Triton160/Triton160RT/bin/Debug/Config/Bak/20220812_140328.PmConfig.xml

<?xml version="1.0"?>
<SCData xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <System Description="系统设定">
    <IsEnableLocalPlc Description="">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </IsEnableLocalPlc>
    <IsEnableRemotePlc Description="">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </IsEnableRemotePlc>
    <TimeLimitForOpenCloseSlitVavle Description="打开或关闭真空闸板阀超时设定">
      <ViewLevel>0</ViewLevel>
      <Unit>sec</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>100</RangeUpLimit>
      <Precision>0</Precision>
    </TimeLimitForOpenCloseSlitVavle>
    <TimeLimitOfOpenGasVavle Description="打开气路阀超时设定">
      <ViewLevel>0</ViewLevel>
      <Unit>sec</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>100</RangeUpLimit>
      <Precision>0</Precision>
    </TimeLimitOfOpenGasVavle>
    <TimeLimitOfCloseGasValve Description="关闭气路阀超时设定">
      <ViewLevel>0</ViewLevel>
      <Unit>sec</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>100</RangeUpLimit>
      <Precision>0</Precision>
    </TimeLimitOfCloseGasValve>
    <IsSimulatorMode Description="启用模拟测试模式">
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>false</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </IsSimulatorMode>
    <IsAtmCycleMode Description="">
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>false</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </IsAtmCycleMode>
    <IsCheckSafeInterlockBeforeAutoRun>
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>false</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </IsCheckSafeInterlockBeforeAutoRun>
    <PumpBasePressure Description="Base Pressure">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>756000</RangeUpLimit>
      <Precision>0</Precision>
    </PumpBasePressure>
    <PumpTimeLimit Description="Pump Down Limit">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>3000</RangeUpLimit>
      <Precision>0</Precision>
    </PumpTimeLimit>
    <VentTime Description="Vent Time totally">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>3</RangeLowLimit>
      <RangeUpLimit>3000</RangeUpLimit>
      <Precision>0</Precision>
    </VentTime>
    <VentTimeLimit Description="Vent Time Limit">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>300</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>3000</RangeUpLimit>
      <Precision>0</Precision>
    </VentTimeLimit>
    <GasFlowPressureAlarmTime Description="Gas Flow Pressure Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>60</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>300</RangeUpLimit>
      <Precision>0</Precision>
    </GasFlowPressureAlarmTime>
    <GasFlowPressureAlarmRange Description="Gas Flow Pressure Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>1000</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>756000</RangeUpLimit>
      <Precision>0</Precision>
    </GasFlowPressureAlarmRange>
    <RfPowerAlarmRange Description="RF Power Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>w</Unit>
      <Value>1000</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>1000</RangeUpLimit>
      <Precision>0</Precision>
    </RfPowerAlarmRange>
    <RfPowerAlarmTime Description="RF Power Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>1000</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>3000</RangeUpLimit>
      <Precision>0</Precision>
    </RfPowerAlarmTime>
    <RfReflectPowerAlarmRange Description="RF Reflect Power Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>w</Unit>
      <Value>1000</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>1000</RangeUpLimit>
      <Precision>0</Precision>
    </RfReflectPowerAlarmRange>
    <RfReflectPowerAlarmTime Description="RF Reflect Power Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>300</RangeUpLimit>
      <Precision>0</Precision>
    </RfReflectPowerAlarmTime>
    <Language Description="系统语言，1：english，2：中文">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>2</RangeUpLimit>
      <Precision>0</Precision>
    </Language>
    <MatchMode Description="Match Mode">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>1</RangeUpLimit>
      <Precision>0</Precision>
    </MatchMode>
    <RfMatchModeDuringProcess Description="RF match mode during run recipe">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>1</RangeUpLimit>
      <Precision>0</Precision>
    </RfMatchModeDuringProcess>
    <MatchPositionC1 Description="Match Position C1">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>100</RangeUpLimit>
      <Precision>0</Precision>
    </MatchPositionC1>
    <MatchPositionC2 Description="Match Position C2">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>100</RangeUpLimit>
      <Precision>0</Precision>
    </MatchPositionC2>
    <IsMatchPresetMode Description="Match is preset mode">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </IsMatchPresetMode>
    <RfOnTimeLastPMTime Description="">
      <ViewLevel>0</ViewLevel>
      <Value>2017-05-12 12:30:15</Value>
      <Default>2017-05-12 12:30:15</Default>
    </RfOnTimeLastPMTime>
    <RfOnTimeFromLastPM Description="">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>2147483647</RangeUpLimit>
