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- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.CommonData;
- using MECF.Framework.Common.Communications;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- using System;
- using System.Collections.Generic;
- using System.Text;
- using System.Threading;
- using EventType = Aitex.Core.RT.Event.EventType;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.Rorze
- {
- public class RorzeRobot751 : RobotBaseDevice, IConnection
- {
-
- private bool isSimulatorMode;
- private string _scRoot;
- public RROpModeEnum CurrentOpMode { get; set; }
- public bool IsOrgshCompleted { get; set; }
- public bool IsCmdProcessing { get; set; }
- public RROpStatusEnum CurrentOpStatus { get; set; }
- public int CurrentOperationSpeed { get; set; } //0:Normal, 1-K Set Speed
- public string CurrentIdCodeForErrorController { get; set; }
- public bool _diEms { get; set; }
- public bool _diTempStop { get; set; }
- public bool _diVacuumPressure { get; set; }
- public bool _diAirSourcePressure { get; set; }
- public bool _diZaxisFan { get; set; }
- public bool _diUpperArmFan { get; set;}
- public bool _diLowerArmFan { get; set; }
- public bool _diUpperFinger1ArmWaferExistence1 { get; set; }
- public bool _diUpperFinger1ArmWaferExistence2 { get; set; }
- public bool _diLowerArmWaferExistence1 { get; set; }
- public bool _diLowerArmWaferExistence2 { get; set; }
- public bool _diTPEms { get; set; }
- public bool _diDeadmanSwitch { get; set; }
- public bool _diModeKey { get; set; }
- public bool IsEnableSeqNo { get; private set; }
- public bool IsEnableCheckSum { get; private set; }
- public int CurrentSeqNo { get; set; }
- public string PortName;
- internal void OnEventReceived(string rawMessage)
- {
- try
- {
- string eventname = rawMessage.Split('.')[1].Split(':')[0];
- string[] data = rawMessage.Split('.')[1].Split(':')[1].Split('/');
- switch (eventname)
- {
- case "STAT":
- ParseSTATStatus(data);
- break;
- case "GPIO":
- ParseDioStatus(data);
- break;
- }
- }
- catch(Exception ex)
- {
- LOG.Write(ex);
- }
- }
- private string _address;
- private bool _enableLog;
- private RorzeRobot751Connection _connection;
- private R_TRIG _trigError = new R_TRIG();
- private R_TRIG _trigCommunicationError = new R_TRIG();
- private R_TRIG _trigRetryConnect = new R_TRIG();
- public string Address => _address;
- private PeriodicJob _thread;
- private object _locker = new object();
- private LinkedList<HandlerBase> _lstHandlers = new LinkedList<HandlerBase>();
- private IoSensor _diRobotReady = null; //Normal ON
- private IoSensor _diRobotBlade1WaferOn = null; //Off when wafer present
- private IoSensor _diRobotBlade2WaferOn = null;
- private IoSensor _diRobotError = null; //Normal ON
- private IoSensor _diTPinUse = null;
- private IoTrigger _doRobotHold = null; // Normal ON
- public ModuleName CurrentInteractiveModule { get; private set; }
- public bool IsConnected => throw new NotImplementedException();
- public bool IsGrippedBlade1 { get; private set; }
- public bool IsGrippedBlade2 { get; private set; }
- public bool IsPermittedInterlock1 { get; private set; }
- public bool IsPermittedInterlock2 { get; private set; }
- public bool IsPermittedInterlock3 { get; private set; }
- public bool IsPermittedInterlock4 { get; private set; }
- public bool IsPermittedInterlock5 { get; private set; }
- public bool IsPermittedInterlock6 { get; private set; }
- public bool IsPermittedInterlock7 { get; private set; }
- public bool IsPermittedInterlock8 { get; private set; }
- public float CurrentThetaPosition { get; private set; }
- public float CurrentExtensionPosition { get; private set; }
- public float CurrentArm1Position { get; private set; }
- public float CurrentArm2Position { get; private set; }
- public float CurrentZPosition { get; private set; }
- public float CommandThetaPosition { get; private set; }
- public float CommandExtensionPosition { get; private set; }
- public float CommandArm1Position { get; private set; }
- public float CommandArm2Position { get; private set; }
- public float CommandZPosition { get; private set; }
- public int SpeedLevel { get; private set; }
- public int SpeedLevelSetting { get; private set; }
- public string ReadMemorySpec { get; private set; }
- public string ReadTransferStation { get; private set; }
- public int ReadSlotNumber { get; private set; }
- public string ReadArmPosture { get; private set; }
- public RobotArmEnum ReadBladeNo { get; private set; }
- public float ReadThetaPosition { get; private set; }
- public float ReadExtensionPosition { get; private set; }
- public float ReadArm1Position { get; private set; }
- public float ReadArm2Position { get; private set; }
- public float ReadZPosition { get; private set; }
- public Dictionary<string, string> ReadStationItemValues { get; private set; } = new Dictionary<string, string>();
- public Dictionary<string, string> ReadStationItemContents { get; private set; } = new Dictionary<string, string>();
- public string ReadParameterType { get; private set; }
- public string ReadParameterNo { get; private set; }
- public string ReadParameterValue { get; private set; }
- public bool IsManipulatorBatteryLow { get; private set; }
- public bool IsCommandExecutionReady { get; private set; }
- public bool IsServoON { get; private set; }
- public bool IsErrorOccurred { get; private set; }
- public bool IsControllerBatteryLow { get; private set; }
- public bool IsCheckInterlockWaferPresenceOnBlade1 { get; private set; }
- public bool IsCheckInterlockWaferPresenceOnBlade2 { get; private set; }
- public bool IsCheckInterlockPAOp { get; private set; }
- public bool IsCheckInterlockPAWaferStatus { get; private set; }
- public bool IsCheckInterlockPAWaferStatusByCCD { get; private set; }
- public string RobotSystemVersion { get; private set; }
- public string RobotSoftwareVersion { get; private set; }
- public string ReadMappingTransferStation { get; private set; }
- public int ReadMappingSlotNumbers { get; private set; }
- public string ReadSlotMap { get; private set; }
- public int RobotBodyNumber { get; private set; }
-
- private DateTime _dtActionStart;
- public RobotArmEnum chcekingArm { get; set; }
-
- public bool ParseComplete;
- public Dictionary<string, float> ReadMappingCalibrationResult { get; private set; }
