{"text_format":"2","workbook":"xlsx","n_sheets":4,"sheets":["Sheet1","DI-DO","AO","AI"],"not_rendered":{"charts":0,"images":0,"macros":0,"external_links":0,"defined_names":0,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"Sheet1","index":0,"n_rows":4,"n_cols":4,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"PLC TO PC ==AI"]
[null,null,null,"PC TO PLC ==AO"]
[null,null,null,"DI== PLC TO PC"]
[null,null,null,"DO== PC TO PLC"]

{"sheet":"DI-DO","index":1,"n_rows":113,"n_cols":14,"rows_kept":113,"cut":false,"hidden":false,"merged":[[4,2,5,2],[7,2,8,2]]}
["DI","Name","Note","Postion (NO Power)","Location","Logic Note",null,"#.DO","ID","Name","EV No.","Note","Location","Logic Note"]
["DI-00","EMG stop botton",null,null,"CIO 0.00","1=botton closed ,0= button open",null,"DO-00",null,"N2 pressure alarm",null,null,"w4.00"]
["DI-01","EMO relay",null,null,"CIO 0.01","1=EMO ok,0=EMO alarm",null,"DO-01",null,"Pump water flow alarm ",null,null,"w4.01"]
["DI-02","Main conctactor",null,null,"CIO 0.02","1=contactor on,0=contactor off",null,"DO-02",{"$nulls":4},"w4.02"]
["DI-03","Booster Alarm","booster",null,"CIO 0.03",null,null,"DO-03",{"$nulls":4},"w4.03"]
["DI-04","Booster Running",null,null,"CIO 0.04",null,null,"DO-04",{"$nulls":4},"w4.04"]
["DI-05","Syetem reset button",null,null,"CIO 0.05","1=reset on,0=reset off",null,"DO-05",{"$nulls":4},"w4.05"]
["DI-06","Lever1 pump temp warnning","dry pump",null,"CIO 0.06",null,null,"DO-06",{"$nulls":4},"w4.06"]
["DI-07","Lever1 pump temp alarm",null,null,"CIO 0.07",null,null,"DO-07",{"$nulls":4},"w4.07"]
["DI-08",null,null,null,"CIO 0.08",null,null,"DO-08",{"$nulls":4},"w4.08"]
["DI-09",null,null,null,"CIO 0.09",null,null,"DO-09",{"$nulls":4},"w4.09"]
["DI-10","RF hardware interlock",null,null,"CIO 0.10","1=rf interlock ok,0=rf uninterlock",null,"DO-10",{"$nulls":4},"w4.10"]
["DI-11","Chamber door sw",null,null,"CIO 0.11","1=door closed,0=door open",null,"DO-11",{"$nulls":4},"w4.11"]
["DI-12","back panle door sw",null,null,"CIO 0.12","1=door closed,0=door open",null,"DO-12",{"$nulls":4},"w4.12"]
["DI-13",null,null,null,"CIO 0.13",null,null,"DO-13",{"$nulls":4},"w4.13"]
["DI-14","pump door sw",null,null,"CIO 0.14","1=door closed,0=door open",null,"DO-14",{"$nulls":4},"w4.14"]
["DI-15","RF power state fb",null,null,"CIO 0.15","1=on,0=off",null,"DO-15",{"$nulls":4},"w4.15"]
["DI-16",null,null,null,"CIO 1.00",null,null,"DO-16",null,"RF on/off",null,null,"w5.00","rf on==1,rf off ==0"]
["DI-17",null,null,null,"CIO 1.01",null,null,"DO-17",null,"reset signal",null,null,"w5.01"]
["DI-18",null,null,null,"CIO 1.02",null,null,"DO-18",{"$nulls":4},"w5.02"]
["DI-19",null,null,null,"CIO 1.03",null,null,"DO-19",{"$nulls":4},"w5.03"]
["DI-20",null,null,null,"CIO 1.04",null,null,"DO-20",{"$nulls":4},"w5.04"]
["DI-21","Lever1 pump running","oil&dry pump",null,"CIO 1.05",null,null,"DO-21",{"$nulls":4},"w5.05"]
["DI-22","Booster pump power on ","booster",null,"CIO 1.06",null,null,"DO-22",{"$nulls":4},"w5.06"]
["DI-23",null,null,null,"CIO 1.07",null,null,"DO-23",{"$nulls":4},"w5.07"]
["DI-24","Lever1 pump stop bt",null,null,"CIO 1.08",null,null,"DO-24",{"$nulls":4},"w5.08"]
