PlaceRoutine.cs 27 KB

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  1. using System;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
  12. using Aitex.Sorter.RT.SorterCommonFrame.Modules;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
  14. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
  15. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
  16. using System.Threading;
  17. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
  18. using Aitex.Core.RT.Log;
  19. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Flipper.FlipperBase;
  20. namespace Aitex.Sorter.RT.SorterCommonFrame.Routines
  21. {
  22. public class PlaceRoutine : CommonRoutineSorter, IRoutine
  23. {
  24. enum Place
  25. {
  26. QueryState,
  27. TurnReady,
  28. WaitTurnReady,
  29. CheckBeforePlace,
  30. WaitTurnOver,
  31. UnGrip,
  32. WaitUnGrip,
  33. PlaceWafer,
  34. WaitPlace,
  35. Grip,
  36. WaitGrip,
  37. CheckAfterPlace,
  38. RetractRobot,
  39. WaitRetractRobot,
  40. TurnOver,
  41. Finish,
  42. RaiseAligner,
  43. SetAlignerWaferSize,
  44. CheckWaferOnTurnOver,
  45. }
  46. public PlaceRoutine(string module, string name)
  47. {
  48. Module = module;
  49. Name = name;
  50. }
  51. public bool Initalize()
  52. {
  53. Reset();
  54. IsRoutineActive = false;
  55. return true;
  56. }
  57. public ModuleName Station { get; set; }
  58. public ModuleName RobotModulename { get; set; } = ModuleName.Robot;
  59. public int Slot { get; set; }
  60. public Hand Blade { get; set; }
  61. private bool _isTurnOverGripped;
  62. private bool _isTurnOverOn0deg;
  63. private bool _isNeedAlignerPrepare = false;
  64. private bool _isNeedToCheckAlginerWaferSize = false;
  65. private WaferSize _currentWaferSize;
  66. public Result Start(params object[] objs)
  67. {
  68. Reset();
  69. if(WaferManager.Instance.CheckHasWafer(Station, Slot))
  70. {
  71. EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, destination:{Station} detect wafer.");
  72. return Result.FAIL;
  73. }
  74. if (Station == ModuleName.TurnOverStation && _ioTurnOver.IsPlacement)
  75. {
  76. EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not execute {Name}, destination:{Station} detect wafer.");
  77. return Result.FAIL;
  78. }
  79. Robot = DEVICE.GetDevice<RobotBaseDevice>(RobotModulename.ToString());
  80. FixedTurnOverPosition = SC.ContainsItem("Process.FixedTurnOverPosition") ? SC.GetValue<bool>("Process.FixedTurnOverPosition") : true;
  81. if (Blade == Hand.Blade1 && !Robot.Blade1Enable)
  82. {
  83. EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, {Blade} is not enable");
  84. return Result.FAIL;
  85. }
  86. if (Blade == Hand.Blade2 && !Robot.Blade2Enable)
  87. {
  88. EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, {Blade} is not enable");
  89. return Result.FAIL;
  90. }
  91. if (!RobotOffsetConfig.Instance.GetPlaceOffset(Station, ref _offsetX, ref _offsetY, ref _offsetZ,
  92. out string reason))
  93. {
  94. EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, {reason}");
  95. return Result.FAIL;
  96. }
  97. if (ModuleHelper.IsTurnOverStation(Station))
  98. {
  99. _isTurnOverGripped = _ioTurnOver.CurrentGripperPositon == GripPosEnum.Close;
  100. _isTurnOverOn0deg = _ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide;
  101. if(_ioTurnOver.IsPlacement)
  102. {
  103. EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, Wafer on flipper.");
  104. return Result.FAIL;
  105. }
  106. }
  107. if (ModuleHelper.IsAligner(Station))
  108. {
  109. if (!DEVICE.GetDevice<AlignerBaseDevice>(Station.ToString()).IsReady())
  110. {
  111. EV.PostAlarmLog(Station.ToString(), $"{Station} is not ready.");
  112. return Result.FAIL;
  113. }
  114. if(DEVICE.GetDevice<AlignerBaseDevice>(Station.ToString()).IsWaferPresent(0))
  115. {
  116. EV.PostAlarmLog(Station.ToString(), $"{Station} wafer present.");
  117. return Result.FAIL;
  118. }
  119. _isNeedAlignerPrepare = Aligner.IsNeedPrepareBeforePlaceWafer();
  120. if (Blade == Hand.Both)
  121. {
  122. _currentWaferSize = WaferManager.Instance.GetWaferSize(Robot.RobotModuleName, 0);
  123. _isNeedToCheckAlginerWaferSize = Aligner.IsNeedChangeWaferSize(_currentWaferSize);
  124. }
  125. else
  126. {
  127. _currentWaferSize = WaferManager.Instance.GetWaferSize(Robot.RobotModuleName, (int)Blade);
  128. _isNeedToCheckAlginerWaferSize = Aligner.IsNeedChangeWaferSize(_currentWaferSize);
  129. }
  130. }
  131. if (ModuleHelper.IsLoadPort(Station))
  132. {
  133. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(Station.ToString());
  134. if (lp.IsForbidAccessSlotAboveWafer() && Slot > 0 && WaferManager.Instance.CheckHasWafer(Station, Slot - 1))
  135. {
  136. EV.PostAlarmLog(ModuleName.System.ToString(), "Access dennied to the slot above wafer.");
  137. return Result.FAIL;
  138. }
  139. if (!lp.IsEnableTransferWafer(out reason))
  140. {
  141. EV.PostAlarmLog(ModuleName.System.ToString(), $"{Station} is not ready to transfer wafer:{reason}.");
  142. return Result.FAIL;
  143. }
  144. }
  145. EV.PostInfoLog("System", $"Start placing wafer to station:{Station} slot:{Slot + 1} with blade {Blade}");
  146. IsRoutineActive = true;
  147. return Monitor();
  148. }
  149. public Result Monitor()
  150. {
  151. if (!IsRoutineActive)
  152. return Result.DONE;
  153. var ret = MonitorRoutine();
  154. if (ret == Result.FAIL)
  155. {
  156. IsRoutineActive = false;
  157. }
  158. if (ret == Result.DONE)
  159. {
  160. IsRoutineActive = false;
  161. }
  162. return ret;
  163. }
  164. private Result MonitorRoutine()
  165. {
  166. try
  167. {
  168. if (!ModuleHelper.IsTurnOverStation(Station))
  169. {
  170. if (ModuleHelper.IsAligner(Station) && _isNeedToCheckAlginerWaferSize)
  171. {
  172. RtAlignerSetWaferSize((int)Place.SetAlignerWaferSize, _currentWaferSize, Aligner.TimeLimitAlignWafer, Notify, Stop);
  173. if (ExecuteResult.Item1)
  174. {
  175. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  176. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  177. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  178. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  179. }
  180. }
  181. if (ModuleHelper.IsAligner(Station) && _isNeedAlignerPrepare)
  182. {
  183. RtAlignerPrepareAccept((int)Place.RaiseAligner, Aligner.TimeLimitAlignWafer, Notify, Stop);
