| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166 | using Aitex.Core.Common.DeviceData;using Aitex.Core.RT.Device;using Aitex.Core.RT.Device.Unit;using Aitex.Core.RT.Event;using Aitex.Core.Util;using Aitex.Core.Utilities;using MECF.Framework.Common.Event;using System;using System.Collections.Generic;using System.Linq;using System.Reflection;using MECF.Framework.Common.SubstrateTrackings;using Aitex.Core.Common;using FurnaceRT.Equipments.Systems;using Aitex.Core.RT.IOCore;using MECF.Framework.Common.Equipment;using MECF.Framework.RT.Core.IoProviders;using MECF.Framework.Common.Device.Bases;using FurnaceRT.Equipments.Boats;using IoHeater = FurnaceRT.Devices.IoHeater;using IoPressureMeter = FurnaceRT.Devices.IoPressureMeter;using FurnaceRT.Devices;using Aitex.Core.RT.Log;using FurnaceRT.Equipments.PMs.Devices;using Aitex.Core.RT.SCCore;namespace FurnaceRT.Equipments.PMs{    public partial class PMModule    {        enum N2PurgeMode        {            Auto,            Manual_N2Purge,            Manual_ATM,            Manual_Maintenance,            Auto_Check,        }        private Dictionary<string, Tuple<R_TRIG, List<Tuple<IoValve, bool>>>> _n2PurgeSequenceAction;        private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;        private N2PurgeMode _N2PurgeMode = N2PurgeMode.Auto;        private bool GetN2PurgeAIRTo20PPMStatus()        {            return ValveLABacksideDoorCylinderControl.DOOpen.Value;        }        private bool GetN2PurgeUnder20PPMStatus()        {            return ConcentrationO2.Value < 20;        }        private bool GetN2PurgeAIRStatus()        {            return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);        }        private bool GetN2PurgeDoorOpenStatus()        {            return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);        }        private bool GetN2PurgeFoup1Status()        {            return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;        }        private bool GetN2PurgeFoup2Status()        {            return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;        }        private void MonitorN2Purge()        {            if (_N2PurgeMode != N2PurgeMode.Auto)                return;            if (_n2PurgeSequenceAction != null && _n2PurgeSequenceStatus != null)            {                foreach (var key in _n2PurgeSequenceAction.Keys)                {                    var value = _n2PurgeSequenceAction[key];                    value.Item1.CLK = _n2PurgeSequenceStatus[key].Invoke();                    if (value.Item1.Q && value.Item2 != null)                    {                        LOG.Write($"N2 purge sequence trig: {key}");                        //EV.PostWarningLog("System",$"N2 purge sequence trig: {key}");                        foreach (var valve in value.Item2)                        {                            if (valve.Item1.Status != valve.Item2)                                valve.Item1.TurnValve(valve.Item2, out _);                        }                    }                }            }        }        public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)        {            if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)                TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);        }        public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)        {            if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)                TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);            if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)                TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);        }        public void SetN2PurgeProcess(bool isEable)        {            if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)                TrigN2PurgeProcess.SetTrigger(isEable, out _);        }        public void SetN2PurgeLAO2CheckSV(float value)        {            if (TrigN2PurgeLAO2CheckSV != null)                TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);        }        public void SetN2PurgeFOUPO2CheckSV(float value)        {            if (TrigN2PurgeFOUPO2CheckSV != null)                TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);        }        public void SetN2PurgeParameters()        {            if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)            {                var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");                TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);            }            if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)            {                var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");                TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);            }            if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)            {                var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");                TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);            }            if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)            {                var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");                TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);            }            if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)            {                var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");                TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);            }            if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)            {                var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");                TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);            }            if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)            {                var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");                TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);            }        }    }}
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