<== [Save Log Job] 2024-10-31 07:00:50.704 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 07:00:51.572 LOG.INFO EventService.cs Line:60 Register() - 客户端0b73feaa-c7d4-439d-923c-62938f2f4286已连接 [Save Log Job] 2024-10-31 07:00:51.873 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:00:51.873 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:00:51.950 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 07:00:53.406 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:00:53.898 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:00:56.963 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:01:21.951 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 07:01:21.952 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:01:21.968 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 07:01:22.156 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:01:35.528 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-31 07:01:40.366 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 <== [Save Log Job] 2024-10-31 07:02:48.062 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 07:02:49.166 LOG.INFO EventService.cs Line:60 Register() - 客户端ccbacf30-08ff-4eb2-bf23-4d6be330d997已连接 [Save Log Job] 2024-10-31 07:02:49.167 LOG.INFO EventService.cs Line:60 Register() - 客户端ccbacf30-08ff-4eb2-bf23-4d6be330d997已连接 [Save Log Job] 2024-10-31 07:02:49.397 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:02:49.397 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:02:49.479 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 07:02:50.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:02:51.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:02:54.493 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:03:00.086 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 07:03:00.088 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:03:00.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 07:03:00.274 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:03:05.041 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:03:05.043 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:03:05.043 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 07:03:27.705 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-31 07:03:32.407 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 <== [Save Log Job] 2024-10-31 07:08:25.621 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 07:08:26.609 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:08:26.609 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:08:26.667 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 07:08:26.719 LOG.INFO EventService.cs Line:60 Register() - 客户端0737703e-c71d-4899-b1d3-945ec45dcc58已连接 [Save Log Job] 2024-10-31 07:08:26.719 LOG.INFO EventService.cs Line:60 Register() - 客户端0737703e-c71d-4899-b1d3-945ec45dcc58已连接 [Save Log Job] 2024-10-31 07:08:27.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:08:28.249 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:08:31.682 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:08:34.924 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 07:08:34.925 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:08:34.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 07:08:35.100 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:08:37.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:08:37.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:08:37.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 07:11:28.845 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 07:11:34.106 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged <== [Save Log Job] 2024-10-31 07:13:06.353 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 07:13:07.318 LOG.INFO EventService.cs Line:60 Register() - 客户端d1b14575-a322-4983-9f99-c934f5a38157已连接 [Save Log Job] 2024-10-31 07:13:07.337 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:13:07.338 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:13:07.417 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 07:13:08.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:13:08.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:13:12.430 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:13:15.879 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 07:13:15.880 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:13:15.885 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 07:13:16.055 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:13:18.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:13:18.246 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:13:18.246 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode <== [Save Log Job] 2024-10-31 07:15:37.044 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 07:15:38.057 LOG.INFO EventService.cs Line:60 Register() - 客户端f2eaf5aa-e312-4a05-b5f5-6d79399ea90f已连接 [Save Log Job] 2024-10-31 07:15:38.209 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:15:38.209 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:15:38.264 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 07:15:39.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:15:39.662 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:15:43.280 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:15:48.146 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 07:15:48.147 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:15:48.153 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 07:15:48.325 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:15:50.572 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:15:50.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:15:50.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 07:16:50.150 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-31 07:16:55.761 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 <== [Save Log Job] 2024-10-31 07:17:34.102 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 07:17:35.030 LOG.INFO EventService.cs Line:60 Register() - 客户端17d3d1b0-c78c-4f87-955f-86e7a9269edb已连接 [Save Log Job] 2024-10-31 07:17:35.030 LOG.INFO EventService.cs Line:60 Register() - 客户端17d3d1b0-c78c-4f87-955f-86e7a9269edb已连接 [Save Log Job] 2024-10-31 07:17:35.136 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:17:35.137 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:17:35.186 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 07:17:36.557 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:17:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:17:40.199 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:17:43.577 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 07:17:43.578 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:17:43.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 07:17:43.752 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:17:55.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:17:55.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:17:55.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 07:18:24.018 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-31 07:18:30.983 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 <== [Save Log Job] 2024-10-31 07:19:13.050 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 07:19:13.975 LOG.INFO EventService.cs Line:60 Register() - 客户端ac961b74-0802-429c-9892-2666145cea47已连接 [Save Log Job] 2024-10-31 07:19:14.109 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:19:14.110 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:19:14.168 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 07:19:15.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:19:15.572 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:19:19.184 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:19:25.827 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 07:19:25.828 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:19:25.833 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 07:19:26.016 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:19:28.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:19:28.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:19:28.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 07:29:49.978 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 07:29:50.022 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged <== [Save Log Job] 2024-10-31 07:58:07.437 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 07:58:08.655 LOG.INFO EventService.cs Line:60 Register() - 客户端5b277d92-f3ef-4602-b0fe-e81a645401ad已连接 [Save Log Job] 2024-10-31 07:58:08.713 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:58:08.714 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 07:58:08.809 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 07:58:10.167 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:58:10.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:58:13.827 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:58:15.480 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 07:58:15.481 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 07:58:15.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 07:58:15.665 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 08:21:04.764 LOG.INFO EventService.cs Line:60 Register() - 客户端e342fc40-2ee3-4afa-91e6-ec6852a076fb已连接 [Save Log Job] 2024-10-31 08:21:04.764 LOG.INFO EventService.cs Line:60 Register() - 客户端e342fc40-2ee3-4afa-91e6-ec6852a076fb已连接 [Save Log Job] 2024-10-31 08:21:06.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 08:21:14.303 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 08:21:16.691 LOG.INFO LOG.cs Line:61 Write() - 用户admin强制注销登录 [Save Log Job] 2024-10-31 08:21:16.691 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 用户admin强制注销登录,账号admin在其他地点登录 [Save Log Job] 2024-10-31 08:21:16.693 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - ''admin'' 退出系统。 [Save Log Job] 2024-10-31 08:21:17.799 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 08:21:17.801 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 08:21:17.802 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 08:21:17.904 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 08:21:23.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:21:23.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 08:21:23.971 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode ==> <== [Save Log Job] 2024-10-31 08:22:33.469 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 08:22:34.303 LOG.INFO EventService.cs Line:60 Register() - 客户端cdb81847-691c-4a14-a4fd-8aa9f6b674a1已连接 [Save Log Job] 2024-10-31 08:22:34.480 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 08:22:34.480 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 08:22:38.721 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 08:22:53.571 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 08:23:23.553 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒 [Save Log Job] 2024-10-31 08:23:35.627 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 08:23:47.566 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 08:23:47.567 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 08:23:47.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 08:23:47.713 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 08:24:04.905 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:04.906 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:17.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:17.024 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:25.999 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:26.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:26.600 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:26.600 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:26.808 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:26.808 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.000 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.159 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.160 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.416 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.576 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.752 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:25:02.016 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【Chamber FSM】收到重复发送的消息22，该条消息被忽略。 [Save Log Job] 2024-10-31 08:25:02.016 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【DeviceLayer FSM】收到重复发送的消息3，该条消息被忽略。 [Save Log Job] 2024-10-31 08:25:02.168 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【Chamber FSM】收到重复发送的消息22，该条消息被忽略。 [Save Log Job] 2024-10-31 08:25:02.168 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【DeviceLayer FSM】收到重复发送的消息3，该条消息被忽略。 [Save Log Job] 2024-10-31 08:25:02.369 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【Chamber FSM】收到重复发送的消息22，该条消息被忽略。 [Save Log Job] 2024-10-31 08:25:02.369 LOG.WARN StateMachine.cs Line:303 PostMsg() - 状态机【DeviceLayer FSM】收到重复发送的消息3，该条消息被忽略。 [Save Log Job] 2024-10-31 08:25:03.640 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:25:03.640 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Init，can not do SetAutoMode。 <== [Save Log Job] 2024-10-31 08:25:28.125 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 08:25:29.033 LOG.INFO EventService.cs Line:60 Register() - 客户端d029d2cc-326a-4b6a-9c55-2c6dae174fe2已连接 [Save Log Job] 2024-10-31 08:25:29.146 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 08:25:29.147 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 08:25:29.197 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 08:25:30.490 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 08:25:30.603 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 08:25:34.209 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 08:25:39.315 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 08:25:39.316 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 08:25:39.321 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 08:25:39.485 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 08:26:00.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:26:00.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 08:26:00.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 08:26:14.137 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-31 08:26:25.555 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 08:27:01.503 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031082614-123 [Save Log Job] 2024-10-31 08:27:01.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 08:27:27.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 08:27:27.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 08:27:27.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 08:27:27.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 08:27:27.426 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 08:27:27.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 08:27:28.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 08:28:03.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 08:28:03.684 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 1.0 minitues。 [Save Log Job] 2024-10-31 08:28:03.685 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 08:28:03.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031082614-123 [Save Log Job] 2024-10-31 08:28:03.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031082614-123'' [Save Log Job] 2024-10-31 08:28:59.095 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031082614-123'' start run step 1：initial。 [Save Log Job] 2024-10-31 08:28:59.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 08:28:59.096 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 08:28:59.097 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 08:28:59.097 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 08:28:59.098 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 08:28:59.098 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 08:28:59.098 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 08:28:59.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 08:28:59.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 08:28:59.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 08:28:59.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 08:28:59.101 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 08:28:59.153 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability <== [Save Log Job] 2024-10-31 09:29:18.022 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 09:29:18.984 LOG.INFO EventService.cs Line:60 Register() - 客户端01fb3940-43f4-4647-a1ad-f3742d8e936a已连接 [Save Log Job] 2024-10-31 09:29:19.267 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 09:29:19.268 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 09:29:21.764 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 09:29:26.042 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 09:29:26.073 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 09:29:26.781 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 <== [Save Log Job] 2024-10-31 10:25:17.513 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 10:25:18.495 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 10:25:18.495 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 10:25:18.580 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 10:25:18.667 LOG.INFO EventService.cs Line:60 Register() - 客户端843f8b59-5889-447b-b2f8-9421edb3e5fb已连接 [Save Log Job] 2024-10-31 10:25:19.790 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 10:25:20.629 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 10:25:23.595 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 10:25:32.787 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 10:25:32.788 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 10:25:32.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 10:25:32.962 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 10:25:52.960 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 10:25:52.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 10:25:52.