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- using System;
- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- using System.Threading;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
- using Aitex.Core.RT.Log;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Flipper.FlipperBase;
- using Aitex.Sorter.RT.SorterCommonFrame.Modules;
- namespace Aitex.Sorter.RT.SorterCommonFrame.Routines
- {
- public class SwapRoutine : CommonRoutineSorter, IRoutine
- {
- enum Swap
- {
- ReleaseAligner,
- WaitAlignerReady,
- TurnTo180,
- WaitTurnTo180,
- QueryState,
- CheckBeforeSwap,
- SwapWafer,
- WaitSwap,
- SwapPickExtend,
- WaitPickExtend,
- SwapUnGripTurnOver,
- WaitUnGripTurnOver,
- SwapPickRetract,
- WaitPickRetract,
- CheckAfterPick,
- SwapTurnBack,
- WaitTurnBack,
- SwapPlaceExtend,
- WaitPlaceExtend,
- SwapGrip,
- WaitGrip,
- SwapPlaceRetract,
- WaitPlaceRetract,
- TurnOver,
- WaitTurnOver,
- CheckAfterSwap,
- UpdateWaferOnPickBlade,
- UpdateWaferOnChamber,
- RaiseAligner,
- CheckWaferOnTurnOver,
- PickWafer,
- AlignerPrepareAccept,
- WaitAlignerReadyAfterPick,
- PlaceWafer,
- }
- private bool _isNeedToRaiseAligner = false;
- public SwapRoutine(string module, string name)
- {
- Module = module;
- Name = name;
- }
- public bool Initalize()
- {
- Reset();
- IsRoutineActive = false;
- // SC.GetConfigItem($"Robot.{ Robot.RobotModuleName}.TimeLimitForExchangeWafer");
- return true;
- }
- public ModuleName Source { get; set; }
- public ModuleName RobotModulename { get; set; } = ModuleName.Robot;
- public int Slot { get; set; }
- public Hand PlaceBlade { get; set; }
- public Hand PickBlade => GetPickBlade(PlaceBlade);
- public Result Start(params object[] objs)
- {
- Name = "Swap";
- Robot = DEVICE.GetDevice<RobotBaseDevice>(RobotModulename.ToString());
- Reset();
- if (!Robot.Blade2Enable && !Robot.Blade1Enable)
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, not all blade is enable");
- return Result.FAIL;
- }
-
- FixedTurnOverPosition = SC.ContainsItem("Process.FixedTurnOverPosition") ? SC.GetValue<bool>("Process.FixedTurnOverPosition") : true;
- IsRoutineActive = true;
- if(WaferManager.Instance.CheckHasWafer(RobotModulename,(int)PickBlade))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"Robot:{RobotModulename} detect wafer on pick blade:{PickBlade}.");
- return Result.FAIL;
- }
- if (WaferManager.Instance.CheckNoWafer(RobotModulename, (int)PlaceBlade))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"Robot:{RobotModulename} detect no wafer on place blade:{PlaceBlade}.");
- return Result.FAIL;
- }
- if (ModuleHelper.IsAligner(Source) && !DEVICE.GetDevice<AlignerBaseDevice>(Source.ToString()).IsReady())
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), "Aligner is not ready.");
- return Result.FAIL;
- }
- if(ModuleHelper.IsTurnOverStation(Source) && !_ioTurnOver.IsReady)
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), "Turn Over is not ready.");
- return Result.FAIL;
- }
-
- if (ModuleHelper.IsTurnOverStation(Source))
- {
- _isTurnOverOn0deg = _ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide;
- }
- if (ModuleHelper.IsAligner(Source))
- {
- _isNeedToRaiseAligner = Aligner.IsNeedRelease;
- _isNeedPrepareAccept = Aligner.IsNeedPrepareBeforePlaceWafer();
- }
- if (ModuleHelper.IsLoadPort(Source))
- {
- var lp = DEVICE.GetDevice<LoadPortBaseDevice>(Source.ToString());
- if (lp.IsForbidAccessSlotAboveWafer() && Slot > 0 && WaferManager.Instance.CheckHasWafer(Source, Slot - 1))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), "Access dennied to the slot above wafer.");
- return Result.FAIL;
- }
- string reason;
- if (!lp.IsEnableTransferWafer(out reason))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"{Source} is not ready to transfer wafer:{reason}.");
- return Result.FAIL;
- }
- }
- if (!ModuleHelper.IsTurnOverStation(Source) && Source != ModuleName.Aligner)
- {
- if (!RobotOffsetConfig.Instance.GetPickOffset(Source, ref _offsetX, ref _offsetY, ref _offsetZ,