["DI-25","Lever1 pump overload",null,null,"CIO 1.09",null,null,"DO-25",{"$nulls":4},"w5.09"]
["DI-26",null,null,null,"CIO 1.10",null,null,"DO-26",{"$nulls":4},"w5.10"]
["DI-27","RF over temp ",null,null,"CIO 1.11",null,null,"DO-27",{"$nulls":4},"w5.11"]
["DI-28",null,null,null,"CIO 1.12",null,null,"DO-28",{"$nulls":4},"w5.12"]
["DI-29",null,null,null,"CIO 1.13",null,null,"DO-29",{"$nulls":4},"w5.13"]
["DI-30",null,null,null,"CIO 1.14",null,null,"DO-30",{"$nulls":4},"w5.14"]
["DI-31","Lever1 pump start bt",null,null,"CIO 1.15",null,null,"DO-31",{"$nulls":4},"w5.15"]
["DI-32",null,null,null,"CIO2.00",null,null,"DO-32",null,"MFC1 valve  ",null,"SV1","w6.00","valve on==1,valve off ==0"]
["DI-33",null,null,null,"CIO2.01",null,null,"DO-33",null,"MFC2 valve",null,"SV2","w6.01","valve on==1,valve off ==0"]
["DI-34",null,null,null,"CIO2.02",null,null,"DO-34",null,"MFC3 valve",null,"SV3","w6.02"]
["DI-35",null,null,null,"CIO2.03",null,null,"DO-35",null,"MFC4 valve",null,"SV4","w6.03"]
["DI-36",null,null,null,"CIO2.04",null,null,"DO-36",null,"MFC5 valve",null,"SV5","w6.04"]
["DI-37",null,null,null,"CIO2.05",null,null,"DO-37",null,"Chamber purge valve",null,"SV6","w6.05","valve on==1,valve off ==0"]
["DI-38",null,null,null,"CIO2.06",null,null,"DO-38",{"$nulls":4},"w6.06"]
["DI-39",null,null,null,"CIO2.07",null,null,"DO-39",{"$nulls":4},"w6.07"]
["DI-40",null,null,null,"CIO2.08",null,null,"DO-40",{"$nulls":4},"w6.08"]
["DI-41",null,null,null,"CIO2.09",null,null,"DO-41",{"$nulls":4},"w6.09"]
["DI-42",null,null,null,"CIO2.10",null,null,"DO-42",null,"Yellow light",null,null,"w6.10"]
["DI-43",null,null,null,"CIO2.11",null,null,"DO-43",null,"Green light",null,null,"w6.11"]
["DI-44",null,null,null,"CIO2.12",null,null,"DO-44",null,"Red light",null,null,"w6.12"]
["DI-45",null,null,null,"CIO2.13",null,null,"DO-45",null,"Buzzer",null,null,"w6.13"]
["DI-46",null,null,null,"CIO2.14",null,null,"DO-46",{"$nulls":4},"w6.14"]
["DI-47",null,null,null,"CIO2.15",null,null,"DO-47",{"$nulls":4},"w6.15"]
["DI-48",null,null,null,"CIO3.00",null,null,"DO-48",null,"Process gas final valve","PV1",null,"w 0.00"]
["DI-49",null,null,null,"CIO3.01",null,null,"DO-49",null,"Pumping valve ","PV2",null,"w 0.01"]
["DI-50",null,null,null,"CIO3.02",null,null,"DO-50",null,"Chamber vent valve","PV3",null,"w 0.02"]
["DI-51",null,null,null,"CIO3.03",null,null,"DO-51",{"$nulls":4},"w 0.03"]
["DI-52",null,null,null,"CIO3.04",null,null,"DO-52",{"$nulls":4},"w 0.04"]
["DI-53",null,null,null,"CIO3.05",null,null,"DO-53",{"$nulls":4},"w 0.05"]
["DI-54",null,null,null,"CIO3.06",null,null,"DO-54",{"$nulls":4},"w 0.06"]
["DI-55",null,null,null,"CIO3.07",null,null,"DO-55",{"$nulls":4},"w 0.07"]
["DI-56","Process gas final valve state fb","PV1",null,"CIO3.08",null,null,"DO-56",{"$nulls":4},"w 0.08"]
["DI-57","Pumping valve state fb","PV2",null,"CIO3.09",null,null,"DO-57",{"$nulls":4},"w 0.09"]
["DI-58","Chamber vent valve state fb","PV3",null,"CIO3.10",null,null,"DO-58",{"$nulls":4},"w 0.10"]
["DI-59",null,null,null,"CIO3.11",null,null,"DO-59",{"$nulls":4},"w 0.11"]
["DI-60",null,null,null,"CIO3.12",null,null,"DO-60",{"$nulls":4},"w 0.12"]
