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log20241031.txt

log20241031.txt 301 KB
Geschiedenis Ruwe

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
  1. <==  [Save Log Job] 2024-10-31 07:00:50.704 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2. 

  2. [Save Log Job] 2024-10-31 07:00:51.572 LOG.INFO EventService.cs Line:60 Register() - 客户端0b73feaa-c7d4-439d-923c-62938f2f4286已连接
    3. 

  3. [Save Log Job] 2024-10-31 07:00:51.873 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    4. 

  4. [Save Log Job] 2024-10-31 07:00:51.873 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    5. 

  5. [Save Log Job] 2024-10-31 07:00:51.950 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    6. 

  6. [Save Log Job] 2024-10-31 07:00:53.406 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    7. 

  7. [Save Log Job] 2024-10-31 07:00:53.898 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    8. 

  8. [Save Log Job] 2024-10-31 07:00:56.963 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    9. 

  9. [Save Log Job] 2024-10-31 07:01:21.951 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    10. 

  10. [Save Log Job] 2024-10-31 07:01:21.952 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    11. 

  11. [Save Log Job] 2024-10-31 07:01:21.968 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    12. 

  12. [Save Log Job] 2024-10-31 07:01:22.156 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    13. 

  13. [Save Log Job] 2024-10-31 07:01:35.528 LOG.INFO LOG.cs Line:61 Write() - user login server
    14. 

  14. [Save Log Job] 2024-10-31 07:01:40.366 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面
    15. 

  15. <==  [Save Log Job] 2024-10-31 07:02:48.062 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    16. 

  16. [Save Log Job] 2024-10-31 07:02:49.166 LOG.INFO EventService.cs Line:60 Register() - 客户端ccbacf30-08ff-4eb2-bf23-4d6be330d997已连接
    17. 

  17. [Save Log Job] 2024-10-31 07:02:49.167 LOG.INFO EventService.cs Line:60 Register() - 客户端ccbacf30-08ff-4eb2-bf23-4d6be330d997已连接
    18. 

  18. [Save Log Job] 2024-10-31 07:02:49.397 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    19. 

  19. [Save Log Job] 2024-10-31 07:02:49.397 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    20. 

  20. [Save Log Job] 2024-10-31 07:02:49.479 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    21. 

  21. [Save Log Job] 2024-10-31 07:02:50.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    22. 

  22. [Save Log Job] 2024-10-31 07:02:51.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    23. 

  23. [Save Log Job] 2024-10-31 07:02:54.493 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    24. 

  24. [Save Log Job] 2024-10-31 07:03:00.086 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    25. 

  25. [Save Log Job] 2024-10-31 07:03:00.088 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    26. 

  26. [Save Log Job] 2024-10-31 07:03:00.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    27. 

  27. [Save Log Job] 2024-10-31 07:03:00.274 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    28. 

  28. [Save Log Job] 2024-10-31 07:03:05.041 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    29. 

  29. [Save Log Job] 2024-10-31 07:03:05.043 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    30. 

  30. [Save Log Job] 2024-10-31 07:03:05.043 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    31. 

  31. [Save Log Job] 2024-10-31 07:03:27.705 LOG.INFO LOG.cs Line:61 Write() - user login server
    32. 

  32. [Save Log Job] 2024-10-31 07:03:32.407 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面
    33. 

  33. <==  [Save Log Job] 2024-10-31 07:08:25.621 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    34. 

  34. [Save Log Job] 2024-10-31 07:08:26.609 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    35. 

  35. [Save Log Job] 2024-10-31 07:08:26.609 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    36. 

  36. [Save Log Job] 2024-10-31 07:08:26.667 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    37. 

  37. [Save Log Job] 2024-10-31 07:08:26.719 LOG.INFO EventService.cs Line:60 Register() - 客户端0737703e-c71d-4899-b1d3-945ec45dcc58已连接
    38. 

  38. [Save Log Job] 2024-10-31 07:08:26.719 LOG.INFO EventService.cs Line:60 Register() - 客户端0737703e-c71d-4899-b1d3-945ec45dcc58已连接
    39. 

  39. [Save Log Job] 2024-10-31 07:08:27.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    40. 

  40. [Save Log Job] 2024-10-31 07:08:28.249 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    41. 

  41. [Save Log Job] 2024-10-31 07:08:31.682 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    42. 

  42. [Save Log Job] 2024-10-31 07:08:34.924 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    43. 

  43. [Save Log Job] 2024-10-31 07:08:34.925 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    44. 

  44. [Save Log Job] 2024-10-31 07:08:34.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    45. 

  45. [Save Log Job] 2024-10-31 07:08:35.100 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    46. 

  46. [Save Log Job] 2024-10-31 07:08:37.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    47. 

  47. [Save Log Job] 2024-10-31 07:08:37.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    48. 

  48. [Save Log Job] 2024-10-31 07:08:37.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    49. 

  49. [Save Log Job] 2024-10-31 07:11:28.845 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    50. 

  50. [Save Log Job] 2024-10-31 07:11:34.106 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    51. 

  51. <==  [Save Log Job] 2024-10-31 07:13:06.353 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    52. 

  52. [Save Log Job] 2024-10-31 07:13:07.318 LOG.INFO EventService.cs Line:60 Register() - 客户端d1b14575-a322-4983-9f99-c934f5a38157已连接
    53. 

  53. [Save Log Job] 2024-10-31 07:13:07.337 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    54. 

  54. [Save Log Job] 2024-10-31 07:13:07.338 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    55. 

  55. [Save Log Job] 2024-10-31 07:13:07.417 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    56. 

  56. [Save Log Job] 2024-10-31 07:13:08.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    57. 

  57. [Save Log Job] 2024-10-31 07:13:08.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    58. 

  58. [Save Log Job] 2024-10-31 07:13:12.430 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    59. 

  59. [Save Log Job] 2024-10-31 07:13:15.879 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    60. 

  60. [Save Log Job] 2024-10-31 07:13:15.880 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    61. 

  61. [Save Log Job] 2024-10-31 07:13:15.885 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    62. 

  62. [Save Log Job] 2024-10-31 07:13:16.055 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    63. 

  63. [Save Log Job] 2024-10-31 07:13:18.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    64. 

  64. [Save Log Job] 2024-10-31 07:13:18.246 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    65. 

  65. [Save Log Job] 2024-10-31 07:13:18.246 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    66. 

  66. <==  [Save Log Job] 2024-10-31 07:15:37.044 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    67. 

  67. [Save Log Job] 2024-10-31 07:15:38.057 LOG.INFO EventService.cs Line:60 Register() - 客户端f2eaf5aa-e312-4a05-b5f5-6d79399ea90f已连接
    68. 

  68. [Save Log Job] 2024-10-31 07:15:38.209 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    69. 

  69. [Save Log Job] 2024-10-31 07:15:38.209 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    70. 

  70. [Save Log Job] 2024-10-31 07:15:38.264 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    71. 

  71. [Save Log Job] 2024-10-31 07:15:39.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    72. 

  72. [Save Log Job] 2024-10-31 07:15:39.662 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    73. 

  73. [Save Log Job] 2024-10-31 07:15:43.280 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    74. 

  74. [Save Log Job] 2024-10-31 07:15:48.146 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    75. 

  75. [Save Log Job] 2024-10-31 07:15:48.147 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    76. 

  76. [Save Log Job] 2024-10-31 07:15:48.153 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    77. 

  77. [Save Log Job] 2024-10-31 07:15:48.325 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    78. 

  78. [Save Log Job] 2024-10-31 07:15:50.572 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    79. 

  79. [Save Log Job] 2024-10-31 07:15:50.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    80. 

  80. [Save Log Job] 2024-10-31 07:15:50.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    81. 

  81. [Save Log Job] 2024-10-31 07:16:50.150 LOG.INFO LOG.cs Line:61 Write() - user login server
    82. 

  82. [Save Log Job] 2024-10-31 07:16:55.761 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面
    83. 

  83. <==  [Save Log Job] 2024-10-31 07:17:34.102 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    84. 

  84. [Save Log Job] 2024-10-31 07:17:35.030 LOG.INFO EventService.cs Line:60 Register() - 客户端17d3d1b0-c78c-4f87-955f-86e7a9269edb已连接
    85. 

  85. [Save Log Job] 2024-10-31 07:17:35.030 LOG.INFO EventService.cs Line:60 Register() - 客户端17d3d1b0-c78c-4f87-955f-86e7a9269edb已连接
    86. 

  86. [Save Log Job] 2024-10-31 07:17:35.136 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    87. 

  87. [Save Log Job] 2024-10-31 07:17:35.137 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    88. 

  88. [Save Log Job] 2024-10-31 07:17:35.186 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    89. 

  89. [Save Log Job] 2024-10-31 07:17:36.557 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    90. 

  90. [Save Log Job] 2024-10-31 07:17:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    91. 

  91. [Save Log Job] 2024-10-31 07:17:40.199 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    92. 

  92. [Save Log Job] 2024-10-31 07:17:43.577 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    93. 

  93. [Save Log Job] 2024-10-31 07:17:43.578 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    94. 

  94. [Save Log Job] 2024-10-31 07:17:43.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    95. 

  95. [Save Log Job] 2024-10-31 07:17:43.752 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    96. 

  96. [Save Log Job] 2024-10-31 07:17:55.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    97. 

  97. [Save Log Job] 2024-10-31 07:17:55.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    98. 

  98. [Save Log Job] 2024-10-31 07:17:55.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    99. 

  99. [Save Log Job] 2024-10-31 07:18:24.018 LOG.INFO LOG.cs Line:61 Write() - user login server
    100. 

  100. [Save Log Job] 2024-10-31 07:18:30.983 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面
    101. 

  101. <==  [Save Log Job] 2024-10-31 07:19:13.050 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    102. 

  102. [Save Log Job] 2024-10-31 07:19:13.975 LOG.INFO EventService.cs Line:60 Register() - 客户端ac961b74-0802-429c-9892-2666145cea47已连接
    103. 

  103. [Save Log Job] 2024-10-31 07:19:14.109 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    104. 

  104. [Save Log Job] 2024-10-31 07:19:14.110 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    105. 

  105. [Save Log Job] 2024-10-31 07:19:14.168 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    106. 

  106. [Save Log Job] 2024-10-31 07:19:15.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    107. 

  107. [Save Log Job] 2024-10-31 07:19:15.572 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    108. 

  108. [Save Log Job] 2024-10-31 07:19:19.184 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    109. 

  109. [Save Log Job] 2024-10-31 07:19:25.827 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    110. 

  110. [Save Log Job] 2024-10-31 07:19:25.828 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    111. 

  111. [Save Log Job] 2024-10-31 07:19:25.833 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    112. 

  112. [Save Log Job] 2024-10-31 07:19:26.016 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    113. 

  113. [Save Log Job] 2024-10-31 07:19:28.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    114. 

  114. [Save Log Job] 2024-10-31 07:19:28.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    115. 

  115. [Save Log Job] 2024-10-31 07:19:28.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    116. 

  116. [Save Log Job] 2024-10-31 07:29:49.978 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    117. 

  117. [Save Log Job] 2024-10-31 07:29:50.022 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    118. 

  118. <==  [Save Log Job] 2024-10-31 07:58:07.437 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    119. 

  119. [Save Log Job] 2024-10-31 07:58:08.655 LOG.INFO EventService.cs Line:60 Register() - 客户端5b277d92-f3ef-4602-b0fe-e81a645401ad已连接
    120. 

  120. [Save Log Job] 2024-10-31 07:58:08.713 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    121. 

  121. [Save Log Job] 2024-10-31 07:58:08.714 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    122. 

  122. [Save Log Job] 2024-10-31 07:58:08.809 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    123. 

  123. [Save Log Job] 2024-10-31 07:58:10.167 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    124. 

  124. [Save Log Job] 2024-10-31 07:58:10.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    125. 

  125. [Save Log Job] 2024-10-31 07:58:13.827 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    126. 

  126. [Save Log Job] 2024-10-31 07:58:15.480 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    127. 

  127. [Save Log Job] 2024-10-31 07:58:15.481 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    128. 

  128. [Save Log Job] 2024-10-31 07:58:15.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    129. 

  129. [Save Log Job] 2024-10-31 07:58:15.665 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    130. 

  130. [Save Log Job] 2024-10-31 08:21:04.764 LOG.INFO EventService.cs Line:60 Register() - 客户端e342fc40-2ee3-4afa-91e6-ec6852a076fb已连接
    131. 

  131. [Save Log Job] 2024-10-31 08:21:04.764 LOG.INFO EventService.cs Line:60 Register() - 客户端e342fc40-2ee3-4afa-91e6-ec6852a076fb已连接
    132. 

  132. [Save Log Job] 2024-10-31 08:21:06.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    133. 

  133. [Save Log Job] 2024-10-31 08:21:14.303 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    134. 

  134. [Save Log Job] 2024-10-31 08:21:16.691 LOG.INFO LOG.cs Line:61 Write() - 用户admin强制注销登录
    135. 

  135. [Save Log Job] 2024-10-31 08:21:16.691 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 用户admin强制注销登录,账号admin在其他地点登录
    136. 

  136. [Save Log Job] 2024-10-31 08:21:16.693 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - ''admin'' 退出系统。
    137. 

  137. [Save Log Job] 2024-10-31 08:21:17.799 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    138. 

  138. [Save Log Job] 2024-10-31 08:21:17.801 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    139. 

  139. [Save Log Job] 2024-10-31 08:21:17.802 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    140. 

  140. [Save Log Job] 2024-10-31 08:21:17.904 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    141. 

  141. [Save Log Job] 2024-10-31 08:21:23.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    142. 

  142. [Save Log Job] 2024-10-31 08:21:23.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    143. 

  143. [Save Log Job] 2024-10-31 08:21:23.971 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    144. 

  144.  ==> <==  [Save Log Job] 2024-10-31 08:22:33.469 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    145. 

  145. [Save Log Job] 2024-10-31 08:22:34.303 LOG.INFO EventService.cs Line:60 Register() - 客户端cdb81847-691c-4a14-a4fd-8aa9f6b674a1已连接
    146. 

  146. [Save Log Job] 2024-10-31 08:22:34.480 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    147. 

  147. [Save Log Job] 2024-10-31 08:22:34.480 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    148. 

  148. [Save Log Job] 2024-10-31 08:22:38.721 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    149. 

  149. [Save Log Job] 2024-10-31 08:22:53.571 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    150. 

  150. [Save Log Job] 2024-10-31 08:23:23.553 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
    151. 

  151. [Save Log Job] 2024-10-31 08:23:35.627 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    152. 

  152. [Save Log Job] 2024-10-31 08:23:47.566 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    153. 

  153. [Save Log Job] 2024-10-31 08:23:47.567 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    154. 

  154. [Save Log Job] 2024-10-31 08:23:47.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    155. 

  155. [Save Log Job] 2024-10-31 08:23:47.713 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    156. 

  156. [Save Log Job] 2024-10-31 08:24:04.905 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    157. 

  157. [Save Log Job] 2024-10-31 08:24:04.906 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    158. 

  158. [Save Log Job] 2024-10-31 08:24:17.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    159. 

  159. [Save Log Job] 2024-10-31 08:24:17.024 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    160. 

  160. [Save Log Job] 2024-10-31 08:24:25.999 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    161. 

  161. [Save Log Job] 2024-10-31 08:24:26.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    162. 

  162. [Save Log Job] 2024-10-31 08:24:26.600 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    163. 

  163. [Save Log Job] 2024-10-31 08:24:26.600 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    164. 

  164. [Save Log Job] 2024-10-31 08:24:26.808 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    165. 

  165. [Save Log Job] 2024-10-31 08:24:26.808 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    166. 

  166. [Save Log Job] 2024-10-31 08:24:27.000 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    167. 

  167. [Save Log Job] 2024-10-31 08:24:27.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    168. 

  168. [Save Log Job] 2024-10-31 08:24:27.159 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    169. 

  169. [Save Log Job] 2024-10-31 08:24:27.160 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    170. 

  170. [Save Log Job] 2024-10-31 08:24:27.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    171. 

  171. [Save Log Job] 2024-10-31 08:24:27.416 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    172. 

  172. [Save Log Job] 2024-10-31 08:24:27.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    173. 

  173. [Save Log Job] 2024-10-31 08:24:27.576 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    174. 

  174. [Save Log Job] 2024-10-31 08:24:27.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    175. 

  175. [Save Log Job] 2024-10-31 08:24:27.752 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    176. 

  176. [Save Log Job] 2024-10-31 08:25:02.016 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【Chamber FSM】收到重复发送的消息22，该条消息被忽略。
    177. 

  177. [Save Log Job] 2024-10-31 08:25:02.016 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【DeviceLayer FSM】收到重复发送的消息3，该条消息被忽略。
    178. 

  178. [Save Log Job] 2024-10-31 08:25:02.168 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【Chamber FSM】收到重复发送的消息22，该条消息被忽略。
    179. 

  179. [Save Log Job] 2024-10-31 08:25:02.168 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【DeviceLayer FSM】收到重复发送的消息3，该条消息被忽略。
    180. 

  180. [Save Log Job] 2024-10-31 08:25:02.369 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【Chamber FSM】收到重复发送的消息22，该条消息被忽略。
    181. 

  181. [Save Log Job] 2024-10-31 08:25:02.369 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【DeviceLayer FSM】收到重复发送的消息3，该条消息被忽略。
    182. 

  182. [Save Log Job] 2024-10-31 08:25:03.640 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    183. 

  183. [Save Log Job] 2024-10-31 08:25:03.640 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。
    184. 

  184. <==  [Save Log Job] 2024-10-31 08:25:28.125 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    185. 

  185. [Save Log Job] 2024-10-31 08:25:29.033 LOG.INFO EventService.cs Line:60 Register() - 客户端d029d2cc-326a-4b6a-9c55-2c6dae174fe2已连接
    186. 

  186. [Save Log Job] 2024-10-31 08:25:29.146 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    187. 

  187. [Save Log Job] 2024-10-31 08:25:29.147 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    188. 

  188. [Save Log Job] 2024-10-31 08:25:29.197 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    189. 

  189. [Save Log Job] 2024-10-31 08:25:30.490 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    190. 

  190. [Save Log Job] 2024-10-31 08:25:30.603 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    191. 

  191. [Save Log Job] 2024-10-31 08:25:34.209 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    192. 

  192. [Save Log Job] 2024-10-31 08:25:39.315 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    193. 

  193. [Save Log Job] 2024-10-31 08:25:39.316 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    194. 

  194. [Save Log Job] 2024-10-31 08:25:39.321 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    195. 

  195. [Save Log Job] 2024-10-31 08:25:39.485 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    196. 

  196. [Save Log Job] 2024-10-31 08:26:00.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    197. 

  197. [Save Log Job] 2024-10-31 08:26:00.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    198. 

  198. [Save Log Job] 2024-10-31 08:26:00.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    199. 

  199. [Save Log Job] 2024-10-31 08:26:14.137 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
    200. 

  200. [Save Log Job] 2024-10-31 08:26:25.555 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    201. 

  201. [Save Log Job] 2024-10-31 08:27:01.503 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031082614-123
    202. 

  202. [Save Log Job] 2024-10-31 08:27:01.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    203. 

  203. [Save Log Job] 2024-10-31 08:27:27.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    204. 

  204. [Save Log Job] 2024-10-31 08:27:27.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    205. 

  205. [Save Log Job] 2024-10-31 08:27:27.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    206. 

  206. [Save Log Job] 2024-10-31 08:27:27.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    207. 

  207. [Save Log Job] 2024-10-31 08:27:27.426 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    208. 

  208. [Save Log Job] 2024-10-31 08:27:27.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    209. 

  209. [Save Log Job] 2024-10-31 08:27:28.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    210. 

  210. [Save Log Job] 2024-10-31 08:28:03.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    211. 

  211. [Save Log Job] 2024-10-31 08:28:03.684 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 1.0 minitues。
    212. 

  212. [Save Log Job] 2024-10-31 08:28:03.685 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    213. 

  213. [Save Log Job] 2024-10-31 08:28:03.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031082614-123
    214. 

  214. [Save Log Job] 2024-10-31 08:28:03.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031082614-123''
    215. 

  215. [Save Log Job] 2024-10-31 08:28:59.095 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031082614-123'' start run step 1：initial。
    216. 

  216. [Save Log Job] 2024-10-31 08:28:59.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    217. 

  217. [Save Log Job] 2024-10-31 08:28:59.096 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    218. 

  218. [Save Log Job] 2024-10-31 08:28:59.097 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    219. 

  219. [Save Log Job] 2024-10-31 08:28:59.097 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    220. 

  220. [Save Log Job] 2024-10-31 08:28:59.098 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    221. 

  221. [Save Log Job] 2024-10-31 08:28:59.098 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    222. 

  222. [Save Log Job] 2024-10-31 08:28:59.098 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    223. 

  223. [Save Log Job] 2024-10-31 08:28:59.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    224. 

  224. [Save Log Job] 2024-10-31 08:28:59.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    225. 

  225. [Save Log Job] 2024-10-31 08:28:59.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    226. 

  226. [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    227. 

  227. [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    228. 

  228. [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    229. 

  229. [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    230. 

  230. [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    231. 

  231. [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    232. 

  232. [Save Log Job] 2024-10-31 08:28:59.101 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    233. 

  233. [Save Log Job] 2024-10-31 08:28:59.153 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    234. 

  234. <==  [Save Log Job] 2024-10-31 09:29:18.022 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    235. 

  235. [Save Log Job] 2024-10-31 09:29:18.984 LOG.INFO EventService.cs Line:60 Register() - 客户端01fb3940-43f4-4647-a1ad-f3742d8e936a已连接
    236. 

  236. [Save Log Job] 2024-10-31 09:29:19.267 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    237. 

  237. [Save Log Job] 2024-10-31 09:29:19.268 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    238. 

  238. [Save Log Job] 2024-10-31 09:29:21.764 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    239. 

  239. [Save Log Job] 2024-10-31 09:29:26.042 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    240. 

  240. [Save Log Job] 2024-10-31 09:29:26.073 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    241. 

  241. [Save Log Job] 2024-10-31 09:29:26.781 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    242. 

  242. <==  [Save Log Job] 2024-10-31 10:25:17.513 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    243. 

  243. [Save Log Job] 2024-10-31 10:25:18.495 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    244. 

  244. [Save Log Job] 2024-10-31 10:25:18.495 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    245. 

  245. [Save Log Job] 2024-10-31 10:25:18.580 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    246. 

  246. [Save Log Job] 2024-10-31 10:25:18.667 LOG.INFO EventService.cs Line:60 Register() - 客户端843f8b59-5889-447b-b2f8-9421edb3e5fb已连接
    247. 

  247. [Save Log Job] 2024-10-31 10:25:19.790 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    248. 

  248. [Save Log Job] 2024-10-31 10:25:20.629 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    249. 

  249. [Save Log Job] 2024-10-31 10:25:23.595 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    250. 

  250. [Save Log Job] 2024-10-31 10:25:32.787 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    251. 

  251. [Save Log Job] 2024-10-31 10:25:32.788 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    252. 

  252. [Save Log Job] 2024-10-31 10:25:32.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    253. 

  253. [Save Log Job] 2024-10-31 10:25:32.962 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    254. 

  254. [Save Log Job] 2024-10-31 10:25:52.960 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    255. 

