AutoTransfer.cs 322 KB

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  1. using Aitex.Common.Util;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using System;
  12. using System.Collections.Generic;
  13. using System.IO;
  14. using System.Linq;
  15. using System.Text;
  16. using System.Threading.Tasks;
  17. using FurnaceRT.Equipments.CarrierRobots;
  18. using FurnaceRT.Equipments.PMs.RecipeExecutions;
  19. using FurnaceRT.Equipments.Schedulers;
  20. using FurnaceRT.Equipments.Systems;
  21. using FurnaceRT.Equipments.WaferRobots;
  22. using MECF.Framework.Common.Jobs;
  23. using Aitex.Core.RT.Log;
  24. using MECF.Framework.Common.DBCore;
  25. using Aitex.Core.RT.DataCenter;
  26. using System.Diagnostics;
  27. using FurnaceRT.Equipments.PMs;
  28. using MECF.Framework.Common.Schedulers;
  29. using System.Windows.Input;
  30. using System.Net.Sockets;
  31. using FurnaceRT.Equipments.FIMSs;
  32. using FurnaceRT.Devices;
  33. using System.Text.RegularExpressions;
  34. using MECF.Framework.Common.CommonData;
  35. using FurnaceRT.Equipments.Boats;
  36. using MECF.Framework.FA.Core.FAControl;
  37. using MECF.Framework.UI.Client.CenterViews.Operations.FA;
  38. using FurnaceRT.Equipments.LPs;
  39. namespace FurnaceRT.Equipments.Jobs
  40. {
  41. public class AutoTransfer : SchedulerModuleFactory
  42. {
  43. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  44. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  45. public List<ProcessJobInfo> LstProcessJobs => _lstProcessJobs;
  46. //private Object _locker = new Object();
  47. private const string LogSource = "Scheduler";
  48. System.Timers.Timer timer = null;
  49. private bool _isCycleMode;
  50. private int _cycleSetPoint = 0;
  51. private int _cycledCount = 0;
  52. private int _cycledWafer = 0;
  53. private int _cycledTotalWafer = 0;
  54. private int _cycleTime;
  55. private int _cycleTimeSecond = 0;
  56. private Stopwatch _coolTimer = new Stopwatch();
  57. private SchedulerFACallback _faCallback;
  58. private SchedulerDBCallback _dbCallback;
  59. private ProcessJobInfo _secondPj;
  60. private Dictionary<string, int> _sideDummyWafers = new Dictionary<string, int>();
  61. private Dictionary<string, int> _extraDummyWafers = new Dictionary<string, int>();
  62. private List<int> _sideDummySlots = new List<int>();
  63. private List<int> _extraDummySlots = new List<int>();
  64. private List<int> _productSlots = new List<int>();
  65. private List<int> _monitor1Slots = new List<int>();
  66. private List<int> _monitor2Slots = new List<int>();
  67. private List<int> _tSlots = new List<int>();//expert mode
  68. private List<int> _xdSlots = new List<int>();//expert mode
  69. private List<SchedulerStocker> _lstCurrentPjStocker = new List<SchedulerStocker>();
  70. private Dictionary<string, R_TRIG> _chargeRuleAlarmTrigDic = new Dictionary<string, R_TRIG>();
  71. private Dictionary<string, R_TRIG> _waferStatusAlarmTrigDic = new Dictionary<string, R_TRIG>();
  72. private Dictionary<string, R_TRIG> _dummyWaferCheckTrigDic = new Dictionary<string, R_TRIG>();
  73. private Dictionary<string, R_TRIG> _logTrigDic = new Dictionary<string, R_TRIG>();
  74. private bool _isCoolingSkip = false;
  75. public bool HasJobRunning
  76. {
  77. get { return _lstControlJobs.Count > 0; }
  78. }
  79. public AutoTransfer()
  80. {
  81. _faCallback = new SchedulerFACallback();
  82. _dbCallback = new SchedulerDBCallback();
  83. InitModule();
  84. _cycledTotalWafer = SC.ContainsItem("System.TotalCycledWafer")
  85. ? SC.GetValue<int>("System.TotalCycledWafer")
  86. : 0;
  87. DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
  88. DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
  89. DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
  90. DATA.Subscribe("Scheduler.CycledTotalWafer", () => _cycledTotalWafer);
  91. DATA.Subscribe("Scheduler.SecondPj", () => new List<ProcessJobInfo>() { _secondPj });
  92. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  93. DATA.Subscribe($"LP1.LocalJobName", () =>
  94. {
  95. var cj = _lstControlJobs.FirstOrDefault(x => x.Module == "LP1");
  96. if (cj != null)
  97. return cj.Name;
  98. return "";
  99. });
  100. DATA.Subscribe($"LP2.LocalJobStatus", () =>
  101. {
  102. var cj = _lstControlJobs.FirstOrDefault(x => x.Module == "LP2");
  103. if (cj != null)
  104. return cj.State.ToString();
  105. return "";
  106. });
  107. DATA.Subscribe($"Scheduler.CurrentControlJob", () =>
  108. {
  109. var cj = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
  110. return cj;
  111. });
  112. DATA.Subscribe($"Scheduler.CurrentProcessJob", () =>
  113. {
  114. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  115. return pj;
  116. });
  117. DATA.Subscribe($"Scheduler.ControlJobList", () =>
  118. {
  119. return _lstControlJobs;
  120. });
  121. DATA.Subscribe($"Scheduler.ProcessJobList", () =>
  122. {
  123. return _lstProcessJobs;
  124. });
  125. DATA.Subscribe($"Scheduler.CoolingTime", () =>
  126. {
  127. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  128. return pj != null ? pj.CoolTimeSec : 0;
  129. });
  130. DATA.Subscribe($"Scheduler.CoolingRemainTime", () =>
  131. {
  132. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  133. var coolTime = pj != null ? pj.CoolTimeSec : 0;
  134. if (_coolTimer.IsRunning)
  135. return (coolTime - _coolTimer.ElapsedMilliseconds / 1000) > 0 ? coolTime - _coolTimer.ElapsedMilliseconds / 1000 : 0;
  136. return coolTime;
  137. });
  138. DATA.Subscribe($"Scheduler.StockerUseSlots", () =>
  139. {
  140. Dictionary<string, string> stockerUseSlots = new Dictionary<string, string>();
  141. if (!_lstProcessJobs.Any())
  142. return stockerUseSlots;
  143. foreach (var pj in _lstProcessJobs)
  144. {
  145. if (pj.Stockers != null)
  146. {
  147. foreach (var stocker in pj.Stockers)
  148. {
  149. if (!stockerUseSlots.ContainsKey(stocker.Item1))
  150. stockerUseSlots.Add(stocker.Item1, string.Join(",", stocker.Item3));
  151. else
  152. {
  153. var value = stockerUseSlots[stocker.Item1];
  154. stockerUseSlots[stocker.Item1] = $"{value},{string.Join(",", stocker.Item3)}";
  155. }
  156. }
  157. }
  158. }
  159. return stockerUseSlots;
  160. });
  161. }
  162. public void Clear()
  163. {
  164. _carrierRobot.ResetTask();
  165. _waferRobot.ResetTask();
  166. foreach (var pm in _lstPms)
  167. {
  168. pm.ResetTask();
  169. }
  170. foreach (var lp in _lstLPs)
  171. {
  172. lp.ResetTask();
  173. }
  174. foreach (var fims in _lstFIMSs)
  175. {
  176. fims.ResetTask();
  177. }
  178. _lstControlJobs.Clear();
  179. _lstProcessJobs.Clear();
  180. _isCoolingSkip = false;
  181. }
  182. public void ResetTask(ModuleName module)
  183. {
  184. if (module == _carrierRobot.Module)
  185. _carrierRobot.ResetTask();
  186. if (module == _waferRobot.Module)
  187. _waferRobot.ResetTask();
  188. foreach (var lp in _lstLPs)
  189. {
  190. if (module == _carrierRobot.Module)
  191. lp.ResetTask();
  192. }
  193. foreach (var fims in _lstFIMSs)
  194. {
  195. if (module == _carrierRobot.Module)
  196. fims.ResetTask();
  197. }
  198. }
  199. #region Job Management
  200. public Result CreateJob(params object[] objs)
  201. {
  202. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  203. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  204. if (_isCycleMode)
  205. {
  206. _cycledWafer = 0;
  207. _cycledCount = 0;
  208. }
  209. if (objs == null || objs.Length == 0)
  210. {
  211. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid");
  212. return Result.FAIL;
  213. }
  214. var param = (Dictionary<string, object>)objs[0];
  215. if (param == null)
  216. {
  217. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid");
  218. return Result.FAIL;
  219. }
  220. var content = "";
  221. foreach (var key in param.Keys)
  222. {
  223. content += $"{key}-{param[key]}#";
  224. }
  225. LOG.Write($"Control Job: {content}");
  226. if (!Singleton<EquipmentManager>.Instance.GetJobRecipeInfor((string)param["JobRecipe"], out string processRecipe, out string layoutRecipe, out int coolTime, out string reason))
  227. {
  228. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  229. return Result.FAIL;
  230. }
  231. if (string.IsNullOrEmpty(layoutRecipe))
  232. {
  233. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid, Layout Recipe is null");
  234. return Result.FAIL;
  235. }
  236. var path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Layout\\{layoutRecipe}.rcp";
  237. if (!File.Exists(path))
  238. {
  239. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Layout \"{layoutRecipe}\" not exist.");
  240. return Result.FAIL;
  241. }
  242. path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Process\\{processRecipe}.rcp";
  243. if (!File.Exists(path))
  244. {
  245. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Process recipe \"{processRecipe}\" not exist.");
  246. return Result.FAIL;
  247. }
  248. if (!RecipeParser.Parse(processRecipe, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
  249. {
  250. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load process recipe {processRecipe} failed, {reason}");
  251. return Result.FAIL;
  252. }
  253. List<Tuple<string, string, List<int>>> useStockers = new List<Tuple<string, string, List<int>>>();
  254. if (RecipeParser.LayoutRecipeParse(layoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  255. {
  256. if (param.ContainsKey("CarrierPara"))
  257. {
  258. //Stocker1,P_00000036,25,Exist,1111111111111111111111111,LP1;Stocker2,P_00000037,25,Exist,1111111111111111111111111,LP2
  259. var paras = param["CarrierPara"].ToString().Split(';');
  260. if (paras != null && paras.Length > 0)
  261. {
  262. foreach (var item in paras)
  263. {
  264. //Stocker13,,21/22/23/24/25"
  265. var arry = item.Split(',');
  266. if (arry != null && arry.Length >= 2)
  267. {
  268. var pStocker = GetModule(arry[0]) as SchedulerStocker;
  269. if (pStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("P") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  270. {
  271. var slots = new List<int>();
  272. if (arry.Length >= 3)
  273. {
  274. var slotParas = arry[2].Split('/').ToList();
  275. if (slotParas != null && slotParas.Count > 0)
  276. {
  277. foreach (var slotPara in slotParas)
  278. {
  279. var ret = int.TryParse(slotPara, out int slot);
  280. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  281. {
  282. if (_lstProcessJobs.Any())
  283. {
  284. foreach (var job in _lstProcessJobs)
  285. {
  286. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  287. {
  288. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  289. return Result.FAIL;
  290. }
  291. }
  292. }
  293. slots.Add(slot - 1);
  294. }
  295. }
  296. }
  297. }
  298. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  299. }
  300. }
  301. }
  302. }
  303. }
  304. if (param.ContainsKey("mCarrierPara"))
  305. {
  306. //Stocker14,P_00000014;Stocker15,P_00000015
  307. var paras = param["mCarrierPara"].ToString().Split(';');
  308. if (paras != null && paras.Length > 0)
  309. {
  310. if (!string.IsNullOrEmpty(paras[0]))
  311. {
  312. foreach (var item in paras)
  313. {
  314. var arry = item.Split(',');
  315. if (arry != null && arry.Length >= 2)
  316. {
  317. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  318. if (mStocker != null && SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M"))
  319. {
  320. var slots = new List<int>();
  321. if (arry.Length >= 3)
  322. {
  323. var slotParas = arry[2].Split('/').ToList();
  324. if (slotParas != null && slotParas.Count > 0)
  325. {
  326. foreach (var slotPara in slotParas)
  327. {
  328. var ret = int.TryParse(slotPara, out int slot);
  329. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  330. {
  331. if (_lstProcessJobs.Any())
  332. {
  333. foreach (var job in _lstProcessJobs)
  334. {
  335. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  336. {
  337. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  338. return Result.FAIL;
  339. }
  340. }
  341. }
  342. slots.Add(slot - 1);
  343. }
  344. }
  345. }
  346. }
  347. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  348. }
  349. }
  350. }
  351. }
  352. }
  353. }
  354. if (param.ContainsKey("m1CarrierPara"))
  355. {
  356. //Stocker14,P_00000014;Stocker15,P_00000015
  357. var paras = param["m1CarrierPara"].ToString().Split(';');
  358. if (paras != null && paras.Length > 0)
  359. {
  360. if (!string.IsNullOrEmpty(paras[0]))
  361. {
  362. foreach (var item in paras)
  363. {
  364. var arry = item.Split(',');
  365. if (arry != null && arry.Length >= 2)
  366. {
  367. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  368. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M1") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  369. {
  370. var slots = new List<int>();
  371. if (arry.Length >= 3)
  372. {
  373. var slotParas = arry[2].Split('/').ToList();
  374. if (slotParas != null && slotParas.Count > 0)
  375. {
  376. foreach (var slotPara in slotParas)
  377. {
  378. var ret = int.TryParse(slotPara, out int slot);
  379. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  380. {
  381. if (_lstProcessJobs.Any())
  382. {
  383. foreach (var job in _lstProcessJobs)
  384. {
  385. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  386. {
  387. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  388. return Result.FAIL;
  389. }
  390. }
  391. }
  392. slots.Add(slot - 1);
  393. }
  394. }
  395. }
  396. }
  397. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  398. }
  399. }
  400. }
  401. }
  402. }
  403. }
  404. if (param.ContainsKey("m2CarrierPara"))
  405. {
  406. //Stocker14,P_00000014;Stocker15,P_00000015
  407. var paras = param["m2CarrierPara"].ToString().Split(';');
  408. if (paras != null && paras.Length > 0)
  409. {
  410. if (!string.IsNullOrEmpty(paras[0]))
  411. {
  412. foreach (var item in paras)
  413. {
  414. var arry = item.Split(',');
  415. if (arry != null && arry.Length >= 2)
  416. {
  417. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  418. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M2") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  419. {
  420. var slots = new List<int>();
  421. if (arry.Length >= 3)
  422. {
  423. var slotParas = arry[2].Split('/').ToList();
  424. if (slotParas != null && slotParas.Count > 0)
  425. {
  426. foreach (var slotPara in slotParas)
  427. {
  428. var ret = int.TryParse(slotPara, out int slot);
  429. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  430. {
  431. if (_lstProcessJobs.Any())
  432. {
  433. foreach (var job in _lstProcessJobs)
  434. {
  435. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  436. {
  437. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  438. return Result.FAIL;
  439. }
  440. }
  441. }
  442. slots.Add(slot - 1);
  443. }
  444. }
  445. }
  446. }
  447. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  448. }
  449. }
  450. }
  451. }
  452. }
  453. }
  454. useStockers.Sort(compare);
  455. foreach (var s in _lstSideDummyStocker)
  456. {
  457. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.SD)
  458. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  459. else
  460. {
  461. bool onRobot = false;
  462. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  463. {
  464. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  465. if (carrier.CarrierType == CarrierType.SD &&
  466. carrier.InternalModuleName == s.Module)
  467. {
  468. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  469. onRobot = true;
  470. }
  471. }
  472. if (!onRobot)
  473. {
  474. bool inFIMS = false;
  475. foreach (var fims in _lstFIMSs)
  476. {
  477. if (!fims.IsOnline)
  478. continue;
  479. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  480. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.SD &&
  481. carrier.InternalModuleName == s.Module)
  482. {
  483. inFIMS = true;
  484. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  485. }
  486. }
  487. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  488. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  489. }
  490. }
  491. }
  492. foreach (var s in _lstExtraDummyStocker)
  493. {
  494. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.ED)
  495. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  496. else
  497. {
  498. bool onRobot = false;
  499. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  500. {
  501. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  502. if (carrier.CarrierType == CarrierType.ED &&
  503. carrier.InternalModuleName == s.Module)
  504. {
  505. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  506. onRobot = true;
  507. }
  508. }
  509. if (!onRobot)
  510. {
  511. bool inFIMS = false;
  512. foreach (var fims in _lstFIMSs)
  513. {
  514. if (!fims.IsOnline)
  515. continue;
  516. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  517. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.ED &&
  518. carrier.InternalModuleName == s.Module)
  519. {
  520. inFIMS = true;
  521. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  522. }
  523. }
  524. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  525. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  526. }
  527. }
  528. }
  529. var wafers = WaferManager.Instance.GetWafers(_pm1.Module);
  530. if (wafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused) &&
  531. SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  532. {
  533. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in boat");
  534. return Result.FAIL;
  535. }
  536. if (wafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  537. {
  538. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in boat");
  539. return Result.FAIL;
  540. }
  541. var robotWafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot);
  542. if (robotWafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused))
  543. {
  544. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in wafer robot");
  545. return Result.FAIL;
  546. }
  547. if (robotWafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  548. {
  549. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in wafer robot");
  550. return Result.FAIL;
  551. }
  552. if (!CheckWaferStatus(useStockers, true, true, out reason))
  553. {
  554. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  555. return Result.FAIL;
  556. }
  557. }
  558. var pjJobId = param["PJID"].ToString();
  559. var cjJobId = param["CJID"].ToString();
  560. ControlJobInfo cj = null;
  561. if (_lstControlJobs.Exists(x => x.Name == cjJobId))
  562. {
  563. for (int i = 1; i < 1000; i++)
  564. {
  565. if (!_lstControlJobs.Exists(x => x.Name == $"{cjJobId}_{i}"))
  566. {
  567. cjJobId = $"{cjJobId}_{i}";
  568. break;
  569. }
  570. }
  571. }
  572. cj = new ControlJobInfo();
  573. cj.Name = cjJobId;
  574. //cj.Module = module;
  575. cj.LotName = cjJobId;
  576. cj.LotInnerId = Guid.NewGuid();
  577. cj.LotWafers = new List<WaferInfo>();
  578. cj.CreateTime = DateTime.Now;
  579. cj.SetState(EnumControlJobState.WaitingForStart);
  580. ProcessJobInfo pj = new ProcessJobInfo();
  581. pj.Name = pjJobId;
  582. pj.JobRecipe = param["JobRecipe"].ToString();
  583. pj.ProcessRecipe = processRecipe;
  584. pj.LayoutRecipe = layoutRecipe;
  585. pj.ControlJobName = cj.Name;
  586. pj.SetState(EnumProcessJobState.Queued);
  587. pj.CreateTime = DateTime.Now;
  588. pj.Stockers = useStockers;
  589. pj.SlotWafers = new List<Tuple<ModuleName, int>>();
  590. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  591. pj.CoolTimeSec = coolTime;
  592. pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");
  593. pj.IsN2PurgeMode = recipeHead.IsN2PurgeMode;
  594. pj.N2PurgeModeStr = recipeHead.N2PurgeModeStr;
  595. if (useStockers.Any() && !CheckChargeRule(pj, out bool waferShort, false, true, out reason))
  596. {
  597. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {layoutRecipe} check charge rule failed, {reason}");
  598. return Result.FAIL;
  599. }
  600. foreach (var stocker in useStockers)
  601. {
  602. if (CarrierManager.Instance.CheckHasCarrier($"{stocker.Item1}", 0) &&
  603. CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName.ToString() != stocker.Item1)
  604. {
  605. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Carrier of {stocker.Item1} is not match stocker module name {CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName}");
  606. return Result.FAIL;
  607. }
  608. }
  609. _lstProcessJobs.Add(pj);
  610. cj.ProcessJobNameList.Add(pj.Name);
  611. if (!_lstControlJobs.Contains(cj))
  612. _lstControlJobs.Add(cj);
  613. _faCallback.JobCreated(cj, pj);
  614. _secondPj = null;
  615. if ((Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).IsExcuteIdleRecipe)
  616. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).EndIdleRecipe();
  617. return Result.RUN;
  618. }
  619. static int compare(Tuple<string, string> t1, Tuple<string, string> t2)
  620. {
  621. int.TryParse(t1.Item1.Replace("Stocker", ""), out int s1);
  622. int.TryParse(t2.Item1.Replace("Stocker", ""), out int s2);
  623. if (s1 > s2)
  624. {
  625. return 1;
  626. }
  627. else
  628. {
  629. return -1;
  630. }
  631. }
  632. static int compare(Tuple<string, string, List<int>> t1, Tuple<string, string, List<int>> t2)
  633. {
  634. int.TryParse(t1.Item1.Replace("Stocker", ""), out int s1);
  635. int.TryParse(t2.Item1.Replace("Stocker", ""), out int s2);
  636. if (s1 > s2)
  637. {
  638. return 1;
  639. }
  640. else
  641. {
  642. return -1;
  643. }
  644. }
  645. internal ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj, ProcessJobInfo checkPj = null)
  646. {
  647. DateTime dtMin = DateTime.MaxValue;
  648. ProcessJobInfo currentPj = null;
  649. foreach (var pj in _lstProcessJobs)
  650. {
  651. if (checkPj != null && checkPj == pj)
  652. continue;
  653. if (pj.ControlJobName == cj.Name)
  654. {
  655. if (pj.CreateTime.CompareTo(dtMin) < 0)
  656. {
  657. dtMin = pj.CreateTime;
  658. currentPj = pj;
  659. }
  660. }
  661. }
  662. return currentPj;
  663. }
  664. internal void StopJob(string jobName)
  665. {
  666. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  667. if (cj == null)
  668. {
  669. EV.PostWarningLog(LogSource, $"stop job rejected, not found job with id {jobName}");
  670. return;
  671. }
  672. foreach (var pj in _lstProcessJobs)
  673. {
  674. if (pj.ControlJobName == cj.Name)
  675. {
  676. if (pj.State == EnumProcessJobState.Processing)
  677. _faCallback.JobStopped(cj, pj);
  678. pj.SetState(EnumProcessJobState.Stopping);
  679. pj.ProcessingState = EnumProcessingState.WaitingWithdrawal;
  680. }
  681. }
  682. if (_isCycleMode)
  683. {
  684. if (_cycleSetPoint > _cycledCount)
  685. {
  686. _cycleSetPoint = _cycledCount;
  687. EV.PostWarningLog("System", $"system in cycle mode, cycle count reset to {_cycledCount}");
  688. }
  689. }
  690. _dbCallback.LotFinished(cj);
  691. }
  692. internal void AbortJob(string jobName)
  693. {
  694. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  695. if (cj == null)
  696. {
  697. EV.PostWarningLog(LogSource, $"abort job rejected, not found job with id {jobName}");
  698. return;
  699. }
  700. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  701. foreach (var pj in _lstProcessJobs)
  702. {
  703. if (pj.ControlJobName == cj.Name)
  704. {
  705. if (pj.State == EnumProcessJobState.Processing)
  706. _faCallback.JobAborted(cj, pj);
  707. pj.SetState(EnumProcessJobState.Aborting);
  708. if (pj.ProcessingState == EnumProcessingState.Charging || pj.ProcessingState == EnumProcessingState.Discharging)
  709. {
  710. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  711. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  712. pmModule?.SetN2PurgeProcess(false);
  713. }
  714. pj.ProcessingState = EnumProcessingState.WaitingWithdrawal;
  715. pjAbortList.Add(pj);
  716. int unprocessed = 0;
  717. int aborted = 0;
  718. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  719. foreach (var waferInfo in wafers)
  720. {
  721. waferInfo.ProcessJob = null;
  722. waferInfo.NextSequenceStep = 0;
  723. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  724. unprocessed++;
  725. }
  726. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  727. }
  728. }
  729. Singleton<FAJobController>.Instance.FAProcessJobs[jobName].RequestAbort();
  730. foreach (var pj in pjAbortList)
  731. {
  732. _lstProcessJobs.Remove(pj);
  733. }
  734. _lstControlJobs.Remove(cj);
  735. _dbCallback.LotFinished(cj);
  736. }
  737. public void ResumeJob(string jobName)
  738. {
  739. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  740. if (cj == null)
  741. {
  742. EV.PostWarningLog(LogSource, $"resume job rejected, not found job with id {jobName}");
  743. return;
  744. }
  745. if (cj.State == EnumControlJobState.Paused)
  746. {
  747. cj.SetState(EnumControlJobState.Executing);
  748. }
  749. foreach (var pj in _lstProcessJobs)
  750. {
  751. if (pj.ControlJobName == cj.Name)
  752. {
  753. if (pj.State == EnumProcessJobState.Processing)
  754. _faCallback.JobResumed(cj, pj);
  755. }
  756. }
  757. }
  758. internal bool StartJob(string jobName)
  759. {
  760. if (!CheckPMStatus())
  761. {
  762. EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
  763. return false;
  764. }
  765. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  766. if (cj == null)
  767. {
  768. EV.PostWarningLog(LogSource, $"start job rejected, not found job with id {jobName}");
  769. return false;
  770. }
  771. if (_isCycleMode)
  772. {
  773. if (CheckAllJobDone())
  774. {
  775. _cycledWafer = 0;
  776. _cycledCount = 0;
  777. }
  778. }
  779. if (cj.State == EnumControlJobState.WaitingForStart)
  780. {
  781. cj.SetState(EnumControlJobState.Executing);
  782. //(GetModule(cj.Module) as SchedulerLoadPort).NoteJobStart();
  783. cj.LotInnerId = Guid.NewGuid();
  784. cj.BeginTime = DateTime.Now;
  785. _dbCallback.LotCreated(cj);
  786. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  787. }
  788. return true;
  789. }
  790. internal void PauseJob(string jobName)
  791. {
  792. foreach (var cj in _lstControlJobs)
  793. {
  794. if (cj.Name != jobName && !string.IsNullOrEmpty(jobName))