  184. if (ExecuteResult.Item1)
  185. {
  186. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  187. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  188. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  189. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  190. }
  191. }
  192. RtPlaceWafer((int)Place.PlaceWafer, "Place wafer", Station, Slot, Blade, Robot.RobotCommandTimeout, _offsetX, _offsetY, _offsetZ, Notify, Stop);
  193. if (ExecuteResult.Item1)
  194. {
  195. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  196. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  197. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  198. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  199. }
  200. }
  201. else
  202. {
  203. if (_isTurnOverGripped)
  204. {
  205. //RtTurnOverUnGripWafer((int)Place.UnGrip, Notify, Stop);
  206. //if (ExecuteResult.Item1)
  207. //{
  208. // if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  209. // if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  210. // if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  211. // if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  212. //}
  213. //RtWaitTurnOverUnGrip((int)Place.WaitUnGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  214. //if (ExecuteResult.Item1)
  215. //{
  216. // if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  217. // if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  218. // if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  219. // if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  220. //}
  221. }
  222. if (FixedTurnOverPosition)
  223. {
  224. if (!_isTurnOverOn0deg)
  225. {
  226. RtTurnOverTurnBack((int)Place.TurnReady, Notify, Stop);
  227. if (ExecuteResult.Item1)
  228. {
  229. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  230. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  231. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  232. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  233. }
  234. RtWaitTurnOverTurnTo0((int)Place.WaitTurnReady, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  235. if (ExecuteResult.Item1)
  236. {
  237. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  238. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  239. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  240. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  241. }
  242. }
  243. RtTurnOverUnGripWafer((int)Place.UnGrip, Notify, Stop);
  244. if (ExecuteResult.Item1)
  245. {
  246. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  247. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  248. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  249. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  250. }
  251. RtWaitTurnOverUnGrip((int)Place.WaitUnGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  252. if (ExecuteResult.Item1)
  253. {
  254. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  255. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  256. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  257. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  258. }
  259. RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, Robot.RobotCommandTimeout, Notify, Stop);
  260. if (ExecuteResult.Item1)
  261. {
  262. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  263. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  264. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  265. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  266. }
  267. RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
  268. if (ExecuteResult.Item1)
  269. {
  270. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  271. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  272. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  273. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  274. }
  275. RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  276. if (ExecuteResult.Item1)
  277. {
  278. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  279. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  280. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  281. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  282. }
  283. RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, Robot.RobotCommandTimeout, Notify, Stop);
  284. if (ExecuteResult.Item1)
  285. {
  286. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  287. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  288. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  289. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  290. }
  291. RtCheckWaferOnTurn((int)Place.CheckWaferOnTurnOver, Notify, Stop);
  292. if (ExecuteResult.Item1)
  293. {
  294. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  295. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  296. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  297. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  298. }
  299. RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
  300. if (ExecuteResult.Item1)
  301. {
  302. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  303. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  304. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  305. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  306. }
  307. }
  308. else
  309. {
  310. RtTurnOverUnGripWafer((int)Place.UnGrip, Notify, Stop);
  311. if (ExecuteResult.Item1)
  312. {
  313. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  314. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  315. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  316. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  317. }
  318. RtWaitTurnOverUnGrip((int)Place.WaitUnGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  319. if (ExecuteResult.Item1)
  320. {
  321. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  322. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  323. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  324. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  325. }
  326. if (_isTurnOverOn0deg)
  327. {
  328. RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, Robot.RobotCommandTimeout, Notify, Stop);
  329. if (ExecuteResult.Item1)
  330. {
