HirataIILoadPort.cs 47 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Communications;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.CarrierIdReaders.CarrierIDReaderBase;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  14. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
  15. using System;
  16. using System.Collections.Generic;
  17. using System.IO.Ports;
  18. using System.Linq;
  19. using System.Text;
  20. using System.Threading;
  21. using System.Threading.Tasks;
  22. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.HirataII
  23. {
  24. public class HirataIILoadPort:LoadPortBaseDevice,IConnection
  25. {
  26. public HirataIILoadPort(string module,string name,string scRoot, IoTrigger[] dos,bool IsTCPconnection = false,RobotBaseDevice robot =null) :base(module,name,robot)
  27. {
  28. _scRoot = scRoot;
  29. _isTcpConnection = IsTCPconnection;
  30. LoadPortType = "TDKLoadPort";
  31. if (dos != null && dos.Length >= 1)
  32. {
  33. _doLoadPortOK = dos[0];
  34. }
  35. InitializeLP();
  36. SubscribeLPData();
  37. }
  38. public HirataIILoadPort(string module, string name, string scRoot, IoSensor[] dis = null, IoTrigger[] dos = null, bool IsTCPconnection = false, RobotBaseDevice robot = null) : base(module, name, robot)
  39. {
  40. _scRoot = scRoot;
  41. _isTcpConnection = IsTCPconnection;
  42. LoadPortType = "TDKLoadPort";
  43. if (dos != null && dos.Length >= 1)
  44. {
  45. _doLoadPortOK = dos[0];
  46. }
  47. if (dis != null && dis.Length >= 1)
  48. {
  49. _diInfoPadA = dis[0];
  50. }
  51. if (dis != null && dis.Length >= 2)
  52. {
  53. _diInfoPadB = dis[1];
  54. }
  55. if (dis != null && dis.Length >= 3)
  56. {
  57. _diInfoPadC = dis[2];
  58. }
  59. if (dis != null && dis.Length >= 4)
  60. {
  61. _diInfoPadD = dis[3];
  62. }
  63. if (dis != null && dis.Length >= 5)
  64. {
  65. _diWaferProtrude = dis[4];
  66. }
  67. InitializeLP();
  68. SubscribeLPData();
  69. }
  70. private void SubscribeLPData()
  71. {
  72. if (Module != "")
  73. {
  74. DATA.Subscribe($"{Module}.{Name}.SystemStatus", () => SystemStatus.ToString());
  75. DATA.Subscribe($"{Module}.{Name}.Mode", () => Mode.ToString());
  76. DATA.Subscribe($"{Module}.{Name}.InitPosMovement", () => InitPosMovement.ToString());
  77. DATA.Subscribe($"{Module}.{Name}.OperationStatus", () => OperationStatus.ToString());
  78. DATA.Subscribe($"{Module}.{Name}.ErrorCode", () => ErrorCode.ToString());
  79. DATA.Subscribe($"{Module}.{Name}.ContainerStatus", () => ContainerStatus.ToString());
  80. DATA.Subscribe($"{Module}.{Name}.ClampPosition", () => ClampPosition.ToString());
  81. DATA.Subscribe($"{Module}.{Name}.LPDoorLatchPosition", () => LPDoorLatchPosition.ToString());
  82. DATA.Subscribe($"{Module}.{Name}.VacuumStatus", () => VacuumStatus.ToString());
  83. DATA.Subscribe($"{Module}.{Name}.LPDoorState", () => LPDoorState.ToString());
  84. DATA.Subscribe($"{Module}.{Name}.WaferProtrusion", () => WaferProtrusion.ToString());
  85. DATA.Subscribe($"{Module}.{Name}.ElevatorAxisPosition", () => ElevatorAxisPosition.ToString());
  86. DATA.Subscribe($"{Module}.{Name}.MapperPostion", () => MapperPostion.ToString());
  87. DATA.Subscribe($"{Module}.{Name}.MappingStatus", () => MappingStatus.ToString());
  88. DATA.Subscribe($"{Module}.{Name}.Model", () => Model.ToString());
  89. DATA.Subscribe($"{Module}.{Name}.IsFosbModeActual", () => IsFosbModeActual.ToString());
  90. DATA.Subscribe($"{Module}.{Name}.DockPosition", () => DockPosition.ToString());
  91. }
  92. else
  93. {
  94. DATA.Subscribe($"{Name}.SystemStatus", () => SystemStatus.ToString());
  95. DATA.Subscribe($"{Name}.Mode", () => Mode.ToString());
  96. DATA.Subscribe($"{Name}.InitPosMovement", () => InitPosMovement.ToString());
  97. DATA.Subscribe($"{Name}.OperationStatus", () => OperationStatus.ToString());
  98. DATA.Subscribe($"{Name}.ErrorCode", () => ErrorCode.ToString());
  99. DATA.Subscribe($"{Name}.ContainerStatus", () => ContainerStatus.ToString());
  100. DATA.Subscribe($"{Name}.ClampPosition", () => ClampPosition.ToString());
  101. DATA.Subscribe($"{Name}.LPDoorLatchPosition", () => LPDoorLatchPosition.ToString());
  102. DATA.Subscribe($"{Name}.VacuumStatus", () => VacuumStatus.ToString());
  103. DATA.Subscribe($"{Name}.LPDoorState", () => LPDoorState.ToString());
  104. DATA.Subscribe($"{Name}.WaferProtrusion", () => WaferProtrusion.ToString());
  105. DATA.Subscribe($"{Name}.ElevatorAxisPosition", () => ElevatorAxisPosition.ToString());
  106. DATA.Subscribe($"{Name}.MapperPostion", () => MapperPostion.ToString());
  107. DATA.Subscribe($"{Name}.MappingStatus", () => MappingStatus.ToString());