      <Precision>0</Precision>
    </RfOnTimeFromLastPM>
    <RfOnTimeTotal Description="">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>2147483647</RangeUpLimit>
      <Precision>0</Precision>
    </RfOnTimeTotal>
    <RfOnTimePMInterval Description="">
      <ViewLevel>0</ViewLevel>
      <Unit>days</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>365</RangeUpLimit>
      <Precision>0</Precision>
    </RfOnTimePMInterval>
    <RfOnTimeEnableAlarm Description="RF On Time Enable Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </RfOnTimeEnableAlarm>
    <PumpOnTimeLastPMTime Description="">
      <ViewLevel>0</ViewLevel>
      <Value>2017-05-12 12:30:15</Value>
      <Default>2017-05-12 12:30:15</Default>
    </PumpOnTimeLastPMTime>
    <PumpOnTimeFromLastPM Description="">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>2147483647</RangeUpLimit>
      <Precision>0</Precision>
    </PumpOnTimeFromLastPM>
    <PumpOnTimeTotal Description="">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>2147483647</RangeUpLimit>
      <Precision>0</Precision>
    </PumpOnTimeTotal>
    <PumpOnTimePMInterval Description="">
      <ViewLevel>0</ViewLevel>
      <Unit>days</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>365</RangeUpLimit>
      <Precision>0</Precision>
    </PumpOnTimePMInterval>
    <PumpOnTimeEnableAlarm Description="Pump On Time Enable Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </PumpOnTimeEnableAlarm>
    <BoostPumpPressureSetPointMaxValue Description="Boost pump max pressure setting">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>1000</Value>
      <Default>1000</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>3000</RangeUpLimit>
      <Precision>0</Precision>
    </BoostPumpPressureSetPointMaxValue>
    <BuzzerBlinkingTime Description="Buzzer blinking time">
      <ViewLevel>0</ViewLevel>
      <Unit>ms</Unit>
      <Value>3000</Value>
      <Default>3000</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>36000000</RangeUpLimit>
      <Precision>0</Precision>
    </BuzzerBlinkingTime>
    <IsTestMode Description="is test mode">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </IsTestMode>
    <EnableFa Description="Enable Fa">
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>false</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableFa>
    <FaLocalIPAddress Description="Fa Local IP Address">
      <ViewLevel>0</ViewLevel>
      <Value>127.0.0.1</Value>
      <Default>127.0.0.1</Default>
    </FaLocalIPAddress>
  </System>
  <BarcodeConfig Description="Barcode scanner configuration">
    <EnableBarcode Description="Enable barcode scanner input">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableBarcode>
    <EnableSelectRecipeInAutoRun Description="Enable select recipe during auto running">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableSelectRecipeInAutoRun>
    <MinLotInputBarcodeLength Description="Minimum value of the lot barcode length">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>12</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>50</RangeUpLimit>
      <Precision>0</Precision>
    </MinLotInputBarcodeLength>
    <MaxLotInputBarcodeLength Description="Maxmum value of the lot barcode length">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>18</Value>
      <Default>18</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>100</RangeUpLimit>
      <Precision>0</Precision>
    </MaxLotInputBarcodeLength>
    <MaxLotBarcodeCount Description="Maxmum count of the lot barcode">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>5</Value>
      <Default>5</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>100</RangeUpLimit>
      <Precision>0</Precision>
    </MaxLotBarcodeCount>
    <MinRecipeInputBarcodeLength Description="Minimum value of the recipe barcode length">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>12</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>50</RangeUpLimit>
      <Precision>0</Precision>
    </MinRecipeInputBarcodeLength>
    <MaxRecipeInputBarcodeLength Description="Maxmum value of the recipe barcode length">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>18</Value>
      <Default>18</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>100</RangeUpLimit>
      <Precision>0</Precision>
    </MaxRecipeInputBarcodeLength>
    <MaxRecipeBarcodeCount Description="Maxmum count of the recipe barcode">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>10</RangeUpLimit>
      <Precision>0</Precision>
    </MaxRecipeBarcodeCount>
  </BarcodeConfig>
  <RfConfig Description="RF related configuration">
    <EnablePulsingFunction Description="RF is with pulsing function">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnablePulsingFunction>
    <EnableReflectPower Description="RF is with reflect power display">
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableReflectPower>
    <EnableC1C2Position Description="RF is with C1/C2 set function">
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableC1C2Position>
    <EnableVoltageCurrent Description="RF is with voltage/current display function">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableVoltageCurrent>