  795. continue;
  796. if (cj.State == EnumControlJobState.Executing)
  797. {
  798. cj.SetState(EnumControlJobState.Paused);
  799. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  800. }
  801. }
  802. }
  803. #endregion Job Management
  804. private bool CheckPMStatus()
  805. {
  806. bool hasPmOnline = false;
  807. foreach (var schedulerPm in _lstPms)
  808. {
  809. if (schedulerPm.IsAvailable)
  810. {
  811. hasPmOnline = true;
  812. continue;
  813. }
  814. }
  815. return hasPmOnline;
  816. }
  817. public Result Start(params object[] objs)
  818. {
  819. Clear();
  820. _cycledWafer = 0;
  821. _cycledCount = 0;
  822. timer.Start();
  823. if (!CheckPMStatus())
  824. {
  825. EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
  826. return Result.FAIL;
  827. }
  828. return Result.RUN;
  829. }
  830. public Result Monitor()
  831. {
  832. ControlJobInfo cjActive = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
  833. if (cjActive != null)
  834. {
  835. MonitorModuleTasks();
  836. }
  837. MonitorJobTasks();
  838. return Result.RUN;
  839. }
  840. #region Job task
  841. public Result MonitorJobTasks()
  842. {
  843. UpdateProcessJobStatus();
  844. UpdateControlJobStatus();
  845. StartNewJob();
  846. return Result.RUN;
  847. }
  848. private void UpdateProcessJobStatus()
  849. {
  850. foreach (var pj in _lstProcessJobs)
  851. {
  852. if (pj.ProcessingState == EnumProcessingState.Discharging && pj.IsEmptyLayout)
  853. {
  854. pj.SetState(EnumProcessJobState.ProcessingComplete);
  855. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  856. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  857. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  858. pmModule?.SetN2PurgeProcess(false);
  859. }
  860. else
  861. {
  862. if (pj.State == EnumProcessJobState.Processing)
  863. {
  864. if (CheckAllWaferReturned(pj, true))
  865. {
  866. pj.SetState(EnumProcessJobState.ProcessingComplete);
  867. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  868. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  869. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  870. pmModule?.SetN2PurgeProcess(false);
  871. }
  872. }
  873. else if (pj.State == EnumProcessJobState.Stopping)
  874. {
  875. if (CheckAllWaferReturned(pj, false))
  876. {
  877. pj.SetState(EnumProcessJobState.ProcessingComplete);
  878. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  879. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  880. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  881. pmModule?.SetN2PurgeProcess(false);
  882. }
  883. }
  884. }
  885. }
  886. }
  887. private void UpdateControlJobStatus()
  888. {
  889. if (_lstControlJobs.Count == 0)
  890. return;
  891. bool allControlJobComplete = true;
  892. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  893. foreach (var cj in _lstControlJobs)
  894. {
  895. if (cj.State == EnumControlJobState.Executing)
  896. {
  897. bool allPjCompleted = true;
  898. foreach (var pjName in cj.ProcessJobNameList)
  899. {
  900. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  901. if (pj == null)
  902. {
  903. LOG.Error($"Not find pj named {pjName} in {cj.Name}");
  904. continue;
  905. }
  906. if (pj.State != EnumProcessJobState.Complete && pj.State != EnumProcessJobState.ProcessingComplete)
  907. {
  908. allPjCompleted = false;
  909. break;
  910. }
  911. }
  912. if (allPjCompleted)
  913. {
  914. cj.SetState(EnumControlJobState.Completed);
  915. cj.EndTime = DateTime.Now;
  916. string strInfo = $"{cj.Module} has finished: \r\n\r\nProcessed wafer number: {cj.LotWafers.Count} \r\nBegin time: {cj.BeginTime} \r\nEnd time: {cj.EndTime} \r\nDuration: {(cj.EndTime - cj.BeginTime).TotalSeconds:F0} sec";
  917. EV.PostInfoLog("Scheduler", strInfo);
  918. if (SC.GetValue<bool>("System.Job.EnablePopDialogWhenJobDone"))
  919. {
  920. EV.PostPopDialogMessage(EventLevel.Information, "System Information", strInfo);
  921. }
  922. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  923. _dbCallback.LotFinished(cj);
  924. //if (!(_isCycleMode && _cycledCount < _cycleSetPoint))
  925. // (GetModule(cj.Module) as SchedulerLoadPort).NoteJobComplete();
  926. }
  927. }
  928. if (cj.State == EnumControlJobState.Completed && (!SC.GetValue<bool>("System.IsCycleMode") ||
  929. (SC.GetValue<bool>("System.IsCycleMode") && _cycledCount >= _cycleSetPoint)))
  930. {
  931. cjRemoveList.Add(cj);
  932. }
  933. allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
  934. }
  935. if (_isCycleMode && _cycledCount < _cycleSetPoint)
  936. {
  937. int countPerCycle = 0;
  938. int countProcessed = 0;
  939. foreach (var pj in _lstProcessJobs)
  940. {
  941. if (pj.State == EnumProcessJobState.Queued || pj.SlotWafers == null)
  942. continue;
  943. foreach (var pjSlotWafer in pj.SlotWafers)
  944. {
  945. countPerCycle++;
  946. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  947. if (!wafer.IsEmpty && !CheckWaferNeedProcess(pjSlotWafer.Item1, pjSlotWafer.Item2))
  948. {
  949. countProcessed++;
  950. }
  951. }
  952. }
  953. _cycledWafer = _cycledCount * countPerCycle + countProcessed;
  954. if (allControlJobComplete)
  955. {
  956. _cycledCount++;
  957. if (_cycledCount < _cycleSetPoint)
  958. {
  959. foreach (var cj in _lstControlJobs)
  960. {
  961. cj.SetState(EnumControlJobState.Executing);
  962. cj.LotInnerId = Guid.NewGuid();
  963. //_dbCallback.LotCreated(cj);
  964. }
  965. foreach (var pj in _lstProcessJobs)
  966. {
  967. pj.SetState(EnumProcessJobState.Queued);
  968. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  969. pj.InnerId = Guid.NewGuid();
  970. if (pj.SlotWafers == null)
  971. continue;
  972. foreach (var pjSlotWafer in pj.SlotWafers)
  973. {
  974. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  975. wafer.ProcessJob = null;
  976. wafer.NextSequenceStep = 0;
  977. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  978. }
  979. pj.SlotWafers.Clear();
  980. }
  981. }
  982. else
  983. {
  984. foreach (var cj in _lstControlJobs)
  985. {
  986. if (cj.State == EnumControlJobState.Completed)
  987. {
  988. cjRemoveList.Add(cj);
  989. }
  990. }
  991. }
  992. }
  993. }
  994. if (_waferRobot.IsAvailable && cjRemoveList.Any())
  995. {
  996. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
  997. }
  998. foreach (var cj in cjRemoveList)
  999. {
  1000. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1001. foreach (var pj in _lstProcessJobs)
  1002. {
  1003. if (pj.ControlJobName == cj.Name)
  1004. pjRemoveList.Add(pj);
  1005. }
  1006. foreach (var pj in pjRemoveList)
  1007. {
  1008. _lstProcessJobs.Remove(pj);
  1009. }
  1010. _lstControlJobs.Remove(cj);
  1011. }
  1012. }
  1013. public bool CheckAllJobDone()
  1014. {
  1015. foreach (var cj in _lstControlJobs)
  1016. {
  1017. if (cj.State == EnumControlJobState.Executing ||
  1018. cj.State == EnumControlJobState.Paused ||
  1019. cj.State == EnumControlJobState.Queued ||
  1020. cj.State == EnumControlJobState.WaitingForStart)
  1021. return false;
  1022. }
  1023. if (_lstControlJobs.Count > 0 || _lstProcessJobs.Count > 0)
  1024. {
  1025. return false;
  1026. }
  1027. return true;
  1028. }
  1029. public List<Tuple<string, string, List<int>>> GetProcessingStockers()
  1030. {
  1031. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1032. return null;
  1033. foreach (var cj in _lstControlJobs)
  1034. {
  1035. if (cj.State == EnumControlJobState.Completed)
  1036. continue;
  1037. var pj = GetFirstProcessJob(cj);
  1038. if (pj != null)
  1039. {
  1040. if (pj.ProcessingState != EnumProcessingState.Discharging)
  1041. return pj.Stockers;
  1042. else
  1043. {
  1044. List<Tuple<string, string, List<int>>> temp = new List<Tuple<string, string, List<int>>>();
  1045. foreach (var item in pj.Stockers)
  1046. {
  1047. if (CarrierManager.Instance.CheckHasCarrier(item.Item1, 0))
  1048. {
  1049. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1050. if (wafers != null && !wafers.Any(x => !x.IsEmpty && x.OriginStation == (int)ModuleHelper.Converter(item.Item1)))
  1051. continue;
  1052. }
  1053. temp.Add(Tuple.Create(item.Item1, item.Item2, item.Item3));
  1054. }
  1055. return temp;
  1056. }
  1057. }
  1058. }
  1059. return null;
  1060. }
  1061. public List<Tuple<string, string, List<int>>> GetSecondlyProcessingStockers()
  1062. {
  1063. var pj = GetSecondlyProcessJob();
  1064. return pj != null ? pj.Stockers : null;
  1065. }
  1066. private ProcessJobInfo GetSecondlyProcessJob()
  1067. {
  1068. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1069. return null;
  1070. if (_lstControlJobs.Count > 1)
  1071. {
  1072. var cj = _lstControlJobs[1];
  1073. if (cj.State == EnumControlJobState.Completed)
  1074. return null;
  1075. var pj = GetFirstProcessJob(cj);
  1076. return pj;
  1077. }
  1078. return null;
  1079. }
  1080. private ProcessJobInfo GetSecondlyProcessJobV2()
  1081. {
  1082. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1083. return null;
  1084. if (_lstControlJobs.Count > 1 && _secondPj == null)
  1085. {
  1086. var cj = _lstControlJobs[1];
  1087. if (cj.State == EnumControlJobState.Completed)
  1088. return null;
  1089. var pj = GetFirstProcessJob(cj);
  1090. return pj;
  1091. }
  1092. return _secondPj;
  1093. }
  1094. public List<Tuple<string, string, List<int>>> GetAllPJStockers()
  1095. {
  1096. List<Tuple<string, string, List<int>>> temp = new List<Tuple<string, string, List<int>>>();
  1097. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1098. return temp;
  1099. foreach (var cj in _lstControlJobs)
  1100. {
  1101. if (cj.State == EnumControlJobState.Completed)
  1102. continue;
  1103. foreach (var pj in _lstProcessJobs)
  1104. {
  1105. if (pj != null && pj.ControlJobName == cj.Name)
  1106. {
  1107. temp.AddRange(pj.Stockers);
  1108. }
  1109. }
  1110. }
  1111. return temp;
  1112. }
  1113. private void StartNewJob()
  1114. {
  1115. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1116. return;
  1117. _secondPj = GetSecondlyProcessJobV2();
  1118. ControlJobInfo cjActived = null;
  1119. DateTime dtMin = DateTime.MaxValue;
  1120. foreach (var cj in _lstControlJobs)
  1121. {
  1122. if (cj.State == EnumControlJobState.Completed)
  1123. continue;
  1124. if (cj.CreateTime.CompareTo(dtMin) < 0)
  1125. {
  1126. dtMin = cj.CreateTime;
  1127. cjActived = cj;
  1128. }
  1129. }
  1130. if (cjActived == null)
  1131. return;
  1132. if (cjActived.State != EnumControlJobState.Executing &&
  1133. cjActived.State != EnumControlJobState.Paused)
  1134. {
  1135. cjActived.BeginTime = DateTime.Now;
  1136. cjActived.SetState(EnumControlJobState.Executing);
  1137. }
  1138. ProcessJobInfo pj = null;
  1139. foreach (var cj in _lstControlJobs)
  1140. {
  1141. if (cj.State != EnumControlJobState.Executing)
  1142. continue;
  1143. cjActived = cj;
  1144. pj = GetFirstProcessJob(cjActived);
  1145. if (pj != null && pj.State == EnumProcessJobState.Queued)
  1146. {
  1147. if (!pj.IsEmptyLayout)
  1148. {
  1149. if (CheckProcessJobReady(pj))
  1150. {
  1151. //先不管charge rule
  1152. if (!CheckChargeRule(pj, out bool waferShort, true, true, out string reason))
  1153. {
  1154. if (!_chargeRuleAlarmTrigDic.ContainsKey(pj.InnerId.ToString()))
  1155. _chargeRuleAlarmTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1156. _chargeRuleAlarmTrigDic[pj.InnerId.ToString()].CLK = true;
  1157. if (_chargeRuleAlarmTrigDic[pj.InnerId.ToString()].Q)
  1158. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, {reason}");
  1159. return;
  1160. }
  1161. if (!CheckWaferStatus(pj.Stockers, false, false, out reason))
  1162. {
  1163. if (!_waferStatusAlarmTrigDic.ContainsKey(pj.InnerId.ToString()))
  1164. _waferStatusAlarmTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1165. _waferStatusAlarmTrigDic[pj.InnerId.ToString()].CLK = true;
  1166. if (_waferStatusAlarmTrigDic[pj.InnerId.ToString()].Q)
  1167. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  1168. return;
  1169. }
  1170. if (!CheckDummyWaferUse(pj))
  1171. return;
  1172. if (!SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1173. {
  1174. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1175. if (wafers != null && wafers.Any(x => !x.IsEmpty && (x.WaferType == WaferType.SD || x.WaferType == WaferType.ED)))
  1176. {
  1177. for (int i = 0; i < wafers.Count; i++)
  1178. {
  1179. var wafer = wafers[i];
  1180. if (wafer == null || wafer.IsEmpty)
  1181. continue;
  1182. if (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED)
  1183. {
  1184. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1185. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1186. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1187. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1188. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid wafer in boat");
  1189. return;
  1190. }
  1191. if (!pj.SideDummySlots.Any(x => x == i) && !pj.ExtraDummySlots.Any(x => x == i))
  1192. {
  1193. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1194. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1195. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1196. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1197. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, dummy wafer layout mismatch");
  1198. return;
  1199. }
  1200. }
  1201. var existSDSlots = new List<int>();
  1202. foreach (var slot in pj.SideDummySlots)
  1203. {
  1204. var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, slot);
  1205. if (!wafer.IsEmpty)
  1206. {
  1207. if (wafer.WaferType != WaferType.SD)
  1208. {
  1209. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1210. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1211. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1212. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1213. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, SD wafer layout mismatch");
  1214. return;
  1215. }
  1216. else
  1217. {
  1218. existSDSlots.Add(slot);
  1219. }
  1220. }
  1221. }
  1222. var existEDSlots = new List<int>();
  1223. foreach (var slot in pj.ExtraDummySlots)
  1224. {
  1225. var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, slot);
  1226. if (!wafer.IsEmpty)
  1227. {
  1228. if (wafer.WaferType != WaferType.ED)
  1229. {
  1230. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1231. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1232. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1233. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1234. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, ED wafer layout mismatch");
  1235. return;
  1236. }
  1237. else
  1238. {
  1239. existEDSlots.Add(slot);
  1240. }
  1241. }
  1242. }
  1243. for (int i = 0; i < wafers.Count; i++)
  1244. {
  1245. var wafer = wafers[i];
  1246. if (wafer == null || wafer.IsEmpty)
  1247. continue;
  1248. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1249. }
  1250. pj.IsNeedChargeDummyWafer = pj.ExtraDummySlots.Count != existEDSlots.Count || pj.SideDummySlots.Count != existSDSlots.Count;
  1251. }
  1252. else
  1253. {
  1254. pj.IsNeedChargeDummyWafer = true;
  1255. }
  1256. }
  1257. else
  1258. {
  1259. pj.IsNeedChargeDummyWafer = true;
  1260. }
  1261. ActiveProcessJob(cjActived, pj);
  1262. _sideDummyWafers = GetDummyWafers(_lstSideDummyStocker, pj.SideDummySlots.Count(), WaferType.SD);
  1263. _extraDummyWafers = GetDummyWafers(_lstExtraDummyStocker, pj.ExtraDummySlots.Count(), WaferType.ED);
  1264. _sideDummySlots = pj.SideDummySlots;
  1265. _extraDummySlots = pj.ExtraDummySlots;
  1266. _productSlots = pj.ProductSlots;
  1267. _monitor1Slots = pj.Monitor1Slots;
  1268. _monitor2Slots = pj.Monitor2Slots;
  1269. _lstCurrentPjStocker.Clear();
  1270. foreach (var s in pj.Stockers)
  1271. {
  1272. var module = GetModule(s.Item1) as SchedulerStocker;
  1273. if (module != null)
  1274. _lstCurrentPjStocker.Add(module);
  1275. }
  1276. }
  1277. }
  1278. else
  1279. {
  1280. if (!SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1281. {
  1282. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1283. for (int i = 0; i < wafers.Count; i++)
  1284. {
  1285. var wafer = wafers[i];
  1286. if (wafer == null || wafer.IsEmpty)
  1287. continue;
  1288. if (wafer.WaferType != WaferType.ED && wafer.WaferType != WaferType.SD)
  1289. continue;
  1290. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1291. }
  1292. }
  1293. ActiveProcessJob(cjActived, pj);
  1294. }
  1295. break;
  1296. }
  1297. }
  1298. if (_lstControlJobs.Count > 1 && pj != null)
  1299. {
  1300. var second = GetSecondlyProcessJob();
  1301. if (second != null && second.IsEmptyLayout && !second.IsStandbyStarted &&
  1302. (pj.ProcessingState == EnumProcessingState.Cooling || pj.ProcessingState == EnumProcessingState.Discharging))
  1303. {
  1304. foreach (var pm in _lstPms)
  1305. {
  1306. if (pm.IsAvailable)
  1307. {
  1308. _dbCallback.PjCreated(second);
  1309. _dbCallback.PjStart();
  1310. pm.Standby(second.ProcessRecipe);
  1311. second.IsStandbyStarted = true;
  1312. }
  1313. }
  1314. }
  1315. }
  1316. }
  1317. private bool ActiveProcessJob(ControlJobInfo cj, ProcessJobInfo pj)
  1318. {
  1319. //_dbCallback.JobCreated(cj, pj);
  1320. pj.SetState(EnumProcessJobState.Processing);
  1321. pj.ProcessingState = EnumProcessingState.Charging;
  1322. pj.BeginTime = DateTime.Now;
  1323. if (pj.IsN2PurgeMode)
  1324. {
  1325. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  1326. //pmModule?.SetN2PurgeProcess(true);
  1327. //if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  1328. // pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  1329. if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  1330. {
  1331. pmModule?.SetN2PurgeProcess(true);
  1332. pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  1333. }
  1334. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  1335. {
  1336. var setValue = pmModule.GetN2PurgeModeEnumByStr(pj.N2PurgeModeStr);
  1337. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  1338. pmModule.RestAllN2PrugeRD();
  1339. }
  1340. }
  1341. foreach (var pm in _lstPms)
  1342. {
  1343. if (pm.IsAvailable)
  1344. {
  1345. _dbCallback.PjCreated(pj);
  1346. _dbCallback.PjStart();
  1347. pm.Standby(pj.ProcessRecipe);
  1348. pj.IsStandbyStarted = true;
  1349. }
  1350. }
  1351. return true;
  1352. }
  1353. #endregion Job task
  1354. #region Module task
  1355. public Result MonitorModuleTasks()
  1356. {
  1357. MonitorFIMSTask();
  1358. MonitorWaferRobotTask();
  1359. MonitorCarrierRobotTask();
  1360. MonitorPMTask();
  1361. return Result.RUN;
  1362. }
  1363. private void MonitorWaferRobotTask()
  1364. {
  1365. if (!_waferRobot.IsAvailable)
  1366. return;
  1367. foreach (var fims in _lstFIMSs)
  1368. {
  1369. if (fims.IsWaitTransfer(ModuleName.WaferRobot))
  1370. {
  1371. fims.StopWaitTransfer(ModuleName.WaferRobot);
  1372. }
  1373. }
  1374. foreach (var pm in _lstPms)
  1375. {
  1376. if (pm.IsWaitTransfer(ModuleName.WaferRobot))
  1377. {
  1378. pm.StopWaitTransfer(ModuleName.WaferRobot);
  1379. }
  1380. }
  1381. MonitorWaferRobotFIMSTask();
  1382. if (!_waferRobot.IsAvailable)
  1383. return;
  1384. MonitorWaferRobotPMTask();
  1385. }
  1386. private void MonitorCarrierRobotTask()
  1387. {
  1388. if (!_carrierRobot.IsAvailable)
  1389. return;
  1390. //efem robot is idle, release all the target
  1391. foreach (var fims in _lstFIMSs)
  1392. {
  1393. if (fims.IsWaitTransfer(ModuleName.CarrierRobot))
  1394. {
  1395. fims.StopWaitTransfer(ModuleName.CarrierRobot);
  1396. }
  1397. }
  1398. foreach (var stock in _lstTotlaStockers)
  1399. {
  1400. if (stock.IsWaitTransfer(ModuleName.CarrierRobot))
  1401. {
  1402. stock.StopWaitTransfer(ModuleName.CarrierRobot);
  1403. }
  1404. }
  1405. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1406. if (pj == null || pj.IsEmptyLayout)
  1407. return;
  1408. if (pj.ProcessingState == EnumProcessingState.Discharging)
  1409. {
  1410. //discharge
  1411. DischargingOrderBySort(SC.GetStringValue("System.ChargingOrderBySort"));
  1412. if (!_carrierRobot.IsAvailable)
  1413. return;
  1414. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1415. MonitorCassetteRobotStockerTaskInDischarge(_lstSideDummyStocker, WaferType.SD, _sideDummySlots);
  1416. if (!_carrierRobot.IsAvailable)
  1417. return;
  1418. MonitorCarrierRobotPickFIMSTask();
  1419. if (!_carrierRobot.IsAvailable)
  1420. return;
  1421. MonitorCarrierRobotPlaceFIMSTaskInDischarge();
  1422. }
  1423. else if (pj.ProcessingState == EnumProcessingState.Charging)
  1424. {
  1425. //charge
  1426. if (pj.IsNeedChargeDummyWafer)
  1427. MonitorCassetteRobotStockerTask(_lstSideDummyStocker, WaferType.SD);
  1428. if (!_carrierRobot.IsAvailable)
  1429. return;
  1430. ChargingOrderBySort(pj, SC.GetStringValue("System.ChargingOrderBySort"));
  1431. if (!_carrierRobot.IsAvailable)
  1432. return;
  1433. MonitorCarrierRobotPickFIMSTask();
  1434. if (!_carrierRobot.IsAvailable)
  1435. return;
  1436. MonitorCarrierRobotPlaceFIMSTaskInCharge();
  1437. }
  1438. else if (pj.ProcessingState == EnumProcessingState.Processing)
  1439. {
  1440. MonitorCarrierRobotPickFIMSTask();
  1441. MonitorCassetteRobotPlaceStockerTask();
  1442. }
  1443. }
  1444. private void MonitorFIMSTask()
  1445. {
  1446. if (!_lstProcessJobs.Any())
  1447. return;
  1448. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1449. if (pj == null || pj.IsEmptyLayout)
  1450. return;
  1451. //load
  1452. if (pj.ProcessingState == EnumProcessingState.Charging)
  1453. {
  1454. foreach (var st in _lstFIMSs)
  1455. {
  1456. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1457. continue;
  1458. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1459. if (!CheckCarrierCanPickFromFIMS(st.Module) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Charging"))
  1460. {
  1461. return;
  1462. }
  1463. }
  1464. }
  1465. else if (pj.ProcessingState == EnumProcessingState.Discharging)
  1466. {
  1467. //先判断空片的情况,空片的先load
  1468. foreach (var st in _lstFIMSs)
  1469. {
  1470. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1471. continue;
  1472. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1473. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1474. if (wafers != null)
  1475. {
  1476. if (CheckCarrierNoHasEmptySlot(st.Module) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Discharging"))
  1477. {
  1478. return;
  1479. }
  1480. }
  1481. }
  1482. foreach (var st in _lstFIMSs)
  1483. {
  1484. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1485. continue;
  1486. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1487. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1488. if (carrier != null)
  1489. {
  1490. if (!CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Discharging"))
  1491. {
  1492. return;
  1493. }
  1494. }
  1495. }
  1496. }
  1497. //unload
  1498. if (pj.ProcessingState == EnumProcessingState.Charging)
  1499. {
  1500. foreach (var st in _lstFIMSs)
  1501. {
  1502. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1503. continue;
  1504. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1505. if (CheckCarrierCanPickFromFIMS(st.Module) && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Charging"))
  1506. {
  1507. return;
  1508. }
  1509. }
  1510. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  1511. {
  1512. SchedulerFIMS fims = null;
  1513. foreach (var st in _lstFIMSs)
  1514. {
  1515. if (!st.IsAvailable || CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1516. continue;
  1517. // check FIMS
  1518. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1519. if (fimsDevice.IsUnloadCompleted)
  1520. continue;
  1521. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  1522. var transfer = Singleton<EquipmentManager>.Instance.GetTransferJobStockers();
  1523. if (transfer != null && transfer.Any(x => x.Stocker == carrier.InternalModuleName))
  1524. continue;
  1525. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  1526. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) <= slots.Count && CheckCarrierCanPickFromStocker(ModuleName.CarrierRobot) && fims.Unload(pj.IsN2PurgeMode, "Charging"))
  1527. {
  1528. return;
  1529. }
  1530. }
  1531. }
  1532. }
  1533. else if (pj.ProcessingState == EnumProcessingState.Discharging)
  1534. {
  1535. //先判断满片的情况,满片的先unload
  1536. foreach (var st in _lstFIMSs)
  1537. {
  1538. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1539. continue;
  1540. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1541. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1542. if (carrier != null)
  1543. {
  1544. if (!CheckCarrierHasEmptySlot(st.Module) && _waferRobot.IsAvailable && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Discharging"))
  1545. {
  1546. return;
  1547. }
  1548. }
  1549. }
  1550. foreach (var st in _lstFIMSs)
  1551. {
  1552. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1553. continue;
  1554. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1555. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1556. if (carrier != null)
  1557. {
  1558. if (CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && _waferRobot.IsAvailable && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Discharging"))
  1559. {
  1560. return;
  1561. }
  1562. }
  1563. }
  1564. }
  1565. }
  1566. private void MonitorWaferRobotPMTask()
  1567. {
  1568. if (!_waferRobot.IsAvailable)
  1569. return;
  1570. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  1571. if (pmModule == null)
  1572. return;
  1573. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1574. if (pj == null || pj.IsEmptyLayout)
  1575. return;
  1576. //place
  1577. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1578. List<int> slots = GetWaferSlots(wafer.WaferType);
  1579. if (!_logTrigDic.ContainsKey("GetWaferSlots(wafer.WaferType)"))
  1580. _logTrigDic.Add("GetWaferSlots(wafer.WaferType)", new R_TRIG());
  1581. _logTrigDic["GetWaferSlots(wafer.WaferType)"].CLK = slots == null;
  1582. if (_logTrigDic["GetWaferSlots(wafer.WaferType)"].Q)
  1583. LOG.Write($"GetWaferSlots(wafer.WaferType) is null");
