GemModel.xml 16 KB

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  1. <?xml version="1.0" encoding="UTF-8"?>
  2. <Equipment xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema" persistence="false" schemaVersion="1.0.3" productInfo="SecsToHost.Net Compatible">
  3. <License licenseId="" licensePath="" />
  4. <Nameable id="JetPlasma" description="JetPlasma" locator="" alias="JetPlasma" make="JetPlasma" model="JetPlasma" softwareRev="1.0" />
  5. <GemConnection protocol="Hsms" defaultCommunicationState="Enabled" defaultControlState="Online" defaultOnlineSubState="Local" deviceId="0" multipleOpen="false" maxOpenTransactions="3">
  6. <HSMS connectionMode="Passive" linktestInterval="0" localIPAddress="127.0.0.1" localPortNumber="5021" remoteIPAddress="127.0.0.1" remotePortNumber="5020" T3Timeout="45" T5Timeout="10" T6Timeout="5" T7Timeout="10" T8Timeout="5" />
  7. <RS232 commPort="1" baudRate="9600" retry="3" t1="1" t2="10" t3="30" t4="10" />
  8. </GemConnection>
  9. <SecsItemFormats ackc5="Binary" ackc7="Binary" ackc7a="U1" ackc10="Binary" alid="U4" alcd="Binary" altx="Ascii" aled="Binary" attrid="Ascii" ccode="U2" ceid="U4" cpname="Ascii" dataid="U4" dsper="Ascii" errw7="Ascii" loc="Binary" mdln="Ascii" mid="Ascii" objid="Ascii" objspec="Ascii" objtype="Ascii" ppbody="Binary" ppid="Ascii" rcmd="Ascii" repgsz="U4" rptid="U4" seqnum="U2" softrev="Ascii" text="Ascii" tid="Binary" totsmp="U4" trid="U4" svid="U4" ecid="U4" ddid="U4" errcode="U1" opid="U1" length="U4" cmda="U1" ecmin="U4" ecmax="U4" ecdef="Ascii" idtyp="Binary" fnloc="U2" ffrot="U2" orloc="Binary" rpsel="U1" dutms="Ascii" xdies="U4" ydies="U4" rowct="U4" colct="U4" nulbc_binlt_bcequ="U1" prdct="U1" praxi="Binary" smpln="U4" mlcl="U8" refp="I2" />
  10. <Logger logLevel="Info" rolloverSize="10000000" maxBytes="100000" messageLengthLimit="1048576" />
  11. <Clock timeFormat="yymmddhhmmss" />
  12. <RemoteCommand allowLocalMode="false">
  13. <S2F21>
  14. <S2F21Command name="100" logicalName="START" description=" " />
  15. <S2F21Command name="101" logicalName="PAUSE" description=" " />
  16. <S2F21Command name="102" logicalName="STOP" description=" " />
  17. <S2F21Command name="103" logicalName="PP-SELECT" description=" " />
  18. <S2F21Command name="104" logicalName="RESUME" description=" " />
  19. <S2F21Command name="105" logicalName="ABORT" description=" " />
  20. </S2F21>
  21. <S2F41>
  22. <S2F41Command name="Start" logicalName="Start" description=" ">
  23. </S2F41Command>
  24. <S2F41Command name="Pause" logicalName="Pause" description=" " />
  25. <S2F41Command name="Resume" logicalName="Resume" description=" " />
  26. <S2F41Command name="Abort" logicalName="Abort" description=" " />
  27. <S2F41Command name="LotComplete" logicalName="LotComplete" description=" " />
  28. <S2F41Command name="GoRemote" logicalName="GoRemote" description=" " />
  29. <S2F41Command name="GoLocal" logicalName="GoLocal" description=" " />
  30. <S2F41Command name="Unclamp" logicalName="Unclamp" description=" " />
  31. <S2F41Command name="ReadID" logicalName="ReadID" description=" " />
  32. <S2F41Command name="Unload" logicalName="Unload" description=" " />
  33. <S2F41Command name="ScanSlot" logicalName="ScanSlot" description=" " />
  34. </S2F41>
  35. <S2F49>
  36. <S2F49Command name="GOREMOTE" logicalName="GOREMOTE" description="">
  37. </S2F49Command>
  38. <S2F49Command name="PP-SELECT" logicalName="PP-SELECT" description=" ">
  39. </S2F49Command>
  40. <S2F49Command name="START" logicalName="START" description=" ">
  41. </S2F49Command>
  42. <S2F49Command name="STOP" logicalName="STOP" description=" ">
  43. </S2F49Command>
  44. <S2F49Command name="ABORT" logicalName="ABORT" description=" ">
  45. </S2F49Command>
  46. <S2F49Command name="PAUSE" logicalName="PAUSE" description=" ">
  47. </S2F49Command>
  48. <S2F49Command name="RESUME" logicalName="RESUME" description=" ">
  49. </S2F49Command>
