AutoTransfer.cs 321 KB

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  1. using Aitex.Common.Util;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using System;
  12. using System.Collections.Generic;
  13. using System.IO;
  14. using System.Linq;
  15. using System.Text;
  16. using System.Threading.Tasks;
  17. using FurnaceRT.Equipments.CarrierRobots;
  18. using FurnaceRT.Equipments.PMs.RecipeExecutions;
  19. using FurnaceRT.Equipments.Schedulers;
  20. using FurnaceRT.Equipments.Systems;
  21. using FurnaceRT.Equipments.WaferRobots;
  22. using MECF.Framework.Common.Jobs;
  23. using Aitex.Core.RT.Log;
  24. using MECF.Framework.Common.DBCore;
  25. using Aitex.Core.RT.DataCenter;
  26. using System.Diagnostics;
  27. using FurnaceRT.Equipments.PMs;
  28. using MECF.Framework.Common.Schedulers;
  29. using System.Windows.Input;
  30. using System.Net.Sockets;
  31. using FurnaceRT.Equipments.FIMSs;
  32. using FurnaceRT.Devices;
  33. using System.Text.RegularExpressions;
  34. using MECF.Framework.Common.CommonData;
  35. using FurnaceRT.Equipments.Boats;
  36. using MECF.Framework.FA.Core.FAControl;
  37. using MECF.Framework.UI.Client.CenterViews.Operations.FA;
  38. using FurnaceRT.Equipments.LPs;
  39. namespace FurnaceRT.Equipments.Jobs
  40. {
  41. public class AutoTransfer : SchedulerModuleFactory
  42. {
  43. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  44. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  45. public List<ProcessJobInfo> LstProcessJobs => _lstProcessJobs;
  46. //private Object _locker = new Object();
  47. private const string LogSource = "Scheduler";
  48. System.Timers.Timer timer = null;
  49. private bool _isCycleMode;
  50. private int _cycleSetPoint = 0;
  51. private int _cycledCount = 0;
  52. private int _cycledWafer = 0;
  53. private int _cycledTotalWafer = 0;
  54. private int _cycleTime;
  55. private int _cycleTimeSecond = 0;
  56. private Stopwatch _coolTimer = new Stopwatch();
  57. private SchedulerFACallback _faCallback;
  58. private SchedulerDBCallback _dbCallback;
  59. private ProcessJobInfo _secondPj;
  60. private Dictionary<string, int> _sideDummyWafers = new Dictionary<string, int>();
  61. private Dictionary<string, int> _extraDummyWafers = new Dictionary<string, int>();
  62. private List<int> _sideDummySlots = new List<int>();
  63. private List<int> _extraDummySlots = new List<int>();
  64. private List<int> _productSlots = new List<int>();
  65. private List<int> _monitor1Slots = new List<int>();
  66. private List<int> _monitor2Slots = new List<int>();
  67. private List<int> _tSlots = new List<int>();//expert mode
  68. private List<int> _xdSlots = new List<int>();//expert mode
  69. private List<SchedulerStocker> _lstCurrentPjStocker = new List<SchedulerStocker>();
  70. private Dictionary<string, R_TRIG> _chargeRuleAlarmTrigDic = new Dictionary<string, R_TRIG>();
  71. private Dictionary<string, R_TRIG> _waferStatusAlarmTrigDic = new Dictionary<string, R_TRIG>();
  72. private Dictionary<string, R_TRIG> _dummyWaferCheckTrigDic = new Dictionary<string, R_TRIG>();
  73. private Dictionary<string, R_TRIG> _logTrigDic = new Dictionary<string, R_TRIG>();
  74. private bool _isCoolingSkip = false;
  75. public bool HasJobRunning
  76. {
  77. get { return _lstControlJobs.Count > 0; }
  78. }
  79. public AutoTransfer()
  80. {
  81. _faCallback = new SchedulerFACallback();
  82. _dbCallback = new SchedulerDBCallback();
  83. InitModule();
  84. _cycledTotalWafer = SC.ContainsItem("System.TotalCycledWafer")
  85. ? SC.GetValue<int>("System.TotalCycledWafer")
  86. : 0;
  87. DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
  88. DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
  89. DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
  90. DATA.Subscribe("Scheduler.CycledTotalWafer", () => _cycledTotalWafer);
  91. DATA.Subscribe("Scheduler.SecondPj", () => new List<ProcessJobInfo>() { _secondPj });
  92. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  93. DATA.Subscribe($"LP1.LocalJobName", () =>
  94. {
  95. var cj = _lstControlJobs.FirstOrDefault(x => x.Module == "LP1");
  96. if (cj != null)
  97. return cj.Name;
  98. return "";
  99. });
  100. DATA.Subscribe($"LP2.LocalJobStatus", () =>
  101. {
  102. var cj = _lstControlJobs.FirstOrDefault(x => x.Module == "LP2");
  103. if (cj != null)
  104. return cj.State.ToString();
  105. return "";
  106. });
  107. DATA.Subscribe($"Scheduler.CurrentControlJob", () =>
  108. {
  109. var cj = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
  110. return cj;
  111. });
  112. DATA.Subscribe($"Scheduler.CurrentProcessJob", () =>
  113. {
  114. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  115. return pj;
  116. });
  117. DATA.Subscribe($"Scheduler.ControlJobList", () =>
  118. {
  119. return _lstControlJobs;
  120. });
  121. DATA.Subscribe($"Scheduler.ProcessJobList", () =>
  122. {
  123. return _lstProcessJobs;
  124. });
  125. DATA.Subscribe($"Scheduler.CoolingTime", () =>
  126. {
  127. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  128. return pj != null ? pj.CoolTimeSec : 0;
  129. });
  130. DATA.Subscribe($"Scheduler.CoolingRemainTime", () =>
  131. {
  132. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  133. var coolTime = pj != null ? pj.CoolTimeSec : 0;
  134. if (_coolTimer.IsRunning)
  135. return (coolTime - _coolTimer.ElapsedMilliseconds / 1000) > 0 ? coolTime - _coolTimer.ElapsedMilliseconds / 1000 : 0;
  136. return coolTime;
  137. });
  138. DATA.Subscribe($"Scheduler.StockerUseSlots", () =>
  139. {
  140. Dictionary<string, string> stockerUseSlots = new Dictionary<string, string>();
  141. if (!_lstProcessJobs.Any())
  142. return stockerUseSlots;
  143. foreach (var pj in _lstProcessJobs)
  144. {
  145. if (pj.Stockers != null)
  146. {
  147. foreach (var stocker in pj.Stockers)
  148. {
  149. if (!stockerUseSlots.ContainsKey(stocker.Item1))
  150. stockerUseSlots.Add(stocker.Item1, string.Join(",", stocker.Item3));
  151. else
  152. {
  153. var value = stockerUseSlots[stocker.Item1];
  154. stockerUseSlots[stocker.Item1] = $"{value},{string.Join(",", stocker.Item3)}";
  155. }
  156. }
  157. }
  158. }
  159. return stockerUseSlots;
  160. });
  161. }
  162. public void Clear()
  163. {
  164. _carrierRobot.ResetTask();
  165. _waferRobot.ResetTask();
  166. foreach (var pm in _lstPms)
  167. {
  168. pm.ResetTask();
  169. }
  170. foreach (var lp in _lstLPs)
  171. {
  172. lp.ResetTask();
  173. }
  174. foreach (var fims in _lstFIMSs)
  175. {
  176. fims.ResetTask();
  177. }
  178. _lstControlJobs.Clear();
  179. _lstProcessJobs.Clear();
  180. _isCoolingSkip = false;
  181. }
  182. public void ResetTask(ModuleName module)
  183. {
  184. if (module == _carrierRobot.Module)
  185. _carrierRobot.ResetTask();
  186. if (module == _waferRobot.Module)
  187. _waferRobot.ResetTask();
  188. foreach (var lp in _lstLPs)
  189. {
  190. if (module == _carrierRobot.Module)
  191. lp.ResetTask();
  192. }
  193. foreach (var fims in _lstFIMSs)
  194. {
  195. if (module == _carrierRobot.Module)
  196. fims.ResetTask();
  197. }
  198. }
  199. #region Job Management
  200. public Result CreateJob(params object[] objs)
  201. {
  202. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  203. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  204. if (_isCycleMode)
  205. {
  206. _cycledWafer = 0;
  207. _cycledCount = 0;
  208. }
  209. if (objs == null || objs.Length == 0)
  210. {
  211. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid");
  212. return Result.FAIL;
  213. }
  214. var param = (Dictionary<string, object>)objs[0];
  215. if (param == null)
  216. {
  217. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid");
  218. return Result.FAIL;
  219. }
  220. var content = "";
  221. foreach (var key in param.Keys)
  222. {
  223. content += $"{key}-{param[key]}#";
  224. }
  225. LOG.Write($"Control Job: {content}");
  226. if (!Singleton<EquipmentManager>.Instance.GetJobRecipeInfor((string)param["JobRecipe"], out string processRecipe, out string layoutRecipe, out int coolTime, out string reason))
  227. {
  228. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  229. return Result.FAIL;
  230. }
  231. if (string.IsNullOrEmpty(layoutRecipe))
  232. {
  233. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid, Layout Recipe is null");
  234. return Result.FAIL;
  235. }
  236. var path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Layout\\{layoutRecipe}.rcp";
  237. if (!File.Exists(path))
  238. {
  239. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Layout \"{layoutRecipe}\" not exist.");
  240. return Result.FAIL;
  241. }
  242. path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Process\\{processRecipe}.rcp";
  243. if (!File.Exists(path))
  244. {
  245. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Process recipe \"{processRecipe}\" not exist.");
  246. return Result.FAIL;
  247. }
  248. if (!RecipeParser.Parse(processRecipe, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
  249. {
  250. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load process recipe {processRecipe} failed, {reason}");
  251. return Result.FAIL;
  252. }
  253. List<Tuple<string, string, List<int>>> useStockers = new List<Tuple<string, string, List<int>>>();
  254. if (RecipeParser.LayoutRecipeParse(layoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  255. {
  256. if (param.ContainsKey("CarrierPara"))
  257. {
  258. //Stocker1,P_00000036,25,Exist,1111111111111111111111111,LP1;Stocker2,P_00000037,25,Exist,1111111111111111111111111,LP2
  259. var paras = param["CarrierPara"].ToString().Split(';');
  260. if (paras != null && paras.Length > 0)
  261. {
  262. foreach (var item in paras)
  263. {
  264. //Stocker13,,21/22/23/24/25"
  265. var arry = item.Split(',');
  266. if (arry != null && arry.Length >= 2)
  267. {
  268. var pStocker = GetModule(arry[0]) as SchedulerStocker;
  269. if (pStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("P") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  270. {
  271. var slots = new List<int>();
  272. if (arry.Length >= 3)
  273. {
  274. var slotParas = arry[2].Split('/').ToList();
  275. if (slotParas != null && slotParas.Count > 0)
  276. {
  277. foreach (var slotPara in slotParas)
  278. {
  279. var ret = int.TryParse(slotPara, out int slot);
  280. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  281. {
  282. if (_lstProcessJobs.Any())
  283. {
  284. foreach (var job in _lstProcessJobs)
  285. {
  286. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  287. {
  288. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  289. return Result.FAIL;
  290. }
  291. }
  292. }
  293. slots.Add(slot - 1);
  294. }
  295. }
  296. }
  297. }
  298. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  299. }
  300. }
  301. }
  302. }
  303. }
  304. if (param.ContainsKey("mCarrierPara"))
  305. {
  306. //Stocker14,P_00000014;Stocker15,P_00000015
  307. var paras = param["mCarrierPara"].ToString().Split(';');
  308. if (paras != null && paras.Length > 0)
  309. {
  310. if (!string.IsNullOrEmpty(paras[0]))
  311. {
  312. foreach (var item in paras)
  313. {
  314. var arry = item.Split(',');
  315. if (arry != null && arry.Length >= 2)
  316. {
  317. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  318. if (mStocker != null && SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M"))
  319. {
  320. var slots = new List<int>();
  321. if (arry.Length >= 3)
  322. {
  323. var slotParas = arry[2].Split('/').ToList();
  324. if (slotParas != null && slotParas.Count > 0)
  325. {
  326. foreach (var slotPara in slotParas)
  327. {
  328. var ret = int.TryParse(slotPara, out int slot);
  329. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  330. {
  331. if (_lstProcessJobs.Any())
  332. {
  333. foreach (var job in _lstProcessJobs)
  334. {
  335. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  336. {
  337. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  338. return Result.FAIL;
  339. }
  340. }
  341. }
  342. slots.Add(slot - 1);
  343. }
  344. }
  345. }
  346. }
  347. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  348. }
  349. }
  350. }
  351. }
  352. }
  353. }
  354. if (param.ContainsKey("m1CarrierPara"))
  355. {
  356. //Stocker14,P_00000014;Stocker15,P_00000015
  357. var paras = param["m1CarrierPara"].ToString().Split(';');
  358. if (paras != null && paras.Length > 0)
  359. {
  360. if (!string.IsNullOrEmpty(paras[0]))
  361. {
  362. foreach (var item in paras)
  363. {
  364. var arry = item.Split(',');
  365. if (arry != null && arry.Length >= 2)
  366. {
  367. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  368. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M1") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  369. {
  370. var slots = new List<int>();
  371. if (arry.Length >= 3)
  372. {
  373. var slotParas = arry[2].Split('/').ToList();
  374. if (slotParas != null && slotParas.Count > 0)
  375. {
  376. foreach (var slotPara in slotParas)
  377. {
  378. var ret = int.TryParse(slotPara, out int slot);
  379. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  380. {
  381. if (_lstProcessJobs.Any())
  382. {
  383. foreach (var job in _lstProcessJobs)
  384. {
  385. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  386. {
  387. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  388. return Result.FAIL;
  389. }
  390. }
  391. }
  392. slots.Add(slot - 1);
  393. }
  394. }
  395. }
  396. }
  397. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  398. }
  399. }
  400. }
  401. }
  402. }
  403. }
  404. if (param.ContainsKey("m2CarrierPara"))
  405. {
  406. //Stocker14,P_00000014;Stocker15,P_00000015
  407. var paras = param["m2CarrierPara"].ToString().Split(';');
  408. if (paras != null && paras.Length > 0)
  409. {
  410. if (!string.IsNullOrEmpty(paras[0]))
  411. {
  412. foreach (var item in paras)
  413. {
  414. var arry = item.Split(',');
  415. if (arry != null && arry.Length >= 2)
  416. {
  417. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  418. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M2") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  419. {
  420. var slots = new List<int>();
  421. if (arry.Length >= 3)
  422. {
  423. var slotParas = arry[2].Split('/').ToList();
  424. if (slotParas != null && slotParas.Count > 0)
  425. {
  426. foreach (var slotPara in slotParas)
  427. {
  428. var ret = int.TryParse(slotPara, out int slot);
  429. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  430. {
  431. if (_lstProcessJobs.Any())
  432. {
  433. foreach (var job in _lstProcessJobs)
  434. {
  435. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  436. {
  437. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  438. return Result.FAIL;
  439. }
  440. }
  441. }
  442. slots.Add(slot - 1);
  443. }
  444. }
  445. }
  446. }
  447. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  448. }
  449. }
  450. }
  451. }
  452. }
  453. }
  454. useStockers.Sort(compare);
  455. foreach (var s in _lstSideDummyStocker)
  456. {
  457. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.SD)
  458. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  459. else
  460. {
  461. bool onRobot = false;
  462. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  463. {
  464. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  465. if (carrier.CarrierType == CarrierType.SD &&
  466. carrier.InternalModuleName == s.Module)
  467. {
  468. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  469. onRobot = true;
  470. }
  471. }
  472. if (!onRobot)
  473. {
  474. bool inFIMS = false;
  475. foreach (var fims in _lstFIMSs)
  476. {
  477. if (!fims.IsOnline)
  478. continue;
  479. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  480. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.SD &&
  481. carrier.InternalModuleName == s.Module)
  482. {
  483. inFIMS = true;
  484. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  485. }
  486. }
  487. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  488. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  489. }
  490. }
  491. }
  492. foreach (var s in _lstExtraDummyStocker)
  493. {
  494. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.ED)
  495. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  496. else
  497. {
  498. bool onRobot = false;
  499. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  500. {
  501. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  502. if (carrier.CarrierType == CarrierType.ED &&
  503. carrier.InternalModuleName == s.Module)
  504. {
  505. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  506. onRobot = true;
  507. }
  508. }
  509. if (!onRobot)
  510. {
  511. bool inFIMS = false;
  512. foreach (var fims in _lstFIMSs)
  513. {
  514. if (!fims.IsOnline)
  515. continue;
  516. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  517. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.ED &&
  518. carrier.InternalModuleName == s.Module)
  519. {
  520. inFIMS = true;
  521. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  522. }
  523. }
  524. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  525. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  526. }
  527. }
  528. }
  529. var wafers = WaferManager.Instance.GetWafers(_pm1.Module);
  530. if (wafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused) &&
  531. SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  532. {
  533. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in boat");
  534. return Result.FAIL;
  535. }
  536. if (wafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  537. {
  538. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in boat");
  539. return Result.FAIL;
  540. }
  541. var robotWafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot);
  542. if (robotWafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused))
  543. {
  544. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in wafer robot");
  545. return Result.FAIL;
  546. }
  547. if (robotWafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  548. {
  549. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in wafer robot");
  550. return Result.FAIL;
  551. }
  552. if (!CheckWaferStatus(useStockers, true, true, out reason))
  553. {
  554. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  555. return Result.FAIL;
  556. }
  557. }
  558. var pjJobId = param["PJID"].ToString();
  559. var cjJobId = param["CJID"].ToString();
  560. ControlJobInfo cj = null;
  561. if (_lstControlJobs.Exists(x => x.Name == cjJobId))
  562. {
  563. for (int i = 1; i < 1000; i++)
  564. {
  565. if (!_lstControlJobs.Exists(x => x.Name == $"{cjJobId}_{i}"))
  566. {
  567. cjJobId = $"{cjJobId}_{i}";
  568. break;
  569. }
  570. }
  571. }
  572. cj = new ControlJobInfo();
  573. cj.Name = cjJobId;
  574. //cj.Module = module;
  575. cj.LotName = cjJobId;
  576. cj.LotInnerId = Guid.NewGuid();
  577. cj.LotWafers = new List<WaferInfo>();
  578. cj.CreateTime = DateTime.Now;
  579. cj.SetState(EnumControlJobState.WaitingForStart);
  580. ProcessJobInfo pj = new ProcessJobInfo();
  581. pj.Name = pjJobId;
  582. pj.JobRecipe = param["JobRecipe"].ToString();
  583. pj.ProcessRecipe = processRecipe;
  584. pj.LayoutRecipe = layoutRecipe;
  585. pj.ControlJobName = cj.Name;
  586. pj.SetState(EnumProcessJobState.Queued);
  587. pj.CreateTime = DateTime.Now;
  588. pj.Stockers = useStockers;
  589. pj.SlotWafers = new List<Tuple<ModuleName, int>>();
  590. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  591. pj.CoolTimeSec = coolTime;
  592. pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");
  593. pj.IsN2PurgeMode = recipeHead.IsN2PurgeMode;
  594. if (useStockers.Any() && !CheckChargeRule(pj, out bool waferShort, false, true, out reason))
  595. {
  596. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {layoutRecipe} check charge rule failed, {reason}");
  597. return Result.FAIL;
  598. }
  599. foreach (var stocker in useStockers)
  600. {
  601. if (CarrierManager.Instance.CheckHasCarrier($"{stocker.Item1}", 0) &&
  602. CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName.ToString() != stocker.Item1)
  603. {
  604. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Carrier of {stocker.Item1} is not match stocker module name {CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName}");
  605. return Result.FAIL;
  606. }
  607. }
  608. _lstProcessJobs.Add(pj);
  609. cj.ProcessJobNameList.Add(pj.Name);
  610. if (!_lstControlJobs.Contains(cj))
  611. _lstControlJobs.Add(cj);
  612. _faCallback.JobCreated(cj, pj);
  613. _secondPj = null;
  614. if ((Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).IsExcuteIdleRecipe)
  615. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).EndIdleRecipe();
  616. return Result.RUN;
  617. }
  618. static int compare(Tuple<string, string> t1, Tuple<string, string> t2)
  619. {
  620. int.TryParse(t1.Item1.Replace("Stocker", ""), out int s1);
  621. int.TryParse(t2.Item1.Replace("Stocker", ""), out int s2);
  622. if (s1 > s2)
  623. {
  624. return 1;
  625. }
  626. else
  627. {
  628. return -1;
  629. }
  630. }
  631. static int compare(Tuple<string, string, List<int>> t1, Tuple<string, string, List<int>> t2)
  632. {
  633. int.TryParse(t1.Item1.Replace("Stocker", ""), out int s1);
  634. int.TryParse(t2.Item1.Replace("Stocker", ""), out int s2);
  635. if (s1 > s2)
  636. {
  637. return 1;
  638. }
  639. else
  640. {
  641. return -1;
  642. }
  643. }
  644. internal ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj, ProcessJobInfo checkPj = null)
  645. {
  646. DateTime dtMin = DateTime.MaxValue;
  647. ProcessJobInfo currentPj = null;
  648. foreach (var pj in _lstProcessJobs)
  649. {
  650. if (checkPj != null && checkPj == pj)
  651. continue;
  652. if (pj.ControlJobName == cj.Name)
  653. {
  654. if (pj.CreateTime.CompareTo(dtMin) < 0)
  655. {
  656. dtMin = pj.CreateTime;
  657. currentPj = pj;
  658. }
  659. }
  660. }
  661. return currentPj;
  662. }
  663. internal void StopJob(string jobName)
  664. {
  665. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  666. if (cj == null)
  667. {
  668. EV.PostWarningLog(LogSource, $"stop job rejected, not found job with id {jobName}");
  669. return;
  670. }
  671. foreach (var pj in _lstProcessJobs)
  672. {
  673. if (pj.ControlJobName == cj.Name)
  674. {
  675. if (pj.State == EnumProcessJobState.Processing)
  676. _faCallback.JobStopped(cj, pj);
  677. pj.SetState(EnumProcessJobState.Stopping);
  678. pj.ProcessingState = EnumProcessingState.WaitingWithdrawal;
  679. }
  680. }
  681. if (_isCycleMode)
  682. {
  683. if (_cycleSetPoint > _cycledCount)
  684. {
  685. _cycleSetPoint = _cycledCount;
  686. EV.PostWarningLog("System", $"system in cycle mode, cycle count reset to {_cycledCount}");
  687. }
  688. }
  689. _dbCallback.LotFinished(cj);
  690. }
  691. internal void AbortJob(string jobName)
  692. {
  693. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  694. if (cj == null)
  695. {
  696. EV.PostWarningLog(LogSource, $"abort job rejected, not found job with id {jobName}");
  697. return;
  698. }
  699. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  700. foreach (var pj in _lstProcessJobs)
  701. {
  702. if (pj.ControlJobName == cj.Name)
  703. {
  704. if (pj.State == EnumProcessJobState.Processing)
  705. _faCallback.JobAborted(cj, pj);
  706. pj.SetState(EnumProcessJobState.Aborting);
  707. if (pj.ProcessingState == EnumProcessingState.Charging || pj.ProcessingState == EnumProcessingState.Discharging)
  708. {
  709. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  710. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  711. pmModule?.SetN2PurgeProcess(false);
  712. }
  713. pj.ProcessingState = EnumProcessingState.WaitingWithdrawal;
  714. pjAbortList.Add(pj);
  715. int unprocessed = 0;
  716. int aborted = 0;
  717. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  718. foreach (var waferInfo in wafers)
  719. {
  720. waferInfo.ProcessJob = null;
  721. waferInfo.NextSequenceStep = 0;
  722. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  723. unprocessed++;
  724. }
  725. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  726. }
  727. }
  728. if (!string.IsNullOrEmpty(jobName) && Singleton<FAJobController>.Instance.FAProcessJobs.ContainsKey(jobName))
  729. {
  730. Singleton<FAJobController>.Instance.FAProcessJobs[jobName].RequestAbort();
  731. }
  732. foreach (var pj in pjAbortList)
  733. {
  734. _lstProcessJobs.Remove(pj);
  735. }
  736. _lstControlJobs.Remove(cj);
  737. _dbCallback.LotFinished(cj);
  738. }
  739. public void ResumeJob(string jobName)
  740. {
  741. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  742. if (cj == null)
  743. {
  744. EV.PostWarningLog(LogSource, $"resume job rejected, not found job with id {jobName}");
  745. return;
  746. }
  747. if (cj.State == EnumControlJobState.Paused)
  748. {
  749. cj.SetState(EnumControlJobState.Executing);
  750. }
  751. foreach (var pj in _lstProcessJobs)
  752. {
  753. if (pj.ControlJobName == cj.Name)
  754. {
  755. if (pj.State == EnumProcessJobState.Processing)
  756. _faCallback.JobResumed(cj, pj);
  757. }
  758. }
  759. }
  760. internal bool StartJob(string jobName)
  761. {
  762. if (!CheckPMStatus())
  763. {
  764. EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
  765. return false;
  766. }
  767. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  768. if (cj == null)
  769. {
  770. EV.PostWarningLog(LogSource, $"start job rejected, not found job with id {jobName}");
  771. return false;
  772. }
  773. if (_isCycleMode)
  774. {
  775. if (CheckAllJobDone())
  776. {
  777. _cycledWafer = 0;
  778. _cycledCount = 0;
  779. }
  780. }
  781. if (cj.State == EnumControlJobState.WaitingForStart)
  782. {
  783. cj.SetState(EnumControlJobState.Executing);
  784. //(GetModule(cj.Module) as SchedulerLoadPort).NoteJobStart();
  785. cj.LotInnerId = Guid.NewGuid();
  786. cj.BeginTime = DateTime.Now;
  787. _dbCallback.LotCreated(cj);
  788. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  789. }
  790. return true;
  791. }
  792. internal void PauseJob(string jobName)