  1584. if (pj.ProcessingState == EnumProcessingState.Charging &&
  1585. wafer != null && !wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Idle &&
  1586. slots != null)
  1587. {
  1588. Hand placeBlade = Hand.Blade1;
  1589. int placeSlot = -1;
  1590. for (int i = 0; i < slots.Count; i++)
  1591. {
  1592. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1593. continue;
  1594. placeSlot = slots[i];
  1595. placeBlade = Hand.Blade1;
  1596. break;
  1597. }
  1598. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
  1599. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
  1600. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
  1601. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  1602. {
  1603. //check PM
  1604. for (int i = 0; i < slots.Count; i++)
  1605. {
  1606. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1607. continue;
  1608. placeSlot = slots[i];
  1609. if (i + 4 < slots.Count && Math.Abs(slots[i] - slots[i + 4]) == 4)
  1610. {
  1611. if (WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 1]) &&
  1612. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 2]) &&
  1613. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 3]) &&
  1614. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 4]))
  1615. {
  1616. placeBlade = Hand.Both;
  1617. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  1618. placeSlot = slots[i + 4];
  1619. }
  1620. }
  1621. break;
  1622. }
  1623. }
  1624. if (pmModule.CheckReadyForTransfer(_waferRobot.Module, placeBlade, placeSlot, EnumTransferType.Place, out string reason) &&
  1625. placeSlot != -1 && _waferRobot.Place(_pm1.Module, placeSlot, placeBlade))
  1626. {
  1627. _pm1.WaitTransfer(ModuleName.WaferRobot);
  1628. return;
  1629. }
  1630. }
  1631. if (!_waferRobot.IsAvailable)
  1632. return;
  1633. //pick
  1634. List<int> targetWaferSlots = GetWaferSlots();
  1635. if (!_logTrigDic.ContainsKey("GetWaferSlots()"))
  1636. _logTrigDic.Add("GetWaferSlots()", new R_TRIG());
  1637. _logTrigDic["GetWaferSlots()"].CLK = targetWaferSlots == null;
  1638. if (_logTrigDic["GetWaferSlots()"].Q)
  1639. LOG.Write($"GetWaferSlots() is null");
  1640. if (pj.ProcessingState == EnumProcessingState.Discharging &&
  1641. wafer != null && wafer.IsEmpty && targetWaferSlots != null)
  1642. {
  1643. Hand pickBlade = Hand.Blade1;
  1644. int pickSlot = -1;
  1645. var isEnableDummyWaferDischarge = SC.GetValue<bool>("System.IsEnableDummyWaferDischarge");
  1646. //check PM
  1647. for (int i = 0; i < targetWaferSlots.Count; i++)
  1648. {
  1649. var targetWafer = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i]);
  1650. if (targetWafer == null || targetWafer.IsEmpty || (targetWafer.ProcessState != EnumWaferProcessStatus.Completed &&
  1651. targetWafer.ProcessState != EnumWaferProcessStatus.Abort &&
  1652. targetWafer.ProcessState != EnumWaferProcessStatus.Failed))
  1653. continue;
  1654. if (!isEnableDummyWaferDischarge && (targetWafer.WaferType == WaferType.SD || targetWafer.WaferType == WaferType.ED))
  1655. continue;
  1656. pickSlot = targetWaferSlots[i];
  1657. if (i + 4 < targetWaferSlots.Count && Math.Abs(targetWaferSlots[i] - targetWaferSlots[i + 4]) == 4)
  1658. {
  1659. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 1]) &&
  1660. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 2]) &&
  1661. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 3]) &&
  1662. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 4]) &&
  1663. SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
  1664. {
  1665. bool isFromTopToBottom = SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom";
  1666. var wafer0 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 4 : 0)]);
  1667. var wafer1 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 3 : 1)]);
  1668. var wafer2 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + 2]);
  1669. var wafer3 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 1 : 3)]);
  1670. var wafer4 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 0 : 4)]);
  1671. if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
  1672. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
  1673. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
  1674. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4) &&
  1675. wafer0.OriginStation == wafer1.OriginStation &&
  1676. wafer0.OriginStation == wafer2.OriginStation &&
  1677. wafer0.OriginStation == wafer3.OriginStation &&
  1678. wafer0.OriginStation == wafer4.OriginStation &&
  1679. Math.Abs(wafer1.OriginSlot - wafer2.OriginSlot) == 1 &&
  1680. Math.Abs(wafer2.OriginSlot - wafer3.OriginSlot) == 1 &&
  1681. Math.Abs(wafer0.OriginSlot - wafer4.OriginSlot) == 4 &&
  1682. Math.Abs(wafer0.OriginSlot - wafer3.OriginSlot) == 3 &&
  1683. Math.Abs(wafer0.OriginSlot - wafer2.OriginSlot) == 2 &&
  1684. Math.Abs(wafer0.OriginSlot - wafer1.OriginSlot) == 1)
  1685. {
  1686. pickBlade = Hand.Both;
  1687. pickSlot = wafer4.Slot;
  1688. }
  1689. }
  1690. }
  1691. break;
  1692. }
  1693. if (pmModule.CheckReadyForTransfer(_waferRobot.Module, pickBlade, pickSlot, EnumTransferType.Pick, out string reason) &&
  1694. pickSlot != -1 && _waferRobot.Pick(_pm1.Module, pickSlot, pickBlade))
  1695. {
  1696. _pm1.WaitTransfer(ModuleName.WaferRobot);
  1697. }
  1698. }
  1699. }
  1700. private void MonitorWaferRobotFIMSTask()
  1701. {
  1702. if (!_waferRobot.IsAvailable)
  1703. return;
  1704. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1705. if (pj == null || pj.IsEmptyLayout)
  1706. return;
  1707. //pick
  1708. if (pj.ProcessingState == EnumProcessingState.Charging &&
  1709. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2))
  1710. {
  1711. SchedulerFIMS fims = null;
  1712. List<int> slots = null;
  1713. WaferType waferType = WaferType.None;
  1714. ModuleName currentFims = GetCurrentTransferFims();
  1715. foreach (var st in _lstFIMSs)
  1716. {
  1717. if (!st.IsAvailable)
  1718. continue;
  1719. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1720. continue;
  1721. // check FIMS
  1722. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1723. if (!fimsDevice.IsLoadCompleted)
  1724. continue;
  1725. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1726. if (carrier != null && !carrier.IsEmpty)
  1727. {
  1728. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  1729. bool hasWafer = false;
  1730. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1731. if (wafers != null && stockerInfo != null)
  1732. {
  1733. foreach (var wafer in wafers)
  1734. {
  1735. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  1736. continue;
  1737. if (!wafer.IsEmpty && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  1738. {
  1739. hasWafer = true;
  1740. break;
  1741. }
  1742. }
  1743. }
  1744. if (!hasWafer)
  1745. continue;
  1746. if (currentFims != ModuleName.System && currentFims != st.Module)
  1747. continue;
  1748. GetWaferSlotsAndWaferType(carrier, out slots, out waferType);
  1749. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) < slots.Count)
  1750. {
  1751. fims = st;
  1752. break;
  1753. }
  1754. }
  1755. }
  1756. if (fims != null && slots != null)
  1757. {
  1758. Hand pickBlade = Hand.Blade1;
  1759. int pickSlot = -1;
  1760. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  1761. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  1762. if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
  1763. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
  1764. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
  1765. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4))
  1766. {
  1767. //check PM
  1768. for (int i = 0; i < slots.Count; i++)
  1769. {
  1770. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1771. continue;
  1772. if (i + 4 < slots.Count && Math.Abs(slots[i] - slots[i + 4]) == 4)
  1773. {
  1774. if (WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 1]) &&
  1775. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 2]) &&
  1776. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 3]) &&
  1777. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 4]) &&
  1778. SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
  1779. {
  1780. pickBlade = Hand.Both;
  1781. break;
  1782. }
  1783. }
  1784. break;
  1785. }
  1786. //check cassette
  1787. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  1788. if (waferType == WaferType.SD)
  1789. dummyWafers = _sideDummyWafers;
  1790. else if (waferType == WaferType.ED)
  1791. dummyWafers = _extraDummyWafers;
  1792. var wafers = WaferManager.Instance.GetWafers(fims.Module).ToList();
  1793. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1794. wafers.Reverse();
  1795. if (wafers != null)
  1796. {
  1797. for (int i = 0; i < wafers.Count; i++)
  1798. {
  1799. if (wafers[i] == null || wafers[i].IsEmpty || wafers[i].ProcessState != EnumWaferProcessStatus.Idle)
  1800. continue;
  1801. if ((wafers[i].WaferType == WaferType.SD || wafers[i].WaferType == WaferType.ED) && !dummyWafers.ContainsKey(wafers[i].InnerId.ToString()))
  1802. continue;
  1803. if (stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == i))
  1804. continue;
  1805. pickSlot = wafers[i].OriginSlot;
  1806. if (pickBlade == Hand.Both)
  1807. {
  1808. if (i < SC.GetValue<int>("System.CassetteSlotCount") - 4)
  1809. {
  1810. if (waferType == WaferType.SD || waferType == WaferType.ED)
  1811. {
  1812. if (!wafers[i + 1].IsEmpty && !wafers[i + 2].IsEmpty && !wafers[i + 3].IsEmpty && !wafers[i + 4].IsEmpty &&
  1813. wafers[i + 1].ProcessState == EnumWaferProcessStatus.Idle &&
  1814. wafers[i + 2].ProcessState == EnumWaferProcessStatus.Idle &&
  1815. wafers[i + 3].ProcessState == EnumWaferProcessStatus.Idle &&
  1816. wafers[i + 4].ProcessState == EnumWaferProcessStatus.Idle &&
  1817. (!stockerInfo.Item3.Any() || (stockerInfo.Item3.Any(x => x == i + 1) && stockerInfo.Item3.Any(x => x == i + 2) && stockerInfo.Item3.Any(x => x == i + 3) && stockerInfo.Item3.Any(x => x == i + 4))) &&
  1818. dummyWafers.ContainsKey(wafers[i + 1].InnerId.ToString()) && dummyWafers.ContainsKey(wafers[i + 2].InnerId.ToString()) &&
  1819. dummyWafers.ContainsKey(wafers[i + 3].InnerId.ToString()) && dummyWafers.ContainsKey(wafers[i + 4].InnerId.ToString()))
  1820. {
  1821. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1822. pickSlot = wafers[i + 4].OriginSlot;
  1823. break;
  1824. }
  1825. else
  1826. {
  1827. pickBlade = Hand.Blade1;
  1828. break;
  1829. }
  1830. }
  1831. else
  1832. {
  1833. if (!wafers[i + 1].IsEmpty && !wafers[i + 2].IsEmpty && !wafers[i + 3].IsEmpty && !wafers[i + 4].IsEmpty &&
  1834. wafers[i + 1].ProcessState == EnumWaferProcessStatus.Idle &&
  1835. wafers[i + 2].ProcessState == EnumWaferProcessStatus.Idle &&
  1836. wafers[i + 3].ProcessState == EnumWaferProcessStatus.Idle &&
  1837. wafers[i + 4].ProcessState == EnumWaferProcessStatus.Idle &&
  1838. (!stockerInfo.Item3.Any() || (stockerInfo.Item3.Any(x => x == i + 1) && stockerInfo.Item3.Any(x => x == i + 2) && stockerInfo.Item3.Any(x => x == i + 3) && stockerInfo.Item3.Any(x => x == i + 4))))
  1839. {
  1840. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1841. pickSlot = wafers[i + 4].OriginSlot;
  1842. break;
  1843. }
  1844. else
  1845. {
  1846. pickBlade = Hand.Blade1;
  1847. break;
  1848. }
  1849. }
  1850. }
  1851. else
  1852. {
  1853. pickBlade = Hand.Blade1;
  1854. break;
  1855. }
  1856. }
  1857. else
  1858. {
  1859. pickBlade = Hand.Blade1;
  1860. break;
  1861. }
  1862. }
  1863. }
  1864. }
  1865. if (SC.GetValue<bool>($"System.IsEnableFIMSChargeMapping"))
  1866. {
  1867. if (carrier != null && !carrier.IsEmpty && carrier.IsMapped && carrier.IsMapOK &&
  1868. pickSlot != -1 && _pm1.IsAvailable && _waferRobot.Pick(fims.Module, pickSlot, pickBlade))
  1869. {
  1870. fims.WaitTransfer(ModuleName.WaferRobot);
  1871. return;
  1872. }
  1873. }
  1874. else
  1875. {
  1876. if (pickSlot != -1 && _waferRobot.Pick(fims.Module, pickSlot, pickBlade))
  1877. {
  1878. fims.WaitTransfer(ModuleName.WaferRobot);
  1879. }
  1880. }
  1881. }
  1882. }
  1883. if (!_waferRobot.IsAvailable)
  1884. return;
  1885. // mapping
  1886. if (pj.ProcessingState == EnumProcessingState.Charging && SC.GetValue<bool>($"System.IsEnableFIMSChargeMapping") &&
  1887. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2) && WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1))
  1888. {
  1889. foreach (var fims in _lstFIMSs)
  1890. {
  1891. if (!fims.IsAvailable)
  1892. continue;
  1893. if (!CarrierManager.Instance.CheckHasCarrier(fims.Module.ToString(), 0))
  1894. continue;
  1895. // check FIMS
  1896. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{fims.Module}");
  1897. if (!fimsDevice.IsLoadCompleted)
  1898. continue;
  1899. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  1900. if (carrier == null || carrier.IsEmpty || carrier.IsMapped)
  1901. continue;
  1902. var mappingSlot = GetMappingSlot(fims.Module);
  1903. if (_waferRobot.Map(fims.Module, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  1904. {
  1905. fims.WaitTransfer(ModuleName.WaferRobot);
  1906. return;
  1907. }
  1908. }
  1909. }
  1910. if (!_waferRobot.IsAvailable)
  1911. return;
  1912. //place
  1913. var robotWafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1914. if (pj.ProcessingState == EnumProcessingState.Discharging &&
  1915. robotWafer != null && !robotWafer.IsEmpty && (robotWafer.ProcessState == EnumWaferProcessStatus.Completed ||
  1916. robotWafer.ProcessState == EnumWaferProcessStatus.Abort ||
  1917. robotWafer.ProcessState == EnumWaferProcessStatus.Failed))
  1918. {
  1919. SchedulerFIMS fims = null;
  1920. var waferInRobot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1921. foreach (var st in _lstFIMSs)
  1922. {
  1923. if (!st.IsAvailable)
  1924. continue;
  1925. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1926. continue;
  1927. // check FIMS
  1928. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1929. if (!fimsDevice.IsLoadCompleted)
  1930. continue;
  1931. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1932. if (carrier == null || carrier.IsEmpty)
  1933. continue;
  1934. if ((ModuleName)waferInRobot.OriginStation != carrier.InternalModuleName)
  1935. continue;
  1936. bool hasEmptySlot = false;
  1937. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1938. if (wafers != null)
  1939. {
  1940. foreach (var wafer in wafers)
  1941. {
  1942. if (wafer == null)
  1943. continue;
  1944. if (wafer.IsEmpty)
  1945. {
  1946. hasEmptySlot = true;
  1947. break;
  1948. }
  1949. }
  1950. }
  1951. if (hasEmptySlot)
  1952. {
  1953. fims = st;
  1954. break;
  1955. }
  1956. }
  1957. if (fims != null)
  1958. {
  1959. Hand placeBlade = Hand.Blade1;
  1960. int placeSlot = waferInRobot.OriginSlot;
  1961. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
  1962. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
  1963. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
  1964. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4) &&
  1965. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation &&
  1966. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation &&
  1967. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation &&
  1968. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation)
  1969. {
  1970. var tempPlaceSlot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginSlot;
  1971. if (tempPlaceSlot + 4 < SC.GetValue<int>("System.CassetteSlotCount"))
  1972. {
  1973. if (WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 1) &&
  1974. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 2) &&
  1975. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 3) &&
  1976. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 4))
  1977. {
  1978. placeBlade = Hand.Both;
  1979. placeSlot = tempPlaceSlot;
  1980. }
  1981. }
  1982. }
  1983. if (placeSlot != -1 && _waferRobot.Place(fims.Module, placeSlot, placeBlade))
  1984. {
  1985. fims.WaitTransfer(ModuleName.WaferRobot);
  1986. }
  1987. }
  1988. }
  1989. }
  1990. private bool CheckWaferSlotsHasWafer(List<int> slots)
  1991. {
  1992. foreach (var slot in slots)
  1993. {
  1994. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
  1995. {
  1996. return true;
  1997. }
  1998. }
  1999. return false;
  2000. }
  2001. private List<int> GetWaferSlots()
  2002. {
  2003. List<int> slots = null;
  2004. switch (SC.GetStringValue("System.ChargingOrderBySort"))
  2005. {
  2006. case "ED,P,M":
  2007. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2008. return _monitor1Slots;
  2009. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2010. return _monitor2Slots;
  2011. if (CheckWaferSlotsHasWafer(_productSlots))
  2012. return _productSlots;
  2013. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2014. return _extraDummySlots;
  2015. break;
  2016. case "ED,M,P":
  2017. if (CheckWaferSlotsHasWafer(_productSlots))
  2018. return _productSlots;
  2019. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2020. return _monitor1Slots;
  2021. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2022. return _monitor2Slots;
  2023. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2024. return _extraDummySlots;
  2025. break;
  2026. case "P,ED,M":
  2027. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2028. return _monitor1Slots;
  2029. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2030. return _monitor2Slots;
  2031. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2032. return _extraDummySlots;
  2033. if (CheckWaferSlotsHasWafer(_productSlots))
  2034. return _productSlots;
  2035. break;
  2036. case "P,M,ED":
  2037. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2038. return _extraDummySlots;
  2039. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2040. return _monitor1Slots;
  2041. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2042. return _monitor2Slots;
  2043. if (CheckWaferSlotsHasWafer(_productSlots))
  2044. return _productSlots;
  2045. break;
  2046. case "M,P,ED":
  2047. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2048. return _extraDummySlots;
  2049. if (CheckWaferSlotsHasWafer(_productSlots))
  2050. return _productSlots;
  2051. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2052. return _monitor1Slots;
  2053. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2054. return _monitor2Slots;
  2055. break;
  2056. case "M,ED,P":
  2057. if (CheckWaferSlotsHasWafer(_productSlots))
  2058. return _productSlots;
  2059. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2060. return _extraDummySlots;
  2061. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2062. return _monitor1Slots;
  2063. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2064. return _monitor2Slots;
  2065. break;
  2066. default:
  2067. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2068. return _monitor1Slots;
  2069. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2070. return _monitor2Slots;
  2071. if (CheckWaferSlotsHasWafer(_productSlots))
  2072. return _productSlots;
  2073. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2074. return _extraDummySlots;
  2075. break;
  2076. }
  2077. foreach (var slot in _sideDummySlots)
  2078. {
  2079. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
  2080. {
  2081. return _sideDummySlots;
  2082. }
  2083. }
  2084. return slots;
  2085. }
  2086. private bool CheckCarrierHasWaferInPM(ModuleName module)
  2087. {
  2088. bool isHaveWafer = false;
  2089. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2090. {
  2091. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  2092. continue;
  2093. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2094. if (wafer == null || wafer.IsEmpty)
  2095. continue;
  2096. if (wafer.OriginStation == (int)module)
  2097. {
  2098. isHaveWafer = true;
  2099. break;
  2100. }
  2101. }
  2102. return isHaveWafer;
  2103. }
  2104. private void DischargingOrderBySort(string order)
  2105. {
  2106. switch (order)
  2107. {
  2108. case "ED,P,M":
  2109. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2110. if (!_carrierRobot.IsAvailable)
  2111. return;
  2112. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2113. if (!_carrierRobot.IsAvailable)
  2114. return;
  2115. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2116. if (!_carrierRobot.IsAvailable)
  2117. return;
  2118. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2119. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2120. break;
  2121. case "ED,M,P":
  2122. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2123. if (!_carrierRobot.IsAvailable)
  2124. return;
  2125. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2126. if (!_carrierRobot.IsAvailable)
  2127. return;
  2128. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2129. if (!_carrierRobot.IsAvailable)
  2130. return;
  2131. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2132. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2133. break;
  2134. case "P,ED,M":
  2135. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2136. if (!_carrierRobot.IsAvailable)
  2137. return;
  2138. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2139. if (!_carrierRobot.IsAvailable)
  2140. return;
  2141. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2142. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2143. if (!_carrierRobot.IsAvailable)
  2144. return;
  2145. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2146. break;
  2147. case "P,M,ED":
  2148. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2149. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2150. if (!_carrierRobot.IsAvailable)
  2151. return;
  2152. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2153. if (!_carrierRobot.IsAvailable)
  2154. return;
  2155. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2156. if (!_carrierRobot.IsAvailable)
  2157. return;
  2158. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2159. break;
  2160. case "M,P,ED":
  2161. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2162. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2163. if (!_carrierRobot.IsAvailable)
  2164. return;
  2165. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2166. if (!_carrierRobot.IsAvailable)
  2167. return;
  2168. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2169. if (!_carrierRobot.IsAvailable)
  2170. return;
  2171. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2172. if (!_carrierRobot.IsAvailable)
  2173. return;
  2174. break;
  2175. case "M,ED,P":
  2176. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2177. if (!_carrierRobot.IsAvailable)
  2178. return;
  2179. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2180. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2181. if (!_carrierRobot.IsAvailable)
  2182. return;
  2183. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2184. if (!_carrierRobot.IsAvailable)
  2185. return;
  2186. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2187. if (!_carrierRobot.IsAvailable)
  2188. return;
  2189. break;
  2190. default:
  2191. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2192. if (!_carrierRobot.IsAvailable)
  2193. return;
  2194. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2195. if (!_carrierRobot.IsAvailable)
  2196. return;
  2197. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2198. if (!_carrierRobot.IsAvailable)
  2199. return;
  2200. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2201. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2202. break;
  2203. }
  2204. }
  2205. private void ChargingOrderBySort(ProcessJobInfo pj, string order)
  2206. {
  2207. List<SchedulerStocker> pjStocker = new List<SchedulerStocker>();
  2208. foreach (var s in pj.Stockers)
  2209. {
  2210. var module = GetModule(s.Item1) as SchedulerStocker;
  2211. if (module != null)
  2212. pjStocker.Add(module);
  2213. }
  2214. switch (order)
  2215. {
  2216. case "ED,P,M":
  2217. if (pj.IsNeedChargeDummyWafer)
  2218. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2219. if (!_carrierRobot.IsAvailable)
  2220. return;
  2221. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2222. if (!_carrierRobot.IsAvailable)
  2223. return;
  2224. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2225. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2226. break;
  2227. case "ED,M,P":
  2228. if (pj.IsNeedChargeDummyWafer)
  2229. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2230. if (!_carrierRobot.IsAvailable)
  2231. return;
  2232. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2233. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2234. if (!_carrierRobot.IsAvailable)
  2235. return;
  2236. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2237. break;
  2238. case "P,ED,M":
  2239. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2240. if (!_carrierRobot.IsAvailable)
  2241. return;
  2242. if (pj.IsNeedChargeDummyWafer)
  2243. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2244. if (!_carrierRobot.IsAvailable)
  2245. return;
  2246. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2247. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2248. break;
  2249. case "P,M,ED":
  2250. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2251. if (!_carrierRobot.IsAvailable)
  2252. return;
  2253. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2254. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2255. if (!_carrierRobot.IsAvailable)
  2256. return;
  2257. if (pj.IsNeedChargeDummyWafer)
  2258. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2259. break;
  2260. case "M,P,ED":
  2261. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2262. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2263. if (!_carrierRobot.IsAvailable)
  2264. return;
  2265. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2266. if (!_carrierRobot.IsAvailable)
  2267. return;
  2268. if (pj.IsNeedChargeDummyWafer)
  2269. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2270. break;
  2271. case "M,ED,P":
  2272. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2273. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2274. if (!_carrierRobot.IsAvailable)
  2275. return;
  2276. if (pj.IsNeedChargeDummyWafer)
