123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497 |
- <?xml version="1.0" encoding="utf-8"?>
- <root>
- <!--
- Microsoft ResX Schema
-
- Version 2.0
-
- The primary goals of this format is to allow a simple XML format
- that is mostly human readable. The generation and parsing of the
- various data types are done through the TypeConverter classes
- associated with the data types.
-
- Example:
-
- ... ado.net/XML headers & schema ...
- <resheader name="resmimetype">text/microsoft-resx</resheader>
- <resheader name="version">2.0</resheader>
- <resheader name="reader">System.Resources.ResXResourceReader, System.Windows.Forms, ...</resheader>
- <resheader name="writer">System.Resources.ResXResourceWriter, System.Windows.Forms, ...</resheader>
- <data name="Name1"><value>this is my long string</value><comment>this is a comment</comment></data>
- <data name="Color1" type="System.Drawing.Color, System.Drawing">Blue</data>
- <data name="Bitmap1" mimetype="application/x-microsoft.net.object.binary.base64">
- <value>[base64 mime encoded serialized .NET Framework object]</value>
- </data>
- <data name="Icon1" type="System.Drawing.Icon, System.Drawing" mimetype="application/x-microsoft.net.object.bytearray.base64">
- <value>[base64 mime encoded string representing a byte array form of the .NET Framework object]</value>
- <comment>This is a comment</comment>
- </data>
-
- There are any number of "resheader" rows that contain simple
- name/value pairs.
-
- Each data row contains a name, and value. The row also contains a
- type or mimetype. Type corresponds to a .NET class that support
- text/value conversion through the TypeConverter architecture.
- Classes that don't support this are serialized and stored with the
- mimetype set.
-
- The mimetype is used for serialized objects, and tells the
- ResXResourceReader how to depersist the object. This is currently not
- extensible. For a given mimetype the value must be set accordingly:
-
- Note - application/x-microsoft.net.object.binary.base64 is the format
- that the ResXResourceWriter will generate, however the reader can
- read any of the formats listed below.
-
- mimetype: application/x-microsoft.net.object.binary.base64
- value : The object must be serialized with
- : System.Runtime.Serialization.Formatters.Binary.BinaryFormatter
- : and then encoded with base64 encoding.
-
- mimetype: application/x-microsoft.net.object.soap.base64
- value : The object must be serialized with
- : System.Runtime.Serialization.Formatters.Soap.SoapFormatter
- : and then encoded with base64 encoding.
- mimetype: application/x-microsoft.net.object.bytearray.base64
- value : The object must be serialized into a byte array
- : using a System.ComponentModel.TypeConverter
- : and then encoded with base64 encoding.
- -->
- <xsd:schema id="root" xmlns="" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:msdata="urn:schemas-microsoft-com:xml-msdata">
- <xsd:import namespace="http://www.w3.org/XML/1998/namespace" />
- <xsd:element name="root" msdata:IsDataSet="true">
- <xsd:complexType>
- <xsd:choice maxOccurs="unbounded">
- <xsd:element name="metadata">
- <xsd:complexType>
- <xsd:sequence>
- <xsd:element name="value" type="xsd:string" minOccurs="0" />
- </xsd:sequence>