  793. {
  794. foreach (var cj in _lstControlJobs)
  795. {
  796. if (cj.Name != jobName && !string.IsNullOrEmpty(jobName))
  797. continue;
  798. if (cj.State == EnumControlJobState.Executing)
  799. {
  800. cj.SetState(EnumControlJobState.Paused);
  801. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  802. }
  803. }
  804. }
  805. #endregion Job Management
  806. private bool CheckPMStatus()
  807. {
  808. bool hasPmOnline = false;
  809. foreach (var schedulerPm in _lstPms)
  810. {
  811. if (schedulerPm.IsAvailable)
  812. {
  813. hasPmOnline = true;
  814. continue;
  815. }
  816. }
  817. return hasPmOnline;
  818. }
  819. public Result Start(params object[] objs)
  820. {
  821. Clear();
  822. _cycledWafer = 0;
  823. _cycledCount = 0;
  824. timer.Start();
  825. if (!CheckPMStatus())
  826. {
  827. EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
  828. return Result.FAIL;
  829. }
  830. return Result.RUN;
  831. }
  832. public Result Monitor()
  833. {
  834. ControlJobInfo cjActive = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
  835. if (cjActive != null)
  836. {
  837. MonitorModuleTasks();
  838. }
  839. MonitorJobTasks();
  840. return Result.RUN;
  841. }
  842. #region Job task
  843. public Result MonitorJobTasks()
  844. {
  845. UpdateProcessJobStatus();
  846. UpdateControlJobStatus();
  847. StartNewJob();
  848. return Result.RUN;
  849. }
  850. private void UpdateProcessJobStatus()
  851. {
  852. foreach (var pj in _lstProcessJobs)
  853. {
  854. if (pj.ProcessingState == EnumProcessingState.Discharging && pj.IsEmptyLayout)
  855. {
  856. pj.SetState(EnumProcessJobState.ProcessingComplete);
  857. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  858. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  859. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  860. pmModule?.SetN2PurgeProcess(false);
  861. }
  862. else
  863. {
  864. if (pj.State == EnumProcessJobState.Processing)
  865. {
  866. if (CheckAllWaferReturned(pj, true))
  867. {
  868. pj.SetState(EnumProcessJobState.ProcessingComplete);
  869. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  870. _faCallback.EndDischarge(pj);
  871. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  872. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  873. pmModule?.SetN2PurgeProcess(false);
  874. }
  875. }
  876. else if (pj.State == EnumProcessJobState.Stopping)
  877. {
  878. if (CheckAllWaferReturned(pj, false))
  879. {
  880. pj.SetState(EnumProcessJobState.ProcessingComplete);
  881. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  882. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  883. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  884. pmModule?.SetN2PurgeProcess(false);
  885. }
  886. }
  887. }
  888. }
  889. }
  890. private void UpdateControlJobStatus()
  891. {
  892. if (_lstControlJobs.Count == 0)
  893. return;
  894. bool allControlJobComplete = true;
  895. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  896. foreach (var cj in _lstControlJobs)
  897. {
  898. if (cj.State == EnumControlJobState.Executing)
  899. {
  900. bool allPjCompleted = true;
  901. foreach (var pjName in cj.ProcessJobNameList)
  902. {
  903. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  904. if (pj == null)
  905. {
  906. LOG.Error($"Not find pj named {pjName} in {cj.Name}");
  907. continue;
  908. }
  909. if (pj.State != EnumProcessJobState.Complete && pj.State != EnumProcessJobState.ProcessingComplete)
  910. {
  911. allPjCompleted = false;
  912. break;
  913. }
  914. }
  915. if (allPjCompleted)
  916. {
  917. cj.SetState(EnumControlJobState.Completed);
  918. cj.EndTime = DateTime.Now;
  919. string strInfo = $"{cj.Module} has finished: \r\n\r\nProcessed wafer number: {cj.LotWafers.Count} \r\nBegin time: {cj.BeginTime} \r\nEnd time: {cj.EndTime} \r\nDuration: {(cj.EndTime - cj.BeginTime).TotalSeconds:F0} sec";
  920. EV.PostInfoLog("Scheduler", strInfo);
  921. if (SC.GetValue<bool>("System.Job.EnablePopDialogWhenJobDone"))
  922. {
  923. EV.PostPopDialogMessage(EventLevel.Information, "System Information", strInfo);
  924. }
  925. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  926. _dbCallback.LotFinished(cj);
  927. //if (!(_isCycleMode && _cycledCount < _cycleSetPoint))
  928. // (GetModule(cj.Module) as SchedulerLoadPort).NoteJobComplete();
  929. }
  930. }
  931. if (cj.State == EnumControlJobState.Completed && (!SC.GetValue<bool>("System.IsCycleMode") ||
  932. (SC.GetValue<bool>("System.IsCycleMode") && _cycledCount >= _cycleSetPoint)))
  933. {
  934. cjRemoveList.Add(cj);
  935. }
  936. allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
  937. }
  938. if (_isCycleMode && _cycledCount < _cycleSetPoint)
  939. {
  940. int countPerCycle = 0;
  941. int countProcessed = 0;
  942. foreach (var pj in _lstProcessJobs)
  943. {
  944. if (pj.State == EnumProcessJobState.Queued || pj.SlotWafers == null)
  945. continue;
  946. foreach (var pjSlotWafer in pj.SlotWafers)
  947. {
  948. countPerCycle++;
  949. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  950. if (!wafer.IsEmpty && !CheckWaferNeedProcess(pjSlotWafer.Item1, pjSlotWafer.Item2))
  951. {
  952. countProcessed++;
  953. }
  954. }
  955. }
  956. _cycledWafer = _cycledCount * countPerCycle + countProcessed;
  957. if (allControlJobComplete)
  958. {
  959. _cycledCount++;
  960. if (_cycledCount < _cycleSetPoint)
  961. {
  962. foreach (var cj in _lstControlJobs)
  963. {
  964. cj.SetState(EnumControlJobState.Executing);
  965. cj.LotInnerId = Guid.NewGuid();
  966. //_dbCallback.LotCreated(cj);
  967. }
  968. foreach (var pj in _lstProcessJobs)
  969. {
  970. pj.SetState(EnumProcessJobState.Queued);
  971. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  972. pj.InnerId = Guid.NewGuid();
  973. if (pj.SlotWafers == null)
  974. continue;
  975. foreach (var pjSlotWafer in pj.SlotWafers)
  976. {
  977. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  978. wafer.ProcessJob = null;
  979. wafer.NextSequenceStep = 0;
  980. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  981. }
  982. pj.SlotWafers.Clear();
  983. }
  984. }
  985. else
  986. {
  987. foreach (var cj in _lstControlJobs)
  988. {
  989. if (cj.State == EnumControlJobState.Completed)
  990. {
  991. cjRemoveList.Add(cj);
  992. }
  993. }
  994. }
  995. }
  996. }
  997. if (_waferRobot.IsAvailable && cjRemoveList.Any())
  998. {
  999. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
  1000. }
  1001. foreach (var cj in cjRemoveList)
  1002. {
  1003. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1004. foreach (var pj in _lstProcessJobs)
  1005. {
  1006. if (pj.ControlJobName == cj.Name)
  1007. pjRemoveList.Add(pj);
  1008. }
  1009. foreach (var pj in pjRemoveList)
  1010. {
  1011. _lstProcessJobs.Remove(pj);
  1012. }
  1013. _lstControlJobs.Remove(cj);
  1014. Singleton<FAJobController>.Instance.CheckPJCompleteByCJID(cj.Name);
  1015. Task.Delay(2000).ContinueWith(x =>
  1016. {
  1017. Singleton<FAJobController>.Instance.CJComplete(cj.Name);
  1018. });
  1019. }
  1020. }
  1021. public bool CheckAllJobDone()
  1022. {
  1023. foreach (var cj in _lstControlJobs)
  1024. {
  1025. if (cj.State == EnumControlJobState.Executing ||
  1026. cj.State == EnumControlJobState.Paused ||
  1027. cj.State == EnumControlJobState.Queued ||
  1028. cj.State == EnumControlJobState.WaitingForStart)
  1029. return false;
  1030. }
  1031. if (_lstControlJobs.Count > 0 || _lstProcessJobs.Count > 0)
  1032. {
  1033. return false;
  1034. }
  1035. return true;
  1036. }
  1037. public List<Tuple<string, string, List<int>>> GetProcessingStockers()
  1038. {
  1039. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1040. return null;
  1041. foreach (var cj in _lstControlJobs)
  1042. {
  1043. if (cj.State == EnumControlJobState.Completed)
  1044. continue;
  1045. var pj = GetFirstProcessJob(cj);
  1046. if (pj != null)
  1047. {
  1048. if (pj.ProcessingState != EnumProcessingState.Discharging)
  1049. return pj.Stockers;
  1050. else
  1051. {
  1052. List<Tuple<string, string, List<int>>> temp = new List<Tuple<string, string, List<int>>>();
  1053. foreach (var item in pj.Stockers)
  1054. {
  1055. if (CarrierManager.Instance.CheckHasCarrier(item.Item1, 0))
  1056. {
  1057. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1058. if (wafers != null && !wafers.Any(x => !x.IsEmpty && x.OriginStation == (int)ModuleHelper.Converter(item.Item1)))
  1059. continue;
  1060. }
  1061. temp.Add(Tuple.Create(item.Item1, item.Item2, item.Item3));
  1062. }
  1063. return temp;
  1064. }
  1065. }
  1066. }
  1067. return null;
  1068. }
  1069. public List<Tuple<string, string, List<int>>> GetSecondlyProcessingStockers()
  1070. {
  1071. var pj = GetSecondlyProcessJob();
  1072. return pj != null ? pj.Stockers : null;
  1073. }
  1074. private ProcessJobInfo GetSecondlyProcessJob()
  1075. {
  1076. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1077. return null;
  1078. if (_lstControlJobs.Count > 1)
  1079. {
  1080. var cj = _lstControlJobs[1];
  1081. if (cj.State == EnumControlJobState.Completed)
  1082. return null;
  1083. var pj = GetFirstProcessJob(cj);
  1084. return pj;
  1085. }
  1086. return null;
  1087. }
  1088. private ProcessJobInfo GetSecondlyProcessJobV2()
  1089. {
  1090. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1091. return null;
  1092. if (_lstControlJobs.Count > 1 && _secondPj == null)
  1093. {
  1094. var cj = _lstControlJobs[1];
  1095. if (cj.State == EnumControlJobState.Completed)
  1096. return null;
  1097. var pj = GetFirstProcessJob(cj);
  1098. return pj;
  1099. }
  1100. return _secondPj;
  1101. }
  1102. public List<Tuple<string, string, List<int>>> GetAllPJStockers()
  1103. {
  1104. List<Tuple<string, string, List<int>>> temp = new List<Tuple<string, string, List<int>>>();
  1105. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1106. return temp;
  1107. foreach (var cj in _lstControlJobs)
  1108. {
  1109. if (cj.State == EnumControlJobState.Completed)
  1110. continue;
  1111. foreach (var pj in _lstProcessJobs)
  1112. {
  1113. if (pj != null && pj.ControlJobName == cj.Name)
  1114. {
  1115. temp.AddRange(pj.Stockers);
  1116. }
  1117. }
  1118. }
  1119. return temp;
  1120. }
  1121. private void StartNewJob()
  1122. {
  1123. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1124. return;
  1125. _secondPj = GetSecondlyProcessJobV2();
  1126. ControlJobInfo cjActived = null;
  1127. DateTime dtMin = DateTime.MaxValue;
  1128. foreach (var cj in _lstControlJobs)
  1129. {
  1130. if (cj.State == EnumControlJobState.Completed)
  1131. continue;
  1132. if (cj.CreateTime.CompareTo(dtMin) < 0)
  1133. {
  1134. dtMin = cj.CreateTime;
  1135. cjActived = cj;
  1136. }
  1137. }
  1138. if (cjActived == null)
  1139. return;
  1140. if (cjActived.State != EnumControlJobState.Executing &&
  1141. cjActived.State != EnumControlJobState.Paused)
  1142. {
  1143. cjActived.BeginTime = DateTime.Now;
  1144. cjActived.SetState(EnumControlJobState.Executing);
  1145. }
  1146. ProcessJobInfo pj = null;
  1147. foreach (var cj in _lstControlJobs)
  1148. {
  1149. if (cj.State != EnumControlJobState.Executing)
  1150. continue;
  1151. cjActived = cj;
  1152. pj = GetFirstProcessJob(cjActived);
  1153. if (pj != null && pj.State == EnumProcessJobState.Queued)
  1154. {
  1155. if (!pj.IsEmptyLayout)
  1156. {
  1157. if (CheckProcessJobReady(pj))
  1158. {
  1159. //先不管charge rule
  1160. if (!CheckChargeRule(pj, out bool waferShort, true, true, out string reason))
  1161. {
  1162. if (!_chargeRuleAlarmTrigDic.ContainsKey(pj.InnerId.ToString()))
  1163. _chargeRuleAlarmTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1164. _chargeRuleAlarmTrigDic[pj.InnerId.ToString()].CLK = true;
  1165. if (_chargeRuleAlarmTrigDic[pj.InnerId.ToString()].Q)
  1166. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, {reason}");
  1167. return;
  1168. }
  1169. if (!CheckWaferStatus(pj.Stockers, false, false, out reason))
  1170. {
  1171. if (!_waferStatusAlarmTrigDic.ContainsKey(pj.InnerId.ToString()))
  1172. _waferStatusAlarmTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1173. _waferStatusAlarmTrigDic[pj.InnerId.ToString()].CLK = true;
  1174. if (_waferStatusAlarmTrigDic[pj.InnerId.ToString()].Q)
  1175. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  1176. return;
  1177. }
  1178. if (!CheckDummyWaferUse(pj))
  1179. return;
  1180. if (!SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1181. {
  1182. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1183. if (wafers != null && wafers.Any(x => !x.IsEmpty && (x.WaferType == WaferType.SD || x.WaferType == WaferType.ED)))
  1184. {
  1185. for (int i = 0; i < wafers.Count; i++)
  1186. {
  1187. var wafer = wafers[i];
  1188. if (wafer == null || wafer.IsEmpty)
  1189. continue;
  1190. if (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED)
  1191. {
  1192. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1193. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1194. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1195. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1196. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid wafer in boat");
  1197. return;
  1198. }
  1199. if (!pj.SideDummySlots.Any(x => x == i) && !pj.ExtraDummySlots.Any(x => x == i))
  1200. {
  1201. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1202. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1203. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1204. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1205. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, dummy wafer layout mismatch");
  1206. return;
  1207. }
  1208. }
  1209. var existSDSlots = new List<int>();
  1210. foreach (var slot in pj.SideDummySlots)
  1211. {
  1212. var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, slot);
  1213. if (!wafer.IsEmpty)
  1214. {
  1215. if (wafer.WaferType != WaferType.SD)
  1216. {
  1217. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1218. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1219. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1220. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1221. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, SD wafer layout mismatch");
  1222. return;
  1223. }
  1224. else
  1225. {
  1226. existSDSlots.Add(slot);
  1227. }
  1228. }
  1229. }
  1230. var existEDSlots = new List<int>();
  1231. foreach (var slot in pj.ExtraDummySlots)
  1232. {
  1233. var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, slot);
  1234. if (!wafer.IsEmpty)
  1235. {
  1236. if (wafer.WaferType != WaferType.ED)
  1237. {
  1238. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1239. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1240. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1241. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1242. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, ED wafer layout mismatch");
  1243. return;
  1244. }
  1245. else
  1246. {
  1247. existEDSlots.Add(slot);
  1248. }
  1249. }
  1250. }
  1251. for (int i = 0; i < wafers.Count; i++)
  1252. {
  1253. var wafer = wafers[i];
  1254. if (wafer == null || wafer.IsEmpty)
  1255. continue;
  1256. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1257. }
  1258. pj.IsNeedChargeDummyWafer = pj.ExtraDummySlots.Count != existEDSlots.Count || pj.SideDummySlots.Count != existSDSlots.Count;
  1259. }
  1260. else
  1261. {
  1262. pj.IsNeedChargeDummyWafer = true;
  1263. }
  1264. }
  1265. else
  1266. {
  1267. pj.IsNeedChargeDummyWafer = true;
  1268. }
  1269. ActiveProcessJob(cjActived, pj);
  1270. _sideDummyWafers = GetDummyWafers(_lstSideDummyStocker, pj.SideDummySlots.Count(), WaferType.SD);
  1271. _extraDummyWafers = GetDummyWafers(_lstExtraDummyStocker, pj.ExtraDummySlots.Count(), WaferType.ED);
  1272. _sideDummySlots = pj.SideDummySlots;
  1273. _extraDummySlots = pj.ExtraDummySlots;
  1274. _productSlots = pj.ProductSlots;
  1275. _monitor1Slots = pj.Monitor1Slots;
  1276. _monitor2Slots = pj.Monitor2Slots;
  1277. _lstCurrentPjStocker.Clear();
  1278. foreach (var s in pj.Stockers)
  1279. {
  1280. var module = GetModule(s.Item1) as SchedulerStocker;
  1281. if (module != null)
  1282. _lstCurrentPjStocker.Add(module);
  1283. }
  1284. }
  1285. }
  1286. else
  1287. {
  1288. if (!SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1289. {
  1290. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1291. for (int i = 0; i < wafers.Count; i++)
  1292. {
  1293. var wafer = wafers[i];
  1294. if (wafer == null || wafer.IsEmpty)
  1295. continue;
  1296. if (wafer.WaferType != WaferType.ED && wafer.WaferType != WaferType.SD)
  1297. continue;
  1298. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1299. }
  1300. }
  1301. ActiveProcessJob(cjActived, pj);
  1302. }
  1303. break;
  1304. }
  1305. }
  1306. if (_lstControlJobs.Count > 1 && pj != null)
  1307. {
  1308. var second = GetSecondlyProcessJob();
  1309. if (second != null && second.IsEmptyLayout && !second.IsStandbyStarted &&
  1310. (pj.ProcessingState == EnumProcessingState.Cooling || pj.ProcessingState == EnumProcessingState.Discharging))
  1311. {
  1312. foreach (var pm in _lstPms)
  1313. {
  1314. if (pm.IsAvailable)
  1315. {
  1316. _dbCallback.PjCreated(second);
  1317. _dbCallback.PjStart();
  1318. pm.Standby(second.ProcessRecipe);
  1319. second.IsStandbyStarted = true;
  1320. }
  1321. }
  1322. }
  1323. }
  1324. }
  1325. private bool ActiveProcessJob(ControlJobInfo cj, ProcessJobInfo pj)
  1326. {
  1327. //_dbCallback.JobCreated(cj, pj);
  1328. pj.SetState(EnumProcessJobState.Processing);
  1329. pj.ProcessingState = EnumProcessingState.Charging;
  1330. pj.BeginTime = DateTime.Now;
  1331. if (pj.IsN2PurgeMode &&
  1332. SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable"))
  1333. {
  1334. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  1335. pmModule?.SetN2PurgeProcess(true);
  1336. if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  1337. pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  1338. }
  1339. foreach (var pm in _lstPms)
  1340. {
  1341. if (pm.IsAvailable)
  1342. {
  1343. _dbCallback.PjCreated(pj);
  1344. _dbCallback.PjStart();
  1345. _faCallback.StartCharge(pj);
  1346. pm.Standby(pj.ProcessRecipe);
  1347. pj.IsStandbyStarted = true;
  1348. }
  1349. }
  1350. return true;
  1351. }
  1352. #endregion Job task
  1353. #region Module task
  1354. public Result MonitorModuleTasks()
  1355. {
  1356. MonitorFIMSTask();
  1357. MonitorWaferRobotTask();
  1358. MonitorCarrierRobotTask();
  1359. MonitorPMTask();
  1360. return Result.RUN;
  1361. }
  1362. private void MonitorWaferRobotTask()
  1363. {
  1364. if (!_waferRobot.IsAvailable)
  1365. return;
  1366. foreach (var fims in _lstFIMSs)
  1367. {
  1368. if (fims.IsWaitTransfer(ModuleName.WaferRobot))
  1369. {
  1370. fims.StopWaitTransfer(ModuleName.WaferRobot);
  1371. }
  1372. }
  1373. foreach (var pm in _lstPms)
  1374. {
  1375. if (pm.IsWaitTransfer(ModuleName.WaferRobot))
  1376. {
  1377. pm.StopWaitTransfer(ModuleName.WaferRobot);
  1378. }
  1379. }
  1380. MonitorWaferRobotFIMSTask();
  1381. if (!_waferRobot.IsAvailable)
  1382. return;
  1383. MonitorWaferRobotPMTask();
  1384. }
  1385. private void MonitorCarrierRobotTask()
  1386. {
  1387. if (!_carrierRobot.IsAvailable)
  1388. return;
  1389. //efem robot is idle, release all the target
  1390. foreach (var fims in _lstFIMSs)
  1391. {
  1392. if (fims.IsWaitTransfer(ModuleName.CarrierRobot))
  1393. {
  1394. fims.StopWaitTransfer(ModuleName.CarrierRobot);
  1395. }
  1396. }
  1397. foreach (var stock in _lstTotlaStockers)
  1398. {
  1399. if (stock.IsWaitTransfer(ModuleName.CarrierRobot))
  1400. {
  1401. stock.StopWaitTransfer(ModuleName.CarrierRobot);
  1402. }
  1403. }
  1404. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1405. if (pj == null || pj.IsEmptyLayout)
  1406. return;
  1407. if (pj.ProcessingState == EnumProcessingState.Discharging)
  1408. {
  1409. //discharge
  1410. DischargingOrderBySort(SC.GetStringValue("System.ChargingOrderBySort"));
  1411. if (!_carrierRobot.IsAvailable)
  1412. return;
  1413. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1414. MonitorCassetteRobotStockerTaskInDischarge(_lstSideDummyStocker, WaferType.SD, _sideDummySlots);
  1415. if (!_carrierRobot.IsAvailable)
  1416. return;
  1417. MonitorCarrierRobotPickFIMSTask();
  1418. if (!_carrierRobot.IsAvailable)
  1419. return;
  1420. MonitorCarrierRobotPlaceFIMSTaskInDischarge();
  1421. }
  1422. else if (pj.ProcessingState == EnumProcessingState.Charging)
  1423. {
  1424. //charge
  1425. if (pj.IsNeedChargeDummyWafer)
  1426. MonitorCassetteRobotStockerTask(_lstSideDummyStocker, WaferType.SD);
  1427. if (!_carrierRobot.IsAvailable)
  1428. return;
  1429. ChargingOrderBySort(pj, SC.GetStringValue("System.ChargingOrderBySort"));
  1430. if (!_carrierRobot.IsAvailable)
  1431. return;
  1432. MonitorCarrierRobotPickFIMSTask();
  1433. if (!_carrierRobot.IsAvailable)
  1434. return;
  1435. MonitorCarrierRobotPlaceFIMSTaskInCharge();
  1436. }
  1437. else if (pj.ProcessingState == EnumProcessingState.Processing)
  1438. {
  1439. MonitorCarrierRobotPickFIMSTask();
  1440. MonitorCassetteRobotPlaceStockerTask();
  1441. }
  1442. }
  1443. private void MonitorFIMSTask()
  1444. {
  1445. if (!_lstProcessJobs.Any())
  1446. return;
  1447. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1448. if (pj == null || pj.IsEmptyLayout)
  1449. return;
  1450. //load
  1451. if (pj.ProcessingState == EnumProcessingState.Charging)
  1452. {
  1453. foreach (var st in _lstFIMSs)
  1454. {
  1455. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1456. continue;
  1457. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1458. if (!CheckCarrierCanPickFromFIMS(st.Module) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Charging"))
  1459. {
  1460. return;
  1461. }
  1462. }
  1463. }
  1464. else if (pj.ProcessingState == EnumProcessingState.Discharging)
  1465. {
  1466. //先判断空片的情况,空片的先load
  1467. foreach (var st in _lstFIMSs)
  1468. {
  1469. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1470. continue;
  1471. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1472. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1473. if (wafers != null)
  1474. {
  1475. if (CheckCarrierNoHasEmptySlot(st.Module) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Discharging"))
  1476. {
  1477. return;
  1478. }
  1479. }
  1480. }
  1481. foreach (var st in _lstFIMSs)
  1482. {
  1483. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1484. continue;
  1485. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1486. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1487. if (carrier != null)
  1488. {
  1489. if (!CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Discharging"))
  1490. {
  1491. return;
  1492. }
  1493. }
  1494. }
  1495. }
  1496. //unload
  1497. if (pj.ProcessingState == EnumProcessingState.Charging)
  1498. {
  1499. foreach (var st in _lstFIMSs)
  1500. {
  1501. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1502. continue;
  1503. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1504. if (CheckCarrierCanPickFromFIMS(st.Module) && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Charging"))
  1505. {
  1506. return;
  1507. }
  1508. }
  1509. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  1510. {
  1511. SchedulerFIMS fims = null;
  1512. foreach (var st in _lstFIMSs)
  1513. {
  1514. if (!st.IsAvailable || CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1515. continue;
  1516. // check FIMS
  1517. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1518. if (fimsDevice.IsUnloadCompleted)
  1519. continue;
  1520. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  1521. var transfer = Singleton<EquipmentManager>.Instance.GetTransferJobStockers();
  1522. if (transfer != null && transfer.Any(x => x.Stocker == carrier.InternalModuleName))
  1523. continue;
  1524. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  1525. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) <= slots.Count && CheckCarrierCanPickFromStocker(ModuleName.CarrierRobot) && fims.Unload(pj.IsN2PurgeMode, "Charging"))
  1526. {
  1527. return;
  1528. }
  1529. }
  1530. }
  1531. }
  1532. else if (pj.ProcessingState == EnumProcessingState.Discharging)
  1533. {
  1534. //先判断满片的情况,满片的先unload
  1535. foreach (var st in _lstFIMSs)
  1536. {
  1537. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1538. continue;
  1539. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1540. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1541. if (carrier != null)
  1542. {
  1543. if (!CheckCarrierHasEmptySlot(st.Module) && _waferRobot.IsAvailable && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Discharging"))
  1544. {
  1545. return;
  1546. }
  1547. }
  1548. }
  1549. foreach (var st in _lstFIMSs)
  1550. {
  1551. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1552. continue;
  1553. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1554. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1555. if (carrier != null)
  1556. {
  1557. if (CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && _waferRobot.IsAvailable && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Discharging"))
  1558. {
  1559. return;
  1560. }
  1561. }
  1562. }
  1563. }
  1564. }
  1565. private void MonitorWaferRobotPMTask()
  1566. {
  1567. if (!_waferRobot.IsAvailable)
  1568. return;
  1569. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  1570. if (pmModule == null)
  1571. return;
  1572. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1573. if (pj == null || pj.IsEmptyLayout)
  1574. return;
  1575. //place
  1576. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1577. List<int> slots = GetWaferSlots(wafer.WaferType);
  1578. if (!_logTrigDic.ContainsKey("GetWaferSlots(wafer.WaferType)"))
  1579. _logTrigDic.Add("GetWaferSlots(wafer.WaferType)", new R_TRIG());
  1580. _logTrigDic["GetWaferSlots(wafer.WaferType)"].CLK = slots == null;
  1581. if (_logTrigDic["GetWaferSlots(wafer.WaferType)"].Q)
  1582. LOG.Write($"GetWaferSlots(wafer.WaferType) is null");