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode <== [Save Log Job] 2024-10-31 10:39:00.032 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 10:39:00.941 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 10:39:00.942 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 10:39:01.006 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 10:39:01.118 LOG.INFO EventService.cs Line:60 Register() - 客户端7e737423-4774-4fb4-a8b3-39a8bba51d22已连接 [Save Log Job] 2024-10-31 10:39:01.118 LOG.INFO EventService.cs Line:60 Register() - 客户端7e737423-4774-4fb4-a8b3-39a8bba51d22已连接 [Save Log Job] 2024-10-31 10:39:02.369 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 10:39:02.823 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 10:39:06.018 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 10:39:08.112 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 10:39:08.113 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 10:39:08.118 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 10:39:08.239 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 10:39:21.423 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 10:39:21.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 10:39:21.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode <== [Save Log Job] 2024-10-31 10:55:40.655 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 10:55:41.222 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 10:55:41.222 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 10:55:41.256 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 10:55:41.430 LOG.INFO EventService.cs Line:60 Register() - 客户端982048e3-48d3-45f4-bda9-921646ad89e3已连接 [Save Log Job] 2024-10-31 10:55:41.430 LOG.INFO EventService.cs Line:60 Register() - 客户端982048e3-48d3-45f4-bda9-921646ad89e3已连接 [Save Log Job] 2024-10-31 10:55:42.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 10:55:42.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 10:55:46.263 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 <== [Save Log Job] 2024-10-31 11:35:28.452 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 11:35:29.336 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 11:35:29.336 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 11:35:29.397 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 11:35:29.514 LOG.INFO EventService.cs Line:60 Register() - 客户端397166d3-412f-4029-bdb4-5d46891d27c8已连接 [Save Log Job] 2024-10-31 11:35:29.514 LOG.INFO EventService.cs Line:60 Register() - 客户端397166d3-412f-4029-bdb4-5d46891d27c8已连接 [Save Log Job] 2024-10-31 11:35:30.771 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:35:31.176 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 11:35:34.406 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:35:37.767 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 11:35:37.768 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 11:35:37.772 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 11:35:37.891 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 11:35:40.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 11:35:40.631 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 11:35:40.632 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 11:36:24.566 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file 123 renamed CACB [Save Log Job] 2024-10-31 11:36:24.566 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information <== [Save Log Job] 2024-10-31 11:36:37.187 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 11:36:37.877 LOG.INFO EventService.cs Line:60 Register() - 客户端7ec42523-bb40-4402-9cb0-51ccc252d370已连接 [Save Log Job] 2024-10-31 11:36:38.074 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 11:36:38.076 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 11:36:38.121 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 11:36:39.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 11:36:39.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:36:43.134 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:36:44.655 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 11:36:44.656 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 11:36:44.662 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 11:36:44.781 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 11:36:59.454 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 11:36:59.455 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 11:36:59.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 11:37:37.247 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 11:37:37.268 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031113737-CACB [Save Log Job] 2024-10-31 11:37:37.269 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 11:37:37.271 LOG.INFO YZQZFabAuto.cs Line:158 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 11:37:37.271 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:37:37.274 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:37:37.303 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:37:37.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 11:37:37.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 11:37:37.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 11:37:37.324 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 11:37:37.325 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 11:37:37.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 11:37:38.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 11:37:47.275 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:37:57.277 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:38:07.277 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:38:13.231 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 11:38:13.289 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 11:38:13.289 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 11:38:13.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031113737-CACB [Save Log Job] 2024-10-31 11:38:13.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031113737-CACB'' [Save Log Job] 2024-10-31 11:38:13.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031113737-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 11:38:13.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 11:38:13.344 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 11:38:13.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 11:38:13.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 11:38:13.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 11:38:13.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 11:38:13.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 11:38:13.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 11:38:13.347 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 11:38:13.347 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 11:38:13.347 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 11:38:13.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 11:38:13.400 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 11:38:17.280 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:38:27.281 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:38:37.283 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:38:43.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031113737-CACB'' end step 1 [Save Log Job] 2024-10-31 11:38:43.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 11:38:43.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031113737-CACB Start time：2024/10/31 11:38:13 End time：2024/10/31 11:38:43 Total time：0:0:30 [Save Log Job] 2024-10-31 11:38:43.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 11:38:43.482 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.458 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:47.284 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:38:53.567 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 11:38:53.625 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 11:38:57.284 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:38:59.481 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 11:38:59.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 11:39:01.574 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:39:02.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 11:39:06.017 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 11:39:07.285 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:39:17.286 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:39:27.287 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:39:37.287 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:39:47.287 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:39:56.129 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 11:39:56.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 11:39:56.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-31 11:39:56.937 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-31 11:39:56.980 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:39:57.085 LOG.INFO YZQZFabAuto.cs Line:204 EndJobRecord() - EndJobRecord|[{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":"10/31/2024 11:37:37 AM","EndtTime":null,"OxygenConcentration":"0.5185441","CharmberPressure":"50000","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.5185441","CharmberPressure":"50000","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.2843558","CharmberPressure":"35011","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.2687851","CharmberPressure":"25007","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.08293953","CharmberPressure":"10012","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"20.9915","CharmberPressure":"97","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"45.51493","CharmberPressure":"98","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"45.13792","CharmberPressure":"100","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"25.26181","CharmberPressure":"108","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.3654462","CharmberPressure":"92","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.7099109","CharmberPressure":"5083","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.001861358","CharmberPressure":"15078","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.9877884","CharmberPressure":"30087","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.492254","CharmberPressure":"40083","Power":"0","Operation":null},{"LotId":"SFC240912810/","MachineNumber":"22","ReceipeName":"CACB","StartTime":null,"EndtTime":null,"OxygenConcentration":"0.6777888","CharmberPressure":"55081","Power":"0","Operation":null}] [Save Log Job] 2024-10-31 11:39:57.085 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 <== [Save Log Job] 2024-10-31 11:49:39.060 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 11:49:39.965 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 11:49:39.965 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 11:49:40.027 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 11:49:40.057 LOG.INFO EventService.cs Line:60 Register() - 客户端a19de865-a0ef-4dbf-a9b6-a0b20fbea72e已连接 [Save Log Job] 2024-10-31 11:49:40.058 LOG.INFO EventService.cs Line:60 Register() - 客户端a19de865-a0ef-4dbf-a9b6-a0b20fbea72e已连接 [Save Log Job] 2024-10-31 11:49:41.363 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:49:41.873 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 11:49:45.036 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:49:51.498 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 11:49:51.499 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 11:49:51.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 11:49:51.628 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 11:50:04.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 11:50:04.292 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 11:50:04.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 11:50:17.363 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 11:50:17.383 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031115017-CACB [Save Log Job] 2024-10-31 11:50:17.383 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 11:50:17.385 LOG.INFO YZQZFabAuto.cs Line:158 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 11:50:17.386 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:50:17.390 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:50:17.436 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 11:50:17.436 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 11:50:17.436 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 11:50:17.437 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 11:50:17.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 11:50:17.461 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:50:17.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 11:50:19.503 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 11:50:21.076 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 11:50:27.391 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:50:37.392 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:50:47.392 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:50:57.393 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:51:03.735 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 11:51:03.796 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。 [Save Log Job] 2024-10-31 11:51:03.796 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 11:51:03.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031115017-CACB [Save Log Job] 2024-10-31 11:51:03.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031115017-CACB'' [Save Log Job] 2024-10-31 11:51:03.850 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031115017-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 11:51:03.852 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 11:51:03.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 11:51:03.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 11:51:03.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 11:51:03.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 11:51:03.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 11:51:03.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 11:51:03.905 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 11:51:07.394 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:51:17.400 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:51:27.404 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:51:33.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031115017-CACB'' end step 1 [Save Log Job] 2024-10-31 11:51:33.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 11:51:33.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031115017-CACB Start time：2024/10/31 11:51:03 End time：2024/10/31 11:51:33 Total time：0:0:30 [Save Log Job] 2024-10-31 11:51:33.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 11:51:33.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.946 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.947 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:37.404 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:51:44.040 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 11:51:44.098 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 11:51:47.405 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:51:49.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 11:51:49.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 11:51:51.923 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:53.255 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 11:51:56.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 11:51:57.405 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:52:07.406 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:52:17.407 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:52:27.409 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:52:37.409 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:52:46.423 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve <== [Save Log Job] 2024-10-31 11:54:01.734 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 11:54:02.629 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 11:54:02.630 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 11:54:02.694 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 11:54:02.720 LOG.INFO EventService.cs Line:60 Register() - 客户端fef1f210-1c1f-4960-97c3-f48e471e5cdc已连接 [Save Log Job] 2024-10-31 11:54:02.720 LOG.INFO EventService.cs Line:60 Register() - 客户端fef1f210-1c1f-4960-97c3-f48e471e5cdc已连接 [Save Log Job] 2024-10-31 11:54:03.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 11:54:04.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:54:07.708 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:54:11.806 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 11:54:11.807 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 11:54:11.812 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 11:54:11.937 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 11:54:16.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 11:54:16.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 11:54:16.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 11:54:26.292 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 11:54:26.314 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031115426-CACB [Save Log Job] 2024-10-31 11:54:26.314 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 11:54:26.316 LOG.INFO YZQZFabAuto.cs Line:158 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 11:54:26.317 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:54:26.320 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:54:26.368 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 11:54:26.368 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 11:54:26.368 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 11:54:26.369 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 11:54:26.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 11:54:26.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 11:54:26.504 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:54:28.