TazmoRobot.cs 62 KB

12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667686970717273747576777879808182838485868788899091929394959697989910010110210310410510610710810911011111211311411511611711811912012112212312412512612712812913013113213313413513613713813914014114214314414514614714814915015115215315415515615715815916016116216316416516616716816917017117217317417517617717817918018118218318418518618718818919019119219319419519619719819920020120220320420520620720820921021121221321421521621721821922022122222322422522622722822923023123223323423523623723823924024124224324424524624724824925025125225325425525625725825926026126226326426526626726826927027127227327427527627727827928028128228328428528628728828929029129229329429529629729829930030130230330430530630730830931031131231331431531631731831932032132232332432532632732832933033133233333433533633733833934034134234334434534634734834935035135235335435535635735835936036136236336436536636736836937037137237337437537637737837938038138238338438538638738838939039139239339439539639739839940040140240340440540640740840941041141241341441541641741841942042142242342442542642742842943043143243343443543643743843944044144244344444544644744844945045145245345445545645745845946046146246346446546646746846947047147247347447547647747847948048148248348448548648748848949049149249349449549649749849950050150250350450550650750850951051151251351451551651751851952052152252352452552652752852953053153253353453553653753853954054154254354454554654754854955055155255355455555655755855956056156256356456556656756856957057157257357457557657757857958058158258358458558658758858959059159259359459559659759859960060160260360460560660760860961061161261361461561661761861962062162262362462562662762862963063163263363463563663763863964064164264364464564664764864965065165265365465565665765865966066166266366466566666766866967067167267367467567667767867968068168268368468568668768868969069169269369469569669769869970070170270370470570670770870971071171271371471571671771871972072172272372472572672772872973073173273373473573673773873974074174274374474574674774874975075175275375475575675775875976076176276376476576676776876977077177277377477577677777877978078178278378478578678778878979079179279379479579679779879980080180280380480580680780880981081181281381481581681781881982082182282382482582682782882983083183283383483583683783883984084184284384484584684784884985085185285385485585685785885986086186286386486586686786886987087187287387487587687787887988088188288388488588688788888989089189289389489589689789889990090190290390490590690790890991091191291391491591691791891992092192292392492592692792892993093193293393493593693793893994094194294394494594694794894995095195295395495595695795895996096196296396496596696796896997097197297397497597697797897998098198298398498598698798898999099199299399499599699799899910001001100210031004100510061007100810091010101110121013101410151016101710181019102010211022102310241025102610271028102910301031103210331034103510361037103810391040104110421043104410451046104710481049105010511052105310541055105610571058105910601061106210631064106510661067106810691070107110721073107410751076107710781079108010811082108310841085108610871088108910901091109210931094109510961097109810991100110111021103110411051106110711081109111011111112111311141115111611171118111911201121112211231124112511261127112811291130113111321133113411351136113711381139114011411142114311441145114611471148114911501151115211531154115511561157115811591160116111621163116411651166116711681169117011711172117311741175117611771178117911801181118211831184118511861187118811891190119111921193119411951196119711981199120012011202120312041205120612071208120912101211121212131214121512161217121812191220122112221223122412251226122712281229123012311232123312341235123612371238123912401241124212431244124512461247124812491250125112521253125412551256125712581259126012611262126312641265126612671268126912701271127212731274127512761277127812791280128112821283128412851286128712881289129012911292129312941295129612971298129913001301130213031304130513061307130813091310131113121313131413151316131713181319132013211322132313241325132613271328132913301331133213331334133513361337133813391340134113421343134413451346134713481349135013511352135313541355135613571358135913601361136213631364136513661367136813691370137113721373137413751376137713781379138013811382138313841385138613871388138913901391139213931394139513961397139813991400140114021403140414051406140714081409141014111412141314141415141614171418141914201421142214231424142514261427142814291430143114321433143414351436143714381439144014411442144314441445144614471448144914501451145214531454145514561457145814591460146114621463146414651466146714681469147014711472147314741475147614771478147914801481148214831484148514861487148814891490149114921493149414951496149714981499150015011502150315041505150615071508150915101511151215131514151515161517151815191520152115221523152415251526152715281529153015311532153315341535153615371538153915401541154215431544154515461547154815491550155115521553155415551556155715581559156015611562156315641565156615671568156915701571157215731574157515761577157815791580158115821583158415851586158715881589159015911592159315941595159615971598159916001601160216031604160516061607160816091610161116121613161416151616161716181619162016211622162316241625162616271628162916301631163216331634163516361637163816391640164116421643164416451646164716481649165016511652165316541655165616571658165916601661166216631664166516661667
  1. using System;
  2. using System.Collections.Generic;
  3. using System.IO.Ports;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.Common.DeviceData;
  9. using Aitex.Core.RT.DataCenter;
  10. using Aitex.Core.RT.Device;
  11. using Aitex.Core.RT.Device.Unit;
  12. using Aitex.Core.RT.Event;
  13. using Aitex.Core.RT.Log;
  14. using Aitex.Core.RT.OperationCenter;
  15. using Aitex.Core.RT.SCCore;
  16. using Aitex.Core.Util;
  17. using MECF.Framework.Common.CommonData;
  18. using MECF.Framework.Common.Communications;
  19. using MECF.Framework.Common.Device.Bases;
  20. using MECF.Framework.Common.Equipment;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Common;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
  24. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
  25. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.TazmoRobot
  26. {
  27. public enum TazmoRobotState
  28. {
  29. Standby = 0,
  30. TPInUse = 1,
  31. InOperation = 2,
  32. Running,
  33. Pause = 7,
  34. Initializing = 9,
  35. StandbyDueToUnInit = 0X10,
  36. RecoverabelErrorWithoutInit = 0X20,
  37. ErrorRequiredInit = 0xA0,
  38. ErrorRequiredPowerCycle = 0xC0,
  39. }
  40. public enum TazmoRobotPositionEnum
  41. {
  42. UnloadLoad,
  43. Mapping,
  44. }
  45. public enum TazmoRobotArmExtensionEnum
  46. {
  47. PositionToPull,
  48. ArmExtension,
  49. }
  50. public enum TazmoRobotWorkPresenceInfoEnum
  51. {
  52. NoWork,
  53. WorkExists,
  54. }
  55. public enum TazmoRobotGripPostionInfoEnum
  56. {
  57. Close,