  1583. if (pj.ProcessingState == EnumProcessingState.Charging &&
  1584. wafer != null && !wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Idle &&
  1585. slots != null)
  1586. {
  1587. Hand placeBlade = Hand.Blade1;
  1588. int placeSlot = -1;
  1589. for (int i = 0; i < slots.Count; i++)
  1590. {
  1591. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1592. continue;
  1593. placeSlot = slots[i];
  1594. placeBlade = Hand.Blade1;
  1595. break;
  1596. }
  1597. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
  1598. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
  1599. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
  1600. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  1601. {
  1602. //check PM
  1603. for (int i = 0; i < slots.Count; i++)
  1604. {
  1605. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1606. continue;
  1607. placeSlot = slots[i];
  1608. if (i + 4 < slots.Count && Math.Abs(slots[i] - slots[i + 4]) == 4)
  1609. {
  1610. if (WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 1]) &&
  1611. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 2]) &&
  1612. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 3]) &&
  1613. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 4]))
  1614. {
  1615. placeBlade = Hand.Both;
  1616. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  1617. placeSlot = slots[i + 4];
  1618. }
  1619. }
  1620. break;
  1621. }
  1622. }
  1623. if (pmModule.CheckReadyForTransfer(_waferRobot.Module, placeBlade, placeSlot, EnumTransferType.Place, out string reason) &&
  1624. placeSlot != -1 && _waferRobot.Place(_pm1.Module, placeSlot, placeBlade))
  1625. {
  1626. _pm1.WaitTransfer(ModuleName.WaferRobot);
  1627. return;
  1628. }
  1629. }
  1630. if (!_waferRobot.IsAvailable)
  1631. return;
  1632. //pick
  1633. List<int> targetWaferSlots = GetWaferSlots();
  1634. if (!_logTrigDic.ContainsKey("GetWaferSlots()"))
  1635. _logTrigDic.Add("GetWaferSlots()", new R_TRIG());
  1636. _logTrigDic["GetWaferSlots()"].CLK = targetWaferSlots == null;
  1637. if (_logTrigDic["GetWaferSlots()"].Q)
  1638. LOG.Write($"GetWaferSlots() is null");
  1639. if (pj.ProcessingState == EnumProcessingState.Discharging &&
  1640. wafer != null && wafer.IsEmpty && targetWaferSlots != null)
  1641. {
  1642. Hand pickBlade = Hand.Blade1;
  1643. int pickSlot = -1;
  1644. var isEnableDummyWaferDischarge = SC.GetValue<bool>("System.IsEnableDummyWaferDischarge");
  1645. //check PM
  1646. for (int i = 0; i < targetWaferSlots.Count; i++)
  1647. {
  1648. var targetWafer = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i]);
  1649. if (targetWafer == null || targetWafer.IsEmpty || (targetWafer.ProcessState != EnumWaferProcessStatus.Completed &&
  1650. targetWafer.ProcessState != EnumWaferProcessStatus.Abort &&
  1651. targetWafer.ProcessState != EnumWaferProcessStatus.Failed))
  1652. continue;
  1653. if (!isEnableDummyWaferDischarge && (targetWafer.WaferType == WaferType.SD || targetWafer.WaferType == WaferType.ED))
  1654. continue;
  1655. pickSlot = targetWaferSlots[i];
  1656. if (i + 4 < targetWaferSlots.Count && Math.Abs(targetWaferSlots[i] - targetWaferSlots[i + 4]) == 4)
  1657. {
  1658. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 1]) &&
  1659. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 2]) &&
  1660. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 3]) &&
  1661. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 4]) &&
  1662. SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
  1663. {
  1664. bool isFromTopToBottom = SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom";
  1665. var wafer0 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 4 : 0)]);
  1666. var wafer1 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 3 : 1)]);
  1667. var wafer2 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + 2]);
  1668. var wafer3 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 1 : 3)]);
  1669. var wafer4 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 0 : 4)]);
  1670. if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
  1671. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
  1672. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
  1673. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4) &&
  1674. wafer0.OriginStation == wafer1.OriginStation &&
  1675. wafer0.OriginStation == wafer2.OriginStation &&
  1676. wafer0.OriginStation == wafer3.OriginStation &&
  1677. wafer0.OriginStation == wafer4.OriginStation &&
  1678. Math.Abs(wafer1.OriginSlot - wafer2.OriginSlot) == 1 &&
  1679. Math.Abs(wafer2.OriginSlot - wafer3.OriginSlot) == 1 &&
  1680. Math.Abs(wafer0.OriginSlot - wafer4.OriginSlot) == 4 &&
  1681. Math.Abs(wafer0.OriginSlot - wafer3.OriginSlot) == 3 &&
  1682. Math.Abs(wafer0.OriginSlot - wafer2.OriginSlot) == 2 &&
  1683. Math.Abs(wafer0.OriginSlot - wafer1.OriginSlot) == 1)
  1684. {
  1685. pickBlade = Hand.Both;
  1686. pickSlot = wafer4.Slot;
  1687. }
  1688. }
  1689. }
  1690. break;
  1691. }
  1692. if (pmModule.CheckReadyForTransfer(_waferRobot.Module, pickBlade, pickSlot, EnumTransferType.Pick, out string reason) &&
  1693. pickSlot != -1 && _waferRobot.Pick(_pm1.Module, pickSlot, pickBlade))
  1694. {
  1695. _pm1.WaitTransfer(ModuleName.WaferRobot);
  1696. }
  1697. }
  1698. }
  1699. private void MonitorWaferRobotFIMSTask()
  1700. {
  1701. if (!_waferRobot.IsAvailable)
  1702. return;
  1703. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1704. if (pj == null || pj.IsEmptyLayout)
  1705. return;
  1706. //pick
  1707. if (pj.ProcessingState == EnumProcessingState.Charging &&
  1708. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2))
  1709. {
  1710. SchedulerFIMS fims = null;
  1711. List<int> slots = null;
  1712. WaferType waferType = WaferType.None;
  1713. ModuleName currentFims = GetCurrentTransferFims();
  1714. foreach (var st in _lstFIMSs)
  1715. {
  1716. if (!st.IsAvailable)
  1717. continue;
  1718. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1719. continue;
  1720. // check FIMS
  1721. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1722. if (!fimsDevice.IsLoadCompleted)
  1723. continue;
  1724. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1725. if (carrier != null && !carrier.IsEmpty)
  1726. {
  1727. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  1728. bool hasWafer = false;
  1729. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1730. if (wafers != null && stockerInfo != null)
  1731. {
  1732. foreach (var wafer in wafers)
  1733. {
  1734. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  1735. continue;
  1736. if (!wafer.IsEmpty && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  1737. {
  1738. hasWafer = true;
  1739. break;
  1740. }
  1741. }
  1742. }
  1743. if (!hasWafer)
  1744. continue;
  1745. if (currentFims != ModuleName.System && currentFims != st.Module)
  1746. continue;
  1747. GetWaferSlotsAndWaferType(carrier, out slots, out waferType);
  1748. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) < slots.Count)
  1749. {
  1750. fims = st;
  1751. break;
  1752. }
  1753. }
  1754. }
  1755. if (fims != null && slots != null)
  1756. {
  1757. Hand pickBlade = Hand.Blade1;
  1758. int pickSlot = -1;
  1759. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  1760. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  1761. if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
  1762. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
  1763. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
  1764. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4))
  1765. {
  1766. //check PM
  1767. for (int i = 0; i < slots.Count; i++)
  1768. {
  1769. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1770. continue;
  1771. if (i + 4 < slots.Count && Math.Abs(slots[i] - slots[i + 4]) == 4)
  1772. {
  1773. if (WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 1]) &&
  1774. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 2]) &&
  1775. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 3]) &&
  1776. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 4]) &&
  1777. SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
  1778. {
  1779. pickBlade = Hand.Both;
  1780. break;
  1781. }
  1782. }
  1783. break;
  1784. }
  1785. //check cassette
  1786. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  1787. if (waferType == WaferType.SD)
  1788. dummyWafers = _sideDummyWafers;
  1789. else if (waferType == WaferType.ED)
  1790. dummyWafers = _extraDummyWafers;
  1791. var wafers = WaferManager.Instance.GetWafers(fims.Module).ToList();
  1792. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1793. wafers.Reverse();
  1794. if (wafers != null)
  1795. {
  1796. for (int i = 0; i < wafers.Count; i++)
  1797. {
  1798. if (wafers[i] == null || wafers[i].IsEmpty || wafers[i].ProcessState != EnumWaferProcessStatus.Idle)
  1799. continue;
  1800. if ((wafers[i].WaferType == WaferType.SD || wafers[i].WaferType == WaferType.ED) && !dummyWafers.ContainsKey(wafers[i].InnerId.ToString()))
  1801. continue;
  1802. if (stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == i))
  1803. continue;
  1804. pickSlot = wafers[i].OriginSlot;
  1805. if (pickBlade == Hand.Both)
  1806. {
  1807. if (i < SC.GetValue<int>("System.CassetteSlotCount") - 4)
  1808. {
  1809. if (waferType == WaferType.SD || waferType == WaferType.ED)
  1810. {
  1811. if (!wafers[i + 1].IsEmpty && !wafers[i + 2].IsEmpty && !wafers[i + 3].IsEmpty && !wafers[i + 4].IsEmpty &&
  1812. wafers[i + 1].ProcessState == EnumWaferProcessStatus.Idle &&
  1813. wafers[i + 2].ProcessState == EnumWaferProcessStatus.Idle &&
  1814. wafers[i + 3].ProcessState == EnumWaferProcessStatus.Idle &&
  1815. wafers[i + 4].ProcessState == EnumWaferProcessStatus.Idle &&
  1816. (!stockerInfo.Item3.Any() || (stockerInfo.Item3.Any(x => x == i + 1) && stockerInfo.Item3.Any(x => x == i + 2) && stockerInfo.Item3.Any(x => x == i + 3) && stockerInfo.Item3.Any(x => x == i + 4))) &&
  1817. dummyWafers.ContainsKey(wafers[i + 1].InnerId.ToString()) && dummyWafers.ContainsKey(wafers[i + 2].InnerId.ToString()) &&
  1818. dummyWafers.ContainsKey(wafers[i + 3].InnerId.ToString()) && dummyWafers.ContainsKey(wafers[i + 4].InnerId.ToString()))
  1819. {
  1820. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1821. pickSlot = wafers[i + 4].OriginSlot;
  1822. break;
  1823. }
  1824. else
  1825. {
  1826. pickBlade = Hand.Blade1;
  1827. break;
  1828. }
  1829. }
  1830. else
  1831. {
  1832. if (!wafers[i + 1].IsEmpty && !wafers[i + 2].IsEmpty && !wafers[i + 3].IsEmpty && !wafers[i + 4].IsEmpty &&
  1833. wafers[i + 1].ProcessState == EnumWaferProcessStatus.Idle &&
  1834. wafers[i + 2].ProcessState == EnumWaferProcessStatus.Idle &&
  1835. wafers[i + 3].ProcessState == EnumWaferProcessStatus.Idle &&
  1836. wafers[i + 4].ProcessState == EnumWaferProcessStatus.Idle &&
  1837. (!stockerInfo.Item3.Any() || (stockerInfo.Item3.Any(x => x == i + 1) && stockerInfo.Item3.Any(x => x == i + 2) && stockerInfo.Item3.Any(x => x == i + 3) && stockerInfo.Item3.Any(x => x == i + 4))))
  1838. {
  1839. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1840. pickSlot = wafers[i + 4].OriginSlot;
  1841. break;
  1842. }
  1843. else
  1844. {
  1845. pickBlade = Hand.Blade1;
  1846. break;
  1847. }
  1848. }
  1849. }
  1850. else
  1851. {
  1852. pickBlade = Hand.Blade1;
  1853. break;
  1854. }
  1855. }
  1856. else
  1857. {
  1858. pickBlade = Hand.Blade1;
  1859. break;
  1860. }
  1861. }
  1862. }
  1863. }
  1864. if (SC.GetValue<bool>($"System.IsEnableFIMSChargeMapping"))
  1865. {
  1866. if (carrier != null && !carrier.IsEmpty && carrier.IsMapped && carrier.IsMapOK &&
  1867. pickSlot != -1 && _pm1.IsAvailable && _waferRobot.Pick(fims.Module, pickSlot, pickBlade))
  1868. {
  1869. fims.WaitTransfer(ModuleName.WaferRobot);
  1870. return;
  1871. }
  1872. }
  1873. else
  1874. {
  1875. if (pickSlot != -1 && _waferRobot.Pick(fims.Module, pickSlot, pickBlade))
  1876. {
  1877. fims.WaitTransfer(ModuleName.WaferRobot);
  1878. }
  1879. }
  1880. }
  1881. }
  1882. if (!_waferRobot.IsAvailable)
  1883. return;
  1884. // mapping
  1885. if (pj.ProcessingState == EnumProcessingState.Charging && SC.GetValue<bool>($"System.IsEnableFIMSChargeMapping") &&
  1886. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2) && WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1))
  1887. {
  1888. foreach (var fims in _lstFIMSs)
  1889. {
  1890. if (!fims.IsAvailable)
  1891. continue;
  1892. if (!CarrierManager.Instance.CheckHasCarrier(fims.Module.ToString(), 0))
  1893. continue;
  1894. // check FIMS
  1895. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{fims.Module}");
  1896. if (!fimsDevice.IsLoadCompleted)
  1897. continue;
  1898. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  1899. if (carrier == null || carrier.IsEmpty || carrier.IsMapped)
  1900. continue;
  1901. var mappingSlot = GetMappingSlot(fims.Module);
  1902. if (_waferRobot.Map(fims.Module, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  1903. {
  1904. fims.WaitTransfer(ModuleName.WaferRobot);
  1905. return;
  1906. }
  1907. }
  1908. }
  1909. if (!_waferRobot.IsAvailable)
  1910. return;
  1911. //place
  1912. var robotWafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1913. if (pj.ProcessingState == EnumProcessingState.Discharging &&
  1914. robotWafer != null && !robotWafer.IsEmpty && (robotWafer.ProcessState == EnumWaferProcessStatus.Completed ||
  1915. robotWafer.ProcessState == EnumWaferProcessStatus.Abort ||
  1916. robotWafer.ProcessState == EnumWaferProcessStatus.Failed))
  1917. {
  1918. SchedulerFIMS fims = null;
  1919. var waferInRobot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1920. foreach (var st in _lstFIMSs)
  1921. {
  1922. if (!st.IsAvailable)
  1923. continue;
  1924. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1925. continue;
  1926. // check FIMS
  1927. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1928. if (!fimsDevice.IsLoadCompleted)
  1929. continue;
  1930. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1931. if (carrier == null || carrier.IsEmpty)
  1932. continue;
  1933. if ((ModuleName)waferInRobot.OriginStation != carrier.InternalModuleName)
  1934. continue;
  1935. bool hasEmptySlot = false;
  1936. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1937. if (wafers != null)
  1938. {
  1939. foreach (var wafer in wafers)
  1940. {
  1941. if (wafer == null)
  1942. continue;
  1943. if (wafer.IsEmpty)
  1944. {
  1945. hasEmptySlot = true;
  1946. break;
  1947. }
  1948. }
  1949. }
  1950. if (hasEmptySlot)
  1951. {
  1952. fims = st;
  1953. break;
  1954. }
  1955. }
  1956. if (fims != null)
  1957. {
  1958. Hand placeBlade = Hand.Blade1;
  1959. int placeSlot = waferInRobot.OriginSlot;
  1960. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
  1961. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
  1962. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
  1963. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4) &&
  1964. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation &&
  1965. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation &&
  1966. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation &&
  1967. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation)
  1968. {
  1969. var tempPlaceSlot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginSlot;
  1970. if (tempPlaceSlot + 4 < SC.GetValue<int>("System.CassetteSlotCount"))
  1971. {
  1972. if (WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 1) &&
  1973. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 2) &&
  1974. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 3) &&
  1975. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 4))
  1976. {
  1977. placeBlade = Hand.Both;
  1978. placeSlot = tempPlaceSlot;
  1979. }
  1980. }
  1981. }
  1982. if (placeSlot != -1 && _waferRobot.Place(fims.Module, placeSlot, placeBlade))
  1983. {
  1984. fims.WaitTransfer(ModuleName.WaferRobot);
  1985. }
  1986. }
  1987. }
  1988. }
  1989. private bool CheckWaferSlotsHasWafer(List<int> slots)
  1990. {
  1991. foreach (var slot in slots)
  1992. {
  1993. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
  1994. {
  1995. return true;
  1996. }
  1997. }
  1998. return false;
  1999. }
  2000. private List<int> GetWaferSlots()
  2001. {
  2002. List<int> slots = null;
  2003. switch (SC.GetStringValue("System.ChargingOrderBySort"))
  2004. {
  2005. case "ED,P,M":
  2006. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2007. return _monitor1Slots;
  2008. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2009. return _monitor2Slots;
  2010. if (CheckWaferSlotsHasWafer(_productSlots))
  2011. return _productSlots;
  2012. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2013. return _extraDummySlots;
  2014. break;
  2015. case "ED,M,P":
  2016. if (CheckWaferSlotsHasWafer(_productSlots))
  2017. return _productSlots;
  2018. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2019. return _monitor1Slots;
  2020. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2021. return _monitor2Slots;
  2022. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2023. return _extraDummySlots;
  2024. break;
  2025. case "P,ED,M":
  2026. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2027. return _monitor1Slots;
  2028. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2029. return _monitor2Slots;
  2030. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2031. return _extraDummySlots;
  2032. if (CheckWaferSlotsHasWafer(_productSlots))
  2033. return _productSlots;
  2034. break;
  2035. case "P,M,ED":
  2036. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2037. return _extraDummySlots;
  2038. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2039. return _monitor1Slots;
  2040. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2041. return _monitor2Slots;
  2042. if (CheckWaferSlotsHasWafer(_productSlots))
  2043. return _productSlots;
  2044. break;
  2045. case "M,P,ED":
  2046. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2047. return _extraDummySlots;
  2048. if (CheckWaferSlotsHasWafer(_productSlots))
  2049. return _productSlots;
  2050. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2051. return _monitor1Slots;
  2052. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2053. return _monitor2Slots;
  2054. break;
  2055. case "M,ED,P":
  2056. if (CheckWaferSlotsHasWafer(_productSlots))
  2057. return _productSlots;
  2058. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2059. return _extraDummySlots;
  2060. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2061. return _monitor1Slots;
  2062. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2063. return _monitor2Slots;
  2064. break;
  2065. default:
  2066. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2067. return _monitor1Slots;
  2068. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2069. return _monitor2Slots;
  2070. if (CheckWaferSlotsHasWafer(_productSlots))
  2071. return _productSlots;
  2072. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2073. return _extraDummySlots;
  2074. break;
  2075. }
  2076. foreach (var slot in _sideDummySlots)
  2077. {
  2078. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
  2079. {
  2080. return _sideDummySlots;
  2081. }
  2082. }
  2083. return slots;
  2084. }
  2085. private bool CheckCarrierHasWaferInPM(ModuleName module)
  2086. {
  2087. bool isHaveWafer = false;
  2088. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2089. {
  2090. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  2091. continue;
  2092. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2093. if (wafer == null || wafer.IsEmpty)
  2094. continue;
  2095. if (wafer.OriginStation == (int)module)
  2096. {
  2097. isHaveWafer = true;
  2098. break;
  2099. }
  2100. }
  2101. return isHaveWafer;
  2102. }
  2103. private void DischargingOrderBySort(string order)
  2104. {
  2105. switch (order)
  2106. {
  2107. case "ED,P,M":
  2108. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2109. if (!_carrierRobot.IsAvailable)
  2110. return;
  2111. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2112. if (!_carrierRobot.IsAvailable)
  2113. return;
  2114. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2115. if (!_carrierRobot.IsAvailable)
  2116. return;
  2117. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2118. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2119. break;
  2120. case "ED,M,P":
  2121. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2122. if (!_carrierRobot.IsAvailable)
  2123. return;
  2124. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2125. if (!_carrierRobot.IsAvailable)
  2126. return;
  2127. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2128. if (!_carrierRobot.IsAvailable)
  2129. return;
  2130. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2131. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2132. break;
  2133. case "P,ED,M":
  2134. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2135. if (!_carrierRobot.IsAvailable)
  2136. return;
  2137. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2138. if (!_carrierRobot.IsAvailable)
  2139. return;
  2140. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2141. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2142. if (!_carrierRobot.IsAvailable)
  2143. return;
  2144. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2145. break;
  2146. case "P,M,ED":
  2147. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2148. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2149. if (!_carrierRobot.IsAvailable)
  2150. return;
  2151. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2152. if (!_carrierRobot.IsAvailable)
  2153. return;
  2154. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2155. if (!_carrierRobot.IsAvailable)
  2156. return;
  2157. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2158. break;
  2159. case "M,P,ED":
  2160. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2161. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2162. if (!_carrierRobot.IsAvailable)
  2163. return;
  2164. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2165. if (!_carrierRobot.IsAvailable)
  2166. return;
  2167. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2168. if (!_carrierRobot.IsAvailable)
  2169. return;
  2170. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2171. if (!_carrierRobot.IsAvailable)
  2172. return;
  2173. break;
  2174. case "M,ED,P":
  2175. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2176. if (!_carrierRobot.IsAvailable)
  2177. return;
  2178. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2179. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2180. if (!_carrierRobot.IsAvailable)
  2181. return;
  2182. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2183. if (!_carrierRobot.IsAvailable)
  2184. return;
  2185. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2186. if (!_carrierRobot.IsAvailable)
  2187. return;
  2188. break;
  2189. default:
  2190. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2191. if (!_carrierRobot.IsAvailable)
  2192. return;
  2193. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2194. if (!_carrierRobot.IsAvailable)
  2195. return;
  2196. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2197. if (!_carrierRobot.IsAvailable)
  2198. return;
  2199. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2200. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2201. break;
  2202. }
  2203. }
  2204. private void ChargingOrderBySort(ProcessJobInfo pj, string order)
  2205. {
  2206. List<SchedulerStocker> pjStocker = new List<SchedulerStocker>();
  2207. foreach (var s in pj.Stockers)
  2208. {
  2209. var module = GetModule(s.Item1) as SchedulerStocker;
  2210. if (module != null)
  2211. pjStocker.Add(module);
  2212. }
  2213. switch (order)
  2214. {
  2215. case "ED,P,M":
  2216. if (pj.IsNeedChargeDummyWafer)
  2217. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2218. if (!_carrierRobot.IsAvailable)
  2219. return;
  2220. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2221. if (!_carrierRobot.IsAvailable)
  2222. return;
  2223. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2224. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2225. break;
  2226. case "ED,M,P":
  2227. if (pj.IsNeedChargeDummyWafer)
  2228. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2229. if (!_carrierRobot.IsAvailable)
  2230. return;
  2231. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2232. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2233. if (!_carrierRobot.IsAvailable)
  2234. return;
  2235. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2236. break;
  2237. case "P,ED,M":
  2238. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2239. if (!_carrierRobot.IsAvailable)
  2240. return;
  2241. if (pj.IsNeedChargeDummyWafer)
  2242. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2243. if (!_carrierRobot.IsAvailable)
  2244. return;
  2245. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2246. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2247. break;
  2248. case "P,M,ED":
  2249. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2250. if (!_carrierRobot.IsAvailable)
  2251. return;
  2252. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2253. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2254. if (!_carrierRobot.IsAvailable)
  2255. return;
  2256. if (pj.IsNeedChargeDummyWafer)
  2257. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2258. break;
  2259. case "M,P,ED":
  2260. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2261. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2262. if (!_carrierRobot.IsAvailable)
  2263. return;
  2264. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2265. if (!_carrierRobot.IsAvailable)
  2266. return;
  2267. if (pj.IsNeedChargeDummyWafer)
  2268. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2269. break;
  2270. case "M,ED,P":
  2271. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2272. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2273. if (!_carrierRobot.IsAvailable)
  2274. return;