  108. DATA.Subscribe($"{Name}.Model", () => Model.ToString());
  109. DATA.Subscribe($"{Name}.IsFosbModeActual", () => IsFosbModeActual.ToString());
  110. DATA.Subscribe($"{Name}.DockPosition", () => DockPosition.ToString());
  111. }
  112. }
  113. public override string SpecCarrierType
  114. {
  115. get
  116. {
  117. if (_isPlaced)
  118. return SC.GetStringValue($"CarrierInfo.CarrierName{InfoPadCarrierIndex}");
  119. return "";
  120. }
  121. set => base.SpecCarrierType = value;
  122. }
  123. private bool _needMoveBaseToReadCarrierID
  124. {
  125. get
  126. {
  127. if (SC.ContainsItem($"{_scRoot}.{Name}.NeedMoveToReadCarrierID"))
  128. return SC.GetValue<bool>($"{_scRoot}.{Name}.NeedMoveToReadCarrierID");
  129. return false;
  130. }
  131. }
  132. public override bool ReadCarrierID(int offset = 0, int length = 16)
  133. {
  134. if (_needMoveBaseToReadCarrierID)
  135. {
  136. return QueryCarrierID(out _);
  137. //lock (_locker)
  138. //{
  139. // _lstHandler.AddLast(new HirataIIMoveToReadCarrierIDHandler(this));
  140. // _lstHandler.AddLast(new HirataIIMoveHandler(this, "FCOTB", null));
  141. //}
  142. //return true;
  143. }
  144. else
  145. return base.ReadCarrierID(offset, length);
  146. }
  147. public override bool IsEnableLoad(out string reason)
  148. {
  149. //if(IsWaferProtrude)
  150. //{
  151. // reason = "Wafer Protrusion";
  152. // return false;
  153. //}
  154. if (_isNeedCheckIronStickDoor)
  155. {
  156. if (DiIronCassetteDoorClose != null && !DiIronCassetteDoorClose.Value)
  157. {
  158. reason = "Iron Door Closed";
  159. return false;
  160. }
  161. }
  162. return base.IsEnableLoad(out reason);
  163. }
  164. public override bool IsEnableDualTransfer(out string reason)
  165. {
  166. reason = "";
  167. if (SC.ContainsItem($"CarrierInfo.EnableDualTransfer{InfoPadCarrierIndex}") &&
  168. SC.GetValue<bool>($"CarrierInfo.EnableDualTransfer{InfoPadCarrierIndex}"))
  169. {
  170. return true;
  171. }
  172. return base.IsEnableDualTransfer(out reason);
  173. }
  174. public override bool IsEnableTransferWafer(out string reason)
  175. {
  176. if (LPDoorState != TDKPosition.Open)
  177. {
  178. reason = "Door is not open";
  179. return false;
  180. }
  181. if (DockPosition != TDKDockPosition.Dock)
  182. {
  183. reason = "Foup is not dock";
  184. return false;
  185. }
  186. if(WaferProtrusion == TDKWaferProtrusion.ShadingStatus)
  187. {
  188. reason = "Wafer Protrude";
  189. return false;
  190. }
  191. if(_diWaferProtrude!=null && !_diWaferProtrude.Value)
  192. {
  193. reason = "Wafer Protrude signal on";
  194. return false;
  195. }
  196. if (_isNeedCheckIronStickDoor)
  197. {
  198. if (DiIronCassetteDoorClose != null && !DiIronCassetteDoorClose.Value)
  199. {
  200. reason = "Iron Door Closed";
  201. return false;
  202. }
  203. }
  204. return base.IsEnableTransferWafer(out reason);
  205. }
  206. private bool _isNeedCheckIronStickDoor
  207. {
  208. get
  209. {
  210. if (SC.ContainsItem($"CarrierInfo.NeedCheckIronDoorCarrier{InfoPadCarrierIndex}"))
  211. return SC.GetValue<bool>($"CarrierInfo.NeedCheckIronDoorCarrier{InfoPadCarrierIndex}");
  212. if (SC.ContainsItem($"CarrierInfo.Carrier{InfoPadCarrierIndex}.NeedCheckIronDoorCarrier"))
  213. return SC.GetValue<bool>($"CarrierInfo.Carrier{InfoPadCarrierIndex}.NeedCheckIronDoorCarrier");
  214. return false;
  215. }
  216. }
  217. private void InitializeLP()
  218. {
  219. IsMapWaferByLoadPort = true;
  220. if (_doLoadPortOK != null)
  221. _doLoadPortOK.SetTrigger(true, out _);
  222. //_deviceAddress = SC.GetValue<int>($"{Name}.DeviceAddress");
  223. _enableLog = SC.GetValue<bool>($"LoadPort.{Name}.EnableLogMessage");
  224. if (_isTcpConnection)
  225. {
  226. Address = SC.GetStringValue($"LoadPort.{Name}.Address");
  227. _tcpConnection = new HirataIILoadPortTCPConnection(this, Address);
  228. _tcpConnection.EnableLog(_enableLog);
  229. if (_tcpConnection.Connect())
  230. {
  231. //LOG.Write($"Connected with {Module}.{Name} .");
  232. EV.PostInfoLog(Module, $"Connected with {Module}.{Name} .");
  233. }
  234. else
  235. {
  236. EV.PostAlarmLog(Module, $"Can't connect to {Module}.{Name}.");
  237. }
  238. }
  239. else
  240. {
  241. string portName = SC.GetStringValue($"LoadPort.{Name}.PortName");
  242. int bautRate = SC.GetValue<int>($"LoadPort.{Name}.BaudRate");
  243. int dataBits = SC.GetValue<int>($"LoadPort.{Name}.DataBits");
  244. Enum.TryParse(SC.GetStringValue($"LoadPort.{Name}.Parity"), out Parity parity);
  245. Enum.TryParse(SC.GetStringValue($"LoadPort.{Name}.StopBits"), out StopBits stopBits);
  246. _connection = new HirataIILoadPortConnection(this, portName, bautRate, dataBits, parity, stopBits);