  2277. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2278. if (!_carrierRobot.IsAvailable)
  2279. return;
  2280. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2281. break;
  2282. default:
  2283. if (pj.IsNeedChargeDummyWafer)
  2284. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2285. if (!_carrierRobot.IsAvailable)
  2286. return;
  2287. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2288. if (!_carrierRobot.IsAvailable)
  2289. return;
  2290. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2291. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2292. break;
  2293. }
  2294. }
  2295. private void MonitorCassetteRobotStockerTaskInDischarge(List<SchedulerStocker> targetStockers, WaferType targetWaferType, List<int> waferSlots)
  2296. {
  2297. if (!_carrierRobot.IsAvailable)
  2298. return;
  2299. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  2300. //pick
  2301. if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && waferSlots.Count > 0)
  2302. {
  2303. bool needPickSdCassette = false;
  2304. int sdWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType, true);
  2305. needPickSdCassette = sdWaferCount > 0;
  2306. var sdStockerModule = GetModuleNameForNextWafer(targetWaferType);
  2307. if (needPickSdCassette && sdStockerModule != ModuleName.System)
  2308. {
  2309. SchedulerStocker sdStocker = null;
  2310. foreach (var sd in targetStockers)
  2311. {
  2312. if (!CarrierManager.Instance.CheckHasCarrier(sd.Module, 0) ||
  2313. CarrierManager.Instance.GetCarrier(sd.Module, 0).CarrierType != targetCarrierType)
  2314. continue;
  2315. if (sd.Module == sdStockerModule &&
  2316. CheckCarrierHasEmptySlot(sd.Module))
  2317. {
  2318. sdStocker = sd;
  2319. break;
  2320. }
  2321. }
  2322. SchedulerFIMS fims = null;
  2323. foreach (var st in _lstFIMSs)
  2324. {
  2325. if (!st.IsAvailable)
  2326. continue;
  2327. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  2328. {
  2329. fims = st;
  2330. break;
  2331. }
  2332. }
  2333. if (sdStocker != null && fims != null)
  2334. {
  2335. if (_carrierRobot.Pick(sdStocker.Module, 0, Hand.Blade1))
  2336. {
  2337. sdStocker.WaitTransfer(ModuleName.CarrierRobot);
  2338. return;
  2339. }
  2340. }
  2341. }
  2342. }
  2343. if (!_carrierRobot.IsAvailable)
  2344. return;
  2345. //place
  2346. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2347. if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  2348. {
  2349. if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName) || !CheckCarrierHasEmptySlot(ModuleName.CarrierRobot))
  2350. {
  2351. SchedulerStocker sdStocker = null;
  2352. foreach (var sd in targetStockers)
  2353. {
  2354. if (CarrierManager.Instance.CheckNoCarrier(sd.Module, 0) && sd.Module == carrier.InternalModuleName)
  2355. {
  2356. sdStocker = sd;
  2357. break;
  2358. }
  2359. }
  2360. if (sdStocker != null)
  2361. {
  2362. var canPlace = true;
  2363. var transfer = Singleton<EquipmentManager>.Instance.GetTransferJobStockers();
  2364. if (transfer != null && transfer.Any(x => x.Stocker == carrier.InternalModuleName))
  2365. canPlace = false;
  2366. if (canPlace && _carrierRobot.Place(sdStocker.Module, 0, Hand.Blade1))
  2367. {
  2368. sdStocker.WaitTransfer(ModuleName.CarrierRobot);
  2369. return;
  2370. }
  2371. }
  2372. }
  2373. }
  2374. }
  2375. private bool CheckCarrierCanPickFromFIMSInDischarge(ModuleName fimsCarrierModule)
  2376. {
  2377. List<ModuleName> robotModules = new List<ModuleName>();
  2378. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  2379. {
  2380. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  2381. if (wafer == null || wafer.IsEmpty)
  2382. continue;
  2383. if (!robotModules.Contains((ModuleName)wafer.OriginStation))
  2384. robotModules.Add((ModuleName)wafer.OriginStation);
  2385. }
  2386. if (robotModules.Contains(fimsCarrierModule))
  2387. return false;
  2388. List<ModuleName> pmModules = new List<ModuleName>();
  2389. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2390. {
  2391. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2392. if (wafer == null || wafer.IsEmpty)
  2393. continue;
  2394. if (!pmModules.Contains((ModuleName)wafer.OriginStation))
  2395. pmModules.Add((ModuleName)wafer.OriginStation);
  2396. }
  2397. if (pmModules.Contains(fimsCarrierModule))
  2398. return false;
  2399. return true;
  2400. }
  2401. private ModuleName GetNextStockerRelatedToWaferRobot()
  2402. {
  2403. List<ModuleName> fimsModules = new List<ModuleName>();
  2404. foreach (var fims in _lstFIMSs)
  2405. {
  2406. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  2407. continue;
  2408. fimsModules.Add(CarrierManager.Instance.GetCarrier(fims.Module, 0).InternalModuleName);
  2409. }
  2410. List<ModuleName> robotModules = new List<ModuleName>();
  2411. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  2412. {
  2413. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  2414. if (wafer == null || wafer.IsEmpty)
  2415. continue;
  2416. if (!robotModules.Contains((ModuleName)wafer.OriginStation))
  2417. robotModules.Add((ModuleName)wafer.OriginStation);
  2418. }
  2419. if (robotModules.Count > 0)
  2420. {
  2421. foreach (var module in robotModules)
  2422. {
  2423. if (!fimsModules.Any(x => x == module))
  2424. return module;
  2425. }
  2426. }
  2427. List<ModuleName> pmModules = new List<ModuleName>();
  2428. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2429. {
  2430. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2431. if (wafer == null || wafer.IsEmpty)
  2432. continue;
  2433. if (!pmModules.Contains((ModuleName)wafer.OriginStation))
  2434. pmModules.Add((ModuleName)wafer.OriginStation);
  2435. if (pmModules.Count == _lstFIMSs.Count)
  2436. break;
  2437. }
  2438. if (pmModules.Count > 0)
  2439. {
  2440. foreach (var module in pmModules)
  2441. {
  2442. if (!fimsModules.Any(x => x == module))
  2443. return module;
  2444. }
  2445. }
  2446. return ModuleName.System;
  2447. }
  2448. private void MonitorCassetteRobotPlaceStockerTask()
  2449. {
  2450. if (!_carrierRobot.IsAvailable)
  2451. return;
  2452. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2453. if (pj == null)
  2454. return;
  2455. //place
  2456. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2457. if (carrier != null && !carrier.IsEmpty && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()))
  2458. {
  2459. var target = pj.Stockers.Find(x => x.Item1 == carrier.InternalModuleName.ToString());
  2460. if (target != null && CarrierManager.Instance.CheckNoCarrier(target.Item1, 0))
  2461. {
  2462. if (_carrierRobot.Place(ModuleHelper.Converter(target.Item1), 0, Hand.Blade1))
  2463. {
  2464. GetModule(target.Item1).WaitTransfer(ModuleName.CarrierRobot);
  2465. return;
  2466. }
  2467. }
  2468. }
  2469. }
  2470. private void MonitorCassetteRobotStockerTask(List<SchedulerStocker> targetStockers, WaferType targetWaferType)
  2471. {
  2472. if (!_carrierRobot.IsAvailable)
  2473. return;
  2474. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2475. if (pj == null || pj.IsEmptyLayout)
  2476. return;
  2477. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2478. var targetSlots = GetWaferSlots(targetWaferType);
  2479. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  2480. if (targetSlots == null)
  2481. return;
  2482. //pick
  2483. if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && targetSlots.Count > 0)
  2484. {
  2485. bool needPickTargetCassette = false;
  2486. int targetWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType);
  2487. if (targetWaferCount < targetSlots.Count)
  2488. needPickTargetCassette = true;
  2489. if (needPickTargetCassette)
  2490. {
  2491. SchedulerStocker targetStocker = null;
  2492. foreach (var target in targetStockers)
  2493. {
  2494. if (CarrierManager.Instance.CheckHasCarrier(target.Module, 0) && !CheckCarrierHasNoWafer(target.Module, targetWaferType) &&
  2495. CarrierManager.Instance.GetCarrier(target.Module).CarrierType == targetCarrierType)
  2496. {
  2497. if (pj.ProcessingState == EnumProcessingState.Charging)
  2498. {
  2499. carrier = CarrierManager.Instance.GetCarrier(target.Module);
  2500. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2501. var wafers = WaferManager.Instance.GetWafers(target.Module);
  2502. if (wafers != null && stockerInfo != null)
  2503. {
  2504. foreach (var wafer in wafers)
  2505. {
  2506. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2507. continue;
  2508. if (!wafer.IsEmpty && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  2509. {
  2510. targetStocker = target;
  2511. break;
  2512. }
  2513. }
  2514. if (targetStocker != null)
  2515. break;
  2516. }
  2517. }
  2518. else
  2519. {
  2520. targetStocker = target;
  2521. break;
  2522. }
  2523. }
  2524. }
  2525. SchedulerFIMS fims = null;
  2526. foreach (var st in _lstFIMSs)
  2527. {
  2528. if (!st.IsAvailable)
  2529. continue;
  2530. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  2531. {
  2532. fims = st;
  2533. break;
  2534. }
  2535. }
  2536. if (targetStocker != null && fims != null)
  2537. {
  2538. switch (targetCarrierType.ToString())
  2539. {
  2540. case "SD":
  2541. _lstPlaceSideDummyStocker.Add(targetStocker);
  2542. break;
  2543. case "ED":
  2544. _lstPlaceExtraDummyStockers.Add(targetStocker);
  2545. break;
  2546. case "P":
  2547. _lstPlaceCurrentBatchStocker.Add(targetStocker);
  2548. break;
  2549. case "M1":
  2550. _lstPlaceMonitor1Stocker.Add(targetStocker);
  2551. break;
  2552. case "M2":
  2553. _lstPlaceMonitor2Stocker.Add(targetStocker);
  2554. break;
  2555. }
  2556. if (_carrierRobot.Pick(targetStocker.Module, 0, Hand.Blade1))
  2557. {
  2558. targetStocker.WaitTransfer(ModuleName.CarrierRobot);
  2559. return;
  2560. }
  2561. }
  2562. }
  2563. }
  2564. if (!_carrierRobot.IsAvailable)
  2565. return;
  2566. //place
  2567. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2568. if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  2569. {
  2570. var needPlace = false;
  2571. if (pj.ProcessingState == EnumProcessingState.Charging)
  2572. {
  2573. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2574. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  2575. if (wafers != null && stockerInfo != null)
  2576. {
  2577. foreach (var wafer in wafers)
  2578. {
  2579. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2580. continue;
  2581. if (stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2582. {
  2583. needPlace = true;
  2584. break;
  2585. }
  2586. }
  2587. }
  2588. }
  2589. if (GetWaferCountRelatedToWaferRobot(targetWaferType) >= targetSlots.Count || CheckCarrierHasNoWafer(ModuleName.CarrierRobot, targetWaferType) || needPlace)
  2590. {
  2591. switch (targetCarrierType.ToString())
  2592. {
  2593. case "SD":
  2594. targetStockers = _lstPlaceSideDummyStocker;
  2595. break;
  2596. case "ED":
  2597. targetStockers = _lstPlaceExtraDummyStockers;
  2598. break;
  2599. case "P":
  2600. targetStockers = _lstPlaceCurrentBatchStocker;
  2601. break;
  2602. case "M1":
  2603. targetStockers = _lstPlaceMonitor1Stocker;
  2604. break;
  2605. case "M2":
  2606. targetStockers = _lstPlaceMonitor2Stocker;
  2607. break;
  2608. }
  2609. SchedulerStocker targetStocker = null;
  2610. foreach (var target in targetStockers)
  2611. {
  2612. if (CarrierManager.Instance.CheckNoCarrier(target.Module, 0) && carrier.InternalModuleName == target.Module)
  2613. {
  2614. if (pj.ProcessingState == EnumProcessingState.Charging)
  2615. {
  2616. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2617. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  2618. if (wafers != null && stockerInfo != null)
  2619. {
  2620. var hasWafer = false;
  2621. foreach (var wafer in wafers)
  2622. {
  2623. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2624. continue;
  2625. if (stockerInfo.Item3.Any() && stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2626. {
  2627. hasWafer = true;
  2628. break;
  2629. }
  2630. }
  2631. if (!hasWafer)
  2632. {
  2633. targetStocker = target;
  2634. break;
  2635. }
  2636. }
  2637. }
  2638. else
  2639. {
  2640. targetStocker = target;
  2641. break;
  2642. }
  2643. }
  2644. }
  2645. if (targetStocker != null)
  2646. {
  2647. if (_carrierRobot.Place(targetStocker.Module, 0, Hand.Blade1))
  2648. {
  2649. targetStocker.WaitTransfer(ModuleName.CarrierRobot);
  2650. return;
  2651. }
  2652. }
  2653. }
  2654. }
  2655. }
  2656. private bool CheckCarrierCanPickFromStocker(ModuleName currentModule)
  2657. {
  2658. var currentWafers = WaferManager.Instance.GetWafers(currentModule);
  2659. if (currentWafers != null && !currentWafers.Any(x => !x.IsEmpty))
  2660. {
  2661. //空盒子
  2662. return false;
  2663. }
  2664. var carrierType = CarrierManager.Instance.GetCarrier(currentModule, 0).CarrierType;
  2665. var ret = CheckHasPWafer();
  2666. var waferTypeSlots = GetWaferTypeSlots();
  2667. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2668. {
  2669. Dictionary<WaferType, int> nextWaferTypeDic = new Dictionary<WaferType, int>();
  2670. int startIndex = -1;
  2671. for (int i = 0; i < waferTypeSlots.Count; i++)
  2672. {
  2673. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2674. {
  2675. startIndex = i;
  2676. continue;
  2677. }
  2678. //P wafer不够的情况
  2679. if (waferTypeSlots[i].Item1 == WaferType.P)
  2680. {
  2681. if (!ret.Item1)
  2682. continue;
  2683. else
  2684. {
  2685. if (i - startIndex > ret.Item2)
  2686. continue;
  2687. }
  2688. }
  2689. if (!nextWaferTypeDic.ContainsKey(waferTypeSlots[i].Item1))
  2690. nextWaferTypeDic.Add(waferTypeSlots[i].Item1, 0);
  2691. nextWaferTypeDic[waferTypeSlots[i].Item1] += 1;
  2692. if (nextWaferTypeDic.Count == _lstFIMSs.Count)
  2693. break;
  2694. if (i - startIndex >= _lstFIMSs.Count * 25)
  2695. break;
  2696. }
  2697. Dictionary<WaferType, int> fimsWaferTypeDic = new Dictionary<WaferType, int>();
  2698. foreach (var fims in _lstFIMSs)
  2699. {
  2700. if (CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
  2701. {
  2702. for (int i = 0; i < WaferManager.Instance.GetWafers(fims.Module).Length; i++)
  2703. {
  2704. var wafer = WaferManager.Instance.GetWafer(fims.Module, i);
  2705. if (wafer == null || wafer.IsEmpty)
  2706. continue;
  2707. if (!fimsWaferTypeDic.ContainsKey(wafer.WaferType))
  2708. fimsWaferTypeDic.Add(wafer.WaferType, 0);
  2709. fimsWaferTypeDic[wafer.WaferType] += 1;
  2710. }
  2711. }
  2712. }
  2713. foreach (var type in nextWaferTypeDic.Keys)
  2714. {
  2715. if (carrierType.ToString() == type.ToString())
  2716. {
  2717. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2718. {
  2719. if (!fimsWaferTypeDic.ContainsKey(type) || nextWaferTypeDic[type] > fimsWaferTypeDic[type])
  2720. return true;
  2721. }
  2722. else if (type == WaferType.SD)
  2723. {
  2724. foreach (var wafer in currentWafers)
  2725. {
  2726. if (wafer.IsEmpty)
  2727. continue;
  2728. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2729. return true;
  2730. }
  2731. }
  2732. else if (type == WaferType.ED)
  2733. {
  2734. foreach (var wafer in currentWafers)
  2735. {
  2736. if (wafer.IsEmpty)
  2737. continue;
  2738. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2739. return true;
  2740. }
  2741. }
  2742. }
  2743. }
  2744. }
  2745. return false;
  2746. }
  2747. private bool CheckCarrierCanPickFromFIMS(ModuleName currentModule)
  2748. {
  2749. var fimsWafers = WaferManager.Instance.GetWafers(currentModule);
  2750. if (fimsWafers != null && !fimsWafers.Any(x => !x.IsEmpty))
  2751. {
  2752. //空盒子
  2753. return true;
  2754. }
  2755. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2756. if (pj == null)
  2757. return true;
  2758. var carrier = CarrierManager.Instance.GetCarrier(currentModule, 0);
  2759. var carrierType = carrier.CarrierType;
  2760. if (!pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()))
  2761. return true;
  2762. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2763. GetWaferSlotsAndWaferType(carrier, out var slots, out var waferType);
  2764. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  2765. if (waferType == WaferType.SD)
  2766. dummyWafers = _sideDummyWafers;
  2767. else if (waferType == WaferType.ED)
  2768. dummyWafers = _extraDummyWafers;
  2769. if (stockerInfo != null)
  2770. {
  2771. var hasWafer = false;
  2772. foreach (var wafer in fimsWafers)
  2773. {
  2774. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2775. continue;
  2776. if (stockerInfo.Item3.Any() && stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2777. {
  2778. hasWafer = true;
  2779. break;
  2780. }
  2781. if (!stockerInfo.Item3.Any())
  2782. {
  2783. if (slots != null && slots.Count > 0)
  2784. {
  2785. for (int i = 0; i < slots.Count; i++)
  2786. {
  2787. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slots[i]))
  2788. {
  2789. continue;
  2790. }
  2791. if ((wafer.WaferType == WaferType.SD || wafer.WaferType == WaferType.ED) && !dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2792. continue;
  2793. return false;
  2794. }
  2795. }
  2796. }
  2797. }
  2798. if (hasWafer)
  2799. return false;
  2800. }
  2801. return true;
  2802. var ret = CheckHasPWafer();
  2803. var waferTypeSlots = GetWaferTypeSlots();
  2804. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2805. {
  2806. List<WaferType> nextWaferTypeLst = new List<WaferType>();
  2807. int startIndex = -1;
  2808. for (int i = 0; i < waferTypeSlots.Count; i++)
  2809. {
  2810. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2811. {
  2812. startIndex = i;
  2813. continue;
  2814. }
  2815. //P wafer不够的情况
  2816. if (waferTypeSlots[i].Item1 == WaferType.P)
  2817. {
  2818. if (!ret.Item1)
  2819. continue;
  2820. else
  2821. {
  2822. if (i - startIndex > ret.Item2)
  2823. continue;
  2824. }
  2825. }
  2826. if (!nextWaferTypeLst.Contains(waferTypeSlots[i].Item1))
  2827. nextWaferTypeLst.Add(waferTypeSlots[i].Item1);
  2828. if (nextWaferTypeLst.Count == _lstFIMSs.Count)
  2829. break;
  2830. if (i - startIndex >= _lstFIMSs.Count * 25)
  2831. break;
  2832. }
  2833. foreach (var type in nextWaferTypeLst)
  2834. {
  2835. if (carrierType.ToString() == type.ToString())
  2836. {
  2837. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2838. return false;
  2839. else if (type == WaferType.SD)
  2840. {
  2841. foreach (var wafer in fimsWafers)
  2842. {
  2843. if (wafer.IsEmpty)
  2844. continue;
  2845. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2846. return false;
  2847. }
  2848. }
  2849. else if (type == WaferType.ED)
  2850. {
  2851. foreach (var wafer in fimsWafers)
  2852. {
  2853. if (wafer.IsEmpty)
  2854. continue;
  2855. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2856. return false;
  2857. }
  2858. }
  2859. }
  2860. }
  2861. }
  2862. return true;
  2863. }
  2864. private bool CheckCarrierCanPlaceToStocker(ModuleName currentModule)
  2865. {
  2866. var fimsWafers = WaferManager.Instance.GetWafers(currentModule);
  2867. if (fimsWafers != null && !fimsWafers.Any(x => !x.IsEmpty))
  2868. {
  2869. //空盒子
  2870. return true;
  2871. }
  2872. var carrierType = CarrierManager.Instance.GetCarrier(currentModule, 0).CarrierType;
  2873. var ret = CheckHasPWafer();
  2874. var waferTypeSlots = GetWaferTypeSlots();
  2875. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2876. {
  2877. List<WaferType> nextWaferTypeLst = new List<WaferType>();
  2878. int startIndex = -1;
  2879. for (int i = 0; i < waferTypeSlots.Count; i++)
  2880. {
  2881. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2882. {
  2883. startIndex = i;
  2884. continue;
  2885. }
  2886. //P wafer不够的情况
  2887. if (waferTypeSlots[i].Item1 == WaferType.P)
  2888. {
  2889. if (!ret.Item1)
  2890. continue;
  2891. else
  2892. {
  2893. if (i - startIndex > ret.Item2)
  2894. continue;
  2895. }
  2896. }
  2897. if (!nextWaferTypeLst.Contains(waferTypeSlots[i].Item1))
  2898. nextWaferTypeLst.Add(waferTypeSlots[i].Item1);
  2899. if (nextWaferTypeLst.Count == _lstFIMSs.Count)
  2900. break;
  2901. if (i - startIndex >= _lstFIMSs.Count * 25)
  2902. break;
  2903. }
  2904. foreach (var type in nextWaferTypeLst)
  2905. {
  2906. if (carrierType.ToString() == type.ToString())
  2907. {
  2908. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2909. return false;
  2910. else if (type == WaferType.SD)
  2911. {
  2912. foreach (var wafer in fimsWafers)
  2913. {
  2914. if (wafer.IsEmpty)
  2915. continue;
  2916. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2917. return false;
  2918. }
  2919. }
  2920. else if (type == WaferType.ED)
  2921. {
  2922. foreach (var wafer in fimsWafers)
  2923. {
  2924. if (wafer.IsEmpty)
  2925. continue;
  2926. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2927. return false;
  2928. }
  2929. }
  2930. }
  2931. }
  2932. }
  2933. return true;
  2934. }
  2935. private void MonitorCarrierRobotPickFIMSTask()
  2936. {
  2937. if (!_carrierRobot.IsAvailable)
  2938. return;
  2939. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2940. if (pj == null)
  2941. return;
  2942. //pick
  2943. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2944. if (carrier != null && carrier.IsEmpty)
  2945. {
  2946. SchedulerFIMS fims = null;
  2947. foreach (var st in _lstFIMSs)
  2948. {
  2949. if (!st.IsAvailable)
  2950. continue;
  2951. // check FIMS
  2952. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  2953. if (!fimsDevice.IsUnloadCompleted)
  2954. continue;
  2955. if (CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  2956. {
  2957. carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  2958. if (carrier != null)
  2959. {
  2960. if (pj.ProcessingState == EnumProcessingState.Discharging)
  2961. {
  2962. //discharge
  2963. if (!CheckCarrierHasEmptySlot(st.Module))
  2964. {
  2965. fims = st;
  2966. break;
  2967. }
  2968. if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
  2969. {
  2970. fims = st;
  2971. break;
  2972. }
  2973. }
  2974. else if (pj.ProcessingState == EnumProcessingState.Charging)
  2975. {
  2976. //charge
  2977. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  2978. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2979. var wafers = WaferManager.Instance.GetWafers(st.Module);
  2980. if (wafers != null && stockerInfo != null)
  2981. {
  2982. bool isEmpty = true;
  2983. foreach (var wafer in wafers)
  2984. {
  2985. if (!wafer.IsEmpty)
  2986. {
  2987. if (stockerInfo.Item3.Any())
  2988. {
  2989. if (stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2990. {
  2991. isEmpty = false;
  2992. break;
  2993. }
  2994. }
  2995. else
  2996. {
  2997. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  2998. {
  2999. isEmpty = false;
  3000. break;
  3001. }
  3002. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3003. {
  3004. isEmpty = false;
  3005. break;
  3006. }
  3007. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3008. {
  3009. isEmpty = false;
  3010. break;
  3011. }
  3012. }
  3013. }
  3014. }
  3015. if (isEmpty)
  3016. {
  3017. fims = st;
  3018. break;
  3019. }
  3020. }
  3021. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) >= slots.Count)
  3022. {
  3023. fims = st;
  3024. break;
  3025. }
  3026. }
  3027. else if (pj.ProcessingState == EnumProcessingState.Processing)
  3028. {
  3029. foreach (var bf in pj.Stockers)
  3030. {
  3031. if (CarrierManager.Instance.CheckHasCarrier(bf.Item1, 0))
  3032. continue;
  3033. if (bf.Item1 == carrier.InternalModuleName.ToString())
  3034. {
  3035. fims = st;
  3036. break;
  3037. }
  3038. }
  3039. }
  3040. }
  3041. }
  3042. }
  3043. if (fims != null)
  3044. {
  3045. if (_carrierRobot.Pick(fims.Module, 0, Hand.Blade1))
  3046. {
  3047. fims.WaitTransfer(ModuleName.CarrierRobot);
  3048. return;
  3049. }
  3050. }
  3051. }
  3052. if (!_carrierRobot.IsAvailable)
  3053. return;
  3054. }
  3055. private void MonitorCarrierRobotPlaceFIMSTaskInCharge()
  3056. {
  3057. if (!_carrierRobot.IsAvailable)
  3058. return;
  3059. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3060. if (pj == null)
  3061. return;
  3062. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3063. //place
  3064. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3065. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  3066. if (carrier != null && !carrier.IsEmpty && stockerInfo != null)
  3067. {
  3068. SchedulerFIMS fims = null;
  3069. foreach (var st in _lstFIMSs)
  3070. {
  3071. if (!st.IsAvailable)
  3072. continue;
  3073. // check FIMS
  3074. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  3075. if (!fimsDevice.IsUnloadCompleted)
  3076. continue;
  3077. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  3078. {
  3079. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  3080. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) <= slots.Count)
  3081. {
  3082. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3083. foreach (var wafer in wafers)
  3084. {
  3085. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3086. {
  3087. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3088. continue;
  3089. fims = st;
  3090. break;
  3091. }
  3092. }
  3093. }
  3094. if (fims != null)
  3095. break;
  3096. }
  3097. }
  3098. if (fims != null)
  3099. {
  3100. if (_carrierRobot.Place(fims.Module, 0, Hand.Blade1))
  3101. {
  3102. fims.WaitTransfer(ModuleName.CarrierRobot);
  3103. return;
  3104. }
  3105. }
  3106. }
  3107. }
  3108. private void MonitorCarrierRobotPlaceFIMSTaskInDischarge()
  3109. {
  3110. if (!_carrierRobot.IsAvailable)
  3111. return;
  3112. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3113. if (pj == null)
  3114. return;
  3115. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3116. //place
  3117. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3118. if (carrier != null && !carrier.IsEmpty && CheckCarrierHasEmptySlot(ModuleName.CarrierRobot) && CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
  3119. {
  3120. SchedulerFIMS fims = null;
  3121. foreach (var st in _lstFIMSs)
  3122. {
  3123. if (!st.IsAvailable)
  3124. continue;
  3125. // check FIMS
  3126. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  3127. if (!fimsDevice.IsUnloadCompleted)
  3128. continue;
