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- 【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
- SFC240912810/,22,CACB,,10/31/2024 1:02:46 PM,,0.007568084,50000,0
- SFC240912810/,22,CACB,,,,0.007568084,50000,0
- SFC240912810/,22,CACB,,,,0.3998689,40005,0
- SFC240912810/,22,CACB,,,,0.6979638,24994,0
- SFC240912810/,22,CACB,,,,0.9510534,9985,0
- SFC240912810/,22,CACB,,,,0.05236031,100,0
- SFC240912810/,22,CACB,,,,21.1668,107,0
- SFC240912810/,22,CACB,,,,45.84654,99,0
- SFC240912810/,22,CACB,,,,45.61365,109,0
- SFC240912810/,22,CACB,,,,6.296107,101,0
- SFC240912810/,22,CACB,,,,0.6157331,107,0
- SFC240912810/,22,CACB,,,,0.7376741,5104,0
- SFC240912810/,22,CACB,,,,0.374632,15098,0
- SFC240912810/,22,CACB,,,,0.676639,30095,0
- SFC240912810/,22,CACB,,,,0.976694,45078,0
- SFC240912810/,22,CACB,,,,0.4770368,55062,0
- SFC240912810/,22,CACB,,,10/31/2024 1:05:14 PM,0.9476838,65070,0
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