  50. <S2F49Command name="Start_Transfer" logicalName="Start_Transfer" description=" " />
  51. </S2F49>
  52. </RemoteCommand>
  53. <StatusVariables>
  54. <SVID id="1" valueType="List" logicalName="AlarmsEnabled" value="" eventTrigger="" units="" description=" " isArray="false" />
  55. <SVID id="2" valueType="List" logicalName="AlarmsSet" value="" eventTrigger="" description=" " isArray="false" />
  56. <SVID id="3" valueType="Ascii" logicalName="Clock" value="" eventTrigger="" description=" " isArray="false" />
  57. <SVID id="4" valueType="U4" logicalName="ControlState" value="1" eventTrigger="" description=" " isArray="false" />
  58. <SVID id="5" valueType="List" logicalName="EventsEnabled" value="" eventTrigger="" description=" " isArray="false" />
  59. <SVID id="6" valueType="Ascii" logicalName="PPExecName" value="PPExecName" eventTrigger="" description=" " isArray="false" />
  60. <SVID id="7" valueType="U1" logicalName="PreviousProcessState" value="0" eventTrigger="" description=" " isArray="false" />
  61. <SVID id="8" valueType="U1" logicalName="ProcessState" value="0" eventTrigger="" description=" " isArray="false" />
  62. <SVID id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" description=" " isArray="false" />
  63. <SVID id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" description=" " isArray="false" />
  64. <SVID id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" description=" " isArray="false" />
  65. <SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" description=" " isArray="false" />
  66. <SVID id="13" valueType="Ascii" logicalName="SpoolState" value="1" eventTrigger="" description=" " isArray="false" />
  67. <SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="0" eventTrigger="" description=" " isArray="false">
  68. </SVID>
  69. <SVID id="1101" valueType="U4" logicalName="EquipmentMode" value="" units="" description=" " eventTrigger=" " />
  70. <SVID id="1102" valueType="U4" logicalName="EquipmentStatus" value="" units="" description=" " eventTrigger=" " />
  71. <SVID id="1103" valueType="List" logicalName="RecipeList" value="" units="" description=" " eventTrigger=" " />
  72. <SVID id="1201" valueType="Ascii" logicalName="System.IoPressureMeter.PressureMeterChamber.Feedback" value="" units="" description=" " eventTrigger=" " />
  73. <SVID id="1202" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPosition" value="" units="" description=" " eventTrigger=" " />
  74. <SVID id="1203" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPositionSetPoint" value="" units="" description=" " eventTrigger=" " />
  75. <SVID id="1204" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPressure" value="" units="" description=" " eventTrigger=" " />
  76. <SVID id="1205" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPressureSetPoint" value="" units="" description=" " eventTrigger=" " />
  77. <SVID id="1206" valueType="Ascii" logicalName="System.IoPump.MainPump.N2PressureValue" value="" units="" description=" " eventTrigger=" " />
  78. <SVID id="1207" valueType="Ascii" logicalName="System.IoPump.MainPump.WaterFlowValue" value="" units="" description=" " eventTrigger=" " />
  79. <SVID id="1208" valueType="Ascii" logicalName="System.IoRf.Rf.RFSetPoint" value="" units="" description=" " eventTrigger=" " />
  80. <SVID id="1209" valueType="Ascii" logicalName="System.IoRf.Rf.RFForwardPower" value="" units="" description=" " eventTrigger=" " />
  81. <SVID id="1210" valueType="Ascii" logicalName="System.IoRf.Rf.RFReflectPower" value="" units="" description=" " eventTrigger=" " />
  82. <SVID id="1211" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC1Feedback" value="" units="" description=" " eventTrigger=" " />
  83. <SVID id="1212" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC2Feedback" value="" units="" description=" " eventTrigger=" " />