  3129. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  3130. {
  3131. fims = st;
  3132. break;
  3133. }
  3134. }
  3135. if (fims != null)
  3136. {
  3137. if (_carrierRobot.Place(fims.Module, 0, Hand.Blade1))
  3138. {
  3139. fims.WaitTransfer(ModuleName.CarrierRobot);
  3140. return;
  3141. }
  3142. }
  3143. }
  3144. }
  3145. private bool CheckCarrierHasNoWafer(ModuleName module, WaferType waferType)
  3146. {
  3147. bool isEmpty = true;
  3148. var wafers = WaferManager.Instance.GetWafers(module);
  3149. if (wafers != null)
  3150. {
  3151. foreach (var wafer in wafers)
  3152. {
  3153. if (!wafer.IsEmpty)
  3154. {
  3155. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3156. {
  3157. isEmpty = false;
  3158. break;
  3159. }
  3160. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3161. {
  3162. isEmpty = false;
  3163. break;
  3164. }
  3165. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3166. {
  3167. isEmpty = false;
  3168. break;
  3169. }
  3170. }
  3171. }
  3172. }
  3173. return isEmpty;
  3174. }
  3175. private Dictionary<string, int> GetDummyWafers(List<SchedulerStocker> targetStockers, int needWaferCount, WaferType waferType)
  3176. {
  3177. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  3178. float useCountMin = GetWaferUseCountMin(targetStockers, waferType);
  3179. float useCountMax = GetWaferUseCountMax(targetStockers, waferType);
  3180. int range = (int)(useCountMax - useCountMin);
  3181. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), waferType.ToString()));
  3182. for (int i = 0; i <= range; i++)
  3183. {
  3184. foreach (var target in targetStockers)
  3185. {
  3186. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  3187. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  3188. continue;
  3189. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3190. if (wafers != null)
  3191. {
  3192. foreach (var wafer in wafers)
  3193. {
  3194. if (wafer.IsEmpty)
  3195. continue;
  3196. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3197. {
  3198. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3199. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3200. }
  3201. }
  3202. }
  3203. }
  3204. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3205. {
  3206. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3207. if (carrier.CarrierType == targetCarrierType)
  3208. {
  3209. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3210. if (wafers != null)
  3211. {
  3212. foreach (var wafer in wafers)
  3213. {
  3214. if (wafer.IsEmpty)
  3215. continue;
  3216. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3217. {
  3218. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3219. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3220. }
  3221. }
  3222. }
  3223. }
  3224. }
  3225. foreach (var fims in _lstFIMSs)
  3226. {
  3227. if (!fims.IsOnline)
  3228. continue;
  3229. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  3230. if (!carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  3231. {
  3232. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3233. if (wafers != null)
  3234. {
  3235. foreach (var wafer in wafers)
  3236. {
  3237. if (wafer.IsEmpty)
  3238. continue;
  3239. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3240. {
  3241. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3242. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3243. }
  3244. }
  3245. }
  3246. }
  3247. }
  3248. if (dummyWafers.Count() < needWaferCount)
  3249. useCountMin++;
  3250. else
  3251. break;
  3252. }
  3253. return dummyWafers;
  3254. }
  3255. private float GetWaferUseCountMin(List<SchedulerStocker> targetStockers, WaferType waferType)
  3256. {
  3257. float iUseCountMin = 10000;
  3258. foreach (var target in targetStockers)
  3259. {
  3260. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3261. if (wafers == null)
  3262. continue;
  3263. foreach (var wafer in wafers)
  3264. {
  3265. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3266. continue;
  3267. if (wafer.UseCount < iUseCountMin)
  3268. iUseCountMin = wafer.UseCount;
  3269. }
  3270. }
  3271. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3272. {
  3273. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3274. foreach (var wafer in wafers)
  3275. {
  3276. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3277. continue;
  3278. if (wafer.UseCount < iUseCountMin)
  3279. iUseCountMin = wafer.UseCount;
  3280. }
  3281. }
  3282. foreach (var fims in _lstFIMSs)
  3283. {
  3284. if (!fims.IsOnline)
  3285. continue;
  3286. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3287. foreach (var wafer in wafers)
  3288. {
  3289. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3290. continue;
  3291. if (wafer.UseCount < iUseCountMin)
  3292. iUseCountMin = wafer.UseCount;
  3293. }
  3294. }
  3295. return iUseCountMin;
  3296. }
  3297. private float GetWaferUseCountMax(List<SchedulerStocker> targetStockers, WaferType waferType)
  3298. {
  3299. float iUseCountMax = 0;
  3300. foreach (var target in targetStockers)
  3301. {
  3302. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3303. if (wafers == null)
  3304. continue;
  3305. foreach (var wafer in wafers)
  3306. {
  3307. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3308. continue;
  3309. if (wafer.UseCount >= iUseCountMax)
  3310. iUseCountMax = wafer.UseCount;
  3311. }
  3312. }
  3313. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3314. {
  3315. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3316. foreach (var wafer in wafers)
  3317. {
  3318. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3319. continue;
  3320. if (wafer.UseCount >= iUseCountMax)
  3321. iUseCountMax = wafer.UseCount;
  3322. }
  3323. }
  3324. foreach (var fims in _lstFIMSs)
  3325. {
  3326. if (!fims.IsOnline)
  3327. continue;
  3328. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3329. foreach (var wafer in wafers)
  3330. {
  3331. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3332. continue;
  3333. if (wafer.UseCount >= iUseCountMax)
  3334. iUseCountMax = wafer.UseCount;
  3335. }
  3336. }
  3337. return iUseCountMax;
  3338. }
  3339. private ModuleName GetModuleNameForNextWafer(WaferType waferType)
  3340. {
  3341. ModuleName module = ModuleName.System;
  3342. bool hasEmptyFims = false;
  3343. foreach (var fims in _lstFIMSs)
  3344. {
  3345. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  3346. {
  3347. hasEmptyFims = true;
  3348. break;
  3349. }
  3350. }
  3351. if (!hasEmptyFims)
  3352. return module;
  3353. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0))
  3354. {
  3355. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation;
  3356. }
  3357. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1))
  3358. {
  3359. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation;
  3360. }
  3361. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2))
  3362. {
  3363. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation;
  3364. }
  3365. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3))
  3366. {
  3367. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation;
  3368. }
  3369. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  3370. {
  3371. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation;
  3372. }
  3373. else
  3374. {
  3375. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3376. {
  3377. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  3378. {
  3379. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3380. continue;
  3381. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3382. if (wafer == null || wafer.IsEmpty)
  3383. continue;
  3384. if (wafer.WaferType == waferType)
  3385. {
  3386. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3387. break;
  3388. }
  3389. }
  3390. }
  3391. else
  3392. {
  3393. for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
  3394. {
  3395. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3396. continue;
  3397. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3398. if (wafer == null || wafer.IsEmpty)
  3399. continue;
  3400. if (wafer.WaferType == waferType)
  3401. {
  3402. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3403. break;
  3404. }
  3405. }
  3406. }
  3407. }
  3408. //下一片要放回的cassette已经在fims上
  3409. bool isCarrierAlreadyPicked = false;
  3410. foreach (var fims in _lstFIMSs)
  3411. {
  3412. if (!CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
  3413. continue;
  3414. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  3415. if (carrier != null && carrier.InternalModuleName == module)
  3416. {
  3417. isCarrierAlreadyPicked = true;
  3418. }
  3419. }
  3420. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3421. {
  3422. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
  3423. if (carrier != null && carrier.InternalModuleName == module)
  3424. {
  3425. isCarrierAlreadyPicked = true;
  3426. }
  3427. }
  3428. if (isCarrierAlreadyPicked)
  3429. {
  3430. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3431. {
  3432. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  3433. {
  3434. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3435. continue;
  3436. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3437. if (wafer == null || wafer.IsEmpty)
  3438. continue;
  3439. if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
  3440. {
  3441. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3442. break;
  3443. }
  3444. }
  3445. }
  3446. else
  3447. {
  3448. for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
  3449. {
  3450. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3451. continue;
  3452. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3453. if (wafer == null || wafer.IsEmpty)
  3454. continue;
  3455. if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
  3456. {
  3457. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3458. break;
  3459. }
  3460. }
  3461. }
  3462. }
  3463. return module;
  3464. }
  3465. private int GetWaferCountRelatedToWaferRobot(WaferType waferType, bool includeFims = true)
  3466. {
  3467. int count = 0;
  3468. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3469. if (pj == null || pj.IsEmptyLayout)
  3470. return count;
  3471. if (includeFims)
  3472. {
  3473. foreach (var fims in _lstFIMSs)
  3474. {
  3475. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  3476. continue;
  3477. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3478. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  3479. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  3480. foreach (var wafer in wafers)
  3481. {
  3482. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3483. {
  3484. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo != null && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3485. continue;
  3486. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3487. count++;
  3488. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3489. count++;
  3490. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3491. count++;
  3492. }
  3493. }
  3494. }
  3495. }
  3496. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  3497. {
  3498. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  3499. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3500. {
  3501. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString());
  3502. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo != null && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3503. continue;
  3504. count++;
  3505. }
  3506. }
  3507. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  3508. {
  3509. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3510. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3511. count++;
  3512. }
  3513. return count;
  3514. }
  3515. private void GetWaferSlotsAndWaferType(CarrierInfo carrier, out List<int> slots, out WaferType waferType)
  3516. {
  3517. slots = null;
  3518. waferType = WaferType.None;
  3519. if (carrier != null && !carrier.IsEmpty)
  3520. {
  3521. switch (carrier.CarrierType)
  3522. {
  3523. case CarrierType.SD:
  3524. slots = _sideDummySlots;
  3525. waferType = WaferType.SD;
  3526. break;
  3527. case CarrierType.ED:
  3528. slots = _extraDummySlots;
  3529. waferType = WaferType.ED;
  3530. break;
  3531. case CarrierType.M1:
  3532. slots = _monitor1Slots;
  3533. waferType = WaferType.M1;
  3534. break;
  3535. case CarrierType.M2:
  3536. slots = _monitor2Slots;
  3537. waferType = WaferType.M2;
  3538. break;
  3539. case CarrierType.P:
  3540. slots = _productSlots;
  3541. waferType = WaferType.P;
  3542. break;
  3543. }
  3544. }
  3545. }
  3546. private bool CheckCarrierHasEmptySlot(ModuleName module)
  3547. {
  3548. bool hasEmpty = false;
  3549. var wafers = WaferManager.Instance.GetWafers(module);
  3550. if (wafers != null)
  3551. {
  3552. foreach (var wafer in wafers)
  3553. {
  3554. if (wafer.IsEmpty)
  3555. {
  3556. hasEmpty = true;
  3557. break;
  3558. }
  3559. }
  3560. }
  3561. return hasEmpty;
  3562. }
  3563. private bool CheckCarrierNoHasEmptySlot(ModuleName module)
  3564. {
  3565. bool noHasEmpty = true;
  3566. var wafers = WaferManager.Instance.GetWafers(module);
  3567. if (wafers != null)
  3568. {
  3569. foreach (var wafer in wafers)
  3570. {
  3571. if (!wafer.IsEmpty)
  3572. {
  3573. noHasEmpty = false;
  3574. break;
  3575. }
  3576. }
  3577. }
  3578. return noHasEmpty;
  3579. }
  3580. private bool CheckModuleHasWaferInWaferRobotAndPM(ModuleName module)
  3581. {
  3582. bool isHaveWafer = false;
  3583. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  3584. if (wafers != null)
  3585. {
  3586. foreach (var wafer in wafers)
  3587. {
  3588. if (wafer == null || wafer.IsEmpty)
  3589. continue;
  3590. if (wafer.OriginStation == (int)module)
  3591. {
  3592. isHaveWafer = true;
  3593. break;
  3594. }
  3595. }
  3596. }
  3597. wafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot).ToList();
  3598. if (wafers != null)
  3599. {
  3600. foreach (var wafer in wafers)
  3601. {
  3602. if (wafer == null || wafer.IsEmpty)
  3603. continue;
  3604. if (wafer.OriginStation == (int)module)
  3605. {
  3606. isHaveWafer = true;
  3607. break;
  3608. }
  3609. }
  3610. }
  3611. return isHaveWafer;
  3612. }
  3613. private bool CheckWaferStatus(List<Tuple<string, string, List<int>>> useStockers, bool isNeedCheckMonitor, bool isNeedCheckP, out string reason)
  3614. {
  3615. reason = string.Empty;
  3616. if (SC.GetValue<bool>("System.IsCycleMode"))
  3617. {
  3618. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  3619. {
  3620. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  3621. continue;
  3622. var wafers = WaferManager.Instance.GetWafers(module);
  3623. if (wafers == null)
  3624. continue;
  3625. foreach (var wafer in wafers)
  3626. {
  3627. if (wafer.IsEmpty)
  3628. continue;
  3629. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  3630. }
  3631. }
  3632. }
  3633. else
  3634. {
  3635. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  3636. {
  3637. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  3638. continue;
  3639. var stockerInfo = useStockers.FirstOrDefault(x => x.Item1 == module.ToString());
  3640. var wafers = WaferManager.Instance.GetWafers(module);
  3641. if (wafers == null || stockerInfo == null)
  3642. continue;
  3643. if (SC.GetValue<bool>("System.EnableWarningFailedWafer"))
  3644. {
  3645. if (wafers.ToList().Any(x => x.ProcessState == EnumWaferProcessStatus.Failed))
  3646. {
  3647. reason = $"{module} has failed wafers.";
  3648. return false;
  3649. }
  3650. }
  3651. foreach (var wafer in wafers)
  3652. {
  3653. if (wafer.IsEmpty)
  3654. continue;
  3655. if (wafer.ProcessState != EnumWaferProcessStatus.Idle && SC.GetValue<bool>("System.EnableWarningWaferProcessState") && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  3656. {
  3657. if (wafer.WaferType == WaferType.P && isNeedCheckP)
  3658. {
  3659. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  3660. return false;
  3661. }
  3662. if (isNeedCheckMonitor)
  3663. {
  3664. if (wafer.WaferType == WaferType.M2 || wafer.WaferType == WaferType.M || wafer.WaferType == WaferType.M1)
  3665. {
  3666. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  3667. return false;
  3668. }
  3669. }
  3670. }
  3671. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  3672. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  3673. }
  3674. }
  3675. }
  3676. return true;
  3677. }
  3678. private Tuple<bool, int> CheckHasPWafer()
  3679. {
  3680. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3681. if (pj == null || pj.Stockers == null)
  3682. return Tuple.Create(false, 0);
  3683. int countP = 0;
  3684. foreach (var stocker in pj.Stockers)
  3685. {
  3686. var wafers = WaferManager.Instance.GetWafersByOriginalPosition(ModuleHelper.Converter(stocker.Item1));
  3687. foreach (var wafer in wafers)
  3688. {
  3689. if (!wafer.IsEmpty && wafer.WaferType == WaferType.P && wafer.Station != (int)ModuleName.PM1)
  3690. {
  3691. countP++;
  3692. }
  3693. }
  3694. }
  3695. return Tuple.Create(countP > 0, countP);
  3696. }
  3697. //返回下一片要放的wafer的slot和type
  3698. private int GetNextWaferSlot(out WaferType waferType)
  3699. {
  3700. var waferTypeSlots = GetWaferTypeSlots();
  3701. waferType = WaferType.None;
  3702. var ret = CheckHasPWafer();
  3703. int slot = -1;
  3704. if (waferTypeSlots != null)
  3705. {
  3706. for (int i = 0; i < waferTypeSlots.Count; i++)
  3707. {
  3708. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3709. {
  3710. continue;
  3711. }
  3712. //针对P wafer不够的情况
  3713. if (!ret.Item1 && waferTypeSlots[i].Item1 == WaferType.P)
  3714. continue;
  3715. slot = waferTypeSlots[i].Item2;
  3716. waferType = waferTypeSlots[i].Item1;
  3717. break;
  3718. }
  3719. }
  3720. return slot;
  3721. }
  3722. //返回下一片要放的wafer的type,需要除去当前在机械手上的wafer
  3723. private WaferType GetNextWaferType()
  3724. {
  3725. var ret = CheckHasPWafer();
  3726. var waferTypeSlots = GetWaferTypeSlots();
  3727. WaferType waferType = WaferType.None;
  3728. if (waferTypeSlots != null)
  3729. {
  3730. for (int i = 0; i < waferTypeSlots.Count; i++)
  3731. {
  3732. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3733. {
  3734. continue;
  3735. }
  3736. var wafer0 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0);
  3737. var wafer1 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1);
  3738. if (i < waferTypeSlots.Count && wafer0 != null && !wafer0.IsEmpty && wafer0.WaferType == waferTypeSlots[i].Item1)
  3739. i++;
  3740. if (i < waferTypeSlots.Count && wafer1 != null && !wafer1.IsEmpty && wafer1.WaferType == waferTypeSlots[i].Item1)
  3741. i++;
  3742. //机械手wafer放过去就放满了
  3743. if (i >= waferTypeSlots.Count)
  3744. {
  3745. break;
  3746. }
  3747. //针对P wafer不够的情况
  3748. if (!ret.Item1 && waferTypeSlots[i].Item1 == WaferType.P)
  3749. continue;
  3750. waferType = waferTypeSlots[i].Item1;
  3751. break;
  3752. }
  3753. }
  3754. return waferType;
  3755. }
  3756. private ModuleName GetCurrentTransferFims()
  3757. {
  3758. ModuleName currentFims = ModuleName.System;
  3759. foreach (var st in _lstFIMSs)
  3760. {
  3761. if (!st.IsAvailable)
  3762. continue;
  3763. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  3764. continue;
  3765. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  3766. if (carrier != null && !carrier.IsEmpty)
  3767. {
  3768. bool hasWafer = false;
  3769. var wafers = WaferManager.Instance.GetWafers(st.Module);
  3770. if (wafers != null)
  3771. {
  3772. foreach (var wafer in wafers)
  3773. {
  3774. if (wafer == null || wafer.IsEmpty)
  3775. continue;
  3776. if (!wafer.IsEmpty)
  3777. {
  3778. hasWafer = true;
  3779. break;
  3780. }
  3781. }
  3782. }
  3783. if (hasWafer && CheckCarrierHasWaferInPM(carrier.InternalModuleName))
  3784. {
  3785. currentFims = st.Module;
  3786. break;
  3787. };
  3788. }
  3789. }
  3790. return currentFims;
  3791. }
  3792. private List<int> GetWaferSlots(out WaferType waferType)
  3793. {
  3794. var waferTypeSlots = GetWaferTypeSlots();
  3795. waferType = WaferType.None;
  3796. var slots = new List<int>();
  3797. if (waferTypeSlots != null)
  3798. {
  3799. List<Tuple<ModuleName, WaferType, int>> fimsWaferInforLst = new List<Tuple<ModuleName, WaferType, int>>();
  3800. foreach (var st in _lstFIMSs)
  3801. {
  3802. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  3803. continue;
  3804. var fimsWafers = WaferManager.Instance.GetWafers(st.Module);
  3805. int waferCountFIMS = 0;
  3806. WaferType waferTypeFIMS = WaferType.None;
  3807. if (fimsWafers != null)
  3808. {
  3809. foreach (var fimsWafer in fimsWafers)
  3810. {
  3811. if (!fimsWafer.IsEmpty)
  3812. {
  3813. waferTypeFIMS = fimsWafer.WaferType;
  3814. if (fimsWafer.WaferType == WaferType.P || fimsWafer.WaferType == WaferType.M1 || fimsWafer.WaferType == WaferType.M2)
  3815. {
  3816. waferCountFIMS++;
  3817. }
  3818. else if (fimsWafer.WaferType == WaferType.SD && _sideDummyWafers.ContainsKey(fimsWafer.InnerId.ToString()))
  3819. {
  3820. waferCountFIMS++;
  3821. }
  3822. else if (fimsWafer.WaferType == WaferType.ED && _extraDummyWafers.ContainsKey(fimsWafer.InnerId.ToString()))
  3823. {
  3824. waferCountFIMS++;
  3825. }
  3826. }
  3827. }
  3828. }
  3829. if (waferCountFIMS > 0)
  3830. fimsWaferInforLst.Add(Tuple.Create(st.Module, waferTypeFIMS, waferCountFIMS));
  3831. }
  3832. //两个FIMS都有Carrier,直接返回
  3833. if (_lstFIMSs.Count == fimsWaferInforLst.Count)
  3834. return slots;
  3835. //FIMS有空的,才继续
  3836. int startIndex = 0;
  3837. for (int i = 0; i < waferTypeSlots.Count; i++)
  3838. {
  3839. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3840. {
  3841. continue;
  3842. }
  3843. var wafer0 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0);
  3844. var wafer1 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1);
  3845. if (i < waferTypeSlots.Count && wafer0 != null && !wafer0.IsEmpty && wafer0.WaferType == waferTypeSlots[i].Item1)
  3846. i++;
  3847. if (i >= waferTypeSlots.Count)
  3848. break;
  3849. if (i < waferTypeSlots.Count && wafer1 != null && !wafer1.IsEmpty && wafer1.WaferType == waferTypeSlots[i].Item1)
  3850. i++;
  3851. if (i >= waferTypeSlots.Count)
  3852. break;
  3853. if (fimsWaferInforLst.Count > 0)
  3854. {
  3855. var fimsWaferInfor = fimsWaferInforLst.FirstOrDefault(x => x.Item2 == waferTypeSlots[i].Item1);
  3856. if (fimsWaferInfor != null)
  3857. {
  3858. for (; i < waferTypeSlots.Count;)
  3859. {
  3860. if (i >= waferTypeSlots.Count)
  3861. break;
  3862. if (waferTypeSlots[i].Item1 == fimsWaferInfor.Item2)
  3863. i++;
  3864. else
  3865. break;
  3866. }
  3867. }
  3868. }
  3869. if (i >= waferTypeSlots.Count)
  3870. {
  3871. i = waferTypeSlots.Count - 1;
  3872. }
  3873. startIndex = i;
  3874. waferType = waferTypeSlots[i].Item1;
  3875. break;
  3876. }
  3877. for (int i = startIndex; i < waferTypeSlots.Count; i++)
  3878. {
  3879. if (waferTypeSlots[i].Item1 != waferType)
  3880. {
  3881. break;
  3882. }
  3883. slots.Add(waferTypeSlots[i].Item2);
  3884. }
  3885. }
  3886. return slots;
  3887. }
  3888. private List<int> GetWaferSlots(WaferType waferType)
  3889. {
  3890. var slots = new List<int>();
  3891. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3892. if (pj == null)
  3893. return null;
  3894. if (!RecipeParser.LayoutRecipeParse(pj.LayoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out string reason))
  3895. {
  3896. //Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load layout recipe {pj.LayoutRecipe} failed, {reason}");
  3897. return null;
  3898. }
  3899. switch (waferType)
  3900. {
  3901. case WaferType.SD:
  3902. return pj.SideDummySlots;
  3903. case WaferType.ED:
  3904. return pj.ExtraDummySlots;
  3905. case WaferType.M1:
  3906. return pj.Monitor1Slots;
  3907. case WaferType.M2:
  3908. return pj.Monitor2Slots;
  3909. case WaferType.P:
  3910. return pj.ProductSlots;
  3911. }
  3912. return null;
  3913. }
  3914. private List<int> GetWaferSlots(RecipeLayoutEntityExpert layoutRecipeDataExpert, WaferType waferType)
  3915. {
  3916. var slots = new List<int>();
  3917. if (layoutRecipeDataExpert == null)
  3918. return null;
  3919. var type = "";
  3920. switch (waferType)
  3921. {
  3922. case WaferType.SD:
  3923. type = "sd";
  3924. break;
  3925. case WaferType.ED:
  3926. type = "fd";
  3927. break;
  3928. case WaferType.M1:
  3929. type = "m1";
  3930. break;
  3931. case WaferType.M2:
  3932. type = "m2";
  3933. break;
  3934. case WaferType.P:
  3935. type = "pd";
  3936. break;
  3937. }
  3938. if (layoutRecipeDataExpert != null)
  3939. {
  3940. for (int i = 0; i < layoutRecipeDataExpert.Items.Count; i++)
  3941. {
  3942. if (layoutRecipeDataExpert.Items[i].ToLower() == type)
  3943. {
  3944. slots.Add(i);
  3945. }
  3946. }
  3947. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3948. {
  3949. slots.Sort((x, y) => -x.CompareTo(y));//降序
  3950. }
  3951. else
  3952. {
  3953. slots.Sort((x, y) => x.CompareTo(y));//升序
  3954. }
  3955. }
  3956. return slots;
  3957. }
  3958. #region charge rule
  3959. private bool CheckChargeRule(ProcessJobInfo pj, out bool waferShort, bool needCheckPWafer, bool needCheckMWafer, out string reason)
  3960. {
  3961. waferShort = false;
  3962. //needCheckPWafer = false;
  3963. reason = string.Empty;
  3964. if (!RecipeParser.LayoutRecipeParse(pj.LayoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  3965. {
  3966. //Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load layout recipe {pj.LayoutRecipe} failed, {reason}");
  3967. return false;
  3968. }
  3969. if (!CheckLayoutParameter(layoutRecipeDataNormal, out reason))
  3970. {
  3971. return false;
  3972. }
  3973. int iCassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  3974. if (iCassetteSlotCount == 0)
  3975. {
  3976. reason = "System.CassetteSlotCount not valid";
  3977. return false;
  3978. }
  3979. int iSlotCount = SC.GetValue<int>($"Boat.SlotCount");
  3980. var productSlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.P);
  3981. var monitor1Slots = GetWaferSlots(layoutRecipeDataExpert, WaferType.M1);