["DI-61",null,null,null,"CIO3.13",null,null,"DO-61",{"$nulls":4},"w 0.13"]
["DI-62",null,null,null,"CIO3.14",null,null,"DO-62",{"$nulls":4},"w 0.14"]
["DI-63",null,null,null,"CIO3.15",null,null,"DO-63",{"$nulls":4},"w 0.15"]
["DI-64","MFC1 valve state fb","SV1",null,"CIO4.00",null,null,"DO-64",{"$nulls":4},"w1.00"]
["DI-65","MFC2 valve state fb","SV2",null,"CIO4.01",null,null,"DO-65",{"$nulls":4},"w1.01"]
["DI-66","MFC3 valve state fb","SV3",null,"CIO4.02",null,null,"DO-66",{"$nulls":4},"w1.02"]
["DI-67","MFC4 valve state fb","SV4",null,"CIO4.03",null,null,"DO-67",{"$nulls":4},"w1.03"]
["DI-68","MFC5 valve state fb","SV5",null,"CIO4.04",null,null,"DO-68",{"$nulls":4},"w1.04"]
["DI-69","Chamber purge valve state fb","SV6",null,"CIO4.05",null,null,"DO-69",{"$nulls":4},"w1.05"]
["DI-70",null,null,null,"CIO4.06",null,null,"DO-70",{"$nulls":4},"w1.06"]
["DI-71",null,null,null,"CIO4.07",null,null,"DO-71",{"$nulls":4},"w1.07"]
["DI-72",null,null,null,"CIO4.08",null,null,"DO-72",{"$nulls":4},"w1.08"]
["DI-73",null,null,null,"CIO4.09",null,null,"DO-73",{"$nulls":4},"w1.09"]
["DI-74","Yellow light fb",null,null,"CIO4.10",null,null,"DO-74",{"$nulls":4},"w1.10"]
["DI-75","Green light fb",null,null,"CIO4.11",null,null,"DO-75",{"$nulls":4},"w1.11"]
["DI-76","Red light fb",null,null,"CIO4.12",null,null,"DO-76",{"$nulls":4},"w1.12"]
["DI-77","Buzzer fb",null,null,"CIO4.13",null,null,"DO-77",{"$nulls":4},"w1.13"]
["DI-78",null,null,null,"CIO4.14",null,null,"DO-78",{"$nulls":4},"w1.14"]
["DI-79",null,null,null,"CIO4.15",null,null,"DO-79",{"$nulls":4},"w1.15"]
["DI-80",null,null,null,"CIO5.00",null,null,"DO-80",{"$nulls":4},"w2.00"]
["DI-81",null,null,null,"CIO5.01",null,null,"DO-81",{"$nulls":4},"w2.01"]
["DI-82",null,null,null,"CIO5.02",null,null,"DO-82",{"$nulls":4},"w2.02"]
["DI-83",null,null,null,"CIO5.03",null,null,"DO-83",{"$nulls":4},"w2.03"]
["DI-84",null,null,null,"CIO5.04",null,null,"DO-84",{"$nulls":4},"w2.04"]
["DI-85",null,null,null,"CIO5.05",null,null,"DO-85",{"$nulls":4},"w2.05"]
["DI-86",null,null,null,"CIO5.06",null,null,"DO-86",{"$nulls":4},"w2.06"]
["DI-87",null,null,null,"CIO5.07",null,null,"DO-87",{"$nulls":4},"w2.07"]
["DI-88",null,null,null,"CIO5.08",null,null,"DO-88",{"$nulls":4},"w2.08"]
["DI-89",null,null,null,"CIO5.09",null,null,"DO-89",{"$nulls":4},"w2.09"]
["DI-90",null,null,null,"CIO5.10",null,null,"DO-90",{"$nulls":4},"w2.10"]
["DI-91",null,null,null,"CIO5.11",null,null,"DO-91",{"$nulls":4},"w2.11"]
["DI-92",null,null,null,"CIO5.12",null,null,"DO-92",{"$nulls":4},"w2.12"]
["DI-93",null,null,null,"CIO5.13",null,null,"DO-93",{"$nulls":4},"w2.13"]
["DI-94",null,null,null,"CIO5.14",null,null,"DO-94",{"$nulls":4},"w2.14"]
["DI-95",null,null,null,"CIO5.15",null,null,"DO-95",{"$nulls":4},"w2.15"]
["DI-96",null,null,null,"CIO6.00",null,null,"DO-96",{"$nulls":4},"w3.00"]
["DI-97",null,null,null,"CIO6.01",null,null,"DO-97",{"$nulls":4},"w3.01"]
["DI-98",null,null,null,"CIO6.02",null,null,"DO-98",{"$nulls":4},"w3.02"]
["DI-99",null,null,null,"CIO6.03",null,null,"DO-99",{"$nulls":4},"w3.03"]
["DI-100",null,null,null,"CIO6.04",null,null,"DO-100",{"$nulls":4},"w3.04"]
