ZZ-EFEM/Framework/AitexSorterRT/Config/SorterGemModel.xml

<?xml version="1.0" encoding="UTF-8"?>
<Equipment xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema" persistence="true" schemaVersion="1.0.3" productInfo="SecsToHost.Net Compatible">
  <License licenseId="" licensePath="" />
  <Nameable id="AitexSorter" description="AitexSorter" locator="" alias="AitexSorter" make="Aitex" model="AitexSorter" softwareRev="1.0" />
  <GemConnection protocol="Hsms" defaultCommunicationState="Enabled" defaultControlState="Online" defaultOnlineSubState="Local" deviceId="0" multipleOpen="false" maxOpenTransactions="3">
    <HSMS connectionMode="Passive" linktestInterval="30" localIPAddress="127.0.0.1" localPortNumber="5021" remoteIPAddress="127.0.0.1" remotePortNumber="5020" T3Timeout="45" T5Timeout="10" T6Timeout="5" T7Timeout="10" T8Timeout="5" />
    <RS232 commPort="1" baudRate="9600" retry="3" t1="1" t2="10" t3="30" t4="10" />
  </GemConnection>
  <SecsItemFormats ackc5="Binary" ackc7="Binary" ackc7a="U1" ackc10="Binary" alid="U4" alcd="Binary" altx="Ascii" aled="Binary" attrid="Ascii" ccode="U2" ceid="U4" cpname="Ascii" dataid="U4" dsper="Ascii" errw7="Ascii" loc="Binary" mdln="Ascii" mid="Ascii" objid="Ascii" objspec="Ascii" objtype="Ascii" ppbody="Binary" ppid="Ascii" rcmd="Ascii" repgsz="U4" rptid="U4" seqnum="U2" softrev="Ascii" text="Ascii" tid="Binary" totsmp="U4" trid="U4" svid="U4" ecid="U4" ddid="U4" errcode="I1" opid="I1" length="U4" cmda="I1" ecmin="U4" ecmax="U4" ecdef="Ascii" idtyp="Binary" fnloc="U2" ffrot="U2" orloc="Binary" rpsel="I1" dutms="Ascii" xdies="U4" ydies="U4" rowct="U4" colct="U4" nulbc_binlt_bcequ="I1" prdct="I1" praxi="Binary" smpln="U4" mlcl="U8" refp="I2" />
  <Logger logLevel="Info" rolloverSize="10000000" maxBytes="100000" messageLengthLimit="1048576" />
  <Clock timeFormat="yymmddhhmmss" />
  <RemoteCommand allowLocalMode="false">
    <S2F21>
      <S2F21Command name="100" logicalName="START" description=" " />
      <S2F21Command name="101" logicalName="PAUSE" description=" " />
      <S2F21Command name="102" logicalName="STOP" description=" " />
      <S2F21Command name="103" logicalName="PP-SELECT" description=" " />
      <S2F21Command name="104" logicalName="RESUME" description=" " />
      <S2F21Command name="105" logicalName="ABORT" description=" " />
    </S2F21>
    <S2F41>
      <S2F41Command name="Start" logicalName="Start" description=" ">
      </S2F41Command>
      <S2F41Command name="Pause" logicalName="Pause" description=" " />
      <S2F41Command name="Resume" logicalName="Resume" description=" " />
      <S2F41Command name="Abort" logicalName="Abort" description=" " />
      <S2F41Command name="LotComplete" logicalName="LotComplete" description=" " />
      <S2F41Command name="GoRemote" logicalName="GoRemote" description=" " />
      <S2F41Command name="GoLocal" logicalName="GoLocal" description=" " />
      <S2F41Command name="Unclamp" logicalName="Unclamp" description=" " />
      <S2F41Command name="Load" logicalName="Load" description=" " />
      <S2F41Command name="ReadID" logicalName="ReadID" description=" " />
      <S2F41Command name="WriteID" logicalName="WriteID" description=" " />
      <S2F41Command name="Unload" logicalName="Unload" description=" " />
      <S2F41Command name="ScanSlot" logicalName="ScanSlot" description=" " />
    </S2F41>
    <S2F49>
      <S2F49Command name="GOREMOTE" logicalName="GOREMOTE" description="">
      </S2F49Command>
      <S2F49Command name="PP-SELECT" logicalName="PP-SELECT" description=" ">
      </S2F49Command>
      <S2F49Command name="START" logicalName="START" description=" ">
      </S2F49Command>
      <S2F49Command name="STOP" logicalName="STOP" description=" ">
      </S2F49Command>
      <S2F49Command name="ABORT" logicalName="ABORT" description=" ">
      </S2F49Command>
      <S2F49Command name="PAUSE" logicalName="PAUSE" description=" ">
      </S2F49Command>
      <S2F49Command name="RESUME" logicalName="RESUME" description=" ">
      </S2F49Command>
      <S2F49Command name="START-TRANSFER" logicalName="START-TRANSFER" description=" " />
    </S2F49>
  </RemoteCommand>
  <StatusVariables>
    <SVID id="1" valueType="List" logicalName="AlarmsEnabled" value="" eventTrigger="" units="" description=" " isArray="false" />
