--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:30:47.914 LOG.INFO UiEvent.cs Line:51 Event() - Software is expired. Can not login。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:31:30.967 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-17 13:31:30.967 LOG.INFO UiEvent.cs Line:51 Event() - 用户帐号'admin'已被创建。
[Save Log Job] 2024-10-17 13:31:34.777 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_Language, 2)
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:32:37.652 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:33:39.243 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-17 13:33:39.244 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-17 13:33:45.620 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:35:13.924 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:35:42.237 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-17 13:35:42.239 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-17 13:35:52.059 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-17 13:36:13.396 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 6 days, at 2024/10/24 0:00:00 。
[Save Log Job] 2024-10-17 13:36:17.311 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-17 13:36:24.646 LOG.INFO UiEvent.cs Line:51 Event() - 菜单文件\\123保存成功
[Save Log Job] 2024-10-17 13:36:24.646 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-10-17 13:36:40.617 LOG.INFO UiEvent.cs Line:51 Event() - 菜单文件123保存成功
[Save Log Job] 2024-10-17 13:36:40.617 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-10-17 13:36:41.321 LOG.INFO UiEvent.cs Line:51 Event() - 菜单文件123保存成功
[Save Log Job] 2024-10-17 13:36:41.321 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-10-17 13:36:49.755 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetAutoMode()
[Save Log Job] 2024-10-17 13:36:49.755 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-17 13:36:49.756 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to 自动模式
[Save Log Job] 2024-10-17 13:36:51.161 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 RunRecipe(123, )
[Save Log Job] 2024-10-17 13:36:51.161 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-17 13:36:51.261 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查门的状态。
[Save Log Job] 2024-10-17 13:36:51.261 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查腔体门是否关闭。
[Save Log Job] 2024-10-17 13:36:51.261 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查背板门是否关闭。
[Save Log Job] 2024-10-17 13:36:51.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查泵的状态。
[Save Log Job] 2024-10-17 13:36:51.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：关闭所有阀门。
[Save Log Job] 2024-10-17 13:36:51.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：打开抽气阀门。
[Save Log Job] 2024-10-17 13:36:51.361 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-17 13:36:53.271 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-17 13:36:54.077 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查腔体压力。
[Save Log Job] 2024-10-17 13:37:32.978 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：抽气到100毫托。
[Save Log Job] 2024-10-17 13:37:32.979 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess 操作完成，用时0.7分钟。
[Save Log Job] 2024-10-17 13:37:32.979 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-17 13:37:32.980 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241017133651-123'
[Save Log Job] 2024-10-17 13:37:32.980 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241017133651-123
[Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241017133651-123' start run step 1：initial。
[Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-17 13:37:33.080 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-17 13:37:33.080 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-17 13:37:33.080 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-17 13:37:33.081 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-17 13:37:33.081 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-17 13:37:33.082 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 100sccm。
[Save Log Job] 2024-10-17 13:37:33.082 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 100sccm。
[Save Log Job] 2024-10-17 13:37:33.084 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 0sccm。
[Save Log Job] 2024-10-17 13:37:33.085 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-17 13:37:33.085 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-17 13:37:33.085 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 0sccm。
[Save Log Job] 2024-10-17 13:37:33.085 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 0sccm。
[Save Log Job] 2024-10-17 13:38:03.135 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241017133651-123' end step 1
[Save Log Job] 2024-10-17 13:38:03.135 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-17 13:38:03.137 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，菜单文件：20241017133651-123
开始时间：2024/10/17 13:37:32
结束时间：2024/10/17 13:38:03
总时间：0:0:30
[Save Log Job] 2024-10-17 13:38:03.137 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺运行结束
[Save Log Job] 2024-10-17 13:38:03.235 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 等待10秒钟
[Save Log Job] 2024-10-17 13:38:05.144 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 13:38:05.144 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 13:38:05.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 13:38:13.282 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 关闭射频
[Save Log Job] 2024-10-17 13:38:13.383 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 停止流气
[Save Log Job] 2024-10-17 13:38:23.033 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 关闭所有阀门
[Save Log Job] 2024-10-17 13:38:23.035 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 开始吹扫, Loop 1
[Save Log Job] 2024-10-17 13:38:23.035 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 压力抽到100毫托
[Save Log Job] 2024-10-17 13:38:26.850 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 抽气等待10秒
[Save Log Job] 2024-10-17 13:38:28.763 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 13:38:36.901 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 充气压力到700000毫托
[Save Log Job] 2024-10-17 13:40:37.023 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺程序收尾处理错误：Can not purge to purge pressure 700000 in purge time 120。
[Save Log Job] 2024-10-17 13:40:37.024 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺收尾失败
[Save Log Job] 2024-10-17 13:40:37.024 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-17 13:40:37.124 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-17 13:40:39.034 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber purge valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 13:40:39.035 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 14:15:08.517 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-17 14:30:24.464 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_Language, 1)
[Save Log Job] 2024-10-17 14:30:56.795 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_Language, 2)
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 17:05:47.722 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-17 17:05:47.723 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-17 17:05:49.294 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-17 17:05:52.858 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 6 days, at 2024/10/24 0:00:00 。
[Save Log Job] 2024-10-17 17:06:38.402 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-17 17:07:08.096 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_Language, 1)
