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							- <?xml version="1.0" encoding="utf-8"?>
 
- <Aitex>
 
- 	<TableParameterFormat ChamberType="TempPID" Version="1.0"  TableNumber="10">
 
-   
 
-     <!--###########################################-->
 
-     <Catalog DisplayName="ParameterInfo">
 
-       <Group DisplayName="Parameter Information">
 
-         <Step ModuleName="" DeviceType="" DisplayName="No." ControlName="TableNo" InputType="ReadOnly" />
 
-         <Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
 
-         <Step ModuleName="" DeviceType="" DisplayName="Use Temp" ControlName="UseTemp" InputType="NumInput" InputMode="" Min="0" Max="700"  />
 
-       </Group>
 
-     </Catalog>
 
-     <!--###########################################-->
 
-     <Catalog DisplayName="Table">
 
-       <Group DisplayName="HT.U" ControlName="HTU">
 
-         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	 <Group DisplayName="HTCU" ControlName="HTCU">
 
-         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	 <Group DisplayName="HT.C" ControlName="HTC">
 
-         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	 <Group DisplayName="HTCL" ControlName="HTCL">
 
-          <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	<Group DisplayName="HT.L" ControlName="HTL">
 
-          <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	<Group DisplayName="PR.U" ControlName="PRU">
 
-          <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	<Group DisplayName="PRCU" ControlName="PRCU">
 
-          <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	<Group DisplayName="PR.C" ControlName="PRC">
 
-          <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	<Group DisplayName="PRCL" ControlName="PRCL">
 
-          <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
- 	<Group DisplayName="PR.L" ControlName="PRL">
 
-          <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-         <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
-       </Group>
 
-     </Catalog>
 
-   </TableParameterFormat>
 
- 	<TableParameterSchema>
 
-     <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
 
-       <xs:simpleType name="booleanType">
 
-         <xs:restriction base="xs:string">
 
-           <xs:enumeration value="0" />
 
-           <xs:enumeration value="1" />
 
-           <xs:enumeration value="False" />
 
-           <xs:enumeration value="True" />
 
-           <xs:enumeration value="false" />
 
-           <xs:enumeration value="true" />
 
-         </xs:restriction>
 
-       </xs:simpleType>
 
-       <xs:element name="TableParameterData">
 
-         <xs:complexType>
 
-           <xs:sequence>
 
-             <xs:element maxOccurs="unbounded" name="Step">
 
-               <xs:complexType>
 
-                 <xs:attribute name="TableNo" type="xs:string" use="required" />
 
-                 <xs:attribute name="Name" type="xs:string" use="required" />
 
-                 <xs:attribute name="Type" type="xs:string" use="required" />
 
-                 <xs:attribute name="UseTemp" type="xs:decimal" use="required" />
 
-               </xs:complexType>
 
-             </xs:element>
 
-           </xs:sequence>
 
-           <xs:attribute name="ParameterChamberType" type="xs:string" fixed="Parameter" use="required" />
 
-           <xs:attribute name="ParameterType" type="xs:string" use="required" />
 
-           <xs:attribute name="ParameterVersion" type="xs:string" fixed="1.0" use="required" />
 
-           <xs:attribute name="CreatedBy" type="xs:string" use="required" />
 
-           <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
 
-           <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
 
-           <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
 
-           <xs:attribute name="Description" type="xs:string" use="required" />
 
-         </xs:complexType>
 
-       </xs:element>
 
-     </xs:schema>
 
-   </TableParameterSchema>
 
- </Aitex>
 
 
  |