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- using System;
- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using Aitex.Sorter.RT.SorterCommonFrame.Modules;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
- using System.Threading;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using Aitex.Sorter.RT.SorterCommonFrame.SorterJobControl;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Flipper.FlipperBase;
- namespace Aitex.Sorter.RT.SorterCommonFrame.Routines
- {
- public class EfemPickRoutine : CommonRoutineSorter, IRoutine
- {
- enum Pick
- {
- ReleaseAligner,
- QueryState,
- WaitLastMotion,
- WaitAlignerReady,
- TurnReady,
- WaitTurnReady,
- TurnTo0,
- WaitTurnTo0,
- CheckBeforePick,
- GoPickPosition,
- WaitGotoPos,
- PickWafer,
- WaitPick,
- UnGrip,
- WaitUngrip,
- RobotRetract,
- WaitRobotRetract,
- CheckAfterPick,
- TurnBack,
- WaitTurnBack,
- Finish,
- }
- private int _timeout = 0;
- public EfemPickRoutine(string module, string name)
- {
- Module = module;
- Name =name;
- }
- public bool Initalize()
- {
- Reset();
- IsRoutineActive = false;
- return true;
- }
- public ModuleName Source { get; set; }
- public int Slot { get; set; }
- public Hand Blade { get; set; }
-
- public ModuleName RobotModulename { get; set; } = ModuleName.Robot;
- private bool _isNeedWaitTurnOverIdle;
- private bool _isNeedReleasePA;
- public Result Start(params object[] objs)
- {
- Reset();
- Robot = DEVICE.GetDevice<RobotBaseDevice>(RobotModulename.ToString());
- Aligner = DEVICE.GetDevice<AlignerBaseDevice>(ModuleName.Aligner.ToString());
- _timeout = Robot.RobotCommandTimeout;
- if (Blade == Hand.Blade1 || Blade == Hand.Blade2)
- {
- if (WaferManager.Instance.CheckHasWafer(RobotModulename, (int)Blade))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, there's wafer on {Blade}.");
- return Result.FAIL;
- }
- }
- if (Blade == Hand.Both)
- {
- if (WaferManager.Instance.CheckHasWafer(RobotModulename, 0))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, there's wafer on lower arm.");
- return Result.FAIL;
- }
- if (WaferManager.Instance.CheckHasWafer(RobotModulename, 1))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, there's wafer on upper arm.");
- return Result.FAIL;
- }
- }
- FixedTurnOverPosition = SC.ContainsItem("Process.FixedTurnOverPosition") ? SC.GetValue<bool>("Process.FixedTurnOverPosition") : true;
- if (Source == ModuleName.TurnOverStation && !_ioTurnOver.IsPlacement)
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, destination no wafer.");
- return Result.FAIL;
- }
- if (!ModuleHelper.IsTurnOverStation(Source) && Source != ModuleName.Aligner)
- {
- if (!RobotOffsetConfig.Instance.GetPickOffset(Source, ref _offsetX, ref _offsetY, ref _offsetZ,
- out string reason))
- {
- EV.PostWarningLog(ModuleName.System.ToString(), $"Can not {Name}, {reason}");
- return Result.FAIL;
- }
- }
- else
- {
- _offsetX = 0;
- _offsetY = 0;
- _offsetY = 0;
- }
- if(ModuleHelper.IsAligner(Source))
- {
- if (!DEVICE.GetDevice<AlignerBaseDevice>(Source.ToString()).IsReady())
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), "Aligner is not ready");
- return Result.FAIL;
- }
- _isNeedReleasePA = Aligner.IsNeedRelease;
- }
- if (ModuleHelper.IsLoadPort(Source))
- {
- var lp = DEVICE.GetDevice<LoadPortBaseDevice>(Source.ToString());
- if(lp.IsForbidAccessSlotAboveWafer() && Slot>0 && WaferManager.Instance.CheckHasWafer(Source,Slot-1))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), "Access dennied to the slot above wafer.");
- return Result.FAIL;
- }
- string reason;
- if(!lp.IsEnableTransferWafer(out reason))
- {
- EV.PostAlarmLog(ModuleName.System.ToString(), $"{Source} is not ready to transfer wafer:{reason}.");
- return Result.FAIL;
- }
- var wafer = WaferManager.Instance.GetWafer(Source, Slot);
- if(ModuleHelper.IsLoadPort((ModuleName)wafer.DestinationStation))
- {
- if(!Singleton<SorterJobManager>.Instance.CheckCarrierAccessPermit(Source, (ModuleName)wafer.DestinationStation))
- {
- EV.PostAlarmLog("System", $"Can't start pick routine: carrier access dennied.");
- return Result.FAIL;
- }
- }
- }
- if (ModuleHelper.IsTurnOverStation(Source) && !_ioTurnOver.IsReady)