  58. Oepn,
  59. WorkIsGripped,
  60. PostionUnknow = 0xF,
  61. }
  62. public enum TazmoRobotZPositionInfo
  63. {
  64. Down = 1,
  65. MidDown,
  66. Mid,
  67. MidUp,
  68. Up,
  69. Unknow = 0xF,
  70. }
  71. public class TazmoRobot : RobotBaseDevice, IConnection
  72. {
  73. private bool isSimulatorMode
  74. {
  75. get
  76. {
  77. return SC.ContainsItem("System.IsSimulatorMode") ? SC.GetValue<bool>("System.IsSimulatorMode") : false;
  78. }
  79. }
  80. private string _scRoot;
  81. public TazmoRobotState DeviceState { get; private set; }
  82. public bool TaExecuteSuccss { get; set; }
  83. private TazmoRobotConnection _connection;
  84. public TazmoRobotConnection Connection => _connection;
  85. private R_TRIG _trigError = new R_TRIG();
  86. private R_TRIG _trigWarningMessage = new R_TRIG();
  87. private R_TRIG _trigCommunicationError = new R_TRIG();
  88. private R_TRIG _trigRetryConnect = new R_TRIG();
  89. private PeriodicJob _thread;
  90. private static Object _locker = new Object();
  91. private LinkedList<HandlerBase> _lstHandler = new LinkedList<HandlerBase>();
  92. private IoSensor _diRobotReady = null; //Normal ON
  93. private IoSensor _diRobotBlade1WaferOn = null; //Off when wafer present
  94. private IoSensor _diRobotBlade2WaferOn = null;
  95. private IoSensor _diRobotError = null; //Normal ON
  96. private IoSensor _diTPinUse = null;
  97. private IoSensor _diRobotArmPos = null;
  98. private IoSensor _diRobotMove = null;
  99. private IoSensor _diRobotHome = null;
  100. private IoTrigger _doRobotHold = null; // Normal ON
  101. private IoTrigger _doRobotIn1 = null; // Normal ON
  102. private bool _enableLog = true;
  103. private bool _commErr = false;
  104. private string _address;
  105. public int CurrentStopPositionPoint { get; private set; }
  106. public int CurrentSlotNumber { get; private set; }
  107. public TazmoRobotPositionEnum CurrentPositionCate { get; private set; }
  108. public TazmoRobotArmExtensionEnum CurrentArmExtensionPos { get; private set; }
  109. //public TazmoRobotWorkPresenceInfoEnum CurrentWorkPresnece { get; private set; }
  110. public TazmoRobotWorkPresenceInfoEnum CurrentArm1WorkPresnece { get; private set; }
  111. public TazmoRobotWorkPresenceInfoEnum CurrentArm2WorkPresnece { get; private set; }
  112. public TazmoRobotGripPostionInfoEnum CurrentArm1GripperPosition { get; private set; }
  113. public TazmoRobotGripPostionInfoEnum CurrentArm2GripperPosition { get; private set; }
  114. public TazmoRobotZPositionInfo CurrentZpositionCate { get; private set; }
  115. public int R1AxisPosition { get; private set; }
  116. public int R2AxisPosition { get; private set; }
  117. public int ZAxisPosition { get; private set; }
  118. public int SAxisPosition { get; private set; }
  119. public string RobotSystemVersion { get; private set; }
  120. public string RobotSoftwareVersion { get; private set; }
  121. private string commasymbol = ",";
  122. private DateTime _dtActionStart;
  123. public string PortName { get; private set; }
  124. public TazmoRobot(string module, string name, string scRoot, IoSensor[] dis, IoTrigger[] dos) : base(module, name)
  125. {
  126. _scRoot = scRoot;
  127. //base.Initialize();
  128. ResetPropertiesAndResponses();
  129. RegisterSpecialData();
  130. RegisterAlarm();
  131. if (dis != null && dis.Length >= 8)
  132. {
  133. _diRobotReady = dis[0];
  134. _diRobotBlade1WaferOn = dis[1];
  135. _diRobotBlade2WaferOn = dis[2];
  136. _diRobotError = dis[3];
  137. _diTPinUse = dis[4];
  138. _diRobotArmPos = dis[5];
  139. _diRobotMove = dis[6];
  140. _diRobotHome = dis[7];
  141. _diRobotError.OnSignalChanged += _diRobotError_OnSignalChanged;
  142. _diRobotMove.OnSignalChanged += _diRobotMove_OnSignalChanged;
  143. //_diTPinUse.OnSignalChanged += _diTPinUse_OnSignalChanged;
  144. }
  145. if (dos != null && dos.Length >= 1)
  146. {
  147. _doRobotIn1 = dos[0];
  148. if (_doRobotIn1 != null)
  149. _doRobotIn1.SetTrigger(true, out _);
  150. }
  151. int bautRate = SC.GetValue<int>($"{scRoot}.{Name}.BaudRate");
  152. int dataBits = SC.GetValue<int>($"{scRoot}.{Name}.DataBits");
  153. Enum.TryParse(SC.GetStringValue($"{scRoot}.{Name}.Parity"), out Parity parity);
  154. Enum.TryParse(SC.GetStringValue($"{scRoot}.{Name}.StopBits"), out StopBits stopBits);
  155. _enableLog = SC.GetValue<bool>($"{scRoot}.{Name}.EnableLogMessage");
  156. PortName = SC.GetStringValue($"{scRoot}.{Name}.PortName");
  157. Address = PortName;
  158. _connection = new TazmoRobotConnection(this, PortName, bautRate, dataBits, parity, stopBits);
  159. _connection.EnableLog(_enableLog);
  160. if (_connection.Connect())
  161. {
  162. EV.PostInfoLog(Module, $"{Module}.{Name} connected");
  163. IsConnected = true;
  164. }
  165. _thread = new PeriodicJob(100, OnTimer, $"{Module}.{Name} MonitorHandler", true);
  166. //_address = SC.GetStringValue($"{_scRoot}.{Name}.DeviceAddress");
  167. ConnectionManager.Instance.Subscribe($"{Name}", this);
  168. }
  169. public void ParseAxisPosition(string data)
  170. {
  171. try
  172. {
  173. string[] datas = data.Replace("\r", "").Split(',');
  174. switch (datas[0])
  175. {
  176. case "001":
  177. R1AxisPosition = Convert.ToInt32(datas[2]);
  178. break;
  179. case "002":
  180. R2AxisPosition = Convert.ToInt32(datas[2]);
  181. break;
  182. case "040":
  183. ZAxisPosition = Convert.ToInt32(datas[2]);
  184. break;
  185. case "080":
  186. SAxisPosition = Convert.ToInt32(datas[2]);
  187. break;
  188. }
  189. }
  190. catch(Exception ex)
  191. {
  192. LOG.Write(ex);
  193. }
  194. }
  195. private void _diRobotMove_OnSignalChanged(IoSensor arg1, bool arg2)
  196. {
  197. }
  198. private void _diRobotError_OnSignalChanged(IoSensor arg1, bool arg2)
  199. {
  200. if (arg2)
  201. {
  202. lock (_locker)
  203. {
  204. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "STA", ""));
  205. }
  206. OnError("RobotError");
  207. }
  208. }
  209. public void ParseStatus(string state)
  210. {
  211. int statecode = Convert.ToInt32(state, 16);
  212. if (statecode <= 0x10) DeviceState = (TazmoRobotState)statecode;
  213. else
  214. {
  215. ErrorCode = statecode.ToString("X3");
  216. EV.Notify($"{Name}Error{ErrorCode}");
  217. OnError("RobotError");
  218. }
  219. if (statecode >= 0x20 && statecode <= 0x99) DeviceState = TazmoRobotState.RecoverabelErrorWithoutInit;
  220. if (statecode >= 0xA0 && statecode <= 0xBF) DeviceState = TazmoRobotState.ErrorRequiredInit;
  221. if (statecode > 0xC0 && statecode <= 0xFF) DeviceState = TazmoRobotState.ErrorRequiredPowerCycle;
  222. }
  223. public void ParseStatusAndPostion(string cmd,string statedata)
  224. {
  225. string[] data = statedata.Split(',');
  226. switch(cmd)
  227. {
  228. case "WCH":
  229. case "VCH":
  230. if(data[0] == "1") CurrentArm1WorkPresnece = (TazmoRobotWorkPresenceInfoEnum)Convert.ToInt32(data[1]);
  231. if(data[0] == "2") CurrentArm2WorkPresnece = (TazmoRobotWorkPresenceInfoEnum)Convert.ToInt32(data[1]);
  232. break;