  331. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  332. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  333. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  334. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  335. }
  336. RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
  337. if (ExecuteResult.Item1)
  338. {
  339. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  340. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  341. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  342. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  343. }
  344. RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  345. if (ExecuteResult.Item1)
  346. {
  347. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  348. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  349. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  350. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  351. }
  352. RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, Robot.RobotCommandTimeout, Notify, Stop);
  353. if (ExecuteResult.Item1)
  354. {
  355. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  356. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  357. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  358. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  359. }
  360. RtCheckWaferOnTurn((int)Place.CheckWaferOnTurnOver, Notify, Stop);
  361. if (ExecuteResult.Item1)
  362. {
  363. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  364. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  365. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  366. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  367. }
  368. if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide)
  369. {
  370. RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
  371. if (ExecuteResult.Item1)
  372. {
  373. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  374. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  375. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  376. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  377. }
  378. }
  379. if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.BackSide)
  380. {
  381. RtTurnOverTurnBack((int)Place.TurnOver, Notify, Stop);
  382. if (ExecuteResult.Item1)
  383. {
  384. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  385. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  386. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  387. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  388. }
  389. }
  390. }
  391. else
  392. {
  393. RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, Robot.RobotCommandTimeout, Notify, Stop, PutWaferOffsetForTurnOverOn180());
  394. if (ExecuteResult.Item1)
  395. {
  396. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  397. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  398. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  399. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  400. }
  401. RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
  402. if (ExecuteResult.Item1)
  403. {
  404. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  405. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  406. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  407. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  408. }
  409. RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  410. if (ExecuteResult.Item1)
  411. {
  412. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  413. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  414. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  415. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  416. }
  417. RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, Robot.RobotCommandTimeout, Notify, Stop, PutWaferOffsetForTurnOverOn180());
  418. if (ExecuteResult.Item1)
  419. {
  420. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  421. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  422. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  423. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  424. }
  425. RtCheckWaferOnTurn((int)Place.CheckWaferOnTurnOver, Notify, Stop);
  426. if (ExecuteResult.Item1)
  427. {
  428. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  429. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  430. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  431. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  432. }
  433. if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide)
  434. {
  435. RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
  436. if (ExecuteResult.Item1)
  437. {
  438. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  439. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  440. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  441. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  442. }
  443. }
  444. if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.BackSide)
  445. {
  446. RtTurnOverTurnBack((int)Place.TurnOver, Notify, Stop);
  447. if (ExecuteResult.Item1)
  448. {
  449. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  450. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  451. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  452. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  453. }
  454. }
  455. }
  456. }
  457. }
  458. RtUpdateWaferSingleStepProcessState((int)Place.Finish, "Update step process state", Station, Slot, Blade,
  459. EnumWaferProcessStatus.Wait, Notify, Stop);
  460. if (ExecuteResult.Item1)
  461. {
  462. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  463. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  464. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  465. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  466. }
  467. EV.PostInfoLog("System", $"Complete placing wafer to station:{Station} slot:{Slot + 1} with blade {Blade}.");
  468. IsRoutineActive = false;
  469. return Result.DONE;
  470. }
  471. catch (Exception ex)
  472. {
  473. LOG.Write(ex);
  474. EV.PostAlarmLog("System", $"Failed to place wafer to station:{Station} slot:{Slot + 1} with blade {Blade}.");
  475. IsRoutineActive = false;
  476. return Result.FAIL;
  477. }
  478. }
  479. /// <summary>
  480. /// prepare process failed
  481. /// </summary>
  482. /// <param name="failReason"></param>
  483. /// <param name="reactor"></param>
  484. }
  485. }