  247. _connection.EnableLog(_enableLog);
  248. int count = SC.ContainsItem("System.ComPortRetryCount") ? SC.GetValue<int>("System.ComPortRetryCount") : 10;
  249. int sleep = SC.ContainsItem("System.ComPortRetryDelayTime") ? SC.GetValue<int>("System.ComPortRetryDelayTime") : 2;
  250. if (sleep <= 0 || sleep > 10)
  251. sleep = 2;
  252. int retry = 0;
  253. do
  254. {
  255. _connection.Disconnect();
  256. Thread.Sleep(sleep * 1000);
  257. if (_connection.Connect())
  258. {
  259. //LOG.Write($"Connected with {Module}.{Name} .");
  260. EV.PostInfoLog(Module, $"Connected with {Module}.{Name} .");
  261. break;
  262. }
  263. if (count > 0 && retry++ > count)
  264. {
  265. EV.PostAlarmLog(Module, $"Can't connect to {Module}.{Name}.");
  266. break;
  267. }
  268. } while (true);
  269. }
  270. ConnectionManager.Instance.Subscribe($"{Name}", this);
  271. _thread = new PeriodicJob(50, OnTimer, $"{Module}.{Name} MonitorHandler", true);
  272. SetCarrierType();
  273. }
  274. private bool OnTimer()
  275. {
  276. try
  277. {
  278. if (_isTcpConnection)
  279. {
  280. _tcpConnection.MonitorTimeout();
  281. if(!_tcpConnection.IsConnected || _tcpConnection.IsCommunicationError)
  282. {
  283. lock (_locker)
  284. {
  285. _lstHandler.Clear();
  286. }
  287. _trigRetryConnect.CLK = !_tcpConnection.IsConnected;
  288. if (_trigRetryConnect.Q)
  289. {
  290. Address = SC.GetStringValue($"LoadPort.{Name}.Address");
  291. _tcpConnection = new HirataIILoadPortTCPConnection(this, Address);
  292. _tcpConnection.EnableLog(_enableLog);
  293. if (!_tcpConnection.Connect())
  294. {
  295. EV.PostAlarmLog(Module, $"Can not connect with {_tcpConnection.Address}, {Module}.{Name}");
  296. }
  297. }
  298. return true;
  299. }
  300. //_trigActionDone.CLK = (_lstHandler.Count == 0 && !_tcpConnection.IsBusy);
  301. //if (_trigActionDone.Q)
  302. // OnActionDone(null);
  303. HandlerBase handler = null;
  304. if (!_tcpConnection.IsBusy)
  305. {
  306. lock (_locker)
  307. {
  308. if (_lstHandler.Count == 0)
  309. {
  310. }
  311. if (_lstHandler.Count > 0)
  312. {
  313. handler = _lstHandler.First.Value;
  314. if (handler != null) _tcpConnection.Execute(handler);
  315. _lstHandler.RemoveFirst();
  316. }
  317. }
  318. }
  319. }
  320. else
  321. {
  322. _connection.MonitorTimeout();
  323. if (!_connection.IsConnected || _connection.IsCommunicationError)
  324. {
  325. lock (_locker)
  326. {
  327. _lstHandler.Clear();
  328. }
  329. _trigRetryConnect.CLK = !_connection.IsConnected;
  330. if (_trigRetryConnect.Q)
  331. {
  332. _connection.SetPortAddress(SC.GetStringValue($"{Name}.Address"));
  333. if (!_connection.Connect())
  334. {
  335. EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}");
  336. }
  337. }
  338. return true;
  339. }
  340. //_trigActionDone.CLK = (_lstHandler.Count == 0 && !_connection.IsBusy);
  341. //if (_trigActionDone.Q)
  342. // OnActionDone(null);
  343. HandlerBase handler = null;
  344. if (!_connection.IsBusy)
  345. {
  346. lock (_locker)
  347. {
  348. if (_lstHandler.Count == 0)
  349. {
  350. }
  351. if (_lstHandler.Count > 0)
  352. {
  353. handler = _lstHandler.First.Value;
  354. if (handler != null) _connection.Execute(handler);
  355. _lstHandler.RemoveFirst();
  356. }
  357. }
  358. }
  359. }
  360. if (_infoPadType == 1) //Extenal
  361. {
  362. InfoPadSensorIndex = (_diInfoPadA == null || !_diInfoPadA.Value ? 0 : 1) +
  363. (_diInfoPadB == null || !_diInfoPadB.Value ? 0 : 2) +
  364. (_diInfoPadC == null || !_diInfoPadC.Value ? 0 : 4) +
  365. (_diInfoPadD == null || !_diInfoPadD.Value ? 0 : 8);
  366. }
  367. if (_infoPadType == 2) //Fixed by SC
  368. {
  369. if (SC.ContainsItem($"LoadPort.{Name}.CarrierIndex"))
  370. {
  371. InfoPadSensorIndex = SC.GetValue<int>($"LoadPort.{Name}.CarrierIndex");
  372. }
  373. else
  374. InfoPadSensorIndex = 0;
  375. }
  376. if (IsAutoDetectCarrierType)
  377. {
  378. if (InfoPadCarrierIndex != InfoPadSensorIndex)
  379. {
  380. InfoPadCarrierIndex = InfoPadSensorIndex;
  381. SetCarrierType();
  382. }
  383. }
  384. }
  385. catch (Exception ex)
  386. {
  387. LOG.Write(ex);
  388. }
  389. return true;
  390. }
  391. private int recipeNo
  392. {
  393. get
  394. {
  395. if (SC.ContainsItem($"CarrierInfo.CarrierRecipeNumber{InfoPadCarrierIndex}"))
  396. return SC.GetValue<int>($"CarrierInfo.CarrierRecipeNumber{InfoPadCarrierIndex}");
  397. if (SC.ContainsItem($"CarrierInfo.Carrier{InfoPadCarrierIndex}.LPRecipeNumber"))
  398. return SC.GetValue<int>($"CarrierInfo.Carrier{InfoPadCarrierIndex}.LPRecipeNumber");
  399. return 0;
  400. }
  401. }