    <SVID id="2" valueType="List" logicalName="AlarmsSet" value="" eventTrigger="" description=" " isArray="false" />
    <SVID id="3" valueType="Ascii" logicalName="Clock" value="" eventTrigger="" description=" " isArray="false" />
    <SVID id="4" valueType="U4" logicalName="ControlState" value="1" eventTrigger="" description=" " isArray="false" />
    <SVID id="5" valueType="List" logicalName="EventsEnabled" value="" eventTrigger="" description=" " isArray="false" />
    <SVID id="6" valueType="Ascii" logicalName="PPExecName" value="PPExecName" eventTrigger="" description=" " isArray="false" />
    <SVID id="7" valueType="I1" logicalName="PreviousProcessState" value="0" eventTrigger="" description=" " isArray="false" />
    <SVID id="8" valueType="I1" logicalName="ProcessState" value="0" eventTrigger="" description=" " isArray="false" />
    <SVID id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" description=" " isArray="false" />
    <SVID id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" description=" " isArray="false" />
    <SVID id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" description=" " isArray="false" />
    <SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" description=" " isArray="false" />
    <SVID id="13" valueType="Ascii" logicalName="SpoolState" value="1" eventTrigger="" description=" " isArray="false" />
    <SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="0" eventTrigger="" description=" " isArray="false">
    </SVID>
    <SVID id="1021" valueType="Ascii" logicalName="CARRIER_PORT1_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1022" valueType="Ascii" logicalName="CARRIER_PORT2_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1023" valueType="Ascii" logicalName="CARRIER_PORT3_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1024" valueType="Ascii" logicalName="CARRIER_PORT4_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1025" valueType="Ascii" logicalName="CARRIER_PORT5_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1026" valueType="Ascii" logicalName="CARRIER_PORT6_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1027" valueType="Ascii" logicalName="CARRIER_PORT7_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1028" valueType="Ascii" logicalName="CARRIER_PORT8_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1029" valueType="Ascii" logicalName="CARRIER_PORT9_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1030" valueType="Ascii" logicalName="CARRIER_PORT10_STATE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1031" valueType="Ascii" logicalName="CARRIER_PORT1_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1032" valueType="Ascii" logicalName="CARRIER_PORT2_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1033" valueType="Ascii" logicalName="CARRIER_PORT3_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1034" valueType="Ascii" logicalName="CARRIER_PORT4_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1035" valueType="Ascii" logicalName="CARRIER_PORT5_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1036" valueType="Ascii" logicalName="CARRIER_PORT6_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1037" valueType="Ascii" logicalName="CARRIER_PORT7_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1038" valueType="Ascii" logicalName="CARRIER_PORT8_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1039" valueType="Ascii" logicalName="CARRIER_PORT9_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1040" valueType="Ascii" logicalName="CARRIER_PORT10_CURRENT_SLOTMAP" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1041" valueType="List" logicalName="CARRIER_PORT1_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1042" valueType="List" logicalName="CARRIER_PORT2_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1043" valueType="List" logicalName="CARRIER_PORT3_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1044" valueType="List" logicalName="CARRIER_PORT4_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1045" valueType="List" logicalName="CARRIER_PORT5_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1046" valueType="List" logicalName="CARRIER_PORT6_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