EfemPlaceRoutine.cs 24 KB

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  1. using System;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
  12. using Aitex.Sorter.RT.SorterCommonFrame.Modules;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
  14. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
  15. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
  16. using System.Threading;
  17. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
  18. using Aitex.Core.RT.Log;
  19. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Flipper.FlipperBase;
  20. namespace Aitex.Sorter.RT.SorterCommonFrame.Routines
  21. {
  22. public class EfemPlaceRoutine : CommonRoutineSorter, IRoutine
  23. {
  24. enum Place
  25. {
  26. QueryState,
  27. TurnReady,
  28. WaitTurnReady,
  29. CheckBeforePlace,
  30. WaitTurnOver,
  31. UnGrip,
  32. WaitUnGrip,
  33. PlaceWafer,
  34. WaitPlace,
  35. Grip,
  36. WaitGrip,
  37. CheckAfterPlace,
  38. RetractRobot,
  39. WaitRetractRobot,
  40. TurnOver,
  41. Finish,
  42. RaiseAligner,
  43. SetAlignerWaferSize,
  44. CheckWaferOnTurnOver,
  45. }
  46. private int _timeout = 0;
  47. public EfemPlaceRoutine(string module, string name)
  48. {
  49. Module = module;
  50. Name = name;
  51. }
  52. public bool Initalize()
  53. {
  54. Reset();
  55. IsRoutineActive = false;
  56. return true;
  57. }
  58. public ModuleName Station { get; set; }
  59. public ModuleName RobotModulename { get; set; } = ModuleName.Robot;
  60. public int Slot { get; set; }
  61. public Hand Blade { get; set; }
  62. private bool _isTurnOverGripped;
  63. private bool _isTurnOverOn0deg;
  64. private bool _isNeedAlignerPrepare = false;
  65. private bool _isNeedToCheckAlginerWaferSize = false;
  66. private WaferSize _currentWaferSize;
  67. public Result Start(params object[] objs)
  68. {
  69. Reset();
  70. if(WaferManager.Instance.CheckHasWafer(Station, Slot))
  71. {
  72. EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, destination:{Station} detect wafer.");
  73. return Result.FAIL;
  74. }
  75. if (Station == ModuleName.TurnOverStation && _ioTurnOver.IsPlacement)
  76. {
  77. EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not execute {Name}, destination:{Station} detect wafer.");
  78. return Result.FAIL;
  79. }
  80. Robot = DEVICE.GetDevice<RobotBaseDevice>(RobotModulename.ToString());
  81. FixedTurnOverPosition = SC.ContainsItem("Process.FixedTurnOverPosition") ? SC.GetValue<bool>("Process.FixedTurnOverPosition") : true;
  82. _timeout = Robot.RobotCommandTimeout;
  83. if (!RobotOffsetConfig.Instance.GetPlaceOffset(Station, ref _offsetX, ref _offsetY, ref _offsetZ,
  84. out string reason))
  85. {
  86. EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, {reason}");
  87. return Result.FAIL;
  88. }
  89. if (ModuleHelper.IsTurnOverStation(Station))
  90. {
  91. _isTurnOverGripped = _ioTurnOver.CurrentGripperPositon == GripPosEnum.Close;
  92. _isTurnOverOn0deg = _ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide;
  93. if(_ioTurnOver.IsPlacement)
  94. {
  95. EV.PostWarningLog(ModuleName.System.ToString(), $"Can not execute {Name}, Wafer on flipper.");
  96. return Result.FAIL;
  97. }
  98. }
  99. if (ModuleHelper.IsAligner(Station))
  100. {
  101. if (!DEVICE.GetDevice<AlignerBaseDevice>(Station.ToString()).IsReady())
  102. {
  103. EV.PostAlarmLog(Station.ToString(), $"{Station} is not ready.");
  104. return Result.FAIL;
  105. }
  106. if(DEVICE.GetDevice<AlignerBaseDevice>(Station.ToString()).IsWaferPresent(0))
  107. {
  108. EV.PostAlarmLog(Station.ToString(), $"{Station} wafer present.");
  109. return Result.FAIL;
  110. }
  111. _isNeedAlignerPrepare = Aligner.IsNeedPrepareBeforePlaceWafer();
  112. if (Blade == Hand.Both)
  113. {
  114. _currentWaferSize = WaferManager.Instance.GetWaferSize(Robot.RobotModuleName, 0);
  115. _isNeedToCheckAlginerWaferSize = Aligner.IsNeedChangeWaferSize(_currentWaferSize);
  116. }
  117. else
  118. {
  119. _currentWaferSize = WaferManager.Instance.GetWaferSize(Robot.RobotModuleName, (int)Blade);
  120. _isNeedToCheckAlginerWaferSize = Aligner.IsNeedChangeWaferSize(_currentWaferSize);
  121. }
  122. }
  123. if (ModuleHelper.IsLoadPort(Station))
  124. {
  125. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(Station.ToString());
  126. if (lp.IsForbidAccessSlotAboveWafer() && Slot > 0 && WaferManager.Instance.CheckHasWafer(Station, Slot - 1))
  127. {
  128. EV.PostAlarmLog(ModuleName.System.ToString(), "Access dennied to the slot above wafer.");
  129. return Result.FAIL;
  130. }
  131. if (!lp.IsEnableTransferWafer(out reason))
  132. {
  133. EV.PostAlarmLog(ModuleName.System.ToString(), $"{Station} is not ready to transfer wafer:{reason}.");
  134. return Result.FAIL;
  135. }
  136. }
  137. EV.PostInfoLog("System", $"Start placing wafer to station:{Station} slot:{Slot + 1} with blade {Blade}");
  138. IsRoutineActive = true;
  139. return Monitor();
  140. }
  141. public Result Monitor()
  142. {
  143. if (!IsRoutineActive)
  144. return Result.DONE;
  145. var ret = MonitorRoutine();
  146. if (ret == Result.FAIL)
  147. {
  148. Initalize();
  149. IsRoutineActive = false;
  150. }
  151. if (ret == Result.DONE)
  152. {
  153. IsRoutineActive = false;
  154. }
  155. return ret;
  156. }
  157. private Result MonitorRoutine()
  158. {
  159. try
  160. {
  161. if (!ModuleHelper.IsTurnOverStation(Station))
  162. {
  163. if (ModuleHelper.IsAligner(Station) && _isNeedToCheckAlginerWaferSize)
  164. {
  165. RtAlignerSetWaferSize((int)Place.SetAlignerWaferSize, _currentWaferSize, _timeout, Notify, Stop);