  255. [Save Log Job] 2024-10-31 10:25:52.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    256. 

  256. [Save Log Job] 2024-10-31 10:25:52.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    257. 

  257. <==  [Save Log Job] 2024-10-31 10:39:00.032 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    258. 

  258. [Save Log Job] 2024-10-31 10:39:00.941 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    259. 

  259. [Save Log Job] 2024-10-31 10:39:00.942 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    260. 

  260. [Save Log Job] 2024-10-31 10:39:01.006 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    261. 

  261. [Save Log Job] 2024-10-31 10:39:01.118 LOG.INFO EventService.cs Line:60 Register() - 客户端7e737423-4774-4fb4-a8b3-39a8bba51d22已连接
    262. 

  262. [Save Log Job] 2024-10-31 10:39:01.118 LOG.INFO EventService.cs Line:60 Register() - 客户端7e737423-4774-4fb4-a8b3-39a8bba51d22已连接
    263. 

  263. [Save Log Job] 2024-10-31 10:39:02.369 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    264. 

  264. [Save Log Job] 2024-10-31 10:39:02.823 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    265. 

  265. [Save Log Job] 2024-10-31 10:39:06.018 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    266. 

  266. [Save Log Job] 2024-10-31 10:39:08.112 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    267. 

  267. [Save Log Job] 2024-10-31 10:39:08.113 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    268. 

  268. [Save Log Job] 2024-10-31 10:39:08.118 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    269. 

  269. [Save Log Job] 2024-10-31 10:39:08.239 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    270. 

  270. [Save Log Job] 2024-10-31 10:39:21.423 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    271. 

  271. [Save Log Job] 2024-10-31 10:39:21.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    272. 

  272. [Save Log Job] 2024-10-31 10:39:21.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    273. 

  273. <==  [Save Log Job] 2024-10-31 10:55:40.655 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    274. 

  274. [Save Log Job] 2024-10-31 10:55:41.222 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    275. 

  275. [Save Log Job] 2024-10-31 10:55:41.222 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    276. 

  276. [Save Log Job] 2024-10-31 10:55:41.256 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    277. 

  277. [Save Log Job] 2024-10-31 10:55:41.430 LOG.INFO EventService.cs Line:60 Register() - 客户端982048e3-48d3-45f4-bda9-921646ad89e3已连接
    278. 

  278. [Save Log Job] 2024-10-31 10:55:41.430 LOG.INFO EventService.cs Line:60 Register() - 客户端982048e3-48d3-45f4-bda9-921646ad89e3已连接
    279. 

  279. [Save Log Job] 2024-10-31 10:55:42.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    280. 

  280. [Save Log Job] 2024-10-31 10:55:42.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    281. 

  281. [Save Log Job] 2024-10-31 10:55:46.263 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    282. 

  282. <==  [Save Log Job] 2024-10-31 11:35:28.452 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    283. 

  283. [Save Log Job] 2024-10-31 11:35:29.336 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    284. 

  284. [Save Log Job] 2024-10-31 11:35:29.336 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    285. 

  285. [Save Log Job] 2024-10-31 11:35:29.397 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    286. 

  286. [Save Log Job] 2024-10-31 11:35:29.514 LOG.INFO EventService.cs Line:60 Register() - 客户端397166d3-412f-4029-bdb4-5d46891d27c8已连接
    287. 

  287. [Save Log Job] 2024-10-31 11:35:29.514 LOG.INFO EventService.cs Line:60 Register() - 客户端397166d3-412f-4029-bdb4-5d46891d27c8已连接
    288. 

  288. [Save Log Job] 2024-10-31 11:35:30.771 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    289. 

  289. [Save Log Job] 2024-10-31 11:35:31.176 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    290. 

  290. [Save Log Job] 2024-10-31 11:35:34.406 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    291. 

  291. [Save Log Job] 2024-10-31 11:35:37.767 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    292. 

  292. [Save Log Job] 2024-10-31 11:35:37.768 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    293. 

  293. [Save Log Job] 2024-10-31 11:35:37.772 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    294. 

  294. [Save Log Job] 2024-10-31 11:35:37.891 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    295. 

  295. [Save Log Job] 2024-10-31 11:35:40.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    296. 

  296. [Save Log Job] 2024-10-31 11:35:40.631 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    297. 

  297. [Save Log Job] 2024-10-31 11:35:40.632 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    298. 

  298. [Save Log Job] 2024-10-31 11:36:24.566 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file  123  renamed CACB
    299. 

  299. [Save Log Job] 2024-10-31 11:36:24.566 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    300. 

  300. <==  [Save Log Job] 2024-10-31 11:36:37.187 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    301. 

  301. [Save Log Job] 2024-10-31 11:36:37.877 LOG.INFO EventService.cs Line:60 Register() - 客户端7ec42523-bb40-4402-9cb0-51ccc252d370已连接
    302. 

  302. [Save Log Job] 2024-10-31 11:36:38.074 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    303. 

  303. [Save Log Job] 2024-10-31 11:36:38.076 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    304. 

  304. [Save Log Job] 2024-10-31 11:36:38.121 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    305. 

  305. [Save Log Job] 2024-10-31 11:36:39.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    306. 

  306. [Save Log Job] 2024-10-31 11:36:39.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    307. 

  307. [Save Log Job] 2024-10-31 11:36:43.134 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    308. 

  308. [Save Log Job] 2024-10-31 11:36:44.655 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    309. 

  309. [Save Log Job] 2024-10-31 11:36:44.656 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    310. 

  310. [Save Log Job] 2024-10-31 11:36:44.662 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    311. 

  311. [Save Log Job] 2024-10-31 11:36:44.781 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    312. 

  312. [Save Log Job] 2024-10-31 11:36:59.454 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    313. 

  313. [Save Log Job] 2024-10-31 11:36:59.455 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    314. 

  314. [Save Log Job] 2024-10-31 11:36:59.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    315. 

  315. [Save Log Job] 2024-10-31 11:37:37.247 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    316. 

  316. [Save Log Job] 2024-10-31 11:37:37.268 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031113737-CACB
    317. 

  317. [Save Log Job] 2024-10-31 11:37:37.269 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    318. 

  318. [Save Log Job] 2024-10-31 11:37:37.271 LOG.INFO YZQZFabAuto.cs Line:158 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    319. 

  319. [Save Log Job] 2024-10-31 11:37:37.271 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    320. 

  320. [Save Log Job] 2024-10-31 11:37:37.274 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    321. 

  321. [Save Log Job] 2024-10-31 11:37:37.303 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    322. 

  322. [Save Log Job] 2024-10-31 11:37:37.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    323. 

  323. [Save Log Job] 2024-10-31 11:37:37.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    324. 

  324. [Save Log Job] 2024-10-31 11:37:37.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    325. 

  325. [Save Log Job] 2024-10-31 11:37:37.324 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    326. 

  326. [Save Log Job] 2024-10-31 11:37:37.325 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    327. 

  327. [Save Log Job] 2024-10-31 11:37:37.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    328. 

  328. [Save Log Job] 2024-10-31 11:37:38.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    329. 

  329. [Save Log Job] 2024-10-31 11:37:47.275 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    330. 

  330. [Save Log Job] 2024-10-31 11:37:57.277 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    331. 

  331. [Save Log Job] 2024-10-31 11:38:07.277 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    332. 

  332. [Save Log Job] 2024-10-31 11:38:13.231 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    333. 

  333. [Save Log Job] 2024-10-31 11:38:13.289 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    334. 

  334. [Save Log Job] 2024-10-31 11:38:13.289 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    335. 

  335. [Save Log Job] 2024-10-31 11:38:13.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031113737-CACB
    336. 

  336. [Save Log Job] 2024-10-31 11:38:13.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031113737-CACB''
    337. 

  337. [Save Log Job] 2024-10-31 11:38:13.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031113737-CACB'' start run step 1：initial。
    338. 

  338. [Save Log Job] 2024-10-31 11:38:13.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    339. 

  339. [Save Log Job] 2024-10-31 11:38:13.344 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    340. 

  340. [Save Log Job] 2024-10-31 11:38:13.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    341. 

  341. [Save Log Job] 2024-10-31 11:38:13.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    342. 

  342. [Save Log Job] 2024-10-31 11:38:13.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    343. 

  343. [Save Log Job] 2024-10-31 11:38:13.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    344. 

  344. [Save Log Job] 2024-10-31 11:38:13.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    345. 

  345. [Save Log Job] 2024-10-31 11:38:13.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    346. 

  346. [Save Log Job] 2024-10-31 11:38:13.347 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    347. 

  347. [Save Log Job] 2024-10-31 11:38:13.347 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    348. 

  348. [Save Log Job] 2024-10-31 11:38:13.347 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    349. 

  349. [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    350. 

  350. [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    351. 

  351. [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    352. 

  352. [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    353. 

  353. [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    354. 

  354. [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    355. 

  355. [Save Log Job] 2024-10-31 11:38:13.400 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    356. 

  356. [Save Log Job] 2024-10-31 11:38:17.280 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    357. 

  357. [Save Log Job] 2024-10-31 11:38:27.281 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    358. 

  358. [Save Log Job] 2024-10-31 11:38:37.283 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    359. 

  359. [Save Log Job] 2024-10-31 11:38:43.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031113737-CACB'' end step 1
    360. 

  360. [Save Log Job] 2024-10-31 11:38:43.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    361. 

  361. [Save Log Job] 2024-10-31 11:38:43.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031113737-CACB
    362. 

  362. Start time：2024/10/31 11:38:13
    363. 

  363. End time：2024/10/31 11:38:43
    364. 

  364. Total time：0:0:30
    365. 

  365. [Save Log Job] 2024-10-31 11:38:43.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    366. 

  366. [Save Log Job] 2024-10-31 11:38:43.482 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    367. 

  367. [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    368. 

  368. [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    369. 

  369. [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    370. 

  370. [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    371. 

  371. [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    372. 

  372. [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    373. 

  373. [Save Log Job] 2024-10-31 11:38:47.284 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    374. 

  374. [Save Log Job] 2024-10-31 11:38:53.567 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    375. 

  375. [Save Log Job] 2024-10-31 11:38:53.625 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    376. 

  376. [Save Log Job] 2024-10-31 11:38:57.284 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    377. 

  377. [Save Log Job] 2024-10-31 11:38:59.481 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    378. 

  378. [Save Log Job] 2024-10-31 11:38:59.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    379. 

  379. [Save Log Job] 2024-10-31 11:39:01.574 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    380. 

  380. [Save Log Job] 2024-10-31 11:39:02.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    381. 

  381. [Save Log Job] 2024-10-31 11:39:06.017 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    382. 

  382. [Save Log Job] 2024-10-31 11:39:07.285 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    383. 

  383. [Save Log Job] 2024-10-31 11:39:17.286 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    384. 

  384. [Save Log Job] 2024-10-31 11:39:27.287 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    385. 

  385. [Save Log Job] 2024-10-31 11:39:37.287 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    386. 

  386. [Save Log Job] 2024-10-31 11:39:47.287 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    387. 

  387. [Save Log Job] 2024-10-31 11:39:56.129 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    388. 

  388. [Save Log Job] 2024-10-31 11:39:56.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    389. 

  389. [Save Log Job] 2024-10-31 11:39:56.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    390. 

  390. [Save Log Job] 2024-10-31 11:39:56.937 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    391. 

  391. [Save Log Job] 2024-10-31 11:39:56.980 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    392. 

  392. [Save Log Job] 2024-10-31 11:39:57.085 LOG.INFO YZQZFabAuto.cs Line:204 EndJobRecord() - EndJobRecord|[{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":"10/31/2024 11:37:37 AM","EndtTime":null,"OxygenConcentration":"0.5185441","CharmberPressure":"50000","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.5185441","CharmberPressure":"50000","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.2843558","CharmberPressure":"35011","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.2687851","CharmberPressure":"25007","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.08293953","CharmberPressure":"10012","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"20.9915","CharmberPressure":"97","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"45.51493","CharmberPressure":"98","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"45.13792","CharmberPressure":"100","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"25.26181","CharmberPressure":"108","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.3654462","CharmberPressure":"92","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.7099109","CharmberPressure":"5083","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.001861358","CharmberPressure":"15078","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.9877884","CharmberPressure":"30087","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.492254","CharmberPressure":"40083","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.6777888","CharmberPressure":"55081","Power":"0","Operation":null}]
    393. 

  393. [Save Log Job] 2024-10-31 11:39:57.085 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    394. 

  394. <==  [Save Log Job] 2024-10-31 11:49:39.060 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    395. 

  395. [Save Log Job] 2024-10-31 11:49:39.965 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    396. 

  396. [Save Log Job] 2024-10-31 11:49:39.965 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    397. 

  397. [Save Log Job] 2024-10-31 11:49:40.027 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    398. 

  398. [Save Log Job] 2024-10-31 11:49:40.057 LOG.INFO EventService.cs Line:60 Register() - 客户端a19de865-a0ef-4dbf-a9b6-a0b20fbea72e已连接
    399. 

  399. [Save Log Job] 2024-10-31 11:49:40.058 LOG.INFO EventService.cs Line:60 Register() - 客户端a19de865-a0ef-4dbf-a9b6-a0b20fbea72e已连接
    400. 

  400. [Save Log Job] 2024-10-31 11:49:41.363 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    401. 

  401. [Save Log Job] 2024-10-31 11:49:41.873 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    402. 

  402. [Save Log Job] 2024-10-31 11:49:45.036 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    403. 

  403. [Save Log Job] 2024-10-31 11:49:51.498 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    404. 

  404. [Save Log Job] 2024-10-31 11:49:51.499 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    405. 

  405. [Save Log Job] 2024-10-31 11:49:51.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    406. 

  406. [Save Log Job] 2024-10-31 11:49:51.628 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    407. 

  407. [Save Log Job] 2024-10-31 11:50:04.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    408. 

  408. [Save Log Job] 2024-10-31 11:50:04.292 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    409. 

  409. [Save Log Job] 2024-10-31 11:50:04.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    410. 

  410. [Save Log Job] 2024-10-31 11:50:17.363 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    411. 

  411. [Save Log Job] 2024-10-31 11:50:17.383 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031115017-CACB
    412. 

  412. [Save Log Job] 2024-10-31 11:50:17.383 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    413. 

  413. [Save Log Job] 2024-10-31 11:50:17.385 LOG.INFO YZQZFabAuto.cs Line:158 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    414. 

  414. [Save Log Job] 2024-10-31 11:50:17.386 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    415. 

  415. [Save Log Job] 2024-10-31 11:50:17.390 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    416. 

  416. [Save Log Job] 2024-10-31 11:50:17.436 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    417. 

  417. [Save Log Job] 2024-10-31 11:50:17.436 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    418. 

  418. [Save Log Job] 2024-10-31 11:50:17.436 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    419. 

  419. [Save Log Job] 2024-10-31 11:50:17.437 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    420. 

  420. [Save Log Job] 2024-10-31 11:50:17.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    421. 

  421. [Save Log Job] 2024-10-31 11:50:17.461 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    422. 

  422. [Save Log Job] 2024-10-31 11:50:17.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    423. 

  423. [Save Log Job] 2024-10-31 11:50:19.503 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    424. 

  424. [Save Log Job] 2024-10-31 11:50:21.076 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    425. 

  425. [Save Log Job] 2024-10-31 11:50:27.391 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    426. 

  426. [Save Log Job] 2024-10-31 11:50:37.392 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    427. 

  427. [Save Log Job] 2024-10-31 11:50:47.392 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    428. 

  428. [Save Log Job] 2024-10-31 11:50:57.393 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    429. 

  429. [Save Log Job] 2024-10-31 11:51:03.735 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    430. 

  430. [Save Log Job] 2024-10-31 11:51:03.796 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
    431. 

  431. [Save Log Job] 2024-10-31 11:51:03.796 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    432. 

  432. [Save Log Job] 2024-10-31 11:51:03.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031115017-CACB
    433. 

  433. [Save Log Job] 2024-10-31 11:51:03.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031115017-CACB''
    434. 

  434. [Save Log Job] 2024-10-31 11:51:03.850 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031115017-CACB'' start run step 1：initial。
    435. 

  435. [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    436. 

  436. [Save Log Job] 2024-10-31 11:51:03.852 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    437. 

  437. [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    438. 

  438. [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    439. 

  439. [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    440. 

  440. [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    441. 

  441. [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    442. 

  442. [Save Log Job] 2024-10-31 11:51:03.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    443. 

  443. [Save Log Job] 2024-10-31 11:51:03.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    444. 

  444. [Save Log Job] 2024-10-31 11:51:03.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    445. 

  445. [Save Log Job] 2024-10-31 11:51:03.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    446. 

  446. [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    447. 

  447. [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    448. 

  448. [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    449. 

  449. [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    450. 

  450. [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    451. 

  451. [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    452. 

  452. [Save Log Job] 2024-10-31 11:51:03.905 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    453. 

  453. [Save Log Job] 2024-10-31 11:51:07.394 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    454. 

  454. [Save Log Job] 2024-10-31 11:51:17.400 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    455. 

  455. [Save Log Job] 2024-10-31 11:51:27.404 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    456. 

  456. [Save Log Job] 2024-10-31 11:51:33.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031115017-CACB'' end step 1
    457. 

  457. [Save Log Job] 2024-10-31 11:51:33.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    458. 

  458. [Save Log Job] 2024-10-31 11:51:33.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031115017-CACB
    459. 

  459. Start time：2024/10/31 11:51:03
    460. 

  460. End time：2024/10/31 11:51:33
    461. 

  461. Total time：0:0:30
    462. 

  462. [Save Log Job] 2024-10-31 11:51:33.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    463. 

  463. [Save Log Job] 2024-10-31 11:51:33.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    464. 

  464. [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    465. 

  465. [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    466. 

  466. [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    467. 

  467. [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    468. 

  468. [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    469. 

  469. [Save Log Job] 2024-10-31 11:51:35.947 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    470. 

  470. [Save Log Job] 2024-10-31 11:51:37.404 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    471. 

  471. [Save Log Job] 2024-10-31 11:51:44.040 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    472. 

  472. [Save Log Job] 2024-10-31 11:51:44.098 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    473. 

  473. [Save Log Job] 2024-10-31 11:51:47.405 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    474. 

  474. [Save Log Job] 2024-10-31 11:51:49.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    475. 

  475. [Save Log Job] 2024-10-31 11:51:49.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    476. 

  476. [Save Log Job] 2024-10-31 11:51:51.923 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    477. 

  477. [Save Log Job] 2024-10-31 11:51:53.255 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    478. 

  478. [Save Log Job] 2024-10-31 11:51:56.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    479. 

  479. [Save Log Job] 2024-10-31 11:51:57.405 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    480. 

  480. [Save Log Job] 2024-10-31 11:52:07.406 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    481. 

  481. [Save Log Job] 2024-10-31 11:52:17.407 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    482. 

  482. [Save Log Job] 2024-10-31 11:52:27.409 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    483. 

  483. [Save Log Job] 2024-10-31 11:52:37.409 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    484. 

  484. [Save Log Job] 2024-10-31 11:52:46.423 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    485. 

  485. <==  [Save Log Job] 2024-10-31 11:54:01.734 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    486. 

  486. [Save Log Job] 2024-10-31 11:54:02.629 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    487. 

  487. [Save Log Job] 2024-10-31 11:54:02.630 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    488. 

  488. [Save Log Job] 2024-10-31 11:54:02.694 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    489. 

  489. [Save Log Job] 2024-10-31 11:54:02.720 LOG.INFO EventService.cs Line:60 Register() - 客户端fef1f210-1c1f-4960-97c3-f48e471e5cdc已连接
    490. 

  490. [Save Log Job] 2024-10-31 11:54:02.720 LOG.INFO EventService.cs Line:60 Register() - 客户端fef1f210-1c1f-4960-97c3-f48e471e5cdc已连接
    491. 

  491. [Save Log Job] 2024-10-31 11:54:03.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    492. 

  492. [Save Log Job] 2024-10-31 11:54:04.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    493. 

  493. [Save Log Job] 2024-10-31 11:54:07.708 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    494. 

  494. [Save Log Job] 2024-10-31 11:54:11.806 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    495. 

  495. [Save Log Job] 2024-10-31 11:54:11.807 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    496. 

  496. [Save Log Job] 2024-10-31 11:54:11.812 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    497. 

  497. [Save Log Job] 2024-10-31 11:54:11.937 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    498. 

  498. [Save Log Job] 2024-10-31 11:54:16.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    499. 

  499. [Save Log Job] 2024-10-31 11:54:16.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    500. 

  500. [Save Log Job] 2024-10-31 11:54:16.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    501. 

  501. [Save Log Job] 2024-10-31 11:54:26.292 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    502. 

  502. [Save Log Job] 2024-10-31 11:54:26.314 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031115426-CACB
    503. 

  503. [Save Log Job] 2024-10-31 11:54:26.314 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    504. 

  504. [Save Log Job] 2024-10-31 11:54:26.316 LOG.INFO YZQZFabAuto.cs Line:158 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    505. 

  505. [Save Log Job] 2024-10-31 11:54:26.317 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    506. 

  506. [Save Log Job] 2024-10-31 11:54:26.320 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    507. 

  507. [Save Log Job] 2024-10-31 11:54:26.368 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    508. 

  508. [Save Log Job] 2024-10-31 11:54:26.368 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    509. 

  509. [Save Log Job] 2024-10-31 11:54:26.368 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    510. 

  510. [Save Log Job] 2024-10-31 11:54:26.369 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    511. 

  511. [Save Log Job] 2024-10-31 11:54:26.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    512. 

  512. [Save Log Job] 2024-10-31 11:54:26.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    513. 

  513. [Save Log Job] 2024-10-31 11:54:26.504 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    514. 

  514. [Save Log Job] 2024-10-31 11:54:28.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    515. 

  515. [Save Log Job] 2024-10-31 11:54:36.322 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    516. 

  516. [Save Log Job] 2024-10-31 11:54:46.322 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    517. 

  517. [Save Log Job] 2024-10-31 11:54:56.323 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    518. 

  518. [Save Log Job] 2024-10-31 11:55:06.323 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    519. 

  519. [Save Log Job] 2024-10-31 11:55:07.120 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    520. 

  520. [Save Log Job] 2024-10-31 11:55:07.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    521. 

  521. [Save Log Job] 2024-10-31 11:55:07.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    522. 

  522. [Save Log Job] 2024-10-31 11:55:07.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031115426-CACB
    523. 

  523. [Save Log Job] 2024-10-31 11:55:07.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031115426-CACB''
    524. 

  524. [Save Log Job] 2024-10-31 11:55:07.234 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031115426-CACB'' start run step 1：initial。
    525. 

  525. [Save Log Job] 2024-10-31 11:55:07.235 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    526. 

  526. [Save Log Job] 2024-10-31 11:55:07.235 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    527. 

  527. [Save Log Job] 2024-10-31 11:55:07.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    528. 

  528. [Save Log Job] 2024-10-31 11:55:07.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    529. 

  529. [Save Log Job] 2024-10-31 11:55:07.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    530. 

  530. [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    531. 

  531. [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    532. 

  532. [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    533. 

  533. [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    534. 

  534. [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    535. 

  535. [Save Log Job] 2024-10-31 11:55:07.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    536. 

  536. [Save Log Job] 2024-10-31 11:55:07.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    537. 