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 11:54:36.322 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:54:46.322 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:54:56.323 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:55:06.323 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:55:07.120 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 11:55:07.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 11:55:07.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 11:55:07.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031115426-CACB [Save Log Job] 2024-10-31 11:55:07.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031115426-CACB'' [Save Log Job] 2024-10-31 11:55:07.234 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031115426-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 11:55:07.235 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 11:55:07.235 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 11:55:07.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 11:55:07.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 11:55:07.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 11:55:07.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 11:55:07.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 11:55:07.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 11:55:07.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 11:55:07.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 11:55:07.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 11:55:07.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 11:55:07.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 11:55:07.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 11:55:16.328 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:55:26.328 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:55:36.330 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:55:37.317 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031115426-CACB'' end step 1 [Save Log Job] 2024-10-31 11:55:37.320 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 11:55:37.320 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031115426-CACB Start time：2024/10/31 11:55:07 End time：2024/10/31 11:55:37 Total time：0:0:30 [Save Log Job] 2024-10-31 11:55:37.321 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 11:55:37.373 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 11:55:39.353 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.375 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.377 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.377 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.377 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.377 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:46.330 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:55:47.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 11:55:47.528 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 11:55:53.289 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 11:55:53.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 11:55:55.354 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:56.331 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:55:56.686 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 11:55:59.777 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 11:56:06.332 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:56:16.332 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:56:26.333 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:56:36.333 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:56:46.334 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:56:49.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 11:56:50.715 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 11:56:50.715 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-31 11:56:50.716 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-31 11:56:50.717 LOG.INFO YZQZFabAuto.cs Line:204 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 11:56:50.717 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 11:56:54.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:56:54.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:56:55.243 LOG.INFO YZQZFabAuto.cs Line:233 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311156507242—SFC240912810/.csv <== [Save Log Job] 2024-10-31 12:31:06.298 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 12:31:07.142 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 12:31:07.142 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 12:31:07.213 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 12:31:07.290 LOG.INFO EventService.cs Line:60 Register() - 客户端95b6b934-e339-472c-b005-2cbb2f97e0b4已连接 [Save Log Job] 2024-10-31 12:31:07.290 LOG.INFO EventService.cs Line:60 Register() - 客户端95b6b934-e339-472c-b005-2cbb2f97e0b4已连接 [Save Log Job] 2024-10-31 12:31:08.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:31:09.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 12:31:12.225 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 12:31:15.903 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 12:31:15.904 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 12:31:15.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 12:31:16.041 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 12:31:27.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 12:31:27.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 12:31:27.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 12:33:15.374 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 12:33:15.399 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031123315-CACB [Save Log Job] 2024-10-31 12:33:15.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 12:33:15.401 LOG.INFO YZQZFabAuto.cs Line:158 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 12:33:15.402 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:33:15.404 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:33:15.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 12:33:15.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 12:33:15.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 12:33:15.453 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 12:33:15.454 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 12:33:15.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:33:15.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 12:33:17.534 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 12:33:19.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 12:33:25.404 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:33:35.405 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:33:45.405 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:33:54.330 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 12:33:54.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 12:33:54.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 12:33:54.390 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031123315-CACB [Save Log Job] 2024-10-31 12:33:54.390 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031123315-CACB'' [Save Log Job] 2024-10-31 12:33:54.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031123315-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 12:33:54.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 12:33:54.445 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 12:33:54.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 12:33:54.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 12:33:54.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 12:33:54.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 12:33:54.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 12:33:54.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 12:33:54.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 12:33:54.448 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 12:33:54.448 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 12:33:54.448 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 12:33:54.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 12:33:55.406 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:34:05.408 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:34:15.414 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:34:24.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031123315-CACB'' end step 1 [Save Log Job] 2024-10-31 12:34:24.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 12:34:24.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031123315-CACB Start time：2024/10/31 12:33:54 End time：2024/10/31 12:34:24 Total time：0:0:30 [Save Log Job] 2024-10-31 12:34:24.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 12:34:24.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 12:34:25.415 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:34:55.821 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:55.823 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:55.823 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:55.823 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:55.825 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:55.825 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:55.842 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:34:56.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 12:34:56.895 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 12:35:05.843 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:35:15.843 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:35:17.898 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 12:35:17.957 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 12:35:19.969 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:35:21.319 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 12:35:24.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 12:35:25.843 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:35:35.844 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:35:45.844 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:35:55.845 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:36:05.845 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:36:14.493 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 12:36:15.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.8 minitues [Save Log Job] 2024-10-31 12:36:15.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-31 12:36:15.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-31 12:36:15.344 LOG.INFO YZQZFabAuto.cs Line:204 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 12:36:15.344 LOG.INFO YZQZFabAuto.cs Line:181 work() - work |0 [Save Log Job] 2024-10-31 12:36:19.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:36:19.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:36:29.917 LOG.INFO YZQZFabAuto.cs Line:233 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311236153512—SFC240912810.csv [Save Log Job] 2024-10-31 12:36:36.946 LOG.INFO YZQZFabAuto.cs Line:278 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311236153512—SFC240912810/.csv [Save Log Job] 2024-10-31 12:36:53.033 LOG.INFO YZQZFabAuto.cs Line:310 Export2CsvWanPanFile() - 用户名或密码不正确。 <== [Save Log Job] 2024-10-31 12:41:25.036 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 12:41:25.980 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 12:41:25.980 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 12:41:26.041 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 12:41:26.068 LOG.INFO EventService.cs Line:60 Register() - 客户端7a212ea1-bcf2-4521-a64d-1f6e1abb9196已连接 [Save Log Job] 2024-10-31 12:41:26.068 LOG.INFO EventService.cs Line:60 Register() - 客户端7a212ea1-bcf2-4521-a64d-1f6e1abb9196已连接 [Save Log Job] 2024-10-31 12:41:27.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:41:27.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 12:41:31.050 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 12:41:33.103 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 12:41:33.104 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 12:41:33.109 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 12:41:33.231 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 12:41:59.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 12:41:59.192 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 12:41:59.192 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 12:42:15.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 12:42:15.096 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031124215-CACB [Save Log Job] 2024-10-31 12:42:15.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 12:42:15.098 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 12:42:15.099 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:42:15.101 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:42:15.151 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 12:42:15.151 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 12:42:15.151 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 12:42:15.152 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 12:42:15.152 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 12:42:15.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:42:15.214 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 12:42:16.242 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 12:42:25.102 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:42:35.102 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:42:45.102 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:42:55.102 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:42:58.812 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 12:42:58.871 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 12:42:58.871 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 12:42:58.873 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031124215-CACB [Save Log Job] 2024-10-31 12:42:58.873 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031124215-CACB'' [Save Log Job] 2024-10-31 12:42:58.925 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031124215-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 12:42:58.926 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 12:42:58.926 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 12:42:58.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 12:42:58.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 12:42:58.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 12:42:58.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 12:42:58.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 12:42:58.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 12:42:58.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 12:42:58.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 12:42:58.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 12:42:58.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 12:43:05.108 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:43:15.113 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:43:25.115 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:43:28.994 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031124215-CACB'' end step 1 [Save Log Job] 2024-10-31 12:43:28.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 12:43:28.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031124215-CACB Start time：2024/10/31 12:42:58 End time：2024/10/31 12:43:28 Total time：0:0:30 [Save Log Job] 2024-10-31 12:43:28.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 12:43:29.051 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.048 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:35.115 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:43:39.113 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 12:43:39.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 12:43:45.003 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 12:43:45.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 12:43:45.116 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:43:47.101 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:48.440 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 12:43:51.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 12:43:55.117 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:44:05.118 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:44:15.118 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:44:25.119 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:44:35.120 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:44:41.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 12:44:42.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 12:44:42.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-31 12:44:42.466 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-31 12:44:42.467 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 12:44:42.467 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 12:52:31.566 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:52:31.566 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 12:52:31.566 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:52:31.967 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 12:52:31.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:52:32.386 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311244424724—SFC240912810.csv <== [Save Log Job] 2024-10-31 13:01:58.866 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 13:01:59.748 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:01:59.748 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:01:59.814 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 13:01:59.898 LOG.INFO EventService.cs Line:60 Register() - 客户端cf730beb-9262-41f4-8647-6e08434e8f3c已连接 [Save Log Job] 2024-10-31 13:01:59.898 LOG.INFO EventService.cs Line:60 Register() - 客户端cf730beb-9262-41f4-8647-6e08434e8f3c已连接 [Save Log Job] 2024-10-31 13:02:01.167 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:02:01.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:02:04.824 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:02:11.181 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 13:02:11.182 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:02:11.