    <PowerRange Description="Max power value">
      <ViewLevel>0</ViewLevel>
      <Unit>w</Unit>
      <Value>1200</Value>
      <Default>1200</Default>
      <RangeLowLimit>100</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PowerRange>
    <Coefficient Description="RF power coefficient">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </Coefficient>
    <PowerRegulationFactor Description="Power Regulation Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PowerRegulationFactor>
  </RfConfig>
  <GasLineConfig Description="Gas related configuration">
    <Gas1Name Description="Gas1 Name">
      <ViewLevel>0</ViewLevel>
      <Value>Gas1</Value>
      <Default>Gas1</Default>
    </Gas1Name>
    <Gas1Enable Description="Gas1 Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1Enable>
    <Gas1MfcN2Scale Description="Gas1 N2 Scale">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1MfcN2Scale>
    <Gas1MfcScaleFactor Description="Gas1 Scale Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1MfcScaleFactor>
    <Gas1MfcEnableAlarm Description="Gas1 MFC Enable Flow Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1MfcEnableAlarm>
    <Gas1MfcAlarmRange Description="Gas1 MFC Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1MfcAlarmRange>
    <Gas1MfcAlarmTime Description="Gas1 MFC Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1MfcAlarmTime>
    <Gas1MfcDefaultSetPoint Description="Gas1 MFC Default SetPoint">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1MfcDefaultSetPoint>
    <Gas1PressureMinValue Description="Gas1 Pressure Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1PressureMinValue>
    <Gas1PressureMaxValue Description="Gas1 Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1PressureMaxValue>
    <Gas1PressureWarningTime Description="Gas1 Pressure warning time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1PressureWarningTime>
    <Gas1PressureAlarmTime Description="Gas1 Pressure alarm time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>120</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1PressureAlarmTime>
    <Gas1MfcFlowRegulationFactor Description="Gas1 Mfc Flow Regulation Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas1MfcFlowRegulationFactor>
    <Gas2Name Description="Gas2 Name">
      <ViewLevel>0</ViewLevel>
      <Value>Gas2</Value>
      <Default>Gas2</Default>
    </Gas2Name>
    <Gas2Enable Description="Gas2 Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2Enable>
    <Gas2MfcN2Scale Description="Gas2 N2 Scale">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2MfcN2Scale>
    <Gas2MfcScaleFactor Description="Gas2 Scale Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2MfcScaleFactor>
    <Gas2MfcEnableAlarm Description="Gas2 MFC Enable Flow Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2MfcEnableAlarm>
    <Gas2MfcAlarmRange Description="Gas2 MFC Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2MfcAlarmRange>
    <Gas2MfcAlarmTime Description="Gas2 MFC Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2MfcAlarmTime>
    <Gas2MfcDefaultSetPoint Description="Gas2 MFC Default SetPoint">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2MfcDefaultSetPoint>
    <Gas2PressureMinValue Description="Gas2 Pressure Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2PressureMinValue>
    <Gas2PressureMaxValue Description="Gas2 Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2PressureMaxValue>
    <Gas2PressureWarningTime Description="Gas2 Pressure warning time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2PressureWarningTime>
    <Gas2PressureAlarmTime Description="Gas2 Pressure alarm time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>120</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2PressureAlarmTime>
    <Gas2MfcFlowRegulationFactor Description="Gas2 Mfc Flow Regulation Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas2MfcFlowRegulationFactor>
    <Gas3Name Description="Gas3 Name">
      <ViewLevel>0</ViewLevel>
      <Value>Gas3</Value>
      <Default>Gas3</Default>
    </Gas3Name>
    <Gas3Enable Description="Gas3 Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3Enable>
    <Gas3MfcN2Scale Description="Gas3 N2 Scale">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3MfcN2Scale>
    <Gas3MfcScaleFactor Description="Gas3 Scale Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3MfcScaleFactor>
    <Gas3MfcEnableAlarm Description="Gas3 MFC Enable Flow Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3MfcEnableAlarm>
    <Gas3MfcAlarmRange Description="Gas3 MFC Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3MfcAlarmRange>
    <Gas3MfcAlarmTime Description="Gas3 MFC Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3MfcAlarmTime>
    <Gas3MfcDefaultSetPoint Description="Gas3 MFC Default SetPoint">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3MfcDefaultSetPoint>
    <Gas3PressureMinValue Description="Gas3 Pressure Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3PressureMinValue>
    <Gas3PressureMaxValue Description="Gas3 Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3PressureMaxValue>