  2275. if (pj.IsNeedChargeDummyWafer)
  2276. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2277. if (!_carrierRobot.IsAvailable)
  2278. return;
  2279. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2280. break;
  2281. default:
  2282. if (pj.IsNeedChargeDummyWafer)
  2283. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2284. if (!_carrierRobot.IsAvailable)
  2285. return;
  2286. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2287. if (!_carrierRobot.IsAvailable)
  2288. return;
  2289. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2290. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2291. break;
  2292. }
  2293. }
  2294. private void MonitorCassetteRobotStockerTaskInDischarge(List<SchedulerStocker> targetStockers, WaferType targetWaferType, List<int> waferSlots)
  2295. {
  2296. if (!_carrierRobot.IsAvailable)
  2297. return;
  2298. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  2299. //pick
  2300. if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && waferSlots.Count > 0)
  2301. {
  2302. bool needPickSdCassette = false;
  2303. int sdWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType, true);
  2304. needPickSdCassette = sdWaferCount > 0;
  2305. var sdStockerModule = GetModuleNameForNextWafer(targetWaferType);
  2306. if (needPickSdCassette && sdStockerModule != ModuleName.System)
  2307. {
  2308. SchedulerStocker sdStocker = null;
  2309. foreach (var sd in targetStockers)
  2310. {
  2311. if (!CarrierManager.Instance.CheckHasCarrier(sd.Module, 0) ||
  2312. CarrierManager.Instance.GetCarrier(sd.Module, 0).CarrierType != targetCarrierType)
  2313. continue;
  2314. if (sd.Module == sdStockerModule &&
  2315. CheckCarrierHasEmptySlot(sd.Module))
  2316. {
  2317. sdStocker = sd;
  2318. break;
  2319. }
  2320. }
  2321. SchedulerFIMS fims = null;
  2322. foreach (var st in _lstFIMSs)
  2323. {
  2324. if (!st.IsAvailable)
  2325. continue;
  2326. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  2327. {
  2328. fims = st;
  2329. break;
  2330. }
  2331. }
  2332. if (sdStocker != null && fims != null)
  2333. {
  2334. if (_carrierRobot.Pick(sdStocker.Module, 0, Hand.Blade1))
  2335. {
  2336. sdStocker.WaitTransfer(ModuleName.CarrierRobot);
  2337. return;
  2338. }
  2339. }
  2340. }
  2341. }
  2342. if (!_carrierRobot.IsAvailable)
  2343. return;
  2344. //place
  2345. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2346. if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  2347. {
  2348. if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName) || !CheckCarrierHasEmptySlot(ModuleName.CarrierRobot))
  2349. {
  2350. SchedulerStocker sdStocker = null;
  2351. foreach (var sd in targetStockers)
  2352. {
  2353. if (CarrierManager.Instance.CheckNoCarrier(sd.Module, 0) && sd.Module == carrier.InternalModuleName)
  2354. {
  2355. sdStocker = sd;
  2356. break;
  2357. }
  2358. }
  2359. if (sdStocker != null)
  2360. {
  2361. var canPlace = true;
  2362. var transfer = Singleton<EquipmentManager>.Instance.GetTransferJobStockers();
  2363. if (transfer != null && transfer.Any(x => x.Stocker == carrier.InternalModuleName))
  2364. canPlace = false;
  2365. if (canPlace && _carrierRobot.Place(sdStocker.Module, 0, Hand.Blade1))
  2366. {
  2367. sdStocker.WaitTransfer(ModuleName.CarrierRobot);
  2368. return;
  2369. }
  2370. }
  2371. }
  2372. }
  2373. }
  2374. private bool CheckCarrierCanPickFromFIMSInDischarge(ModuleName fimsCarrierModule)
  2375. {
  2376. List<ModuleName> robotModules = new List<ModuleName>();
  2377. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  2378. {
  2379. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  2380. if (wafer == null || wafer.IsEmpty)
  2381. continue;
  2382. if (!robotModules.Contains((ModuleName)wafer.OriginStation))
  2383. robotModules.Add((ModuleName)wafer.OriginStation);
  2384. }
  2385. if (robotModules.Contains(fimsCarrierModule))
  2386. return false;
  2387. List<ModuleName> pmModules = new List<ModuleName>();
  2388. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2389. {
  2390. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2391. if (wafer == null || wafer.IsEmpty)
  2392. continue;
  2393. if (!pmModules.Contains((ModuleName)wafer.OriginStation))
  2394. pmModules.Add((ModuleName)wafer.OriginStation);
  2395. }
  2396. if (pmModules.Contains(fimsCarrierModule))
  2397. return false;
  2398. return true;
  2399. }
  2400. private ModuleName GetNextStockerRelatedToWaferRobot()
  2401. {
  2402. List<ModuleName> fimsModules = new List<ModuleName>();
  2403. foreach (var fims in _lstFIMSs)
  2404. {
  2405. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  2406. continue;
  2407. fimsModules.Add(CarrierManager.Instance.GetCarrier(fims.Module, 0).InternalModuleName);
  2408. }
  2409. List<ModuleName> robotModules = new List<ModuleName>();
  2410. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  2411. {
  2412. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  2413. if (wafer == null || wafer.IsEmpty)
  2414. continue;
  2415. if (!robotModules.Contains((ModuleName)wafer.OriginStation))
  2416. robotModules.Add((ModuleName)wafer.OriginStation);
  2417. }
  2418. if (robotModules.Count > 0)
  2419. {
  2420. foreach (var module in robotModules)
  2421. {
  2422. if (!fimsModules.Any(x => x == module))
  2423. return module;
  2424. }
  2425. }
  2426. List<ModuleName> pmModules = new List<ModuleName>();
  2427. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2428. {
  2429. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2430. if (wafer == null || wafer.IsEmpty)
  2431. continue;
  2432. if (!pmModules.Contains((ModuleName)wafer.OriginStation))
  2433. pmModules.Add((ModuleName)wafer.OriginStation);
  2434. if (pmModules.Count == _lstFIMSs.Count)
  2435. break;
  2436. }
  2437. if (pmModules.Count > 0)
  2438. {
  2439. foreach (var module in pmModules)
  2440. {
  2441. if (!fimsModules.Any(x => x == module))
  2442. return module;
  2443. }
  2444. }
  2445. return ModuleName.System;
  2446. }
  2447. private void MonitorCassetteRobotPlaceStockerTask()
  2448. {
  2449. if (!_carrierRobot.IsAvailable)
  2450. return;
  2451. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2452. if (pj == null)
  2453. return;
  2454. //place
  2455. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2456. if (carrier != null && !carrier.IsEmpty && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()))
  2457. {
  2458. var target = pj.Stockers.Find(x => x.Item1 == carrier.InternalModuleName.ToString());
  2459. if (target != null && CarrierManager.Instance.CheckNoCarrier(target.Item1, 0))
  2460. {
  2461. if (_carrierRobot.Place(ModuleHelper.Converter(target.Item1), 0, Hand.Blade1))
  2462. {
  2463. GetModule(target.Item1).WaitTransfer(ModuleName.CarrierRobot);
  2464. return;
  2465. }
  2466. }
  2467. }
  2468. }
  2469. private void MonitorCassetteRobotStockerTask(List<SchedulerStocker> targetStockers, WaferType targetWaferType)
  2470. {
  2471. if (!_carrierRobot.IsAvailable)
  2472. return;
  2473. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2474. if (pj == null || pj.IsEmptyLayout)
  2475. return;
  2476. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2477. var targetSlots = GetWaferSlots(targetWaferType);
  2478. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  2479. if (targetSlots == null)
  2480. return;
  2481. //pick
  2482. if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && targetSlots.Count > 0)
  2483. {
  2484. bool needPickTargetCassette = false;
  2485. int targetWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType);
  2486. if (targetWaferCount < targetSlots.Count)
  2487. needPickTargetCassette = true;
  2488. if (needPickTargetCassette)
  2489. {
  2490. SchedulerStocker targetStocker = null;
  2491. foreach (var target in targetStockers)
  2492. {
  2493. if (CarrierManager.Instance.CheckHasCarrier(target.Module, 0) && !CheckCarrierHasNoWafer(target.Module, targetWaferType) &&
  2494. CarrierManager.Instance.GetCarrier(target.Module).CarrierType == targetCarrierType)
  2495. {
  2496. if (pj.ProcessingState == EnumProcessingState.Charging)
  2497. {
  2498. carrier = CarrierManager.Instance.GetCarrier(target.Module);
  2499. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2500. var wafers = WaferManager.Instance.GetWafers(target.Module);
  2501. if (wafers != null && stockerInfo != null)
  2502. {
  2503. foreach (var wafer in wafers)
  2504. {
  2505. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2506. continue;
  2507. if (!wafer.IsEmpty && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  2508. {
  2509. targetStocker = target;
  2510. break;
  2511. }
  2512. }
  2513. if (targetStocker != null)
  2514. break;
  2515. }
  2516. }
  2517. else
  2518. {
  2519. targetStocker = target;
  2520. break;
  2521. }
  2522. }
  2523. }
  2524. SchedulerFIMS fims = null;
  2525. foreach (var st in _lstFIMSs)
  2526. {
  2527. if (!st.IsAvailable)
  2528. continue;
  2529. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  2530. {
  2531. fims = st;
  2532. break;
  2533. }
  2534. }
  2535. if (targetStocker != null && fims != null)
  2536. {
  2537. switch (targetCarrierType.ToString())
  2538. {
  2539. case "SD":
  2540. _lstPlaceSideDummyStocker.Add(targetStocker);
  2541. break;
  2542. case "ED":
  2543. _lstPlaceExtraDummyStockers.Add(targetStocker);
  2544. break;
  2545. case "P":
  2546. _lstPlaceCurrentBatchStocker.Add(targetStocker);
  2547. break;
  2548. case "M1":
  2549. _lstPlaceMonitor1Stocker.Add(targetStocker);
  2550. break;
  2551. case "M2":
  2552. _lstPlaceMonitor2Stocker.Add(targetStocker);
  2553. break;
  2554. }
  2555. if (_carrierRobot.Pick(targetStocker.Module, 0, Hand.Blade1))
  2556. {
  2557. targetStocker.WaitTransfer(ModuleName.CarrierRobot);
  2558. return;
  2559. }
  2560. }
  2561. }
  2562. }
  2563. if (!_carrierRobot.IsAvailable)
  2564. return;
  2565. //place
  2566. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2567. if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  2568. {
  2569. var needPlace = false;
  2570. if (pj.ProcessingState == EnumProcessingState.Charging)
  2571. {
  2572. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2573. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  2574. if (wafers != null && stockerInfo != null)
  2575. {
  2576. foreach (var wafer in wafers)
  2577. {
  2578. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2579. continue;
  2580. if (stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2581. {
  2582. needPlace = true;
  2583. break;
  2584. }
  2585. }
  2586. }
  2587. }
  2588. if (GetWaferCountRelatedToWaferRobot(targetWaferType) >= targetSlots.Count || CheckCarrierHasNoWafer(ModuleName.CarrierRobot, targetWaferType) || needPlace)
  2589. {
  2590. switch (targetCarrierType.ToString())
  2591. {
  2592. case "SD":
  2593. targetStockers = _lstPlaceSideDummyStocker;
  2594. break;
  2595. case "ED":
  2596. targetStockers = _lstPlaceExtraDummyStockers;
  2597. break;
  2598. case "P":
  2599. targetStockers = _lstPlaceCurrentBatchStocker;
  2600. break;
  2601. case "M1":
  2602. targetStockers = _lstPlaceMonitor1Stocker;
  2603. break;
  2604. case "M2":
  2605. targetStockers = _lstPlaceMonitor2Stocker;
  2606. break;
  2607. }
  2608. SchedulerStocker targetStocker = null;
  2609. foreach (var target in targetStockers)
  2610. {
  2611. if (CarrierManager.Instance.CheckNoCarrier(target.Module, 0) && carrier.InternalModuleName == target.Module)
  2612. {
  2613. if (pj.ProcessingState == EnumProcessingState.Charging)
  2614. {
  2615. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2616. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  2617. if (wafers != null && stockerInfo != null)
  2618. {
  2619. var hasWafer = false;
  2620. foreach (var wafer in wafers)
  2621. {
  2622. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2623. continue;
  2624. if (stockerInfo.Item3.Any() && stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2625. {
  2626. hasWafer = true;
  2627. break;
  2628. }
  2629. }
  2630. if (!hasWafer)
  2631. {
  2632. targetStocker = target;
  2633. break;
  2634. }
  2635. }
  2636. }
  2637. else
  2638. {
  2639. targetStocker = target;
  2640. break;
  2641. }
  2642. }
  2643. }
  2644. if (targetStocker != null)
  2645. {
  2646. if (_carrierRobot.Place(targetStocker.Module, 0, Hand.Blade1))
  2647. {
  2648. targetStocker.WaitTransfer(ModuleName.CarrierRobot);
  2649. return;
  2650. }
  2651. }
  2652. }
  2653. }
  2654. }
  2655. private bool CheckCarrierCanPickFromStocker(ModuleName currentModule)
  2656. {
  2657. var currentWafers = WaferManager.Instance.GetWafers(currentModule);
  2658. if (currentWafers != null && !currentWafers.Any(x => !x.IsEmpty))
  2659. {
  2660. //空盒子
  2661. return false;
  2662. }
  2663. var carrierType = CarrierManager.Instance.GetCarrier(currentModule, 0).CarrierType;
  2664. var ret = CheckHasPWafer();
  2665. var waferTypeSlots = GetWaferTypeSlots();
  2666. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2667. {
  2668. Dictionary<WaferType, int> nextWaferTypeDic = new Dictionary<WaferType, int>();
  2669. int startIndex = -1;
  2670. for (int i = 0; i < waferTypeSlots.Count; i++)
  2671. {
  2672. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2673. {
  2674. startIndex = i;
  2675. continue;
  2676. }
  2677. //P wafer不够的情况
  2678. if (waferTypeSlots[i].Item1 == WaferType.P)
  2679. {
  2680. if (!ret.Item1)
  2681. continue;
  2682. else
  2683. {
  2684. if (i - startIndex > ret.Item2)
  2685. continue;
  2686. }
  2687. }
  2688. if (!nextWaferTypeDic.ContainsKey(waferTypeSlots[i].Item1))
  2689. nextWaferTypeDic.Add(waferTypeSlots[i].Item1, 0);
  2690. nextWaferTypeDic[waferTypeSlots[i].Item1] += 1;
  2691. if (nextWaferTypeDic.Count == _lstFIMSs.Count)
  2692. break;
  2693. if (i - startIndex >= _lstFIMSs.Count * 25)
  2694. break;
  2695. }
  2696. Dictionary<WaferType, int> fimsWaferTypeDic = new Dictionary<WaferType, int>();
  2697. foreach (var fims in _lstFIMSs)
  2698. {
  2699. if (CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
  2700. {
  2701. for (int i = 0; i < WaferManager.Instance.GetWafers(fims.Module).Length; i++)
  2702. {
  2703. var wafer = WaferManager.Instance.GetWafer(fims.Module, i);
  2704. if (wafer == null || wafer.IsEmpty)
  2705. continue;
  2706. if (!fimsWaferTypeDic.ContainsKey(wafer.WaferType))
  2707. fimsWaferTypeDic.Add(wafer.WaferType, 0);
  2708. fimsWaferTypeDic[wafer.WaferType] += 1;
  2709. }
  2710. }
  2711. }
  2712. foreach (var type in nextWaferTypeDic.Keys)
  2713. {
  2714. if (carrierType.ToString() == type.ToString())
  2715. {
  2716. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2717. {
  2718. if (!fimsWaferTypeDic.ContainsKey(type) || nextWaferTypeDic[type] > fimsWaferTypeDic[type])
  2719. return true;
  2720. }
  2721. else if (type == WaferType.SD)
  2722. {
  2723. foreach (var wafer in currentWafers)
  2724. {
  2725. if (wafer.IsEmpty)
  2726. continue;
  2727. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2728. return true;
  2729. }
  2730. }
  2731. else if (type == WaferType.ED)
  2732. {
  2733. foreach (var wafer in currentWafers)
  2734. {
  2735. if (wafer.IsEmpty)
  2736. continue;
  2737. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2738. return true;
  2739. }
  2740. }
  2741. }
  2742. }
  2743. }
  2744. return false;
  2745. }
  2746. private bool CheckCarrierCanPickFromFIMS(ModuleName currentModule)
  2747. {
  2748. var fimsWafers = WaferManager.Instance.GetWafers(currentModule);
  2749. if (fimsWafers != null && !fimsWafers.Any(x => !x.IsEmpty))
  2750. {
  2751. //空盒子
  2752. return true;
  2753. }
  2754. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2755. if (pj == null)
  2756. return true;
  2757. var carrier = CarrierManager.Instance.GetCarrier(currentModule, 0);
  2758. var carrierType = carrier.CarrierType;
  2759. if (!pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()))
  2760. return true;
  2761. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2762. GetWaferSlotsAndWaferType(carrier, out var slots, out var waferType);
  2763. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  2764. if (waferType == WaferType.SD)
  2765. dummyWafers = _sideDummyWafers;
  2766. else if (waferType == WaferType.ED)
  2767. dummyWafers = _extraDummyWafers;
  2768. if (stockerInfo != null)
  2769. {
  2770. var hasWafer = false;
  2771. foreach (var wafer in fimsWafers)
  2772. {
  2773. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2774. continue;
  2775. if (stockerInfo.Item3.Any() && stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2776. {
  2777. hasWafer = true;
  2778. break;
  2779. }
  2780. if (!stockerInfo.Item3.Any())
  2781. {
  2782. if (slots != null && slots.Count > 0)
  2783. {
  2784. for (int i = 0; i < slots.Count; i++)
  2785. {
  2786. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slots[i]))
  2787. {
  2788. continue;
  2789. }
  2790. if ((wafer.WaferType == WaferType.SD || wafer.WaferType == WaferType.ED) && !dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2791. continue;
  2792. return false;
  2793. }
  2794. }
  2795. }
  2796. }
  2797. if (hasWafer)
  2798. return false;
  2799. }
  2800. return true;
  2801. var ret = CheckHasPWafer();
  2802. var waferTypeSlots = GetWaferTypeSlots();
  2803. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2804. {
  2805. List<WaferType> nextWaferTypeLst = new List<WaferType>();
  2806. int startIndex = -1;
  2807. for (int i = 0; i < waferTypeSlots.Count; i++)
  2808. {
  2809. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2810. {
  2811. startIndex = i;
  2812. continue;
  2813. }
  2814. //P wafer不够的情况
  2815. if (waferTypeSlots[i].Item1 == WaferType.P)
  2816. {
  2817. if (!ret.Item1)
  2818. continue;
  2819. else
  2820. {
  2821. if (i - startIndex > ret.Item2)
  2822. continue;
  2823. }
  2824. }
  2825. if (!nextWaferTypeLst.Contains(waferTypeSlots[i].Item1))
  2826. nextWaferTypeLst.Add(waferTypeSlots[i].Item1);
  2827. if (nextWaferTypeLst.Count == _lstFIMSs.Count)
  2828. break;
  2829. if (i - startIndex >= _lstFIMSs.Count * 25)
  2830. break;
  2831. }
  2832. foreach (var type in nextWaferTypeLst)
  2833. {
  2834. if (carrierType.ToString() == type.ToString())
  2835. {
  2836. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2837. return false;
  2838. else if (type == WaferType.SD)
  2839. {
  2840. foreach (var wafer in fimsWafers)
  2841. {
  2842. if (wafer.IsEmpty)
  2843. continue;
  2844. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2845. return false;
  2846. }
  2847. }
  2848. else if (type == WaferType.ED)
  2849. {
  2850. foreach (var wafer in fimsWafers)
  2851. {
  2852. if (wafer.IsEmpty)
  2853. continue;
  2854. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2855. return false;
  2856. }
  2857. }
  2858. }
  2859. }
  2860. }
  2861. return true;
  2862. }
  2863. private bool CheckCarrierCanPlaceToStocker(ModuleName currentModule)
  2864. {
  2865. var fimsWafers = WaferManager.Instance.GetWafers(currentModule);
  2866. if (fimsWafers != null && !fimsWafers.Any(x => !x.IsEmpty))
  2867. {
  2868. //空盒子
  2869. return true;
  2870. }
  2871. var carrierType = CarrierManager.Instance.GetCarrier(currentModule, 0).CarrierType;
  2872. var ret = CheckHasPWafer();
  2873. var waferTypeSlots = GetWaferTypeSlots();
  2874. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2875. {
  2876. List<WaferType> nextWaferTypeLst = new List<WaferType>();
  2877. int startIndex = -1;
  2878. for (int i = 0; i < waferTypeSlots.Count; i++)
  2879. {
  2880. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2881. {
  2882. startIndex = i;
  2883. continue;
  2884. }
  2885. //P wafer不够的情况
  2886. if (waferTypeSlots[i].Item1 == WaferType.P)
  2887. {
  2888. if (!ret.Item1)
  2889. continue;
  2890. else
  2891. {
  2892. if (i - startIndex > ret.Item2)
  2893. continue;
  2894. }
  2895. }
  2896. if (!nextWaferTypeLst.Contains(waferTypeSlots[i].Item1))
  2897. nextWaferTypeLst.Add(waferTypeSlots[i].Item1);
  2898. if (nextWaferTypeLst.Count == _lstFIMSs.Count)
  2899. break;
  2900. if (i - startIndex >= _lstFIMSs.Count * 25)
  2901. break;
  2902. }
  2903. foreach (var type in nextWaferTypeLst)
  2904. {
  2905. if (carrierType.ToString() == type.ToString())
  2906. {
  2907. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2908. return false;
  2909. else if (type == WaferType.SD)
  2910. {
  2911. foreach (var wafer in fimsWafers)
  2912. {
  2913. if (wafer.IsEmpty)
  2914. continue;
  2915. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2916. return false;
  2917. }
  2918. }
  2919. else if (type == WaferType.ED)
  2920. {
  2921. foreach (var wafer in fimsWafers)
  2922. {
  2923. if (wafer.IsEmpty)
  2924. continue;
  2925. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2926. return false;
  2927. }
  2928. }
  2929. }
  2930. }
  2931. }
  2932. return true;
  2933. }
  2934. private void MonitorCarrierRobotPickFIMSTask()
  2935. {
  2936. if (!_carrierRobot.IsAvailable)
  2937. return;
  2938. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2939. if (pj == null)
  2940. return;
  2941. //pick
  2942. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2943. if (carrier != null && carrier.IsEmpty)
  2944. {
  2945. SchedulerFIMS fims = null;
  2946. foreach (var st in _lstFIMSs)
  2947. {
  2948. if (!st.IsAvailable)
  2949. continue;
  2950. // check FIMS
  2951. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  2952. if (!fimsDevice.IsUnloadCompleted)
  2953. continue;
  2954. if (CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  2955. {
  2956. carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  2957. if (carrier != null)
  2958. {
  2959. if (pj.ProcessingState == EnumProcessingState.Discharging)
  2960. {
  2961. //discharge
  2962. if (!CheckCarrierHasEmptySlot(st.Module))
  2963. {
  2964. fims = st;
  2965. break;
  2966. }
  2967. if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
  2968. {
  2969. fims = st;
  2970. break;
  2971. }
  2972. }
  2973. else if (pj.ProcessingState == EnumProcessingState.Charging)
  2974. {
  2975. //charge
  2976. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  2977. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2978. var wafers = WaferManager.Instance.GetWafers(st.Module);
  2979. if (wafers != null && stockerInfo != null)
  2980. {
  2981. bool isEmpty = true;
  2982. foreach (var wafer in wafers)
  2983. {
  2984. if (!wafer.IsEmpty)
  2985. {
  2986. if (stockerInfo.Item3.Any())
  2987. {
  2988. if (stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2989. {
  2990. isEmpty = false;
  2991. break;
  2992. }
  2993. }
  2994. else
  2995. {
  2996. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  2997. {
  2998. isEmpty = false;
  2999. break;
  3000. }
  3001. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3002. {
  3003. isEmpty = false;
  3004. break;
  3005. }
  3006. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3007. {
  3008. isEmpty = false;
  3009. break;
  3010. }
  3011. }
  3012. }
  3013. }
  3014. if (isEmpty)
  3015. {
  3016. fims = st;
  3017. break;
  3018. }
  3019. }
  3020. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) >= slots.Count)
  3021. {
  3022. fims = st;
  3023. break;
  3024. }
  3025. }
  3026. else if (pj.ProcessingState == EnumProcessingState.Processing)
  3027. {
  3028. foreach (var bf in pj.Stockers)
  3029. {
  3030. if (CarrierManager.Instance.CheckHasCarrier(bf.Item1, 0))
  3031. continue;
  3032. if (bf.Item1 == carrier.InternalModuleName.ToString())
  3033. {
  3034. fims = st;
  3035. break;
  3036. }
  3037. }
  3038. }
  3039. }
  3040. }
  3041. }
  3042. if (fims != null)
  3043. {
  3044. if (_carrierRobot.Pick(fims.Module, 0, Hand.Blade1))
  3045. {
  3046. fims.WaitTransfer(ModuleName.CarrierRobot);
  3047. return;
  3048. }
  3049. }
  3050. }
  3051. if (!_carrierRobot.IsAvailable)
  3052. return;
  3053. }
  3054. private void MonitorCarrierRobotPlaceFIMSTaskInCharge()
  3055. {
  3056. if (!_carrierRobot.IsAvailable)
  3057. return;
  3058. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3059. if (pj == null)
  3060. return;
  3061. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3062. //place
  3063. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3064. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  3065. if (carrier != null && !carrier.IsEmpty && stockerInfo != null)
  3066. {
  3067. SchedulerFIMS fims = null;
  3068. foreach (var st in _lstFIMSs)
  3069. {
  3070. if (!st.IsAvailable)
  3071. continue;
  3072. // check FIMS
  3073. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  3074. if (!fimsDevice.IsUnloadCompleted)
  3075. continue;
  3076. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  3077. {
  3078. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  3079. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) <= slots.Count)
  3080. {
  3081. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3082. foreach (var wafer in wafers)
  3083. {
  3084. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3085. {
  3086. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3087. continue;
  3088. fims = st;
  3089. break;
  3090. }
  3091. }
  3092. }
  3093. if (fims != null)
  3094. break;
  3095. }
  3096. }
  3097. if (fims != null)
  3098. {
  3099. if (_carrierRobot.Place(fims.Module, 0, Hand.Blade1))
  3100. {
  3101. fims.WaitTransfer(ModuleName.CarrierRobot);
  3102. return;
  3103. }
  3104. }
  3105. }
  3106. }
  3107. private void MonitorCarrierRobotPlaceFIMSTaskInDischarge()
  3108. {
  3109. if (!_carrierRobot.IsAvailable)
  3110. return;
  3111. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3112. if (pj == null)
  3113. return;
  3114. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3115. //place
  3116. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3117. if (carrier != null && !carrier.IsEmpty && CheckCarrierHasEmptySlot(ModuleName.CarrierRobot) && CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
  3118. {
  3119. SchedulerFIMS fims = null;
  3120. foreach (var st in _lstFIMSs)
  3121. {
  3122. if (!st.IsAvailable)
  3123. continue;
  3124. // check FIMS
