| 12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667 | 
							- <?xml version="1.0" encoding="utf-8"?>
 
- <Aitex>
 
- 	<TableParameterFormat ChamberType="LeakCheckCondition" Version="1.0"  TableNumber="3">
 
- 		<!--###########################################-->
 
- 		<Catalog DisplayName="ParameterInfo">
 
- 			<Group DisplayName="Parameter Information">
 
- 				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="TableNo" InputType="ReadOnly" />
 
- 				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
 
- 			</Group>
 
- 		</Catalog>
 
- 		<!--###########################################-->
 
- 		<Catalog DisplayName="Table">
 
- 			<Group DisplayName="Leak Check" ControlName="LeakCheck">
 
- 				<Step ModuleName="" DeviceType="" DefaultValue="1:VG13" DisplayName="Press Sensor" ControlName="PressSensor" InputType="TextInput"  Description=""/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="PH = HIGH LIMIT" DefaultValue="0" ControlName="PHHighLimit" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="PL = LOW LIMIT" DefaultValue="0" ControlName="PLLowLimit" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="BPLIMIT = BASE PRESSURE LIMIT" DefaultValue="0" ControlName="BPLimit" InputType="DoubleInput" InputMode=""  Min="-10" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DefaultValue="00:00.0" DisplayName="Delay Time" ControlName="DelayTime" InputType="TextInput" />
 
- 				<Step ModuleName="" DeviceType="" DefaultValue="00:00.0" DisplayName="Check Time" ControlName="CheckTime" InputType="TextInput" />
 
- 				<Step ModuleName="" DeviceType="" DisplayName="Leak Limit" DefaultValue="0" ControlName="LeakLimit" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="Retry Limit" DefaultValue="0" ControlName="RetryLimit" InputType="NumInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DefaultValue="Monitor" DisplayName="PH BP" ControlName="PHBP" InputType="TextInput" />
 
- 				<Step ModuleName="" DeviceType="" DefaultValue="Monitor" DisplayName="PL BP" ControlName="PLBP" InputType="TextInput" />
 
- 				<Step ModuleName="" DeviceType="" DefaultValue="Monitor" DisplayName="BP BPLimit" ControlName="BPBPLimit" InputType="TextInput" />
 
- 				<Step ModuleName="" DeviceType="" DefaultValue="Monitor" DisplayName="Error Command" ControlName="ErrorCommand" InputType="TextInput" />
 
- 				<Step ModuleName="" DeviceType="" DefaultValue="Monitor" DisplayName="Retry Over Command" ControlName="RetryOverCommand" InputType="TextInput" />
 
- 			</Group>
 
- 		</Catalog>
 
- 	</TableParameterFormat>
 
- 	<TableParameterSchema>
 
- 		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
 
- 			<xs:simpleType name="booleanType">
 
- 				<xs:restriction base="xs:string">
 
- 					<xs:enumeration value="0" />
 
- 					<xs:enumeration value="1" />
 
- 					<xs:enumeration value="False" />
 
- 					<xs:enumeration value="True" />
 
- 					<xs:enumeration value="false" />
 
- 					<xs:enumeration value="true" />
 
- 				</xs:restriction>
 
- 			</xs:simpleType>
 
- 			<xs:element name="TableParameterData">
 
- 				<xs:complexType>
 
- 					<xs:sequence>
 
- 						<xs:element maxOccurs="unbounded" name="Step">
 
- 							<xs:complexType>
 
- 								<xs:attribute name="TableNo" type="xs:string" use="required" />
 
- 								<xs:attribute name="Name" type="xs:string" use="required" />
 
- 								<xs:attribute name="Type" type="xs:string" use="required" />
 
- 								<xs:attribute name="UseTemp" type="xs:decimal" use="required" />
 
- 							</xs:complexType>
 
- 						</xs:element>
 
- 					</xs:sequence>
 
- 					<xs:attribute name="ParameterChamberType" type="xs:string" fixed="Parameter" use="required" />
 
- 					<xs:attribute name="ParameterType" type="xs:string" use="required" />
 
- 					<xs:attribute name="ParameterVersion" type="xs:string" fixed="1.0" use="required" />
 
- 					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
 
- 					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
 
- 					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
 
- 					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
 
- 					<xs:attribute name="Description" type="xs:string" use="required" />
 
- 				</xs:complexType>
 
- 			</xs:element>
 
- 		</xs:schema>
 
- 	</TableParameterSchema>
 
- </Aitex>
 
 
  |