EfemPickRoutine.cs 20 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438
  1. using System;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
  12. using Aitex.Sorter.RT.SorterCommonFrame.Modules;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
  14. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
  15. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
  16. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
  17. using System.Threading;
  18. using Aitex.Core.RT.Log;
  19. using Aitex.Core.Util;
  20. using Aitex.Sorter.RT.SorterCommonFrame.SorterJobControl;
  21. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Flipper.FlipperBase;
  22. namespace Aitex.Sorter.RT.SorterCommonFrame.Routines
  23. {
  24. public class EfemPickRoutine : CommonRoutineSorter, IRoutine
  25. {
  26. enum Pick
  27. {
  28. ReleaseAligner,
  29. QueryState,
  30. WaitLastMotion,
  31. WaitAlignerReady,
  32. TurnReady,
  33. WaitTurnReady,
  34. TurnTo0,
  35. WaitTurnTo0,
  36. CheckBeforePick,
  37. GoPickPosition,
  38. WaitGotoPos,
  39. PickWafer,
  40. WaitPick,
  41. UnGrip,
  42. WaitUngrip,
  43. RobotRetract,
  44. WaitRobotRetract,
  45. CheckAfterPick,
  46. TurnBack,
  47. WaitTurnBack,
  48. Finish,
  49. }
  50. private int _timeout = 0;
  51. public EfemPickRoutine(string module, string name)
  52. {
  53. Module = module;
  54. Name =name;
  55. }
  56. public bool Initalize()
  57. {
  58. Reset();
  59. IsRoutineActive = false;
  60. return true;
  61. }
  62. public ModuleName Source { get; set; }
  63. public int Slot { get; set; }
  64. public Hand Blade { get; set; }
  65. public ModuleName RobotModulename { get; set; } = ModuleName.Robot;
  66. private bool _isNeedWaitTurnOverIdle;
  67. private bool _isNeedReleasePA;
  68. public Result Start(params object[] objs)
  69. {
  70. Reset();
  71. Robot = DEVICE.GetDevice<RobotBaseDevice>(RobotModulename.ToString());
  72. Aligner = DEVICE.GetDevice<AlignerBaseDevice>(ModuleName.Aligner.ToString());
  73. _timeout = Robot.RobotCommandTimeout;
  74. if (Blade == Hand.Blade1 || Blade == Hand.Blade2)
  75. {
  76. if (WaferManager.Instance.CheckHasWafer(RobotModulename, (int)Blade))
  77. {
  78. EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, there's wafer on {Blade}.");
  79. return Result.FAIL;
  80. }
  81. }
  82. if (Blade == Hand.Both)
  83. {
  84. if (WaferManager.Instance.CheckHasWafer(RobotModulename, 0))
  85. {
  86. EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, there's wafer on lower arm.");
  87. return Result.FAIL;
  88. }
  89. if (WaferManager.Instance.CheckHasWafer(RobotModulename, 1))
  90. {
  91. EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, there's wafer on upper arm.");
  92. return Result.FAIL;
  93. }
  94. }
  95. FixedTurnOverPosition = SC.ContainsItem("Process.FixedTurnOverPosition") ? SC.GetValue<bool>("Process.FixedTurnOverPosition") : true;
  96. if (Source == ModuleName.TurnOverStation && !_ioTurnOver.IsPlacement)
  97. {
  98. EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, destination no wafer.");
  99. return Result.FAIL;
  100. }
  101. if (!ModuleHelper.IsTurnOverStation(Source) && Source != ModuleName.Aligner)
  102. {
  103. if (!RobotOffsetConfig.Instance.GetPickOffset(Source, ref _offsetX, ref _offsetY, ref _offsetZ,
  104. out string reason))
  105. {
  106. EV.PostWarningLog(ModuleName.System.ToString(), $"Can not {Name}, {reason}");
  107. return Result.FAIL;
  108. }
  109. }
  110. else
  111. {
  112. _offsetX = 0;
  113. _offsetY = 0;
  114. _offsetY = 0;
  115. }
  116. if(ModuleHelper.IsAligner(Source))
  117. {
  118. if (!DEVICE.GetDevice<AlignerBaseDevice>(Source.ToString()).IsReady())
  119. {
  120. EV.PostAlarmLog(ModuleName.System.ToString(), "Aligner is not ready");
  121. return Result.FAIL;
  122. }
  123. _isNeedReleasePA = Aligner.IsNeedRelease;
  124. }
  125. if (ModuleHelper.IsLoadPort(Source))
  126. {
  127. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(Source.ToString());
  128. if(lp.IsForbidAccessSlotAboveWafer() && Slot>0 && WaferManager.Instance.CheckHasWafer(Source,Slot-1))
  129. {
  130. EV.PostAlarmLog(ModuleName.System.ToString(), "Access dennied to the slot above wafer.");
  131. return Result.FAIL;
  132. }
  133. string reason;
  134. if(!lp.IsEnableTransferWafer(out reason))
  135. {
  136. EV.PostAlarmLog(ModuleName.System.ToString(), $"{Source} is not ready to transfer wafer:{reason}.");
  137. return Result.FAIL;
  138. }
  139. var wafer = WaferManager.Instance.GetWafer(Source, Slot);
  140. if(ModuleHelper.IsLoadPort((ModuleName)wafer.DestinationStation))
  141. {
  142. if(!Singleton<SorterJobManager>.Instance.CheckCarrierAccessPermit(Source, (ModuleName)wafer.DestinationStation))
  143. {
  144. EV.PostAlarmLog("System", $"Can't start pick routine: carrier access dennied.");
