Mag7RobotHandler.cs 45 KB

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  1. using System;
  2. using System.Text;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Sorter.Common;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using System.Text.RegularExpressions;
  8. using Aitex.Core.Common;
  9. using Aitex.Core.RT.Event;
  10. using Aitex.Core.RT.Log;
  11. using MECF.Framework.Common.CommonData;
  12. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.MAG7
  13. {
  14. public class Mag7RobotMotionHandler : ITransferMsg
  15. {
  16. public bool background { get; protected set; }
  17. public bool evt { get { return false; } }
  18. public string deviceID { private get; set; }
  19. public string _cmd = string.Empty;
  20. public IDevice Robot { set { _robot = (Robot)value; } }
  21. protected Robot _robot;
  22. public Mag7RobotMotionHandler()
  23. {
  24. background = false;
  25. }
  26. public virtual string package(params object[] args)
  27. {
  28. return "";
  29. }
  30. public bool unpackage(string type, string[] items)
  31. {
  32. if (type.Equals(ProtocolTag.resp_tag_excute))
  33. {
  34. update(items);
  35. return true;
  36. }
  37. if (type.Equals(ProtocolTag.resp_tag_error))
  38. {
  39. processError(items);
  40. return true;
  41. }
  42. return !background;
  43. }
  44. protected virtual void update(string[] data)
  45. {
  46. }
  47. protected virtual void processError(string[] data)
  48. {
  49. }
  50. }
  51. public class RbHomeHandler : Mag7RobotMotionHandler
  52. {
  53. public RbHomeHandler()
  54. {
  55. background = true;
  56. }
  57. public override string package(params object[] args)
  58. {
  59. updateBefore();
  60. return "HOME ALL";
  61. }
  62. protected void updateBefore()
  63. {
  64. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  65. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  66. _robot.CmdBladeTarget = $"{_robot.Name}.A";
  67. _robot.CmdBlade1Extend = "0";
  68. _robot.CmdBlade2Extend = "0";
  69. _robot.MoveInfo = new RobotMoveInfo()
  70. {
  71. Action = RobotAction.Moving,
  72. ArmTarget = RobotArm.Both,
  73. BladeTarget = "ArmA.System",
  74. };
  75. }
  76. protected override void update(string[] data)
  77. {
  78. _robot.Initalized = true;
  79. _robot.Swap = false;
  80. }
  81. }
  82. public class RbStopHandler : Mag7RobotMotionHandler
  83. {
  84. public RbStopHandler()
  85. {
  86. background = true;
  87. }
  88. //$,<UNo>(,<SeqNo>),CSTP,<Sw>(,<Sum>)<CR>
  89. public override string package(params object[] args)
  90. {
  91. return "PAUSE";
  92. }
  93. }
  94. public class PickHandler : Mag7RobotMotionHandler
  95. {
  96. private ModuleName _chamber;
  97. private int _slot;
  98. private Hand _hand;
  99. public PickHandler()
  100. {
  101. background = true;
  102. }
  103. /// <summary>
  104. /// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
  105. //[[RO r_offset] [TO t_offset] [ZO z_offset]]
  106. // [ALTWAFSPD(Y | N)]
  107. // [EX NO_VIA|RE NO_VIA]
  108. // [STRT(NR | R1 | R2 | VIA)]
  109. // [(GRIP(OFF | ON)]
  110. // [ENRT [(NR | R1 | R2 | VIA)]
  111. // [(GRIP(OFF | ON)]
  112. // In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
  113. public override string package(params object[] args)
  114. {
  115. // PICK<CR>
  116. _chamber = (ModuleName)args[0];
  117. _slot = (int)args[1];
  118. _hand = (Hand)args[2];
  119. updateBefore();
  120. return string.Format("PICK {0} ARM {1}",
  121. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  122. Mag7RobotConvertor.hand2string(_hand));
  123. }
  124. private void updateBefore()
  125. {
  126. _robot.Blade1Target = _chamber;
  127. _robot.Blade2Target = _chamber;
  128. string arm = _hand == Hand.Blade1 ? "A" : "B";
  129. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  130. _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  131. _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  132. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  133. _robot.MoveInfo = new RobotMoveInfo()
  134. {
  135. Action = RobotAction.Picking,
  136. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  137. BladeTarget = target,
  138. };
  139. }
  140. protected override void update(string[] data)
  141. {
  142. if (_hand == Hand.Both)
  143. {
  144. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
  145. WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
  146. }
  147. else
  148. {
  149. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
  150. }
  151. string arm = _hand == Hand.Blade1 ? "A" : "B";
  152. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  153. _robot.CmdBlade1Extend = "0";
  154. _robot.CmdBlade2Extend = "0";
  155. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  156. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  157. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  158. _robot.MoveInfo = new RobotMoveInfo()
  159. {
  160. Action = RobotAction.Moving,
  161. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  162. BladeTarget = target,
  163. };
  164. }
  165. protected override void processError(string[] data)
  166. {
  167. try
  168. {
  169. int error = int.Parse(data[1]);
  170. string arm = _hand == Hand.Blade1 ? "A" : "B";
  171. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  172. _robot.CmdBlade1Extend = "0";
  173. _robot.CmdBlade2Extend = "0";
  174. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  175. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  176. /* Error 740: Error prior to a PICK: Wafer Sensed.