1047" valueType="List" logicalName="CARRIER_PORT7_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1048" valueType="List" logicalName="CARRIER_PORT8_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1049" valueType="List" logicalName="CARRIER_PORT9_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1050" valueType="List" logicalName="CARRIER_PORT10_CURRENT_WAFERID" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1051" valueType="List" logicalName="PORT_CATEGORY" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1080" valueType="Ascii" logicalName="EQUIPMENT_MODE" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1081" valueType="Ascii" logicalName="EQUIPMENT_STATUS" value="" units="" description=" " eventTrigger=" " />
    <SVID id="1082" valueType="U4" logicalName="JobWaitCarrier" value="" units="" description=" " eventTrigger=" " />
  </StatusVariables>
  <EquipmentConstants suppressECMinMaxType="false">
    <ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="2" units="" description="" eventTrigger=" " isArray="false" />
    <ECID id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
    <ECID id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
    <ECID id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
    <ECID id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
    <ECID id="2007" valueType="I1" logicalName="TimeFormat" value="0" min="0" max="1" units="" description="" eventTrigger=" " isArray="false" />
    <ECID id="2251" valueType="I1" logicalName="PortUsage01" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2252" valueType="I1" logicalName="PortUsage02" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2253" valueType="I1" logicalName="PortUsage03" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2254" valueType="I1" logicalName="PortUsage04" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2255" valueType="I1" logicalName="PortUsage05" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2256" valueType="I1" logicalName="PortUsage06" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2257" valueType="I1" logicalName="PortUsage07" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2258" valueType="I1" logicalName="PortUsage08" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2259" valueType="I1" logicalName="PortUsage09" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2260" valueType="I1" logicalName="PortUsage10" value="" min="0" max="0" units="" description=" " eventTrigger=" " />


    <ECID id="2270" valueType="I1" logicalName="EnableAutoCarrierIDReadAfterCarrierArrived" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2271" valueType="I1" logicalName="EnableAutoUndockAfterProcessComplete" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2272" valueType="I1" logicalName="ReadWaferIDAlignerAngle" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2273" valueType="I1" logicalName="RobotSpeed" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2274" valueType="I1" logicalName="Blade1Enable" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2275" valueType="I1" logicalName="Blade2Enable" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2276" valueType="I1" logicalName="AttempOnlineFailTo" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2277" valueType="I1" logicalName="DefaultOnlineTo" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    
    <ECID id="2281" valueType="I1" logicalName="T1" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2282" valueType="I1" logicalName="T2" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2283" valueType="I1" logicalName="T3" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2284" valueType="I1" logicalName="T4" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2285" valueType="I1" logicalName="T5" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2286" valueType="I1" logicalName="T6" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2287" valueType="I1" logicalName="T7" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2288" valueType="I1" logicalName="T8" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2289" valueType="I1" logicalName="LinkTest" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2290" valueType="I1" logicalName="Stream5Wbit" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2291" valueType="I1" logicalName="Stream6Wbit" value="" min="0" max="0" units="" description=" " eventTrigger=" " />