  3125. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  3126. if (!fimsDevice.IsUnloadCompleted)
  3127. continue;
  3128. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  3129. {
  3130. fims = st;
  3131. break;
  3132. }
  3133. }
  3134. if (fims != null)
  3135. {
  3136. if (_carrierRobot.Place(fims.Module, 0, Hand.Blade1))
  3137. {
  3138. fims.WaitTransfer(ModuleName.CarrierRobot);
  3139. return;
  3140. }
  3141. }
  3142. }
  3143. }
  3144. private bool CheckCarrierHasNoWafer(ModuleName module, WaferType waferType)
  3145. {
  3146. bool isEmpty = true;
  3147. var wafers = WaferManager.Instance.GetWafers(module);
  3148. if (wafers != null)
  3149. {
  3150. foreach (var wafer in wafers)
  3151. {
  3152. if (!wafer.IsEmpty)
  3153. {
  3154. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3155. {
  3156. isEmpty = false;
  3157. break;
  3158. }
  3159. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3160. {
  3161. isEmpty = false;
  3162. break;
  3163. }
  3164. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3165. {
  3166. isEmpty = false;
  3167. break;
  3168. }
  3169. }
  3170. }
  3171. }
  3172. return isEmpty;
  3173. }
  3174. private Dictionary<string, int> GetDummyWafers(List<SchedulerStocker> targetStockers, int needWaferCount, WaferType waferType)
  3175. {
  3176. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  3177. float useCountMin = GetWaferUseCountMin(targetStockers, waferType);
  3178. float useCountMax = GetWaferUseCountMax(targetStockers, waferType);
  3179. int range = (int)(useCountMax - useCountMin);
  3180. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), waferType.ToString()));
  3181. for (int i = 0; i <= range; i++)
  3182. {
  3183. foreach (var target in targetStockers)
  3184. {
  3185. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  3186. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  3187. continue;
  3188. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3189. if (wafers != null)
  3190. {
  3191. foreach (var wafer in wafers)
  3192. {
  3193. if (wafer.IsEmpty)
  3194. continue;
  3195. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3196. {
  3197. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3198. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3199. }
  3200. }
  3201. }
  3202. }
  3203. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3204. {
  3205. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3206. if (carrier.CarrierType == targetCarrierType)
  3207. {
  3208. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3209. if (wafers != null)
  3210. {
  3211. foreach (var wafer in wafers)
  3212. {
  3213. if (wafer.IsEmpty)
  3214. continue;
  3215. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3216. {
  3217. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3218. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3219. }
  3220. }
  3221. }
  3222. }
  3223. }
  3224. foreach (var fims in _lstFIMSs)
  3225. {
  3226. if (!fims.IsOnline)
  3227. continue;
  3228. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  3229. if (!carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  3230. {
  3231. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3232. if (wafers != null)
  3233. {
  3234. foreach (var wafer in wafers)
  3235. {
  3236. if (wafer.IsEmpty)
  3237. continue;
  3238. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3239. {
  3240. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3241. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3242. }
  3243. }
  3244. }
  3245. }
  3246. }
  3247. if (dummyWafers.Count() < needWaferCount)
  3248. useCountMin++;
  3249. else
  3250. break;
  3251. }
  3252. return dummyWafers;
  3253. }
  3254. private float GetWaferUseCountMin(List<SchedulerStocker> targetStockers, WaferType waferType)
  3255. {
  3256. float iUseCountMin = 10000;
  3257. foreach (var target in targetStockers)
  3258. {
  3259. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3260. if (wafers == null)
  3261. continue;
  3262. foreach (var wafer in wafers)
  3263. {
  3264. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3265. continue;
  3266. if (wafer.UseCount < iUseCountMin)
  3267. iUseCountMin = wafer.UseCount;
  3268. }
  3269. }
  3270. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3271. {
  3272. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3273. foreach (var wafer in wafers)
  3274. {
  3275. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3276. continue;
  3277. if (wafer.UseCount < iUseCountMin)
  3278. iUseCountMin = wafer.UseCount;
  3279. }
  3280. }
  3281. foreach (var fims in _lstFIMSs)
  3282. {
  3283. if (!fims.IsOnline)
  3284. continue;
  3285. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3286. foreach (var wafer in wafers)
  3287. {
  3288. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3289. continue;
  3290. if (wafer.UseCount < iUseCountMin)
  3291. iUseCountMin = wafer.UseCount;
  3292. }
  3293. }
  3294. return iUseCountMin;
  3295. }
  3296. private float GetWaferUseCountMax(List<SchedulerStocker> targetStockers, WaferType waferType)
  3297. {
  3298. float iUseCountMax = 0;
  3299. foreach (var target in targetStockers)
  3300. {
  3301. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3302. if (wafers == null)
  3303. continue;
  3304. foreach (var wafer in wafers)
  3305. {
  3306. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3307. continue;
  3308. if (wafer.UseCount >= iUseCountMax)
  3309. iUseCountMax = wafer.UseCount;
  3310. }
  3311. }
  3312. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3313. {
  3314. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3315. foreach (var wafer in wafers)
  3316. {
  3317. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3318. continue;
  3319. if (wafer.UseCount >= iUseCountMax)
  3320. iUseCountMax = wafer.UseCount;
  3321. }
  3322. }
  3323. foreach (var fims in _lstFIMSs)
  3324. {
  3325. if (!fims.IsOnline)
  3326. continue;
  3327. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3328. foreach (var wafer in wafers)
  3329. {
  3330. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3331. continue;
  3332. if (wafer.UseCount >= iUseCountMax)
  3333. iUseCountMax = wafer.UseCount;
  3334. }
  3335. }
  3336. return iUseCountMax;
  3337. }
  3338. private ModuleName GetModuleNameForNextWafer(WaferType waferType)
  3339. {
  3340. ModuleName module = ModuleName.System;
  3341. bool hasEmptyFims = false;
  3342. foreach (var fims in _lstFIMSs)
  3343. {
  3344. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  3345. {
  3346. hasEmptyFims = true;
  3347. break;
  3348. }
  3349. }
  3350. if (!hasEmptyFims)
  3351. return module;
  3352. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0))
  3353. {
  3354. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation;
  3355. }
  3356. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1))
  3357. {
  3358. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation;
  3359. }
  3360. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2))
  3361. {
  3362. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation;
  3363. }
  3364. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3))
  3365. {
  3366. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation;
  3367. }
  3368. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  3369. {
  3370. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation;
  3371. }
  3372. else
  3373. {
  3374. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3375. {
  3376. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  3377. {
  3378. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3379. continue;
  3380. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3381. if (wafer == null || wafer.IsEmpty)
  3382. continue;
  3383. if (wafer.WaferType == waferType)
  3384. {
  3385. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3386. break;
  3387. }
  3388. }
  3389. }
  3390. else
  3391. {
  3392. for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
  3393. {
  3394. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3395. continue;
  3396. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3397. if (wafer == null || wafer.IsEmpty)
  3398. continue;
  3399. if (wafer.WaferType == waferType)
  3400. {
  3401. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3402. break;
  3403. }
  3404. }
  3405. }
  3406. }
  3407. //下一片要放回的cassette已经在fims上
  3408. bool isCarrierAlreadyPicked = false;
  3409. foreach (var fims in _lstFIMSs)
  3410. {
  3411. if (!CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
  3412. continue;
  3413. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  3414. if (carrier != null && carrier.InternalModuleName == module)
  3415. {
  3416. isCarrierAlreadyPicked = true;
  3417. }
  3418. }
  3419. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3420. {
  3421. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
  3422. if (carrier != null && carrier.InternalModuleName == module)
  3423. {
  3424. isCarrierAlreadyPicked = true;
  3425. }
  3426. }
  3427. if (isCarrierAlreadyPicked)
  3428. {
  3429. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3430. {
  3431. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  3432. {
  3433. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3434. continue;
  3435. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3436. if (wafer == null || wafer.IsEmpty)
  3437. continue;
  3438. if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
  3439. {
  3440. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3441. break;
  3442. }
  3443. }
  3444. }
  3445. else
  3446. {
  3447. for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
  3448. {
  3449. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3450. continue;
  3451. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3452. if (wafer == null || wafer.IsEmpty)
  3453. continue;
  3454. if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
  3455. {
  3456. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3457. break;
  3458. }
  3459. }
  3460. }
  3461. }
  3462. return module;
  3463. }
  3464. private int GetWaferCountRelatedToWaferRobot(WaferType waferType, bool includeFims = true)
  3465. {
  3466. int count = 0;
  3467. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3468. if (pj == null || pj.IsEmptyLayout)
  3469. return count;
  3470. if (includeFims)
  3471. {
  3472. foreach (var fims in _lstFIMSs)
  3473. {
  3474. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  3475. continue;
  3476. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3477. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  3478. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  3479. foreach (var wafer in wafers)
  3480. {
  3481. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3482. {
  3483. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo != null && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3484. continue;
  3485. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3486. count++;
  3487. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3488. count++;
  3489. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3490. count++;
  3491. }
  3492. }
  3493. }
  3494. }
  3495. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  3496. {
  3497. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  3498. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3499. {
  3500. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString());
  3501. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo != null && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3502. continue;
  3503. count++;
  3504. }
  3505. }
  3506. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  3507. {
  3508. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3509. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3510. count++;
  3511. }
  3512. return count;
  3513. }
  3514. private void GetWaferSlotsAndWaferType(CarrierInfo carrier, out List<int> slots, out WaferType waferType)
  3515. {
  3516. slots = null;
  3517. waferType = WaferType.None;
  3518. if (carrier != null && !carrier.IsEmpty)
  3519. {
  3520. switch (carrier.CarrierType)
  3521. {
  3522. case CarrierType.SD:
  3523. slots = _sideDummySlots;
  3524. waferType = WaferType.SD;
  3525. break;
  3526. case CarrierType.ED:
  3527. slots = _extraDummySlots;
  3528. waferType = WaferType.ED;
  3529. break;
  3530. case CarrierType.M1:
  3531. slots = _monitor1Slots;
  3532. waferType = WaferType.M1;
  3533. break;
  3534. case CarrierType.M2:
  3535. slots = _monitor2Slots;
  3536. waferType = WaferType.M2;
  3537. break;
  3538. case CarrierType.P:
  3539. slots = _productSlots;
  3540. waferType = WaferType.P;
  3541. break;
  3542. }
  3543. }
  3544. }
  3545. private bool CheckCarrierHasEmptySlot(ModuleName module)
  3546. {
  3547. bool hasEmpty = false;
  3548. var wafers = WaferManager.Instance.GetWafers(module);
  3549. if (wafers != null)
  3550. {
  3551. foreach (var wafer in wafers)
  3552. {
  3553. if (wafer.IsEmpty)
  3554. {
  3555. hasEmpty = true;
  3556. break;
  3557. }
  3558. }
  3559. }
  3560. return hasEmpty;
  3561. }
  3562. private bool CheckCarrierNoHasEmptySlot(ModuleName module)
  3563. {
  3564. bool noHasEmpty = true;
  3565. var wafers = WaferManager.Instance.GetWafers(module);
  3566. if (wafers != null)
  3567. {
  3568. foreach (var wafer in wafers)
  3569. {
  3570. if (!wafer.IsEmpty)
  3571. {
  3572. noHasEmpty = false;
  3573. break;
  3574. }
  3575. }
  3576. }
  3577. return noHasEmpty;
  3578. }
  3579. private bool CheckModuleHasWaferInWaferRobotAndPM(ModuleName module)
  3580. {
  3581. bool isHaveWafer = false;
  3582. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  3583. if (wafers != null)
  3584. {
  3585. foreach (var wafer in wafers)
  3586. {
  3587. if (wafer == null || wafer.IsEmpty)
  3588. continue;
  3589. if (wafer.OriginStation == (int)module)
  3590. {
  3591. isHaveWafer = true;
  3592. break;
  3593. }
  3594. }
  3595. }
  3596. wafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot).ToList();
  3597. if (wafers != null)
  3598. {
  3599. foreach (var wafer in wafers)
  3600. {
  3601. if (wafer == null || wafer.IsEmpty)
  3602. continue;
  3603. if (wafer.OriginStation == (int)module)
  3604. {
  3605. isHaveWafer = true;
  3606. break;
  3607. }
  3608. }
  3609. }
  3610. return isHaveWafer;
  3611. }
  3612. private bool CheckWaferStatus(List<Tuple<string, string, List<int>>> useStockers, bool isNeedCheckMonitor, bool isNeedCheckP, out string reason)
  3613. {
  3614. reason = string.Empty;
  3615. if (SC.GetValue<bool>("System.IsCycleMode"))
  3616. {
  3617. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  3618. {
  3619. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  3620. continue;
  3621. var wafers = WaferManager.Instance.GetWafers(module);
  3622. if (wafers == null)
  3623. continue;
  3624. foreach (var wafer in wafers)
  3625. {
  3626. if (wafer.IsEmpty)
  3627. continue;
  3628. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  3629. }
  3630. }
  3631. }
  3632. else
  3633. {
  3634. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  3635. {
  3636. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  3637. continue;
  3638. var stockerInfo = useStockers.FirstOrDefault(x => x.Item1 == module.ToString());
  3639. var wafers = WaferManager.Instance.GetWafers(module);
  3640. if (wafers == null || stockerInfo == null)
  3641. continue;
  3642. if (SC.GetValue<bool>("System.EnableWarningFailedWafer"))
  3643. {
  3644. if (wafers.ToList().Any(x => x.ProcessState == EnumWaferProcessStatus.Failed))
  3645. {
  3646. reason = $"{module} has failed wafers.";
  3647. return false;
  3648. }
  3649. }
  3650. foreach (var wafer in wafers)
  3651. {
  3652. if (wafer.IsEmpty)
  3653. continue;
  3654. if (wafer.ProcessState != EnumWaferProcessStatus.Idle && SC.GetValue<bool>("System.EnableWarningWaferProcessState") && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  3655. {
  3656. if (wafer.WaferType == WaferType.P && isNeedCheckP)
  3657. {
  3658. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  3659. return false;
  3660. }
  3661. if (isNeedCheckMonitor)
  3662. {
  3663. if (wafer.WaferType == WaferType.M2 || wafer.WaferType == WaferType.M || wafer.WaferType == WaferType.M1)
  3664. {
  3665. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  3666. return false;
  3667. }
  3668. }
  3669. }
  3670. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  3671. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  3672. }
  3673. }
  3674. }
  3675. return true;
  3676. }
  3677. private Tuple<bool, int> CheckHasPWafer()
  3678. {
  3679. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3680. if (pj == null || pj.Stockers == null)
  3681. return Tuple.Create(false, 0);
  3682. int countP = 0;
  3683. foreach (var stocker in pj.Stockers)
  3684. {
  3685. var wafers = WaferManager.Instance.GetWafersByOriginalPosition(ModuleHelper.Converter(stocker.Item1));
  3686. foreach (var wafer in wafers)
  3687. {
  3688. if (!wafer.IsEmpty && wafer.WaferType == WaferType.P && wafer.Station != (int)ModuleName.PM1)
  3689. {
  3690. countP++;
  3691. }
  3692. }
  3693. }
  3694. return Tuple.Create(countP > 0, countP);
  3695. }
  3696. //返回下一片要放的wafer的slot和type
  3697. private int GetNextWaferSlot(out WaferType waferType)
  3698. {
  3699. var waferTypeSlots = GetWaferTypeSlots();
  3700. waferType = WaferType.None;
  3701. var ret = CheckHasPWafer();
  3702. int slot = -1;
  3703. if (waferTypeSlots != null)
  3704. {
  3705. for (int i = 0; i < waferTypeSlots.Count; i++)
  3706. {
  3707. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3708. {
  3709. continue;
  3710. }
  3711. //针对P wafer不够的情况
  3712. if (!ret.Item1 && waferTypeSlots[i].Item1 == WaferType.P)
  3713. continue;
  3714. slot = waferTypeSlots[i].Item2;
  3715. waferType = waferTypeSlots[i].Item1;
  3716. break;
  3717. }
  3718. }
  3719. return slot;
  3720. }
  3721. //返回下一片要放的wafer的type,需要除去当前在机械手上的wafer
  3722. private WaferType GetNextWaferType()
  3723. {
  3724. var ret = CheckHasPWafer();
  3725. var waferTypeSlots = GetWaferTypeSlots();
  3726. WaferType waferType = WaferType.None;
  3727. if (waferTypeSlots != null)
  3728. {
  3729. for (int i = 0; i < waferTypeSlots.Count; i++)
  3730. {
  3731. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3732. {
  3733. continue;
  3734. }
  3735. var wafer0 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0);
  3736. var wafer1 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1);
  3737. if (i < waferTypeSlots.Count && wafer0 != null && !wafer0.IsEmpty && wafer0.WaferType == waferTypeSlots[i].Item1)
  3738. i++;
  3739. if (i < waferTypeSlots.Count && wafer1 != null && !wafer1.IsEmpty && wafer1.WaferType == waferTypeSlots[i].Item1)
  3740. i++;
  3741. //机械手wafer放过去就放满了
  3742. if (i >= waferTypeSlots.Count)
  3743. {
  3744. break;
  3745. }
  3746. //针对P wafer不够的情况
  3747. if (!ret.Item1 && waferTypeSlots[i].Item1 == WaferType.P)
  3748. continue;
  3749. waferType = waferTypeSlots[i].Item1;
  3750. break;
  3751. }
  3752. }
  3753. return waferType;
  3754. }
  3755. private ModuleName GetCurrentTransferFims()
  3756. {
  3757. ModuleName currentFims = ModuleName.System;
  3758. foreach (var st in _lstFIMSs)
  3759. {
  3760. if (!st.IsAvailable)
  3761. continue;
  3762. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  3763. continue;
  3764. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  3765. if (carrier != null && !carrier.IsEmpty)
  3766. {
  3767. bool hasWafer = false;
  3768. var wafers = WaferManager.Instance.GetWafers(st.Module);
  3769. if (wafers != null)
  3770. {
  3771. foreach (var wafer in wafers)
  3772. {
  3773. if (wafer == null || wafer.IsEmpty)
  3774. continue;
  3775. if (!wafer.IsEmpty)
  3776. {
  3777. hasWafer = true;
  3778. break;
  3779. }
  3780. }
  3781. }
  3782. if (hasWafer && CheckCarrierHasWaferInPM(carrier.InternalModuleName))
  3783. {
  3784. currentFims = st.Module;
  3785. break;
  3786. };
  3787. }
  3788. }
  3789. return currentFims;
  3790. }
  3791. private List<int> GetWaferSlots(out WaferType waferType)
  3792. {
  3793. var waferTypeSlots = GetWaferTypeSlots();
  3794. waferType = WaferType.None;
  3795. var slots = new List<int>();
  3796. if (waferTypeSlots != null)
  3797. {
  3798. List<Tuple<ModuleName, WaferType, int>> fimsWaferInforLst = new List<Tuple<ModuleName, WaferType, int>>();
  3799. foreach (var st in _lstFIMSs)
  3800. {
  3801. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  3802. continue;
  3803. var fimsWafers = WaferManager.Instance.GetWafers(st.Module);
  3804. int waferCountFIMS = 0;
  3805. WaferType waferTypeFIMS = WaferType.None;
  3806. if (fimsWafers != null)
  3807. {
  3808. foreach (var fimsWafer in fimsWafers)
  3809. {
  3810. if (!fimsWafer.IsEmpty)
  3811. {
  3812. waferTypeFIMS = fimsWafer.WaferType;
  3813. if (fimsWafer.WaferType == WaferType.P || fimsWafer.WaferType == WaferType.M1 || fimsWafer.WaferType == WaferType.M2)
  3814. {
  3815. waferCountFIMS++;
  3816. }
  3817. else if (fimsWafer.WaferType == WaferType.SD && _sideDummyWafers.ContainsKey(fimsWafer.InnerId.ToString()))
  3818. {
  3819. waferCountFIMS++;
  3820. }
  3821. else if (fimsWafer.WaferType == WaferType.ED && _extraDummyWafers.ContainsKey(fimsWafer.InnerId.ToString()))
  3822. {
  3823. waferCountFIMS++;
  3824. }
  3825. }
  3826. }
  3827. }
  3828. if (waferCountFIMS > 0)
  3829. fimsWaferInforLst.Add(Tuple.Create(st.Module, waferTypeFIMS, waferCountFIMS));
  3830. }
  3831. //两个FIMS都有Carrier,直接返回
  3832. if (_lstFIMSs.Count == fimsWaferInforLst.Count)
  3833. return slots;
  3834. //FIMS有空的,才继续
  3835. int startIndex = 0;
  3836. for (int i = 0; i < waferTypeSlots.Count; i++)
  3837. {
  3838. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3839. {
  3840. continue;
  3841. }
  3842. var wafer0 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0);
  3843. var wafer1 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1);
  3844. if (i < waferTypeSlots.Count && wafer0 != null && !wafer0.IsEmpty && wafer0.WaferType == waferTypeSlots[i].Item1)
  3845. i++;
  3846. if (i >= waferTypeSlots.Count)
  3847. break;
  3848. if (i < waferTypeSlots.Count && wafer1 != null && !wafer1.IsEmpty && wafer1.WaferType == waferTypeSlots[i].Item1)
  3849. i++;
  3850. if (i >= waferTypeSlots.Count)
  3851. break;
  3852. if (fimsWaferInforLst.Count > 0)
  3853. {
  3854. var fimsWaferInfor = fimsWaferInforLst.FirstOrDefault(x => x.Item2 == waferTypeSlots[i].Item1);
  3855. if (fimsWaferInfor != null)
  3856. {
  3857. for (; i < waferTypeSlots.Count;)
  3858. {
  3859. if (i >= waferTypeSlots.Count)
  3860. break;
  3861. if (waferTypeSlots[i].Item1 == fimsWaferInfor.Item2)
  3862. i++;
  3863. else
  3864. break;
  3865. }
  3866. }
  3867. }
  3868. if (i >= waferTypeSlots.Count)
  3869. {
  3870. i = waferTypeSlots.Count - 1;
  3871. }
  3872. startIndex = i;
  3873. waferType = waferTypeSlots[i].Item1;
  3874. break;
  3875. }
  3876. for (int i = startIndex; i < waferTypeSlots.Count; i++)
  3877. {
  3878. if (waferTypeSlots[i].Item1 != waferType)
  3879. {
  3880. break;
  3881. }
  3882. slots.Add(waferTypeSlots[i].Item2);
  3883. }
  3884. }
  3885. return slots;
  3886. }
  3887. private List<int> GetWaferSlots(WaferType waferType)
  3888. {
  3889. var slots = new List<int>();
  3890. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3891. if (pj == null)
  3892. return null;
  3893. if (!RecipeParser.LayoutRecipeParse(pj.LayoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out string reason))
  3894. {
  3895. //Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load layout recipe {pj.LayoutRecipe} failed, {reason}");
  3896. return null;
  3897. }
  3898. switch (waferType)
  3899. {
  3900. case WaferType.SD:
  3901. return pj.SideDummySlots;
  3902. case WaferType.ED:
  3903. return pj.ExtraDummySlots;
  3904. case WaferType.M1:
  3905. return pj.Monitor1Slots;
  3906. case WaferType.M2:
  3907. return pj.Monitor2Slots;
  3908. case WaferType.P:
  3909. return pj.ProductSlots;
  3910. }
  3911. return null;
  3912. }
  3913. private List<int> GetWaferSlots(RecipeLayoutEntityExpert layoutRecipeDataExpert, WaferType waferType)
  3914. {
  3915. var slots = new List<int>();
  3916. if (layoutRecipeDataExpert == null)
  3917. return null;
  3918. var type = "";
  3919. switch (waferType)
  3920. {
  3921. case WaferType.SD:
  3922. type = "sd";
  3923. break;
  3924. case WaferType.ED:
  3925. type = "fd";
  3926. break;
  3927. case WaferType.M1:
  3928. type = "m1";
  3929. break;
  3930. case WaferType.M2:
  3931. type = "m2";
  3932. break;
  3933. case WaferType.P:
  3934. type = "pd";
  3935. break;
  3936. }
  3937. if (layoutRecipeDataExpert != null)
  3938. {
  3939. for (int i = 0; i < layoutRecipeDataExpert.Items.Count; i++)
  3940. {
  3941. if (layoutRecipeDataExpert.Items[i].ToLower() == type)
  3942. {
  3943. slots.Add(i);
  3944. }
  3945. }
  3946. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3947. {
  3948. slots.Sort((x, y) => -x.CompareTo(y));//降序
  3949. }
  3950. else
  3951. {
  3952. slots.Sort((x, y) => x.CompareTo(y));//升序
  3953. }
  3954. }
  3955. return slots;
  3956. }
  3957. #region charge rule
  3958. private bool CheckChargeRule(ProcessJobInfo pj, out bool waferShort, bool needCheckPWafer, bool needCheckMWafer, out string reason)
  3959. {
  3960. waferShort = false;
  3961. //needCheckPWafer = false;
  3962. reason = string.Empty;
  3963. if (!RecipeParser.LayoutRecipeParse(pj.LayoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  3964. {
  3965. //Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load layout recipe {pj.LayoutRecipe} failed, {reason}");
  3966. return false;
  3967. }
  3968. if (!CheckLayoutParameter(layoutRecipeDataNormal, out reason))
  3969. {
  3970. return false;
  3971. }
  3972. int iCassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  3973. if (iCassetteSlotCount == 0)
  3974. {
  3975. reason = "System.CassetteSlotCount not valid";
  3976. return false;
  3977. }
  3978. int iSlotCount = SC.GetValue<int>($"Boat.SlotCount");
  3979. var productSlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.P);