  145. return Result.FAIL;
  146. }
  147. }
  148. }
  149. if (ModuleHelper.IsTurnOverStation(Source) && !_ioTurnOver.IsReady)
  150. {
  151. _isNeedWaitTurnOverIdle = true;
  152. }
  153. else
  154. _isNeedWaitTurnOverIdle = false;
  155. if (ModuleHelper.IsTurnOverStation(Source))
  156. {
  157. _isTurnOverOn0deg = _ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide;
  158. }
  159. EV.PostInfoLog("System",$"Start picking wafer from station:{Source} slot:{Slot+1} with blade {Blade}");
  160. IsRoutineActive = true;
  161. return Monitor();
  162. }
  163. private bool _isTurnOverOn0deg;
  164. public Result Monitor()
  165. {
  166. if (!IsRoutineActive) return Result.DONE;
  167. var ret = MonitorRoutine();
  168. if (ret == Result.FAIL)
  169. {
  170. Initalize();
  171. IsRoutineActive = false;
  172. }
  173. if (ret == Result.DONE)
  174. {
  175. IsRoutineActive = false;
  176. }
  177. return ret;
  178. }
  179. private Result MonitorRoutine()
  180. {
  181. try
  182. {
  183. if (!ModuleHelper.IsTurnOverStation(Source))
  184. {
  185. if (ModuleHelper.IsAligner(Source) && _isNeedReleasePA)
  186. {
  187. RtReleaseAligner((int)Pick.ReleaseAligner, Notify, Stop);
  188. if (ExecuteResult.Item1)
  189. {
  190. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  191. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  192. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  193. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  194. }
  195. RtWaitAlignerMotion((int)Pick.WaitAlignerReady, Aligner, "Wait Aligner Ready", _timeout, Notify, Stop);
  196. if (ExecuteResult.Item1)
  197. {
  198. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  199. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  200. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  201. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  202. }
  203. }
  204. RtPickWafer((int)Pick.PickWafer, "Start pick wafer", Source, Slot, Blade, _timeout, _offsetX, _offsetY, _offsetZ, Notify, Stop);
  205. if (ExecuteResult.Item1)
  206. {
  207. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  208. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  209. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  210. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  211. }
  212. }
  213. else
  214. {
  215. if (_isNeedWaitTurnOverIdle)
  216. {
  217. RtWaitTurnOverMotion((int)Pick.WaitTurnReady, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  218. if (ExecuteResult.Item1)
  219. {
  220. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  221. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  222. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  223. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  224. }
  225. }
  226. if (FixedTurnOverPosition)
  227. {
  228. if (_isTurnOverOn0deg)
  229. {
  230. RtTurnOverTurn((int)Pick.TurnTo0, Notify, Stop);
  231. if (ExecuteResult.Item1)
  232. {
  233. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  234. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  235. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  236. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  237. }
  238. RtWaitTurnOverTurnTo180((int)Pick.WaitTurnTo0, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  239. if (ExecuteResult.Item1)
  240. {
  241. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  242. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  243. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  244. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  245. }
  246. }
  247. RtRobotArmGoReadyForPickFromTurnOver((int)Pick.GoPickPosition, Source, Slot, Blade, _timeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
  248. if (ExecuteResult.Item1)
  249. {
  250. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  251. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  252. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  253. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  254. }
  255. RtTurnOverUnGripWafer((int)Pick.UnGrip, Notify, Stop);
  256. if (ExecuteResult.Item1)
  257. {
  258. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  259. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  260. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  261. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  262. }
  263. RtWaitTurnOverUnGrip((int)Pick.WaitUngrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  264. if (ExecuteResult.Item1)
  265. {
  266. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  267. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  268. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  269. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  270. }
  271. RtPickWaferFromTurnOver((int)Pick.RobotRetract, Source, Slot, Blade, _timeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
