PickRoutine.cs 18 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
  12. using System;
  13. namespace EFEM.RT.Routines
  14. {
  15. public class PickRoutine : CommonRoutine, IRoutine, IEfemPickRoutine
  16. {
  17. private enum Pick
  18. {
  19. ReserveRobot,
  20. WaitForPick,
  21. QueryState,
  22. OpenLoadLockDoor,
  23. CoolBufferMoveUP,
  24. WaitCoolBufferMoveUP,
  25. CheckBeforePick,
  26. QueryRobotParameter,
  27. RobotServoOff,
  28. WaitRobotServoOff,
  29. SetWaferSizeParameter0000,
  30. SetWaferSizeParameter0114,
  31. RobotServoOn,
  32. WaitRobotServoOn,
  33. PickWafer,
  34. WaitPick,
  35. XMove,
  36. CloseLoadLockDoor,
  37. CoolBufferMoveDown,
  38. WaitCoolBufferMoveDown,
  39. CheckAfterPick,
  40. PostMessage,
  41. RobotBusytoSimifOn,
  42. RobotBusytoSimifOff,
  43. CheckWaferPrecense,
  44. WaitCheckWaferPrecense,
  45. CheckWaferPrecenseAfterPick,
  46. QuerySignalStatus,
  47. RobotBladeUnGrip
  48. }
  49. protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;
  50. private SCConfigItem _scPickTimeout = null;
  51. private int _timeout = 0;
  52. private int _axisTimeout = 0;
  53. private int _axisSpeed = 0;
  54. public double WaitForPickTime = 0.00;
  55. public PickRoutine(string module, string name)
  56. {
  57. Module = module;
  58. Name = name;
  59. _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer);
  60. if (HaveMotionAxis)
  61. {
  62. _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
  63. _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
  64. }
  65. }
  66. public bool Initalize()
  67. {
  68. IsStopped = true;
  69. return true;
  70. }
  71. public ModuleName Source { get; set; }
  72. public int Slot { get; set; }
  73. public Hand Blade { get; set; }
  74. private LoadPort _lpDevice;
  75. private bool _skipWait;
  76. public Result Start(params object[] objs)
  77. {
  78. IsStopped = false;
  79. Reset();
  80. _timeout = robot.RobotCommandTimeout;
  81. Reset();
  82. EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString()));
  83. //robot.IsBusy = true;
  84. return Result.RUN;
  85. }
  86. public Result Monitor()
  87. {
  88. try
  89. {
  90. if (IsStopped) return Result.DONE;
  91. if (WaitForPickTime > 0.0)
  92. Wait((int)Pick.WaitForPick, "Wait", WaitForPickTime, Notify, Stop);
  93. //if (ModuleHelper.IsLoadPort(Source))
  94. // QueryLoadportState((int)Pick.QueryState, Source.ToString(), _timeout);
  95. if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source))
  96. {
  97. var dev = GetCoolBuffer(Source);
  98. if (dev != null)
  99. {
  100. CoolBufferMoveUP((int)Pick.CoolBufferMoveUP, GetCoolBuffer(Source), WaferManager.Instance.GetWaferSize(Source, Slot), _timeout, Notify, Stop);
  101. WaitCoolBufferMoveUp((int)Pick.WaitCoolBufferMoveUP, GetCoolBuffer(Source), "Wait CoolingBuffer Move Up...", _timeout, Notify, Stop);
  102. }
  103. }
  104. //RobotSignalStatus((int)Pick.QuerySignalStatus, robot, _timeout);
  105. CheckBladeWaferIsExist((int)Pick.CheckWaferPrecense, robot, Blade, _timeout);
  106. WaitRobotMotion((int)Pick.WaitCheckWaferPrecense, robot, "Wait finish check wafer", _timeout, Notify, Stop);
  107. CheckBeforePick((int)Pick.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
  108. if (!ModuleHelper.IsLoadLock(Source))
  109. {
  110. PickWafer((int)Pick.PickWafer, "Pick wafer", Source, Slot, Blade, OffsetX, OffsetY, OffsetZ, Notify, Stop);
  111. this.WaitRobotMotion((int)Pick.WaitPick, robot, "Wait picked", _timeout, Notify, Stop);
  112. }
  113. //UnGripRobotBlade((int)Pick.RobotBladeUnGrip, Blade, robot, _timeout);
  114. //if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source))
  115. //{
  116. // CoolBufferMoveDown((int)Pick.CoolBufferMoveDown, GetCoolBuffer(Source), WaferManager.Instance.GetWaferSize(Source, Slot), _timeout, Notify, Stop);
  117. // WaitCoolBufferMoveDown((int)Pick.WaitCoolBufferMoveDown, GetCoolBuffer(Source), "Wait CoolingBuffer Move Down...", _timeout, Notify, Stop);
  118. //}
  119. PostMessage((int)Pick.PostMessage, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString()));
  120. //CheckBladeWaferIsExist((int)Pick.CheckWaferPrecenseAfterPick, robot, Blade, _timeout);
  121. CheckAfterPick((int)Pick.CheckAfterPick, "Check wafer information after wafer picked", Source, Slot, Blade, Notify, Stop);
  122. }
  123. catch (RoutineBreakException)
  124. {
  125. if (!IsActived(TokenId) && !_skipWait)
  126. {
  127. _skipWait = true;
  128. return Monitor();
  129. }
  130. return Result.RUN;
  131. }
  132. catch (RoutineFaildException)
  133. {
  134. IsStopped = true;
  135. return Result.FAIL;
  136. }
  137. IsStopped = true;
  138. return Result.DONE;
  139. }
  140. public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  141. {
  142. Tuple<bool, Result> ret = Execute(id, () =>
  143. {
  144. notify(name);
  145. string reason = string.Empty;
  146. if (!CheckRobotMotionInterlock(chamber, slot, out reason))
  147. {
  148. EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
  149. return false;
  150. }
  151. notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot));
  152. if (blade == Hand.Blade1)
  153. {
  154. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  155. {
  156. //online mode, CreateWafer in LoadLock
  157. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  158. }
  159. else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  160. {
  161. //online mode, CreateWafer in LoadLock
  162. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  163. if (chamber.ToString() == "Buffer")
  164. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
  165. if (chamber.ToString() == "Buffer1")
  166. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
  167. if (chamber.ToString() == "Buffer2")
  168. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
  169. }
  170. else
  171. {