- out string reason))
- {
- EV.PostWarningLog(ModuleName.System.ToString(), $"Can not {Name}, {reason}");
- return Result.FAIL;
- }
- }
- else
- {
- _offsetX = 0;
- _offsetY = 0;
- _offsetY = 0;
- }
- EV.PostInfoLog("System", $"Start swapping wafer from station:{Source} slot:{Slot + 1} with blade {PickBlade}");
- return Monitor();
- }
- private bool _isTurnOverOn0deg;
- private bool _isNeedPrepareAccept;
- public Result Monitor()
- {
- if (!IsRoutineActive)
- return Result.DONE;
- var ret = MonitorRoutine();
- if(ret == Result.FAIL)
- {
- IsRoutineActive = false;
- }
- if (ret == Result.DONE)
- {
- IsRoutineActive = false;
- }
- return ret;
- }
- private Result MonitorRoutine()
- {
- try
- {
- if (ModuleHelper.IsAligner(Source))
- {
- if (_isNeedToRaiseAligner)
- {
- RtReleaseAligner((int)Swap.ReleaseAligner, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitAlignerMotion((int)Swap.WaitAlignerReady, Aligner, "Wait Aligner Ready", Aligner.TimeLimitAlignWafer, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- if(_isNeedPrepareAccept)
- {
- RtPickWaferForSwap((int)Swap.PickWafer,"Pick wafer for swap",Source,Slot,PickBlade, Robot.RobotCommandTimeout,_offsetX,_offsetY,_offsetZ, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- AlignerPostActionAfterPick((int)Swap.AlignerPrepareAccept, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtWaitAlignerMotion((int)Swap.WaitAlignerReadyAfterPick, Aligner, "Wait Aligner Ready", Aligner.TimeLimitAlignWafer, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtPlaceWafer((int)Swap.PlaceWafer,"Place wafer for swap",Source,Slot,PlaceBlade, Robot.RobotCommandTimeout, _offsetX, _offsetY, _offsetZ, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- else
- {
- RtSwapWafer((int)Swap.SwapWafer, "Swap wafer", Source, Slot, PickBlade, Robot.RobotCommandTimeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- }
- if (ModuleHelper.IsLoadPort(Source) || ModuleHelper.IsBuffer(Source))
- {
- RtSwapWafer((int)Swap.SwapWafer, "Swap wafer", Source, Slot, PickBlade, Robot.RobotCommandTimeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
-
- if (ModuleHelper.IsTurnOverStation(Source))
- {
- if (FixedTurnOverPosition)
- {
- if (_isTurnOverOn0deg)
- {
- RtTurnOverTurn((int)Swap.TurnTo180, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverTurnTo180((int)Swap.WaitTurnTo180, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- RtRobotArmGoReadyForPickFromTurnOver((int)Swap.SwapPickExtend, Source, Slot, PickBlade, Robot.RobotCommandTimeout,
- Notify, Stop, GetWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverUnGripWafer((int)Swap.SwapUnGripTurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverMotion((int)Swap.WaitUnGripTurnOver, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtPickWaferFromTurnOver((int)Swap.SwapPickRetract, Source, Slot, PickBlade,Robot.RobotCommandTimeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverTurnBack((int)Swap.SwapTurnBack, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverMotion((int)Swap.WaitTurnBack, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtDeliverWaferToGrip((int)Swap.SwapPlaceExtend, Source, Slot, PlaceBlade, Robot.RobotCommandTimeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverGripWafer((int)Swap.SwapGrip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverMotion((int)Swap.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtRetractRobotArmForTurning((int)Swap.SwapPlaceRetract, Source, Slot, PlaceBlade, Robot.RobotCommandTimeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtCheckWaferOnTurn((int)Swap.CheckWaferOnTurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverTurn((int)Swap.TurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- else
- {
- if (_isTurnOverOn0deg)
- {