  3980. var monitor1Slots = GetWaferSlots(layoutRecipeDataExpert, WaferType.M1);
  3981. var monitor2Slots = GetWaferSlots(layoutRecipeDataExpert, WaferType.M2);
  3982. var sideDummySlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.SD);
  3983. var extraDummySlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.ED);
  3984. int iNeedCassetteNum;
  3985. var temp = (float)productSlots.Count / iCassetteSlotCount;
  3986. iNeedCassetteNum = (int)Math.Ceiling(temp);
  3987. int iCurrentCassetteNum = GetCurrentCassetteNum(pj, WaferType.P);
  3988. int iDummyUpper = int.Parse(layoutRecipeDataNormal.DummyUpperSlot);
  3989. int iDummyLower = int.Parse(layoutRecipeDataNormal.DummyLowerSlot);
  3990. int iNeedPWaferNum = productSlots.Count;
  3991. int iNeedM1WaferNum = monitor1Slots.Count;
  3992. int iNeedM2WaferNum = monitor2Slots.Count;
  3993. int iNeedSDWaferNum = sideDummySlots.Count;
  3994. int iNeedEDWaferNum = extraDummySlots.Count;
  3995. int iCurrentPWaferNum = GetCurrentWaferNum(pj, WaferType.P, out bool pSlotSelect);
  3996. int iCurrentSDWaferNum = GetCurrentDummyWaferNum(WaferType.SD);
  3997. int iCurrentM1WaferNum = GetCurrentWaferNum(pj, WaferType.M1, out bool m1SlotSelect);
  3998. int iCurrentM2WaferNum = GetCurrentWaferNum(pj, WaferType.M2, out bool m2SlotSelect);
  3999. int iCurrentEDWaferNum = GetCurrentDummyWaferNum(WaferType.ED);
  4000. //if (iNeedMWaferNum > iCurrentMWaferNum)
  4001. //{
  4002. // reason = "monitor wafer are short.";
  4003. // return false;
  4004. //}
  4005. //if (iNeedSDWaferNum > iCurrentSDWaferNum)
  4006. //{
  4007. // reason = "dummy wafer are short.";
  4008. // return false;
  4009. //}
  4010. //if (iNeedEDWaferNum > iCurrentEDWaferNum)
  4011. //{
  4012. // reason = "extra dummy wafer are short.";
  4013. // return false;
  4014. //}
  4015. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4016. {
  4017. sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4018. extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4019. monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4020. monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4021. productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  4022. }
  4023. else
  4024. {
  4025. sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4026. extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4027. monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  4028. monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  4029. productSlots.Sort((x, y) => x.CompareTo(y));//升序
  4030. }
  4031. pj.SideDummySlots = sideDummySlots;
  4032. pj.ExtraDummySlots = extraDummySlots;
  4033. pj.Monitor1Slots = monitor1Slots;
  4034. pj.Monitor2Slots = monitor2Slots;
  4035. pj.ProductSlots = productSlots;
  4036. bool bM1Short = false;
  4037. bool bM2Short = false;
  4038. if (needCheckMWafer)
  4039. {
  4040. bM1Short = GetRemainWaferNum(pj, WaferType.M1) < 0 && monitor1Slots.Count > 0;
  4041. bM2Short = GetRemainWaferNum(pj, WaferType.M2) < 0 && monitor2Slots.Count > 0;
  4042. if (monitor1Slots.Count > 0 && m1SlotSelect && iCurrentM1WaferNum != monitor1Slots.Count)
  4043. {
  4044. reason = $"layout recipe M1 wafer number={iCurrentM1WaferNum}, current M1 wafer number={monitor1Slots.Count}, not match";
  4045. return false;
  4046. }
  4047. if (monitor2Slots.Count > 0 && m2SlotSelect && iCurrentM2WaferNum != monitor2Slots.Count)
  4048. {
  4049. reason = $"layout recipe M2 wafer number={iCurrentM2WaferNum}, current M2 wafer number={monitor2Slots.Count}, not match";
  4050. return false;
  4051. }
  4052. if (bM1Short)
  4053. {
  4054. reason = "M1 wafer are short";
  4055. return false;
  4056. }
  4057. if (bM2Short)
  4058. {
  4059. reason = "M2 wafer are short";
  4060. return false;
  4061. }
  4062. }
  4063. if (!needCheckPWafer)
  4064. return true;
  4065. if (iNeedPWaferNum > iCurrentPWaferNum)
  4066. {
  4067. reason = "layout recipe production wafer number greater than current production wafer number";
  4068. return false;
  4069. }
  4070. if (pSlotSelect && iNeedPWaferNum != iCurrentPWaferNum)
  4071. {
  4072. reason = $"layout recipe production wafer number={iNeedPWaferNum}, current production wafer number={iCurrentPWaferNum}, not match";
  4073. return false;
  4074. }
  4075. //下面charge rule暂时不判断
  4076. return true;
  4077. //if (layoutRecipeDataNormal.ProductPosition.ToLower() == "slot")
  4078. //{
  4079. // if (iNeedPWaferNum <= iCurrentPWaferNum)
  4080. // {
  4081. // return true;
  4082. // }
  4083. // else
  4084. // {
  4085. // reason = "production wafer insufficiency productPos set to slot";
  4086. // return false;
  4087. // }
  4088. //}
  4089. string strWhenCassetteAreShort = layoutRecipeDataNormal.WhenCassetteInBatchAreShort;
  4090. string strWhenPWaferShort = layoutRecipeDataNormal.WhenPWaferShort;
  4091. string strWhenWaferInCassetteAreShort = layoutRecipeDataNormal.WhenWaferInCassetteAreShort;
  4092. string strWhenEDAreShort = layoutRecipeDataNormal.WhenEDAreShort;
  4093. bool bSDMove = layoutRecipeDataNormal.SDRule == "Move";
  4094. bool bBoatSupplyED = layoutRecipeDataNormal.RuleOfSpaceInBoat == "SupplyED" && !bSDMove;
  4095. bool bEDShort = false;
  4096. List<string> adjustedSlot = new List<string>();
  4097. for (int i = 0; i < layoutRecipeDataExpert.Items.Count; i++)
  4098. {
  4099. adjustedSlot.Add(layoutRecipeDataExpert.Items[i]);
  4100. }
  4101. bool bCassetteSuppleED;
  4102. bool bWaferSuppleED;
  4103. if (iNeedPWaferNum > iCurrentPWaferNum)
  4104. {
  4105. // 先判断cassette是否充足,然后再判断P wafers是否充足
  4106. if (iNeedCassetteNum > iCurrentCassetteNum)
  4107. {
  4108. if (strWhenCassetteAreShort != "LeaveAs" && strWhenCassetteAreShort != "SupplyED")
  4109. {
  4110. reason = "cassette in batch are short";
  4111. return true;
  4112. }
  4113. else
  4114. {
  4115. bCassetteSuppleED = strWhenCassetteAreShort == "SupplyED";
  4116. // 重新计算需要的P wafers
  4117. iNeedPWaferNum = iNeedPWaferNum - (iNeedCassetteNum - iCurrentCassetteNum) * iCassetteSlotCount;
  4118. // 判断P wafers是否充足
  4119. if (iNeedPWaferNum > iCurrentPWaferNum)
  4120. { // 只有在when P wafer short == leave as 的时候 when wafer in cassette are short 才执行判断
  4121. if (strWhenPWaferShort == "LeaveAs")
  4122. {
  4123. if (strWhenWaferInCassetteAreShort != "LeaveAs" && strWhenWaferInCassetteAreShort != "SupplyED")
  4124. {
  4125. reason = "wafer in cassette are short";
  4126. return true;
  4127. }
  4128. else
  4129. {
  4130. bWaferSuppleED = strWhenWaferInCassetteAreShort == "SupplyED";
  4131. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4132. }
  4133. }
  4134. else
  4135. {
  4136. bEDShort = CassetteShortPWaferShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, iCurrentPWaferNum, bCassetteSuppleED);
  4137. }
  4138. }
  4139. else
  4140. {
  4141. bWaferSuppleED = false;
  4142. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4143. }
  4144. }
  4145. }
  4146. else
  4147. { // 只有在when P wafer short == leave as 的时候 when wafer in cassette are short 才执行判断
  4148. if (strWhenPWaferShort == "LeaveAs")
  4149. {
  4150. if (strWhenWaferInCassetteAreShort == "LeaveAs")
  4151. {
  4152. }
  4153. else if (strWhenWaferInCassetteAreShort == "SupplyED")
  4154. {
  4155. bCassetteSuppleED = false;
  4156. bWaferSuppleED = true;
  4157. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4158. }
  4159. else
  4160. {
  4161. reason = "wafer in cassette are short";
  4162. return true;
  4163. }
  4164. }
  4165. else
  4166. {
  4167. bWaferSuppleED = false;
  4168. bEDShort = CassetteShortPWaferShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, iCurrentPWaferNum, bWaferSuppleED);
  4169. }
  4170. }
  4171. }
  4172. if (bSDMove)
  4173. {
  4174. for (int i = iDummyUpper; i < iSlotCount - iDummyLower; i++)
  4175. {
  4176. if (adjustedSlot[i] != "")
  4177. {
  4178. for (int j = 0; j < iDummyUpper; j++)
  4179. {
  4180. adjustedSlot[i - j - 1] = "dummy";
  4181. }
  4182. break;
  4183. }
  4184. }
  4185. for (int i = iSlotCount - iDummyLower - 1; i > iDummyUpper; i--)
  4186. {
  4187. if (adjustedSlot[i] != "")
  4188. {
  4189. for (int j = 0; j < iDummyLower; j++)
  4190. {
  4191. adjustedSlot[i + j + 1] = "dummy";
  4192. }
  4193. break;
  4194. }
  4195. }
  4196. }
  4197. else
  4198. {
  4199. if (bBoatSupplyED)
  4200. {
  4201. for (int i = iDummyUpper; i < iSlotCount - iDummyLower; i++)
  4202. {
  4203. if (iCurrentEDWaferNum > 0)
  4204. {
  4205. if (adjustedSlot[i] == "")
  4206. {
  4207. adjustedSlot[i] = "extradummy";
  4208. iCurrentEDWaferNum--;
  4209. }
  4210. }
  4211. else
  4212. {
  4213. bEDShort = true;
  4214. break;
  4215. }
  4216. }
  4217. }
  4218. for (int i = 0; i < iDummyUpper; i++)
  4219. {
  4220. adjustedSlot[i] = "dummy";
  4221. }
  4222. for (int i = iSlotCount - iDummyLower; i < iSlotCount; i++)
  4223. {
  4224. adjustedSlot[i] = "dummy";
  4225. }
  4226. }
  4227. if (bEDShort)
  4228. {
  4229. switch (strWhenEDAreShort)
  4230. {
  4231. case "WarningAndContinue":
  4232. case "AbortWhenError":
  4233. reason = "extradummy wafer are short";
  4234. break;
  4235. case "LeaveAs":
  4236. bEDShort = false;
  4237. break;
  4238. }
  4239. }
  4240. sideDummySlots.Clear();
  4241. extraDummySlots.Clear();
  4242. monitor1Slots.Clear();
  4243. monitor2Slots.Clear();
  4244. productSlots.Clear();
  4245. for (int i = 0; i < adjustedSlot.Count; i++)
  4246. {
  4247. if (adjustedSlot[i].ToLower() == "dummy" && iCurrentSDWaferNum > 0)
  4248. {
  4249. sideDummySlots.Add(i);
  4250. iCurrentSDWaferNum--;
  4251. }
  4252. if (adjustedSlot[i].ToLower() == "extradummy")
  4253. {
  4254. extraDummySlots.Add(i);
  4255. }
  4256. if (adjustedSlot[i].ToLower() == "monitor1" && iCurrentM1WaferNum > 0)
  4257. {
  4258. monitor1Slots.Add(i);
  4259. iCurrentM1WaferNum--;
  4260. }
  4261. if (adjustedSlot[i].ToLower() == "monitor2" && iCurrentM2WaferNum > 0)
  4262. {
  4263. monitor2Slots.Add(i);
  4264. iCurrentM2WaferNum--;
  4265. }
  4266. if (adjustedSlot[i].ToLower() == "pd")
  4267. {
  4268. productSlots.Add(i);
  4269. }
  4270. }
  4271. bM1Short = (GetCurrentWaferNum(pj, WaferType.M1, out m1SlotSelect) < monitor1Slots.Count) || monitor1Slots.Count == 0;
  4272. bM2Short = (GetCurrentWaferNum(pj, WaferType.M2, out m2SlotSelect) < monitor2Slots.Count) || monitor2Slots.Count == 0;
  4273. bool bSDShort = (GetCurrentWaferNum(pj, WaferType.SD, out bool sdSlotSelect) < sideDummySlots.Count) || sideDummySlots.Count == 0;
  4274. if (SC.GetValue<bool>("System.IsLeaveAsAllWaferWhenWaferShort"))
  4275. bEDShort = bM1Short = bM2Short = bSDShort = false;
  4276. waferShort = bEDShort || bM1Short || bM2Short || bSDShort;
  4277. if (bM1Short || bM2Short)
  4278. {
  4279. if (reason == string.Empty)
  4280. {
  4281. if (bSDShort)
  4282. {
  4283. reason = "dummy wafer and monitor wafer are short";
  4284. }
  4285. else
  4286. {
  4287. reason = "monitor wafer are short";
  4288. }
  4289. }
  4290. else
  4291. {
  4292. if (bSDShort)
  4293. {
  4294. reason = "extradummy wafer,monitor wafer and dummy wafer are short";
  4295. }
  4296. else
  4297. {
  4298. reason = "extradummy wafer and dummy wafer are short";
  4299. }
  4300. }
  4301. }
  4302. else
  4303. {
  4304. if (reason == string.Empty)
  4305. {
  4306. if (bSDShort)
  4307. {
  4308. reason = "dummy wafer are short";
  4309. }
  4310. }
  4311. else
  4312. {
  4313. if (bSDShort)
  4314. {
  4315. reason = "extradummy wafer and dummy wafer are short";
  4316. }
  4317. }
  4318. }
  4319. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4320. {
  4321. sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4322. extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4323. monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4324. monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4325. productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  4326. }
  4327. else
  4328. {
  4329. sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4330. extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4331. monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  4332. monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  4333. productSlots.Sort((x, y) => x.CompareTo(y));//升序
  4334. }
  4335. pj.SideDummySlots = sideDummySlots;
  4336. pj.ExtraDummySlots = extraDummySlots;
  4337. pj.Monitor1Slots = monitor1Slots;
  4338. pj.Monitor2Slots = monitor2Slots;
  4339. pj.ProductSlots = productSlots;
  4340. return true;
  4341. }
  4342. private bool CheckLayoutParameter(RecipeLayoutEntityNormal layoutRecipeDataNormal, out string reason)
  4343. {
  4344. reason = string.Empty;
  4345. if (string.IsNullOrEmpty(layoutRecipeDataNormal.DummyUpperSlot))
  4346. {
  4347. reason = "DummyUpper is null";
  4348. return false;
  4349. }
  4350. if (string.IsNullOrEmpty(layoutRecipeDataNormal.DummyLowerSlot))
  4351. {
  4352. reason = "DummyLower is null";
  4353. return false;
  4354. }
  4355. if (string.IsNullOrEmpty(layoutRecipeDataNormal.CenteringSlotPosition))
  4356. {
  4357. reason = "CenteringSlotPosition is null";
  4358. return false;
  4359. }
  4360. //if (string.IsNullOrEmpty(layoutRecipeDataNormal.Pitch))
  4361. //{
  4362. // reason = "Pitch is null";
  4363. // return false;
  4364. //}
  4365. if (string.IsNullOrEmpty(layoutRecipeDataNormal.ProductPosition))
  4366. {
  4367. reason = "ProductPosition is null";
  4368. return false;
  4369. }
  4370. if (string.IsNullOrEmpty(layoutRecipeDataNormal.MonitorPosition))
  4371. {
  4372. reason = "MonitorPosition is null";
  4373. return false;
  4374. }
  4375. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenCassetteInBatchAreShort))
  4376. {
  4377. reason = "WhenCassetteInBatchAreShort is null";
  4378. return false;
  4379. }
  4380. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenPWaferShort))
  4381. {
  4382. reason = "WhenPWaferShort is null";
  4383. return false;
  4384. }
  4385. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenWaferInCassetteAreShort))
  4386. {
  4387. reason = "WhenWaferInCassetteAreShort is null";
  4388. return false;
  4389. }
  4390. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenEDAreShort))
  4391. {
  4392. reason = "WhenEDAreShort is null";
  4393. return false;
  4394. }
  4395. if (string.IsNullOrEmpty(layoutRecipeDataNormal.SDRule))
  4396. {
  4397. reason = "SDRule is null";
  4398. return false;
  4399. }
  4400. if (string.IsNullOrEmpty(layoutRecipeDataNormal.RuleOfSpaceInBoat))
  4401. {
  4402. reason = "RuleOfSpaceInBoat is null";
  4403. return false;
  4404. }
  4405. return true;
  4406. }
  4407. private int GetCurrentCassetteNum(ProcessJobInfo pj, WaferType targetWaferType)
  4408. {
  4409. int iCassetteNum = 0;
  4410. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4411. foreach (var target in _lstTotlaStockers)
  4412. {
  4413. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()))
  4414. continue;
  4415. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4416. if (!carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  4417. iCassetteNum++;
  4418. }
  4419. return iCassetteNum;
  4420. }
  4421. private int GetRemainWaferNum(ProcessJobInfo pj, WaferType targetWaferType)
  4422. {
  4423. int iWaferNum = 0;
  4424. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4425. foreach (var target in _lstTotlaStockers)
  4426. {
  4427. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4428. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4429. continue;
  4430. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4431. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()) || stockerInfo == null)
  4432. continue;
  4433. var wafers = WaferManager.Instance.GetWafers(target.Module);
  4434. foreach (var wafer in wafers)
  4435. {
  4436. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4437. iWaferNum++;
  4438. }
  4439. }
  4440. if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0))
  4441. {
  4442. var carrier = CarrierManager.Instance.GetCarrier(_carrierRobot.Module);
  4443. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4444. if (carrier.CarrierType == targetCarrierType && pj != null && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()) && stockerInfo != null)
  4445. {
  4446. var wafers = WaferManager.Instance.GetWafers(_carrierRobot.Module);
  4447. foreach (var wafer in wafers)
  4448. {
  4449. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4450. iWaferNum++;
  4451. }
  4452. }
  4453. }
  4454. foreach (var fims in _lstFIMSs)
  4455. {
  4456. if (!fims.IsOnline)
  4457. continue;
  4458. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  4459. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4460. if (carrier.CarrierType == targetCarrierType && pj != null && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()) && stockerInfo != null)
  4461. {
  4462. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  4463. foreach (var wafer in wafers)
  4464. {
  4465. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4466. iWaferNum++;
  4467. }
  4468. }
  4469. }
  4470. {
  4471. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  4472. foreach (var wafer in wafers)
  4473. {
  4474. if (wafer == null || wafer.IsEmpty || wafer.WaferType != targetWaferType)
  4475. continue;
  4476. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString());
  4477. if (stockerInfo != null && pj != null && pj.Stockers.Any(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString()) && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4478. iWaferNum++;
  4479. }
  4480. }
  4481. var useCount = 0;
  4482. if (targetWaferType == WaferType.M1)
  4483. useCount = pj.Monitor1Slots.Count;
  4484. if (targetWaferType == WaferType.M2)
  4485. useCount = pj.Monitor2Slots.Count;
  4486. return iWaferNum - useCount;
  4487. }
  4488. private int GetCurrentWaferNum(ProcessJobInfo pj, WaferType targetWaferType, out bool isSlotSelect)
  4489. {
  4490. int iWaferNum = 0;
  4491. isSlotSelect = false;
  4492. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4493. foreach (var target in _lstTotlaStockers)
  4494. {
  4495. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4496. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4497. continue;
  4498. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()))
  4499. continue;
  4500. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == target.Module.ToString());
  4501. var wafers = WaferManager.Instance.GetWafers(target.Module);
  4502. foreach (var wafer in wafers)
  4503. {
  4504. if (!stockerInfo.Item3.Any() && !wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4505. iWaferNum++;
  4506. if (stockerInfo.Item3.Any(x => x == wafer.OriginSlot) && !wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4507. {
  4508. iWaferNum++;
  4509. isSlotSelect = true;
  4510. }
  4511. }
  4512. }
  4513. return iWaferNum;
  4514. }
  4515. private int GetCurrentDummyWaferNum(WaferType targetWaferType)
  4516. {
  4517. int iWaferNum = 0;
  4518. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4519. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  4520. {
  4521. if (module == ModuleName.SMIFA || module == ModuleName.SMIFB || module == ModuleName.Boat)
  4522. continue;
  4523. if (ModuleHelper.IsStocker(module))
  4524. {
  4525. var carrier = CarrierManager.Instance.GetCarrier(module);
  4526. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4527. continue;
  4528. }
  4529. var wafers = WaferManager.Instance.GetWafers(module);
  4530. if (wafers == null)
  4531. continue;
  4532. foreach (var wafer in wafers)
  4533. {
  4534. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4535. iWaferNum++;
  4536. }
  4537. }
  4538. return iWaferNum;
  4539. }
  4540. private bool CassetteShortWaferInCassetteShort(ProcessJobInfo pj, ref List<string> adjustslot, ref int currentEDNum, RecipeLayoutEntityNormal layoutRecipeDataNormal, RecipeLayoutEntityExpert layoutRecipeDataExpert, bool cassetteSupplyED, bool waferSupplyED)
  4541. {
  4542. bool bEDShort = false;
  4543. bool monitorSlot = layoutRecipeDataNormal.MonitorPosition.ToLower() == "slot";
  4544. int slotCount = SC.GetValue<int>($"Boat.SlotCount");
  4545. int cassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  4546. adjustslot = new List<string>();
  4547. for (int i = 0; i < slotCount; i++)
  4548. {
  4549. adjustslot.Add("");
  4550. }
  4551. if (monitorSlot)
  4552. {
  4553. for (int i = 0; i < slotCount; i++)
  4554. {
  4555. if (layoutRecipeDataExpert.Items[i].ToLower() == "monitor")
  4556. adjustslot[i] = "monitor";
  4557. }
  4558. }
  4559. List<SchedulerStocker> tempStockers = new List<SchedulerStocker>();
  4560. foreach (var p in pj.Stockers)
  4561. {
  4562. var module = GetModule(p.Item1) as SchedulerStocker;
  4563. var carrier = CarrierManager.Instance.GetCarrier(module.Module);
  4564. if (!carrier.IsEmpty && carrier.CarrierType.ToString() == "P")
  4565. tempStockers.Add(module);
  4566. }
  4567. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4568. tempStockers.Reverse();
  4569. int.TryParse(layoutRecipeDataNormal.DummyUpperSlot, out int dummyUpper);
  4570. int.TryParse(layoutRecipeDataNormal.DummyLowerSlot, out int dummyLower);
  4571. int.TryParse(layoutRecipeDataNormal.CenteringSlotPosition, out int centeringSlotPos);
  4572. int centeringSlotPosLower;
  4573. int centeringSlotPosUpper;
  4574. if (tempStockers.Count % 2 == 0)
  4575. {
  4576. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4577. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4578. }
  4579. else
  4580. {
  4581. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount / 2) + 1 + (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4582. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount / 2) - 1 - (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4583. }
  4584. if (centeringSlotPosLower >= slotCount - dummyLower)
  4585. {
  4586. int iIndex = slotCount - dummyLower - 1;
  4587. if (!monitorSlot)
  4588. {
  4589. adjustslot[iIndex] = "monitor";
  4590. iIndex--;
  4591. }
  4592. foreach (var stocker in tempStockers)
  4593. {
  4594. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4595. if (wafers == null)
  4596. continue;
  4597. foreach (var wafer in wafers)
  4598. {
  4599. if (!wafer.IsEmpty)
  4600. {
  4601. for (int i = iIndex; i >= dummyUpper; i--)
  4602. {
  4603. if (adjustslot[i] == "")
  4604. {
  4605. adjustslot[i] = "production";
  4606. iIndex = i - 1;
  4607. break;
  4608. }
  4609. }
  4610. }
  4611. else
  4612. {
  4613. if (waferSupplyED)
  4614. {
  4615. if (currentEDNum > 0)
  4616. {
  4617. for (int i = iIndex; i >= dummyUpper; i--)
  4618. {
  4619. if (adjustslot[i] == "")
  4620. {
  4621. adjustslot[i] = "extradummy";
  4622. currentEDNum--;
  4623. iIndex = i - 1;
  4624. break;
  4625. }
  4626. }
  4627. }
  4628. else
  4629. {
  4630. bEDShort = true;
  4631. }
  4632. }
  4633. }
  4634. }
  4635. if (!monitorSlot)
  4636. {
  4637. adjustslot[iIndex] = "monitor";
  4638. iIndex--;
  4639. }
  4640. }
  4641. if (cassetteSupplyED && currentEDNum > 0)
  4642. {
  4643. for (int i = iIndex; i >= dummyUpper; i--)
  4644. {
  4645. if (currentEDNum > 0)
  4646. {
  4647. if (adjustslot[i] == "")
  4648. {
  4649. adjustslot[i] = "extradummy";
  4650. currentEDNum--;
  4651. }
  4652. }
  4653. else
  4654. {
  4655. bEDShort = true;
  4656. break;
  4657. }
  4658. }
  4659. }
  4660. }
  4661. else if (centeringSlotPosUpper <= dummyUpper + 1)
  4662. {
  4663. int iIndex = dummyUpper;
  4664. if (!monitorSlot)
  4665. {
  4666. adjustslot[iIndex] = "monitor";
  4667. iIndex++;
  4668. }
  4669. foreach (var stocker in tempStockers)
  4670. {
  4671. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4672. if (wafers == null)
  4673. continue;
  4674. foreach (var wafer in wafers)
  4675. {
  4676. if (!wafer.IsEmpty)
  4677. {
  4678. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4679. {
  4680. if (adjustslot[i] == "")
  4681. {
  4682. adjustslot[i] = "production";
  4683. iIndex = i + 1;
  4684. break;
  4685. }
  4686. }
  4687. }
  4688. else
  4689. {
  4690. if (waferSupplyED)
  4691. {
  4692. if (currentEDNum > 0)
  4693. {
  4694. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4695. {
  4696. if (adjustslot[i] == "")
  4697. {
  4698. adjustslot[i] = "extradummy";
  4699. currentEDNum--;
  4700. iIndex = i + 1;
  4701. break;
  4702. }
  4703. }
  4704. }
  4705. else
  4706. {
  4707. bEDShort = true;
  4708. }
  4709. }
  4710. }
  4711. }
  4712. if (!monitorSlot)
  4713. {
  4714. adjustslot[iIndex] = "monitor";
  4715. iIndex++;
  4716. }
  4717. }
  4718. if (cassetteSupplyED && currentEDNum > 0)
  4719. {
  4720. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4721. {
  4722. if (currentEDNum > 0)
  4723. {
  4724. if (adjustslot[i] == "")
  4725. {
  4726. adjustslot[i] = "extradummy";
  4727. currentEDNum--;
  4728. }
  4729. }
  4730. else
  4731. {
  4732. bEDShort = true;
  4733. break;
  4734. }
  4735. }
  4736. }
  4737. }
  4738. else
  4739. {
  4740. int iCount = 0;
  4741. int iUpperIndex = centeringSlotPos - 1;
  4742. int iLowerIndex = centeringSlotPos - 1;
  4743. int iUpperCount = 0;
  4744. int iLowerCount = 0;
  4745. bool bCassetteEvenNumber = tempStockers.Count % 2 == 0;
  4746. if (bCassetteEvenNumber && !monitorSlot)
  4747. {
  4748. adjustslot[centeringSlotPos - 1] = "monitor";
  4749. iUpperIndex--;
  4750. iLowerIndex++;
  4751. iCount++;
  4752. }
  4753. foreach (var stocker in tempStockers)
  4754. {
  4755. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4756. if (wafers == null)
  4757. continue;
  4758. foreach (var wafer in wafers)
  4759. {
  4760. if (bCassetteEvenNumber)
  4761. {
  4762. if (!monitorSlot && iUpperCount >= cassetteSlotCount && iUpperIndex >= dummyUpper)
  4763. {
  4764. adjustslot[iUpperIndex] = "monitor";
  4765. iUpperIndex--;
  4766. iUpperCount = 0;
  4767. }
  4768. if (!monitorSlot && iLowerCount >= cassetteSlotCount && iLowerIndex < slotCount - dummyLower)
  4769. {
  4770. adjustslot[iLowerIndex] = "monitor";
  4771. iLowerIndex++;
  4772. iLowerCount = 0;
  4773. }
  4774. }
  4775. else
  4776. {
  4777. if (!monitorSlot && iUpperCount + iLowerCount >= cassetteSlotCount && iUpperIndex >= dummyUpper && iLowerIndex < slotCount - dummyLower)
  4778. {