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 13:02:11.307 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:02:14.383 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:02:14.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:02:14.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:02:46.258 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:02:46.281 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031130246-CACB [Save Log Job] 2024-10-31 13:02:46.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 13:02:46.283 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 13:02:46.284 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:02:46.287 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:02:46.328 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:02:46.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:02:46.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:02:46.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:02:46.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:02:46.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:02:46.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:02:48.424 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 13:02:48.556 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:02:56.287 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:03:06.288 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:03:16.288 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:03:26.288 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:03:31.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:03:31.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 13:03:31.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 13:03:31.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031130246-CACB [Save Log Job] 2024-10-31 13:03:31.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031130246-CACB'' [Save Log Job] 2024-10-31 13:03:31.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031130246-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 13:03:31.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:03:31.335 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:03:31.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:03:31.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:03:31.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:03:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:03:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:03:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:03:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:03:31.390 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:03:36.293 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:03:46.298 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:03:56.305 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:04:01.402 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031130246-CACB'' end step 1 [Save Log Job] 2024-10-31 13:04:01.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:04:01.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031130246-CACB Start time：2024/10/31 13:03:31 End time：2024/10/31 13:04:01 Total time：0:0:30 [Save Log Job] 2024-10-31 13:04:01.405 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 13:04:01.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.439 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:06.306 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:04:11.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 13:04:11.611 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 13:04:16.307 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:04:17.411 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 13:04:17.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 13:04:19.512 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:20.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 13:04:23.903 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 13:04:26.308 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:04:36.309 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:04:46.309 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:04:56.309 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:05:06.310 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:05:13.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 13:05:14.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 13:05:14.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-31 13:05:14.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-31 13:05:14.800 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 13:05:14.800 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:05:18.257 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:05:19.112 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:05:32.190 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311305148094—SFC240912810.csv [Save Log Job] 2024-10-31 13:05:40.164 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311305148094—SFC240912810/.csv [Save Log Job] 2024-10-31 13:05:40.637 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 13:06:36.878 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, EFC241014689/) [Save Log Job] 2024-10-31 13:06:36.879 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031130636-CACB [Save Log Job] 2024-10-31 13:06:36.879 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 13:06:36.880 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|EFC241014689/|CACB [Save Log Job] 2024-10-31 13:06:36.880 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:06:36.881 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:06:36.891 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:06:36.930 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:06:36.987 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:06:39.031 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 13:06:39.699 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:06:46.882 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:06:56.883 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:07:06.883 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:07:11.266 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-10-31 13:07:11.411 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:07:16.887 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:07:28.783 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:07:40.502 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:07:50.507 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:08:00.511 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:08:10.512 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:08:20.515 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:08:30.520 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:08:33.910 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, EFC241014689/) [Save Log Job] 2024-10-31 13:08:33.912 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031130833-CACB [Save Log Job] 2024-10-31 13:08:33.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 13:08:33.912 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|EFC241014689/|CACB [Save Log Job] 2024-10-31 13:08:33.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:08:33.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:08:33.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:08:33.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:08:33.963 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:08:34.020 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:08:34.063 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:08:34.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:08:34.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:08:34.135 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。 [Save Log Job] 2024-10-31 13:08:34.135 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 13:08:34.135 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031130833-CACB [Save Log Job] 2024-10-31 13:08:34.135 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031130833-CACB'' [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031130833-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:08:34.186 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:08:34.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:08:34.187 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:08:34.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:08:34.240 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:08:40.523 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:08:50.528 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 <== [Save Log Job] 2024-10-31 13:10:12.452 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 13:10:13.203 LOG.INFO EventService.cs Line:60 Register() - 客户端6c415266-0548-4530-aa11-01ea455afc41已连接 [Save Log Job] 2024-10-31 13:10:13.316 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:10:13.316 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:10:13.376 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 13:10:14.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:10:14.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:10:18.389 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 <== [Save Log Job] 2024-10-31 13:10:28.700 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 13:10:29.541 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:10:29.542 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:10:29.586 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 13:10:29.626 LOG.INFO EventService.cs Line:60 Register() - 客户端e50b45b1-cc7a-4e6c-b3c6-7c7f62cd737f已连接 [Save Log Job] 2024-10-31 13:10:29.626 LOG.INFO EventService.cs Line:60 Register() - 客户端e50b45b1-cc7a-4e6c-b3c6-7c7f62cd737f已连接 [Save Log Job] 2024-10-31 13:10:30.848 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:10:30.910 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:10:34.597 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:10:40.252 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 13:10:40.253 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:10:40.258 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 13:10:40.379 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:11:19.792 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file CACB save completed [Save Log Job] 2024-10-31 13:11:19.792 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information [Save Log Job] 2024-10-31 13:11:24.841 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-10-31 13:11:24.842 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:11:30.822 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmRange, 1) [Save Log Job] 2024-10-31 13:11:32.654 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmTime, 2) [Save Log Job] 2024-10-31 13:12:00.470 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:12:00.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:12:00.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:13:07.450 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:13:07.459 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031131307-CACB [Save Log Job] 2024-10-31 13:13:07.460 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 13:13:07.462 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 13:13:07.463 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:13:07.465 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:13:07.497 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:13:07.515 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:13:07.515 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:13:07.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:13:07.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:13:07.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:13:07.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:13:09.103 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:13:17.465 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:13:27.466 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:13:37.466 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:13:47.467 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:13:47.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:13:47.995 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 13:13:47.995 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 13:13:47.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031131307-CACB [Save Log Job] 2024-10-31 13:13:47.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031131307-CACB'' [Save Log Job] 2024-10-31 13:13:48.050 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131307-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 13:13:48.051 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:13:48.051 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:13:48.051 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:13:48.052 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:13:48.052 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:13:48.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:13:48.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:13:48.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:13:48.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:13:48.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:13:48.055 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:13:48.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:13:57.473 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:14:07.475 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:14:17.479 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:14:18.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131307-CACB'' end step 1 [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131307-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:14:18.178 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:14:18.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:14:18.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:14:18.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:14:18.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 13:14:20.650 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 13:14:20.652 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 13:14:20.652 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:14:20.652 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 13:14:20.659 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:14:20.659 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031131307-CACB Start time：2024/10/31 13:13:47 End time：2024/10/31 13:14:20 Total time：0:0:32 [Save Log Job] 2024-10-31 13:14:20.660 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 13:14:20.661 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311314206598—SFC240912810.csv [Save Log Job] 2024-10-31 13:14:28.440 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311314206598—SFC240912810/.csv [Save Log Job] 2024-10-31 13:14:28.441 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.442 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.442 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.443 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:14:28.445 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:14:28.447 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.511 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String] [Save Log Job] 2024-10-31 13:14:28.677 LOG.INFO YZQZFabAuto.cs Line:102 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":201,"Message":"Value cannot be null.\r\nParameter name: value","Data":null} [Save Log Job] 2024-10-31 13:14:28.874 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 13:17:45.205 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:18:07.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:18:07.299 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031131807-CACB [Save Log Job] 2024-10-31 13:18:07.299 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 13:18:07.300 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 13:18:07.300 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:18:07.301 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:18:07.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:18:07.378 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:18:07.407 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:18:07.464 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:18:09.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:18:09.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。 [Save Log Job] 2024-10-31 13:18:09.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 13:18:09.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031131807-CACB [Save Log Job] 2024-10-31 13:18:09.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031131807-CACB'' [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131807-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:18:09.131 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:18:09.131 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:18:09.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:18:09.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:18:17.302 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:18:27.303 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:18:37.303 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:18:39.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131807-CACB'' end step 1 [Save Log Job] 2024-10-31 13:18:39.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031131807-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 13:18:39.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:18:39.276 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:18:39.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:18:39.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:18:39.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:18:39.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:18:39.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 13:18:41.847 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 13:18:41.847 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 13:18:41.847 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:18:41.