FIMSUnloadRoutine.cs 6.3 KB

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  1. using Aitex.Core.RT.Event;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using FurnaceRT.Equipments.PMs;
  6. using FurnaceRT.Equipments.Systems;
  7. using MECF.Framework.Common.Equipment;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. namespace FurnaceRT.Equipments.FIMSs
  11. {
  12. public class FIMSUnloadRoutine : ModuleRoutine, IRoutine
  13. {
  14. enum RoutineStep
  15. {
  16. Unload,
  17. Delay,
  18. CheckUnloadFinish,
  19. }
  20. private int _timeout;
  21. private FIMSModule _fimsModule;
  22. private PMModule _pmModule;
  23. private bool _isNeedN2Purge;
  24. public FIMSUnloadRoutine(FIMSModule fimsModule)
  25. {
  26. Module = fimsModule.Module.ToString();
  27. _fimsModule = fimsModule;
  28. Name = "Unload";
  29. _pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  30. }
  31. public Result Init(bool isNeedN2Purge)
  32. {
  33. _isNeedN2Purge = isNeedN2Purge;
  34. return Result.DONE;
  35. }
  36. public Result Start(params object[] objs)
  37. {
  38. Reset();
  39. _timeout = SC.GetValue<int>($"FIMS.{Module}.MotionTimeout");
  40. if (_fimsModule.FIMSDevice.IsUnloadCompleted)
  41. {
  42. EV.PostInfoLog(Module, $"{Module} already at unload position");
  43. _fimsModule.FIMSDevice.IsLoadCompleted = false;
  44. _fimsModule.FIMSDevice.IsUnloadCompleted = true;
  45. return Result.DONE;
  46. }
  47. if (!Singleton<EquipmentManager>.Instance.IsAutoMode && !Singleton<EquipmentManager>.Instance.IsReturnWafer)
  48. {
  49. if (!_fimsModule.SensorWaferRobotEX1AxisHomePosition.Value)
  50. {
  51. _fimsModule.UnloadFailAlarm.Set($"wafer robot EX1 axis not at home position");
  52. return Result.FAIL;
  53. }
  54. if (!_fimsModule.SensorWaferRobotEX2AxisHomePosition.Value)
  55. {
  56. _fimsModule.UnloadFailAlarm.Set($"wafer robot EX2 axis not at home position");
  57. return Result.FAIL;
  58. }
  59. }
  60. //if (_fimsModule.FIMSDevice.DoorOpenCloseStatus == Devices.DeviceStatus.Open && _fimsModule.IsWaferOnRobot)
  61. //{
  62. // _fimsModule.UnloadFailAlarm.Set($"wafer robot inside {Module}");
  63. // return Result.FAIL;
  64. //}
  65. Notify($"{_fimsModule.Name} {Name} start");
  66. _fimsModule.FIMSDevice.IsLoadCompleted = false;
  67. _fimsModule.FIMSDevice.IsUnloadCompleted = false;
  68. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime"))
  69. {
  70. _timeout = (int)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  71. }
  72. if (_isNeedN2Purge)
  73. _pmModule?.SetN2PurgeParameters();
  74. _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), _isNeedN2Purge);
  75. return Result.RUN;
  76. }
  77. public override Result Monitor()
  78. {
  79. try
  80. {
  81. PauseRountine(_fimsModule.FIMSDevice.IsPause);
  82. if (_fimsModule.FIMSDevice.IsPause)
  83. return Result.RUN;
  84. Unload((int)RoutineStep.Unload, _timeout);
  85. Delay((int)RoutineStep.Delay, 3);
  86. CheckUnloadFinish((int)RoutineStep.CheckUnloadFinish, _timeout);
  87. }
  88. catch (RoutineBreakException)
  89. {
  90. return Result.RUN;
  91. }
  92. catch (RoutineFaildException)
  93. {
  94. _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
  95. _fimsModule.Stop();
  96. return Result.FAIL;
  97. }
  98. _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
  99. _fimsModule.FIMSDevice.IsUnloadCompleted = true;
  100. _fimsModule.Stop();
  101. Notify($"{_fimsModule.Name} {Name} finished");
  102. return Result.DONE;
  103. }
  104. public void Abort()
  105. {
  106. _fimsModule.Stop();
  107. }
  108. private void Unload(int id, int timeout)
  109. {
  110. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  111. {
  112. Notify($"{Module} unload");
  113. if (!_fimsModule.FIMSDevice.Unload(out string reason))
  114. {
  115. Stop(reason);
  116. return false;
  117. }
  118. return true;
  119. }, () =>
  120. {
  121. return true;
  122. }, timeout * 1000);
  123. if (ret.Item1)
  124. {
  125. if (ret.Item2 == Result.FAIL)
  126. {
  127. throw (new RoutineFaildException());
  128. }
  129. else if (ret.Item2 == Result.TIMEOUT) //timeout
  130. {
  131. _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");
  132. throw (new RoutineFaildException());
  133. }
  134. else
  135. throw (new RoutineBreakException());
  136. }
  137. }
  138. private void CheckUnloadFinish(int id, int timeout)
  139. {
  140. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  141. {
  142. Notify($"Check {Module} unload finish");
  143. return true;
  144. }, () =>
  145. {
  146. return _fimsModule.FIMSDevice.IsPLCUnloadCompleted && !_fimsModule.FIMSDevice.IsRunning;
  147. }, timeout * 1000);
  148. if (ret.Item1)
  149. {
  150. if (ret.Item2 == Result.FAIL)
  151. {
  152. throw (new RoutineFaildException());
  153. }
  154. else if (ret.Item2 == Result.TIMEOUT) //timeout
  155. {
  156. _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");
  157. throw (new RoutineFaildException());
  158. }
  159. else
  160. throw (new RoutineBreakException());
  161. }
  162. }
  163. }
  164. }