--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-15 00:21:50.160 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM��
[Save Log Job] 2024-11-15 03:21:51.019 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM��
[Save Log Job] 2024-11-15 06:21:51.779 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM��
[Save Log Job] 2024-11-15 09:21:52.468 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM��
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-15 13:38:20.104 LOG.INFO UiEvent.cs Line:58 Event() - �Ѿ��������豸ʵʱ����ϵͳ
[Save Log Job] 2024-11-15 13:38:21.353 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-15 13:38:22.373 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-15 13:38:24.980 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM ��
[Save Log Job] 2024-11-15 13:38:33.345 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-15 13:38:43.947 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-15 13:38:43.948 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-15 13:38:43.949 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-15 13:40:43.120 LOG.INFO UiEvent.cs Line:58 Event() - �Ѿ��������豸ʵʱ����ϵͳ
[Save Log Job] 2024-11-15 13:40:43.123 LOG.INFO UiEvent.cs Line:58 Event() - �Ѿ��������豸ʵʱ����ϵͳ
[Save Log Job] 2024-11-15 13:40:44.818 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-15 13:40:44.818 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-15 13:40:48.364 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM ��
[Save Log Job] 2024-11-15 13:40:50.586 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-15 13:40:53.879 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-15 13:40:53.880 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-15 13:40:53.881 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-15 13:41:13.655 LOG.INFO YZQZFabAuto.cs Line:56 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"12332432434324","MachineNumber":"22","MachineType":"��Դ򽺻�"}]
[Save Log Job] 2024-11-15 13:41:15.722 LOG.INFO YZQZFabAuto.cs Line:58 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|������ʱ
[Save Log Job] 2024-11-15 13:41:32.347 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 12332432434324/)
[Save Log Job] 2024-11-15 13:41:32.348 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-15 13:41:32.351 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Check door status��
[Save Log Job] 2024-11-15 13:41:32.358 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��check chamber door��
[Save Log Job] 2024-11-15 13:41:32.359 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��check backpanel door��
[Save Log Job] 2024-11-15 13:41:32.361 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Check pump status��
[Save Log Job] 2024-11-15 13:41:32.362 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Close all the valves��
[Save Log Job] 2024-11-15 13:41:32.448 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Open pumping valve��
[Save Log Job] 2024-11-15 13:41:32.449 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-15 13:41:34.454 LOG.INFO UiEvent.cs Line:51 Event() - System ����Chamber pumping valveOpenʧ�ܣ�ԭ��Valve keep closed ��
[Save Log Job] 2024-11-15 13:41:35.056 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Check chamber pressure��
[Save Log Job] 2024-11-15 13:42:10.119 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Pump below 100mTorr��
[Save Log Job] 2024-11-15 13:42:10.120 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��PreProcess Finished in 0.6 minitues��
[Save Log Job] 2024-11-15 13:42:10.120 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-11-15 13:42:10.121 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241115134132-CACB
[Save Log Job] 2024-11-15 13:42:10.122 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241115134132-CACB'
[Save Log Job] 2024-11-15 13:42:10.219 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115134132-CACB' start run step 1��initial��
[Save Log Job] 2024-11-15 13:42:10.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetTVMode��TV mode set to TVPressureCtrl��
[Save Log Job] 2024-11-15 13:42:10.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position��
[Save Log Job] 2024-11-15 13:42:10.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetTVPressure��TV pressure set to 50 mtorr��
[Save Log Job] 2024-11-15 13:42:10.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetBoostPressure��Boost pump pressure set to 100 mTorr��
[Save Log Job] 2024-11-15 13:42:10.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMode��Set RF work mode to ContinuousWaveMode��
[Save Log Job] 2024-11-15 13:42:10.224 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPulsingFrequency��RF set Frequency:0��
[Save Log Job] 2024-11-15 13:42:10.225 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPulsingDuty��RF set Duty:0 ��
[Save Log Job] 2024-11-15 13:42:10.227 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPower��RF set Power:0��
[Save Log Job] 2024-11-15 13:42:10.228 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchProcessMode��Match mode set to PresetMode��
[Save Log Job] 2024-11-15 13:42:10.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchPositionC1��Set RF match position c1 :50��
[Save Log Job] 2024-11-15 13:42:10.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchPositionC2��Set RF match position c2 :50��
[Save Log Job] 2024-11-15 13:42:10.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas1�� ramp to 45sccm��
[Save Log Job] 2024-11-15 13:42:10.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas2�� ramp to 56sccm��
[Save Log Job] 2024-11-15 13:42:10.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas3�� ramp to 66sccm��
[Save Log Job] 2024-11-15 13:42:10.235 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas4�� ramp to 76sccm��
[Save Log Job] 2024-11-15 13:42:10.236 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas5�� ramp to 86sccm��
[Save Log Job] 2024-11-15 13:42:10.237 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPowerOnOff��Set RF power Off��
[Save Log Job] 2024-11-15 13:42:10.238 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-11-15 13:42:40.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115134132-CACB' end step 1