  537. [Save Log Job] 2024-10-31 11:55:07.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    538. 

  538. [Save Log Job] 2024-10-31 11:55:07.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    539. 

  539. [Save Log Job] 2024-10-31 11:55:07.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    540. 

  540. [Save Log Job] 2024-10-31 11:55:07.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    541. 

  541. [Save Log Job] 2024-10-31 11:55:07.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    542. 

  542. [Save Log Job] 2024-10-31 11:55:07.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    543. 

  543. [Save Log Job] 2024-10-31 11:55:16.328 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    544. 

  544. [Save Log Job] 2024-10-31 11:55:26.328 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    545. 

  545. [Save Log Job] 2024-10-31 11:55:36.330 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    546. 

  546. [Save Log Job] 2024-10-31 11:55:37.317 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031115426-CACB'' end step 1
    547. 

  547. [Save Log Job] 2024-10-31 11:55:37.320 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    548. 

  548. [Save Log Job] 2024-10-31 11:55:37.320 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031115426-CACB
    549. 

  549. Start time：2024/10/31 11:55:07
    550. 

  550. End time：2024/10/31 11:55:37
    551. 

  551. Total time：0:0:30
    552. 

  552. [Save Log Job] 2024-10-31 11:55:37.321 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    553. 

  553. [Save Log Job] 2024-10-31 11:55:37.373 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    554. 

  554. [Save Log Job] 2024-10-31 11:55:39.353 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    555. 

  555. [Save Log Job] 2024-10-31 11:55:39.375 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    556. 

  556. [Save Log Job] 2024-10-31 11:55:39.377 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    557. 

  557. [Save Log Job] 2024-10-31 11:55:39.377 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    558. 

  558. [Save Log Job] 2024-10-31 11:55:39.377 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    559. 

  559. [Save Log Job] 2024-10-31 11:55:39.377 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    560. 

  560. [Save Log Job] 2024-10-31 11:55:46.330 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    561. 

  561. [Save Log Job] 2024-10-31 11:55:47.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    562. 

  562. [Save Log Job] 2024-10-31 11:55:47.528 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    563. 

  563. [Save Log Job] 2024-10-31 11:55:53.289 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    564. 

  564. [Save Log Job] 2024-10-31 11:55:53.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    565. 

  565. [Save Log Job] 2024-10-31 11:55:55.354 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    566. 

  566. [Save Log Job] 2024-10-31 11:55:56.331 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    567. 

  567. [Save Log Job] 2024-10-31 11:55:56.686 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    568. 

  568. [Save Log Job] 2024-10-31 11:55:59.777 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    569. 

  569. [Save Log Job] 2024-10-31 11:56:06.332 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    570. 

  570. [Save Log Job] 2024-10-31 11:56:16.332 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    571. 

  571. [Save Log Job] 2024-10-31 11:56:26.333 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    572. 

  572. [Save Log Job] 2024-10-31 11:56:36.333 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    573. 

  573. [Save Log Job] 2024-10-31 11:56:46.334 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    574. 

  574. [Save Log Job] 2024-10-31 11:56:49.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    575. 

  575. [Save Log Job] 2024-10-31 11:56:50.715 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    576. 

  576. [Save Log Job] 2024-10-31 11:56:50.715 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    577. 

  577. [Save Log Job] 2024-10-31 11:56:50.716 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    578. 

  578. [Save Log Job] 2024-10-31 11:56:50.717 LOG.INFO YZQZFabAuto.cs Line:204 EndJobRecord() - EndJobRecord|
    579. 

  579. [Save Log Job] 2024-10-31 11:56:50.717 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    580. 

  580. [Save Log Job] 2024-10-31 11:56:54.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    581. 

  581. [Save Log Job] 2024-10-31 11:56:54.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    582. 

  582. [Save Log Job] 2024-10-31 11:56:55.243 LOG.INFO YZQZFabAuto.cs Line:233 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311156507242—SFC240912810/.csv
    583. 

  583. <==  [Save Log Job] 2024-10-31 12:31:06.298 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    584. 

  584. [Save Log Job] 2024-10-31 12:31:07.142 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    585. 

  585. [Save Log Job] 2024-10-31 12:31:07.142 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    586. 

  586. [Save Log Job] 2024-10-31 12:31:07.213 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    587. 

  587. [Save Log Job] 2024-10-31 12:31:07.290 LOG.INFO EventService.cs Line:60 Register() - 客户端95b6b934-e339-472c-b005-2cbb2f97e0b4已连接
    588. 

  588. [Save Log Job] 2024-10-31 12:31:07.290 LOG.INFO EventService.cs Line:60 Register() - 客户端95b6b934-e339-472c-b005-2cbb2f97e0b4已连接
    589. 

  589. [Save Log Job] 2024-10-31 12:31:08.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    590. 

  590. [Save Log Job] 2024-10-31 12:31:09.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    591. 

  591. [Save Log Job] 2024-10-31 12:31:12.225 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    592. 

  592. [Save Log Job] 2024-10-31 12:31:15.903 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    593. 

  593. [Save Log Job] 2024-10-31 12:31:15.904 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    594. 

  594. [Save Log Job] 2024-10-31 12:31:15.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    595. 

  595. [Save Log Job] 2024-10-31 12:31:16.041 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    596. 

  596. [Save Log Job] 2024-10-31 12:31:27.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    597. 

  597. [Save Log Job] 2024-10-31 12:31:27.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    598. 

  598. [Save Log Job] 2024-10-31 12:31:27.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    599. 

  599. [Save Log Job] 2024-10-31 12:33:15.374 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    600. 

  600. [Save Log Job] 2024-10-31 12:33:15.399 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031123315-CACB
    601. 

  601. [Save Log Job] 2024-10-31 12:33:15.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    602. 

  602. [Save Log Job] 2024-10-31 12:33:15.401 LOG.INFO YZQZFabAuto.cs Line:158 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    603. 

  603. [Save Log Job] 2024-10-31 12:33:15.402 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    604. 

  604. [Save Log Job] 2024-10-31 12:33:15.404 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    605. 

  605. [Save Log Job] 2024-10-31 12:33:15.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    606. 

  606. [Save Log Job] 2024-10-31 12:33:15.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    607. 

  607. [Save Log Job] 2024-10-31 12:33:15.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    608. 

  608. [Save Log Job] 2024-10-31 12:33:15.453 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    609. 

  609. [Save Log Job] 2024-10-31 12:33:15.454 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    610. 

  610. [Save Log Job] 2024-10-31 12:33:15.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    611. 

  611. [Save Log Job] 2024-10-31 12:33:15.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    612. 

  612. [Save Log Job] 2024-10-31 12:33:17.534 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    613. 

  613. [Save Log Job] 2024-10-31 12:33:19.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    614. 

  614. [Save Log Job] 2024-10-31 12:33:25.404 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    615. 

  615. [Save Log Job] 2024-10-31 12:33:35.405 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    616. 

  616. [Save Log Job] 2024-10-31 12:33:45.405 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    617. 

  617. [Save Log Job] 2024-10-31 12:33:54.330 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    618. 

  618. [Save Log Job] 2024-10-31 12:33:54.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    619. 

  619. [Save Log Job] 2024-10-31 12:33:54.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    620. 

  620. [Save Log Job] 2024-10-31 12:33:54.390 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031123315-CACB
    621. 

  621. [Save Log Job] 2024-10-31 12:33:54.390 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031123315-CACB''
    622. 

  622. [Save Log Job] 2024-10-31 12:33:54.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031123315-CACB'' start run step 1：initial。
    623. 

  623. [Save Log Job] 2024-10-31 12:33:54.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    624. 

  624. [Save Log Job] 2024-10-31 12:33:54.445 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    625. 

  625. [Save Log Job] 2024-10-31 12:33:54.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    626. 

  626. [Save Log Job] 2024-10-31 12:33:54.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    627. 

  627. [Save Log Job] 2024-10-31 12:33:54.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    628. 

  628. [Save Log Job] 2024-10-31 12:33:54.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    629. 

  629. [Save Log Job] 2024-10-31 12:33:54.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    630. 

  630. [Save Log Job] 2024-10-31 12:33:54.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    631. 

  631. [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    632. 

  632. [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    633. 

  633. [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    634. 

  634. [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    635. 

  635. [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    636. 

  636. [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    637. 

  637. [Save Log Job] 2024-10-31 12:33:54.448 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    638. 

  638. [Save Log Job] 2024-10-31 12:33:54.448 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    639. 

  639. [Save Log Job] 2024-10-31 12:33:54.448 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    640. 

  640. [Save Log Job] 2024-10-31 12:33:54.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    641. 

  641. [Save Log Job] 2024-10-31 12:33:55.406 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    642. 

  642. [Save Log Job] 2024-10-31 12:34:05.408 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    643. 

  643. [Save Log Job] 2024-10-31 12:34:15.414 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    644. 

  644. [Save Log Job] 2024-10-31 12:34:24.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031123315-CACB'' end step 1
    645. 

  645. [Save Log Job] 2024-10-31 12:34:24.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    646. 

  646. [Save Log Job] 2024-10-31 12:34:24.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031123315-CACB
    647. 

  647. Start time：2024/10/31 12:33:54
    648. 

  648. End time：2024/10/31 12:34:24
    649. 

  649. Total time：0:0:30
    650. 

  650. [Save Log Job] 2024-10-31 12:34:24.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    651. 

  651. [Save Log Job] 2024-10-31 12:34:24.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    652. 

  652. [Save Log Job] 2024-10-31 12:34:25.415 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    653. 

  653. [Save Log Job] 2024-10-31 12:34:55.821 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    654. 

  654. [Save Log Job] 2024-10-31 12:34:55.823 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    655. 

  655. [Save Log Job] 2024-10-31 12:34:55.823 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    656. 

  656. [Save Log Job] 2024-10-31 12:34:55.823 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    657. 

  657. [Save Log Job] 2024-10-31 12:34:55.825 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    658. 

  658. [Save Log Job] 2024-10-31 12:34:55.825 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    659. 

  659. [Save Log Job] 2024-10-31 12:34:55.842 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    660. 

  660. [Save Log Job] 2024-10-31 12:34:56.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    661. 

  661. [Save Log Job] 2024-10-31 12:34:56.895 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    662. 

  662. [Save Log Job] 2024-10-31 12:35:05.843 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    663. 

  663. [Save Log Job] 2024-10-31 12:35:15.843 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    664. 

  664. [Save Log Job] 2024-10-31 12:35:17.898 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    665. 

  665. [Save Log Job] 2024-10-31 12:35:17.957 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    666. 

  666. [Save Log Job] 2024-10-31 12:35:19.969 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    667. 

  667. [Save Log Job] 2024-10-31 12:35:21.319 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    668. 

  668. [Save Log Job] 2024-10-31 12:35:24.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    669. 

  669. [Save Log Job] 2024-10-31 12:35:25.843 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    670. 

  670. [Save Log Job] 2024-10-31 12:35:35.844 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    671. 

  671. [Save Log Job] 2024-10-31 12:35:45.844 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    672. 

  672. [Save Log Job] 2024-10-31 12:35:55.845 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    673. 

  673. [Save Log Job] 2024-10-31 12:36:05.845 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    674. 

  674. [Save Log Job] 2024-10-31 12:36:14.493 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    675. 

  675. [Save Log Job] 2024-10-31 12:36:15.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.8 minitues
    676. 

  676. [Save Log Job] 2024-10-31 12:36:15.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    677. 

  677. [Save Log Job] 2024-10-31 12:36:15.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    678. 

  678. [Save Log Job] 2024-10-31 12:36:15.344 LOG.INFO YZQZFabAuto.cs Line:204 EndJobRecord() - EndJobRecord|
    679. 

  679. [Save Log Job] 2024-10-31 12:36:15.344 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0
    680. 

  680. [Save Log Job] 2024-10-31 12:36:19.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    681. 

  681. [Save Log Job] 2024-10-31 12:36:19.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    682. 

  682. [Save Log Job] 2024-10-31 12:36:29.917 LOG.INFO YZQZFabAuto.cs Line:233 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311236153512—SFC240912810.csv
    683. 

  683. [Save Log Job] 2024-10-31 12:36:36.946 LOG.INFO YZQZFabAuto.cs Line:278 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311236153512—SFC240912810/.csv
    684. 

  684. [Save Log Job] 2024-10-31 12:36:53.033 LOG.INFO YZQZFabAuto.cs Line:310 Export2CsvWanPanFile() - 用户名或密码不正确。
    685. 

  685. 

  686. <==  [Save Log Job] 2024-10-31 12:41:25.036 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    687. 

  687. [Save Log Job] 2024-10-31 12:41:25.980 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    688. 

  688. [Save Log Job] 2024-10-31 12:41:25.980 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    689. 

  689. [Save Log Job] 2024-10-31 12:41:26.041 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    690. 

  690. [Save Log Job] 2024-10-31 12:41:26.068 LOG.INFO EventService.cs Line:60 Register() - 客户端7a212ea1-bcf2-4521-a64d-1f6e1abb9196已连接
    691. 

  691. [Save Log Job] 2024-10-31 12:41:26.068 LOG.INFO EventService.cs Line:60 Register() - 客户端7a212ea1-bcf2-4521-a64d-1f6e1abb9196已连接
    692. 

  692. [Save Log Job] 2024-10-31 12:41:27.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    693. 

  693. [Save Log Job] 2024-10-31 12:41:27.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    694. 

  694. [Save Log Job] 2024-10-31 12:41:31.050 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    695. 

  695. [Save Log Job] 2024-10-31 12:41:33.103 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    696. 

  696. [Save Log Job] 2024-10-31 12:41:33.104 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    697. 

  697. [Save Log Job] 2024-10-31 12:41:33.109 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    698. 

  698. [Save Log Job] 2024-10-31 12:41:33.231 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    699. 

  699. [Save Log Job] 2024-10-31 12:41:59.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    700. 

  700. [Save Log Job] 2024-10-31 12:41:59.192 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    701. 

  701. [Save Log Job] 2024-10-31 12:41:59.192 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    702. 

  702. [Save Log Job] 2024-10-31 12:42:15.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    703. 

  703. [Save Log Job] 2024-10-31 12:42:15.096 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031124215-CACB
    704. 

  704. [Save Log Job] 2024-10-31 12:42:15.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    705. 

  705. [Save Log Job] 2024-10-31 12:42:15.098 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    706. 

  706. [Save Log Job] 2024-10-31 12:42:15.099 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    707. 

  707. [Save Log Job] 2024-10-31 12:42:15.101 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    708. 

  708. [Save Log Job] 2024-10-31 12:42:15.151 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    709. 

  709. [Save Log Job] 2024-10-31 12:42:15.151 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    710. 

  710. [Save Log Job] 2024-10-31 12:42:15.151 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    711. 

  711. [Save Log Job] 2024-10-31 12:42:15.152 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    712. 

  712. [Save Log Job] 2024-10-31 12:42:15.152 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    713. 

  713. [Save Log Job] 2024-10-31 12:42:15.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    714. 

  714. [Save Log Job] 2024-10-31 12:42:15.214 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    715. 

  715. [Save Log Job] 2024-10-31 12:42:16.242 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    716. 

  716. [Save Log Job] 2024-10-31 12:42:25.102 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    717. 

  717. [Save Log Job] 2024-10-31 12:42:35.102 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    718. 

  718. [Save Log Job] 2024-10-31 12:42:45.102 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    719. 

  719. [Save Log Job] 2024-10-31 12:42:55.102 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    720. 

  720. [Save Log Job] 2024-10-31 12:42:58.812 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    721. 

  721. [Save Log Job] 2024-10-31 12:42:58.871 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    722. 

  722. [Save Log Job] 2024-10-31 12:42:58.871 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    723. 

  723. [Save Log Job] 2024-10-31 12:42:58.873 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031124215-CACB
    724. 

  724. [Save Log Job] 2024-10-31 12:42:58.873 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031124215-CACB''
    725. 

  725. [Save Log Job] 2024-10-31 12:42:58.925 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031124215-CACB'' start run step 1：initial。
    726. 

  726. [Save Log Job] 2024-10-31 12:42:58.926 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    727. 

  727. [Save Log Job] 2024-10-31 12:42:58.926 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    728. 

  728. [Save Log Job] 2024-10-31 12:42:58.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    729. 

  729. [Save Log Job] 2024-10-31 12:42:58.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    730. 

  730. [Save Log Job] 2024-10-31 12:42:58.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    731. 

  731. [Save Log Job] 2024-10-31 12:42:58.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    732. 

  732. [Save Log Job] 2024-10-31 12:42:58.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    733. 

  733. [Save Log Job] 2024-10-31 12:42:58.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    734. 

  734. [Save Log Job] 2024-10-31 12:42:58.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    735. 

  735. [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    736. 

  736. [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    737. 

  737. [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    738. 

  738. [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    739. 

  739. [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    740. 

  740. [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    741. 

  741. [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    742. 

  742. [Save Log Job] 2024-10-31 12:42:58.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    743. 

  743. [Save Log Job] 2024-10-31 12:42:58.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    744. 

  744. [Save Log Job] 2024-10-31 12:43:05.108 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    745. 

  745. [Save Log Job] 2024-10-31 12:43:15.113 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    746. 

  746. [Save Log Job] 2024-10-31 12:43:25.115 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    747. 

  747. [Save Log Job] 2024-10-31 12:43:28.994 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031124215-CACB'' end step 1
    748. 

  748. [Save Log Job] 2024-10-31 12:43:28.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    749. 

  749. [Save Log Job] 2024-10-31 12:43:28.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031124215-CACB
    750. 

  750. Start time：2024/10/31 12:42:58
    751. 

  751. End time：2024/10/31 12:43:28
    752. 

  752. Total time：0:0:30
    753. 

  753. [Save Log Job] 2024-10-31 12:43:28.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    754. 

  754. [Save Log Job] 2024-10-31 12:43:29.051 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    755. 

  755. [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    756. 

  756. [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    757. 

  757. [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    758. 

  758. [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    759. 

  759. [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    760. 

  760. [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    761. 

  761. [Save Log Job] 2024-10-31 12:43:35.115 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    762. 

  762. [Save Log Job] 2024-10-31 12:43:39.113 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    763. 

  763. [Save Log Job] 2024-10-31 12:43:39.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    764. 

  764. [Save Log Job] 2024-10-31 12:43:45.003 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    765. 

  765. [Save Log Job] 2024-10-31 12:43:45.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    766. 

  766. [Save Log Job] 2024-10-31 12:43:45.116 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    767. 

  767. [Save Log Job] 2024-10-31 12:43:47.101 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    768. 

  768. [Save Log Job] 2024-10-31 12:43:48.440 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    769. 

  769. [Save Log Job] 2024-10-31 12:43:51.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    770. 

  770. [Save Log Job] 2024-10-31 12:43:55.117 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    771. 

  771. [Save Log Job] 2024-10-31 12:44:05.118 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    772. 

  772. [Save Log Job] 2024-10-31 12:44:15.118 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    773. 

  773. [Save Log Job] 2024-10-31 12:44:25.119 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    774. 

  774. [Save Log Job] 2024-10-31 12:44:35.120 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    775. 

  775. [Save Log Job] 2024-10-31 12:44:41.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    776. 

  776. [Save Log Job] 2024-10-31 12:44:42.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    777. 

  777. [Save Log Job] 2024-10-31 12:44:42.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    778. 

  778. [Save Log Job] 2024-10-31 12:44:42.466 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    779. 

  779. [Save Log Job] 2024-10-31 12:44:42.467 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    780. 

  780. [Save Log Job] 2024-10-31 12:44:42.467 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    781. 

  781. [Save Log Job] 2024-10-31 12:52:31.566 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    782. 

  782. [Save Log Job] 2024-10-31 12:52:31.566 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    783. 

  783. [Save Log Job] 2024-10-31 12:52:31.566 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    784. 

  784. [Save Log Job] 2024-10-31 12:52:31.967 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    785. 

  785. [Save Log Job] 2024-10-31 12:52:31.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    786. 

  786. [Save Log Job] 2024-10-31 12:52:32.386 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311244424724—SFC240912810.csv
    787. 

  787. <==  [Save Log Job] 2024-10-31 13:01:58.866 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    788. 

  788. [Save Log Job] 2024-10-31 13:01:59.748 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    789. 

  789. [Save Log Job] 2024-10-31 13:01:59.748 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    790. 

  790. [Save Log Job] 2024-10-31 13:01:59.814 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    791. 

  791. [Save Log Job] 2024-10-31 13:01:59.898 LOG.INFO EventService.cs Line:60 Register() - 客户端cf730beb-9262-41f4-8647-6e08434e8f3c已连接
    792. 

  792. [Save Log Job] 2024-10-31 13:01:59.898 LOG.INFO EventService.cs Line:60 Register() - 客户端cf730beb-9262-41f4-8647-6e08434e8f3c已连接
    793. 

  793. [Save Log Job] 2024-10-31 13:02:01.167 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    794. 

  794. [Save Log Job] 2024-10-31 13:02:01.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    795. 

  795. [Save Log Job] 2024-10-31 13:02:04.824 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    796. 

  796. [Save Log Job] 2024-10-31 13:02:11.181 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    797. 

  797. [Save Log Job] 2024-10-31 13:02:11.182 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    798. 

  798. [Save Log Job] 2024-10-31 13:02:11.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    799. 

  799. [Save Log Job] 2024-10-31 13:02:11.307 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    800. 

  800. [Save Log Job] 2024-10-31 13:02:14.383 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    801. 

  801. [Save Log Job] 2024-10-31 13:02:14.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    802. 

  802. [Save Log Job] 2024-10-31 13:02:14.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    803. 

  803. [Save Log Job] 2024-10-31 13:02:46.258 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    804. 

  804. [Save Log Job] 2024-10-31 13:02:46.281 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031130246-CACB
    805. 

  805. [Save Log Job] 2024-10-31 13:02:46.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    806. 

  806. [Save Log Job] 2024-10-31 13:02:46.283 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    807. 

  807. [Save Log Job] 2024-10-31 13:02:46.284 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    808. 

  808. [Save Log Job] 2024-10-31 13:02:46.287 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    809. 

  809. [Save Log Job] 2024-10-31 13:02:46.328 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    810. 

  810. [Save Log Job] 2024-10-31 13:02:46.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    811. 

  811. [Save Log Job] 2024-10-31 13:02:46.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    812. 

  812. [Save Log Job] 2024-10-31 13:02:46.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    813. 

  813. [Save Log Job] 2024-10-31 13:02:46.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    814. 

  814. [Save Log Job] 2024-10-31 13:02:46.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    815. 

  815. [Save Log Job] 2024-10-31 13:02:46.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    816. 

  816. [Save Log Job] 2024-10-31 13:02:48.424 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    817. 

  817. [Save Log Job] 2024-10-31 13:02:48.556 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    818. 

  818. [Save Log Job] 2024-10-31 13:02:56.287 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    819. 

  819. [Save Log Job] 2024-10-31 13:03:06.288 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    820. 

  820. [Save Log Job] 2024-10-31 13:03:16.288 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    821. 

  821. [Save Log Job] 2024-10-31 13:03:26.288 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    822. 

  822. [Save Log Job] 2024-10-31 13:03:31.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    823. 

  823. [Save Log Job] 2024-10-31 13:03:31.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    824. 

