|
@@ -971,13 +971,14 @@ namespace FurnaceRT.Equipments.Jobs
|
|
|
|
|
|
|
|
private void UpdateProcessJobStatus()
|
|
private void UpdateProcessJobStatus()
|
|
|
{
|
|
{
|
|
|
|
|
+ var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
|
|
|
foreach (var pj in _lstProcessJobs)
|
|
foreach (var pj in _lstProcessJobs)
|
|
|
{
|
|
{
|
|
|
if (pj.ProcessingState == EnumProcessingState.Discharging && pj.IsEmptyLayout)
|
|
if (pj.ProcessingState == EnumProcessingState.Discharging && pj.IsEmptyLayout)
|
|
|
{
|
|
{
|
|
|
pj.SetState(EnumProcessJobState.ProcessingComplete);
|
|
pj.SetState(EnumProcessJobState.ProcessingComplete);
|
|
|
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
|
|
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
|
|
|
- var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
|
|
|
|
|
|
|
+
|
|
|
pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
|
|
pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
|
|
|
pmModule?.SetN2PurgeProcess(false);
|
|
pmModule?.SetN2PurgeProcess(false);
|
|
|
}
|
|
}
|
|
@@ -985,12 +986,11 @@ namespace FurnaceRT.Equipments.Jobs
|
|
|
{
|
|
{
|
|
|
if (pj.State == EnumProcessJobState.Processing)
|
|
if (pj.State == EnumProcessJobState.Processing)
|
|
|
{
|
|
{
|
|
|
- if (CheckAllWaferReturned(pj, true))
|
|
|
|
|
|
|
+ if (CheckAllWaferReturned(pj, true) && pmModule.CheckRecipeIsCompleted(pj))
|
|
|
{
|
|
{
|
|
|
pj.SetState(EnumProcessJobState.ProcessingComplete);
|
|
pj.SetState(EnumProcessJobState.ProcessingComplete);
|
|
|
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
|
|
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
|
|
|
_faCallback.EndDischarge(pj);
|
|
_faCallback.EndDischarge(pj);
|
|
|
- var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
|
|
|
|
|
pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
|
|
pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
|
|
|
pmModule?.SetN2PurgeProcess(false);
|
|
pmModule?.SetN2PurgeProcess(false);
|
|
|
}
|
|
}
|
|
@@ -1001,7 +1001,6 @@ namespace FurnaceRT.Equipments.Jobs
|
|
|
{
|
|
{
|
|
|
pj.SetState(EnumProcessJobState.ProcessingComplete);
|
|
pj.SetState(EnumProcessJobState.ProcessingComplete);
|
|
|
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
|
|
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
|
|
|
- var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
|
|
|
|
|
pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
|
|
pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
|
|
|
pmModule?.SetN2PurgeProcess(false);
|
|
pmModule?.SetN2PurgeProcess(false);
|
|
|
}
|
|
}
|