    <ECID id="2301" valueType="Ascii" logicalName="PortCategory01" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2302" valueType="Ascii" logicalName="PortCategory02" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2303" valueType="Ascii" logicalName="PortCategory03" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2304" valueType="Ascii" logicalName="PortCategory04" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2305" valueType="Ascii" logicalName="PortCategory05" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2306" valueType="Ascii" logicalName="PortCategory06" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2307" valueType="Ascii" logicalName="PortCategory07" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2308" valueType="Ascii" logicalName="PortCategory08" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2309" valueType="Ascii" logicalName="PortCategory09" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2310" valueType="Ascii" logicalName="PortCategory10" value="" min="0" max="0" units="" description=" " eventTrigger=" " />

    <ECID id="2311" valueType="Ascii" logicalName="PortCarrierType01" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2312" valueType="Ascii" logicalName="PortCarrierType02" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2313" valueType="Ascii" logicalName="PortCarrierType03" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2314" valueType="Ascii" logicalName="PortCarrierType04" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2315" valueType="Ascii" logicalName="PortCarrierType05" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2316" valueType="Ascii" logicalName="PortCarrierType06" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2317" valueType="Ascii" logicalName="PortCarrierType07" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2318" valueType="Ascii" logicalName="PortCarrierType08" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2319" valueType="Ascii" logicalName="PortCarrierType09" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2320" valueType="Ascii" logicalName="PortCarrierType10" value="" min="0" max="0" units="" description=" " eventTrigger=" " />

    <ECID id="2321" valueType="Ascii" logicalName="CarrierTypeOffset01" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2322" valueType="Ascii" logicalName="CarrierTypeOffset02" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2323" valueType="Ascii" logicalName="CarrierTypeOffset03" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2324" valueType="Ascii" logicalName="CarrierTypeOffset04" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2325" valueType="Ascii" logicalName="CarrierTypeOffset05" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2326" valueType="Ascii" logicalName="CarrierTypeOffset06" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2327" valueType="Ascii" logicalName="CarrierTypeOffset07" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2328" valueType="Ascii" logicalName="CarrierTypeOffset08" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2329" valueType="Ascii" logicalName="CarrierTypeOffset09" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2330" valueType="Ascii" logicalName="CarrierTypeOffset10" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2331" valueType="Ascii" logicalName="CarrierTypeOffset11" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2332" valueType="Ascii" logicalName="CarrierTypeOffset12" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2333" valueType="Ascii" logicalName="CarrierTypeOffset13" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2334" valueType="Ascii" logicalName="CarrierTypeOffset14" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2335" valueType="Ascii" logicalName="CarrierTypeOffset15" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2336" valueType="Ascii" logicalName="CarrierTypeOffset16" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2337" valueType="Ascii" logicalName="CarrierTypeOffset17" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2338" valueType="Ascii" logicalName="CarrierTypeOffset18" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2339" valueType="Ascii" logicalName="CarrierTypeOffset19" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    <ECID id="2340" valueType="Ascii" logicalName="CarrierTypeOffset20" value="" min="0" max="0" units="" description=" " eventTrigger=" " />

