ZZ-EFEM/Framework/output/MECF.Framework/SimulatorItems/SiasunAligner_IOSimulatorItems.json

{
    "IOSimulatorItemList": [
        {
            "SourceCommandName": "Align",
            "SourceCommand": "ALIGN",
            "SuccessResponse": "_RDY",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "Rotate",
            "SourceCommand": "ROTATE",
            "Argument": "25.2",
            "SuccessResponse": "_RDY",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "SevoOn",
            "SourceCommand": "SVON",
            "SuccessResponse": "_RDY",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "SevoOff",
            "SourceCommand": "SVOFF",
            "SuccessResponse": "_RDY",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "SetAlignAngle",
            "SourceCommand": "SWAA",
            "Argument": "60",
            "SuccessResponse": "_RDY",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "SetWaferSize",
            "SourceCommand": "SWS",
            "Argument": "200",
            "SuccessResponse": "_RDY",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "Home",
            "SourceCommand": "ALIGNER HOME/SCAN/ALGN",
            "SuccessResponse": "_RDY",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "RequestAlignAngle",
            "SourceCommand": "RWAA",
            "SuccessResponse": "RWAA 90.000",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "RequestWaferSize",
            "SourceCommand": "RWS",
            "SuccessResponse": "RWS 300",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "RequestBiasXY",
            "SourceCommand": "RBIASXY",
            "SuccessResponse": "RBIASXY 6.018 1.285",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "RequestBiasRT",
            "SourceCommand": "RBIASRT",
            "SuccessResponse": "RBIASRT 1.285,0.105",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "RequestNotchAngle",
            "SourceCommand": "RNOTCH",
            "SuccessResponse": "RNOTCH 90.105",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "RequestErrorCode",
            "SourceCommand": "REER",
            "SuccessResponse": "_ERR 15",
            "FailedResponse": "_ERR 15"
        },
        {
            "SourceCommandName": "Hello",
            "SourceCommand": "HLLO",
            "SuccessResponse": "Hello AG",
            "FailedResponse": ""
        },
        {
            "SourceCommandName": "RequestWaferOnOff",
            "SourceCommand": "RWK",
            "SuccessResponse": "RWK 0",
            "FailedResponse": "_ERR 9"
        },
        {
            "SourceCommandName": "RequestReady",
            "SourceCommand": "RAR",
            "SuccessResponse": "RAR 1",
            "FailedResponse": "_ERR 9"
        }

    ]
}