- <xsd:attribute name="name" use="required" type="xsd:string" />
- <xsd:attribute name="type" type="xsd:string" />
- <xsd:attribute name="mimetype" type="xsd:string" />
- <xsd:attribute ref="xml:space" />
- </xsd:complexType>
- </xsd:element>
- <xsd:element name="assembly">
- <xsd:complexType>
- <xsd:attribute name="alias" type="xsd:string" />
- <xsd:attribute name="name" type="xsd:string" />
- </xsd:complexType>
- </xsd:element>
- <xsd:element name="data">
- <xsd:complexType>
- <xsd:sequence>
- <xsd:element name="value" type="xsd:string" minOccurs="0" msdata:Ordinal="1" />
- <xsd:element name="comment" type="xsd:string" minOccurs="0" msdata:Ordinal="2" />
- </xsd:sequence>
- <xsd:attribute name="name" type="xsd:string" use="required" msdata:Ordinal="1" />
- <xsd:attribute name="type" type="xsd:string" msdata:Ordinal="3" />
- <xsd:attribute name="mimetype" type="xsd:string" msdata:Ordinal="4" />
- <xsd:attribute ref="xml:space" />
- </xsd:complexType>
- </xsd:element>
- <xsd:element name="resheader">
- <xsd:complexType>
- <xsd:sequence>
- <xsd:element name="value" type="xsd:string" minOccurs="0" msdata:Ordinal="1" />
- </xsd:sequence>
- <xsd:attribute name="name" type="xsd:string" use="required" />
- </xsd:complexType>
- </xsd:element>
- </xsd:choice>
- </xsd:complexType>
- </xsd:element>
- </xsd:schema>
- <resheader name="resmimetype">
- <value>text/microsoft-resx</value>
- </resheader>
- <resheader name="version">
- <value>2.0</value>
- </resheader>
- <resheader name="reader">
- <value>System.Resources.ResXResourceReader, System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089</value>
- </resheader>
- <resheader name="writer">
- <value>System.Resources.ResXResourceWriter, System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089</value>
- </resheader>
- <data name="GlobalLableAutoMode" xml:space="preserve">
- <value>自动模式</value>
- </data>
- <assembly alias="System.Windows.Forms" name="System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089" />
- <data name="logo" type="System.Resources.ResXFileRef, System.Windows.Forms">
- <value>..\logo.ico;System.Drawing.Icon, System.Drawing, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b03f5f7f11d50a3a</value>
- </data>
- <data name="GlobalLableManualMode" xml:space="preserve">
- <value>手动模式</value>
- </data>
- <data name="RTLoadModuleFailed" xml:space="preserve">
- <value>系统初始化异常,请检查系统启动日志。\r\n</value>
- </data>
- <data name="ConfirmExit" xml:space="preserve">
- <value>是否确定退出系统?</value>
- </data>
- <data name="RTEntity_Invoke_Operation01" xml:space="preserve">
- <value>手动操作 {0}{1}</value>
- </data>
- <data name="RTEntity_Invoke_UndefinedOperation0" xml:space="preserve">
- <value>未定义的操作 {0}</value>
- </data>
- <data name="RTEntity_Invoke_ErrorDuringReadRecipeFile0" xml:space="preserve">
- <value>读取菜单文件失败 {0}</value>
- </data>
- <data name="RTEntity_Invoke_RecipeFileContentNotValid0" xml:space="preserve">
- <value>菜单文件无效, {0}</value>
- </data>
- <data name="RTEntity_Invoke_RecipeFileNotValid0" xml:space="preserve">
- <value>菜单文件无效, {0}</value>
- </data>
- <data name="RTEntity_Invoke_Invoke0Exception" xml:space="preserve">
- <value>调用方法{0} 出现异常,请查看日志文件详细记录</value>
- </data>
- <data name="PumpDownRoutine_Monitor_CheckDoorStatus" xml:space="preserve">
- <value>检查门的状态</value>
- </data>