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 13:19:06.642 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:06.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:19:06.643 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:06.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031131807-CACB Start time：2024/10/31 13:18:09 End time：2024/10/31 13:19:06 Total time：0:0:57 [Save Log Job] 2024-10-31 13:19:06.643 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:06.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 13:19:06.643 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:17.861 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:19:17.861 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:19:17.862 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311319178624—SFC240912810.csv [Save Log Job] 2024-10-31 13:19:17.867 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311319178624—SFC240912810/.csv [Save Log Job] 2024-10-31 13:19:21.866 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.273 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 13:19:39.273 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.273 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.273 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.274 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.281 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String] <== [Save Log Job] 2024-10-31 13:21:46.000 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 13:21:46.775 LOG.INFO EventService.cs Line:60 Register() - 客户端4c8eb1f2-5274-410f-ad2b-44862b8e5413已连接 [Save Log Job] 2024-10-31 13:21:46.775 LOG.INFO EventService.cs Line:60 Register() - 客户端4c8eb1f2-5274-410f-ad2b-44862b8e5413已连接 [Save Log Job] 2024-10-31 13:21:46.924 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:21:46.925 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:21:46.973 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 13:21:48.048 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:21:48.299 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:21:51.985 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:21:56.573 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 13:21:56.574 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:21:56.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 13:21:56.709 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:22:10.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:22:10.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:22:10.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:22:23.130 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:22:23.150 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031132223-CACB [Save Log Job] 2024-10-31 13:22:23.150 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 13:22:23.152 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 13:22:23.153 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:22:23.157 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:22:23.204 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:22:23.204 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:22:23.204 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:22:23.205 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:22:23.206 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:22:23.206 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:22:23.266 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:22:24.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:22:33.156 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:22:43.157 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:22:53.157 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:23:02.952 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:23:03.009 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 13:23:03.009 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 13:23:03.011 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031132223-CACB [Save Log Job] 2024-10-31 13:23:03.011 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031132223-CACB'' [Save Log Job] 2024-10-31 13:23:03.065 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132223-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 13:23:03.065 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:23:03.066 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:23:03.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:23:03.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:23:03.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:23:03.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:23:03.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:23:03.119 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:23:03.159 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:23:13.165 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:23:23.173 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:23:33.139 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132223-CACB'' end step 1 [Save Log Job] 2024-10-31 13:23:33.176 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132223-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:23:33.190 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:23:33.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:23:33.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 13:23:35.752 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 13:23:35.754 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 13:23:35.754 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:23:35.754 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 13:23:35.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:23:35.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031132223-CACB Start time：2024/10/31 13:23:03 End time：2024/10/31 13:23:35 Total time：0:0:32 [Save Log Job] 2024-10-31 13:23:35.763 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 13:23:39.706 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:23:39.706 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.707 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.707 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.707 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.709 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.710 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:23:39.711 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311323397064—SFC240912810.csv [Save Log Job] 2024-10-31 13:23:39.712 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.712 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311323397064—SFC240912810/.csv [Save Log Job] 2024-10-31 13:23:39.776 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String] [Save Log Job] 2024-10-31 13:23:46.515 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。 <== [Save Log Job] 2024-10-31 13:26:28.015 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 13:26:28.893 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:26:28.894 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:26:28.941 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 13:26:28.986 LOG.INFO EventService.cs Line:60 Register() - 客户端99e45dd7-c317-484d-be53-265e48822ce5已连接 [Save Log Job] 2024-10-31 13:26:28.986 LOG.INFO EventService.cs Line:60 Register() - 客户端99e45dd7-c317-484d-be53-265e48822ce5已连接 <== [Save Log Job] 2024-10-31 13:26:58.286 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 13:26:59.203 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:26:59.203 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:26:59.215 LOG.INFO EventService.cs Line:60 Register() - 客户端eaf139b9-493d-4913-9d9e-903c4bbe0a29已连接 [Save Log Job] 2024-10-31 13:26:59.215 LOG.INFO EventService.cs Line:60 Register() - 客户端eaf139b9-493d-4913-9d9e-903c4bbe0a29已连接 [Save Log Job] 2024-10-31 13:26:59.267 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 13:27:00.505 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:27:00.598 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:27:04.278 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:27:06.736 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 13:27:06.737 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:27:06.742 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 13:27:06.864 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:27:11.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:27:11.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:27:11.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:27:36.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:27:36.479 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031132736-CACB [Save Log Job] 2024-10-31 13:27:36.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 13:27:36.481 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 13:27:36.482 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:27:36.484 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:27:36.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:27:36.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:27:36.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:27:36.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:27:36.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:27:36.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:27:36.596 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:27:38.608 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 13:27:40.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:27:46.485 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:27:56.487 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:28:06.488 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:28:15.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:28:15.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 13:28:15.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 13:28:15.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031132736-CACB [Save Log Job] 2024-10-31 13:28:15.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031132736-CACB'' [Save Log Job] 2024-10-31 13:28:15.389 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132736-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 13:28:15.390 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:28:15.390 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:28:15.391 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:28:15.391 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:28:15.391 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:28:15.391 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:28:15.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:28:15.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:28:15.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:28:15.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:28:15.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:28:15.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:28:16.489 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:28:26.489 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:28:36.496 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:28:45.461 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132736-CACB'' end step 1 [Save Log Job] 2024-10-31 13:28:45.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031132736-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 13:28:45.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:28:45.511 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:28:45.512 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 13:28:46.501 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:28:48.101 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 13:28:48.103 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 13:28:48.103 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:28:48.103 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 13:28:48.106 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:28:48.106 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031132736-CACB Start time：2024/10/31 13:28:15 End time：2024/10/31 13:28:48 Total time：0:0:32 [Save Log Job] 2024-10-31 13:28:48.107 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 13:28:50.471 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:28:50.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:28:50.473 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.494 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311328504696—SFC240912810.csv [Save Log Job] 2024-10-31 13:28:50.496 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.496 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.496 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.496 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.496 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311328504696—SFC240912810/.csv [Save Log Job] 2024-10-31 13:28:50.563 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String] [Save Log Job] 2024-10-31 13:28:52.340 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。 <== [Save Log Job] 2024-10-31 13:41:35.605 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 13:41:36.535 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:41:36.535 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:41:36.554 LOG.INFO EventService.cs Line:60 Register() - 客户端e6b361e0-9a41-4c6a-b7fa-9630c1d10ca7已连接 [Save Log Job] 2024-10-31 13:41:36.554 LOG.INFO EventService.cs Line:60 Register() - 客户端e6b361e0-9a41-4c6a-b7fa-9630c1d10ca7已连接 [Save Log Job] 2024-10-31 13:41:36.603 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 13:41:37.816 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:41:37.940 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:41:41.613 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:41:43.464 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 13:41:43.466 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:41:43.470 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 13:41:43.591 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:42:03.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:42:03.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:42:03.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:42:15.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:42:15.860 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031134215-CACB [Save Log Job] 2024-10-31 13:42:15.860 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 13:42:15.862 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/|CACB [Save Log Job] 2024-10-31 13:42:15.863 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:42:15.865 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:42:15.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:42:15.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:42:15.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:42:15.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:42:15.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:42:15.978 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:42:16.033 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:42:17.609 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:42:25.865 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:42:35.866 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:42:45.867 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:42:52.607 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:42:52.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 13:42:52.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 13:42:52.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031134215-CACB [Save Log Job] 2024-10-31 13:42:52.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031134215-CACB'' [Save Log Job] 2024-10-31 13:42:52.720 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031134215-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 13:42:52.721 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:42:52.722 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:42:52.722 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:42:52.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:42:52.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:42:52.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:42:52.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:42:52.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:42:52.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:42:52.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:42:52.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:42:52.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:42:52.776 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:42:55.869 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:43:05.873 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:43:15.877 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 13:43:22.808 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031134215-CACB'' end step 1 [Save Log Job] 2024-10-31 13:43:22.858 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031134215-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 13:43:22.858 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:43:22.858 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:43:22.858 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:43:22.858 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:43:22.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 <== [Save Log Job] 2024-10-31 13:59:11.120 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 13:59:12.049 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:59:12.049 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 13:59:12.118 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 13:59:12.140 LOG.INFO EventService.cs Line:55 Register() - 客户端c9419173-b8e4-43fa-983b-785d9f486288已连接 [Save Log Job] 2024-10-31 13:59:12.140 LOG.INFO EventService.cs Line:60 Register() - 客户端c9419173-b8e4-43fa-983b-785d9f486288已连接 [Save Log Job] 2024-10-31 13:59:13.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:59:13.