- public RorzeRobot751(string module, string name, string scRoot, IoSensor[] dis, IoTrigger[] dos) : base(module, name)
- {
- Module = module;
- Name = name;
- isSimulatorMode = SC.ContainsItem("System.IsSimulatorMode") ? SC.GetValue<bool>("System.IsSimulatorMode") : false;
- _scRoot = scRoot;
- _address = SC.GetStringValue($"{_scRoot}.{Name}.Address");
- _enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
- RobotBodyNumber = SC.GetValue<int>($"{_scRoot}.{Name}.BodyNumber");
- SpeedLevelSetting = SC.GetValue<int>($"{_scRoot}.{Name}.SpeedLevel");
- _connection = new RorzeRobot751Connection(this, _address);
- _connection.EnableLog(_enableLog);
-
- if (dis != null && dis.Length >= 5)
- {
- _diRobotReady = dis[0];
- _diRobotBlade1WaferOn = dis[1];
- _diRobotBlade2WaferOn = dis[2];
- _diRobotError = dis[3];
- _diTPinUse = dis[4];
- _diRobotError.OnSignalChanged += _diRobotError_OnSignalChanged;
- _diTPinUse.OnSignalChanged += _diTPinUse_OnSignalChanged;
- }
- if (dos != null && dos.Length >= 1)
- {
- _doRobotHold = dos[0];
- }
- ConnectionManager.Instance.Subscribe($"{Name}", _connection);
- _thread = new PeriodicJob(1, OnTimer, $"{_scRoot}.{Name} MonitorHandler", true);
-
- ResetPropertiesAndResponses();
- RegisterSpecialData();
- RegisterAlarm();
- }
- public void HandlerMotion(string command, string[] pdata)
- {
- switch (command)
- {
- case "MMAP":
- try
- {
-
- StringBuilder sb = new StringBuilder();
- for (int i = 6; i < pdata.Length; i++)
- {
- string value = pdata[i].Substring(3);
- switch (value)
- {
- case "--":
- sb.Append("0");
- break;
- case "OK":
- sb.Append("1");
- break;
- case "CW":
- sb.Append("2");
- break;
- case "DW":
- sb.Append("W");
- break;
- }
- }
- ReadSlotMap = sb.ToString();
- NotifySlotMapResult(CurrentInteractiveModule, ReadSlotMap);
- return;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
-
- }
- break;
- default:
- break;
- }
- }
- private void RegisterAlarm()
- {
- }
- public void NotifyAlarmByErrorCode(string errorcode)
- {
- EV.Notify($"{Name}Error{errorcode}");
- }
- private void _diTPinUse_OnSignalChanged(IoSensor arg1, bool arg2)
- {
- SetMaintenanceMode(!arg1.Value);
- }
- private void _diRobotError_OnSignalChanged(IoSensor arg1, bool arg2)
- {
- if (arg1.Value == false)
- {
- lock (_locker)
- {
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "STAT"));
- }
- OnError("RobotError");
- }
- }
- private void ResetPropertiesAndResponses()
- {
- }
- private void RegisterSpecialData()
- {
- DATA.Subscribe($"{Module}.{Name}.CurrentArm1Position", () => CurrentArm1Position);
- DATA.Subscribe($"{Module}.{Name}.CurrentArm2Position", () => CurrentArm2Position);
- DATA.Subscribe($"{Module}.{Name}.CurrentExtensionPosition", () => CurrentExtensionPosition);
- DATA.Subscribe($"{Module}.{Name}.CurrentThetaPosition", () => CurrentThetaPosition);
- DATA.Subscribe($"{Module}.{Name}.CurrentZPosition", () => CurrentZPosition);
- DATA.Subscribe($"{Module}.{Name}.IsManipulatorBatteryLow", () => IsManipulatorBatteryLow);
- DATA.Subscribe($"{Module}.{Name}.IsCommandExecutionReady", () => IsCommandExecutionReady);
- DATA.Subscribe($"{Module}.{Name}.IsServoON", () => IsServoON);
- DATA.Subscribe($"{Module}.{Name}.IsErrorOccurred", () => IsErrorOccurred);
- DATA.Subscribe($"{Module}.{Name}.IsControllerBatteryLow", () => IsControllerBatteryLow);
- DATA.Subscribe($"{Module}.{Name}.IsWaferPresenceOnBlade1", () => IsWaferPresenceOnBlade1);
- DATA.Subscribe($"{Module}.{Name}.IsWaferPresenceOnBlade2", () => IsWaferPresenceOnBlade2);
- DATA.Subscribe($"{Module}.{Name}.ErrorCode", () => ErrorCode);
- DATA.Subscribe($"{Module}.{Name}.IsGrippedBlade1", () => IsGrippedBlade1);
- DATA.Subscribe($"{Module}.{Name}.IsGrippedBlade2", () => IsGrippedBlade2);
- DATA.Subscribe($"{Module}.{Name}.IsPermittedInterlock1", () => IsPermittedInterlock1);
- DATA.Subscribe($"{Module}.{Name}.IsPermittedInterlock2", () => IsPermittedInterlock2);
- DATA.Subscribe($"{Module}.{Name}.IsPermittedInterlock3", () => IsPermittedInterlock3);
- DATA.Subscribe($"{Module}.{Name}.IsPermittedInterlock4", () => IsPermittedInterlock4);
- DATA.Subscribe($"{Module}.{Name}.IsPermittedInterlock5", () => IsPermittedInterlock5);
- DATA.Subscribe($"{Module}.{Name}.IsPermittedInterlock6", () => IsPermittedInterlock6);
- DATA.Subscribe($"{Module}.{Name}.IsPermittedInterlock7", () => IsPermittedInterlock7);
- DATA.Subscribe($"{Module}.{Name}.IsPermittedInterlock8", () => IsPermittedInterlock8);
- DATA.Subscribe($"{Module}.{Name}.RobotSpeed", () => SpeedLevelSetting.ToString());
- DATA.Subscribe($"{Name}.RobotSpeed", () =>
- {
- return SpeedLevelSetting.ToString();
- });
- OP.Subscribe("SetSpeed", InvokeSetSpeed);
- }
- private bool OnTimer()
- {
- try
- {
- if (!_connection.IsConnected || _connection.IsCommunicationError)
- {
- lock (_locker)
- {
- _lstHandlers.Clear();
- }
- _trigRetryConnect.CLK = !_connection.IsConnected;
- if (_trigRetryConnect.Q)
- {
- if (!_connection.Connect())
- {
- EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}");
- }
- else
- {
- //_lstHandler.AddLast(new RobotHirataR4QueryPinHandler(this, _deviceAddress));
- //_lstHandler.AddLast(new RobotHirataR4SetCommModeHandler(this, _deviceAddress, EnumRfPowerCommunicationMode.Host));
- }
- }
- return true;
- }
- HandlerBase handler = null;
- lock (_locker)
- {
- if (!_connection.IsBusy)
- {
- if (_lstHandlers.Count > 0)
- {
- handler = _lstHandlers.First.Value;
- ExecuteHandler(handler);
- _lstHandlers.RemoveFirst();
- }
- }
- else
- {
- _connection.MonitorTimeout();
- _trigCommunicationError.CLK = _connection.IsCommunicationError;
- if (_trigCommunicationError.Q)
- {
- _lstHandlers.Clear();
- //EV.PostAlarmLog(Module, $"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
- OnError($"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
- //_trigActionDone.CLK = true;
- }
- }
- }
-
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- return true;
- }
- public bool Connect()
- {
- return _connection.Connect();
- }
- public bool Disconnect()
- {
- return _connection.Disconnect();
- }
- public override bool IsReady()
- {
- //if (_diRobotReady!=null && !_diRobotReady.Value)
- // return false;
- if (_diRobotError != null && !_diRobotError.Value)
- return false;
- if (_diTPinUse != null && !_diTPinUse.Value)
- return false;
- return RobotState == RobotStateEnum.Idle && !IsBusy && fsm.CheckExecuted();
- }