- <data name="PumpDownRoutine_Monitor_CheckPumpStatus" xml:space="preserve">
- <value>检查泵的状态</value>
- </data>
- <data name="PumpDownRoutine_Monitor_CloseAllTheValves" xml:space="preserve">
- <value>关闭所有阀门</value>
- </data>
- <data name="PumpDownRoutine_Monitor_OpenPumpingValve" xml:space="preserve">
- <value>打开抽气阀门</value>
- </data>
- <data name="PumpDownRoutine_Monitor_WaitChamberPressureUntilBelow0" xml:space="preserve">
- <value>等待腔体压力低于{0}</value>
- </data>
- <data name="PumpDownRoutine_Monitor_PumpingDownCompleted" xml:space="preserve">
- <value>抽气结束</value>
- </data>
- <data name="PumpDownRoutine_PumpDownRoutine_PumpingDown" xml:space="preserve">
- <value>抽气</value>
- </data>
- <data name="IoSensorFactory_Product_BackPanelDoorIsOpened" xml:space="preserve">
- <value>背板门已打开</value>
- </data>
- <data name="IoSensorFactory_Product_ChamberDoorIsOpened" xml:space="preserve">
- <value>腔体门已打开</value>
- </data>
- <data name="IoSensorFactory_Product_PrecursorDoorIsOpened" xml:space="preserve">
- <value>液态源门已打开</value>
- </data>
- <data name="IoSensorFactory_Product_PumpDoorIsOpened" xml:space="preserve">
- <value>抽气泵门已打开</value>
- </data>
- <data name="CommonRoutine_CheckDoor_CheckChamberDoor" xml:space="preserve">
- <value>检查腔体门是否关闭</value>
- </data>
- <data name="CommonRoutine_CheckDoor_CheckBackpanelDoor" xml:space="preserve">
- <value>检查背板门是否关闭</value>
- </data>
- <data name="CommonRoutine_CheckDoor_ChamberDoorNotClosed" xml:space="preserve">
- <value>腔体门未关闭</value>
- </data>
- <data name="CommonRoutine_CheckDoor_BackpanelDoorNotClosed" xml:space="preserve">
- <value>背板门未关闭</value>
- </data>
- <data name="CommonRoutine_CloseAllValve_CanNotCloseValve01" xml:space="preserve">
- <value>不能关闭阀门{0}, {1}</value>
- </data>
- <data name="CommonRoutine_CloseAllValve_CanNotCloseValve0In1S" xml:space="preserve">
- <value>不能在{1} 秒内关闭阀门{0}</value>
- </data>
- <data name="CommonRoutine_OpenValve_Open0" xml:space="preserve">
- <value>打开{0}</value>
- </data>
- <data name="CommonRoutine_OpenValve_0CanNotBeOpen" xml:space="preserve">
- <value>打开{0}失败</value>
- </data>
- <data name="CommonRoutine_CloseValve_Close0" xml:space="preserve">
- <value>关闭{0}</value>
- </data>
- <data name="CommonRoutine_CloseValve_0CanNotBeClose" xml:space="preserve">
- <value>关闭{0}失败</value>
- </data>
- <data name="StopPumpRoutine_StopPumpRoutine_StopPump" xml:space="preserve">
- <value>停止抽气</value>
- </data>
- <data name="StopPumpRoutine_Monitor_CheckIfTheRfIsOn" xml:space="preserve">
- <value>检查射频是否打开</value>
- </data>
- <data name="StopPumpRoutine_Monitor_CheckIfTheGasStoppedFlowing" xml:space="preserve">
- <value>检查是否在流气</value>
- </data>
- <data name="StopPumpRoutine_Monitor_ClosePumpValve" xml:space="preserve">
- <value>关闭抽气阀门</value>
- </data>
- <data name="StopPumpRoutine_Monitor_StopPumpingCompleted" xml:space="preserve">
- <value>停止抽气,操作完成</value>
- </data>
- <data name="GasFlowRoutine_GasFlowRoutine_GasFlow" xml:space="preserve">
- <value>流气体</value>
- </data>
- <data name="GasFlowRoutine_Start_PumpingValveNotOpenOpenPumpValveFirst" xml:space="preserve">
- <value>抽气阀门没有打开</value>
- </data>
- <data name="GasFlowRoutine_Monitor_OpenValveAndFlowMfc" xml:space="preserve">
- <value>打开阀门,流气</value>
- </data>
- <data name="GasFlowRoutine_Monitor_GasFlowCompleted" xml:space="preserve">