  177. Error 741: Error after a PICK: No Wafer Sensed.
  178. Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
  179. Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
  180. Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
  181. Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
  182. Error 772: Broken wafer encountered.
  183. Defect or breakage of a substrate is detected. If this error is reported on an unbroken wafer,increase the BREAK_THR parameter.
  184. */
  185. if (error == 741 || error == 742 || error == 745) // not picked the wafer
  186. {
  187. }
  188. else if (error == 772) // not picked the wafer
  189. {
  190. if (_hand == Hand.Both)
  191. {
  192. WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
  193. WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
  194. }
  195. else
  196. {
  197. WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
  198. }
  199. }
  200. else //picked but error
  201. {
  202. if (_hand == Hand.Both)
  203. {
  204. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
  205. WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
  206. }
  207. else
  208. {
  209. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
  210. }
  211. }
  212. }
  213. catch (Exception ex)
  214. {
  215. LOG.Write(ex);
  216. }
  217. }
  218. }
  219. public class PickExtendHandler : Mag7RobotMotionHandler
  220. {
  221. private ModuleName _chamber;
  222. private int _slot;
  223. private Hand _hand;
  224. public PickExtendHandler()
  225. {
  226. background = true;
  227. }
  228. /// <summary>
  229. /// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
  230. //[[RO r_offset] [TO t_offset] [ZO z_offset]]
  231. // [ALTWAFSPD(Y | N)]
  232. // [EX NO_VIA|RE NO_VIA]
  233. // [STRT(NR | R1 | R2 | VIA)]
  234. // [(GRIP(OFF | ON)]
  235. // [ENRT [(NR | R1 | R2 | VIA)]
  236. // [(GRIP(OFF | ON)]
  237. // In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
  238. public override string package(params object[] args)
  239. {
  240. // PICK<CR>
  241. _chamber = (ModuleName)args[0];
  242. _slot = (int)args[1];
  243. _hand = (Hand)args[2];
  244. updateBefore();
  245. return string.Format("PICK {0} ARM {1} ENRT NR",
  246. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  247. Mag7RobotConvertor.hand2string(_hand));
  248. }
  249. private void updateBefore()
  250. {
  251. string arm = _hand == Hand.Blade1 ? "A" : "B";
  252. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  253. _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  254. _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  255. _robot.Blade1Target = _chamber;
  256. _robot.Blade2Target = _chamber;
  257. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  258. _robot.MoveInfo = new RobotMoveInfo()
  259. {
  260. Action = RobotAction.Picking,
  261. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  262. BladeTarget = target,
  263. };
  264. }
  265. protected override void processError(string[] data)
  266. {
  267. try
  268. {
  269. int error = int.Parse(data[1]);
  270. string arm = _hand == Hand.Blade1 ? "A" : "B";
  271. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  272. _robot.CmdBlade1Extend = "0";
  273. _robot.CmdBlade2Extend = "0";
  274. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  275. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  276. /* Error 740: Error prior to a PICK: Wafer Sensed.
