| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999 | using System;using System.Collections;using System.Collections.Generic;using System.Diagnostics;using System.Threading;using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.IOCore;using Aitex.Core.RT.Log;using Aitex.Core.Util;using Aitex.Core.WCF;using FurnaceSimulator.Views;using MECF.Framework.Simulator.Core.Commons;namespace FurnaceSimulator.Instances{    public class SimulatorSystem : Singleton<SimulatorSystem>    {        private PeriodicJob _thread;        private int _shuttleServoStation;        private int _robotServoStation;        Random _rd = new Random();        private List<int> motionStationList;        private Dictionary<string, int> currentStationDic = new Dictionary<string, int>();        private Dictionary<string, int> currentPosDic = new Dictionary<string, int>();        private Dictionary<string, int> targetStationPosDic = new Dictionary<string, int>();        private Dictionary<string, bool> isAutoMoveDic = new Dictionary<string, bool>();        private Dictionary<string, bool> logDic = new Dictionary<string, bool>();        private Dictionary<string, DeviceTimer> timerDic = new Dictionary<string, DeviceTimer>();        private RD_TRIG _smif1LoadTrig = new RD_TRIG();        private RD_TRIG _smif2LoadTrig = new RD_TRIG();        private RD_TRIG _smif1UnloadTrig = new RD_TRIG();        private RD_TRIG _smif2UnloadTrig = new RD_TRIG();        private RD_TRIG _smif1HomeTrig = new RD_TRIG();        private RD_TRIG _smif2HomeTrig = new RD_TRIG();        private Stopwatch _rAxisHomeTimer = new Stopwatch();        public SimulatorSystem()        {        }        public void Initialize()        {            motionStationList = new List<int>();            for (int i = 0; i < 100; i++)            {                if (motionStationList.Count == 0)                {                    motionStationList.Add(0);                }                else                {                    motionStationList.Add(motionStationList[motionStationList.Count - 1] + 10000);                }            }                      Singleton<DataManager>.Instance.Initialize(false);            WcfServiceManager.Instance.Initialize(new Type[]            {               typeof(SimulatorPlc1),               typeof(SimulatorPlc2),               typeof(SimulatorPlc3),               typeof(SimulatorPlc4),               typeof(SimulatorPlc5),               typeof(SimulatorPlc6),               typeof(SimulatorPlc7),               typeof(SimulatorPlc8),               //typeof(SimulatorPlc9),            });            SetDefaultValue();            _thread = new PeriodicJob(200, OnMonitor, nameof(SimulatorSystem), true);        }        public static Int16 Pres2Phy901P(double pressure)        {            var voltage = Math.Log10(pressure) + 6;            var raw = voltage / 10.0 * 0x7fff;            if (raw < 0) raw = 0;            else if (raw > 0x7fff) raw = 0x7fff;            return Convert.ToInt16(raw);        }        public double Phy2Pres901P(byte low, byte high)        {            Int16 rawValue = BitConverter.ToInt16(new byte[] { low, high }, 0);            var voltage = Converter.Phy2Logic(rawValue, 1, 9, 3276.7, 29490.3);            return Math.Pow(10.0, voltage - 6.0);        }        public static Int16 Pres2Phy974B(double pressure)        {            var voltage = (Math.Log10(pressure) + 11) / 2;            var raw = voltage / 10.0 * 0x7fff;            if (raw < 0) raw = 0;            else if (raw > 0x7fff) raw = 0x7fff;            return Convert.ToInt16(raw);        }        public double Phy2Pres974B(byte low, byte high)        {            Int16 rawValue = BitConverter.ToInt16(new byte[] { low, high }, 0);            var voltage = Converter.Phy2Logic(rawValue, 1.5, 7, 4915.05, 22936.9);            return Math.Pow(10.0, 2 * voltage - 11.0);        }        private SimpleSocketDeviceSimulator _SimpleSocketDeviceSimulator;        private void SetDefaultValue()        {            IO.DI[$"PM1.DI_LP1FOUPInPosition1"].Value = true;            IO.DI[$"PM1.DI_LP1FOUPInPosition2"].Value = true;            IO.DI[$"PM1.DI_LP1FOUPInPosition3"].Value = true;            IO.DI[$"PM1.DI_LP1FOUPDetect"].Value = true;            IO.DI[$"PM1.DI_LP2FOUPInPosition1"].Value = true;            IO.DI[$"PM1.DI_LP2FOUPInPosition2"].Value = true;            IO.DI[$"PM1.DI_LP2FOUPInPosition3"].Value = true;            IO.DI[$"PM1.DI_LP2FOUPDetect"].Value = true;            IO.DI[$"PM1.DI_LP3FOUPInPosition1"].Value = true;            IO.DI[$"PM1.DI_LP3FOUPInPosition2"].Value = true;            IO.DI[$"PM1.DI_LP3FOUPInPosition3"].Value = true;            IO.DI[$"PM1.DI_LP3FOUPDetect"].Value = true;            IO.DI[$"PM1.DI_LP4FOUPInPosition1"].Value = true;            IO.DI[$"PM1.DI_LP4FOUPInPosition2"].Value = true;            IO.DI[$"PM1.DI_LP4FOUPInPosition3"].Value = true;            IO.DI[$"PM1.DI_LP4FOUPDetect"].Value = true;            IO.DI[$"PM1.DI_WaferRobotEX1AxisHomePosition"].Value = true;            IO.DI[$"PM1.DI_WaferRobotEX2AxisHomePosition"].Value = true;            IO.DI[$"PM1.DI_FBLightCurtainFault"].Value = false;            IO.DI[$"PM1.DI_FBLightCurtainOSSD1"].Value = false;            IO.DI[$"PM1.DI_FBLightCurtainOSSD2"].Value = false;            IO.DI[$"PM1.DI_BoatRAxisAlarm"].Value = false;            IO.DI[$"PM1.DI_LP1FOUPLeftClamp"].Value = false;            IO.DI[$"PM1.DI_LP1FOUPRightClamp"].Value = false;            IO.DI[$"PM1.DI_LP1FOUPLeftRelease"].Value = true;            IO.DI[$"PM1.DI_LP1FOUPRightRelease"].Value = true;            IO.DI[$"PM1.DI_LP2FOUPLeftClamp"].Value = false;            IO.DI[$"PM1.DI_LP2FOUPRightClamp"].Value = false;            IO.DI[$"PM1.DI_LP2FOUPLeftRelease"].Value = true;            IO.DI[$"PM1.DI_LP2FOUPRightRelease"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionA1"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionB1"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionC1"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionD1"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionA2"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionB2"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionC2"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionD2"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionA3"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionB3"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionC3"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionD3"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionA4"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionB4"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionC4"].Value = true;            IO.DI[$"PM1.DI_BufferInPositionD4"].Value = true;            IO.AI[$"PM1.AI_APCHomeStatus"].FloatValue = 2;            for (int i = 1; i < 10; i++)            {                if (IO.DI[$"PM1.DI_VAC{i}"] != null)                {                    IO.DI[$"PM1.DI_VAC{i}"].Value = true;                }            }            IO.DI[$"PM1.DI_BoatUnloadInterlock"].Value = true;            IO.DI[$"PM1.DI_PS13LStatus"].Value = false;            IO.DI[$"PM1.DI_FurnaceShutterOpened"].Value = true;            IO.DI[$"PM1.DI_MiddlePos1BoatZAxis"].Value = true;            IO.DI[$"PM1.DI_MiddlePos2BoatZAxis"].Value = true;            IO.DI[$"PM1.DI_MiddlePos3BoatZAxis"].Value = true;            IO.AI[$"PM1.AI_N26PurgePressure"].FloatValue =2;            for (int i = 1; i < 100; i++)            {                if (IO.DI[$"PM1.DI_AV{i}ILK"] != null)                {                    IO.DI[$"PM1.DI_AV{i}ILK"].Value = true;                }            }            //_SimpleSocketDeviceSimulator = new SimpleSocketDeviceSimulator(12000, -1, "\r", ' ', false);        }        private bool OnMonitor()        {            try            {                //return true;                //MonitorValve();                MonitorLP("PM1", "LP1");                MonitorLP("PM1", "LP2");                MonitorFIMS("PM1", "FIMS1");                MonitorFIMS("PM1", "FIMS2");                MonitorBuffer();                MonitorMFC();                MonitorDoor();                MonitorRAxis("PM1");                MonitorZAxis("PM1");                MonitorHeater();                MonitorAPC();                MonitorHeaterBand();                if (IO.DO[$"PM1.DO_ShutterOpen"].Value)                {                    IO.DI[$"PM1.DI_FurnaceShutterOpened"].Value = IO.DO[$"PM1.DO_ShutterOpen"].Value;                    IO.DI[$"PM1.DI_FurnaceShutterClosed"].Value = IO.DO[$"PM1.DO_ShutterClose"].Value;                }                if (IO.DO[$"PM1.DO_ShutterClose"].Value)                {                    IO.DI[$"PM1.DI_FurnaceShutterOpened"].Value = IO.DO[$"PM1.DO_ShutterOpen"].Value;                    IO.DI[$"PM1.DI_FurnaceShutterClosed"].Value = IO.DO[$"PM1.DO_ShutterClose"].Value;                }                IO.AI[$"PM1.AI_BufferTargetPosFb"].FloatValue = IO.AO[$"PM1.AO_TargetPositionBufferAxis"].FloatValue;                IO.AI[$"PM1.AI_BoatTargetPosFb"].FloatValue = IO.AO[$"PM1.AO_BoatPosition"].FloatValue;                IO.DI[$"PM1.DI_VaccumPumpBothOn"].Value = true;                if (IO.DO[$"PM1.DO_ValveAV91"] != null && IO.DI[$"PM1.DI_AV91_1RHCAirInOpened"] != null) { IO.DI[$"PM1.DI_AV91_1RHCAirInOpened"].Value = IO.DO[$"PM1.DO_ValveAV91"].Value; }                if (IO.DO[$"PM1.DO_ValveAV91"] != null && IO.DI[$"PM1.DI_AV91_2RHCAirInOpened"] != null) { IO.DI[$"PM1.DI_AV91_2RHCAirInOpened"].Value = IO.DO[$"PM1.DO_ValveAV91"].Value; }                if (IO.DO[$"PM1.DO_ValveAV91"] != null && IO.DI[$"PM1.DI_AV91_3RHCAirOutOpened"] != null) { IO.DI[$"PM1.DI_AV91_3RHCAirOutOpened"].Value = IO.DO[$"PM1.DO_ValveAV91"].Value; }                if (IO.DO[$"PM1.DO_ValveAV91"] != null && IO.DI[$"PM1.DI_AV91_4RHCAirOutOpened"] != null) { IO.DI[$"PM1.DI_AV91_4RHCAirOutOpened"].Value = IO.DO[$"PM1.DO_ValveAV91"].Value; }                if (IO.DO[$"PM1.DO_ValveAV91"] != null && IO.DI[$"PM1.DI_AV91_1RHCAirInClosed"] != null) { IO.DI[$"PM1.DI_AV91_1RHCAirInClosed"].Value = !IO.DO[$"PM1.DO_ValveAV91"].Value; }                if (IO.DO[$"PM1.DO_ValveAV91"] != null && IO.DI[$"PM1.DI_AV91_2RHCAirInClosed"] != null) { IO.DI[$"PM1.DI_AV91_2RHCAirInClosed"].Value = !IO.DO[$"PM1.DO_ValveAV91"].Value; }                if (IO.DO[$"PM1.DO_ValveAV91"] != null && IO.DI[$"PM1.DI_AV91_3RHCAirOutClosed"] != null) { IO.DI[$"PM1.DI_AV91_3RHCAirOutClosed"].Value = !IO.DO[$"PM1.DO_ValveAV91"].Value; }                if (IO.DO[$"PM1.DO_ValveAV91"] != null && IO.DI[$"PM1.DI_AV91_4RHCAirOutClosed"] != null) { IO.DI[$"PM1.DI_AV91_4RHCAirOutClosed"].Value = !IO.DO[$"PM1.DO_ValveAV91"].Value; }                if (IO.DO[$"PM1.DO_LAExhaustValveOpen"] != null && IO.DO[$"PM1.DO_LAExhaustValveClose"] != null &&                    (IO.DO[$"PM1.DO_LAExhaustValveOpen"].Value || IO.DO[$"PM1.DO_LAExhaustValveClose"].Value))                {                    IO.DI[$"PM1.DI_AV66CommonExhaustOpened"].Value = IO.DO[$"PM1.DO_LAExhaustValveOpen"].Value;                    IO.DI[$"PM1.DI_AV66CommonExhaustClosed"].Value = IO.DO[$"PM1.DO_LAExhaustValveClose"].Value;                }                if (IO.DO[$"PM1.DO_FFUAirInValveOpen"] != null && IO.DO[$"PM1.DO_FFUAirInValveClose"] != null &&                    (IO.DO[$"PM1.DO_FFUAirInValveOpen"].Value || IO.DO[$"PM1.DO_FFUAirInValveClose"].Value))                {                  //  IO.DI[$"PM1.DI_AV65FFUAirInOpened"].Value = IO.DO[$"PM1.DO_FFUAirInValveOpen"].Value;                    //IO.DI[$"PM1.DI_AV65FFUAirInClosed"].Value = IO.DO[$"PM1.DO_FFUAirInValveClose"].Value;                }                return true;            }            catch (Exception e)            {                LOG.Write(e);            }            return true;        }        public void Terminate()        {            _thread.Stop();        }        private void MonitorHeaterBand()        {            for (int i = 1; i < 20; i++)            {                if (IO.AI[$"PM1.AI_ForelineHeater{i}TempPV"] != null)                {                    IO.DI[$"PM1.DI_ForelineHeater{i}ControlDoing"].Value = IO.DO[$"PM1.DO_ForelineHeater{i}Enable"].Value;                    IO.AI[$"PM1.AI_ForelineHeater{i}TempPV"].FloatValue = IO.AO[$"PM1.AO_ForelineHeater{i}TempSV"].FloatValue;                    IO.AI[$"PM1.AI_ForelineHeater{i}PBFeedback"].FloatValue = IO.AO[$"PM1.AO_ForelineHeater{i}PBSV"].FloatValue;                    IO.AI[$"PM1.AI_ForelineHeater{i}TIFeedback"].FloatValue = IO.AO[$"PM1.AO_ForelineHeater{i}TISV"].FloatValue;                    IO.AI[$"PM1.AI_ForelineHeater{i}TDFeedback"].FloatValue = IO.AO[$"PM1.AO_ForelineHeater{i}TDSV"].FloatValue;                    IO.AI[$"PM1.AI_ForelineHeater{i}ManualMVFeedback"].FloatValue = IO.AO[$"PM1.AO_ForelineHeater{i}TempSV"].FloatValue > 0 ? 100 : 0;                }            }            if (IO.AI[$"PM1.AI_CapHeaterTempPV"] != null)            {                IO.DI[$"PM1.DI_CapHeaterControlDoing"].Value = IO.DO[$"PM1.DO_CapHeaterEnable"].Value;                IO.AI[$"PM1.AI_CapHeaterTempPV"].FloatValue = IO.AO[$"PM1.AO_CapHeaterTempSV"].FloatValue;                IO.AI[$"PM1.AI_CapHeaterPBFeedback"].FloatValue = IO.AO[$"PM1.AO_CapHeaterPBSV"].FloatValue;                IO.AI[$"PM1.AI_CapHeaterTIFeedback"].FloatValue = IO.AO[$"PM1.AO_CapHeaterTISV"].FloatValue;                IO.AI[$"PM1.AI_CapHeaterTDFeedback"].FloatValue = IO.AO[$"PM1.AO_CapHeaterTDSV"].FloatValue;                IO.AI[$"PM1.AI_CapHeaterControlOutput"].FloatValue = IO.AO[$"PM1.AO_CapHeaterTempSV"].FloatValue > 0 ? 