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- using System;
- using System.Text;
- using Aitex.Core.RT.Device;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using System.Text.RegularExpressions;
- using Aitex.Core.Common;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Log;
- using MECF.Framework.Common.CommonData;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.MAG7
- {
- public class Mag7RobotMotionHandler : ITransferMsg
- {
- public bool background { get; protected set; }
- public bool evt { get { return false; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- public IDevice Robot { set { _robot = (Robot)value; } }
- protected Robot _robot;
- public Mag7RobotMotionHandler()
- {
- background = false;
- }
- public virtual string package(params object[] args)
- {
- return "";
- }
- public bool unpackage(string type, string[] items)
- {
- if (type.Equals(ProtocolTag.resp_tag_excute))
- {
- update(items);
-
- return true;
- }
- if (type.Equals(ProtocolTag.resp_tag_error))
- {
- processError(items);
- return true;
- }
- return !background;
- }
- protected virtual void update(string[] data)
- {
- }
- protected virtual void processError(string[] data)
- {
- }
- }
- public class RbHomeHandler : Mag7RobotMotionHandler
- {
- public RbHomeHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- updateBefore();
- return "HOME ALL";
- }
- protected void updateBefore()
- {
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- _robot.CmdBladeTarget = $"{_robot.Name}.A";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = RobotArm.Both,
- BladeTarget = "ArmA.System",
- };
- }
- protected override void update(string[] data)
- {
- _robot.Initalized = true;
- _robot.Swap = false;
- }
- }
- public class RbStopHandler : Mag7RobotMotionHandler
- {
- public RbStopHandler()
- {
- background = true;
- }
- //$,<UNo>(,<SeqNo>),CSTP,<Sw>(,<Sum>)<CR>
- public override string package(params object[] args)
- {
- return "PAUSE";
- }
- }
- public class PickHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PickHandler()
- {
- background = true;
- }
- /// <summary>
- /// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
- //[[RO r_offset] [TO t_offset] [ZO z_offset]]
- // [ALTWAFSPD(Y | N)]
- // [EX NO_VIA|RE NO_VIA]
- // [STRT(NR | R1 | R2 | VIA)]
- // [(GRIP(OFF | ON)]
- // [ENRT [(NR | R1 | R2 | VIA)]
- // [(GRIP(OFF | ON)]
- // In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
- public override string package(params object[] args)
- {
- // PICK<CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("PICK {0} ARM {1}",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
- _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Picking,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
- protected override void update(string[] data)
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
- WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
- }
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
-
-
-
- protected override void processError(string[] data)
- {
- try
- {
- int error = int.Parse(data[1]);
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- /* Error 740: Error prior to a PICK: Wafer Sensed.
- Error 741: Error after a PICK: No Wafer Sensed.
- Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
- Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
- Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
- Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
- Error 772: Broken wafer encountered.
- Defect or breakage of a substrate is detected. If this error is reported on an unbroken wafer,increase the BREAK_THR parameter.
- */
- if (error == 741 || error == 742 || error == 745) // not picked the wafer
- {
- }
- else if (error == 772) // not picked the wafer
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
- WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
- }
- }
- else //picked but error
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
- WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
- }
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- }
- }
- public class PickExtendHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PickExtendHandler()
- {
- background = true;
- }
- /// <summary>
- /// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
- //[[RO r_offset] [TO t_offset] [ZO z_offset]]
- // [ALTWAFSPD(Y | N)]
- // [EX NO_VIA|RE NO_VIA]
- // [STRT(NR | R1 | R2 | VIA)]
- // [(GRIP(OFF | ON)]
- // [ENRT [(NR | R1 | R2 | VIA)]
- // [(GRIP(OFF | ON)]
- // In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
- public override string package(params object[] args)
- {
- // PICK<CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("PICK {0} ARM {1} ENRT NR",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
- _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Picking,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
-
-
- protected override void processError(string[] data)
- {
- try
- {
- int error = int.Parse(data[1]);
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- /* Error 740: Error prior to a PICK: Wafer Sensed.
- Error 741: Error after a PICK: No Wafer Sensed.
- Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
- Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
- Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
- Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
- */
- if (error == 741 || error == 742 || error == 745) // not picked the wafer
- {
- }
- else if (error == 772) // not picked the wafer
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
- WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
- }
- }
- else //picked but error
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
- WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
- }
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- }
- }
- public class PickRetractHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PickRetractHandler()
- {
- background = true;
- }
- /// <summary>
- /// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
- //[[RO r_offset] [TO t_offset] [ZO z_offset]]
- // [ALTWAFSPD(Y | N)]
- // [EX NO_VIA|RE NO_VIA]
- // [STRT(NR | R1 | R2 | VIA)]
- // [(GRIP(OFF | ON)]
- // [ENRT [(NR | R1 | R2 | VIA)]
- // [(GRIP(OFF | ON)]
- // In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
- public override string package(params object[] args)
- {
- // PICK<CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("PICK {0} ARM {1} STRT NR",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
- protected override void update(string[] data)
- {
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- }
-
-
- protected override void processError(string[] data)
- {
- try
- {
- int error = int.Parse(data[1]);
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- /* Error 740: Error prior to a PICK: Wafer Sensed.
- Error 741: Error after a PICK: No Wafer Sensed.
- Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
- Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
- Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
- Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
- */
- if (error == 741 || error == 742 || error == 745) // not picked the wafer
- {
- }
- else if (error == 772) // not picked the wafer
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
- WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
- }
- }
- else //picked but error
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
- WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
- }
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- }
- }
- public class PlaceHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PlaceHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("PLACE {0} ARM {1}",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
- _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Placing,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
- protected override void update(string[] data)
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
- }
- else
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
- }
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
-
-
- protected override void processError(string[] data)
- {
- try
- {
- int error = int.Parse(data[1]);
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- /* Error 730: Error prior to PLACE: No Wafer Sensed.
- Error 731: Error after a PLACE: Wafer Sensed.
- Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
- WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
- Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
- Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
- Error 735: R_MT wafer sensor failure.
- Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
- */
- if (error == 731 || error == 732 || error == 736) // not placed the wafer
- {
- }
- else if (error == 772) // not picked the wafer
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
- }
- else
- {
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
- }
- }
- else //placed but error
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
- }
- else
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
- }
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- }
- }
- public class PlaceExtendHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PlaceExtendHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("PLACE {0} ARM {1} ENRT NR",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
- _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Placing,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
- protected override void update(string[] data)
- {
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- }
-
- protected override void processError(string[] data)
- {
- try
- {
- int error = int.Parse(data[1]);
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- /* Error 730: Error prior to PLACE: No Wafer Sensed.
- Error 731: Error after a PLACE: Wafer Sensed.
- Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
- WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
- Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
- Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
- Error 735: R_MT wafer sensor failure.
- Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
- */
- if (error == 731 || error == 732 || error == 736) // not placed the wafer
- {
- }
- else if (error == 772) // not picked the wafer
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
- }
- else
- {
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
- }
- }
- else //placed but error
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
- }
- else
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
- }
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- }
- }
- public class PlaceRetractHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PlaceRetractHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("PLACE {0} ARM {1} STRT NR",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
- protected override void update(string[] data)
- {
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- }
-
-
-
- protected override void processError(string[] data)
- {
- try
- {
- int error = int.Parse(data[1]);
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- /* Error 730: Error prior to PLACE: No Wafer Sensed.
- Error 731: Error after a PLACE: Wafer Sensed.
- Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
- WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
- Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
- Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
- Error 735: R_MT wafer sensor failure.
- Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
- */
- if (error == 731 || error == 732 || error == 736) // not placed the wafer
- {
- }
- else if (error == 772) // not picked the wafer
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
- }
- else
- {
- WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
- }
- }
- else //placed but error
- {
- if (_hand == Hand.Both)
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
- }
- else
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
- }
- }
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- }
- }
- public class ExchangHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public ExchangHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // Picks from designated arm and places using other arm.<CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- if (_hand == Hand.Blade1)
- _hand = Hand.Blade2;
- else
- _hand = Hand.Blade1;
- updateBefore();
- return string.Format("SWAP {0} {1}",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- _robot.Swap = true;
- _robot.PlaceBalde = _hand;
- }
- protected override void update(string[] data)
- {
- if (_hand == Hand.Blade2)
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
- }
- else
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot);
- }
- _robot.Swap = false;
- _robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
- _robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
- }
- }
- public class GotoHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public GotoHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // Moves to a specified station-referenced location.< CR >
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("GOTO N {0} ARM {1} R RE Z DN",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
- _robot.MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = target,
- };
- }
- }
- public class ExtendHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public ExtendHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // Moves to a specified station-referenced location.< CR >
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("GOTO N {0} ARM {1} R EX Z DN",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
- _robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
- }
- }
- public class RetractHandler : Mag7RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public RetractHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // Moves to a specified station-referenced location.< CR >
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- return string.Format("GOTO N {0} ARM {1} R RE Z DN",
- Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
- Mag7RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _robot.Blade1Target = _chamber;
- _robot.Blade2Target = _chamber;
- string arm = _hand == Hand.Blade1 ? "A" : "B";
- _robot.CmdBladeTarget = $"{_chamber}.{arm}";
- _robot.CmdBlade1Extend = "0";
- _robot.CmdBlade2Extend = "0";
- }
- }
- public class RbSetSpeedHandler : Mag7RobotMotionHandler
- {
- private int _speed = 0;
- public RbSetSpeedHandler()
- {
- background = false;
- }
- public override string package(params object[] args)
- {
- _speed = (int)args[0];
- string speed = "LOSPD";
- switch (_speed)
- {
- case 1: //low
- speed = "LOSPD";
- break;
- case 2: //Medium
- speed = "MESPD";
- break;
- case 3: //high
- speed = "HISPD";
- break;
- }
- return string.Format(" SET LOSPD Y", speed);
- }
- }
- public class RbSetCommunicationHandler : Mag7RobotMotionHandler
- {
- public RbSetCommunicationHandler()
- {
- background = true;
- }
- //SET COMM [M/B (MON|PKT)] [FLOW (SEQ|BKG|BKG+|MULTI|MULTI_DEV)]
- //[LF(ON | OFF)]
- //[ECHO(ON | OFF)]
- //[CHECKSUM(ON | OFF)]
- //[ERRLVL err_level]
- //[DREP(AUT | REQ)]
- //[ERR_REP(AUT | REQ)]
- //[RR(ON | OFF)]
- public override string package(params object[] args)
- {
- return string.Format("SET COMM {0} {1} {2} {3} {4}",
- "M/B PKT", // packet mode
- "FLOW SEQ", // sequential mode
- "ECHO OFF", // echo off
- "LF OFF", //LF off
- "CHECKSUM OFF" // echo off
- );
- }
- }
- public class RbSetLoadHandler : Mag7RobotMotionHandler
- {
- public RbSetLoadHandler()
- {
- background = true;
- }
- //SET LOAD <<(ARM)>[(A | B)]> <PAN L|R> (?|ON|OFF)
- //RQ LOAD <<(ARM)>[(A | B)]> <PAN L|R>
- public override string package(params object[] args)
- {
- Hand hand = (Hand)args[0];
- return string.Format("SET LOAD {0} OFF", hand == Hand.Blade1 ? "A" : "B");
- }
- }
- public class RbCheckLoadHandler : Mag7RobotMotionHandler
- {
- public RbCheckLoadHandler()
- {
- background = true;
- }
- //CHECK LOAD[station] [(A | B)] <PAN L|R> [[INTLCK ALL| (DIS|ENB)]| [EX_ENABLE
- // (DIS | ENB)] |[SBIT_SLVL_SEN(DIS | ENB)] |[VLV_SEN(DIS | ENB)]
- public override string package(params object[] args)
- {
- ModuleName module = (ModuleName)args[0];
- int slot = (int)args[1];
- return string.Format("CHECK LOAD {0} INTLCK ALL DIS", Mag7RobotConvertor.MapModule(module));
- }
- }
- public class RbRequestWaferPresentHandler : ITransferMsg
- {
- public RbRequestWaferPresentHandler()
- {
- background = true;
- }
- //RQ WAFER PRESENT <<(ARM)>[(A|B|AB)]>
- public IDevice Robot { get; set; }
- public bool background { get; }
- public bool evt { get; }
- public string package(params object[] args)
- {
- return string.Format("RQ WAFER PRESENT AB");
- }
- public bool unpackage(string type, string[] items)
- {
- //WAFER PRESENT Y N
- if (type.Equals(ProtocolTag.resp_tag_excute))
- {
- return true;
- }
- if (items.Length == 4)
- {
- if (items[2] == "Y")
- ((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Normal);
- if (items[2] == "?")