[Save Log Job] 2024-11-15 13:42:40.321 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115134132-CACB' start run step 2��initial��
[Save Log Job] 2024-11-15 13:42:40.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetTVMode��TV mode set to TVPressureCtrl��
[Save Log Job] 2024-11-15 13:42:40.323 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position��
[Save Log Job] 2024-11-15 13:42:40.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetTVPressure��TV pressure set to 50 mtorr��
[Save Log Job] 2024-11-15 13:42:40.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetBoostPressure��Boost pump pressure set to 100 mTorr��
[Save Log Job] 2024-11-15 13:42:40.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMode��Set RF work mode to ContinuousWaveMode��
[Save Log Job] 2024-11-15 13:42:40.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPulsingFrequency��RF set Frequency:0��
[Save Log Job] 2024-11-15 13:42:40.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPulsingDuty��RF set Duty:0 ��
[Save Log Job] 2024-11-15 13:42:40.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPower��RF set Power:150��
[Save Log Job] 2024-11-15 13:42:40.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchProcessMode��Match mode set to PresetMode��
[Save Log Job] 2024-11-15 13:42:40.331 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchPositionC1��Set RF match position c1 :50��
[Save Log Job] 2024-11-15 13:42:40.332 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchPositionC2��Set RF match position c2 :50��
[Save Log Job] 2024-11-15 13:42:40.333 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas1�� ramp to 45sccm��
[Save Log Job] 2024-11-15 13:42:40.333 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas2�� ramp to 56sccm��
[Save Log Job] 2024-11-15 13:42:40.334 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas3�� ramp to 66sccm��
[Save Log Job] 2024-11-15 13:42:40.335 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas4�� ramp to 76sccm��
[Save Log Job] 2024-11-15 13:42:40.336 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas5�� ramp to 86sccm��
[Save Log Job] 2024-11-15 13:42:40.337 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPowerOnOff��Set RF power On��
[Save Log Job] 2024-11-15 13:51:03.978 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm��Forward power 18 out of range[149,151] in 1 seconds.
[Save Log Job] 2024-11-15 13:51:03.986 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-11-15 13:51:03.989 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-11-15 13:51:04.013 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed��Recipe��20241115134132-CACB
Start time��2024/11/15 13:42:10
End time��2024/11/15 13:42:41
Total time��0:0:31
[Save Log Job] 2024-11-15 13:51:04.037 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-11-15 13:51:04.038 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC1 ValveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC5 ValveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC2 ValveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC4 ValveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:51:04.062 LOG.INFO UiEvent.cs Line:51 Event() - System ����Process gas final valveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:51:04.062 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed��please confirm PLC still running
[Save Log Job] 2024-11-15 13:51:04.062 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC3 ValveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:51:14.763 LOG.INFO YZQZFabAuto.cs Line:56 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"21323432432","MachineNumber":"22","MachineType":"��Դ򽺻�"}]
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-15 13:52:55.503 LOG.INFO UiEvent.cs Line:57 Event() - �Ѿ��������豸ʵʱ����ϵͳ
[Save Log Job] 2024-11-15 13:52:55.505 LOG.INFO UiEvent.cs Line:58 Event() - �Ѿ��������豸ʵʱ����ϵͳ
[Save Log Job] 2024-11-15 13:52:57.012 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-15 13:52:57.129 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-15 13:53:00.641 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM ��
[Save Log Job] 2024-11-15 13:53:04.653 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-15 13:53:08.767 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-15 13:53:08.768 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-15 13:53:08.778 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-15 13:53:14.244 LOG.INFO YZQZFabAuto.cs Line:56 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"32423423423","MachineNumber":"22","MachineType":"��Դ򽺻�"}]
[Save Log Job] 2024-11-15 13:53:16.305 LOG.INFO YZQZFabAuto.cs Line:58 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|������ʱ
[Save Log Job] 2024-11-15 13:53:49.513 LOG.INFO YZQZFabAuto.cs Line:56 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"32423423423","MachineNumber":"22","MachineType":"��Դ򽺻�"}]
[Save Log Job] 2024-11-15 13:53:51.544 LOG.INFO YZQZFabAuto.cs Line:58 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|������ʱ
[Save Log Job] 2024-11-15 13:54:12.786 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 32423423423/)
[Save Log Job] 2024-11-15 13:54:12.787 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-15 13:54:12.788 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-15 13:54:12.890 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Check door status��
[Save Log Job] 2024-11-15 13:54:12.891 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��check chamber door��
[Save Log Job] 2024-11-15 13:54:12.891 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��check backpanel door��
[Save Log Job] 2024-11-15 13:54:12.892 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Check pump status��
[Save Log Job] 2024-11-15 13:54:12.893 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Close all the valves��
[Save Log Job] 2024-11-15 13:54:12.990 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Open pumping valve��
[Save Log Job] 2024-11-15 13:54:15.006 LOG.INFO UiEvent.cs Line:51 Event() - System ����Chamber pumping valveOpenʧ�ܣ�ԭ��Valve keep closed ��
[Save Log Job] 2024-11-15 13:54:16.811 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Check chamber pressure��
[Save Log Job] 2024-11-15 13:55:07.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��Pump below 100mTorr��
[Save Log Job] 2024-11-15 13:55:07.347 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe��PreProcess Finished in 0.9 minitues��
[Save Log Job] 2024-11-15 13:55:07.348 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-11-15 13:55:07.349 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241115135412-CACB
[Save Log Job] 2024-11-15 13:55:07.349 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241115135412-CACB'
[Save Log Job] 2024-11-15 13:55:07.350 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115135412-CACB' start run step 1��initial��
[Save Log Job] 2024-11-15 13:55:07.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetTVMode��TV mode set to TVPressureCtrl��
[Save Log Job] 2024-11-15 13:55:07.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position��
[Save Log Job] 2024-11-15 13:55:07.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetTVPressure��TV pressure set to 50 mtorr��
[Save Log Job] 2024-11-15 13:55:07.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetBoostPressure��Boost pump pressure set to 100 mTorr��
[Save Log Job] 2024-11-15 13:55:07.354 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMode��Set RF work mode to ContinuousWaveMode��
[Save Log Job] 2024-11-15 13:55:07.356 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPulsingFrequency��RF set Frequency:0��
[Save Log Job] 2024-11-15 13:55:07.356 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPulsingDuty��RF set Duty:0 ��
[Save Log Job] 2024-11-15 13:55:07.357 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPower��RF set Power:0��
[Save Log Job] 2024-11-15 13:55:07.358 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchProcessMode��Match mode set to PresetMode��
[Save Log Job] 2024-11-15 13:55:07.358 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchPositionC1��Set RF match position c1 :50��
[Save Log Job] 2024-11-15 13:55:07.359 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchPositionC2��Set RF match position c2 :50��
[Save Log Job] 2024-11-15 13:55:07.360 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas1�� ramp to 45sccm��
[Save Log Job] 2024-11-15 13:55:07.361 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas2�� ramp to 56sccm��
[Save Log Job] 2024-11-15 13:55:07.362 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas3�� ramp to 66sccm��
[Save Log Job] 2024-11-15 13:55:07.362 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas4�� ramp to 76sccm��
[Save Log Job] 2024-11-15 13:55:07.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas5�� ramp to 86sccm��
[Save Log Job] 2024-11-15 13:55:07.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPowerOnOff��Set RF power Off��
[Save Log Job] 2024-11-15 13:55:07.365 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-11-15 13:55:37.443 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115135412-CACB' end step 1
[Save Log Job] 2024-11-15 13:55:37.444 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115135412-CACB' start run step 2��initial��
[Save Log Job] 2024-11-15 13:55:37.445 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetTVMode��TV mode set to TVPressureCtrl��
[Save Log Job] 2024-11-15 13:55:37.445 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position��
[Save Log Job] 2024-11-15 13:55:37.446 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetTVPressure��TV pressure set to 50 mtorr��
[Save Log Job] 2024-11-15 13:55:37.447 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��PressureControl.SetBoostPressure��Boost pump pressure set to 100 mTorr��
[Save Log Job] 2024-11-15 13:55:37.448 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMode��Set RF work mode to ContinuousWaveMode��
[Save Log Job] 2024-11-15 13:55:37.449 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPulsingFrequency��RF set Frequency:0��
[Save Log Job] 2024-11-15 13:55:37.450 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPulsingDuty��RF set Duty:0 ��
[Save Log Job] 2024-11-15 13:55:37.450 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPower��RF set Power:150��
[Save Log Job] 2024-11-15 13:55:37.451 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchProcessMode��Match mode set to PresetMode��
[Save Log Job] 2024-11-15 13:55:37.452 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchPositionC1��Set RF match position c1 :50��
[Save Log Job] 2024-11-15 13:55:37.453 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetMatchPositionC2��Set RF match position c2 :50��
[Save Log Job] 2024-11-15 13:55:37.454 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas1�� ramp to 45sccm��
[Save Log Job] 2024-11-15 13:55:37.455 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas2�� ramp to 56sccm��
[Save Log Job] 2024-11-15 13:55:37.456 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas3�� ramp to 66sccm��
[Save Log Job] 2024-11-15 13:55:37.457 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas4�� ramp to 76sccm��
[Save Log Job] 2024-11-15 13:55:37.457 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��MfcGas5�� ramp to 86sccm��
[Save Log Job] 2024-11-15 13:55:37.458 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute��Rf.SetPowerOnOff��Set RF power On��
[Save Log Job] 2024-11-15 13:55:45.447 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm��Forward power 18 out of range[149,151] in 1 seconds.
[Save Log Job] 2024-11-15 13:55:45.454 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-11-15 13:55:45.482 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-11-15 13:55:45.483 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed��Recipe��20241115135412-CACB
Start time��2024/11/15 13:55:07
End time��2024/11/15 13:55:38
Total time��0:0:31
[Save Log Job] 2024-11-15 13:55:45.991 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC1 ValveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:55:46.000 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC2 ValveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:55:46.023 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC3 ValveCloseʧ�ܣ�ԭ��Valve keep open��
[Save Log Job] 2024-11-15 13:55:46.522 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-11-15 13:55:47.140 LOG.INFO UiEvent.cs Line:51 Event() - System ����MFC4 ValveCloseʧ�ܣ�ԭ��Valve keep open��