  402. private void SetCarrierType()
  403. {
  404. if (_isNeedSetType)
  405. {
  406. if (recipeNo > 5 || recipeNo < 1)
  407. {
  408. EV.PostAlarmLog(Name, $"Carrier is configured on invalid recipe no:{recipeNo},can't load.");
  409. return;
  410. }
  411. lock (_locker)
  412. {
  413. _lstHandler.AddLast(new HirataIISetHandler(this, "TYPE", recipeNo.ToString()));
  414. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  415. _lstHandler.AddLast(new HirataIIGetHandler(this, "LPIOI", null));
  416. }
  417. }
  418. }
  419. public override void Monitor()
  420. {
  421. base.Monitor();
  422. }
  423. private R_TRIG _trigActionDone = new R_TRIG();
  424. private string _scRoot;
  425. private bool _isTcpConnection;
  426. private HirataIILoadPortConnection _connection;
  427. private HirataIILoadPortTCPConnection _tcpConnection;
  428. private IoTrigger _doLoadPortOK;
  429. private IoSensor _diInfoPadA = null;
  430. private IoSensor _diInfoPadB = null;
  431. private IoSensor _diInfoPadC = null;
  432. private IoSensor _diInfoPadD = null;
  433. private IoSensor _diWaferProtrude = null;
  434. //InfoPadType,0=OnLP,1=Ext,2=FixedbySC
  435. private IoSensor _diIronCassetteDoorClose;
  436. public IoSensor DiIronCassetteDoorClose
  437. {
  438. get => _diIronCassetteDoorClose;
  439. set
  440. {
  441. _diIronCassetteDoorClose = value;
  442. _diIronCassetteDoorClose.OnSignalChanged += _diIronCassetteDoorClose_OnSignalChanged;
  443. }
  444. }
  445. private void _diIronCassetteDoorClose_OnSignalChanged(IoSensor arg1, bool arg2)
  446. {
  447. if (!IsPlacement || !IsMapped) return;
  448. if (arg2) return;
  449. if (_diIronCassetteDoorClose.Value) return;
  450. if (!IsReady()) return;
  451. Unclamp(out _);
  452. }
  453. private int _infoPadType
  454. {
  455. get
  456. {
  457. return SC.ContainsItem($"LoadPort.{Name}.InfoPadType") ? SC.GetValue<int>($"LoadPort.{Name}.InfoPadType") : 2;
  458. }
  459. }
  460. public override int ValidSlotsNumber
  461. {
  462. get
  463. {
  464. if (SC.ContainsItem($"CarrierInfo.CarrierSlotsNumber{InfoPadCarrierIndex}"))
  465. return SC.GetValue<int>($"CarrierInfo.CarrierSlotsNumber{InfoPadCarrierIndex}");
  466. return base.ValidSlotsNumber;
  467. }
  468. }
  469. public HirataIILoadPortConnection Connection
  470. {
  471. get => _connection;
  472. }
  473. public HirataIILoadPortTCPConnection TCPConnection => _tcpConnection;
  474. private PeriodicJob _thread;
  475. private static Object _locker = new Object();
  476. private LinkedList<HandlerBase> _lstHandler = new LinkedList<HandlerBase>();
  477. private bool _enableLog = true;
  478. //private bool _commErr = false;
  479. private R_TRIG _trigError = new R_TRIG();
  480. private R_TRIG _trigWarningMessage = new R_TRIG();
  481. private R_TRIG _trigCommunicationError = new R_TRIG();
  482. private R_TRIG _trigRetryConnect = new R_TRIG();
  483. public TDKSystemStatus SystemStatus { get; set; }
  484. public TDKMode Mode { get; set; }
  485. public TDKInitPosMovement InitPosMovement { get; set; }
  486. public TDKOperationStatus OperationStatus { get; set; }
  487. public TDKContainerStatus ContainerStatus { get; set; }
  488. public TDKPosition ClampPosition { get; set; }
  489. public TDKPosition LPDoorLatchPosition { get; set; }
  490. public TDKVacummStatus VacuumStatus { get; set; }
  491. public TDKPosition LPDoorState { get; set; }
  492. public TDKWaferProtrusion WaferProtrusion { get; set; }
  493. public TDKElevatorAxisPosition ElevatorAxisPosition { get; set; }
  494. public TDKDockPosition DockPosition { get; set; }
  495. public TDKMapPosition MapperPostion { get; set; }
  496. public TDKMappingStatus MappingStatus { get; set; }
  497. public TDKModel Model { get; set; }
  498. public string Address { get; set; }
  499. public bool IsConnected => this.Connect();// _connection.IsConnected;
  500. private DateTime _dtStartAction;
  501. public bool Disconnect()
  502. {
  503. if (_isTcpConnection)
  504. return _tcpConnection.Disconnect();
  505. return _connection.Disconnect();
  506. }
  507. public void OnCarrierNotPlaced()
  508. {
  509. _isPlaced = false;
  510. ConfirmRemoveCarrier();
  511. }
  512. public void OnCarrierNotPresent()
  513. {
  514. _isPresent = false;
  515. //ConfirmRemoveCarrier();
  516. }
  517. public void OnCarrierPlaced()
  518. {
  519. _isPlaced = true;
  520. ConfirmAddCarrier();
  521. }
  522. public void OnCarrierPresent()
  523. {
  524. _isPresent = true;
  525. //ConfirmAddCarrier();
  526. }
  527. public void OnSwitchKey1()
  528. {
  529. _isAccessSwPressed = true;
  530. }
  531. public void OnSwitchKey2()
  532. {
  533. }
  534. public void OffSwitchKey1()
  535. {