- public bool ParseReadData(string _command, string[] rdata)
- {
- try
- {
- switch(_command)
- {
- case "STAT":
- rdata[0] = rdata[0].Split(':')[1];
- ParseSTATStatus(rdata);
- break;
- case "GPIO":
- rdata[0] = rdata[0].Split(':')[1];
- ParseDioStatus(rdata);
- break;
- case "GMAP":
- ParseSlotMap(rdata);
- break;
- case "GCHK":
- ParseWaferPresence(rdata);
- break;
- case "EXST":
- ParseWaferIsPresence(rdata);
- break;
- }
- //if (_command == "RSLV") //Read the speed level
- //{
- // return (rdata.Length == 1 && ParseSpeedLevel(rdata[0]));
- //}
- //if (_command == "RPOS") //Reference current postion
- //{
- // return (rdata.Length > 1 && ParsePositionData(rdata));
- //}
- //if (_command == "RSTP") //Reference registered position, read the save postion for station
- //{
- // return (rdata.Length > 6 && ParseRegisteredPositionData(rdata));
- //}
- //if (_command == "RSTR") //Reference station item value
- //{
- // return (rdata.Length == 4 && ParseStationData(rdata));
- //}
- //if (_command == "RPRM") //Reference the parameter values of the specified unit
- //{
- // return (rdata.Length == 3 && ParseParameterData(rdata));
- //}
- //if (_command == "RMSK") //Reference the interlock information
- //{
- // return (rdata.Length == 1 && ParseInterlockInfo(rdata));
- //}
- //if (_command == "RVER") //Reference the software version
- //{
- // return (rdata.Length == 2 && ParseSoftwareVersion(rdata));
- //}
- //if (_command == "RMAP") //Reference the slot map
- //{
- // return (rdata.Length > 2 && ParseSlotMap(rdata));
- //}
- //if (_command == "RMPD") //reference the mapping data
- //{
- // return (rdata.Length > 1 && ParseMappingData(rdata));
- //}
- //if (_command == "RMCA") // Reference the mapping calibration result
- //{
- // return (rdata.Length > 1 && ParseMappingCalibrationResult(rdata));
- //}
- //if (_command == "RALN") // Reference the alignment result
- //{
- // return true;
- //}
- //if (_command == "RACA") // Reference calibration result for alignment
- //{
- // return true;
- //}
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return true;
- }
- }
- private void ParseDioStatus(string[] rdata)
- {
- var byte1=Convert.ToByte(rdata[0].Substring(12, 2),16);
- var byte2 = Convert.ToByte(rdata[0].Substring(10, 2),16);
- IsWaferPresenceOnBlade1 = ((byte2 >> 2) & 0x01) == 1 && ((byte2 >> 3) & 0x01) == 1;
- IsWaferPresenceOnBlade2 = ((byte1 >> 0) & 0x01) == 1 && ((byte1 >> 1) & 0x01) == 1;
- }
-
- public bool ParseSTATStatus(string[] status)
- {
- try
- {
-
- CurrentOpMode = (RROpModeEnum)int.Parse(status[0].Substring(0,1));
- IsOrgshCompleted = status[0][1] == '1';
- IsCmdProcessing = status[0][2] == '1';
- CurrentOpStatus = (RROpStatusEnum)int.Parse(status[0].Substring(3, 1));
- CurrentOperationSpeed = int.Parse(status[0].Substring(4, 1));
- CurrentIdCodeForErrorController = status[1].Substring(0, 2);
- CurrentIdCodeForErrorController = status[1].Substring(2, 2);
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return true;
- }
- }
- public bool ParseWaferPresence(string[] data)
- {
- try
- {
- var str = data[0].Split(':')[1];
- IsWaferPresenceOnBlade2 = int.Parse(str.Substring(0, 1)) == 0 ? false:true ;
- IsWaferPresenceOnBlade1 = int.Parse(str.Substring(1, 1)) == 0 ? false : true;
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return true;
- }
- }
- public bool ParseWaferIsPresence(string[] data)
- {
- try
- {
- var str = data[0].Split(':')[1];
- if (chcekingArm == RobotArmEnum.Lower)
- {
- IsWaferPresenceOnBlade1 = int.Parse(str.Substring(0, 1)) == 1 ? true : false;
- }
- else if (chcekingArm == RobotArmEnum.Upper)
- {
- IsWaferPresenceOnBlade2 = int.Parse(str.Substring(0, 1)) == 1 ? true : false;
- }
- ParseComplete = true;
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return true;
- }
- }
- public bool ParseSpeedLevel(string speedlevel)
- {
- try
- {
- int level = Convert.ToInt32(speedlevel);
- if (level < 1 || level > 3) return false;
- SpeedLevel = level;
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- public bool ParsePositionData(string[] pdata)
- {
- try
- {
- if (pdata[0] == "R")
- {
- CommandThetaPosition = Convert.ToSingle(pdata[1]) / 1000;
- CommandExtensionPosition = Convert.ToSingle(pdata[2]) / 1000;
- CommandArm1Position = Convert.ToSingle(pdata[3]) / 1000;
- CommandArm2Position = Convert.ToSingle(pdata[4]) / 1000;
- CommandZPosition = Convert.ToSingle(pdata[5]) / 1000;
- return true;
- }
- if (pdata[0] == "F")
- {
- CurrentThetaPosition = Convert.ToSingle(pdata[1]) / 1000;
- PositionAxis1 = CurrentThetaPosition;
- CurrentExtensionPosition = Convert.ToSingle(pdata[2]) / 1000;
- PositionAxis2 = CurrentExtensionPosition;
- CurrentArm1Position = Convert.ToSingle(pdata[3]) / 1000;
- PositionAxis3 = CurrentArm1Position;
- CurrentArm2Position = Convert.ToSingle(pdata[4]) / 1000;
- PositionAxis4 = CurrentArm2Position;
- CurrentZPosition = Convert.ToSingle(pdata[5]) / 1000;
- PositionAxis5 = CurrentZPosition;
- return true;
- }
- return false;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- public bool ParseRegisteredPositionData(string[] pdata)
- {
- return true;
- }
- public bool ParseStationData(string[] pdata)
- {
- try
- {
- ReadMemorySpec = pdata[0];
- ReadTransferStation = pdata[1];
- if (ReadStationItemValues.ContainsKey(pdata[2]))
- ReadStationItemValues.Remove(pdata[2]);
- ReadStationItemValues.Add(pdata[2], pdata[3]);
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- public bool ParseParameterData(string[] pdata)
- {
- try
- {
- ReadParameterType = pdata[0];
- ReadParameterNo = pdata[1];
- ReadParameterValue = pdata[2];
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- public bool ParseInterlockInfo(string[] pdata)
- {
- try
- {
- int intdata = Convert.ToInt16(pdata[0]);
- IsCheckInterlockWaferPresenceOnBlade1 = (intdata & 0x1) == 0;
- IsCheckInterlockWaferPresenceOnBlade2 = (intdata & 0x2) == 0;
- IsCheckInterlockPAOp = (intdata & 0x10) == 0;
- IsCheckInterlockPAWaferStatus = (intdata & 0x20) == 0;
- IsCheckInterlockPAWaferStatusByCCD = (intdata & 0x40) == 0;
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- public bool ParseSoftwareVersion(string[] pdata)
- {
- try
- {
- RobotSystemVersion = pdata[0];
- RobotSoftwareVersion = pdata[1];
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- public bool ParseSlotMap(string[] pdata)
- {
- // n = 0 : Wafer does not exist.