  </EquipmentConstants>
  <DataVariables>
    <DVID id="3001" valueType="U4" logicalName="EventLimit" value="0" eventTrigger="" description=" " isArray="false" />
    <DVID id="3002" valueType="U4" logicalName="LimitVariable" value="0" eventTrigger="" description=" " isArray="false" />
    <DVID id="3003" valueType="Ascii" logicalName="PPChangeName" value="" eventTrigger="" description=" " isArray="false" />
    <DVID id="3004" valueType="U2" logicalName="PPChangeStatus" value="1" eventTrigger="" description=" " isArray="false" />
    <DVID id="3005" valueType="Binary" logicalName="TransitionType" value="0" eventTrigger="" description=" " isArray="false" />
    <DVID id="3006" valueType="U4" logicalName="AlarmID" eventTrigger="" description=" " isArray="false" />
    <DVID id="3007" valueType="U4" logicalName="ECChangedID" value="" eventTrigger="" description=" " isArray="false" />
    <DVID id="3008" valueType="Ascii" logicalName="EVENT_NAME" value="" description="EVENT_NAME" eventTrigger=" ">
    </DVID>
    <DVID id="3009" valueType="Ascii" logicalName="MODE" value="" description="MODE" eventTrigger=" ">
    </DVID>
    <DVID id="3010" valueType="Ascii" logicalName="STATUS" value="" description="STATUS" eventTrigger=" ">
    </DVID>
    <DVID id="3011" valueType="Ascii" logicalName="CAR_ID" value="" description="CAR_ID" eventTrigger=" ">
    </DVID>
    <DVID id="3012" valueType="Ascii" logicalName="WAFER_ID" value="" description="WAFER_ID" eventTrigger=" ">
    </DVID>
    <DVID id="3013" valueType="Ascii" logicalName="LOT_ID" value="" description="LOT_ID" eventTrigger=" ">
    </DVID>
    <DVID id="3014" valueType="Ascii" logicalName="OPERATOR_ID" value="" description="OPERATOR_ID" eventTrigger=" ">
    </DVID>
    <DVID id="3015" valueType="Ascii" logicalName="PORT_ID" value="" description="PORT_ID" eventTrigger=" ">
    </DVID>
    <DVID id="3016" valueType="Ascii" logicalName="SLOT_NO" value="" description="SLOT_NO" eventTrigger=" ">
    </DVID>
    <DVID id="3017" valueType="Ascii" logicalName="SLOT_MAP" value="" description="SLOT_MAP" eventTrigger=" ">
    </DVID>
    <DVID id="3018" valueType="Ascii" logicalName="PORT_CTGRY" value="" description="PORT_CTGRY" eventTrigger=" ">
    </DVID>
    <DVID id="3019" valueType="Ascii" logicalName="LASERMARK1" value="" description="LASERMARK1" eventTrigger=" ">
    </DVID>
    <DVID id="3020" valueType="Ascii" logicalName="LASERMARK2" value="" description="LASERMARK2" eventTrigger=" ">
    </DVID>
    <DVID id="3021" valueType="Ascii" logicalName="START_CAR_ID" value="" description="START_CAR_ID" eventTrigger=" ">
    </DVID>
    <DVID id="3022" valueType="Ascii" logicalName="START_WAFER_ID" value="" description="START_WAFER_ID" eventTrigger=" ">
    </DVID>
    <DVID id="3023" valueType="Ascii" logicalName="START_SLOT_NO" value="" description="START_SLOT_NO" eventTrigger=" ">
    </DVID>
    <DVID id="3024" valueType="Ascii" logicalName="LM_READER_NO" value="" description="LM_READER_NO" eventTrigger=" ">
    </DVID>
    <DVID id="3025" valueType="Ascii" logicalName="RF_ID" value="" description="RF_ID" eventTrigger=" ">
    </DVID>
    <DVID id="3026" valueType="List" logicalName="WAFER_DATA_01" value="" description="WAFER_DATA_01" eventTrigger=" ">
    </DVID>
    <DVID id="3027" valueType="List" logicalName="WAFER_DATA_02" value="" description="WAFER_DATA_02" eventTrigger=" ">
    </DVID>
    <DVID id="3028" valueType="List" logicalName="WAFER_DATA_03" value="" description="WAFER_DATA_03" eventTrigger=" ">
    </DVID>
    <DVID id="3029" valueType="List" logicalName="WAFER_DATA_04" value="" description="WAFER_DATA_04" eventTrigger=" ">
    </DVID>
    <DVID id="3030" valueType="List" logicalName="WAFER_DATA_05" value="" description="WAFER_DATA_05" eventTrigger=" ">
    </DVID>
    <DVID id="3031" valueType="List" logicalName="WAFER_DATA_06" value="" description="WAFER_DATA_06" eventTrigger=" ">
    </DVID>
