Triton160/Triton160RT/Config/DeviceModel.Hz.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="Triton160" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
  <IoValves>
    <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="SV1"
             unit=""
             isNc="true"
             isDefaultOpen="false"
             diOpen="DI_MFC1_valve_state_fb"
             doOpen="DO_MFC1_valve__"
              diCloseSensor=""
              diOpenSensor=""/>
    <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="SV2"
             unit="" isNc="true"
             isDefaultOpen="false"
             diOpen="DI_MFC2_valve_state_fb"
             doOpen="DO_MFC2_valve"
             diCloseSensor=""
              diOpenSensor=""/>
    <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="SV3"
             unit=""
             isNc="true"
             isDefaultOpen="false"
             diOpen="DI_MFC3_valve_state_fb"
             doOpen="DO_MFC3_valve"
             diCloseSensor=""
              diOpenSensor=""/>
    <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="SV4"
             unit=""
             isNc="true"
             isDefaultOpen="false"
             diOpen="DI_MFC4_valve_state_fb"
             doOpen="DO_MFC4_valve"
             diCloseSensor=""
              diOpenSensor=""/>
    <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="SV5"
             unit=""
             isNc="true"
             isDefaultOpen="false"
             diOpen="DI_MFC5_valve_state_fb"
             doOpen="DO_MFC5_valve"
             diCloseSensor=""
              diOpenSensor=""/>

    <IoValve id="ValveChamberPurge" display="Chamber purge valve" schematicId="SV6"
             unit=""
             isNc="true"
             isDefaultOpen="false"
             diOpen="DI_Chamber_purge_valve_state_fb"
             doOpen="DO_Chamber_purge_valve"
             diCloseSensor=""
              diOpenSensor=""/>

    <IoValve id="ValveProcessGasFinal" display="Process gas final valve" schematicId="PV1"
             unit=""
             isNc="true"
             isDefaultOpen="false"
             diOpen="DI_Process_gas_final_valve_state_fb"
             doOpen="DO_Process_gas_final_valve"
             diCloseSensor=""
              diOpenSensor=""/>

    <IoValve id="ValveChamberPumping" display="Chamber pumping valve" schematicId="PV2"
             unit=""
             isNc="true"
             isDefaultOpen="false"
             diOpen="DI_Pumping_valve_state_fb"
             doOpen="DO_Pumping_valve_"
             diCloseSensor=""
              diOpenSensor=""/>

    <IoValve id="ValveChamberVent" display="Chamber vent valve" schematicId="PV3"
             unit=""
             isNc="true"
             isDefaultOpen="false"
             diOpen="DI_Chamber_vent_valve_state_fb"
             doOpen="DO_Chamber_vent_valve"
             diCloseSensor=""
              diOpenSensor=""/>
  </IoValves>

  <IoMfcs>
    <IoMfc id="MfcGas1" display="" schematicId="MFC1" unit="sccm"
           aiFlow="AI_MFC1_real_flow__fb"
           aoFlow="AO_MFC1_flow_setpoint"
            diOffline=""
           scGasName="GasLineConfig_Gas1Name"
           scEnable="GasLineConfig_Gas1Enable"
           scN2Scale="GasLineConfig_Gas1MfcN2Scale"
           scScaleFactor="GasLineConfig_Gas1MfcScaleFactor"
           scAlarmRange="GasLineConfig_Gas1MfcAlarmRange"
           scEnableAlarm="GasLineConfig_Gas1MfcEnableAlarm"
           scAlarmTime="GasLineConfig_Gas1MfcAlarmTime"
           aoRange="AO_MFC1_actual_range"
            scFlowRegulationFactor="GasLineConfig_Gas1MfcFlowRegulationFactor"
            scDefaultSetPoint=""/>
    <IoMfc id="MfcGas2" display="" schematicId="MFC2" unit="sccm"
           aiFlow="AI_MFC2_real_flow_fb"
           aoFlow="AO_MFC2_flow_setpoint"
            diOffline=""
           scGasName="GasLineConfig_Gas2Name"
           scEnable="GasLineConfig_Gas2Enable"
           scN2Scale="GasLineConfig_Gas2MfcN2Scale"
           scScaleFactor="GasLineConfig_Gas2MfcScaleFactor"
           scAlarmRange="GasLineConfig_Gas2MfcAlarmRange"
           scEnableAlarm="GasLineConfig_Gas2MfcEnableAlarm"
           scAlarmTime="GasLineConfig_Gas2MfcAlarmTime"
           aoRange="AO_MFC2_actual_range"
           