- //1 : Wafer exists.
- //2 : Thickness abnormal(thick)
- //3 : Cross
- //4 : Bow / Lift
- //7 : Multiple wafers
- //8 : Thickness abnormal(thin)
- //9 : Mapping failure
- try
- {
- ReadSlotMap = pdata[0].Replace("2","W").Replace("3","2").Replace("4","?").Replace("7","W").Replace("8","?").Replace("9","?");
- NotifySlotMapResult(CurrentInteractiveModule, ReadSlotMap);
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- public bool ParseMappingData(string[] pdata)
- {
- try
- {
- ReadMappingTransferStation = pdata[0];
- List<string> lstupdata = new List<string>();
- List<string> lstdowndata = new List<string>();
- for (int i = 0; i < (pdata.Length - 1) / 2; i++)
- {
- lstupdata.Add(pdata[2 * i + 1].Remove(0, 3));
- lstdowndata.Add(pdata[2 * i + 2]);
- }
- ReadMappingDownData = lstdowndata.ToArray();
- ReadMappingUpData = lstupdata.ToArray();
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- public bool ParseMappingCalibrationResult(string[] pdata)
- {
- try
- {
- ReadMappingTransferStation = pdata[0];
- ReadMappingCalibrationResult.Clear();
- ReadMappingCalibrationResult.Add("LowestLaySlotPosition", Convert.ToInt32(pdata[1]) / 1000);
- ReadMappingCalibrationResult.Add("HighestLaySlotPosition", Convert.ToInt32(pdata[2]) / 1000);
- ReadMappingCalibrationResult.Add("WaferWidth", Convert.ToInt32(pdata[3]) / 1000);
- ReadMappingCalibrationResult.Add("ThreshhholdValueofDoubleInsertion", Convert.ToInt32(pdata[4]) / 1000);
- ReadMappingCalibrationResult.Add("ThreshhholdValueofSlantingInsertion1", Convert.ToInt32(pdata[5]) / 1000);
- ReadMappingCalibrationResult.Add("ThreshhholdValueofSlantingInsertion2", Convert.ToInt32(pdata[6]) / 1000);
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- protected override bool fClear(object[] param)
- {
- lock (_locker)
- {
- _lstHandlers.Clear();
- _connection.ForceClear();
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "CCLR", "E"));
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "STAT"));
- }
- return true;
- }
-
- protected override bool fStartReadData(object[] param)
- {
- if (param.Length < 1) return false;
- string readcommand = param[0].ToString();
- switch (readcommand)
- {
- case "CurrentStatus":
- lock (_locker)
- {
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "STAT"));
- }
- break;
- case "SignalStatus":
- lock (_locker)
- {
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "GPIO"));
- }
- break;
- case "CheckWaferIsPresence":
- {
- _dtActionStart = DateTime.Now;
- ParseComplete = false;
- IsBusy = true;
- RobotArmEnum arm = chcekingArm = (RobotArmEnum)param[1];
- int interval =Convert.ToInt16(param[2]);
- switch (arm)
- {
- case RobotArmEnum.Lower:
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "EXST", $"(2,{interval})"));
- break;
- case RobotArmEnum.Upper:
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "EXST", $"(1,{interval})"));
- break;
- }
- }
- break;
- case "CheckWaferPresence":
- {
- RobotArmEnum arm = chcekingArm = (RobotArmEnum)param[1];
- switch (arm)
- {
- case RobotArmEnum.Lower:
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "GCHK", "(2)"));
- break;
- case RobotArmEnum.Upper:
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "GCHK", "(1)"));
- break;
- case RobotArmEnum.Both:
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "GCHK", "(3)"));
- break;
- }
- }
- break;
- default:
- break;
- }
- return true;
- }
- protected override bool fMonitorReadData(object[] param)
- {
- var readParameter = CurrentParamter[0].ToString();
- switch (readParameter)
- {
- case "CurrentStatus":
- {
- IsBusy = false;
- }
- break;
- case "SignalStatus":
- {
- IsBusy = false;
- }
- break;
- case "CheckWaferPresence":
- {
- IsBusy = false;
- }
- break;
- case "WaferSize":
- IsBusy = false;
- if (_setSizeArm == RobotArmEnum.Lower || _setSizeArm == RobotArmEnum.Blade1)
- WaferManager.Instance.UpdateWaferSize(RobotModuleName, 0, _setSize);
- if (_setSizeArm == RobotArmEnum.Upper || _setSizeArm == RobotArmEnum.Upper)
- WaferManager.Instance.UpdateWaferSize(RobotModuleName, 1, _setSize);
- if (_setSizeArm == RobotArmEnum.Both)
- {
- WaferManager.Instance.UpdateWaferSize(RobotModuleName, 0, _setSize);
- WaferManager.Instance.UpdateWaferSize(RobotModuleName, 1, _setSize);
- }
- Size = _setSize;
- break;
- case "CheckWaferIsPresence":
- {
-
- if (!ParseComplete)
- {
- if (DateTime.Now - _dtActionStart < TimeSpan.FromSeconds(30))
- {
- //OnError("CheckWaferIsPresence timeout");
- return false;
- }
- else
- {
- ParseComplete = false;
- OnError("CheckWaferIsPresence timeout");
- return true;
- }
- }
- else
- {
- ParseComplete = false;
- IsBusy = false;
- }
- }
- break;
- }
- return true;
- }
- private void ExecuteHandler(HandlerBase handler)
- {
- _connection.Execute(handler);
- }
- private string Checksum(byte[] bytes)
- {
- int sum = 0;
- foreach (byte code in bytes)
- {
- sum += code;
- }
- string hex = String.Format("{0:X2}", sum % 256);
- return hex;
- }
- protected override bool fStartSetParameters(object[] param)
- {
- try
- {
- string strParameter;
- string setcommand = param[0].ToString();
- _setParameter = setcommand;
- switch (setcommand)
- {
- case "RobotSpeed": // SSPD Set the motion speed
- int speedlevel = Convert.ToInt32(param[2]);
- lock (_locker)
- {
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "SSPD", $"(0,{speedlevel})"));
- }
- if (SC.ContainsItem($"{_scRoot}.{Name}.SpeedLevel"))
- {
- SC.SetItemValue($"{_scRoot}.{Name}.SpeedLevel", Convert.ToInt32(speedlevel));
- SpeedLevelSetting = SC.GetValue<int>($"{_scRoot}.{Name}.SpeedLevel");
- }
- break;
- case "TransferSpeedLevel": //SSLV Select the transfer speed level
- string sslvlevel = param[1].ToString();
- int nSpeed = 100;
- if (sslvlevel == "1") nSpeed = 100;
- if (sslvlevel == "2") nSpeed = 50;
- if (sslvlevel == "3") nSpeed = 10;
- if (!"123".Contains(sslvlevel))
- {
- EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sslvlevel);
- return false;
- }
- lock (_locker)
- {
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "SSPD", $"(0,{nSpeed})"));
- }
- if (SC.ContainsItem($"{_scRoot}.{Name}.SpeedLevel"))
- {
- SC.SetItemValue($"{_scRoot}.{Name}.SpeedLevel", Convert.ToInt32(sslvlevel));
- SpeedLevelSetting = SC.GetValue<int>($"{_scRoot}.{Name}.SpeedLevel");
- }
- break;
- case "WaferSize":
- _setSizeArm = (RobotArmEnum)param[1];
- _setSize = (WaferSize)param[2];
- break;
- }
- }
- catch (Exception)
- {
- string reason = "";
- if (param != null)
- {
- foreach (var para in param)
- {
- reason += para.ToString() + ",";
- }
- }
- EV.PostAlarmLog(Name, "Set command parameter invalid:" + reason);