    <DVID id="3032" valueType="List" logicalName="WAFER_DATA_07" value="" description="WAFER_DATA_07" eventTrigger=" ">
    </DVID>
    <DVID id="3033" valueType="List" logicalName="WAFER_DATA_08" value="" description="WAFER_DATA_08" eventTrigger=" ">
    </DVID>
    <DVID id="3034" valueType="List" logicalName="WAFER_DATA_09" value="" description="WAFER_DATA_09" eventTrigger=" ">
    </DVID>
    <DVID id="3035" valueType="List" logicalName="WAFER_DATA_10" value="" description="WAFER_DATA_10" eventTrigger=" ">
    </DVID>
    <DVID id="3036" valueType="List" logicalName="WAFER_DATA_11" value="" description="WAFER_DATA_11" eventTrigger=" ">
    </DVID>
    <DVID id="3037" valueType="List" logicalName="WAFER_DATA_12" value="" description="WAFER_DATA_12" eventTrigger=" ">
    </DVID>
    <DVID id="3038" valueType="List" logicalName="WAFER_DATA_13" value="" description="WAFER_DATA_13" eventTrigger=" ">
    </DVID>
    <DVID id="3039" valueType="List" logicalName="WAFER_DATA_14" value="" description="WAFER_DATA_14" eventTrigger=" ">
    </DVID>
    <DVID id="3040" valueType="List" logicalName="WAFER_DATA_15" value="" description="WAFER_DATA_15" eventTrigger=" ">
    </DVID>
    <DVID id="3041" valueType="List" logicalName="WAFER_DATA_16" value="" description="WAFER_DATA_16" eventTrigger=" ">
    </DVID>
    <DVID id="3042" valueType="List" logicalName="WAFER_DATA_17" value="" description="WAFER_DATA_17" eventTrigger=" ">
    </DVID>
    <DVID id="3043" valueType="List" logicalName="WAFER_DATA_18" value="" description="WAFER_DATA_18" eventTrigger=" ">
    </DVID>
    <DVID id="3044" valueType="List" logicalName="WAFER_DATA_19" value="" description="WAFER_DATA_19" eventTrigger=" ">
    </DVID>
    <DVID id="3045" valueType="List" logicalName="WAFER_DATA_20" value="" description="WAFER_DATA_20" eventTrigger=" ">
    </DVID>
    <DVID id="3046" valueType="List" logicalName="WAFER_DATA_21" value="" description="WAFER_DATA_21" eventTrigger=" ">
    </DVID>
    <DVID id="3047" valueType="List" logicalName="WAFER_DATA_22" value="" description="WAFER_DATA_22" eventTrigger=" ">
    </DVID>
    <DVID id="3048" valueType="List" logicalName="WAFER_DATA_23" value="" description="WAFER_DATA_23" eventTrigger=" ">
    </DVID>
    <DVID id="3049" valueType="List" logicalName="WAFER_DATA_24" value="" description="WAFER_DATA_24" eventTrigger=" ">
    </DVID>
    <DVID id="3050" valueType="List" logicalName="WAFER_DATA_25" value="" description="WAFER_DATA_25" eventTrigger=" ">
    </DVID>

    <DVID id="3054" valueType="Ascii" logicalName="LEFT_POS_NAME" value="" description="LEFT_POS_NAME" eventTrigger=" ">
    </DVID>
    <DVID id="3055" valueType="Ascii" logicalName="ARRIVE_POS_NAME" value="" description="ARRIVE_POS_NAME" eventTrigger=" ">
    </DVID>
    <DVID id="3056" valueType="Ascii" logicalName="BATCH_ID" value="" description="BATCH_ID" eventTrigger=" ">
    </DVID>
  </DataVariables>
  <DataCollections useAnnotatedEvent="false">
    <RPTIDs>
      <RPTID id="1" logicalName="ControlReport">
        <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
      </RPTID>
      <RPTID id="2" logicalName="ProcessingReport">
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
      </RPTID>
      <RPTID id="4" logicalName="ProcessingStateChangedReport">
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        <ReportVariable id="8" varType="StatusVariable" logicalName="ProcessState" />
        <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
      </RPTID>
      <RPTID id="5" logicalName="ECChangedReport">
        <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
      </RPTID>
      <RPTID id="6" logicalName="PPChangedReport">
        <ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
        <ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
      </RPTID>
      <RPTID id="7" logicalName="PPSelectedReport">
        <ReportVariable id="6" varType="StatusVariable" logicalName="PPExecName" />
      </RPTID>
      <RPTID id="8" logicalName="AlarmEventReport">
        <ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        <ReportVariable id="2" varType="StatusVariable" logicalName="AlarmsSet" />
      </RPTID>
    </RPTIDs>
    <CEIDs>
      <CEID id="1" logicalName="EquipmentOFFLINE" description=" " enabled="false">