[Save Log Job] 2024-10-17 17:10:03.652 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
[Save Log Job] 2024-10-17 17:10:03.652 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-10-17 17:11:29.822 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-17 17:11:29.824 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-17 17:11:29.824 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-17 17:12:11.667 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-17 17:12:11.768 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-17 17:12:11.770 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-17 17:12:11.771 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-17 17:12:11.771 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-17 17:12:11.772 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-17 17:12:11.773 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-17 17:12:11.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-17 17:12:11.870 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-17 17:12:13.877 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-17 17:12:14.780 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-17 17:13:20.395 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-17 17:13:20.493 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 1.1 minitues。
[Save Log Job] 2024-10-17 17:13:20.494 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-17 17:13:20.494 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241017171211-123
[Save Log Job] 2024-10-17 17:13:20.494 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241017171211-123'
[Save Log Job] 2024-10-17 17:13:20.594 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241017171211-123' start run step 1：initial。
[Save Log Job] 2024-10-17 17:13:20.594 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-17 17:13:20.594 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-17 17:13:20.596 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-17 17:13:20.596 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-17 17:13:20.596 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-17 17:13:20.596 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 100sccm。
[Save Log Job] 2024-10-17 17:13:20.598 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-17 17:13:20.598 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 0sccm。
[Save Log Job] 2024-10-17 17:13:20.598 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-17 17:13:20.599 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 0sccm。
[Save Log Job] 2024-10-17 17:13:20.599 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 0sccm。
[Save Log Job] 2024-10-17 17:13:20.599 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-17 17:13:50.676 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241017171211-123' end step 1
[Save Log Job] 2024-10-17 17:13:50.676 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-17 17:13:50.676 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241017171211-123
Start time：2024/10/17 17:13:20
End time：2024/10/17 17:13:50
Total time：0:0:30
[Save Log Job] 2024-10-17 17:13:50.676 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-17 17:13:50.678 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-17 17:13:52.690 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 17:13:52.690 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 17:13:52.690 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 17:14:00.738 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-17 17:14:00.838 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-17 17:14:10.481 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Start cycle purge, Loop 1
[Save Log Job] 2024-10-17 17:14:10.481 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-17 17:14:10.481 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, pumping pressure to 100 mTor
[Save Log Job] 2024-10-17 17:14:25.857 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, pump delay 10 seconds
[Save Log Job] 2024-10-17 17:14:27.765 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-17 17:14:35.905 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent pressure to 700000 mtor
[Save Log Job] 2024-10-17 17:15:56.026 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-10-17 17:15:56.026 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in PostProcess，can not do SetManualMode。
[Save Log Job] 2024-10-17 17:16:26.683 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-17 17:16:26.683 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-10-17 17:16:26.784 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-17 17:16:32.499 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-17 17:16:32.499 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-10-17 17:16:32.500 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-10-17 17:21:52.269 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-10-17 17:21:52.269 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
[Save Log Job] 2024-10-17 17:26:09.461 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-17 17:26:09.461 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-17 17:26:09.461 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-17 17:29:43.540 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-10-17 17:29:43.542 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-10-17 17:29:43.542 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-17 17:30:05.701 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 100)
[Save Log Job] 2024-10-17 17:30:05.702 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-10-17 17:30:05.703 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 100)
[Save Log Job] 2024-10-17 17:30:05.704 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 120)
[Save Log Job] 2024-10-17 17:30:05.704 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-10-17 17:30:05.802 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Check door status。
[Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：check chamber door。
[Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：check backpanel door。
[Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Check pump status。
[Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Close all the valves。
[Save Log Job] 2024-10-17 17:30:05.902 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Open pumping valve。
[Save Log Job] 2024-10-17 17:30:06.404 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Wait chamber pressure until below 100。
[Save Log Job] 2024-10-17 17:30:10.829 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-10-17 17:30:10.830 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 50)
[Save Log Job] 2024-10-17 17:30:10.830 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 50 mTorr。
[Save Log Job] 2024-10-17 17:30:10.830 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-10-17 17:31:54.403 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Pump below 100mTorr。
[Save Log Job] 2024-10-17 17:31:54.503 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Pump Finished in 1.8 minitues。
[Save Log Job] 2024-10-17 17:31:54.505 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
[Save Log Job] 2024-10-17 17:31:54.505 LOG.INFO UiEvent.cs Line:51 Event() - Pump
[Save Log Job] 2024-10-17 17:31:54.605 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
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