["DI-101",null,null,null,"CIO6.05",null,null,"DO-101",{"$nulls":4},"w3.05"]
["DI-102",null,null,null,"CIO6.06",null,null,"DO-102",{"$nulls":4},"w3.06"]
["DI-103",null,null,null,"CIO6.07",null,null,"DO-103",{"$nulls":4},"w3.07"]
["DI-104",null,null,null,"CIO6.08",null,null,"DO-104",{"$nulls":4},"w3.08"]
["DI-105",null,null,null,"CIO6.09",null,null,"DO-105",{"$nulls":4},"w3.09"]
["DI-106",null,null,null,"CIO6.10",null,null,"DO-106",{"$nulls":4},"w3.10"]
["DI-107",null,null,null,"CIO6.11",null,null,"DO-107",{"$nulls":4},"w3.11"]
["DI-108",null,null,null,"CIO6.12",null,null,"DO-108",{"$nulls":4},"w3.12"]
["DI-109",null,null,null,"CIO6.13",null,null,"DO-109",{"$nulls":4},"w3.13"]
["DI-110",null,null,null,"CIO6.14",null,null,"DO-110",{"$nulls":4},"w3.14"]
["DI-111",null,null,null,"CIO6.15",null,null,"DO-111",{"$nulls":4},"w3.15"]

{"sheet":"AO","index":2,"n_rows":51,"n_cols":8,"rows_kept":51,"cut":false,"hidden":false,"merged":[[18,7,20,7],[41,7,42,7]]}
["Node No. ","ID","Range","Scale","Device Name","Logic note","date type","Remark"]
["AO-00","d1000",null,"0-100%","match C1 position setpoint",null,"float"]
["AO-01","d1002",null,"0-100%","match C2 position setpoint",null,"float"]
["AO-02","d1004",null,null,"match work mode setpoint","0:manual,1=auto","float"]
["AO-03","d1006",null,null,"match hold or preset setpoint","0:hold,1=preset","float"]
["AO-04","d1008",{"$nulls":4},"float"]
["AO-05","d1010",{"$nulls":4},"float"]
["AO-06","d1012",{"$nulls":4},"float"]
["AO-07","d1014",{"$nulls":4},"float"]
["AO-08","d1016",null,null,"RF work mode set","CW mode==1,Pulsing mode==2,","float"]
["AO-09","d1018",null,"0-1000W","RF power setpoint",null,"float"]
["AO-10","d1020",null,"0-10K","RF Pulsing Frequency setpoint",null,"float"]
["AO-11","d1022",null,"0-100%","RF Pulsing duty cycle setpoint",null,"float"]
["AO-12","d1024",null,"0-1000SCCM","MFC1 flow setpoint",null,"float"]
["AO-13","d1026",null,"0-1000SCCM","MFC2 flow setpoint",null,"float"]
["AO-14","d1028",null,"0-1000SCCM","MFC3 flow setpoint",null,"float"]
["AO-15","d1030",null,"0-1000SCCM","MFC4 flow setpoint",null,"float"]
["AO-16","d1032",null,"0-1000SCCM","MFC5 flow setpoint",null,"float"]
["AO-17","d1034",null,null,"Throttle valve work mode","pressure=1,position=2","float","Throttle vavle only"]
["AO-18","d1036",null,"0-1000 mt","Throttle valve pressure setpoint",null,"float"]
["AO-19","d1038",null,"0-100%","Throttle valve position setpoint",null,"float"]
["AO-20","d1040",{"$nulls":4},"float"]
["AO-21","d1042",{"$nulls":4},"float"]
["AO-22","d1044",{"$nulls":4},"float"]
["AO-23","d1046",{"$nulls":4},"float"]
["AO-24","d1048",{"$nulls":4},"float"]
["AO-25","d1050",{"$nulls":4},"float"]
["AO-26","d1052",{"$nulls":4},"float"]
["AO-27","d1054",{"$nulls":4},"float"]
["AO-28","d1056",{"$nulls":4},"float"]
["AO-29","d1058",{"$nulls":4},"float"]
["AO-30","d1060",null,null,"heartbeat",null,"float"]
["AO-31","d1062"]
["AO-32","d1064",null,null,"MFC1 actual range",null,"float"]
["AO-33","d1066",null,null,"MFC2 actual range",null,"float"]
["AO-34","d1068",null,null,"MFC3 actual range",null,"float"]