- return false;
- }
- return true;
- }
- private string _setParameter;
- private RobotArmEnum _setSizeArm;
- private WaferSize _setSize;
- protected override bool fMonitorSetParamter(object[] param)
- {
- IsBusy = false;
- switch (_setParameter)
- {
- case "WaferSize":
- if (_setSizeArm == RobotArmEnum.Lower || _setSizeArm == RobotArmEnum.Blade1)
- WaferManager.Instance.UpdateWaferSize(RobotModuleName, 0, _setSize);
- if (_setSizeArm == RobotArmEnum.Upper || _setSizeArm == RobotArmEnum.Upper)
- WaferManager.Instance.UpdateWaferSize(RobotModuleName, 1, _setSize);
- if (_setSizeArm == RobotArmEnum.Both)
- {
- WaferManager.Instance.UpdateWaferSize(RobotModuleName, 0, _setSize);
- WaferManager.Instance.UpdateWaferSize(RobotModuleName, 1, _setSize);
- }
- Size = _setSize;
- break;
- }
- return true;
- }
- protected override bool fStartTransferWafer(object[] param)
- {
- return false;
- }
- protected override bool fStartUnGrip(object[] param)
- {
- lock (_locker)
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- switch(arm)
- {
- case RobotArmEnum.Lower:
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "UCLM", "(2)"));
- break;
- case RobotArmEnum.Upper:
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "UCLM", "(1)"));
- break;
- case RobotArmEnum.Both:
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "UCLM", "(3)"));
- break;
- }
- }
- return true;
- }
- protected override bool fStartGrip(object[] param)
- {
- lock (_locker)
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- switch (arm)
- {
- case RobotArmEnum.Lower:
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "CLMP", "(2)"));
- break;
- case RobotArmEnum.Upper:
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "CLMP", "(1)"));
- break;
- case RobotArmEnum.Both:
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "CLMP", "(3)"));
- break;
- }
- }
- return true;
- }
- protected override bool fStartInit(object[] param)
- {
- SpeedLevelSetting = SC.GetValue<int>($"{_scRoot}.{Name}.SpeedLevel");
- lock (_locker)
- {
- if (_doRobotHold != null)
- {
- _doRobotHold.SetTrigger(true, out _);
- Thread.Sleep(100);
- }
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "EVNT", "(0,1)"));
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "INIT"));
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "MODE","(1,0)"));
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "ORGN","(0,0)"));
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "SSPD", $"(0,{SpeedLevelSetting})"));
- }
- return true;
- }
- protected override bool fStartHome(object[] param)
- {
- SpeedLevelSetting = SC.GetValue<int>($"{_scRoot}.{Name}.SpeedLevel");
- lock (_locker)
- {
- if (_doRobotHold != null)
- {
- _doRobotHold.SetTrigger(true, out _);
- Thread.Sleep(100);
- }
- //_lstHandlers.AddLast(new SR100RobotMotionHandler(this, "CSOL", "F,1,0"));
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "EVNT", "(0,1)"));
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "INIT"));
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "MODE", "(1,0)"));
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "ORGN", "(0,0)"));
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "SSPD", $"(0,{SpeedLevelSetting})"));
- }
- return true;
- }
- protected override bool fStartGoTo(object[] param)
- {
- try
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
- if (ModuleHelper.IsLoadPort(module))
- {
- var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
- if (lp != null)
- lp.NoteTransferStart();
- }
- BladeTarget = module;
- Blade1Target = module;
- Blade2Target = module;
-
- int slot = (int)param[2] + 1;
- int TrsSt = GetStationsName(module);
- int nArm = 0;
- if (arm == RobotArmEnum.Lower)
- nArm = 2;
- if (arm == RobotArmEnum.Upper)
- nArm = 1;
- if (arm == RobotArmEnum.Both)
- nArm = 3;
- if (nArm == 0)
- return false;
-
- RobotPostionEnum postype = (RobotPostionEnum)param[3];
-
- string strCmd = string.Empty;
- int Id = 1;
-
- if (postype == RobotPostionEnum.PickExtend)
- {
- Id = 1;
- strCmd = "EXTD";
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + module.ToString(),
- };
- }
- if (postype == RobotPostionEnum.PickRetracted)
- {
- Id = 1;
- strCmd = "HOME";
-
- }
- if (postype == RobotPostionEnum.PlaceExtend)
- {
- Id = 3;
- strCmd = "EXTD";
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + module.ToString(),
- };
- }
- if (postype == RobotPostionEnum.PlaceRetract)
- {
- Id = 1;
- strCmd = "HOME";
- }
- if (postype == RobotPostionEnum.PickReady)
- {
- Id = 1;
- strCmd = "HOME";
- }
- if (postype == RobotPostionEnum.PlaceReady)
- {
- Id = 2;
- strCmd = "HOME";
- }
- string strpara = $"{Id},{nArm},{TrsSt},{slot}";
-
- //if (postype == RobotPostionEnum.PickReady)
- //{
- // strCmd = "MGT1";
- // var Speed1 = (int)param[4];
- // var ZDistince = (int)param[5];
- // strpara = $"{nArm},{TrsSt},{slot},{Speed1},{ZDistince}";
- //}
- //if (postype == RobotPostionEnum.PlaceReady)
- //{
- // strCmd = "MPT1";
- // var falg1 = (int)param[4];
- // var falg2 = (int)param[5];
- // var Speed1 = (int)param[6];
- // var Speed2 = (int)param[7];
- // var ZDistince = (int)param[8];
- // strpara = $"{nArm},{TrsSt},{slot},{falg1},{falg2},{Speed1},{Speed2},{ZDistince}";
- //}
- lock (_locker)
- {
- lock (_locker)
- {
- if (_lstHandlers.Count == 0 && !_connection.IsBusy)
- {
- ExecuteHandler(new RorzeRobot751MotionHandler(this, strCmd, $"({strpara})"));
- }
- else
- {
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, strCmd, $"({strpara})"));
- }
- }
- }
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- protected override bool fGoToComplete(object[] param)
- {
- try
- {
- RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
- ModuleName sourcemodule = (ModuleName)Enum.Parse(typeof(ModuleName), CurrentParamter[1].ToString());
- int SourceslotIndex = (int)CurrentParamter[2];
- RobotPostionEnum postype = (RobotPostionEnum)CurrentParamter[3];
- switch (postype)
- {
- //case RobotPostionEnum.PickExtend:
- case RobotPostionEnum.PickRetracted:
- BladeTarget = ModuleName.System;
- Blade1Target = ModuleName.System;
- Blade2Target = ModuleName.System;
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + ModuleName.System,
- };
- if (arm == RobotArmEnum.Lower)
- {
- WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- UpdateThicknessType(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- //if (isSimulatorMode || GetWaferState(arm) == RobotArmWaferStateEnum.Present)
- // WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- //else
- // OnError("Wafer detect error");
- }
- if (arm == RobotArmEnum.Upper)
