| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569 | 
							- using Aitex.Core.Common.DeviceData;
 
- using Aitex.Core.RT.DataCenter;
 
- using Aitex.Core.RT.Device;
 
- using Aitex.Core.RT.Device.Unit;
 
- using Aitex.Core.RT.Event;
 
- using Aitex.Core.RT.Fsm;
 
- using Aitex.Core.RT.Log;
 
- using Aitex.Core.RT.OperationCenter;
 
- using Aitex.Core.RT.Routine;
 
- using Aitex.Core.RT.SCCore;
 
- using Aitex.Core.Util;
 
- using Aitex.Core.Utilities;
 
- using Aitex.Sorter.Common;
 
- using MECF.Framework.Common.Alarms;
 
- using MECF.Framework.Common.Device.Bases;
 
- using MECF.Framework.Common.Equipment;
 
- using MECF.Framework.Common.Schedulers;
 
- using MECF.Framework.Common.SubstrateTrackings;
 
- using System;
 
- using System.Collections.Generic;
 
- using System.Linq;
 
- using System.Text;
 
- using System.Threading.Tasks;
 
- namespace FurnaceRT.Equipments.FIMSs
 
- {
 
-     public partial class FIMSModule : FIMSModuleBase
 
-     {
 
-         public enum STATE
 
-         {
 
-             NotInstall,
 
-             NotConnected,
 
-             Idle,
 
-             Error,
 
-             Init,
 
-             Homing,
 
-             Unloading,
 
-             Loading,
 
-             Cycle,
 
-             InTransfer,
 
-         }
 
-         public enum MSG
 
-         {
 
-             Home,
 
-             Disconnected,
 
-             Connected,
 
-             Reset,
 
-             Abort,
 
-             Error,
 
-             InTransfer,
 
-             Cycle,
 
-             TransferComplete,
 
-             Load,
 
-             Unload,
 
-             LoadRetry,
 
-             UnloadRetry,
 
-         }
 
-         public override bool IsReady
 
-         {
 
-             get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
 
-         }
 
-         public override bool IsError
 
-         {
 
-             get
 
-             {
 
-                 return FsmState == (int)STATE.Error;
 
-             }
 
-         }
 
-         public override bool IsInit
 
-         {
 
-             get { return false; }
 
-         }
 
-         public bool IsFoupExist => FIMSDevice != null ? FIMSDevice.IsFoupExist : false;
 
-         public bool IsLoading
 
-         {
 
-             get
 
-             {
 
-                 return FsmState == (int)STATE.Loading;
 
-             }
 
-         }
 
-         private bool _isOnline;
 
-         public override bool IsOnline
 
-         {
 
-             get
 
-             {
 
-                 return _isOnline;
 
-             }
 
-             set
 
-             {
 
-                 _isOnline = value;
 
-                 SC.SetItemValue($"FIMS.{Name}.IsOnline", value);
 
-             }
 
-         }
 
-         #region fields
 
-         private FIMSHomeRoutine _homeRoutine;
 
-         private FIMSLoadRoutine _loadRoutine;
 
-         private FIMSUnloadRoutine _unloadRoutine;
 
-         private FIMSCycleTest _moveCycleTest;
 
-         private List<AITWaterMappingData> _mappingData;
 
-         #endregion
 
-         public FIMSModule(ModuleName module) : base(SC.GetValue<int>("System.CassetteSlotCount"))
 
-         {
 
-             Name = module.ToString();
 
-             Module = module.ToString();
 
-             IsOnline = SC.GetValue<bool>($"FIMS.{Name}.IsOnline");
 
-         }
 
-         public override bool Initialize()
 
-         {
 
-             InitRoutine();
 
-             InitDevice();
 
-             InitFsm();
 
-             InitOp();
 
-             InitData();
 
-             InitAlarmEvent();
 
-             Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
 
-             return base.Initialize();
 
-         }
 
-         private void Instance_OnAlarmEvent(EventItem item)
 
-         {
 
-             if (item != null && item.Level == EventLevel.Alarm && (item.Source == Name || item.Source == Module))
 
-             {
 
-                 DEVICE.GetDevice<SignalTowerBase>("System.SignalTower")?.Reset();
 
-                 LOG.Write($"{item.Source} {item.EventEnum} {item.Description}\n");
 
-                 PostMsg(MSG.Error);
 
-             }
 
-         }
 
-         private void InitRoutine()
 
-         {
 
-             _homeRoutine = new FIMSHomeRoutine(this);
 
-             _loadRoutine = new FIMSLoadRoutine(this);
 
