| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182 | using Aitex.Core.RT.Event;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using FurnaceRT.Equipments.PMs;using FurnaceRT.Equipments.Systems;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using System;namespace FurnaceRT.Equipments.FIMSs{    public class FIMSUnloadRoutine : ModuleRoutine, IRoutine    {        enum RoutineStep        {            Unload,            Delay,            CheckUnloadFinish,        }        private int _timeout;        private FIMSModule _fimsModule;        private PMModule _pmModule;        private bool _isNeedN2Purge;        public FIMSUnloadRoutine(FIMSModule fimsModule)        {            Module = fimsModule.Module.ToString();            _fimsModule = fimsModule;            Name = "Unload";            _pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;        }        public Result Init(bool isNeedN2Purge)        {            _isNeedN2Purge = isNeedN2Purge;            return Result.DONE;        }        public Result Start(params object[] objs)        {            Reset();            _timeout = SC.GetValue<int>($"FIMS.{Module}.MotionTimeout");            if (_fimsModule.FIMSDevice.IsUnloadCompleted)            {                EV.PostInfoLog(Module, $"{Module} already at unload position");                _fimsModule.FIMSDevice.IsLoadCompleted = false;                _fimsModule.FIMSDevice.IsUnloadCompleted = true;                return Result.DONE;            }            if (!Singleton<EquipmentManager>.Instance.IsAutoMode && !Singleton<EquipmentManager>.Instance.IsReturnWafer)            {                if (!_fimsModule.SensorWaferRobotEX1AxisHomePosition.Value)                {                    _fimsModule.UnloadFailAlarm.Set($"wafer robot EX1 axis not at home position");                    return Result.FAIL;                }                if (!_fimsModule.SensorWaferRobotEX2AxisHomePosition.Value)                {                    _fimsModule.UnloadFailAlarm.Set($"wafer robot EX2 axis not at home position");                    return Result.FAIL;                }            }                            //if (_fimsModule.FIMSDevice.DoorOpenCloseStatus == Devices.DeviceStatus.Open && _fimsModule.IsWaferOnRobot)            //{            //    _fimsModule.UnloadFailAlarm.Set($"wafer robot inside {Module}");            //    return Result.FAIL;            //}            Notify($"{_fimsModule.Name} {Name} start");            _fimsModule.FIMSDevice.IsLoadCompleted = false;            _fimsModule.FIMSDevice.IsUnloadCompleted = false;                        if (_isNeedN2Purge)                _pmModule?.SetN2PurgeParameters();            _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), _isNeedN2Purge);            return Result.RUN;        }        public override Result Monitor()        {            try            {                PauseRountine(_fimsModule.FIMSDevice.IsPause);                if (_fimsModule.FIMSDevice.IsPause)                    return Result.RUN;                Unload((int)RoutineStep.Unload, _timeout);                Delay((int)RoutineStep.Delay, 3);                CheckUnloadFinish((int)RoutineStep.CheckUnloadFinish, _timeout);            }            catch (RoutineBreakException)            {                return Result.RUN;            }            catch (RoutineFaildException)            {                _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);                _fimsModule.Stop();                return Result.FAIL;            }            _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);            _fimsModule.FIMSDevice.IsUnloadCompleted = true;            _fimsModule.Stop();            Notify($"{_fimsModule.Name} {Name} finished");            return Result.DONE;        }        public void Abort()        {            _fimsModule.Stop();        }        private void Unload(int id, int timeout)        {            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify($"{Module} unload");                if (!_fimsModule.FIMSDevice.Unload(out string reason))                {                    Stop(reason);                    return false;                }                return true;            }, () =>            {                return true;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");                    throw (new RoutineFaildException());                }                else                    throw (new RoutineBreakException());            }        }        private void CheckUnloadFinish(int id, int timeout)        {            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify($"Check {Module} unload finish");                return true;            }, () =>            {                return _fimsModule.FIMSDevice.IsPLCUnloadCompleted && !_fimsModule.FIMSDevice.IsRunning;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");                    throw (new RoutineFaildException());                }                else                    throw (new RoutineBreakException());            }        }    }}
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