  824. [Save Log Job] 2024-10-31 13:03:31.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    825. 

  825. [Save Log Job] 2024-10-31 13:03:31.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031130246-CACB
    826. 

  826. [Save Log Job] 2024-10-31 13:03:31.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031130246-CACB''
    827. 

  827. [Save Log Job] 2024-10-31 13:03:31.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031130246-CACB'' start run step 1：initial。
    828. 

  828. [Save Log Job] 2024-10-31 13:03:31.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    829. 

  829. [Save Log Job] 2024-10-31 13:03:31.335 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    830. 

  830. [Save Log Job] 2024-10-31 13:03:31.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    831. 

  831. [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    832. 

  832. [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    833. 

  833. [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    834. 

  834. [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    835. 

  835. [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    836. 

  836. [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    837. 

  837. [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    838. 

  838. [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    839. 

  839. [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    840. 

  840. [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    841. 

  841. [Save Log Job] 2024-10-31 13:03:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    842. 

  842. [Save Log Job] 2024-10-31 13:03:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    843. 

  843. [Save Log Job] 2024-10-31 13:03:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    844. 

  844. [Save Log Job] 2024-10-31 13:03:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    845. 

  845. [Save Log Job] 2024-10-31 13:03:31.390 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    846. 

  846. [Save Log Job] 2024-10-31 13:03:36.293 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    847. 

  847. [Save Log Job] 2024-10-31 13:03:46.298 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    848. 

  848. [Save Log Job] 2024-10-31 13:03:56.305 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    849. 

  849. [Save Log Job] 2024-10-31 13:04:01.402 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031130246-CACB'' end step 1
    850. 

  850. [Save Log Job] 2024-10-31 13:04:01.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    851. 

  851. [Save Log Job] 2024-10-31 13:04:01.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031130246-CACB
    852. 

  852. Start time：2024/10/31 13:03:31
    853. 

  853. End time：2024/10/31 13:04:01
    854. 

  854. Total time：0:0:30
    855. 

  855. [Save Log Job] 2024-10-31 13:04:01.405 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    856. 

  856. [Save Log Job] 2024-10-31 13:04:01.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    857. 

  857. [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    858. 

  858. [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    859. 

  859. [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    860. 

  860. [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    861. 

  861. [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    862. 

  862. [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    863. 

  863. [Save Log Job] 2024-10-31 13:04:06.306 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    864. 

  864. [Save Log Job] 2024-10-31 13:04:11.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    865. 

  865. [Save Log Job] 2024-10-31 13:04:11.611 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    866. 

  866. [Save Log Job] 2024-10-31 13:04:16.307 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    867. 

  867. [Save Log Job] 2024-10-31 13:04:17.411 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    868. 

  868. [Save Log Job] 2024-10-31 13:04:17.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    869. 

  869. [Save Log Job] 2024-10-31 13:04:19.512 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    870. 

  870. [Save Log Job] 2024-10-31 13:04:20.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    871. 

  871. [Save Log Job] 2024-10-31 13:04:23.903 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    872. 

  872. [Save Log Job] 2024-10-31 13:04:26.308 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    873. 

  873. [Save Log Job] 2024-10-31 13:04:36.309 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    874. 

  874. [Save Log Job] 2024-10-31 13:04:46.309 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    875. 

  875. [Save Log Job] 2024-10-31 13:04:56.309 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    876. 

  876. [Save Log Job] 2024-10-31 13:05:06.310 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    877. 

  877. [Save Log Job] 2024-10-31 13:05:13.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    878. 

  878. [Save Log Job] 2024-10-31 13:05:14.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    879. 

  879. [Save Log Job] 2024-10-31 13:05:14.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    880. 

  880. [Save Log Job] 2024-10-31 13:05:14.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    881. 

  881. [Save Log Job] 2024-10-31 13:05:14.800 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    882. 

  882. [Save Log Job] 2024-10-31 13:05:14.800 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    883. 

  883. [Save Log Job] 2024-10-31 13:05:18.257 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    884. 

  884. [Save Log Job] 2024-10-31 13:05:19.112 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    885. 

  885. [Save Log Job] 2024-10-31 13:05:32.190 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311305148094—SFC240912810.csv
    886. 

  886. [Save Log Job] 2024-10-31 13:05:40.164 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311305148094—SFC240912810/.csv
    887. 

  887. [Save Log Job] 2024-10-31 13:05:40.637 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。
    888. 

  888. 

  889. [Save Log Job] 2024-10-31 13:06:36.878 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, EFC241014689/)
    890. 

  890. [Save Log Job] 2024-10-31 13:06:36.879 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031130636-CACB
    891. 

  891. [Save Log Job] 2024-10-31 13:06:36.879 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    892. 

  892. [Save Log Job] 2024-10-31 13:06:36.880 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|EFC241014689/|CACB
    893. 

  893. [Save Log Job] 2024-10-31 13:06:36.880 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    894. 

  894. [Save Log Job] 2024-10-31 13:06:36.881 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    895. 

  895. [Save Log Job] 2024-10-31 13:06:36.891 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    896. 

  896. [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    897. 

  897. [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    898. 

  898. [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    899. 

  899. [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    900. 

  900. [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    901. 

  901. [Save Log Job] 2024-10-31 13:06:36.987 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    902. 

  902. [Save Log Job] 2024-10-31 13:06:39.031 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    903. 

  903. [Save Log Job] 2024-10-31 13:06:39.699 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    904. 

  904. [Save Log Job] 2024-10-31 13:06:46.882 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    905. 

  905. [Save Log Job] 2024-10-31 13:06:56.883 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    906. 

  906. [Save Log Job] 2024-10-31 13:07:06.883 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    907. 

  907. [Save Log Job] 2024-10-31 13:07:11.266 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    908. 

  908. [Save Log Job] 2024-10-31 13:07:11.411 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    909. 

  909. [Save Log Job] 2024-10-31 13:07:16.887 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    910. 

  910. [Save Log Job] 2024-10-31 13:07:28.783 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    911. 

  911. [Save Log Job] 2024-10-31 13:07:40.502 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    912. 

  912. [Save Log Job] 2024-10-31 13:07:50.507 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    913. 

  913. [Save Log Job] 2024-10-31 13:08:00.511 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    914. 

  914. [Save Log Job] 2024-10-31 13:08:10.512 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    915. 

  915. [Save Log Job] 2024-10-31 13:08:20.515 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    916. 

  916. [Save Log Job] 2024-10-31 13:08:30.520 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    917. 

  917. [Save Log Job] 2024-10-31 13:08:33.910 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, EFC241014689/)
    918. 

  918. [Save Log Job] 2024-10-31 13:08:33.912 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031130833-CACB
    919. 

  919. [Save Log Job] 2024-10-31 13:08:33.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    920. 

  920. [Save Log Job] 2024-10-31 13:08:33.912 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|EFC241014689/|CACB
    921. 

  921. [Save Log Job] 2024-10-31 13:08:33.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    922. 

  922. [Save Log Job] 2024-10-31 13:08:33.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    923. 

  923. [Save Log Job] 2024-10-31 13:08:33.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    924. 

  924. [Save Log Job] 2024-10-31 13:08:33.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    925. 

  925. [Save Log Job] 2024-10-31 13:08:33.963 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    926. 

  926. [Save Log Job] 2024-10-31 13:08:34.020 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    927. 

  927. [Save Log Job] 2024-10-31 13:08:34.063 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    928. 

  928. [Save Log Job] 2024-10-31 13:08:34.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    929. 

  929. [Save Log Job] 2024-10-31 13:08:34.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    930. 

  930. [Save Log Job] 2024-10-31 13:08:34.135 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    931. 

  931. [Save Log Job] 2024-10-31 13:08:34.135 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    932. 

  932. [Save Log Job] 2024-10-31 13:08:34.135 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031130833-CACB
    933. 

  933. [Save Log Job] 2024-10-31 13:08:34.135 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031130833-CACB''
    934. 

  934. [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031130833-CACB'' start run step 1：initial。
    935. 

  935. [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    936. 

  936. [Save Log Job] 2024-10-31 13:08:34.186 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    937. 

  937. [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    938. 

  938. [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    939. 

  939. [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    940. 

  940. [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    941. 

  941. [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    942. 

  942. [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    943. 

  943. [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    944. 

  944. [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    945. 

  945. [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    946. 

  946. [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    947. 

  947. [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    948. 

  948. [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    949. 

  949. [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    950. 

  950. [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    951. 

  951. [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    952. 

  952. [Save Log Job] 2024-10-31 13:08:34.240 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    953. 

  953. [Save Log Job] 2024-10-31 13:08:40.523 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    954. 

  954. [Save Log Job] 2024-10-31 13:08:50.528 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    955. 

  955. <==  [Save Log Job] 2024-10-31 13:10:12.452 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    956. 

  956. [Save Log Job] 2024-10-31 13:10:13.203 LOG.INFO EventService.cs Line:60 Register() - 客户端6c415266-0548-4530-aa11-01ea455afc41已连接
    957. 

  957. [Save Log Job] 2024-10-31 13:10:13.316 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    958. 

  958. [Save Log Job] 2024-10-31 13:10:13.316 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    959. 

  959. [Save Log Job] 2024-10-31 13:10:13.376 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    960. 

  960. [Save Log Job] 2024-10-31 13:10:14.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    961. 

  961. [Save Log Job] 2024-10-31 13:10:14.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    962. 

  962. [Save Log Job] 2024-10-31 13:10:18.389 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    963. 

  963. <==  [Save Log Job] 2024-10-31 13:10:28.700 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    964. 

  964. [Save Log Job] 2024-10-31 13:10:29.541 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    965. 

  965. [Save Log Job] 2024-10-31 13:10:29.542 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    966. 

  966. [Save Log Job] 2024-10-31 13:10:29.586 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    967. 

  967. [Save Log Job] 2024-10-31 13:10:29.626 LOG.INFO EventService.cs Line:60 Register() - 客户端e50b45b1-cc7a-4e6c-b3c6-7c7f62cd737f已连接
    968. 

  968. [Save Log Job] 2024-10-31 13:10:29.626 LOG.INFO EventService.cs Line:60 Register() - 客户端e50b45b1-cc7a-4e6c-b3c6-7c7f62cd737f已连接
    969. 

  969. [Save Log Job] 2024-10-31 13:10:30.848 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    970. 

  970. [Save Log Job] 2024-10-31 13:10:30.910 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    971. 

  971. [Save Log Job] 2024-10-31 13:10:34.597 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    972. 

  972. [Save Log Job] 2024-10-31 13:10:40.252 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    973. 

  973. [Save Log Job] 2024-10-31 13:10:40.253 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    974. 

  974. [Save Log Job] 2024-10-31 13:10:40.258 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    975. 

  975. [Save Log Job] 2024-10-31 13:10:40.379 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    976. 

  976. [Save Log Job] 2024-10-31 13:11:19.792 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file  CACB  save completed
    977. 

  977. [Save Log Job] 2024-10-31 13:11:19.792 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    978. 

  978. [Save Log Job] 2024-10-31 13:11:24.841 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    979. 

  979. [Save Log Job] 2024-10-31 13:11:24.842 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    980. 

  980. [Save Log Job] 2024-10-31 13:11:30.822 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmRange, 1)
    981. 

  981. [Save Log Job] 2024-10-31 13:11:32.654 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmTime, 2)
    982. 

  982. [Save Log Job] 2024-10-31 13:12:00.470 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    983. 

  983. [Save Log Job] 2024-10-31 13:12:00.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    984. 

  984. [Save Log Job] 2024-10-31 13:12:00.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    985. 

  985. [Save Log Job] 2024-10-31 13:13:07.450 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    986. 

  986. [Save Log Job] 2024-10-31 13:13:07.459 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031131307-CACB
    987. 

  987. [Save Log Job] 2024-10-31 13:13:07.460 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    988. 

  988. [Save Log Job] 2024-10-31 13:13:07.462 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    989. 

  989. [Save Log Job] 2024-10-31 13:13:07.463 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    990. 

  990. [Save Log Job] 2024-10-31 13:13:07.465 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    991. 

  991. [Save Log Job] 2024-10-31 13:13:07.497 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    992. 

  992. [Save Log Job] 2024-10-31 13:13:07.515 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    993. 

  993. [Save Log Job] 2024-10-31 13:13:07.515 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    994. 

  994. [Save Log Job] 2024-10-31 13:13:07.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    995. 

  995. [Save Log Job] 2024-10-31 13:13:07.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    996. 

  996. [Save Log Job] 2024-10-31 13:13:07.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    997. 

  997. [Save Log Job] 2024-10-31 13:13:07.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    998. 

  998. [Save Log Job] 2024-10-31 13:13:09.103 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    999. 

  999. [Save Log Job] 2024-10-31 13:13:17.465 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1000. 

  1000. [Save Log Job] 2024-10-31 13:13:27.466 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1001. 

  1001. [Save Log Job] 2024-10-31 13:13:37.466 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1002. 

  1002. [Save Log Job] 2024-10-31 13:13:47.467 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1003. 

  1003. [Save Log Job] 2024-10-31 13:13:47.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1004. 

  1004. [Save Log Job] 2024-10-31 13:13:47.995 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1005. 

  1005. [Save Log Job] 2024-10-31 13:13:47.995 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1006. 

  1006. [Save Log Job] 2024-10-31 13:13:47.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031131307-CACB
    1007. 

  1007. [Save Log Job] 2024-10-31 13:13:47.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031131307-CACB''
    1008. 

  1008. [Save Log Job] 2024-10-31 13:13:48.050 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131307-CACB'' start run step 1：initial。
    1009. 

  1009. [Save Log Job] 2024-10-31 13:13:48.051 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1010. 

  1010. [Save Log Job] 2024-10-31 13:13:48.051 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1011. 

  1011. [Save Log Job] 2024-10-31 13:13:48.051 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1012. 

  1012. [Save Log Job] 2024-10-31 13:13:48.052 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1013. 

  1013. [Save Log Job] 2024-10-31 13:13:48.052 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1014. 

  1014. [Save Log Job] 2024-10-31 13:13:48.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1015. 

  1015. [Save Log Job] 2024-10-31 13:13:48.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1016. 

  1016. [Save Log Job] 2024-10-31 13:13:48.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1017. 

  1017. [Save Log Job] 2024-10-31 13:13:48.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1018. 

  1018. [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1019. 

  1019. [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1020. 

  1020. [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1021. 

  1021. [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1022. 

  1022. [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1023. 

  1023. [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1024. 

  1024. [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1025. 

  1025. [Save Log Job] 2024-10-31 13:13:48.055 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1026. 

  1026. [Save Log Job] 2024-10-31 13:13:48.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1027. 

  1027. [Save Log Job] 2024-10-31 13:13:57.473 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1028. 

  1028. [Save Log Job] 2024-10-31 13:14:07.475 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1029. 

  1029. [Save Log Job] 2024-10-31 13:14:17.479 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1030. 

  1030. [Save Log Job] 2024-10-31 13:14:18.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131307-CACB'' end step 1
    1031. 

  1031. [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131307-CACB'' start run step 2：initial。
    1032. 

  1032. [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1033. 

  1033. [Save Log Job] 2024-10-31 13:14:18.178 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1034. 

  1034. [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1035. 

  1035. [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1036. 

  1036. [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1037. 

  1037. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1038. 

  1038. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1039. 

  1039. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1040. 

  1040. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1041. 

  1041. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1042. 

  1042. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1043. 

  1043. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1044. 

  1044. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1045. 

  1045. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1046. 

  1046. [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1047. 

  1047. [Save Log Job] 2024-10-31 13:14:18.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1048. 

  1048. [Save Log Job] 2024-10-31 13:14:18.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1049. 

  1049. [Save Log Job] 2024-10-31 13:14:20.650 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1050. 

  1050. [Save Log Job] 2024-10-31 13:14:20.652 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1051. 

  1051. [Save Log Job] 2024-10-31 13:14:20.652 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1052. 

  1052. [Save Log Job] 2024-10-31 13:14:20.652 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1053. 

  1053. [Save Log Job] 2024-10-31 13:14:20.659 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    1054. 

  1054. [Save Log Job] 2024-10-31 13:14:20.659 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031131307-CACB
    1055. 

  1055. Start time：2024/10/31 13:13:47
    1056. 

  1056. End time：2024/10/31 13:14:20
    1057. 

  1057. Total time：0:0:32
    1058. 

  1058. [Save Log Job] 2024-10-31 13:14:20.660 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1059. 

  1059. [Save Log Job] 2024-10-31 13:14:20.661 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311314206598—SFC240912810.csv
    1060. 

  1060. [Save Log Job] 2024-10-31 13:14:28.440 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311314206598—SFC240912810/.csv
    1061. 

  1061. [Save Log Job] 2024-10-31 13:14:28.441 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1062. 

  1062. [Save Log Job] 2024-10-31 13:14:28.442 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1063. 

  1063. [Save Log Job] 2024-10-31 13:14:28.442 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1064. 

  1064. [Save Log Job] 2024-10-31 13:14:28.443 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1065. 

  1065. [Save Log Job] 2024-10-31 13:14:28.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1066. 

  1066. [Save Log Job] 2024-10-31 13:14:28.445 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1067. 

  1067. [Save Log Job] 2024-10-31 13:14:28.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1068. 

  1068. [Save Log Job] 2024-10-31 13:14:28.447 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1069. 

  1069. [Save Log Job] 2024-10-31 13:14:28.511 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String]
    1070. 

  1070. [Save Log Job] 2024-10-31 13:14:28.677 LOG.INFO YZQZFabAuto.cs Line:102 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":201,"Message":"Value cannot be null.\r\nParameter name: value","Data":null}
    1071. 

  1071. [Save Log Job] 2024-10-31 13:14:28.874 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。
    1072. 

  1072. 

  1073. [Save Log Job] 2024-10-31 13:17:45.205 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1074. 

  1074. [Save Log Job] 2024-10-31 13:18:07.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    1075. 

  1075. [Save Log Job] 2024-10-31 13:18:07.299 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031131807-CACB
    1076. 

  1076. [Save Log Job] 2024-10-31 13:18:07.299 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1077. 

  1077. [Save Log Job] 2024-10-31 13:18:07.300 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    1078. 

  1078. [Save Log Job] 2024-10-31 13:18:07.300 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1079. 

  1079. [Save Log Job] 2024-10-31 13:18:07.301 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1080. 

  1080. [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1081. 

  1081. [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1082. 

  1082. [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1083. 

  1083. [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1084. 

  1084. [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1085. 

  1085. [Save Log Job] 2024-10-31 13:18:07.378 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1086. 

  1086. [Save Log Job] 2024-10-31 13:18:07.407 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1087. 

  1087. [Save Log Job] 2024-10-31 13:18:07.464 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1088. 

  1088. [Save Log Job] 2024-10-31 13:18:09.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1089. 

  1089. [Save Log Job] 2024-10-31 13:18:09.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    1090. 

  1090. [Save Log Job] 2024-10-31 13:18:09.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1091. 

  1091. [Save Log Job] 2024-10-31 13:18:09.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031131807-CACB
    1092. 

  1092. [Save Log Job] 2024-10-31 13:18:09.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031131807-CACB''
    1093. 

  1093. [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131807-CACB'' start run step 1：initial。
    1094. 

  1094. [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1095. 

  1095. [Save Log Job] 2024-10-31 13:18:09.131 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1096. 

  1096. [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1097. 

  1097. [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1098. 

  1098. [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1099. 

  1099. [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1100. 

  1100. [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1101. 

  1101. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1102. 

  1102. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1103. 

  1103. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1104. 

  1104. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1105. 

  1105. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1106. 

  1106. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1107. 

  1107. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1108. 

  1108. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1109. 

  1109. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1110. 

  1110. [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1111. 

  1111. [Save Log Job] 2024-10-31 13:18:09.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1112. 

  1112. [Save Log Job] 2024-10-31 13:18:17.302 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1113. 

  1113. [Save Log Job] 2024-10-31 13:18:27.303 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1114. 

  1114. [Save Log Job] 2024-10-31 13:18:37.303 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1115. 

  1115. [Save Log Job] 2024-10-31 13:18:39.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131807-CACB'' end step 1
    1116. 

  1116. [Save Log Job] 2024-10-31 13:18:39.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131807-CACB'' start run step 2：initial。
    1117. 

  1117. [Save Log Job] 2024-10-31 13:18:39.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1118. 

  1118. [Save Log Job] 2024-10-31 13:18:39.276 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1119. 

  1119. [Save Log Job] 2024-10-31 13:18:39.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1120. 

  1120. [Save Log Job] 2024-10-31 13:18:39.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1121. 

  1121. [Save Log Job] 2024-10-31 13:18:39.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1122. 

  1122. [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1123. 

  1123. [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1124. 

  1124. [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1125. 

  1125. [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1126. 

  1126. [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1127. 

  1127. [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1128. 

  1128. [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1129. 

  1129. [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1130. 

  1130. [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1131. 

  1131. [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1132. 

  1132. [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1133. 

  1133. [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1134. 

  1134. [Save Log Job] 2024-10-31 13:18:41.847 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1135. 

  1135. [Save Log Job] 2024-10-31 13:18:41.847 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1136. 

  1136. [Save Log Job] 2024-10-31 13:18:41.847 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1137. 

  1137. [Save Log Job] 2024-10-31 13:18:41.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1138. 

  1138. [Save Log Job] 2024-10-31 13:19:06.642 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1139. 

  1139. [Save Log Job] 2024-10-31 13:19:06.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    1140. 

  1140. [Save Log Job] 2024-10-31 13:19:06.643 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1141. 

  1141. [Save Log Job] 2024-10-31 13:19:06.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031131807-CACB
    1142. 

  1142. Start time：2024/10/31 13:18:09
    1143. 

  1143. End time：2024/10/31 13:19:06
    1144. 

  1144. Total time：0:0:57
    1145. 

  1145. [Save Log Job] 2024-10-31 13:19:06.643 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1146. 

  1146. [Save Log Job] 2024-10-31 13:19:06.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1147. 

  1147. [Save Log Job] 2024-10-31 13:19:06.643 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1148. 

  1148. [Save Log Job] 2024-10-31 13:19:17.861 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1149. 

  1149. [Save Log Job] 2024-10-31 13:19:17.861 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1150. 

  1150. [Save Log Job] 2024-10-31 13:19:17.862 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311319178624—SFC240912810.csv
    1151. 

  1151. [Save Log Job] 2024-10-31 13:19:17.867 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311319178624—SFC240912810/.csv
    1152. 

  1152. [Save Log Job] 2024-10-31 13:19:21.866 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1153. 

  1153. [Save Log Job] 2024-10-31 13:19:39.273 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。
    1154. 

  1154. 

  1155. [Save Log Job] 2024-10-31 13:19:39.273 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1156. 

  1156. [Save Log Job] 2024-10-31 13:19:39.273 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1157. 

  1157. [Save Log Job] 2024-10-31 13:19:39.273 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1158. 

  1158. [Save Log Job] 2024-10-31 13:19:39.274 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1159. 

  1159. [Save Log Job] 2024-10-31 13:19:39.281 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String]
    1160. 

  1160. <==  [Save Log Job] 2024-10-31 13:21:46.000 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1161. 

  1161. [Save Log Job] 2024-10-31 13:21:46.775 LOG.INFO EventService.cs Line:60 Register() - 客户端4c8eb1f2-5274-410f-ad2b-44862b8e5413已连接
    1162. 