- {
- WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 1);
- UpdateThicknessType(sourcemodule, SourceslotIndex, RobotModuleName, 1);
- //if (isSimulatorMode || GetWaferState(arm) == RobotArmWaferStateEnum.Present)
- // WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 1);
- //else
- // OnError("Wafer detect error");
- }
- if (arm == RobotArmEnum.Both)
- {
- WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- UpdateThicknessType(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 1);
- UpdateThicknessType(sourcemodule, SourceslotIndex, RobotModuleName, 1);
- //if (isSimulatorMode || GetWaferState(arm) == RobotArmWaferStateEnum.Present)
- //{
- // WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- // WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 1);
- //}
- //else
- // OnError("Wafer detect error");
- }
- break;
- //case RobotPostionEnum.PlaceExtend:
- case RobotPostionEnum.PlaceRetract:
- BladeTarget = ModuleName.System;
- Blade1Target = ModuleName.System;
- Blade2Target = ModuleName.System;
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + ModuleName.System,
- };
- if (arm == RobotArmEnum.Lower)
- {
- WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, SourceslotIndex);
- UpdateThicknessType(RobotModuleName, 0, sourcemodule, SourceslotIndex);
- //if (isSimulatorMode || GetWaferState(arm) == RobotArmWaferStateEnum.Absent)
- // WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, SourceslotIndex);
- //else
- // OnError("Wafer detect error");
- }
- if (arm == RobotArmEnum.Upper)
- {
- WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, SourceslotIndex);
- UpdateThicknessType(RobotModuleName, 1, sourcemodule, SourceslotIndex);
- //if (isSimulatorMode || GetWaferState(arm) == RobotArmWaferStateEnum.Absent)
- // WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, SourceslotIndex);
- //else
- // OnError("Wafer detect error");
- }
- if (arm == RobotArmEnum.Both)
- {
- WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, SourceslotIndex);
- UpdateThicknessType(RobotModuleName, 0, sourcemodule, SourceslotIndex);
- WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, SourceslotIndex);
- UpdateThicknessType(RobotModuleName, 1, sourcemodule, SourceslotIndex);
- //if (isSimulatorMode || GetWaferState(arm) == RobotArmWaferStateEnum.Absent)
- //{
- // WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, SourceslotIndex);
- // WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, SourceslotIndex);
- //}
- //else
- // OnError("Wafer detect error");
- }
- break;
- case RobotPostionEnum.PickReady:
- case RobotPostionEnum.PlaceReady:
- {
- BladeTarget = ModuleName.System;
- Blade1Target = ModuleName.System;
- Blade2Target = ModuleName.System;
- if (arm == RobotArmEnum.Lower)
- {
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = RobotArm.ArmA,
- BladeTarget = RobotArm.ArmA+"."+ ModuleName.System.ToString(),
- };
- }
- if (arm == RobotArmEnum.Upper)
- {
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = RobotArm.ArmB,
- BladeTarget = RobotArm.ArmB + "." + ModuleName.System.ToString(),
- };
- }
- }
- break;
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- return base.fGoToComplete(param);
- }
- protected override bool fStop(object[] param)
- {
- lock (_locker)
- {
- if (_doRobotHold != null)
- _doRobotHold.SetTrigger(false, out _);
- _lstHandlers.Clear();
- _connection.ForceClear();
- //ExecuteHandler(new SR100RobotMotionHandler(this, "CSTP", "E"));
- }
- return true; ;
- }
- protected override bool fStartMove(object[] param)
- {
- try
- {
- string strCmd = param[0].ToString();
- string strpara = string.Empty;
- for (int i = 1; i < param.Length; i++)
- {
- if (i == 1)
- strpara += param[i].ToString();
- else
- strpara += "," + param[i].ToString();
- }
- lock (_locker)
- {
- //_lstHandlers.AddLast(new SR100RobotMotionHandler(this, strCmd, strpara));
- //_lstHandlers.AddLast(new SR100RobotReadHandler(this, "RPOS", "F"));
- }
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- private int GetStationsName(ModuleName module)
- {
- try
- {
- if (ModuleHelper.IsLoadPort(module))
- {
- var infopadindex = SC.GetStringValue($"CarrierInfo.{module}ThicknessType") =="THICK"? "0" :"1";
- //int infopadindex = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString()).InfoPadCarrierIndex;
- return SC.GetValue<int>($"CarrierInfo.{module}Station{infopadindex}");
- }
- int nvalue = SC.GetValue<int>($"CarrierInfo.{module}Station");
- return nvalue;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return 0;
- }
- }
- private bool UpdateThicknessType(ModuleName moduleform , int moduleformslot,ModuleName moduleto,int moduletoslot)
- {
- try
- {lock(this)
- {
- if (!ModuleHelper.IsLoadPort(moduleto))
- {
- string type = null;
- if (ModuleHelper.IsRobot(moduleform))
- {
- if (moduleformslot == 0)
- type = SC.GetStringValue($"CarrierInfo.LowerThicknessType");
- else type = SC.GetStringValue($"CarrierInfo.UpperThicknessType");
- SC.SetItemValueFromString($"CarrierInfo.{moduleto}ThicknessType",type);
- }
- else
- {
- type = SC.GetStringValue($"CarrierInfo.{moduleform}ThicknessType");
- if (ModuleHelper.IsRobot(moduleto))
- {
- if (moduletoslot == 0)
- SC.SetItemValueFromString($"CarrierInfo.LowerThicknessType", type);
- else SC.SetItemValueFromString($"CarrierInfo.UpperThicknessType", type);
- }
- else SC.SetItemValueFromString($"CarrierInfo.{moduleto}ThicknessType", type);
- }
- }
- if (!ModuleHelper.IsLoadPort(moduleform))
- {
- if (ModuleHelper.IsRobot(moduleform))
- {
- if (moduleformslot == 0)
- SC.SetItemValueFromString($"CarrierInfo.LowerThicknessType", "NONE");
- else SC.SetItemValueFromString($"CarrierInfo.UpperThicknessType", "NONE");
- }
- else SC.SetItemValueFromString($"CarrierInfo.{moduleform}ThicknessType", "NONE");
- }
- }
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- private int GetSlotsNumber(ModuleName module)
- {
- try
- {
- if (ModuleHelper.IsLoadPort(module))
- {
- return DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString()).ValidSlotsNumber;
- }
- return SC.GetValue<int>($"CarrierInfo.{module}SlotsNumber");
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return -1;
- }
- }
- private bool _isNeedMappignData
- {
- get
- {
- if (SC.ContainsItem($"Robot.{RobotModuleName}.NeedReadMapData"))
- return SC.GetValue<bool>($"Robot.{RobotModuleName}.NeedReadMapData");
- return true;
- }
- }
- protected override bool fStartMapWafer(object[] param)
- {
- try
- {
- //RobotArmEnum pickarm = (RobotArmEnum)param[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[0].ToString());