    <Gas3PressureWarningTime Description="Gas3 Pressure warning time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3PressureWarningTime>
    <Gas3PressureAlarmTime Description="Gas3 Pressure alarm time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>120</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3PressureAlarmTime>
    <Gas3MfcFlowRegulationFactor Description="Gas3 Mfc Flow Regulation Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas3MfcFlowRegulationFactor>
    <Gas4Name Description="Gas4 Name">
      <ViewLevel>0</ViewLevel>
      <Value>Gas4</Value>
      <Default>Gas4</Default>
    </Gas4Name>
    <Gas4Enable Description="Gas4 Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4Enable>
    <Gas4MfcN2Scale Description="Gas4 N2 Scale">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4MfcN2Scale>
    <Gas4MfcScaleFactor Description="Gas4 Scale Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4MfcScaleFactor>
    <Gas4MfcEnableAlarm Description="Gas4 MFC Enable Flow Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4MfcEnableAlarm>
    <Gas4MfcAlarmRange Description="Gas4 MFC Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4MfcAlarmRange>
    <Gas4MfcAlarmTime Description="Gas4 MFC Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4MfcAlarmTime>
    <Gas4MfcDefaultSetPoint Description="Gas4 MFC Default SetPoint">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4MfcDefaultSetPoint>
    <Gas4PressureMinValue Description="Gas4 Pressure Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4PressureMinValue>
    <Gas4PressureMaxValue Description="Gas4 Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4PressureMaxValue>
    <Gas4PressureWarningTime Description="Gas4 Pressure warning time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4PressureWarningTime>
    <Gas4PressureAlarmTime Description="Gas4 Pressure alarm time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>120</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4PressureAlarmTime>
    <Gas4MfcFlowRegulationFactor Description="Gas4 Mfc Flow Regulation Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas4MfcFlowRegulationFactor>
    <Gas5Name Description="Gas5 Name">
      <ViewLevel>0</ViewLevel>
      <Value>Gas5</Value>
      <Default>Gas5</Default>
    </Gas5Name>
    <Gas5Enable Description="Gas5 Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5Enable>
    <Gas5MfcN2Scale Description="Gas5 N2 Scale">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5MfcN2Scale>
    <Gas5MfcScaleFactor Description="Gas5 Scale Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5MfcScaleFactor>
    <Gas5MfcEnableAlarm Description="Gas5 MFC Enable Flow Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5MfcEnableAlarm>
    <Gas5MfcAlarmRange Description="Gas5 MFC Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5MfcAlarmRange>
    <Gas5MfcAlarmTime Description="Gas5 MFC Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5MfcAlarmTime>
    <Gas5MfcDefaultSetPoint Description="Gas5 MFC Default SetPoint">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5MfcDefaultSetPoint>
    <Gas5PressureMinValue Description="Gas5 Pressure Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5PressureMinValue>
    <Gas5PressureMaxValue Description="Gas5 Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5PressureMaxValue>
    <Gas5PressureWarningTime Description="Gas5 Pressure warning time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5PressureWarningTime>
    <Gas5PressureAlarmTime Description="Gas5 Pressure alarm time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>120</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5PressureAlarmTime>
    <Gas5MfcFlowRegulationFactor Description="Gas5 Mfc Flow Regulation Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </Gas5MfcFlowRegulationFactor>
    <CdaPressureMinValue Description="CDA Pressure Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </CdaPressureMinValue>
    <CdaPressureMaxValue Description="CDA Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </CdaPressureMaxValue>
    <CdaPressureWarningTime Description="CDA Pressure warning time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </CdaPressureWarningTime>
    <CdaPressureAlarmTime Description="CDA Pressure alarm time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>120</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </CdaPressureAlarmTime>
    <N2PressureMinValue Description="N2 Pressure Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </N2PressureMinValue>
    <N2PressureMaxValue Description="N2 Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>50</Value>
      <Default>50</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </N2PressureMaxValue>
    <N2PressureWarningTime Description="N2 Pressure warning time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </N2PressureWarningTime>
    <N2PressureAlarmTime Description="N2 Pressure alarm time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>120</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </N2PressureAlarmTime>
  </GasLineConfig>
  <VaporLineConfig Description="Vapor related configuration">