  172. bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
  173. if (!bHasWafer)
  174. {
  175. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
  176. return false;
  177. }
  178. }
  179. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty);
  180. if (!bNoWafer)
  181. {
  182. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  183. return false;
  184. }
  185. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0); //check sensor
  186. if (!bNoWafer)
  187. {
  188. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  189. return false;
  190. }
  191. if (ModuleHelper.IsBuffer(chamber))
  192. {
  193. bool bHasWafer = CheckSeneorHasWafer(chamber, slot); //check sensor
  194. if (!bHasWafer)
  195. {
  196. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  197. return false;
  198. }
  199. }
  200. }
  201. else if (blade == Hand.Blade2)
  202. {
  203. bool bHasWafer = true;
  204. for (int i = 0; i < robot.Blade2Slots; i++)
  205. {
  206. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  207. {
  208. //online mode, CreateWafer in LoadLock
  209. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  210. }
  211. else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  212. {
  213. //online mode, CreateWafer in LoadLock
  214. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  215. if (chamber.ToString() == "Buffer")
  216. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
  217. if (chamber.ToString() == "Buffer1")
  218. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
  219. if (chamber.ToString() == "Buffer2")
  220. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
  221. }
  222. else
  223. bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal);
  224. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty);
  225. if (!bNoWafer)
  226. {
  227. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  228. return false;
  229. }
  230. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); //check sensor
  231. if (!bNoWafer)
  232. {
  233. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  234. return false;
  235. }
  236. if (ModuleHelper.IsBuffer(chamber))
  237. {
  238. bHasWafer = CheckSeneorHasWafer(chamber, slot + i); //check sensor
  239. if (!bHasWafer)
  240. {
  241. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  242. return false;
  243. }
  244. }
  245. }
  246. if (!bHasWafer)
  247. {
  248. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
  249. return false;
  250. }
  251. }
  252. else
  253. {
  254. bool bHasWafer = true;
  255. for (int i = 0; i < robot.Blade2Slots + 1; i++)
  256. {
  257. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  258. {
  259. //online mode, CreateWafer in LoadLock
  260. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  261. }
  262. else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  263. {
  264. //online mode, CreateWafer in LoadLock
  265. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  266. if (chamber.ToString() == "Buffer")
  267. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
  268. if (chamber.ToString() == "Buffer1")
  269. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
  270. if (chamber.ToString() == "Buffer2")
  271. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
  272. }
  273. else
  274. bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
  275. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty);
  276. if (!bNoWafer)
  277. {
  278. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  279. return false;
  280. }
  281. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor
  282. if (!bNoWafer)
  283. {
  284. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  285. return false;
  286. }
  287. if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both)
  288. {
  289. bHasWafer &= CheckSeneorHasWafer(chamber, slot + i); //check sensor
  290. if (!bHasWafer)
  291. {
  292. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  293. return false;
  294. }
  295. }
  296. }
  297. if (!bHasWafer)
  298. {
  299. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot));
  300. return false;
  301. }
  302. }
  303. if (ModuleHelper.IsCoolingBuffer(chamber))
  304. {
  305. IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
  306. if (!buffer.CheckPinUp())
  307. {
  308. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position.");
  309. return false;
  310. }
  311. }
  312. return true;
  313. });
  314. if (ret.Item1)
  315. {
  316. if (ret.Item2 == Result.FAIL)
  317. {
  318. //error(String.Format("Failed to check wafer information."));
  319. throw (new RoutineFaildException());
  320. }
  321. }
  322. }
  323. public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  324. {
  325. Tuple<bool, Result> ret = Execute(id, () =>
  326. {
  327. notify(name);
  328. if (blade == Hand.Blade1)
  329. {
  330. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);
  331. if (!bHasWafer)
  332. {
  333. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  334. return false;
  335. }
  336. }
  337. else if (blade == Hand.Blade2)
  338. {
  339. for (int i = 0; i < robot.Blade2Slots; i++)
  340. {
  341. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i);
  342. if (!bHasWafer)
  343. {
  344. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  345. return false;
  346. }
  347. }
  348. }
  349. else
  350. {
  351. for (int i = 0; i < robot.Blade2Slots + 1; i++)
  352. {
  353. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);
  354. if (!bHasWafer)
  355. {
  356. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  357. return false;
  358. }
  359. }
  360. }
  361. return true;
  362. });
  363. if (ret.Item1)
  364. {
  365. if (ret.Item2 == Result.FAIL)
  366. {
  367. //error(String.Format("Failed to check wafer information."));
  368. throw (new RoutineFaildException());
  369. }
  370. }
  371. }
  372. }
  373. }