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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Runtime.Serialization;
- using System.Xml;
- using System.Xml.Serialization;
- using System.Xml.Schema;
- using Aitex.Core.Util;
- namespace Aitex.Platform
- {
- /// <summary>
- /// Defines sequencer running mode.
- /// </summary>
- [Serializable]
- [DataContract]
- public enum SystemMode
- {
- /// <summary>
- /// In Auto mode, operators cannot manually create, delete, and move susceptors; instead,
- /// operators can only run sequences.
- /// </summary>
- [EnumMember]
- Auto = 0,
- /// <summary>
- /// In Manual mode, operators can manually create, delete, and move susceptors, but cannot
- /// run sequences.
- /// </summary>
- [EnumMember]
- Manual,
- /// <summary>
- /// In AtmCycle mode, the sequencer moves susceptor from chamber to chamber without checking
- /// any interlocks: chambers can be at atmosphere condition, and can be online or offline.
- /// It moves susceptor from Loadlock to the buffer first, and the moves it to the first reactor,
- /// and then moves the susceptor from that reactor to the next one one by one. After all reactors
- /// are traversed, it moves susceptor to the cooldown. And finally moves the susceptor from
- /// cooldown to the loadlock. At this point, the cycle is completed.
- /// </summary>
- [EnumMember]
- Cycle
- }
-
- /// <summary>
- /// Tower light status define
- /// </summary>
- [Serializable]
- [DataContract]
- public enum TowerLightStatus
- {
- /// <summary>
- /// Light steady on
- /// </summary>
- [EnumMember]
- On,
- /// <summary>
- /// Light steady off
- /// </summary>
- [EnumMember]
- Off,
- /// <summary>
- /// Light blinking
- /// </summary>
- [EnumMember]
- Blinking,
- /// <summary>
- /// Unknow state
- /// </summary>
- [EnumMember]
- Unknow,
- }
-
-
- [Serializable]
- [DataContract]
- public enum PressureCtrlMode
- {
- [EnumMember]
- TVPressureCtrl = 1,
- [EnumMember]
- TVPositionCtrl = 2,
- }
- [Serializable]
- [DataContract]
- public enum RfMode
- {
- [EnumMember]
- ContinuousWaveMode = 1,
- [EnumMember]
- PulsingMode = 2,
- }
-
- [Serializable]
- [DataContract]
- public enum CarrierDataType
- {
- [EnumMember]
- NONE,
- [EnumMember]
- Created,
- [EnumMember]
- Deleted,
- [EnumMember]
- SusceptorMove,
- [EnumMember]
- ProcessStart,
- [EnumMember]
- ProcessNormalEnd,
- [EnumMember]
- ProcessErrStop,
- [EnumMember]
- ProcessManualAbort,
- [EnumMember]
- RecipeStepStart,
- [EnumMember]
- RecipeStepNormalEnd,
- [EnumMember]
- RecipeStepPaused,
- [EnumMember]
- RecipeStepResume,
- [EnumMember]
- RecipeStepJump,
- [EnumMember]
- RecipeUpdated,
- [EnumMember]
- PreProcessStart,
- [EnumMember]
- PreProcessStep,
- [EnumMember]
- PreProcessNormalEnd,
- [EnumMember]
- PreProcessErrorEnd,
- [EnumMember]
- PostProcessStart,
- [EnumMember]
- PostProcessStep,
- [EnumMember]
- PostProcessNormalEnd,
- [EnumMember]
- PostProcessErrorEnd,
- [EnumMember]
- MoUsedWeight,
- }
- [Serializable]
- [DataContract]
- public enum EndByCondition
- {
- [EnumMember]
- EndByRfTime,
- [EnumMember]
- EndByStepTime,
- [EnumMember]
- EndByHeatUp,
- }
- }
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