100 : 0;            }            if (IO.AI[$"PM1.AI_APCExternalHeaterTempPV"] != null)            {                IO.DI[$"PM1.DI_APCExternalHeaterControlDoing"].Value = IO.DO[$"PM1.DO_APCExternalHeaterEnable"].Value;                IO.AI[$"PM1.AI_APCExternalHeaterTempPV"].FloatValue = IO.AO[$"PM1.AO_APCExternalHeaterTempSV"].FloatValue;                IO.AI[$"PM1.AI_APCExternalHeaterPBFeedback"].FloatValue = IO.AO[$"PM1.AO_APCExternalHeaterPBSV"].FloatValue;                IO.AI[$"PM1.AI_APCExternalHeaterTIFeedback"].FloatValue = IO.AO[$"PM1.AO_APCExternalHeaterTISV"].FloatValue;                IO.AI[$"PM1.AI_APCExternalHeaterTDFeedback"].FloatValue = IO.AO[$"PM1.AO_APCExternalHeaterTDSV"].FloatValue;                IO.AI[$"PM1.AI_APCExternalHeaterControlOutput"].FloatValue = IO.AO[$"PM1.AO_APCExternalHeaterTempSV"].FloatValue > 0 ? 100 : 0;            }            if (IO.AI[$"PM1.AI_APCRingHeaterTempPV"] != null)            {                IO.DI[$"PM1.DI_APCRingHeaterControlDoing"].Value = IO.DO[$"PM1.DO_APCRingHeaterEnable"].Value;                IO.AI[$"PM1.AI_APCRingHeaterTempPV"].FloatValue = IO.AO[$"PM1.AO_APCRingHeaterTempSV"].FloatValue;                IO.AI[$"PM1.AI_APCRingHeaterPBFeedback"].FloatValue = IO.AO[$"PM1.AO_APCRingHeaterPBSV"].FloatValue;                IO.AI[$"PM1.AI_APCRingHeaterTIFeedback"].FloatValue = IO.AO[$"PM1.AO_APCRingHeaterTISV"].FloatValue;                IO.AI[$"PM1.AI_APCRingHeaterTDFeedback"].FloatValue = IO.AO[$"PM1.AO_APCRingHeaterTDSV"].FloatValue;                IO.AI[$"PM1.AI_APCRingHeaterControlOutput"].FloatValue = IO.AO[$"PM1.AO_APCRingHeaterTempSV"].FloatValue > 0 ? 100 : 0;            }            for (int i = 1; i < 80; i++)            {                for (int ch=1;ch<40;ch++)                {                    if (IO.AO[$"PM1.AO_Unit{i}CH{ch}SV"] != null && IO.AI[$"PM1.AI_Unit{i}CH{ch}SV"] != null)                    {                        IO.AI[$"PM1.AI_Unit{i}CH{ch}EnableIn"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}EnableIn"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}SV"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}SV"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}PV"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}SV"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}PID_P"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}PID_P"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}PID_I"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}PID_I"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}PID_D"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}PID_D"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}UpRate"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}UpRate"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}DownRate"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}DownRate"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}AutotuneActivate"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}AutotuneActivate"].FloatValue;                        //IO.AI[$"PM1.AI_Unit{i}CH{ch}AlarmHigher"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}AlarmHigher"].FloatValue;                        //IO.AI[$"PM1.AI_Unit{i}CH{ch}AlarmLower"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}AlarmLower"].FloatValue;                        IO.AI[$"PM1.AI_Unit{i}CH{ch}WorkingOutput"].FloatValue = IO.AO[$"PM1.AO_Unit{i}CH{ch}SV"].FloatValue > 0 ? 100 : 0;                    }                }                            }        }        private void MonitorAPC()        {            IO.AI[$"PM1.AI_APCSelectController"].FloatValue = IO.AO[$"PM1.AO_APCControllerModeSelect"].FloatValue;            IO.AI[$"PM1.AI_APCControlModeStatus"].FloatValue = IO.AO[$"PM1.AO_APCSpecifyControlMode"].FloatValue;            IO.AI[$"PM1.AI_APCPositionActualValue"].FloatValue = IO.AO[$"PM1.AO_APCSpecifyTargetOpeningForValveOpeningControl"].FloatValue;            if (IO.AO[$"PM1.AO_APCSlowVacuumTargetPressure"].FloatValue > 0)            {                IO.AI[$"PM1.AI_APCValueSensorInput1"].FloatValue = IO.AO[$"PM1.AO_APCSlowVacuumTargetPressure"].FloatValue;                IO.AI[$"PM1.AI_APCValueSensorInput2"].FloatValue = IO.AO[$"PM1.AO_APCSlowVacuumTargetPressure"].FloatValue;            }            else if (IO.AO[$"PM1.AO_APCSpecifyTargetVacuumPressureControl"].FloatValue > 0)            {                IO.AI[$"PM1.AI_APCValueSensorInput1"].FloatValue = IO.AO[$"PM1.AO_APCSpecifyTargetVacuumPressureControl"].FloatValue;                IO.AI[$"PM1.AI_APCValueSensorInput2"].FloatValue = IO.AO[$"PM1.AO_APCSpecifyTargetVacuumPressureControl"].FloatValue;            }        }        private void MonitorHeater()        {            IO.AI[$"Heater.AI_HeaterUCascadePV"].FloatValue = IO.AO[$"Heater.AO_HeaterUCascadeControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterUHeaterPV"].FloatValue = IO.AO[$"Heater.AO_HeaterUHeaterControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterUWorkingOutput"].FloatValue = IO.AO[$"Heater.AO_HeaterUCascadeControlModeSV"].FloatValue > 0 || IO.AO[$"Heater.AO_HeaterUHeaterControlModeSV"].FloatValue > 0 ? 100 : 0;            IO.DI[$"Heater.DI_HeaterUEnableOutput"].Value = IO.DO[$"Heater.DO_HeaterUEnableIn"].Value;            IO.AI[$"Heater.AI_HeaterCUCascadePV"].FloatValue = IO.AO[$"Heater.AO_HeaterCUCascadeControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterCUHeaterPV"].FloatValue = IO.AO[$"Heater.AO_HeaterCUHeaterControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterCUWorkingOutput"].FloatValue = IO.AO[$"Heater.AO_HeaterCUCascadeControlModeSV"].FloatValue > 0 || IO.AO[$"Heater.AO_HeaterCUHeaterControlModeSV"].FloatValue > 0 ? 100 : 0;            IO.DI[$"Heater.DI_HeaterCUEnableOutput"].Value = IO.DO[$"Heater.DO_HeaterCUEnableIn"].Value;            IO.AI[$"Heater.AI_HeaterCCascadePV"].FloatValue = IO.AO[$"Heater.AO_HeaterCCascadeControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterCHeaterPV"].FloatValue = IO.AO[$"Heater.AO_HeaterCHeaterControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterCWorkingOutput"].FloatValue = IO.AO[$"Heater.AO_HeaterCCascadeControlModeSV"].FloatValue > 0 || IO.AO[$"Heater.AO_HeaterCHeaterControlModeSV"].FloatValue > 0 ? 100 : 0;            IO.DI[$"Heater.DI_HeaterCEnableOutput"].Value = IO.DO[$"Heater.DO_HeaterCEnableIn"].Value;            IO.AI[$"Heater.AI_HeaterCLCascadePV"].FloatValue = IO.AO[$"Heater.AO_HeaterCLCascadeControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterCLHeaterPV"].FloatValue = IO.AO[$"Heater.AO_HeaterCLHeaterControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterCLWorkingOutput"].FloatValue = IO.AO[$"Heater.AO_HeaterCLCascadeControlModeSV"].FloatValue > 0 || IO.AO[$"Heater.AO_HeaterCLHeaterControlModeSV"].FloatValue > 0 ? 