  277. Error 741: Error after a PICK: No Wafer Sensed.
  278. Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
  279. Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
  280. Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
  281. Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
  282. */
  283. if (error == 741 || error == 742 || error == 745) // not picked the wafer
  284. {
  285. }
  286. else if (error == 772) // not picked the wafer
  287. {
  288. if (_hand == Hand.Both)
  289. {
  290. WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
  291. WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
  292. }
  293. else
  294. {
  295. WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
  296. }
  297. }
  298. else //picked but error
  299. {
  300. if (_hand == Hand.Both)
  301. {
  302. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
  303. WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
  304. }
  305. else
  306. {
  307. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
  308. }
  309. }
  310. }
  311. catch (Exception ex)
  312. {
  313. LOG.Write(ex);
  314. }
  315. }
  316. }
  317. public class PickRetractHandler : Mag7RobotMotionHandler
  318. {
  319. private ModuleName _chamber;
  320. private int _slot;
  321. private Hand _hand;
  322. public PickRetractHandler()
  323. {
  324. background = true;
  325. }
  326. /// <summary>
  327. /// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
  328. //[[RO r_offset] [TO t_offset] [ZO z_offset]]
  329. // [ALTWAFSPD(Y | N)]
  330. // [EX NO_VIA|RE NO_VIA]
  331. // [STRT(NR | R1 | R2 | VIA)]
  332. // [(GRIP(OFF | ON)]
  333. // [ENRT [(NR | R1 | R2 | VIA)]
  334. // [(GRIP(OFF | ON)]
  335. // In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
  336. public override string package(params object[] args)
  337. {
  338. // PICK<CR>
  339. _chamber = (ModuleName)args[0];
  340. _slot = (int)args[1];
  341. _hand = (Hand)args[2];
  342. updateBefore();
  343. return string.Format("PICK {0} ARM {1} STRT NR",
  344. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  345. Mag7RobotConvertor.hand2string(_hand));
  346. }
  347. private void updateBefore()
  348. {
  349. string arm = _hand == Hand.Blade1 ? "A" : "B";
  350. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  351. _robot.CmdBlade1Extend = "0";
  352. _robot.CmdBlade2Extend = "0";
  353. _robot.Blade1Target = _chamber;
  354. _robot.Blade2Target = _chamber;
  355. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  356. _robot.MoveInfo = new RobotMoveInfo()
  357. {
  358. Action = RobotAction.Moving,
  359. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  360. BladeTarget = target,
  361. };
  362. }
  363. protected override void update(string[] data)
  364. {
  365. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  366. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  367. }
  368. protected override void processError(string[] data)
  369. {
  370. try
  371. {
  372. int error = int.Parse(data[1]);
  373. string arm = _hand == Hand.Blade1 ? "A" : "B";
  374. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  375. _robot.CmdBlade1Extend = "0";
  376. _robot.CmdBlade2Extend = "0";
  377. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  378. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  379. /* Error 740: Error prior to a PICK: Wafer Sensed.