  233. case "STA":
  234. if (data.Length != 10)
  235. {
  236. EV.PostAlarmLog("System", "Received invalid status and postion data:" + statedata);
  237. return;
  238. }
  239. ParseStatus(data[0]);
  240. CurrentStopPositionPoint = Convert.ToInt32(data[1]);
  241. CurrentSlotNumber = Convert.ToInt32(data[2]);
  242. CurrentPositionCate = (TazmoRobotPositionEnum)Convert.ToInt32(data[3]);
  243. CurrentArmExtensionPos = (TazmoRobotArmExtensionEnum)Convert.ToInt32(data[4]);
  244. CurrentArm1WorkPresnece = (TazmoRobotWorkPresenceInfoEnum)Convert.ToInt32(data[5]);
  245. CurrentArm2WorkPresnece = (TazmoRobotWorkPresenceInfoEnum)Convert.ToInt32(data[6]);
  246. CurrentArm1GripperPosition = (TazmoRobotGripPostionInfoEnum)Convert.ToInt32(data[7]);
  247. CurrentArm2GripperPosition = (TazmoRobotGripPostionInfoEnum)Convert.ToInt32(data[8]);
  248. CurrentZpositionCate = (TazmoRobotZPositionInfo)Convert.ToInt32(data[9],16);
  249. break;
  250. }
  251. }
  252. public void ParseAllStageSpeed(string statedata)
  253. {
  254. string[] data = statedata.Split(',');
  255. if (data.Length != 10)
  256. {
  257. // EV.PostAlarmLog("System", "Received Query Speed data:" + statedata);
  258. return;
  259. }
  260. ParseStatus(data[0]);
  261. Speed = Convert.ToInt32(data[3]);
  262. }
  263. private void RegisterAlarm()
  264. {
  265. EV.Subscribe(new EventItem(60011, "Alarm", $"{Name}Error", $"{Name} Occurred Error", EventLevel.Alarm, EventType.EventUI_Notify));
  266. for(int i = 0x20;i<=0x99; i++)
  267. {
  268. string errorcode = i.ToString("X3");
  269. EV.Subscribe(new EventItem(64000 +i, "Alarm", $"{Name}Error{errorcode}", $"{Name} Occurred recoverable error without initialization,code:{errorcode}.", EventLevel.Alarm, EventType.EventUI_Notify));
  270. }
  271. for (int i = 0xA0; i <= 0xB0; i++)
  272. {
  273. EV.Subscribe(new EventItem(64000 + i, "Alarm", $"{Name}Error{i.ToString("X3")}", $"{Name} Occurred error require initialization,code:{i.ToString("X3")}.", EventLevel.Alarm, EventType.EventUI_Notify));
  274. }
  275. for (int i = 0xC0; i <= 0xFF; i++)
  276. {
  277. EV.Subscribe(new EventItem(64000 + i, "Alarm", $"{Name}Error{i.ToString("X3")}", $"{Name} Occurred error require power again,code:{i.ToString("X3")}.", EventLevel.Alarm, EventType.EventUI_Notify));
  278. }
  279. }
  280. private void RegisterSpecialData()
  281. {
  282. DATA.Subscribe($"{Name}.TazmoStatus", () => DeviceState.ToString());
  283. DATA.Subscribe($"{Name}.CurrentStopPositionPoint", () => CurrentStopPositionPoint.ToString());
  284. DATA.Subscribe($"{Name}.CurrentSlotNumber", () => CurrentSlotNumber.ToString());
  285. DATA.Subscribe($"{Name}.CurrentPositionCate", () => CurrentPositionCate.ToString());
  286. DATA.Subscribe($"{Name}.CurrentArmExtensionPos", () => CurrentArmExtensionPos.ToString());
  287. DATA.Subscribe($"{Name}.CurrentArm1WorkPresnece", () => CurrentArm1WorkPresnece.ToString());
  288. DATA.Subscribe($"{Name}.CurrentArm2WorkPresnece", () => CurrentArm2WorkPresnece.ToString());
  289. DATA.Subscribe($"{Name}.CurrentArm1GripperPosition", () => CurrentArm1GripperPosition.ToString());
  290. DATA.Subscribe($"{Name}.CurrentArm2GripperPosition", () => CurrentArm2GripperPosition.ToString());
  291. DATA.Subscribe($"{Name}.CurrentZpositionCate", () => CurrentZpositionCate.ToString());
  292. DATA.Subscribe($"{Name}.R1AxisPosition", () => R1AxisPosition.ToString());
  293. DATA.Subscribe($"{Name}.R2AxisPosition", () => R2AxisPosition.ToString());
  294. DATA.Subscribe($"{Name}.ZAxisPosition", () => ZAxisPosition.ToString());
  295. DATA.Subscribe($"{Name}.SAxisPosition", () => SAxisPosition.ToString());
  296. OP.Subscribe(String.Format("{0}.{1}", Name, "StartJog"), (out string reason, int time, object[] param) =>
  297. {
  298. string axis = param[0].ToString();
  299. bool direction = (bool)param[1];
  300. bool ret = ExecuteRobotJog(axis,direction);
  301. if (ret)
  302. {
  303. reason = string.Format("{0} {1}", Name, "start jog succesfully");
  304. return true;
  305. }
  306. reason = $"{Name} start jog failed";
  307. return false;
  308. });
  309. OP.Subscribe(String.Format("{0}.{1}", Name, "StopJog"), (out string reason, int time, object[] param) =>
  310. {
  311. bool ret = ExecuteRobotStopJog();
  312. if (ret)
  313. {
  314. reason = string.Format("{0} {1}", Name, "Stop jog succesfully");
  315. return true;
  316. }
  317. reason = $"{Name} Stop jog failed";
  318. return false;
  319. });
  320. }
  321. private bool ExecuteRobotJog(string axis, bool direction)
  322. {
  323. if (RobotState != RobotStateEnum.Idle) return false;
  324. lock (_locker)
  325. {
  326. string parameter = $"{axis},{(direction ? "0" : "1")},0";
  327. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "JOG", parameter));
  328. }
  329. return true;
  330. }
  331. private bool ExecuteRobotStopJog()
  332. {
  333. if (RobotState != RobotStateEnum.Idle) return false;
  334. lock (_locker)
  335. {
  336. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "JSP",null));
  337. }
  338. return true;
  339. }
  340. private void ResetPropertiesAndResponses()
  341. {
  342. }
  343. private bool OnTimer()
  344. {
  345. try
  346. {
  347. _connection.MonitorTimeout();
  348. if (!_connection.IsConnected || _connection.IsCommunicationError)
  349. {
  350. lock (_locker)
  351. {
  352. _lstHandler.Clear();
  353. }
  354. _trigRetryConnect.CLK = !_connection.IsConnected;
  355. if (_trigRetryConnect.Q)
  356. {
  357. _connection.SetPortAddress(SC.GetStringValue($"{Name}.Address"));
  358. if (!_connection.Connect())
  359. {
  360. EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}");
  361. }
  362. }
  363. return true;
  364. }
  365. HandlerBase handler = null;
  366. if (!_connection.IsBusy)
  367. {
  368. lock (_locker)
  369. {
  370. if (_lstHandler.Count == 0)
  371. {
  372. }
  373. if (_lstHandler.Count > 0)
  374. {
  375. handler = _lstHandler.First.Value;
  376. if (handler != null) _connection.Execute(handler);
  377. _lstHandler.RemoveFirst();
  378. }
  379. }
  380. }
  381. }
  382. catch (Exception ex)
  383. {
  384. LOG.Write(ex);
  385. }
  386. return true;
  387. }
  388. public string Address { get; private set; }
  389. public bool IsConnected { get; private set; }
  390. public bool Connect()
  391. {
  392. return _connection.Connect();
  393. }
  394. public bool Disconnect()
  395. {
  396. return _connection.Disconnect();
  397. }
  398. public bool ParseReadData(string _command, string[] rdata)
  399. {
  400. try
  401. {
  402. if (_command.Equals("RMP"))
  403. {
  404. ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), rdata[0].ToString());
  405. CurrentSlotMap = rdata[2].ToString();
  406. }
  407. return true;
  408. }
  409. catch (Exception ex)
  410. {
  411. LOG.Write(ex);
  412. return true;
  413. }
  414. }
  415. public string CurrentSlotMap { get; private set; }
  416. public override bool IsReady()
  417. {
  418. if (_diRobotError != null && _diRobotError.Value)
  419. return false;