  1162. [Save Log Job] 2024-10-31 13:21:46.775 LOG.INFO EventService.cs Line:60 Register() - 客户端4c8eb1f2-5274-410f-ad2b-44862b8e5413已连接
    1163. 

  1163. [Save Log Job] 2024-10-31 13:21:46.924 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1164. 

  1164. [Save Log Job] 2024-10-31 13:21:46.925 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1165. 

  1165. [Save Log Job] 2024-10-31 13:21:46.973 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1166. 

  1166. [Save Log Job] 2024-10-31 13:21:48.048 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1167. 

  1167. [Save Log Job] 2024-10-31 13:21:48.299 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1168. 

  1168. [Save Log Job] 2024-10-31 13:21:51.985 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1169. 

  1169. [Save Log Job] 2024-10-31 13:21:56.573 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1170. 

  1170. [Save Log Job] 2024-10-31 13:21:56.574 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1171. 

  1171. [Save Log Job] 2024-10-31 13:21:56.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1172. 

  1172. [Save Log Job] 2024-10-31 13:21:56.709 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1173. 

  1173. [Save Log Job] 2024-10-31 13:22:10.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1174. 

  1174. [Save Log Job] 2024-10-31 13:22:10.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1175. 

  1175. [Save Log Job] 2024-10-31 13:22:10.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1176. 

  1176. [Save Log Job] 2024-10-31 13:22:23.130 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    1177. 

  1177. [Save Log Job] 2024-10-31 13:22:23.150 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031132223-CACB
    1178. 

  1178. [Save Log Job] 2024-10-31 13:22:23.150 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1179. 

  1179. [Save Log Job] 2024-10-31 13:22:23.152 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    1180. 

  1180. [Save Log Job] 2024-10-31 13:22:23.153 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1181. 

  1181. [Save Log Job] 2024-10-31 13:22:23.157 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1182. 

  1182. [Save Log Job] 2024-10-31 13:22:23.204 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1183. 

  1183. [Save Log Job] 2024-10-31 13:22:23.204 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1184. 

  1184. [Save Log Job] 2024-10-31 13:22:23.204 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1185. 

  1185. [Save Log Job] 2024-10-31 13:22:23.205 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1186. 

  1186. [Save Log Job] 2024-10-31 13:22:23.206 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1187. 

  1187. [Save Log Job] 2024-10-31 13:22:23.206 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1188. 

  1188. [Save Log Job] 2024-10-31 13:22:23.266 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1189. 

  1189. [Save Log Job] 2024-10-31 13:22:24.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1190. 

  1190. [Save Log Job] 2024-10-31 13:22:33.156 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1191. 

  1191. [Save Log Job] 2024-10-31 13:22:43.157 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1192. 

  1192. [Save Log Job] 2024-10-31 13:22:53.157 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1193. 

  1193. [Save Log Job] 2024-10-31 13:23:02.952 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1194. 

  1194. [Save Log Job] 2024-10-31 13:23:03.009 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1195. 

  1195. [Save Log Job] 2024-10-31 13:23:03.009 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1196. 

  1196. [Save Log Job] 2024-10-31 13:23:03.011 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031132223-CACB
    1197. 

  1197. [Save Log Job] 2024-10-31 13:23:03.011 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031132223-CACB''
    1198. 

  1198. [Save Log Job] 2024-10-31 13:23:03.065 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132223-CACB'' start run step 1：initial。
    1199. 

  1199. [Save Log Job] 2024-10-31 13:23:03.065 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1200. 

  1200. [Save Log Job] 2024-10-31 13:23:03.066 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1201. 

  1201. [Save Log Job] 2024-10-31 13:23:03.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1202. 

  1202. [Save Log Job] 2024-10-31 13:23:03.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1203. 

  1203. [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1204. 

  1204. [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1205. 

  1205. [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1206. 

  1206. [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1207. 

  1207. [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1208. 

  1208. [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1209. 

  1209. [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1210. 

  1210. [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1211. 

  1211. [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1212. 

  1212. [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1213. 

  1213. [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1214. 

  1214. [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1215. 

  1215. [Save Log Job] 2024-10-31 13:23:03.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1216. 

  1216. [Save Log Job] 2024-10-31 13:23:03.119 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1217. 

  1217. [Save Log Job] 2024-10-31 13:23:03.159 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1218. 

  1218. [Save Log Job] 2024-10-31 13:23:13.165 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1219. 

  1219. [Save Log Job] 2024-10-31 13:23:23.173 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1220. 

  1220. [Save Log Job] 2024-10-31 13:23:33.139 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132223-CACB'' end step 1
    1221. 

  1221. [Save Log Job] 2024-10-31 13:23:33.176 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1222. 

  1222. [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132223-CACB'' start run step 2：initial。
    1223. 

  1223. [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1224. 

  1224. [Save Log Job] 2024-10-31 13:23:33.190 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1225. 

  1225. [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1226. 

  1226. [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1227. 

  1227. [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1228. 

  1228. [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1229. 

  1229. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1230. 

  1230. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1231. 

  1231. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1232. 

  1232. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1233. 

  1233. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1234. 

  1234. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1235. 

  1235. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1236. 

  1236. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1237. 

  1237. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1238. 

  1238. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1239. 

  1239. [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1240. 

  1240. [Save Log Job] 2024-10-31 13:23:35.752 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1241. 

  1241. [Save Log Job] 2024-10-31 13:23:35.754 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1242. 

  1242. [Save Log Job] 2024-10-31 13:23:35.754 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1243. 

  1243. [Save Log Job] 2024-10-31 13:23:35.754 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1244. 

  1244. [Save Log Job] 2024-10-31 13:23:35.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    1245. 

  1245. [Save Log Job] 2024-10-31 13:23:35.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031132223-CACB
    1246. 

  1246. Start time：2024/10/31 13:23:03
    1247. 

  1247. End time：2024/10/31 13:23:35
    1248. 

  1248. Total time：0:0:32
    1249. 

  1249. [Save Log Job] 2024-10-31 13:23:35.763 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1250. 

  1250. [Save Log Job] 2024-10-31 13:23:39.706 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1251. 

  1251. [Save Log Job] 2024-10-31 13:23:39.706 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1252. 

  1252. [Save Log Job] 2024-10-31 13:23:39.707 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1253. 

  1253. [Save Log Job] 2024-10-31 13:23:39.707 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1254. 

  1254. [Save Log Job] 2024-10-31 13:23:39.707 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1255. 

  1255. [Save Log Job] 2024-10-31 13:23:39.709 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1256. 

  1256. [Save Log Job] 2024-10-31 13:23:39.710 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1257. 

  1257. [Save Log Job] 2024-10-31 13:23:39.711 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311323397064—SFC240912810.csv
    1258. 

  1258. [Save Log Job] 2024-10-31 13:23:39.712 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1259. 

  1259. [Save Log Job] 2024-10-31 13:23:39.712 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311323397064—SFC240912810/.csv
    1260. 

  1260. [Save Log Job] 2024-10-31 13:23:39.776 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String]
    1261. 

  1261. [Save Log Job] 2024-10-31 13:23:46.515 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。
    1262. 

  1262. 

  1263. <==  [Save Log Job] 2024-10-31 13:26:28.015 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1264. 

  1264. [Save Log Job] 2024-10-31 13:26:28.893 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1265. 

  1265. [Save Log Job] 2024-10-31 13:26:28.894 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1266. 

  1266. [Save Log Job] 2024-10-31 13:26:28.941 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1267. 

  1267. [Save Log Job] 2024-10-31 13:26:28.986 LOG.INFO EventService.cs Line:60 Register() - 客户端99e45dd7-c317-484d-be53-265e48822ce5已连接
    1268. 

  1268. [Save Log Job] 2024-10-31 13:26:28.986 LOG.INFO EventService.cs Line:60 Register() - 客户端99e45dd7-c317-484d-be53-265e48822ce5已连接
    1269. 

  1269. <==  [Save Log Job] 2024-10-31 13:26:58.286 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1270. 

  1270. [Save Log Job] 2024-10-31 13:26:59.203 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1271. 

  1271. [Save Log Job] 2024-10-31 13:26:59.203 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1272. 

  1272. [Save Log Job] 2024-10-31 13:26:59.215 LOG.INFO EventService.cs Line:60 Register() - 客户端eaf139b9-493d-4913-9d9e-903c4bbe0a29已连接
    1273. 

  1273. [Save Log Job] 2024-10-31 13:26:59.215 LOG.INFO EventService.cs Line:60 Register() - 客户端eaf139b9-493d-4913-9d9e-903c4bbe0a29已连接
    1274. 

  1274. [Save Log Job] 2024-10-31 13:26:59.267 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1275. 

  1275. [Save Log Job] 2024-10-31 13:27:00.505 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1276. 

  1276. [Save Log Job] 2024-10-31 13:27:00.598 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1277. 

  1277. [Save Log Job] 2024-10-31 13:27:04.278 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1278. 

  1278. [Save Log Job] 2024-10-31 13:27:06.736 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1279. 

  1279. [Save Log Job] 2024-10-31 13:27:06.737 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1280. 

  1280. [Save Log Job] 2024-10-31 13:27:06.742 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1281. 

  1281. [Save Log Job] 2024-10-31 13:27:06.864 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1282. 

  1282. [Save Log Job] 2024-10-31 13:27:11.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1283. 

  1283. [Save Log Job] 2024-10-31 13:27:11.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1284. 

  1284. [Save Log Job] 2024-10-31 13:27:11.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1285. 

  1285. [Save Log Job] 2024-10-31 13:27:36.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    1286. 

  1286. [Save Log Job] 2024-10-31 13:27:36.479 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031132736-CACB
    1287. 

  1287. [Save Log Job] 2024-10-31 13:27:36.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1288. 

  1288. [Save Log Job] 2024-10-31 13:27:36.481 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    1289. 

  1289. [Save Log Job] 2024-10-31 13:27:36.482 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1290. 

  1290. [Save Log Job] 2024-10-31 13:27:36.484 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1291. 

  1291. [Save Log Job] 2024-10-31 13:27:36.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1292. 

  1292. [Save Log Job] 2024-10-31 13:27:36.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1293. 

  1293. [Save Log Job] 2024-10-31 13:27:36.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1294. 

  1294. [Save Log Job] 2024-10-31 13:27:36.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1295. 

  1295. [Save Log Job] 2024-10-31 13:27:36.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1296. 

  1296. [Save Log Job] 2024-10-31 13:27:36.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1297. 

  1297. [Save Log Job] 2024-10-31 13:27:36.596 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1298. 

  1298. [Save Log Job] 2024-10-31 13:27:38.608 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1299. 

  1299. [Save Log Job] 2024-10-31 13:27:40.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1300. 

  1300. [Save Log Job] 2024-10-31 13:27:46.485 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1301. 

  1301. [Save Log Job] 2024-10-31 13:27:56.487 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1302. 

  1302. [Save Log Job] 2024-10-31 13:28:06.488 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1303. 

  1303. [Save Log Job] 2024-10-31 13:28:15.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1304. 

  1304. [Save Log Job] 2024-10-31 13:28:15.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    1305. 

  1305. [Save Log Job] 2024-10-31 13:28:15.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1306. 

  1306. [Save Log Job] 2024-10-31 13:28:15.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031132736-CACB
    1307. 

  1307. [Save Log Job] 2024-10-31 13:28:15.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031132736-CACB''
    1308. 

  1308. [Save Log Job] 2024-10-31 13:28:15.389 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132736-CACB'' start run step 1：initial。
    1309. 

  1309. [Save Log Job] 2024-10-31 13:28:15.390 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1310. 

  1310. [Save Log Job] 2024-10-31 13:28:15.390 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1311. 

  1311. [Save Log Job] 2024-10-31 13:28:15.391 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1312. 

  1312. [Save Log Job] 2024-10-31 13:28:15.391 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1313. 

  1313. [Save Log Job] 2024-10-31 13:28:15.391 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1314. 

  1314. [Save Log Job] 2024-10-31 13:28:15.391 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1315. 

  1315. [Save Log Job] 2024-10-31 13:28:15.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1316. 

  1316. [Save Log Job] 2024-10-31 13:28:15.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1317. 

  1317. [Save Log Job] 2024-10-31 13:28:15.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1318. 

  1318. [Save Log Job] 2024-10-31 13:28:15.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1319. 

  1319. [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1320. 

  1320. [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1321. 

  1321. [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1322. 

  1322. [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1323. 

  1323. [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1324. 

  1324. [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1325. 

  1325. [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1326. 

  1326. [Save Log Job] 2024-10-31 13:28:15.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1327. 

  1327. [Save Log Job] 2024-10-31 13:28:16.489 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1328. 

  1328. [Save Log Job] 2024-10-31 13:28:26.489 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1329. 

  1329. [Save Log Job] 2024-10-31 13:28:36.496 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1330. 

  1330. [Save Log Job] 2024-10-31 13:28:45.461 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132736-CACB'' end step 1
    1331. 

  1331. [Save Log Job] 2024-10-31 13:28:45.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132736-CACB'' start run step 2：initial。
    1332. 

  1332. [Save Log Job] 2024-10-31 13:28:45.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1333. 

  1333. [Save Log Job] 2024-10-31 13:28:45.511 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1334. 

  1334. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1335. 

  1335. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1336. 

  1336. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1337. 

  1337. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1338. 

  1338. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1339. 

  1339. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1340. 

  1340. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1341. 

  1341. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1342. 

  1342. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1343. 

  1343. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1344. 

  1344. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1345. 

  1345. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1346. 

  1346. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1347. 

  1347. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1348. 

  1348. [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1349. 

  1349. [Save Log Job] 2024-10-31 13:28:46.501 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1350. 

  1350. [Save Log Job] 2024-10-31 13:28:48.101 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1351. 

  1351. [Save Log Job] 2024-10-31 13:28:48.103 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1352. 

  1352. [Save Log Job] 2024-10-31 13:28:48.103 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1353. 

  1353. [Save Log Job] 2024-10-31 13:28:48.103 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1354. 

  1354. [Save Log Job] 2024-10-31 13:28:48.106 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    1355. 

  1355. [Save Log Job] 2024-10-31 13:28:48.106 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031132736-CACB
    1356. 

  1356. Start time：2024/10/31 13:28:15
    1357. 

  1357. End time：2024/10/31 13:28:48
    1358. 

  1358. Total time：0:0:32
    1359. 

  1359. [Save Log Job] 2024-10-31 13:28:48.107 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1360. 

  1360. [Save Log Job] 2024-10-31 13:28:50.471 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1361. 

  1361. [Save Log Job] 2024-10-31 13:28:50.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1362. 

  1362. [Save Log Job] 2024-10-31 13:28:50.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1363. 

  1363. [Save Log Job] 2024-10-31 13:28:50.473 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1364. 

  1364. [Save Log Job] 2024-10-31 13:28:50.494 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311328504696—SFC240912810.csv
    1365. 

  1365. [Save Log Job] 2024-10-31 13:28:50.496 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1366. 

  1366. [Save Log Job] 2024-10-31 13:28:50.496 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1367. 

  1367. [Save Log Job] 2024-10-31 13:28:50.496 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1368. 

  1368. [Save Log Job] 2024-10-31 13:28:50.496 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1369. 

  1369. [Save Log Job] 2024-10-31 13:28:50.496 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311328504696—SFC240912810/.csv
    1370. 

  1370. [Save Log Job] 2024-10-31 13:28:50.563 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String]
    1371. 

  1371. [Save Log Job] 2024-10-31 13:28:52.340 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。
    1372. 

  1372. 

  1373. <==  [Save Log Job] 2024-10-31 13:41:35.605 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1374. 

  1374. [Save Log Job] 2024-10-31 13:41:36.535 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1375. 

  1375. [Save Log Job] 2024-10-31 13:41:36.535 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1376. 

  1376. [Save Log Job] 2024-10-31 13:41:36.554 LOG.INFO EventService.cs Line:60 Register() - 客户端e6b361e0-9a41-4c6a-b7fa-9630c1d10ca7已连接
    1377. 

  1377. [Save Log Job] 2024-10-31 13:41:36.554 LOG.INFO EventService.cs Line:60 Register() - 客户端e6b361e0-9a41-4c6a-b7fa-9630c1d10ca7已连接
    1378. 

  1378. [Save Log Job] 2024-10-31 13:41:36.603 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1379. 

  1379. [Save Log Job] 2024-10-31 13:41:37.816 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1380. 

  1380. [Save Log Job] 2024-10-31 13:41:37.940 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1381. 

  1381. [Save Log Job] 2024-10-31 13:41:41.613 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1382. 

  1382. [Save Log Job] 2024-10-31 13:41:43.464 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1383. 

  1383. [Save Log Job] 2024-10-31 13:41:43.466 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1384. 

  1384. [Save Log Job] 2024-10-31 13:41:43.470 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1385. 

  1385. [Save Log Job] 2024-10-31 13:41:43.591 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1386. 

  1386. [Save Log Job] 2024-10-31 13:42:03.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1387. 

  1387. [Save Log Job] 2024-10-31 13:42:03.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1388. 

  1388. [Save Log Job] 2024-10-31 13:42:03.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1389. 

  1389. [Save Log Job] 2024-10-31 13:42:15.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/)
    1390. 

  1390. [Save Log Job] 2024-10-31 13:42:15.860 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031134215-CACB
    1391. 

  1391. [Save Log Job] 2024-10-31 13:42:15.860 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1392. 

  1392. [Save Log Job] 2024-10-31 13:42:15.862 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB
    1393. 

  1393. [Save Log Job] 2024-10-31 13:42:15.863 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1394. 

  1394. [Save Log Job] 2024-10-31 13:42:15.865 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1395. 

  1395. [Save Log Job] 2024-10-31 13:42:15.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1396. 

  1396. [Save Log Job] 2024-10-31 13:42:15.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1397. 

  1397. [Save Log Job] 2024-10-31 13:42:15.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1398. 

  1398. [Save Log Job] 2024-10-31 13:42:15.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1399. 

  1399. [Save Log Job] 2024-10-31 13:42:15.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1400. 

  1400. [Save Log Job] 2024-10-31 13:42:15.978 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1401. 

  1401. [Save Log Job] 2024-10-31 13:42:16.033 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1402. 

  1402. [Save Log Job] 2024-10-31 13:42:17.609 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1403. 

  1403. [Save Log Job] 2024-10-31 13:42:25.865 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1404. 

  1404. [Save Log Job] 2024-10-31 13:42:35.866 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1405. 

  1405. [Save Log Job] 2024-10-31 13:42:45.867 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1406. 

  1406. [Save Log Job] 2024-10-31 13:42:52.607 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1407. 

  1407. [Save Log Job] 2024-10-31 13:42:52.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    1408. 

  1408. [Save Log Job] 2024-10-31 13:42:52.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1409. 

  1409. [Save Log Job] 2024-10-31 13:42:52.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031134215-CACB
    1410. 

  1410. [Save Log Job] 2024-10-31 13:42:52.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031134215-CACB''
    1411. 

  1411. [Save Log Job] 2024-10-31 13:42:52.720 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031134215-CACB'' start run step 1：initial。
    1412. 

  1412. [Save Log Job] 2024-10-31 13:42:52.721 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1413. 

  1413. [Save Log Job] 2024-10-31 13:42:52.722 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1414. 

  1414. [Save Log Job] 2024-10-31 13:42:52.722 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1415. 

  1415. [Save Log Job] 2024-10-31 13:42:52.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1416. 

  1416. [Save Log Job] 2024-10-31 13:42:52.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1417. 

  1417. [Save Log Job] 2024-10-31 13:42:52.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1418. 

  1418. [Save Log Job] 2024-10-31 13:42:52.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1419. 

  1419. [Save Log Job] 2024-10-31 13:42:52.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1420. 

  1420. [Save Log Job] 2024-10-31 13:42:52.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1421. 

  1421. [Save Log Job] 2024-10-31 13:42:52.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1422. 

  1422. [Save Log Job] 2024-10-31 13:42:52.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1423. 

  1423. [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1424. 

  1424. [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1425. 

  1425. [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1426. 

  1426. [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1427. 

  1427. [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1428. 

  1428. [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1429. 

  1429. [Save Log Job] 2024-10-31 13:42:52.776 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1430. 

  1430. [Save Log Job] 2024-10-31 13:42:55.869 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1431. 

  1431. [Save Log Job] 2024-10-31 13:43:05.873 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1432. 

  1432. [Save Log Job] 2024-10-31 13:43:15.877 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1433. 

  1433. [Save Log Job] 2024-10-31 13:43:22.808 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031134215-CACB'' end step 1
    1434. 

  1434. [Save Log Job] 2024-10-31 13:43:22.858 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031134215-CACB'' start run step 2：initial。
    1435. 

  1435. [Save Log Job] 2024-10-31 13:43:22.858 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1436. 

  1436. [Save Log Job] 2024-10-31 13:43:22.858 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1437. 

  1437. [Save Log Job] 2024-10-31 13:43:22.858 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1438. 

  1438. [Save Log Job] 2024-10-31 13:43:22.858 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1439. 

  1439. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1440. 

  1440. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1441. 

  1441. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1442. 

  1442. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1443. 

  1443. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1444. 

  1444. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1445. 

  1445. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1446. 

  1446. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1447. 

  1447. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1448. 

  1448. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1449. 

  1449. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1450. 

  1450. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1451. 

  1451. [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1452. 

  1452. <==  [Save Log Job] 2024-10-31 13:59:11.120 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1453. 

  1453. [Save Log Job] 2024-10-31 13:59:12.049 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1454. 

  1454. [Save Log Job] 2024-10-31 13:59:12.049 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1455. 

  1455. [Save Log Job] 2024-10-31 13:59:12.118 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1456. 

  1456. [Save Log Job] 2024-10-31 13:59:12.140 LOG.INFO EventService.cs Line:55 Register() - 客户端c9419173-b8e4-43fa-983b-785d9f486288已连接
    1457. 

  1457. [Save Log Job] 2024-10-31 13:59:12.140 LOG.INFO EventService.cs Line:60 Register() - 客户端c9419173-b8e4-43fa-983b-785d9f486288已连接
    1458. 

  1458. [Save Log Job] 2024-10-31 13:59:13.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1459. 

  1459. [Save Log Job] 2024-10-31 13:59:13.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1460. 

  1460. [Save Log Job] 2024-10-31 13:59:17.136 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1461. 

  1461. [Save Log Job] 2024-10-31 13:59:20.180 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1462. 

  1462. [Save Log Job] 2024-10-31 13:59:20.181 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1463. 

  1463. [Save Log Job] 2024-10-31 13:59:20.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1464. 

  1464. [Save Log Job] 2024-10-31 13:59:20.308 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1465. 

  1465. [Save Log Job] 2024-10-31 14:00:34.410 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1466. 

  1466. [Save Log Job] 2024-10-31 14:00:34.412 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1467. 

  1467. [Save Log Job] 2024-10-31 14:00:34.412 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1468. 

  1468. [Save Log Job] 2024-10-31 14:01:01.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/EFC241014689/)
    1469. 

  1469. [Save Log Job] 2024-10-31 14:01:01.791 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031140101-CACB
    1470. 

  1470. [Save Log Job] 2024-10-31 14:01:01.791 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1471. 