           scFlowRegulationFactor="GasLineConfig_Gas2MfcFlowRegulationFactor"
            scDefaultSetPoint=""/>
    <IoMfc id="MfcGas3" display="" schematicId="MFC3" unit="sccm"
           aiFlow="AI_MFC3_real_flow_fb"
           aoFlow="AO_MFC3_flow_setpoint"
            diOffline=""
           scGasName="GasLineConfig_Gas3Name"
           scEnable="GasLineConfig_Gas3Enable"
           scN2Scale="GasLineConfig_Gas3MfcN2Scale"
           scScaleFactor="GasLineConfig_Gas3MfcScaleFactor"
           scAlarmRange="GasLineConfig_Gas3MfcAlarmRange"
           scEnableAlarm="GasLineConfig_Gas3MfcEnableAlarm"
           scAlarmTime="GasLineConfig_Gas3MfcAlarmTime"
           aoRange="AO_MFC3_actual_range"
           
           scFlowRegulationFactor="GasLineConfig_Gas3MfcFlowRegulationFactor"
            scDefaultSetPoint=""/>
    <IoMfc id="MfcGas4" display="" schematicId="MFC4" unit="sccm"
           aiFlow="AI_MFC4_real_flow_fb"
           aoFlow="AO_MFC4_flow_setpoint"
            diOffline=""
           scGasName="GasLineConfig_Gas4Name"
           scEnable="GasLineConfig_Gas4Enable"
           scN2Scale="GasLineConfig_Gas4MfcN2Scale"
           scScaleFactor="GasLineConfig_Gas4MfcScaleFactor"
           scAlarmRange="GasLineConfig_Gas4MfcAlarmRange"
           scEnableAlarm="GasLineConfig_Gas4MfcEnableAlarm"
           scAlarmTime="GasLineConfig_Gas4MfcAlarmTime"
           aoRange="AO_MFC4_actual_range"
           
           scFlowRegulationFactor="GasLineConfig_Gas4MfcFlowRegulationFactor"
            scDefaultSetPoint=""/>
    <IoMfc id="MfcGas5" display="" schematicId="MFC5" unit="sccm"
           aiFlow="AI_MFC5_real_flow_fb"
           aoFlow="AO_MFC5_flow_setpoint"
            diOffline=""
           scGasName="GasLineConfig_Gas5Name"
           scEnable="GasLineConfig_Gas5Enable"
           scN2Scale="GasLineConfig_Gas5MfcN2Scale"
           scScaleFactor="GasLineConfig_Gas5MfcScaleFactor"
           scAlarmRange="GasLineConfig_Gas5MfcAlarmRange"
           scEnableAlarm="GasLineConfig_Gas5MfcEnableAlarm"
           scAlarmTime="GasLineConfig_Gas5MfcAlarmTime"
           aoRange="AO_MFC5_actual_range"
           
           scFlowRegulationFactor="GasLineConfig_Gas5MfcFlowRegulationFactor"
            scDefaultSetPoint=""/>
  </IoMfcs>

  <IoPressureMeters>
    <IoPressureMeter id="PressureMeterChamber" display="Chamber Pressure"  schematicId="" unit="mTorr"
                     aiPressure="AI_Chamber_real_pressure_fb_"
                      diGaugeFail=""
                     scPrecision="PressureControlConfig_ChamberPressureGaugePrecision"
                      />
  </IoPressureMeters>

  <IoPumps>
    <IoPump id="MainPump" display="Main Pump"  schematicId="MainPump" unit="mTorr"
            diBreakerState=""
            diRunning="DI_Lever1_pump_running"
            diOverloadAlarm="DI_Lever1_pump_overload"
            diStart="DI_Lever1_pump_start_bt"
            diStop="DI_Lever1_pump_stop_bt"
            diPumpTempWaring="DI_Lever1_pump_temp_warnning"
            diPumpTempAlarm="DI_Lever1_pump_temp_alarm"
	        diLever1PumpCBAlarm="DI_Lever1_pump_CB_alarm"
			diROOTSPumpCBAlarm="DI_ROOTS_pump_CB_alarm"
            diN2Alarm="DI_Pump_N2_pressure_alam"
            diWaterFlowAlarm="DI_Pump_water_flow_alam"
            
            doWaterFlowAlarm="DO_Pump_water_flow_alarm_"
            doN2PressureAlarm="DO_N2_pressure_alarm"
            
            aiWaterFlow=""
            aiN2Pressure=""
             aoN2PressureAlarmMaxValue="AO_N2_pressure_alarm_setpoint_Max_"
             aoN2PressureAlarmMinValue="AO_N2_pressure_alarm_setpoint_Min_"
             aoWaterFlowAlarmMaxValue="AO_Water_flow_alarm_setpoint_Max_"
             aoWaterFlowAlarmMinValue="AO_Water_flow_alarm_setpoint_Min_"
            
            scEnableDryPump="PressureControlConfig_EnableDryPump"
            