  536. _isAccessSwPressed = false;
  537. }
  538. public void OffSwitchKey2()
  539. {
  540. }
  541. public bool OnEvent(out string reason)
  542. {
  543. reason = string.Empty;
  544. lock (_locker)
  545. {
  546. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  547. //_lstHandler.AddLast(new HirataIIGetHandler(this, "FSBxx", null));
  548. _lstHandler.AddLast(new HirataIIGetHandler(this, "LEDST", null));
  549. _lstHandler.AddLast(new HirataIIGetHandler(this, "LPIOI", null));
  550. }
  551. return true;
  552. }
  553. private LoadportCassetteState _cassetteState = LoadportCassetteState.None;
  554. public override LoadportCassetteState CassetteState
  555. {
  556. get { return _cassetteState; }
  557. set
  558. {
  559. _cassetteState = value;
  560. }
  561. }
  562. public void SetCassetteState(LoadportCassetteState state)
  563. {
  564. _cassetteState = state;
  565. if (state == LoadportCassetteState.Normal)
  566. {
  567. OnCarrierPresent();
  568. OnCarrierPlaced();
  569. }
  570. if (state == LoadportCassetteState.Absent)
  571. {
  572. OnCarrierNotPlaced();
  573. OnCarrierNotPresent();
  574. }
  575. }
  576. protected override bool fStartWrite(object[] param)
  577. {
  578. return false;
  579. }
  580. protected override bool fStartRead(object[] param)
  581. {
  582. switch(param[0].ToString())
  583. {
  584. case "CarrierID":
  585. lock (_locker)
  586. {
  587. _lstHandler.AddLast(new HirataIIMoveToReadCarrierIDHandler(this));
  588. _lstHandler.AddLast(new HirataIIMoveHandler(this, "FCOTB", null));
  589. }
  590. return true;
  591. }
  592. _dtStartAction = DateTime.Now;
  593. return false;
  594. }
  595. protected override bool fMonitorReadingData(object[] param)
  596. {
  597. IsBusy = false;
  598. if(DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitAction))
  599. {
  600. OnError("ReadTimeout");
  601. return true;
  602. }
  603. switch (CurrentParamter[0].ToString())
  604. {
  605. case "CarrierID":
  606. if(_isTcpConnection)
  607. {
  608. if (_lstHandler.Count == 0 && !_tcpConnection.IsBusy)
  609. {
  610. if(CurrentReader.IsReady)
  611. {
  612. base.OnCarrierIdRead(CurrentReader.CarrierIDBeRead);
  613. return true;
  614. }
  615. if(CurrentReader.DeviceState == CIDReaderStateEnum.Error)
  616. {
  617. return true;
  618. }
  619. }
  620. }
  621. else
  622. {
  623. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  624. {
  625. if (CurrentReader.IsReady)
  626. {
  627. base.OnCarrierIdRead(CurrentReader.CarrierIDBeRead);
  628. return true;
  629. }
  630. if (CurrentReader.DeviceState == CIDReaderStateEnum.Error)
  631. {
  632. return true;
  633. }
  634. }
  635. }
  636. return false;
  637. }
  638. return base.fMonitorReadingData(param);
  639. }
  640. public override void OnCarrierIdRead(string carrierId, int readerIndex = 1, int startPage = 1, int length = 16, bool updateCarrierID = true)
  641. {
  642. if (_needMoveBaseToReadCarrierID) return;
  643. base.OnCarrierIdRead(carrierId, readerIndex, startPage, length, updateCarrierID);
  644. }
  645. protected override bool fStartExecute(object[] param)
  646. {
  647. _dtStartAction = DateTime.Now;
  648. try
  649. {
  650. switch(param[0].ToString())
  651. {
  652. case "Move":
  653. lock (_locker)
  654. {
  655. _lstHandler.AddLast(new HirataIIMoveHandler(this, param[1].ToString(), null));
  656. }
  657. break;
  658. case "Set":
  659. lock (_locker)
  660. {
  661. _lstHandler.AddLast(new HirataIISetHandler(this, param[1].ToString(), null));
  662. }
  663. break;
  664. case "Get":
  665. lock (_locker)
  666. {
  667. _lstHandler.AddLast(new HirataIIGetHandler(this, param[1].ToString(), null));
  668. }
  669. break;
  670. case "SetIndicator":
  671. Indicator light = (Indicator)param[1];
  672. IndicatorState state = (IndicatorState)param[2];
  673. string[] statestr = new string[] {"","LP","BL","LO" }; //{ "","LON", "LBL", "LOF" };
  674. string strLight = "";
  675. if (light == Indicator.LOAD)
  676. strLight = "LOD";
  677. if (light == Indicator.UNLOAD)
  678. strLight = "ULD";
  679. if (light == Indicator.ACCESSMANUL)
  680. strLight = "ST2";
  681. if (light == Indicator.ACCESSAUTO)
  682. strLight = "ST3";
  683. if (string.IsNullOrEmpty(strLight))
  684. return false;
  685. lock (_locker)
  686. {
  687. _lstHandler.AddLast(new HirataIISetHandler(this, statestr[(int)state], strLight));
  688. _lstHandler.AddLast(new HirataIIGetHandler(this, "LEDST", null));
  689. }
  690. break;
  691. case "QueryIndicator":
  692. lock (_locker)
  693. {
  694. _lstHandler.AddLast(new HirataIIGetHandler(this, "LEDST", null));
  695. }
  696. break;
  697. case "QueryState":
  698. lock (_locker)