  1471. [Save Log Job] 2024-10-31 14:01:01.793 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/EFC241014689/|CACB
    1472. 

  1472. [Save Log Job] 2024-10-31 14:01:01.794 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1473. 

  1473. [Save Log Job] 2024-10-31 14:01:01.796 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1474. 

  1474. [Save Log Job] 2024-10-31 14:01:01.846 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1475. 

  1475. [Save Log Job] 2024-10-31 14:01:01.846 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1476. 

  1476. [Save Log Job] 2024-10-31 14:01:01.846 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1477. 

  1477. [Save Log Job] 2024-10-31 14:01:01.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1478. 

  1478. [Save Log Job] 2024-10-31 14:01:01.848 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1479. 

  1479. [Save Log Job] 2024-10-31 14:01:01.908 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1480. 

  1480. [Save Log Job] 2024-10-31 14:01:01.920 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1481. 

  1481. [Save Log Job] 2024-10-31 14:01:03.915 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1482. 

  1482. [Save Log Job] 2024-10-31 14:01:06.084 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1483. 

  1483. [Save Log Job] 2024-10-31 14:01:11.796 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1484. 

  1484. [Save Log Job] 2024-10-31 14:01:21.797 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1485. 

  1485. [Save Log Job] 2024-10-31 14:01:31.799 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1486. 

  1486. [Save Log Job] 2024-10-31 14:01:40.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1487. 

  1487. [Save Log Job] 2024-10-31 14:01:41.023 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1488. 

  1488. [Save Log Job] 2024-10-31 14:01:41.023 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1489. 

  1489. [Save Log Job] 2024-10-31 14:01:41.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031140101-CACB
    1490. 

  1490. [Save Log Job] 2024-10-31 14:01:41.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031140101-CACB''
    1491. 

  1491. [Save Log Job] 2024-10-31 14:01:41.077 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140101-CACB'' start run step 1：initial。
    1492. 

  1492. [Save Log Job] 2024-10-31 14:01:41.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1493. 

  1493. [Save Log Job] 2024-10-31 14:01:41.078 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1494. 

  1494. [Save Log Job] 2024-10-31 14:01:41.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1495. 

  1495. [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1496. 

  1496. [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1497. 

  1497. [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1498. 

  1498. [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1499. 

  1499. [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1500. 

  1500. [Save Log Job] 2024-10-31 14:01:41.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1501. 

  1501. [Save Log Job] 2024-10-31 14:01:41.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1502. 

  1502. [Save Log Job] 2024-10-31 14:01:41.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1503. 

  1503. [Save Log Job] 2024-10-31 14:01:41.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1504. 

  1504. [Save Log Job] 2024-10-31 14:01:41.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1505. 

  1505. [Save Log Job] 2024-10-31 14:01:41.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1506. 

  1506. [Save Log Job] 2024-10-31 14:01:41.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1507. 

  1507. [Save Log Job] 2024-10-31 14:01:41.082 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1508. 

  1508. [Save Log Job] 2024-10-31 14:01:41.083 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1509. 

  1509. [Save Log Job] 2024-10-31 14:01:41.134 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1510. 

  1510. [Save Log Job] 2024-10-31 14:01:41.799 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1511. 

  1511. [Save Log Job] 2024-10-31 14:01:51.804 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1512. 

  1512. [Save Log Job] 2024-10-31 14:02:01.807 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1513. 

  1513. [Save Log Job] 2024-10-31 14:02:11.173 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140101-CACB'' end step 1
    1514. 

  1514. [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140101-CACB'' start run step 2：initial。
    1515. 

  1515. [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1516. 

  1516. [Save Log Job] 2024-10-31 14:02:11.224 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1517. 

  1517. [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1518. 

  1518. [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1519. 

  1519. [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1520. 

  1520. [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1521. 

  1521. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1522. 

  1522. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1523. 

  1523. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1524. 

  1524. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1525. 

  1525. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1526. 

  1526. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1527. 

  1527. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1528. 

  1528. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1529. 

  1529. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1530. 

  1530. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1531. 

  1531. [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1532. 

  1532. [Save Log Job] 2024-10-31 14:02:11.811 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1533. 

  1533. [Save Log Job] 2024-10-31 14:02:13.796 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1534. 

  1534. [Save Log Job] 2024-10-31 14:02:13.796 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1535. 

  1535. [Save Log Job] 2024-10-31 14:02:18.235 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1536. 

  1536. [Save Log Job] 2024-10-31 14:02:18.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1537. 

  1537. [Save Log Job] 2024-10-31 14:02:19.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    1538. 

  1538. [Save Log Job] 2024-10-31 14:02:19.405 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031140101-CACB
    1539. 

  1539. Start time：2024/10/31 14:01:41
    1540. 

  1540. End time：2024/10/31 14:02:19
    1541. 

  1541. Total time：0:0:38
    1542. 

  1542. [Save Log Job] 2024-10-31 14:02:22.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1543. 

  1543. [Save Log Job] 2024-10-31 14:02:22.910 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1544. 

  1544. <==  [Save Log Job] 2024-10-31 14:03:24.942 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1545. 

  1545. [Save Log Job] 2024-10-31 14:03:25.728 LOG.INFO EventService.cs Line:60 Register() - 客户端2b17448f-9af3-475b-b8c8-9bb397f26059已连接
    1546. 

  1546. [Save Log Job] 2024-10-31 14:03:25.907 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1547. 

  1547. [Save Log Job] 2024-10-31 14:03:25.908 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1548. 

  1548. [Save Log Job] 2024-10-31 14:03:25.971 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1549. 

  1549. [Save Log Job] 2024-10-31 14:03:27.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1550. 

  1550. [Save Log Job] 2024-10-31 14:03:27.304 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1551. 

  1551. [Save Log Job] 2024-10-31 14:03:30.982 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1552. 

  1552. [Save Log Job] 2024-10-31 14:04:02.717 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1553. 

  1553. [Save Log Job] 2024-10-31 14:04:02.718 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1554. 

  1554. [Save Log Job] 2024-10-31 14:04:02.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1555. 

  1555. [Save Log Job] 2024-10-31 14:04:02.840 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1556. 

  1556. [Save Log Job] 2024-10-31 14:04:16.138 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1557. 

  1557. [Save Log Job] 2024-10-31 14:04:16.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1558. 

  1558. [Save Log Job] 2024-10-31 14:04:16.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1559. 

  1559. [Save Log Job] 2024-10-31 14:04:47.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/EFC241014689/)
    1560. 

  1560. [Save Log Job] 2024-10-31 14:04:47.507 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031140447-CACB
    1561. 

  1561. [Save Log Job] 2024-10-31 14:04:47.507 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1562. 

  1562. [Save Log Job] 2024-10-31 14:04:47.509 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/EFC241014689/|CACB
    1563. 

  1563. [Save Log Job] 2024-10-31 14:04:47.510 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1564. 

  1564. [Save Log Job] 2024-10-31 14:04:47.514 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1565. 

  1565. [Save Log Job] 2024-10-31 14:04:47.520 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1566. 

  1566. [Save Log Job] 2024-10-31 14:04:47.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1567. 

  1567. [Save Log Job] 2024-10-31 14:04:47.561 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1568. 

  1568. [Save Log Job] 2024-10-31 14:04:47.561 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1569. 

  1569. [Save Log Job] 2024-10-31 14:04:47.562 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1570. 

  1570. [Save Log Job] 2024-10-31 14:04:47.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1571. 

  1571. [Save Log Job] 2024-10-31 14:04:47.624 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1572. 

  1572. [Save Log Job] 2024-10-31 14:04:49.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1573. 

  1573. [Save Log Job] 2024-10-31 14:04:57.514 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1574. 

  1574. [Save Log Job] 2024-10-31 14:05:07.515 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1575. 

  1575. [Save Log Job] 2024-10-31 14:05:17.515 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1576. 

  1576. [Save Log Job] 2024-10-31 14:05:27.515 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1577. 

  1577. [Save Log Job] 2024-10-31 14:05:28.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1578. 

  1578. [Save Log Job] 2024-10-31 14:05:28.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1579. 

  1579. [Save Log Job] 2024-10-31 14:05:28.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1580. 

  1580. [Save Log Job] 2024-10-31 14:05:28.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031140447-CACB
    1581. 

  1581. [Save Log Job] 2024-10-31 14:05:28.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031140447-CACB''
    1582. 

  1582. [Save Log Job] 2024-10-31 14:05:28.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140447-CACB'' start run step 1：initial。
    1583. 

  1583. [Save Log Job] 2024-10-31 14:05:28.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1584. 

  1584. [Save Log Job] 2024-10-31 14:05:28.181 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1585. 

  1585. [Save Log Job] 2024-10-31 14:05:28.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1586. 

  1586. [Save Log Job] 2024-10-31 14:05:28.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1587. 

  1587. [Save Log Job] 2024-10-31 14:05:28.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1588. 

  1588. [Save Log Job] 2024-10-31 14:05:28.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1589. 

  1589. [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1590. 

  1590. [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1591. 

  1591. [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1592. 

  1592. [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1593. 

  1593. [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1594. 

  1594. [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1595. 

  1595. [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1596. 

  1596. [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1597. 

  1597. [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1598. 

  1598. [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1599. 

  1599. [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1600. 

  1600. [Save Log Job] 2024-10-31 14:05:28.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1601. 

  1601. [Save Log Job] 2024-10-31 14:05:37.517 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1602. 

  1602. [Save Log Job] 2024-10-31 14:05:47.523 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1603. 

  1603. [Save Log Job] 2024-10-31 14:05:57.529 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1604. 

  1604. [Save Log Job] 2024-10-31 14:05:58.231 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140447-CACB'' end step 1
    1605. 

  1605. [Save Log Job] 2024-10-31 14:05:58.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140447-CACB'' start run step 2：initial。
    1606. 

  1606. [Save Log Job] 2024-10-31 14:05:58.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1607. 

  1607. [Save Log Job] 2024-10-31 14:05:58.282 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1608. 

  1608. [Save Log Job] 2024-10-31 14:05:58.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1609. 

  1609. [Save Log Job] 2024-10-31 14:05:58.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1610. 

  1610. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1611. 

  1611. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1612. 

  1612. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1613. 

  1613. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1614. 

  1614. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1615. 

  1615. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1616. 

  1616. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1617. 

  1617. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1618. 

  1618. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1619. 

  1619. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1620. 

  1620. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1621. 

  1621. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1622. 

  1622. [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1623. 

  1623. [Save Log Job] 2024-10-31 14:06:00.737 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1624. 

  1624. [Save Log Job] 2024-10-31 14:06:04.043 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1625. 

  1625. [Save Log Job] 2024-10-31 14:06:04.218 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1626. 

  1626. [Save Log Job] 2024-10-31 14:06:04.219 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1627. 

  1627. [Save Log Job] 2024-10-31 14:06:05.176 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    1628. 

  1628. [Save Log Job] 2024-10-31 14:06:05.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031140447-CACB
    1629. 

  1629. Start time：2024/10/31 14:05:28
    1630. 

  1630. End time：2024/10/31 14:06:05
    1631. 

  1631. Total time：0:0:37
    1632. 

  1632. [Save Log Job] 2024-10-31 14:06:10.313 LOG.ERROR LOG.cs Line:51 Write() - 
    1633. 

  1633. System.Threading.ThreadAbortException: Thread was being aborted.
    1634. 

  1634.    在 System.Diagnostics.StackFrameHelper.InitializeSourceInfo(Int32 iSkip, Boolean fNeedFileInfo, Exception exception)
    1635. 

  1635.    在 System.Diagnostics.StackTrace.CaptureStackTrace(Int32 iSkip, Boolean fNeedFileInfo, Thread targetThread, Exception e)
    1636. 

  1636.    在 System.Diagnostics.StackTrace..ctor(Boolean fNeedFileInfo)
    1637. 

  1637.    在 Aitex.Core.RT.Log.LogManager.CacheLog(String message, Level level, Exception exception, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LogManager.cs:行号 128
    1638. 

  1638.    在 Aitex.Core.RT.Log.LogManager.Info(String message, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LogManager.cs:行号 53
    1639. 

  1639.    在 Aitex.Core.RT.Log.LOG.Info(String message, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LOG.cs:行号 16
    1640. 

  1640.    在 Aitex.Core.MES.YZQZ.YZQZFabAuto.work(Boolean start, Boolean end) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\YZQZ\YZQZFabAuto.cs:行号 144
    1641. 

  1641.    在 Aitex.Core.MES.YZQZ.YZQZFabAuto.OnTimer() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\YZQZ\YZQZFabAuto.cs:行号 139
    1642. 

  1642.    在 Aitex.Core.Util.PeriodicJob.Run() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Utilities\PeriodicJob.cs:行号 116
    1643. 

  1643. [Save Log Job] 2024-10-31 14:06:11.249 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1644. 

  1644. [Save Log Job] 2024-10-31 14:06:11.249 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1645. 

  1645. [Save Log Job] 2024-10-31 14:06:11.249 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311406095336—SFC240912810-EFC241014689.csv
    1646. 

  1646. [Save Log Job] 2024-10-31 14:06:11.250 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1647. 

  1647. [Save Log Job] 2024-10-31 14:06:11.252 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311406095336—SFC240912810/EFC241014689/.csv
    1648. 

  1648. [Save Log Job] 2024-10-31 14:06:11.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1649. 

  1649. [Save Log Job] 2024-10-31 14:06:14.320 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1650. 

  1650. [Save Log Job] 2024-10-31 14:06:14.320 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1651. 

  1651. [Save Log Job] 2024-10-31 14:06:14.321 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1652. 

  1652. [Save Log Job] 2024-10-31 14:06:15.615 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。
    1653. 

  1653. 

  1654. [Save Log Job] 2024-10-31 14:06:54.505 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String]
    1655. 

  1655. [Save Log Job] 2024-10-31 14:09:08.595 LOG.INFO YZQZFabAuto.cs Line:102 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":201,"Message":"Value cannot be null.\r\nParameter name: value","Data":null}
    1656. 

  1656. <==  [Save Log Job] 2024-10-31 14:28:59.139 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1657. 

  1657. [Save Log Job] 2024-10-31 14:29:00.032 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1658. 

  1658. [Save Log Job] 2024-10-31 14:29:00.035 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1659. 

  1659. [Save Log Job] 2024-10-31 14:29:00.109 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1660. 

  1660. [Save Log Job] 2024-10-31 14:29:00.257 LOG.INFO EventService.cs Line:60 Register() - 客户端4873e6b2-5db9-47c1-acab-caff677a7827已连接
    1661. 

  1661. [Save Log Job] 2024-10-31 14:29:01.513 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1662. 

  1662. [Save Log Job] 2024-10-31 14:29:01.765 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1663. 

  1663. [Save Log Job] 2024-10-31 14:29:05.125 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1664. 

  1664. [Save Log Job] 2024-10-31 14:29:10.683 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1665. 

  1665. [Save Log Job] 2024-10-31 14:29:10.685 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1666. 

  1666. [Save Log Job] 2024-10-31 14:29:10.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1667. 

  1667. [Save Log Job] 2024-10-31 14:29:10.856 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1668. 

  1668. [Save Log Job] 2024-10-31 14:29:24.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1669. 

  1669. [Save Log Job] 2024-10-31 14:29:24.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1670. 

  1670. [Save Log Job] 2024-10-31 14:29:24.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1671. 

  1671. [Save Log Job] 2024-10-31 14:29:43.043 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/EFC241014689)
    1672. 

  1672. [Save Log Job] 2024-10-31 14:29:43.065 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031142943-CACB
    1673. 

  1673. [Save Log Job] 2024-10-31 14:29:43.065 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1674. 

  1674. [Save Log Job] 2024-10-31 14:29:43.067 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/EFC241014689|CACB
    1675. 

  1675. [Save Log Job] 2024-10-31 14:29:43.068 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1676. 

  1676. [Save Log Job] 2024-10-31 14:29:43.070 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1677. 

  1677. [Save Log Job] 2024-10-31 14:29:43.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1678. 

  1678. [Save Log Job] 2024-10-31 14:29:43.122 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1679. 

  1679. [Save Log Job] 2024-10-31 14:29:43.122 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1680. 

  1680. [Save Log Job] 2024-10-31 14:29:43.123 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1681. 

  1681. [Save Log Job] 2024-10-31 14:29:43.125 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1682. 

  1682. [Save Log Job] 2024-10-31 14:29:43.125 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1683. 

  1683. [Save Log Job] 2024-10-31 14:29:43.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1684. 

  1684. [Save Log Job] 2024-10-31 14:29:45.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1685. 

  1685. [Save Log Job] 2024-10-31 14:29:53.071 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1686. 

  1686. [Save Log Job] 2024-10-31 14:30:03.072 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1687. 

  1687. [Save Log Job] 2024-10-31 14:30:13.073 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1688. 

  1688. [Save Log Job] 2024-10-31 14:30:23.074 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1689. 

  1689. [Save Log Job] 2024-10-31 14:30:27.813 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1690. 

  1690. [Save Log Job] 2024-10-31 14:30:27.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1691. 

  1691. [Save Log Job] 2024-10-31 14:30:27.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1692. 

  1692. [Save Log Job] 2024-10-31 14:30:27.877 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031142943-CACB
    1693. 

  1693. [Save Log Job] 2024-10-31 14:30:27.877 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031142943-CACB''
    1694. 

  1694. [Save Log Job] 2024-10-31 14:30:27.932 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031142943-CACB'' start run step 1：initial。
    1695. 

  1695. [Save Log Job] 2024-10-31 14:30:27.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1696. 

  1696. [Save Log Job] 2024-10-31 14:30:27.933 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1697. 

  1697. [Save Log Job] 2024-10-31 14:30:27.934 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1698. 

  1698. [Save Log Job] 2024-10-31 14:30:27.934 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1699. 

  1699. [Save Log Job] 2024-10-31 14:30:27.935 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1700. 

  1700. [Save Log Job] 2024-10-31 14:30:27.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1701. 

  1701. [Save Log Job] 2024-10-31 14:30:27.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1702. 

  1702. [Save Log Job] 2024-10-31 14:30:27.937 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1703. 

  1703. [Save Log Job] 2024-10-31 14:30:27.937 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1704. 

  1704. [Save Log Job] 2024-10-31 14:30:27.937 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1705. 

  1705. [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1706. 

  1706. [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1707. 

  1707. [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1708. 

  1708. [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1709. 

  1709. [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1710. 

  1710. [Save Log Job] 2024-10-31 14:30:27.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1711. 

  1711. [Save Log Job] 2024-10-31 14:30:27.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1712. 

  1712. [Save Log Job] 2024-10-31 14:30:27.992 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1713. 

  1713. [Save Log Job] 2024-10-31 14:30:33.085 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1714. 

  1714. [Save Log Job] 2024-10-31 14:30:43.092 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1715. 

  1715. [Save Log Job] 2024-10-31 14:30:53.097 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1716. 

  1716. [Save Log Job] 2024-10-31 14:30:58.022 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031142943-CACB'' end step 1
    1717. 

  1717. [Save Log Job] 2024-10-31 14:30:58.073 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031142943-CACB'' start run step 2：initial。
    1718. 

  1718. [Save Log Job] 2024-10-31 14:30:58.073 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1719. 

  1719. [Save Log Job] 2024-10-31 14:30:58.074 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1720. 

  1720. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1721. 

  1721. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1722. 

  1722. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1723. 

  1723. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1724. 

  1724. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1725. 

  1725. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1726. 

  1726. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1727. 

  1727. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1728. 

  1728. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1729. 

  1729. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1730. 

  1730. [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1731. 

  1731. [Save Log Job] 2024-10-31 14:30:58.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1732. 

  1732. [Save Log Job] 2024-10-31 14:30:58.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1733. 

  1733. [Save Log Job] 2024-10-31 14:30:58.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1734. 

  1734. [Save Log Job] 2024-10-31 14:30:58.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1735. 

  1735. [Save Log Job] 2024-10-31 14:31:00.541 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1736. 

  1736. [Save Log Job] 2024-10-31 14:31:00.543 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1737. 

  1737. [Save Log Job] 2024-10-31 14:31:00.543 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1738. 

  1738. [Save Log Job] 2024-10-31 14:31:04.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1739. 

  1739. [Save Log Job] 2024-10-31 14:31:04.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    1740. 

  1740. [Save Log Job] 2024-10-31 14:31:04.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031142943-CACB
    1741. 

  1741. Start time：2024/10/31 14:30:27
    1742. 

  1742. End time：2024/10/31 14:31:04
    1743. 

  1743. Total time：0:0:36
    1744. 

  1744. [Save Log Job] 2024-10-31 14:31:04.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1745. 

  1745. [Save Log Job] 2024-10-31 14:31:04.563 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311431045628—SFC240912810-EFC241014689.csv
    1746. 

  1746. [Save Log Job] 2024-10-31 14:31:04.565 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1747. 

  1747. [Save Log Job] 2024-10-31 14:31:04.565 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311431045628—SFC240912810/EFC241014689.csv
    1748. 

  1748. [Save Log Job] 2024-10-31 14:31:05.428 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。
    1749. 

  1749. 

  1750. [Save Log Job] 2024-10-31 14:31:07.371 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1751. 

  1751. [Save Log Job] 2024-10-31 14:31:07.372 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1752. 

  1752. [Save Log Job] 2024-10-31 14:31:07.372 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1753. 

  1753. [Save Log Job] 2024-10-31 14:31:11.714 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String]
    1754. 

  1754. <==  [Save Log Job] 2024-10-31 14:33:17.709 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1755. 

  1755. [Save Log Job] 2024-10-31 14:33:18.756 LOG.INFO EventService.cs Line:60 Register() - 客户端4690f899-0613-4896-9530-7505c2c26c7e已连接
    1756. 

  1756. [Save Log Job] 2024-10-31 14:33:18.843 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1757. 

  1757. [Save Log Job] 2024-10-31 14:33:18.844 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1758. 

  1758. [Save Log Job] 2024-10-31 14:33:18.896 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1759. 

  1759. [Save Log Job] 2024-10-31 14:33:20.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1760. 

  1760. [Save Log Job] 2024-10-31 14:33:20.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1761. 

  1761. [Save Log Job] 2024-10-31 14:33:23.909 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1762. 

  1762. <==  [Save Log Job] 2024-10-31 15:04:40.888 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1763. 

  1763. [Save Log Job] 2024-10-31 15:04:42.119 LOG.INFO EventService.cs Line:60 Register() - 客户端4c63ba02-8a3a-4679-9451-0f609576344d已连接
    1764. 

  1764. [Save Log Job] 2024-10-31 15:04:42.194 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1765. 

  1765. [Save Log Job] 2024-10-31 15:04:42.195 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1766. 

  1766. [Save Log Job] 2024-10-31 15:04:42.294 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1767. 

  1767. [Save Log Job] 2024-10-31 15:04:43.649 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1768. 

  1768. [Save Log Job] 2024-10-31 15:04:43.762 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1769. 

  1769. [Save Log Job] 2024-10-31 15:04:47.309 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1770. 

  1770. [Save Log Job] 2024-10-31 15:04:49.907 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1771. 

  1771. [Save Log Job] 2024-10-31 15:04:49.909 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1772. 

  1772. [Save Log Job] 2024-10-31 15:04:49.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1773. 

  1773. [Save Log Job] 2024-10-31 15:04:50.086 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1774. 