-             _unloadRoutine = new FIMSUnloadRoutine(this);
 
-             _moveCycleTest = new FIMSCycleTest(this);
 
-         }
 
-         private void InitData()
 
-         {
 
-             
 
-             DATA.Subscribe($"{Module}.MappingData", () => new List<AITWaterMappingData>()
 
-             {
 
-                 new AITWaterMappingData(){Slot = 1,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 2,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 3,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 4,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 5,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 6,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 7,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 8,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 9,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 10,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 11,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 12,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 13,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 14,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 15,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 16,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 17,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 18,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 19,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 20,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 21,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 22,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 23,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 24,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-                 new AITWaterMappingData(){Slot = 25,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
 
-             });
 
-             DATA.Subscribe($"{Module}.SlotNo1Distance", () => 100.0f);
 
-             DATA.Subscribe($"{Module}.SlotPitchDistance", () => 100f);
 
-             DATA.Subscribe($"{Module}.ThicknessReferenceValue", () => 5f);
 
-             DATA.Subscribe($"{Module}.ThicknessPermissions", () => 8f);
 
-             DATA.Subscribe($"{Module}.MappingResult", () => "Normal Complete");
 
-             DATA.Subscribe($"{Module}.Status", () => StringFsmStatus);
 
-             DATA.Subscribe($"{Module}.IsOnline", () => IsOnline);
 
-             DATA.Subscribe($"{Module}.IsError", () => IsError);
 
-             DATA.Subscribe($"{Module}.FIMSCycledCount", () => _moveCycleTest.LoopCounter);
 
-             //DATA.Subscribe(Module, "CassettePresent", () => _diStationCassettePresent.Value);
 
-             //DATA.Subscribe($"{Module}.StageValveState", () => StageValveState.ToString());
 
-         }
 
-         private void InitOp()
 
-         {
 
-             OP.Subscribe($"{Module}.Abort", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Abort));
 
-             OP.Subscribe($"{Module}.Home", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Home));
 
-             OP.Subscribe($"{Module}.Load", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Load));
 
-             OP.Subscribe($"{Module}.Unload", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Unload));
 
-             OP.Subscribe($"{Module}.Reset", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Reset));
 
-             OP.Subscribe($"{Module}.Cycle", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Cycle));
 
-             OP.Subscribe($"{Module}.SetOnline", (string cmd, object[] args) =>
 
-             {
 
-                 IsOnline = true;
 
-                 return true;
 
-             });
 
-             OP.Subscribe($"{Module}.SetOffline", (string cmd, object[] args) =>
 
-             {
 
-                 IsOnline = false;
 
-                 return true;
 
-             });
 
-             OP.Subscribe($"{Module}.AlarmAction", (string cmd, object[] args) =>
 
-             {
 
-                 Enum.TryParse(args[0].ToString(), out AlarmAction alarmAction);
 
-                 string eventName = null;
 
-                 if (args.Length > 1)
 
-                     eventName = args[1].ToString();
 
-                 if (eventName != null)
 
-                 {
 
-                     EV.ClearAlarmEvent(eventName);
 
-                     var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == eventName);
 
-                     if (item != null)
 
-                     {
 
-                         item.Reset();
 
-                         _triggeredAlarmList.Remove(item);
 
-                     }
 
-                     if (item != null)
 
-                     {
 
-                         switch (alarmAction)
 
-                         {
 
-                             case AlarmAction.Retry:
 
-                                 {
 
-                                     CheckToPostMessage((int)item.RetryMessage, item.RetryMessageParas);
 
-                                 }
 
-                                 break;
 
-                             case AlarmAction.Abort:
 
-                                 {
 
-                                     CheckToPostMessage((int)MSG.Abort);
 
-                                 }
 
-                                 break;
 
-                             case AlarmAction.Clear:
 
-                                 {
 
-                                     int alarmCount = 0;
 
-                                     var alarms = EV.GetAlarmEvent();
 
-                                     foreach (var alarm in alarms)
 
-                                     {
 
-                                         if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
 
-                                             alarmCount++;
 
-                                     }
 
-                                     if (alarmCount == 0)
 
-                                         CheckToPostMessage((int)MSG.Reset);
 
-                                 }
 
-                                 break;
 
-                             case AlarmAction.Continue:
 
-                                 {
 
-                                     int alarmCount = 0;
 
-                                     var alarms = EV.GetAlarmEvent();
 
-                                     foreach (var alarm in alarms)
 
-                                     {
 
-                                         if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
 
-                                             alarmCount++;
 
-                                     }
 
-                                     if (alarmCount == 0)
 