  380. Error 741: Error after a PICK: No Wafer Sensed.
  381. Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
  382. Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
  383. Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
  384. Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
  385. */
  386. if (error == 741 || error == 742 || error == 745) // not picked the wafer
  387. {
  388. }
  389. else if (error == 772) // not picked the wafer
  390. {
  391. if (_hand == Hand.Both)
  392. {
  393. WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
  394. WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
  395. }
  396. else
  397. {
  398. WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
  399. }
  400. }
  401. else //picked but error
  402. {
  403. if (_hand == Hand.Both)
  404. {
  405. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
  406. WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
  407. }
  408. else
  409. {
  410. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
  411. }
  412. }
  413. }
  414. catch (Exception ex)
  415. {
  416. LOG.Write(ex);
  417. }
  418. }
  419. }
  420. public class PlaceHandler : Mag7RobotMotionHandler
  421. {
  422. private ModuleName _chamber;
  423. private int _slot;
  424. private Hand _hand;
  425. public PlaceHandler()
  426. {
  427. background = true;
  428. }
  429. public override string package(params object[] args)
  430. {
  431. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  432. _chamber = (ModuleName)args[0];
  433. _slot = (int)args[1];
  434. _hand = (Hand)args[2];
  435. updateBefore();
  436. return string.Format("PLACE {0} ARM {1}",
  437. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  438. Mag7RobotConvertor.hand2string(_hand));
  439. }
  440. private void updateBefore()
  441. {
  442. _robot.Blade1Target = _chamber;
  443. _robot.Blade2Target = _chamber;
  444. string arm = _hand == Hand.Blade1 ? "A" : "B";
  445. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  446. _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  447. _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  448. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  449. _robot.MoveInfo = new RobotMoveInfo()
  450. {
  451. Action = RobotAction.Placing,
  452. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  453. BladeTarget = target,
  454. };
  455. }
  456. protected override void update(string[] data)
  457. {
  458. if (_hand == Hand.Both)
  459. {
  460. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
  461. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  462. }
  463. else
  464. {
  465. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
  466. }
  467. string arm = _hand == Hand.Blade1 ? "A" : "B";
  468. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  469. _robot.CmdBlade1Extend = "0";
  470. _robot.CmdBlade2Extend = "0";
  471. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  472. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  473. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  474. _robot.MoveInfo = new RobotMoveInfo()
  475. {
  476. Action = RobotAction.Moving,
  477. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  478. BladeTarget = target,
  479. };
  480. }
  481. protected override void processError(string[] data)
  482. {
  483. try
  484. {
  485. int error = int.Parse(data[1]);
  486. string arm = _hand == Hand.Blade1 ? "A" : "B";
  487. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  488. _robot.CmdBlade1Extend = "0";
  489. _robot.CmdBlade2Extend = "0";
  490. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  491. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  492. /* Error 730: Error prior to PLACE: No Wafer Sensed.
  493. Error 731: Error after a PLACE: Wafer Sensed.
  494. Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
  495. WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
  496. Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
  497. Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
  498. Error 735: R_MT wafer sensor failure.
  499. Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
  500. */
  501. if (error == 731 || error == 732 || error == 736) // not placed the wafer
  502. {
  503. }
  504. else if (error == 772) // not picked the wafer
  505. {
  506. if (_hand == Hand.Both)
  507. {
  508. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
  509. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  510. }
  511. else
  512. {
  513. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
  514. }
  515. }
  516. else //placed but error
  517. {
  518. if (_hand == Hand.Both)
  519. {
  520. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
  521. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  522. }
  523. else
  524. {
  525. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
  526. }
  527. }
  528. }
  529. catch (Exception ex)
  530. {
  531. LOG.Write(ex);
  532. }
  533. }
  534. }
  535. public class PlaceExtendHandler : Mag7RobotMotionHandler
  536. {
  537. private ModuleName _chamber;
  538. private int _slot;
  539. private Hand _hand;
  540. public PlaceExtendHandler()
  541. {
  542. background = true;
  543. }
  544. public override string package(params object[] args)
  545. {
  546. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  547. _chamber = (ModuleName)args[0];
  548. _slot = (int)args[1];
  549. _hand = (Hand)args[2];
  550. updateBefore();
  551. return string.Format("PLACE {0} ARM {1} ENRT NR",
  552. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  553. Mag7RobotConvertor.hand2string(_hand));
  554. }
  555. private void updateBefore()
  556. {
  557. _robot.Blade1Target = _chamber;
  558. _robot.Blade2Target = _chamber;
  559. string arm = _hand == Hand.Blade1 ? "A" : "B";
  560. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  561. _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  562. _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  563. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  564. _robot.MoveInfo = new RobotMoveInfo()
  565. {
  566. Action = RobotAction.Placing,
  567. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  568. BladeTarget = target,
  569. };
  570. }
  571. protected override void update(string[] data)
  572. {
  573. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  574. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  575. }
  576. protected override void processError(string[] data)
  577. {
  578. try
  579. {
  580. int error = int.Parse(data[1]);
  581. string arm = _hand == Hand.Blade1 ? "A" : "B";
  582. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  583. _robot.CmdBlade1Extend = "0";
  584. _robot.CmdBlade2Extend = "0";
  585. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  586. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  587. /* Error 730: Error prior to PLACE: No Wafer Sensed.