100 : 0;            IO.DI[$"Heater.DI_HeaterCLEnableOutput"].Value = IO.DO[$"Heater.DO_HeaterCLEnableIn"].Value;            IO.AI[$"Heater.AI_HeaterLCascadePV"].FloatValue = IO.AO[$"Heater.AO_HeaterLCascadeControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterLHeaterPV"].FloatValue = IO.AO[$"Heater.AO_HeaterLHeaterControlModeSV"].FloatValue;            IO.AI[$"Heater.AI_HeaterLWorkingOutput"].FloatValue = IO.AO[$"Heater.AO_HeaterLCascadeControlModeSV"].FloatValue > 0 || IO.AO[$"Heater.AO_HeaterLHeaterControlModeSV"].FloatValue > 0 ? 100 : 0;            IO.DI[$"Heater.DI_HeaterLEnableOutput"].Value = IO.DO[$"Heater.DO_HeaterLEnableIn"].Value;        }        public void MonitorCylinder()        {            //var valveList = new List<Tuple<string, string, string, string>>            //                {            //                    new Tuple<string, string, string, string>(            //                        $"PMA.DO_LiftPinUp",            //                        $"PMA.DO_LiftPinDown",            //                        $"PMA.DI_LiftPinUp",            //                        $"PMA.DI_LiftPinDown"            //                    ),            //                    new Tuple<string, string, string, string>(            //                        $"PMB.DO_LiftPinUp",            //                        $"PMB.DO_LiftPinDown",            //                        $"PMB.DI_LiftPinUp",            //                        $"PMB.DI_LiftPinDown"            //                    ),            //                    new Tuple<string, string, string, string>(            //                        $"PMC.DO_LiftPinUp",            //                        $"PMC.DO_LiftPinDown",            //                        $"PMC.DI_LiftPinUp",            //                        $"PMC.DI_LiftPinDown"            //                    ),            //                    new Tuple<string, string, string, string>(            //                        $"MF.DO_SlitDoorPMAOpen",            //                        $"MF.DO_SlitDoorPMAClose",            //                        $"MF.DI_SlitDoorPMAOpen",            //                        $"MF.DI_SlitDoorPMAClose"            //                    ),            //                     new Tuple<string, string, string, string>(            //                        $"MF.DO_SlitDoorPMBOpen",            //                        $"MF.DO_SlitDoorPMBClose",            //                        $"MF.DI_SlitDoorPMBOpen",            //                        $"MF.DI_SlitDoorPMBClose"            //                    ),            //                     new Tuple<string, string, string, string>(            //                        $"MF.DO_SlitDoorPMCOpen",            //                        $"MF.DO_SlitDoorPMCClose",            //                        $"MF.DI_SlitDoorPMCOpen",            //                        $"MF.DI_SlitDoorPMCClose"            //                    ),            //                     new Tuple<string, string, string, string>(            //                        $"MF.DO_CassDoorOpen",            //                        $"MF.DO_CassDoorClose",            //                        $"MF.DI_CassetteDoorOpen",            //                        $"MF.DI_CassetteDoorClose"            //                    ),            //                };            //foreach (var valve in valveList)            //{            //    if (IO.DO[valve.Item1].Value != IO.DO[valve.Item2].Value)            //    {            //        IO.DI[valve.Item3].Value = IO.DO[valve.Item1].Value;            //        IO.DI[valve.Item4].Value = IO.DO[valve.Item2].Value;            //    }            //}            //if(IO.DO[$"MF.DO_CassSliderOut"].Value)            //{            //    IO.DI[$"MF.DI_CassSliderCylinderOut"].Value = true;            //    IO.DI[$"MF.DI_CassSliderCylinderIn"].Value = false;            //    IO.DI[$"MF.DI_CassetteNestOutSW"].Value = true;            //}            //if (IO.DO[$"MF.DO_CassSliderIn"].Value)            //{            //    IO.DI[$"MF.DI_CassSliderCylinderOut"].Value = false;            //    IO.DI[$"MF.DI_CassSliderCylinderIn"].Value = true;            //    IO.DI[$"MF.DI_CassetteNestOutSW"].Value = false;            //}        }        private void MonitorSMIF()        {            _smif1LoadTrig.CLK = IO.DO[$"SMIF.DO_LoadSmif1"].Value;            _smif1UnloadTrig.CLK = IO.DO[$"SMIF.DO_UnLoadSmif1"].Value;            _smif1HomeTrig.CLK = IO.DO[$"SMIF.DO_InitSmif1"].Value;            _smif2LoadTrig.CLK = IO.DO[$"SMIF.DO_LoadSmif2"].Value;            _smif2UnloadTrig.CLK = IO.DO[$"SMIF.DO_UnLoadSmif2"].Value;            _smif2HomeTrig.CLK = IO.DO[$"SMIF.DO_InitSmif2"].Value;            if (_smif1LoadTrig.R)            {                IO.DI[$"SMIF.DI_Smif1Ready"].Value = false;            }            if (_smif1LoadTrig.T)            {                IO.DI[$"SMIF.DI_Smif1Ready"].Value = true;                IO.DI[$"SMIF.DI_Smif1ZAxisLoadPositionSensor"].Value = true;                IO.DI[$"SMIF.DI_Smif1SlideAxisExtendSensor"].Value = true;                IO.DI[$"SMIF.DI_Smif1ZAxisUnloadPositionSensor"].Value = false;                IO.DI[$"SMIF.DI_Smif1SlideAxisRetractSensor"].Value = false;            }            if (_smif1UnloadTrig.R)            {                IO.DI[$"SMIF.DI_Smif1Ready"].Value = false;            }            if (_smif1UnloadTrig.T)            {                IO.DI[$"SMIF.DI_Smif1Ready"].Value = true;                IO.DI[$"SMIF.DI_Smif1ZAxisUnloadPositionSensor"].Value = true;                IO.DI[$"SMIF.DI_Smif1SlideAxisRetractSensor"].Value = true;                IO.DI[$"SMIF.DI_Smif1ZAxisLoadPositionSensor"].Value = false;                IO.DI[$"SMIF.DI_Smif1SlideAxisExtendSensor"].Value = false;            }            if (_smif1HomeTrig.R)            {                IO.DI[$"SMIF.DI_Smif1Ready"].Value = false;                IO.DI[$"SMIF.DI_Smif1Homed"].Value = false;            }            if (_smif1HomeTrig.T)            {                IO.DI[$"SMIF.DI_Smif1Ready"].Value = true;                IO.DI[$"SMIF.DI_Smif1Homed"].Value = true;            }            if (_smif2LoadTrig.R)            {                IO.DI[$"SMIF.DI_Smif2Ready"].Value = false;            }            if (_smif2LoadTrig.T)            {                IO.DI[$"SMIF.DI_Smif2Ready"].Value = true;                IO.DI[$"SMIF.DI_Smif2ZAxisLoadPositionSensor"].Value = true;                IO.DI[$"SMIF.DI_Smif2SlideAxisExtendSensor"].Value = true;                