  84. <SVID id="1213" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC1SetPoint" value="" units="" description=" " eventTrigger=" " />
  85. <SVID id="1214" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC2SetPoint" value="" units="" description=" " eventTrigger=" " />
  86. <SVID id="1215" valueType="Ascii" logicalName="System.IoRf.Rf.RFFrequency" value="" units="" description=" " eventTrigger=" " />
  87. <SVID id="1216" valueType="Ascii" logicalName="System.IoRf.Rf.RFDuty" value="" units="" description=" " eventTrigger=" " />
  88. <SVID id="1217" valueType="Ascii" logicalName="System.IoMfc.MfcGas1.FeedBack" value="" units="" description=" " eventTrigger=" " />
  89. <SVID id="1218" valueType="Ascii" logicalName="System.IoMfc.MfcGas1.SetPoint" value="" units="" description=" " eventTrigger=" " />
  90. <SVID id="1219" valueType="Ascii" logicalName="System.IoMfc.MfcGas2.FeedBack" value="" units="" description=" " eventTrigger=" " />
  91. <SVID id="1220" valueType="Ascii" logicalName="System.IoMfc.MfcGas2.SetPoint" value="" units="" description=" " eventTrigger=" " />
  92. <SVID id="1221" valueType="Ascii" logicalName="System.IoMfc.MfcGas3.FeedBack" value="" units="" description=" " eventTrigger=" " />
  93. <SVID id="1222" valueType="Ascii" logicalName="System.IoMfc.MfcGas3.SetPoint" value="" units="" description=" " eventTrigger=" " />
  94. <SVID id="1223" valueType="Ascii" logicalName="System.IoMfc.MfcGas4.FeedBack" value="" units="" description=" " eventTrigger=" " />
  95. <SVID id="1224" valueType="Ascii" logicalName="System.IoMfc.MfcGas4.SetPoint" value="" units="" description=" " eventTrigger=" " />
  96. <SVID id="1225" valueType="Ascii" logicalName="System.IoMfc.MfcGas5.FeedBack" value="" units="" description=" " eventTrigger=" " />
  97. <SVID id="1226" valueType="Ascii" logicalName="System.IoMfc.MfcGas5.SetPoint" value="" units="" description=" " eventTrigger=" " />
  98. </StatusVariables>
  99. <EquipmentConstants suppressECMinMaxType="false">
  100. <ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="2" units="" description="" eventTrigger=" " isArray="false" />
  101. <ECID id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
  102. <ECID id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
  103. <ECID id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
  104. <ECID id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
  105. <ECID id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="1" units="" description="" eventTrigger=" " isArray="false" />
  106. </EquipmentConstants>
  107. <DataVariables>
  108. <DVID id="3001" valueType="U4" logicalName="EventLimit" value="0" eventTrigger="" description=" " isArray="false" />
  109. <DVID id="3002" valueType="U4" logicalName="LimitVariable" value="0" eventTrigger="" description=" " isArray="false" />
  110. <DVID id="3003" valueType="Ascii" logicalName="PPChangeName" value="" eventTrigger="" description=" " isArray="false" />
  111. <DVID id="3004" valueType="U2" logicalName="PPChangeStatus" value="1" eventTrigger="" description=" " isArray="false" />
  112. <DVID id="3005" valueType="Binary" logicalName="TransitionType" value="0" eventTrigger="" description=" " isArray="false" />
  113. <DVID id="3006" valueType="U4" logicalName="AlarmID" eventTrigger="" description=" " isArray="false" />
  114. <DVID id="3007" valueType="U4" logicalName="ECChangedID" value="" eventTrigger="" description=" " isArray="false" />
  115. <DVID id="3101" valueType="Ascii" logicalName="EventName" value="" eventTrigger="" description=" " isArray="false" />
  116. <DVID id="3102" valueType="Ascii" logicalName="LotId" value="" eventTrigger="" description=" " isArray="false" />
  117. <DVID id="3103" valueType="Ascii" logicalName="RecipeId" value="" eventTrigger="" description=" " isArray="false" />
  118. <DVID id="3104" valueType="Ascii" logicalName="JobId" value="" eventTrigger="" description=" " isArray="false" />
  119. </DataVariables>
  120. <DataCollections useAnnotatedEvent="false">