        <RPTID id="1" logicalName="ControlReport" />
      </CEID>
      <CEID id="2" logicalName="ControlStateLOCAL" description=" " enabled="false">
        <RPTID id="1" logicalName="ControlReport" />
      </CEID>
      <CEID id="3" logicalName="ControlStateREMOTE" description=" " enabled="false">
        <RPTID id="1" logicalName="ControlReport" />
      </CEID>
      <CEID id="4" logicalName="ProcessingStarted" description=" " enabled="false">
        <RPTID id="2" logicalName="ProcessingReport" />
      </CEID>
      <CEID id="5" logicalName="ProcessingCompleted" description=" " enabled="false">
        <RPTID id="2" logicalName="ProcessingReport" />
      </CEID>
      <CEID id="6" logicalName="ProcessingStopped" description=" " enabled="false">
        <RPTID id="2" logicalName="ProcessingReport" />
      </CEID>
      <CEID id="7" logicalName="ProcessingStateChanged" description=" " enabled="false">
        <RPTID id="4" logicalName="ProcessingStateChangedReport" />
      </CEID>
      <CEID id="8" logicalName="EquipmentConstantChanged" description=" " enabled="false">
        <RPTID id="5" logicalName="ECChangedReport" />
      </CEID>
      <CEID id="9" logicalName="ProcessProgramChanged" description=" " enabled="false">
        <RPTID id="6" logicalName="PPChangedReport" />
      </CEID>
      <CEID id="10" logicalName="ProcessProgramSelected" description=" " enabled="false">
        <RPTID id="7" logicalName="PPSelectedReport" />
      </CEID>
      <CEID id="11" logicalName="SpoolingActivated" description=" " enabled="false" />
      <CEID id="12" logicalName="SpoolingDeactivated" description=" " enabled="false" />
      <CEID id="13" logicalName="SpoolingFailed" description=" " enabled="false" />
      <CEID id="100001" logicalName="__SYSTEM__100001__ALARMSET" description="Alarm Set: PowerFailue" enabled="false">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200001" logicalName="__SYSTEM__200001__ALARMCLEAR" description="Alarm Clear: PowerFailue" enabled="false">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="2100" logicalName="MODE_CHANGE_REPORT" enabled="false" description=" " />
      <CEID id="2110" logicalName="STATUS_CHANGE_REPORT" enabled="false" description=" " />
      <CEID id="2120" logicalName="ControlMode_CHANGE_Report" enabled="false" description=" " />
      <CEID id="2130" logicalName="JOB_WAIT_CARRIER_STATUS_CHANGE" enabled="false" description=" " />

      <CEID id="2200" logicalName="CARRIER_ARRIVED" enabled="false" description=" " />
      <CEID id="2210" logicalName="CARRIER_ID_READ" enabled="false" description=" " />
      <CEID id="2220" logicalName="CARRIER_ID_READ_FAILED" enabled="false" description=" " />
      <CEID id="2230" logicalName="SLOT_MAP_AVAILABLE" enabled="false" description=" " />
      <CEID id="2240" logicalName="CARRIR_DOCK_COMPLETE" enabled="false" description=" " />
      <CEID id="2250" logicalName="RF_ID_READ" enabled="false" description=" " />
      <CEID id="2260" logicalName="RF_ID_READ_FAILED" enabled="false" description=" " />
      <CEID id="2270" logicalName="RF_ID_WRITE" enabled="false" description=" " />

      <CEID id="2290" logicalName="BATCH_ID_READ" enabled="false" description=" " />
      <CEID id="2300" logicalName="PROCESS_START_INQUIRY" enabled="false" description=" " />
      <CEID id="2400" logicalName="PROCESS_START_REPORT" enabled="false" description=" " />
      <CEID id="2410" logicalName="WAFER_LEFT_POSITION" enabled="false" description=" " />
      <CEID id="2420" logicalName="WAFER_ARRIVE_POSITION" enabled="false" description=" " />
      <CEID id="2430" logicalName="WAFER_ALIGN_START" enabled="false" description=" " />
      <CEID id="2440" logicalName="WAFER_ALIGN_END" enabled="false" description=" " />
      <CEID id="2450" logicalName="WAFER_LM_READ" enabled="false" description=" " />
      <CEID id="2500" logicalName="LOT_PROCESS_START" enabled="false" description=" " />
      <CEID id="4000" logicalName="CARRIER_COMPLETE" enabled="false" description=" " />
      <CEID id="4010" logicalName="UNLOAD_CARRIER_FULL" enabled="false" description=" " />
      <CEID id="4050" logicalName="CARRIER_UNLOADED" enabled="false" description=" " />