  4779. adjustslot[iUpperIndex] = "monitor";
  4780. iUpperIndex--;
  4781. iUpperCount = 0;
  4782. adjustslot[iLowerIndex] = "monitor";
  4783. iLowerIndex++;
  4784. iLowerCount = 0;
  4785. bCassetteEvenNumber = true;
  4786. }
  4787. }
  4788. if (iCount % 2 == 0)
  4789. {
  4790. if (!wafer.IsEmpty)
  4791. {
  4792. for (int i = iUpperIndex; i >= dummyUpper; i--)
  4793. {
  4794. if (adjustslot[i] == "")
  4795. {
  4796. adjustslot[i] = "production";
  4797. iUpperIndex = i - 1;
  4798. iUpperCount++;
  4799. iCount++;
  4800. break;
  4801. }
  4802. }
  4803. }
  4804. else
  4805. {
  4806. if (waferSupplyED)
  4807. {
  4808. if (currentEDNum > 0)
  4809. {
  4810. for (int i = iUpperIndex; i >= dummyUpper; i--)
  4811. {
  4812. if (adjustslot[i] == "")
  4813. {
  4814. adjustslot[i] = "extradummy";
  4815. currentEDNum--;
  4816. iUpperIndex = i - 1;
  4817. iUpperCount++;
  4818. iCount++;
  4819. break;
  4820. }
  4821. }
  4822. }
  4823. else
  4824. {
  4825. bEDShort = true;
  4826. }
  4827. }
  4828. }
  4829. }
  4830. else
  4831. {
  4832. if (!wafer.IsEmpty)
  4833. {
  4834. for (int i = iLowerIndex; i < slotCount - dummyLower; i++)
  4835. {
  4836. if (adjustslot[i] == "")
  4837. {
  4838. adjustslot[i] = "production";
  4839. iLowerIndex = i + 1;
  4840. iLowerCount++;
  4841. iCount++;
  4842. break;
  4843. }
  4844. }
  4845. }
  4846. else
  4847. {
  4848. if (waferSupplyED)
  4849. {
  4850. if (currentEDNum > 0)
  4851. {
  4852. for (int i = iLowerIndex; i < slotCount - dummyLower; i++)
  4853. {
  4854. if (adjustslot[i] == "")
  4855. {
  4856. adjustslot[i] = "extradummy";
  4857. currentEDNum--;
  4858. iLowerIndex = i + 1;
  4859. iLowerCount++;
  4860. iCount++;
  4861. break;
  4862. }
  4863. }
  4864. }
  4865. else
  4866. {
  4867. bEDShort = true;
  4868. }
  4869. }
  4870. }
  4871. }
  4872. }
  4873. if (!monitorSlot)
  4874. {
  4875. if (adjustslot[iUpperIndex + 1] != "M")
  4876. {
  4877. adjustslot[iUpperIndex] = "monitor";
  4878. iUpperIndex--;
  4879. iCount++;
  4880. }
  4881. if (adjustslot[iLowerIndex - 1] != "monitor")
  4882. {
  4883. adjustslot[iLowerIndex] = "monitor";
  4884. iLowerIndex++;
  4885. iCount++;
  4886. }
  4887. }
  4888. }
  4889. if (cassetteSupplyED && currentEDNum > 0)
  4890. {
  4891. for (int i = 0; i < slotCount - iCount - dummyUpper - dummyLower; i++)
  4892. {
  4893. if (currentEDNum <= 0)
  4894. {
  4895. bEDShort = true;
  4896. break;
  4897. }
  4898. for (int j = iUpperIndex; j >= dummyUpper; j--)
  4899. {
  4900. if (adjustslot[j] == "")
  4901. {
  4902. adjustslot[j] = "extradummy";
  4903. iUpperIndex = j - 1;
  4904. currentEDNum--;
  4905. break;
  4906. }
  4907. }
  4908. if (currentEDNum <= 0)
  4909. {
  4910. bEDShort = true;
  4911. break;
  4912. }
  4913. for (int j = iLowerIndex; j < slotCount - dummyLower; j++)
  4914. {
  4915. if (adjustslot[j] == "")
  4916. {
  4917. adjustslot[j] = "extradummy";
  4918. iLowerIndex = j + 1;
  4919. currentEDNum--;
  4920. break;
  4921. }
  4922. }
  4923. }
  4924. }
  4925. }
  4926. return bEDShort;
  4927. }
  4928. private bool CassetteShortPWaferShort(ProcessJobInfo pj, ref List<string> adjustslot, ref int currentEDNum, RecipeLayoutEntityNormal layoutRecipeDataNormal, RecipeLayoutEntityExpert layoutRecipeDataExpert, int currentPWaferNum, bool cassetteSupplyED)
  4929. {
  4930. bool bEDShort = false;
  4931. bool monitorSlot = layoutRecipeDataNormal.MonitorPosition.ToLower() == "slot";
  4932. int slotCount = SC.GetValue<int>($"Boat.SlotCount");
  4933. int cassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  4934. adjustslot = new List<string>();
  4935. for (int i = 0; i < slotCount; i++)
  4936. {
  4937. adjustslot.Add("");
  4938. }
  4939. if (monitorSlot)
  4940. {
  4941. for (int i = 0; i < slotCount; i++)
  4942. {
  4943. if (layoutRecipeDataExpert.Items[i].ToLower() == "monitor")
  4944. adjustslot[i] = "monitor";
  4945. }
  4946. }
  4947. int.TryParse(layoutRecipeDataNormal.DummyUpperSlot, out int dummyUpper);
  4948. int.TryParse(layoutRecipeDataNormal.DummyLowerSlot, out int dummyLower);
  4949. int.TryParse(layoutRecipeDataNormal.CenteringSlotPosition, out int centeringSlotPos);
  4950. List<SchedulerStocker> tempStockers = new List<SchedulerStocker>();
  4951. foreach (var p in pj.Stockers)
  4952. {
  4953. var module = GetModule(p.Item1) as SchedulerStocker;
  4954. var carrier = CarrierManager.Instance.GetCarrier(module.Module);
  4955. if (!carrier.IsEmpty && carrier.CarrierType.ToString() == "P")
  4956. tempStockers.Add(module);
  4957. }
  4958. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4959. tempStockers.Reverse();
  4960. int centeringSlotPosLower;
  4961. int centeringSlotPosUpper;
  4962. if ((currentPWaferNum / 2) % cassetteSlotCount == 0)
  4963. {
  4964. var temp = (int)Math.Ceiling((float)((currentPWaferNum / 2) / cassetteSlotCount));
  4965. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount + 1) * temp;
  4966. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount + 1) * temp;
  4967. }
  4968. else
  4969. {
  4970. var temp = (int)Math.Ceiling((float)((currentPWaferNum / 2) / cassetteSlotCount));
  4971. centeringSlotPosLower = centeringSlotPos + (currentPWaferNum / 2) + 1 + temp;
  4972. centeringSlotPosUpper = centeringSlotPos - (currentPWaferNum / 2) - 1 - temp;
  4973. }
  4974. if (centeringSlotPosLower >= slotCount - dummyLower)
  4975. {
  4976. int iIndex = slotCount - dummyLower - 1;
  4977. if (!monitorSlot)
  4978. {
  4979. adjustslot[iIndex] = "monitor";
  4980. iIndex--;
  4981. }
  4982. for (int i = 0; i < tempStockers.Count; i++)
  4983. {
  4984. if (currentPWaferNum == 0)
  4985. break;
  4986. for (int j = 0; j < cassetteSlotCount; j++)
  4987. {
  4988. if (currentPWaferNum == 0)
  4989. break;
  4990. for (int k = iIndex; k >= dummyUpper; k--)
  4991. {
  4992. if (adjustslot[k] == "")
  4993. {
  4994. adjustslot[k] = "production";
  4995. currentPWaferNum--;
  4996. iIndex = k - 1;
  4997. break;
  4998. }
  4999. }
  5000. }
  5001. if (!monitorSlot)
  5002. {
  5003. adjustslot[iIndex] = "monitor";
  5004. iIndex--;
  5005. }
  5006. }
  5007. if (cassetteSupplyED)
  5008. {
  5009. for (int i = iIndex; i >= dummyUpper; i--)
  5010. {
  5011. if (currentEDNum > 0)
  5012. {
  5013. if (adjustslot[i] == "")
  5014. {
  5015. adjustslot[i] = "extradummy";
  5016. currentEDNum--;
  5017. }
  5018. }
  5019. else
  5020. {
  5021. bEDShort = true;
  5022. break;
  5023. }
  5024. }
  5025. }
  5026. }
  5027. else if (centeringSlotPosUpper <= dummyUpper + 1)
  5028. {
  5029. int iIndex = dummyUpper;
  5030. if (!monitorSlot)
  5031. {
  5032. adjustslot[iIndex] = "monitor";
  5033. iIndex++;
  5034. }
  5035. for (int i = 0; i < tempStockers.Count; i++)
  5036. {
  5037. if (currentPWaferNum == 0)
  5038. break;
  5039. for (int j = 0; j < cassetteSlotCount; j++)
  5040. {
  5041. if (currentPWaferNum == 0)
  5042. break;
  5043. for (int k = iIndex; k < slotCount - dummyLower; k++)
  5044. {
  5045. if (adjustslot[k] == "")
  5046. {
  5047. adjustslot[k] = "production";
  5048. currentPWaferNum--;
  5049. iIndex = k + 1;
  5050. break;
  5051. }
  5052. }
  5053. }
  5054. if (!monitorSlot)
  5055. {
  5056. adjustslot[iIndex] = "monitor";
  5057. iIndex++;
  5058. }
  5059. }
  5060. if (cassetteSupplyED)
  5061. {
  5062. for (int i = iIndex; i < slotCount - dummyLower; i++)
  5063. {
  5064. if (currentEDNum > 0)
  5065. {
  5066. if (adjustslot[i] == "")
  5067. {
  5068. adjustslot[i] = "extradummy";
  5069. currentEDNum--;
  5070. }
  5071. }
  5072. else
  5073. {
  5074. bEDShort = true;
  5075. break;
  5076. }
  5077. }
  5078. }
  5079. }
  5080. else
  5081. {
  5082. int iCount = 0;
  5083. int iUpperIndex = centeringSlotPos - 1;
  5084. int iLowerIndex = centeringSlotPos - 1;
  5085. int iUpperCount = 0;
  5086. int iLowerCount = 0;
  5087. bool bCassetteEvenNumber = (currentPWaferNum / 2) % cassetteSlotCount == 0;
  5088. if (bCassetteEvenNumber && !monitorSlot)
  5089. {
  5090. adjustslot[centeringSlotPos - 1] = "monitor";
  5091. iUpperIndex--;
  5092. iLowerIndex++;
  5093. iCount++;
  5094. }
  5095. for (int i = 0; i < tempStockers.Count; i++)
  5096. {
  5097. if (currentPWaferNum == 0)
  5098. break;
  5099. for (int j = 0; j < cassetteSlotCount; j++)
  5100. {
  5101. if (currentPWaferNum == 0)
  5102. break;
  5103. if (bCassetteEvenNumber)
  5104. {
  5105. if (!monitorSlot && iUpperCount >= cassetteSlotCount && iUpperIndex >= dummyUpper)
  5106. {
  5107. adjustslot[iUpperIndex] = "monitor";
  5108. iUpperIndex--;
  5109. iUpperCount = 0;
  5110. }
  5111. if (!monitorSlot && iLowerCount >= cassetteSlotCount && iLowerIndex < slotCount - dummyLower)
  5112. {
  5113. adjustslot[iLowerIndex] = "monitor";
  5114. iLowerIndex++;
  5115. iLowerCount = 0;
  5116. }
  5117. }
  5118. else
  5119. {
  5120. if (!monitorSlot && iUpperCount + iLowerCount >= cassetteSlotCount && iUpperIndex >= dummyUpper && iLowerIndex < slotCount - dummyLower)
  5121. {
  5122. adjustslot[iUpperIndex] = "monitor";
  5123. iUpperIndex--;
  5124. iUpperCount = 0;
  5125. adjustslot[iLowerIndex] = "monitor";
  5126. iLowerIndex++;
  5127. iLowerCount = 0;
  5128. bCassetteEvenNumber = true;
  5129. }
  5130. }
  5131. if (iCount % 2 == 0)
  5132. {
  5133. for (int k = iUpperIndex; k >= dummyUpper; k--)
  5134. {
  5135. if (adjustslot[k] == "")
  5136. {
  5137. adjustslot[k] = "production";
  5138. currentPWaferNum--;
  5139. iUpperIndex = k - 1;
  5140. iUpperCount++;
  5141. iCount++;
  5142. break;
  5143. }
  5144. }
  5145. }
  5146. else
  5147. {
  5148. for (int k = iLowerIndex; k < slotCount - dummyLower; k++)
  5149. {
  5150. if (adjustslot[k] == "")
  5151. {
  5152. adjustslot[k] = "production";
  5153. currentPWaferNum--;
  5154. iLowerIndex = k + 1;
  5155. iLowerCount++;
  5156. iCount++;
  5157. break;
  5158. }
  5159. }
  5160. }
  5161. }
  5162. }
  5163. if (!monitorSlot)
  5164. {
  5165. if (adjustslot[iUpperIndex + 1] != "monitor")
  5166. {
  5167. adjustslot[iUpperIndex] = "monitor";
  5168. iUpperIndex--;
  5169. iCount++;
  5170. }
  5171. if (adjustslot[iLowerIndex - 1] != "monitor")
  5172. {
  5173. adjustslot[iLowerIndex] = "monitor";
  5174. iLowerIndex++;
  5175. iCount++;
  5176. }
  5177. }
  5178. if (cassetteSupplyED)
  5179. {
  5180. for (int i = 0; i < slotCount - iCount - dummyUpper - dummyLower; i++)
  5181. {
  5182. if (currentEDNum <= 0)
  5183. {
  5184. bEDShort = true;
  5185. break;
  5186. }
  5187. for (int j = iUpperIndex; j >= dummyUpper; j--)
  5188. {
  5189. if (adjustslot[j] == "")
  5190. {
  5191. adjustslot[j] = "extradummy";
  5192. currentEDNum--;
  5193. iUpperIndex = j - 1;
  5194. break;
  5195. }
  5196. }
  5197. if (currentEDNum <= 0)
  5198. {
  5199. bEDShort = true;
  5200. break;
  5201. }
  5202. for (int j = iLowerIndex; j < slotCount - dummyLower; j++)
  5203. {
  5204. if (adjustslot[j] == "")
  5205. {
  5206. adjustslot[j] = "extradummy";
  5207. currentEDNum--;
  5208. iLowerIndex = j + 1;
  5209. break;
  5210. }
  5211. }
  5212. }
  5213. }
  5214. }
  5215. return bEDShort;
  5216. }
  5217. #endregion
  5218. #region dummy use
  5219. private bool CheckDummyWaferUse(ProcessJobInfo pj)
  5220. {
  5221. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5222. {
  5223. if (!ModuleHelper.IsStocker(module) || !pj.Stockers.Any(x => x.Item1 == module.ToString()))
  5224. continue;
  5225. var wafers = WaferManager.Instance.GetWafers(module);
  5226. if (wafers == null)
  5227. continue;
  5228. foreach (var wafer in wafers)
  5229. {
  5230. if (wafer.IsEmpty)
  5231. continue;
  5232. // SD Dummy
  5233. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.SDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm"))
  5234. {
  5235. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.SDCountWarning")} 次");
  5236. }
  5237. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm"))
  5238. {
  5239. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeWarning")} hour");
  5240. }
  5241. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm"))
  5242. {
  5243. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessWarning")} nm");
  5244. }
  5245. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm"))
  5246. {
  5247. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm")} 次");
  5248. return false;
  5249. }
  5250. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm"))
  5251. {
  5252. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm")} hour");
  5253. return false;
  5254. }
  5255. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm"))
  5256. {
  5257. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm")} nm");
  5258. return false;
  5259. }
  5260. // Extra Dummy
  5261. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
  5262. {
  5263. Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning")} 次");
  5264. }
  5265. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
  5266. {
  5267. Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning")} hour");
  5268. }
  5269. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
  5270. {
  5271. Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning")} nm");
  5272. }
  5273. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
  5274. {
  5275. Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm")} 次");
  5276. return false;
  5277. }
  5278. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
  5279. {
  5280. Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm")} hour");
  5281. return false;
  5282. }
  5283. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
  5284. {
  5285. Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm")} nm");
  5286. return false;
  5287. }
  5288. }
  5289. }
  5290. return true;
  5291. }
  5292. #endregion
  5293. private void MonitorPMTask()
  5294. {
  5295. if (!_carrierRobot.IsAvailable || !_waferRobot.IsAvailable)
  5296. return;
  5297. foreach (var pm in _lstPms)
  5298. {
  5299. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  5300. if (pmModule == null)
  5301. return;
  5302. if (!pm.IsAvailable && !pmModule.IsMainRecipeComplete)
  5303. continue;
  5304. var wafers = WaferManager.Instance.GetWafers(pm.Module);
  5305. if (wafers == null)
  5306. continue;
  5307. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  5308. if (pj == null)
  5309. return;
  5310. bool isNeedProcess = false;
  5311. bool isProcessed = false;
  5312. foreach (var wafer in wafers)
  5313. {
  5314. if (wafer == null || wafer.IsEmpty)
  5315. continue;
  5316. if (!pj.SlotWafers.Any(x => x.Item1 == (ModuleName)wafer.OriginStation && x.Item2 == wafer.OriginSlot))
  5317. pj.SlotWafers.Add(Tuple.Create((ModuleName)wafer.OriginStation, wafer.OriginSlot));
  5318. if (wafer.ProcessJob == null)
  5319. {
  5320. wafer.ProcessJob = pj;
  5321. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  5322. }
  5323. if (wafer.ProcessState == EnumWaferProcessStatus.Idle)
  5324. {
  5325. isNeedProcess = true;
  5326. isProcessed = false;
  5327. }
  5328. if (wafer.ProcessState == EnumWaferProcessStatus.Completed)
  5329. {
  5330. isNeedProcess = false;
  5331. isProcessed = true;
  5332. }
  5333. }
  5334. if (pj.IsEmptyLayout)
  5335. {
  5336. if (pj.ProcessingState == EnumProcessingState.Charging)
  5337. {
  5338. isNeedProcess = true;
  5339. isProcessed = false;
  5340. }
  5341. else
  5342. {
  5343. isNeedProcess = false;
  5344. if (DateTime.Now - pm.RecipeStartTime > TimeSpan.FromSeconds(5))
  5345. isProcessed = true;
  5346. }
  5347. }
  5348. if (isNeedProcess && CheckChargeFinished(pj, pm.Module) && pj.ProcessingState != EnumProcessingState.Processing &&
  5349. pmModule.CheckStandbyCondition() && pm.IsAvailable)
  5350. {
  5351. if (SC.GetValue<bool>("System.IsEnableBoatChargeMapping") && !pj.IsMapAfterCharge)
  5352. {
  5353. var mappingSlot = GetMappingSlot(ModuleName.PM1);
  5354. if (_waferRobot.Map(ModuleName.PM1, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  5355. {
  5356. pj.IsMapAfterCharge = true;
  5357. return;
  5358. }
  5359. }
  5360. if (!pj.RobotHomed)
  5361. {
  5362. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
  5363. pj.RobotHomed = true;
  5364. }
  5365. pj.ProcessingState = EnumProcessingState.Processing;
  5366. var _boatslotmap = GetBoatSlotMap();
  5367. _faCallback.EndCharge(pj, _boatslotmap);
  5368. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  5369. if (pm.Process((string)pj.ProcessRecipe, false, true))
  5370. return;
  5371. }
  5372. //工艺结束
  5373. if (isProcessed)
  5374. {
  5375. if (pj.ProcessingState == EnumProcessingState.Processing)
  5376. {
  5377. Singleton<EquipmentManager>.Instance.EndPj();
  5378. if (pj.CoolTimeSec > 0)
  5379. {
  5380. _coolTimer.Restart();
  5381. pj.ProcessingState = EnumProcessingState.CoolingBeforeDischarge;
  5382. }
  5383. else
  5384. {
  5385. _coolTimer.Restart();
  5386. pj.ProcessingState = EnumProcessingState.CoolingBeforeDischarge;
  5387. }
  5388. LOG.Write($"Cooling start {pj.CoolTimeSec}");
  5389. }
  5390. if (pj.ProcessingState == EnumProcessingState.CoolingBeforeDischarge && (_coolTimer.ElapsedMilliseconds > pj.CoolTimeSec * 1000 || _isCoolingSkip))
  5391. {
  5392. _isCoolingSkip = false;
  5393. var boatModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule;
  5394. if (boatModule != null && !boatModule.IsBoatElevatorAtHomePosition && boatModule.ZAxisDevice.IsReady)
  5395. {
  5396. boatModule.ZAxisDevice.SetServoMoveTo("HomePosition", out _);
  5397. }
  5398. if (boatModule != null && !boatModule.IsBoatRotationAtHomePosition && boatModule.RAxisDevice.IsReady)
  5399. {
  5400. boatModule.RAxisDevice.ServoStop();
  5401. boatModule.RAxisDevice.SetServoHome();
  5402. }
  5403. if (boatModule != null && boatModule.IsBoatElevatorAtHomePosition && boatModule.IsBoatRotationAtHomePosition)
  5404. {
  5405. if (SC.GetValue<bool>("System.IsEnableBoatDischargeMapping") && !pj.IsMapBeforeDischarge)
  5406. {
  5407. var mappingSlot = GetMappingSlot(ModuleName.PM1);
  5408. if (_waferRobot.Map(ModuleName.PM1, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  5409. {
  5410. pj.IsMapBeforeDischarge = true;
  5411. return;
  5412. }
  5413. }
  5414. _coolTimer.Stop();
  5415. AdjustDischargeSlots();
  5416. pj.ProcessingState = EnumProcessingState.Discharging;
  5417. var _boatslotmap = GetBoatSlotMap();
  5418. _faCallback.StartDischarge(pj, _boatslotmap);
  5419. LOG.Write($"Cooling completed {pj.CoolTimeSec}");
  5420. if (pj.IsN2PurgeMode &&
  5421. SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable"))
  5422. {
  5423. pmModule?.SetN2PurgeProcess(true);
  5424. if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  5425. pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  5426. }
  5427. }
  5428. }
  5429. }
  5430. }
  5431. }
  5432. #endregion Module task
  5433. #region Logic Check
  5434. private bool CheckChargeFinished(ProcessJobInfo pj, ModuleName module, bool isOnlyCharge = false)
  5435. {
  5436. var wafers = WaferManager.Instance.GetWafers(module);
  5437. if (pj == null || wafers == null)
  5438. return false;
  5439. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) ||
  5440. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) ||
  5441. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2) ||
  5442. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) ||
  5443. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  5444. return false;
  5445. int edCount = 0;
  5446. int sdCount = 0;
  5447. int m1Count = 0;
  5448. int m2Count = 0;
  5449. int pCount = 0;
  5450. int expertCount = 0;
  5451. foreach (var wafer in wafers)
  5452. {
  5453. if (wafer == null || wafer.IsEmpty)
  5454. continue;
  5455. switch (wafer.WaferType)
  5456. {
  5457. case WaferType.M1:
  5458. m1Count++;
  5459. break;
  5460. case WaferType.M2:
  5461. m2Count++;
  5462. break;
  5463. case WaferType.ED:
  5464. edCount++;
  5465. break;
  5466. case WaferType.SD:
  5467. sdCount++;
  5468. break;
  5469. case WaferType.P:
  5470. pCount++;
  5471. break;
  5472. case WaferType.XD:
  5473. case WaferType.T:
  5474. expertCount++;
  5475. break;
  5476. }
  5477. }
  5478. if (expertCount > 0)
  5479. {
  5480. if (pj.XdSlots == null || pj.TSlots == null)
  5481. return false;
  5482. return expertCount == pj.XdSlots.Count + pj.TSlots.Count;
  5483. }
  5484. if (pj.ExtraDummySlots != null && pj.ExtraDummySlots.Count != edCount && pj.ExtraDummySlots.Count > 0)
  5485. return false;
  5486. if (pj.SideDummySlots != null && pj.SideDummySlots.Count != sdCount && pj.SideDummySlots.Count > 0)
  5487. return false;
  5488. if (pj.Monitor1Slots != null && pj.Monitor1Slots.Count != m1Count)
  5489. return false;
  5490. if (pj.Monitor2Slots != null && pj.Monitor2Slots.Count != m2Count)
  5491. return false;
  5492. foreach (var s in pj.Stockers)
  5493. {
  5494. var carrier = CarrierManager.Instance.GetCarrier(s.Item1, 0);
  5495. if (carrier == null || carrier.CarrierType != CarrierType.P || carrier.IsEmpty)
  5496. continue;
  5497. var carrierWafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(s.Item1)).ToList();
  5498. if (carrierWafers == null || (carrierWafers.Any(x => !x.IsEmpty) && pj.ProductSlots.Count > pCount))
  5499. return false;
  5500. }
  5501. var carrierRobot = CarrierManager.Instance.GetCarrier(_carrierRobot.Module, 0);
  5502. if (carrierRobot != null && !carrierRobot.IsEmpty && isOnlyCharge)
  5503. return false;
  5504. if (carrierRobot != null && !carrierRobot.IsEmpty &&
  5505. carrierRobot.CarrierType == CarrierType.P &&
  5506. pj.Stockers.Any(x => ModuleHelper.Converter(x.Item1) == carrierRobot.InternalModuleName))
  5507. {
  5508. var carrierWafers = WaferManager.Instance.GetWafers(_carrierRobot.Module).ToList();
  5509. if (carrierWafers == null || carrierWafers.Any(x => !x.IsEmpty))
  5510. return false;
  5511. }
  5512. foreach (var fims in _lstFIMSs)
  5513. {
  5514. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  5515. if (carrier != null && !carrier.IsEmpty && isOnlyCharge)
  5516. return false;
  5517. if (carrier != null && !carrier.IsEmpty &&
  5518. carrier.CarrierType == CarrierType.P &&
  5519. pj.Stockers.Any(x => ModuleHelper.Converter(x.Item1) == carrier.InternalModuleName))
  5520. {
  5521. var carrierWafers = WaferManager.Instance.GetWafers(fims.Module).ToList();
  5522. if (carrierWafers == null || carrierWafers.Any(x => !x.IsEmpty))
  5523. return false;
  5524. }
  5525. }
  5526. return true;
  5527. }
  5528. private bool CheckProcessJobReady(ProcessJobInfo pj)
  5529. {
  5530. bool isReady = true;
  5531. if (pj == null)
  5532. return false;
  5533. //Boat Ready检查
  5534. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  5535. if (pmModule == null || !pmModule.CheckReadyForTransfer(_waferRobot.Module, Hand.Blade1, 0, EnumTransferType.Place, out string reason))
  5536. return false;
  5537. int pCount = 0;
  5538. int m1Count = 0;
  5539. int m2Count = 0;
  5540. foreach (var s in pj.Stockers)
  5541. {
  5542. var type = SC.GetStringValue($"System.Stocker.{s.Item1}WaferType");
  5543. if (!string.IsNullOrEmpty(type) && (type.Contains("P") || type.Contains("M") || type.Contains("None")))
  5544. {
  5545. ModuleName module = ModuleHelper.Converter(s.Item1);
  5546. if (!CarrierManager.Instance.CheckHasCarrier(module, 0))
  5547. continue;
  5548. var wafers = WaferManager.Instance.GetWafers(module).ToList();
  5549. if (wafers == null)
  5550. continue;
  5551. foreach (var wafer in wafers)
  5552. {
  5553. if (wafer == null || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  5554. continue;
  5555. if (wafer.WaferType == WaferType.M1)
  5556. m1Count++;
  5557. if (wafer.WaferType == WaferType.M2)
  5558. m2Count++;
  5559. if (wafer.WaferType == WaferType.P)
  5560. pCount++;
  5561. }
  5562. }
  5563. }
  5564. if (m1Count < pj.Monitor1Slots.Count || m2Count < pj.Monitor2Slots.Count || pCount < pj.ProductSlots.Count)
  5565. return false;
  5566. return isReady;
  5567. }
  5568. protected bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  5569. {
  5570. if (pj.SlotWafers == null || pj.SlotWafers.Count == 0 ||
  5571. pj.SlotWafers.Count != (pj.SideDummySlots != null ? pj.SideDummySlots.Count : 0) +
  5572. (pj.ExtraDummySlots != null ? pj.ExtraDummySlots.Count : 0) +
  5573. (pj.ProductSlots != null ? pj.ProductSlots.Count : 0) +
  5574. (pj.Monitor1Slots != null ? pj.Monitor1Slots.Count : 0) +
  5575. (pj.Monitor2Slots != null ? pj.Monitor2Slots.Count : 0))
  5576. return false;
  5577. var boatWafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  5578. for (int i = 0; i < pj.SlotWafers.Count; ++i)
  5579. {
  5580. if (!CarrierManager.Instance.CheckHasCarrier(pj.SlotWafers[i].Item1, 0))
  5581. {
  5582. var isFOUPUnloaded = true;
  5583. if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0) && CarrierManager.Instance.GetCarrier(_carrierRobot.Module, 0).InternalModuleName == pj.SlotWafers[i].Item1)
  5584. {
  5585. isFOUPUnloaded = false;
  5586. }
  5587. foreach (var st in _lstFIMSs)
  5588. {
  5589. if (!st.IsOnline || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  5590. continue;
  5591. if (CarrierManager.Instance.GetCarrier(st.Module, 0).InternalModuleName == pj.SlotWafers[i].Item1)
  5592. {
  5593. isFOUPUnloaded = false;
  5594. break;
  5595. }
  5596. }
  5597. if (isFOUPUnloaded)
  5598. continue;//已经unload
  5599. }
  5600. WaferInfo wafer = WaferManager.Instance.GetWafer(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2);
  5601. if (wafer.IsEmpty)
  5602. {
  5603. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  5604. return false;
  5605. else
  5606. {
  5607. if (boatWafers.Any(x => x.OriginStation == (int)pj.SlotWafers[i].Item1 && x.OriginSlot == pj.SlotWafers[i].Item2 &&
  5608. !x.IsEmpty &&
  5609. (x.WaferType == WaferType.SD || x.WaferType == WaferType.ED)))
  5610. continue;
  5611. else
  5612. return false;
  5613. }
  5614. }
  5615. if (checkAllProcessed && CheckWaferNeedProcess(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2))
  5616. return false;
  5617. }
  5618. if (checkAllProcessed)
  5619. {
  5620. if (boatWafers != null)
  5621. {
  5622. for (int i = 0; i < boatWafers.Count; i++)
  5623. {
  5624. var wafer = boatWafers[i];
  5625. if (wafer.IsEmpty)
  5626. continue;
