ELK/Furnace/FurnaceRT/Equipments/PMs/Routines/PMLeakCheckRoutine.cs

using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
using FurnaceRT.Equipments.PMs;
using FurnaceRT.Equipments.PMs.Routines;
using System;
using System.Collections.Generic;
using System.Diagnostics;

namespace FurnaceRT.Modules.PMs
{
    public class PMLeakCheckRoutine : PMBaseRoutine
    {
        enum RoutineStep
        {
            CheckSlitValve,

            SetValve,

            SetTV,

            SetGasLine1,
            SetGasLine2,
            SetGasLine3,
            SetGasLine4,

            SetTuning,

            Pump,

            ContinuePump,

            ClosePumpValve,

            DoLeakCheck,

            CalcLeakCheck,

            Vent,

            UnsetTuning,

            StopVent,
        }

        enum LeakCheckType
        {
            ChamberOnly,

            ChamberAndGasline,

            ChamberAndGaslineToFacility,
        }

        private int _paramContinuePumpTime;
        private int _paramLeakCheckTime;
        private string _leakCheckType;
        private bool[] _isMfcChecked;
        private string _gaslineSelection;
        private double[] _mfcScale = new double[4];

        private double _beginPressure;

        private int _tvPostion;
        private double _basePressure;
        private int _timeoutPump;

        private bool _enableTuning;

        private float _tuningPercent;

        private float _ventAtmPressure;

        //private TM _tm;

        private Stopwatch _swTimer = new Stopwatch();

        private List<string> _mfc = new List<string>() { "Mfc1", "Mfc2", "Mfc3", "Mfc4" };

        public int ElapsedTime
        {
            get { return _swTimer.IsRunning ? (int)(_swTimer.ElapsedMilliseconds / 1000) : 0; }
        }

        public PMLeakCheckRoutine(ModuleName module, PMModule pm) : base(module, pm)
        {
            Module = module.ToString();
            Name = "Leak Check";
        }

        internal void Init(int pumpTime, int leakCheckTime, string leakCheckType, bool[] isMfcChecked)
        {
            _paramContinuePumpTime = pumpTime;
            _paramLeakCheckTime = leakCheckTime;
            _leakCheckType = leakCheckType;
            _isMfcChecked = isMfcChecked;

            if (_leakCheckType != LeakCheckType.ChamberOnly.ToString())
            {
                _gaslineSelection = string.Empty;

                for (int i = 0; i < _isMfcChecked.Length; i++)
                {
                    if (_isMfcChecked[i])
                    {
                        _mfcScale[i] = DEVICE.GetDevice<IoMfc3>($"{Module}.{_mfc[i]}").Scale;
                        _gaslineSelection += _mfc[i] + ",";
                    }
                }

                _gaslineSelection = _gaslineSelection.Remove(_gaslineSelection.Length - 1);
            }
        }

        public override Result Start(params object[] objs)
        {
            Reset();

            _swTimer.Restart();

            _tvPostion = SC.GetValue<int>($"PM.{Module}.LeakCheck.TVPosition");
            _basePressure = SC.GetValue<double>($"PM.{Module}.LeakCheck.PumpBasePressure");
            _timeoutPump = SC.GetValue<int>($"PM.{Module}.LeakCheck.PumpTimeout");

            _enableTuning = SC.GetValue<bool>($"PM.{Module}.LeakCheck.EnableTuning");

            _tuningPercent = (float) SC.GetValue<double>($"PM.{Module}.LeakCheck.TuningPercent");

            _ventAtmPressure = (float)SC.GetValue<double>($"PM.{Module}.VentRoutine.VentBasePressure");

            return Result.RUN;
        }

        public override Result Monitor()
        {
            try
            {
                CheckSlitValve((int)RoutineStep.CheckSlitValve, PMModule);

                SetValve((int)RoutineStep.SetValve, PMModule);

                SetTV((int)RoutineStep.SetTV, PMModule, _tvPostion);

                if (_leakCheckType == LeakCheckType.ChamberAndGasline.ToString())
                {
                    for (int i = 0; i < _isMfcChecked.Length; i++)
                    {
                        if (_isMfcChecked[i])
                        {
                            SetGasLine((int)Enum.Parse(typeof(RoutineStep), $"SetGasLine{i + 1}"), PMModule, _mfc[i], 0);
                        }
                    }
                }
                else if (_leakCheckType == LeakCheckType.ChamberAndGaslineToFacility.ToString())
                {
                    for (int i = 0; i < _isMfcChecked.Length; i++)
                    {
                        if (_isMfcChecked[i])
                        {
                            SetGasLine((int)Enum.Parse(typeof(RoutineStep), $"SetGasLine{i + 1}"), PMModule, _mfc[i], _mfcScale[i]);
                        }
                    }
                }

                if (_enableTuning)
                {
                    SetTuning((int)RoutineStep.SetTuning, PMModule, _tuningPercent);
                }

                Pump((int)RoutineStep.Pump, PMModule, _timeoutPump, _basePressure);

                ContinuePump((int)RoutineStep.ContinuePump, _paramContinuePumpTime);

                ClosePumpValve((int)RoutineStep.ClosePumpValve, PMModule);

                DoLeakCheck((int)RoutineStep.DoLeakCheck, _paramLeakCheckTime);

