using System; using System.Xml; using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.Event; using Aitex.Core.RT.IOCore; using Aitex.Core.RT.SCCore; using Aitex.Core.RT.Tolerance; using Aitex.Platform; namespace Aitex.Core.RT.Device.Unit { public class IoPressureControl : BaseDevice, IDevice { private bool _enableTolerance; public bool EnableTolerance { get { return _enableTolerance; } set { if (_enableTolerance != value) { EV.PostMessage(Module, EventEnum.GeneralInfo, value ? "Start monitor pressure stability" : "Stop monitor pressure stability"); if (value) { _tolerance.Reset(_scAlarmTime.Value); } } _enableTolerance = value; } } public bool IsIndependentControl { get { if (_scIsIndependentControl != null) return _scIsIndependentControl.Value; return false; } } public bool IsTvInstalled { get { if (_scTvInstalled != null) return _scTvInstalled.Value; return false; } } public bool IsBoostPumpInstalled { get { if (_scIsBoostPumpInstalled != null) return _scIsBoostPumpInstalled.Value; return false; } } public bool EnableBoostControl { get { return _diLogicProcessGasFlowing == null || _diLogicProcessGasFlowing.Value; } } private IoThrottleValve _tv; private IoPressureMeter _pressureMeter; private IoBoostPump _boost; private double _pressureSetPoint; private ToleranceChecker _tolerance = new ToleranceChecker(); private SCItem _scAlarmRange = null; private SCItem _scAlarmTime = null; private SCItem _scIsIndependentControl = null; private SCItem _scIsBoostPumpInstalled = null; private SCItem _scTvInstalled = null; private DIAccessor _diLogicProcessGasFlowing; public IoPressureControl(string module, XmlElement node) { base.Module = module; base.Name = node.GetAttribute("id"); base.Display = node.GetAttribute("display"); base.DeviceID = node.GetAttribute("schematicId"); _diLogicProcessGasFlowing = ParseDiNode("diLogicProcessGasFlowing", node); _scAlarmRange = ParseScNodeDouble("scGasFlowPressureAlarmRange", node); _scAlarmTime = ParseScNodeDouble("scGasFlowPressureAlarmTime", node); _scIsIndependentControl = ParseScNodeBool("scIsIndependentControl", node); _scIsBoostPumpInstalled = ParseScNodeBool("scIsBoostPumpInstalled", node); _scTvInstalled = ParseScNodeBool("scTvInstalled", node); _tv = ParseDeviceNode("tv", node); _pressureMeter = ParseDeviceNode("pressureMeter", node); _boost = ParseDeviceNode("boost", node); } public bool Initialize() { DEVICE.Register(String.Format("{0}.{1}", Name, AITPressureControlOperation.SetTVPressure), (out string reason, int time, object[] param) => { double target = Convert.ToDouble((string)param[0]); if (!IsTvInstalled) { reason = string.Format("Throttle valve not config"); return true; } if (_tv.PressureMode == PressureCtrlMode.TVPositionCtrl) { reason = "Throttle valve is in positon conrol mode, can not set pressure"; return false; } _tv.PressureSetpoint = (float)target; reason = string.Format("TV pressure set to {0} mtorr", target); return true; }); DEVICE.Register(String.Format("{0}.{1}", Name, AITPressureControlOperation.SetTVPosition), (out string reason, int time, object[] param) => { double target = Convert.ToDouble((string)param[0]); if (!IsTvInstalled) { reason = string.Format("Throttle valve not config"); return true; } if (_tv.PressureMode == PressureCtrlMode.TVPressureCtrl) { reason = "Throttle valve is in pressure conrol mode, can not set position"; return false; } _tv.PositionSetpoint = (float)target; reason = string.Format("TV position set to {0}", target); return true; }); DEVICE.Register(String.Format("{0}.{1}", Name, AITPressureControlOperation.SetTVMode), (out string reason, int time, object[] param) => { reason = string.Empty; if (!IsTvInstalled) { reason = string.Format("Throttle valve not config"); return true; } _tv.PressureMode = (PressureCtrlMode)Enum.Parse(typeof(PressureCtrlMode), (string)param[0], true); reason = string.Format("TV mode set to {0}", _tv.PressureMode); return true; }); DEVICE.Register(String.Format("{0}.{1}", Name, AITPressureControlOperation.SetBoostPressure), (out string reason, int time, object[] param) => { if (!IsBoostPumpInstalled) { reason = string.Format("boost pump not set up"); return false; } double setpoint = Convert.ToDouble((string)param[0]); if (!_boost.SetPressure(setpoint, out reason)) { return false; } _pressureSetPoint = setpoint; reason = string.Format("Boost pump pressure set to {0} mTorr", setpoint); return true; }); DEVICE.Register(String.Format("{0}.{1}", Name, AITPressureControlOperation.SetChamberPressure), (out string reason, int time, object[] param) => { double setpoint = Convert.ToDouble((string)param[0]); _pressureSetPoint = setpoint; reason = string.Format("Chamber pressure set to {0} mTorr", setpoint); return true; }); return true; } public void Terminate() { } public void Monitor() { CheckTolerance(); if (_boost != null && IsBoostPumpInstalled) { _boost.SetEnable((IsIndependentControl && EnableBoostControl) ? (int) BoostPumpEnable.Enable : (int) BoostPumpEnable.Disable); } } public void CheckTolerance() { if (!EnableTolerance) return; if (_tv!=null && IsTvInstalled && _tv.PressureMode == PressureCtrlMode.TVPositionCtrl) return; _tolerance.Monitor(_pressureMeter.Value, _pressureSetPoint - Math.Abs(_scAlarmRange.Value), _pressureSetPoint + Math.Abs(_scAlarmRange.Value), _scAlarmTime.Value); if (_tolerance.Trig) { EV.PostMessage(Module, EventEnum.ProcessPressureToleranceAlarm, Module, Display, String.Format("Out of range in {0} seconds", _scAlarmTime.Value.ToString("0"))); } } public void Reset() { _tolerance.Reset(_scAlarmTime.Value); } } }