  420. //if (_diTPinUse != null && !_diTPinUse.Value)
  421. // return false;
  422. return RobotState == RobotStateEnum.Idle && !IsBusy;
  423. }
  424. public virtual bool ResetCPU(out string reason)
  425. {
  426. lock (_locker)
  427. {
  428. _lstHandler.Clear();
  429. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "CPI", ""));
  430. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "STA", ""));
  431. }
  432. reason = "";
  433. return true;
  434. }
  435. protected override bool fStop(object[] param)
  436. {
  437. lock (_locker)
  438. {
  439. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "PAU", null));
  440. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this,"STA", null));
  441. }
  442. return true;
  443. }
  444. protected override bool fError(object[] param)
  445. {
  446. return true;
  447. }
  448. public override bool SetSpeed(object[] param)
  449. {
  450. if (!IsReady()) return false;
  451. Int32 speedvalue;
  452. if (!Int32.TryParse(param[0].ToString(), out speedvalue)) return false;
  453. if (SC.ContainsItem($"Robot.{RobotModuleName}.RobotSpeed"))
  454. {
  455. SC.SetItemValue($"Robot.{RobotModuleName}.RobotSpeed", speedvalue);
  456. }
  457. var p1 = speedvalue;
  458. var p2 = speedvalue;
  459. var p3 = speedvalue;
  460. var p4 = speedvalue;
  461. var p5 = speedvalue;
  462. var p6 = speedvalue;
  463. var p7 = speedvalue;
  464. var p8 = speedvalue;
  465. var p9 = speedvalue;
  466. var p10 = speedvalue;
  467. var p11 = speedvalue;
  468. var p12 = speedvalue;
  469. var p13 = speedvalue;
  470. string para1 = $"0,2,{p1},{p2},{p3},{p4},{p5},{p6},{p7},{p8},{p9},{p10},{p11},{p12},{p13}";
  471. lock (_locker)
  472. {
  473. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "DWL", para1));
  474. }
  475. return true;
  476. }
  477. protected override bool fStartSetParameters(object[] param)
  478. {
  479. _dtActionStart = DateTime.Now;
  480. try
  481. {
  482. string strParameter;
  483. string setcommand = param[0].ToString();
  484. switch (setcommand)
  485. {
  486. case "RobotSpeed": // SSPD Set the motion speed
  487. Int32 speedvalue;
  488. if (!Int32.TryParse(param[1].ToString(), out speedvalue)) return false;
  489. if (SC.ContainsItem($"Robot.{RobotModuleName}.RobotSpeed"))
  490. {
  491. SC.SetItemValue($"Robot.{RobotModuleName}.RobotSpeed", speedvalue);
  492. }
  493. var p1 = speedvalue;
  494. var p2 = speedvalue;
  495. var p3 = speedvalue;
  496. var p4 = speedvalue;
  497. var p5 = speedvalue;
  498. var p6 = speedvalue;
  499. var p7 = speedvalue;
  500. var p8 = speedvalue;
  501. var p9 = speedvalue;
  502. var p10 = speedvalue;
  503. var p11 = speedvalue;
  504. var p12 = speedvalue;
  505. var p13 = speedvalue;
  506. string para1 = $"0,2,{p1},{p2},{p3},{p4},{p5},{p6},{p7},{p8},{p9},{p10},{p11},{p12},{p13}";
  507. lock (_locker)
  508. {
  509. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "DWL", para1));
  510. }
  511. break;
  512. }
  513. }
  514. catch (Exception)
  515. {
  516. string reason = "";
  517. if (param != null)
  518. {
  519. foreach (var para in param)
  520. {
  521. reason += para.ToString() + ",";
  522. }
  523. }
  524. EV.PostAlarmLog(Name, "Set command parameter invalid:" + reason);
  525. return false;
  526. }
  527. return true;
  528. }
  529. protected override bool fMonitorSetParamter(object[] param)
  530. {
  531. IsBusy = false;
  532. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  533. {
  534. OnError("SetParameterTimeout");
  535. return true;
  536. }
  537. return _lstHandler.Count == 0 && !_connection.IsBusy;
  538. }
  539. public bool IsPause;
  540. protected override bool fReset(object[] param)
  541. {
  542. _lstHandler.Clear();
  543. _connection.ForceClear();
  544. lock (_locker)
  545. {
  546. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "CER", ""));
  547. if (IsPause)
  548. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "CNT", ""));
  549. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RED", "001,2"));
  550. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RED", "002,2"));
  551. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RED", "040,2"));
  552. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RED", "080,2"));
  553. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "STA", ""));
  554. }
  555. return true;
  556. }
  557. private bool _isNeedWaferConfirm ////0=auto detect,1=down move after release
  558. {
  559. get
  560. {
  561. if (SC.ContainsItem($"{_scRoot}.{RobotModuleName}.NeedWaferConfirm"))
  562. return SC.GetValue<bool>($"{_scRoot}.{RobotModuleName}.NeedWaferConfirm");
  563. return true;
  564. }
  565. }
  566. protected override bool fMonitorReset(object[] param)
  567. {
  568. IsBusy = false;
  569. if( _lstHandler.Count == 0 && !_connection.IsBusy)
  570. {
  571. BladeTarget = ModuleName.System;
  572. Blade1Target = ModuleName.System;
  573. Blade2Target = ModuleName.System;
  574. return true;
  575. }
  576. return false;
  577. }
  578. protected override bool fStartHome(object[] param)
  579. {
  580. lock (_locker)
  581. {
  582. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "HOM",""));
  583. }
  584. _dtActionStart = DateTime.Now;
  585. return true;
  586. }
  587. protected override bool fMonitorHome(object[] param)
  588. {
  589. IsBusy = false;
  590. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  591. {
  592. OnError("Init timeout");
  593. return true;
  594. }
  595. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  596. {
  597. EV.PostInfoLog(RobotModuleName.ToString(), "Home complete.");
  598. BladeTarget = ModuleName.System;
  599. Blade1Target = ModuleName.System;
  600. Blade2Target = ModuleName.System;
  601. CmdTarget = ModuleName.System;
  602. MoveInfo = new RobotMoveInfo()
  603. {
  604. Action = RobotAction.Moving,
  605. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  606. BladeTarget = BuildBladeTarget(),
  607. };
  608. return true;
  609. }
  610. return false;
  611. }
  612. protected override bool fStartInit(object[] param)
  613. {
  614. lock (_locker)
  615. {
  616. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "RST", _isNeedWaferConfirm ? "0" : "1"));
  617. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "1"));
  618. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "2"));
  619. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "STA", ""));
  620. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RED", "001,2"));
  621. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RED", "002,2"));
  622. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RED", "040,2"));
  623. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RED", "080,2"));
  624. }
  625. _dtActionStart = DateTime.Now;
  626. return true;
  627. }
  628. protected override bool fMonitorInit(object[] param)
  629. {
  630. IsBusy = false;
  631. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  632. {
  633. OnError("Init timeout");
  634. return true;
  635. }
