PMScheduleMaintenance.cs 18 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.Common.DeviceData;
  3. using Aitex.Core.RT.DataCenter;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.IOCore;
  6. using Aitex.Core.RT.Log;
  7. using Aitex.Core.RT.OperationCenter;
  8. using Aitex.Core.RT.Routine;
  9. using Aitex.Core.RT.SCCore;
  10. using Aitex.Core.Util;
  11. using DocumentFormat.OpenXml.VariantTypes;
  12. using FurnaceRT.Equipments.Systems;
  13. using MECF.Framework.Common.CommonData.EnumData;
  14. using MECF.Framework.Common.DataCenter;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.Event;
  17. using MECF.Framework.Common.OperationCenter;
  18. using MECF.Framework.Common.Utilities;
  19. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  20. using System;
  21. using System.Collections;
  22. using System.Collections.Generic;
  23. using System.Diagnostics;
  24. using System.Linq;
  25. namespace FurnaceRT.Equipments.PMs
  26. {
  27. public partial class PMModule
  28. {
  29. private void InitScheduleMaintenance()
  30. {
  31. new ScheduleMaintenanceData(MaintenanceItemEnum.SDCarrierUseFreq.ToString(), "Times", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  32. new ScheduleMaintenanceData(MaintenanceItemEnum.SDWaferThickness.ToString(), "Å", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  33. new ScheduleMaintenanceData(MaintenanceItemEnum.SDUsableDummyWafer.ToString(), "Sheets", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  34. new ScheduleMaintenanceData(MaintenanceItemEnum.SDBufferRackStayTime.ToString(), "h:m", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  35. new ScheduleMaintenanceData(MaintenanceItemEnum.SDWaferUserTime.ToString(), "h:m", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  36. new ScheduleMaintenanceData(MaintenanceItemEnum.FDCarrierUseFreq.ToString(), "Times", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  37. new ScheduleMaintenanceData(MaintenanceItemEnum.FDWaferThickness.ToString(), "Å", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  38. new ScheduleMaintenanceData(MaintenanceItemEnum.FDUsableDummyWafer.ToString(), "Sheets", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  39. new ScheduleMaintenanceData(MaintenanceItemEnum.FDBufferRackStayTime.ToString(), "h:m", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  40. new ScheduleMaintenanceData(MaintenanceItemEnum.FDWaferUserTime.ToString(), "h:m", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  41. new ScheduleMaintenanceData(MaintenanceItemEnum.BoatRecipeThickness1.ToString(), "Å", "Boat");
  42. new ScheduleMaintenanceData(MaintenanceItemEnum.BoatTCUseTime.ToString(), "h:m", "Boat");
  43. new ScheduleMaintenanceData(MaintenanceItemEnum.BoatCKDUseTime.ToString(), "h:m", "Boat");
  44. new ScheduleMaintenanceData(MaintenanceItemEnum.BoatPUMPUseTime.ToString(), "h:m", "Boat");
  45. new ScheduleMaintenanceData(MaintenanceItemEnum.NonOperationTime1.ToString(), "h:m", "Conditioning");
  46. new ScheduleMaintenanceData(MaintenanceItemEnum.NonOperationTime2.ToString(), "h:m", "Conditioning");
  47. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeExecuteFreq.ToString(), "Times", "Reactor.Recipe", "Select Recipe");
  48. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness.ToString(), "Å", "Reactor.Recipe", "Select Recipe");
  49. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq1.ToString(), "Times", "Reactor.StepRunFreq", "Step ID");
  50. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq2.ToString(), "Times", "Reactor.StepRunFreq", "Step ID");
  51. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq3.ToString(), "Times", "Reactor.StepRunFreq", "Step ID");
  52. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime1.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  53. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime2.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  54. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime3.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  55. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime4.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  56. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime5.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  57. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime6.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  58. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime7.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  59. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime8.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  60. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness1_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  61. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness2_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  62. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness3_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  63. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness4_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  64. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness5_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  65. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness6_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  66. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness7_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  67. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness8_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  68. }