["AO-35","d1070",null,null,"MFC4 actual range",null,"float"]
["AO-36","d1072",null,null,"MFC5 actual range",null,"float"]
["AO-37","d1074"]
["AO-38","d1076"]
["AO-39","d1078"]
["AO-40","d1080",null,null,"booster pressure control enable","1=enable,0=disable","float","booster only"]
["AO-41","d1082",null,"0-1000  mt ","booster pressure control setpoint",null,"float"]
["AO-42","d1084",null,null,"RF match coefficient",null,"float"]
["AO-43","d1086",null,null,"N2 pressure alarm setpoint(Min)"]
["AO-44","d1088",null,null,"N2 pressure alarm setpoint(Max)"]
["AO-45","d1090",null,null,"Water flow alarm setpoint(Min)"]
["AO-46","d1092",null,null,"Water flow alarm setpoint(Max)"]
["AO-47","d1094"]
["AO-48","d1096"]
["AO-49","d1098"]

{"sheet":"AI","index":3,"n_rows":51,"n_cols":8,"rows_kept":51,"cut":false,"hidden":false,"merged":[[21,7,23,7]]}
["Node No. ","ID","Range","Scale","Device Name","Logic note","date type"]
["AI-00","d2000",null,null,"Chamber real pressure fb ","unit:mtorr","float"]
["AI-01","d2002",{"$nulls":4},"float"]
["AI-02","d2004",null,null,"MFC1 real flow  fb",null,"float"]
["AI-03","d2006",null,null,"MFC2 real flow fb",null,"float"]
["AI-04","d2008",null,null,"MFC3 real flow fb",null,"float"]
["AI-05","d2010",null,null,"MFC4 real flow fb",null,"float"]
["AI-06","d2012",null,null,"MFC5 real flow fb",null,"float"]
["AI-07","d2014",{"$nulls":4},"float"]
["AI-08","d2016",null,null,"RF forward power fb",null,"float"]
["AI-09","d2018",null,null,"RF reflect power fb",null,"float"]
["AI-10","d2020"]
["AI-11","d2022",{"$nulls":4},"float"]
["AI-12","d2024",{"$nulls":4},"float"]
["AI-13","d2026",{"$nulls":4},"float"]
["AI-14","d2028",{"$nulls":4},"float"]
["AI-15","d2030",{"$nulls":4},"float"]
["AI-16","d2032",{"$nulls":4},"float"]
["AI-17","d2034",{"$nulls":4},"float"]
["AI-18","d2036",{"$nulls":4},"float"]
["AI-19","d2038",{"$nulls":4},"float"]
["AI-20","d2040",null,"0-100%","Thorttle valve real position fb",null,"float","Thorttle valve only"]
["AI-21","d2042",null,null,"Thorttle valve real pressure fb",null,"float"]
["AI-22","d2044",null,null,"thorttle valve state","1=normal;2=err ","float"]
["AI-23","d2046"]
["AI-24","d2048"]
["AI-25","d2050",null,null,"heartbeat fb",null,"float"]
["AI-26","d2052"]
["AI-27","d2054",null,null,"match c1 positon fb",null,"float"]
["AI-28","d2056",null,null,"match c2 positon fb",null,"float"]
["AI-29","d2058",null,null,"match work mode fb","0:manual,1=auto","float"]
["AI-30","d2060",null,null,"match hold or preset fb","0:hold,1=preset","float"]
["AI-31","d2062"]
["AI-32","d2064"]
["AI-33","d2066"]
["AI-34","d2068"]
["AI-35","d2070",null,"4-32L/M","Lever1 pump  water flow fb","unit:L/M","float"]
["AI-36","d2072",null,null,"Lever1 N2 pressure fb","mpa","float"]
["AI-37","d2074"]
["AI-38","d2076"]
["AI-39","d2078"]
["AI-40","d2080"]
["AI-41","d2082"]
["AI-42","d2084"]
["AI-43","d2086"]
["AI-44","d2088",null,"00~59","Second","秒"]
["AI-45","d2090",null,"00~59","Minute","分"]
["AI-46","d2092",null,"00~23","Time","时"]
["AI-47","d2094",null,"00~31","Day","日"]
["AI-48","d2096",null,"01~12","Month","月"]
["AI-49","d2098",null,"00~99","Year","年"]