  121. <RPTIDs>
  122. <RPTID id="1" logicalName="ControlReport">
  123. <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
  124. <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
  125. </RPTID>
  126. <RPTID id="2" logicalName="ProcessingReport">
  127. <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
  128. <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
  129. </RPTID>
  130. <RPTID id="4" logicalName="ProcessingStateChangedReport">
  131. <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
  132. <ReportVariable id="8" varType="StatusVariable" logicalName="ProcessState" />
  133. <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
  134. </RPTID>
  135. <RPTID id="5" logicalName="ECChangedReport">
  136. <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
  137. </RPTID>
  138. <RPTID id="6" logicalName="PPChangedReport">
  139. <ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
  140. <ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
  141. </RPTID>
  142. <RPTID id="7" logicalName="PPSelectedReport">
  143. <ReportVariable id="6" varType="StatusVariable" logicalName="PPExecName" />
  144. </RPTID>
  145. <RPTID id="8" logicalName="AlarmEventReport">
  146. <ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
  147. <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
  148. <ReportVariable id="2" varType="StatusVariable" logicalName="AlarmsSet" />
  149. </RPTID>
  150. </RPTIDs>
  151. <CEIDs>
  152. <CEID id="1" logicalName="EquipmentOFFLINE" description=" " enabled="false">
  153. <RPTID id="1" logicalName="ControlReport" />
  154. </CEID>
  155. <CEID id="2" logicalName="ControlStateLOCAL" description=" " enabled="false">
  156. <RPTID id="1" logicalName="ControlReport" />
  157. </CEID>
  158. <CEID id="3" logicalName="ControlStateREMOTE" description=" " enabled="false">
  159. <RPTID id="1" logicalName="ControlReport" />
  160. </CEID>
  161. <CEID id="4" logicalName="ProcessingStarted" description=" " enabled="false">
  162. <RPTID id="2" logicalName="ProcessingReport" />
  163. </CEID>
  164. <CEID id="5" logicalName="ProcessingCompleted" description=" " enabled="false">
  165. <RPTID id="2" logicalName="ProcessingReport" />
  166. </CEID>
  167. <CEID id="6" logicalName="ProcessingStopped" description=" " enabled="false">
  168. <RPTID id="2" logicalName="ProcessingReport" />
  169. </CEID>
  170. <CEID id="7" logicalName="ProcessingStateChanged" description=" " enabled="false">
  171. <RPTID id="4" logicalName="ProcessingStateChangedReport" />
  172. </CEID>
  173. <CEID id="8" logicalName="EquipmentConstantChanged" description=" " enabled="false">
  174. <RPTID id="5" logicalName="ECChangedReport" />
  175. </CEID>
  176. <CEID id="9" logicalName="ProcessProgramChanged" description=" " enabled="false">
  177. <RPTID id="6" logicalName="PPChangedReport" />
  178. </CEID>
  179. <CEID id="10" logicalName="ProcessProgramSelected" description=" " enabled="false">
  180. <RPTID id="7" logicalName="PPSelectedReport" />
  181. </CEID>
  182. <CEID id="11" logicalName="SpoolingActivated" description=" " enabled="false" />
  183. <CEID id="12" logicalName="SpoolingDeactivated" description=" " enabled="false" />
  184. <CEID id="13" logicalName="SpoolingFailed" description=" " enabled="false" />
  185. <CEID id="101" logicalName="CarrierLoaded" description=" " enabled="false" />
  186. <CEID id="102" logicalName="LotStart" description=" " enabled="false" />
  187. <CEID id="103" logicalName="LotFinished" description=" " enabled="false" />
  188. <CEID id="104" logicalName="CarrierUnloaded" description=" " enabled="false" />
  189. <CEID id="105" logicalName="EquipmentStatusChanged" description=" " enabled="false" />
  190. <CEID id="106" logicalName="EquipmentModeChanged" description=" " enabled="false" />
  191. </CEIDs>
  192. </DataCollections>
  193. <Alarms>
  194. </Alarms>
  195. </Equipment>