  1774. [Save Log Job] 2024-10-31 15:05:03.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1775. 

  1775. [Save Log Job] 2024-10-31 15:05:03.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1776. 

  1776. [Save Log Job] 2024-10-31 15:05:03.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1777. 

  1777. [Save Log Job] 2024-10-31 15:07:06.728 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/EFC241014689)
    1778. 

  1778. [Save Log Job] 2024-10-31 15:07:06.751 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031150706-CACB
    1779. 

  1779. [Save Log Job] 2024-10-31 15:07:06.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1780. 

  1780. [Save Log Job] 2024-10-31 15:07:06.753 LOG.INFO YZQZFabAuto.cs Line:132 StartJobRecord() - StartJobRecord|start|SFC240912810/EFC241014689|CACB
    1781. 

  1781. [Save Log Job] 2024-10-31 15:07:06.753 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1782. 

  1782. [Save Log Job] 2024-10-31 15:07:06.756 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1783. 

  1783. [Save Log Job] 2024-10-31 15:07:06.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1784. 

  1784. [Save Log Job] 2024-10-31 15:07:06.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1785. 

  1785. [Save Log Job] 2024-10-31 15:07:06.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1786. 

  1786. [Save Log Job] 2024-10-31 15:07:06.808 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1787. 

  1787. [Save Log Job] 2024-10-31 15:07:06.809 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1788. 

  1788. [Save Log Job] 2024-10-31 15:07:06.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1789. 

  1789. [Save Log Job] 2024-10-31 15:07:06.940 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1790. 

  1790. [Save Log Job] 2024-10-31 15:07:08.915 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1791. 

  1791. [Save Log Job] 2024-10-31 15:07:10.506 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1792. 

  1792. [Save Log Job] 2024-10-31 15:07:16.756 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1793. 

  1793. [Save Log Job] 2024-10-31 15:07:26.761 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1794. 

  1794. [Save Log Job] 2024-10-31 15:07:36.758 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1795. 

  1795. [Save Log Job] 2024-10-31 15:07:45.550 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1796. 

  1796. [Save Log Job] 2024-10-31 15:07:45.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    1797. 

  1797. [Save Log Job] 2024-10-31 15:07:45.611 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1798. 

  1798. [Save Log Job] 2024-10-31 15:07:45.613 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031150706-CACB
    1799. 

  1799. [Save Log Job] 2024-10-31 15:07:45.613 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031150706-CACB''
    1800. 

  1800. [Save Log Job] 2024-10-31 15:07:45.666 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031150706-CACB'' start run step 1：initial。
    1801. 

  1801. [Save Log Job] 2024-10-31 15:07:45.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1802. 

  1802. [Save Log Job] 2024-10-31 15:07:45.667 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1803. 

  1803. [Save Log Job] 2024-10-31 15:07:45.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1804. 

  1804. [Save Log Job] 2024-10-31 15:07:45.668 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1805. 

  1805. [Save Log Job] 2024-10-31 15:07:45.668 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1806. 

  1806. [Save Log Job] 2024-10-31 15:07:45.669 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1807. 

  1807. [Save Log Job] 2024-10-31 15:07:45.669 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1808. 

  1808. [Save Log Job] 2024-10-31 15:07:45.669 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1809. 

  1809. [Save Log Job] 2024-10-31 15:07:45.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1810. 

  1810. [Save Log Job] 2024-10-31 15:07:45.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1811. 

  1811. [Save Log Job] 2024-10-31 15:07:45.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1812. 

  1812. [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1813. 

  1813. [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1814. 

  1814. [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1815. 

  1815. [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1816. 

  1816. [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1817. 

  1817. [Save Log Job] 2024-10-31 15:07:45.672 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1818. 

  1818. [Save Log Job] 2024-10-31 15:07:45.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1819. 

  1819. [Save Log Job] 2024-10-31 15:07:46.761 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1820. 

  1820. [Save Log Job] 2024-10-31 15:07:56.769 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1821. 

  1821. [Save Log Job] 2024-10-31 15:08:06.774 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1822. 

  1822. [Save Log Job] 2024-10-31 15:08:15.745 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031150706-CACB'' end step 1
    1823. 

  1823. [Save Log Job] 2024-10-31 15:08:15.797 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031150706-CACB'' start run step 2：initial。
    1824. 

  1824. [Save Log Job] 2024-10-31 15:08:15.797 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1825. 

  1825. [Save Log Job] 2024-10-31 15:08:15.797 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1826. 

  1826. [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1827. 

  1827. [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1828. 

  1828. [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1829. 

  1829. [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1830. 

  1830. [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1831. 

  1831. [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。
    1832. 

  1832. [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1833. 

  1833. [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1834. 

  1834. [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1835. 

  1835. [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1836. 

  1836. [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1837. 

  1837. [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1838. 

  1838. [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1839. 

  1839. [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1840. 

  1840. [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1841. 

  1841. [Save Log Job] 2024-10-31 15:08:16.787 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1842. 

  1842. [Save Log Job] 2024-10-31 15:08:18.249 LOG.INFO YZQZFabAuto.cs Line:178 EndJobRecord() - EndJobRecord|
    1843. 

  1843. [Save Log Job] 2024-10-31 15:08:18.249 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1844. 

  1844. [Save Log Job] 2024-10-31 15:08:18.251 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0
    1845. 

  1845. [Save Log Job] 2024-10-31 15:08:22.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1846. 

  1846. [Save Log Job] 2024-10-31 15:08:22.441 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    1847. 

  1847. [Save Log Job] 2024-10-31 15:08:22.441 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031150706-CACB
    1848. 

  1848. Start time：2024/10/31 15:07:45
    1849. 

  1849. End time：2024/10/31 15:08:22
    1850. 

  1850. Total time：0:0:36
    1851. 

  1851. [Save Log Job] 2024-10-31 15:08:22.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1852. 

  1852. [Save Log Job] 2024-10-31 15:08:22.465 LOG.INFO YZQZFabAuto.cs Line:207 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311508224532—SFC240912810-EFC241014689.csv
    1853. 

  1853. [Save Log Job] 2024-10-31 15:08:22.467 LOG.INFO YZQZFabAuto.cs Line:252 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311508224532—SFC240912810/EFC241014689.csv
    1854. 

  1854. [Save Log Job] 2024-10-31 15:08:22.496 LOG.ERROR LOG.cs Line:51 Write() - 
    1855. 

  1855. System.Threading.ThreadAbortException: Thread was being aborted.
    1856. 

  1856.    在 System.Diagnostics.StackFrameHelper.InitializeSourceInfo(Int32 iSkip, Boolean fNeedFileInfo, Exception exception)
    1857. 

  1857.    在 System.Diagnostics.StackTrace.CaptureStackTrace(Int32 iSkip, Boolean fNeedFileInfo, Thread targetThread, Exception e)
    1858. 

  1858.    在 System.Diagnostics.StackTrace..ctor(Boolean fNeedFileInfo)
    1859. 

  1859.    在 Aitex.Core.RT.Log.LogManager.CacheLog(String message, Level level, Exception exception, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LogManager.cs:行号 128
    1860. 

  1860.    在 Aitex.Core.RT.Log.LogManager.Info(String message, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LogManager.cs:行号 53
    1861. 

  1861.    在 Aitex.Core.RT.Log.LOG.Info(String message, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LOG.cs:行号 16
    1862. 

  1862.    在 Aitex.Core.MES.YZQZ.YZQZFabAuto.work(Boolean start, Boolean end) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\YZQZ\YZQZFabAuto.cs:行号 155
    1863. 

  1863.    在 Aitex.Core.MES.YZQZ.YZQZFabAuto.OnTimer() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\YZQZ\YZQZFabAuto.cs:行号 150
    1864. 

  1864.    在 Aitex.Core.Util.PeriodicJob.Run() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Utilities\PeriodicJob.cs:行号 116
    1865. 

  1865. [Save Log Job] 2024-10-31 15:08:22.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1866. 

  1866. [Save Log Job] 2024-10-31 15:08:25.874 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1867. 

  1867. [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1868. 

  1868. [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1869. 

  1869. [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1870. 

  1870. [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1871. 

  1871. [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1872. 

  1872. [Save Log Job] 2024-10-31 15:08:25.925 LOG.INFO YZQZFabAuto.cs Line:284 Export2CsvWanPanFile() - 用户名或密码不正确。
    1873. 

  1873. 

  1874. [Save Log Job] 2024-10-31 15:09:51.589 LOG.INFO YZQZFabAuto.cs Line:113 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    1875. 

  1875. <==  [Save Log Job] 2024-10-31 15:42:01.192 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1876. 

  1876. [Save Log Job] 2024-10-31 15:42:02.471 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1877. 

  1877. [Save Log Job] 2024-10-31 15:42:02.471 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1878. 

  1878. [Save Log Job] 2024-10-31 15:42:02.480 LOG.INFO EventService.cs Line:60 Register() - 客户端e4840b76-5b3d-4cc5-b4a6-9f226a4d29b1已连接
    1879. 

  1879. [Save Log Job] 2024-10-31 15:42:02.586 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1880. 

  1880. [Save Log Job] 2024-10-31 15:42:03.957 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1881. 

  1881. [Save Log Job] 2024-10-31 15:42:04.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1882. 

  1882. [Save Log Job] 2024-10-31 15:42:07.603 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1883. 

  1883. [Save Log Job] 2024-10-31 15:42:49.997 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1884. 

  1884. [Save Log Job] 2024-10-31 15:42:49.999 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1885. 

  1885. [Save Log Job] 2024-10-31 15:42:50.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1886. 

  1886. [Save Log Job] 2024-10-31 15:42:50.178 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1887. 

  1887. [Save Log Job] 2024-10-31 15:44:58.867 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1888. 

  1888. [Save Log Job] 2024-10-31 15:44:58.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1889. 

  1889. [Save Log Job] 2024-10-31 15:44:58.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1890. 

  1890. [Save Log Job] 2024-10-31 15:45:19.950 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, )
    1891. 

  1891. [Save Log Job] 2024-10-31 15:45:19.975 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031154519-CACB
    1892. 

  1892. [Save Log Job] 2024-10-31 15:45:19.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1893. 

  1893. [Save Log Job] 2024-10-31 15:45:19.976 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start||CACB
    1894. 

  1894. [Save Log Job] 2024-10-31 15:45:19.977 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1895. 

  1895. [Save Log Job] 2024-10-31 15:45:19.980 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1896. 

  1896. [Save Log Job] 2024-10-31 15:45:20.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1897. 

  1897. [Save Log Job] 2024-10-31 15:45:20.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1898. 

  1898. [Save Log Job] 2024-10-31 15:45:20.032 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1899. 

  1899. [Save Log Job] 2024-10-31 15:45:20.033 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1900. 

  1900. [Save Log Job] 2024-10-31 15:45:20.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1901. 

  1901. [Save Log Job] 2024-10-31 15:45:20.049 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1902. 

  1902. [Save Log Job] 2024-10-31 15:45:20.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1903. 

  1903. [Save Log Job] 2024-10-31 15:45:21.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1904. 

  1904. [Save Log Job] 2024-10-31 15:45:29.981 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1905. 

  1905. [Save Log Job] 2024-10-31 15:45:39.982 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1906. 

  1906. [Save Log Job] 2024-10-31 15:45:49.983 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1907. 

  1907. [Save Log Job] 2024-10-31 15:46:21.546 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1908. 

  1908. [Save Log Job] 2024-10-31 15:46:35.806 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1909. 

  1909. [Save Log Job] 2024-10-31 15:46:52.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1910. 

  1910. [Save Log Job] 2024-10-31 15:46:52.179 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1911. 

  1911. [Save Log Job] 2024-10-31 15:46:53.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 1.6 minitues。
    1912. 

  1912. [Save Log Job] 2024-10-31 15:46:53.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1913. 

  1913. [Save Log Job] 2024-10-31 15:46:53.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031154519-CACB
    1914. 

  1914. [Save Log Job] 2024-10-31 15:46:53.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031154519-CACB''
    1915. 

  1915. [Save Log Job] 2024-10-31 15:47:05.730 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1916. 

  1916. [Save Log Job] 2024-10-31 15:48:40.664 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1917. 

  1917. [Save Log Job] 2024-10-31 15:51:07.533 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1918. 

  1918. [Save Log Job] 2024-10-31 15:51:07.533 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1919. 

  1919. [Save Log Job] 2024-10-31 15:51:07.558 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1920. 

  1920. [Save Log Job] 2024-10-31 15:51:07.669 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311551076673—.csv
    1921. 

  1921. [Save Log Job] 2024-10-31 15:51:12.908 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311551076673—.csv
    1922. 

  1922. [Save Log Job] 2024-10-31 15:51:12.922 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1923. 

  1923. [Save Log Job] 2024-10-31 15:51:13.918 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。
    1924. 

  1924. 

  1925. [Save Log Job] 2024-10-31 15:51:13.918 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031154519-CACB
    1926. 

  1926. Start time：2024/10/31 15:46:53
    1927. 

  1927. End time：2024/10/31 15:51:13
    1928. 

  1928. Total time：0:4:20
    1929. 

  1929. [Save Log Job] 2024-10-31 15:51:13.920 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    1930. 

  1930. [Save Log Job] 2024-10-31 15:51:19.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1931. 

  1931. [Save Log Job] 2024-10-31 15:51:19.785 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1932. 

  1932. [Save Log Job] 2024-10-31 15:51:23.134 LOG.INFO YZQZFabAuto.cs Line:102 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    1933. 

  1933. [Save Log Job] 2024-10-31 15:51:49.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file  CACB  save completed
    1934. 

  1934. [Save Log Job] 2024-10-31 15:51:49.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    1935. 

  1935. [Save Log Job] 2024-10-31 15:51:53.728 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    1936. 

  1936. [Save Log Job] 2024-10-31 15:51:53.728 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1937. 

  1937. [Save Log Job] 2024-10-31 15:52:04.678 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmRange, 100)
    1938. 

  1938. [Save Log Job] 2024-10-31 15:52:05.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmTime, 100)
    1939. 

  1939. [Save Log Job] 2024-10-31 15:52:30.586 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1940. 

  1940. [Save Log Job] 2024-10-31 15:53:41.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, )
    1941. 

  1941. [Save Log Job] 2024-10-31 15:55:10.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1942. 

  1942. [Save Log Job] 2024-10-31 15:55:45.004 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031155341-CACB
    1943. 

  1943. [Save Log Job] 2024-10-31 15:55:45.004 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1944. 

  1944. [Save Log Job] 2024-10-31 15:55:45.009 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1945. 

  1945. [Save Log Job] 2024-10-31 15:56:05.344 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start||CACB
    1946. 

  1946. [Save Log Job] 2024-10-31 15:56:05.344 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1947. 

  1947. [Save Log Job] 2024-10-31 15:56:16.441 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1948. 

  1948. [Save Log Job] 2024-10-31 15:56:41.909 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1949. 

  1949. [Save Log Job] 2024-10-31 15:56:53.841 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0
    1950. 

  1950. [Save Log Job] 2024-10-31 15:56:53.886 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord|
    1951. 

  1951. <==  [Save Log Job] 2024-10-31 16:44:37.752 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1952. 

  1952. [Save Log Job] 2024-10-31 16:44:38.743 LOG.INFO EventService.cs Line:60 Register() - 客户端ccbfbe9d-0cdb-4f56-9a1b-a58fbaaee3b3已连接
    1953. 

  1953. [Save Log Job] 2024-10-31 16:44:38.846 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1954. 

  1954. [Save Log Job] 2024-10-31 16:44:38.846 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1955. 

  1955. [Save Log Job] 2024-10-31 16:44:38.930 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1956. 

  1956. [Save Log Job] 2024-10-31 16:44:44.890 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1957. 

  1957. [Save Log Job] 2024-10-31 16:45:09.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1958. 

  1958. [Save Log Job] 2024-10-31 16:45:14.756 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1959. 

  1959. [Save Log Job] 2024-10-31 16:45:33.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1960. 

  1960. [Save Log Job] 2024-10-31 16:45:52.287 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    1961. 

  1961. [Save Log Job] 2024-10-31 16:45:56.584 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    1962. 

  1962. [Save Log Job] 2024-10-31 16:45:56.589 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    1963. 

  1963. [Save Log Job] 2024-10-31 16:45:59.523 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    1964. 

  1964. [Save Log Job] 2024-10-31 16:46:29.458 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1965. 

  1965. [Save Log Job] 2024-10-31 16:46:29.459 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1966. 

  1966. [Save Log Job] 2024-10-31 16:46:29.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1967. 

  1967. [Save Log Job] 2024-10-31 16:46:29.601 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1968. 

  1968. [Save Log Job] 2024-10-31 16:46:43.911 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1969. 

  1969. [Save Log Job] 2024-10-31 16:46:43.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1970. 

  1970. [Save Log Job] 2024-10-31 16:46:43.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1971. 

  1971. [Save Log Job] 2024-10-31 16:47:03.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, )
    1972. 

  1972. [Save Log Job] 2024-10-31 16:47:05.673 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031164703-CACB
    1973. 

  1973. [Save Log Job] 2024-10-31 16:47:05.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1974. 

  1974. [Save Log Job] 2024-10-31 16:47:05.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1975. 

  1975. [Save Log Job] 2024-10-31 16:47:05.705 LOG.INFO YZQZFabAuto.cs Line:160 StartJobRecord() - StartJobRecord|start||CACB
    1976. 

  1976. [Save Log Job] 2024-10-31 16:47:05.710 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    1977. 

  1977. [Save Log Job] 2024-10-31 16:47:05.717 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    1978. 

  1978. [Save Log Job] 2024-10-31 16:47:15.918 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    1979. 

  1979. [Save Log Job] 2024-10-31 16:47:19.284 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    1980. 

  1980. [Save Log Job] 2024-10-31 16:47:19.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1981. 

  1981. [Save Log Job] 2024-10-31 16:47:19.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1982. 

  1982. [Save Log Job] 2024-10-31 16:47:19.287 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1983. 

  1983. [Save Log Job] 2024-10-31 16:47:19.307 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1984. 

  1984. [Save Log Job] 2024-10-31 16:47:19.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1985. 

  1985. [Save Log Job] 2024-10-31 16:47:20.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1986. 

  1986. [Save Log Job] 2024-10-31 16:47:20.808 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    1987. 

  1987. [Save Log Job] 2024-10-31 16:47:21.892 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1988. 

  1988. [Save Log Job] 2024-10-31 16:47:25.919 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    1989. 

  1989. [Save Log Job] 2024-10-31 16:47:35.920 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    1990. 

  1990. [Save Log Job] 2024-10-31 16:47:45.921 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    1991. 

  1991. [Save Log Job] 2024-10-31 16:47:55.921 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    1992. 

  1992. [Save Log Job] 2024-10-31 16:47:56.932 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1993. 

  1993. [Save Log Job] 2024-10-31 16:47:56.993 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    1994. 

  1994. [Save Log Job] 2024-10-31 16:47:56.993 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1995. 

  1995. [Save Log Job] 2024-10-31 16:47:56.996 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031164703-CACB
    1996. 

  1996. [Save Log Job] 2024-10-31 16:47:56.996 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031164703-CACB''
    1997. 

  1997. [Save Log Job] 2024-10-31 16:47:57.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031164703-CACB'' start run step 1：initial。
    1998. 

  1998. [Save Log Job] 2024-10-31 16:47:57.055 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1999. 

  1999. [Save Log Job] 2024-10-31 16:47:57.055 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    2000. 

  2000. [Save Log Job] 2024-10-31 16:47:57.056 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    2001. 

  2001. [Save Log Job] 2024-10-31 16:47:57.056 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    2002. 

  2002. [Save Log Job] 2024-10-31 16:47:57.057 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    2003. 

  2003. [Save Log Job] 2024-10-31 16:47:57.057 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    2004. 

  2004. [Save Log Job] 2024-10-31 16:47:57.058 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    2005. 

  2005. [Save Log Job] 2024-10-31 16:47:57.058 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    2006. 

  2006. [Save Log Job] 2024-10-31 16:47:57.058 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    2007. 

  2007. [Save Log Job] 2024-10-31 16:47:57.059 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    2008. 

  2008. [Save Log Job] 2024-10-31 16:47:57.059 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    2009. 

  2009. [Save Log Job] 2024-10-31 16:47:57.060 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    2010. 

  2010. [Save Log Job] 2024-10-31 16:47:57.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    2011. 

  2011. [Save Log Job] 2024-10-31 16:47:57.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    2012. 

  2012. [Save Log Job] 2024-10-31 16:47:57.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    2013. 

  2013. [Save Log Job] 2024-10-31 16:47:57.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    2014. 

  2014. [Save Log Job] 2024-10-31 16:47:57.062 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    2015. 

  2015. [Save Log Job] 2024-10-31 16:47:57.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    2016. 

  2016. [Save Log Job] 2024-10-31 16:47:57.157 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    2017. 

  2017. [Save Log Job] 2024-10-31 16:48:05.923 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2018. 

  2018. [Save Log Job] 2024-10-31 16:48:15.935 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2019. 

  2019. [Save Log Job] 2024-10-31 16:48:25.945 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2020. 

  2020. [Save Log Job] 2024-10-31 16:48:27.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031164703-CACB'' end step 1
    2021. 

  2021. [Save Log Job] 2024-10-31 16:48:27.143 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    2022. 

  2022. [Save Log Job] 2024-10-31 16:48:27.143 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031164703-CACB
    2023. 

  2023. Start time：2024/10/31 16:47:56
    2024. 

  2024. End time：2024/10/31 16:48:27
    2025. 

  2025. Total time：0:0:30
    2026. 

  2026. [Save Log Job] 2024-10-31 16:48:27.144 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    2027. 

  2027. [Save Log Job] 2024-10-31 16:48:27.199 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    2028. 

  2028. [Save Log Job] 2024-10-31 16:48:27.226 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    2029. 

  2029. [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    2030. 

  2030. [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    2031. 

  2031. [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    2032. 

  2032. [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    2033. 

  2033. [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    2034. 

  2034. [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    2035. 

  2035. [Save Log Job] 2024-10-31 16:48:35.946 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2036. 

  2036. [Save Log Job] 2024-10-31 16:48:37.267 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    2037. 

  2037. [Save Log Job] 2024-10-31 16:48:37.328 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    2038. 

  2038. [Save Log Job] 2024-10-31 16:48:43.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    2039. 

  2039. [Save Log Job] 2024-10-31 16:48:43.300 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    2040. 

  2040. [Save Log Job] 2024-10-31 16:48:45.320 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    2041. 

  2041. [Save Log Job] 2024-10-31 16:48:45.947 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2042. 

  2042. [Save Log Job] 2024-10-31 16:48:46.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    2043. 

  2043. [Save Log Job] 2024-10-31 16:48:49.745 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    2044. 

  2044. [Save Log Job] 2024-10-31 16:48:55.948 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2045. 

  2045. [Save Log Job] 2024-10-31 16:49:05.949 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2046. 

  2046. [Save Log Job] 2024-10-31 16:49:15.951 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2047. 

  2047. [Save Log Job] 2024-10-31 16:49:25.952 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2048. 

  2048. [Save Log Job] 2024-10-31 16:49:35.953 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2049. 

  2049. [Save Log Job] 2024-10-31 16:49:39.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    2050. 

  2050. [Save Log Job] 2024-10-31 16:49:40.738 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    2051. 