  3982. var monitor2Slots = GetWaferSlots(layoutRecipeDataExpert, WaferType.M2);
  3983. var sideDummySlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.SD);
  3984. var extraDummySlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.ED);
  3985. int iNeedCassetteNum;
  3986. var temp = (float)productSlots.Count / iCassetteSlotCount;
  3987. iNeedCassetteNum = (int)Math.Ceiling(temp);
  3988. int iCurrentCassetteNum = GetCurrentCassetteNum(pj, WaferType.P);
  3989. int iDummyUpper = int.Parse(layoutRecipeDataNormal.DummyUpperSlot);
  3990. int iDummyLower = int.Parse(layoutRecipeDataNormal.DummyLowerSlot);
  3991. int iNeedPWaferNum = productSlots.Count;
  3992. int iNeedM1WaferNum = monitor1Slots.Count;
  3993. int iNeedM2WaferNum = monitor2Slots.Count;
  3994. int iNeedSDWaferNum = sideDummySlots.Count;
  3995. int iNeedEDWaferNum = extraDummySlots.Count;
  3996. int iCurrentPWaferNum = GetCurrentWaferNum(pj, WaferType.P, out bool pSlotSelect);
  3997. int iCurrentSDWaferNum = GetCurrentDummyWaferNum(WaferType.SD);
  3998. int iCurrentM1WaferNum = GetCurrentWaferNum(pj, WaferType.M1, out bool m1SlotSelect);
  3999. int iCurrentM2WaferNum = GetCurrentWaferNum(pj, WaferType.M2, out bool m2SlotSelect);
  4000. int iCurrentEDWaferNum = GetCurrentDummyWaferNum(WaferType.ED);
  4001. //if (iNeedMWaferNum > iCurrentMWaferNum)
  4002. //{
  4003. // reason = "monitor wafer are short.";
  4004. // return false;
  4005. //}
  4006. //if (iNeedSDWaferNum > iCurrentSDWaferNum)
  4007. //{
  4008. // reason = "dummy wafer are short.";
  4009. // return false;
  4010. //}
  4011. //if (iNeedEDWaferNum > iCurrentEDWaferNum)
  4012. //{
  4013. // reason = "extra dummy wafer are short.";
  4014. // return false;
  4015. //}
  4016. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4017. {
  4018. sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4019. extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4020. monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4021. monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4022. productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  4023. }
  4024. else
  4025. {
  4026. sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4027. extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4028. monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  4029. monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  4030. productSlots.Sort((x, y) => x.CompareTo(y));//升序
  4031. }
  4032. pj.SideDummySlots = sideDummySlots;
  4033. pj.ExtraDummySlots = extraDummySlots;
  4034. pj.Monitor1Slots = monitor1Slots;
  4035. pj.Monitor2Slots = monitor2Slots;
  4036. pj.ProductSlots = productSlots;
  4037. bool bM1Short = false;
  4038. bool bM2Short = false;
  4039. if (needCheckMWafer)
  4040. {
  4041. bM1Short = GetRemainWaferNum(pj, WaferType.M1) < 0 && monitor1Slots.Count > 0;
  4042. bM2Short = GetRemainWaferNum(pj, WaferType.M2) < 0 && monitor2Slots.Count > 0;
  4043. if (monitor1Slots.Count > 0 && m1SlotSelect && iCurrentM1WaferNum != monitor1Slots.Count)
  4044. {
  4045. reason = $"layout recipe M1 wafer number={iCurrentM1WaferNum}, current M1 wafer number={monitor1Slots.Count}, not match";
  4046. return false;
  4047. }
  4048. if (monitor2Slots.Count > 0 && m2SlotSelect && iCurrentM2WaferNum != monitor2Slots.Count)
  4049. {
  4050. reason = $"layout recipe M2 wafer number={iCurrentM2WaferNum}, current M2 wafer number={monitor2Slots.Count}, not match";
  4051. return false;
  4052. }
  4053. if (bM1Short)
  4054. {
  4055. reason = "M1 wafer are short";
  4056. return false;
  4057. }
  4058. if (bM2Short)
  4059. {
  4060. reason = "M2 wafer are short";
  4061. return false;
  4062. }
  4063. }
  4064. if (!needCheckPWafer)
  4065. return true;
  4066. if (iNeedPWaferNum > iCurrentPWaferNum)
  4067. {
  4068. reason = "layout recipe production wafer number greater than current production wafer number";
  4069. return false;
  4070. }
  4071. if (pSlotSelect && iNeedPWaferNum != iCurrentPWaferNum)
  4072. {
  4073. reason = $"layout recipe production wafer number={iNeedPWaferNum}, current production wafer number={iCurrentPWaferNum}, not match";
  4074. return false;
  4075. }
  4076. //下面charge rule暂时不判断
  4077. return true;
  4078. //if (layoutRecipeDataNormal.ProductPosition.ToLower() == "slot")
  4079. //{
  4080. // if (iNeedPWaferNum <= iCurrentPWaferNum)
  4081. // {
  4082. // return true;
  4083. // }
  4084. // else
  4085. // {
  4086. // reason = "production wafer insufficiency productPos set to slot";
  4087. // return false;
  4088. // }
  4089. //}
  4090. string strWhenCassetteAreShort = layoutRecipeDataNormal.WhenCassetteInBatchAreShort;
  4091. string strWhenPWaferShort = layoutRecipeDataNormal.WhenPWaferShort;
  4092. string strWhenWaferInCassetteAreShort = layoutRecipeDataNormal.WhenWaferInCassetteAreShort;
  4093. string strWhenEDAreShort = layoutRecipeDataNormal.WhenEDAreShort;
  4094. bool bSDMove = layoutRecipeDataNormal.SDRule == "Move";
  4095. bool bBoatSupplyED = layoutRecipeDataNormal.RuleOfSpaceInBoat == "SupplyED" && !bSDMove;
  4096. bool bEDShort = false;
  4097. List<string> adjustedSlot = new List<string>();
  4098. for (int i = 0; i < layoutRecipeDataExpert.Items.Count; i++)
  4099. {
  4100. adjustedSlot.Add(layoutRecipeDataExpert.Items[i]);
  4101. }
  4102. bool bCassetteSuppleED;
  4103. bool bWaferSuppleED;
  4104. if (iNeedPWaferNum > iCurrentPWaferNum)
  4105. {
  4106. // 先判断cassette是否充足,然后再判断P wafers是否充足
  4107. if (iNeedCassetteNum > iCurrentCassetteNum)
  4108. {
  4109. if (strWhenCassetteAreShort != "LeaveAs" && strWhenCassetteAreShort != "SupplyED")
  4110. {
  4111. reason = "cassette in batch are short";
  4112. return true;
  4113. }
  4114. else
  4115. {
  4116. bCassetteSuppleED = strWhenCassetteAreShort == "SupplyED";
  4117. // 重新计算需要的P wafers
  4118. iNeedPWaferNum = iNeedPWaferNum - (iNeedCassetteNum - iCurrentCassetteNum) * iCassetteSlotCount;
  4119. // 判断P wafers是否充足
  4120. if (iNeedPWaferNum > iCurrentPWaferNum)
  4121. { // 只有在when P wafer short == leave as 的时候 when wafer in cassette are short 才执行判断
  4122. if (strWhenPWaferShort == "LeaveAs")
  4123. {
  4124. if (strWhenWaferInCassetteAreShort != "LeaveAs" && strWhenWaferInCassetteAreShort != "SupplyED")
  4125. {
  4126. reason = "wafer in cassette are short";
  4127. return true;
  4128. }
  4129. else
  4130. {
  4131. bWaferSuppleED = strWhenWaferInCassetteAreShort == "SupplyED";
  4132. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4133. }
  4134. }
  4135. else
  4136. {
  4137. bEDShort = CassetteShortPWaferShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, iCurrentPWaferNum, bCassetteSuppleED);
  4138. }
  4139. }
  4140. else
  4141. {
  4142. bWaferSuppleED = false;
  4143. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4144. }
  4145. }
  4146. }
  4147. else
  4148. { // 只有在when P wafer short == leave as 的时候 when wafer in cassette are short 才执行判断
  4149. if (strWhenPWaferShort == "LeaveAs")
  4150. {
  4151. if (strWhenWaferInCassetteAreShort == "LeaveAs")
  4152. {
  4153. }
  4154. else if (strWhenWaferInCassetteAreShort == "SupplyED")
  4155. {
  4156. bCassetteSuppleED = false;
  4157. bWaferSuppleED = true;
  4158. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4159. }
  4160. else
  4161. {
  4162. reason = "wafer in cassette are short";
  4163. return true;
  4164. }
  4165. }
  4166. else
  4167. {
  4168. bWaferSuppleED = false;
  4169. bEDShort = CassetteShortPWaferShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, iCurrentPWaferNum, bWaferSuppleED);
  4170. }
  4171. }
  4172. }
  4173. if (bSDMove)
  4174. {
  4175. for (int i = iDummyUpper; i < iSlotCount - iDummyLower; i++)
  4176. {
  4177. if (adjustedSlot[i] != "")
  4178. {
  4179. for (int j = 0; j < iDummyUpper; j++)
  4180. {
  4181. adjustedSlot[i - j - 1] = "dummy";
  4182. }
  4183. break;
  4184. }
  4185. }
  4186. for (int i = iSlotCount - iDummyLower - 1; i > iDummyUpper; i--)
  4187. {
  4188. if (adjustedSlot[i] != "")
  4189. {
  4190. for (int j = 0; j < iDummyLower; j++)
  4191. {
  4192. adjustedSlot[i + j + 1] = "dummy";
  4193. }
  4194. break;
  4195. }
  4196. }
  4197. }
  4198. else
  4199. {
  4200. if (bBoatSupplyED)
  4201. {
  4202. for (int i = iDummyUpper; i < iSlotCount - iDummyLower; i++)
  4203. {
  4204. if (iCurrentEDWaferNum > 0)
  4205. {
  4206. if (adjustedSlot[i] == "")
  4207. {
  4208. adjustedSlot[i] = "extradummy";
  4209. iCurrentEDWaferNum--;
  4210. }
  4211. }
  4212. else
  4213. {
  4214. bEDShort = true;
  4215. break;
  4216. }
  4217. }
  4218. }
  4219. for (int i = 0; i < iDummyUpper; i++)
  4220. {
  4221. adjustedSlot[i] = "dummy";
  4222. }
  4223. for (int i = iSlotCount - iDummyLower; i < iSlotCount; i++)
  4224. {
  4225. adjustedSlot[i] = "dummy";
  4226. }
  4227. }
  4228. if (bEDShort)
  4229. {
  4230. switch (strWhenEDAreShort)
  4231. {
  4232. case "WarningAndContinue":
  4233. case "AbortWhenError":
  4234. reason = "extradummy wafer are short";
  4235. break;
  4236. case "LeaveAs":
  4237. bEDShort = false;
  4238. break;
  4239. }
  4240. }
  4241. sideDummySlots.Clear();
  4242. extraDummySlots.Clear();
  4243. monitor1Slots.Clear();
  4244. monitor2Slots.Clear();
  4245. productSlots.Clear();
  4246. for (int i = 0; i < adjustedSlot.Count; i++)
  4247. {
  4248. if (adjustedSlot[i].ToLower() == "dummy" && iCurrentSDWaferNum > 0)
  4249. {
  4250. sideDummySlots.Add(i);
  4251. iCurrentSDWaferNum--;
  4252. }
  4253. if (adjustedSlot[i].ToLower() == "extradummy")
  4254. {
  4255. extraDummySlots.Add(i);
  4256. }
  4257. if (adjustedSlot[i].ToLower() == "monitor1" && iCurrentM1WaferNum > 0)
  4258. {
  4259. monitor1Slots.Add(i);
  4260. iCurrentM1WaferNum--;
  4261. }
  4262. if (adjustedSlot[i].ToLower() == "monitor2" && iCurrentM2WaferNum > 0)
  4263. {
  4264. monitor2Slots.Add(i);
  4265. iCurrentM2WaferNum--;
  4266. }
  4267. if (adjustedSlot[i].ToLower() == "pd")
  4268. {
  4269. productSlots.Add(i);
  4270. }
  4271. }
  4272. bM1Short = (GetCurrentWaferNum(pj, WaferType.M1, out m1SlotSelect) < monitor1Slots.Count) || monitor1Slots.Count == 0;
  4273. bM2Short = (GetCurrentWaferNum(pj, WaferType.M2, out m2SlotSelect) < monitor2Slots.Count) || monitor2Slots.Count == 0;
  4274. bool bSDShort = (GetCurrentWaferNum(pj, WaferType.SD, out bool sdSlotSelect) < sideDummySlots.Count) || sideDummySlots.Count == 0;
  4275. if (SC.GetValue<bool>("System.IsLeaveAsAllWaferWhenWaferShort"))
  4276. bEDShort = bM1Short = bM2Short = bSDShort = false;
  4277. waferShort = bEDShort || bM1Short || bM2Short || bSDShort;
  4278. if (bM1Short || bM2Short)
  4279. {
  4280. if (reason == string.Empty)
  4281. {
  4282. if (bSDShort)
  4283. {
  4284. reason = "dummy wafer and monitor wafer are short";
  4285. }
  4286. else
  4287. {
  4288. reason = "monitor wafer are short";
  4289. }
  4290. }
  4291. else
  4292. {
  4293. if (bSDShort)
  4294. {
  4295. reason = "extradummy wafer,monitor wafer and dummy wafer are short";
  4296. }
  4297. else
  4298. {
  4299. reason = "extradummy wafer and dummy wafer are short";
  4300. }
  4301. }
  4302. }
  4303. else
  4304. {
  4305. if (reason == string.Empty)
  4306. {
  4307. if (bSDShort)
  4308. {
  4309. reason = "dummy wafer are short";
  4310. }
  4311. }
  4312. else
  4313. {
  4314. if (bSDShort)
  4315. {
  4316. reason = "extradummy wafer and dummy wafer are short";
  4317. }
  4318. }
  4319. }
  4320. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4321. {
  4322. sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4323. extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4324. monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4325. monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4326. productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  4327. }
  4328. else
  4329. {
  4330. sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4331. extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4332. monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  4333. monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  4334. productSlots.Sort((x, y) => x.CompareTo(y));//升序
  4335. }
  4336. pj.SideDummySlots = sideDummySlots;
  4337. pj.ExtraDummySlots = extraDummySlots;
  4338. pj.Monitor1Slots = monitor1Slots;
  4339. pj.Monitor2Slots = monitor2Slots;
  4340. pj.ProductSlots = productSlots;
  4341. return true;
  4342. }
  4343. private bool CheckLayoutParameter(RecipeLayoutEntityNormal layoutRecipeDataNormal, out string reason)
  4344. {
  4345. reason = string.Empty;
  4346. if (string.IsNullOrEmpty(layoutRecipeDataNormal.DummyUpperSlot))
  4347. {
  4348. reason = "DummyUpper is null";
  4349. return false;
  4350. }
  4351. if (string.IsNullOrEmpty(layoutRecipeDataNormal.DummyLowerSlot))
  4352. {
  4353. reason = "DummyLower is null";
  4354. return false;
  4355. }
  4356. if (string.IsNullOrEmpty(layoutRecipeDataNormal.CenteringSlotPosition))
  4357. {
  4358. reason = "CenteringSlotPosition is null";
  4359. return false;
  4360. }
  4361. //if (string.IsNullOrEmpty(layoutRecipeDataNormal.Pitch))
  4362. //{
  4363. // reason = "Pitch is null";
  4364. // return false;
  4365. //}
  4366. if (string.IsNullOrEmpty(layoutRecipeDataNormal.ProductPosition))
  4367. {
  4368. reason = "ProductPosition is null";
  4369. return false;
  4370. }
  4371. if (string.IsNullOrEmpty(layoutRecipeDataNormal.MonitorPosition))
  4372. {
  4373. reason = "MonitorPosition is null";
  4374. return false;
  4375. }
  4376. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenCassetteInBatchAreShort))
  4377. {
  4378. reason = "WhenCassetteInBatchAreShort is null";
  4379. return false;
  4380. }
  4381. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenPWaferShort))
  4382. {
  4383. reason = "WhenPWaferShort is null";
  4384. return false;
  4385. }
  4386. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenWaferInCassetteAreShort))
  4387. {
  4388. reason = "WhenWaferInCassetteAreShort is null";
  4389. return false;
  4390. }
  4391. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenEDAreShort))
  4392. {
  4393. reason = "WhenEDAreShort is null";
  4394. return false;
  4395. }
  4396. if (string.IsNullOrEmpty(layoutRecipeDataNormal.SDRule))
  4397. {
  4398. reason = "SDRule is null";
  4399. return false;
  4400. }
  4401. if (string.IsNullOrEmpty(layoutRecipeDataNormal.RuleOfSpaceInBoat))
  4402. {
  4403. reason = "RuleOfSpaceInBoat is null";
  4404. return false;
  4405. }
  4406. return true;
  4407. }
  4408. private int GetCurrentCassetteNum(ProcessJobInfo pj, WaferType targetWaferType)
  4409. {
  4410. int iCassetteNum = 0;
  4411. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4412. foreach (var target in _lstTotlaStockers)
  4413. {
  4414. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()))
  4415. continue;
  4416. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4417. if (!carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  4418. iCassetteNum++;
  4419. }
  4420. return iCassetteNum;
  4421. }
  4422. private int GetRemainWaferNum(ProcessJobInfo pj, WaferType targetWaferType)
  4423. {
  4424. int iWaferNum = 0;
  4425. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4426. foreach (var target in _lstTotlaStockers)
  4427. {
  4428. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4429. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4430. continue;
  4431. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4432. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()) || stockerInfo == null)
  4433. continue;
  4434. var wafers = WaferManager.Instance.GetWafers(target.Module);
  4435. foreach (var wafer in wafers)
  4436. {
  4437. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4438. iWaferNum++;
  4439. }
  4440. }
  4441. if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0))
  4442. {
  4443. var carrier = CarrierManager.Instance.GetCarrier(_carrierRobot.Module);
  4444. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4445. if (carrier.CarrierType == targetCarrierType && pj != null && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()) && stockerInfo != null)
  4446. {
  4447. var wafers = WaferManager.Instance.GetWafers(_carrierRobot.Module);
  4448. foreach (var wafer in wafers)
  4449. {
  4450. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4451. iWaferNum++;
  4452. }
  4453. }
  4454. }
  4455. foreach (var fims in _lstFIMSs)
  4456. {
  4457. if (!fims.IsOnline)
  4458. continue;
  4459. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  4460. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4461. if (carrier.CarrierType == targetCarrierType && pj != null && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()) && stockerInfo != null)
  4462. {
  4463. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  4464. foreach (var wafer in wafers)
  4465. {
  4466. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4467. iWaferNum++;
  4468. }
  4469. }
  4470. }
  4471. {
  4472. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  4473. foreach (var wafer in wafers)
  4474. {
  4475. if (wafer == null || wafer.IsEmpty || wafer.WaferType != targetWaferType)
  4476. continue;
  4477. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString());
  4478. if (stockerInfo != null && pj != null && pj.Stockers.Any(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString()) && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4479. iWaferNum++;
  4480. }
  4481. }
  4482. var useCount = 0;
  4483. if (targetWaferType == WaferType.M1)
  4484. useCount = pj.Monitor1Slots.Count;
  4485. if (targetWaferType == WaferType.M2)
  4486. useCount = pj.Monitor2Slots.Count;
  4487. return iWaferNum - useCount;
  4488. }
  4489. private int GetCurrentWaferNum(ProcessJobInfo pj, WaferType targetWaferType, out bool isSlotSelect)
  4490. {
  4491. int iWaferNum = 0;
  4492. isSlotSelect = false;
  4493. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4494. foreach (var target in _lstTotlaStockers)
  4495. {
  4496. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4497. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4498. continue;
  4499. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()))
  4500. continue;
  4501. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == target.Module.ToString());
  4502. var wafers = WaferManager.Instance.GetWafers(target.Module);
  4503. foreach (var wafer in wafers)
  4504. {
  4505. if (!stockerInfo.Item3.Any() && !wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4506. iWaferNum++;
  4507. if (stockerInfo.Item3.Any(x => x == wafer.OriginSlot) && !wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4508. {
  4509. iWaferNum++;
  4510. isSlotSelect = true;
  4511. }
  4512. }
  4513. }
  4514. return iWaferNum;
  4515. }
  4516. private int GetCurrentDummyWaferNum(WaferType targetWaferType)
  4517. {
  4518. int iWaferNum = 0;
  4519. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4520. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  4521. {
  4522. if (module == ModuleName.SMIFA || module == ModuleName.SMIFB || module == ModuleName.Boat)
  4523. continue;
  4524. if (ModuleHelper.IsStocker(module))
  4525. {
  4526. var carrier = CarrierManager.Instance.GetCarrier(module);
  4527. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4528. continue;
  4529. }
  4530. var wafers = WaferManager.Instance.GetWafers(module);
  4531. if (wafers == null)
  4532. continue;
  4533. foreach (var wafer in wafers)
  4534. {
  4535. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4536. iWaferNum++;
  4537. }
  4538. }
  4539. return iWaferNum;
  4540. }
  4541. private bool CassetteShortWaferInCassetteShort(ProcessJobInfo pj, ref List<string> adjustslot, ref int currentEDNum, RecipeLayoutEntityNormal layoutRecipeDataNormal, RecipeLayoutEntityExpert layoutRecipeDataExpert, bool cassetteSupplyED, bool waferSupplyED)
  4542. {
  4543. bool bEDShort = false;
  4544. bool monitorSlot = layoutRecipeDataNormal.MonitorPosition.ToLower() == "slot";
  4545. int slotCount = SC.GetValue<int>($"Boat.SlotCount");
  4546. int cassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  4547. adjustslot = new List<string>();
  4548. for (int i = 0; i < slotCount; i++)
  4549. {
  4550. adjustslot.Add("");
  4551. }
  4552. if (monitorSlot)
  4553. {
  4554. for (int i = 0; i < slotCount; i++)
  4555. {
  4556. if (layoutRecipeDataExpert.Items[i].ToLower() == "monitor")
  4557. adjustslot[i] = "monitor";
  4558. }
  4559. }
  4560. List<SchedulerStocker> tempStockers = new List<SchedulerStocker>();
  4561. foreach (var p in pj.Stockers)
  4562. {
  4563. var module = GetModule(p.Item1) as SchedulerStocker;
  4564. var carrier = CarrierManager.Instance.GetCarrier(module.Module);
  4565. if (!carrier.IsEmpty && carrier.CarrierType.ToString() == "P")
  4566. tempStockers.Add(module);
  4567. }
  4568. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4569. tempStockers.Reverse();
  4570. int.TryParse(layoutRecipeDataNormal.DummyUpperSlot, out int dummyUpper);
  4571. int.TryParse(layoutRecipeDataNormal.DummyLowerSlot, out int dummyLower);
  4572. int.TryParse(layoutRecipeDataNormal.CenteringSlotPosition, out int centeringSlotPos);
  4573. int centeringSlotPosLower;
  4574. int centeringSlotPosUpper;
  4575. if (tempStockers.Count % 2 == 0)
  4576. {
  4577. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4578. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4579. }
  4580. else
  4581. {
  4582. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount / 2) + 1 + (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4583. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount / 2) - 1 - (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4584. }
  4585. if (centeringSlotPosLower >= slotCount - dummyLower)
  4586. {
  4587. int iIndex = slotCount - dummyLower - 1;
  4588. if (!monitorSlot)
  4589. {
  4590. adjustslot[iIndex] = "monitor";
  4591. iIndex--;
  4592. }
  4593. foreach (var stocker in tempStockers)
  4594. {
  4595. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4596. if (wafers == null)
  4597. continue;
  4598. foreach (var wafer in wafers)
  4599. {
  4600. if (!wafer.IsEmpty)
  4601. {
  4602. for (int i = iIndex; i >= dummyUpper; i--)
  4603. {
  4604. if (adjustslot[i] == "")
  4605. {
  4606. adjustslot[i] = "production";
  4607. iIndex = i - 1;
  4608. break;
  4609. }
  4610. }
  4611. }
  4612. else
  4613. {
  4614. if (waferSupplyED)
  4615. {
  4616. if (currentEDNum > 0)
  4617. {
  4618. for (int i = iIndex; i >= dummyUpper; i--)
  4619. {
  4620. if (adjustslot[i] == "")
  4621. {
  4622. adjustslot[i] = "extradummy";
  4623. currentEDNum--;
  4624. iIndex = i - 1;
  4625. break;
  4626. }
  4627. }
  4628. }
  4629. else
  4630. {
  4631. bEDShort = true;
  4632. }
  4633. }
  4634. }
  4635. }
  4636. if (!monitorSlot)
  4637. {
  4638. adjustslot[iIndex] = "monitor";
  4639. iIndex--;
  4640. }
  4641. }
  4642. if (cassetteSupplyED && currentEDNum > 0)
  4643. {
  4644. for (int i = iIndex; i >= dummyUpper; i--)
  4645. {
  4646. if (currentEDNum > 0)
  4647. {
  4648. if (adjustslot[i] == "")
  4649. {
  4650. adjustslot[i] = "extradummy";
  4651. currentEDNum--;
  4652. }
  4653. }
  4654. else
  4655. {
  4656. bEDShort = true;
  4657. break;
  4658. }
  4659. }
  4660. }
  4661. }
  4662. else if (centeringSlotPosUpper <= dummyUpper + 1)
  4663. {
  4664. int iIndex = dummyUpper;
  4665. if (!monitorSlot)
  4666. {
  4667. adjustslot[iIndex] = "monitor";
  4668. iIndex++;
  4669. }
  4670. foreach (var stocker in tempStockers)
  4671. {
  4672. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4673. if (wafers == null)
  4674. continue;
  4675. foreach (var wafer in wafers)
  4676. {
  4677. if (!wafer.IsEmpty)
  4678. {
  4679. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4680. {
  4681. if (adjustslot[i] == "")
  4682. {
  4683. adjustslot[i] = "production";
  4684. iIndex = i + 1;
  4685. break;
  4686. }
  4687. }
  4688. }
  4689. else
  4690. {
  4691. if (waferSupplyED)
  4692. {
  4693. if (currentEDNum > 0)
  4694. {
  4695. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4696. {
  4697. if (adjustslot[i] == "")
  4698. {
  4699. adjustslot[i] = "extradummy";
  4700. currentEDNum--;
  4701. iIndex = i + 1;
  4702. break;
  4703. }
  4704. }
  4705. }
  4706. else
  4707. {
  4708. bEDShort = true;
  4709. }
  4710. }
  4711. }
  4712. }
  4713. if (!monitorSlot)
  4714. {
  4715. adjustslot[iIndex] = "monitor";
  4716. iIndex++;
  4717. }
  4718. }
  4719. if (cassetteSupplyED && currentEDNum > 0)
  4720. {
  4721. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4722. {
  4723. if (currentEDNum > 0)
  4724. {
  4725. if (adjustslot[i] == "")
  4726. {
  4727. adjustslot[i] = "extradummy";
  4728. currentEDNum--;
  4729. }
  4730. }
  4731. else
  4732. {
  4733. bEDShort = true;
  4734. break;
  4735. }
  4736. }
  4737. }
  4738. }
  4739. else
  4740. {
  4741. int iCount = 0;
  4742. int iUpperIndex = centeringSlotPos - 1;
  4743. int iLowerIndex = centeringSlotPos - 1;
  4744. int iUpperCount = 0;
  4745. int iLowerCount = 0;
  4746. bool bCassetteEvenNumber = tempStockers.Count % 2 == 0;
  4747. if (bCassetteEvenNumber && !monitorSlot)
  4748. {
  4749. adjustslot[centeringSlotPos - 1] = "monitor";
  4750. iUpperIndex--;
  4751. iLowerIndex++;
  4752. iCount++;
  4753. }
  4754. foreach (var stocker in tempStockers)
  4755. {
  4756. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4757. if (wafers == null)
  4758. continue;
  4759. foreach (var wafer in wafers)
  4760. {
  4761. if (bCassetteEvenNumber)
  4762. {
  4763. if (!monitorSlot && iUpperCount >= cassetteSlotCount && iUpperIndex >= dummyUpper)
  4764. {
  4765. adjustslot[iUpperIndex] = "monitor";
  4766. iUpperIndex--;
  4767. iUpperCount = 0;
  4768. }
  4769. if (!monitorSlot && iLowerCount >= cassetteSlotCount && iLowerIndex < slotCount - dummyLower)
  4770. {
  4771. adjustslot[iLowerIndex] = "monitor";
  4772. iLowerIndex++;
  4773. iLowerCount = 0;
  4774. }
  4775. }
  4776. else
  4777. {
  4778. if (!monitorSlot && iUpperCount + iLowerCount >= cassetteSlotCount && iUpperIndex >= dummyUpper && iLowerIndex < slotCount - dummyLower)
  4779. {
  4780. adjustslot[iUpperIndex] = "monitor";
  4781. iUpperIndex--;
  4782. iUpperCount = 0;
  4783. adjustslot[iLowerIndex] = "monitor";
  4784. iLowerIndex++;
