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">			<xs:simpleType name="booleanType">				<xs:restriction base="xs:string">					<xs:enumeration value="0" />					<xs:enumeration value="1" />					<xs:enumeration value="False" />					<xs:enumeration value="True" />					<xs:enumeration value="false" />					<xs:enumeration value="true" />				</xs:restriction>			</xs:simpleType>			<xs:element name="TableParameterData">				<xs:complexType>					<xs:sequence>						<xs:element maxOccurs="unbounded" name="Step">							<xs:complexType>								<xs:attribute name="TableNo" type="xs:string" use="required" />								<xs:attribute name="Name" type="xs:string" use="required" />								<xs:attribute name="Type" type="xs:string" use="required" />								<!--<xs:attribute name="UseTemp" type="xs:decimal" use="required" />-->							</xs:complexType>						</xs:element>					</xs:sequence>					<xs:attribute name="ParameterChamberType" type="xs:string" fixed="Parameter" use="required" />					<xs:attribute name="ParameterType" type="xs:string" use="required" />					<xs:attribute name="ParameterVersion" type="xs:string" fixed="1.0" use="required" />					<xs:attribute name="CreatedBy" type="xs:string" use="required" />					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />					<xs:attribute name="Description" type="xs:string" use="required" />				</xs:complexType>			</xs:element>		</xs:schema>	</TableParameterSchema></Aitex>
 |