IO.DI[$"SMIF.DI_Smif2ZAxisUnloadPositionSensor"].Value = false;                IO.DI[$"SMIF.DI_Smif2SlideAxisRetractSensor"].Value = false;            }            if (_smif2UnloadTrig.R)            {                IO.DI[$"SMIF.DI_Smif2Ready"].Value = false;            }            if (_smif2UnloadTrig.T)            {                IO.DI[$"SMIF.DI_Smif2Ready"].Value = true;                IO.DI[$"SMIF.DI_Smif2ZAxisUnloadPositionSensor"].Value = true;                IO.DI[$"SMIF.DI_Smif2SlideAxisRetractSensor"].Value = true;                IO.DI[$"SMIF.DI_Smif2ZAxisLoadPositionSensor"].Value = false;                IO.DI[$"SMIF.DI_Smif2SlideAxisExtendSensor"].Value = false;            }            if (_smif2HomeTrig.R)            {                IO.DI[$"SMIF.DI_Smif2Ready"].Value = false;                IO.DI[$"SMIF.DI_Smif2Homed"].Value = false;            }            if (_smif2HomeTrig.T)            {                IO.DI[$"SMIF.DI_Smif2Ready"].Value = true;                IO.DI[$"SMIF.DI_Smif2Homed"].Value = true;            }        }        private void MonitorMotion()        {            //MonitorModule("Shuttle", "Z");            //MonitorModule("Shuttle", "R");            //MonitorModule("TM", "Z");            //MonitorModule("TM", "E");            //MonitorModule("TM", "R");            //IO.AI[$"Motion.AI_ShuttleRStatus"].Value = IO.AO[$"Motion.AO_ShuttleRMotionStationSet"].Value;            //IO.AI[$"Motion.AI_TMEStatus"].Value = IO.AO[$"Motion.AO_TMEMotionStationSet"].Value;            //IO.AI[$"Motion.AI_TMRStatus"].Value = IO.AO[$"Motion.AO_TMRMotionStationSet"].Value;            //IO.AI[$"Motion.AI_TMEMotionDirection"].Value = IO.AO[$"Motion.AO_TMEMotionDirectionSet"].Value;            //IO.AI[$"Motion.AI_TMRMotionDirection"].Value = IO.AO[$"Motion.AO_TMRMotionDirectionSet"].Value;            //IO.AI[$"Motion.AI_ShuttleRMotionDirection"].Value = IO.AO[$"Motion.AO_ShuttleRMotionDirectionSet"].Value;            MonitorRobot();            MonitorShuttle();        }        private void MonitorRobot()        {            //short valueL = IO.AO[$"MF.AO_RobotServoTargetStationL"].Value;            //short valueH = (short)IO.AO[$"MF.AO_RobotServoTargetStationH"].Value;            //UInt32 tmp = (ushort)valueL + (UInt32)(((ushort)valueH) << 16);            //int station = tmp > Int32.MaxValue ? (int)((~tmp + 1) * -1) : (int)tmp;            //IO.AI[$"MF.AI_RobotServoTargetStationL"].Value = IO.AO[$"MF.AO_RobotServoTargetStationL"].Value > 0 ? IO.AO[$"MF.AO_RobotServoTargetStationL"].Value : IO.AI[$"MF.AI_RobotServoTargetStationL"].Value;            //IO.AI[$"MF.AI_RobotServoTargetStationH"].Value = IO.AO[$"MF.AO_RobotServoTargetStationH"].Value > 0 ? IO.AO[$"MF.AO_RobotServoTargetStationH"].Value : IO.AI[$"MF.AI_RobotServoTargetStationH"].Value;            //IO.AI[$"MF.AI_RobotDCMotor1TargetStationL"].Value = IO.AO[$"MF.AO_RobotDCMotor1TargetStationL"].Value > 0 ? IO.AO[$"MF.AO_RobotDCMotor1TargetStationL"].Value : IO.AI[$"MF.AI_RobotDCMotor1TargetStationL"].Value;            //IO.AI[$"MF.AI_RobotDCMotor1TargetStationH"].Value = IO.AO[$"MF.AO_RobotDCMotor1TargetStationH"].Value > 0 ? IO.AO[$"MF.AO_RobotDCMotor1TargetStationH"].Value : IO.AI[$"MF.AI_RobotDCMotor1TargetStationH"].Value;            //IO.AI[$"MF.AI_RobotDCMotor2TargetStationL"].Value = IO.AO[$"MF.AO_RobotDCMotor2TargetStationL"].Value > 0 ? IO.AO[$"MF.AO_RobotDCMotor2TargetStationL"].Value : IO.AI[$"MF.AI_RobotDCMotor2TargetStationL"].Value;            //IO.AI[$"MF.AI_RobotDCMotor2TargetStationH"].Value = IO.AO[$"MF.AO_RobotDCMotor2TargetStationH"].Value > 0 ? IO.AO[$"MF.AO_RobotDCMotor2TargetStationH"].Value : IO.AI[$"MF.AI_RobotDCMotor2TargetStationH"].Value;            //IO.AI[$"MF.AI_RobotStatus"].Value = (short)((IO.DO[$"MF.DO_RobotServoOn"].Value ? 1 : 0) +             //    ((_robotServoStation == station ? 1 : 0) << 1) + (1 << 10) + ((IO.DO[$"MF.DO_RobotServoPinSearch"].Value ? 1:0) << 11));            //_robotServoStation = station;        }        private void MonitorShuttle()        {            //short valueL = IO.AO[$"MF.AO_ShuttleServoTargetStationL"].Value;            //short valueH = (short)IO.AO[$"MF.AO_ShuttleServoTargetStationH"].Value;            //UInt32 tmp = (ushort)valueL + (UInt32)(((ushort)valueH) << 16);            //int station = tmp > Int32.MaxValue ? (int)((~tmp + 1) * -1) : (int)tmp;            //if(station == 1)            //{            //    IO.DI["MF.DI_ShuttleUp"].Value = false;            //    IO.DI["MF.DI_ShuttleDown"].Value = false;            //}            //else if(station == 2)            //{            //    IO.DI["MF.DI_ShuttleUp"].Value = true;            //    IO.DI["MF.DI_ShuttleDown"].Value = true;            //}            //else            //{            //    IO.DI["MF.DI_ShuttleUp"].Value = true;            //    IO.DI["MF.DI_ShuttleDown"].Value = false;            //}            //IO.AI[$"MF.AI_ShuttleServoTargetStationL"].Value = IO.AO[$"MF.AO_ShuttleServoTargetStationL"].Value > 0 ? IO.AO[$"MF.AO_ShuttleServoTargetStationL"].Value : IO.AI[$"MF.AI_ShuttleServoTargetStationL"].Value;            //IO.AI[$"MF.AI_ShuttleServoTargetStationH"].Value = IO.AO[$"MF.AO_ShuttleServoTargetStationH"].Value > 0 ? IO.AO[$"MF.AO_ShuttleServoTargetStationH"].Value : IO.AI[$"MF.AI_ShuttleServoTargetStationH"].Value;            //IO.AI[$"MF.AI_ShuttleDCMotor1TargetStationL"].Value = IO.AO[$"MF.AO_ShuttleDCMotor1TargetStationL"].Value != 0 ? IO.AO[$"MF.AO_ShuttleDCMotor1TargetStationL"].Value : IO.AI[$"MF.AI_ShuttleDCMotor1TargetStationL"].Value;            //IO.AI[$"MF.AI_ShuttleDCMotor1TargetStationH"].Value = IO.AO[$"MF.AO_ShuttleDCMotor1TargetStationH"].Value != 0 ? IO.AO[$"MF.AO_ShuttleDCMotor1TargetStationH"].Value : IO.AI[$"MF.AI_ShuttleDCMotor1TargetStationH"].Value;            //IO.AI[$"MF.AI_ShuttleStatus"].Value = (short)((IO.DO[$"MF.DO_RobotServoOn"].Value ? 1 : 0) +            //    ((_shuttleServoStation == station ? 