  699. {
  700. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  701. }
  702. break;
  703. case "Undock":
  704. lock (_locker)
  705. {
  706. _lstHandler.AddLast(new HirataIIMoveHandler(this, "YWAIT", null));
  707. }
  708. break;
  709. case "Dock":
  710. lock (_locker)
  711. {
  712. _lstHandler.AddLast(new HirataIIMoveHandler(this, "YDOOR", null));
  713. }
  714. break;
  715. case "CloseDoor":
  716. lock (_locker)
  717. {
  718. _lstHandler.AddLast(new HirataIIMoveHandler(this, "DORFW", null));
  719. }
  720. break;
  721. case "OpenDoor":
  722. lock (_locker)
  723. {
  724. _lstHandler.AddLast(new HirataIIMoveHandler(this, "DORBK", null));
  725. }
  726. break;
  727. case "Unclamp":
  728. lock (_locker)
  729. {
  730. _lstHandler.AddLast(new HirataIIMoveHandler(this, "PODOP", null));
  731. }
  732. break;
  733. case "Clamp":
  734. lock (_locker)
  735. {
  736. _lstHandler.AddLast(new HirataIIMoveHandler(this, "PODCL", null));
  737. }
  738. break;
  739. case "DoorUp":
  740. lock (_locker)
  741. {
  742. _lstHandler.AddLast(new HirataIIMoveHandler(this, "ZDRUP", null));
  743. }
  744. break;
  745. case "DoorDown":
  746. lock (_locker)
  747. {
  748. _lstHandler.AddLast(new HirataIIMoveHandler(this, "ZDRDW", null));
  749. }
  750. break;
  751. case "OpenDoorNoMap":
  752. lock (_locker)
  753. {
  754. //_lstHandler.AddLast(new TDKMoveHandler(this, "YDOOR", null));
  755. }
  756. break;
  757. case "OpenDoorAndMap":
  758. lock (_locker)
  759. {
  760. //_lstHandler.AddLast(new TDKMoveHandler(this, "YDOOR", null));
  761. }
  762. break;
  763. case "MapWafer":
  764. lock(_locker)
  765. {
  766. if(DockPosition != TDKDockPosition.Dock)
  767. _lstHandler.AddLast(new HirataIIMoveHandler(this, "YDOOR", null));
  768. if(DoorState != FoupDoorState.Open)
  769. _lstHandler.AddLast(new HirataIIMoveHandler(this, "DORBK", null));
  770. _lstHandler.AddLast(new HirataIIMoveHandler(this, "MAPDO", null));
  771. _lstHandler.AddLast(new HirataIIGetHandler(this, "MAPRD", null));
  772. }
  773. break;
  774. case "ReadCarrierID":
  775. lock(_locker)
  776. {
  777. _lstHandler.AddLast(new HirataIIMoveToReadCarrierIDHandler(this));
  778. }
  779. break;
  780. }
  781. return true;
  782. }
  783. catch(Exception ex)
  784. {
  785. LOG.Write(ex);
  786. EV.PostAlarmLog(Name, $"Parameter invalid");
  787. return false;
  788. }
  789. }
  790. protected override bool fMonitorExecuting(object[] param)
  791. {
  792. IsBusy = false;
  793. if (DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitAction))
  794. {
  795. string command = CurrentParamter[0].ToString();
  796. OnError(command);
  797. return true;
  798. }
  799. if (_isTcpConnection)
  800. {
  801. if (_lstHandler.Count == 0 && !_tcpConnection.IsBusy)
  802. {
  803. return true;
  804. }
  805. }
  806. else
  807. {
  808. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  809. {
  810. return true;
  811. }
  812. }
  813. return base.fMonitorExecuting(param);
  814. }
  815. protected override bool fStartUnload(object[] param)
  816. {
  817. _dtStartAction = DateTime.Now;
  818. if (!_isPlaced)
  819. {
  820. EV.PostAlarmLog(Name, $"No carrier on {Name},can't unload.");
  821. return false;
  822. }
  823. if (!_isDocked)
  824. {
  825. EV.PostAlarmLog(Name, $"Carrier is not docked on {Name},can't unload.");
  826. return false;
  827. }
  828. if (IsNeedMapOnUnload)
  829. {
  830. _lstHandler.AddLast(new HirataIIMoveHandler(this, "CUDMP", null));
  831. _lstHandler.AddLast(new HirataIIGetHandler(this, "MAPRD", null));
  832. }
  833. else
  834. _lstHandler.AddLast(new HirataIIMoveHandler(this, "CULOD", null));
  835. if(IsKeepClampAfterUnload)
  836. _lstHandler.AddLast(new HirataIIMoveHandler(this, "PODCL", null));
  837. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  838. return true;
  839. }
  840. protected override bool fMonitorUnload(object[] param)
  841. {
  842. IsBusy = false;
  843. if (DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitAction))
  844. {
  845. OnError("UnloadTimeout");
  846. return true;
  847. }
  848. if (_isTcpConnection)
  849. {
  850. if (_lstHandler.Count == 0 && !_tcpConnection.IsBusy)
  851. {
  852. OnUnloaded();
  853. return true;
  854. }
  855. }
  856. else
  857. {
  858. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  859. {
  860. OnUnloaded();
  861. return true;
  862. }
  863. }
  864. return base.fMonitorUnload(param);
  865. }
  866. private bool _isNeedSetType
  867. {
  868. get
  869. {
  870. if (SC.ContainsItem($"LoadPort.{Name}.NeedSetType"))
  871. return SC.GetValue<bool>($"LoadPort.{Name}.NeedSetType");
  872. return false;