  588. Error 731: Error after a PLACE: Wafer Sensed.
  589. Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
  590. WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
  591. Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
  592. Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
  593. Error 735: R_MT wafer sensor failure.
  594. Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
  595. */
  596. if (error == 731 || error == 732 || error == 736) // not placed the wafer
  597. {
  598. }
  599. else if (error == 772) // not picked the wafer
  600. {
  601. if (_hand == Hand.Both)
  602. {
  603. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
  604. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  605. }
  606. else
  607. {
  608. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
  609. }
  610. }
  611. else //placed but error
  612. {
  613. if (_hand == Hand.Both)
  614. {
  615. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
  616. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  617. }
  618. else
  619. {
  620. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
  621. }
  622. }
  623. }
  624. catch (Exception ex)
  625. {
  626. LOG.Write(ex);
  627. }
  628. }
  629. }
  630. public class PlaceRetractHandler : Mag7RobotMotionHandler
  631. {
  632. private ModuleName _chamber;
  633. private int _slot;
  634. private Hand _hand;
  635. public PlaceRetractHandler()
  636. {
  637. background = true;
  638. }
  639. public override string package(params object[] args)
  640. {
  641. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  642. _chamber = (ModuleName)args[0];
  643. _slot = (int)args[1];
  644. _hand = (Hand)args[2];
  645. updateBefore();
  646. return string.Format("PLACE {0} ARM {1} STRT NR",
  647. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  648. Mag7RobotConvertor.hand2string(_hand));
  649. }
  650. private void updateBefore()
  651. {
  652. _robot.Blade1Target = _chamber;
  653. _robot.Blade2Target = _chamber;
  654. string arm = _hand == Hand.Blade1 ? "A" : "B";
  655. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  656. _robot.CmdBlade1Extend = "0";
  657. _robot.CmdBlade2Extend = "0";
  658. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  659. _robot.MoveInfo = new RobotMoveInfo()
  660. {
  661. Action = RobotAction.Moving,
  662. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  663. BladeTarget = target,
  664. };
  665. }
  666. protected override void update(string[] data)
  667. {
  668. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  669. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  670. }
  671. protected override void processError(string[] data)
  672. {
  673. try
  674. {
  675. int error = int.Parse(data[1]);
  676. string arm = _hand == Hand.Blade1 ? "A" : "B";
  677. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  678. _robot.CmdBlade1Extend = "0";
  679. _robot.CmdBlade2Extend = "0";
  680. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  681. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  682. /* Error 730: Error prior to PLACE: No Wafer Sensed.
  683. Error 731: Error after a PLACE: Wafer Sensed.
  684. Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
  685. WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
  686. Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
  687. Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
  688. Error 735: R_MT wafer sensor failure.
  689. Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
  690. */
  691. if (error == 731 || error == 732 || error == 736) // not placed the wafer
  692. {
  693. }
  694. else if (error == 772) // not picked the wafer
  695. {
  696. if (_hand == Hand.Both)
  697. {
  698. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
  699. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  700. }
  701. else
  702. {
  703. WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
  704. }
  705. }
  706. else //placed but error
  707. {
  708. if (_hand == Hand.Both)
  709. {
  710. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
  711. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  712. }
  713. else