1 : 0) << 1) + (1 << 10));            //_shuttleServoStation = station;            //IO.DI["MF.DI_CassNestAIn"].Value = IO.AI[$"MF.AI_ShuttleDCMotor1TargetStationL"].Value == 1;            //IO.DI["MF.DI_CassNestBIn"].Value = IO.AI[$"MF.AI_ShuttleDCMotor1TargetStationL"].Value != 1;            //IO.DI["MF.DI_ShuttleUp"].Value = IO.AO[$"MF.AO_ShuttleServoTargetStationL"].Value == 2;//opposite            //IO.DI["MF.DI_ShuttleDown"].Value = IO.AO[$"MF.AO_ShuttleServoTargetStationL"].Value == 1;//opposite        }        private void MonitorValve()        {            IO.DI[$"MF.DI_ASOpenPosition"].Value = IO.DO[$"MF.DO_ASOpenPosition"].Value;            IO.DI[$"MF.DI_ASClosePosition"].Value = IO.DO[$"MF.DO_ASClosePosition"].Value;            IO.DI[$"MF.DI_ASUpPosition"].Value = IO.DO[$"MF.DO_ASUpPosition"].Value;            IO.DI[$"MF.DI_ASDownPosition"].Value = IO.DO[$"MF.DO_ASDownPosition"].Value;            if (IO.DO[$"MF.DO_BoatElevatorZAxisStop"].Value)            {                IO.DI[$"MF.DI_Zone1Sensor"].Value = false;                IO.DI[$"MF.DI_Zone2Sensor"].Value = false;                IO.DI[$"MF.DI_CapCloseSensor"].Value = false;                IO.DI[$"MF.DI_HomePosition"].Value = false;            }            if (IO.DO[$"MF.DO_MoveToP1Position"].Value)            {                IO.DI[$"MF.DI_Zone1Sensor"].Value = IO.DO[$"MF.DO_MoveToP1Position"].Value;                IO.DI[$"MF.DI_Zone2Sensor"].Value = false;                IO.DI[$"MF.DI_CapCloseSensor"].Value = false;                IO.DI[$"MF.DI_HomePosition"].Value = false;            }            if (IO.DO[$"MF.DO_MoveToP2Position"].Value)            {                IO.DI[$"MF.DI_Zone2Sensor"].Value = IO.DO[$"MF.DO_MoveToP2Position"].Value;                IO.DI[$"MF.DI_Zone1Sensor"].Value = false;                IO.DI[$"MF.DI_CapCloseSensor"].Value = false;                IO.DI[$"MF.DI_HomePosition"].Value = false;            }            if (IO.DO[$"MF.DO_MoveToPPPosition"].Value)            {                IO.DI[$"MF.DI_CapCloseSensor"].Value = IO.DO[$"MF.DO_MoveToPPPosition"].Value;                IO.DI[$"MF.DI_Zone1Sensor"].Value = false;                IO.DI[$"MF.DI_Zone2Sensor"].Value = false;                IO.DI[$"MF.DI_HomePosition"].Value = false;            }            if (IO.DO[$"MF.DO_HomePosition"].Value)            {                IO.DI[$"MF.DI_HomePosition"].Value = IO.DO[$"MF.DO_HomePosition"].Value;                IO.DI[$"MF.DI_Zone1Sensor"].Value = false;                IO.DI[$"MF.DI_Zone2Sensor"].Value = false;                IO.DI[$"MF.DI_CapCloseSensor"].Value = false;            }            IO.DI[$"MF.DI_ZAxisMoving"].Value = IO.DO[$"MF.DO_HomePosition"].Value || IO.DO[$"MF.DO_MoveToPPPosition"].Value ||                IO.DO[$"MF.DO_MoveToP2Position"].Value || IO.DO[$"MF.DO_MoveToP1Position"].Value;            if (IO.DO[$"MF.DO_BoatElevatorRotateStop"].Value)            {                IO.DI[$"MF.DI_RotationAxisHomed"].Value = false;            }            if (IO.DO[$"MF.DO_BoatElevatorRotateHome"].Value)            {                IO.DI[$"MF.DI_RotationAxisHomed"].Value = IO.DO[$"MF.DO_BoatElevatorRotateHome"].Value;            }            if (IO.DO[$"MF.DO_BoatElevatorRotateContinuous"].Value || IO.DO[$"MF.DO_BoatElevatorRotateInterval"].Value)            {                IO.DI[$"MF.DI_RotationAxisHomed"].Value = false;            }            IO.DI[$"MF.DI_RotationAxisMoving"].Value = IO.DO[$"MF.DO_BoatElevatorRotateHome"].Value ||                IO.DO[$"MF.DO_BoatElevatorRotateContinuous"].Value || IO.DO[$"MF.DO_BoatElevatorRotateInterval"].Value;            IO.DI[$"EFEM.DI_Valve1EX"].Value = IO.DO[$"EFEM.DO_Valve1EX"].Value;            IO.DI[$"EFEM.DI_Valve1RE"].Value = IO.DO[$"EFEM.DO_Valve1RE"].Value;            IO.DI[$"EFEM.DI_Valve2EX"].Value = IO.DO[$"EFEM.DO_Valve2EX"].Value;            IO.DI[$"EFEM.DI_Valve2RE"].Value = IO.DO[$"EFEM.DO_Valve2RE"].Value;            //IO.DI[$"PM1.DI_M21REALOUT"].Value = IO.DO[$"PM1.DO_M21ValveOpen"].Value;            //IO.DI[$"PM1.DI_D11REALOUT"].Value = IO.DO[$"PM1.DO_D11ValveOpen"].Value;            //IO.DI[$"PM1.DI_M11REALOUT"].Value = IO.DO[$"PM1.DO_M11ValveOpen"].Value;            //IO.DI[$"PM1.DI_J11REALOUT"].Value = IO.DO[$"PM1.DO_J11ValveOpen"].Value;            //IO.DI[$"PM1.DI_VV2REALOUT"].Value = IO.DO[$"PM1.DO_VV2ValveOpen"].Value;            //IO.DI[$"PM1.DI_IV2REALOUT"].Value = IO.DO[$"PM1.DO_IV2ValveOpen"].Value;        }        private void MonitorMFC()        {            for (int i = 1; i < 52; i++)            {                if (IO.AO[$"PM1.AO_MFC{i}AirFlowSV"] != null)                {                    IO.AI[$"PM1.AI_MFC{i}AirFlowPV"].FloatValue = IO.AO[$"PM1.AO_MFC{i}AirFlowSV"].FloatValue;                }            }            if(IO.AO[$"PM1.AO_MFM57AirFlowSV"] != null && IO.AI[$"PM1.AI_MFM57AirFlowPV"] != null)                IO.AI[$"PM1.AI_MFM57AirFlowPV"].FloatValue = IO.AO[$"PM1.AO_MFM57AirFlowSV"].FloatValue;            //IO.AI[$"PM1.AI_APCFeedback"].Value = IO.AO[$"PM1.AO_APCSetpoint"].Value;        }        private void MonitorModule(string module, string submodule)        {            //string uniqueModule = module + submodule;            //string AO_MotionServoStop = $"Motion.AO_{uniqueModule}MotionServoStop";            //string AO_MotionJogN = $"Motion.AO_{uniqueModule}MotionJogN";            //string AO_MotionJogP = $"Motion.AO_{uniqueModule}MotionJogP";            //string AO_MotionJogSpeedL = $"Motion.AO_{uniqueModule}MotionJogSpeedL";            //string AO_MotionJogSpeedH = $"Motion.AO_{uniqueModule}MotionJogSpeedH";            //string AO_MotionPositionSet = $"Motion.AO_{uniqueModule}MotionPositionSet";            //string AO_MotionAutoSpeedL = $"Motion.AO_{uniqueModule}MotionAutoSpeedL";            //string AO_MotionAutoSpeedH = $"Motion.AO_{uniqueModule}MotionAutoSpeedH";            //string AO_MotionServoOn = $"Motion.AO_{module}MotionServoOn";            //string AO_MotionAutoMove = $"Motion.AO_{module}MotionAutoMove";            //string AO_MotionAbort = $"Motion.AO_{module}MotionAbort";            //string AI_MotionSystemStatus = $"Motion.AI_{uniqueModule}MotionSystemStatus";            //string AI_MotionServoStatus = $"Motion.AI_{uniqueModule}MotionServoStatus";            //string AI_MotionPositionL = $"Motion.AI_{uniqueModule}MotionPositionL";            //string AI_MotionPositionH = $"Motion.AI_{uniqueModule}MotionPositionH";            //string AI_MotionTargetPositionL = $"Motion.AI_{uniqueModule}MotionTargetPositionL";            //string AI_MotionTargetPositionH = $"Motion.AI_{uniqueModule}MotionTargetPositionH";            //string AI_MotionSpeedL = $"Motion.AI_{uniqueModule}MotionSpeedL";            //string AI_MotionSpeedH = $"Motion.AI_{uniqueModule}MotionSpeedH";            //string AI_MotionPositionSet = $"Motion.AI_{uniqueModule}MotionPositionSet";            //if (!currentStationDic.ContainsKey(uniqueModule))            //{            //    currentStationDic.Add(uniqueModule, 0);            //}            //if (!currentPosDic.ContainsKey(uniqueModule))            //{            //    currentPosDic.Add(uniqueModule, 0);            //}            //if (!targetStationPosDic.ContainsKey(uniqueModule))            //{            //    targetStationPosDic.Add(uniqueModule, 0);            //}            //if (!isAutoMoveDic.ContainsKey(module))            //{            //    isAutoMoveDic.Add(module, false);            //}            //if (!logDic.ContainsKey(uniqueModule))            //{            //    