  636. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  637. {
  638. EV.PostInfoLog(RobotModuleName.ToString(), "Init complete.");
  639. var waferinfoOnArm1 = WaferManager.Instance.GetWafer(RobotModuleName, 0);
  640. var waferinfoOnArm2 = WaferManager.Instance.GetWafer(RobotModuleName, 1);
  641. if (CurrentArm1WorkPresnece == TazmoRobotWorkPresenceInfoEnum.NoWork && !waferinfoOnArm1.IsEmpty)
  642. {
  643. EV.PostAlarmLog(RobotModuleName.ToString(), "Robot didn't detect wafer on blade1,but it has record.");
  644. }
  645. if (CurrentArm1WorkPresnece == TazmoRobotWorkPresenceInfoEnum.WorkExists && waferinfoOnArm1.IsEmpty)
  646. {
  647. EV.PostAlarmLog(RobotModuleName.ToString(), "Robot detect wafer on blade1, will create wafer.");
  648. WaferManager.Instance.CreateWafer(RobotModuleName, 0, WaferStatus.Normal, Size);
  649. }
  650. if (CurrentArm2WorkPresnece == TazmoRobotWorkPresenceInfoEnum.NoWork && !waferinfoOnArm2.IsEmpty)
  651. {
  652. EV.PostAlarmLog(RobotModuleName.ToString(), "Robot didn't detect wafer on blade2,but it has record.");
  653. }
  654. if (CurrentArm2WorkPresnece == TazmoRobotWorkPresenceInfoEnum.WorkExists && waferinfoOnArm2.IsEmpty)
  655. {
  656. EV.PostAlarmLog(RobotModuleName.ToString(), "Robot detect wafer on blade2, will create wafer.");
  657. WaferManager.Instance.CreateWafer(RobotModuleName, 1, WaferStatus.Normal, Size);
  658. }
  659. BladeTarget = ModuleName.System;
  660. Blade1Target = ModuleName.System;
  661. Blade2Target = ModuleName.System;
  662. CmdTarget = ModuleName.System;
  663. MoveInfo = new RobotMoveInfo()
  664. {
  665. Action = RobotAction.Moving,
  666. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  667. BladeTarget = BuildBladeTarget(),
  668. };
  669. return true;
  670. }
  671. return base.fMonitorInit(param);
  672. }
  673. protected override bool fResetToReady(object[] param)
  674. {
  675. return true;
  676. }
  677. protected override bool fStartExtendForPick(object[] param)
  678. {
  679. return true;
  680. }
  681. protected override bool fStartExtendForPlace(object[] param)
  682. {
  683. return true;
  684. }
  685. protected override bool fStartGoTo(object[] param)
  686. {
  687. try
  688. {
  689. RobotArmEnum arm = (RobotArmEnum)param[0];
  690. ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
  691. var moduleIndex = Chamber2staion(module);
  692. string para1 = moduleIndex;
  693. int slot = (int)param[2] + 1;
  694. para1 += commasymbol + slot.ToString();
  695. para1 += arm == RobotArmEnum.Lower ? commasymbol + "1" : commasymbol + "2";
  696. lock (_locker)
  697. {
  698. if (arm == RobotArmEnum.Lower)
  699. {
  700. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "MTP", para1));
  701. }
  702. if (arm == RobotArmEnum.Upper)
  703. {
  704. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "MTP", para1));
  705. }
  706. }
  707. _dtActionStart = DateTime.Now;
  708. EV.PostInfoLog("Robot", $"{RobotModuleName} start to goto {module}.");
  709. return true;
  710. }
  711. catch (Exception ex)
  712. {
  713. LOG.Write(ex);
  714. return false;
  715. }
  716. }
  717. protected override bool fMonitorGoTo(object[] param)
  718. {
  719. IsBusy = false;
  720. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  721. {
  722. OnError("Goto Postion timeout");
  723. return true;
  724. }
  725. if(_lstHandler.Count == 0 && !_connection.IsBusy)
  726. {
  727. RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
  728. ModuleName sourcemodule = (ModuleName)Enum.Parse(typeof(ModuleName), CurrentParamter[1].ToString());
  729. int SourceslotIndex = (int)CurrentParamter[2];
  730. BladeTarget = sourcemodule;
  731. Blade1Target = sourcemodule;
  732. Blade2Target = sourcemodule;
  733. EV.PostInfoLog("Robot", $"{RobotModuleName} goto {sourcemodule} completed.");
  734. return true;
  735. }
  736. return base.fMonitorGoTo(param);
  737. }
  738. protected override bool fStartGrip(object[] param)
  739. {
  740. _dtActionStart = DateTime.Now;
  741. RobotArmEnum arm = (RobotArmEnum)param[0];
  742. lock (_locker)
  743. {
  744. if (arm == RobotArmEnum.Both)
  745. {
  746. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "VVN", "1"));
  747. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "VVN", "2"));
  748. }
  749. if (arm == RobotArmEnum.Lower)
  750. {
  751. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "VVN", "1"));
  752. }
  753. if (arm == RobotArmEnum.Upper)
  754. {
  755. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "VVN", "2"));
  756. }
  757. }
  758. EV.PostInfoLog("Robot", $"{RobotModuleName} start to grip arm {arm}.");
  759. return true;
  760. }
  761. protected override bool fMonitorGrip(object[] param)
  762. {
  763. IsBusy = false;
  764. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  765. {
  766. OnError("Grip timeout");
  767. return true;
  768. }
  769. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  770. {
  771. RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
  772. EV.PostInfoLog("Robot",$"{RobotModuleName} {arm} grip wafer completed.");
  773. return true;
  774. }
  775. return base.fMonitorGrip(param);
  776. }
  777. protected override bool fStartUnGrip(object[] param)
  778. {
  779. _dtActionStart = DateTime.Now;
  780. RobotArmEnum arm = (RobotArmEnum)param[0];
  781. lock (_locker)
  782. {
  783. if (arm == RobotArmEnum.Both)
  784. {
  785. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "VVF", "1"));
  786. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "VVF", "2"));
  787. }
  788. if (arm == RobotArmEnum.Lower)
  789. {
  790. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "VVF", "1"));
  791. }
  792. if (arm == RobotArmEnum.Upper)
  793. {
  794. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "VVF", "2"));
  795. }
  796. }
  797. EV.PostInfoLog("Robot", $"{RobotModuleName} start to ungrip arm {arm}.");
  798. return true;
  799. }
  800. protected override bool fMonitorUnGrip(object[] param)
  801. {
  802. IsBusy = false;
  803. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  804. {
  805. OnError("Ungrip timeout");
  806. return true;
  807. }
  808. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  809. {
  810. RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
  811. EV.PostInfoLog("Robot", $"{RobotModuleName} {arm} ungrip wafer completed.");
  812. return true;
  813. }
  814. return base.fMonitorGrip(param);
  815. }
  816. protected override bool fStartMapWafer(object[] param)
  817. {
  818. _dtActionStart = DateTime.Now;
  819. ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[0].ToString());
  820. string moduleIndex = Chamber2staion(module);
  821. string para1 = moduleIndex + commasymbol + "0";
  822. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "MAP", para1));
  823. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "RMP", moduleIndex));
  824. if (ModuleHelper.IsLoadPort(module))
  825. {
  826. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
  827. if (lp != null)