- {
- _isNeedWaitTurnOverIdle = true;
- }
- else
- _isNeedWaitTurnOverIdle = false;
-
- if (ModuleHelper.IsTurnOverStation(Source))
- {
- _isTurnOverOn0deg = _ioTurnOver.CurrentFlipperPosition == FlipperPosEnum.FrontSide;
- }
- EV.PostInfoLog("System",$"Start picking wafer from station:{Source} slot:{Slot+1} with blade {Blade}");
- IsRoutineActive = true;
- return Monitor();
- }
- private bool _isTurnOverOn0deg;
- public Result Monitor()
- {
- if (!IsRoutineActive) return Result.DONE;
- var ret = MonitorRoutine();
- if (ret == Result.FAIL)
- {
- Initalize();
- IsRoutineActive = false;
- }
- if (ret == Result.DONE)
- {
- IsRoutineActive = false;
- }
- return ret;
- }
- private Result MonitorRoutine()
- {
- try
- {
- if (!ModuleHelper.IsTurnOverStation(Source))
- {
- if (ModuleHelper.IsAligner(Source) && _isNeedReleasePA)
- {
- RtReleaseAligner((int)Pick.ReleaseAligner, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtWaitAlignerMotion((int)Pick.WaitAlignerReady, Aligner, "Wait Aligner Ready", _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- }
- RtPickWafer((int)Pick.PickWafer, "Start pick wafer", Source, Slot, Blade, _timeout, _offsetX, _offsetY, _offsetZ, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- }
- else
- {
- if (_isNeedWaitTurnOverIdle)
- {
- RtWaitTurnOverMotion((int)Pick.WaitTurnReady, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- }
- if (FixedTurnOverPosition)
- {
- if (_isTurnOverOn0deg)
- {
- RtTurnOverTurn((int)Pick.TurnTo0, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtWaitTurnOverTurnTo180((int)Pick.WaitTurnTo0, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- }
- RtRobotArmGoReadyForPickFromTurnOver((int)Pick.GoPickPosition, Source, Slot, Blade, _timeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtTurnOverUnGripWafer((int)Pick.UnGrip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtWaitTurnOverUnGrip((int)Pick.WaitUngrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtPickWaferFromTurnOver((int)Pick.RobotRetract, Source, Slot, Blade, _timeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtTurnOverTurnBack((int)Pick.TurnBack, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- }
- else
- {
- if (_isTurnOverOn0deg)
- {
- RtRobotArmGoReadyForPickFromTurnOver((int)Pick.GoPickPosition, Source, Slot, Blade, _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtTurnOverUnGripWafer((int)Pick.UnGrip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtWaitTurnOverUnGrip((int)Pick.WaitUngrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtPickWaferFromTurnOver((int)Pick.RobotRetract, Source, Slot, Blade, _timeout, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- }
- else
- {
- RtRobotArmGoReadyForPickFromTurnOver((int)Pick.GoPickPosition, Source, Slot, Blade, _timeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtTurnOverUnGripWafer((int)Pick.UnGrip, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtWaitTurnOverUnGrip((int)Pick.WaitUngrip, _ioTurnOver, _ioTurnOver.TimelimitAction, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- RtPickWaferFromTurnOver((int)Pick.RobotRetract, Source, Slot, Blade, _timeout, Notify, Stop, GetWaferOffsetForTurnOverOn180());
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.RUN;
- }
- }
- }
- }
- RtUpdateWaferSingleStepProcessState((int)Pick.Finish, "Update wafer single step process state", RobotModulename, 0, Blade,
- EnumWaferProcessStatus.Idle, Notify, Stop);
- if (ExecuteResult.Item1)
- {
- if (ExecuteResult.Item2 == Result.RUN) return Result.RUN;
- if (ExecuteResult.Item2 == Result.FAIL) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.TIMEOUT) return Result.FAIL;
- if (ExecuteResult.Item2 == Result.DONE) return Result.DONE;
- }
-
- EV.PostInfoLog("System", $"Complete picking wafer from station:{Source} slot:{Slot + 1} with blade {Blade}.");
- IsRoutineActive = false;
- return Result.DONE;
- }
- catch (Exception ex)
- {
- EV.PostAlarmLog("System", $"Failed to pick wafer from station:{Source} slot:{Slot + 1} with blade {Blade}.");
- LOG.Write(ex);
- IsRoutineActive = false;
- return Result.FAIL;
- }
- }
- }
- }
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