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@@ -950,6 +950,7 @@
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<config default="false" name="EnableLogMessage" description="Enable log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="3" name="ReconnectCount" description="MFC reconnect count" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<configs name="MFC1" display="MFC1">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -967,6 +968,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC2" display="MFC2">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -984,6 +986,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC3" display="MFC3">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1001,6 +1004,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC4" display="MFC4">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1018,6 +1022,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC5" display="MFC5">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1035,6 +1040,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC6" display="MFC6">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1052,6 +1058,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC7" display="MFC7">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1069,6 +1076,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC8" display="MFC8">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1086,6 +1094,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC9" display="MFC9">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1103,6 +1112,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC10" display="MFC10">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1120,6 +1130,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC11" display="MFC11">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="20" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1137,6 +1148,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC12" display="MFC12">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1154,6 +1166,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC13" display="MFC13">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="0.5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1171,6 +1184,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC14" display="MFC14">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1188,6 +1202,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC15" display="MFC15">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1205,6 +1220,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC16" display="MFC16">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1222,6 +1238,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC17" display="MFC17">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1239,6 +1256,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC31" display="MFC31">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1256,6 +1274,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC32" display="MFC32">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1273,6 +1292,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC51" display="MFC51">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -1290,6 +1310,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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<configs name="MFC57" display="MFC57">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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