  69. public void MaintenanceProcessingCommandExec(string maintenanceProcessing, AlarmReportItem alarmReportItem)
  70. {
  71. if (Enum.TryParse<MaintenanceProcessingCommandEnum>(maintenanceProcessing, out var command))
  72. {
  73. switch (command)
  74. {
  75. case MaintenanceProcessingCommandEnum.None:
  76. break;
  77. case MaintenanceProcessingCommandEnum.AlarmReport:
  78. alarmReportItem?.Exec();
  79. break;
  80. case MaintenanceProcessingCommandEnum.JobProhibition:
  81. break;
  82. case MaintenanceProcessingCommandEnum.JobManualStart:
  83. break;
  84. case MaintenanceProcessingCommandEnum.JobAutoStart:
  85. break;
  86. }
  87. }
  88. }
  89. #region Carrier/Wafer
  90. public void UpdateSEDWafer()
  91. {
  92. var ccc = BinarySerializer<Dictionary<ModuleName, Dictionary<int, WaferInfo>>>.FromStream("WaferManager");
  93. if (ccc == null)
  94. return;
  95. List<WaferInfo> waferInfos = new List<WaferInfo>();
  96. foreach (var moduleWafers in ccc)
  97. {
  98. waferInfos.AddRange(moduleWafers.Value.Select(a => a.Value));
  99. }
  100. if (waferInfos.Any(a => a.WaferType == WaferType.ED))
  101. {
  102. var maxEDUseCount = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseCount);
  103. var maxEDUseThick = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseThick);
  104. var maxEDUseTime = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseTime);
  105. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.FDCarrierUseFreq.ToString(), out var FDCarrierUseFreq))
  106. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(FDCarrierUseFreq.Item, maxEDUseCount);
  107. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.FDWaferThickness.ToString(), out var FDWaferThickness))
  108. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(FDWaferThickness.Item, maxEDUseThick);
  109. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.FDWaferUserTime.ToString(), out var FDWaferUserTime))
  110. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(FDWaferUserTime.Item, maxEDUseTime);
  111. }
  112. if (waferInfos.Any(a => a.WaferType == WaferType.SD))
  113. {
  114. var maxSDUseCount = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseCount);
  115. var maxSDUseThick = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseThick);
  116. var maxSDUseTime = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseTime);
  117. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.SDCarrierUseFreq.ToString(), out var SDCarrierUseFreq))
  118. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(SDCarrierUseFreq.Item, maxSDUseCount);
  119. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.SDWaferThickness.ToString(), out var SDWaferThickness))
  120. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(SDWaferThickness.Item, maxSDUseThick);
  121. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.SDWaferUserTime.ToString(), out var SDWaferUserTime))
  122. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(SDWaferUserTime.Item, maxSDUseTime);
  123. }
  124. }
  125. #endregion
  126. #region DataItemEnum.Reactor 模块
  127. /// <summary>
  128. /// 根据RecipeStep +StepGroup统计 累计膜厚
  129. /// </summary>
  130. /// <param name="recipeName"></param>
  131. public void UpdateRecipeStepGroupThickness(string stepName, float thickness)
  132. {
  133. if (string.IsNullOrEmpty(stepName) || thickness <= 0)
  134. return;
  135. var stepNo = stepName.Split(':').FirstOrDefault();
  136. var list = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values
  137. .Where(a => !string.IsNullOrEmpty(a.AdditionInformationDisplaySupplement))
  138. .Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepThickness}")
  139. .Where(a => a.AdditionInformationDisplaySupplement.Split(',').Contains(stepNo))
  140. .ToList();
  141. if (list == null || list.Count == 0)
  142. return;
  143. foreach (var item in list)
  144. {
  145. if (item == null)
  146. continue;
  147. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item, thickness);
  148. if (item.CurrentValue > item.StartValue && item.CurrentValue < item.LimitValue)
  149. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.ReatorStepThicknessWarning.Set, $"more than {item.StartValue} Å"));
  150. if (item.CurrentValue >= item.LimitValue)