logDic.Add(uniqueModule, false);            //}            //if (!timerDic.ContainsKey(uniqueModule))            //{            //    timerDic.Add(uniqueModule, new DeviceTimer());            //}            //if (IO.AO[AO_MotionJogN].Value > 1 || IO.AO[AO_MotionJogP].Value > 1)            //{            //    short valueL = (short)IO.AO[AO_MotionJogSpeedL].Value;            //    short valueH = (short)IO.AO[AO_MotionJogSpeedH].Value;            //    valueH = valueH > Int16.MaxValue ? (short)((~valueH + 1) * -1) : (short)valueH;            //    int jogSpeed = valueL + ((valueH + 1) << 16);            //    currentPosDic[uniqueModule] = IO.AO[AO_MotionJogN].Value > 1 ? motionStationList[currentStationDic[uniqueModule]] - jogSpeed : motionStationList[currentStationDic[uniqueModule]] + jogSpeed;            //    IO.AI[AI_MotionPositionL].Value = (short)(currentPosDic[uniqueModule] & 0xFFFF);            //    IO.AI[AI_MotionPositionH].Value = (short)((currentPosDic[uniqueModule] >> 16) & 0xFFFF);            //}            ////station            //targetStationPosDic[uniqueModule] = IO.AO[AO_MotionPositionSet].Value;            //var targetPos = motionStationList[targetStationPosDic[uniqueModule]];            //IO.AI[AI_MotionTargetPositionL].Value = (short)(targetPos & 0xFFFF);            //IO.AI[AI_MotionTargetPositionH].Value = (short)((targetPos >> 16) & 0xFFFF);            //if (!isAutoMoveDic[module] && IO.AO[AO_MotionAutoMove].Value == 1)            //{            //    currentPosDic[uniqueModule] = motionStationList[currentStationDic[uniqueModule]];            //}            //int MotionServoStatusValue = 0;            //if (isAutoMoveDic[module])            //{            //    IO.AI[AI_MotionTargetPositionL].Value = (short)(targetPos & 0xFFFF);            //    IO.AI[AI_MotionTargetPositionH].Value = (short)((targetPos >> 16) & 0xFFFF);            //    IO.AI[AI_MotionSpeedL].Value = IO.AO[AO_MotionAutoSpeedL].Value;            //    IO.AI[AI_MotionSpeedH].Value = IO.AO[AO_MotionAutoSpeedH].Value;            //    short valueLow = (short)IO.AO[AO_MotionAutoSpeedL].Value;            //    short valueHigh = (short)IO.AO[AO_MotionAutoSpeedH].Value;            //    valueHigh = valueHigh > Int16.MaxValue ? (short)((~valueHigh + 1) * -1) : (short)valueHigh;            //    int moveSpeed = valueLow + ((valueHigh + 1) << 16);            //    int status = (IO.AI[AI_MotionServoStatus].Value & 0xBF);            //    if (targetPos == currentPosDic[uniqueModule])            //    {            //        if (logDic[uniqueModule])            //        {            //            LOG.Write(String.Format("Scheduler axis move stop uniqueModule={0} target={1},time span {2}", uniqueModule, targetStationPosDic[uniqueModule], timerDic[uniqueModule].GetElapseTime()));            //            logDic[uniqueModule] = false;            //            timerDic[uniqueModule].Stop();            //        }            //        status += 0x40;            //    }            //    else            //    {            //        if (timerDic[uniqueModule].IsIdle())            //        {            //            LOG.Write(String.Format("Scheduler axis move start uniqueModule={0} target={1}", uniqueModule, targetStationPosDic[uniqueModule]));            //            timerDic[uniqueModule].Start(500000);            //            logDic[uniqueModule] = true;            //        }            //    }            //    if (targetPos > currentPosDic[uniqueModule])            //    {            //        currentPosDic[uniqueModule] += 5000;            //        if (currentPosDic[uniqueModule] >= targetPos)            //        {            //            currentStationDic[uniqueModule] = targetStationPosDic[uniqueModule];            //            targetPos = currentPosDic[uniqueModule];            //            status += 0x40;            //        }            //    }            //    if (targetPos < currentPosDic[uniqueModule])            //    {            //        currentPosDic[uniqueModule] -= 5000;            //        if (currentPosDic[uniqueModule] <= targetPos)            //        {            //            currentStationDic[uniqueModule] = targetStationPosDic[uniqueModule];            //            targetPos = currentPosDic[uniqueModule];            //            status += 0x40;            //        }            //    }            //    //position done. bit 6            //    MotionServoStatusValue = status | MotionServoStatusValue;            //    IO.AI[AI_MotionPositionL].Value = (short)(currentPosDic[uniqueModule] & 0xFFFF);            //    IO.AI[AI_MotionPositionH].Value = (short)((currentPosDic[uniqueModule] >> 16) & 0xFFFF);            //}            //int systemStatus = 0;            //if (IO.AO[AO_MotionServoOn].Value == 1)            //    systemStatus = 2 + (isAutoMoveDic[module] ? 16 : 32) + (IO.AO[AO_MotionAbort].Value == 1 ? 4 : 0); ;            //IO.AI[AI_MotionSystemStatus].Value = (short)systemStatus;            //isAutoMoveDic[module] = IO.AO[AO_MotionAutoMove].Value == 1;            ////servo on. bit 5            //MotionServoStatusValue = MotionServoStatusValue | (IO.AO[AO_MotionServoOn].Value == 1 ? 0x20 : 0);            ////ready. Servo stop. bit 6            //MotionServoStatusValue = MotionServoStatusValue | (IO.AO[AO_MotionServoStop].Value == 0 ? 0x40 : 0);            ////servo normal. bit 1            //MotionServoStatusValue = MotionServoStatusValue | 2;            //IO.AI[AI_MotionServoStatus].Value = (short)MotionServoStatusValue;            //IO.AI[AI_MotionPositionSet].Value = IO.AO[AO_MotionPositionSet].Value;        }        private void MonitorRAxis(string module)        {            if (IO.DI[$"{module}.DI_BoatRAxisHomeBusy"].Value != IO.DO[$"{module}.DO_BoatRAxisHomeCmd"].Value &&                IO.DO[$"{module}.DO_BoatRAxisHomeCmd"].Value)            {                IO.DI[$"{module}.DI_BoatRAxisHomeDone"].Value = false;                if (!