  714. {
  715. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
  716. }
  717. }
  718. }
  719. catch (Exception ex)
  720. {
  721. LOG.Write(ex);
  722. }
  723. }
  724. }
  725. public class ExchangHandler : Mag7RobotMotionHandler
  726. {
  727. private ModuleName _chamber;
  728. private int _slot;
  729. private Hand _hand;
  730. public ExchangHandler()
  731. {
  732. background = true;
  733. }
  734. public override string package(params object[] args)
  735. {
  736. // Picks from designated arm and places using other arm.<CR>
  737. _chamber = (ModuleName)args[0];
  738. _slot = (int)args[1];
  739. _hand = (Hand)args[2];
  740. if (_hand == Hand.Blade1)
  741. _hand = Hand.Blade2;
  742. else
  743. _hand = Hand.Blade1;
  744. updateBefore();
  745. return string.Format("SWAP {0} {1}",
  746. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  747. Mag7RobotConvertor.hand2string(_hand));
  748. }
  749. private void updateBefore()
  750. {
  751. _robot.Blade1Target = _chamber;
  752. _robot.Blade2Target = _chamber;
  753. _robot.Swap = true;
  754. _robot.PlaceBalde = _hand;
  755. }
  756. protected override void update(string[] data)
  757. {
  758. if (_hand == Hand.Blade2)
  759. {
  760. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
  761. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
  762. }
  763. else
  764. {
  765. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
  766. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot);
  767. }
  768. _robot.Swap = false;
  769. _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
  770. _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
  771. }
  772. }
  773. public class GotoHandler : Mag7RobotMotionHandler
  774. {
  775. private ModuleName _chamber;
  776. private int _slot;
  777. private Hand _hand;
  778. public GotoHandler()
  779. {
  780. background = true;
  781. }
  782. public override string package(params object[] args)
  783. {
  784. // Moves to a specified station-referenced location.< CR >
  785. _chamber = (ModuleName)args[0];
  786. _slot = (int)args[1];
  787. _hand = (Hand)args[2];
  788. updateBefore();
  789. return string.Format("GOTO N {0} ARM {1} R RE Z DN",
  790. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  791. Mag7RobotConvertor.hand2string(_hand));
  792. }
  793. private void updateBefore()
  794. {
  795. _robot.Blade1Target = _chamber;
  796. _robot.Blade2Target = _chamber;
  797. string arm = _hand == Hand.Blade1 ? "A" : "B";
  798. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  799. _robot.CmdBlade1Extend = "0";
  800. _robot.CmdBlade2Extend = "0";
  801. string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
  802. _robot.MoveInfo = new RobotMoveInfo()
  803. {
  804. Action = RobotAction.Moving,
  805. ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
  806. BladeTarget = target,
  807. };
  808. }
  809. }
  810. public class ExtendHandler : Mag7RobotMotionHandler
  811. {
  812. private ModuleName _chamber;
  813. private int _slot;
  814. private Hand _hand;
  815. public ExtendHandler()
  816. {
  817. background = true;
  818. }
  819. public override string package(params object[] args)
  820. {
  821. // Moves to a specified station-referenced location.< CR >
  822. _chamber = (ModuleName)args[0];
  823. _slot = (int)args[1];
  824. _hand = (Hand)args[2];
  825. updateBefore();
  826. return string.Format("GOTO N {0} ARM {1} R EX Z DN",
  827. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  828. Mag7RobotConvertor.hand2string(_hand));
  829. }
  830. private void updateBefore()
  831. {
  832. _robot.Blade1Target = _chamber;
  833. _robot.Blade2Target = _chamber;
  834. string arm = _hand == Hand.Blade1 ? "A" : "B";
  835. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  836. _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  837. _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  838. }
  839. }
  840. public class RetractHandler : Mag7RobotMotionHandler
  841. {
  842. private ModuleName _chamber;
  843. private int _slot;
  844. private Hand _hand;
  845. public RetractHandler()
  846. {
  847. background = true;
  848. }
