- <?xml version="1.0"?>
- <TableRecipeData RecipeVersion="Triton160" CreatedBy="System" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2024-12-16T10:38:32" PressureMode="TV" BasePressure="100" ElectrodeTemp="20" PumpDownLimit="120" PurgeActive="false" Barcode="" Description="(Empty)">
- <Step StepNo="第1步" Name="initial" Loop=" " EndBy="EndByStepTime" Time="00:00:30">
- <Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="50" PressureControl.SetBoostPressure="100" />
- <RF Rf.SetPowerOnTime="00:00:00" Rf.SetMode="ContinuousWaveMode" Rf.SetPulsingFrequency="0" Rf.SetPulsingDuty="0" Rf.SetPower="0" Rf.SetMatchProcessMode="PresetMode" Rf.SetMatchPositionC1="50" Rf.SetMatchPositionC2="50" />
- <Mfc MfcGas1="45" MfcGas2="56" MfcGas3="66" MfcGas4="76" MfcGas5="86" />
- </Step>
- <Step StepNo="第2步" Name="initial" Loop=" " EndBy="EndByStepTime" Time="00:00:30">
- <Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="50" PressureControl.SetBoostPressure="100" />
- <RF Rf.SetPowerOnTime="00:00:00" Rf.SetMode="ContinuousWaveMode" Rf.SetPulsingFrequency="0" Rf.SetPulsingDuty="0" Rf.SetPower="0" Rf.SetMatchProcessMode="PresetMode" Rf.SetMatchPositionC1="50" Rf.SetMatchPositionC2="50" />
- <Mfc MfcGas1="45" MfcGas2="56" MfcGas3="66" MfcGas4="76" MfcGas5="86" />
- </Step>
- </TableRecipeData>
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