_rAxisHomeTimer.IsRunning)                    _rAxisHomeTimer.Restart();            }            if (_rAxisHomeTimer.IsRunning && _rAxisHomeTimer.ElapsedMilliseconds > 3000)            {                IO.DI[$"{module}.DI_BoatRAxisHomeDone"].Value = true;                _rAxisHomeTimer.Stop();            }            IO.DI[$"{module}.DI_BoatRAxisHomeBusy"].Value = IO.DO[$"{module}.DO_BoatRAxisHomeCmd"].Value;            IO.DI[$"{module}.DI_BoatRAxisRotationBusy"].Value = IO.DO[$"{module}.DO_BoatRAxisRotationForward"].Value || IO.DO[$"{module}.DO_BoatRAxisRotationReverse"].Value;        }        private void MonitorZAxis(string module)        {            if ((int)(IO.AO[$"{module}.AO_BoatPosition"].FloatValue + 0.00001) == 1)            {                IO.DI[$"{module}.DI_HmPosBoatZAxis"].Value = true;                IO.DI[$"{module}.DI_MiddlePos3BoatZAxis"].Value = true;                IO.DI[$"{module}.DI_MiddlePos1BoatZAxis"].Value = false;                IO.DI[$"{module}.DI_MiddlePos2BoatZAxis"].Value = false;            }            if ((int)(IO.AO[$"{module}.AO_BoatPosition"].FloatValue + 0.00001) == 2)            {                IO.DI[$"{module}.DI_HmPosBoatZAxis"].Value = false;                IO.DI[$"{module}.DI_MiddlePos3BoatZAxis"].Value = false;                IO.DI[$"{module}.DI_MiddlePos1BoatZAxis"].Value = true;                IO.DI[$"{module}.DI_MiddlePos2BoatZAxis"].Value = false;            }            if ((int)(IO.AO[$"{module}.AO_BoatPosition"].FloatValue + 0.00001) == 3)            {                IO.DI[$"{module}.DI_HmPosBoatZAxis"].Value = false;                IO.DI[$"{module}.DI_MiddlePos3BoatZAxis"].Value = false;                IO.DI[$"{module}.DI_MiddlePos1BoatZAxis"].Value = false;                IO.DI[$"{module}.DI_MiddlePos2BoatZAxis"].Value = true;            }            IO.AI[$"{module}.AI_BoatTargetPosFb"].FloatValue = IO.AO[$"{module}.AO_BoatPosition"].FloatValue;        }        private void MonitorLP(string module, string lp)        {            if (IO.DO[$"{module}.DO_{lp}FOUPClamp"].Value)            {                IO.DI[$"{module}.DI_{lp}FOUPLeftClamp"].Value = true;                IO.DI[$"{module}.DI_{lp}FOUPRightClamp"].Value = true;                IO.DI[$"{module}.DI_{lp}FOUPLeftRelease"].Value = false;                IO.DI[$"{module}.DI_{lp}FOUPRightRelease"].Value = false;            }            if (IO.DO[$"{module}.DO_{lp}FOUPRelease"].Value)            {                IO.DI[$"{module}.DI_{lp}FOUPLeftClamp"].Value = false;                IO.DI[$"{module}.DI_{lp}FOUPRightClamp"].Value = false;                IO.DI[$"{module}.DI_{lp}FOUPLeftRelease"].Value = true;                IO.DI[$"{module}.DI_{lp}FOUPRightRelease"].Value = true;            }        }        private void MonitorFIMS(string module, string fims)        {            IO.DI[$"{module}.DI_{fims}LoadComplete"].Value = IO.DO[$"{module}.DO_{fims}LoadCommand"].Value;            IO.DI[$"{module}.DI_{fims}UnloadComplete"].Value = IO.DO[$"{module}.DO_{fims}UnloadCommand"].Value;            IO.DI[$"{module}.DI_{fims}HomeComplete"].Value = IO.DO[$"{module}.DO_{fims}HomeCommand"].Value;            if (IO.DI[$"{module}.DI_{fims}FOUPDock"] != null && IO.DO[$"{module}.DO_{fims}Dock"] != null) IO.DI[$"{module}.DI_{fims}FOUPDock"].Value = IO.DO[$"{module}.DO_{fims}Dock"].Value;            if (IO.DI[$"{module}.DI_{fims}FOUPUndock"] != null && IO.DO[$"{module}.DO_{fims}Undock"] != null) IO.DI[$"{module}.DI_{fims}FOUPUndock"].Value = IO.DO[$"{module}.DO_{fims}Undock"].Value;            if (IO.DI[$"{module}.DI_{fims}Seal"] != null && IO.DO[$"{module}.DO_{fims}Seal"] != null) IO.DI[$"{module}.DI_{fims}Seal"].Value = IO.DO[$"{module}.DO_{fims}Seal"].Value;            if (IO.DI[$"{module}.DI_{fims}Release"] != null && IO.DO[$"{module}.DO_{fims}Release"] != null) IO.DI[$"{module}.DI_{fims}Release"].Value = IO.DO[$"{module}.DO_{fims}Release"].Value;            if (IO.DI[$"{module}.DI_{fims}DoorClosed"] != null && IO.DO[$"{module}.DO_{fims}DoorClose"] != null) IO.DI[$"{module}.DI_{fims}DoorClosed"].Value = IO.DO[$"{module}.DO_{fims}DoorClose"].Value;            if (IO.DI[$"{module}.DI_{fims}DoorOpened"] != null && IO.DO[$"{module}.DO_{fims}DoorOpen"] != null) IO.DI[$"{module}.DI_{fims}DoorOpened"].Value = IO.DO[$"{module}.DO_{fims}DoorOpen"].Value;            if (IO.DI[$"{module}.DI_{fims}LatchOn"] != null && IO.DO[$"{module}.DO_{fims}Latch1On"] != null) IO.DI[$"{module}.DI_{fims}LatchOn"].Value = IO.DO[$"{module}.DO_{fims}Latch1On"].Value || IO.DO[$"{module}.DO_{fims}Latch2On"].Value;            if (IO.DI[$"{module}.DI_{fims}LatchOff"] != null && IO.DO[$"{module}.DO_{fims}Latch1Off"] != null) IO.DI[$"{module}.DI_{fims}LatchOff"].Value = IO.DO[$"{module}.DO_{fims}Latch1Off"].Value || IO.DO[$"{module}.DO_{fims}Latch2Off"].Value;            if (IO.DI[$"{module}.DI_{fims}CollisionAvoidanceUp"] != null && IO.DO[$"{module}.DO_{fims}CollisionAvoidanceUp"] != null) IO.DI[$"{module}.DI_{fims}CollisionAvoidanceUp"].Value = IO.DO[$"{module}.DO_{fims}CollisionAvoidanceUp"].Value;            if (IO.DI[$"{module}.DI_{fims}CollisionAvoidanceDown"] != null && IO.DO[$"{module}.DO_{fims}CollisionAvoidanceDown"] != null) IO.DI[$"{module}.DI_{fims}CollisionAvoidanceDown"].Value = IO.DO[$"{module}.DO_{fims}CollisionAvoidanceDown"].Value;            if (IO.DI[$"{module}.DI_{fims}N2PurgeValveOpened"] != null && IO.DO[$"{module}.DO_{fims}N2PurgeValveOpen"] != null) IO.DI[$"{module}.DI_{fims}N2PurgeValveOpened"].Value = IO.DO[$"{module}.DO_{fims}N2PurgeValveOpen"].Value;            if (IO.DI[$"{module}.DI_{fims}N2PurgeValveClosed"] != null && IO.DO[$"{module}.DO_{fims}N2PurgeValveClose"] != null) IO.DI[$"{module}.DI_{fims}N2PurgeValveClosed"].Value = IO.DO[$"{module}.DO_{fims}N2PurgeValveClose"].Value;        }        private void MonitorBuffer()        {            switch (IO.AO[$"PM1.AO_TargetPositionBufferAxis"].FloatValue)            {                case 1:                case 9:                    IO.DI[$"PM1.DI_L1Position"].Value = true;                    break;                case 2:                case 10:                    IO.DI[$"PM1.DI_L2Position"].Value = true;                    break;                case 3:                case 11:                    IO.DI[$"PM1.DI_L3Position"].Value = true;                    break;                case 4:                case 12:                    IO.DI[$"PM1.DI_L4Position"].Value = true;                    break;                case 5:                case 13:                    IO.DI[$"PM1.DI_H1Position"].Value = true;                    break;                case 6:                case 14:                    IO.DI[$"PM1.DI_H2Position"].Value = true;                    break;                case 7:                case 15:                    IO.DI[$"PM1.DI_H3Position"].Value = true;                    break;                case 8:                case 16:                    IO.DI[$"PM1.DI_H4Position"].Value = true;                    break;            }            IO.AI[$"PM1.AI_BufferTargetPosFb"].FloatValue = IO.AO[$"PM1.AO_TargetPositionBufferAxis"].FloatValue;        }        private void MonitorDoor()        {            if (IO.DI[$"PM1.DI_AGVDoorOpened"] != null && IO.DO[$"PM1.DO_AGVDoorSwitchOpen"] != null) IO.DI[$"PM1.DI_AGVDoorOpened"].Value = IO.DO[$"PM1.DO_AGVDoorSwitchOpen"].Value;            if (IO.DI[$"PM1.DI_AGVDoorClosed"] != null && IO.DO[$"PM1.DO_AGVDoorSwitchClose"] != null) IO.DI[$"PM1.DI_AGVDoorClosed"].Value = IO.DO[$"PM1.DO_AGVDoorSwitchClose"].Value;        }    }}
 |