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:59:17.136 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:59:20.180 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 13:59:20.181 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 13:59:20.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 13:59:20.308 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 14:00:34.410 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 14:00:34.412 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 14:00:34.412 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 14:01:01.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/EFC241014689/) [Save Log Job] 2024-10-31 14:01:01.791 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031140101-CACB [Save Log Job] 2024-10-31 14:01:01.791 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 14:01:01.793 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/EFC241014689/|CACB [Save Log Job] 2024-10-31 14:01:01.794 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:01:01.796 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:01:01.846 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 14:01:01.846 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 14:01:01.846 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 14:01:01.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 14:01:01.848 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 14:01:01.908 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 14:01:01.920 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:01:03.915 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 14:01:06.084 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 14:01:11.796 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:01:21.797 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:01:31.799 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:01:40.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 14:01:41.023 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 14:01:41.023 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 14:01:41.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031140101-CACB [Save Log Job] 2024-10-31 14:01:41.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031140101-CACB'' [Save Log Job] 2024-10-31 14:01:41.077 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140101-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 14:01:41.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:01:41.078 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:01:41.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:01:41.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 14:01:41.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:01:41.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:01:41.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:01:41.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:01:41.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:01:41.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:01:41.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:01:41.082 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:01:41.083 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 14:01:41.134 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 14:01:41.799 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:01:51.804 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:02:01.807 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:02:11.173 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140101-CACB'' end step 1 [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140101-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:02:11.224 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:02:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:02:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 14:02:11.811 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:02:13.796 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 14:02:13.796 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 14:02:18.235 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:02:18.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 14:02:19.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 14:02:19.405 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031140101-CACB Start time：2024/10/31 14:01:41 End time：2024/10/31 14:02:19 Total time：0:0:38 [Save Log Job] 2024-10-31 14:02:22.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 14:02:22.910 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 <== [Save Log Job] 2024-10-31 14:03:24.942 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 14:03:25.728 LOG.INFO EventService.cs Line:60 Register() - 客户端2b17448f-9af3-475b-b8c8-9bb397f26059已连接 [Save Log Job] 2024-10-31 14:03:25.907 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 14:03:25.908 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 14:03:25.971 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 14:03:27.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 14:03:27.304 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:03:30.982 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 14:04:02.717 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 14:04:02.718 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 14:04:02.723 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 14:04:02.840 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 14:04:16.138 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 14:04:16.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 14:04:16.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 14:04:47.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/EFC241014689/) [Save Log Job] 2024-10-31 14:04:47.507 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031140447-CACB [Save Log Job] 2024-10-31 14:04:47.507 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 14:04:47.509 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/EFC241014689/|CACB [Save Log Job] 2024-10-31 14:04:47.510 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:04:47.514 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:04:47.520 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:04:47.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 14:04:47.561 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 14:04:47.561 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 14:04:47.562 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 14:04:47.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 14:04:47.624 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 14:04:49.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 14:04:57.514 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:05:07.515 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:05:17.515 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:05:27.515 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:05:28.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 14:05:28.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 14:05:28.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 14:05:28.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031140447-CACB [Save Log Job] 2024-10-31 14:05:28.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031140447-CACB'' [Save Log Job] 2024-10-31 14:05:28.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140447-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 14:05:28.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:05:28.181 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:05:28.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:05:28.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:05:28.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:05:28.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:05:28.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:05:28.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 14:05:28.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 14:05:37.517 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:05:47.523 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:05:57.529 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:05:58.231 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140447-CACB'' end step 1 [Save Log Job] 2024-10-31 14:05:58.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031140447-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 14:05:58.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:05:58.282 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:05:58.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:05:58.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:05:58.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 14:06:00.737 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 14:06:04.043 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 14:06:04.218 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:06:04.219 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 14:06:05.176 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 14:06:05.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031140447-CACB Start time：2024/10/31 14:05:28 End time：2024/10/31 14:06:05 Total time：0:0:37 [Save Log Job] 2024-10-31 14:06:10.313 LOG.ERROR LOG.cs Line:51 Write() - System.Threading.ThreadAbortException: Thread was being aborted. 在 System.Diagnostics.StackFrameHelper.InitializeSourceInfo(Int32 iSkip, Boolean fNeedFileInfo, Exception exception) 在 System.Diagnostics.StackTrace.CaptureStackTrace(Int32 iSkip, Boolean fNeedFileInfo, Thread targetThread, Exception e) 在 System.Diagnostics.StackTrace..ctor(Boolean fNeedFileInfo) 在 Aitex.Core.RT.Log.LogManager.CacheLog(String message, Level level, Exception exception, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LogManager.cs:行号 128 在 Aitex.Core.RT.Log.LogManager.Info(String message, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LogManager.cs:行号 53 在 Aitex.Core.RT.Log.LOG.Info(String message, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LOG.cs:行号 16 在 Aitex.Core.MES.YZQZ.YZQZFabAuto.work(Boolean start, Boolean end) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\YZQZ\YZQZFabAuto.cs:行号 144 在 Aitex.Core.MES.YZQZ.YZQZFabAuto.OnTimer() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\YZQZ\YZQZFabAuto.cs:行号 139 在 Aitex.Core.Util.PeriodicJob.Run() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Utilities\PeriodicJob.cs:行号 116 [Save Log Job] 2024-10-31 14:06:11.249 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:11.249 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 14:06:11.249 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311406095336—SFC240912810-EFC241014689.csv [Save Log Job] 2024-10-31 14:06:11.250 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:11.252 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311406095336—SFC240912810/EFC241014689/.csv [Save Log Job] 2024-10-31 14:06:11.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:06:14.320 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:14.320 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:14.321 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:15.615 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 14:06:54.505 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String] [Save Log Job] 2024-10-31 14:09:08.595 LOG.INFO YZQZFabAuto.cs Line:102 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":201,"Message":"Value cannot be null.\r\nParameter name: value","Data":null} <== [Save Log Job] 2024-10-31 14:28:59.139 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 14:29:00.032 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 14:29:00.035 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 14:29:00.109 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 14:29:00.257 LOG.INFO EventService.cs Line:60 Register() - 客户端4873e6b2-5db9-47c1-acab-caff677a7827已连接 [Save Log Job] 2024-10-31 14:29:01.513 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:29:01.765 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 14:29:05.125 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 14:29:10.683 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 14:29:10.685 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 14:29:10.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 14:29:10.856 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 14:29:24.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 14:29:24.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 14:29:24.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 14:29:43.043 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/EFC241014689) [Save Log Job] 2024-10-31 14:29:43.065 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031142943-CACB [Save Log Job] 2024-10-31 14:29:43.065 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 14:29:43.067 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start|SFC240912810/EFC241014689|CACB [Save Log Job] 2024-10-31 14:29:43.068 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:29:43.070 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:29:43.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 14:29:43.122 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 14:29:43.122 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 14:29:43.123 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 14:29:43.125 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:29:43.125 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 14:29:43.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 14:29:45.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 14:29:53.071 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:30:03.072 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:30:13.073 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:30:23.074 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:30:27.813 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 14:30:27.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 14:30:27.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 14:30:27.877 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031142943-CACB [Save Log Job] 2024-10-31 14:30:27.877 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031142943-CACB'' [Save Log Job] 2024-10-31 14:30:27.932 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031142943-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 14:30:27.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:30:27.933 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:30:27.934 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:30:27.934 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:30:27.935 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:30:27.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:30:27.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:30:27.937 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 14:30:27.937 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:30:27.937 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:30:27.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:30:27.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:30:27.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 14:30:27.992 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 14:30:33.085 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:30:43.092 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:30:53.097 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:30:58.022 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031142943-CACB'' end step 1 [Save Log Job] 2024-10-31 14:30:58.073 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031142943-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 14:30:58.073 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:30:58.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:30:58.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:30:58.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:30:58.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:30:58.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 14:31:00.541 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 14:31:00.543 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 14:31:00.543 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 14:31:04.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 14:31:04.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 14:31:04.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031142943-CACB Start time：2024/10/31 14:30:27 End time：2024/10/31 14:31:04 Total time：0:0:36 [Save Log Job] 2024-10-31 14:31:04.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 14:31:04.563 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311431045628—SFC240912810-EFC241014689.csv [Save Log Job] 2024-10-31 14:31:04.565 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:31:04.565 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311431045628—SFC240912810/EFC241014689.csv [Save Log Job] 2024-10-31 14:31:05.428 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 14:31:07.371 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:31:07.372 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:31:07.372 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:31:11.714 LOG.INFO YZQZFabAuto.cs Line:100 SaveMachineErrorRecord() - MES|http://192.168.1.207:86/api/mes/SaveMachineErrorRecord|System.Collections.Generic.Dictionary`2[System.String,System.String] <== [Save Log Job] 2024-10-31 14:33:17.709 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 14:33:18.756 LOG.INFO EventService.cs Line:60 Register() - 客户端4690f899-0613-4896-9530-7505c2c26c7e已连接 [Save Log Job] 2024-10-31 14:33:18.843 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 14:33:18.844 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 14:33:18.896 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 14:33:20.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 14:33:20.