- <value>流气操作完成</value>
- </data>
- <data name="GasFlowRoutine_CheckStable_GasFlowPressureNotStableIn0Seconds" xml:space="preserve">
- <value>在流气的{0}秒内压力没有稳定</value>
- </data>
- <data name="RfPowerRoutine_Monitor_RFPowerOn" xml:space="preserve">
- <value>打开射频</value>
- </data>
- <data name="RfPowerRoutine_Monitor_RfPowerCompleted" xml:space="preserve">
- <value>打开射频操作完成</value>
- </data>
- <data name="RfPowerRoutine_AbortRf_StopRFError" xml:space="preserve">
- <value>停止射频出错</value>
- </data>
- <data name="StopGasFlowRoutine_StopGasFlowRoutine_StopGasFlow" xml:space="preserve">
- <value>停止流气</value>
- </data>
- <data name="StopGasFlowRoutine_Monitor_CloseValveAndStopMfc" xml:space="preserve">
- <value>关闭阀门,停止流气</value>
- </data>
- <data name="StopGasFlowRoutine_Monitor_StopGasFlowCompleted" xml:space="preserve">
- <value>停止流气操作完成</value>
- </data>
- <data name="CyclePurgeRoutine_CyclePurgeRoutine_CyclePurge" xml:space="preserve">
- <value>吹扫</value>
- </data>
- <data name="CyclePurgeRoutine_Monitor_CheckIfThePumpValveOpen" xml:space="preserve">
- <value>检查抽气阀门是否打开</value>
- </data>
- <data name="CyclePurgeRoutine_Monitor_StartCyclePurge" xml:space="preserve">
- <value>开始吹扫</value>
- </data>
- <data name="CyclePurgeRoutine_Monitor_Pumping" xml:space="preserve">
- <value>抽气</value>
- </data>
- <data name="CyclePurgeRoutine_Monitor_Venting" xml:space="preserve">
- <value>充气</value>
- </data>
- <data name="CyclePurgeRoutine_Monitor_KeepInPumpingStatus" xml:space="preserve">
- <value>保持在抽气状态</value>
- </data>
- <data name="CyclePurgeRoutine_Monitor_CyclePurgeFinished" xml:space="preserve">
- <value>吹扫操作完成</value>
- </data>
- <data name="VentRountine_VentRountine_Vent" xml:space="preserve">
- <value>充气</value>
- </data>
- <data name="VentRountine_Monitor_CheckSensor" xml:space="preserve">
- <value>检查设备状态</value>
- </data>
- <data name="VentRountine_Monitor_PumpingCloseValve" xml:space="preserve">
- <value>抽气关闭阀门</value>
- </data>
- <data name="VentRountine_Monitor_PumpingOpenValve" xml:space="preserve">
- <value>抽气打开阀门</value>
- </data>
- <data name="VentRountine_Monitor_CloseAllTheValve" xml:space="preserve">
- <value>关闭所有阀门</value>
- </data>
- <data name="VentRountine_Monitor_VentDelay0SecondsBeforeOpenVentValve" xml:space="preserve">
- <value>打开充气阀门之前,等待{0}秒</value>
- </data>
- <data name="VentRountine_Monitor_VentValve" xml:space="preserve">
- <value>充气阀门</value>
- </data>
- <data name="VentRountine_Monitor_Vent0Seconds" xml:space="preserve">
- <value>充气{0}秒</value>
- </data>
- <data name="VentRountine_Monitor_VentCompleted" xml:space="preserve">
- <value>充气操作完成</value>
- </data>
- <data name="LeakCheckRoutine_LeakCheckRoutine_LeakCheck" xml:space="preserve">
- <value>检漏</value>
- </data>
- <data name="LeakCheckRoutine_Monitor_OpenGasFinalValve" xml:space="preserve">
- <value>打开气体总阀</value>
- </data>
- <data name="LeakCheckRoutine_Monitor_PumpDelay0Seconds" xml:space="preserve">
- <value>继续抽气{0}秒</value>
- </data>
- <data name="LeakCheckRoutine_Monitor_LeakCheckDelay0Seconds" xml:space="preserve">
- <value>检漏等待{0}秒 </value>
- </data>
- <data name="LeakCheckRoutine_Monitor_CalculateLeakCheckRate" xml:space="preserve">
- <value>计算漏率</value>
- </data>
- <data name="LeakCheckRoutine_Monitor_LeakCheckFinished" xml:space="preserve">