  4785. iLowerCount = 0;
  4786. bCassetteEvenNumber = true;
  4787. }
  4788. }
  4789. if (iCount % 2 == 0)
  4790. {
  4791. if (!wafer.IsEmpty)
  4792. {
  4793. for (int i = iUpperIndex; i >= dummyUpper; i--)
  4794. {
  4795. if (adjustslot[i] == "")
  4796. {
  4797. adjustslot[i] = "production";
  4798. iUpperIndex = i - 1;
  4799. iUpperCount++;
  4800. iCount++;
  4801. break;
  4802. }
  4803. }
  4804. }
  4805. else
  4806. {
  4807. if (waferSupplyED)
  4808. {
  4809. if (currentEDNum > 0)
  4810. {
  4811. for (int i = iUpperIndex; i >= dummyUpper; i--)
  4812. {
  4813. if (adjustslot[i] == "")
  4814. {
  4815. adjustslot[i] = "extradummy";
  4816. currentEDNum--;
  4817. iUpperIndex = i - 1;
  4818. iUpperCount++;
  4819. iCount++;
  4820. break;
  4821. }
  4822. }
  4823. }
  4824. else
  4825. {
  4826. bEDShort = true;
  4827. }
  4828. }
  4829. }
  4830. }
  4831. else
  4832. {
  4833. if (!wafer.IsEmpty)
  4834. {
  4835. for (int i = iLowerIndex; i < slotCount - dummyLower; i++)
  4836. {
  4837. if (adjustslot[i] == "")
  4838. {
  4839. adjustslot[i] = "production";
  4840. iLowerIndex = i + 1;
  4841. iLowerCount++;
  4842. iCount++;
  4843. break;
  4844. }
  4845. }
  4846. }
  4847. else
  4848. {
  4849. if (waferSupplyED)
  4850. {
  4851. if (currentEDNum > 0)
  4852. {
  4853. for (int i = iLowerIndex; i < slotCount - dummyLower; i++)
  4854. {
  4855. if (adjustslot[i] == "")
  4856. {
  4857. adjustslot[i] = "extradummy";
  4858. currentEDNum--;
  4859. iLowerIndex = i + 1;
  4860. iLowerCount++;
  4861. iCount++;
  4862. break;
  4863. }
  4864. }
  4865. }
  4866. else
  4867. {
  4868. bEDShort = true;
  4869. }
  4870. }
  4871. }
  4872. }
  4873. }
  4874. if (!monitorSlot)
  4875. {
  4876. if (adjustslot[iUpperIndex + 1] != "M")
  4877. {
  4878. adjustslot[iUpperIndex] = "monitor";
  4879. iUpperIndex--;
  4880. iCount++;
  4881. }
  4882. if (adjustslot[iLowerIndex - 1] != "monitor")
  4883. {
  4884. adjustslot[iLowerIndex] = "monitor";
  4885. iLowerIndex++;
  4886. iCount++;
  4887. }
  4888. }
  4889. }
  4890. if (cassetteSupplyED && currentEDNum > 0)
  4891. {
  4892. for (int i = 0; i < slotCount - iCount - dummyUpper - dummyLower; i++)
  4893. {
  4894. if (currentEDNum <= 0)
  4895. {
  4896. bEDShort = true;
  4897. break;
  4898. }
  4899. for (int j = iUpperIndex; j >= dummyUpper; j--)
  4900. {
  4901. if (adjustslot[j] == "")
  4902. {
  4903. adjustslot[j] = "extradummy";
  4904. iUpperIndex = j - 1;
  4905. currentEDNum--;
  4906. break;
  4907. }
  4908. }
  4909. if (currentEDNum <= 0)
  4910. {
  4911. bEDShort = true;
  4912. break;
  4913. }
  4914. for (int j = iLowerIndex; j < slotCount - dummyLower; j++)
  4915. {
  4916. if (adjustslot[j] == "")
  4917. {
  4918. adjustslot[j] = "extradummy";
  4919. iLowerIndex = j + 1;
  4920. currentEDNum--;
  4921. break;
  4922. }
  4923. }
  4924. }
  4925. }
  4926. }
  4927. return bEDShort;
  4928. }
  4929. private bool CassetteShortPWaferShort(ProcessJobInfo pj, ref List<string> adjustslot, ref int currentEDNum, RecipeLayoutEntityNormal layoutRecipeDataNormal, RecipeLayoutEntityExpert layoutRecipeDataExpert, int currentPWaferNum, bool cassetteSupplyED)
  4930. {
  4931. bool bEDShort = false;
  4932. bool monitorSlot = layoutRecipeDataNormal.MonitorPosition.ToLower() == "slot";
  4933. int slotCount = SC.GetValue<int>($"Boat.SlotCount");
  4934. int cassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  4935. adjustslot = new List<string>();
  4936. for (int i = 0; i < slotCount; i++)
  4937. {
  4938. adjustslot.Add("");
  4939. }
  4940. if (monitorSlot)
  4941. {
  4942. for (int i = 0; i < slotCount; i++)
  4943. {
  4944. if (layoutRecipeDataExpert.Items[i].ToLower() == "monitor")
  4945. adjustslot[i] = "monitor";
  4946. }
  4947. }
  4948. int.TryParse(layoutRecipeDataNormal.DummyUpperSlot, out int dummyUpper);
  4949. int.TryParse(layoutRecipeDataNormal.DummyLowerSlot, out int dummyLower);
  4950. int.TryParse(layoutRecipeDataNormal.CenteringSlotPosition, out int centeringSlotPos);
  4951. List<SchedulerStocker> tempStockers = new List<SchedulerStocker>();
  4952. foreach (var p in pj.Stockers)
  4953. {
  4954. var module = GetModule(p.Item1) as SchedulerStocker;
  4955. var carrier = CarrierManager.Instance.GetCarrier(module.Module);
  4956. if (!carrier.IsEmpty && carrier.CarrierType.ToString() == "P")
  4957. tempStockers.Add(module);
  4958. }
  4959. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4960. tempStockers.Reverse();
  4961. int centeringSlotPosLower;
  4962. int centeringSlotPosUpper;
  4963. if ((currentPWaferNum / 2) % cassetteSlotCount == 0)
  4964. {
  4965. var temp = (int)Math.Ceiling((float)((currentPWaferNum / 2) / cassetteSlotCount));
  4966. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount + 1) * temp;
  4967. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount + 1) * temp;
  4968. }
  4969. else
  4970. {
  4971. var temp = (int)Math.Ceiling((float)((currentPWaferNum / 2) / cassetteSlotCount));
  4972. centeringSlotPosLower = centeringSlotPos + (currentPWaferNum / 2) + 1 + temp;
  4973. centeringSlotPosUpper = centeringSlotPos - (currentPWaferNum / 2) - 1 - temp;
  4974. }
  4975. if (centeringSlotPosLower >= slotCount - dummyLower)
  4976. {
  4977. int iIndex = slotCount - dummyLower - 1;
  4978. if (!monitorSlot)
  4979. {
  4980. adjustslot[iIndex] = "monitor";
  4981. iIndex--;
  4982. }
  4983. for (int i = 0; i < tempStockers.Count; i++)
  4984. {
  4985. if (currentPWaferNum == 0)
  4986. break;
  4987. for (int j = 0; j < cassetteSlotCount; j++)
  4988. {
  4989. if (currentPWaferNum == 0)
  4990. break;
  4991. for (int k = iIndex; k >= dummyUpper; k--)
  4992. {
  4993. if (adjustslot[k] == "")
  4994. {
  4995. adjustslot[k] = "production";
  4996. currentPWaferNum--;
  4997. iIndex = k - 1;
  4998. break;
  4999. }
  5000. }
  5001. }
  5002. if (!monitorSlot)
  5003. {
  5004. adjustslot[iIndex] = "monitor";
  5005. iIndex--;
  5006. }
  5007. }
  5008. if (cassetteSupplyED)
  5009. {
  5010. for (int i = iIndex; i >= dummyUpper; i--)
  5011. {
  5012. if (currentEDNum > 0)
  5013. {
  5014. if (adjustslot[i] == "")
  5015. {
  5016. adjustslot[i] = "extradummy";
  5017. currentEDNum--;
  5018. }
  5019. }
  5020. else
  5021. {
  5022. bEDShort = true;
  5023. break;
  5024. }
  5025. }
  5026. }
  5027. }
  5028. else if (centeringSlotPosUpper <= dummyUpper + 1)
  5029. {
  5030. int iIndex = dummyUpper;
  5031. if (!monitorSlot)
  5032. {
  5033. adjustslot[iIndex] = "monitor";
  5034. iIndex++;
  5035. }
  5036. for (int i = 0; i < tempStockers.Count; i++)
  5037. {
  5038. if (currentPWaferNum == 0)
  5039. break;
  5040. for (int j = 0; j < cassetteSlotCount; j++)
  5041. {
  5042. if (currentPWaferNum == 0)
  5043. break;
  5044. for (int k = iIndex; k < slotCount - dummyLower; k++)
  5045. {
  5046. if (adjustslot[k] == "")
  5047. {
  5048. adjustslot[k] = "production";
  5049. currentPWaferNum--;
  5050. iIndex = k + 1;
  5051. break;
  5052. }
  5053. }
  5054. }
  5055. if (!monitorSlot)
  5056. {
  5057. adjustslot[iIndex] = "monitor";
  5058. iIndex++;
  5059. }
  5060. }
  5061. if (cassetteSupplyED)
  5062. {
  5063. for (int i = iIndex; i < slotCount - dummyLower; i++)
  5064. {
  5065. if (currentEDNum > 0)
  5066. {
  5067. if (adjustslot[i] == "")
  5068. {
  5069. adjustslot[i] = "extradummy";
  5070. currentEDNum--;
  5071. }
  5072. }
  5073. else
  5074. {
  5075. bEDShort = true;
  5076. break;
  5077. }
  5078. }
  5079. }
  5080. }
  5081. else
  5082. {
  5083. int iCount = 0;
  5084. int iUpperIndex = centeringSlotPos - 1;
  5085. int iLowerIndex = centeringSlotPos - 1;
  5086. int iUpperCount = 0;
  5087. int iLowerCount = 0;
  5088. bool bCassetteEvenNumber = (currentPWaferNum / 2) % cassetteSlotCount == 0;
  5089. if (bCassetteEvenNumber && !monitorSlot)
  5090. {
  5091. adjustslot[centeringSlotPos - 1] = "monitor";
  5092. iUpperIndex--;
  5093. iLowerIndex++;
  5094. iCount++;
  5095. }
  5096. for (int i = 0; i < tempStockers.Count; i++)
  5097. {
  5098. if (currentPWaferNum == 0)
  5099. break;
  5100. for (int j = 0; j < cassetteSlotCount; j++)
  5101. {
  5102. if (currentPWaferNum == 0)
  5103. break;
  5104. if (bCassetteEvenNumber)
  5105. {
  5106. if (!monitorSlot && iUpperCount >= cassetteSlotCount && iUpperIndex >= dummyUpper)
  5107. {
  5108. adjustslot[iUpperIndex] = "monitor";
  5109. iUpperIndex--;
  5110. iUpperCount = 0;
  5111. }
  5112. if (!monitorSlot && iLowerCount >= cassetteSlotCount && iLowerIndex < slotCount - dummyLower)
  5113. {
  5114. adjustslot[iLowerIndex] = "monitor";
  5115. iLowerIndex++;
  5116. iLowerCount = 0;
  5117. }
  5118. }
  5119. else
  5120. {
  5121. if (!monitorSlot && iUpperCount + iLowerCount >= cassetteSlotCount && iUpperIndex >= dummyUpper && iLowerIndex < slotCount - dummyLower)
  5122. {
  5123. adjustslot[iUpperIndex] = "monitor";
  5124. iUpperIndex--;
  5125. iUpperCount = 0;
  5126. adjustslot[iLowerIndex] = "monitor";
  5127. iLowerIndex++;
  5128. iLowerCount = 0;
  5129. bCassetteEvenNumber = true;
  5130. }
  5131. }
  5132. if (iCount % 2 == 0)
  5133. {
  5134. for (int k = iUpperIndex; k >= dummyUpper; k--)
  5135. {
  5136. if (adjustslot[k] == "")
  5137. {
  5138. adjustslot[k] = "production";
  5139. currentPWaferNum--;
  5140. iUpperIndex = k - 1;
  5141. iUpperCount++;
  5142. iCount++;
  5143. break;
  5144. }
  5145. }
  5146. }
  5147. else
  5148. {
  5149. for (int k = iLowerIndex; k < slotCount - dummyLower; k++)
  5150. {
  5151. if (adjustslot[k] == "")
  5152. {
  5153. adjustslot[k] = "production";
  5154. currentPWaferNum--;
  5155. iLowerIndex = k + 1;
  5156. iLowerCount++;
  5157. iCount++;
  5158. break;
  5159. }
  5160. }
  5161. }
  5162. }
  5163. }
  5164. if (!monitorSlot)
  5165. {
  5166. if (adjustslot[iUpperIndex + 1] != "monitor")
  5167. {
  5168. adjustslot[iUpperIndex] = "monitor";
  5169. iUpperIndex--;
  5170. iCount++;
  5171. }
  5172. if (adjustslot[iLowerIndex - 1] != "monitor")
  5173. {
  5174. adjustslot[iLowerIndex] = "monitor";
  5175. iLowerIndex++;
  5176. iCount++;
  5177. }
  5178. }
  5179. if (cassetteSupplyED)
  5180. {
  5181. for (int i = 0; i < slotCount - iCount - dummyUpper - dummyLower; i++)
  5182. {
  5183. if (currentEDNum <= 0)
  5184. {
  5185. bEDShort = true;
  5186. break;
  5187. }
  5188. for (int j = iUpperIndex; j >= dummyUpper; j--)
  5189. {
  5190. if (adjustslot[j] == "")
  5191. {
  5192. adjustslot[j] = "extradummy";
  5193. currentEDNum--;
  5194. iUpperIndex = j - 1;
  5195. break;
  5196. }
  5197. }
  5198. if (currentEDNum <= 0)
  5199. {
  5200. bEDShort = true;
  5201. break;
  5202. }
  5203. for (int j = iLowerIndex; j < slotCount - dummyLower; j++)
  5204. {
  5205. if (adjustslot[j] == "")
  5206. {
  5207. adjustslot[j] = "extradummy";
  5208. currentEDNum--;
  5209. iLowerIndex = j + 1;
  5210. break;
  5211. }
  5212. }
  5213. }
  5214. }
  5215. }
  5216. return bEDShort;
  5217. }
  5218. #endregion
  5219. #region dummy use
  5220. private bool CheckDummyWaferUse(ProcessJobInfo pj)
  5221. {
  5222. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5223. {
  5224. if (!ModuleHelper.IsStocker(module) || !pj.Stockers.Any(x => x.Item1 == module.ToString()))
  5225. continue;
  5226. var wafers = WaferManager.Instance.GetWafers(module);
  5227. if (wafers == null)
  5228. continue;
  5229. foreach (var wafer in wafers)
  5230. {
  5231. if (wafer.IsEmpty)
  5232. continue;
  5233. // SD Dummy
  5234. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.SDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm"))
  5235. {
  5236. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.SDCountWarning")} 次");
  5237. }
  5238. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm"))
  5239. {
  5240. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeWarning")} hour");
  5241. }
  5242. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm"))
  5243. {
  5244. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessWarning")} nm");
  5245. }
  5246. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm"))
  5247. {
  5248. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm")} 次");
  5249. return false;
  5250. }
  5251. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm"))
  5252. {
  5253. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm")} hour");
  5254. return false;
  5255. }
  5256. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm"))
  5257. {
  5258. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm")} nm");
  5259. return false;
  5260. }
  5261. // Extra Dummy
  5262. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
  5263. {
  5264. Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning")} 次");
  5265. }
  5266. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
  5267. {
  5268. Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning")} hour");
  5269. }
  5270. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
  5271. {
  5272. Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning")} nm");
  5273. }
  5274. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
  5275. {
  5276. Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm")} 次");
  5277. return false;
  5278. }
  5279. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
  5280. {
  5281. Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm")} hour");
  5282. return false;
  5283. }
  5284. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
  5285. {
  5286. Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm")} nm");
  5287. return false;
  5288. }
  5289. }
  5290. }
  5291. return true;
  5292. }
  5293. #endregion
  5294. private void MonitorPMTask()
  5295. {
  5296. if (!_carrierRobot.IsAvailable || !_waferRobot.IsAvailable)
  5297. return;
  5298. foreach (var pm in _lstPms)
  5299. {
  5300. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  5301. if (pmModule == null)
  5302. return;
  5303. if (!pm.IsAvailable && !pmModule.IsMainRecipeComplete)
  5304. continue;
  5305. var wafers = WaferManager.Instance.GetWafers(pm.Module);
  5306. if (wafers == null)
  5307. continue;
  5308. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  5309. if (pj == null)
  5310. return;
  5311. bool isNeedProcess = false;
  5312. bool isProcessed = false;
  5313. foreach (var wafer in wafers)
  5314. {
  5315. if (wafer == null || wafer.IsEmpty)
  5316. continue;
  5317. if (!pj.SlotWafers.Any(x => x.Item1 == (ModuleName)wafer.OriginStation && x.Item2 == wafer.OriginSlot))
  5318. pj.SlotWafers.Add(Tuple.Create((ModuleName)wafer.OriginStation, wafer.OriginSlot));
  5319. if (wafer.ProcessJob == null)
  5320. {
  5321. wafer.ProcessJob = pj;
  5322. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  5323. }
  5324. if (wafer.ProcessState == EnumWaferProcessStatus.Idle)
  5325. {
  5326. isNeedProcess = true;
  5327. isProcessed = false;
  5328. }
  5329. if (wafer.ProcessState == EnumWaferProcessStatus.Completed)
  5330. {
  5331. isNeedProcess = false;
  5332. isProcessed = true;
  5333. }
  5334. }
  5335. if (pj.IsEmptyLayout)
  5336. {
  5337. if (pj.ProcessingState == EnumProcessingState.Charging)
  5338. {
  5339. isNeedProcess = true;
  5340. isProcessed = false;
  5341. }
  5342. else
  5343. {
  5344. isNeedProcess = false;
  5345. if (DateTime.Now - pm.RecipeStartTime > TimeSpan.FromSeconds(5))
  5346. isProcessed = true;
  5347. }
  5348. }
  5349. if (isNeedProcess && CheckChargeFinished(pj, pm.Module) && pj.ProcessingState != EnumProcessingState.Processing &&
  5350. pmModule.CheckStandbyCondition() && pm.IsAvailable)
  5351. {
  5352. if (SC.GetValue<bool>("System.IsEnableBoatChargeMapping") && !pj.IsMapAfterCharge)
  5353. {
  5354. var mappingSlot = GetMappingSlot(ModuleName.PM1);
  5355. if (_waferRobot.Map(ModuleName.PM1, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  5356. {
  5357. pj.IsMapAfterCharge = true;
  5358. return;
  5359. }
  5360. }
  5361. if (!pj.RobotHomed)
  5362. {
  5363. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
  5364. pj.RobotHomed = true;
  5365. }
  5366. pj.ProcessingState = EnumProcessingState.Processing;
  5367. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  5368. if (pm.Process((string)pj.ProcessRecipe, false, true))
  5369. return;
  5370. }
  5371. //工艺结束
  5372. if (isProcessed)
  5373. {
  5374. if (pj.ProcessingState == EnumProcessingState.Processing)
  5375. {
  5376. Singleton<EquipmentManager>.Instance.EndPj();
  5377. if (pj.CoolTimeSec > 0)
  5378. {
  5379. _coolTimer.Restart();
  5380. pj.ProcessingState = EnumProcessingState.CoolingBeforeDischarge;
  5381. }
  5382. else
  5383. {
  5384. _coolTimer.Restart();
  5385. pj.ProcessingState = EnumProcessingState.CoolingBeforeDischarge;
  5386. }
  5387. LOG.Write($"Cooling start {pj.CoolTimeSec}");
  5388. }
  5389. if (pj.ProcessingState == EnumProcessingState.CoolingBeforeDischarge && (_coolTimer.ElapsedMilliseconds > pj.CoolTimeSec * 1000 || _isCoolingSkip))
  5390. {
  5391. _isCoolingSkip = false;
  5392. var boatModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule;
  5393. if (boatModule != null && !boatModule.IsBoatElevatorAtHomePosition && boatModule.ZAxisDevice.IsReady)
  5394. {
  5395. boatModule.ZAxisDevice.SetServoMoveTo("HomePosition", out _);
  5396. }
  5397. if (boatModule != null && !boatModule.IsBoatRotationAtHomePosition && boatModule.RAxisDevice.IsReady)
  5398. {
  5399. boatModule.RAxisDevice.ServoStop();
  5400. boatModule.RAxisDevice.SetServoHome();
  5401. }
  5402. if (boatModule != null && boatModule.IsBoatElevatorAtHomePosition && boatModule.IsBoatRotationAtHomePosition)
  5403. {
  5404. if (SC.GetValue<bool>("System.IsEnableBoatDischargeMapping") && !pj.IsMapBeforeDischarge)
  5405. {
  5406. var mappingSlot = GetMappingSlot(ModuleName.PM1);
  5407. if (_waferRobot.Map(ModuleName.PM1, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  5408. {
  5409. pj.IsMapBeforeDischarge = true;
  5410. return;
  5411. }
  5412. }
  5413. _coolTimer.Stop();
  5414. AdjustDischargeSlots();
  5415. pj.ProcessingState = EnumProcessingState.Discharging;
  5416. LOG.Write($"Cooling completed {pj.CoolTimeSec}");
  5417. if (pj.IsN2PurgeMode)
  5418. {
  5419. //pmModule?.SetN2PurgeProcess(true);
  5420. //if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  5421. // pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  5422. if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  5423. {
  5424. pmModule?.SetN2PurgeProcess(true);
  5425. pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  5426. }
  5427. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  5428. {
  5429. var setValue = pmModule.GetN2PurgeModeEnumByStr(pj.N2PurgeModeStr);
  5430. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  5431. pmModule.RestAllN2PrugeRD();
  5432. }
  5433. }
  5434. }
  5435. }
  5436. }
  5437. }
  5438. }
  5439. #endregion Module task
  5440. #region Logic Check
  5441. private bool CheckChargeFinished(ProcessJobInfo pj, ModuleName module, bool isOnlyCharge = false)
  5442. {
  5443. var wafers = WaferManager.Instance.GetWafers(module);
  5444. if (pj == null || wafers == null)
  5445. return false;
  5446. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) ||
  5447. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) ||
  5448. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2) ||
  5449. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) ||
  5450. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  5451. return false;
  5452. int edCount = 0;
  5453. int sdCount = 0;
  5454. int m1Count = 0;
  5455. int m2Count = 0;
  5456. int pCount = 0;
  5457. int expertCount = 0;
  5458. foreach (var wafer in wafers)
  5459. {
  5460. if (wafer == null || wafer.IsEmpty)
  5461. continue;
  5462. switch (wafer.WaferType)
  5463. {
  5464. case WaferType.M1:
  5465. m1Count++;
  5466. break;
  5467. case WaferType.M2:
  5468. m2Count++;
  5469. break;
  5470. case WaferType.ED:
  5471. edCount++;
  5472. break;
  5473. case WaferType.SD:
  5474. sdCount++;
  5475. break;
  5476. case WaferType.P:
  5477. pCount++;
  5478. break;
  5479. case WaferType.XD:
  5480. case WaferType.T:
  5481. expertCount++;
  5482. break;
  5483. }
  5484. }
  5485. if (expertCount > 0)
  5486. {
  5487. if (pj.XdSlots == null || pj.TSlots == null)
  5488. return false;
  5489. return expertCount == pj.XdSlots.Count + pj.TSlots.Count;
  5490. }
  5491. if (pj.ExtraDummySlots != null && pj.ExtraDummySlots.Count != edCount && pj.ExtraDummySlots.Count > 0)
  5492. return false;
  5493. if (pj.SideDummySlots != null && pj.SideDummySlots.Count != sdCount && pj.SideDummySlots.Count > 0)
  5494. return false;
  5495. if (pj.Monitor1Slots != null && pj.Monitor1Slots.Count != m1Count)
  5496. return false;
  5497. if (pj.Monitor2Slots != null && pj.Monitor2Slots.Count != m2Count)
  5498. return false;
  5499. foreach (var s in pj.Stockers)
  5500. {
  5501. var carrier = CarrierManager.Instance.GetCarrier(s.Item1, 0);
  5502. if (carrier == null || carrier.CarrierType != CarrierType.P || carrier.IsEmpty)
  5503. continue;
  5504. var carrierWafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(s.Item1)).ToList();
  5505. if (carrierWafers == null || (carrierWafers.Any(x => !x.IsEmpty) && pj.ProductSlots.Count > pCount))
  5506. return false;
  5507. }
  5508. var carrierRobot = CarrierManager.Instance.GetCarrier(_carrierRobot.Module, 0);
  5509. if (carrierRobot != null && !carrierRobot.IsEmpty && isOnlyCharge)
  5510. return false;
  5511. if (carrierRobot != null && !carrierRobot.IsEmpty &&
  5512. carrierRobot.CarrierType == CarrierType.P &&
  5513. pj.Stockers.Any(x => ModuleHelper.Converter(x.Item1) == carrierRobot.InternalModuleName))
  5514. {
  5515. var carrierWafers = WaferManager.Instance.GetWafers(_carrierRobot.Module).ToList();
  5516. if (carrierWafers == null || carrierWafers.Any(x => !x.IsEmpty))
  5517. return false;
  5518. }
  5519. foreach (var fims in _lstFIMSs)
  5520. {
  5521. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  5522. if (carrier != null && !carrier.IsEmpty && isOnlyCharge)
  5523. return false;
  5524. if (carrier != null && !carrier.IsEmpty &&
  5525. carrier.CarrierType == CarrierType.P &&
  5526. pj.Stockers.Any(x => ModuleHelper.Converter(x.Item1) == carrier.InternalModuleName))
  5527. {
  5528. var carrierWafers = WaferManager.Instance.GetWafers(fims.Module).ToList();
  5529. if (carrierWafers == null || carrierWafers.Any(x => !x.IsEmpty))
  5530. return false;
  5531. }
  5532. }
  5533. return true;
  5534. }
  5535. private bool CheckProcessJobReady(ProcessJobInfo pj)
  5536. {
  5537. bool isReady = true;
  5538. if (pj == null)
  5539. return false;
  5540. //Boat Ready检查
  5541. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  5542. if (pmModule == null || !pmModule.CheckReadyForTransfer(_waferRobot.Module, Hand.Blade1, 0, EnumTransferType.Place, out string reason))
  5543. return false;
  5544. int pCount = 0;
  5545. int m1Count = 0;
  5546. int m2Count = 0;
  5547. foreach (var s in pj.Stockers)
  5548. {
  5549. var type = SC.GetStringValue($"System.Stocker.{s.Item1}WaferType");
  5550. if (!string.IsNullOrEmpty(type) && (type.Contains("P") || type.Contains("M") || type.Contains("None")))
  5551. {
  5552. ModuleName module = ModuleHelper.Converter(s.Item1);
  5553. if (!CarrierManager.Instance.CheckHasCarrier(module, 0))
  5554. continue;
  5555. var wafers = WaferManager.Instance.GetWafers(module).ToList();
  5556. if (wafers == null)
  5557. continue;
  5558. foreach (var wafer in wafers)
  5559. {
  5560. if (wafer == null || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  5561. continue;
  5562. if (wafer.WaferType == WaferType.M1)
  5563. m1Count++;
  5564. if (wafer.WaferType == WaferType.M2)
  5565. m2Count++;
  5566. if (wafer.WaferType == WaferType.P)
  5567. pCount++;
  5568. }
  5569. }
  5570. }
  5571. if (m1Count < pj.Monitor1Slots.Count || m2Count < pj.Monitor2Slots.Count || pCount < pj.ProductSlots.Count)
  5572. return false;
  5573. return isReady;
  5574. }
  5575. protected bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  5576. {
  5577. if (pj.SlotWafers == null || pj.SlotWafers.Count == 0 ||
  5578. pj.SlotWafers.Count != (pj.SideDummySlots != null ? pj.SideDummySlots.Count : 0) +
  5579. (pj.ExtraDummySlots != null ? pj.ExtraDummySlots.Count : 0) +
  5580. (pj.ProductSlots != null ? pj.ProductSlots.Count : 0) +
  5581. (pj.Monitor1Slots != null ? pj.Monitor1Slots.Count : 0) +
  5582. (pj.Monitor2Slots != null ? pj.Monitor2Slots.Count : 0))
  5583. return false;
  5584. var boatWafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  5585. for (int i = 0; i < pj.SlotWafers.Count; ++i)
  5586. {
  5587. if (!CarrierManager.Instance.CheckHasCarrier(pj.SlotWafers[i].Item1, 0))
  5588. {
  5589. var isFOUPUnloaded = true;
  5590. if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0) && CarrierManager.Instance.GetCarrier(_carrierRobot.Module, 0).InternalModuleName == pj.SlotWafers[i].Item1)
  5591. {
  5592. isFOUPUnloaded = false;
  5593. }
  5594. foreach (var st in _lstFIMSs)
  5595. {
  5596. if (!st.IsOnline || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  5597. continue;
  5598. if (CarrierManager.Instance.GetCarrier(st.Module, 0).InternalModuleName == pj.SlotWafers[i].Item1)
  5599. {
  5600. isFOUPUnloaded = false;
  5601. break;
  5602. }
  5603. }
  5604. if (isFOUPUnloaded)
  5605. continue;//已经unload
  5606. }
  5607. WaferInfo wafer = WaferManager.Instance.GetWafer(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2);
  5608. if (wafer.IsEmpty)
  5609. {
  5610. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  5611. return false;
  5612. else
  5613. {
  5614. if (boatWafers.Any(x => x.OriginStation == (int)pj.SlotWafers[i].Item1 && x.OriginSlot == pj.SlotWafers[i].Item2 &&
  5615. !x.IsEmpty &&
  5616. (x.WaferType == WaferType.SD || x.WaferType == WaferType.ED)))
  5617. continue;
  5618. else
  5619. return false;
  5620. }
  5621. }
  5622. if (checkAllProcessed && CheckWaferNeedProcess(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2))
  5623. return false;
  5624. }
  5625. if (checkAllProcessed)
  5626. {
  5627. if (boatWafers != null)
  5628. {
  5629. for (int i = 0; i < boatWafers.Count; i++)
  5630. {
  5631. var wafer = boatWafers[i];
  5632. if (wafer.IsEmpty)
  5633. continue;