  272. if (ExecuteResult.Item1)
  273. {
  274. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  275. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  276. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  277. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  278. }
  279. RtTurnOverTurnBack((int)Pick.TurnBack, Notify, Stop);
  280. if (ExecuteResult.Item1)
  281. {
  282. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  283. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  284. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  285. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  286. }
  287. }
  288. else
  289. {
  290. if (_isTurnOverOn0deg)
  291. {
  292. RtRobotArmGoReadyForPickFromTurnOver((int)Pick.GoPickPosition, Source, Slot, Blade, _timeout, Notify, Stop);
  293. if (ExecuteResult.Item1)
  294. {
  295. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  296. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  297. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  298. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  299. }
  300. RtTurnOverUnGripWafer((int)Pick.UnGrip, Notify, Stop);
  301. if (ExecuteResult.Item1)
  302. {
  303. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  304. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  305. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  306. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  307. }
  308. RtWaitTurnOverUnGrip((int)Pick.WaitUngrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  309. if (ExecuteResult.Item1)
  310. {
  311. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  312. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  313. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  314. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  315. }
  316. RtPickWaferFromTurnOver((int)Pick.RobotRetract, Source, Slot, Blade, _timeout, Notify, Stop);
  317. if (ExecuteResult.Item1)
  318. {
  319. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  320. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  321. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  322. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  323. }
  324. }
  325. else
  326. {
  327. RtRobotArmGoReadyForPickFromTurnOver((int)Pick.GoPickPosition, Source, Slot, Blade, _timeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
  328. if (ExecuteResult.Item1)
  329. {
  330. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  331. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  332. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  333. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  334. }
  335. RtTurnOverUnGripWafer((int)Pick.UnGrip, Notify, Stop);
  336. if (ExecuteResult.Item1)
  337. {
  338. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  339. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  340. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  341. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  342. }
  343. RtWaitTurnOverUnGrip((int)Pick.WaitUngrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
  344. if (ExecuteResult.Item1)
  345. {
  346. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  347. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  348. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  349. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  350. }
  351. RtPickWaferFromTurnOver((int)Pick.RobotRetract, Source, Slot, Blade, _timeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
  352. if (ExecuteResult.Item1)
  353. {
  354. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  355. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  356. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  357. if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
  358. }
  359. }
  360. }
  361. }
  362. RtUpdateWaferSingleStepProcessState((int)Pick.Finish, "Update wafer single step process state", RobotModulename, 0, Blade,
  363. EnumWaferProcessStatus.Idle, Notify, Stop);
  364. if (ExecuteResult.Item1)
  365. {
  366. if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
  367. if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
  368. if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
  369. if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
  370. }
  371. EV.PostInfoLog("System", $"Complete picking wafer from station:{Source} slot:{Slot + 1} with blade {Blade}.");
  372. IsRoutineActive = false;
  373. return Result.DONE;
  374. }
  375. catch (Exception ex)
  376. {
  377. EV.PostAlarmLog("System", $"Failed to pick wafer from station:{Source} slot:{Slot + 1} with blade {Blade}.");
  378. LOG.Write(ex);
  379. IsRoutineActive = false;
  380. return Result.FAIL;
  381. }
  382. }
  383. }
  384. }