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:33:23.909 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 <== [Save Log Job] 2024-10-31 15:04:40.888 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 15:04:42.119 LOG.INFO EventService.cs Line:60 Register() - 客户端4c63ba02-8a3a-4679-9451-0f609576344d已连接 [Save Log Job] 2024-10-31 15:04:42.194 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 15:04:42.195 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 15:04:42.294 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 15:04:43.649 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:04:43.762 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 15:04:47.309 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 15:04:49.907 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 15:04:49.909 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 15:04:49.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 15:04:50.086 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 15:05:03.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 15:05:03.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 15:05:03.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 15:07:06.728 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, SFC240912810/EFC241014689) [Save Log Job] 2024-10-31 15:07:06.751 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031150706-CACB [Save Log Job] 2024-10-31 15:07:06.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 15:07:06.753 LOG.INFO YZQZFabAuto.cs Line:132 StartJobRecord() - StartJobRecord|start|SFC240912810/EFC241014689|CACB [Save Log Job] 2024-10-31 15:07:06.753 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:07:06.756 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:07:06.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 15:07:06.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 15:07:06.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 15:07:06.808 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 15:07:06.809 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 15:07:06.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 15:07:06.940 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:07:08.915 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 15:07:10.506 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 15:07:16.756 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:07:26.761 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:07:36.758 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:07:45.550 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 15:07:45.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 15:07:45.611 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 15:07:45.613 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031150706-CACB [Save Log Job] 2024-10-31 15:07:45.613 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031150706-CACB'' [Save Log Job] 2024-10-31 15:07:45.666 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031150706-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 15:07:45.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 15:07:45.667 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 15:07:45.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 15:07:45.668 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 15:07:45.668 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 15:07:45.669 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 15:07:45.669 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 15:07:45.669 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 15:07:45.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 15:07:45.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 15:07:45.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 15:07:45.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 15:07:45.672 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 15:07:45.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 15:07:46.761 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:07:56.769 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:08:06.774 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:08:15.745 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031150706-CACB'' end step 1 [Save Log Job] 2024-10-31 15:08:15.797 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031150706-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 15:08:15.797 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 15:08:15.797 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 15:08:15.798 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 15:08:15.799 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 15:08:16.787 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:08:18.249 LOG.INFO YZQZFabAuto.cs Line:178 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 15:08:18.249 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 15:08:18.251 LOG.INFO YZQZFabAuto.cs Line:155 work() - work |0 [Save Log Job] 2024-10-31 15:08:22.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 15:08:22.441 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 15:08:22.441 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031150706-CACB Start time：2024/10/31 15:07:45 End time：2024/10/31 15:08:22 Total time：0:0:36 [Save Log Job] 2024-10-31 15:08:22.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 15:08:22.465 LOG.INFO YZQZFabAuto.cs Line:207 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311508224532—SFC240912810-EFC241014689.csv [Save Log Job] 2024-10-31 15:08:22.467 LOG.INFO YZQZFabAuto.cs Line:252 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311508224532—SFC240912810/EFC241014689.csv [Save Log Job] 2024-10-31 15:08:22.496 LOG.ERROR LOG.cs Line:51 Write() - System.Threading.ThreadAbortException: Thread was being aborted. 在 System.Diagnostics.StackFrameHelper.InitializeSourceInfo(Int32 iSkip, Boolean fNeedFileInfo, Exception exception) 在 System.Diagnostics.StackTrace.CaptureStackTrace(Int32 iSkip, Boolean fNeedFileInfo, Thread targetThread, Exception e) 在 System.Diagnostics.StackTrace..ctor(Boolean fNeedFileInfo) 在 Aitex.Core.RT.Log.LogManager.CacheLog(String message, Level level, Exception exception, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LogManager.cs:行号 128 在 Aitex.Core.RT.Log.LogManager.Info(String message, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LogManager.cs:行号 53 在 Aitex.Core.RT.Log.LOG.Info(String message, Boolean isTraceOn) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Log\LOG.cs:行号 16 在 Aitex.Core.MES.YZQZ.YZQZFabAuto.work(Boolean start, Boolean end) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\YZQZ\YZQZFabAuto.cs:行号 155 在 Aitex.Core.MES.YZQZ.YZQZFabAuto.OnTimer() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\YZQZ\YZQZFabAuto.cs:行号 150 在 Aitex.Core.Util.PeriodicJob.Run() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Utilities\PeriodicJob.cs:行号 116 [Save Log Job] 2024-10-31 15:08:22.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:08:25.874 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:25.875 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:25.925 LOG.INFO YZQZFabAuto.cs Line:284 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 15:09:51.589 LOG.INFO YZQZFabAuto.cs Line:113 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} <== [Save Log Job] 2024-10-31 15:42:01.192 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 15:42:02.471 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 15:42:02.471 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 15:42:02.480 LOG.INFO EventService.cs Line:60 Register() - 客户端e4840b76-5b3d-4cc5-b4a6-9f226a4d29b1已连接 [Save Log Job] 2024-10-31 15:42:02.586 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 15:42:03.957 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:42:04.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 15:42:07.603 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 15:42:49.997 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 15:42:49.999 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 15:42:50.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 15:42:50.178 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 15:44:58.867 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 15:44:58.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 15:44:58.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 15:45:19.950 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 15:45:19.975 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031154519-CACB [Save Log Job] 2024-10-31 15:45:19.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 15:45:19.976 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-10-31 15:45:19.977 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:45:19.980 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:45:20.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 15:45:20.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 15:45:20.032 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 15:45:20.033 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 15:45:20.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 15:45:20.049 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:45:20.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 15:45:21.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 15:45:29.981 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:45:39.982 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:45:49.983 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:46:21.546 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:46:35.806 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:46:52.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 15:46:52.179 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:46:53.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 1.6 minitues。 [Save Log Job] 2024-10-31 15:46:53.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 15:46:53.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031154519-CACB [Save Log Job] 2024-10-31 15:46:53.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031154519-CACB'' [Save Log Job] 2024-10-31 15:47:05.730 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:48:40.664 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:51:07.533 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 15:51:07.533 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:51:07.558 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 15:51:07.669 LOG.INFO YZQZFabAuto.cs Line:196 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311551076673—.csv [Save Log Job] 2024-10-31 15:51:12.908 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311551076673—.csv [Save Log Job] 2024-10-31 15:51:12.922 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 15:51:13.918 LOG.INFO YZQZFabAuto.cs Line:273 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 15:51:13.918 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031154519-CACB Start time：2024/10/31 15:46:53 End time：2024/10/31 15:51:13 Total time：0:4:20 [Save Log Job] 2024-10-31 15:51:13.920 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 15:51:19.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:51:19.785 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:51:23.134 LOG.INFO YZQZFabAuto.cs Line:102 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 15:51:49.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file CACB save completed [Save Log Job] 2024-10-31 15:51:49.928 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information [Save Log Job] 2024-10-31 15:51:53.728 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-10-31 15:51:53.728 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 15:52:04.678 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmRange, 100) [Save Log Job] 2024-10-31 15:52:05.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmTime, 100) [Save Log Job] 2024-10-31 15:52:30.586 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:53:41.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 15:55:10.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:55:45.004 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031155341-CACB [Save Log Job] 2024-10-31 15:55:45.004 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 15:55:45.009 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 15:56:05.344 LOG.INFO YZQZFabAuto.cs Line:121 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-10-31 15:56:05.344 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:56:16.441 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:56:41.909 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:56:53.841 LOG.INFO YZQZFabAuto.cs Line:144 work() - work |0 [Save Log Job] 2024-10-31 15:56:53.886 LOG.INFO YZQZFabAuto.cs Line:167 EndJobRecord() - EndJobRecord| <== [Save Log Job] 2024-10-31 16:44:37.752 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 16:44:38.743 LOG.INFO EventService.cs Line:60 Register() - 客户端ccbfbe9d-0cdb-4f56-9a1b-a58fbaaee3b3已连接 [Save Log Job] 2024-10-31 16:44:38.846 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 16:44:38.846 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 16:44:38.930 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 16:44:44.890 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 16:45:09.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 16:45:14.756 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 16:45:33.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 16:45:52.287 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:45:56.584 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:45:56.589 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:45:59.523 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:46:29.458 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 16:46:29.459 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 16:46:29.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 16:46:29.601 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 16:46:43.911 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 16:46:43.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 16:46:43.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 16:47:03.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 16:47:05.673 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031164703-CACB [Save Log Job] 2024-10-31 16:47:05.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 16:47:05.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 16:47:05.705 LOG.INFO YZQZFabAuto.cs Line:160 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-10-31 16:47:05.710 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:47:05.717 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:47:15.918 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:47:19.284 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:47:19.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 16:47:19.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 16:47:19.287 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 16:47:19.307 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 16:47:19.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 16:47:20.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 16:47:20.808 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:47:21.892 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 16:47:25.919 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:47:35.920 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:47:45.921 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:47:55.921 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:47:56.932 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 16:47:56.993 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-31 16:47:56.993 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 16:47:56.996 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031164703-CACB [Save Log Job] 2024-10-31 16:47:56.996 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031164703-CACB'' [Save Log Job] 2024-10-31 16:47:57.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031164703-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 16:47:57.055 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 16:47:57.055 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 16:47:57.056 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 16:47:57.056 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 16:47:57.057 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 16:47:57.057 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 16:47:57.058 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 16:47:57.058 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 16:47:57.058 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 16:47:57.059 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 16:47:57.059 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 16:47:57.060 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 16:47:57.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 16:47:57.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 16:47:57.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 16:47:57.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 16:47:57.062 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 16:47:57.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 16:47:57.157 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:48:05.923 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:48:15.935 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:48:25.945 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:48:27.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031164703-CACB'' end step 1 [Save Log Job] 2024-10-31 16:48:27.143 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 16:48:27.143 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031164703-CACB Start time：2024/10/31 16:47:56 End time：2024/10/31 16:48:27 Total time：0:0:30 [Save Log Job] 2024-10-31 16:48:27.144 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 16:48:27.199 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 16:48:27.226 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.194 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:35.946 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:48:37.267 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 16:48:37.328 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 16:48:43.