  828. lp.NoteTransferStart();
  829. }
  830. BladeTarget = module;
  831. Blade1Target = module;
  832. Blade2Target = module;
  833. CmdTarget = module;
  834. MoveInfo = new RobotMoveInfo()
  835. {
  836. Action = RobotAction.Moving,
  837. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  838. BladeTarget = BuildBladeTarget(),
  839. };
  840. EV.PostInfoLog("Robot", $"{RobotModuleName} start to map station {module}.");
  841. return true;
  842. }
  843. protected override bool fMonitorMap(object[] param)
  844. {
  845. IsBusy = false;
  846. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  847. {
  848. OnError("Map timeout");
  849. return true;
  850. }
  851. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  852. {
  853. ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), CurrentParamter[0].ToString());
  854. if (ModuleHelper.IsLoadPort(module))
  855. {
  856. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
  857. if (lp != null)
  858. lp.NoteTransferStop();
  859. }
  860. EV.PostInfoLog("Robot",$"{RobotModuleName} map {module} completed.");
  861. BladeTarget = ModuleName.System;
  862. Blade1Target = ModuleName.System;
  863. Blade2Target = ModuleName.System;
  864. CmdTarget = ModuleName.System;
  865. MoveInfo = new RobotMoveInfo()
  866. {
  867. Action = RobotAction.Moving,
  868. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  869. BladeTarget = BuildBladeTarget(),
  870. };
  871. NotifySlotMapResult(module, CurrentSlotMap);
  872. return true;
  873. }
  874. return base.fMonitorMap(param);
  875. }
  876. protected override bool fStartPickWafer(object[] param)
  877. {
  878. _dtActionStart = DateTime.Now;
  879. try
  880. {
  881. RobotArmEnum arm = (RobotArmEnum)param[0];
  882. ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
  883. if (ModuleHelper.IsLoadPort(module))
  884. {
  885. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
  886. if (lp != null)
  887. lp.NoteTransferStart();
  888. }
  889. int slot = (int)param[2] + 1;
  890. string moduleIndex = Chamber2staion(module);
  891. if(param.Length >=4 && (bool)param[3] == true)
  892. {
  893. moduleIndex = Chamber2staion(module,true);
  894. }
  895. lock (_locker)
  896. {
  897. if (arm == RobotArmEnum.Lower)
  898. {
  899. ////para1 += ",1";
  900. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "GET", $"{moduleIndex},{slot},1"));
  901. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "1"));
  902. }
  903. if (arm == RobotArmEnum.Upper)
  904. {
  905. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "GET", $"{moduleIndex},{slot},2"));
  906. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "2"));
  907. }
  908. if(arm == RobotArmEnum.Both)
  909. {
  910. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "GET", $"{moduleIndex},{slot},1"));
  911. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "GET", $"{moduleIndex},{slot+1},2"));
  912. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "1"));
  913. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "2"));
  914. }
  915. //_lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "STA", ""));
  916. }
  917. BladeTarget = module;
  918. Blade1Target = module;
  919. Blade2Target = module;
  920. CmdTarget = module;
  921. MoveInfo = new RobotMoveInfo()
  922. {
  923. Action = RobotAction.Moving,
  924. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  925. BladeTarget = BuildBladeTarget(),
  926. };
  927. EV.PostInfoLog("Robot", $"{RobotModuleName} start to pick wafer from {module} slot{slot} with arm:{arm}.");
  928. return true;
  929. }
  930. catch (Exception ex)
  931. {
  932. LOG.Write(ex);
  933. return false;
  934. }
  935. }
  936. protected override bool fMonitorPick(object[] param)
  937. {
  938. IsBusy = false;
  939. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  940. {
  941. OnError("Pick timeout");
  942. return true;
  943. }
  944. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  945. {
  946. RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
  947. ModuleName sourcemodule;
  948. if (!Enum.TryParse(CurrentParamter[1].ToString(), out sourcemodule)) return false;
  949. if (ModuleHelper.IsLoadPort(sourcemodule))
  950. {
  951. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(sourcemodule.ToString());
  952. if (lp != null)
  953. lp.NoteTransferStop();
  954. }
  955. int SourceslotIndex;
  956. if (!int.TryParse(CurrentParamter[2].ToString(), out SourceslotIndex)) return false;
  957. if (arm == RobotArmEnum.Lower)
  958. {
  959. //if(GetWaferState(arm) != RobotArmWaferStateEnum.Present)
  960. //{
  961. // OnError("Wafer detect error");
  962. //}
  963. WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 0);
  964. }
  965. if (arm == RobotArmEnum.Upper)
  966. {
  967. //if(GetWaferState(arm) != RobotArmWaferStateEnum.Present)
  968. //{
  969. // OnError("Wafer detect error");
  970. //}
  971. WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 1);
  972. }
  973. if (arm == RobotArmEnum.Both)
  974. {
  975. //if(GetWaferState(arm) != RobotArmWaferStateEnum.Present)
  976. //{
  977. // OnError("Wafer detect error");
  978. //}
  979. WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 0);
  980. WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex + 1, RobotModuleName, 1);
  981. }
  982. EV.PostInfoLog("Robot", $"{RobotModuleName} pick wafer from {sourcemodule},slot:{SourceslotIndex+1} completed.");
  983. BladeTarget = ModuleName.System;
  984. Blade1Target = ModuleName.System;
  985. Blade2Target = ModuleName.System;
  986. CmdTarget = ModuleName.System;
  987. MoveInfo = new RobotMoveInfo()
  988. {
  989. Action = RobotAction.Moving,
  990. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  991. BladeTarget = BuildBladeTarget(),
  992. };
  993. return true;
  994. }
  995. return base.fMonitorPick(param);
  996. }
  997. protected override bool fStartPlaceWafer(object[] param)
  998. {
  999. _dtActionStart = DateTime.Now;
  1000. RobotArmEnum arm = (RobotArmEnum)param[0];
  1001. ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
  1002. int slot = (int)param[2] + 1;
  1003. if (ModuleHelper.IsLoadPort(module))
  1004. {
  1005. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
  1006. if (lp != null)
  1007. lp.NoteTransferStart();
  1008. }
  1009. string moduleIndex = Chamber2staion(module);
  1010. if (param.Length == 4 && (bool)param[3])
  1011. moduleIndex = Chamber2staion(module,true);
  1012. lock (_locker)
  1013. {
  1014. if (arm == RobotArmEnum.Both)
  1015. {
  1016. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "PUT", $"{moduleIndex},{slot},1"));
  1017. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "PUT", $"{moduleIndex},{slot+1},2"));
  1018. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "1"));
  1019. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "2"));
  1020. }
  1021. if (arm == RobotArmEnum.Lower)
  1022. {
  1023. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "PUT", $"{moduleIndex},{slot},1"));