- BladeTarget = module;
- Blade1Target = module;
- Blade2Target = module;
- int slotsNumber = GetSlotsNumber(module);
- if (slotsNumber == -1)
- {
- EV.PostAlarmLog("Robot", "Invalid mapping paramter slots number");
- return false;
- }
- //int slot = 25;// (int)param[2];
- string strpara = $"({GetStationsName(module)},0,0)";
- lock (_locker)
- {
- CurrentInteractiveModule = module;
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "WMAP", strpara));
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "GMAP"));
- }
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- protected override bool fStartSwapWafer(object[] param)
- {
- try
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
- BladeTarget = module;
- Blade1Target = module;
- Blade2Target = module;
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + module,
- };
- if (ModuleHelper.IsLoadPort(module))
- {
- var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
- if (lp != null)
- lp.NoteTransferStart();
- }
- int slot = (int)param[2] + 1;
-
- int TrsSt = GetStationsName(module);
-
- int nArm = 0;
- if (arm == RobotArmEnum.Lower)
- nArm = 2;
- if (arm == RobotArmEnum.Upper)
- nArm = 1;
- if (nArm == 0)
- return false;
- string strpara = $"({nArm},{TrsSt},{slot})";
-
- lock (_locker)
- {
- if (_lstHandlers.Count == 0 && !_connection.IsBusy)
- {
- ExecuteHandler(new RorzeRobot751MotionHandler(this, "EXCH", strpara));
- }
- else
- {
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "EXCH", strpara));
- }
- }
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- protected override bool fSwapComplete(object[] param)
- {
- RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
- ModuleName sourcemodule;
- if (!Enum.TryParse(CurrentParamter[1].ToString(), out sourcemodule)) return false;
- int Sourceslotindex;
- if (!int.TryParse(CurrentParamter[2].ToString(), out Sourceslotindex)) return false;
- //int delayCount = 0;
- BladeTarget = ModuleName.System;
- Blade1Target = ModuleName.System;
- Blade2Target = ModuleName.System;
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + ModuleName.System,
- };
- if (arm == RobotArmEnum.Lower)
- {
- //WaferManager.Instance.WaferMoved(sourcemodule, Sourceslotindex, RobotModuleName, 0);
- //WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, Sourceslotindex);
- //while (!isSimulatorMode && !(GetWaferState(RobotArmEnum.Lower) == RobotArmWaferStateEnum.Present
- // && GetWaferState(RobotArmEnum.Upper) == RobotArmWaferStateEnum.Absent))
- //{
- // delayCount++;
- // Thread.Sleep(50);
- // LOG.Write($"{RobotModuleName} delay {delayCount} time to detect wafer");
- // if (delayCount > 100)
- // {
- // OnError("Wafer detect error");
- // return true;
- // }
- //}
- WaferManager.Instance.WaferMoved(sourcemodule, Sourceslotindex, RobotModuleName, 0);
- UpdateThicknessType(sourcemodule, Sourceslotindex, RobotModuleName, 0);
- WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, Sourceslotindex);
- UpdateThicknessType(RobotModuleName, 1, sourcemodule, Sourceslotindex);
- }
- if (arm == RobotArmEnum.Upper)
- {
- //WaferManager.Instance.WaferMoved(sourcemodule, Sourceslotindex, RobotModuleName, 1);
- //WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, Sourceslotindex);
- //delayCount = 0;
- //while (!isSimulatorMode && !(GetWaferState(RobotArmEnum.Upper) == RobotArmWaferStateEnum.Present &&
- // GetWaferState(RobotArmEnum.Lower) == RobotArmWaferStateEnum.Absent))
- //{
- // delayCount++;
- // Thread.Sleep(50);
- // LOG.Write($"{RobotModuleName} delay {delayCount} time to detect wafer");
- // if (delayCount > 100)
- // {
- // OnError("Wafer detect error");
- // return true;
- // }
- //}
- WaferManager.Instance.WaferMoved(sourcemodule, Sourceslotindex, RobotModuleName, 1);
- UpdateThicknessType(sourcemodule, Sourceslotindex, RobotModuleName, 1);
- WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, Sourceslotindex);
- UpdateThicknessType(RobotModuleName, 0, sourcemodule, Sourceslotindex);
- }
- return base.fSwapComplete(param);
- }
- protected override bool fStartPlaceWafer(object[] param)
- {
- try
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
- if (ModuleHelper.IsLoadPort(module))
- {
- var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
- if (lp != null)
- lp.NoteTransferStart();
- }
- BladeTarget = module;
- Blade1Target = module;
- Blade2Target = module;
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + module,
- };
- int slot = (int)param[2] + 1;
-
- int TrsSt = GetStationsName(module);
-
- int nArm = 0;
- if (arm == RobotArmEnum.Lower)
- nArm = 2;
- if (arm == RobotArmEnum.Upper)
- nArm = 1;
- if (arm == RobotArmEnum.Both)
- nArm = 3;
- if (nArm == 0)
- return false;
- string strpara = $"{nArm},{TrsSt},{slot}";
-
- lock (_locker)
- {
- if (_lstHandlers.Count == 0 && !_connection.IsBusy)
- {
- ExecuteHandler(new RorzeRobot751MotionHandler(this, "UNLD", $"({strpara})"));
- }
- else
- {
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "UNLD", $"({strpara})"));
- }
- }
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- protected override bool fPlaceComplete(object[] param)
- {
- RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
- ModuleName sourcemodule;
- if (!Enum.TryParse(CurrentParamter[1].ToString(), out sourcemodule)) return false;
- int Sourceslotindex;
- if (!int.TryParse(CurrentParamter[2].ToString(), out Sourceslotindex)) return false;
- BladeTarget = ModuleName.System;
- Blade1Target = ModuleName.System;
- Blade2Target = ModuleName.System;
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + ModuleName.System,
- };
- if (arm == RobotArmEnum.Lower)
- {
- WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, Sourceslotindex);
- UpdateThicknessType(RobotModuleName, 0, sourcemodule, Sourceslotindex);
- }
- if (arm == RobotArmEnum.Upper)
- {
- WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, Sourceslotindex);
- UpdateThicknessType(RobotModuleName, 1, sourcemodule, Sourceslotindex);
- }
- if (arm == RobotArmEnum.Both)
- {
-
- WaferManager.Instance.WaferMoved(RobotModuleName, 0, sourcemodule, Sourceslotindex);
- UpdateThicknessType(RobotModuleName, 0, sourcemodule, Sourceslotindex);
- WaferManager.Instance.WaferMoved(RobotModuleName, 1, sourcemodule, Sourceslotindex + 1);
- UpdateThicknessType(RobotModuleName, 1, sourcemodule, Sourceslotindex+1);
- }
- return true;
- }
- protected override bool fStartPickWafer(object[] param)
- {
- try
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
- if (ModuleHelper.IsLoadPort(module))
- {
- var lp = DEVICE.GetDevice<LoadPortBaseDevice>(module.ToString());