            scEnableWaterFlow="PressureControlConfig_PumpEnableWaterFlow"
            scWaterFlowMinValue="PressureControlConfig_PumpWaterFlowMinValue"
            scWaterFlowMaxValue="PressureControlConfig_PumpWaterFlowMaxValue"
            scWaterFlowOutOfToleranceWarningTime="PressureControlConfig_PumpWaterFlowOutOfToleranceWarningTime"
            scWaterFlowOutOfToleranceAlarmTime="PressureControlConfig_PumpWaterFlowOutOfToleranceAlarmTime"
            
            scEnableN2Pressure="PressureControlConfig_PumpEnableN2Pressure"
            scN2PressureMinValue="PressureControlConfig_PumpN2PressureMinValue"
            scN2PressureMaxValue="PressureControlConfig_PumpN2PressureMaxValue"
            scN2PressureOutOfToleranceWarningTime="PressureControlConfig_PumpN2PressureOutOfToleranceWarningTime"
            scN2PressureOutOfToleranceAlarmTime="PressureControlConfig_PumpN2PressureOutOfToleranceAlarmTime"
            />
  </IoPumps>

  <IoBoostPumps>
    <IoBoostPump id="BoostPump" display="Boost Pump"
            schematicId="BoostPump"
            unit="mTorr"
                  aiFrequency=""
                  diBreakerState=""
                 
        scPressureSetPointMaxValue="System_BoostPumpPressureSetPointMaxValue"
                  scEnableFrequency="PressureControlConfig_EnableBoosterPumpFrequency"
        diBoosterInvAlarm="DI_Booster_Alarm"
        diBoosterInvRun="DI_Booster_Running"
                 diBoosterPowerOn="DI_Booster_pump_power_on_"
        aoBoosterEnable="AO_booster_pressure_control_enable"
        aoBoosterSetPoint="AO_booster_pressure_control_setpoint"
            />
  </IoBoostPumps>

  <IoRfs>
    <IoRf  id="Rf"
           display="RF Generator"
           schematicId=""
           unit=""
           doOnOff="DO_RF_on_off"
           diOnOffFeedback="DI_RF_power_state_fb"
           diInterlock="DI_RF_hardware_interlock"
           diOverTemp ="DI_RF_over_temp_"
		   diRFCBAlarm="DI_RF_CB_alarm"
            aiCurrent=""
            aiVoltage=""
            diBreakerState=""
            diIArc=""
            diOffline=""

            diVArc=""
           
            doWaterFlowAlarm=""
            doWaterFlowWarning=""
  
           aoMatchMode="AO_match_work_mode_setpoint"
           aoMatchPresetMode="AO_match_hold_or_preset_setpoint"
           aoMatchPositionC1="AO_match_C1_position_setpoint"
           aoMatchPositionC2="AO_match_C2_position_setpoint"
           aoWorkMode="AO_RF_work_mode_set"
           aoFrequency="AO_RF_Pulsing_Frequency_setpoint"
           aoDuty="AO_RF_Pulsing_duty_cycle_setpoint"
           aoPower="AO_RF_power_setpoint"
            aoCoefficient="AO_RF_match_coefficient"
           
            aiWaterFlow=""
           aiForwardPower="AI_RF_forward_power_fb"
           aiReflectPower="AI_RF_reflect_power_fb"
           aiMatchMode ="AI_match_work_mode_fb"
           aiMatchPresetMode="AI_match_hold_or_preset_fb"
           aiMatchPositionC1="AI_match_c1_positon_fb"
           aiMatchPositionC2="AI_match_c2_positon_fb"
           
          scMatchMode="System_MatchMode"
           scMatchPositionC1="System_MatchPositionC1"
           scMatchPositionC2="System_MatchPositionC2"
           
           scPowerAlarmRange="System_RfPowerAlarmRange"
           scPowerAlarmTime="System_RfPowerAlarmTime"
            scReflectPowerAlarmRange="System_RfReflectPowerAlarmRange"
           scReflectPowerAlarmTime="System_RfReflectPowerAlarmTime"
           
           scPowerRange="RfConfig_PowerRange"
           scCoefficient="RfConfig_Coefficient"
           scEnablePulsingFunction="RfConfig_EnablePulsingFunction"
            scEnableC1C2Position="RfConfig_EnableC1C2Position"
            scEnableReflectPower="RfConfig_EnableReflectPower"
            scEnableVoltageCurrent="RfConfig_EnableVoltageCurrent"
             scPowerRegulationFactor="RfConfig_PowerRegulationFactor"
           />
  </IoRfs>