- ((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Unknown);
- if (items[2] == "N")
- ((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Empty);
- if (items[3] == "Y")
- ((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Normal);
- if (items[3] == "?")
- ((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Unknown);
- if (items[3] == "N")
- ((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Empty);
- }
- else
- {
- EV.PostWarningLog(Robot.Module, $"Request Wafer Present return unexpected feedback");
- return false;
- }
- return false;
- }
- }
- public class RRequestAWCDataHandler : ITransferMsg
- {
- public RRequestAWCDataHandler()
- {
- background = true;
- }
- //RQ WAF_CEN DATA
- public IDevice Robot { get; set; }
- public bool background { get; }
- public bool evt { get; }
- public string package(params object[] args)
- {
- return string.Format("RQ WAF_CEN DATA");
- }
- public bool unpackage(string type, string[] items)
- {
- //WAF_CEN DATA SENS 1 r_pos_Striping_edge t_pos_Striping_edge r_pos_trailing_edge t_pos_trailing_edge OFFSET r_offset t_offset
- if (type.Equals(ProtocolTag.resp_tag_excute))
- {
- return true;
- }
- if (items.Length >= 15)
- {
- if (int.TryParse(items[13], out int rOffset) && int.TryParse(items[14], out int tOffset))
- ((Robot)Robot).NotifyAWCData(rOffset, tOffset);
- }
- else
- {
- EV.PostWarningLog(Robot.Module, $"Request Wafer center find data return error feedback");
- return false;
- }
- return false;
- }
- }
- public class RBQueryStateHandler : ITransferMsg
- {
- public bool background { get; protected set; }
- public bool evt { get { return false; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- public IDevice Robot { set { _device = (Robot)value; } }
- protected Robot _device;
- public RBQueryStateHandler()
- {
- background = false;
- }
- //$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
- public string package(params object[] args)
- {
- return ",RSTS,";
- }
- public bool unpackage(string type, string[] items)
- {
- return !background;
- }
- }
- public class RbEventHandler : ITransferMsg
- {
- public bool background { get { return false; } }
- public bool evt { get { return true; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- public IDevice Robot { set { _device = (Robot)value; } }
- protected Robot _device;
- public RbEventHandler()
- {
- }
- //$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
- public string package(params object[] args)
- {
- return "";
- }
- public bool unpackage(string type, string[] items)
- {
- return true;
- }
- }
- public class RBQueryPositionHandler : ITransferMsg
- {
- public bool background { get; protected set; }
- public bool evt { get { return false; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- public IDevice Robot { set { _device = (Robot)value; } }
- protected Robot _device;
- public RBQueryPositionHandler()
- {
- background = false;
- }
- //RQ POS ABS ALL
- //POS ABS(A|B) rVal tVal zVal sVal wVal waVal wbVal
- public string package(params object[] args)
- {
- return "RQ POS ABS ALL";
- }
- public bool unpackage(string type, string[] items)
- {
- //POS ABS (A|B) rVal tVal zVal sVal wVal waVal wbVal
- //Radial: rVal
- //Theta:tVal
- //Z:zVal
- //S:sVal
- //W:wVal
- //WA:waVal
- //WB:wbVal
- if (items.Length == 9)
- {
- _device.Rotation = int.Parse(items[1]);
- return true;
- }
- return !background;
- }
- }
- }
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