  849. public override string package(params object[] args)
  850. {
  851. // Moves to a specified station-referenced location.< CR >
  852. _chamber = (ModuleName)args[0];
  853. _slot = (int)args[1];
  854. _hand = (Hand)args[2];
  855. updateBefore();
  856. return string.Format("GOTO N {0} ARM {1} R RE Z DN",
  857. Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
  858. Mag7RobotConvertor.hand2string(_hand));
  859. }
  860. private void updateBefore()
  861. {
  862. _robot.Blade1Target = _chamber;
  863. _robot.Blade2Target = _chamber;
  864. string arm = _hand == Hand.Blade1 ? "A" : "B";
  865. _robot.CmdBladeTarget = $"{_chamber}.{arm}";
  866. _robot.CmdBlade1Extend = "0";
  867. _robot.CmdBlade2Extend = "0";
  868. }
  869. }
  870. public class RbSetSpeedHandler : Mag7RobotMotionHandler
  871. {
  872. private int _speed = 0;
  873. public RbSetSpeedHandler()
  874. {
  875. background = false;
  876. }
  877. public override string package(params object[] args)
  878. {
  879. _speed = (int)args[0];
  880. string speed = "LOSPD";
  881. switch (_speed)
  882. {
  883. case 1: //low
  884. speed = "LOSPD";
  885. break;
  886. case 2: //Medium
  887. speed = "MESPD";
  888. break;
  889. case 3: //high
  890. speed = "HISPD";
  891. break;
  892. }
  893. return string.Format(" SET LOSPD Y", speed);
  894. }
  895. }
  896. public class RbSetCommunicationHandler : Mag7RobotMotionHandler
  897. {
  898. public RbSetCommunicationHandler()
  899. {
  900. background = true;
  901. }
  902. //SET COMM [M/B (MON|PKT)] [FLOW (SEQ|BKG|BKG+|MULTI|MULTI_DEV)]
  903. //[LF(ON | OFF)]
  904. //[ECHO(ON | OFF)]
  905. //[CHECKSUM(ON | OFF)]
  906. //[ERRLVL err_level]
  907. //[DREP(AUT | REQ)]
  908. //[ERR_REP(AUT | REQ)]
  909. //[RR(ON | OFF)]
  910. public override string package(params object[] args)
  911. {
  912. return string.Format("SET COMM {0} {1} {2} {3} {4}",
  913. "M/B PKT", // packet mode
  914. "FLOW SEQ", // sequential mode
  915. "ECHO OFF", // echo off
  916. "LF OFF", //LF off
  917. "CHECKSUM OFF" // echo off
  918. );
  919. }
  920. }
  921. public class RbSetLoadHandler : Mag7RobotMotionHandler
  922. {
  923. public RbSetLoadHandler()
  924. {
  925. background = true;
  926. }
  927. //SET LOAD <<(ARM)>[(A | B)]> <PAN L|R> (?|ON|OFF)
  928. //RQ LOAD <<(ARM)>[(A | B)]> <PAN L|R>
  929. public override string package(params object[] args)
  930. {
  931. Hand hand = (Hand)args[0];
  932. return string.Format("SET LOAD {0} OFF", hand == Hand.Blade1 ? "A" : "B");
  933. }
  934. }
  935. public class RbCheckLoadHandler : Mag7RobotMotionHandler
  936. {
  937. public RbCheckLoadHandler()
  938. {
  939. background = true;
  940. }
  941. //CHECK LOAD[station] [(A | B)] <PAN L|R> [[INTLCK ALL| (DIS|ENB)]| [EX_ENABLE
  942. // (DIS | ENB)] |[SBIT_SLVL_SEN(DIS | ENB)] |[VLV_SEN(DIS | ENB)]
  943. public override string package(params object[] args)
  944. {
  945. ModuleName module = (ModuleName)args[0];
  946. int slot = (int)args[1];
  947. return string.Format("CHECK LOAD {0} INTLCK ALL DIS", Mag7RobotConvertor.MapModule(module));
  948. }
  949. }
  950. public class RbRequestWaferPresentHandler : ITransferMsg
  951. {
  952. public RbRequestWaferPresentHandler()
  953. {
  954. background = true;
  955. }
  956. //RQ WAFER PRESENT <<(ARM)>[(A|B|AB)]>
  957. public IDevice Robot { get; set; }
  958. public bool background { get; }
  959. public bool evt { get; }
  960. public string package(params object[] args)
  961. {
  962. return string.Format("RQ WAFER PRESENT AB");
  963. }
  964. public bool unpackage(string type, string[] items)
  965. {
  966. //WAFER PRESENT Y N
  967. if (type.Equals(ProtocolTag.resp_tag_excute))
  968. {
  969. return true;
  970. }
  971. if (items.Length == 4)
  972. {
  973. if (items[2] == "Y")
  974. ((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Normal);
  975. if (items[2] == "?")
  976. ((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Unknown);
  977. if (items[2] == "N")
  978. ((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Empty);
  979. if (items[3] == "Y")
  980. ((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Normal);
  981. if (items[3] == "?")