  1024. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "1"));
  1025. }
  1026. if (arm == RobotArmEnum.Upper)
  1027. {
  1028. // para1 += ",2";
  1029. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "PUT", $"{moduleIndex},{slot},2"));
  1030. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "2"));
  1031. }
  1032. //_lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "STA", ""));
  1033. }
  1034. BladeTarget = module;
  1035. Blade1Target = module;
  1036. Blade2Target = module;
  1037. CmdTarget = module;
  1038. MoveInfo = new RobotMoveInfo()
  1039. {
  1040. Action = RobotAction.Moving,
  1041. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  1042. BladeTarget = BuildBladeTarget(),
  1043. };
  1044. EV.PostInfoLog("Robot", $"{RobotModuleName} start to place wafer to {module} slot{slot} with arm:{arm}.");
  1045. return true;
  1046. }
  1047. protected override bool fMonitorPlace(object[] param)
  1048. {
  1049. IsBusy = false;
  1050. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  1051. {
  1052. OnError("Place timeout");
  1053. return true;
  1054. }
  1055. if (_lstHandler.Count != 0 || _connection.IsBusy) return false;
  1056. RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
  1057. ModuleName sourcemodule;
  1058. if (!Enum.TryParse(CurrentParamter[1].ToString(), out sourcemodule)) return false;
  1059. if(ModuleHelper.IsLoadPort(sourcemodule))
  1060. {
  1061. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(sourcemodule.ToString());
  1062. lp.NoteTransferStop();
  1063. }
  1064. int Sourceslotindex;
  1065. if (!int.TryParse(CurrentParamter[2].ToString(), out Sourceslotindex)) return false;
  1066. if (arm == RobotArmEnum.Lower)
  1067. {
  1068. //if(GetWaferState(arm) != RobotArmWaferStateEnum.Absent)
  1069. //{
  1070. // OnError("Wafer detect error");
  1071. //}
  1072. WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, Sourceslotindex);
  1073. }
  1074. if (arm == RobotArmEnum.Upper)
  1075. {
  1076. //if (GetWaferState(arm) != RobotArmWaferStateEnum.Absent)
  1077. //{
  1078. // OnError("Wafer detect error");
  1079. //}
  1080. WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, Sourceslotindex);
  1081. }
  1082. if (arm == RobotArmEnum.Both)
  1083. {
  1084. //if (GetWaferState(arm) != RobotArmWaferStateEnum.Absent)
  1085. //{
  1086. // OnError("Wafer detect error");
  1087. //}
  1088. WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, Sourceslotindex);
  1089. WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, Sourceslotindex + 1);
  1090. }
  1091. BladeTarget = ModuleName.System;
  1092. Blade1Target = ModuleName.System;
  1093. Blade2Target = ModuleName.System;
  1094. CmdTarget = ModuleName.System;
  1095. MoveInfo = new RobotMoveInfo()
  1096. {
  1097. Action = RobotAction.Moving,
  1098. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  1099. BladeTarget = BuildBladeTarget(),
  1100. };
  1101. EV.PostInfoLog("System", $"{RobotModuleName} place wafer to {sourcemodule} slot {Sourceslotindex+1} with arm {arm}" +
  1102. $" successfully.");
  1103. return true;
  1104. }
  1105. protected override bool fStartReadData(object[] param)
  1106. {
  1107. if (param.Length < 1) return false;
  1108. string readcommand = param[0].ToString();
  1109. switch (readcommand)
  1110. {
  1111. case "CurrentStatus":
  1112. lock (_locker)
  1113. {
  1114. //_lstHandlers.AddLast(new SR100RobotReadHandler(this, "RSTS"));
  1115. //_lstHandlers.AddLast(new SR100RobotReadHandler(this, "RPOS", "F"));
  1116. //_lstHandlers.AddLast(new SR100RobotReadHandler(this, "RPOS", "R"));
  1117. }
  1118. break;
  1119. case "MappingData":
  1120. {
  1121. ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
  1122. string para1 = Chamber2staion(module);
  1123. lock (_locker)
  1124. {
  1125. _lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "MAP", para1));
  1126. }
  1127. }
  1128. break;
  1129. default:
  1130. break;
  1131. }
  1132. return true;
  1133. }
  1134. protected override bool fMonitorReadData(object[] param)
  1135. {
  1136. IsBusy = false;
  1137. return _lstHandler.Count == 0 && !_connection.IsBusy;
  1138. }
  1139. protected override bool fStartRetractFromPick(object[] param)
  1140. {
  1141. throw new NotImplementedException();
  1142. }
  1143. protected override bool fStartRetractFromPlace(object[] param)
  1144. {
  1145. throw new NotImplementedException();
  1146. }
  1147. protected override bool fStartSwapWafer(object[] param)
  1148. {
  1149. _dtActionStart = DateTime.Now;
  1150. try
  1151. {
  1152. RobotArmEnum arm = (RobotArmEnum)param[0];
  1153. ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
  1154. if (ModuleHelper.IsLoadPort(module))
  1155. {
  1156. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
  1157. if (lp != null)
  1158. lp.NoteTransferStart();
  1159. }
  1160. int slot = (int)param[2] + 1;
  1161. string moduleIndex = Chamber2staion(module);
  1162. if (param.Length >= 4 && (bool)param[3] == true)
  1163. {
  1164. moduleIndex = Chamber2staion(module, true);
  1165. }
  1166. lock (_locker)
  1167. {
  1168. if (arm == RobotArmEnum.Lower)
  1169. {
  1170. ////para1 += ",1";
  1171. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "EXG", $"{moduleIndex},{slot},1"));
  1172. }
  1173. if (arm == RobotArmEnum.Upper)
  1174. {
  1175. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "EXG", $"{moduleIndex},{slot},2"));
  1176. }
  1177. if (arm == RobotArmEnum.Both)
  1178. {
  1179. }
  1180. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "1"));
  1181. //_lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "2"));
  1182. //_lstHandler.AddLast(new TazmoRobotSingleTransactionHandler(this, "STA", ""));
  1183. }
  1184. BladeTarget = module;
  1185. Blade1Target = module;
  1186. Blade2Target = module;
  1187. CmdTarget = module;
  1188. MoveInfo = new RobotMoveInfo()
  1189. {
  1190. Action = RobotAction.Moving,
  1191. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  1192. BladeTarget = BuildBladeTarget(),
  1193. };
  1194. EV.PostInfoLog("Robot", $"{RobotModuleName} start to swap wafer from {module} slot{slot} with arm:{arm}.");
  1195. return true;
  1196. }
  1197. catch (Exception ex)
  1198. {
  1199. LOG.Write(ex);
  1200. return false;
  1201. }
  1202. }
  1203. protected override bool fMonitorSwap(object[] param)
  1204. {
  1205. IsBusy = false;
  1206. if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(RobotCommandTimeout))
  1207. {
  1208. OnError("Swap timeout");
  1209. return true;
  1210. }
  1211. if (_lstHandler.Count != 0 || _connection.IsBusy) return false;
  1212. RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
  1213. ModuleName sourcemodule;
  1214. if (!Enum.TryParse(CurrentParamter[1].ToString(), out sourcemodule)) return false;
  1215. int Sourceslotindex;
  1216. if (!int.TryParse(CurrentParamter[2].ToString(), out Sourceslotindex)) return false;
  1217. if (ModuleHelper.IsLoadPort(sourcemodule))
  1218. {