  <IoThrottleValves>
    <IoThrottleValve  id="ThrottleValve" display=""  schematicId="" unit=""
                      aiPositionFeedback="AI_Thorttle_valve_real_position_fb"
                      aiPressureFeedback="AI_Thorttle_valve_real_pressure_fb"
                      aiState="AI_thorttle_valve_state"
                      
                      aoPositionSetPoint="AO_Throttle_valve_position_setpoint"
                      aoPressureSetPoint="AO_Throttle_valve_pressure_setpoint"
                      aoPressureMode="AO_Throttle_valve_work_mode"
                      />
  </IoThrottleValves>

  <IoPressureControls>
    <IoPressureControl
      id="PressureControl"
      display="PressureControl"
      schematicId="PressureControl"
      unit="mTorr"
       diLogicProcessGasFlowing="LogicProcessGasFlowing"
      
      scGasFlowPressureAlarmRange="System_GasFlowPressureAlarmRange"
      scGasFlowPressureAlarmTime="System_GasFlowPressureAlarmTime"
      scIsIndependentControl="PressureControlConfig_IsIndependentControl"
      scIsBoostPumpInstalled="PressureControlConfig_EnableBoosterPump"
      scTvInstalled="PressureControlConfig_EnableThrottleValve"

      boost="BoostPump"
      tv="ThrottleValve"
      pressureMeter ="PressureMeterChamber"
      />
  </IoPressureControls>

  <IoPressureSensors>
  </IoPressureSensors>

  <IoWaterFlowSensors>
  </IoWaterFlowSensors>

  <IoThermalCouples></IoThermalCouples>

  <IoHeaters></IoHeaters>

  <IoHeartbeats>
    <IoHeartbeat  id="Heartbeat" display=""  schematicId="" unit="" ao="AO_heartbeat" ai="AI_heartbeat_fb"  />
  </IoHeartbeats>

  <IoSignalLights>
    <IoSignalLight id="SignalTowerRedLight" display=""  schematicId="" unit="" diFeedback="DI_Red_light_fb" doSet="DO_Red_light"/>
    <IoSignalLight id="SignalTowerYellowLight" display=""  schematicId="" unit="" diFeedback="DI_Yellow_light_fb" doSet="DO_Yellow_light"/>
    <IoSignalLight id="SignalTowerGreenLight" display=""  schematicId="" unit="" diFeedback="DI_Green_light_fb"  doSet="DO_Green_light"/>
    <IoSignalLight id="SignalTowerBuzzer" display=""  schematicId="" unit="" diFeedback="DI_Buzzer_fb"  doSet="DO_Buzzer"/>
  </IoSignalLights>

  <IoSensors>
	  <!--<IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />-->
	  <IoSensor id="SensorChamberDoor"   display=""  schematicId="" unit="" di="DI_Chamber_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
	  <!--<IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />-->
  </IoSensors>

  <IoEmos>
    <IoEmo id="EmoSystem"
           display=""
           schematicId=""
           unit=""
           diStopButton="DI_EMG_stop_botton"
           diMainContactor="DI_Main_conctactor" />
  </IoEmos>

  <IoResets>
    <IoReset id="ResetPlcSignal"
           display=""
           schematicId=""
           unit=""
           doReset="DO_reset_signal"  />
  </IoResets>

  <IoStatisticss>
    <IoStatistics id="StatisticsRfOnTime"
                  display="RF On Statistics"
                  schematicId=""
                  unit=""
                  diMonitorSignal="DI_RF_power_state_fb"
                  scLastPMTime="System_RfOnTimeLastPMTime"
                  scTimeFromLastPM="System_RfOnTimeFromLastPM"
                  scTimeTotal="System_RfOnTimeTotal"
                  scEnableAlarm="System_RfOnTimeEnableAlarm"
                  scPMInterval="System_RfOnTimePMInterval"/>

    <IoStatistics id="StatisticsPumpOnTime"
                  display="Pump On Statistics"
                  schematicId=""
                  unit=""
                  diMonitorSignal="DI_Lever1_pump_running"
                  scLastPMTime="System_PumpOnTimeLastPMTime"
                  scTimeFromLastPM="System_PumpOnTimeFromLastPM"
                  scTimeTotal="System_PumpOnTimeTotal"
                  scEnableAlarm="System_PumpOnTimeEnableAlarm"
                  scPMInterval="System_PumpOnTimePMInterval"/>
  </IoStatisticss>

  <IoPlcDateTimes>
    <IoPlcDateTime id="PlcDateTime"
                  display="PlcDateTime"
                  schematicId=""
                  unit=""
                  aiYear="AI_Year"
                   aiMonth="AI_Month"
                  aiDay="AI_Day"
                  aiHour="AI_Time"
                  aiMinute="AI_Minute"
                  aiSecond="AI_Second"/>
  </IoPlcDateTimes>

</DeviceModelDefine>