    <Vapor1Name Description="Vapor1 Name">
      <ViewLevel>0</ViewLevel>
      <Value>Vapor1</Value>
      <Default>Vapor1</Default>
    </Vapor1Name>
    <Vapor1Enable Description="Vapor1 Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor1Enable>
    <Vapor1EnableMfc Description="Vapor1 MFC Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor1EnableMfc>
    <Vapor1MfcN2Scale Description="Vapor1 N2 Scale">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor1MfcN2Scale>
    <Vapor1MfcScaleFactor Description="Vapor1 Scale Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor1MfcScaleFactor>
    <Vapor1MfcEnableAlarm Description="Vapor1 MFC Enable Flow Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor1MfcEnableAlarm>
    <Vapor1MfcAlarmRange Description="Vapor1 MFC Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor1MfcAlarmRange>
    <Vapor1MfcAlarmTime Description="Vapor1 MFC Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor1MfcAlarmTime>
    <Vapor1MfcDefaultSetPoint Description="Vapor1 MFC Default SetPoint">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor1MfcDefaultSetPoint>
    <Vapor2Name Description="Vapor2 Name">
      <ViewLevel>0</ViewLevel>
      <Value>Vapor2</Value>
      <Default>Vapor2</Default>
    </Vapor2Name>
    <Vapor2Enable Description="Vapor2 Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor2Enable>
    <Vapor2EnableMfc Description="Vapor2 MFC Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor2EnableMfc>
    <Vapor2MfcN2Scale Description="Vapor2 N2 Scale">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor2MfcN2Scale>
    <Vapor2MfcScaleFactor Description="Vapor2 Scale Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor2MfcScaleFactor>
    <Vapor2MfcEnableAlarm Description="Vapor2 MFC Enable Flow Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor2MfcEnableAlarm>
    <Vapor2MfcAlarmRange Description="Vapor2 MFC Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor2MfcAlarmRange>
    <Vapor2MfcAlarmTime Description="Vapor2 MFC Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor2MfcAlarmTime>
    <Vapor2MfcDefaultSetPoint Description="Vapor2 MFC Default SetPoint">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor2MfcDefaultSetPoint>
    <Vapor3Name Description="Vapor3 Name">
      <ViewLevel>0</ViewLevel>
      <Value>Vapor3</Value>
      <Default>Vapor3</Default>
    </Vapor3Name>
    <Vapor3Enable Description="Vapor3 Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor3Enable>
    <Vapor3EnableMfc Description="Vapor3 MFC Installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor3EnableMfc>
    <Vapor3MfcN2Scale Description="Vapor3 N2 Scale">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor3MfcN2Scale>
    <Vapor3MfcScaleFactor Description="Vapor3 Scale Factor">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor3MfcScaleFactor>
    <Vapor3MfcEnableAlarm Description="Vapor3 MFC Enable Flow Alarm">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor3MfcEnableAlarm>
    <Vapor3MfcAlarmRange Description="Vapor3 MFC Alarm Range">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor3MfcAlarmRange>
    <Vapor3MfcAlarmTime Description="Vapor3 MFC Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor3MfcAlarmTime>
    <Vapor3MfcDefaultSetPoint Description="Vapor3 MFC Default SetPoint">
      <ViewLevel>0</ViewLevel>
      <Unit>sccm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </Vapor3MfcDefaultSetPoint>
  </VaporLineConfig>
  <PressureControlConfig Description="pressure control related configuration">
    <IsIndependentControl Description="Is Independent Control">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </IsIndependentControl>
    <EnableBoosterPump Description="Is boost pump installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableBoosterPump>
    <EnableBoosterPumpFrequency Description="Is boost pump has frequency">
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>false</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableBoosterPumpFrequency>
    <EnableThrottleValve Description="Is TV Enabled">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableThrottleValve>
    <EnableDryPump Description="Is dry pump installed">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableDryPump>
    <ChamberPressureGaugePrecision Description="Chamber Pressure Gauge Precision">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>100000</Value>
      <Default>100000</Default>
      <RangeLowLimit>100</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </ChamberPressureGaugePrecision>
    <PumpEnableN2Pressure Description="Is Pump with N2 Pressure">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </PumpEnableN2Pressure>
    <PumpN2PressureMinValue Description="Pump N2 Pressure Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpN2PressureMinValue>
    <PumpN2PressureMaxValue Description="Pump N2 Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>1</Value>
      <Default>1</Default>
      <RangeLowLimit>0.01</RangeLowLimit>
      <RangeUpLimit>1</RangeUpLimit>
      <Precision>0</Precision>
    </PumpN2PressureMaxValue>