  166. if (ExecuteResult.Item1)
  167. {
  168. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  169. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  170. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  171. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  172. }
  173. }
  174. if (ModuleHelper.IsAligner(Station) && _isNeedAlignerPrepare)
  175. {
  176. RtAlignerPrepareAccept((int)Place.RaiseAligner, _timeout, Notify, Stop);
  177. if (ExecuteResult.Item1)
  178. {
  179. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  180. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  181. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  182. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  183. }
  184. }
  185. RtPlaceWafer((int)Place.PlaceWafer, "Place wafer", Station, Slot, Blade, _timeout, _offsetX, _offsetY, _offsetZ, Notify, Stop);
  186. if (ExecuteResult.Item1)
  187. {
  188. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  189. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  190. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  191. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  192. }
  193. }
  194. else
  195. {
  196. if (_isTurnOverGripped)
  197. {
  198. RtTurnOverUnGripWafer((int)Place.UnGrip, Notify, Stop);
  199. if (ExecuteResult.Item1)
  200. {
  201. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  202. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  203. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  204. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  205. }
  206. RtWaitTurnOverUnGrip((int)Place.WaitUnGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  207. if (ExecuteResult.Item1)
  208. {
  209. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  210. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  211. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  212. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  213. }
  214. }
  215. if (FixedTurnOverPosition)
  216. {
  217. if (!_isTurnOverOn0deg)
  218. {
  219. RtTurnOverTurnBack((int)Place.TurnReady, Notify, Stop);
  220. if (ExecuteResult.Item1)
  221. {
  222. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  223. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  224. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  225. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  226. }
  227. RtWaitTurnOverTurnTo0((int)Place.WaitTurnReady, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  228. if (ExecuteResult.Item1)
  229. {
  230. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  231. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  232. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  233. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  234. }
  235. }
  236. RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, _timeout, Notify, Stop);
  237. if (ExecuteResult.Item1)
  238. {
  239. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  240. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  241. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  242. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  243. }
  244. RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
  245. if (ExecuteResult.Item1)
  246. {
  247. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  248. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  249. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  250. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  251. }
  252. RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  253. if (ExecuteResult.Item1)
  254. {
  255. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  256. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  257. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  258. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  259. }
  260. RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, _timeout, Notify, Stop);
  261. if (ExecuteResult.Item1)
  262. {
  263. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  264. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  265. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  266. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  267. }
  268. RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
  269. if (ExecuteResult.Item1)
  270. {
  271. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  272. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  273. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  274. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  275. }
  276. }
  277. else
  278. {
  279. if (_isTurnOverOn0deg)
  280. {
  281. RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, _timeout, Notify, Stop);
  282. if (ExecuteResult.Item1)
  283. {
  284. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  285. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  286. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  287. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  288. }
  289. RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
  290. if (ExecuteResult.Item1)
  291. {
  292. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  293. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  294. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  295. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  296. }
  297. RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  298. if (ExecuteResult.Item1)
  299. {
  300. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  301. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  302. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  303. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  304. }
