ZZ-EFEM/Framework/Common/SubstrateTrackings/PositionedWafer.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace MECF.Framework.Common.SubstrateTrackings
{
    public class PositionedWafer
    {
        public string Module { get; set; }
        public int Slot { get; set; }
    }
}