  2051. [Save Log Job] 2024-10-31 16:49:40.739 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    2052. 

  2052. [Save Log Job] 2024-10-31 16:49:40.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    2053. 

  2053. [Save Log Job] 2024-10-31 16:49:40.741 LOG.INFO YZQZFabAuto.cs Line:206 EndJobRecord() - EndJobRecord|
    2054. 

  2054. [Save Log Job] 2024-10-31 16:49:40.741 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0
    2055. 

  2055. [Save Log Job] 2024-10-31 16:49:40.753 LOG.INFO YZQZFabAuto.cs Line:235 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311649407528—.csv
    2056. 

  2056. [Save Log Job] 2024-10-31 16:49:40.755 LOG.INFO YZQZFabAuto.cs Line:280 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311649407528—.csv
    2057. 

  2057. [Save Log Job] 2024-10-31 16:49:40.778 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2058. 

  2058. [Save Log Job] 2024-10-31 16:49:40.796 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    2059. 

  2059. [Save Log Job] 2024-10-31 16:49:41.199 LOG.INFO YZQZFabAuto.cs Line:312 Export2CsvWanPanFile() - 用户名或密码不正确。
    2060. 

  2060. 

  2061. <==  [Save Log Job] 2024-10-31 17:07:12.760 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2062. 

  2062. [Save Log Job] 2024-10-31 17:07:13.808 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    2063. 

  2063. [Save Log Job] 2024-10-31 17:07:13.808 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    2064. 

  2064. [Save Log Job] 2024-10-31 17:07:13.900 LOG.INFO EventService.cs Line:60 Register() - 客户端546b7464-8372-4d28-9b38-c61c03eb2884已连接
    2065. 

  2065. [Save Log Job] 2024-10-31 17:07:13.911 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    2066. 

  2066. [Save Log Job] 2024-10-31 17:07:14.917 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2067. 

  2067. [Save Log Job] 2024-10-31 17:07:14.990 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2068. 

  2068. [Save Log Job] 2024-10-31 17:07:15.168 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2069. 

  2069. [Save Log Job] 2024-10-31 17:07:15.214 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2070. 

  2070. [Save Log Job] 2024-10-31 17:07:15.311 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2071. 

  2071. [Save Log Job] 2024-10-31 17:07:15.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    2072. 

  2072. [Save Log Job] 2024-10-31 17:07:15.549 LOG.ERROR DatabaseManager.cs Line:70 PeriodicRun() - 执行数据库操作错误, Backend sent unrecognized response type: ?, Insert into "EventManager"("ID","EventEnum","Type","Source","Description","Level","OccurTime") values(1000,'GeneralInfo','EventUI_Notify','System','Operation SetConfig(System_IsMesMode, True)','Information','2024-10-31 17:07:15.393')
    2073. 

  2073. [Save Log Job] 2024-10-31 17:07:15.580 LOG.ERROR PostgresqlDB.cs Line:113 ExecuteDataset() - 执行查询出错，SELECT * FROM "RecipeRunHistory" where "ProcessBeginTime" >= '2024/10/31 00:00:00.000' and "ProcessBeginTime" <= '2024/10/31 23:59:59.999' order by "ProcessBeginTime" ASC;
    2074. 

  2074. System.ObjectDisposedException: 无法访问已关闭的流。
    2075. 

  2075.    在 System.IO.__Error.StreamIsClosed()
    2076. 

  2076.    在 System.IO.BufferedStream.Read(Byte[] array, Int32 offset, Int32 count)
    2077. 

  2077.    在 Npgsql.PGUtil.CheckedStreamRead(Stream stream, Byte[] buffer, Int32 offset, Int32 size)
    2078. 

  2078.    在 Npgsql.PGUtil.ReadInt32(Stream stream)
    2079. 

  2079.    在 Npgsql.StringRowReaderV3.GetThisFieldCount()
    2080. 

  2080.    在 Npgsql.StringRowReaderV3.ReadNext()
    2081. 

  2081.    在 Npgsql.RowReader.GetNext()
    2082. 

  2082.    在 Npgsql.ForwardsOnlyRow.get_Item(Int32 index)
    2083. 

  2083.    在 Npgsql.ForwardsOnlyDataReader.GetProviderSpecificValue(Int32 ordinal)
    2084. 

  2084.    在 Npgsql.ForwardsOnlyDataReader.GetValue(Int32 Index)
    2085. 

  2085.    在 Npgsql.CachingDataReader..ctor(ForwardsOnlyDataReader reader, CommandBehavior behavior)
    2086. 

  2086.    在 Npgsql.NpgsqlCommand.ExecuteReader(CommandBehavior cb)
    2087. 

  2087.    在 Npgsql.NpgsqlCommand.ExecuteDbDataReader(CommandBehavior behavior)
    2088. 

  2088.    在 System.Data.Common.DbCommand.System.Data.IDbCommand.ExecuteReader(CommandBehavior behavior)
    2089. 

  2089.    在 System.Data.Common.DbDataAdapter.FillInternal(DataSet dataset, DataTable[] datatables, Int32 startRecord, Int32 maxRecords, String srcTable, IDbCommand command, CommandBehavior behavior)
    2090. 

  2090.    在 System.Data.Common.DbDataAdapter.Fill(DataSet dataSet, Int32 startRecord, Int32 maxRecords, String srcTable, IDbCommand command, CommandBehavior behavior)
    2091. 

  2091.    在 System.Data.Common.DbDataAdapter.Fill(DataSet dataSet)
    2092. 

  2092.    在 Aitex.Core.RT.DBCore.PostgresqlDB.ExecuteDataset(String cmdText, Object[] p) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\DBCore\PostgresqlDB.cs:行号 107
    2093. 

  2093. [Save Log Job] 2024-10-31 17:07:18.925 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    2094. 

  2094. [Save Log Job] 2024-10-31 17:07:24.298 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    2095. 

  2095. [Save Log Job] 2024-10-31 17:07:24.299 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    2096. 

  2096. [Save Log Job] 2024-10-31 17:07:24.305 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    2097. 

  2097. [Save Log Job] 2024-10-31 17:07:24.485 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    2098. 

  2098. [Save Log Job] 2024-10-31 17:07:43.134 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    2099. 

  2099. [Save Log Job] 2024-10-31 17:07:43.136 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    2100. 

  2100. [Save Log Job] 2024-10-31 17:07:43.136 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    2101. 

  2101. [Save Log Job] 2024-10-31 17:07:47.101 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, )
    2102. 

  2102. [Save Log Job] 2024-10-31 17:07:47.122 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    2103. 

  2103. [Save Log Job] 2024-10-31 17:07:47.125 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031170747-CACB
    2104. 

  2104. [Save Log Job] 2024-10-31 17:07:47.125 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    2105. 

  2105. [Save Log Job] 2024-10-31 17:07:47.126 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    2106. 

  2106. [Save Log Job] 2024-10-31 17:07:47.127 LOG.INFO YZQZFabAuto.cs Line:168 StartJobRecord() - StartJobRecord|start||CACB
    2107. 

  2107. [Save Log Job] 2024-10-31 17:07:47.128 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2108. 

  2108. [Save Log Job] 2024-10-31 17:07:47.130 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2109. 

  2109. [Save Log Job] 2024-10-31 17:07:47.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    2110. 

  2110. [Save Log Job] 2024-10-31 17:07:47.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    2111. 

  2111. [Save Log Job] 2024-10-31 17:07:47.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    2112. 

  2112. [Save Log Job] 2024-10-31 17:07:47.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    2113. 

  2113. [Save Log Job] 2024-10-31 17:07:47.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    2114. 

  2114. [Save Log Job] 2024-10-31 17:07:47.240 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2115. 

  2115. [Save Log Job] 2024-10-31 17:07:47.248 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    2116. 

  2116. [Save Log Job] 2024-10-31 17:07:49.252 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    2117. 

  2117. [Save Log Job] 2024-10-31 17:07:51.215 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    2118. 

  2118. [Save Log Job] 2024-10-31 17:07:57.130 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2119. 

  2119. [Save Log Job] 2024-10-31 17:08:07.134 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2120. 

  2120. [Save Log Job] 2024-10-31 17:08:17.131 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2121. 

  2121. [Save Log Job] 2024-10-31 17:08:26.159 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    2122. 

  2122. [Save Log Job] 2024-10-31 17:08:26.220 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    2123. 

  2123. [Save Log Job] 2024-10-31 17:08:26.220 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    2124. 

  2124. [Save Log Job] 2024-10-31 17:08:26.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031170747-CACB
    2125. 

  2125. [Save Log Job] 2024-10-31 17:08:26.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031170747-CACB''
    2126. 

  2126. [Save Log Job] 2024-10-31 17:08:26.223 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    2127. 

  2127. [Save Log Job] 2024-10-31 17:08:26.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031170747-CACB'' start run step 1：initial。
    2128. 

  2128. [Save Log Job] 2024-10-31 17:08:26.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    2129. 

  2129. [Save Log Job] 2024-10-31 17:08:26.279 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    2130. 

  2130. [Save Log Job] 2024-10-31 17:08:26.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    2131. 

  2131. [Save Log Job] 2024-10-31 17:08:26.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    2132. 

  2132. [Save Log Job] 2024-10-31 17:08:26.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    2133. 

  2133. [Save Log Job] 2024-10-31 17:08:26.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    2134. 

  2134. [Save Log Job] 2024-10-31 17:08:26.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    2135. 

  2135. [Save Log Job] 2024-10-31 17:08:26.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    2136. 

  2136. [Save Log Job] 2024-10-31 17:08:26.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    2137. 

  2137. [Save Log Job] 2024-10-31 17:08:26.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    2138. 

  2138. [Save Log Job] 2024-10-31 17:08:26.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    2139. 

  2139. [Save Log Job] 2024-10-31 17:08:26.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    2140. 

  2140. [Save Log Job] 2024-10-31 17:08:26.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    2141. 

  2141. [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    2142. 

  2142. [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    2143. 

  2143. [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    2144. 

  2144. [Save Log Job] 2024-10-31 17:08:26.287 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    2145. 

  2145. [Save Log Job] 2024-10-31 17:08:26.339 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    2146. 

  2146. [Save Log Job] 2024-10-31 17:08:27.134 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2147. 

  2147. [Save Log Job] 2024-10-31 17:08:37.144 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2148. 

  2148. [Save Log Job] 2024-10-31 17:08:47.156 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2149. 

  2149. [Save Log Job] 2024-10-31 17:08:56.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031170747-CACB'' end step 1
    2150. 

  2150. [Save Log Job] 2024-10-31 17:08:56.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    2151. 

  2151. [Save Log Job] 2024-10-31 17:08:56.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031170747-CACB
    2152. 

  2152. Start time：2024/10/31 17:08:26
    2153. 

  2153. End time：2024/10/31 17:08:56
    2154. 

  2154. Total time：0:0:30
    2155. 

  2155. [Save Log Job] 2024-10-31 17:08:56.367 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    2156. 

  2156. [Save Log Job] 2024-10-31 17:08:56.368 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    2157. 

  2157. [Save Log Job] 2024-10-31 17:08:56.423 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    2158. 

  2158. [Save Log Job] 2024-10-31 17:08:57.158 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2159. 

  2159. [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    2160. 

  2160. [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    2161. 

  2161. [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    2162. 

  2162. [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    2163. 

  2163. [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    2164. 

  2164. [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    2165. 

  2165. [Save Log Job] 2024-10-31 17:09:06.518 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    2166. 

  2166. [Save Log Job] 2024-10-31 17:09:06.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    2167. 

  2167. [Save Log Job] 2024-10-31 17:09:07.158 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2168. 

  2168. [Save Log Job] 2024-10-31 17:09:12.372 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    2169. 

  2169. [Save Log Job] 2024-10-31 17:09:12.434 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    2170. 

  2170. [Save Log Job] 2024-10-31 17:09:14.457 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    2171. 

  2171. [Save Log Job] 2024-10-31 17:09:15.807 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    2172. 

  2172. [Save Log Job] 2024-10-31 17:09:17.159 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2173. 

  2173. [Save Log Job] 2024-10-31 17:09:18.911 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    2174. 

  2174. [Save Log Job] 2024-10-31 17:09:27.159 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2175. 

  2175. [Save Log Job] 2024-10-31 17:09:37.160 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2176. 

  2176. [Save Log Job] 2024-10-31 17:09:47.161 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2177. 

  2177. [Save Log Job] 2024-10-31 17:09:57.161 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2178. 

  2178. [Save Log Job] 2024-10-31 17:10:07.161 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2179. 

  2179. [Save Log Job] 2024-10-31 17:10:09.001 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    2180. 

  2180. [Save Log Job] 2024-10-31 17:10:09.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    2181. 

  2181. [Save Log Job] 2024-10-31 17:10:09.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    2182. 

  2182. [Save Log Job] 2024-10-31 17:10:09.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    2183. 

  2183. [Save Log Job] 2024-10-31 17:10:09.918 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2184. 

  2184. [Save Log Job] 2024-10-31 17:10:09.919 LOG.INFO YZQZFabAuto.cs Line:214 EndJobRecord() - EndJobRecord|
    2185. 

  2185. [Save Log Job] 2024-10-31 17:10:09.919 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2186. 

  2186. [Save Log Job] 2024-10-31 17:10:09.934 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311710099323—.csv
    2187. 

  2187. [Save Log Job] 2024-10-31 17:10:09.936 LOG.INFO YZQZFabAuto.cs Line:288 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311710099323—.csv
    2188. 

  2188. [Save Log Job] 2024-10-31 17:10:09.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2189. 

  2189. [Save Log Job] 2024-10-31 17:10:10.395 LOG.INFO YZQZFabAuto.cs Line:320 Export2CsvWanPanFile() - 用户名或密码不正确。
    2190. 

  2190. 

  2191. [Save Log Job] 2024-10-31 17:14:28.259 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file  CACB  save completed
    2192. 

  2192. [Save Log Job] 2024-10-31 17:14:28.259 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    2193. 

  2193. [Save Log Job] 2024-10-31 17:14:29.580 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    2194. 

  2194. [Save Log Job] 2024-10-31 17:14:29.581 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    2195. 

  2195. [Save Log Job] 2024-10-31 17:14:33.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmTime, 1)
    2196. 

  2196. [Save Log Job] 2024-10-31 17:14:34.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmRange, 1)
    2197. 

  2197. [Save Log Job] 2024-10-31 17:14:37.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file  CACB  save completed
    2198. 

  2198. [Save Log Job] 2024-10-31 17:14:37.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    2199. 

  2199. [Save Log Job] 2024-10-31 17:14:54.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, )
    2200. 

  2200. [Save Log Job] 2024-10-31 17:14:54.424 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031171454-CACB
    2201. 

  2201. [Save Log Job] 2024-10-31 17:14:54.424 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    2202. 

  2202. [Save Log Job] 2024-10-31 17:14:54.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    2203. 

  2203. [Save Log Job] 2024-10-31 17:14:54.424 LOG.INFO YZQZFabAuto.cs Line:168 StartJobRecord() - StartJobRecord|start||CACB
    2204. 

  2204. [Save Log Job] 2024-10-31 17:14:54.425 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    2205. 

  2205. [Save Log Job] 2024-10-31 17:14:54.425 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2206. 

  2206. [Save Log Job] 2024-10-31 17:14:54.430 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2207. 

  2207. [Save Log Job] 2024-10-31 17:14:54.475 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    2208. 

  2208. [Save Log Job] 2024-10-31 17:14:54.475 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    2209. 

  2209. [Save Log Job] 2024-10-31 17:14:54.475 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    2210. 

  2210. [Save Log Job] 2024-10-31 17:14:54.476 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    2211. 

  2211. [Save Log Job] 2024-10-31 17:14:54.476 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    2212. 

  2212. [Save Log Job] 2024-10-31 17:14:54.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2213. 

  2213. [Save Log Job] 2024-10-31 17:14:54.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    2214. 

  2214. [Save Log Job] 2024-10-31 17:14:56.579 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    2215. 

  2215. [Save Log Job] 2024-10-31 17:14:58.213 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    2216. 

  2216. [Save Log Job] 2024-10-31 17:15:04.432 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2217. 

  2217. [Save Log Job] 2024-10-31 17:15:14.434 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2218. 

  2218. [Save Log Job] 2024-10-31 17:15:24.434 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2219. 

  2219. [Save Log Job] 2024-10-31 17:15:34.434 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2220. 

  2220. [Save Log Job] 2024-10-31 17:15:44.437 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2221. 

  2221. [Save Log Job] 2024-10-31 17:15:48.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    2222. 

  2222. [Save Log Job] 2024-10-31 17:15:48.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    2223. 

  2223. [Save Log Job] 2024-10-31 17:15:48.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    2224. 

  2224. [Save Log Job] 2024-10-31 17:15:48.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031171454-CACB
    2225. 

  2225. [Save Log Job] 2024-10-31 17:15:48.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031171454-CACB''
    2226. 

  2226. [Save Log Job] 2024-10-31 17:15:48.749 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    2227. 

  2227. [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031171454-CACB'' start run step 1：initial。
    2228. 

  2228. [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    2229. 

  2229. [Save Log Job] 2024-10-31 17:15:48.800 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    2230. 

  2230. [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    2231. 

  2231. [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    2232. 

  2232. [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    2233. 

  2233. [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    2234. 

  2234. [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    2235. 

  2235. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    2236. 

  2236. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    2237. 

  2237. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    2238. 

  2238. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    2239. 

  2239. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    2240. 

  2240. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    2241. 

  2241. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    2242. 

  2242. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    2243. 

  2243. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    2244. 

  2244. [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    2245. 

  2245. [Save Log Job] 2024-10-31 17:15:48.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    2246. 

  2246. [Save Log Job] 2024-10-31 17:15:54.438 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2247. 

  2247. [Save Log Job] 2024-10-31 17:16:04.438 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2248. 

  2248. [Save Log Job] 2024-10-31 17:16:14.439 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2249. 

  2249. [Save Log Job] 2024-10-31 17:16:18.863 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031171454-CACB'' end step 1
    2250. 

  2250. [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031171454-CACB'' start run step 2：initial。
    2251. 

  2251. [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    2252. 

  2252. [Save Log Job] 2024-10-31 17:16:18.914 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    2253. 

  2253. [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    2254. 

  2254. [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    2255. 

  2255. [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    2256. 

  2256. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    2257. 

  2257. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    2258. 

  2258. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。
    2259. 

  2259. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    2260. 

  2260. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    2261. 

  2261. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    2262. 

  2262. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    2263. 

  2263. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    2264. 

  2264. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    2265. 

  2265. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    2266. 

  2266. [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    2267. 

  2267. [Save Log Job] 2024-10-31 17:16:18.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    2268. 

  2268. [Save Log Job] 2024-10-31 17:16:20.391 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    2269. 

  2269. [Save Log Job] 2024-10-31 17:16:20.393 LOG.INFO YZQZFabAuto.cs Line:214 EndJobRecord() - EndJobRecord|
    2270. 

  2270. [Save Log Job] 2024-10-31 17:16:20.393 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0
    2271. 

  2271. [Save Log Job] 2024-10-31 17:16:20.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    2272. 

  2272. [Save Log Job] 2024-10-31 17:16:20.397 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311716203975—.csv
    2273. 

  2273. [Save Log Job] 2024-10-31 17:16:20.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    2274. 

  2274. [Save Log Job] 2024-10-31 17:16:20.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031171454-CACB
    2275. 

  2275. Start time：2024/10/31 17:15:48
    2276. 

  2276. End time：2024/10/31 17:16:20
    2277. 

  2277. Total time：0:0:31
    2278. 

  2278. [Save Log Job] 2024-10-31 17:16:20.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    2279. 

  2279. [Save Log Job] 2024-10-31 17:16:20.398 LOG.INFO YZQZFabAuto.cs Line:288 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311716203975—.csv
    2280. 

  2280. [Save Log Job] 2024-10-31 17:16:20.398 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error
    2281. 

  2281. [Save Log Job] 2024-10-31 17:16:20.453 LOG.INFO YZQZFabAuto.cs Line:104 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}}
    2282. 

  2282. [Save Log Job] 2024-10-31 17:16:20.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2283. 

  2283. [Save Log Job] 2024-10-31 17:16:20.778 LOG.INFO YZQZFabAuto.cs Line:320 Export2CsvWanPanFile() - 用户名或密码不正确。
    2284. 

  2284. 

  2285. [Save Log Job] 2024-10-31 17:16:22.417 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    2286. 

  2286. [Save Log Job] 2024-10-31 17:31:12.258 LOG.INFO YZQZFabAuto.cs Line:214 EndJobRecord() - EndJobRecord|
    2287. 

  2287. [Save Log Job] 2024-10-31 17:31:12.258 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    2288. 

  2288. <==  [Save Log Job] 2024-10-31 17:57:48.751 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2289. 

  2289. [Save Log Job] 2024-10-31 17:57:49.704 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    2290. 

  2290. [Save Log Job] 2024-10-31 17:57:49.705 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    2291. 

  2291. [Save Log Job] 2024-10-31 17:57:49.787 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    2292. 

  2292. [Save Log Job] 2024-10-31 17:57:49.794 LOG.INFO EventService.cs Line:60 Register() - 客户端3b8c6475-2037-4155-83b0-4f95011e9206已连接
    2293. 

  2293. <==  [Save Log Job] 2024-10-31 17:57:53.488 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2294. 

  2294. [Save Log Job] 2024-10-31 17:57:54.431 LOG.INFO EventService.cs Line:60 Register() - 客户端07e0dd8f-82ba-42e6-95b1-81eb85e3cbe0已连接
    2295. 

  2295. [Save Log Job] 2024-10-31 17:57:54.431 LOG.INFO EventService.cs Line:60 Register() - 客户端07e0dd8f-82ba-42e6-95b1-81eb85e3cbe0已连接
    2296. 

  2296. [Save Log Job] 2024-10-31 17:57:54.515 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    2297. 

  2297. [Save Log Job] 2024-10-31 17:57:54.515 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    2298. 

  2298. [Save Log Job] 2024-10-31 17:57:54.577 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    2299. 

  2299. [Save Log Job] 2024-10-31 17:57:55.711 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2300. 

  2300. [Save Log Job] 2024-10-31 17:57:55.713 LOG.INFO YZQZFabAuto.cs Line:119 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2301. 

  2301. [Save Log Job] 2024-10-31 17:57:55.821 LOG.INFO YZQZFabAuto.cs Line:161 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2302. 

  2302. [Save Log Job] 2024-10-31 17:57:55.826 LOG.INFO YZQZFabAuto.cs Line:161 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2303. 

  2303. [Save Log Job] 2024-10-31 17:57:55.832 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2304. 

  2304. [Save Log Job] 2024-10-31 17:57:55.843 LOG.INFO YZQZFabAuto.cs Line:161 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2305. 

  2305. [Save Log Job] 2024-10-31 17:57:55.887 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2306. 

  2306. [Save Log Job] 2024-10-31 17:57:55.897 LOG.INFO YZQZFabAuto.cs Line:161 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2307. 

  2307. [Save Log Job] 2024-10-31 17:57:55.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2308. 

  2308. [Save Log Job] 2024-10-31 17:57:56.514 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    2309. 

  2309. [Save Log Job] 2024-10-31 17:57:59.592 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    2310. 

  2310.