                CalcLeakCheck((int)RoutineStep.CalcLeakCheck, _paramLeakCheckTime);

                FastVent((int)RoutineStep.Vent, PMModule, _ventAtmPressure, _timeoutPump);

                if (_enableTuning)
                {
                    UnsetTuning((int)RoutineStep.UnsetTuning, PMModule);
                }

                StopVent((int)RoutineStep.StopVent, PMModule, _timeoutPump);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                return Result.FAIL;
            }

            _swTimer.Stop();
            return Result.DONE;
        }

        public override void Abort()
        {
            Stop($"{Module} leak check aborted");
            _swTimer.Stop();

            //LeakCheckDataRecorder.Add((int)_swTimer.ElapsedMilliseconds / 1000, _beginPressure, _tm.ChamberPressure, 0, Result.FAIL.ToString(), _leakCheckType, Module, _gaslineSelection);
        }

        private void SetTuning(int id, PMModule pm, float percent)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Start leak check pumping");

                //pm.ChamberProcessPressureGauge.SetTuning(_tuningPercent);

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void UnsetTuning(int id, PMModule pm )
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Stop leak check venting");

                //pm.ChamberProcessPressureGauge.UnsetTuning();

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }


        private void StopVent(int id, PMModule pm, int timeout)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Turn off {pm.Name} vent valve");

                //if (!pm.Gas4Valve.TurnValve(false, out string reason))
                //{
                //    Stop(reason);
                //    return false;
                //}

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void FastVent(int id, PMModule pm, float ventPressure, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Turn {pm.Name} vent valve on, vent to {ventPressure} Torr");

                //if (!pm.Gas4Valve.TurnValve(true, out string reason))
                //{
                //    Stop(reason);
                //    return false;
                //}

                return true;
            }, () =>
            {
                return pm.ChamberPressure >= ventPressure;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    Stop($"{pm.Name} vent timeout, over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }


        public void CheckSlitValve(int id, PMModule pm)
        {
            Tuple<bool, Result> ret = Check(id, () =>
            {
                Notify($"Check {Module} slit valve is closed");

                if (!pm.CheckSlitValveClose())
                {
                    Stop($"{Module} slit valve is not closed.");
                    return false;
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
            }
        }

        public void SetValve(int id, PMModule pm)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Run {pm.Name} close valve all");

                string reason = "";
                foreach (var stick in PMModule.GasSticks)
                {
                    if (!stick.SetFlow(out reason, 0, 0))
                    {
                        Stop(reason);
                        return false;
                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        public void SetTV(int id, PMModule pm, float position)
        {
            Tuple<bool, Result> ret = Check(id, () =>
            {
                Notify($"Run {Module} set TV position");

                //if (!pm.ThrottleValve.SetMode(PressureCtrlMode.TVPositionCtrl, out string reason))
                //{
                //    Stop(reason);
                //    return false;
                //}

                //if (!pm.ThrottleValve.SetPosition(position, out reason))
                //{
                //    Stop(reason);
                //    return false;
                //}
                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
            }
        }

        private void SetGasLine(int id, PMModuleBase pm, string mfcId, double flow)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Set gas {mfcId} flow to {flow} sccm");

                //if (!pm.SetGasLine(mfcId, (float)flow, out string reason))
                //{
                //    Stop(reason);
                //    return false;
                //}

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    Stop($"Set gas {mfcId} flow to {flow} sccm failed.");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        public void Pump(int id, PMModule pm, int timeout, double pressure)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"{pm.Name} pump to {pressure} Torr");

                //if (!pm.PumpValve.TurnValve(true, out string reason))
                //{
                //    Stop(reason);
                //    return false;
                //}

                return true;
            }, () =>
            {
                return pm.ChamberPressure < pressure;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    Stop($"{pm.Name} pump timeout, over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        public void ContinuePump(int id, int delayTime)
        {
            Tuple<bool, Result> ret = Delay(id, () =>
            {
                Notify($"continue pump {delayTime} seconds");

                return true;
            }, delayTime * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }

                throw new RoutineBreakException();
            }
        }

        public void ClosePumpValve(int id, PMModule pm)
        {
            string timeoutReason = string.Empty;

            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Run {pm.Name} close valve all");

                //if (!pm.PumpValve.TurnValve(false, out string reason))
                //{
                //    Stop(reason);
                //    return false;
                //}
                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        public void DoLeakCheck(int id, double time)
        {
            Tuple<bool, Result> ret = Delay(id, () =>
            {
                Notify($"Keep pressure for {time} seconds");

                _beginPressure = PMModule.ChamberPressure * 1000; // 单位使用mTorr

                return true;
            }, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.RUN)
                {
                    throw (new RoutineBreakException());
                }
            }
        }

        public void CalcLeakCheck(int id, int time)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                double endPressure = PMModule.ChamberPressure * 1000; // 单位使用mTorr

                double leakRate = (endPressure - _beginPressure) / (time / 60.0);

                LeakCheckDataRecorder.Add(time, _beginPressure, endPressure, leakRate, Result.Succeed.ToString(), _leakCheckType, Module, _gaslineSelection);

                EV.PostInfoLog(Module,
                    $"{Module} leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2} mTorr, end: {endPressure:F2} mTorr, using {time} seconds, leak rate: {leakRate:F2}");
                return true;
            });
        }
    }
}