  151. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.ReatorStepThicknessAlarm.Set, $"more than {item.LimitValue} Å"));
  152. }
  153. }
  154. /// <summary>
  155. /// 根据RecipeStep统计 Step执行Time 累计时间
  156. /// </summary>
  157. /// <param name="recipeName"></param>
  158. public void UpdateRecipeStepRunTime(string stepName, double stepTime)
  159. {
  160. if (string.IsNullOrEmpty(stepName) || stepTime <= 0)
  161. return;
  162. var stepNo = stepName.Split(':').FirstOrDefault();
  163. var list = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunTime}" && a.AdditionInformationDisplay == stepNo).ToList();
  164. if (list == null || list.Count == 0)
  165. return;
  166. foreach (var item in list)
  167. {
  168. if (item == null)
  169. continue;
  170. var data = Math.Round(stepTime, 1, MidpointRounding.AwayFromZero);
  171. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item, (float)data);
  172. }
  173. }
  174. /// <summary>
  175. /// 根据RecipeStep统计 Step执行 累计次数
  176. /// </summary>
  177. /// <param name="recipeName"></param>
  178. public void UpdateRecipeStepFre(string stepName)
  179. {
  180. if (string.IsNullOrEmpty(stepName))
  181. return;
  182. var stepNo = stepName.Split(':').FirstOrDefault();
  183. var list = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunFreq}" && a.AdditionInformationDisplay == stepNo).ToList();
  184. if (list == null || list.Count == 0)
  185. return;
  186. foreach (var item in list)
  187. {
  188. if (item == null)
  189. continue;
  190. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item);
  191. if (item.CurrentValue > item.StartValue && item.CurrentValue < item.LimitValue)
  192. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.ReatorStepRunFreqWarning.Set, $"more than {item.StartValue} times"));
  193. if (item.CurrentValue >= item.LimitValue)
  194. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.ReatorStepRunFreqAlarm.Set, $"more than {item.LimitValue} times"));
  195. }
  196. }
  197. /// <summary>
  198. /// 根据RecipeName统计 Recipe执行 累计次数
  199. /// </summary>
  200. /// <param name="processRecipeName"></param>
  201. public void UpdateRecipeFre(string recipeName)
  202. {
  203. if (string.IsNullOrEmpty(recipeName))
  204. return;
  205. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName).FirstOrDefault();
  206. if (item == null)
  207. return;
  208. if (item != null && item.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString())
  209. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item);
  210. }
  211. /// <summary>
  212. /// 根据RecipeName统计累计膜厚
  213. /// </summary>
  214. /// <param name="recipeName"></param>
  215. /// <param name="thickness"></param>
  216. public void UpdateRecipeThickness(string recipeName, float thickness)
  217. {
  218. if (string.IsNullOrEmpty(recipeName) || thickness <= 0)
  219. return;
  220. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Item == MaintenanceItemEnum.RecipeThickness.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName).FirstOrDefault();
  221. if (item == null)
  222. return;
  223. if (item != null && item.Item == MaintenanceItemEnum.RecipeThickness.ToString())
  224. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item, thickness);
  225. }
  226. #endregion
  227. #region 检查是否超过设定值
  228. public bool CheckRecipeExecuteFreqMoreThan(string recipeName)
  229. {
  230. if (string.IsNullOrEmpty(recipeName))
  231. return false;
  232. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName).FirstOrDefault();
  233. if (item == null)
  234. return false;
  235. if (item.CurrentValue > item.StartValue && item.CurrentValue < item.LimitValue)
  236. {
  237. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.RecipeExecuteFreqWarning.Set, $"more than {item.StartValue} times"));
  238. return false;
  239. }
  240. if (item.CurrentValue >= item.LimitValue)
  241. {
  242. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.RecipeExecuteFreqAlarm.Set, $"more than {item.LimitValue} times"));
  243. return true;
  244. }
  245. return false;
  246. }
  247. public bool CheckRecipeThicknessMoreThan(string recipeName)
  248. {
  249. if (string.IsNullOrEmpty(recipeName))
  250. return false;
  251. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Item == MaintenanceItemEnum.RecipeThickness.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName).FirstOrDefault();
  252. if (item == null)
  253. return false;
  254. if (item.CurrentValue > item.StartValue && item.CurrentValue < item.LimitValue)
  255. {
  256. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.RecipeThicknessWarning.Set, $"more than {item.StartValue} Å"));
  257. return false;
  258. }
  259. if (item.CurrentValue >= item.LimitValue)
  260. {
  261. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.RecipeThicknessAlarm.Set, $"more than {item.LimitValue} Å"));
  262. return true;
  263. }
  264. return false;
  265. }
  266. #endregion
  267. }
  268. }