BrooksSMIFRCMDEnum.cs 1.2 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.SMIFs.Brooks
  7. {
  8. enum BrooksSMIFRCMDEnum
  9. {
  10. HostToUnlockPort = 1,
  11. HostToLockPort = 2,
  12. GotoStagePosition = 9,
  13. GetWaferMap = 11,
  14. GoHome = 13,
  15. Reset = 16,
  16. SwitchOperationMode = 18,
  17. EmergencyStop = 20,
  18. EnableCassetteFetch = 30,
  19. EnableLoad,
  20. EnableHome,
  21. EnableOpenForUnload,
  22. EnableUnload,
  23. EnableClose,
  24. EnableErrorHome,
  25. EnableErrorLoad,
  26. EnableErrorUnload,
  27. EnableAll,
  28. DisableCassetteFetch,
  29. DisableLoad,
  30. DisableHome,
  31. DisableOpenForUnload,
  32. DisableUnload,
  33. DisableClose,
  34. DisableErrorHome,
  35. DisableErrorLoad,
  36. DisableErrorUnload,
  37. DisableAll,
  38. FetchCassetteFromPod,
  39. LoadCassette,
  40. OpenPodForUnload,
  41. UnloadCassette,
  42. ClosePodFOrUnload,
  43. ErrorHome,
  44. ErrorLoad,
  45. ErrorUnload,
  46. GetIOPortStatus = 134,
  47. GetWaferMapReport = 140,
  48. LockPodDoor = 141,
  49. UnlockPodDoor = 142
  50. }
  51. }