      <CEID id="4100" logicalName="CARRIER_REMOVED" enabled="false" description=" " />
      <CEID id="5000" logicalName="LOT_PROCESS_END" enabled="false" description=" " />

      <CEID id="100002" logicalName="__SYSTEM__100002__ALARMSET" description="Alarm Set: CompressedAirError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200002" logicalName="__SYSTEM__200002__ALARMCLEAR" description="Alarm Clear: CompressedAirError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="100003" logicalName="__SYSTEM__100003__ALARMSET" description="Alarm Set: VacuumError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200003" logicalName="__SYSTEM__200003__ALARMCLEAR" description="Alarm Clear: VacuumError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="100004" logicalName="__SYSTEM__100004__ALARMSET" description="Alarm Set: RobotError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200004" logicalName="__SYSTEM__200004__ALARMCLEAR" description="Alarm Clear: RobotError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="100005" logicalName="__SYSTEM__100005__ALARMSET" description="Alarm Set: WaferIDReadError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200005" logicalName="__SYSTEM__200005__ALARMCLEAR" description="Alarm Clear: WaferIDReadError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="100006" logicalName="__SYSTEM__100006__ALARMSET" description="Alarm Set: WaferIDCheckError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200006" logicalName="__SYSTEM__200006__ALARMCLEAR" description="Alarm Clear: WaferIDCheckError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="100007" logicalName="__SYSTEM__100007__ALARMSET" description="Alarm Set: MechanicalAlignmentError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200007" logicalName="__SYSTEM__200007__ALARMCLEAR" description="Alarm Clear: MechanicalAlignmentError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="100008" logicalName="__SYSTEM__100008__ALARMSET" description="Alarm Set: CarrierPortError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200008" logicalName="__SYSTEM__200008__ALARMCLEAR" description="Alarm Clear: CarrierPortError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="100009" logicalName="__SYSTEM__100009__ALARMSET" description="Alarm Set: ProcessingError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200009" logicalName="__SYSTEM__200009__ALARMCLEAR" description="Alarm Clear: ProcessingError">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="100010" logicalName="__SYSTEM__100010__ALARMSET" description="Alarm Set: ProcessCannotContinue">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
      <CEID id="200010" logicalName="__SYSTEM__200010__ALARMCLEAR" description="Alarm Clear: ProcessCannotContinue">
        <RPTID id="8" logicalName="AlarmEventReport" />
      </CEID>
    </CEIDs>
  </DataCollections>
  <Alarms>
    <ALID id="10" logicalName="PowerFailue" description="" category="Others" enabled="false" eventSet="100001" eventClear="200001" />
    <ALID id="12" logicalName="CompressedAirError" description="" category="Others" enabled="false" eventSet="100002" eventClear="200002" />
    <ALID id="14" logicalName="VacuumError" description="" category="Others" enabled="false" eventSet="100003" eventClear="200003" />
    <ALID id="20" logicalName="RobotError" description="" category="Others" enabled="false" eventSet="100004" eventClear="200004" />
    <ALID id="40" logicalName="WaferIDReadError" description="" category="Others" enabled="false" eventSet="100005" eventClear="200005" />
    <ALID id="41" logicalName="WaferIDCheckError" description="" category="Others" enabled="false" eventSet="100006" eventClear="200006" />
    <ALID id="50" logicalName="MechanicalAlignmentError" description="" category="Others" enabled="false" eventSet="100007" eventClear="200007" />
    <ALID id="70" logicalName="CarrierPortError" description="" category="Others" enabled="false" eventSet="100008" eventClear="200008" />
    <ALID id="90" logicalName="ProcessingError" description="" category="Others" enabled="false" eventSet="100009" eventClear="200009" />
    <ALID id="100" logicalName="ProcessCannotContinue" description="" category="Others" enabled="false" eventSet="100010" eventClear="200010" />
  </Alarms>
</Equipment>