text/microsoft-resx 2.0 System.Resources.ResXResourceReader, System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089 System.Resources.ResXResourceWriter, System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089 Auto Mode ..\logo.ico;System.Drawing.Icon, System.Drawing, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b03f5f7f11d50a3a Manual Mode System Initialize Failed, please check the log file for detail information. Are you sure you want to exit control system? Operation {0}{1} Undefined operation {0} error during read recipe file {0} recipe file content not valid, {0} recipe file not valid, {0} Invoke {0} exception Check door status Check pump status Close all the valves Open pumping valve Wait chamber pressure until below {0} Pumping Down completed Pumping Down BackPanel door is opened Chamber door is opened Precursor door is opened Pump door is opened check chamber door check backpanel door Chamber door not closed Backpanel door not closed can not close valve {0}, {1} can not close valve {0} in {1} s Open {0} {0} Can Not Be Open Close {0} {0} Can Not Be Close Stop pump Check if the rf is on Check if the gas stopped flowing close pump valve Stop pumping completed Gas Flow Pumping valve not open, open pump valve first Open valve and flow mfc Gas flow completed Gas flow pressure not stable in {0} seconds RF Power On Rf power completed stop RF error Stop gas flow Close valve and stop mfc Stop gas flow completed Cycle Purge Check if the pump valve open Start cycle purge pumping venting keep in pumping status CyclePurge finished Vent check sensor pumping close valve pumping open valve close all the valve vent delay {0} seconds before open vent valve vent valve vent {0} seconds vent completed Leak Check Open gas final valve pump delay {0} seconds Leak check delay {0} seconds Calculate leak check rate Leak Check finished Leak Check time: {0}, Start Pressure: {1}, Stop Pressure: {2}, Leak Time: {3}, Leak Rate: {4} Process Recipe：{0} Start time：{1} End time：{2} Total time：{3} {0} Recipe completely run {0} recipe was aborted recipe running：start step {0}，（{1}） Recipe running：current step {0}，paused user aborted recipe {0} Finished in {1} minitues pumping pressure to {0} mTor vent pressure to {0} mtor Load recipe '{0}' failed Check chamber pressure preprocess finished recipe：{0} failed reason：{1} wait for 10 seconds RF Power Off Stop all the gas flow pump delay {0} seconds vent delay {0} seconds Post Process finished {0} failed after running recipe Post Process loading recipe file... loading recipe file failed preparing running recipe preparing running recipe failed run recipe, pumping down run recipe, pumping down failed run recipe, pumping down aborted start running recipe run recipe failed running recipe running recipe aborted run recipe aborted run recipe skipped run recipe post process run recipe cycle purge recipe completed run recipe cycle purge error recipe aborted Pump below {0}mTorr {0} setpoint should be in {1} and {2}， setting value {3} is not valid Set RF match mode {0} Emergency Off button was pressed Main contactor is off Reset statistics of {0} Reset statistics of {0} failed, not define config entry Can not run recipe because pump PM needed Can not run recipe because RF PM needed base pressure {0} not valid Pump Down Limit {0} not valid System in online remote mode, can not switch to manual. switch off host control first Host Control mode change to OnlineRemote, notify system change to auto mode