  1219. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(sourcemodule.ToString());
  1220. lp.NoteTransferStop();
  1221. }
  1222. if (arm == RobotArmEnum.Lower)
  1223. {
  1224. //if ( !(GetWaferState(RobotArmEnum.Lower) == RobotArmWaferStateEnum.Present
  1225. // && GetWaferState(RobotArmEnum.Upper) == RobotArmWaferStateEnum.Absent))
  1226. //{
  1227. // OnError("Wafer detect error");
  1228. //}
  1229. WaferManager.Instance.WaferMoved(sourcemodule, Sourceslotindex, RobotModuleName, 0);
  1230. WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, Sourceslotindex);
  1231. }
  1232. if (arm == RobotArmEnum.Upper)
  1233. {
  1234. //if ( !(GetWaferState(RobotArmEnum.Upper) == RobotArmWaferStateEnum.Present &&
  1235. // GetWaferState(RobotArmEnum.Lower) == RobotArmWaferStateEnum.Absent))
  1236. //{
  1237. // OnError("Wafer detect error");
  1238. //}
  1239. WaferManager.Instance.WaferMoved(sourcemodule, Sourceslotindex, RobotModuleName, 1);
  1240. WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, Sourceslotindex);
  1241. }
  1242. BladeTarget = ModuleName.System;
  1243. Blade1Target = ModuleName.System;
  1244. Blade2Target = ModuleName.System;
  1245. CmdTarget = ModuleName.System;
  1246. MoveInfo = new RobotMoveInfo()
  1247. {
  1248. Action = RobotAction.Moving,
  1249. ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
  1250. BladeTarget = BuildBladeTarget(),
  1251. };
  1252. EV.PostInfoLog("Robot", $"{RobotModuleName} swap wafer from {sourcemodule} slot{Sourceslotindex+1} with arm:{arm} completed.");
  1253. return true;
  1254. }
  1255. public override void OnError(string errortext)
  1256. {
  1257. _lstHandler.Clear();
  1258. base.OnError(errortext);
  1259. }
  1260. protected override bool fStartTransferWafer(object[] param)
  1261. {
  1262. return true;
  1263. }
  1264. public override void Reset()
  1265. {
  1266. _trigError.RST = true;
  1267. _connection.SetCommunicationError(false, "");
  1268. _trigCommunicationError.RST = true;
  1269. _enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
  1270. _connection.EnableLog(_enableLog);
  1271. _trigRetryConnect.RST = true;
  1272. //base.Reset();
  1273. }
  1274. public void NoteError(string errortext)
  1275. {
  1276. OnError(errortext);
  1277. }
  1278. public void CheckWaferPresentAndGrip()
  1279. {
  1280. if (GetWaferState(RobotArmEnum.Lower) == RobotArmWaferStateEnum.Present)
  1281. {
  1282. if (WaferManager.Instance.CheckNoWafer(ModuleName.Robot, 0))
  1283. {
  1284. EV.PostWarningLog($"{RobotModuleName}", $"System detec wafer on lower arm, will create wafer automatically.");
  1285. WaferManager.Instance.CreateWafer(ModuleName.Robot, 0, WaferStatus.Normal);
  1286. }
  1287. }
  1288. if (GetWaferState(RobotArmEnum.Lower) == RobotArmWaferStateEnum.Absent)
  1289. {
  1290. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "1"));
  1291. if (WaferManager.Instance.CheckHasWafer(ModuleName.Robot, 0))
  1292. {
  1293. EV.PostWarningLog($"{ModuleName.Robot}", $"System didn't detect wafer on lower arm, but it has record.");
  1294. }
  1295. }
  1296. if (GetWaferState(RobotArmEnum.Upper) == RobotArmWaferStateEnum.Present)
  1297. {
  1298. if (WaferManager.Instance.CheckNoWafer(ModuleName.Robot, 1))
  1299. {
  1300. EV.PostWarningLog($"{ModuleName.Robot}", $"System detect wafer on upper arm, will create wafer automatically.");
  1301. WaferManager.Instance.CreateWafer(ModuleName.Robot, 1, WaferStatus.Normal);
  1302. }
  1303. }
  1304. if (GetWaferState(RobotArmEnum.Upper) == RobotArmWaferStateEnum.Absent)
  1305. {
  1306. _lstHandler.AddLast(new TazmoRobotTwinTransactionHandler(this, "WCH", "2"));
  1307. if (WaferManager.Instance.CheckHasWafer(ModuleName.Robot, 1))
  1308. {
  1309. EV.PostWarningLog($"{ModuleName.Robot}", $"System didn't detect wafer on upper arm, but it has record.");
  1310. }
  1311. }
  1312. }
  1313. public override RobotArmWaferStateEnum GetWaferState(RobotArmEnum arm)
  1314. {
  1315. if (arm == RobotArmEnum.Lower)
  1316. {
  1317. if (_diRobotBlade1WaferOn != null)
  1318. {
  1319. if (_diRobotBlade1WaferOn.Value) return RobotArmWaferStateEnum.Present;
  1320. else return RobotArmWaferStateEnum.Absent;
  1321. }
  1322. return CurrentArm1WorkPresnece== TazmoRobotWorkPresenceInfoEnum.WorkExists ? RobotArmWaferStateEnum.Present : RobotArmWaferStateEnum.Absent;
  1323. }
  1324. if (arm == RobotArmEnum.Upper)
  1325. {
  1326. if (_diRobotBlade2WaferOn != null)
  1327. {
  1328. if (_diRobotBlade2WaferOn.Value) return RobotArmWaferStateEnum.Present;
  1329. else return RobotArmWaferStateEnum.Absent;
  1330. }
  1331. return CurrentArm2WorkPresnece == TazmoRobotWorkPresenceInfoEnum.WorkExists ? RobotArmWaferStateEnum.Present : RobotArmWaferStateEnum.Absent;
  1332. }
  1333. if (arm == RobotArmEnum.Both)
  1334. {
  1335. if (_diRobotBlade1WaferOn != null && _diRobotBlade2WaferOn != null)
  1336. {
  1337. if (_diRobotBlade2WaferOn.Value && _diRobotBlade1WaferOn.Value)
  1338. return RobotArmWaferStateEnum.Present;
  1339. else if (!_diRobotBlade2WaferOn.Value && !_diRobotBlade1WaferOn.Value)
  1340. return RobotArmWaferStateEnum.Absent;
  1341. else return RobotArmWaferStateEnum.Unknown;
  1342. }
  1343. if (CurrentArm1WorkPresnece == TazmoRobotWorkPresenceInfoEnum.WorkExists
  1344. && CurrentArm2WorkPresnece == TazmoRobotWorkPresenceInfoEnum.WorkExists)
  1345. {
  1346. return RobotArmWaferStateEnum.Present;
  1347. }
  1348. if (CurrentArm1WorkPresnece == TazmoRobotWorkPresenceInfoEnum.NoWork
  1349. && CurrentArm1WorkPresnece == TazmoRobotWorkPresenceInfoEnum.NoWork)
  1350. {
  1351. return RobotArmWaferStateEnum.Absent;
  1352. }
  1353. }
  1354. return RobotArmWaferStateEnum.Unknown;
  1355. }
  1356. public override bool OnActionDone(object[] param)
  1357. {
  1358. EV.PostInfoLog("Robot", $"OnActionDone");
  1359. IsBusy = false;
  1360. if (_lstHandler.Count == 0)
  1361. {
  1362. IsBusy = false;
  1363. return base.OnActionDone(param);
  1364. }
  1365. return true;
  1366. }
  1367. protected override bool fClear(object[] param)
  1368. {
  1369. return true;
  1370. }
  1371. private string Chamber2staion(ModuleName chamber, bool flip = false,WaferSize size = WaferSize.WS12)
  1372. {
  1373. if(ModuleHelper.IsLoadPort(chamber))
  1374. {
  1375. var lp = DEVICE.GetDevice<LoadPortBaseDevice>(chamber.ToString());
  1376. int carrierIndex = lp.InfoPadCarrierIndex;
  1377. if (flip)
  1378. return SC.GetStringValue($"CarrierInfo.Carrier{carrierIndex}.{chamber}FlipStation");
  1379. else
  1380. return SC.GetStringValue($"CarrierInfo.Carrier{carrierIndex}.{chamber}FrontStation");
  1381. }
  1382. if (flip)
  1383. return SC.GetStringValue($"CarrierInfo.Size{size.ToString().Replace("WS","")}.{chamber}FlipStation");
  1384. else
  1385. return SC.GetStringValue($"CarrierInfo.Size{size.ToString().Replace("WS", "")}.{chamber}FrontStation");
  1386. }
  1387. private string BuildBladeTarget()
  1388. {
  1389. return (CmdRobotArm == RobotArmEnum.Upper ? "ArmB" : "ArmA") + "." + CmdTarget;
  1390. }
  1391. }
  1392. }