  873. }
  874. }
  875. protected override bool fStartLoad(object[] param)
  876. {
  877. _dtStartAction = DateTime.Now;
  878. if(!_isPlaced)
  879. {
  880. EV.PostAlarmLog(Name, $"No carrier on {Name},can't load.");
  881. return false;
  882. }
  883. if (_isDocked)
  884. {
  885. EV.PostAlarmLog(Name, $"Carrier is docked on {Name},can't load.");
  886. return false;
  887. }
  888. if (_isNeedSetType)
  889. {
  890. if(recipeNo >5 || recipeNo < 1 )
  891. {
  892. EV.PostAlarmLog(Name, $"Carrier is configured on invalid recipe no:{recipeNo},can't load.");
  893. return false;
  894. }
  895. lock (_locker)
  896. {
  897. _lstHandler.AddLast(new HirataIISetHandler(this, "TYPE", recipeNo.ToString()));
  898. }
  899. }
  900. lock (_locker)
  901. {
  902. if (IsMapWaferByLoadPort)
  903. {
  904. _lstHandler.AddLast(new HirataIIMoveHandler(this, "CLDMP", null));
  905. _lstHandler.AddLast(new HirataIIGetHandler(this, "MAPRD", null));
  906. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  907. }
  908. else
  909. {
  910. _lstHandler.AddLast(new HirataIIMoveHandler(this, "CLOAD", null));
  911. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  912. }
  913. }
  914. return true;
  915. }
  916. protected override bool fMonitorLoad(object[] param)
  917. {
  918. IsBusy = false;
  919. if (DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitAction))
  920. {
  921. OnError("LoadTimeout");
  922. return true;
  923. }
  924. if (_isTcpConnection)
  925. {
  926. if (_lstHandler.Count == 0 && !_tcpConnection.IsBusy)
  927. {
  928. OnLoaded();
  929. return true;
  930. }
  931. }
  932. else
  933. {
  934. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  935. {
  936. OnLoaded();
  937. return true;
  938. }
  939. }
  940. return base.fMonitorLoad(param);
  941. }
  942. protected override bool fStartInit(object[] param)
  943. {
  944. _dtStartAction = DateTime.Now;
  945. lock (_locker)
  946. {
  947. if(param.Length >=1 && param[0].ToString() == "ForceHome")
  948. _lstHandler.AddLast(new HirataIIMoveHandler(this, "ABORG", null));
  949. else
  950. _lstHandler.AddLast(new HirataIIMoveHandler(this, "ORGSH", null));
  951. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  952. //_lstHandler.AddLast(new HirataIIGetHandler(this, "FSBxx", null));
  953. _lstHandler.AddLast(new HirataIIGetHandler(this, "LEDST", null));
  954. _lstHandler.AddLast(new HirataIIGetHandler(this, "LPIOI", null));
  955. }
  956. return true;
  957. }
  958. protected override bool fMonitorInit(object[] param)
  959. {
  960. IsBusy = false;
  961. if (DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitAction))
  962. {
  963. OnError("InitTimeout");
  964. return true;
  965. }
  966. if (_isTcpConnection)
  967. {
  968. if (_lstHandler.Count == 0 && !_tcpConnection.IsBusy)
  969. {
  970. OnHomed();
  971. return true;
  972. }
  973. }
  974. else
  975. {
  976. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  977. {
  978. OnHomed();
  979. return true;
  980. }
  981. }
  982. return base.fMonitorInit(param);
  983. }
  984. public override bool SetIndicator(Indicator light, IndicatorState state, out string reason)
  985. {
  986. reason = "";
  987. return fStartExecute(new object[] { "SetIndicator", light, state });
  988. }
  989. protected override bool fStartReset(object[] param)
  990. {
  991. _dtStartAction = DateTime.Now;
  992. _lstHandler.Clear();
  993. if (_isTcpConnection)
  994. {
  995. if (!_tcpConnection.IsConnected)
  996. _tcpConnection.Connect();
  997. _tcpConnection.ForceClear();
  998. }
  999. else
  1000. {
  1001. if (!_connection.IsConnected)
  1002. _connection.Connect();
  1003. _connection.ForceClear();
  1004. }
  1005. lock (_locker)
  1006. {
  1007. _lstHandler.AddLast(new HirataIISetHandler(this, "RESET", null));
  1008. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  1009. //_lstHandler.AddLast(new HirataIIGetHandler(this, "FSBxx", null));
  1010. _lstHandler.AddLast(new HirataIIGetHandler(this, "LEDST", null));
  1011. _lstHandler.AddLast(new HirataIIGetHandler(this, "LPIOI", null));
  1012. }
  1013. return true;
  1014. }
  1015. protected override bool fMonitorReset(object[] param)
  1016. {
  1017. IsBusy = false;
  1018. if (DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitAction))
  1019. {
  1020. OnError("Reset");
  1021. return true;
  1022. }
  1023. if (_isTcpConnection)
  1024. {
  1025. if (_lstHandler.Count == 0 && !_tcpConnection.IsBusy)
  1026. {
  1027. return true;
  1028. }
  1029. }
  1030. else
  1031. {
  1032. if (_lstHandler.Count == 0 && !_connection.IsBusy)
  1033. {
  1034. return true;
  1035. }
  1036. }
  1037. return base.fMonitorReset(param);