    <PumpN2PressureOutOfToleranceWarningTime Description="Pump N2 Pressure Out Of Tolerance Warning Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpN2PressureOutOfToleranceWarningTime>
    <PumpN2PressureOutOfToleranceAlarmTime Description="Pump N2 Pressure Out Of Tolerance Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>300</Value>
      <Default>300</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpN2PressureOutOfToleranceAlarmTime>
    <PumpEnableWaterFlow Description="Is Pump water flow enabled">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </PumpEnableWaterFlow>
    <PumpWaterFlowMinValue Description="Pump Water Flow Min Value">
      <ViewLevel>0</ViewLevel>
      <Unit>slm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpWaterFlowMinValue>
    <PumpWaterFlowMaxValue Description="Pump Water Flow Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>slm</Unit>
      <Value>999999</Value>
      <Default>999999</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpWaterFlowMaxValue>
    <PumpWaterFlowOutOfToleranceWarningTime Description="Pump Water Flow Out Of Tolerance Warning Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpWaterFlowOutOfToleranceWarningTime>
    <PumpWaterFlowOutOfToleranceAlarmTime Description="Pump Water Flow Out Of Tolerance Alarm Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>300</Value>
      <Default>300</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpWaterFlowOutOfToleranceAlarmTime>
    <PumpN2PurgeMaxTimeWhenPumpOff Description="Pump N2 Purge Time After Pump Off">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>600</Value>
      <Default>600</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpN2PurgeMaxTimeWhenPumpOff>
    <MinVacuumGaugePressureAfterVent Description="Min Vacuum Gauge Pressure After Vent">
      <ViewLevel>0</ViewLevel>
      <Unit>Torr</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>10</RangeLowLimit>
      <RangeUpLimit>1000</RangeUpLimit>
      <Precision>0</Precision>
    </MinVacuumGaugePressureAfterVent>
    <AtmPressure Description="Min  Pressure as ATM">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>500000</Value>
      <Default>500000</Default>
      <RangeLowLimit>10</RangeLowLimit>
      <RangeUpLimit>999999999</RangeUpLimit>
      <Precision>0</Precision>
    </AtmPressure>
  </PressureControlConfig>
  <ProcessConfig Description="process control related configuration">
    <ChamberPressureMaxValue Description="Chamber Pressure Max Value">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>100000</Value>
      <Default>100000</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>9999999</RangeUpLimit>
      <Precision>0</Precision>
    </ChamberPressureMaxValue>
    <EnablePurgeByTime>
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>false</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnablePurgeByTime>
    <PurgeTime>
      <ViewLevel>0</ViewLevel>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>0</RangeUpLimit>
      <Precision>0</Precision>
    </PurgeTime>
    <EnablePurgeByPressure>
      <ViewLevel>0</ViewLevel>
      <Value>false</Value>
      <Default>false</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnablePurgeByPressure>
    <PurgePumpTimeLimit Description="Purge Pump Time Limit">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>3000</RangeUpLimit>
      <Precision>0</Precision>
    </PurgePumpTimeLimit>
    <PurgeVentTimeLimit Description="Purge Vent Time Limit">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>120</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>3000</RangeUpLimit>
      <Precision>0</Precision>
    </PurgeVentTimeLimit>
    <PurgePumpStableTime Description="Purge Pump Stable Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>300</RangeUpLimit>
      <Precision>0</Precision>
    </PurgePumpStableTime>
    <PurgeVentStableTime Description="Purge Vent Stable Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>1</RangeLowLimit>
      <RangeUpLimit>300</RangeUpLimit>
      <Precision>0</Precision>
    </PurgeVentStableTime>
    <PurgePumpPressure Description="Purge Pump Pressure">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>100</Value>
      <Default>100</Default>
      <RangeLowLimit>10</RangeLowLimit>
      <RangeUpLimit>756000</RangeUpLimit>
      <Precision>0</Precision>
    </PurgePumpPressure>
    <PurgeVentPressure Description="Purge Vent Pressure">
      <ViewLevel>0</ViewLevel>
      <Unit>mTorr</Unit>
      <Value>700000</Value>
      <Default>700000</Default>
      <RangeLowLimit>100</RangeLowLimit>
      <RangeUpLimit>756000</RangeUpLimit>
      <Precision>0</Precision>
    </PurgeVentPressure>
    <PurgeCycleCount Description="Purge Count">
      <ViewLevel>0</ViewLevel>
      <Unit />
      <Value>3</Value>
      <Default>3</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>30</RangeUpLimit>
      <Precision>0</Precision>
    </PurgeCycleCount>
    <PurgeVentTime Description="Purge Vent Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </PurgeVentTime>
    <ElectrodeTemperatureAlarmRange Description="Electrode Temperature alarm range">
      <ViewLevel>0</ViewLevel>
      <Unit>℃</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </ElectrodeTemperatureAlarmRange>
    <ElectrodeTemperatureAlarmTime Description="Electrode temperature alarm time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </ElectrodeTemperatureAlarmTime>
    <ElectrodeTemperatureCriticalDefault Description="Electrode temperature default critical temperature">
      <ViewLevel>0</ViewLevel>
      <Unit>℃</Unit>
      <Value>80</Value>
      <Default>80</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </ElectrodeTemperatureCriticalDefault>
    <RecipeCycleCouterFlag Description="0, Reset the couter every day, 1, Reset the couter while recipe change">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>99</RangeUpLimit>
      <Precision>0</Precision>
    </RecipeCycleCouterFlag>
    <ProcessFinishedReminderFlag Description="0, Pop up the reminder dialog when process done, 1, Pop up when post process done">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>99</RangeUpLimit>
      <Precision>0</Precision>
    </ProcessFinishedReminderFlag>
  </ProcessConfig>
  <CoolingConfig Description="cooling control related configuration">
    <EnableElectrodeTcLeftAsControlTc Description="Left TC as control TC">
      <ViewLevel>0</ViewLevel>
      <Value>true</Value>
      <Default>true</Default>
      <RangeLowLimit>false</RangeLowLimit>
      <RangeUpLimit>false</RangeUpLimit>
      <Precision>0</Precision>
    </EnableElectrodeTcLeftAsControlTc>
    <ElectrodeTcDifferenceMaxValue Description="Max difference between monitor TC and control TC">
      <ViewLevel>0</ViewLevel>
      <Unit>℃</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </ElectrodeTcDifferenceMaxValue>
    <ElectrodeCriticalTemperatureManualProcess Description="Electrode Critical Temperature During Manual Process">
      <ViewLevel>0</ViewLevel>
      <Unit>℃</Unit>
      <Value>80</Value>
      <Default>80</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </ElectrodeCriticalTemperatureManualProcess>
    <ElectrodeOverTemperatureTime Description="Electrode Over Temperature Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </ElectrodeOverTemperatureTime>
    <ElectrodeCoolingWaterOpenTime Description="Electrode Cooling Water Open Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </ElectrodeCoolingWaterOpenTime>
    <RfCoolingValveMaxOpenTime Description="RF Cooling Valve Max Open Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>900</Value>
      <Default>900</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </RfCoolingValveMaxOpenTime>
    <PumpCoolingValveMaxOpenTime Description="Dry Pump Cooling Valve Max Open Time">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>600</Value>
      <Default>600</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </PumpCoolingValveMaxOpenTime>
    <WaterFlowPumpMinValue Description="pump cooling water flow min value">
      <ViewLevel>0</ViewLevel>
      <Unit>slm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterFlowPumpMinValue>
    <WaterFlowPumpMaxValue Description="pump cooling water flow max value">
      <ViewLevel>0</ViewLevel>
      <Unit>slm</Unit>
      <Value>999</Value>
      <Default>999</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterFlowPumpMaxValue>
    <WaterFlowPumpOutOfToleranceWarningTime Description="warning time if pump cooling water flow out of tolerance">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>15</Value>
      <Default>15</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterFlowPumpOutOfToleranceWarningTime>
    <WaterFlowPumpOutOfToleranceAlarmTime Description="alarm time if pump cooling water flow out of tolerance">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterFlowPumpOutOfToleranceAlarmTime>
    <WaterFlowRfMinValue Description="RF cooling water flow min value">
      <ViewLevel>0</ViewLevel>
      <Unit>slm</Unit>
      <Value>0</Value>
      <Default>0</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterFlowRfMinValue>
    <WaterFlowRfMaxValue Description="RF cooling water flow max value">
      <ViewLevel>0</ViewLevel>
      <Unit>slm</Unit>
      <Value>999</Value>
      <Default>999</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterFlowRfMaxValue>
    <WaterFlowRfOutOfToleranceWarningTime Description="warning time if RF cooling water flow out of tolerance">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>15</Value>
      <Default>15</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterFlowRfOutOfToleranceWarningTime>
    <WaterFlowRfOutOfToleranceAlarmTime Description="alarm time if RF cooling water flow out of tolerance">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>9999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterFlowRfOutOfToleranceAlarmTime>
    <WaterTemperatureInletMinValue Description="Inlet cooling water temperature min value">
      <ViewLevel>0</ViewLevel>
      <Unit>℃</Unit>
      <Value>10</Value>
      <Default>10</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterTemperatureInletMinValue>
    <WaterTemperatureInletMaxValue Description="Inlet cooling water temperature max value">
      <ViewLevel>0</ViewLevel>
      <Unit>℃</Unit>
      <Value>30</Value>
      <Default>30</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterTemperatureInletMaxValue>
    <WaterTemperatureInletOutOfToleranceWarningTime Description="warning time if Inlet cooling water temperature out of tolerance">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>15</Value>
      <Default>15</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterTemperatureInletOutOfToleranceWarningTime>
    <WaterTemperatureInletOutOfToleranceAlarmTime Description="alarm time if Inlet cooling water temperature out of tolerance">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>60</Value>
      <Default>60</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999</RangeUpLimit>
      <Precision>0</Precision>
    </WaterTemperatureInletOutOfToleranceAlarmTime>
  </CoolingConfig>
  <TransferConfig Description=" ">
    <InitAllTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </InitAllTimeout>
    <MotorPushBarInAcceleration Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInAcceleration>
    <MotorPushBarInDeceleration Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInDeceleration>
    <MotorPushBarInStartFrequency Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInStartFrequency>
    <MotorPushBarInDefaultServoSpeed Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInDefaultServoSpeed>
    <MotorPushBarInDefaultManualSpeed Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInDefaultManualSpeed>
    <MotorPushBarInServoOnTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInServoOnTimeout>
    <MotorPushBarInMoveTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInMoveTimeout>
    <MotorPushBarInStopTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInStopTimeout>
    <MotorPushBarInResetAlarmTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInResetAlarmTimeout>
    <MotorPushBarInHomeTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarInHomeTimeout>
    <MotorLoadStationInAcceleration Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInAcceleration>
    <MotorLoadStationInDeceleration Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInDeceleration>
    <MotorLoadStationInStartFrequency Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInStartFrequency>
    <MotorLoadStationInDefaultServoSpeed Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInDefaultServoSpeed>
    <MotorLoadStationInDefaultManualSpeed Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInDefaultManualSpeed>
    <MotorLoadStationInServoOnTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInServoOnTimeout>
    <MotorLoadStationInMoveTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInMoveTimeout>
    <MotorLoadStationInStopTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInStopTimeout>
    <MotorLoadStationInResetAlarmTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInResetAlarmTimeout>
    <MotorLoadStationInHomeTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationInHomeTimeout>
    <MotorPushBarChamberAcceleration Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberAcceleration>
    <MotorPushBarChamberDeceleration Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberDeceleration>
    <MotorPushBarChamberStartFrequency Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberStartFrequency>
    <MotorPushBarChamberDefaultServoSpeed Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberDefaultServoSpeed>
    <MotorPushBarChamberDefaultManualSpeed Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberDefaultManualSpeed>
    <MotorPushBarChamberServoOnTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberServoOnTimeout>
    <MotorPushBarChamberMoveTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberMoveTimeout>
    <MotorPushBarChamberStopTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberStopTimeout>
    <MotorPushBarChamberResetAlarmTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberResetAlarmTimeout>
    <MotorPushBarChamberHomeTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorPushBarChamberHomeTimeout>
    <MotorLoadStationOutAcceleration Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutAcceleration>
    <MotorLoadStationOutDeceleration Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutDeceleration>
    <MotorLoadStationOutStartFrequency Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutStartFrequency>
    <MotorLoadStationOutDefaultServoSpeed Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutDefaultServoSpeed>
    <MotorLoadStationOutDefaultManualSpeed Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutDefaultManualSpeed>
    <MotorLoadStationOutServoOnTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutServoOnTimeout>
    <MotorLoadStationOutMoveTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutMoveTimeout>
    <MotorLoadStationOutStopTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutStopTimeout>
    <MotorLoadStationOutResetAlarmTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutResetAlarmTimeout>
    <MotorLoadStationOutHomeTimeout Description=" ">
      <ViewLevel>0</ViewLevel>
      <Unit>s</Unit>
      <Value>180</Value>
      <Default>180</Default>
      <RangeLowLimit>0</RangeLowLimit>
      <RangeUpLimit>999999</RangeUpLimit>
      <Precision>0</Precision>
    </MotorLoadStationOutHomeTimeout>
  </TransferConfig>
</SCData>