PM.Smart.AZone.CurrentReading PM.Smart.AZone.TempReading PM.Smart.BZone.CurrentReading PM.Smart.BZone.TempReading PM.Smart.CZone.CurrentReading PM.Smart.CZone.TempReading PM.Smart.DZone.CurrentReading PM.Smart.DZone.TempReading PM.Smart.BZone.TcReading PM.Smart.CZone.TcReading PM.RecipeEngine.CurrentLoopCount PM.RecipeEngine.CurStepNo PM.RecipeEngine.RecipeTotalStepNum PM.RecipeEngine.CurStepTotalCycleCount PM.SmartServer.ReflectivityAt635nm_C_Area_01 PM.SmartServer.ReflectivityAt635nm_C_Area_02 PM.SmartServer.ReflectivityAt635nm_C_Area_03