123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116 |
- namespace Aitex.Sorter.RT.EFEMs.Servers
- {
- public enum EfemCommandType
- {
- MOV, //MOV Motion request
- GET, //Request for each type status acquisition
- SET, //Control setting
- ACK,
- };
- public enum EfemCommand
- {
- READY, //Ready , ACK, INF
- INIT, //EFEM initialization MOV, ACK, INF
- ORGSH, //Origin search
- LOCK, //Pod lock MOV, ACK, INF
- UNLOCK, //Pod unlock
- DOCK, //Moving to pod dock position MOV, ACK, INF
- UNDOCK, //Moving to pod undock position MOV, ACK, INF
- OPEN, //Pod open MOV, ACK, INF
- CLOSE, //Pod close MOV, ACK, INF
- WAFSH, //Wafer mapping MOV, ACK, INF
- MAPDT, //Wafer map information GET, ACK, INF, EVT
- LOAD, //Wafer carry-out MOV, ACK, INF
- UNLOAD, //Wafer carry-in MOV, ACK, INF
- GOTO, //Move to specified object MOV, ACK, INF
- TRANS, //Wafer transfer MOV, ACK, INF
- CHANGE, //Wafer exchange MOV, ACK, INF
- ALIGN, //Alignment MOV, SET, ACK, INF
- HOME, //Home MOV, ACK, INF
- HOLD, //Hold MOV, ACK, INF
- RESTR, //Restart MOV, ACK
- ABORT, //Abort termination MOV, ACK, INF
- EMS, //Emergency stop MOV, ACK, INF
- ERROR, //Error GET, SET, ACK, INF
-
- CLAMP, //Clamp output, get state GET, SET, ACK, INF
- STATE, //Get status GET, ACK, INF
-
- MODE, //E84 mode setting GET, SET, ACK, INF
- TRANSREQ, //E84 automatic transfer request MOV, GET, ACK, INF, EVT
- SIGOUT, //Signal output SET, ACK
- SIGSTAT, //Signal input/output information GET, ACK, INF, EVT
- EVENT, //Event setting GET, SET, ACK, INF
- CSTID, //Carrier ID GET, ACK, INF
- USDEFINE, //User Define
- FFU, //Ffu SET,ACK,INF
- WTYPE, //Wtype Set and acquire wafer type SET,ACK,GET,ACK,INF
- PURGE, //Purge SET,ACK,GET,ACK,INF
- ADPLOCK, //Adplock MOV,ACK,INF
- ADPUNLOCK, //Adpunlock SET,ACK,INF
- LED, //Led SET,ACK,INF
- WORKCHK, //Workchk MOV,ACK,INF
- FFUFAN,
- }
- public enum EfemEventType
- {
- ALL = 0x1000, //All events (cannot be designated for GET)
- MAPDT = 0x0001, //Mapping result event
- TRANSREQ = 0x0002, //E84 automatic transfer start event
- SYSTEM = 0x0004, //System I/O update event
- PORT = 0x0008, //Port I/O update event
- PRS = 0x0010, //Pressure sensor measured value update event
- FFU = 0x0020, //FFU revolution update event
- }
- public class EfemParameter
- {
- public const string SYS = "SYS";
- public const string STOWER = "STOWER";
- public const string P1 = "P1";
- public const string P2 = "P2";
- public const string P3 = "P3";
- public const string P4 = "P4";
- }
- public enum EfemEventValue
- {
- ON, //Event is enabled
- OFF, //Event is disabled
- };
- public enum StateItem
- {
- VER, //MOV Motion request
- TRACK, //Request for each type status acquisition
- PRS, //Control setting
- FFU,
- };
- public enum MoveArm
- {
- ARM1, //Designates upper finger
- ARM2, //Designates lower finger
- }
- public enum MovePosition
- {
- UP, //Height for inserting a wafer
- DOWN, //Height for picking up a wafer
- }
- }
|