-                                         CheckToPostMessage((int)MSG.Reset);
 
-                                 }
 
-                                 break;
 
-                         }
 
-                     }
 
-                 }
 
-                 return true;
 
-             });
 
-         }
 
-         private void InitFsm()
 
-         {
 
-             EnumLoop<STATE>.ForEach((item) =>
 
-             {
 
-                 MapState((int)item, item.ToString());
 
-             });
 
-             EnumLoop<MSG>.ForEach((item) =>
 
-             {
 
-                 MapMessage((int)item, item.ToString());
 
-             });
 
-             EnableFsm(100, STATE.Init);
 
-             Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
 
-             Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
 
-             Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
 
-             Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
 
-             Transition(STATE.Homing, MSG.Error, null, STATE.Init);
 
-             Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
 
-             Transition(STATE.Idle, MSG.Disconnected, null, STATE.NotConnected);
 
-             Transition(STATE.Idle, MSG.InTransfer, null, STATE.InTransfer);
 
-             Transition(STATE.InTransfer, MSG.TransferComplete, null, STATE.Idle);
 
-             Transition(STATE.InTransfer, MSG.Abort, null, STATE.Idle);
 
-             Transition(STATE.NotConnected, MSG.Connected, null, STATE.Idle);
 
-             //Error
 
-             AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
 
-             Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
 
-             Transition(STATE.Init, MSG.Reset, FsmReset, STATE.Init);
 
-             Transition(STATE.Idle, MSG.Reset, FsmReset, STATE.Idle);
 
-             //load
 
-             Transition(STATE.Error, MSG.LoadRetry, FsmStartLoad, STATE.Loading);
 
-             Transition(STATE.Idle, MSG.Load, FsmStartLoad, STATE.Loading);
 
-             Transition(STATE.Loading, FSM_MSG.TIMER, FsmMonitorLoadTask, STATE.Idle);
 
-             Transition(STATE.Loading, MSG.Abort, FsmAbortTask, STATE.Idle);
 
-             //unload
 
-             Transition(STATE.Error, MSG.UnloadRetry, FsmStartUnload, STATE.Unloading);
 
-             Transition(STATE.Idle, MSG.Unload, FsmStartUnload, STATE.Unloading);
 
-             Transition(STATE.Unloading, FSM_MSG.TIMER, FsmMonitorUnloadTask, STATE.Idle);
 
-             Transition(STATE.Unloading, MSG.Abort, FsmAbortTask, STATE.Idle);
 
-             Transition(STATE.Idle, MSG.Cycle, FsmStartMoveTest, STATE.Cycle);
 
-             Transition(STATE.Cycle, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
 
-             Transition(STATE.Cycle, MSG.Abort, FsmAbortTask, STATE.Idle);
 
-         }
 
-         #region Service Functions
 
-         private bool FsmStartHome(object[] param)
 
-         {
 
-             Result ret = StartRoutine(_homeRoutine);
 
-             if (ret == Result.FAIL || ret == Result.DONE)
 
-                 return false;
 
-             return ret == Result.RUN;
 
-         }
 
-         private bool FsmAbortTask(object[] param)
 
-         {
 
-             return true;
 
-         }
 
-         private bool FsmMonitorHomeTask(object[] param)
 
-         {
 
-             Result ret = MonitorRoutine();
 
-             if (ret == Result.FAIL)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             if (ret == Result.DONE)
 
-             {
 
-                 return true;
 
-             }
 
-             return false;
 
-         }
 
-         private bool FsmStartMoveTest(object[] param)
 
-         {
 
-             Result ret = StartRoutine(_moveCycleTest);
 
-             if (ret == Result.FAIL || ret == Result.DONE)
 
-                 return false;
 
-             return ret == Result.RUN;
 
-         }
 
-         private bool FsmStartLoad(object[] param)
 
-         {
 
-             bool isNeedN2Purge = false;
 
-             if(param.Length > 0)
 
-             {
 
-                 bool.TryParse(param[0].ToString(), out isNeedN2Purge);
 
-             }
 
-             _loadRoutine.Init(isNeedN2Purge);
 
-             QueueRoutine.Clear();
 
-             QueueRoutine.Enqueue(_loadRoutine);
 
-             Result ret = QueueRoutine.Peek().Start();
 
-             if (ret == Result.FAIL || ret == Result.DONE)
 
-                 return false;
 
-             return ret == Result.RUN;
 
-         }
 
-         private bool FsmStartUnload(object[] param)
 
-         {
 
-             bool isNeedN2Purge = false;
 
-             if (param.Length > 0)
 