- <value>检漏操作完成</value>
- </data>
- <data name="LeakCheckRoutine_CalcLeakCheck_LeakCheckTime0StartPressure1StopPressure2LeakTime3LeakRate4" xml:space="preserve">
- <value>检漏时间: {0}, 开始压力: {1}, 结束压力: {2}, 检漏计时时间: {3}, 漏率: {4}</value>
- </data>
- <data name="Process_Process_Process" xml:space="preserve">
- <value>工艺运行</value>
- </data>
- <data name="Process_Exit_Recipe0RNStartTime1RNEndTime2RNTotalTime3" xml:space="preserve">
- <value>菜单文件:{0}
- 开始时间:{1}
- 结束时间:{2}
- 总时间:{3}</value>
- </data>
- <data name="Process_Exit_0RecipeCompletelyRun" xml:space="preserve">
- <value>{0} 工艺运行结束</value>
- </data>
- <data name="Process_Exit_0RecipeWasAborted" xml:space="preserve">
- <value>{0} 工艺被终止运行</value>
- </data>
- <data name="Process_Monitor_RecipeRunningStartStep01" xml:space="preserve">
- <value>工艺运行:开始第{0}步,({1})</value>
- </data>
- <data name="Process_PauseRecipe_工艺运行中当前第0步暂停" xml:space="preserve">
- <value>工艺运行中:当前第{0}步,暂停</value>
- </data>
- <data name="Process_AbortRecipe_UserAbortedRecipe" xml:space="preserve">
- <value>工艺终止运行</value>
- </data>
- <data name="CommonRoutine_End_0FinishedIn1Minitues" xml:space="preserve">
- <value>{0} 操作完成,用时{1}分钟</value>
- </data>
- <data name="CommonRoutine_CyclePump_PumpingPressureTo0MTor" xml:space="preserve">
- <value>压力抽到{0}毫托</value>
- </data>
- <data name="CommonRoutine_CycleVent_VentPressureTo0Mtor" xml:space="preserve">
- <value>充气压力到{0}毫托</value>
- </data>
- <data name="PreProcess_LoadRecipe_LoadRecipe0Failed" xml:space="preserve">
- <value>加载菜单文件'{0}'失败</value>
- </data>
- <data name="PreProcess_Monitor_CheckChamberPressure" xml:space="preserve">
- <value>检查腔体压力</value>
- </data>
- <data name="PreProcess_Monitor_PreprocessFinished" xml:space="preserve">
- <value>完成工艺准备</value>
- </data>
- <data name="PreProcess_Stop_Recipe0RNFailedReason1" xml:space="preserve">
- <value>运行工艺{0}
- 失败,原因:{1}</value>
- </data>
- <data name="PostProcess_Monitor_WaitFor10Seconds" xml:space="preserve">
- <value>等待10秒钟</value>
- </data>
- <data name="PostProcess_Monitor_RFPowerOff" xml:space="preserve">
- <value>关闭射频</value>
- </data>
- <data name="PostProcess_Monitor_StopAllTheGasFlow" xml:space="preserve">
- <value>停止流气</value>
- </data>
- <data name="PostProcess_Monitor_PumpDelay0Seconds" xml:space="preserve">
- <value>抽气等待{0}秒</value>
- </data>
- <data name="PostProcess_Monitor_VentDelay0Seconds" xml:space="preserve">
- <value>充气等待{0}秒</value>
- </data>
- <data name="PostProcess_Monitor_PostProcessFinished" xml:space="preserve">
- <value>工艺收尾结束</value>
- </data>
- <data name="PostProcess_Stop_0FailedAfterRunningRecipe" xml:space="preserve">
- <value>{0} 工艺收尾失败</value>
- </data>
- <data name="PostProcess_PostProcess_PostProcess" xml:space="preserve">
- <value>工艺收尾</value>
- </data>
- <data name="PMEntity_fProcessLoadRecipe_LoadingRecipeFile" xml:space="preserve">
- <value>加载菜单文件</value>
- </data>
- <data name="PMEntity_fProcessLoadRecipe_LoadingRecipeFileFailed" xml:space="preserve">
- <value>加载菜单文件失败</value>
- </data>
- <data name="PMEntity_fStartPreProcess_PreparingRunningRecipe" xml:space="preserve">
- <value>准备运行工艺</value>
- </data>
- <data name="PMEntity_fStartPreProcess_PreparingRunningRecipeFailed" xml:space="preserve">
- <value>准备运行工艺失败</value>
- </data>