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 16:48:43.300 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 16:48:45.320 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:45.947 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:48:46.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 16:48:49.745 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 16:48:55.948 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:49:05.949 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:49:15.951 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:49:25.952 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:49:35.953 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:49:39.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 16:49:40.738 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 16:49:40.739 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-31 16:49:40.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-31 16:49:40.741 LOG.INFO YZQZFabAuto.cs Line:206 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 16:49:40.741 LOG.INFO YZQZFabAuto.cs Line:183 work() - work |0 [Save Log Job] 2024-10-31 16:49:40.753 LOG.INFO YZQZFabAuto.cs Line:235 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311649407528—.csv [Save Log Job] 2024-10-31 16:49:40.755 LOG.INFO YZQZFabAuto.cs Line:280 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311649407528—.csv [Save Log Job] 2024-10-31 16:49:40.778 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 16:49:40.796 LOG.INFO YZQZFabAuto.cs Line:147 SaveMachineStatusRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 16:49:41.199 LOG.INFO YZQZFabAuto.cs Line:312 Export2CsvWanPanFile() - 用户名或密码不正确。 <== [Save Log Job] 2024-10-31 17:07:12.760 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 17:07:13.808 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 17:07:13.808 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 17:07:13.900 LOG.INFO EventService.cs Line:60 Register() - 客户端546b7464-8372-4d28-9b38-c61c03eb2884已连接 [Save Log Job] 2024-10-31 17:07:13.911 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 17:07:14.917 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:07:14.990 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:07:15.168 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:07:15.214 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:07:15.311 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:07:15.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 17:07:15.549 LOG.ERROR DatabaseManager.cs Line:70 PeriodicRun() - 执行数据库操作错误, Backend sent unrecognized response type: ?, Insert into "EventManager"("ID","EventEnum","Type","Source","Description","Level","OccurTime") values(1000,'GeneralInfo','EventUI_Notify','System','Operation SetConfig(System_IsMesMode, True)','Information','2024-10-31 17:07:15.393') [Save Log Job] 2024-10-31 17:07:15.580 LOG.ERROR PostgresqlDB.cs Line:113 ExecuteDataset() - 执行查询出错，SELECT * FROM "RecipeRunHistory" where "ProcessBeginTime" >= '2024/10/31 00:00:00.000' and "ProcessBeginTime" <= '2024/10/31 23:59:59.999' order by "ProcessBeginTime" ASC; System.ObjectDisposedException: 无法访问已关闭的流。 在 System.IO.__Error.StreamIsClosed() 在 System.IO.BufferedStream.Read(Byte[] array, Int32 offset, Int32 count) 在 Npgsql.PGUtil.CheckedStreamRead(Stream stream, Byte[] buffer, Int32 offset, Int32 size) 在 Npgsql.PGUtil.ReadInt32(Stream stream) 在 Npgsql.StringRowReaderV3.GetThisFieldCount() 在 Npgsql.StringRowReaderV3.ReadNext() 在 Npgsql.RowReader.GetNext() 在 Npgsql.ForwardsOnlyRow.get_Item(Int32 index) 在 Npgsql.ForwardsOnlyDataReader.GetProviderSpecificValue(Int32 ordinal) 在 Npgsql.ForwardsOnlyDataReader.GetValue(Int32 Index) 在 Npgsql.CachingDataReader..ctor(ForwardsOnlyDataReader reader, CommandBehavior behavior) 在 Npgsql.NpgsqlCommand.ExecuteReader(CommandBehavior cb) 在 Npgsql.NpgsqlCommand.ExecuteDbDataReader(CommandBehavior behavior) 在 System.Data.Common.DbCommand.System.Data.IDbCommand.ExecuteReader(CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.FillInternal(DataSet dataset, DataTable[] datatables, Int32 startRecord, Int32 maxRecords, String srcTable, IDbCommand command, CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.Fill(DataSet dataSet, Int32 startRecord, Int32 maxRecords, String srcTable, IDbCommand command, CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.Fill(DataSet dataSet) 在 Aitex.Core.RT.DBCore.PostgresqlDB.ExecuteDataset(String cmdText, Object[] p) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\DBCore\PostgresqlDB.cs:行号 107 [Save Log Job] 2024-10-31 17:07:18.925 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 17:07:24.298 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-31 17:07:24.299 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 17:07:24.305 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-31 17:07:24.485 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 17:07:43.134 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-31 17:07:43.136 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 17:07:43.136 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 17:07:47.101 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 17:07:47.122 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-10-31 17:07:47.125 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031170747-CACB [Save Log Job] 2024-10-31 17:07:47.125 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 17:07:47.126 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-10-31 17:07:47.127 LOG.INFO YZQZFabAuto.cs Line:168 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-10-31 17:07:47.128 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:07:47.130 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:07:47.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 17:07:47.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 17:07:47.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 17:07:47.181 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 17:07:47.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 17:07:47.240 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:07:47.248 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 17:07:49.252 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 17:07:51.215 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 17:07:57.130 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:08:07.134 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:08:17.131 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:08:26.159 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 17:08:26.220 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 17:08:26.220 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 17:08:26.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031170747-CACB [Save Log Job] 2024-10-31 17:08:26.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031170747-CACB'' [Save Log Job] 2024-10-31 17:08:26.223 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-10-31 17:08:26.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031170747-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 17:08:26.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 17:08:26.279 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 17:08:26.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 17:08:26.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 17:08:26.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 17:08:26.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 17:08:26.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 17:08:26.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 17:08:26.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 17:08:26.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 17:08:26.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 17:08:26.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 17:08:26.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 17:08:26.287 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 17:08:26.339 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 17:08:27.134 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:08:37.144 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:08:47.156 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:08:56.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031170747-CACB'' end step 1 [Save Log Job] 2024-10-31 17:08:56.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 17:08:56.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031170747-CACB Start time：2024/10/31 17:08:26 End time：2024/10/31 17:08:56 Total time：0:0:30 [Save Log Job] 2024-10-31 17:08:56.367 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 17:08:56.368 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-10-31 17:08:56.423 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 17:08:57.158 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.411 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:09:06.518 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 17:09:06.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 17:09:07.158 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:09:12.372 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 17:09:12.434 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 17:09:14.457 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:09:15.807 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 17:09:17.159 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:09:18.911 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 17:09:27.159 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:09:37.160 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:09:47.161 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:09:57.161 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:10:07.161 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:10:09.001 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 17:10:09.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 17:10:09.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-31 17:10:09.917 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-31 17:10:09.918 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:10:09.919 LOG.INFO YZQZFabAuto.cs Line:214 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 17:10:09.919 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:10:09.934 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311710099323—.csv [Save Log Job] 2024-10-31 17:10:09.936 LOG.INFO YZQZFabAuto.cs Line:288 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311710099323—.csv [Save Log Job] 2024-10-31 17:10:09.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:10:10.395 LOG.INFO YZQZFabAuto.cs Line:320 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 17:14:28.259 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file CACB save completed [Save Log Job] 2024-10-31 17:14:28.259 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information [Save Log Job] 2024-10-31 17:14:29.580 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-10-31 17:14:29.581 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-31 17:14:33.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmTime, 1) [Save Log Job] 2024-10-31 17:14:34.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_RfPowerAlarmRange, 1) [Save Log Job] 2024-10-31 17:14:37.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file CACB save completed [Save Log Job] 2024-10-31 17:14:37.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information [Save Log Job] 2024-10-31 17:14:54.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 17:14:54.424 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241031171454-CACB [Save Log Job] 2024-10-31 17:14:54.424 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-10-31 17:14:54.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-31 17:14:54.424 LOG.INFO YZQZFabAuto.cs Line:168 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-10-31 17:14:54.425 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-10-31 17:14:54.425 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:14:54.430 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:14:54.475 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 17:14:54.475 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 17:14:54.475 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 17:14:54.476 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 17:14:54.476 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 17:14:54.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:14:54.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 17:14:56.579 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 17:14:58.213 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 17:15:04.432 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:15:14.434 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:15:24.434 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:15:34.434 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:15:44.437 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:15:48.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 17:15:48.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-31 17:15:48.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-31 17:15:48.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241031171454-CACB [Save Log Job] 2024-10-31 17:15:48.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241031171454-CACB'' [Save Log Job] 2024-10-31 17:15:48.749 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031171454-CACB'' start run step 1：initial。 [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 17:15:48.800 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 17:15:48.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 17:15:48.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 17:15:48.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-31 17:15:54.438 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:16:04.438 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:16:14.439 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:16:18.863 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031171454-CACB'' end step 1 [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241031171454-CACB'' start run step 2：initial。 [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 17:16:18.914 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 17:16:18.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 17:16:18.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 17:16:18.916 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 17:16:20.391 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds. [Save Log Job] 2024-10-31 17:16:20.393 LOG.INFO YZQZFabAuto.cs Line:214 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 17:16:20.393 LOG.INFO YZQZFabAuto.cs Line:191 work() - work |0 [Save Log Job] 2024-10-31 17:16:20.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 17:16:20.397 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202410311716203975—.csv [Save Log Job] 2024-10-31 17:16:20.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-31 17:16:20.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241031171454-CACB Start time：2024/10/31 17:15:48 End time：2024/10/31 17:16:20 Total time：0:0:31 [Save Log Job] 2024-10-31 17:16:20.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-31 17:16:20.398 LOG.INFO YZQZFabAuto.cs Line:288 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202410311716203975—.csv [Save Log Job] 2024-10-31 17:16:20.398 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error [Save Log Job] 2024-10-31 17:16:20.453 LOG.INFO YZQZFabAuto.cs Line:104 SaveMachineErrorRecord() - MES|ErrorResponse|{"Status":200,"Message":"保存成功","Data":{}} [Save Log Job] 2024-10-31 17:16:20.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:16:20.778 LOG.INFO YZQZFabAuto.cs Line:320 Export2CsvWanPanFile() - 用户名或密码不正确。 [Save Log Job] 2024-10-31 17:16:22.417 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:31:12.258 LOG.INFO YZQZFabAuto.cs Line:214 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-10-31 17:31:12.258 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running <== [Save Log Job] 2024-10-31 17:57:48.751 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 17:57:49.704 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 17:57:49.705 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 17:57:49.787 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 17:57:49.794 LOG.INFO EventService.cs Line:60 Register() - 客户端3b8c6475-2037-4155-83b0-4f95011e9206已连接 <== [Save Log Job] 2024-10-31 17:57:53.488 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-31 17:57:54.431 LOG.INFO EventService.cs Line:60 Register() - 客户端07e0dd8f-82ba-42e6-95b1-81eb85e3cbe0已连接 [Save Log Job] 2024-10-31 17:57:54.431 LOG.INFO EventService.cs Line:60 Register() - 客户端07e0dd8f-82ba-42e6-95b1-81eb85e3cbe0已连接 [Save Log Job] 2024-10-31 17:57:54.515 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 17:57:54.515 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-31 17:57:54.577 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-31 17:57:55.711 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:57:55.713 LOG.INFO YZQZFabAuto.cs Line:119 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:57:55.821 LOG.INFO YZQZFabAuto.cs Line:161 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-10-31 17:57:55.826 LOG.INFO YZQZFabAuto.cs Line:161 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-10-31 17:57:55.832 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:57:55.843 LOG.INFO YZQZFabAuto.cs Line:161 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-10-31 17:57:55.887 LOG.INFO YZQZFabAuto.cs Line:153 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-10-31 17:57:55.897 LOG.INFO YZQZFabAuto.cs Line:161 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-10-31 17:57:55.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:57:56.514 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 17:57:59.592 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。