  5627. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.Failed)
  5628. {
  5629. return false;
  5630. }
  5631. }
  5632. }
  5633. }
  5634. return true;
  5635. }
  5636. public bool CheckWaferNeedProcess(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
  5637. {
  5638. WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
  5639. if (wafer.IsEmpty)
  5640. return false;
  5641. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  5642. return false;
  5643. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  5644. return false;
  5645. for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
  5646. {
  5647. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  5648. .Contains(ModuleName.PM1) || wafer.ProcessJob.Sequence.Steps[i].StepModules
  5649. .Contains(ModuleName.PM2))
  5650. {
  5651. if (processIn == ModuleName.System)
  5652. return true;
  5653. //if (_mapLpPm[(ModuleName)wafer.OriginStation] != processIn)
  5654. // return false;
  5655. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  5656. .Contains(processIn))
  5657. return true;
  5658. }
  5659. }
  5660. return false;
  5661. }
  5662. private List<Tuple<WaferType, int>> GetWaferTypeSlots()
  5663. {
  5664. List<Tuple<WaferType, int>> slots = new List<Tuple<WaferType, int>>();
  5665. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  5666. if (pj == null)
  5667. return slots;
  5668. if (pj.SideDummySlots != null && pj.SideDummySlots.Count > 0)
  5669. {
  5670. pj.SideDummySlots.ForEach(x => slots.Add(Tuple.Create(WaferType.SD, x)));
  5671. }
  5672. if (pj.ExtraDummySlots != null && pj.ExtraDummySlots.Count > 0)
  5673. {
  5674. pj.ExtraDummySlots.ForEach(x => slots.Add(Tuple.Create(WaferType.ED, x)));
  5675. }
  5676. if (pj.ProductSlots != null && pj.ProductSlots.Count > 0)
  5677. {
  5678. pj.ProductSlots.ForEach(x => slots.Add(Tuple.Create(WaferType.P, x)));
  5679. }
  5680. if (pj.Monitor1Slots != null && pj.Monitor1Slots.Count > 0)
  5681. {
  5682. pj.Monitor1Slots.ForEach(x => slots.Add(Tuple.Create(WaferType.M1, x)));
  5683. }
  5684. if (pj.Monitor2Slots != null && pj.Monitor2Slots.Count > 0)
  5685. {
  5686. pj.Monitor2Slots.ForEach(x => slots.Add(Tuple.Create(WaferType.M2, x)));
  5687. }
  5688. return slots.OrderByDescending(x => x.Item2).ToList();
  5689. }
  5690. private string GetMappingSlot(ModuleName module)
  5691. {
  5692. string mappingSlot = string.Empty;
  5693. var wafers = WaferManager.Instance.GetWafers(module);
  5694. if (wafers != null)
  5695. {
  5696. for (int i = 0; i < wafers.Length; i++)
  5697. {
  5698. if (!wafers[i].IsEmpty)
  5699. mappingSlot += "1";
  5700. else
  5701. mappingSlot += "0";
  5702. }
  5703. }
  5704. return mappingSlot;
  5705. }
  5706. private void AdjustDischargeSlots()
  5707. {
  5708. _sideDummySlots.Clear();
  5709. _extraDummySlots.Clear();
  5710. _productSlots.Clear();
  5711. _monitor1Slots.Clear();
  5712. _monitor2Slots.Clear();
  5713. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  5714. {
  5715. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  5716. continue;
  5717. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  5718. if (wafer == null || wafer.IsEmpty)
  5719. continue;
  5720. switch (wafer.WaferType)
  5721. {
  5722. case WaferType.SD:
  5723. _sideDummySlots.Add(i);
  5724. break;
  5725. case WaferType.ED:
  5726. _extraDummySlots.Add(i);
  5727. break;
  5728. case WaferType.P:
  5729. _productSlots.Add(i);
  5730. break;
  5731. case WaferType.M1:
  5732. _monitor1Slots.Add(i);
  5733. break;
  5734. case WaferType.M2:
  5735. _monitor2Slots.Add(i);
  5736. break;
  5737. }
  5738. }
  5739. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  5740. {
  5741. _productSlots.Sort((x, y) => x.CompareTo(y));//升序
  5742. _monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  5743. _monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  5744. _extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  5745. _sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  5746. }
  5747. else
  5748. {
  5749. _productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  5750. _monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  5751. _monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  5752. _extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  5753. _sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  5754. }
  5755. }
  5756. public void CreatePj(string processName)
  5757. {
  5758. _dbCallback.PjCreated(processName);
  5759. }
  5760. public void StartPj()
  5761. {
  5762. _dbCallback.PjStart();
  5763. }
  5764. public void EndPj(string endStatus)
  5765. {
  5766. _dbCallback.PjUpdated();
  5767. _dbCallback.PjFinished(endStatus);
  5768. }
  5769. public void PjUpdated()
  5770. {
  5771. _dbCallback.PjUpdated();
  5772. }
  5773. public void PjFinished(string endStatus)
  5774. {
  5775. _dbCallback.PjFinished(endStatus);
  5776. }
  5777. #endregion Logic Check
  5778. public void CoolingSkip()
  5779. {
  5780. _isCoolingSkip = true;
  5781. }
  5782. public string GetFirstPJId()
  5783. {
  5784. return _dbCallback.GetFirstPJId();
  5785. }
  5786. public string GetFirstPJStatus()
  5787. {
  5788. if (_lstProcessJobs == null || _lstProcessJobs.Count == 0)
  5789. {
  5790. return "";
  5791. }
  5792. return _lstProcessJobs[0].ProcessingState.ToString();
  5793. }
  5794. #region FA
  5795. public bool IsCJExisted(string cjid)
  5796. {
  5797. return _lstControlJobs.Exists(x => x.Name == cjid);
  5798. }
  5799. public bool IsCJExcuting(string cjid)
  5800. {
  5801. return _lstControlJobs.Exists(x => x.Name == cjid && x.State == EnumControlJobState.Executing);
  5802. }
  5803. public bool CreateControlJob(string jobId, List<string> pjIDs, out ControlJobInfo cj)
  5804. {
  5805. cj = null;
  5806. if (_lstControlJobs.Exists(x => x.Name == jobId))
  5807. {
  5808. //EV.PostWarningLog(LogSource, $"{jobId} is already created");
  5809. return false;
  5810. }
  5811. cj = new ControlJobInfo();
  5812. cj.Name = jobId;
  5813. //cj.Module = module;
  5814. cj.LotName = jobId;
  5815. cj.LotInnerId = Guid.NewGuid();
  5816. cj.LotWafers = new List<WaferInfo>();
  5817. cj.CreateTime = DateTime.Now;
  5818. cj.SetState(EnumControlJobState.Queued);
  5819. foreach (var pjName in pjIDs)
  5820. {
  5821. var pj = _lstProcessJobs.FirstOrDefault(x => x.Name == pjName);
  5822. if (pj == null)
  5823. {
  5824. LOG.Info($"not find {pjName} while create control job");
  5825. continue;
  5826. }
  5827. pj.ControlJobName = jobId;
  5828. cj.ProcessJobNameList.Add(pj.Name);
  5829. }
  5830. if (!_lstControlJobs.Contains(cj))
  5831. _lstControlJobs.Add(cj);
  5832. _faCallback.JobCreated(cj);
  5833. //if ((Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).IsExcuteIdleRecipe)
  5834. // (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).EndIdleRecipe();
  5835. return true;
  5836. }
  5837. private bool CheckWaferStatus(List<Tuple<string, string>> useStockers, bool isNeedCheckMonitor, bool isNeedCheckP, out string reason)
  5838. {
  5839. reason = string.Empty;
  5840. if (SC.GetValue<bool>("System.IsCycleMode"))
  5841. {
  5842. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5843. {
  5844. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  5845. continue;
  5846. var wafers = WaferManager.Instance.GetWafers(module);
  5847. if (wafers == null)
  5848. continue;
  5849. foreach (var wafer in wafers)
  5850. {
  5851. if (wafer.IsEmpty)
  5852. continue;
  5853. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  5854. }
  5855. }
  5856. }
  5857. else
  5858. {
  5859. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5860. {
  5861. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  5862. continue;
  5863. var wafers = WaferManager.Instance.GetWafers(module);
  5864. if (wafers == null)
  5865. continue;
  5866. if (SC.GetValue<bool>("System.EnableWarningFailedWafer"))
  5867. {
  5868. if (wafers.ToList().Any(x => x.ProcessState == EnumWaferProcessStatus.Failed))
  5869. {
  5870. reason = $"{module} has failed wafers.";
  5871. return false;
  5872. }
  5873. }
  5874. foreach (var wafer in wafers)
  5875. {
  5876. if (wafer.IsEmpty)
  5877. continue;
  5878. if (wafer.ProcessState != EnumWaferProcessStatus.Idle)
  5879. {
  5880. if (SC.GetValue<bool>("System.EnableWarningWaferProcessState"))
  5881. {
  5882. if (wafer.WaferType == WaferType.P && isNeedCheckP)
  5883. {
  5884. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  5885. return false;
  5886. }
  5887. if (isNeedCheckMonitor)
  5888. {
  5889. if (wafer.WaferType == WaferType.M)
  5890. {
  5891. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  5892. return false;
  5893. }
  5894. }
  5895. }
  5896. else
  5897. {
  5898. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  5899. }
  5900. }
  5901. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  5902. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  5903. }
  5904. }
  5905. }
  5906. return true;
  5907. }
  5908. public bool CreateProcessJob(out ProcessJobInfo pj, params object[] objs)
  5909. {
  5910. var param = (Dictionary<string, object>)objs[0];
  5911. pj = null;
  5912. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5913. {
  5914. var lpModule = Singleton<EquipmentManager>.Instance.Modules[module] as LoadPortModule;
  5915. if (lpModule != null)
  5916. {
  5917. if (lpModule.FsmState == (int)LoadPortModule.STATE.Init)
  5918. {
  5919. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5920. return false;
  5921. }
  5922. if (lpModule.FsmState == (int)LoadPortModule.STATE.Error)
  5923. {
  5924. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5925. return false;
  5926. }
  5927. }
  5928. var fimsModule = Singleton<EquipmentManager>.Instance.Modules[module] as FIMSModule;
  5929. if (fimsModule != null)
  5930. {
  5931. if (fimsModule.FsmState == (int)FIMSModule.STATE.Init)
  5932. {
  5933. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5934. return false;
  5935. }
  5936. if (fimsModule.FsmState == (int)FIMSModule.STATE.Error)
  5937. {
  5938. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5939. return false;
  5940. }
  5941. }
  5942. var boatModule = Singleton<EquipmentManager>.Instance.Modules[module] as BoatModule;
  5943. if (boatModule != null)
  5944. {
  5945. if (boatModule.FsmState == (int)BoatModule.STATE.Init)
  5946. {
  5947. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5948. return false;
  5949. }
  5950. if (boatModule.FsmState == (int)BoatModule.STATE.Error)
  5951. {
  5952. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5953. return false;
  5954. }
  5955. }
  5956. var carrierRobotModule = Singleton<EquipmentManager>.Instance.Modules[module] as CarrierRobotModule;
  5957. if (carrierRobotModule != null)
  5958. {
  5959. if (carrierRobotModule.FsmState == (int)CarrierRobotModule.STATE.Init)
  5960. {
  5961. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5962. return false;
  5963. }
  5964. if (carrierRobotModule.FsmState == (int)CarrierRobotModule.STATE.Error)
  5965. {
  5966. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5967. return false;
  5968. }
  5969. }
  5970. var waferRobotModule = Singleton<EquipmentManager>.Instance.Modules[module] as WaferRobotModule;
  5971. if (waferRobotModule != null)
  5972. {
  5973. if (waferRobotModule.FsmState == (int)WaferRobotModule.STATE.Init)
  5974. {
  5975. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5976. return false;
  5977. }
  5978. if (waferRobotModule.FsmState == (int)WaferRobotModule.STATE.Error)
  5979. {
  5980. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5981. return false;
  5982. }
  5983. }
  5984. var pmModule = Singleton<EquipmentManager>.Instance.Modules[module] as PMModule;
  5985. if (pmModule != null)
  5986. {
  5987. if (pmModule.FsmState == (int)PMModule.STATE.Init)
  5988. {
  5989. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5990. return false;
  5991. }
  5992. if (pmModule.FsmState == (int)PMModule.STATE.Error)
  5993. {
  5994. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5995. return false;
  5996. }
  5997. }
  5998. }
  5999. if (!Singleton<EquipmentManager>.Instance.GetJobRecipeInfor((string)param["JobRecipe"], out string processRecipe, out string layoutRecipe, out int coolTime, out string reason))
  6000. {
  6001. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6002. return false;
  6003. }
  6004. if (string.IsNullOrEmpty(layoutRecipe))
  6005. {
  6006. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid, Layout Recipe is null");
  6007. return false;
  6008. }
  6009. var path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Layout\\{layoutRecipe}.rcp";
  6010. if (!File.Exists(path))
  6011. {
  6012. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Layout \"{layoutRecipe}\" not exist.");
  6013. return false;
  6014. }
  6015. path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Process\\{processRecipe}.rcp";
  6016. if (!File.Exists(path))
  6017. {
  6018. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Process recipe \"{processRecipe}\" not exist.");
  6019. return false;
  6020. }
  6021. if (!RecipeParser.Parse(processRecipe, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
  6022. {
  6023. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load process recipe {processRecipe} failed, {reason}");
  6024. return false;
  6025. }
  6026. List<Tuple<string, string, List<int>>> useStockers = new List<Tuple<string, string, List<int>>>();
  6027. if (RecipeParser.LayoutRecipeParse(layoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  6028. {
  6029. if (param.ContainsKey("CarrierPara"))
  6030. {
  6031. //Stocker1,P_00000036,25,Exist,1111111111111111111111111,LP1;Stocker2,P_00000037,25,Exist,1111111111111111111111111,LP2
  6032. var paras = param["CarrierPara"].ToString().Split(';');
  6033. if (paras != null && paras.Length > 0)
  6034. {
  6035. foreach (var item in paras)
  6036. {
  6037. //Stocker13,,21/22/23/24/25"
  6038. var arry = item.Split(',');
  6039. if (arry != null && arry.Length >= 2)
  6040. {
  6041. var pStocker = GetModule(arry[0]) as SchedulerStocker;
  6042. if (pStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("P") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6043. {
  6044. var slots = new List<int>();
  6045. if (arry.Length >= 3)
  6046. {
  6047. var slotParas = arry[2].Split('/').ToList();
  6048. if (slotParas != null && slotParas.Count > 0)
  6049. {
  6050. foreach (var slotPara in slotParas)
  6051. {
  6052. var ret = int.TryParse(slotPara, out int slot);
  6053. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6054. {
  6055. if (_lstProcessJobs.Any())
  6056. {
  6057. foreach (var job in _lstProcessJobs)
  6058. {
  6059. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6060. {
  6061. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6062. return false;
  6063. }
  6064. }
  6065. }
  6066. slots.Add(slot - 1);
  6067. }
  6068. }
  6069. }
  6070. }
  6071. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6072. }
  6073. }
  6074. }
  6075. }
  6076. }
  6077. if (param.ContainsKey("mCarrierPara"))
  6078. {
  6079. //Stocker14,P_00000014;Stocker15,P_00000015
  6080. var paras = param["mCarrierPara"].ToString().Split(';');
  6081. if (paras != null && paras.Length > 0)
  6082. {
  6083. if (!string.IsNullOrEmpty(paras[0]))
  6084. {
  6085. foreach (var item in paras)
  6086. {
  6087. var arry = item.Split(',');
  6088. if (arry != null && arry.Length >= 2)
  6089. {
  6090. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6091. if (mStocker != null && SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M"))
  6092. {
  6093. var slots = new List<int>();
  6094. if (arry.Length >= 3)
  6095. {
  6096. var slotParas = arry[2].Split('/').ToList();
  6097. if (slotParas != null && slotParas.Count > 0)
  6098. {
  6099. foreach (var slotPara in slotParas)
  6100. {
  6101. var ret = int.TryParse(slotPara, out int slot);
  6102. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6103. {
  6104. if (_lstProcessJobs.Any())
  6105. {
  6106. foreach (var job in _lstProcessJobs)
  6107. {
  6108. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6109. {
  6110. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6111. return false;
  6112. }
  6113. }
  6114. }
  6115. slots.Add(slot - 1);
  6116. }
  6117. }
  6118. }
  6119. }
  6120. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6121. }
  6122. }
  6123. }
  6124. }
  6125. }
  6126. }
  6127. if (param.ContainsKey("m1CarrierPara"))
  6128. {
  6129. //Stocker14,P_00000014;Stocker15,P_00000015
  6130. var paras = param["m1CarrierPara"].ToString().Split(';');
  6131. if (paras != null && paras.Length > 0)
  6132. {
  6133. if (!string.IsNullOrEmpty(paras[0]))
  6134. {
  6135. foreach (var item in paras)
  6136. {
  6137. var arry = item.Split(',');
  6138. if (arry != null && arry.Length >= 2)
  6139. {
  6140. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6141. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M1") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6142. {
  6143. var slots = new List<int>();
  6144. if (arry.Length >= 3)
  6145. {
  6146. var slotParas = arry[2].Split('/').ToList();
  6147. if (slotParas != null && slotParas.Count > 0)
  6148. {
  6149. foreach (var slotPara in slotParas)
  6150. {
  6151. var ret = int.TryParse(slotPara, out int slot);
  6152. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6153. {
  6154. if (_lstProcessJobs.Any())
  6155. {
  6156. foreach (var job in _lstProcessJobs)
  6157. {
  6158. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6159. {
  6160. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6161. return false;
  6162. }
  6163. }
  6164. }
  6165. slots.Add(slot - 1);
  6166. }
  6167. }
  6168. }
  6169. }
  6170. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6171. }
  6172. }
  6173. }
  6174. }
  6175. }
  6176. }
  6177. if (param.ContainsKey("m2CarrierPara"))
  6178. {
  6179. //Stocker14,P_00000014;Stocker15,P_00000015
  6180. var paras = param["m2CarrierPara"].ToString().Split(';');
  6181. if (paras != null && paras.Length > 0)
  6182. {
  6183. if (!string.IsNullOrEmpty(paras[0]))
  6184. {
  6185. foreach (var item in paras)
  6186. {
  6187. var arry = item.Split(',');
  6188. if (arry != null && arry.Length >= 2)
  6189. {
  6190. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6191. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M2") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6192. {
  6193. var slots = new List<int>();
  6194. if (arry.Length >= 3)
  6195. {
  6196. var slotParas = arry[2].Split('/').ToList();
  6197. if (slotParas != null && slotParas.Count > 0)
  6198. {
  6199. foreach (var slotPara in slotParas)
  6200. {
  6201. var ret = int.TryParse(slotPara, out int slot);
  6202. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6203. {
  6204. if (_lstProcessJobs.Any())
  6205. {
  6206. foreach (var job in _lstProcessJobs)
  6207. {
  6208. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6209. {
  6210. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6211. return false;
  6212. }
  6213. }
  6214. }
  6215. slots.Add(slot - 1);
  6216. }
  6217. }
  6218. }
  6219. }
  6220. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6221. }
  6222. }
  6223. }
  6224. }
  6225. }
  6226. }
  6227. }
  6228. if (Singleton<FAJobController>.Instance.FaControlState != FAControlState.OnlineRemote.ToString())
  6229. useStockers.Sort(compare);
  6230. foreach (var s in _lstSideDummyStocker)
  6231. {
  6232. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.SD)
  6233. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  6234. else
  6235. {
  6236. bool onRobot = false;
  6237. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  6238. {
  6239. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  6240. if (carrier.CarrierType == CarrierType.SD &&
  6241. carrier.InternalModuleName == s.Module)
  6242. {
  6243. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6244. onRobot = true;
  6245. }
  6246. }
  6247. if (!onRobot)
  6248. {
  6249. bool inFIMS = false;
  6250. foreach (var fims in _lstFIMSs)
  6251. {
  6252. if (!fims.IsOnline)
  6253. continue;
  6254. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  6255. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.SD &&
  6256. carrier.InternalModuleName == s.Module)
  6257. {
  6258. inFIMS = true;
  6259. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6260. }
  6261. }
  6262. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  6263. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  6264. }
  6265. }
  6266. }
  6267. foreach (var s in _lstExtraDummyStocker)
  6268. {
  6269. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.ED)
  6270. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  6271. else
  6272. {
  6273. bool onRobot = false;
  6274. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  6275. {
  6276. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  6277. if (carrier.CarrierType == CarrierType.ED &&
  6278. carrier.InternalModuleName == s.Module)
  6279. {
  6280. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6281. onRobot = true;
  6282. }
  6283. }
  6284. if (!onRobot)
  6285. {
  6286. bool inFIMS = false;
  6287. foreach (var fims in _lstFIMSs)
  6288. {
  6289. if (!fims.IsOnline)
  6290. continue;
  6291. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  6292. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.ED &&
  6293. carrier.InternalModuleName == s.Module)
  6294. {
  6295. inFIMS = true;
  6296. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6297. }
  6298. }
  6299. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  6300. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  6301. }
  6302. }
  6303. }
  6304. var wafers = WaferManager.Instance.GetWafers(_pm1.Module);
  6305. if (wafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused) &&
  6306. SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  6307. {
  6308. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in boat");
  6309. return false;
  6310. }
  6311. if (wafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  6312. {
  6313. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in boat");
  6314. return false;
  6315. }
  6316. var robotWafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot);
  6317. if (robotWafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused))
  6318. {
  6319. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in wafer robot");
  6320. return false;
  6321. }
  6322. if (robotWafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  6323. {
  6324. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in wafer robot");
  6325. return false;
  6326. }
  6327. if (!CheckWaferStatus(useStockers, true, true, out reason))
  6328. {
  6329. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6330. return false;
  6331. }
  6332. //if (!CheckWaferStatus(useStockers, out reason))
  6333. //{
  6334. // Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6335. // return false;
  6336. //}
  6337. foreach (var stocker in useStockers)
  6338. {
  6339. if (CarrierManager.Instance.CheckHasCarrier($"{stocker.Item1}", 0) &&
  6340. CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName.ToString() != stocker.Item1)
  6341. {
  6342. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Carrier of {stocker.Item1} is not match stocker module name {CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName}");
  6343. return false;
  6344. }
  6345. }
  6346. bool isOnlyCharge = false;
  6347. if (param.ContainsKey("Charge"))
  6348. {
  6349. bool.TryParse(param["Charge"].ToString(), out isOnlyCharge);
  6350. }
  6351. var pjJobId = param["PJID"].ToString();
  6352. if (_lstProcessJobs.Exists(x => x.Name == pjJobId))
  6353. {
  6354. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have the same pj id={pjJobId}");
  6355. return false;
  6356. }
  6357. pj = new ProcessJobInfo();
  6358. pj.Name = pjJobId;
  6359. pj.JobRecipe = param.ContainsKey("JobRecipe") ? param["JobRecipe"].ToString() : "";
  6360. pj.ProcessRecipe = processRecipe;
  6361. pj.LayoutRecipe = layoutRecipe;
  6362. pj.ControlJobName = "";
  6363. pj.SetState(EnumProcessJobState.Queued);
  6364. pj.CreateTime = DateTime.Now;
  6365. pj.Stockers = useStockers;
  6366. pj.SlotWafers = new List<Tuple<ModuleName, int>>();
  6367. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  6368. pj.CoolTimeSec = coolTime;
  6369. //pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");
  6370. //pj.IsOnlyCharge = isOnlyCharge;
  6371. if (!CheckChargeRule(pj, out bool waferShort, false, true, out reason))
  6372. {
  6373. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {layoutRecipe} check charge rule failed, {reason}");
  6374. return false;
  6375. }
  6376. _lstProcessJobs.Add(pj);
  6377. //_faCallback.JobCreated(pj);
  6378. return true;
  6379. }
  6380. #endregion
  6381. private bool InvokeCoolingAbort(string arg1, object[] args)
  6382. {
  6383. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing && x.ProcessingState == EnumProcessingState.Cooling);
  6384. if (pj != null)
  6385. {
  6386. pj.CoolTimeSec = 0;
  6387. }
  6388. return true;
  6389. }
  6390. private bool InvokeCoolingModify(string arg1, object[] args)
  6391. {
  6392. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing && x.ProcessingState == EnumProcessingState.Cooling);
  6393. if (pj != null && args != null && args.Length > 0)
  6394. {
  6395. float.TryParse(args[0].ToString(), out float addCoolTime);
  6396. pj.CoolTimeSec = (int)addCoolTime;
  6397. }
  6398. return true;
  6399. }
  6400. private List<string> GetBoatSlotMap()
  6401. {
  6402. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  6403. if (wafers != null)
  6404. {
  6405. List<string> slotMap = new List<string>();
  6406. foreach (var wafer in wafers)
  6407. {
  6408. if (wafer == null || wafer.IsEmpty)
  6409. {
  6410. slotMap.Add("");
  6411. continue;
  6412. }
  6413. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  6414. slotMap.Add("filler");
  6415. else
  6416. slotMap.Add(wafer.WaferID);
  6417. }
  6418. return slotMap;
  6419. }
  6420. return null;
  6421. }
  6422. }
  6423. }