Protocol.cs 3.6 KB

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  1. namespace Aitex.Sorter.RT.EFEMs.Servers
  2. {
  3. public enum EfemCommandType
  4. {
  5. MOV, //MOV Motion request
  6. GET, //Request for each type status acquisition
  7. SET, //Control setting
  8. ACK,
  9. };
  10. public enum EfemCommand
  11. {
  12. READY, //Ready , ACK, INF
  13. INIT, //EFEM initialization MOV, ACK, INF
  14. ORGSH, //Origin search
  15. LOCK, //Pod lock MOV, ACK, INF
  16. UNLOCK, //Pod unlock
  17. DOCK, //Moving to pod dock position MOV, ACK, INF
  18. UNDOCK, //Moving to pod undock position MOV, ACK, INF
  19. OPEN, //Pod open MOV, ACK, INF
  20. CLOSE, //Pod close MOV, ACK, INF
  21. WAFSH, //Wafer mapping MOV, ACK, INF
  22. MAPDT, //Wafer map information GET, ACK, INF, EVT
  23. LOAD, //Wafer carry-out MOV, ACK, INF
  24. UNLOAD, //Wafer carry-in MOV, ACK, INF
  25. GOTO, //Move to specified object MOV, ACK, INF
  26. TRANS, //Wafer transfer MOV, ACK, INF
  27. CHANGE, //Wafer exchange MOV, ACK, INF
  28. ALIGN, //Alignment MOV, SET, ACK, INF
  29. HOME, //Home MOV, ACK, INF
  30. HOLD, //Hold MOV, ACK, INF
  31. RESTR, //Restart MOV, ACK
  32. ABORT, //Abort termination MOV, ACK, INF
  33. EMS, //Emergency stop MOV, ACK, INF
  34. ERROR, //Error GET, SET, ACK, INF
  35. CLAMP, //Clamp output, get state GET, SET, ACK, INF
  36. STATE, //Get status GET, ACK, INF
  37. MODE, //E84 mode setting GET, SET, ACK, INF
  38. TRANSREQ, //E84 automatic transfer request MOV, GET, ACK, INF, EVT
  39. SIGOUT, //Signal output SET, ACK
  40. SIGSTAT, //Signal input/output information GET, ACK, INF, EVT
  41. EVENT, //Event setting GET, SET, ACK, INF
  42. CSTID, //Carrier ID GET, ACK, INF
  43. USDEFINE, //User Define
  44. FFU, //Ffu SET,ACK,INF
  45. WTYPE, //Wtype Set and acquire wafer type SET,ACK,GET,ACK,INF
  46. PURGE, //Purge SET,ACK,GET,ACK,INF
  47. ADPLOCK, //Adplock MOV,ACK,INF
  48. ADPUNLOCK, //Adpunlock SET,ACK,INF
  49. LED, //Led SET,ACK,INF
  50. WORKCHK, //Workchk MOV,ACK,INF
  51. FFUFAN,
  52. }
  53. public enum EfemEventType
  54. {
  55. ALL = 0x1000, //All events (cannot be designated for GET)
  56. MAPDT = 0x0001, //Mapping result event
  57. TRANSREQ = 0x0002, //E84 automatic transfer start event
  58. SYSTEM = 0x0004, //System I/O update event
  59. PORT = 0x0008, //Port I/O update event
  60. PRS = 0x0010, //Pressure sensor measured value update event
  61. FFU = 0x0020, //FFU revolution update event
  62. }
  63. public class EfemParameter
  64. {
  65. public const string SYS = "SYS";
  66. public const string STOWER = "STOWER";
  67. public const string P1 = "P1";
  68. public const string P2 = "P2";
  69. public const string P3 = "P3";
  70. public const string P4 = "P4";
  71. }
  72. public enum EfemEventValue
  73. {
  74. ON, //Event is enabled
  75. OFF, //Event is disabled
  76. };
  77. public enum StateItem
  78. {
  79. VER, //MOV Motion request
  80. TRACK, //Request for each type status acquisition
  81. PRS, //Control setting
  82. FFU,
  83. };
  84. public enum MoveArm
  85. {
  86. ARM1, //Designates upper finger
  87. ARM2, //Designates lower finger
  88. }
  89. public enum MovePosition
  90. {
  91. UP, //Height for inserting a wafer
  92. DOWN, //Height for picking up a wafer
  93. }
  94. }