  5634. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.Failed)
  5635. {
  5636. return false;
  5637. }
  5638. }
  5639. }
  5640. }
  5641. return true;
  5642. }
  5643. public bool CheckWaferNeedProcess(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
  5644. {
  5645. WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
  5646. if (wafer.IsEmpty)
  5647. return false;
  5648. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  5649. return false;
  5650. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  5651. return false;
  5652. for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
  5653. {
  5654. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  5655. .Contains(ModuleName.PM1) || wafer.ProcessJob.Sequence.Steps[i].StepModules
  5656. .Contains(ModuleName.PM2))
  5657. {
  5658. if (processIn == ModuleName.System)
  5659. return true;
  5660. //if (_mapLpPm[(ModuleName)wafer.OriginStation] != processIn)
  5661. // return false;
  5662. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  5663. .Contains(processIn))
  5664. return true;
  5665. }
  5666. }
  5667. return false;
  5668. }
  5669. private List<Tuple<WaferType, int>> GetWaferTypeSlots()
  5670. {
  5671. List<Tuple<WaferType, int>> slots = new List<Tuple<WaferType, int>>();
  5672. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  5673. if (pj == null)
  5674. return slots;
  5675. if (pj.SideDummySlots != null && pj.SideDummySlots.Count > 0)
  5676. {
  5677. pj.SideDummySlots.ForEach(x => slots.Add(Tuple.Create(WaferType.SD, x)));
  5678. }
  5679. if (pj.ExtraDummySlots != null && pj.ExtraDummySlots.Count > 0)
  5680. {
  5681. pj.ExtraDummySlots.ForEach(x => slots.Add(Tuple.Create(WaferType.ED, x)));
  5682. }
  5683. if (pj.ProductSlots != null && pj.ProductSlots.Count > 0)
  5684. {
  5685. pj.ProductSlots.ForEach(x => slots.Add(Tuple.Create(WaferType.P, x)));
  5686. }
  5687. if (pj.Monitor1Slots != null && pj.Monitor1Slots.Count > 0)
  5688. {
  5689. pj.Monitor1Slots.ForEach(x => slots.Add(Tuple.Create(WaferType.M1, x)));
  5690. }
  5691. if (pj.Monitor2Slots != null && pj.Monitor2Slots.Count > 0)
  5692. {
  5693. pj.Monitor2Slots.ForEach(x => slots.Add(Tuple.Create(WaferType.M2, x)));
  5694. }
  5695. return slots.OrderByDescending(x => x.Item2).ToList();
  5696. }
  5697. private string GetMappingSlot(ModuleName module)
  5698. {
  5699. string mappingSlot = string.Empty;
  5700. var wafers = WaferManager.Instance.GetWafers(module);
  5701. if (wafers != null)
  5702. {
  5703. for (int i = 0; i < wafers.Length; i++)
  5704. {
  5705. if (!wafers[i].IsEmpty)
  5706. mappingSlot += "1";
  5707. else
  5708. mappingSlot += "0";
  5709. }
  5710. }
  5711. return mappingSlot;
  5712. }
  5713. private void AdjustDischargeSlots()
  5714. {
  5715. _sideDummySlots.Clear();
  5716. _extraDummySlots.Clear();
  5717. _productSlots.Clear();
  5718. _monitor1Slots.Clear();
  5719. _monitor2Slots.Clear();
  5720. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  5721. {
  5722. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  5723. continue;
  5724. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  5725. if (wafer == null || wafer.IsEmpty)
  5726. continue;
  5727. switch (wafer.WaferType)
  5728. {
  5729. case WaferType.SD:
  5730. _sideDummySlots.Add(i);
  5731. break;
  5732. case WaferType.ED:
  5733. _extraDummySlots.Add(i);
  5734. break;
  5735. case WaferType.P:
  5736. _productSlots.Add(i);
  5737. break;
  5738. case WaferType.M1:
  5739. _monitor1Slots.Add(i);
  5740. break;
  5741. case WaferType.M2:
  5742. _monitor2Slots.Add(i);
  5743. break;
  5744. }
  5745. }
  5746. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  5747. {
  5748. _productSlots.Sort((x, y) => x.CompareTo(y));//升序
  5749. _monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  5750. _monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  5751. _extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  5752. _sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  5753. }
  5754. else
  5755. {
  5756. _productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  5757. _monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  5758. _monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  5759. _extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  5760. _sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  5761. }
  5762. }
  5763. public void CreatePj(string processName)
  5764. {
  5765. _dbCallback.PjCreated(processName);
  5766. }
  5767. public void StartPj()
  5768. {
  5769. _dbCallback.PjStart();
  5770. }
  5771. public void EndPj(string endStatus)
  5772. {
  5773. _dbCallback.PjUpdated();
  5774. _dbCallback.PjFinished(endStatus);
  5775. }
  5776. public void PjUpdated()
  5777. {
  5778. _dbCallback.PjUpdated();
  5779. }
  5780. public void PjFinished(string endStatus)
  5781. {
  5782. _dbCallback.PjFinished(endStatus);
  5783. }
  5784. #endregion Logic Check
  5785. public void CoolingSkip()
  5786. {
  5787. _isCoolingSkip = true;
  5788. }
  5789. public string GetFirstPJId()
  5790. {
  5791. return _dbCallback.GetFirstPJId();
  5792. }
  5793. public string GetFirstPJStatus()
  5794. {
  5795. if (_lstProcessJobs == null || _lstProcessJobs.Count == 0)
  5796. {
  5797. return "";
  5798. }
  5799. return _lstProcessJobs[0].ProcessingState.ToString();
  5800. }
  5801. #region FA
  5802. public bool IsCJExisted(string cjid)
  5803. {
  5804. return _lstControlJobs.Exists(x => x.Name == cjid);
  5805. }
  5806. public bool IsCJExcuting(string cjid)
  5807. {
  5808. return _lstControlJobs.Exists(x => x.Name == cjid && x.State == EnumControlJobState.Executing);
  5809. }
  5810. public bool CreateControlJob(string jobId, List<string> pjIDs, out ControlJobInfo cj)
  5811. {
  5812. cj = null;
  5813. if (_lstControlJobs.Exists(x => x.Name == jobId))
  5814. {
  5815. //EV.PostWarningLog(LogSource, $"{jobId} is already created");
  5816. return false;
  5817. }
  5818. cj = new ControlJobInfo();
  5819. cj.Name = jobId;
  5820. //cj.Module = module;
  5821. cj.LotName = jobId;
  5822. cj.LotInnerId = Guid.NewGuid();
  5823. cj.LotWafers = new List<WaferInfo>();
  5824. cj.CreateTime = DateTime.Now;
  5825. cj.SetState(EnumControlJobState.Queued);
  5826. foreach (var pjName in pjIDs)
  5827. {
  5828. var pj = _lstProcessJobs.FirstOrDefault(x => x.Name == pjName);
  5829. if (pj == null)
  5830. {
  5831. LOG.Info($"not find {pjName} while create control job");
  5832. continue;
  5833. }
  5834. pj.ControlJobName = jobId;
  5835. cj.ProcessJobNameList.Add(pj.Name);
  5836. }
  5837. if (!_lstControlJobs.Contains(cj))
  5838. _lstControlJobs.Add(cj);
  5839. _faCallback.JobCreated(cj);
  5840. //if ((Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).IsExcuteIdleRecipe)
  5841. // (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).EndIdleRecipe();
  5842. return true;
  5843. }
  5844. private bool CheckWaferStatus(List<Tuple<string, string>> useStockers, bool isNeedCheckMonitor, bool isNeedCheckP, out string reason)
  5845. {
  5846. reason = string.Empty;
  5847. if (SC.GetValue<bool>("System.IsCycleMode"))
  5848. {
  5849. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5850. {
  5851. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  5852. continue;
  5853. var wafers = WaferManager.Instance.GetWafers(module);
  5854. if (wafers == null)
  5855. continue;
  5856. foreach (var wafer in wafers)
  5857. {
  5858. if (wafer.IsEmpty)
  5859. continue;
  5860. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  5861. }
  5862. }
  5863. }
  5864. else
  5865. {
  5866. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5867. {
  5868. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  5869. continue;
  5870. var wafers = WaferManager.Instance.GetWafers(module);
  5871. if (wafers == null)
  5872. continue;
  5873. if (SC.GetValue<bool>("System.EnableWarningFailedWafer"))
  5874. {
  5875. if (wafers.ToList().Any(x => x.ProcessState == EnumWaferProcessStatus.Failed))
  5876. {
  5877. reason = $"{module} has failed wafers.";
  5878. return false;
  5879. }
  5880. }
  5881. foreach (var wafer in wafers)
  5882. {
  5883. if (wafer.IsEmpty)
  5884. continue;
  5885. if (wafer.ProcessState != EnumWaferProcessStatus.Idle)
  5886. {
  5887. if (SC.GetValue<bool>("System.EnableWarningWaferProcessState"))
  5888. {
  5889. if (wafer.WaferType == WaferType.P && isNeedCheckP)
  5890. {
  5891. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  5892. return false;
  5893. }
  5894. if (isNeedCheckMonitor)
  5895. {
  5896. if (wafer.WaferType == WaferType.M)
  5897. {
  5898. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  5899. return false;
  5900. }
  5901. }
  5902. }
  5903. else
  5904. {
  5905. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  5906. }
  5907. }
  5908. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  5909. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  5910. }
  5911. }
  5912. }
  5913. return true;
  5914. }
  5915. public bool CreateProcessJob(out ProcessJobInfo pj, params object[] objs)
  5916. {
  5917. var param = (Dictionary<string, object>)objs[0];
  5918. pj = null;
  5919. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5920. {
  5921. var lpModule = Singleton<EquipmentManager>.Instance.Modules[module] as LoadPortModule;
  5922. if (lpModule != null)
  5923. {
  5924. if (lpModule.FsmState == (int)LoadPortModule.STATE.Init)
  5925. {
  5926. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5927. return false;
  5928. }
  5929. if (lpModule.FsmState == (int)LoadPortModule.STATE.Error)
  5930. {
  5931. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5932. return false;
  5933. }
  5934. }
  5935. var fimsModule = Singleton<EquipmentManager>.Instance.Modules[module] as FIMSModule;
  5936. if (fimsModule != null)
  5937. {
  5938. if (fimsModule.FsmState == (int)FIMSModule.STATE.Init)
  5939. {
  5940. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5941. return false;
  5942. }
  5943. if (fimsModule.FsmState == (int)FIMSModule.STATE.Error)
  5944. {
  5945. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5946. return false;
  5947. }
  5948. }
  5949. var boatModule = Singleton<EquipmentManager>.Instance.Modules[module] as BoatModule;
  5950. if (boatModule != null)
  5951. {
  5952. if (boatModule.FsmState == (int)BoatModule.STATE.Init)
  5953. {
  5954. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5955. return false;
  5956. }
  5957. if (boatModule.FsmState == (int)BoatModule.STATE.Error)
  5958. {
  5959. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5960. return false;
  5961. }
  5962. }
  5963. var carrierRobotModule = Singleton<EquipmentManager>.Instance.Modules[module] as CarrierRobotModule;
  5964. if (carrierRobotModule != null)
  5965. {
  5966. if (carrierRobotModule.FsmState == (int)CarrierRobotModule.STATE.Init)
  5967. {
  5968. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5969. return false;
  5970. }
  5971. if (carrierRobotModule.FsmState == (int)CarrierRobotModule.STATE.Error)
  5972. {
  5973. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5974. return false;
  5975. }
  5976. }
  5977. var waferRobotModule = Singleton<EquipmentManager>.Instance.Modules[module] as WaferRobotModule;
  5978. if (waferRobotModule != null)
  5979. {
  5980. if (waferRobotModule.FsmState == (int)WaferRobotModule.STATE.Init)
  5981. {
  5982. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5983. return false;
  5984. }
  5985. if (waferRobotModule.FsmState == (int)WaferRobotModule.STATE.Error)
  5986. {
  5987. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  5988. return false;
  5989. }
  5990. }
  5991. var pmModule = Singleton<EquipmentManager>.Instance.Modules[module] as PMModule;
  5992. if (pmModule != null)
  5993. {
  5994. if (pmModule.FsmState == (int)PMModule.STATE.Init)
  5995. {
  5996. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  5997. return false;
  5998. }
  5999. if (pmModule.FsmState == (int)PMModule.STATE.Error)
  6000. {
  6001. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6002. return false;
  6003. }
  6004. }
  6005. }
  6006. if (!Singleton<EquipmentManager>.Instance.GetJobRecipeInfor((string)param["JobRecipe"], out string processRecipe, out string layoutRecipe, out int coolTime, out string reason))
  6007. {
  6008. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6009. return false;
  6010. }
  6011. if (string.IsNullOrEmpty(layoutRecipe))
  6012. {
  6013. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid, Layout Recipe is null");
  6014. return false;
  6015. }
  6016. var path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Layout\\{layoutRecipe}.rcp";
  6017. if (!File.Exists(path))
  6018. {
  6019. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Layout \"{layoutRecipe}\" not exist.");
  6020. return false;
  6021. }
  6022. path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Process\\{processRecipe}.rcp";
  6023. if (!File.Exists(path))
  6024. {
  6025. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Process recipe \"{processRecipe}\" not exist.");
  6026. return false;
  6027. }
  6028. if (!RecipeParser.Parse(processRecipe, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
  6029. {
  6030. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load process recipe {processRecipe} failed, {reason}");
  6031. return false;
  6032. }
  6033. List<Tuple<string, string, List<int>>> useStockers = new List<Tuple<string, string, List<int>>>();
  6034. if (RecipeParser.LayoutRecipeParse(layoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  6035. {
  6036. if (param.ContainsKey("CarrierPara"))
  6037. {
  6038. //Stocker1,P_00000036,25,Exist,1111111111111111111111111,LP1;Stocker2,P_00000037,25,Exist,1111111111111111111111111,LP2
  6039. var paras = param["CarrierPara"].ToString().Split(';');
  6040. if (paras != null && paras.Length > 0)
  6041. {
  6042. foreach (var item in paras)
  6043. {
  6044. //Stocker13,,21/22/23/24/25"
  6045. var arry = item.Split(',');
  6046. if (arry != null && arry.Length >= 2)
  6047. {
  6048. var pStocker = GetModule(arry[0]) as SchedulerStocker;
  6049. if (pStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("P") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6050. {
  6051. var slots = new List<int>();
  6052. if (arry.Length >= 3)
  6053. {
  6054. var slotParas = arry[2].Split('/').ToList();
  6055. if (slotParas != null && slotParas.Count > 0)
  6056. {
  6057. foreach (var slotPara in slotParas)
  6058. {
  6059. var ret = int.TryParse(slotPara, out int slot);
  6060. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6061. {
  6062. if (_lstProcessJobs.Any())
  6063. {
  6064. foreach (var job in _lstProcessJobs)
  6065. {
  6066. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6067. {
  6068. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6069. return false;
  6070. }
  6071. }
  6072. }
  6073. slots.Add(slot - 1);
  6074. }
  6075. }
  6076. }
  6077. }
  6078. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6079. }
  6080. }
  6081. }
  6082. }
  6083. }
  6084. if (param.ContainsKey("mCarrierPara"))
  6085. {
  6086. //Stocker14,P_00000014;Stocker15,P_00000015
  6087. var paras = param["mCarrierPara"].ToString().Split(';');
  6088. if (paras != null && paras.Length > 0)
  6089. {
  6090. if (!string.IsNullOrEmpty(paras[0]))
  6091. {
  6092. foreach (var item in paras)
  6093. {
  6094. var arry = item.Split(',');
  6095. if (arry != null && arry.Length >= 2)
  6096. {
  6097. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6098. if (mStocker != null && SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M"))
  6099. {
  6100. var slots = new List<int>();
  6101. if (arry.Length >= 3)
  6102. {
  6103. var slotParas = arry[2].Split('/').ToList();
  6104. if (slotParas != null && slotParas.Count > 0)
  6105. {
  6106. foreach (var slotPara in slotParas)
  6107. {
  6108. var ret = int.TryParse(slotPara, out int slot);
  6109. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6110. {
  6111. if (_lstProcessJobs.Any())
  6112. {
  6113. foreach (var job in _lstProcessJobs)
  6114. {
  6115. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6116. {
  6117. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6118. return false;
  6119. }
  6120. }
  6121. }
  6122. slots.Add(slot - 1);
  6123. }
  6124. }
  6125. }
  6126. }
  6127. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6128. }
  6129. }
  6130. }
  6131. }
  6132. }
  6133. }
  6134. if (param.ContainsKey("m1CarrierPara"))
  6135. {
  6136. //Stocker14,P_00000014;Stocker15,P_00000015
  6137. var paras = param["m1CarrierPara"].ToString().Split(';');
  6138. if (paras != null && paras.Length > 0)
  6139. {
  6140. if (!string.IsNullOrEmpty(paras[0]))
  6141. {
  6142. foreach (var item in paras)
  6143. {
  6144. var arry = item.Split(',');
  6145. if (arry != null && arry.Length >= 2)
  6146. {
  6147. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6148. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M1") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6149. {
  6150. var slots = new List<int>();
  6151. if (arry.Length >= 3)
  6152. {
  6153. var slotParas = arry[2].Split('/').ToList();
  6154. if (slotParas != null && slotParas.Count > 0)
  6155. {
  6156. foreach (var slotPara in slotParas)
  6157. {
  6158. var ret = int.TryParse(slotPara, out int slot);
  6159. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6160. {
  6161. if (_lstProcessJobs.Any())
  6162. {
  6163. foreach (var job in _lstProcessJobs)
  6164. {
  6165. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6166. {
  6167. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6168. return false;
  6169. }
  6170. }
  6171. }
  6172. slots.Add(slot - 1);
  6173. }
  6174. }
  6175. }
  6176. }
  6177. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6178. }
  6179. }
  6180. }
  6181. }
  6182. }
  6183. }
  6184. if (param.ContainsKey("m2CarrierPara"))
  6185. {
  6186. //Stocker14,P_00000014;Stocker15,P_00000015
  6187. var paras = param["m2CarrierPara"].ToString().Split(';');
  6188. if (paras != null && paras.Length > 0)
  6189. {
  6190. if (!string.IsNullOrEmpty(paras[0]))
  6191. {
  6192. foreach (var item in paras)
  6193. {
  6194. var arry = item.Split(',');
  6195. if (arry != null && arry.Length >= 2)
  6196. {
  6197. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6198. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M2") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6199. {
  6200. var slots = new List<int>();
  6201. if (arry.Length >= 3)
  6202. {
  6203. var slotParas = arry[2].Split('/').ToList();
  6204. if (slotParas != null && slotParas.Count > 0)
  6205. {
  6206. foreach (var slotPara in slotParas)
  6207. {
  6208. var ret = int.TryParse(slotPara, out int slot);
  6209. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6210. {
  6211. if (_lstProcessJobs.Any())
  6212. {
  6213. foreach (var job in _lstProcessJobs)
  6214. {
  6215. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6216. {
  6217. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6218. return false;
  6219. }
  6220. }
  6221. }
  6222. slots.Add(slot - 1);
  6223. }
  6224. }
  6225. }
  6226. }
  6227. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6228. }
  6229. }
  6230. }
  6231. }
  6232. }
  6233. }
  6234. }
  6235. if (Singleton<FAJobController>.Instance.FaControlState != FAControlState.OnlineRemote.ToString())
  6236. useStockers.Sort(compare);
  6237. foreach (var s in _lstSideDummyStocker)
  6238. {
  6239. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.SD)
  6240. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  6241. else
  6242. {
  6243. bool onRobot = false;
  6244. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  6245. {
  6246. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  6247. if (carrier.CarrierType == CarrierType.SD &&
  6248. carrier.InternalModuleName == s.Module)
  6249. {
  6250. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6251. onRobot = true;
  6252. }
  6253. }
  6254. if (!onRobot)
  6255. {
  6256. bool inFIMS = false;
  6257. foreach (var fims in _lstFIMSs)
  6258. {
  6259. if (!fims.IsOnline)
  6260. continue;
  6261. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  6262. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.SD &&
  6263. carrier.InternalModuleName == s.Module)
  6264. {
  6265. inFIMS = true;
  6266. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6267. }
  6268. }
  6269. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  6270. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  6271. }
  6272. }
  6273. }
  6274. foreach (var s in _lstExtraDummyStocker)
  6275. {
  6276. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.ED)
  6277. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  6278. else
  6279. {
  6280. bool onRobot = false;
  6281. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  6282. {
  6283. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  6284. if (carrier.CarrierType == CarrierType.ED &&
  6285. carrier.InternalModuleName == s.Module)
  6286. {
  6287. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6288. onRobot = true;
  6289. }
  6290. }
  6291. if (!onRobot)
  6292. {
  6293. bool inFIMS = false;
  6294. foreach (var fims in _lstFIMSs)
  6295. {
  6296. if (!fims.IsOnline)
  6297. continue;
  6298. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  6299. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.ED &&
  6300. carrier.InternalModuleName == s.Module)
  6301. {
  6302. inFIMS = true;
  6303. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6304. }
  6305. }
  6306. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  6307. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  6308. }
  6309. }
  6310. }
  6311. var wafers = WaferManager.Instance.GetWafers(_pm1.Module);
  6312. if (wafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused) &&
  6313. SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  6314. {
  6315. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in boat");
  6316. return false;
  6317. }
  6318. if (wafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  6319. {
  6320. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in boat");
  6321. return false;
  6322. }
  6323. var robotWafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot);
  6324. if (robotWafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused))
  6325. {
  6326. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in wafer robot");
  6327. return false;
  6328. }
  6329. if (robotWafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  6330. {
  6331. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in wafer robot");
  6332. return false;
  6333. }
  6334. if (!CheckWaferStatus(useStockers, true, true, out reason))
  6335. {
  6336. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6337. return false;
  6338. }
  6339. //if (!CheckWaferStatus(useStockers, out reason))
  6340. //{
  6341. // Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6342. // return false;
  6343. //}
  6344. foreach (var stocker in useStockers)
  6345. {
  6346. if (CarrierManager.Instance.CheckHasCarrier($"{stocker.Item1}", 0) &&
  6347. CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName.ToString() != stocker.Item1)
  6348. {
  6349. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Carrier of {stocker.Item1} is not match stocker module name {CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName}");
  6350. return false;
  6351. }
  6352. }
  6353. bool isOnlyCharge = false;
  6354. if (param.ContainsKey("Charge"))
  6355. {
  6356. bool.TryParse(param["Charge"].ToString(), out isOnlyCharge);
  6357. }
  6358. var pjJobId = param["PJID"].ToString();
  6359. if (_lstProcessJobs.Exists(x => x.Name == pjJobId))
  6360. {
  6361. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have the same pj id={pjJobId}");
  6362. return false;
  6363. }
  6364. pj = new ProcessJobInfo();
  6365. pj.Name = pjJobId;
  6366. pj.JobRecipe = param.ContainsKey("JobRecipe") ? param["JobRecipe"].ToString() : "";
  6367. pj.ProcessRecipe = processRecipe;
  6368. pj.LayoutRecipe = layoutRecipe;
  6369. pj.ControlJobName = "";
  6370. pj.SetState(EnumProcessJobState.Queued);
  6371. pj.CreateTime = DateTime.Now;
  6372. pj.Stockers = useStockers;
  6373. pj.SlotWafers = new List<Tuple<ModuleName, int>>();
  6374. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  6375. pj.CoolTimeSec = coolTime;
  6376. //pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");
  6377. //pj.IsOnlyCharge = isOnlyCharge;
  6378. if (!CheckChargeRule(pj, out bool waferShort, false, true, out reason))
  6379. {
  6380. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {layoutRecipe} check charge rule failed, {reason}");
  6381. return false;
  6382. }
  6383. _lstProcessJobs.Add(pj);
  6384. //_faCallback.JobCreated(pj);
  6385. return true;
  6386. }
  6387. #endregion
  6388. private bool InvokeCoolingAbort(string arg1, object[] args)
  6389. {
  6390. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing && x.ProcessingState == EnumProcessingState.Cooling);
  6391. if (pj != null)
  6392. {
  6393. pj.CoolTimeSec = 0;
  6394. }
  6395. return true;
  6396. }
  6397. private bool InvokeCoolingModify(string arg1, object[] args)
  6398. {
  6399. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing && x.ProcessingState == EnumProcessingState.Cooling);
  6400. if (pj != null && args != null && args.Length > 0)
  6401. {
  6402. float.TryParse(args[0].ToString(), out float addCoolTime);
  6403. pj.CoolTimeSec = (int)addCoolTime;
  6404. }
  6405. return true;
  6406. }
  6407. private List<string> GetBoatSlotMap()
  6408. {
  6409. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  6410. if (wafers != null)
  6411. {
  6412. List<string> slotMap = new List<string>();
  6413. foreach (var wafer in wafers)
  6414. {
  6415. if (wafer == null || wafer.IsEmpty)
  6416. {
  6417. slotMap.Add("");
  6418. continue;
  6419. }
  6420. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  6421. slotMap.Add("filler");
  6422. else
  6423. slotMap.Add(wafer.WaferID);
  6424. }
  6425. return slotMap;
  6426. }
  6427. return null;
  6428. }
  6429. }
  6430. }