  982. ((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Unknown);
  983. if (items[3] == "N")
  984. ((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Empty);
  985. }
  986. else
  987. {
  988. EV.PostWarningLog(Robot.Module, $"Request Wafer Present return unexpected feedback");
  989. return false;
  990. }
  991. return false;
  992. }
  993. }
  994. public class RRequestAWCDataHandler : ITransferMsg
  995. {
  996. public RRequestAWCDataHandler()
  997. {
  998. background = true;
  999. }
  1000. //RQ WAF_CEN DATA
  1001. public IDevice Robot { get; set; }
  1002. public bool background { get; }
  1003. public bool evt { get; }
  1004. public string package(params object[] args)
  1005. {
  1006. return string.Format("RQ WAF_CEN DATA");
  1007. }
  1008. public bool unpackage(string type, string[] items)
  1009. {
  1010. //WAF_CEN DATA SENS 1 r_pos_Striping_edge t_pos_Striping_edge r_pos_trailing_edge t_pos_trailing_edge OFFSET r_offset t_offset
  1011. if (type.Equals(ProtocolTag.resp_tag_excute))
  1012. {
  1013. return true;
  1014. }
  1015. if (items.Length >= 15)
  1016. {
  1017. if (int.TryParse(items[13], out int rOffset) && int.TryParse(items[14], out int tOffset))
  1018. ((Robot)Robot).NotifyAWCData(rOffset, tOffset);
  1019. }
  1020. else
  1021. {
  1022. EV.PostWarningLog(Robot.Module, $"Request Wafer center find data return error feedback");
  1023. return false;
  1024. }
  1025. return false;
  1026. }
  1027. }
  1028. public class RBQueryStateHandler : ITransferMsg
  1029. {
  1030. public bool background { get; protected set; }
  1031. public bool evt { get { return false; } }
  1032. public string deviceID { private get; set; }
  1033. public string _cmd = string.Empty;
  1034. public IDevice Robot { set { _device = (Robot)value; } }
  1035. protected Robot _device;
  1036. public RBQueryStateHandler()
  1037. {
  1038. background = false;
  1039. }
  1040. //$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
  1041. public string package(params object[] args)
  1042. {
  1043. return ",RSTS,";
  1044. }
  1045. public bool unpackage(string type, string[] items)
  1046. {
  1047. return !background;
  1048. }
  1049. }
  1050. public class RbEventHandler : ITransferMsg
  1051. {
  1052. public bool background { get { return false; } }
  1053. public bool evt { get { return true; } }
  1054. public string deviceID { private get; set; }
  1055. public string _cmd = string.Empty;
  1056. public IDevice Robot { set { _device = (Robot)value; } }
  1057. protected Robot _device;
  1058. public RbEventHandler()
  1059. {
  1060. }
  1061. //$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
  1062. public string package(params object[] args)
  1063. {
  1064. return "";
  1065. }
  1066. public bool unpackage(string type, string[] items)
  1067. {
  1068. return true;
  1069. }
  1070. }
  1071. public class RBQueryPositionHandler : ITransferMsg
  1072. {
  1073. public bool background { get; protected set; }
  1074. public bool evt { get { return false; } }
  1075. public string deviceID { private get; set; }
  1076. public string _cmd = string.Empty;
  1077. public IDevice Robot { set { _device = (Robot)value; } }
  1078. protected Robot _device;
  1079. public RBQueryPositionHandler()
  1080. {
  1081. background = false;
  1082. }
  1083. //RQ POS ABS ALL
  1084. //POS ABS(A|B) rVal tVal zVal sVal wVal waVal wbVal
  1085. public string package(params object[] args)
  1086. {
  1087. return "RQ POS ABS ALL";
  1088. }
  1089. public bool unpackage(string type, string[] items)
  1090. {
  1091. //POS ABS (A|B) rVal tVal zVal sVal wVal waVal wbVal
  1092. //Radial: rVal
  1093. //Theta:tVal
  1094. //Z:zVal
  1095. //S:sVal
  1096. //W:wVal
  1097. //WA:waVal
  1098. //WB:wbVal
  1099. if (items.Length == 9)
  1100. {
  1101. _device.Rotation = int.Parse(items[1]);
  1102. return true;
  1103. }
  1104. return !background;
  1105. }
  1106. }
  1107. }