  1038. }
  1039. public override void OnError(string error = "")
  1040. {
  1041. lock (_locker)
  1042. {
  1043. _lstHandler.Clear();
  1044. if(_isTcpConnection)
  1045. _tcpConnection.ForceClear();
  1046. else
  1047. _connection.ForceClear();
  1048. _lstHandler.AddLast(new HirataIIGetHandler(this, "STATE", null));
  1049. // _lstHandler.AddLast(new HirataIIGetHandler(this, "FSBxx", null));
  1050. _lstHandler.AddLast(new HirataIIGetHandler(this, "LEDST", null));
  1051. _lstHandler.AddLast(new HirataIIGetHandler(this, "LPIOI", null));
  1052. }
  1053. base.OnError(error);
  1054. }
  1055. public override bool IsReadyForE84Transfer
  1056. {
  1057. get
  1058. {
  1059. if (_isTcpConnection)
  1060. {
  1061. if (_lstHandler.Count != 0 || _tcpConnection.IsBusy)
  1062. {
  1063. return false;
  1064. }
  1065. }
  1066. else
  1067. {
  1068. if (_lstHandler.Count != 0 || _connection.IsBusy)
  1069. {
  1070. return false;
  1071. }
  1072. }
  1073. return base.IsReadyForE84Transfer;
  1074. }
  1075. }
  1076. public override WaferSize GetCurrentWaferSize()
  1077. {
  1078. int intwz=12;
  1079. if(SC.ContainsItem($"CarrierInfo.CarrierWaferSize{InfoPadCarrierIndex}"))
  1080. intwz = SC.GetValue<int>($"CarrierInfo.CarrierWaferSize{InfoPadCarrierIndex}");
  1081. if(SC.ContainsItem($"CarrierInfo.Carrier{InfoPadCarrierIndex}.CarrierWaferSize"))
  1082. intwz = SC.GetValue<int>($"CarrierInfo.Carrier{InfoPadCarrierIndex}.CarrierWaferSize");
  1083. switch (intwz)
  1084. {
  1085. case 0:
  1086. return WaferSize.WS0;
  1087. case 1:
  1088. return WaferSize.WS0;
  1089. case 2:
  1090. return WaferSize.WS2;
  1091. case 3:
  1092. return WaferSize.WS3;
  1093. case 4:
  1094. return WaferSize.WS4;
  1095. case 5:
  1096. return WaferSize.WS5;
  1097. case 6:
  1098. return WaferSize.WS6;
  1099. case 7:
  1100. case 8:
  1101. return WaferSize.WS8;
  1102. case 12:
  1103. return WaferSize.WS12;
  1104. default:
  1105. return WaferSize.WS0;
  1106. }
  1107. }
  1108. public void ParseLPIO(string strData)
  1109. {
  1110. string data = strData.Replace("LPIOI/", "");
  1111. string infoStr = data.Substring(1, 1);
  1112. if (_infoPadType == 0) // Internal
  1113. InfoPadSensorIndex = Convert.ToInt32(infoStr, 16);
  1114. }
  1115. public override void OnSlotMapRead(string _slotMap)
  1116. {
  1117. if (IsVerifyPreDefineWaferCount && CurrentState != LoadPortStateEnum.Unloading)
  1118. {
  1119. int wcount = 0;
  1120. foreach (var ch in _slotMap)
  1121. {
  1122. if (ch != '0')
  1123. {
  1124. wcount++;
  1125. }
  1126. }
  1127. WaferCount = wcount;
  1128. if (WaferCount != PreDefineWaferCount)
  1129. {
  1130. EV.PostAlarmLog("LoadPort", $"{LPModuleName} mapping error,predefine count is {PreDefineWaferCount}, " +
  1131. $"Mapping result is {WaferCount}.");
  1132. OnError("Mapping Error");
  1133. }
  1134. }
  1135. base.OnSlotMapRead(_slotMap);
  1136. }
  1137. }
  1138. public enum TDKSystemStatus
  1139. {
  1140. Normal = 0x30,
  1141. RecoverableError = 0x41,
  1142. UnrecoverableError = 0x45,
  1143. }
  1144. public enum TDKMode
  1145. {
  1146. Online = 0x30,
  1147. Teaching = 0x31,
  1148. Maintenance = 0x32,
  1149. }
  1150. public enum TDKInitPosMovement
  1151. {
  1152. OperationStatus = 0x30,
  1153. HomePosStatus = 0x31,
  1154. LoadStatus = 0x32,
  1155. }
  1156. public enum TDKOperationStatus
  1157. {
  1158. DuringStop = 0x30,
  1159. DuringOperation = 0x31,
  1160. }
  1161. public enum TDKContainerStatus
  1162. {
  1163. Absence = 0x30,
  1164. NormalMount = 0x31,
  1165. MountError = 0x32,
  1166. }
  1167. public enum TDKPosition
  1168. {
  1169. Open = 0x30,
  1170. Close = 0x31,
  1171. TBD = 0x3F
  1172. }
  1173. public enum TDKVacummStatus
  1174. {
  1175. OFF = 0x30,
  1176. ON = 0x31,
  1177. }
  1178. public enum TDKWaferProtrusion
  1179. {
  1180. ShadingStatus = 0x30,
  1181. LightIncidentStatus = 0x31,
  1182. }
  1183. public enum TDKElevatorAxisPosition
  1184. {
  1185. UP = 0x30,
  1186. Down = 0x31,
  1187. MappingStartPos = 0x32,
  1188. MappingEndPos = 0x33,
  1189. TBD = 0x3F,
  1190. }
  1191. public enum TDKDockPosition
  1192. {
  1193. Undock = 0x30,
  1194. Dock = 0x31,
  1195. TBD = 0x3F,
  1196. }
  1197. public enum TDKMapPosition
  1198. {
  1199. MeasurementPos = 0x30,
  1200. WaitingPost = 0x31,
  1201. TBD = 0x3F,
  1202. }
  1203. public enum TDKMappingStatus
  1204. {
  1205. NotPerformed = 0x30,
  1206. NormalEnd = 0x31,
  1207. ErrorStop = 0x32,
  1208. }
  1209. public enum TDKModel
  1210. {
  1211. Type1 = 0x30,
  1212. Type2 = 0x31,
  1213. Type3 = 0x32,
  1214. Type4 = 0x33,
  1215. Type5 = 0x34,
  1216. }
  1217. }