- if (lp != null)
- lp.NoteTransferStart();
- }
- BladeTarget = module;
- Blade1Target = module;
- Blade2Target = module;
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = (arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString())+ "." + module,
- };
- int slot = (int)param[2] + 1;
- string TrsSt = GetStationsName(module).ToString();
- if (string.IsNullOrEmpty(TrsSt))
- {
- EV.PostAlarmLog("Robot", "Invalid Parameter.");
- return false;
- }
- int nArm = 0;
- if (arm == RobotArmEnum.Lower)
- nArm = 2;
- if (arm == RobotArmEnum.Upper)
- nArm = 1;
- if (arm == RobotArmEnum.Both)
- nArm = 3;
- if (nArm == 0)
- return false;
- string strpara = $"{nArm},{TrsSt},{slot}";
- lock (_locker)
- {
- if (_lstHandlers.Count == 0 && !_connection.IsBusy)
- {
- ExecuteHandler(new RorzeRobot751MotionHandler(this, "LOAD",$"({strpara})"));
- }
- else
- {
- _lstHandlers.AddLast(new RorzeRobot751MotionHandler(this, "LOAD", $"({strpara})"));
- }
- }
- return true;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- return false;
- }
- }
- protected override bool fPickComplete(object[] param)
- {
- RobotArmEnum arm = (RobotArmEnum)CurrentParamter[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), CurrentParamter[1].ToString());
- ModuleName sourcemodule;
- if (!Enum.TryParse(CurrentParamter[1].ToString(), out sourcemodule)) return false;
- int SourceslotIndex;
- if (!int.TryParse(CurrentParamter[2].ToString(), out SourceslotIndex)) return false;
- BladeTarget = ModuleName.System;
- Blade1Target = ModuleName.System;
- Blade2Target = ModuleName.System;
- MoveInfo = new RobotMoveInfo()
- {
- ArmTarget = arm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget =(arm == RobotArmEnum.Lower ? RobotArm.ArmA.ToString() : RobotArm.ArmB.ToString()) + "." + ModuleName.System,
- };
- if (arm == RobotArmEnum.Lower)
- {
- WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- UpdateThicknessType(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- }
- if (arm == RobotArmEnum.Upper)
- {
- WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 1);
- UpdateThicknessType(sourcemodule, SourceslotIndex, RobotModuleName, 1);
- }
- if (arm == RobotArmEnum.Both)
- {
-
- WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- UpdateThicknessType(sourcemodule, SourceslotIndex, RobotModuleName, 0);
- WaferManager.Instance.WaferMoved(sourcemodule, SourceslotIndex + 1, RobotModuleName, 1);
- UpdateThicknessType(sourcemodule, SourceslotIndex+1, RobotModuleName, 1);
- }
- return true;
- }
- protected override bool fResetToReady(object[] param)
- {
- if (_doRobotHold != null)
- _doRobotHold.SetTrigger(true, out _);
- return true;
- }
- protected override bool fReset(object[] param)
- {
- IsBusy = true;
- if (!_connection.IsConnected)
- {
- _address = SC.GetStringValue($"{_scRoot}.{Name}.Address");
- _enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
- _connection = new RorzeRobot751Connection(this, _address);
- _connection.EnableLog(_enableLog);
- _connection.Connect();
- }
- lock (_locker)
- {
- if (_doRobotHold != null)
- _doRobotHold.SetTrigger(true, out _);
- _lstHandlers.Clear();
- _connection.ForceClear();
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "RSTA","(1)"));
- _lstHandlers.AddLast(new RorzeRobot751SetHandler(this, "EVNT","(0,1)"));
- _lstHandlers.AddLast(new RorzeRobot751ReadHandler(this, "STAT"));
- }
- return true;
- }
-
- protected override bool fMonitorReset(object[] param)
- {
- if (_lstHandlers.Count > 0 )
- return false;
- if(IsCmdProcessing) return false;
- IsBusy = false;
- return true;
- }
- protected override bool fError(object[] param)
- {
- return true;
- }
- protected override bool fStartExtendForPick(object[] param)
- {
- return false;
- }
- protected override bool fStartExtendForPlace(object[] param)
- {
- return false;
- }
- protected override bool fStartRetractFromPick(object[] param)
- {
- return false;
- }
- protected override bool fStartRetractFromPlace(object[] param)
- {
- return false;
- }
-
- public override RobotArmWaferStateEnum GetWaferState(RobotArmEnum arm)
- {
- if (arm == RobotArmEnum.Lower)
- {
- if (_diRobotBlade1WaferOn != null)
- {
- if (_diRobotBlade1WaferOn.Value) return RobotArmWaferStateEnum.Absent;
- else return RobotArmWaferStateEnum.Present;
- }
- return IsWaferPresenceOnBlade1 ? RobotArmWaferStateEnum.Present : RobotArmWaferStateEnum.Absent;
- }
- if (arm == RobotArmEnum.Upper)
- {
- if (_diRobotBlade2WaferOn != null)
- {
- if (_diRobotBlade2WaferOn.Value) return RobotArmWaferStateEnum.Absent;
- else return RobotArmWaferStateEnum.Present;
- }
- return IsWaferPresenceOnBlade2 ? RobotArmWaferStateEnum.Present : RobotArmWaferStateEnum.Absent;
- }
- if (arm == RobotArmEnum.Both)
- {
- if (_diRobotBlade1WaferOn != null && _diRobotBlade2WaferOn != null)
- {
- if (_diRobotBlade2WaferOn.Value && _diRobotBlade1WaferOn.Value)
- return RobotArmWaferStateEnum.Absent;
- else if (!_diRobotBlade2WaferOn.Value && !_diRobotBlade1WaferOn.Value)
- return RobotArmWaferStateEnum.Present;
- else return RobotArmWaferStateEnum.Unknown;
- }
- if (IsWaferPresenceOnBlade1 && IsWaferPresenceOnBlade2)
- {
- return RobotArmWaferStateEnum.Present;
- }
- if ((!IsWaferPresenceOnBlade1) && !IsWaferPresenceOnBlade2)
- {
- return RobotArmWaferStateEnum.Absent;
- }
- }
- return RobotArmWaferStateEnum.Unknown;
- }
- public void NoteError(string errortext)
- {
- OnError(errortext);
- }
-
- public override bool OnActionDone(object[] param)
- {
- //BladeTarget = ModuleName.System;
- //Blade1Target = ModuleName.System;
- //Blade2Target = ModuleName.System;
- IsBusy = false;
- ModuleName sourcemodule;
- if (CurrentParamter != null && CurrentParamter.Length > 2 && Enum.TryParse(CurrentParamter[1].ToString(), out sourcemodule))
- {
- if (ModuleHelper.IsLoadPort(sourcemodule))
- {
- var lp = DEVICE.GetDevice<LoadPortBaseDevice>(sourcemodule.ToString());
- if (lp != null)
- lp.NoteTransferStop();
- }
- }
- if (_lstHandlers.Count == 0)
- {
- IsBusy = false;
- return base.OnActionDone(param);
- }
- return true;
- }
- public override void Terminate()
- {
- _thread.Stop();
- if (!SC.ContainsItem($"{_scRoot}.{Name}.CloseConnectionOnShutDown") || SC.GetValue<bool>($"{_scRoot}.{Name}.CloseConnectionOnShutDown"))
- {
- LOG.Write("Close connection for" + RobotModuleName.ToString());
- _connection.Disconnect();
- }
- base.Terminate();
- }
- }
- public enum RROpModeEnum
- {
- Initializing,
- Remote,
- Maitanance,
- Recovery,
- }
- public enum RROpStatusEnum
- {
- Stop,
- Moving,
- TempStop,
- }
-
- }
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