- <data name="PMEntity_fPreProcess_RunRecipePumpingDown" xml:space="preserve">
- <value>工艺运行中,抽气</value>
- </data>
- <data name="PMEntity_fPreProcess_RunRecipePumpingDownFailed" xml:space="preserve">
- <value>工艺运行中,抽气失败</value>
- </data>
- <data name="PMEntity_fAbortPreProcess_RunRecipePumpingDownAborted" xml:space="preserve">
- <value>工艺运行中,抽气被终止</value>
- </data>
- <data name="PMEntity_fStartProcess_StartRunningRecipe" xml:space="preserve">
- <value>工艺运行中</value>
- </data>
- <data name="PMEntity_fStartProcess_RunRecipeFailed" xml:space="preserve">
- <value>工艺运行失败</value>
- </data>
- <data name="PMEntity_fProcess_RunningRecipe" xml:space="preserve">
- <value>工艺运行中</value>
- </data>
- <data name="PMEntity_fAbortProcess_RunningRecipeAborted" xml:space="preserve">
- <value>工艺运行中被终止</value>
- </data>
- <data name="PMEntity_fAbortProcess_RunRecipeAborted" xml:space="preserve">
- <value>工艺运行中被终止</value>
- </data>
- <data name="PMEntity_fSkipStep_RunRecipeSkipped" xml:space="preserve">
- <value>工艺跳到下一步</value>
- </data>
- <data name="PMEntity_fStartPostProcess_RunRecipePostProcess" xml:space="preserve">
- <value>开始工艺收尾</value>
- </data>
- <data name="PMEntity_fPostProcess_RunRecipeCyclePurge" xml:space="preserve">
- <value>工艺收尾,吹扫</value>
- </data>
- <data name="PMEntity_fPostProcess_RecipeCompleted" xml:space="preserve">
- <value>工艺完成</value>
- </data>
- <data name="PMEntity_fPostProcess_RunRecipeCyclePurgeError" xml:space="preserve">
- <value>工艺收尾,吹扫失败</value>
- </data>
- <data name="PMEntity_fAbortPostProcess_RecipeAborted" xml:space="preserve">
- <value>工艺收尾被终止</value>
- </data>
- <data name="CommonRoutine_CheckVAC_PumpBelow0" xml:space="preserve">
- <value>抽气到{0}毫托</value>
- </data>
- <data name="SCManager_SetItemValue_0SetpointShouldBeIn1And2SettingValue3IsNotValid" xml:space="preserve">
- <value>{0} 设定值{3}无效,应该介于{1}和{2}之间</value>
- </data>
- <data name="PreProcess_Monitor_SetRFMatchMode" xml:space="preserve">
- <value>设定RF Match模式 {0}</value>
- </data>
- <data name="IoEmo_Monitor_EmergencyOffButtonWasPressed" xml:space="preserve">
- <value>急停未恢复</value>
- </data>
- <data name="IoEmo_Monitor_MainContactorIsOff" xml:space="preserve">
- <value>主系统未上电</value>
- </data>
- <data name="IoStatistics_Initialize_ResetStatisticsOf0" xml:space="preserve">
- <value>{0}统计清零</value>
- </data>
- <data name="IoStatistics_Initialize_ResetStatisticsOf0FailedNotDefineConfigEntry" xml:space="preserve">
- <value>{0}统计清零失败,没有找到设置的定义</value>
- </data>
- <data name="PreProcess_Start_CanNotRunRecipeBecausePumpPMNeeded" xml:space="preserve">
- <value>不能运行工艺,泵需要做PM保养</value>
- </data>
- <data name="PreProcess_Start_CanNotRunRecipeBecauseRFPMNeeded" xml:space="preserve">
- <value>不能运行工艺,RF射频需要做PM保养</value>
- </data>
- <data name="PreProcess_Start_BasePressure0NotValid" xml:space="preserve">
- <value>底压设定值{0}无效</value>
- </data>
- <data name="PreProcess_Start_PumpDownLimit0NotValid" xml:space="preserve">
- <value>抽气报警时间 {0}无效</value>
- </data>
- <data name="SystemInOnlineRemoteModeCanNotSwitchToManualSwitchOffHostControlFirst" xml:space="preserve">
- <value>系统在OnlineRemote模式下,不能切换到手动,先停止Host控制</value>
- </data>
- <data name="HostControlModeChangeTo_stateNotifySystemChangeToAutoMode" xml:space="preserve">
- <value>系统切换到OnlineRemote模式,运行模式更新为自动运行</value>
- </data>
- </root>
|