- RtRobotArmGoReadyForPickFromTurnOver((int)Swap.SwapPickExtend, Source, Slot, PickBlade, Robot.RobotCommandTimeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverUnGripWafer((int)Swap.SwapUnGripTurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverMotion((int)Swap.WaitUnGripTurnOver, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtPickWaferFromTurnOver((int)Swap.SwapPickRetract, Source, Slot, PickBlade, Robot.RobotCommandTimeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtDeliverWaferToGrip((int)Swap.SwapPlaceExtend, Source, Slot, PlaceBlade, Robot.RobotCommandTimeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverGripWafer((int)Swap.SwapGrip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverMotion((int)Swap.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtRetractRobotArmForTurning((int)Swap.SwapPlaceRetract, Source, Slot, PlaceBlade, Robot.RobotCommandTimeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtCheckWaferOnTurn((int)Swap.CheckWaferOnTurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverTurn((int)Swap.TurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- else
- {
- RtRobotArmGoReadyForPickFromTurnOver((int)Swap.SwapPickExtend, Source, Slot, PickBlade, Robot.RobotCommandTimeout, Notify, Stop,
- GetWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverUnGripWafer((int)Swap.SwapUnGripTurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverMotion((int)Swap.WaitUnGripTurnOver, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtPickWaferFromTurnOver((int)Swap.SwapPickRetract, Source, Slot, PickBlade, Robot.RobotCommandTimeout, Notify, Stop,
- GetWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtDeliverWaferToGrip((int)Swap.SwapPlaceExtend, Source, Slot, PlaceBlade, Robot.RobotCommandTimeout, Notify, Stop,
- PutWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverGripWafer((int)Swap.SwapGrip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverMotion((int)Swap.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtRetractRobotArmForTurning((int)Swap.SwapPlaceRetract, Source, Slot, PlaceBlade, Robot.RobotCommandTimeout, Notify, Stop,
- PutWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtCheckWaferOnTurn((int)Swap.CheckWaferOnTurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverTurnBack((int)Swap.TurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- }
- }
- RtUpdateWaferSingleStepProcessState((int)Swap.UpdateWaferOnPickBlade, "Update process state on robot", RobotModulename, 0, PickBlade,
- EnumWaferProcessStatus.Idle, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtUpdateWaferSingleStepProcessState((int)Swap.UpdateWaferOnChamber, "Update process state on chamber", Source, Slot, PickBlade,
- EnumWaferProcessStatus.Wait, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- EV.PostInfoLog("System", $"Complete swapping wafer from station:{Source} slot:{Slot + 1} with blade {PickBlade}.");
- //EV.PostMessage(ModuleName.System.ToString(), EventEnum.GeneralInfo, string.Format("Swap wafer {0}{1:D2} place blade {2}", Source.ToString(), Slot+1, PlaceBlade.ToString()));
- IsRoutineActive = false;
- return Result.DONE;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- EV.PostAlarmLog("System", $"Failed to swap wafer from station:{Source} slot:{Slot + 1} with blade {PickBlade}.");
- IsRoutineActive = false;
- return Result.FAIL;
- }
- }
- protected override void Notify(string message)
- {
- EV.PostMessage(Module, EventEnum.GeneralInfo, String.Format("Swap wafer:{0}", message));
- }
- /// <summary>
- /// prepare process failed
- /// </summary>
- /// <param name="failReason"></param>
- /// <param name="reactor"></param>
- protected override void Stop(string failReason)
- {
- string reason = String.Empty;
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.GeneralInfo, string.Format("Swap wafer {0}{1:D2} with arm {2} failed, {3}", Source.ToString(), Slot+1, PlaceBlade.ToString(), failReason));
- }
-
- private Hand GetPickBlade(Hand placeBlade)
- {
- return PlaceBlade == Hand.Blade1 ? Hand.Blade2 : Hand.Blade1;
- }
-
- }
- }
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