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- using System;
- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using Aitex.Sorter.RT.SorterCommonFrame.Modules;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- using System.Threading;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
- using Aitex.Core.RT.Log;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Flipper.FlipperBase;
- namespace Aitex.Sorter.RT.SorterCommonFrame.Routines
- {
- public class EfemPlaceRoutine : CommonRoutineSorter, IRoutine
- {
- enum Place
- {
- QueryState,
- TurnReady,
- WaitTurnReady,
- CheckBeforePlace,
- WaitTurnOver,
- UnGrip,
- WaitUnGrip,
- PlaceWafer,
- WaitPlace,
- Grip,
- WaitGrip,
- CheckAfterPlace,
- RetractRobot,
- WaitRetractRobot,
- TurnOver,
- Finish,
- RaiseAligner,
- SetAlignerWaferSize,
- CheckWaferOnTurnOver,
- }
- private int _timeout = 0;
- public EfemPlaceRoutine(string module, string name)
- {
- Module = module;
- Name = name;
-
- }
- public bool Initalize()
- {
- Reset();
- IsRoutineActive = false;
- return true;
- }
- public ModuleName Station { get; set; }
- public ModuleName RobotModulename { get; set; } = ModuleName.Robot;
- public int Slot { get; set; }
- public Hand Blade { get; set; }
- private bool _isTurnOverGripped;
- private bool _isTurnOverOn0deg;
- private bool _isNeedAlignerPrepare = false;
- private bool _isNeedToCheckAlginerWaferSize = false;
- private WaferSize _currentWaferSize;
- public Result Start(params object[] objs)
- {
- Reset();
- if(WaferManager.Instance.CheckHasWafer(Station, Slot))
- {
- EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, destination:{Station} detect wafer.");
- return Result.FAIL;
- }
- if (Station == ModuleName.TurnOverStation && _ioTurnOver.IsPlacement)
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not execute {Name}, destination:{Station} detect wafer.");
- return Result.FAIL;
- }
- Robot = DEVICE.GetDevice<RobotBaseDevice>(RobotModulename.ToString());
- FixedTurnOverPosition = SC.ContainsItem("Process.FixedTurnOverPosition") ? SC.GetValue<bool>("Process.FixedTurnOverPosition") : true;
- _timeout = Robot.RobotCommandTimeout;
- if (!RobotOffsetConfig.Instance.GetPlaceOffset(Station, ref _offsetX, ref _offsetY, ref _offsetZ,
- out string reason))
- {
- EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, {reason}");
- return Result.FAIL;
- }
-
- if (ModuleHelper.IsTurnOverStation(Station))
- {
- _isTurnOverGripped = _ioTurnOver.CurrentGripperPositon == GripPosEnum.Close;
- _isTurnOverOn0deg = _ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide;
- if(_ioTurnOver.IsPlacement)
- {
- EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, Wafer on flipper.");
- return Result.FAIL;
- }
- }
- if (ModuleHelper.IsAligner(Station))
- {
- if (!DEVICE.GetDevice<AlignerBaseDevice>(Station.ToString()).IsReady())
- {
- EV.PostAlarmLog(Station.ToString(), $"{Station} is not ready.");
- return Result.FAIL;
- }
- if(DEVICE.GetDevice<AlignerBaseDevice>(Station.ToString()).IsWaferPresent(0))
- {
- EV.PostAlarmLog(Station.ToString(), $"{Station} wafer present.");
- return Result.FAIL;
- }
-
- _isNeedAlignerPrepare = Aligner.IsNeedPrepareBeforePlaceWafer();
- if (Blade == Hand.Both)
- {
- _currentWaferSize = WaferManager.Instance.GetWaferSize(Robot.RobotModuleName, 0);
- _isNeedToCheckAlginerWaferSize = Aligner.IsNeedChangeWaferSize(_currentWaferSize);
- }
- else
- {
- _currentWaferSize = WaferManager.Instance.GetWaferSize(Robot.RobotModuleName, (int)Blade);
- _isNeedToCheckAlginerWaferSize = Aligner.IsNeedChangeWaferSize(_currentWaferSize);
- }
- }
- if (ModuleHelper.IsLoadPort(Station))
- {
- var lp = DEVICE.GetDevice<LoadPortBaseDevice>(Station.ToString());
- if (lp.IsForbidAccessSlotAboveWafer() && Slot > 0 && WaferManager.Instance.CheckHasWafer(Station, Slot - 1))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), "Access dennied to the slot above wafer.");
- return Result.FAIL;
- }
- if (!lp.IsEnableTransferWafer(out reason))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"{Station} is not ready to transfer wafer:{reason}.");
- return Result.FAIL;
- }
- }
- EV.PostInfoLog("System", $"Start placing wafer to station:{Station} slot:{Slot + 1} with blade {Blade}");
- IsRoutineActive = true;
- return Monitor();
- }
-
- public Result Monitor()
- {
- if (!IsRoutineActive)
- return Result.DONE;
- var ret = MonitorRoutine();
- if (ret == Result.FAIL)
- {
- Initalize();
- IsRoutineActive = false;
- }
- if (ret == Result.DONE)
- {
- IsRoutineActive = false;
- }
- return ret;
- }
- private Result MonitorRoutine()
- {
- try
- {
- if (!ModuleHelper.IsTurnOverStation(Station))
- {
- if (ModuleHelper.IsAligner(Station) && _isNeedToCheckAlginerWaferSize)
- {
- RtAlignerSetWaferSize((int)Place.SetAlignerWaferSize, _currentWaferSize, _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- if (ModuleHelper.IsAligner(Station) && _isNeedAlignerPrepare)
- {
- RtAlignerPrepareAccept((int)Place.RaiseAligner, _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- RtPlaceWafer((int)Place.PlaceWafer, "Place wafer", Station, Slot, Blade, _timeout, _offsetX, _offsetY, _offsetZ, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- else
- {
- if (_isTurnOverGripped)
- {
- RtTurnOverUnGripWafer((int)Place.UnGrip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverUnGrip((int)Place.WaitUnGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- if (FixedTurnOverPosition)
- {
- if (!_isTurnOverOn0deg)
- {
- RtTurnOverTurnBack((int)Place.TurnReady, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverTurnTo0((int)Place.WaitTurnReady, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- else
- {
- if (_isTurnOverOn0deg)
- {
- RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtCheckWaferOnTurn((int)Place.CheckWaferOnTurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide)
- {
- RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.BackSide)
- {
- RtTurnOverTurnBack((int)Place.TurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- }
- else
- {
- RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, _timeout, Notify, Stop, PutWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, _timeout, Notify, Stop, PutWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- RtCheckWaferOnTurn((int)Place.CheckWaferOnTurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide)
- {
- RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.BackSide)
- {
- RtTurnOverTurnBack((int)Place.TurnOver, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- }
- }
- }
- }
- RtUpdateWaferSingleStepProcessState((int)Place.Finish, "Update step process state", Station, Slot, Blade,
- EnumWaferProcessStatus.Wait, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
- EV.PostInfoLog("System", $"Complete placing wafer to station:{Station} slot:{Slot + 1} with blade {Blade}.");
- IsRoutineActive = false;
- return Result.DONE;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- EV.PostAlarmLog("System", $"Failed to place wafer to station:{Station} slot:{Slot + 1} with blade {Blade}.");
- IsRoutineActive = false;
- return Result.FAIL;
- }
- }
-
- /// <summary>
- /// prepare process failed
- /// </summary>
- /// <param name="failReason"></param>
- /// <param name="reactor"></param>
-
- }
- }
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