  305. RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, _timeout, Notify, Stop);
  306. if (ExecuteResult.Item1)
  307. {
  308. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  309. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  310. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  311. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  312. }
  313. RtCheckWaferOnTurn((int)Place.CheckWaferOnTurnOver, Notify, Stop);
  314. if (ExecuteResult.Item1)
  315. {
  316. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  317. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  318. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  319. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  320. }
  321. if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide)
  322. {
  323. RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
  324. if (ExecuteResult.Item1)
  325. {
  326. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  327. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  328. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  329. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  330. }
  331. }
  332. if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.BackSide)
  333. {
  334. RtTurnOverTurnBack((int)Place.TurnOver, Notify, Stop);
  335. if (ExecuteResult.Item1)
  336. {
  337. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  338. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  339. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  340. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  341. }
  342. }
  343. }
  344. else
  345. {
  346. RtDeliverWaferToGrip((int)Place.PlaceWafer, Station, Slot, Blade, _timeout, Notify, Stop, PutWaferOffsetForTurnOverOn180());
  347. if (ExecuteResult.Item1)
  348. {
  349. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  350. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  351. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  352. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  353. }
  354. RtTurnOverGripWafer((int)Place.Grip, Notify, Stop);
  355. if (ExecuteResult.Item1)
  356. {
  357. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  358. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  359. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  360. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  361. }
  362. RtWaitTurnOverGrip((int)Place.WaitGrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  363. if (ExecuteResult.Item1)
  364. {
  365. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  366. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  367. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  368. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  369. }
  370. RtRetractRobotArmForTurning((int)Place.RetractRobot, Station, Slot, Blade, _timeout, Notify, Stop, PutWaferOffsetForTurnOverOn180());
  371. if (ExecuteResult.Item1)
  372. {
  373. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  374. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  375. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  376. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  377. }
  378. RtCheckWaferOnTurn((int)Place.CheckWaferOnTurnOver, Notify, Stop);
  379. if (ExecuteResult.Item1)
  380. {
  381. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  382. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  383. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  384. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  385. }
  386. if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide)
  387. {
  388. RtTurnOverTurn((int)Place.TurnOver, Notify, Stop);
  389. if (ExecuteResult.Item1)
  390. {
  391. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  392. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  393. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  394. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  395. }
  396. }
  397. if (_ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.BackSide)
  398. {
  399. RtTurnOverTurnBack((int)Place.TurnOver, Notify, Stop);
  400. if (ExecuteResult.Item1)
  401. {
  402. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  403. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  404. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  405. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  406. }
  407. }
  408. }
  409. }
  410. }
  411. RtUpdateWaferSingleStepProcessState((int)Place.Finish, "Update step process state", Station, Slot, Blade,
  412. EnumWaferProcessStatus.Wait, Notify, Stop);
  413. if (ExecuteResult.Item1)
  414. {
  415. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  416. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  417. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  418. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  419. }
  420. EV.PostInfoLog("System", $"Complete placing wafer to station:{Station} slot:{Slot + 1} with blade {Blade}.");
  421. IsRoutineActive = false;
  422. return Result.DONE;
  423. }
  424. catch (Exception ex)
  425. {
  426. LOG.Write(ex);
  427. EV.PostAlarmLog("System", $"Failed to place wafer to station:{Station} slot:{Slot + 1} with blade {Blade}.");
  428. IsRoutineActive = false;
  429. return Result.FAIL;
  430. }
  431. }
  432. /// <summary>
  433. /// prepare process failed
  434. /// </summary>
  435. /// <param name="failReason"></param>
  436. /// <param name="reactor"></param>
  437. }
  438. }