-             {
 
-                 bool.TryParse(param[0].ToString(), out isNeedN2Purge);
 
-             }
 
-             _unloadRoutine.Init(isNeedN2Purge);
 
-             QueueRoutine.Clear();
 
-             Result ret = StartRoutine(_unloadRoutine);
 
-             if (ret == Result.FAIL || ret == Result.DONE)
 
-                 return false;
 
-             return ret == Result.RUN;
 
-         }
 
-         private bool FsmMonitorLoadTask(object[] param)
 
-         {
 
-             Result ret = MonitorRoutine();
 
-             if (ret == Result.FAIL)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             if (ret == Result.DONE)
 
-                 IsOnline = true;
 
-             return ret == Result.DONE;
 
-         }
 
-         private bool FsmMonitorTask(object[] param)
 
-         {
 
-             Result ret = MonitorRoutine();
 
-             if (ret == Result.FAIL)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             return ret == Result.DONE;
 
-         }
 
-         private bool FsmMonitorUnloadTask(object[] param)
 
-         {
 
-             Result ret = MonitorRoutine();
 
-             if (ret == Result.FAIL)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             return ret == Result.DONE;
 
-         }
 
-         public override bool Home(out string reason)
 
-         {
 
-             CheckToPostMessage((int)MSG.Home);
 
-             reason = string.Empty;
 
-             return true;
 
-         }
 
-         private bool FsmOnError(object[] param)
 
-         {
 
-             if (FsmState == (int)STATE.Error)
 
-             {
 
-                 return false;
 
-             }
 
-             if (FsmState != (int)STATE.Init && FsmState != (int)STATE.Idle)
 
-                 AbortRoutine();
 
-             return true;
 
-         }
 
-         public override void Reset()
 
-         {
 
-             if (IsError)
 
-             {
 
-                 CheckToPostMessage((int)MSG.Reset);
 
-             }
 
-         }
 
-         private bool FsmReset(object[] param)
 
-         {
 
-             FIMSDevice.SetAlarmReset();
 
-             return true;
 
-         }
 
-         public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
 
-         {
 
-             reason = string.Empty;
 
-             return true;
 
-         }
 
-         public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
 
-         {
 
-             reason = string.Empty;
 
-             return true;
 
-         }
 
-         public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
 
-         {
 
-             reason = string.Empty;
 
-             return true;
 
-         }
 
-         public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
 
-             out string reason)
 
-         {
 
-             reason = string.Empty;
 
-             if (!IsReady)
 
-             {
 
-                 reason = $"{Module} status={StringFsmStatus} is busy";
 
-                 return false;
 
-             }
 
-             if (robot == ModuleName.WaferRobot)
 
-             {
 
-                 if (!FIMSDevice.IsLoadCompleted)
 
-                 {
 
-                     reason = $"{Module} is not loaded";
 
-                     return false;
 
-                 }
 
-                 if (!IsDoorOpen)
 
-                 {
 
-                     reason = $"{Module} door is not open";
 
-                 }
 
-             }
 
-             if (robot == ModuleName.CarrierRobot)
 
-             {
 
-                 if (!FIMSDevice.IsUnloadCompleted)
 
-                 {
 
-                     reason = $"{Module} is not unloaded";
 
-                     return false;
 
-                 }
 
-                 if (transferType == EnumTransferType.Pick)
 
-                 {
 
-                     if (!CarrierManager.Instance.CheckHasCarrier(Module, 0))
 
-                     {
 
-                         reason = $"{Module} carrier not present";
 
-                         return false;
 
-                     }
 
-                 }
 
-                 if (transferType == EnumTransferType.Place)
 
-                 {
 
-                     if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
 
-                     {
 
-                         reason = $"{Module} carrier present";
 
-                         return false;
 
-                     }
 
-                 }
 
-             }
 
-             return true;
 
-         }
 
-         public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
 
-         {
 
-             CheckToPostMessage(MSG.InTransfer);
 
-         }
 
-         public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
 
-         {
 
-             if (FsmState == (int)STATE.InTransfer)
 
-                 CheckToPostMessage(MSG.TransferComplete);
 
-         }
 
-         public void InvokeLoad(bool isNeedN2Purge)
 
-         {
 
-             CheckToPostMessage((int)MSG.Load, isNeedN2Purge);
 
-         }
 
-         public void InvokeUnload(bool isNeedN2Purge)
 
-         {
 
-             CheckToPostMessage((int)MSG.Unload, isNeedN2Purge);
 
-         }
 
-         #endregion
 
-     }
 
- }
 
 
  |